JP7220109B2 - probe unit - Google Patents

Description

The present invention relates to a probe unit containing contact probes for signal input/output with respect to a predetermined circuit structure.

Conventionally, when conducting a continuity test or an operating characteristic test of a test object such as a semiconductor integrated circuit or a liquid crystal panel, a contact probe is used to electrically connect the test object and a signal processing device that outputs test signals. A probe unit is used that includes a probe holder that accommodates a plurality of the contact probes, and a base member that is provided around the probe holder and the guide member and fixes and holds the probe holder.

In the probe unit, a guide member is used to guide the arrangement position of the semiconductor integrated circuit and restrict misalignment between the probe holder and the semiconductor integrated circuit. The guide member is attached to the probe holder or the base member by screwing (see Patent Document 1, for example).

JP 2011-210415 A

In the probe unit, the guide member may be replaced depending on the arrangement of the contact probes and the size of the semiconductor integrated circuit. In this case, as in the technique disclosed in Patent Document 1, in a configuration in which the guide member is fixed by screwing, for example, the screw that fixes the base member (or probe holder) and the guide member is removed, and the guide member is taken out. . After that, the guide member to be replaced is attached by screwing. It was necessary to carry out the above-described procedure each time the guide member was replaced, and it took time and effort to replace the guide member.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a probe unit in which a guide member can be easily attached to and detached from an object to be fixed.

In order to solve the above-described problems and achieve the object, a probe unit according to the present invention includes: a contact probe that contacts an electrode to be contacted; a probe holder that holds the contact probe; a main body that guides the member having the electrodes, a guide member that extends from the main body and has at least one flexible portion that bends according to an external load, and a housing that holds the probe holder, and a base member having at least one claw portion that engages with the flexible portion in the guide member stacked on the probe holder.

In the probe unit according to the present invention, in the above invention, the frame portion guides the member having the electrodes, and the bottom portion passes through one end of the contact probe stacked on the probe holder and extending from the probe holder. , is provided.

Further, in the probe unit according to the present invention, in the above-described invention, the guide member has a rectangular outer edge, and the flexible portions are provided on opposite side surfaces of the main body portion. It is characterized by being

Further, in the above invention, the probe unit according to the present invention is a coil spring that partially extends from the probe holder and supports the guide member at the extended distal end, and is formed by winding a wire, a coil spring having a spring portion wound at a predetermined pitch; and a base end portion provided at one end of the spring portion and having an outer circumference having a diameter larger than that of the outer circumference of the spring portion, The probe holder has an opening in the end surface of the probe holder, and has a small diameter portion through which a part of the spring portion is inserted, and a base end portion of the coil spring having a diameter larger than that of the small diameter portion. and a large-diameter portion formed in the holding hole.

Further, in the probe unit according to the present invention, in the above invention, the flexible portion includes a locking portion that locks to the claw portion, and a first connection that extends from one end of the locking portion and continues to the main body portion. and a second connecting portion extending from the other end of the engaging portion and continuing to a portion of the body portion different from the first connecting portion.

ADVANTAGE OF THE INVENTION According to this invention, there exists an effect that a guide member can be easily attached or detached with respect to fixed object.

FIG. 1 is a perspective view showing the configuration of a probe unit according to one embodiment of the invention. FIG. 2 is a top view showing the configuration of the probe unit according to one embodiment of the present invention. FIG. 3 is an exploded perspective view showing the configuration of the probe unit according to one embodiment of the present invention. FIG. 4 is a partial cross-sectional view showing the configuration of the essential parts of the probe unit according to one embodiment of the present invention. 5 is an enlarged view of a part of the configuration shown in FIG. 4. FIG. FIG. 6 is a diagram showing a guide member included in the probe unit according to one embodiment of the present invention. FIG. 7 is a top view showing the configuration of the probe unit according to one embodiment of the present invention. FIG. 8 is a diagram showing a configuration of a guide member included in the probe unit according to Modification 1 of the embodiment of the present invention. FIG. 9 is a top view showing the configuration of a probe unit according to Modification 2 of the embodiment of the present invention. FIG. 10 is a top view showing the configuration of a probe unit according to Modification 3 of the embodiment of the present invention. FIG. 11 is a diagram showing a configuration of a guide member included in a probe unit according to Modification 4 of the embodiment of the present invention.

Hereinafter, the form for carrying out the present invention is explained in detail with a drawing. In addition, the present invention is not limited by the following embodiments. In addition, each drawing referred to in the following description only schematically shows the shape, size, and positional relationship to the extent that the contents of the present invention can be understood. It is not limited only to the specified shape, size, and positional relationship.

(Embodiment)
FIG. 1 is a perspective view showing the configuration of a probe unit according to one embodiment of the invention. FIG. 2 is a top view showing the configuration of the probe unit according to one embodiment of the present invention. FIG. 3 is an exploded perspective view showing the configuration of the probe unit according to one embodiment of the present invention. The probe unit 1 is a device used when inspecting electrical characteristics of a semiconductor integrated circuit, which is an object to be inspected. It is a device that connects to

The probe unit 1 has conductive signal contact probes 2 (hereinafter referred to as , simply referred to as a probe 2), a probe holder 3 that accommodates and holds the probe 2 and a ground contact probe 4 described later in accordance with a predetermined pattern, and a base member 4 that fixes and holds the probe holder 3). , a guide member 5 that guides the placement position of the semiconductor integrated circuit and restricts deviation between the probe holder 3 and the semiconductor integrated circuit.

The probe 2 is formed using a conductive material. When inspecting a semiconductor integrated circuit, the probe 2 has one end in the axial direction that contacts an electrode to which an inspection signal of the semiconductor integrated circuit is input, and the other end that contacts an inspection signal of a circuit board provided with an inspection circuit. is in contact with the electrode that outputs the Further, the probe 2 is extendable in the axial direction. The probe 2 is composed of a plunger and a coil spring, a probe having a pipe member, a pogo pin, a solid conductive member, a conductive pipe, or a wire probe that obtains a load by bowing a wire. Alternatively, a connection terminal (connector) for connecting electrical contacts may be used, or these probes may be combined as appropriate. In this specification, the axial direction of the probe 2 is, for example, the direction perpendicular to the plane of the paper in FIG.

The probe holder 3 is formed using an insulating material. A plurality of holder holes for holding the probes 2 are formed in the probe holder 3 according to the arrangement of the probes 2 . In this embodiment, the probe holder 3 is formed by stacking two members (a first member 31 and a second member 32, which will be described later).
Further, the probe holder 3 is provided with a coil spring 6 that supports the guide member 5 and a positioning pin 7 that determines the placement of the guide member 5 .

A housing portion 41 for housing the probe holder 3 and the guide member 5 is formed in the base member 4 . Further, the base member 4 has claw portions 42 to 45 that engage with the guide member 5 . Each claw portion has a convex shape protruding toward the inner side of the housing portion 41 . The claw portions 42 and 43 and the claw portions 44 and 45 are formed at positions facing each other. The base member 4 is made of metal such as aluminum or stainless steel (SUS304). In addition, it may be molded with resin such as engineering plastics such as PES (Poly Ether Sulfone) and PEEK (Polyetheretherketone), insulating high-strength materials such as machinable ceramics, or the metal surface may be coated. good too.

The guide member 5 has a plate shape with partially different thicknesses. The guide member 5 includes a frame portion 51 formed according to the outer edge of the semiconductor integrated circuit, a bottom portion 52 on which the semiconductor integrated circuit is placed, and elastically deformable portions 42 and 43 engaged with the claw portions 42 and 43 of the base member 4 . It has a first flexible portion 53 and an elastically deformable second flexible portion 54 that engages with the claw portions 44 and 45 of the base member 4 . Through holes 52a are formed in the bottom portion 52 so as to be arranged according to the electrodes and probes 2 of the semiconductor integrated circuit and penetrate in a direction orthogonal to the plate surface. The through-holes 52a each have a hole shape with a uniform diameter along the through-hole direction, and a part of the probe 2 is inserted therethrough.
The guide member 5 is formed using resin such as PEEK or PES.
Also, the frame portion 51 and the bottom portion 52 constitute a body portion.

The first flexible portion 53 and the second flexible portion 54 are C-shaped and have ends connected to the frame portion 51 . Specifically, the first flexible portion 53 includes a linear portion 53a that extends linearly, a first connecting portion 53b that extends from one end of the linear portion 53a while being bent and continues to the frame portion 51, and the other end of the linear portion 53a. and a second connection portion 53c that extends from the frame portion 51 by bending and continues to a portion of the frame portion 51 that is different from the first connection portion 53b. The second flexible portion 54 includes a linear portion 54a that extends linearly, a first connection portion 54b that extends from one end of the linear portion 54a while being bent and continues to the frame portion 51, and a bending portion from the other end of the linear portion 54a. and a second connecting portion 54c extending in a continuous manner to a portion of the frame portion 51 different from the first connecting portion 54b. The linear portions 53 a and 54 a correspond to locking portions that are locked to the claw portions of the base member 4 .
The load (spring constant) of the first flexible portion 53 and the second flexible portion 54 is adjusted according to the type of resin. Moreover, the load (spring constant) of the first flexible portion 53 and the second flexible portion 54 can be adjusted by adjusting the thickness and width of the linear portions 53a and 54a, for example.

For example, when a load is applied from the outside, the first flexible portion 53 and the second flexible portion 54 bend according to the load. The first flexible portion 53 and the second flexible portion 54 have linear portions extending parallel to the side surfaces of the frame portion 51 in the natural state. The natural state here means a state in which no load other than gravity is applied.

FIG. 4 is a partial cross-sectional view showing the configuration of the essential parts of the probe unit according to one embodiment of the present invention. 5 is an enlarged view of a part of the configuration shown in FIG. 4. FIG. The frame portion 51 of the guide member 5 is formed with a hole portion 511 that accommodates a portion of the coil spring 6 and a hole portion 512 through which the positioning pin 7 is inserted. When the guide member 5 is arranged on the base member 4 , the guide member 5 is positioned with respect to the probe holder 3 (base member 4 ) by inserting the positioning pin 7 extending from the probe holder 3 through the hole 512 . Further, the guide member 5 is supported so as to move back and forth in the stacking direction of the guide member 5 and the probe holder 3 by accommodating the coil spring 6 in the hole portion 511 .

The probe holder 3 consists of a first member 31 located on the upper surface side in FIGS. 4 and 5 and a second member 32 located on the lower surface side. The first member 31 and the second member 32 are fixed by an adhesive such as resin or by screwing.

A holding hole 33 is formed in the first member 31 to accommodate and hold a portion of the coil spring 6 . The holding hole 33 is composed of a small-diameter portion 33a having an opening on the end surface of the probe holder 3 and a large-diameter portion 33b having a larger diameter than the small-diameter portion 33a.

The coil spring 6 is provided at a spring portion 61 wound at a predetermined pitch and at one end of the spring portion 61 that is accommodated in the holding hole 33 , and has a diameter greater than the diameter of the outer circumference of the spring portion 61 . and a proximal end 62 having a larger diameter outer circumference. The base end portion 62 has an outer circumference that is larger than the diameter of the small diameter portion 33a and smaller than the diameter of the large diameter portion 33b. The base end portion 33b of the coil spring 6 is accommodated in the large diameter portion 33b, and the base end portion 62 abuts against a step formed by the small diameter portion 33a and the large diameter portion 33b so as to be retained.

Here, the diameter of the outer periphery of the spring portion 61 of the coil spring 6 is r ₁₁ , the diameter of the outer periphery of the base end portion 62 is r ₁₂ , the diameter of the small diameter portion 33a is r ₂₁ , and the diameter of the large diameter portion 33b is r _{22 .} , r ₁₁ <r ₂₁ <r ₁₂ <r ₂₂ . Further, when the diameter of the opening of the hole portion 511 is r ₃₁ , r ₁₁ <r ₃₁ .

When conducting an electrical characteristic test, a load is applied to the semiconductor integrated circuit in a direction in which the probe 2 approaches the semiconductor integrated circuit in order to ensure the connection between the probe 2 and the electrode. At this time, the guide member 5 moves toward the probe holder 3 while receiving reaction force from the coil spring 6 . By being supported by the coil spring 6, the guide member 5 suppresses a sudden increase in the load applied to the probe 2 from the semiconductor integrated circuit.

At the time of inspection, one end of the probe 2 contacts the test signal electrode of the semiconductor integrated circuit, and the other end contacts the test signal electrode of the circuit board. During inspection of the semiconductor integrated circuit, the probe 2 is compressed along the longitudinal direction by the contact load from the semiconductor integrated circuit. An inspection signal supplied from the circuit board to the semiconductor integrated circuit during inspection reaches the electrode of the semiconductor integrated circuit via the probe 2 from the electrode of the circuit board.

FIG. 6 is a diagram showing a guide member included in the probe unit according to one embodiment of the present invention. FIG. 7 is a top view showing the configuration of the probe unit according to one embodiment of the present invention.
The first flexible portion 53 and the second flexible portion 54 are C-shaped and have ends connected to the frame portion 51 . For example, the first flexible portion 53 and the second flexible portion 54 bend toward the frame portion 51 when a load F (see FIG. 6) directed toward the frame portion 51 is applied from the outside.

When the first flexible portion 53 and the second flexible portion 54 are bent, the locked state between the first flexible portion 53 and the claw portions 42 and 43 is released, and the second flexible portion 54 and the claw portions 44 are separated from each other. , 45 are released (see FIG. 7). The guide member 5 can be easily extracted from the base member 4 by releasing the locked states of the first flexible portion 53 and the second flexible portion 54 and the claw portions 42 to 45 .

Further, when the guide member 5 is accommodated in the base member 4 in a state in which the first flexible portion 53 and the second flexible portion 54 are bent by applying the load F, and the load F is released, the first flexible portion 53 and the second flexible portion 54 returns to its original shape. When the first flexible portion 53 and the second flexible portion 54 return to their original shapes, the first flexible portion 53 and the claw portions 42 and 43 are locked, and the second flexible portion 54 and the claw portions 44 are locked. , 45 are locked. The guide member 5 can be easily attached to the base member 4 by engaging the first flexible portion 53 and the second flexible portion 54 with the claw portions 42 to 45, respectively.

As described above, in the present embodiment, the guide member 5 is provided with the flexible first flexible portion 53 and the second flexible portion 54, and the base member 4 is provided with the first flexible portion 53 in the natural state. and claw portions 42 to 45 that engage with the second flexible portion 54 are provided, and according to the bending of the first flexible portion 53 and the second flexible portion 54, the first flexible portion 53 and the second flexible portion 54 and claw portions 42 to 45 are changed between a state in which they are locked and a state in which the locking is released. According to this embodiment, the guide member 5 can be easily attached/detached to/from the object to be fixed (here, the base member 4).

(Modification 1)
FIG. 8 is a diagram showing a configuration of a guide member included in the probe unit according to Modification 1 of the embodiment of the present invention. The probe unit according to Modification 1 includes a guide member 5A instead of the guide member 5 described above. Since other configurations are the same as those of the probe unit 1, description thereof will be omitted.

5 A of guide members are replaced with the bottom part 52 mentioned above, and are provided with 52 A of bottom parts. Since other configurations are the same as those of the probe unit 1, description thereof will be omitted.
The bottom portion 52A is formed with an opening portion 521 that forms an opening corresponding to the arrangement area of the probe 2 . The opening area of the opening 521 should be larger than the formation area of the through hole 52a described above.

In Modification 1, when the guide member 5A is arranged on the base member 4, the probe 2 extends from the bottom portion 52A through the opening 521. As shown in FIG. The behavior of the probe 2 during inspection is the same as in the embodiment described above.

The same effects as those of the above-described embodiment can be obtained in the first modification described above as well.

(Modification 2)
FIG. 9 is a top view showing the configuration of a probe unit according to Modification 2 of the embodiment of the present invention. The probe unit according to Modification 2 includes a base member 4A in place of the base member 4 described above. Since other configurations are the same as those of the probe unit 1, description thereof will be omitted.

A housing portion 41 (see FIG. 4) for housing the probe holder 3 and the guide member 5 is formed in the base member 4A. Further, the base member 4A has claw portions 42 and 45 that engage with the guide member 5. As shown in FIG. The base member 4A has a set of claws (claws 42 and 43, 44 and 45) with respect to the base member 4, and has only one of the claws (claws 42 and 45) in each set. . The base member 4A is made of, for example, a metal such as aluminum or stainless steel (SUS304), a resin such as engineering plastic, or an insulating high-strength material such as machinable ceramic.

In Modified Example 2, when the guide member 5 is arranged on the base member 4B, the probe 2 extends from the bottom portion 52 through the opening portion 521 . At this time, the first flexible portion 53 is engaged with the claw portions 42 and 43 . The behavior of the probe 2 during inspection is the same as in the embodiment described above.

As in Modification 2 described above, even if there is only one locking position by the claw portion, the same effects as those of the above-described embodiment can be obtained.

In addition, although the configuration having the claw portions 42 and 45 has been described in the second modification described above, the claw portions 42 and 44 may be combined, or the claw portions 43 and 44 may be combined. A combination of the claw portions 43 and 45 may be used. Also, the arrangement of the claws can be changed in design as appropriate.

(Modification 3)
FIG. 10 is a top view showing the configuration of a probe unit according to Modification 3 of the embodiment of the present invention. The probe unit according to Modification 3 includes a base member 4B and a guide member 5B instead of the base member 4 and the guide member 5 described above. Since other configurations are the same as those of the probe unit 1, description thereof will be omitted.

A housing portion 41 (see FIG. 4) for housing the probe holder 3 and the guide member 5B is formed in the base member 4B. Moreover, the base member 4B has claw portions 42 and 43 that engage with the guide member 5B. The base member 4</b>B has only one set (claw portions 42 and 43 ) of the set of claw portions (claw portions 42 and 43 , 44 and 45 ) with respect to the base member 4 . The base member 4B is made of, for example, a metal such as aluminum or stainless steel (SUS304), a resin such as engineering plastic, or an insulating high-strength material such as machinable ceramic.

The guide member 5B has a plate shape with partially different thicknesses. The guide member 5B includes a frame portion 51 formed according to the outer edge of the semiconductor integrated circuit, a bottom portion 52 on which the semiconductor integrated circuit is placed, and an elastically deformable portion that engages with the claw portions 42 and 43 of the base member 4. and a first flexible portion 53 . The guide member 5</b>B does not have the second flexible portion 54 with respect to the guide member 5 . The guide member 5B is formed using resin such as PEEK or PES.

In Modification 3, when the guide member 5B is arranged on the base member 4B, the probe 2 extends from the bottom portion 52 through the opening portion 521 . At this time, the first flexible portion 53 is engaged with the claw portions 42 and 43 . The behavior of the probe 2 during inspection is the same as in the embodiment described above.

As in the present modified example 3 described above, even if the locking position of the flexible portion and the claw portion is one, the same effect as the embodiment described above can be obtained.

(Modification 4)
FIG. 11 is a diagram showing a configuration of a guide member included in a probe unit according to Modification 4 of the embodiment of the present invention. The probe unit according to Modification 4 includes a guide member 5C instead of the guide member 5 described above. Since other configurations are the same as those of the probe unit 1, description thereof will be omitted.

The guide member 5C includes a frame portion 51 formed according to the outer edge of the semiconductor integrated circuit, an elastically deformable first flexible portion 53 engaged with the claw portions 42 and 43 of the base member 4, and an elastically deformable second flexible portion 54 that engages with the claw portions 44 and 45 . 5 C of guide members become a structure which does not have the bottom part 52 with respect to the guide member 5. As shown in FIG.
The guide member 5</b>C guides the position of the semiconductor integrated circuit with respect to the base member 4 by means of the frame portion 51 . The behavior of the probe 2 during inspection is the same as in the embodiment described above, except that the bottom portion 52 is not inserted.

In the present modification 4 described above, the guide member 5C for guiding the position of the semiconductor integrated circuit with respect to the base member 4 is provided with the flexible first flexible portion 53 and the second flexible portion 54, and the base member 4 , claw portions 42 to 45 that engage with the first flexible portion 53 and the second flexible portion 54 in the natural state are provided, and according to the bending of the first flexible portion 53 and the second flexible portion 54, the first A state in which the flexible portion 53 and the second flexible portion 54 are locked with the claw portions 42 to 45 and a state in which the locking is released are changed. According to Modification 4, the guide member 5C can be easily attached to and detached from the object to be fixed (here, the base member 4).

It should be noted that, in Modification 4, the probe holder 3 may be configured without the coil spring 6 . Also, the guide pin 7 provided on the base member 4 may be configured without the guide pin 7 . Furthermore, a configuration that does not have the coil spring 6 and the guide pin 7 described above may be used.

In the above-described embodiment, the first flexible portion 53 and the second flexible portion 54 are connected to the opposite sides (side surfaces) of the rectangular frame portion 51 . It may be continuous with (side surface). Also, in the embodiment, an example having two first flexible portions 53 and second flexible portions 54 has been described, but one (see FIG. 10) may be provided, or three or more may be provided. good too. Moreover, even when there is only one flexible portion as in Modification 3 (see FIG. 10), the claw portion may be provided on the side without the flexible portion. From the viewpoint of bending by applying a load, it is preferable that the two flexible portions are provided at opposing positions.

In the above-described embodiment, the first flexible portion 53 and the second flexible portion 54 are C-shaped and have straight portions 53a and 54a extending parallel to the side surfaces of the frame portion 51 in the natural state. However, any shape may be used as long as the locking state with the claw portions 42 to 45 is released when the first flexible portion 53 and the second flexible portion 54 are respectively bent. For example, the linear portion may be wavy or arcuate, or the entire portion including the first connection portion and the second connection portion may be arcuate.

Further, in the above-described embodiment, the frame portion 51 has a horseshoe shape with a part cut out, but it may have an annular shape without a cutout.

In the above-described embodiment, the coil spring 6 has a stepped shape and is held by the probe holder 3. However, the coil spring 6 may be wound with a uniform diameter. In this case, the holding holes 33 also have a hole shape with a uniform diameter.

As described above, the probe unit according to the present invention is suitable for easily attaching and detaching the guide member (guide member) to the fixed object.

1 probe unit 2 contact probe 3 probe holder 4, 4A, 4B base member 5, 5A to 5C guide member 41 housing portion 42 to 45 claw portion 51 frame portion 52 bottom portion 53 first flexible portion 54 second flexible portion

Claims (6)

a contact probe that contacts the electrode to be contacted;
a probe holder that holds the contact probe;
a main body that guides a member that is laminated on the probe holder and has the electrode; and a guide member that extends from the main body and has at least one flexible portion that bends according to an external load;
a base member having an accommodating portion that accommodates and holds the guide member, and at least one claw portion that engages with the flexible portion in the guide member stacked on the probe holder;
with
The main body is
a frame portion for guiding the member having the electrode, the frame portion being formed according to the outer edge of the contact target;
a mounting portion provided in the frame portion for mounting the contact target such that the electrode of the contact target and the contact probe can be brought into contact with each other;
has
The flexible portion is engaged with the claw portion and is elastically deformable, and has an end portion connected to a side surface of the frame portion,
The claw portion of the base member has a convex shape that protrudes toward the inside of the accommodating portion and engages with the flexible portion.
A probe unit characterized by: The mounting portion is a bottom portion through which one end of a contact probe stacked on the probe holder and extending from the probe holder penetrates,
The probe unit according to claim 1, characterized by: The guide member is
The main body has a rectangular outer edge when viewed from the penetrating direction of the opening of the frame ,
The probe unit according to claim 1 or 2, wherein the flexible portions are provided on opposing side surfaces of the main body portion. a coil spring that partially extends from the probe holder and supports the guide member at the extended tip, the spring portion being formed by winding a wire and wound at a predetermined pitch; A coil spring having a base end portion provided at one end of the spring portion and having an outer periphery with a diameter larger than the diameter of the outer periphery of the spring portion,
further comprising
The probe holder has an opening in the end surface of the probe holder, a small diameter part through which a part of the spring part is inserted, and a diameter larger than the small diameter part, and the base end part of the coil spring is accommodated. 4. The probe unit according to any one of claims 1 to 3, wherein a holding hole is formed with a large-diameter portion that The flexible portion is
a locking portion that locks to the claw portion;
a first connection portion extending from one end of the locking portion and continuing to a side surface of the frame portion;
a second connecting portion extending from the other end of the locking portion and continuing to a portion of a side surface of the frame portion that is the same as the side surface to which the first connecting portion is connected and is different from the first connecting portion;
The probe unit according to any one of claims 1 to 4, characterized by having: The frame portion has an opening corresponding to the outer edge of the member having the electrode, and accommodates the member having the electrode in the opening to guide the arrangement position of the member;
a bottom portion through which one end of a contact probe stacked on the probe holder and extending from the probe holder penetrates;
The flexible portion has a belt shape, and each end is connected to a side surface of the frame portion opposite to the opening forming surface side,
When the guide member is accommodated in the accommodating portion, the claw portion engages with the surface of the flexible portion opposite to the base member side in the natural state, and the flexible portion is positioned on the frame portion side. When deformed to become convex, the locked state with the flexible portion is released.
The probe unit according to claim 1, characterized by:

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