JP7235605B2 - Sludge drying equipment - Google Patents

Description

TECHNICAL FIELD The present invention relates to an apparatus for recovering sludge containing a large amount of water from a waste liquid containing powder of a workpiece and drying the sludge.

Conventionally, processing waste generated by processing a workpiece with a grindstone while supplying processing water precipitates processing waste from processing waste containing processing waste. is added to adsorb the processing waste to the anode plate, processing waste (sludge) containing a lot of water is recovered, and the processing waste liquid from which the sludge is removed is reused (see, for example, Patent Document 1). .
Also, as disclosed in Patent Document 2, for example, the sludge is dried in order to utilize the collected sludge.

JP 2013-119050 A JP 2016-049506 A

However, in the sludge recovery apparatus disclosed in Patent Document 2, a heater (electric heating wire, electric heating plate) is used to dry the sludge placed on the conveyor belt that conveys the sludge. It is necessary for the operator to wait until the device parts (conveyor belt and heater) that are drying the sludge are cooled. Moreover, when removing the sludge from the anode plate to which the sludge has adhered, the sludge adheres to the stripping means for stripping off the sludge by sandwiching the anode plate, and it gradually becomes impossible to strip the sludge from the anode plate. Therefore, it is necessary to periodically clean the stripping means, which poses a problem of reduced work efficiency.

Therefore, the sludge recovery device that recovers and dries the sludge eliminates the need to frequently clean the stripping means for stripping the sludge from the adsorption plate (anode plate), and dries the recovered sludge quickly. There is a problem.

In order to solve the above-mentioned problems, the present invention collects sludge containing a large amount of water from the waste liquid containing powder of the workpiece discharged by grinding the workpiece with a grindstone while supplying machining water. A sludge drying apparatus for drying the sludge, comprising a waste liquid tank for storing the waste liquid, an adsorption plate disposed in the waste liquid tank for adsorbing the sludge, and the adsorption plate adsorbing the sludge is removed from the waste liquid tank. taking out means for taking out, drying means for removing the moisture from the sludge taken out from the waste liquid tank and adsorbed on the adsorption plate, and drying in which moisture is removed by the drying means while adsorbed on the adsorption plate and stripping means for stripping sludge from the adsorption plate.

In the sludge drying apparatus according to the present invention, the adsorption plate is a metal that is heated by generating an eddy current by electromagnetic induction, and the drying means includes a cylindrical coil having an opening into which the adsorption plate is inserted; A high-frequency power source for supplying high-frequency power to a coil, supplying high-frequency power to the coil, heating the adsorption plate surrounded by the coil by electromagnetic induction, and removing moisture from the sludge adsorbed by the adsorption plate. is preferably removed.

A sludge drying apparatus according to the present invention for recovering and drying sludge containing a large amount of water from waste liquid containing powder of the workpiece discharged by grinding the workpiece with a grindstone while supplying processing water. comprises a waste liquid tank for storing waste liquid, an adsorption plate arranged in the waste liquid tank for adsorbing sludge, a taking-out means for taking out the adsorption plate that has adsorbed the sludge from the waste liquid tank, and the adsorption plate taken out from the waste liquid tank. and a stripping means for stripping off the dried sludge from the adsorption plate, the moisture of which is removed by the drying means while the sludge is adsorbed on the adsorption plate. There is no need to contact the sludge in a state containing moisture adsorbed to the plate, and the stripping means strips off the sludge after drying, so that the sludge does not adhere to the stripping means. Therefore, it is not necessary to clean the stripping means frequently, and work efficiency is not lowered. In addition, since the sludge containing moisture in the waste liquid tank adheres to the adsorption plate in the form of a film, when the sludge is dried by the drying means, the sludge does not form lumps, so the recovered sludge can be dried quickly. can. Furthermore, when the sludge is dried only from the surface as in the conventional art, the sludge inside may not be completely dried. Since the sludge is dried by the sludge, the sludge inside is also sufficiently dried. Therefore, the stripping means can easily strip the dry sludge from the suction plate.

In the sludge drying apparatus according to the present invention, the adsorption plate is a metal that is heated by generating an eddy current by electromagnetic induction, and the drying means includes a cylindrical coil having an opening into which the adsorption plate is inserted, and high-frequency power to the coil. A high-frequency power supply that supplies the high-frequency power to the coil, heats the adsorption plate surrounded by the coil by electromagnetic induction, and removes moisture from the sludge containing moisture adsorbed by the adsorption plate Since the sludge is dried by heating the adsorption plate by the drying means, the sludge inside is sufficiently dried. Therefore, the stripping means can easily strip the dry sludge from the suction plate, and it is possible to prevent the sludge containing moisture from adhering and sticking to the stripping means.

It is a sectional view showing an example of structure of a grinding device and a sludge drying device. FIG. 4 is an enlarged cross-sectional view showing the arrangement of an adsorption plate (anode plate) and a cathode plate in a waste liquid tank; FIG. 5 is a cross-sectional view for explaining a state in which sludge containing moisture adhering to the adsorption plate taken out from the waste liquid tank by the take-out means is dried by the drying means. FIG. 5 is a cross-sectional view for explaining a state in which a stripping means strips dry sludge adhering to the suction plate;

The sludge drying apparatus 1 according to the present invention shown in FIG. 1 contains the powder P of the solid workpiece S which is ground by the grindstone 404b and discharged while the grinding water is supplied in the grinding device 4. This is an apparatus for recovering powder P of a workpiece S containing much water, that is, sludge P containing much water from a waste liquid L, and drying the sludge P. The sludge drying device 1 may be incorporated in the grinding device 4 or may be separate from the grinding device 4 .
The sludge drying apparatus 1 may collect and dry the sludge P from the waste liquid produced by a cutting apparatus that cuts a solid silicon wafer or the like with a rotating cutting blade.

The grinding device 4 shown in FIG. 1 includes at least a holding table 41 that holds a solid workpiece S and a grinding means 40 that grinds the workpiece S with a rotating grindstone 404b.
Although the solid workpiece S is a silicon wafer in this embodiment, it may be a cylindrical silicon ingot or the like.

A holding table 41 arranged on a base 49 of the grinding device 4 has a holding surface 41a made of, for example, a porous member or the like and communicating with a suction source (not shown). The holding table 41 is rotatable around a rotation axis whose axial direction is the Z-axis direction, and is supported by a table support base 42 . The table support 42 disposed in an opening 49a formed on the upper surface of the base 49 can be reciprocated in the X-axis direction (the front and back direction of the paper surface) by an X-axis moving means (not shown) such as a ball screw mechanism. ing.

Box-shaped water cases 48 are arranged on both sides of the moving path of the holding table 41 . The water case 48 is shown at two positions on the left and right sides of the table support base 42 in FIG. It has an integral trough portion 484 . That is, the water case 48 is provided with a rectangular opening 481 in the central portion of a bottom plate 480 of a box-shaped member in order to reciprocate the holding table 41 in the X-axis direction. It is composed of a tub portion 484 which is constructed by an outer wall 483 and receives the machining water, and a drain port 485 formed in the bottom plate 480 . One end of a liquid supply pipe 485 a extending outside the water case 48 is connected to the liquid drain port 485 . The water case 48 receives the machining water (waste liquid L) flowing down from the holding table 41 and containing the powder P of the workpiece S discharged after the workpiece S is scraped, and sends the machining water to the tank 12 .

The grinding means 40 shown in FIG. and a grinding wheel 404 detachably connected to the mount 403 . The grinding wheel 404 includes an annular wheel base 404a and a plurality of grindstones 404b having a substantially rectangular parallelepiped outer shape and arranged in a plurality of rings on the lower surface of the wheel base 404a. The grinding means 40 is vertically movable in the Z-axis direction.

For example, inside the rotary shaft 400, a channel (not shown) that communicates with a machining water supply source and serves as a path for machining water is provided through the rotary shaft 400 in the Z-axis direction. The bottom surface of the wheel base 404a has an opening so that machining water can be jetted toward the grindstone 404b. A working water nozzle is provided at a position adjacent to the grinding wheel 404 of the grinding means 40 in a state of being lowered to a position where the workpiece S is ground. Processing water may be directly supplied to the contact portion of the .

As shown in FIG. 1, the sludge drying apparatus 1 includes a waste liquid tank 2 for storing waste liquid, an adsorption plate 71 arranged in the waste liquid tank 2 for adsorbing sludge P, and an adsorption plate 71 for adsorbing the sludge P in the waste liquid tank. a drying means 6 for removing water from the sludge P that has been taken out from the waste liquid tank 2 and adsorbed on the adsorption plate 71; and a stripping means 36 for stripping off the dried sludge P1 from the adsorption plate 71. - 特許庁

At a position lower than the drain port 485 of the water case 48 shown in FIG. It has a connected supply port 120 . The tank 12 includes a delivery pump 121 for pumping up the waste liquid L containing the powder P of the workpiece W from the tank 12 and delivering it to the waste liquid tank 2. The delivery pump 121 pumps the waste liquid L into the waste liquid tank 2 through a delivery pipe 121a. The waste liquid L is sent toward the inflow port 20 of the.

The substantially rectangular parallelepiped box-shaped waste liquid tank 2 is made of, for example, an insulating material such as synthetic resin, and includes a bottom plate 21 that is rectangular in plan view and four side walls integrally rising from the outer periphery of the bottom plate 21 in the +Z direction. consists of In FIGS. 1 and 2, the two side walls facing each other in the X-axis direction are side walls 22a (only one side is shown), and the two side walls facing each other in the Y-axis direction are side walls 22b.
An overflow pipe (not shown) is provided in the upper portion of the waste liquid tank 2 to prevent the waste liquid L from overflowing. The overflow pipe communicates with the tank 12 and guides the waste liquid L, which is about to overflow from the waste liquid tank 2, to the tank 12 again.

For example, in the waste liquid tank 2, there are a cathode plate 70 that is negatively charged, and an adsorption plate (anode plate) 71 that faces the cathode plate 70 and is removable from the waste liquid tank 2 and positively charged to adsorb sludge P containing water. and are arranged.

The adsorption plate 71 is made of, for example, an electrochemically noble material, and is formed in a flat plate shape having a rectangular planar shape. For example, the attraction plate 71 can be made of a metal such as iron or stainless steel (SUS) that is heated by generating an eddy current through electromagnetic induction. In this embodiment, SUS is applied as the suction plate 71 .

For example, a plurality of support grooves (not shown) are formed on the inner surfaces of two side walls 22a facing each other in the X-axis direction of the waste liquid tank 2. It is arranged in the waste liquid tank 2 while being inserted into the support groove. That is, the plurality of adsorption plates 71 are spaced apart from each other with their surfaces perpendicular to the longitudinal direction (Y-axis direction) of the waste liquid tank 2, in other words, parallel to the width direction (X-axis direction) of the waste liquid tank 2. are placed apart.

On the upper end surface of the attraction plate 71, for example, two engaged portions 710 (only one is shown) are provided that protrude upward from the central portion in the width direction (X-axis direction) while being spaced apart from each other. The engaged portion 710 is formed in a rectangular plate shape, and is provided with an engaged hole 710a penetrating in the X-axis direction at the center. An engaging pin 320a of a holding portion 320 of the extracting means 32, which will be described later, enters and engages with the engaged hole 710a.

The cathode plate 70 is provided between the adsorption plates 71 adjacent to each other. That is, a plurality of cathode plates 70 are alternately arranged to face the adsorption plate 71 in the Y-axis direction while being spaced apart from the adsorption plate 71 , and are parallel to the adsorption plate 71 .

For example, as shown in FIG. 1, the cathode plate 70 is supported by a housing 73a having a rectangular shape in a side view, and the housing 73a is formed with a discharge portion 73b. The discharge part 73b is, for example, a pipe for supplying purified water from which the sludge P has been removed and which has flowed into the housing 73a to a purified water storage tank (not shown). The cathode plates 70 are arranged parallel to each other with a space therebetween so as to close the openings on both sides of the housing 73a in the Y-axis direction.

Like the adsorption plate 71, the cathode plate 70 is made of an electrochemically noble material, and is formed into a flat plate having a rectangular planar shape. For example, the cathode plate 70 can be made of metal such as iron or stainless steel (SUS) that is heated by generating eddy currents by electromagnetic induction. In this embodiment, SUS is applied as the cathode plate 70 . The cathode plate 70 is formed in a plate-like shape with a mesh, does not have a function of hooking the sludge P on the mesh, and generates a repulsive force on the sludge P by being negatively charged. That is, the cathode plate 70 is negatively charged to allow passage of only purified water as a liquid of the waste liquid L, and generates a repulsive force with the negatively charged sludge P to restrict passage of the sludge P. do. As a result, the housing 73a and the cathode plate 70 form an area inside where the purified water that has passed through the cathode plate 70 exists, and the cathode plate 70 generates a repulsive force between the cathode plate 70 and the sludge P, so that the purified water exists. A region is separated from the waste liquid L in the waste liquid tank 2 .
The shape and the like of the cathode plate 70 are not limited to those of this embodiment.

A gap of a predetermined width is provided between the lower end of each cathode plate 70 and each adsorption plate 71 and the bottom plate 21 of the waste liquid tank 2, and the waste liquid L that has flowed into the waste liquid tank 2 passes through the gap and and the suction plate 71.

In this embodiment, a DC voltage is applied between the adsorption plate 71 and the cathode plate 70 (see FIG. 2). That is, the positive (+) side of the DC power source DC is electrically connected to the adsorption plate 71 and the waste liquid L is positively charged. The adsorption plate 71 is positively charged in the waste liquid L and adsorbs the sludge P negatively charged in the waste liquid L. On the other hand, the cathode plate 70 is electrically connected to the negative (-) side of the direct current power source DC, and the waste liquid L is negatively charged. As a result, an electric field is formed between the adsorption plate 71 and the cathode plate 70 . Then, the sludge P mixed in the waste liquid L and charged negatively (-) is repulsed from the negatively charged cathode plate 70 by electrophoresis, and the adsorption plate charged positively (+). 71 is adsorbed.

A take-out means 32 for taking out the adsorption plate 71 shown in FIG. 1 that has adsorbed the sludge P from the waste liquid tank 2 can reciprocate horizontally above the waste liquid tank 2 in the Y-axis direction by the Y-axis direction moving means 34 . .
The Y-axis direction moving means 34 includes a guide rail 341 extending in the Y-axis direction, a vertical plate 342 provided with a slider (not shown) and movable in the Y-axis direction along the guide rail 341 and extending in the Z-axis direction. It is provided with a ball screw mechanism (not shown) which is composed of a motor and the like and moves the vertical plate 342 in the Y-axis direction. The guide rail 341 has a length extending from above the waste liquid tank 2 to above the drying means 6, and by moving the taking-out means 32 along with the vertical plate 342 in the Y-axis direction, the holding portion 320 of the taking-out means 32 is moved. The holding adsorption plate 71 can be moved from the waste liquid tank 2 to above the drying means 6 .

The extracting means 32 is configured such that the side surface of the vertical plate 342 can be reciprocated in the Z-axis direction by the movable member 323 .
The holding portion 320 that holds the suction plate 71 of the take-out means 32 shown in FIG. 1 is, for example, a pair of chuck cylinders (only one side is shown) arranged on the side surface of the movable member 323 and arranged in the X-axis direction. The pair of holding parts 320 are arranged on the side surfaces of the movable member 323 with a space therebetween in the width direction (X-axis direction) of the waste liquid tank 2 . The pair of holding portions 320 includes a cylinder body 320b attached to a movable member 323, and an engagement pin 320a provided so as to protrude from the cylinder body 320b in the width direction (X-axis direction) of the waste liquid tank 2. there is The pair of holding portions 320 are in a state in which, for example, the engaging pins 320a protruding from the cylinder body 320b approach each other in the X-axis direction. Each engaging pin 320a protrudes from the cylinder main body 320b in a state where the movable member 323 is lowered and the holding portion 320 is positioned above the attracting plate 71, so that each engaging portion 710 of the attracting plate 71 is engaged with each engaging pin 320a. They are respectively inserted into the holes 710a. As a result, the holding portion 320 of the take-out means 32 holds the adsorption plate 71 , and the adsorption plate 71 can be taken out from the waste liquid tank 2 by raising the movable member 323 .

For example, at a position adjacent to the waste liquid tank 2, a drying means 6 for removing moisture from the sludge P that has been taken out from the waste liquid tank 2 and adsorbed on the adsorption plate 71 is arranged. The drying means 6 can dry the sludge P containing water while adhering to the adsorption plate 71. In this embodiment, the drying means 6 has an opening 600 into which the adsorption plate 71 is inserted and extends in the Z-axis direction. and a high-frequency power source 61 that supplies high-frequency power to the coil 60 .
For example, a cylindrical coil 60 formed by spirally winding an enameled wire (litz wire) or the like has a length sufficient to cover the side surface of the adsorption plate 71 to which the sludge P adheres from top to bottom. ing.
For example, the applied voltage of the high-frequency power source 61 can be adjusted by a voltage regulator or the like (not shown), thereby making it possible to adjust the magnitude of the high-frequency current flowing through the coil 60 as well. In addition, the coil 60 may be formed in the shape of a rectangular tube.

The stripping means 36 for stripping off the dried sludge P1 shown in FIG. is set. The stripping means 36 is configured to strip off the dry sludge P1 adhering across the suction plate 71 (in FIG. 1, it is shown in a state of being collected in a collection box 38, which will be described later). The stripping means 36 includes, for example, a pair of opening/closing cylinders 360 (for example, air cylinders), a pair of support plate portions 361 that support the pair of opening/closing cylinders 360, and a pair of opening/closing cylinders 360 that move in the Y-axis direction. stripping plate 362. The pair of opening/closing cylinders 360 may be electric cylinders.
Note that the stripping means 36 may be arranged below the coil 60 . The adsorption plate 71 is advanced from above the coil 60, and when the adsorption plate 71 that has passed the coil 60 is raised, the stripping means 36 pinches the adsorption plate 71 and strips off the dry sludge P1 adhering to the adsorption plate 71. may be

The pair of open/close cylinders 360 includes a cylindrical cylinder tube 360a having a piston (not shown) therein, and a piston rod 360b inserted into the cylinder tube 360a and having an outer end attached to the piston. A stripping plate 362 is fixed to the tip side of the piston rod 360b, and the stripping plate 362 extends in the X-axis direction with a length longer than the width of the adsorption plate 71 (the length in the X-axis direction). .
Note that the stripping means 36 and the drying means 6 are not limited to being arranged vertically side by side as shown in FIG. 1, but may be arranged side by side.

As shown in FIG. 1, below the stripping means 36 is disposed a collecting box 38 for collecting the dried sludge P1. The dried sludge P1 is dropped from the suction plate 71 into the collecting box 38 by the stripping means 36, and when the dried sludge P1 accumulates to a predetermined height in the collecting box 38, it is disposed in the collecting box 38, for example. A sensor detects this and signals that the collection box 38 should be replaced.

Next, sludge P containing a large amount of water is recovered from the waste liquid L containing the powder P of the workpiece S discharged by grinding the workpiece S with the grindstone 404b while supplying the machining water, and the sludge P The operation of the sludge drying apparatus 1 in the case of drying to obtain the dried sludge P1 will be described.

First, after the workpiece S was sucked and held by the holding surface 41a of the holding table 41, the table support base 42 was moved to position the workpiece S on the holding table 41 at the grinding position facing the grindstone 404b. become a state. A motor 402 rotates the rotary shaft 400, which causes the grinding wheel 404 to rotate. The grinding means 40 descends, and the rotating grindstone 404b comes into contact with the upper surface of the workpiece S to perform grinding. Since the workpiece S on the holding surface 41a also rotates as the holding table 41 rotates at a predetermined rotational speed, the grindstone 404b grinds the entire upper surface of the workpiece S. FIG. During grinding, machining water is supplied to the contact portion between the grindstone 404b and the upper surface of the workpiece S to cool and wash the contact portion.

The workpiece S is ground to form fine powder P (silicon powder in this embodiment) of the workpiece W, and the powder P is mixed with the processing water to generate a waste liquid L. be. The generated waste liquid L flows into the water case 48 through the opening 49a, then flows into the waste liquid tank 2 through the liquid supply pipe 485a, the tank 12, and the delivery pipe 121a and is stored.

In the state where the waste liquid L is stored in the waste liquid tank 2 in this way, as shown in FIG. ) is energized, while the cathode plate 70 is energized with the minus (-) of the direct current power supply DC. As a result, the negatively (-) charged sludge P mixed in the waste liquid L repels from the negatively (-) charged cathode plate 70 and is adsorbed to the positively (+)-charged adsorption plate 71. be done. The sludge P is roughly removed by the adsorption plate 71, and the waste liquid L, which has become purified water, is taken up by the discharge portion 73b and fed to a purified water storage tank (not shown).

After a certain amount of sludge P is evenly adsorbed mainly on the side surfaces of the adsorption plate 71 , the Y-axis direction moving means 34 shown in FIG. Next, the holding part 320 descends to hold the adsorption plate 71 and lift the adsorption plate 71 from the waste liquid L in the waste liquid tank 2 . Then, the Y-axis direction moving means 34 moves the holding portion 320 holding the adsorption plate 71 to above the opening 600 of the coil 60 of the drying means 6 shown in FIG.

The holding part 320 is lowered to insert the adsorption plate 71 inside the coil 60 through the opening 600 of the coil 60 .
High-frequency power is supplied to the coil 60 from a high-frequency power supply 61 , and a high-frequency current (alternating current) flows through the coil 60 . As a result, magnetic lines of force are generated around the coil 60, and an eddy current flows in the attracting plate 71 inserted in the coil 60 and made of metal in a direction that hinders the change of the magnetic flux, and the electric resistance of the attracting plate 71 increases. heat is generated by

The adsorption plate 71 and the moisture-containing sludge P adhering to the adsorption plate 71 are heated by the heat generated in the adsorption plate 71 due to the electromagnetic induction, and the moisture evaporates to dry the sludge P. Since the coil 60 surrounds the side surface of the adsorption plate 71, the entire sludge P containing water adhering to the adsorption plate 71 is dried. If the length of the coil 60 in the Z-axis direction is shorter than the length of the side surface of the adsorption plate 71 to which the sludge P adheres, the removal means 32 moves the adsorption plate 71 up and down within the coil 60 during sludge drying. You may let

After the sludge P containing water adhering to the adsorption plate 71 is dried for a predetermined time by the drying means 6 to remove the water from the sludge P to obtain dried sludge P1 shown in FIG. Then, the adsorption plate 71 is taken out from the opening 600 of the coil 60 .

After that, a pair of stripping plates 362 are horizontally moved by a pair of opening/closing cylinders 360 of the stripping means 36 shown in FIG. From this state, the movable member 323 (see FIG. 1) raises the holding portion 320 to pull up the adsorption plate 71 . As a result, the dried sludge P1 is stripped off from the adsorption plate 71 and dropped into the collection box 38 shown in FIG.

As described above, the sludge P containing a large amount of water is recovered from the waste liquid L containing the powder P of the workpiece S discharged by grinding the workpiece S with the grindstone 404b while supplying the machining water. A sludge drying apparatus 1 according to the present invention for drying sludge P comprises a waste liquid tank 2 for storing waste liquid L, an adsorption plate 71 arranged in the waste liquid tank 2 for adsorbing sludge P, and an adsorption plate 71 for adsorbing sludge P. from the waste liquid tank 2, a drying means 6 for removing moisture from the sludge P that has been taken out from the waste liquid tank 2 and adsorbed on the adsorption plate 71, and a drying means 6 in the state adsorbed on the adsorption plate 71. By providing a stripping means 36 for stripping off the dry sludge P1 from which moisture has been removed from the adsorption plate 71, the stripping means 36 contacts the sludge P in a state containing water adsorbed by the adsorption plate 71. - 特許庁Since the stripping means 36 strips off the dried sludge P1 after drying, the sludge P containing water does not adhere to the stripping means 36.例文帳に追加Therefore, frequent cleaning of the stripping means 36 is not necessary, and work efficiency is not lowered. In addition, since the sludge P containing water in the waste liquid tank 2 adheres to the adsorption plate 71 in the form of a film, when the sludge P is dried by the drying means 6, the collected sludge P is not clumped. P can be dried quickly. Furthermore, when the sludge P containing moisture is dried only from the surface as in the conventional art, the sludge P inside may not be completely dried. Since the suction plate 71 is heated by means 6 to dry the sludge P, the sludge P inside is also sufficiently dried. Therefore, the stripping means 36 can easily strip the dry sludge P1 from the adsorption plate 71. - 特許庁

In the sludge drying apparatus 1 according to the present invention, the adsorption plate 71 is a metal heated by generating an eddy current by electromagnetic induction, and the drying means 6 is a cylindrical coil 60 having an opening 600 into which the adsorption plate 71 is inserted. and a high-frequency power supply 61 for supplying high-frequency power to the coil 60, supplying high-frequency power to the coil 60, heating the adsorption plate 71 surrounded by the coil 60 by electromagnetic induction, and being adsorbed by the adsorption plate 71 By removing water from the water-containing sludge P, the adsorption plate 71 is heated by the drying means 6 to dry the sludge P, so that the sludge P inside is also sufficiently dried. Therefore, the stripping means 36 can easily strip the dry sludge P1 from the adsorption plate 71, and the sludge P containing moisture can be prevented from adhering and sticking to the stripping means 36.例文帳に追加

It goes without saying that the sludge drying apparatus 1 according to the present invention is not limited to this embodiment, and may be implemented in various forms within the scope of its technical concept. Moreover, the shape of each component of the sludge drying device 1 and the grinding device 4 shown in the attached drawings is not limited to this, and can be changed as appropriate within the range where the effects of the present invention can be exhibited.

S: workpiece L: waste liquid P: sludge (powder of workpiece) P1: dry sludge 4: grinding device 49: base 49a: opening 40: grinding means 400: rotating shaft 404: grinding wheel 404b: grindstone 41: Holding table 41a: Holding surface 42: Table support 48: Water case 484: Tub 486: Drain port 485a: Liquid supply pipe 12: Tank 121: Sending pump 1: Sludge drying device 2: Waste liquid tank 70: Cathode plate 73a : Casing 73b: Ejection part 71: Suction plate 710: Engaged part 710a: Engaged hole 32: Extracting means 320: Holding part 323: Movable member 34: Y-axis direction moving means 36: Stripping means 360: Pair 362: Stripping plate 38: Collection box 6: Drying means 60: Cylindrical coil 61: High frequency power supply

Claims (2)

A sludge drying apparatus for recovering sludge containing a large amount of water from a waste liquid containing powder of a workpiece discharged by grinding the workpiece with a grindstone while supplying processing water and drying the sludge. ,
a waste liquid tank for storing the waste liquid, an adsorption plate disposed in the waste liquid tank for adsorbing the sludge, a take-out means for taking out the adsorption plate adsorbing the sludge from the waste liquid tank, and a device taken out from the waste liquid tank. drying means for removing the water from the sludge adsorbed by the adsorption plate; and stripping means for stripping the dry sludge from the adsorption plate, the water of which is removed by the drying means while being adsorbed by the adsorption plate. , sludge drying equipment. The attraction plate is a metal heated by generating an eddy current by electromagnetic induction,
The drying means comprises a cylindrical coil having an opening for inserting the adsorption plate, and a high frequency power supply for supplying high frequency power to the coil,
2. A sludge drying apparatus according to claim 1, wherein high-frequency power is supplied to said coil, said adsorption plate surrounded by said coil is heated by electromagnetic induction, and moisture is removed from said sludge adsorbed by said adsorption plate.

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