JP7385352B2 - Inspection method and manufacturing method for fine protrusions - Google Patents

Description

The present invention relates to a method and apparatus for inspecting a microprotrusion tool having at least one microprotrusion protruding from the surface of a base material.

In recent years, microprotrusions called microneedle arrays have been attracting attention in the medical field, beauty field, and the like. This fine protrusion device is constructed by protruding from a sheet-like base material in a regular array with a large number of fine needle-like protrusions called microneedles. By applying such a microprojection to the surface of the skin, it is possible to obtain the same efficacy as administering a drug or the like using a syringe without causing pain.

By the way, such fine protrusions are manufactured by various methods, but the precision of the shape and size of the numerous needle-like protrusions protruding from the base material, Inspection is made for the presence of foreign matter, defects such as bends, and occurrence of burrs. As an inspection method, Patent Document 1 proposes a method in which a protrusion (microneedle) of a microprotrusion is imaged under dark field illumination, and the protrusion is inspected based on the image obtained by the imaging. There is. Specifically, this inspection method irradiates illumination light from a direction parallel to the base material surface on which the protrusion is placed, images the protrusion from a direction perpendicular to the base material surface, and processes the obtained image. and perform the necessary inspections.

However, the inspection method proposed in Patent Document 1 has a problem in that the contrast of the image obtained by imaging is insufficient, and highly accurate inspection cannot be performed.

Therefore, in Patent Document 2, when the surface of the base material on which the protrusions of the micro protrusions are protruded is the first sheet surface, and the opposite surface (back surface) is the second sheet surface, the sheet second surface A method has been proposed in which a state is created in which the tip of the protrusion is dark and the base thereof is bright by irradiating the irradiation light obliquely, and then the protrusion is imaged. According to this inspection method, the protrusions of the microprotrusions can be imaged with high contrast, so that transparent or translucent protrusions can be inspected with high precision.

Japanese Patent Application Publication No. 2010-071845 Japanese Patent Application Publication No. 2016-166769

However, in the inspection method proposed in Patent Document 2, only the tip of the protrusion of the minute protrusion becomes dark, so there is a problem that the shape and dimensions of the protrusion, adhesion of foreign matter, bending, etc. cannot be clearly observed. There is. In addition, since the system captures the transmitted light that has passed through the micro-protrusions, it is possible to detect cases where the micro-protrusions are made of an opaque material that does not transmit light, or where there is an opaque member on the back side of the micro-protrusions. There is also the problem that in some cases, this inspection method cannot be used.

An object of the present invention is to provide a method and apparatus for inspecting fine protrusions, which can eliminate the drawbacks of the prior art described above.

The inspection method of the present invention is a method for inspecting a microprotrusion tool having at least one microprotrusion protrudingly provided on the surface of a base material,
While irradiating light onto the surface of the base material in an oblique direction from one side with the protrusion as a boundary on the side where the protrusion protrudes from the surface of the base material, the light is reflected from the fine protrusion tool. an imaging step of capturing an image of the base material surface together with the protrusion by receiving light in an oblique direction from the other side;
an image processing step of processing the image captured in the imaging step;
a determination step of determining whether the protrusion is good or bad based on the result of image processing in the image processing step;
It has the following.

Further, the inspection device of the present invention is an inspection device for a microprotrusion tool having at least one microprotrusion protrudingly provided on the surface of a base material,
illumination means for irradiating light onto the surface of the base material in an oblique direction from one side of the base material surface with the protrusion as a boundary on the side on which the protrusion protrudes;
an imaging device disposed facing the illumination device on the same side as the illumination device, and capturing an image of the base material surface together with the protrusion by receiving reflected light from the microprotrusion in an oblique direction from the other side;
image processing means for processing the image captured by the imaging means;
control means for determining the quality of the protrusion based on the result of image processing in the image processing means;
It has the following.

According to the method and apparatus for inspecting a microprotrusion of the present invention, an image with a clear difference between the protrusion and a portion other than the protrusion in the microprotrusion can be obtained, and the form of the protrusion can be inspected with high precision. Can be done.

1 is a system configuration diagram of a microprotrusion inspection device according to a first embodiment of the present invention. It is a perspective view of a fine protrusion tool. FIG. 3 is an enlarged perspective view of a part of FIG. 2; FIG. 4 is a cross-sectional view taken along the line AA in FIG. 3. It is a figure showing the positional relationship of the illumination device and the inspection camera in the inspection device of the minute protrusion tool concerning a 1st embodiment of the present invention. It is a flowchart which shows the flow of the inspection method of the fine protrusion tool concerning a 1st embodiment of the present invention. (a) is a ray diagram showing the path of light emitted from the illumination device in the imaging step of the inspection method for microprotrusions according to the first embodiment of the present invention, and (b) is a captured image of the microprotrusions. FIG. 2 is a diagram schematically showing an example. FIG. 2 is a system configuration diagram of an inspection device according to a second embodiment of the present invention. It is a system configuration diagram of an inspection device according to a third embodiment of the present invention. (a) to (e) are cross-sectional views showing a method for manufacturing a fine protrusion tool in the order of steps.

[First embodiment]
A first embodiment of the present invention will be described below based on the accompanying drawings.
(Inspection device for fine protrusions)
First, the configuration of a microprotrusion inspection device according to a first embodiment of the present invention will be described based on FIG. 1.
FIG. 1 is a system configuration diagram of an inspection device for fine protrusions according to a first embodiment of the present invention. The test is performed sequentially on each of the following, and is configured as follows.

That is, the inspection apparatus 1 shown in FIG. 1 includes a drive device 3 such as a motor that intermittently drives a belt conveyor 10 to move each fine protrusion 2 to be inspected to an inspection area, and a drive unit 3 such as a motor that moves each fine protrusion 2 to be inspected to an inspection area. A positioning mechanism (not shown) that positions the fine protrusions 2, an illumination device 4 as illumination means disposed above the fine protrusions 2 positioned by the positioning mechanism, and an inspection camera (CCD camera) as an imaging means. ) 5, an image processing device 6 which is an image processing means for processing images of each fine protrusion 2 obtained by imaging with the inspection camera 5, and a result obtained by image processing of the image processing device 6. The apparatus includes a controller 7 as a control means for determining the quality of each fine protrusion 2.

Here, the microprotrusion device 2 as the inspection target in this embodiment is called a microneedle array used in the medical field and the beauty field, and the details of its configuration will be explained based on FIGS. 2 to 4. This will be explained below.

That is, FIG. 2 is a perspective view of the fine protrusion, FIG. 3 is a perspective view showing an enlarged part of FIG. 2, and FIG. 4 is a cross-sectional view taken along the line AA in FIG. , a plurality of (in the illustrated example, 3×3=9) minute protrusions (microneedles) 2B are regularly and orderly protruding from the upper surface (surface) of a rectangular sheet-like base material 2A. The fine protrusions 2 are made of a transparent or translucent thermoplastic resin that transmits light. Examples of the thermoplastic resin include polyfatty acid ester, polycarbonate, polypropylene, polyethylene, polyester, Polyamide, polyamideimide, polyether ether ketone, etc. or a combination of these may be used.

By the way, as shown in detail in FIGS. 3 and 4, each protrusion 2B of the fine protrusion 2 has a hollow conical shape with a needle-like tip (upper end), and extends from the surface of the base material 2A. It is installed vertically and in one piece. A circular hole-shaped opening 2a is obliquely bored in one upper part of the side surface of the protrusion 2B. The opening 2a is for discharging a medicine or the like, and is formed as a tapered hole whose diameter increases diagonally outward as shown in FIG. Medications also include beauty serums containing beauty ingredients that can improve skin conditions. Examples of beauty ingredients include collagen, various vitamins, placenta, and the like.

The fine protrusion device 2 configured as described above is inspected by image processing as described later. In this inspection, the shape and dimensions of each protrusion 2B, defects such as bends, adhesion of foreign matter, and openings are checked. The presence or absence of burrs in the portion 2a is inspected. In addition, when inspecting the shape and dimensions of each protrusion 2B, the height H of each protrusion 2B, the tip diameter L of the tip, the aperture diameter (diameter) d of the aperture 2a, and the aperture height h (Fig. 4) etc. are inspected.

The tip diameter L can be calculated using any method. The tip diameter L can be determined, for example, as follows. First, the tip of the protrusion 2B is observed under magnification as shown in FIG. Next, an imaginary straight line ILa is assumed along a straight line portion on one side 1a of both sides 1a and 1b, and an imaginary straight line ILb is assumed along a straight line portion on the other side 1b. Then, on the tip side, a point where one side 1a departs from the virtual straight line ILa is determined as a first tip point 1a1, and a point where the other side 1b departs from the virtual straight line ILb is determined as a second tip point 1b1. The length L of the straight line connecting the first tip point 1a1 and the second tip point 1b1 found in this way can be taken as the tip diameter of the protrusion 2B.

Here, the positional relationship between the illumination device 4 and the inspection camera 5 in the inspection apparatus 1 shown in FIG. 1 will be explained below based on FIG. 5.

That is, FIG. 5 is a diagram showing the positional relationship between the illumination device and the inspection camera, and as shown in the figure, the illumination device 4 and the inspection camera 5 are arranged on the plane of the base material 2A of the microprotrusion tool 2 as a boundary. They are installed diagonally opposite to each other on the upper side (the side on which the protrusions 2B of the fine protrusions 2 are protruded). Specifically, the illumination device 4 is installed obliquely so that the light is irradiated obliquely toward the protrusion 2B of the micro-protrusion tool 2. If the incident angle (angle from the horizontal plane) of the light to the fine protrusion 2 (the upper surface of the base material 2A) at this time is θ _L as shown in the figure, then this incident angle θ _L is determined by the inspection camera 5 as described later. In the image of the fine protrusion 2 captured by , the angle is set such that the contrast difference (shade difference) between the surface of the base material 2A and the protrusion 2B is maximum.

Incidentally, it is preferable that the distance L1 between the illumination device 4 and the fine protrusion 2 be as long as the intensity of light can be ensured, that is, the fine protrusion 2 can be irradiated with light from a farther distance. In other words, when light is applied to the fine protrusion 2 from a distance, the light becomes parallel, so the contour (edge) of the fine protrusion 2 captured by the inspection camera 5 becomes clearer. In this embodiment, the distance L1 between the illumination device 4 and the fine protrusion 2 is set to 100 to 150 mm. Further, in the first embodiment, a blue LED (blue light emitting diode) that emits short wavelength blue light is used as the light source of the illumination device 4. Here, the light source is not limited to blue LEDs, and red LEDs, white LEDs, etc. can also be used. Further, incandescent lamps, fluorescent lamps, sodium lamps, etc. can also be used.

On the other hand, the inspection camera 5 is installed diagonally facing the opposite side of the illumination device 4 across the fine protrusion 2 to be inspected. It is installed obliquely so that it can receive the light reflected by the fine protrusion 2. If the imaging angle (angle from the horizontal plane) by the inspection camera 5 at this time is θ _C as shown in the figure, this imaging angle θ _C can be set to 50° or less because it is easier to focus when it is small. Preferably, it is more preferably set to 45° or less. When the imaging angle θ _C exceeds 50°, it becomes difficult to simultaneously focus on the tip and the base of the protrusion 2B of the micro-protrusion 2.

Further, the difference |θ _C −θ _L | between the imaging angle θ _C and the light incident angle θ _L is set to 5° or less, preferably 3° or less, and more preferably 1° or less. In the first embodiment, θ _C =θ _L =45°. Note that the distance L2 between the inspection camera 5 and the microprotrusion tool 2 is set to a distance (focal length) at which the focal point of the lens of the inspection camera 5 matches the position of the microprotrusion tool 2, but in the first embodiment, L2 was set to 80 mm.

(Inspection method for fine protrusions)
Next, an inspection method according to the present invention implemented using the inspection apparatus 1 shown in FIG. 1 will be described below based on FIGS. 6 and 7.

FIG. 6 is a flowchart showing the flow of the microprojection inspection method according to the first embodiment of the present invention, and FIG. 7 is a ray diagram showing the path of light emitted from the illumination device in the imaging step of the inspection method.

The inspection method according to this embodiment is as follows:
a) a positioning step of moving the fine protrusion tool 2 to the inspection area and positioning it;
b) An imaging step of capturing an image of the fine protrusion 2 by irradiating the fine protrusion 2 with light from an oblique direction using the illumination device 4 and receiving reflected light from the fine protrusion 2 from an oblique direction by the inspection camera 5 and,
c) an image processing step of processing the image captured in the imaging step;
d) a determination step of determining the quality of the fine protrusion 2 based on the result of image processing in the image processing step;
The fine protrusion tool 2 is inspected through the above steps, and the details thereof will be explained below along with the flowchart shown in FIG.

When the inspection is started (step S1), as shown in FIG. It is detected by a sensor (step S2). As a result of this detection, when it is confirmed that the fine protrusion tool 2 to be inspected has arrived at the inspection area (step S2: Yes), the controller 7 that has received this signal sends a control signal to the drive device 3 shown in FIG. is transmitted to stop the belt conveyor 10 (step S3).

Then, the fine protrusion 2 to be inspected stops in a predetermined inspection area, and a positioning mechanism (not shown) is driven by a control signal from the controller 7, and this positioning mechanism positions the minute protrusion 2 at a predetermined position in the inspection area. It is positioned accurately (step S4). When the fine protrusion 2 is accurately positioned at the predetermined inspection position in this way, the controller 7 sends a trigger signal (imaging request signal) to the illumination device 4 and inspection camera 5 (step S5). Note that an air cylinder, a robot, or the like is used as the positioning mechanism.

As described above, when a trigger signal is transmitted from the controller 7 to the lighting device 4 and the inspection camera 5, the light source of the lighting device 4 that has received this trigger signal is activated to emit light, and the inspection camera 5 is also activated. Then, the fine protrusion 2 is imaged by the inspection camera 5 (step S6). That is, when the light source of the illumination device 4 emits light, the light emitted from this light source obliquely irradiates the fine protrusion 2 at an incident angle θ _L to illuminate the fine protrusion 2 . In this case, a part of the light emitted from the illumination device 4 is reflected on the surface of the base material 2A of the microprotrusion tool 2, as shown by L in FIG. 7, and is directed toward the inspection camera 5 as specularly reflected light L. The light is received by the inspection camera 5. Further, as shown by L' in FIG. 7, other light is reflected and diffused by the protrusion 2B of the fine protrusion 2 and is diffused as diffused light L' without being directed toward the inspection camera 5.

Therefore, in the image of the fine protrusion 2 taken by the inspection camera 5, the protrusion 2B is dark and other parts are bright due to the contrast difference (shade difference) between the specularly reflected light L and the diffused light L'. , the protrusion 2B is clearly observed (see FIG. 7(b)). The captured image is then subjected to image processing by the image processing device 6 shown in FIG. 1 (step S7), and based on the results, the appearance of the protrusion 2B is first inspected (step S8). In this visual inspection, bending of the protrusion 2B, adhesion of foreign matter, presence or absence of burrs on the periphery of the opening 2a, etc. are detected, and based on the detection results, the quality of the appearance of the protrusion 2B is determined. (Step S9). As a result of the determination, if the appearance of the protrusion 2B is good (that is, there is no bending or adhesion of foreign matter, and no burrs are generated around the periphery of the opening 2a) (Step S9: Yes), The contour (edge) of the protrusion 2B is extracted (step S10), and if there is any problem with the appearance (step S9: No), the controller 7 outputs an "NG signal" (step S14) and the inspection result is displayed. It is output (step S15).

On the other hand, in the extraction of the contour (edge) of the protrusion 2B (step S10), which is performed when the appearance inspection is passed (step S9: Yes), the contrast between the base material 2A of the microprotrusion tool 2 and the protrusion 2B is The difference (shade difference) is quantitatively analyzed in 256 gradations (black and white), and the contour (edge) of the protrusion 2B is extracted from the result. In this embodiment, a blue LED that emits short-wavelength blue light is used as the light source of the illumination device 4, so theoretically, the outline (edge) of the protrusion 2B of the microprotrusion 2 can be extracted more clearly. Here, an aperture 2a is formed in the protrusion 2B of the microprotrusion 2, and light passes through the aperture 2a, so even if the protrusion 2B is imaged darkly as described above, Since the aperture 2a is imaged brightly and white, the aperture 2a can be clearly extracted. In addition, in this embodiment, since the inspection camera 5 is installed obliquely, even if there are a plurality of protrusions 2B in the depth direction (horizontal direction in FIG. 7) (three rows in this embodiment), It is possible to reliably image these protrusions 2B without overlapping each other and clearly extract their contours (edges).

When the outline (edge) of the protrusion 2B of the fine protrusion 2 is extracted by the inspection camera 5 as described above, various dimensions of the protrusion 2B are calculated (step S11). Specifically, as shown in FIG. 4, the height H of the projection 2B, the tip diameter L, the aperture diameter (diameter) d and the aperture height h of the aperture 2a, etc. are calculated. For example, when the number of pixels in the height direction is 180 pixels, the pixel resolution is 3.8 μm/pixel, and the imaging angle θ _C of the inspection camera 5 is 45°, the height H of the protrusion 2B is determined by the following equation.

H=180pixel×3.8μm/pixel×1/cos45°=967μm
When the various dimensions of the protrusion 2B of the micro-protrusion tool 2 are calculated (step S11), it is determined whether the calculated various dimensions are OK (step S12), and the result of the determination is If it is OK (step S12: Yes), the controller 7 outputs an "OK signal" (step S13), and the result is output (step S15). On the other hand, if the result of the determination is NG (step S12: No), the controller 7 outputs an "NG signal" (step S14), and the result is output (step S15).

When the inspection of one fine protrusion tool 2 is completed through the above series of operations, the controller 7 sends a control signal to the drive device 3 shown in FIG. 1 to restart the belt conveyor 10 (step S16), and step S2 The operations from S15 to S15 are repeated, and the next fine protrusion tool 2 is inspected using the same procedure as above.

As described above, in the inspection method for the fine protrusion 2 carried out using the inspection apparatus 1 shown in FIG. However, since the microprotrusion tool 2 is inspected based on the captured image, it is possible that the microprotrusion tool 2 is made of an opaque resin that does not transmit light, or that an opaque member is present on the bottom side of the microprotrusion tool 2. Even in such a case, the effect that the fine protrusion tool 2 can be inspected with high precision can be obtained. In the first embodiment, the fine protrusion 2 is made of a translucent thermoplastic resin.

In the first embodiment, the belt conveyor 10 is driven intermittently to take an image of the fine protrusion 2, but the belt conveyor 10 is driven continuously without stopping to take an image of the fine protrusion 2. You can. By continuously driving the belt conveyor 10 and taking images of the fine protrusions 2, a plurality of fine protrusions 2 can be efficiently inspected.

[Second embodiment]
Next, a second embodiment of the present invention will be described.
FIG. 8 is a system configuration diagram of a microprotrusion inspection device according to the second embodiment of the present invention. In this figure, the same elements as those shown in FIG. 1 are given the same reference numerals, and the following , a further explanation of them will be omitted.

In the inspection apparatus 1' according to the second embodiment, a fine protrusion 2 is set on a stage 21 provided with a rotational positioning mechanism 20, and a required inspection is performed on the fine protrusion 2. In this case, the fine protrusions 2 are sequentially set on the stage 21 by the SCARA robot 30. Here, the SCARA robot 30 is provided with a plurality of chucks 31 that can move up and down and rotate. The fine protrusion tool 2 is gripped and set on the stage 21, and the set fine protrusion tool 2 is inspected. The operation of the rotational positioning mechanism 20 is controlled by a drive device 3 that is driven in response to a control signal from the controller 7, and the SCARA robot 30 also operates in response to a control signal from the controller 7.

The other configuration of the inspection apparatus 1' according to the second embodiment shown in FIG. 8 is the same as the configuration of the inspection apparatus 1 according to the first embodiment (see FIG. 1), and the inspection apparatus 1' is The inspection method for the fine protrusions 2 to be inspected is basically the same as the inspection method according to the first embodiment.

However, in the second embodiment, the fine protrusion tool 2 is rotated by the rotational positioning mechanism 20 in the imaging process, and the fine protrusion tool 2 is imaged multiple times by the inspection camera 5, and the image processing device 6 takes multiple images of the fine protrusion tool 2 in the image processing process. In the image processing and determination step, the controller 7 determines the quality of the fine protrusion 2 based on a plurality of images processed in the image processing step or a composite image of the images. Therefore, in the second embodiment, the fine protrusion tool 2 can be inspected three-dimensionally from multiple directions, making it possible to inspect with even higher precision. In addition, the second embodiment also provides the same effects as the first embodiment.

[Third embodiment]
Next, a third embodiment of the present invention will be described.
FIG. 9 is a diagram showing a system configuration of a microprotrusion inspection device according to the third embodiment of the present invention, and the configuration of the illustrated inspection device 1 is similar to that of the inspection device 1 according to the first embodiment (see FIG. 1). It is the same as that of Therefore, the explanation of the inspection device 1 according to the third embodiment will be omitted again, but in the third embodiment, the inspection device 1 is installed in an inspection area provided in the production line of the fine protrusion tool 2, and It is characterized in that the fine protrusion tool 2 is inspected in parallel during the manufacturing process of the tool 2.

Here, a method for manufacturing the fine protrusion 2 will be explained below based on FIG. 9 and FIGS. 10(a) to (e). Note that FIGS. 10(a) to 10(e) are cross-sectional views showing a method for manufacturing a fine protrusion tool in the order of steps.

In the manufacturing line of the fine projection tool 2 shown in FIG. 9, the base material 2A is moved from a roll 40 around which a sheet-like base material 2A made of thermoplastic resin as a raw material is wound to a pair of upper and lower rollers 41, 42 as shown in the arrows in the figure. The base material 2A is sent out intermittently in the direction of the arrow shown in the figure while maintaining a horizontal state.

In the inspection area (same as the molding area), the upper and lower surfaces of the stopped base material 2A are held by the rectangular frame-shaped pressing member 43, thereby preventing bending deformation of the base material 2A. Further, in this inspection area (molding area), a molding device 50 is disposed below the base material 2A, and on a horizontal stage 51 of this molding device 50, a fine protrusion 2 to be molded is placed. A plurality of (3×3=9 in the illustrated example) needle-shaped molds 52 (see FIGS. 10(a) to 10(d)) having the same external shape (conical shape) as the protrusion 2B are neatly erected. It is set up.

In manufacturing the fine projection tool 2, as shown in FIG. 10(a), the mold 52 is ultrasonically vibrated by an ultrasonic device (not shown). Then, the mold 52 generates heat due to the ultrasonic vibration. Next, the actuator 53 provided in the molding device 50 shown in FIG. 9 is driven to move the stage 51 upward, and as shown in FIG. 10(b), the heated mold 52 is placed on the base material 2A. Insert from the bottom side. As a result, a plurality of hollow conical protrusions 2B (only one is shown in FIG. 10) are erected on the upper surface of the base material 2A.

When a plurality of (nine) protrusions 2B are erected on the upper surface of the base material 2A as described above, the ultrasonic vibration of the mold 52 by the ultrasonic device is stopped, as shown in FIG. 10(c). , cold air is blown onto the protrusion 2B from a cooling device 60 such as a blower shown in FIG. Then, the heated mold 52 and the protrusion 2B are cooled by the cold air, and the protrusion 2B, which had been softened by the heating, is solidified. Thereafter, by driving the actuator 53 of the molding device 50 shown in FIG. 9 to lower the stage 51 and pulling out the mold 52 as shown in FIG. The projections 2B are arranged upright in an orderly manner.

Finally, the laser device 70 shown in FIG. 9 is activated, and the laser emitted from the laser device 70 is sequentially irradiated obliquely to each projection 2B, so that each projection 2B is An opening 2a is diagonally formed in the portion 2B, and the fine protrusion 2 as a product is manufactured. Thereafter, by repeating the above operations while intermittently feeding out the base material 2A from the roll 40, the fine protrusion tool 2 as a product is continuously manufactured.

By the way, in this embodiment, the inspection device 1 installed in the inspection area (molding area) of the manufacturing line for the fine protrusions 2 inspects the fine protrusions 2 in parallel with the manufacturing process of the fine protrusions 2. will be carried out. Here, the inspection of the fine protrusions 2 by the inspection device 1 is performed by the same method as in the first embodiment, but in the third embodiment, the inspection is performed before the drilling operation by the laser device 70, and the calculation is performed by this inspection. The position of the aperture 2a of each protrusion 2B of the fine protrusion 2 that has been drilled (the position of the aperture 2a to be drilled) is transmitted to the controller 7.

Then, the controller 7 controls the laser irradiation position by the laser device 70 with high precision. For this reason, each projection 2B of the fine protrusion 2 is accurately provided with an opening 2a by the laser emitted from the laser device 70, and high quality of the fine protrusion 2 is ensured.

As described above, in the third embodiment, the inspection of the micro-protrusion tool 2 is performed in parallel during the manufacturing process of the micro-protrusion tool 2, so that the production and inspection of the micro-protrusion tool 2 can be carried out in a short time and efficiently. It can be carried out. In addition, the inspection results for the microprotrusion tool 2 are fed back to the controller 7, and based on the results, the controller 7 controls the laser irradiation position to form the opening 2a in each protrusion 2B of the microprotrusion tool 2 with high precision. Since the holes are formed, it is possible to obtain the effect that the quality of the fine protrusion tool 2, which is a product, is improved. It goes without saying that other effects similar to those of the first embodiment can also be obtained in the third embodiment.

Although the present invention has been described above in particular to the inspection of transparent or semi-transparent fine protrusions having light-transmitting properties, the present invention also applies to inspections of transparent or semi-transparent microprotrusions having light-transmitting properties. The present invention can be similarly applied to the inspection of minute protrusions. Furthermore, the present invention is similarly applicable to microprotrusions used in fields other than the medical and cosmetic fields.

In addition, the application of the present invention is not limited to the embodiments described above, and various modifications can be made within the scope of the technical ideas described in the claims, specification, and drawings. Of course.

1, 1' Inspection device 2 Fine protrusion tool 2A Base material of fine protrusion tool 2B Projection part of fine protrusion part 2a Opening part of fine protrusion part 3 Drive device 4 Illumination device (illumination means)
5 Inspection camera (imaging means)
6 Image processing device 7 Controller (control means)
θ _C imaging angle θ _L incident angle of light

Claims (5)

A method for inspecting a microprotrusion tool having at least one microneedle protruding from the surface of a base material, the method comprising:
The microneedle is made of a translucent material, and an opening is provided through a part of the side surface of the microneedle ,
On the side of the base material surface on which the microneedles protrude as a boundary, light from the microprotrusion tool is irradiated onto the base material surface in an oblique direction from one side of the base material surface with the microneedles as a boundary. an imaging step of imaging the surface of the base material together with the microneedles by receiving reflected light in an oblique direction from the other side;
an image processing step of processing the image captured in the imaging step;
a determination step of determining the quality of the microneedle based on the result of image processing in the image processing step;
has
In the imaging step,
Imaging using an illumination means and an imaging means arranged opposite to each other with the microneedle in between,
The incident angle θ _L of light onto the substrate surface in the imaging step is set to an angle at which the difference in contrast between the substrate surface of the microprotrusion and the microneedle is maximized,
The imaging angle θ _C with respect to the substrate surface in the imaging step is set to 50° or less, and the difference |θ _C −θ _L | between the imaging angle θ _C and the incident angle θ _L | is set to 5° or less. death,
Of the light emitted from the illumination means and reflected by the microprotrusions , the reflected light reflected by the surface of the base material is received by the imaging means, and the reflected light reflected by the microneedles is directed toward the imaging means. and the light passing through the aperture located on the side of the microneedle on the imaging means side is also received by the imaging means,
In the determination step, the microprotrusion tool inspection method also includes inspecting the open state of the aperture. In the imaging step, the fine protrusion tool is rotated to perform imaging multiple times, in the image processing step, a plurality of images are processed, and in the determination step, the plurality of images processed in the image processing step or the plurality of images are processed in the image processing step. The method for inspecting a microprotrusion device according to claim 1, wherein the quality of the microneedle is determined based on a combined image. The method for inspecting a microprotrusion tool according to claim 1 or 2, wherein the light irradiated onto the surface of the base material is blue light. A method for manufacturing a microprotrusion tool in which at least one microneedle is protruded on the surface of a base material, the method comprising:
A step of performing the fine protrusion inspection method according to any one of claims 1 to 3 in parallel during the manufacturing process of the fine protrusion ,
a drilling step of forming an opening, which is a through hole, on the side of the microneedle of the microprotrusion device ;
In the drilling step, the drilling position of the hole is controlled based on the inspection result of the micro protrusion tool according to the method for inspecting the micro protrusion tool according to any one of claims 1 to 3. Production method. 5. The method for manufacturing a microprotrusion tool according to claim 4, wherein in the perforation step, the aperture is formed by a laser emitted from a laser device.

Images