JP7196454B2 - table equipment - Google Patents

Description

The present invention relates to a table device.

2. Description of the Related Art A transport device, a machine tool, or a semiconductor manufacturing device uses a table device that slides and positions a table in a process chamber in a vacuum atmosphere or a special gas atmosphere. Patent Literature 1 discloses a stage device having a stage, stator moving units provided on both sides of the stage, and a movable stator coupled to the stage.

In Patent Document 1, a coil is arranged in a stator moving unit, and a magnet is arranged in a moving stator. The movable stator and the stage move with the movement of the stator moving unit due to the attractive force generated between the coil and the magnet.

JP-A-11-287880

The table device may be used in a vacuum atmosphere, a process chamber in a special gas atmosphere, a clean environment, or the like. In Patent Document 1, for example, when a first space in which a moving mechanism is provided and a second space in which an object is inspected are separated by a plate-like member or the like, when a slide is installed in the second space, , a problem arises that the position of the table in the first space cannot be visually observed. In this case, even if the table is placed in the second space in the correct orientation, there is a possibility that the positional relationship between the table in the first space and the table in the second space will be shifted.

The present invention has been made in view of the above problems, and is a table that allows easy determination of whether or not the table in the second space is attached at the correct position with respect to the table in the first space. An object is to provide an apparatus.

In order to achieve the above object, a table device according to an aspect of the present invention has a first surface and a second surface opposite to the first surface, and a first space on the side of the first surface and a a plate-like member that separates the second space from the second surface side; a first substrate that faces the first surface of the plate-like member; and a first substrate that faces the first substrate via the plate-like member. two substrates, a moving mechanism provided in the first space for moving the first substrate, and a support provided between the second substrate and the second surface for movably supporting the second substrate. a first attractive force generating portion having a first polarity facing the first surface and a second attractive force generating portion having a first polarity opposite to the first surface; a second attractive force generating portion having a polarity opposite to the first surface is provided, and the surface of the second substrate facing the second surface has the second polarity opposite to the second surface through the plate-like member; A third attraction force generation portion facing the first attraction force generation portion and a fourth attraction force generation portion facing the second attraction force generation portion with the first polarity through the plate member are provided.

As a result, when the attractive force generating portion of the first substrate and the attractive force generating portion of the second substrate are not properly arranged so as to face each other, the table in the second space is installed in a posture different from the original posture. It will happen. Therefore, an operator or the like can easily grasp that the table in the second space is not properly attached.

As a desirable aspect of the table device, each of the first attraction force generation section, the second attraction force generation section, the third attraction force generation section, and the fourth attraction force generation section is a magnet. Accordingly, it is not necessary to provide a drive circuit, wiring, or the like for operating the first to fourth attraction force generation units, and the configurations of the first substrate and the second substrate can be simplified.

As a desirable aspect of the table device, each of the first attraction force generation section, the second attraction force generation section, the third attraction force generation section, and the fourth attraction force generation section is provided. In the quadrangle obtained by connecting the first attractive force generating portion, the other first attractive force generating portion, the one second attractive force generating portion, and the other second attractive force generating portion, the inside of the opposing sides When the intersection of the virtual lines connecting the points is the first symmetrical point, the first attractive force generating portion on one side and the first attractive force generating portion on the other side are arranged symmetrically with respect to the first symmetrical point. The one second attractive force generating portion and the other second attractive force generating portion are arranged point-symmetrically with respect to the first symmetrical point, and the third attractive force generating portion on one side and the third attractive force generating portion on the other side In the quadrangle obtained by connecting the third attraction generating part of one, the fourth attraction generating part on one side, and the fourth attraction generating part on the other side, the intersection of virtual lines connecting the midpoints of the opposing sides is the second symmetrical point, the third attractive force generating portion on one side and the third attractive force generating portion on the other side are arranged point-symmetrically with respect to the second symmetrical point, and the fourth attractive force generating portion on one side is and the other fourth attractive force generating portion are arranged point-symmetrically with respect to the second point of symmetry. Thereby, the moment rigidity in the yawing direction of the first substrate and the second substrate can be secured.

As a desirable aspect of the table device, the first substrate and the second substrate are rectangular, and one of the first attraction force generation portion and the other of the first attraction force generation portion and one of the second attraction force generation portion and the other second attractive force generating portion are respectively arranged on the first substrate so as to be line symmetrical on a line connecting the midpoints of the opposing sides, and the one third attractive force generating portion and The third attractive force generating portion on the other side, the fourth attractive force generating portion on one side, and the fourth attractive force generating portion on the other side are arranged on the line connecting the midpoints of the opposing sides of the second substrate. They are arranged symmetrically. Thereby, the moment rigidity in the yawing direction of the first substrate and the second substrate can be secured.

As a desirable aspect of the table device, the first substrate and the second substrate are rectangular, and one of the first attractive force generating portions and the other of the first attractive force generating portions are formed in the first substrate by: One of the second attractive force generating portions and the other of the second attractive force generating portions are arranged asymmetrically with respect to a line connecting the midpoints of the opposing sides, and the one of the first attractive force generating portions is arranged and the other first attractive force generating portion, the one second attractive force generating portion, and the other second attractive force generating portion are points with the intersection point of the line connecting the midpoints of the respective sides as a symmetrical point The third attractive force generating portion and the third attractive force generating portion are arranged symmetrically, and the one third attractive force generating portion and the other fourth attractive force generating portion are arranged on the second substrate. are arranged asymmetrically with respect to the line connecting the midpoints of the opposing sides, and the third attraction generating part on one side and the third attraction generating part on the other side, and the fourth attraction generating part on one side and the other fourth attractive force generating portion are arranged point-symmetrically with respect to the point of symmetry of the intersection of the lines connecting the midpoints of the respective sides. Thereby, the moment rigidity in the yawing direction of the first substrate and the second substrate can be secured.

As a desirable aspect of the table device, the first substrate and the second substrate are rectangular, and one of the first attractive force generating portions and the other of the first attractive force generating portions are formed in the first substrate by: One of the second attraction force generating portions and the other of the second attraction generating portions are arranged line-symmetrically with respect to a line connecting the midpoints of the opposing sides, and the one of the first attraction force generating portions is arranged and the other first attractive force generating portion, the one second attractive force generating portion, and the other second attractive force generating portion are points with the intersection point of the line connecting the midpoints of the respective sides as a symmetrical point The third attractive force generating portion and the third attractive force generating portion are arranged symmetrically, and the one third attractive force generating portion and the other fourth attractive force generating portion are arranged on the second substrate. and are arranged line-symmetrically with respect to the line connecting the midpoints of the opposing sides, the third attraction generating part on one side and the third attraction generating part on the other side, and the fourth attraction generating part on one side and the other fourth attractive force generating portion are arranged point-symmetrically with respect to the point of intersection of the lines connecting the midpoints of the respective sides. Thereby, the moment rigidity in the yawing direction of the first substrate and the second substrate can be secured.

As a desirable aspect of the table device, the first attraction force generation section, the second attraction force generation section, the third attraction force generation section, and the fourth attraction force generation section are each covered with a corrosion-resistant layer. As a result, corrosion resistance can be ensured, and gas sterilization using corrosive gas can be performed, so that the table device can be used in a sterile environment.

As a desirable aspect of the table device, the support section has a housing fixed to the second substrate and a ball rotatably provided inside the housing. As a result, the rotation of the ball causes the second substrate to move in the second space along with the movement of the first substrate. Moreover, the structure of the supporting portion is simple, and the structure of the second substrate can also be simplified.

As a desirable aspect of the table device, the plate member and the second substrate are made of a heat-resistant material. According to this, the plate member and the second substrate can be easily sterilized by high-temperature steam sterilization, dry heat sterilization, or the like.

ADVANTAGE OF THE INVENTION According to this invention, it can be easily judged whether the table of 1st space is attached to the table of 2nd space in the correct position.

FIG. 1 is a perspective view of a table device according to each embodiment of the present invention. FIG. 2 is a cross-sectional view taken along line AA in FIG. FIG. 3 is a plan view of the first substrate according to the first embodiment of the invention. FIG. 4 is a plan view of a second substrate according to the first embodiment of the invention. FIG. 5 is a diagram for explaining the location of the attractive force generating section according to the first embodiment of the present invention. FIG. 6 is a diagram showing an example of how the postures of the first substrate and the second substrate are shifted according to the first embodiment of the present invention. FIG. 7 is a side view showing an example of the second moving mechanism according to each embodiment of the invention. FIG. 8 is a plan view of a first substrate according to a second embodiment of the invention. FIG. 9 is a plan view of a second substrate according to a second embodiment of the invention. 10A and 10B are diagrams for explaining the places where the attractive force generating units according to the second embodiment of the present invention are arranged. FIG. FIG. 11 is a diagram showing an example of how the postures of the first substrate and the second substrate are shifted according to the second embodiment of the present invention. FIG. 12 is a plan view of the first substrate according to the third embodiment of the invention. FIG. 13 is a plan view of a second substrate according to the third embodiment of the invention. 14A and 14B are diagrams for explaining a method of arranging the attractive force generating portion according to the third embodiment of the present invention. FIG. FIG. 15 is a diagram showing an example of how the postures of the first substrate and the second substrate are deviated according to the third embodiment of the present invention.

Hereinafter, the present invention will be described in detail with reference to the drawings. It should be noted that the present invention is not limited by the following modes for carrying out the invention (hereinafter referred to as embodiments). In addition, components in the following embodiments include those that can be easily assumed by those skilled in the art, those that are substantially the same, and those that fall within a so-called equivalent range. Furthermore, the constituent elements disclosed in the following embodiments can be combined as appropriate.

FIG. 1 is a perspective view of a table device according to each embodiment of the present invention. FIG. 2 is a cross-sectional view taken along line AA in FIG. FIG. 3 is a plan view of the first substrate according to the first embodiment of the invention. FIG. 4 is a plan view of a second substrate according to the second embodiment according to the first embodiment of the present invention.

[First embodiment]
As shown in FIG. 1 , the table device 1 includes a housing 2 , a first table 3 , a second table 4 , a first moving mechanism 6 and a second moving mechanism 7 . The first table 3 , the first moving mechanism 6 and the second moving mechanism 7 are provided in the first space P inside the housing 2 . A second table 4 is provided in a second space R outside the housing 2 . The second space R is a space for maintaining a specific environment and performing positioning, processing, inspection, etc. of an operation target. The second space R may be any space that can maintain a specific environment suitable for work. The second space R can be applied to various environments such as vacuum, reduced pressure, gas replacement (reduced pressure or positive pressure), different temperature space, clean environment, and foreign matter environment. For example, the table device 1 is used for bio applications such as collection of samples such as cells and various tests. In this case, the second space R is a clean environment, and the second table 4 in the second space R is sterilized by high-temperature steam sterilization, dry heat sterilization, or the like.

The housing 2 includes a plate member 21 . The plate-like member 21 is a plate-like member extending in a direction perpendicular to the side surface of the housing 2 and provided integrally with the housing 2 . The first space P and the second space R are separated by a plate member 21 . In this embodiment, the plate member 21 is a non-magnetic material, and non-magnetic stainless steel or the like is used. Non-magnetic stainless steels include alloy austenitic stainless steels (such as SUS316, for example).

In this embodiment, one direction in the horizontal plane is the X direction, the direction intersecting the X direction in the horizontal plane is the Y direction, and the direction intersecting the X direction and the Y direction (that is, the vertical direction) is the Z direction. and The plate member 21 is parallel to a plane formed by the X direction and the Y direction.

As shown in FIG. 2, the plate member 21 has a first surface 21a and a second surface 21b opposite to the first surface 21a. The first space P is a space on the side of the first surface 21a. The second space R is a space on the second surface 21b side. The first space P and the second space R are separated by the plate member 21 . The plate-like member 21 is a continuous plate-like member that is not provided with a hole or the like that allows the first space P and the second space R to communicate with each other. The plate member 21 is continuous at least in a region overlapping the movable ranges of the first table 3 and the second table 4, and is not provided with holes or the like. As a result, it is possible to suppress the flow of gas containing foreign matter generated by the operations of the first moving mechanism 6 and the second moving mechanism 7 from the first space P into the second space R. Therefore, the environment of the second space R can be maintained.

The first table 3 includes a first substrate 31 , a first attractive force generating portion 32 and a first support portion 34 . The first substrate 31 is a plate-shaped member having a first principal surface 31a and a second principal surface 31b opposite to the first principal surface 31a. The first main surface 31a of the first substrate 31 faces the first surface 21a of the plate member 21 with a gap therebetween. The second main surface 31 b of the first substrate 31 is connected with the connecting portion 77 of the second moving mechanism 7 . The first substrate 31 moves in a plane parallel to the first surface 21 a of the plate member 21 by the operations of the first moving mechanism 6 and the second moving mechanism 7 .

The first attractive force generating portion 32 and the first support portion 34 are provided on the first major surface 31 a of the first substrate 31 . In other words, the first attractive force generating portion 32 and the first support portion 34 are provided between the first substrate 31 and the plate member 21 . In the present embodiment, the first attractive force generator 32 is, for example, a magnet, such as a heat-resistant neodymium magnet or a cobalt magnet. The heat resistant temperature of the heat resistant neodymium magnet is about 150°C. The heat resistance temperature of cobalt magnets is about 200°C. The first attractive force generating portion 32 has an S pole in contact with the first main surface 31a. Although details will be described later, as shown in FIG. 3, on the first main surface 31a, in addition to the first attractive force generating portion 32, a second attractive force generating portion whose N pole is in contact with the first main surface 31a is provided. 33 are arranged.

The first support portion 34 includes a housing 341 and balls 342 . The housing 341 is fixed to the first substrate 31 . The ball 342 is rotatably provided within the recess of the housing 341 . The ball 342 is in contact with the first surface 21 a of the plate member 21 . The first support portion 34 is, for example, a ball roller, and the rotation of the balls 342 allows the first substrate 31 to freely move along the first surface 21 a of the plate member 21 . Since the first supporting portion 34 is provided, it is possible to prevent the first attractive force generating portion 32 from coming into contact with the plate-like member 21, so that the first substrate 31 can move smoothly.

As shown in FIG. 3, the first substrate 31 has a rectangular shape in plan view. 3 is a plan view of the first substrate 31 viewed from the first main surface 31a side. The first substrate 31 has a first side surface 31c, a second side surface 31d, a third side surface 31e and a fourth side surface 31f. The first side surface 31c, the second side surface 31d, the third side surface 31e, and the fourth side surface 31f are surfaces between the first main surface 31a and the second main surface 31b. The first side surface 31c faces the second side surface 31d. The third side surface 31e is between the first side surface 31c and the second side surface 31d and faces the fourth side surface 31f.

The first support portions 34 are provided at each of the four corners of the first main surface 31 a of the first substrate 31 . Two first attractive force generating portions 321 and 322 and two second attractive force generating portions 331 and 332 are provided on the first major surface 31 a of the first substrate 31 . In this case, the S poles of the first attractive force generating portions 321 and 322 are in contact with the first main surface 31a, and the N poles of the second attractive force generating portions 331 and 332 are in contact with the first main surface 31a. Here, a virtual line connecting the middle point of the third side surface 31e in the X direction and the middle point of the fourth side surface 31f in the X direction is defined as a virtual line B1. A virtual line B2 connects the middle point of the first side surface 31c in the Y direction and the middle point of the second side surface 31d in the Y direction. The first attractive force generating portions 321 and 322 are provided on the outer edge of the first main surface 31a at positions overlapping the imaginary line B1. In addition, the second attractive force generating portions 331 and 332 are provided on the outer edge of the first main surface 31a at positions overlapping the imaginary line B2. Note that the first support portion 34 does not necessarily need to be provided if the attractive force of each attractive force generating portion and the rigidity of the plate-like member 21 are appropriately set.

As shown in FIG. 2, the second table 4 includes a second substrate 41, a third attractive force generating section 42, and a second support section 44. As shown in FIG. The second substrate 41 is a plate-like member having a third principal surface 41a and a fourth principal surface 41b opposite to the third principal surface 41a. The fourth main surface 41b of the second substrate 41 faces the second surface 21b of the plate-like member 21 while being separated therefrom. That is, the second substrate 41 faces the first substrate 31 with the plate member 21 interposed therebetween. A third main surface 41a of the second substrate 41 is a surface on which an operation target is placed.

The third attractive force generating portion 42 and the second support portion 44 are provided on the fourth main surface 41 b of the second substrate 41 . In other words, the third attractive force generating portion 42 and the second support portion 44 are provided between the second substrate 41 and the plate member 21 . In this embodiment, the third attractive force generator 42 is a magnet, and for example, a heat-resistant neodymium magnet or a cobalt magnet can be used. The heat resistant temperature of the heat resistant neodymium magnet is about 150°C. The heat resistance temperature of cobalt magnets is about 200°C. The N pole of the third attractive force generating portion 42 is in contact with the fourth main surface 41b. Although the details will be described later, as shown in FIG. 4, the fourth main surface 41b includes a fourth attractive force generating portion having an S pole in contact with the fourth main surface 41b in addition to the third attractive force generating portion 42. 43 are arranged.

The third attractive force generator 42 faces the first attractive force generator 32 with the plate member 21 interposed therebetween. That is, the third attractive force generating portion 42 is arranged at a position overlapping the first attractive force generating portion 32 when viewed in the Z direction. The third attractive force generating portion 42 is arranged such that the poles different from those of the first attractive force generating portion 32 face each other. In the example shown in FIG. 2, the south pole of the third attraction force generating section 42 and the north pole of the first attraction force generating section 32 face each other. As a result, an attractive force F<b>1 is generated between the first attractive force generating portion 32 and the third attractive force generating portion 42 . That is, an attractive force F<b>1 directed toward the first substrate 31 acts on the second substrate 41 . Thereby, the second substrate 41 can move along the second surface 21 b of the plate member 21 following the movement of the first substrate 31 . 3 and 4, the fourth attractive force generator 43 faces the second attractive force generator 33 via the plate member. That is, the fourth attractive force generating portion 43 is arranged at a position overlapping the second attractive force generating portion 33 when viewed in the Z direction. As a result, an attractive force is generated between the second attractive force generating portion 33 and the fourth attractive force generating portion 43 .

The second support portion 44 includes a housing 441 and balls 442 . The second support portion 44 has the same configuration as the first support portion 34, and is, for example, a ball roller. The second support portion 44 supports the second substrate 41 so as to be freely movable along the first surface 21 a of the plate-like member 21 . Further, since the second support portion 44 is provided, it is possible to prevent the third attractive force generating portion 42 from coming into contact with the plate-like member 21 . Therefore, the second substrate 41 can smoothly move following the movement of the first substrate 31 .

As shown in FIG. 4, the second substrate 41 has a rectangular shape in plan view. 4 is a plan view of the second substrate 41 as viewed from the fourth main surface 41b side. As is clear from FIG. 2, when the second table 4 is attached, FIG. It faces the first substrate 31 shown in FIG. 3 in a repeated state. The second substrate 41 has a fifth side surface 41c, a sixth side surface 41d, a seventh side surface 41e and an eighth side surface 41f. The fifth side surface 41c, the sixth side surface 41d, the seventh side surface 41e, and the eighth side surface 41f are surfaces between the third main surface 41a and the fourth main surface 41b. The fifth side surface 41c faces the sixth side surface 41d. The seventh side surface 41e is between the fifth side surface 41c and the sixth side surface 41d and faces the eighth side surface 41f.

The arrangement of the second support portion 44 is the same as the arrangement of the first support portion 34 shown in FIG. That is, the second support portions 44 are provided at each of the four corners of the fourth main surface 41 b of the second substrate 41 . As a result, the four second support portions 44 are provided at positions overlapping the first support portions 34, respectively.

The fourth main surface 41 b of the second substrate 41 is provided with two third attractive force generating portions 421 and 422 and two fourth attractive force generating portions 431 and 432 . In this case, the N poles of the third attractive force generating portions 421 and 422 are in contact with the fourth main surface 41b, and the S poles of the fourth attractive force generating portions 431 and 432 are in contact with the fourth main surface 41b. Here, a virtual line B3 connects the middle point of the seventh side surface 41e in the X direction and the middle point of the eighth side surface 41f in the X direction. A virtual line B4 connects the middle point of the fifth side surface 41c in the Y direction and the middle point of the sixth side surface 41d in the Y direction. The third attractive force generating portions 421 and 422 are provided on the outer edge of the fourth main surface 41b at positions overlapping the imaginary line B3. Further, the fourth attractive force generating portions 431 and 432 are provided on the outer edge of the fourth main surface 41b at positions overlapping the imaginary line B4. That is, the third attractive force generators 421 and 422 are provided at positions overlapping the first attractive force generators 321 and 322 shown in FIG. 3, respectively. The fourth attractive force generators 431 and 432 are provided at positions overlapping the second attractive force generators 331 and 332 shown in FIG. 3, respectively.

A method of arranging each attractive force generation unit on the first table 3 will be described more specifically with reference to FIG. FIG. 5 is a diagram for explaining a method of arranging each attractive force generator on the first table 3. FIG. The method of arranging each attractive force generating unit on the second table 4 is the same as that for the first table 3, so the explanation is omitted.

As shown in FIG. 5, the midpoint of a virtual line connecting the second attractive force generating portion 331 and the first attractive force generating portion 321 is defined as P1. The intersection point of the imaginary line connecting the first attractive force generating portion 321 and the second attractive force generating portion 332 is defined as P2. The midpoint of the imaginary line connecting the second attractive force generating portion 332 and the first attractive force generating portion 322 is defined as P3. The midpoint of the imaginary line connecting the first attractive force generating portion 322 and the second attractive force generating portion 331 is assumed to be P4. A point of symmetry S1 is defined as the intersection of the virtual line connecting the points P1 and P3 and the virtual line connecting the points P2 and P4.

In this case, in the first embodiment, the first attractive force generating portion 321 and the first attractive force generating portion 322 are arranged so as to be symmetrical with respect to the symmetrical point S1. In addition, in the first embodiment, the second attractive force generating portion 331 and the second attractive force generating portion 332 are arranged so as to be symmetrical with respect to the symmetrical point S1.

In the first embodiment, the moment rigidity in the yawing direction of the first table 3 and the second table 4 can be ensured by arranging the respective attractive force generating portions as described above.

FIG. 6 is a diagram showing an example of a situation when the second table 4 is not installed correctly. As shown in FIG. 6, in the present embodiment, when the second table 4 is not installed correctly, for example, even if the second attractive force generating section 331 and the fourth attractive force generating section 431 overlap each other, the third attractive force is generated. The portion 422 and the first attractive force generating portion 321 overlap. In this case, the second table 4 is attached in a posture different from that when it is attached normally. Accordingly, in the present embodiment, the operator or the like can easily recognize that the second table 4 is not properly installed only by visual inspection.

Refer to FIG. 1 again. At least the plate member 21 of the housing 2 is made of a material having excellent heat resistance and corrosion resistance. As a result, the plate member 21 can also be easily sterilized. The second table 4 and the housing 2 can be easily removed from the table device 1 . Therefore, sterilization can be performed by removing the second table 4 and the housing 2 from the table device 1 and placing them in a high temperature steam sterilization device or a dry heat sterilization device. In this case, a material having excellent heat resistance and corrosion resistance is used for the entire housing 2 including the plate member 21 . Further, since the first space P and the second space R are separated by the housing 2, it is possible to sterilize only the second space R by injecting gas, for example.

The first moving mechanism 6 and the second moving mechanism 7 shown in FIG. 1 are XY stages. The 1st moving mechanism 6 and the 2nd moving mechanism 7 have the same structure. In the following description, the second moving mechanism 7 will be taken as an example. The description of the second moving mechanism 7 can also be applied to the description of the first moving mechanism 6 .

FIG. 7 is a side view showing an example of the configuration of the second moving mechanism 7. As shown in FIG. As shown in FIG. 7 , the second moving mechanism 7 is a ball screw mechanism including a motor 71 , a ball screw 73 , a nut 76 and a housing 74 . The second moving mechanism 7 is a drive transmission unit that converts the rotational driving force transmitted from the motor 71 into motion in the axial direction of the ball screw 73 and transmits the motion to the first substrate 31 .

The ball screw 73 and nut 76 are incorporated inside the housing 74 . Ball screw 73 passes through nut 76 . The ball screw 73 is rotatably supported by the housing 74 , and one end of the ball screw 73 is connected to the motor 71 via the shaft 72 . Thereby, the output of the motor 71 is transmitted to the ball screw 73, and the ball screw 73 is rotatable.

The nut 76 is provided movably along the guide rail 75 . Moreover, rotation of the nut 76 is restricted by being incorporated in the guide rail 75 . As a result, the nut 76 moves axially as the ball screw 73 rotates. The direction of movement of the nut 76 is switched according to the direction of rotation of the ball screw 73 .

The connecting portion 77 is a member that connects the nut 76 and the first substrate 31 and is movable in the axial direction along with the movement of the nut 76 . By appropriately changing the thickness and planar shape of the connecting portion 77, the first substrate 31 and the nut 76 can be satisfactorily connected even when the planar shape and height position of the first substrate 31 are changed.

With the above configuration, the second moving mechanism 7 moves the first substrate 31 along with the nut 76 in the axial direction when the rotational drive of the motor 71 is transmitted to the ball screw 73 . As shown in FIG. 1 , a second moving mechanism 7 is movably fixed to the first moving mechanism 6 . The operation of the first moving mechanism 6 allows the second moving mechanism 7 and the first table 3 to move in the X direction. The operation of the second moving mechanism 7 allows the first table 3 to move in the Y direction. In this manner, the first table 3 can move on a plane parallel to the plate member 21 .

The configurations of the first moving mechanism 6 and the second moving mechanism 7 are merely examples, and do not limit the present invention. The first moving mechanism 6 and the second moving mechanism 7 may be configured to move the first table 3 including the first substrate 31 . Various other moving mechanisms can be used as the first moving mechanism 6 and the second moving mechanism 7, and for example, a moving mechanism using a linear motor can be used.

[Second embodiment]
Arrangement of each attractive force generation unit according to the second embodiment of the present invention will be described with reference to FIGS. 8 and 9. FIG. FIG. 8 is a plan view of a first substrate according to a second embodiment of the invention. FIG. 9 is a plan view of a second substrate according to a second embodiment of the invention. The structure of the second embodiment other than the arrangement of the attractive force generating portions is the same as that of the first embodiment, so the description is omitted.

As shown in FIG. 8, in the second embodiment, on the first substrate 31A of the first table 3A, the point of intersection between the virtual line B1 and the virtual line B2 is the symmetry point S2. In this case, in the second embodiment, the first attractive force generating portion 321A and the first attractive force generating portion 322A are arranged point-symmetrically with respect to the symmetry point S2. The first attractive force generating portion 321A and the second attractive force generating portion 331A are arranged asymmetrically with respect to the virtual line B2. The first attractive force generating portion 321A and the second attractive force generating portion 332A are arranged asymmetrically with respect to the virtual line B1.

The first attractive force generating portion 322A and the second attractive force generating portion 331A are arranged asymmetrically with respect to the virtual line B1. The first attractive force generating portion 322A and the second attractive force generating portion 332A are arranged asymmetrically with respect to the virtual line B2.

The second attractive force generating portion 331A and the second attractive force generating portion 332A are arranged symmetrically with respect to the symmetrical point S2. That is, in the second embodiment, the attraction force generation portions are arranged in the order of the second attraction force generation portion 331A, the first attraction force generation portion 321A, the second attraction force generation portion 332A, the first attraction force generation portion 322A, and the second attraction force generation portion 331A. The connecting lines are arranged to form a parallelogram.

As shown in FIG. 9, in the second substrate 41A of the second table 4A, in the second embodiment, the point of intersection between the virtual line B3 and the virtual line B4 is the symmetry point S3. In this case, in the second embodiment, the third attractive force generating portion 421A and the third attractive force generating portion 422A are arranged point-symmetrically with respect to the symmetry point S3. The third attractive force generating portion 421A and the fourth attractive force generating portion 431A are arranged asymmetrically with respect to the virtual line B4. The third attractive force generating portion 421A and the fourth attractive force generating portion 432A are arranged asymmetrically with respect to the virtual line B3.

The third attractive force generating portion 422A and the fourth attractive force generating portion 431A are arranged asymmetrically with respect to the virtual line B3. The third attractive force generating portion 422A and the fourth attractive force generating portion 432A are arranged asymmetrically with respect to the virtual line B4.

The fourth attractive force generating portion 431A and the fourth attractive force generating portion 432A are arranged symmetrically with respect to the symmetry point S3. That is, in the second embodiment, the line connecting the fourth attraction force generation portion 431A, the third attraction force generation portion 421A, the fourth attraction force generation portion 432A, the third attraction force generation portion 422A, and the fourth attraction force generation portion 431A in this order is a parallelogram. Arrange so that

Using FIG. 10, a more specific description will be given of a method of arranging each attractive force generating section on the first table 3A. 10A and 10B are diagrams for explaining a method of arranging each attractive force generation unit on the first table 3A. The method of arranging each attractive force generating part on the second table 4A is the same as that for the first table 3A, so the explanation is omitted.

As shown in FIG. 10, the midpoint of an imaginary line connecting the second attractive force generating portion 331A and the first attractive force generating portion 321A is defined as P1. Let P2 be the intersection point of the imaginary line connecting the first attractive force generating portion 321A and the second attractive force generating portion 332A. Let P3 be the midpoint of the virtual line connecting the second attractive force generating portion 332A and the first attractive force generating portion 322A. The midpoint of the imaginary line connecting the first attractive force generating portion 322A and the second attractive force generating portion 331A is assumed to be P4. A point of symmetry S4 is defined as the intersection of the virtual line connecting the points P1 and P3 and the virtual line connecting the points P2 and P4.

In this case, in the second embodiment, the first attractive force generating portion 321A and the first attractive force generating portion 322A are arranged symmetrically with respect to the symmetry point S4. In addition, in the second embodiment, the second attractive force generating portion 331A and the second attractive force generating portion 332A are arranged symmetrically with respect to the symmetry point S4.

In the second embodiment, by arranging the attractive force generating portions as described above, it is possible to ensure the moment rigidity in the yawing direction of the first table 3A and the second table 4A.

FIG. 11 is a diagram showing an example of a situation when the second table 4A is not installed correctly. As shown in FIG. 11, in the second embodiment, for example, even if the first attractive force generating portion 321A and the third attractive force generating portion 421A are properly overlapped, the second table 4A is normally attached. may be mounted in different orientations. As a result, in this embodiment, the operator or the like can easily recognize that the second table 4A is not properly installed only by visual inspection.

[Third embodiment]
12 and 13, the arrangement of each attractive force generating section according to the third embodiment of the present invention will be described. FIG. 12 is a plan view of the first substrate according to the third embodiment of the invention. FIG. 13 is a plan view of a second substrate according to the third embodiment of the invention. The structure of the third embodiment other than the arrangement of the attractive force generating portions is the same as that of the first embodiment, so the description is omitted.

As shown in FIG. 12, in the first substrate 31B of the first table 3B, in the third embodiment, the point of intersection between the virtual line B1 and the virtual line B2 is the symmetry point S5.

In the third embodiment, the first attractive force generating portion 321B and the first attractive force generating portion 322B are arranged symmetrically with respect to the symmetrical point S5. The first attractive force generator 321B and the second attractive force generator 331B are arranged line-symmetrically with respect to the virtual line B2. The first attractive force generator 321B and the second attractive force generator 332B are arranged line-symmetrically with respect to the virtual line B1.

The first attractive force generating portion 322B and the second attractive force generating portion 331B are arranged so as to be symmetrical with respect to the virtual line B1. The first attractive force generating portion 322B and the second attractive force generating portion 332B are arranged so as to be symmetrical with respect to the virtual line B2.

The second attractive force generating portion 331B and the second attractive force generating portion 332B are arranged symmetrically with respect to the symmetry point S5.

As shown in FIG. 13, in the third embodiment, in the second substrate 41B of the second table 4B, the point of intersection between the virtual line B3 and the virtual line B4 is the symmetry point S6.

In the third embodiment, the third attractive force generating portion 421B and the third attractive force generating portion 422B are arranged point-symmetrically with respect to the symmetry point S6. The third attractive force generator 421B and the fourth attractive force generator 431B are arranged line-symmetrically with respect to the virtual line B4. The third attractive force generator 421B and the fourth attractive force generator 432B are arranged line-symmetrically with respect to the virtual line B3.

The third attractive force generator 422B and the fourth attractive force generator 431B are arranged line-symmetrically with respect to the virtual line B3. The third attractive force generating portion 422B and the fourth attractive force generating portion 432B are arranged line-symmetrically with respect to the virtual line B4.

The fourth attractive force generating portion 431B and the fourth attractive force generating portion 432B are arranged symmetrically with respect to the symmetry point S6.

Using FIG. 14, a more specific description will be given of a method of arranging each attractive force generating section on the first table 3B. 14A and 14B are diagrams for explaining a method of arranging each attractive force generation unit on the first table 3B. The method of arranging each attractive force generating part on the second table 4B is the same as that for the first table 3B, so the explanation is omitted.

As shown in FIG. 14, the midpoint of the imaginary line connecting the second attractive force generating portion 331B and the first attractive force generating portion 321B is defined as P1. Let P2 be the intersection point of the imaginary line connecting the first attractive force generating portion 321B and the second attractive force generating portion 332B. The midpoint of the imaginary line connecting the second attractive force generating portion 332B and the first attractive force generating portion 322B is assumed to be P3. The midpoint of the imaginary line connecting the first attractive force generating portion 322B and the second attractive force generating portion 331B is assumed to be P4. The point of intersection of the virtual line connecting the points P1 and P3 and the virtual line connecting the points P2 and P4 is defined as a symmetry point S7.

In this case, in the third embodiment, the first attractive force generating portion 321B and the first attractive force generating portion 322B are arranged symmetrically with respect to the symmetry point S7. In addition, in the third embodiment, the second attractive force generating portion 331B and the second attractive force generating portion 332B are arranged so as to be symmetrical with respect to the symmetrical point S7.

In the third embodiment, by arranging the respective attractive force generating portions as described above, it is possible to ensure the moment rigidity in the yawing direction of the first table 3B and the second table 4B.

FIG. 15 is a diagram showing an example of a situation when the second table 4B is not installed correctly. As shown in FIG. 15, in the present embodiment, for example, even if the first attractive force generating portion 321B and the third attractive force generating portion 421B are properly overlapped, the second table 4B is normally attached. , may be mounted in different orientations. Accordingly, in the present embodiment, the operator or the like can easily recognize that the second table 4B is not properly installed only by visual inspection.

In each embodiment of the present invention described above, each attraction generating portion is preferably covered with a corrosion-resistant layer to prevent corrosion. For example, each attractive force generating part is preferably coated with fluorine. In addition, the first support portion 34 and the second support portion 44 of each embodiment are made of, for example, a stainless steel material, and the surfaces thereof are processed to form a fluorine oil baking film. preferable. It is preferable to use austenitic stainless steel (SUS304, SUS316, etc.) for other members. As a result, corrosion resistance can be ensured, and gas sterilization using corrosive gas can be performed. Therefore, in each embodiment the table apparatus 1 can be used in a sterile environment. In each embodiment, corrosion resistance indicates resistance to, for example, physiological saline and corrosive gases. The strength of corrosion resistance can be appropriately set according to the purpose of using the table device 1 . In order to impart corrosion resistance to each member constituting the table device 1, PEEK (Poly Ether Ether Ketone) or resin having high corrosion resistance such as fluorine resin may be used. Further, each member may be made of steel such as SUJ2 (high carbon chromium bearing steel) which is processed to form a fluorinated oil baking film.

Also, as described above, in each embodiment of the present invention, each attractive force generator is a magnet. Therefore, it is not necessary to provide a drive circuit or wiring for driving each attractive force generating section, and the configurations of the first substrate 31 and the second substrate 41 can be simplified. In other words, there is no need to provide a moving mechanism, drive circuit, wiring, etc. for moving the second substrate 41 in the second space R. Moreover, when a heat-resistant neodymium magnet is used for each attractive force generating part, the heat-resistant temperature is about 150.degree. A material having excellent heat resistance is used for the second substrate 41, the third attractive force generating portions 421 and 422, the fourth attractive force generating portions 431 and 432, and the second support portion . Therefore, when the table device 1 is used in a clean environment such as biotechnology, the second table 4 can be easily sterilized by high-temperature steam sterilization, dry heat sterilization, or the like.

In addition, in each embodiment, although each attractive force generation part is a magnet, it is not limited to this. For example, each attractive force generator may be configured to include a coil and a yoke. In this case, by changing the current flowing through the coil, it is possible to generate an attractive force between each attractive force generating portion and the opposing attractive force generating portion.

1 table device 2 housing 21 plate member 21a first surface 21b second surface 3, 3A, 3B first table 31, 31A, 31B first substrate 31a first main surface 31b second main surface 32, 321, 322, 321A, 322A, 321B, 322B 1st attractive force generating part 33, 331, 332, 331A, 332A, 331B, 332B 2nd attractive force generating part 34 1st supporting part 4, 4A 4B 2nd table 41, 41A, 41B 2nd substrate 41a third main surface 41b fourth main surface 42, 421, 422, 421A, 422A, 421B, 422B third attractive force generating portion 43, 431, 432, 431A, 432A, 431B, 432B fourth attractive force generating portion 44 second support Part 6 First Moving Mechanism 7 Second Moving Mechanism 77 Connecting Part P First Space R Second Space

Claims (8)

a plate-shaped member having a first surface and a second surface opposite to the first surface and separating a first space on the side of the first surface from a second space on the side of the second surface;
a first substrate facing the first surface of the plate member;
a second substrate facing the first substrate via the plate member;
a moving mechanism provided in the first space for moving the first substrate;
a support part provided between the second substrate and the second surface and movably supporting the second substrate;
In the first substrate, a surface facing the first surface includes a first attractive force generating portion having a first polarity facing the first surface and a second polarity different from the first polarity. and two second attractive force generation units facing each other ,
In the second substrate, on a surface facing the second surface, a third attraction force generation portion having the second polarity facing the first attraction force generation portion via the plate member, and the plate member. Two fourth attraction force generation units are provided in which the first polarity is opposed to the second attraction force generation unit through each ,
Opposing sides of a quadrangle obtained by connecting the first attraction generating portion on one side, the first attraction generating portion on the other side, the second attraction generating portion on one side, and the second attraction generating portion on the other side When the intersection of the virtual lines connecting the midpoints of is set as the first symmetry point, the first attraction force generation part on one side and the first attraction force generation part on the other side are points with respect to the first symmetry point one of the second attraction force generating portions and the other of the second attraction force generating portions are arranged symmetrically with respect to the first point of symmetry,
Opposing sides in a quadrangle obtained by connecting the third attraction generating part on one side, the third attraction generating part on the other side, the fourth attraction generating part on one side, and the fourth attraction generating part on the other side When the intersection of the virtual lines connecting the midpoints of is set as the second symmetric point, the third attraction generating part on one side and the third attraction generating part on the other side are points with respect to the second symmetric point The fourth attractive force generating portion on one side and the fourth attractive force generating portion on the other side are arranged symmetrically with respect to the second point of symmetry ,
table device. The first attraction force generation unit, the second attraction force generation unit, the third attraction force generation unit, and the fourth attraction force generation unit are magnets, respectively.
The table device according to claim 1. The first substrate and the second substrate are rectangular,
The first attractive force generating portion on one side and the first attractive force generating portion on the other side, and the second attractive force generating portion on one side and the second attractive force generating portion on the other side are opposed to each other on the first substrate. It is arranged so as to be symmetrical on the line connecting the midpoints of the sides,
The third attractive force generating portion on one side and the third attractive force generating portion on the other side, and the fourth attractive force generating portion on one side and the fourth attractive force generating portion on the other side are opposed to each other on the second substrate. are arranged symmetrically on the line connecting the midpoints of the sides,
3. The table device according to claim 1 or 2 . The first substrate and the second substrate are rectangular,
One of the first attractive force generating portions and the other of the first attractive force generating portions are opposed to the one of the second attractive force generating portions and the other of the second attractive force generating portions on the first substrate. are arranged asymmetrically with respect to the line connecting the midpoints of each side of
The first attractive force generating portion on one side and the first attractive force generating portion on the other side, and the second attractive force generating portion on one side and the second attractive force generating portion on the other side respectively connect the midpoints of the respective sides. It is arranged symmetrically with the intersection of the lines as the symmetrical point,
One of the third attractive force generating portions and the other of the third attractive force generating portions are opposed to the one of the fourth attractive force generating portions and the other of the fourth attractive force generating portions on the second substrate. are arranged asymmetrically with respect to the line connecting the midpoints of each side of
The third attractive force generating portion on one side and the third attractive force generating portion on the other side, and the fourth attractive force generating portion on one side and the fourth attractive force generating portion on the other side respectively connect the midpoints of the respective sides. are arranged symmetrically with the intersection of the lines as the point of symmetry,
3. The table device according to claim 1 or 2 . The first substrate and the second substrate are rectangular,
One of the first attractive force generating portions and the other of the first attractive force generating portions is, in the first substrate, relative to the one of the second attractive force generating portions and the other of the second attractive force generating portions, arranged symmetrically with respect to the line connecting the midpoints of the opposing sides,
The first attractive force generating portion on one side and the first attractive force generating portion on the other side, and the second attractive force generating portion on one side and the second attractive force generating portion on the other side respectively connect the midpoints of the respective sides. It is arranged symmetrically with the intersection of the lines as the symmetrical point,
One of the third attractive force generating portions and the other of the third attractive force generating portions are opposed to the one of the fourth attractive force generating portions and the other of the fourth attractive force generating portions on the second substrate. are arranged symmetrically with respect to the line connecting the midpoints of each side,
The third attractive force generating portion on one side and the third attractive force generating portion on the other side, and the fourth attractive force generating portion on one side and the fourth attractive force generating portion on the other side respectively connect the midpoints of the respective sides. are arranged symmetrically with the intersection of the lines as the point of symmetry,
3. The table device according to claim 1 or 2 . The first attraction force generation unit, the second attraction force generation unit, the third attraction force generation unit, and the fourth attraction force generation unit are each covered with a corrosion-resistant layer,
The table device according to any one of claims 1 to 5 . the support portion includes a housing fixed to the second substrate;
a ball rotatably mounted within the housing;
A table device according to any one of claims 1 to 6 . The plate member and the second substrate are heat-resistant materials,
A table device according to any one of claims 1 to 7 .

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