JP7399007B2 - Ozone generator and discharge lamp equipment - Google Patents

Description

TECHNICAL FIELD The present invention relates to an ozone generator, and particularly to the flow of raw material gas and the like.

In an ozone generator, an ozone generator is placed inside a housing, and a fluid such as air flowing along a flow path inside the housing is discharged or irradiated with ultraviolet rays to generate ozone and emit it to the outside (for example, patented (See Reference 1).

Furthermore, a configuration is also known in which an excimer lamp is arranged in a pipe through which source gas flows, and an air supply fan is arranged at the inlet of the pipe (see Patent Document 2). In order to improve the efficiency of ozone generation, the flow of raw material gas inside the pipe is made uniform, and the flow velocity is set to match the conditions of the excimer lamp.

Japanese Patent Application Publication No. 2014-103028 Patent No. 6070794

In order to generate ozone efficiently, it is necessary to create a flow that is suitable for the configuration and arrangement of the ozone generator, such as a discharge lamp. For example, when disposing a discharge lamp that emits ultraviolet light of 200 nm or less, the intensity of the ultraviolet light is attenuated depending on the distance from the lamp surface, so it is desirable to flow as much raw material gas as possible along the lamp surface.

On the other hand, with viscous fluids, a boundary layer with a velocity gradient is formed near the lamp surface, so it is desirable to supply a sufficient flow rate near the lamp surface. It is difficult to create an effective flow of raw material gas etc. due to limitations in the operating performance of the air supply fan.

Therefore, it is required to form a flow of raw material gas or the like that is effective for ozone generation around an ozone generation unit such as a discharge lamp.

An ozone generation device that is one aspect of the present invention includes an ozone generation section and a fluid supply pipe that supplies a fluid containing oxygen to the ozone generation section from an outlet. For example, the ozone generator can include a discharge lamp and emit water along the lamp axis. Further, the fluid supply pipe can be configured to include a blower or the like.

In the present invention, the fluid that blows out in one direction from the outlet of the fluid supply pipe attracts the fluid that flows in one direction around the outlet. Here, "blowing out along one direction" does not mean limiting the speed or flow rate of the fluid, but it is sufficient that the fluid given kinetic energy flows out from the outlet and is supplied toward the ozone generator. . Furthermore, "flowing along one direction" does not mean strictly parallel to one direction, but it is sufficient that the flow is generally oriented in one direction, and it is sufficient that part of the liquid flows in one direction. The discharge flow and the induced fluid flow (herein referred to as the accompanying flow) form a flow with non-uniform velocity distribution in one direction (non-uniform flow), but discharge lamps do not have uniform velocity distribution. It can be placed in a variable area.

For example, the fluid supply pipe is cylindrical and can attract fluid flowing in one direction from the outside of the fluid supply pipe (outside the surface of the cylinder). On the other hand, the fluid supply pipe can also be formed in an annular shape, and the fluid can be drawn to flow in one direction through a space area (on the inner surface side) that is annularly surrounded by the fluid supply pipe. can.

A discharge lamp device (light source device) that is one aspect of the present invention is arranged coaxially with a discharge lamp and a lamp axis of the discharge lamp, and blows out fluid from an outlet toward the discharge lamp along the lamp axis. The lamp includes a fluid supply pipe, and the fluid blown out from the outlet attracts fluid flowing around the outlet along the lamp axis.

For example, a blower or the like may be configured to supply kinetic energy to the fluid blown out from the outlet of the fluid supply pipe. When the flow rate of the fluid blown out from the outlet of the fluid supply pipe is discharged from the downstream opening end of the flow pipe, the fluid is discharged from the upstream opening end of the flow pipe.

The diameter or width of the outlet can be made larger than the diameter or width of the discharge lamp. It can further include a flow path tube that accommodates the discharge lamp and surrounds at least the air outlet at its upstream open end. For example, the fluid supply tube and the flow tube can be arranged coaxially with respect to the discharge lamp.

According to the present invention, it is possible to form a flow of raw material gas or the like that is effective for ozone generation around an ozone generation unit such as a discharge lamp.

FIG. 1 is a schematic configuration diagram showing an ozone generator according to a first embodiment. It is a schematic block diagram showing the ozone generation device which is a 2nd embodiment. It is a schematic block diagram showing the ozone generation device which is a 3rd embodiment. It is a schematic block diagram showing the ozone generation device which is a 4th embodiment.

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a configuration diagram of an ozone generator according to a first embodiment.

The ozone generator 10 includes an excimer lamp (discharge lamp) 20, a gas induction tube (fluid supply tube) 30, and a blower 40. Here, the excimer lamp 20 and the gas induction pipe 30 are arranged along the vertical direction. The excimer lamp 20 has an elongated discharge vessel 20S extending along the direction of the lamp axis E and having an outer diameter L1, and forms therein an excimer discharge that emits ultraviolet light with a wavelength of 172 nm, for example.

The excimer lamp 20 irradiates the source gas flowing around the excimer lamp with ultraviolet rays. Ozone is generated by irradiating the oxygen-containing raw material gas with ultraviolet rays, and deodorization, sterilization, and other treatments are performed. It is also possible to arrange an ozone generator, excimer lamp 20, etc. inside the housing.

The gas induction tube 30 is a cylindrical tube with a circular cross section and an opening end (herein referred to as a blowout port) 30A having an axial length W, an outer diameter L2, and an inner diameter B2, and whose tube axis is parallel to the excimer lamp 20. The excimer lamp 20 is arranged coaxially with the excimer lamp 20 so as to coincide with the axis E of the excimer lamp 20 . The outer diameter L2 of the gas induction tube 30 is larger than the outer diameter L1 of the excimer lamp 20. Further, the gas induction tube 30 is spaced apart from the excimer lamp 20 by a predetermined distance B along the lamp axis E.

The blower 40 is housed within the gas induction pipe 30 and is configured here as an axial fan. The blower 40 is arranged coaxially with respect to the gas induction pipe 30, and the excimer lamp 20, the gas induction pipe 30, and the blower 40 are arranged coaxially. The blower 40 is powered by a power supply unit (not shown) and rotates at a predetermined rotational speed. The blower 40 sucks in the raw material gas flowing from one open end (herein referred to as an inlet) 30B of the gas induction pipe 30, supplies kinetic energy to the raw material gas, and blows the raw material gas out from the outlet 30A.

The excimer lamp 20 and the gas induction pipe 30 are arranged in the space 10S. The space 10S has a space size that can form a flow (flow path) of the raw material gas along one direction (here, the lamp axis E) from the gas induction pipe 30 toward the excimer lamp 20. That is, the excimer lamp 20 and the gas induction tube 30 form a space 10S in which they can be arranged facing each other along one direction (lamp axis E).

When the raw material gas is viscous, when the raw material gas blows out from the gas induction pipe 30, the raw material gas around the blown flow is attracted, and the raw material gas flows along the lamp axis E (hereinafter, such a flow will be referred to as accompanying flow). flow) is caused. That is, an accompanying flow is generated by imparting kinetic energy from the blowout flow to the surroundings. In FIG. 1, the blown flow of the raw material gas blown out from the inside of the gas induction pipe 30 is indicated by the symbol F1, and the accompanying flow of the raw material gas flowing around the raw material gas F1 is indicated by the symbol F2.

The blowout flow F1 is a flow of raw material gas blown out by the blower 40, and has a higher flow speed and a relatively larger flow rate than the accompanying flow F2 generated around it. Therefore, regarding the lamp axis E, the speed changes from the center (lamp axis E) toward the periphery, and the speed distribution is not uniform, resulting in a non-uniform flow. The space 10S in which the excimer lamp 20 and the gas induction tube 30 are arranged has a space size that allows formation of the accompanying flow F2 along the lamp axis E.

However, the blowout flow F1 is not a flow (one-dimensional flow) only in the direction along the lamp axis E as shown in FIG. 1, but a three-dimensional flow field is generated. While the blower 40 is rotating, a backflow phenomenon occurs near the outlet 30A of the blower 40 in an area affected by the outer diameter of the fan motor portion 42 of the blower 40, and the fluid supply characteristics of the blower 40 are affected. As a result, turbulent flow occurs near the outlet 30A, resulting in an extremely complicated flow field.

By the way, since the blowout flow F1 is a viscous fluid, a boundary layer is generated near the surface of the excimer lamp 20. The turbulent boundary layer is thicker than the laminar boundary layer, and the velocity gradient is therefore relatively gentle. Moreover, its thickness increases continuously with the flow.

However, when the accompanying flow F2 exceeds the vicinity of the tip of the excimer lamp 20, it changes to a flow affected by the pressure gradient. As a result, the flow rate of the source gas passing near the surface of the excimer lamp 20 increases. Moreover, because the velocity gradient is gentle due to the formation of a turbulent boundary layer, the flow near the ramp surface does not slow down much and becomes a flow with a large flow rate, and the accompanying flow F2 changes to a flow closer to the ramp. The spread of thickness also tends to be suppressed.

The ultraviolet rays emitted from the excimer lamp 20 are absorbed and attenuated in the atmosphere, and the shorter the wavelength, the greater the decrease in light intensity with respect to the traveling distance. However, since the flow rate of the raw material gas flowing around the excimer lamp 20 increases due to the raw material gas blowout flow F1 and the accompanying flow F2, the amount of ozone-containing gas generated increases, resulting in effective sterilization and sterilization. becomes possible.

In addition, by arranging the excimer lamp 20 and the gas induction tube 30 coaxially, there is no deviation in the flow speed and flow rate near the lamp surface, so the source gas passes through a spatial region where the ultraviolet intensity is sufficiently maintained. It is easy to generate ozone, and ozone generation is effective. Furthermore, since the raw material gas becomes a complicated non-uniform flow (turbulent flow), the excimer lamp 20 can be effectively cooled, and a decrease in the luminous efficiency of the excimer lamp 20 can be suppressed.

The distance interval B between the excimer lamp 20 and the gas induction pipe 30 may be determined so that the entire excimer lamp 20 is included in the turbulent flow region, and at least a portion of the excimer lamp 20 is arranged in the turbulent flow region. It's okay.

On the other hand, even if a uniform flow F1 is formed near the outlet 30A of the gas induction pipe 30 along the lamp axis E, a non-uniform flow occurs along the excimer lamp 20 due to the accompanying flow F2. Passes near the surface. Also, in the laminar boundary layer formed near the surface of the excimer lamp 20, the flow direction of the accompanying flow F2 is influenced by the pressure gradient, so that the raw material gas passes through at a larger flow rate. Therefore, the excimer lamp 20 is not limited to being placed in a turbulent flow field.

For example, by making the axial length W of the gas induction pipe 30 sufficiently large and ensuring a sufficient distance between the outlet and the outlet 30A of the blower 40, the influence of complicated turbulence phenomena caused by the blower 40 can be suppressed. At the same time, the blowout flow F1 can be blown out from the blowout port 30A. Further, it is also possible to set the outer diameter L2 of the gas induction pipe 30, the flow rate (flow velocity) of the blower 40, etc., depending on the degree of attenuation of the ultraviolet rays emitted by the excimer lamp 20.

Furthermore, the flow state of the raw material gas around the excimer lamp 20 due to the blowout flow F1 may be adjusted by the axial length W of the gas induction pipe 30. Further, the accompanying flow F2 of the raw material gas drawn around the excimer lamp 20 is controlled by the distance interval B between the excimer lamp 20 and the outlet 30A of the gas induction pipe, or You may adjust the inner diameter B2 of the air outlet 30A, or both.

The attraction of the raw material gas is caused by blowing out the viscous raw material gas from the gas attraction pipe 30, and the degree of viscosity of the raw material gas can be expressed by the Reynolds number. If the axial length W of the gas induction pipe 30 is a representative length, and the flow rate of the raw material gas supplied with kinetic energy by the blower 40 is a representative speed, then the flow rate of the blower 40, the wall thickness of the gas induction pipe 30 (B2- By adjusting L2) and the axial length W, the degree of ejection of the ejected flow, that is, the degree of flow of the accompanying flow induced by the ejected flow may be adjusted.

Next, an ozone generator according to a second embodiment will be described using FIG. 2. In the second embodiment, an excimer lamp is provided within the flow pipe. The same reference numerals are used for the same components as in the first embodiment.

FIG. 2 is a schematic configuration diagram of an ozone generator according to a second embodiment. The ozone generator 10' includes an excimer lamp 20, a gas induction pipe 30, and a blower 40, and further includes a flow pipe 50 that accommodates the excimer lamp 20.

The flow path tube 50 is a tube for forming a flow path, and is configured here as a cylindrical tube with a circular cross section and a constant diameter. The tube axis of the flow pipe 50 coincides with the lamp axis E of the excimer lamp 20, and the excimer lamp 20, the gas induction pipe 30, the blower 40, and the flow pipe 50 are arranged coaxially. The gas induction pipe 30 is surrounded by a flow pipe 50, and the position along the lamp axis E of one opening 50B of the flow pipe 50 is such that the inlet 30B of the gas induction pipe 30 is located at the position along the lamp axis E of one opening 50B of the flow pipe 50. It is located upstream of the opening 50B. That is, the gas induction pipe 30 is partially accommodated within the flow path pipe 50.

A blowout flow F1 of raw material gas blown out from the gas induction pipe 30 by the blower 40 causes an accompanying flow F2 of raw material gas that passes around the gas induction pipe 30 and flows along the lamp axis E of the excimer lamp 20. By making the axial length of the gas induction pipe 30 sufficiently large and ensuring a sufficient distance between the outlet of the blower 40 and the outlet 30A, the blowout flow can be improved while suppressing the influence of complicated turbulent flow phenomena caused by the blower 40. F1 can be blown out from the outlet 30A. An annular opening (hereinafter referred to as an inlet) 70 is formed in one (upstream side) opening 50B of the flow path pipe 50 along the periphery of the gas induction pipe 30. The induced flow F2 of the raw material gas enters from the annular inlet 70 and flows inside the flow pipe 50.

As in the first embodiment, by causing the accompanying flow F2 of the source gas, the flow rate of the entire source gas increases, and the amount of gas containing ozone produced increases. On the other hand, a part of the raw material gas that has flowed into the inlet 70 is drawn toward the inner wall surface 50T of the flow path pipe 50 due to the pressure gradient, and flows near the inner wall surface 50T. Further, the flow rate of a portion of the source gas near the outer surface of the discharge vessel 20S of the excimer lamp 20 increases due to the pressure gradient.

Due to the flow of the raw material gas blowout flow F1 and accompanying flow F2, a non-uniform and complicated flow of the raw material gas is formed in the flow path pipe 50, and a large amount of raw material gas passes by the excimer lamp 20. , the amount of gas produced including ozone increases. In particular, by making the flow of the raw material gas blown out from the gas induction pipe 30 into a turbulent state, a large amount of the raw material gas can flow near the lamp surface. When the flow of the accompanying flow F2 of the raw material gas becomes slow (the flow rate decreases) due to the low output of the blower 40, it is preferable to reduce the tube wall thickness (B2-L2) of the gas induction tube 30.

Pressure loss (friction loss) occurs as a part of the accompanying flow F2 of the raw material gas flows along the inner wall 50T of the flow path pipe 50, but the blowing flow F1 of the raw material gas blown out from the gas induction pipe 30 is relatively Since it is fast and has a large flow rate, the flow in the central part near the lamp axis E is not easily affected by pressure loss.

While the blower 40 is operating, the inlet port 30B of the gas induction pipe 30 always sucks in raw material gas from the upstream side and blows it out from the outlet 30A toward the downstream side, and normally the raw material gas flows in the opposite direction. does not occur. On the other hand, the annular inlet 70 of the flow pipe 50 does not receive a forced flow from the upstream side to the downstream side.

Therefore, if the flow rate of the raw material gas discharged from the outlet 50A of the flow pipe 50 is reduced due to the installation of an obstacle on the downstream side, the raw material gas in the flow pipe 50 is transferred to the inlet 70 on the opposite side. released from. That is, the inlet 70 functions secondarily as an outlet. Therefore, even if an unusual (abnormal) situation occurs, such as when the other outlet 50A of the flow pipe 50 is blocked, the generated ozone will not become highly concentrated or flow in the opposite direction. can be safely released outside the device.

The gas attraction pipe 30 may be arranged within the flow path pipe 50 so that the accompanying flow F2 of the raw material gas is induced. For example, the inlet 30B of the gas induction pipe 30 may be located downstream of the opening 50B of the flow path pipe 50. Further, the inlet 30B of the gas induction tube 30 is configured to coincide with the position of the opening 50B of the flow path tube 50 along the lamp axis E, and the entire gas attraction tube 30 is housed within the flow path tube 50. You may.

Furthermore, the gas induction pipe 30 and the flow pipe 50 do not have a double pipe structure, and the outlet 30A of the gas induction pipe 30 is located upstream of the opening 50B of the flow pipe 50, that is, the gas induction pipe 30 may be configured to be spaced apart from the flow pipe 50 along the lamp axis E. When the gas induction pipe 30 is close to the flow path pipe 50, a blowout flow F1 and an accompanying flow F2 of the raw material gas are similarly generated.

The gas induction pipe 30 and the flow path pipe 50 are not limited to cylindrical pipes with a constant diameter, but may be tapered pipes that taper toward the downstream side to prevent uniform flow, or pipes with the largest diameter at the center. It is also possible to construct a tube that has a large diameter and narrows at both ends, or to arrange a power supply section. Furthermore, it is possible to form a tube with a rectangular cross section having a predetermined width, and it is also possible to provide a curved or bent portion within a range that forms a unidirectional flow of the raw material gas.

In the first and second embodiments, the gas induction tube 30 (and the flow path tube 50) is arranged coaxially with the lamp axis E of the excimer lamp 20, but the excimer lamp 20 is arranged in an oblique direction with respect to the tube axis. It may be placed in Further, the blower 40 may not be housed in the gas induction pipe 30, but may be coaxially arranged on the upstream side. For example, it is possible to provide the blower 40 near the bottom of the housing and form the gas induction pipe 30 at the upper end of the housing. The discharge port 50A of the flow path pipe 50 may be configured to communicate with the outside of the device instead of within the housing.

Next, a third embodiment will be described using FIG. 3. In the third embodiment, raw material gas is blown out to a region away from the excimer lamp, causing a flow of the raw material gas toward the excimer lamp.

FIG. 3 is a schematic configuration diagram showing an ozone generator according to a third embodiment. The ozone generator 100 includes an excimer lamp 20, a gas induction pipe 130, and a blower (not shown). The blower is composed of, for example, a centrifugal fan, and the raw material gas given kinetic energy by the blower flows into the gas induction pipe 130.

The gas induction tube 130 is an annularly bent tube, and the axis of the annular portion coincides with the lamp axis E. That is, the gas induction pipe 130 is arranged coaxially with respect to the excimer lamp 20. The gas induction pipe 130 has an annular opening (hereinafter referred to as an outlet) 135, and raw material gas is blown out from the outlet 135 along the lamp axis E.

As the raw material gas is blown out from the outlet 135, a blown flow F1 of the raw material gas is caused near the lamp axis E, and flows through a cylindrical space region 140 annularly surrounded by the inner peripheral surface 130B of the gas induction pipe 130. This causes an accompanying flow F2 of source gas flowing toward the excimer lamp 20. As a result, a blowout flow F1 and an accompanying flow F2 of the raw material gas are formed along the lamp axis E. On the other hand, the ejected flow of the raw material gas ejected from the gas induction pipe 30 becomes a flow that approaches the excimer lamp 20 side due to the pressure gradient.

Since the raw material gas blowout flow F1 and accompanying flow F2 flow more in the vicinity of the discharge vessel 20S of the excimer lamp 20, the amount of produced fluid containing ozone increases as a result. In addition, since the raw material gas blowout flow F1 that creates a non-uniform flow is formed around the induced raw material gas accompanying flow F2, the raw material gas cannot be stably supplied to the excimer lamp 20. can.

Next, an ozone generator according to a fourth embodiment will be described using FIG. 4. In the fourth embodiment, a flow pipe that accommodates the excimer lamp 20 is provided.

FIG. 4 is a schematic configuration diagram showing an ozone generator according to a fourth embodiment. The annularly bent gas induction pipe 130 is housed within the flow pipe 50, and its outer surface 130A is in contact with the inner wall 50T of the flow pipe 50. The excimer lamp 20, the gas induction tube 130, and the flow path tube 50 are arranged coaxially. The opening 50B of the flow pipe 50 is formed with an opening region 170 (hereinafter referred to as an inlet) having a circular cross section through which the upstream source gas can flow.

Accompanied by the blowout flow F1 of the raw material gas blown out from the outlet 135 of the gas induction pipe 130, an accompanying flow F2 of the raw material gas flows toward the excimer lamp 20 through the spatial region 140. As a result, the flow rate of the source gas flowing near the excimer lamp 20 increases. Furthermore, if something that becomes an obstacle is placed on the downstream side and prevents the raw material gas from being discharged from the discharge port 50A of the flow path pipe 50, the inlet 170 functions as a discharge port for the raw material gas.

In the first to fourth embodiments, the excimer lamp 20, the gas induction pipes 30, 130, and the flow path pipe 50 are arranged along the vertical direction, but they may also be arranged along other directions such as the horizontal direction. good. It is also possible to configure an excimer lamp with a predetermined width, such as a rectangular cross-section, and the gas induction tube and the flow path tube may be coaxially arranged along the central axis. A light source for ultraviolet irradiation other than the excimer lamp 20 may be arranged, and furthermore, an ozone generating section using a discharge method may be arranged in consideration of the lamp cooling function.

The blower 40 may be of any type as long as it provides kinetic energy to the raw material gas. Further, the object of ultraviolet irradiation is not limited to raw material gas, but can be applied to fluids including liquids such as water.

10 Ozone generator 30 130 Gas induction pipe (fluid supply pipe)
50 Flow pipe

Claims (10)

an ozone generating section;
a fluid supply pipe that supplies a fluid containing oxygen from the outlet toward the ozone generating section,
The fluid supply pipe is arranged coaxially with respect to a lamp axis of an ultraviolet irradiation lamp provided in the ozone generation section,
An ozone generating device characterized in that fluid that blows out along one direction from the outlet attracts fluid that flows along the one direction around the outlet. The ozone generating device according to claim 1, wherein the fluid supply pipe is cylindrical and attracts fluid flowing along the one direction from outside the fluid supply pipe. an ozone generating section;
a fluid supply pipe that supplies a fluid containing oxygen from the outlet toward the ozone generating section,
Fluid blowing out along one direction from the outlet attracts fluid flowing along the one direction around the outlet,
An ozone generating device characterized in that the fluid supply pipe is annular and attracts fluid flowing along the one direction through a spatial region annularly surrounded by the fluid supply pipe. an ozone generating section;
a fluid supply pipe that supplies a fluid containing oxygen from the outlet toward the ozone generating section,
Fluid blowing out along one direction from the outlet attracts fluid flowing along the one direction around the outlet,
Further comprising a flow path pipe that houses at least the ozone generating section and in which a non-uniform flow is formed by the blowout flow supplied from the fluid supply pipe and the accompanying flow induced by the blowout flow ,
An ozone generating device characterized in that an end of the flow pipe on the fluid supply pipe side is an open end, and the accompanying flow flows into the flow pipe through the open end . The ozone generation device according to claim 4 , wherein the ozone generation section is arranged in a region where a non-uniform flow is formed by the blowout flow and the accompanying flow. a discharge lamp capable of producing ozone by irradiating an oxygen-containing fluid with ultraviolet light ;
a fluid supply pipe disposed coaxially with respect to the lamp axis of the discharge lamp, and for blowing out fluid from the outlet toward the discharge lamp along the lamp axis;
A discharge lamp device characterized in that fluid blown out from the outlet attracts fluid flowing around the outlet along the lamp axis. The discharge lamp device according to claim 6, wherein the diameter or width of the air outlet is larger than the diameter or width of the discharge lamp. The discharge lamp device according to claim 6 or 7, further comprising a flow pipe that accommodates the discharge lamp and surrounds at least the air outlet at an upstream open end. 9. The discharge lamp device according to claim 8, wherein the fluid supply tube and the flow path tube are arranged coaxially with respect to the discharge lamp. A claim characterized in that when the flow rate of the fluid blown out from the outlet of the fluid supply pipe discharged from the downstream opening end of the flow pipe is reduced, the fluid is discharged from the upstream opening end of the flow pipe. 8. The discharge lamp device according to 8 .

Images