JP7412794B2 - Fluorescent X-ray analyzer - Google Patents

Description

The present invention relates to an X-ray fluorescence analyzer that analyzes a sample by detecting fluorescent X-rays generated from the sample by irradiation with X-rays.

Traditionally, specific elements contained in a sample have been analyzed by detecting fluorescent X-rays generated from the sample by irradiation with X-rays, and in particular, total internal reflection fluorescent X-rays enable highly sensitive analysis. An analytical method (TXRF) is known.

The apparatus used for this total internal reflection X-ray fluorescence analysis (TXRF) generally includes a sample holding substrate on which a sample is held, an X-ray irradiation unit that irradiates the sample held on the sample holding substrate with primary X-rays, It includes a detection section that detects fluorescent X-rays generated from a sample when irradiated with X-rays, and an analysis section that analyzes the sample based on the fluorescent X-rays detected by the detection section. In total internal reflection X-ray fluorescence spectrometry (TXRF), primary X-rays are reflected at a very shallow glancing angle (less than 0.1 degree) from the sample holding plate, and are directly above the sample on the sample holding plate. Fluorescent X-rays generated from the sample are detected by the arranged detector (see, for example, Patent Document 1).

According to this, the detection intensity of fluorescent X-rays is increased compared to a general fluorescent X-ray analysis method. Furthermore, since the primary X-rays are totally reflected, the penetration depth into the sample is as shallow as several nm, and scattering of the primary X-rays can also be suppressed. In other words, the intensity of fluorescent X-rays from the sample increases and the background intensity decreases, so total internal reflection fluorescence X-ray spectrometry (TXRF) improves the detection limit of elements, and for example, detects trace amounts such as hair. Suitable for sample analysis.

By the way, during conventional fluorescent X-ray analysis, the intensity of the fluorescent X-rays generated from the sample changes depending on the thickness, length, number, or amount of the sample, due to individual differences in the thickness of samples such as hair. . For this reason, it is necessary to normalize the intensity of fluorescent X-rays generated from the sample by the amount of the sample, and for example, the amount of the sample may be directly measured using a microelectronic balance.

Japanese Patent Application Publication No. 2005-128013

However, although it is an effective method to directly measure the amount of a sample using a microelectronic balance, the number of personnel and situations where microelectronic balances can be applied is limited, microelectronic balances are expensive, and there are restrictions on installation locations. There was also. Therefore, in reality, it is not easy to normalize the intensity of fluorescent X-rays generated from a sample by the amount of the sample, and there has been a problem in that the sample cannot be analyzed with high accuracy.

The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a sample fluorescence X-ray analyzer that can analyze a sample with high accuracy.

In order to achieve the above object, the present invention includes a sample holding part in which a sample is held, an X-ray irradiation part that irradiates the sample held in the sample holding part with primary X-rays, and a primary An X-ray fluorescence analyzer comprising: a detection unit that detects fluorescent X-rays generated from a sample when irradiated; and an analysis unit that analyzes the sample based on the fluorescent X-rays detected by the detection unit, The analysis section includes an element measurement section that measures a numerical value proportional to the amount of a predetermined element contained in the sample held in the sample holding section based on the fluorescent X-rays detected by the detection section; a sample measurement section that measures a numerical value proportional to the amount of the sample held by the holding section; and a sample measurement section that measures a numerical value proportional to the amount of a predetermined element contained in the sample measured by the element measurement section. and a correction section that performs correction by normalizing with a numerical value proportional to the amount of the sample.

According to this, by correcting a value proportional to the amount of a given element contained in the sample by normalizing it with a value proportional to the amount of the sample, the degree of the amount of the given element per unit amount of the sample can be determined. can be calculated, so the sample can be analyzed with high accuracy regardless of the thickness, length, number, or volume of the sample.

Further, it includes an imaging unit that images a predetermined area including the sample held in the sample holding unit,
The sample measurement unit calculates the ratio of the area of the image occupied by the sample to the area of the image of the predetermined area based on the image of the predetermined area captured by the imaging unit, thereby determining the proportion of the area proportional to the amount of the sample. You can also measure numerical values. According to this method, since a numerical value proportional to the amount of the sample is measured by imaging a predetermined region including the sample, it is possible to easily calculate the amount of the predetermined element per unit amount of the sample. In particular, when a mobile terminal such as a smartphone is used as the imaging unit, the present X-ray fluorescence analyzer can be downsized and costs can be reduced.

The sample measurement unit also includes a light source unit that irradiates the sample held in the sample holding unit with a light beam, and a second detection unit that detects the light beam that has passed through the sample, and the sample measurement unit is configured to transfer the light beam from the light source unit to the sample. A numerical value proportional to the amount of the sample held in the sample holding section may be measured based on the intensity of the light beam irradiated to the sample and the intensity of the light beam transmitted through the sample. According to this method, a numerical value proportional to the amount of the sample is measured by the intensity of the light beam irradiated onto the sample and the intensity of the light beam transmitted through the sample, so it is easy to determine the amount of a given element per unit amount of the sample. It can be calculated. In particular, compared to the case where the amount of the sample is directly measured using a microelectronic balance or the like, the present fluorescent X-ray analyzer can be made smaller and the cost can be reduced.

Further, the sample holding section may include a capillary tube formed in an elongated tubular shape, and the sample may be held inside the capillary tube. According to this method, since the sample is held inside the capillary tube formed in a long and thin tube shape in the sample holding section, fibrous samples such as hair, liquid samples such as saliva and blood, and trace amounts of samples can be sampled. It can be stably placed in the holding section, and the sample can be analyzed with high precision by fluorescent X-ray analysis.

Further, the sample holding section includes a flexible storage bag, and after the sample is stored inside the storage bag, the storage bag is rolled up together with the sample to hold the sample. good. According to this method, after the sample is stored inside the storage bag, the storage bag is rolled up with the sample. The sample can be easily and stably placed in the sample holder.

Further, the sample holding unit includes a flexible storage bag, and after the sample is stored in the inner lower part of the storage bag, the upper and middle parts other than the lower part where the sample is stored are rolled up. The sample may be held by holding the sample. According to this, after the sample is stored in the lower part of the inside of the storage bag, the upper part and middle part other than the lower part where the sample was stored are rolled up, so that fibrous specimens such as hair, saliva, etc. A liquid sample such as blood or a small amount of sample can be easily and stably placed in the sample holding section.

Further, the fluorescent X-ray analysis method according to the present invention includes: a sample holding section in which a sample is held; an X-ray irradiation section that irradiates the sample held in the sample holding section with primary X-rays; A fluorescent X-ray analyzer is used to analyze fluorescence In the radiation analysis method, the analysis section measures a numerical value proportional to the amount of a predetermined element contained in the sample held in the sample holding section, based on the fluorescent X-rays detected by the detection section. a step of measuring a numerical value proportional to the amount of the sample held by the sample holding section; and a step of measuring a numerical value proportional to the amount of a predetermined element contained in the sample measured by the element measuring section; and a step of correcting by normalizing with a numerical value proportional to the amount of the sample measured by the part.

According to the present invention, the amount of the predetermined element per unit amount of the sample is corrected by normalizing the value proportional to the amount of the predetermined element contained in the sample by the value proportional to the amount of the sample. Since the degree can be calculated, the sample can be analyzed with high accuracy regardless of the thickness, length, number, or amount of the sample.

Therefore, health science uses blood, saliva, urine, sweat, etc., environmental analysis uses river water, atmospheric particles, manufacturing process control uses drinking water, plating baths, cleaning water, nanomaterials, etc., and water quality safety assessment uses drinking water, tap water, etc. This device can analyze water, well water, etc., and can be used in a variety of industrial fields.

1 is a schematic configuration diagram showing a fluorescent X-ray analyzer according to a first embodiment of the present invention. FIG. 2 is a block diagram showing the electrical configuration of an analysis section, a detection section, and an imaging section in FIG. 1. FIG. FIG. 2 is a perspective view showing the capillary tube of FIG. 1; FIG. 2 is a diagram showing an example of the intensity of fluorescent X-rays of elements contained in a sample. It is a figure which shows the image of a sample before image processing (left side) and after image processing (right side). FIG. 3 is a diagram for explaining image analysis of a sample. It is a table showing an example of the ratio of a sample to a predetermined area. 3 is a flowchart showing a fluorescent X-ray analysis method using the present apparatus. FIG. 2 is a schematic configuration diagram showing a fluorescent X-ray analyzer according to a second embodiment of the present invention. 10 is a block diagram showing the electrical configuration of the analysis section, the detection section, and the second detection section in FIG. 9. FIG. It is a figure which shows the storage bag as a modification of a sample holding part.

<First embodiment>
Next, a first embodiment of a fluorescent X-ray analysis apparatus (hereinafter referred to as the present apparatus) according to the present invention will be described with reference to FIGS. 1 to 8.

[overall structure]
As shown in FIGS. 1 and 2, this device includes a sample holding section 1 in which a sample P is held, and an X-ray irradiation device that irradiates the sample P held in the sample holding section 1 with primary X-rays (X1). part 2, a detection part 3 that detects fluorescent X-rays (X2) generated from the sample P when irradiated with the primary X-rays (X1), and a predetermined part containing the sample P held in the sample holding part 1 It includes an imaging section 4 that images a region, and an analysis section 5 that analyzes the sample P based on the fluorescent X-rays (X2) detected by the detection section 3 and the image of a predetermined region captured by the imaging section 4. . In this embodiment, a fibrous sample P such as hair is assumed.

The sample holding section 1 includes a capillary tube 10 formed into a long and thin circular tube shape, and a sample P is held inside the capillary tube 10. This capillary tube 10 is removably disposed within a case (not shown) of the present device using a support member or the like. Note that the capillary tube 10 shown in FIG. 1 is shown enlarged for convenience of explanation.

As shown in FIG. 3, the capillary tube 10 is formed into a circumferential wall 10a in the shape of an elongated circular tube with both ends open, with a length of 5 mm to 50 mm, an inner diameter of 100 μm to 5 mm, and a thickness of 5 μm to 100 μm. It is made of a material through which fluorescent X-rays (X2) can pass, such as nitride (BN), quartz glass, and silicon. Note that the capillary tube 10 is preferably made of a material with a smooth surface so that X-rays can easily pass therethrough. Furthermore, depending on the sample, the capillary tube 10 may have an extremely small inner diameter (several tens of nanometers), such as a carbon nanotube.

In addition, when analyzing the sample P, the capillary tube 10 is inserted into the sample P through the opening 10b at one end, and after holding the sample P inside, is placed at a predetermined location in the case (not shown) of the apparatus. be done. At this time, the capillary tube 10 is arranged horizontally so that its axial direction (lengthwise direction) is substantially parallel to the irradiation direction of the primary X-rays (X1) irradiated from the X-ray irradiation section 2.

The X-ray irradiation unit 2 includes an X-ray tube that emits primary X-rays (X1), and a collimator that approximately collimates the primary X-rays (X1) that are emitted from the X-ray tube. This X-ray irradiation unit 2 makes the primary X-ray (X1) enter from the opening 10b at one end of the capillary tube 10 of the sample holding unit 1, and provides a predetermined visual radiation to the inner surface of the peripheral wall 10a of the capillary tube 10. After total reflection at an angle (for example, 0.1 degree), the primary X-ray (X1) is emitted from the opening 10c at the other end of the capillary tube 10, thereby removing the sample P held inside the capillary tube 10. is irradiated with primary X-rays (X1).

According to this, the fluorescent X-ray intensity of the sample P increases, and scattering of the primary X-rays (X1) can also be suppressed. Note that these X-ray tubes and collimators are the same as those used in conventional fluorescent X-ray analyzers, so detailed explanations thereof will be omitted.

The detection section 3 is provided outside the capillary tube 10 of the sample holding section 1. When a plurality of detection units 3 are provided along the circumferential direction outside the capillary tube 10, the fluorescent X-rays (X2) from the sample P can be detected over the entire circumference. This makes it possible to shorten time and increase sensitivity.

The imaging section 4 is for capturing an image of a predetermined area including the sample P held in the sample holding section 1, and is provided outside the capillary tube 10. In particular, when a mobile terminal such as a smartphone is used as the imaging unit 4, the present fluorescent X-ray analyzer can be downsized and costs can be reduced. For example, when the sample P has 5 or 10 hairs, the imaging unit 4 images a predetermined area including the sample P, as shown in the photograph on the left side of FIG. 5 .

As shown in FIG. 2, the analysis section 5 includes an element measurement section 51 that measures the amount of a predetermined element contained in the sample P held in the sample holding section 1, and an element measurement section 51 that measures the amount of the sample P. Controls the sample measurement section 52, the correction section 53 that corrects the quantity related to the element of the sample P by normalizing it by the quantity related to the sample P, the output section 54 that outputs the analysis result of the sample P, and each part of the apparatus. A control section 55 is provided. Note that the amount of the sample P refers to the amount related to the size of the entire sample, such as the surface area, volume, or mass of all the samples P.

The element measurement section 51 measures a numerical value K1 proportional to the amount of a predetermined element contained in the sample P held in the sample holding section 1 based on the fluorescent X-rays detected by the detection section 3. In this embodiment, the element measurement unit 51 measures the intensity of fluorescent X-rays corresponding to a predetermined element as a numerical value K1 proportional to the amount of the predetermined element, as shown in FIG. For example, when it is desired to analyze copper (Cu) as a predetermined element contained in the sample P, the intensity of fluorescent X-rays corresponding to copper (Cu) is measured.

The sample measuring section 52 measures a numerical value K2 proportional to the amount of sample P held by the sample holding section 1. In this embodiment, the sample measurement unit 52 calculates the ratio of the area T of the image occupied by the sample P to the area S of the image of the predetermined area based on the image of the predetermined area captured by the imaging unit 4. Measures a numerical value proportional to the amount of sample.

For example, when the sample P has 5 or 10 hairs, the sample measurement unit 52 converts the image of a predetermined region captured by the imaging unit 4 into a gray scale, as shown in the diagram on the right side of FIG. As shown in Fig. 7, after measuring the area S of the image of a predetermined region and the area T of the image occupied by the sample P (T1+T2+T3+...+Tn: n is the number of materials P), as shown in Fig. 7, Next, the ratio (T/S) of the area T of the image occupied by the sample P to the area S of the image of a predetermined region is calculated. According to this, it is possible to easily measure a numerical value proportional to the amount (number) of samples P from the image taken by the imaging unit 4.

The correction section 53 standardizes a numerical value K1 proportional to the amount of a predetermined element contained in the sample P measured by the element measuring section 51 with a numerical value K2 proportional to the amount of the sample P measured by the sample measuring section 52. Correct by changing the For example, the correction unit 53 normalizes by dividing a numerical value K1 proportional to the amount of a predetermined element by a numerical value K2 proportional to the amount of the sample P.

The analysis unit 5 is generally executed by a personal computer (PC) directly connected to the detection unit 3, but may be executed by a server computer on a cloud connected to the detection unit 3 via a network. . Especially when executed on a server computer on the cloud, for example, a small X-ray irradiation unit 2 (length: 180 mm, width: 45 mm, height: about 20 mm), detection unit 3 (length: 1500 mm, width: 60 mm, thickness: 20 mm) , the capillary tube 10 (length: 30 mm, outer diameter: about 2 mm), and the imaging section 4 alone, making it possible to save space, reduce weight, and downsize.

[Fluorescent X-ray analysis method using this device]
Next, a fluorescent X-ray analysis method using this apparatus will be explained with reference to FIG.

First, the sample P is inserted through the opening 10b at one end of the capillary tube 10, and after holding the sample P inside the capillary tube 10, it is placed horizontally at a predetermined location in the case of this device (not shown). (S1).

Next, the X-ray irradiation section 2 causes the primary X-ray (X1) to enter from the opening 10b at one end of the capillary tube 10 of the sample holding section 1, so that the inner surface of the capillary tube 10 is exposed to a predetermined visual field. After total reflection at the corner, the primary X-rays (X1) are emitted from the opening 10c at the other end of the capillary tube 10, and the sample P held inside the capillary tube 10 receives the primary X-rays (X1). ) is irradiated (S2).

Next, the detection unit 3 detects fluorescent X-rays (X2) generated from the sample P when irradiated with the primary X-rays (X1) (S3). At this time, when each detection unit 3 detects the fluorescent X-rays (X2) from the sample P over the entire circumference, it becomes possible to shorten the analysis time and increase the sensitivity in the fluorescent X-ray analysis.

Next, the analysis section 5 analyzes the sample P held in the sample holding section 1 (S4). Specifically, the element measurement unit 51 measures a numerical value K1 proportional to the amount of a predetermined element contained in the sample P held in the sample holding unit 1 based on the fluorescent X-rays detected by the detection unit 3. do. Further, the sample measuring section 52 measures a numerical value K2 proportional to the amount of the sample P held by the sample holding section 1. Then, the correction unit 53 standardizes a numerical value K1 proportional to the amount of a predetermined element contained in the sample measured by the element measuring unit 51 with a numerical value K2 proportional to the amount of the sample P measured by the sample measuring unit 52. Correct by changing the After that, the output unit 54 outputs the numerical values standardized and corrected by the correction unit 53 on a screen or by printing.
By normalizing and correcting the numerical value K1, which is proportional to the amount of the predetermined element contained in the sample P, by the numerical value K2, which is proportional to the amount of the sample, the amount of the predetermined element per unit amount of the sample P can be calculated. Since the extent of the amount can be calculated, the sample P can be analyzed with high accuracy regardless of the thickness, length, number, or amount of the sample P.

<Second embodiment>
Next, a second embodiment of the present device will be described with reference to FIGS. 9 and 10. In addition, below, only the different configurations from the above-described first embodiment will be explained, and the description of the same configurations will be omitted and the same reference numerals will be given.

As shown in FIG. 9, this device includes a light source section 6 that irradiates a sample P held in a sample holding section 1 with light beams, and a light source section 6 that irradiates a sample P held in a sample holding section 1, and a light source section 6 that irradiates a sample P held in a sample holding section 1, and a light source section 6 that irradiates a sample P held in a sample holding section 1, and a light beam that has passed through the sample P (for example, visible light, X-rays, ultraviolet light, etc.). or infrared rays). As shown in FIG. 10, this second detection section 7 is provided on the input side of the sample measurement section 52 of the analysis section 5, and is configured to transmit the detection result of the light beam to the sample measurement section 52. .

In addition, in this device, the element measurement unit 51 measures the intensity of fluorescent X-rays (X2) corresponding to a predetermined element as a numerical value K1 proportional to the amount of the predetermined element. For example, if the intensity of the fluorescent X-ray (X2) of a predetermined element (for example, copper Cu) detected by the detection unit 3 is I, the primary When the intensity of the line (X1) is I ₀ and the mass of the predetermined element is W, the following relational expression [1] holds true.

I=k'I ₀ W (k': constant of proportionality)...[1]

In addition, in this apparatus, the sample measurement section 52 determines whether the sample P held in the sample holding section 1 is based on the intensity of the light beam irradiated onto the sample P from the light source section 6 and the intensity of the light beam transmitted through the sample P. A numerical value K2 proportional to the amount of is measured. For example, if the intensity of the light beam irradiated onto the sample P from the light source section 6 is A ₀ , the intensity of the light beam transmitted through the sample P detected by the second detection section 7 is A, and the volume of the sample P is V, The following relational expression [2] holds true.

A/A ₀ = kV (k: proportionality constant)...[2]

In addition, in this device, the correction unit 53 adjusts a numerical value K1 proportional to the amount of a predetermined element contained in the sample P measured by the element measurement unit 51 to a value K1 proportional to the amount of the sample P measured by the sample measurement unit 52. The correction is made by normalizing with the calculated value K2. For example, the correction unit 53 converts the intensity I of the fluorescent X-ray corresponding to a predetermined element as a value K1 proportional to the amount of the predetermined element contained in the sample P into a value K2 as a value K2 proportional to the amount of the sample P. When the intensity ratio A/A is normalized by dividing by ₀ , it is proportional to the volume concentration (W/V) of the sample P, as is clear from the above equations [1] and [2].

In this embodiment, the sample P is mainly assumed to be fibrous material such as hair, but sample P may also include blood, saliva, urine, sweat, river water, atmospheric particles, drinking water, plating bath, washing water, nanomaterials, It is possible to analyze various samples P such as tap water, well water, and powdered materials.

Furthermore, although a plurality of the detectors 3 are provided outside the capillary tube 10, only one detector 3 may be provided.

Furthermore, although the X-ray irradiation unit 2 is configured such that the irradiated primary X-rays (X1) are totally reflected on the inner surface of the peripheral wall 10a of the capillary tube 10, other forms of reflection may be used.

Further, although one capillary tube 10 is arranged, a plurality of capillary tubes may be arranged.

Furthermore, although the capillary tube 10 is used as the sample holding section 1, other shapes and structures may be used. For example, as shown in FIG. 11(a), the sample holding unit 1 includes a flexible storage bag 11, and after the sample P is stored inside the storage bag 11, the storage bag 11 One example is one in which the sample P is held by being rolled up completely. Alternatively, as shown in FIG. 11(b), the sample holding section 1 includes a flexible storage bag 11, and after the sample P is stored in the lower part of the inside of the storage bag 11, the sample P is stored. One example is one in which the sample P is held by having the upper and middle portions other than the lower portion rolled up. According to these, a fibrous sample P such as hair, a liquid sample P such as saliva or blood, and a small amount of sample P can be easily and stably placed in the sample holding section 1.

Although the embodiments of the present invention have been described above with reference to the drawings, the present invention is not limited to the illustrated embodiments. Various modifications and variations can be made to the illustrated embodiments within the same scope as the present invention or within an equivalent scope.

DESCRIPTION OF SYMBOLS 1...Sample holding part 10...Capillary tube 10a...Peripheral wall 10b...Opening part at one end 10c...Opening part at the other end 2...X-ray irradiation part 3...Detection part 4...Imaging part 5...Analysis part 51...Element measuring part 52 ...Sample measuring section 53...Correction section 54...Output section 55...Control section 6...Light source section 7...Second detection section P...Sample

Claims (7)

a sample holding section in which the sample is held;
an X-ray irradiation unit that irradiates the sample held in the sample holding unit with primary X-rays;
a detection unit that detects fluorescent X-rays generated from the sample when irradiated with the primary X-rays;
A fluorescent X-ray analyzer comprising: an analysis section that analyzes a sample based on the fluorescent X-rays detected by the detection section,
The analysis department is
an element measurement unit that measures a numerical value proportional to the amount of a predetermined element contained in the sample held in the sample holding unit based on the fluorescent X-rays detected by the detection unit;
a sample measuring unit that measures a numerical value proportional to the amount of the sample held by the sample holding unit;
a correction unit that corrects a numerical value proportional to the amount of a predetermined element contained in the sample measured by the element measuring unit by normalizing it with a numerical value proportional to the amount of the sample measured by the sample measuring unit; Prepare,
The sample holding unit includes a flexible storage bag, and after the sample is stored inside the storage bag, the sample is held by rolling the storage bag together with the sample. Fluorescence X-ray analyzer. a sample holding section in which the sample is held;
an X-ray irradiation unit that irradiates the sample held in the sample holding unit with primary X-rays;
a detection unit that detects fluorescent X-rays generated from the sample when irradiated with the primary X-rays;
A fluorescent X-ray analyzer comprising: an analysis section that analyzes a sample based on the fluorescent X-rays detected by the detection section,
The analysis department is
an element measurement unit that measures a numerical value proportional to the amount of a predetermined element contained in the sample held in the sample holding unit based on the fluorescent X-rays detected by the detection unit;
a sample measuring unit that measures a numerical value proportional to the amount of the sample held by the sample holding unit;
a correction unit that corrects a numerical value proportional to the amount of a predetermined element contained in the sample measured by the element measuring unit by normalizing it with a numerical value proportional to the amount of the sample measured by the sample measuring unit; Prepare,
The sample holding unit includes a flexible storage bag, and after the sample is stored in the inner lower part of the storage bag, the upper and middle parts other than the lower part where the sample is stored are rolled up. A fluorescent X-ray analyzer characterized in that a sample is held by . an imaging unit configured to image a predetermined area including the sample held in the sample holding unit;
The sample measurement unit calculates the ratio of the area of the image occupied by the sample to the area of the image of the predetermined area based on the image of the predetermined area captured by the imaging unit, thereby determining the proportion of the area proportional to the amount of the sample. The fluorescent X-ray analyzer according to claim 1 or 2, which measures numerical values. comprising a light source unit that irradiates a light beam to the sample held in the sample holding unit, and a second detection unit that detects the light beam that has passed through the sample,
The sample measuring unit measures a numerical value proportional to the amount of the sample held in the sample holding unit based on the intensity of the light beam irradiated onto the sample from the light source unit and the intensity of the light beam transmitted through the sample. The fluorescent X-ray analyzer according to claim 1 or 2. 3. The X-ray fluorescence spectrometer according to claim 1, wherein the sample holding section includes a capillary tube formed into an elongated tubular shape, and the sample is held inside the capillary tube. a sample holding part comprising a flexible storage bag, and after the sample is stored inside the storage bag, the storage bag is wound together with the sample to hold the sample ;
an X-ray irradiation unit that irradiates the sample held in the sample holding unit with primary X-rays;
a detection unit that detects fluorescent X-rays generated from the sample when irradiated with the primary X-rays;
A fluorescent X-ray analysis method using a fluorescent X-ray analyzer comprising an analysis section that analyzes a sample based on the fluorescent X-rays detected by the detection section,
The analysis department is
a step of measuring a numerical value proportional to the amount of a predetermined element contained in the sample held in the sample holding part by an element measuring part based on the fluorescent X-rays detected by the detecting part ;
measuring a numerical value proportional to the amount of the sample held by the sample holding unit using a sample measuring unit ;
a step of correcting, by a correction unit, a numerical value proportional to the amount of a predetermined element contained in the sample measured by the element measuring unit by a numerical value proportional to the amount of the sample measured by the sample measuring unit; A fluorescent X-ray analysis method comprising: A flexible storage bag is provided, and after the sample is stored in the inner lower part of the storage bag, the upper and middle parts other than the lower part where the sample is stored are rolled up to hold the sample. A sample holding part;
an X-ray irradiation unit that irradiates the sample held in the sample holding unit with primary X-rays;
a detection unit that detects fluorescent X-rays generated from the sample when irradiated with the primary X-rays;
A fluorescent X-ray analysis method using a fluorescent X-ray analyzer comprising an analysis section that analyzes a sample based on the fluorescent X-rays detected by the detection section,
The analysis department is
a step of measuring a numerical value proportional to the amount of a predetermined element contained in the sample held in the sample holding part by an element measuring part based on the fluorescent X-rays detected by the detecting part ;
measuring a numerical value proportional to the amount of the sample held by the sample holding unit using a sample measuring unit ;
a step of correcting, by a correction unit, a numerical value proportional to the amount of a predetermined element contained in the sample measured by the element measuring unit by a numerical value proportional to the amount of the sample measured by the sample measuring unit; A fluorescent X-ray analysis method comprising: