JP7287597B2 - Mems素子 - Google Patents
Mems素子 Download PDFInfo
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- JP7287597B2 JP7287597B2 JP2019160902A JP2019160902A JP7287597B2 JP 7287597 B2 JP7287597 B2 JP 7287597B2 JP 2019160902 A JP2019160902 A JP 2019160902A JP 2019160902 A JP2019160902 A JP 2019160902A JP 7287597 B2 JP7287597 B2 JP 7287597B2
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- electrode film
- movable electrode
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- fixed electrode
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- 239000000758 substrate Substances 0.000 claims description 16
- 125000006850 spacer group Chemical group 0.000 claims description 7
- 230000008602 contraction Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Description
Claims (1)
- バックチャンバーを備えたハンドル基板上に、固定電極を含むバックプレートと可動電極膜とを対向配置したMEMS素子において、
前記固定電極は、スペーサーを介して前記ハンドル基板上に配置し、
前記可動電極膜は、支持部材を介して前記バックプレートに支持され、
前記支持部材は、前記可動電極膜の落下を防止する第一のストッパー部と、前記可動電極膜と前記固定電極との接触を防ぐ第二のストッパー部を含む中継部と、該中継部を連結し前記固定電極の外周に沿って前記バックプレートに接合する連結部と、前記第一のストッパー部と前記第二のストッパー部の間に備えた支持部とからなり、前記可動電極膜に形成した孔内を前記支持部が貫通し、前記孔の内壁と前記支持部の間、前記可動電極膜と第一のストッパー部の間および前記可動電極膜と第二のストッパー部の間に隙間を設けることで前記可動電極膜と前記支持部材が接触により接続していることを特徴とするMEMS素子。
Priority Applications (1)
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JP2019160902A JP7287597B2 (ja) | 2019-09-04 | 2019-09-04 | Mems素子 |
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JP2019160902A JP7287597B2 (ja) | 2019-09-04 | 2019-09-04 | Mems素子 |
Publications (2)
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JP2021040255A JP2021040255A (ja) | 2021-03-11 |
JP7287597B2 true JP7287597B2 (ja) | 2023-06-06 |
Family
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Family Applications (1)
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JP2019160902A Active JP7287597B2 (ja) | 2019-09-04 | 2019-09-04 | Mems素子 |
Country Status (1)
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JP (1) | JP7287597B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2024207210A1 (zh) * | 2023-04-04 | 2024-10-10 | 瑞声声学科技(深圳)有限公司 | Mems麦克风 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008054307A (ja) | 2006-07-27 | 2008-03-06 | Yamaha Corp | シリコンマイクロホン |
JP2014176035A (ja) | 2013-03-12 | 2014-09-22 | Omron Corp | 静電容量型センサ、音響センサ及びマイクロフォン |
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2019
- 2019-09-04 JP JP2019160902A patent/JP7287597B2/ja active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008054307A (ja) | 2006-07-27 | 2008-03-06 | Yamaha Corp | シリコンマイクロホン |
JP2014176035A (ja) | 2013-03-12 | 2014-09-22 | Omron Corp | 静電容量型センサ、音響センサ及びマイクロフォン |
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JP2021040255A (ja) | 2021-03-11 |
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