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JP7276263B2 - Surface inspection device - Google Patents

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JP7276263B2
JP7276263B2 JP2020112517A JP2020112517A JP7276263B2 JP 7276263 B2 JP7276263 B2 JP 7276263B2 JP 2020112517 A JP2020112517 A JP 2020112517A JP 2020112517 A JP2020112517 A JP 2020112517A JP 7276263 B2 JP7276263 B2 JP 7276263B2
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inspected
rolling
light projecting
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JP2022011396A (en
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智将 岡山
紘明 大野
和也 橋本
和弥 林
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JFE Steel Corp
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Description

本発明は、熱延鋼板の表面欠陥を検出する装置に関するものであり、特に圧延ロールに疵が入ることによって発生する鋼板の凸状欠陥を検出するための表面検査装置に関するものである。 TECHNICAL FIELD The present invention relates to an apparatus for detecting surface defects in a hot-rolled steel sheet, and more particularly to a surface inspection apparatus for detecting convex defects in a steel sheet caused by flaws in rolling rolls.

熱延鋼板の圧延プロセスにおいてロール疵が存在し、凹凸の種類大小によって欠陥の認識率が変化する。中でも凸状欠陥で程度が軽いものがもっとも検出率が悪く、過去にも最適な投光配列を検討していた。例えば、特許文献1では、図8に示す設備配置で、図9に示すように2つ以上の照明によって投光角度を板幅方向斜めに照射することで欠陥の検出率が上昇すると報告がある。 Roll flaws exist in the rolling process of hot-rolled steel sheets, and the recognition rate of the flaws changes depending on the type and size of the unevenness. Among them, convex defects with a light degree have the lowest detection rate. For example, in Patent Document 1, it is reported that the defect detection rate increases by irradiating obliquely in the plate width direction with two or more lights as shown in FIG. 9 in the equipment arrangement shown in FIG. .

このロール疵は圧延ロール表面の欠陥によって圧延中の鋼板にピッチ性の疵が転写する製品不良であり、疵が発生した場合は圧延ロールを交換することで次材への転写を防ぐ必要がある。 This roll flaw is a product defect in which a pitch-like flaw is transferred to the steel sheet being rolled due to a defect on the surface of the rolling roll. If a flaw occurs, it is necessary to prevent transfer to the next material by replacing the rolling roll. .

したがって欠陥の認識率を向上させることはロール交換を即時に行うことができ、製品の欠陥発生を最小限に抑えることと同時に、歩留まりを向上させる効果があり非常に重要である。 Therefore, it is very important to improve the defect recognition rate so that the roll can be replaced immediately, and the occurrence of product defects can be minimized, and at the same time, the yield can be improved.

また特許文献2で開示された装置では図10に示すように被検査体の鋼板1と投光部のストロボ照明2と受光部のエリアカメラセンサ3を正反射の位置に配置する光学系が提案されている。 In the apparatus disclosed in Patent Document 2, as shown in FIG. 10, an optical system is proposed in which the steel plate 1 of the object to be inspected, the strobe illumination 2 of the light-projecting part, and the area camera sensor 3 of the light-receiving part are arranged at the positions of specular reflection. It is

特開2006-177789号公報JP 2006-177789 A 特開2001-111759号公報Japanese Patent Application Laid-Open No. 2001-111759

しかしながら、投光部が拡散照射を有する検査装置の場合、被検査体の板幅方向に対応する受光部ごとの検出率は図1(a)に示す様に均一ではなく、欠陥位置と投光部と受光部が一直線上に並ぶ位置、つまり正反射の位置(たとえば、図1(a)の6aと8b、6bと8d、6cと8f)で、凸状欠陥の検出率が低下することが判明している。 However, in the case of an inspection apparatus in which the light projecting part has diffuse irradiation, the detection rate for each light receiving part corresponding to the plate width direction of the object to be inspected is not uniform as shown in FIG. The convex defect detection rate may decrease at positions where the light-receiving part and the light-receiving part are aligned, that is, positions of specular reflection (for example, 6a and 8b, 6b and 8d, and 6c and 8f in FIG. 1(a)). It turns out.

また特許文献1については光学系の投光角度は20°が最適であると述べているが、図8に示すピンチロール4の下流側に設置することを想定した評価である。さらに、ピンチロール上流側の評価の際の幅方向の投光パターンは0°または20°の2種類のみの限定的であることに加え、各幅方向の信号強度には言及していない。 Moreover, although Patent Document 1 states that the optimum light projection angle of the optical system is 20°, this evaluation is based on the assumption that the optical system is installed downstream of the pinch roll 4 shown in FIG. 8 . Furthermore, the light projection pattern in the width direction in the evaluation of the pinch roll upstream side is limited to only two types, 0° and 20°, and the signal intensity in each width direction is not mentioned.

また投光部と被検査体までの距離を2000mmとして、投光部の光の拡散性をピーク値の1/2値と定義した場合、投光部は被検査帯の幅方向に対し25°以上の拡散性をもっている。そのことから複数の投光部を有する設備に対しては,1つの投光部による角度評価だけではなく、投光部の幅方向への斜光角度と信号SとノイズNの比(以下、S/N比と呼ぶ)についての関係を幅位置ごとに明らかにする必要がある。 When the distance between the light projecting part and the object to be inspected is 2000 mm and the diffusivity of the light from the light projecting part is defined as 1/2 of the peak value, the light projecting part is positioned at an angle of 25° to the width direction of the inspection band. It has more diffusibility. Therefore, for equipment having a plurality of light projection units, not only the angle evaluation by one light projection unit, but also the oblique light angle in the width direction of the light projection unit and the ratio of the signal S and the noise N (hereinafter referred to as S /N ratio) must be clarified for each width position.

特許文献2については投光部と受光部は正反射位置の関係で、投光による正反射成分を受光部が検出することで欠陥検出性を向上することを目的としており、凸状欠陥を検出するにあたって検出率は十分ではなかった。 Patent document 2 aims to improve the defect detectability by detecting the specular reflection component of the light from the light emitting unit and the light receiving unit, based on the relationship between the specular reflection positions of the light emitting unit and the light receiving unit. The detection rate was not sufficient for this purpose.

本発明は、上記の事情に鑑みてなされたものであって、熱延鋼板の表面欠陥、特に、圧延ロールに疵が入ることによって発生する鋼板の凸状欠陥を均一に検出する装置を提供することを目的とする。 SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and provides an apparatus for uniformly detecting surface defects of hot-rolled steel sheets, particularly convex defects of steel sheets caused by scratches on rolling rolls. The purpose is to

発明者らは、凸状欠陥の表面性状から最適な投光角度を探求し,投光部による正反射成分によって受光部は検出率を低下させることから遮光板を設置することで,圧延プロセスにおける被検査体の凸状欠陥を受光部の位置によらず、板幅方向に均一に検出することができることを見出した。 The inventors searched for the optimum light projection angle from the surface properties of convex defects, and since the specular reflection component from the light projection part reduces the detection rate of the light reception part, by installing a light shielding plate, it is possible to improve the rolling process. It has been found that convex defects on an object to be inspected can be uniformly detected in the plate width direction regardless of the position of the light-receiving part.

上述した課題を解決し、目的を達成するために、本発明にかかる第1の表面検査装置は、被検査体の検査対象面上に光を照射する投光部と反射光を受光する受光部を備え、該投光部および受光部を、圧延ロールの後段で、かつ被検査体を圧下または挟持するロールの前段に設置した表面検査装置であって、前記受光部の光軸は、前記被検査体の圧延方向に平行で、かつ、前記検査対象面に垂直な面内にあるように構成され、前記投光部は前記被検査体の圧延方向に平行で、かつ、前記検査対象面に垂直な面内の成分光を遮断する遮光板を設置したことを特徴とする。 In order to solve the above-described problems and achieve the object, a first surface inspection apparatus according to the present invention includes a light projecting unit that irradiates light onto an inspection target surface of an object to be inspected and a light receiving unit that receives reflected light. , wherein the light emitting unit and the light receiving unit are installed behind the rolling rolls and before the rolls that compress or sandwich the object to be inspected, wherein the optical axis of the light receiving unit is the object parallel to the rolling direction of the object to be inspected and perpendicular to the surface to be inspected; It is characterized by installing a light shielding plate for blocking component light in a vertical plane.

また、本発明にかかる第2の表面検査装置は、被検査体の検査対象面上に光を照射する投光部と反射光を受光する受光部を備え、該投光部および受光部を、圧延ロールの後段で、かつ被検査体を圧下または挟持するロールの前段に設置した表面検査装置であって、前記投光部と受光部の光軸は互いに正反射の関係にはなく、前記受光部の光軸は前記被検査体の圧延方向に平行で、かつ、前記検査対象面に垂直な面内で傾斜し、前記投光部は後方照射にて配置されていることを特徴とする。 A second surface inspection apparatus according to the present invention comprises a light projecting section for irradiating light onto an inspection target surface of an object to be inspected and a light receiving section for receiving reflected light, the light projecting section and light receiving section comprising: A surface inspection apparatus installed downstream of rolling rolls and upstream of rolls for compressing or nipping an object to be inspected, wherein the optical axes of the light projecting part and the light receiving part are not in a regular reflection relationship with each other, and the light receiving part The optical axis of the part is parallel to the rolling direction of the object to be inspected and is inclined in a plane perpendicular to the surface to be inspected, and the light projecting part is arranged for rear irradiation.

また、本発明にかかる表面検査装置は、前記投光部が幅方向断面視で前記検査対象面への垂線に対し25~45°の方向から光を照射すること、がより好ましい解決手段になり得るものと考えられる。 Further, in the surface inspection apparatus according to the present invention, it is a more preferable solution that the light projecting unit irradiates light from a direction of 25 to 45 degrees with respect to a perpendicular line to the surface to be inspected in cross-sectional view in the width direction. considered to be obtained.

本発明によれば、熱延鋼板の凸状欠陥を軽度なものまで板幅方向に均一に精度よく検出することができる。 ADVANTAGE OF THE INVENTION According to this invention, even a slight convex defect of a hot-rolled steel plate can be uniformly and accurately detected in the width direction of the steel plate.

(a)従来の表面検査装置を用いて、凸部欠陥を有する被検査体を検査したときの検出率を幅方向で比較したグラフであり、(b)投光部と受光部との位置関係を示す概念図である。(a) It is a graph comparing the detection rate in the width direction when inspecting an object having a convex defect using a conventional surface inspection apparatus, and (b) the positional relationship between the light emitting unit and the light receiving unit. It is a conceptual diagram showing 凸状欠陥の一例を示す拡大顕微鏡写真である。It is an enlarged micrograph showing an example of a convex defect. 投光方向を変えて凸状欠陥を観察した例であって、(a1)は圧延方向に沿って投光部を配置した概念図を示し、(a2)はその観察写真であり、(b1)は圧延方向に直交する方向に投光部を配置した概念図を示し、(b2)はその観察写真である。An example of observing a convex defect by changing the light projection direction, (a1) shows a conceptual diagram in which the light projection part is arranged along the rolling direction, (a2) is an observation photograph thereof, and (b1) shows a conceptual diagram in which a light projecting part is arranged in a direction orthogonal to the rolling direction, and (b2) is an observation photograph thereof. 光源の傾斜角θが凸状欠陥の検出に与える影響を確認するための装置の概念図であり、(a)は斜視図を示し、(b)は、幅方向断面視(A-A視)での概念図を示す。FIG. 2 is a conceptual diagram of an apparatus for confirming the influence of the tilt angle θ of the light source on the detection of convex defects, (a) showing a perspective view, and (b) a cross-sectional view in the width direction (AA view). shows a conceptual diagram of 光源の傾斜角θが凸状欠陥の検出に与える影響を示すグラフである。4 is a graph showing the influence of the tilt angle θ of the light source on the detection of convex defects. 複数の投光部を有する投光パターンを示した図である。FIG. 4 is a diagram showing a light projection pattern having a plurality of light projection parts; 図6の各投光パターンで検出した結果を示すグラフである。FIG. 7 is a graph showing results detected with each light projection pattern in FIG. 6. FIG. 従来の表面検査装置を設置した設備配置を示す側面模式図である。It is a side schematic diagram which shows the equipment arrangement which installed the conventional surface inspection apparatus. 従来の表面検査装置の投光角度を示す模式図である。It is a schematic diagram which shows the projection angle of the conventional surface inspection apparatus. 従来の表面検査装置の被検査体、投光部および受光部の位置関係を示す模式図である。It is a schematic diagram which shows the positional relationship of the to-be-tested object of the conventional surface inspection apparatus, a light-projection part, and a light-receiving part.

発明者らは,凸状欠陥を検出するにあたり欠陥部の表面観察を行った。なお欠陥サンプルの選定に至っては既存の表面検査装置で検出不可能なものを使用し、サンプルカットに関してはスキンパス工程において未圧下の状態で通板させカットを実施した。 The inventors observed the surface of the defect portion to detect the convex defect. Defective samples were selected that could not be detected by existing surface inspection equipment, and the samples were cut by passing them through in the skin-pass process in an unpressurized state.

その結果、図2に示すように凸状欠陥部は圧延方向に沿って微小な凹凸欠陥の集合体であることが判明した。図3には、投光方向を圧延方向Fに沿う方向(a1)および直交する方向(b1)とした場合の概念図と、それぞれの受光部のカメラ撮影結果(a2、b2)を示す。図3から明らかなように、圧延方向に対し直交する方向の斜光が有効であることが判明した。上記知見は特許文献1にも記載されているが、この微小欠陥は検査装置より下流の図8中のピンチロール4によって凸状欠陥部を局所的に加圧することによってピンチロール表面の模様が転写し微細な凹凸が発生していると位置付けられていた。 As a result, as shown in FIG. 2, it was found that the convex defect portion was an aggregate of fine uneven defects along the rolling direction. FIG. 3 shows a conceptual diagram when the light projection direction is set along the rolling direction F (a1) and in a direction (b1) perpendicular to the rolling direction F, and camera imaging results (a2, b2) of the respective light receiving units. As is clear from FIG. 3, it was found that oblique light in the direction perpendicular to the rolling direction is effective. The above knowledge is also described in Patent Document 1, but this minute defect is obtained by locally pressing the convex defect portion with a pinch roll 4 in FIG. However, it was positioned as the occurrence of fine unevenness.

しかしながら、欠陥部の凸量10μm程度の欠陥に対し、熱延鋼板自体は20μm以上の凸状クラウンを有しており、ピンチロールのロール中心部自体も500μmの凸状クラウンを有している。上記の事実から熱延鋼板の幅中央部はエッジに比べ520μm以上加圧されていると考えられる。したがって、熱延鋼板の幅中央部はエッジ部に比べ表層の粗さが欠陥部のように微細に変化することはない。また、熱延鋼板自体に厚み変動があり、ピンチロール荷重が3~5tf程度変動した場合においても長手方向の表面性状態は変化しない。つまり、ピンチロールによって微細な凹凸疵が発生することは考えにくいことから、欠陥部の微小な凹凸は図8中の仕上圧延機1のワークロールによって既に発生していると考えられる。 However, the hot-rolled steel sheet itself has a convex crown of 20 μm or more, and the roll center itself of the pinch roll also has a convex crown of 500 μm for a defect having a convex amount of about 10 μm. From the above facts, it is considered that the central portion of the width of the hot-rolled steel sheet is pressed by 520 μm or more compared to the edges. Therefore, the width center of the hot-rolled steel sheet does not show minute changes in the roughness of the surface layer as compared with the edges. In addition, the thickness of the hot-rolled steel sheet itself fluctuates, and even if the pinch roll load fluctuates by about 3 to 5 tf, the surface properties in the longitudinal direction do not change. In other words, since it is difficult to imagine that pinch rolls will cause fine irregularities, it is considered that the fine irregularities in the defective portion have already been produced by the work rolls of the finishing mill 1 in FIG.

上記の結果・考察から凸状欠陥部は幅方向斜光によって拡散反射をおこし明るい側へS/N比が向上する(図3(b2))と考えた。また、受光部は拡散反射光より強い正反射光を受けると欠陥部は非欠陥部と紛れてしまう(図3(a2))ことが分かる。このことは図1に示すように各受光部8a~gと光源6a~cの位置関係から実際の欠陥の検出率を見比べると明らかで、欠陥検出率の低い受光部8b、8d、8fは欠陥位置・投光部・受光部が一直線上に並ぶ状況が一致している。つまり投光部が持つ光の拡散成分によって一部の受光部は正反射光を受光し欠陥検出率を下げていることを示している。 From the above results and considerations, it was considered that the convex defect causes diffuse reflection due to oblique light in the width direction, and the S/N ratio improves toward the bright side (FIG. 3(b2)). Further, it can be seen that when the light-receiving portion receives specularly reflected light that is stronger than diffusely reflected light, the defective portion is mixed with the non-defective portion (FIG. 3(a2)). This is clear when comparing the actual defect detection rate from the positional relationship between the light receiving sections 8a to 8g and the light sources 6a to 6c as shown in FIG. The situation where the position, the light emitting part, and the light receiving part are aligned on a straight line is consistent. In other words, it indicates that part of the light-receiving units receive the specularly reflected light due to the diffusion component of the light possessed by the light-projecting unit, thereby lowering the defect detection rate.

以上のことから最適な幅方向斜光角度を明らかにするために、確認実験を行った。
まず、検査装置をピンチロール4より上流に設置することを想定し、ピンチロール4下流側で発生する微細な凹凸部内の平坦部は計測しないこととした。図4(a)に検査装置3の配置を斜視概念図で示す。図4(b)には、幅方向(W)断面視(A-A視)での各装置の配置を示す。この装置では、単一投光によって欠陥を照射し、その投光部6の光軸62を検査対象面への垂線に対し傾斜させた場合のS/N比を評価した。図5はこの結果を示すグラフであり、幅方向(W)断面視で検査対象面への垂線に対する投光部6の光軸62のなす角度(光源角度)θと凸状欠陥部のS/N比の関係をグラフで示す。試験条件は同一条件下かつ、別のサンプルによる結果をサンプルA(○)およびサンプルB(△)として示す。その結果、光源角度θが25~45°の範囲で凸状欠陥部のS/N比は向上することが確認できた。
Based on the above, confirmation experiments were conducted in order to clarify the optimum oblique light angle in the width direction.
First, assuming that the inspection device is installed upstream of the pinch roll 4, the flat portion in the minute irregularities generated downstream of the pinch roll 4 is not measured. FIG. 4(a) shows a schematic perspective view of the arrangement of the inspection device 3. As shown in FIG. FIG. 4(b) shows the arrangement of each device in cross-sectional view (A--A view) in the width direction (W). In this apparatus, the defect was irradiated with a single light projection, and the S/N ratio was evaluated when the optical axis 62 of the light projection unit 6 was tilted with respect to the normal to the surface to be inspected. FIG. 5 is a graph showing the results, showing the angle (light source angle) .theta. The N ratio relationship is shown graphically. The results of different samples under the same test conditions are shown as Sample A (○) and Sample B (Δ). As a result, it was confirmed that the S/N ratio of the convex defect was improved when the light source angle θ was in the range of 25 to 45°.

次に、図6示すように、2つ以上の投光部6を有する検査装置パターンを複数作成し、図7に既存技術の光学系との凸状欠陥部のS/N比較を行った。また図9の表記に関して、各投光部6の個数は()内の数値の数であり、カンマ[,]で区切ることとする。以下、ストリップ進行方向に対し左側をオペレーションサイド・右側をドライブサイドと定義し、()内の左端の数字をオペレーションサイドと、右端の数字をドライブサイドとする。また、投光部の光軸62が、幅方向(W)断面で検査対象面への垂線となす角度θ[°]を数値で記載し、オペレーションサイド側へ向かう照射を負[-]表示とし、ドライブサイド側に向かう照射を正[+]と表記する。次に、その例として(+25, ,-25)の表記は2つの投光部を有していることを表す。そして、オペレーションサイドに位置する投光部6の光軸62は幅方向(W)断面で検査対象面への垂線に対し25°傾斜させてドライブサイド側に向かって照射している。一方、ドライブサイドに位置する投光部6の光軸62は幅方向(W)断面で検査対象面への垂線に対し、25°傾斜させてオペレーションサイド側に向かって照射している。そして、受光部8は、オペレーションサイド側から、8a、8b、8c、8d、8e、8f、8gと置く。また、投光部6の光軸62は圧延方向(F)断面で検査対象面に垂直な軸に対し10°傾けており、受光部8の光軸81は圧延方向(F)断面で検査対象面に垂直な軸に対し3°傾けている。投光部6および受光部8とも、光軸62、81は仕上圧延機1側へ傾斜させている。また、投光部6から被検査体9までの距離は3100mmと固定した。 Next, as shown in FIG. 6, a plurality of inspection apparatus patterns having two or more light projection units 6 were prepared, and the S/N comparison of the convex defect portion with the optical system of the existing technology was performed as shown in FIG. Regarding the notation of FIG. 9, the number of each light projecting unit 6 is the number of numerical values in parentheses, and is separated by commas [,]. Hereinafter, the left side with respect to the strip traveling direction is defined as the operation side, and the right side as the drive side, and the leftmost number in parentheses is the operation side, and the rightmost number is the drive side. In addition, the angle θ [°] formed by the optical axis 62 of the light projecting part and the perpendicular to the surface to be inspected in the cross section in the width direction (W) is indicated numerically, and the irradiation toward the operation side is indicated as a negative [-]. , the irradiation toward the drive side is denoted as positive [+]. Next, as an example, the notation of (+25, , -25) indicates that there are two light projection units. The optical axis 62 of the light projecting unit 6 located on the operation side is tilted at 25° with respect to the perpendicular line to the surface to be inspected in the cross section in the width direction (W) and irradiates toward the drive side. On the other hand, the optical axis 62 of the light projecting unit 6 located on the drive side is tilted at 25° with respect to the perpendicular line to the surface to be inspected in the cross section in the width direction (W) and irradiates toward the operation side. The light receiving portions 8 are arranged as 8a, 8b, 8c, 8d, 8e, 8f, and 8g from the operation side. The optical axis 62 of the light projecting part 6 is inclined by 10° with respect to the axis perpendicular to the surface to be inspected in the cross section in the rolling direction (F), and the optical axis 81 of the light receiving part 8 is in the cross section in the rolling direction (F) to be inspected. It is tilted by 3° with respect to the axis perpendicular to the surface. The optical axes 62 and 81 of both the light projecting section 6 and the light receiving section 8 are inclined toward the finishing mill 1 side. Also, the distance from the light projecting unit 6 to the inspection object 9 was fixed at 3100 mm.

図7中0(○)は図1(b)に示す投光部6のパターン(-25,0,+25)である従来技術に対する結果であり、投光部6と受光部8と被検査体9が一直線上(正反射位置)にある場合においてS/N比が低下することが判明した。これは前述した正反射成分が強い場合において、凸状欠陥部が熱延鋼板の地合いに紛れる顕微鏡観察結果(図3(a2))と一致している。図1(a)における実際の検出率と傾向が一致することを確認した。 In FIG. 7, 0 (○) is the result for the prior art, which is the pattern (−25, 0, +25) of the light projecting unit 6 shown in FIG. It has been found that the S/N ratio decreases when 9 is on a straight line (specular reflection position). This agrees with the microscopic observation result (FIG. 3(a2)) in which the convex defect part is mixed with the texture of the hot-rolled steel sheet when the specular reflection component is strong. It was confirmed that the actual detection rate and the trend in FIG. 1(a) coincided.

図6(a)~(e)の投光パターンを上記0の投光パターンと比較したものを図7<0-a>~<0-e>に示す。図6(a)の投光パターンは3つの投光部から2つの投光部へと変更することで、センター部の正反射成分が減少し受光部8dの検出能力は向上したものの、正反射成分を受ける受光部8bと8fの検出能力は低下したままであった。図6(b)の投光パターンは投光部6を更に幅方向に傾けることで,各受光部8の正反射成分の強度が低下し、S/N比は均一に向上した。しかしながら、受光部8b~fの計測範囲において一部正反射成分が入ってしまうことを確認した。図6(c)の投光パターンは投光部6に遮光板10を設置したことでS/N比を低下させることなく正反射成分を除去することができた。図6(d)の投光パターンは光量を確保するために4つの投光部6を有する検査パターンであり、投光部6同士が干渉し光量上昇には直接つながらないことも判明した。3つの投光部から4つの投光部にした際のシステム改造費が高額であることから現実的ではなかった。図6(e)は投光部を1つ幅方向に大きく移動させた検査パターンであり、S/N比が非対称な傾向となり実運用において向かないものとなった、加えて、治具と検査室内の基礎工事費が膨らむことから図6(d)および(e)の検討を進めることを断念した。 7 <0-a> to <0-e> show a comparison of the projection patterns of FIGS. 6(a) to (e) with the projection pattern of 0. FIG. By changing the light projection pattern of FIG. 6(a) from three light projection parts to two light projection parts, the regular reflection component at the center part is reduced and the detection capability of the light receiving part 8d is improved. The detection capability of the receivers 8b and 8f receiving the components remained degraded. In the projection pattern of FIG. 6(b), by tilting the light projecting portion 6 further in the width direction, the intensity of the regular reflection component of each light receiving portion 8 is reduced, and the S/N ratio is uniformly improved. However, it was confirmed that some regular reflection components were included in the measurement range of the light receiving units 8b to 8f. In the light projection pattern of FIG. 6(c), by installing the light shielding plate 10 in the light projection part 6, the specular reflection component could be removed without lowering the S/N ratio. The light projection pattern of FIG. 6D is an inspection pattern having four light projection parts 6 to ensure the amount of light. It was not realistic because the cost of system modification when changing from three light projection units to four light projection units was high. FIG. 6(e) shows an inspection pattern in which the light-projecting part is largely moved by one in the width direction. Since the cost of indoor foundation work would increase, we abandoned the consideration of FIGS. 6(d) and 6(e).

なお、本実施形態における表面検査装置は、その原理から、検出すべきロール疵の原因となる圧延ロールの後段であって、ロール疵が発生した被検査体(たとえば、熱延鋼帯)を圧下または挟持するロールの前段に設置することが好ましい。 From the principle, the surface inspection apparatus in the present embodiment reduces the inspection object (for example, hot-rolled steel strip) in which the roll flaws are generated in the rear stage of the rolling rolls that cause the roll flaws to be detected. Alternatively, it is preferably installed in the preceding stage of the sandwiching rolls.

1 仕上圧延機
2 冷却帯
3 検出装置
4 ピンチロール
5 ダウンコイラ
6 投光部
6a、6b、6c 投光部
61 光束
62 投光部の光軸(投光方向)
7 金属帯(被検査体)
8 受光部
8a、8b、8c、8d、8e、8f、8g 受光部
81 受光部の光軸
9 サンプル片(被検査体)
10 遮光板
D 凸状欠陥部
DD 板同士の擦れによる欠陥部
S 非欠陥部
F 圧延方向
W 幅方向
1 Finishing rolling mill 2 Cooling band 3 Detecting device 4 Pinch roll 5 Down coiler 6 Light projection parts 6a, 6b, 6c Light projection part 61 Light flux 62 Optical axis of light projection part (light projection direction)
7 Metal band (object to be inspected)
8 light-receiving parts 8a, 8b, 8c, 8d, 8e, 8f, 8g light-receiving part 81 optical axis of light-receiving part 9 sample piece (object to be inspected)
10 Light shielding plate D Convex defect part DD Defect part S caused by rubbing between plates Non-defect part F Rolling direction W Width direction

Claims (3)

被検査体の検査対象面上に光を照射する投光部と反射光を受光する受光部を備え、該投光部および受光部を、圧延ロールの後段で、かつ被検査体を圧下または挟持するロールの前段に設置した表面検査装置であって、
前記受光部の光軸は、前記被検査体の圧延方向に平行で、かつ、前記検査対象面に垂直な面内で傾斜し、前記検査対象面に垂直な軸に対し前記圧延ロール側へ傾けるように構成され
記投光部が幅方向断面視で前記検査対象面への垂線に対し25~45°の方向から拡散光を照射し、前記投光部の光軸は圧延方向断面で前記検査対象面に垂直な軸に対し前記圧延ロール側へ傾けるように構成され、
前記投光部は前記被検査体の圧延方向に平行で、かつ、前記検査対象面に垂直な面内の成分光を遮断する遮光板を設置したことを特徴とする表面検査装置。
A light projecting part for irradiating light onto an inspection object surface of an object to be inspected and a light receiving part for receiving reflected light are provided, and the light projecting part and the light receiving part are arranged behind the rolling rolls and the object to be inspected is rolled down or sandwiched. A surface inspection device installed in the front stage of the roll to
The optical axis of the light-receiving part is parallel to the rolling direction of the object to be inspected and is inclined in a plane perpendicular to the surface to be inspected, and is inclined toward the rolling roll with respect to the axis perpendicular to the surface to be inspected. configured as
The light projecting part irradiates diffused light from a direction of 25 to 45° with respect to a perpendicular line to the inspection target surface in a cross-sectional view in the width direction, and the optical axis of the light projecting part is directed to the inspection target surface in the rolling direction cross section. configured to tilt toward the rolling roll with respect to the vertical axis,
A surface inspection apparatus according to claim 1, wherein said light projecting portion is provided with a light blocking plate for blocking component light in a plane parallel to the rolling direction of said object to be inspected and perpendicular to said surface to be inspected.
前記受光部の光軸は、前記検査対象面に垂直な軸に対し前記圧延ロール側へ3°傾け、
前記投光部の光軸は、圧延方向断面で前記検査対象面に垂直な軸に対し前記圧延ロール側へ10°傾けていることを特徴とする請求項1に記載の表面検査装置。
the optical axis of the light-receiving unit is inclined by 3° toward the rolling roll with respect to the axis perpendicular to the surface to be inspected;
2. The surface inspection apparatus according to claim 1, wherein the optical axis of said light projecting section is inclined by 10 degrees toward said rolling roll with respect to an axis perpendicular to said surface to be inspected in a cross section in the rolling direction.
前記投光部は前記被検査体の検査対象面の幅方向中央に配置せず、両端側に配置することを特徴とする請求項1または2に記載の表面検査装置。 3. The surface inspection apparatus according to claim 1, wherein said light projecting part is not arranged in the center of the inspection target surface of said object to be inspected, but is arranged on both end sides thereof.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011055728A1 (en) 2009-11-06 2011-05-12 住友電気工業株式会社 Method of inspecting obverse surface of continuous cast material
JP2011117975A (en) 2011-02-28 2011-06-16 Jfe Steel Corp Apparatus for inspection of rolling roll scratch
CN205655799U (en) 2016-05-04 2016-10-19 成都贝森伟任科技有限责任公司 Metal sheet surface detection device that can adjusting position

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618610A (en) * 1984-06-22 1986-01-16 Sumitomo Metal Ind Ltd Apparatus for inspecting steel sheet surface
JP5056287B2 (en) * 2006-09-14 2012-10-24 Jfeスチール株式会社 Area ratio measuring device for corroded portion of surface-treated steel sheet, area ratio measuring device for white rust portion of galvanized steel sheet and measuring method thereof
US9903710B2 (en) * 2015-06-05 2018-02-27 Nippon Steel & Sumitomo Metal Corporation Shape inspection apparatus for metallic body and shape inspection method for metallic body

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011055728A1 (en) 2009-11-06 2011-05-12 住友電気工業株式会社 Method of inspecting obverse surface of continuous cast material
JP2011117975A (en) 2011-02-28 2011-06-16 Jfe Steel Corp Apparatus for inspection of rolling roll scratch
CN205655799U (en) 2016-05-04 2016-10-19 成都贝森伟任科技有限责任公司 Metal sheet surface detection device that can adjusting position

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