JP7181028B2 - Machining equipment maintenance method and machining equipment - Google Patents

Description

The present invention relates to a processing apparatus maintenance method and processing apparatus.

If the depth of cut of the cutting device is not stable, it is suspected that the flatness of the holding surface of the holding table has deteriorated.

In the cutting device, a holding table (chuck table) is mounted on a table base. This holding table is replaced according to the size of the workpiece. Therefore, the holding table and the table base may come into contact with each other during replacement, and the holding table and the table base may be damaged.

In addition, if the holding table is not frequently replaced, the holding table and the table base may rust due to cutting water that has entered between them. may worsen.

In order to check the flatness of the holding surface of the holding table, a dial gauge is usually fixed to the spindle shaft using a fixing jig as disclosed in Patent Document 1, for example. Then, using a dial gauge, the height position of the holding surface of the holding table placed on the table base is measured.

JP 2013-108823 A

However, there are times when the dial gauge is not at hand. Even in such a case, there is a demand to detect the flatness of the holding surface of the holding table.
SUMMARY OF THE INVENTION An object of the present invention is to detect the flatness of the holding surface of a holding table even without a measuring instrument such as a dial gauge.

A maintenance method (main maintenance method) of the present invention includes a holding table including a holding surface for holding a workpiece, a processing means for machining the workpiece held by the holding table, and a workpiece held by the holding table. and an image capturing means having an image capturing camera for capturing an image of the workpiece, wherein the image capturing camera is moved in a direction approaching a first location of the holding surface of the holding table. A first focus for forming a plurality of picked-up images by picking up an image of the first location of the holding surface while moving relative to each other, and detecting a first focus position of the imaging camera based on the formed plurality of picked-up images. a position detection step, and capturing an image of the second location on the holding surface of the holding table while relatively moving the imaging camera in a direction toward a second location different from the first location on the holding surface of the holding table; a second focus position detection step of forming a plurality of captured images by doing so, detecting a second focus position of the imaging camera based on the formed plurality of captured images; the first focus position and the second focus; and a flatness detection step of detecting the flatness of the holding surface from the difference from the position.

Further, in this maintenance method, if the flatness detected in the flatness detection step is out of a preset allowable flatness, the processing apparatus including the holding table is repaired, or Alternatively, the holding table may be exchanged.

A processing apparatus (this processing apparatus) of the present invention comprises a holding table including a holding surface for holding a workpiece, a processing means for machining the workpiece held by the holding table, and a workpiece held by the holding table. and an imaging means having an imaging camera for imaging the workpiece, the imaging means having a moving means for moving the imaging camera with respect to the holding table, and the processing The apparatus includes a controller that controls at least the imaging means, and the controller brings the imaging camera close to each of a plurality of locations on the holding surface of the holding table at predetermined timings set in advance. an imaging means control unit for controlling the imaging means to form a plurality of captured images for each of the plurality of locations on the holding surface by imaging a plurality of times while relatively moving in a direction; A captured image storage unit that stores captured images, and a focus position detection unit that detects the focus position of the imaging camera for each of the plurality of locations based on the plurality of captured images stored in the captured image storage unit. a flatness detection unit that detects the flatness of the holding surface from a plurality of focus positions detected for each of the plurality of locations; a flatness tolerance storage unit that stores a preset flatness tolerance; a pass/fail determination unit that compares the flatness of the holding surface detected by the flatness detection unit and the flatness tolerance value to make a pass/fail determination, and when the pass/fail determination unit determines that the It further has a warning transmission part which issues a warning to.

In this maintenance method, the difference between the focus position of the imaging camera when the first location on the holding surface is imaged by the imaging camera and the focus position of the imaging camera when the second location on the holding surface is imaged by the imaging camera Therefore, since the flatness of the holding surface is detected, the flatness of the holding surface can be detected even without a measuring instrument.

If the flatness detected in the above maintenance method deviates from the preset flatness tolerance, repair the processing apparatus including the holding table, or replace the holding table to perform processing. Processing using the apparatus can be preferably carried out.

In addition, in this processing apparatus, the controller takes images of a plurality of locations on the holding surface, saves the captured images, detects focus positions at a plurality of locations, determines pass/fail of the flatness, and issues a warning when the result of the pass/fail determination is negative. , the user can easily know that the flatness of the holding surface is deteriorating.

It is a perspective view which shows the structure of a cutting device. 3 is an exploded perspective view showing the structure of a holding table; FIG. 4 is a cross-sectional view showing the configuration of a holding table; FIG. It is a block diagram which shows the structure of the controller of a processing apparatus. FIGS. 5(a) and 5(b) are explanatory diagrams showing imaging locations set on the holding surface. FIG. 10 is an explanatory diagram showing how an imaging location on the holding surface is imaged while changing the height of the imaging camera; It is a block diagram which shows the structure of other controllers in a processing apparatus.

A maintenance method (this maintenance method) according to the present embodiment performs maintenance on the processing apparatus 1 as shown in FIG. First, the configuration of the processing apparatus 1 will be described.
As shown in FIG. 1 , the processing apparatus 1 is a device that performs cutting by rotating a cutting blade of a cutting section 6 to cut a workpiece held on a holding table section 30 .

The processing apparatus 1 has a housing 3 and includes a base 10 and a portal column 14 erected on the base 10 inside the housing 3 . The processing apparatus 1 also includes input/output members 9 as user interfaces on the side and top surfaces of the housing. Furthermore, the processing device 1 includes a controller 7 that controls each member of the processing device 1 .

The center of the upper surface of the base 10 has a rectangular opening extending in the X-axis direction. A bellows-shaped waterproof cover 5 is provided so as to cover this opening. A cleaning table 40 is provided on the +Y-axis side of the waterproof cover 5 to clean the workpiece after cutting. Further, on the waterproof cover 5, a holding table section 30 is provided which is rotatable around the Z axis. The holding table portion 30 holds the workpiece by suction.

A cassette 53 is arranged on the −Y-axis side of the waterproof cover 5 to store the workpiece before cutting. In FIG. 1, the cassette 53 is shown only by a frame in order to clearly show the other members. The workpiece in the cassette 53 is placed on the waterproof cover 5 by a workpiece conveying member (not shown) when being cut.

The waterproof cover 5 is also provided with a pair of L-shaped positioning members 51 . The positioning member 51 sandwiches the workpiece placed on the waterproof cover 5 from the +X-axis direction and the −X-axis direction and arranges it in a predetermined initial position.

A cutting feed mechanism (not shown) for moving the holding table portion 30 along the X-axis direction is arranged below the waterproof cover 5 . For example, the cutting feed mechanism moves the holding table section 30 under the workpiece placed at the initial position. Further, the cutting feed mechanism moves the holding table portion 30 holding the workpiece by suction to a predetermined cutting position. Furthermore, the cutting feed mechanism moves the workpiece along the cutting feed direction (X-axis direction) via the holding table section 30 when cutting the workpiece.

A gate-shaped column 14 is erected on the rear side (−X-axis direction side) of the base 10 so as to straddle the waterproof cover 5 . A cutting portion moving mechanism 13 for moving the cutting portion 6 is provided on the front surface (the surface on the +X-axis direction side) of the portal column 14 . The cutting portion moving mechanism 13 feeds the cutting portion 6 in the Y-axis direction as well as in the Z-axis direction. The cutting portion moving mechanism 13 includes an index feed mechanism 12 that moves the cutting portion 6 in the index feed direction, and a cutting feed mechanism 16 that moves the cutting portion 6 in the cutting feed direction.

The index feed mechanism 12 is arranged on the front surface of the portal column 14 . The index feed mechanism 12 reciprocates the cutting feed mechanism 16 and the cutting portion 6 in the Y-axis direction.
The index feed mechanism 12 includes a pair of guide rails 121 extending in the Y-axis direction, a Y-axis table 123 placed on the guide rails 121, a ball screw 120 extending parallel to the guide rails 121, and a motor 122 for rotating the ball screw 120. contains.

A pair of guide rails 121 are arranged in front of the portal column 14 in parallel with the Y-axis direction. The Y-axis table 123 is installed on a pair of guide rails 121 so as to be slidable along these guide rails 121 . The cutting feed mechanism 16 and the cutting part 6 are placed on the Y-axis table 123 .

The ball screw 120 is screwed into a nut portion (not shown) provided on the back side of the Y-axis table 123 . The motor 122 is connected to one end of the ball screw 120 and drives the ball screw 120 to rotate. By rotationally driving the ball screw 120, the Y-axis table 123, the cutting feed mechanism 16, and the cutting portion 6 move along the guide rail 121 in the Y-axis direction, which is the index feed direction.

The cutting feed mechanism 16 reciprocates the cutting portion 6 in the Z-axis direction (vertical direction). The cutting feed mechanism 16 includes a pair of guide rails 161 extending in the Z-axis direction, a support member 163 mounted on the guide rails 161, a ball screw 160 extending parallel to the guide rails 161, and a motor 162 for rotating the ball screw 160. I'm in.

A pair of guide rails 161 are arranged on the Y-axis table 123 in parallel with the Z-axis direction. The support member 163 is installed on a pair of guide rails 161 so as to be slidable along these guide rails 161 . A cutting part 6 is attached to the lower end of the support member 163 .

The ball screw 120 is screwed into a nut portion (not shown) provided on the back side of the support member 163 . The motor 162 is connected to one end of the ball screw 160 and drives the ball screw 160 to rotate. By rotationally driving the ball screw 160, the support member 163 and the cutting portion 6 move along the guide rail 161 in the Z-axis direction, which is the feed direction.

The cutting section 6 is configured to cut the workpiece held by the holding table section 30 . The cutting part 6 has a housing 61 provided at the lower end of the support member 163 . Furthermore, the cutting unit 6 includes a rotating shaft extending in the Y-axis direction, a cutting blade attached to the rotating shaft, and a motor (not shown) for driving the rotating shaft. The cutting part 6 corresponds to an example of processing means. An imaging camera 65 is provided on the side surface of the housing 61 in the cutting section 6 .

The imaging camera 65 is attached to the side surface of the +X-axis direction of the housing 61 so as to move together with the cutting section 6, and includes, for example, a microscope. The imaging camera 65 is configured to capture an image of a portion positioned below the imaging camera 65 . The imaging camera 65 can image, for example, the holding surface 311 (see FIG. 2) of the holding table section 30 or the workpiece placed on the holding surface 311 . The imaging camera 65 is typically used to observe the workpiece during processing.

Next, the configuration of the holding table section 30 will be described. As shown in FIG. 2 , the holding table section 30 includes a holding table 31 that holds a workpiece, and a table base 32 arranged below the holding table 31 .

The holding table 31 includes a disk-shaped holding portion 310 and a frame 312 that accommodates the holding portion 310 . Holding portion 310 is made of porous ceramics, for example. The upper surface of the holding portion 310 is a holding surface 311 that sucks and holds the workpiece from below.

As shown in FIG. 3 , the bottom surface of the frame 312 is a bottom portion 313 that is placed on the table base 32 . A central portion of the bottom portion 313 is formed with a recess 314 that engages the alignment ring 33 . A suction path 315 is formed in the concave portion 314 so as to penetrate the bottom portion 313 in the vertical direction and communicate with the holding portion 310 . Further, the bottom portion 313 is formed with an engaging recess portion 316 for engaging the projecting member. The holding portion 310 is accommodated in the frame body 312 configured in this way so that the holding surface 311 is exposed upward. As a result, the holding table 31 in which the holding portion 310 and the frame 312 are integrated is formed.

The table base 32 has a surface 32 a facing the holding table 31 , a positioning portion 320 for positioning the holding table 31 , and a suction hole 325 for sucking the workpiece and a suction hole 326 for sucking the holding table passing through the table base 32 . ing.

The surface 32a of the table base 32 supports the bottom 313 of the frame 312 from below. The suction hole 325 for sucking the workpiece is a suction hole for sucking the workpiece onto the holding surface 311 of the holding table 31 . The holding table suction suction hole 326 is a suction hole for sucking the holding table 31 onto the surface 32 a of the table base 32 .

The positioning portion 320 is engaged with the engagement recess 316 of the bottom portion 313 of the frame 312 to position the holding table 31 at a predetermined position on the table base 32 . As shown in the enlarged view of FIG. 3, the positioning portion 320 includes a positioning pin 321 which is a convex member, a compression coil spring 323 disposed inside the positioning pin 321, and a housing opening opened on the surface 32a of the table base 32. A recess 324 is provided. The accommodation recess 324 accommodates the positioning pin 321 and the compression coil spring 323 .

The positioning pin 321 is formed in a substantially cylindrical shape with an open bottom, and has a hollow portion 321a inside. A compression coil spring 323 is housed in the cavity 321a. A hooking hole 322 having a diameter smaller than that of the hollow portion 321a is formed in the ceiling surface of the hollow portion 321a.

A lower end of the compression coil spring 323 is fixed to the bottom surface of the housing recess 324 . The upper end of the compression coil spring 323 abuts around the hooking hole 322 in the ceiling surface of the cavity 321a. Thereby, the positioning pin 321 is urged upward by the compression coil spring 323 . Therefore, the positioning pin 321 protrudes from the surface 32 a of the table base 32 and can be engaged with the engaging recess 316 of the frame 312 . By engaging the positioning pin 321 with the engaging recess 316 , the holding table 31 is positioned and fixed to the table base 32 .

When the holding table 31 is positioned and fixed to the table base 32, the suction path 315 of the frame 312 and the suction hole 325 for sucking the workpiece communicate with each other. A suction source 34 is connected to the workpiece suction hole 325 and the holding table suction hole 326 via an electromagnetic valve 327 .

The suction source 34 sucks the bottom portion 313 of the holding table 31 through the holding table suction suction hole 326 . As a result, the surface 32a of the table base 32 holds the holding table 31 by suction. Thus, the holding table 31 is attached to the table base 32 . Further, the accommodation recessed portion 324 sucks the workpiece placed on the holding surface 311 of the holding table 31 through the suction hole 325 for sucking the workpiece. Thereby, the holding surface 311 sucks and holds the workpiece.

The holding table section 30 has a θ table (not shown) on the table base 32 side. The θ table supports the holding table 31 via the table base 32 . Furthermore, the θ table is configured to be rotatable within the XY plane. Therefore, the θ table can rotate the holding table 31 within the XY plane.

A controller 7 shown in FIG. 1 is a control unit of the processing apparatus 1 . As shown in FIG. 4, the controller 7 includes a general-purpose control section 70 that controls the operation of the processing apparatus 1, and a memory 73 that stores various data and programs.

The general-purpose control unit 70 executes various types of processing and controls each component of the processing apparatus 1 in an integrated manner. For example, the general-purpose control section 70 controls the cutting feed mechanism, the cutting section moving mechanism 13 (the motor 122 and the motor 162), and the θ table of the holding table section 30 based on the user's instructions, so that the cutting section 6 cuts the to determine the position of the workpiece. Further, the general-purpose control unit 70 controls the motor of the cutting unit 6 to cut the workpiece. Further, the general control unit 70 controls the imaging camera 65 to image the holding surface 311 of the holding table unit 30 or the workpiece held on the holding surface 311 .

The input/output member 9 as a user interface includes, as shown in FIG. . The indicator light 91 emits an optical warning to the user. The touch panel 93 displays images to the user and accepts user input. A speaker 95 provides an audio display to the user.
In this embodiment, the processing apparatus 1 is configured to perform each step of this maintenance method according to user instructions received via the touch panel 93 .

The steps of this maintenance method are described below. In this maintenance method, the flatness of the holding surface 311 of the holding table 31 in the holding table section 30 is detected, and a predetermined operation is performed based on the detection result. In this embodiment, the flatness of the holding surface 311 is detected based on the image captured by the imaging camera 65 .

(1) Focus position detection step In this step, the user controls the imaging means to image the holding surface 311 of the holding table 31 . For example, multiple locations on the holding surface 311 are imaged multiple times while changing the imaging position along the Z-axis direction. Thereby, a plurality of captured images are formed for each of a plurality of locations on the holding surface 311 .

In the present embodiment, the imaging means includes the imaging camera 65 and a configuration for changing the location (imaging location) of the holding surface 311 that is imaged by the imaging camera 65 . The imaging location is determined by the relative positional relationship between the imaging camera 65 and the holding surface 311 and the rotation angle of the holding surface 311 . The imaging means further includes a configuration for changing the position of the imaging camera 65 along the Z-axis direction at the imaging location.

Below, a configuration for changing the relative positional relationship between the imaging camera 65 and the holding surface 311, a configuration for changing the rotation angle of the holding surface 311, and a configuration for changing the position of the imaging camera 65 along the Z-axis direction at the imaging location will be described. This configuration is also referred to as moving means.

Here, in this embodiment, the position of the holding table 31 in the X-axis direction is determined by a cutting feed mechanism (not shown) under the waterproof cover 5 . A θ table (not shown) of the holding table 31 determines the rotational position of the holding surface 311 within the XY plane.
On the other hand, the index feed mechanism 12 of the cutting portion moving mechanism 13 determines the position of the imaging camera 65 in the Y-axis direction. Furthermore, the position of the imaging camera 65 along the Z-axis direction is determined by the cutting feed mechanism 16 .

Thus, in this embodiment, the cutting feed mechanism, the θ table, the index feed mechanism 12, and the cutting feed mechanism 16 correspond to an example of the moving means. A configuration in which the imaging camera 65 is added to this corresponds to an example of imaging means.

Therefore, in more detail, in this embodiment, the user controls the cutting feed mechanism, the θ table, and the index feed mechanism 12 to set one location of the holding surface 311 as the imaging location of the imaging camera 65. do. With regard to this imaging location, the user takes a plurality of images while controlling the cutting feed mechanism 16 to change the position of the imaging camera 65 along the Z-axis direction.

Here, the Z-axis direction (approaching/separating direction) is the direction in which the imaging camera 65 approaches or moves away from the imaging location of the holding surface 311 . Below, the distance from the reference plane of the processing device 1 to the imaging camera 65 along the contact/separation direction is expressed as the height position of the imaging camera 65 . The reference plane of the processing apparatus 1 is, for example, a virtual plane including an ideal holding surface (for example, a very flat holding surface) 311 on the holding table 31 . Then, the user captures a plurality of images corresponding to different height positions of the imaging camera 65 for each imaging location while changing imaging locations on the holding surface 311 .

For example, the user sets the point a on the holding surface 311 shown in FIG. 5A as the imaging location. Then, as shown in FIG. 6, while changing the height position H of the imaging camera 65, a plurality of images are captured. After that, the user similarly changes the height position H of the imaging camera 65 and takes a plurality of images using points b, c, d, and e shown in FIG. 5A as imaging positions. The captured image is stored in the memory 73, for example.

Next, the user detects the focus position of the imaging camera 65 for each imaging location based on the captured image. That is, the user detects a plurality of focus positions of the imaging camera 65 corresponding to a plurality of imaging locations.

At this time, the user, for example, uses the general-purpose control unit 70 to obtain the sharpness values from a plurality of captured images regarding the imaged location a shown in FIG. 5(a). Then, the user specifies the captured image having the highest sharpness value, and detects the height position H (see FIG. 6) of this captured image as the focus position of the imaging camera 65 at the imaging location a. The user similarly detects the focus positions of the imaging camera 65 at the imaging locations b, c, d and e.

(2) Flatness Detection Step In this step, the user detects the flatness of the holding surface 311 from a plurality of focus positions detected for each of a plurality of imaging locations. For example, the user calculates differences between a plurality of focus positions and detects the maximum value of the differences as the degree of flatness.

For example, the difference between the focus position of the imaging location a shown in FIG. 5A and the focus positions of the other imaging locations b to e is
b: -2 (μm), c: +2 (μm), d: +1 (μm), e: 0 (μm)
, the maximum difference is 4 μm. In this case, the user detects that the flatness of the imaging locations a to e of the holding surface 311 is ±4 μm.

(3) Flatness Acceptability Determining Step Next, the user determines whether or not the detected flatness of the holding surface 311 is within a preset tolerance for flatness. For example, in the example shown in FIG. 5A, the flatness of the holding surface 311 is ±4 μm. In this regard, if the flatness tolerance is ±3 μm, the user determines that the flatness of the holding surface 311 is outside the flatness tolerance.
If the flatness of the holding surface 311 is outside the allowable flatness value, the user repairs the processing apparatus 1 including the holding table 31 or replaces the holding table 31, for example.

After the pass/fail determination step, the user may detect the flatness of the holding surface 311 again. The user selects a location on the holding surface 311 that is different from the first imaging location as an imaging location. For example, when points a to e shown in FIG. 5(a) are taken as imaging points in the first detection, the user controls the θ table of the holding table unit 30 to rotate the holding table 31 clockwise by 90 degrees. only rotate. Then, a plurality of images are taken while changing the height position H of the image pickup camera 65 with the points f to j shown in FIG. 5B as the image pickup locations.
After that, in the same manner as described above, the focus positions of the imaging camera 65 at the imaging locations f to j are detected, and the maximum value of the difference in the focus positions at the imaging locations f to j is detected as the flatness.

Here, the difference between the focus position of the imaging location f shown in FIG. 5B and the focus positions of the other imaging locations g to j is
g: +1 (μm), h: 0 (μm), i: +2 (μm), j: -2 (μm)
, the maximum difference is 4 μm. In this case, the user detects that the flatness of the holding surface 311 at the imaging locations f to j is ±4 μm.
In this case as well, since the allowable flatness value is ±3 μm, it is determined that the flatness of the holding surface 311 is outside the allowable flatness value.

In this example, even if the holding table 31 is rotated clockwise by 90 degrees, the flatness of the holding surface 311 is substantially the same. Therefore, it is considered that the inclination of the rotation axis of the holding table 31 is small. Therefore, one of the reasons why the flatness is out of the allowable range is thought to be that the holding table 31 or the table base 32 has small scratches (burrs), rust, or the like.

When there is a small scratch or rust between the holding table 31 and the table base 32, that is, the surfaces of the holding table 31 and the table base 32 facing each other, in order to improve the flatness of the holding surface 311, It is effective to flatten these surfaces with an oil stone or the like. If flattening with an oil stone or the like is insufficient, it is also effective to replace the holding table 31 and/or the table base 32 .

Further, when the rotating shaft of the holding table 31 is tilted, it is effective to repair the rotating shaft, that is, to reassemble the rotating shaft, or to appropriately replace the parts of the rotating shaft.

Also, in the example shown in FIG. 5A, the user detects the focus positions of five imaging locations a to e in the focus position detection step. Then, the flatness of the holding surface 311 is detected based on the five focus positions for the imaging locations a to e. However, two or more imaging locations may be used for detecting the focus position. Therefore, this maintenance method may be implemented as follows.

(1a) First Focus Position Detecting Step The user moves the imaging camera 65 relative to the first point of the holding surface 311 in a direction approaching the first point in the Z-axis direction (contact and separation direction). , is imaged multiple times. This forms a plurality of captured images with respect to the first location. The user detects the first focus position, which is the focus position of the imaging camera 65 at the first location, based on these multiple captured images.

(2a) Second focus position detection step Next, the user moves the imaging camera 65 to a second location different from the first location on the holding surface 311 by bringing the imaging camera 65 closer to the second location in the Z-axis direction. Images are taken a plurality of times while being relatively moved. This forms a plurality of captured images with respect to the second location. The user detects the second focus position, which is the focus position of the imaging camera 65 at the second location, based on the plurality of captured images.

(3a) Flatness detection step and pass/fail determination step Then, the user detects the flatness of the holding surface 311 from the difference between the first focus position and the second focus position. Then, the user determines whether or not the detected flatness of the holding surface 311 is within a preset tolerance for flatness.
If the flatness of the holding surface 311 is outside the allowable flatness value, the user repairs the processing apparatus 1 including the holding table 31 or replaces the holding table 31, for example.

As described above, in this maintenance method, the flatness of the holding surface 311 that holds the workpiece is detected using the imaging camera 65 provided in the processing apparatus 1 for imaging the workpiece. For this purpose, a plurality of imaging locations including, for example, a first location and a second location are set on the holding surface 311 . Then, each imaging location is imaged while the imaging camera 65 is relatively moved in a direction approaching each imaging location. As a result, a plurality of captured images are formed for each imaging location.

Furthermore, based on a plurality of captured images formed for each imaging location, the focus position of the imaging camera 65 for each imaging location, for example, the first focus position and the second focus position are detected. After that, the difference between a plurality of focus positions is obtained, and the flatness of the holding surface 311 is detected based on this difference.

In this regard, for example, if the flatness of the holding surface 311 is extremely good, the distances in the contact and separation directions between the imaging camera 65 at the same height position and the plurality of imaging locations on the holding surface 311 are very similar to each other. do. For this reason, the focus positions of the imaging cameras 65 at a plurality of imaging locations are also very similar.

On the other hand, if the flatness of the holding surface 311 is poor, the distance in the contact/separation direction between the imaging camera 65 at the same height position and each imaging location on the holding surface 311 varies depending on the imaging location. Therefore, the focus position of the imaging camera 65 at each imaging location also varies according to the imaging location. Therefore, the flatness of the holding surface 311 can be preferably detected by using the focus positions of the imaging camera 65 for a plurality of imaging locations.

Thus, in this maintenance method, the flatness of the holding surface 311 of the holding table 31 can be detected using the imaging camera 65 for observing the workpiece provided in the processing apparatus 1 . Therefore, according to this maintenance method, a measuring instrument such as a dial gauge is not required to detect the flatness of the holding surface 311 . Therefore, the flatness of the holding surface 311 can be easily detected.

In the above embodiment, the user detects the focus position at each imaging location based on a plurality of captured images, and further detects the flatness of the holding surface 311 based on the plurality of focus positions. Alternatively, the general-purpose control unit 70 may detect the focus position at each imaging location and the flatness of the holding surface 311 according to a user's instruction.

Further, in the above embodiment, the user will detect the flatness of the holding surface 311 at any time based on his/her own judgment. Alternatively, the processing apparatus 1 may be configured to detect the flatness of the holding surface 311 at a preset timing, for example, when the power of the processing apparatus 1 is turned on. In this case, the processing apparatus 1 is preferably configured to detect the flatness of the holding surface 311 without depending on the user's instruction.

In this case, the processing apparatus 1 is provided with a controller 17 shown in FIG. 7 instead of the controller 7 shown in FIG. 4, for example.
The controller 17 includes, for example, a cutting control section 71 that controls cutting, the memory 73 described above, and a maintenance control section 75 .

As with the general-purpose control unit 70 described above, the cutting processing control unit 71 controls the cutting feed mechanism, the cutting unit moving mechanism 13, the holding table unit 30, and the cutting unit 6 based on the user's instructions, thereby cutting the workpiece. Carry out cutting for

The maintenance control unit 75 detects the flatness of the holding surface 311 of the holding table 31 and performs a predetermined operation based on the detection result. In this embodiment, the maintenance control unit 75 detects the flatness of the holding surface 311 based on the image captured by the imaging camera 65 .

As shown in FIG. 7, the maintenance control unit 75 includes an imaging device control unit 171 that controls imaging, a captured image storage unit 173 that stores captured images, a focus position detection unit 175 that detects the focus position of the imaging camera 65, and a holding unit. A flatness detection unit 177 that detects the flatness of the surface 311, a flatness allowable value storage unit 179 that stores the flatness allowable value, a pass/fail judgment unit 181 that judges pass/fail of the detected flatness, and a user A warning sending unit 183 for sending a warning is provided.

The imaging means control section 171 controls the imaging means to image the holding surface 311 of the holding table 31 . For example, in the present embodiment, the imaging means control section 171 controls the imaging means to detect a plurality of locations on the holding surface 311 at predetermined timings set in advance, and the imaging camera 65 is moved to each location on the Z-axis. Images are taken a plurality of times while relatively moving in the direction (contact/separate direction). As a result, the imaging device control unit 171 forms a plurality of captured images for each of the plurality of imaging locations on the holding surface 311 .

As described above, in the present embodiment, the cutting feed mechanism, the θ table, the index feed mechanism 12, and the cutting feed mechanism 16 correspond to examples of the above-described moving means, and the configuration in which the image pickup camera 65 is added to these is the image pickup mechanism. It corresponds to an example of means.

Therefore, in more detail, in this embodiment, the imaging device control unit 171 controls the cutting feed mechanism, the θ table, the index feed mechanism 12, and the cut feed mechanism 16 to move one portion of the holding surface 311 to It is set as an imaging location of the imaging camera 65 . A plurality of images are captured while changing the height position of the imaging camera 65 with respect to this imaging location. Furthermore, the imaging means control unit 171 captures a plurality of images corresponding to different height positions for each imaging location while changing the imaging location on the holding surface 311 .

The captured image storage unit 173 stores the image captured by the imaging means control unit 171 .
The focus position detection unit 175 detects the focus position of the imaging camera 65 for each imaging location based on the captured image stored in the captured image storage unit 173 . That is, the captured image storage unit 173 detects a plurality of focus positions of the imaging camera 65 corresponding to a plurality of imaging locations.

At this time, the focus position detection unit 175 obtains sharpness values from a plurality of captured images regarding each captured location. Then, the focus position detection unit 175 identifies the captured image having the highest sharpness value, and detects the height position H (see FIG. 6) of this captured image as the focus position of the imaging camera 65 at each imaging location.

The flatness detection unit 177 detects the flatness of the holding surface 311 from a plurality of focus positions detected for each of a plurality of imaging locations. For example, the flatness detection unit 177 obtains differences between a plurality of focus positions and detects the maximum value of the differences as the flatness. The flatness detector 177 may display the detected flatness of the holding surface 311 on the touch panel 93 of the input/output member 9 shown in FIG.

The flatness allowable value storage unit 179 stores the flatness allowable value of the holding surface 311 . This allowable value of flatness is set in advance and stored in the allowable flatness value storage unit 179 .
The pass/fail determination unit 181 compares the flatness of the holding surface 311 detected by the flatness detection unit 177 with the flatness allowable value stored in the flatness allowable value storage unit 179, and determines the pass/fail of the holding surface 311. judge. For example, when the comparison result is equal to or less than a predetermined value, the pass/fail determination unit 181 determines that the flatness of the holding surface 311 is sufficiently good and that it is acceptable. On the other hand, when the comparison result is larger than the predetermined value, the pass/fail determination unit 181 determines that the flatness of the holding surface 311 is unsatisfactory. The pass/fail determination section 181 may display the determination result on the touch panel 93 .

The warning transmission unit 183 issues a warning to the user when the pass/fail determination unit 181 determines no. In this case, the warning transmission unit 183 may, for example, drive the indicator lamp 91 shown in FIG. 1 to issue a light warning to the user. In addition, the warning transmission unit 183 may issue an audible warning to the user via the speaker 95 . Further, the warning transmission unit 183 may display on the touch panel 93 that the flatness of the holding surface 311 is poor.

With this configuration, the user can arbitrarily set the detection timing of the flatness of the holding surface 311 . Therefore, the user can easily detect the flatness of the holding surface 311 (examination) on a regular basis. Moreover, the user can easily know that the flatness of the holding surface 311 is deteriorating due to the warning issued by the warning transmitting unit 183 .

Moreover, in this embodiment, the processing apparatus 1 is used as the cutting apparatus which cuts a to-be-processed object. However, the processing device 1 is not limited to this, and may be a laser processing device. For example, the laser processing apparatus forms a modified layer by irradiating a laser beam to the workpiece placed on the holding surface 311 of the holding table 31, and then divides the workpiece along the modified layer. may be configured to

1: processing device, 3: housing, 10: base, 14: portal column, 5: waterproof cover,
13: cutting part moving mechanism,
30: holding table section, 31: holding table, 32: table base, 311: holding surface 12: index feed mechanism, 120: ball screw, 121: guide rail,
122: motor, 123: Y-axis table,
16: cutting feed mechanism, 160: ball screw, 161: guide rail, 162: motor,
163: support member,
6: cutting unit, 61: housing, 65: imaging camera 7: controller, 70: general-purpose control unit, 73: memory,
17: controller, 71: cutting control unit, 75: maintenance control unit,
171: imaging means control unit, 173: captured image storage unit, 175: focus position detection unit,
177: flatness detection unit, 179: flatness tolerance storage unit, 181: pass/fail determination unit,
183: warning transmission unit,
9: input/output member, 91: indicator lamp, 93: touch panel, 95: speaker,

Claims (3)

It has a holding table including a holding surface for holding a workpiece, processing means for processing the workpiece held by the holding table, and an imaging camera for imaging the workpiece held by the holding table. A maintenance method for a processing apparatus comprising imaging means,
forming a plurality of captured images by imaging the first portion of the holding surface of the holding table while moving the imaging camera relative to the first portion of the holding surface of the holding table in the approaching direction; a first focus position detection step of detecting a first focus position of the imaging camera based on the captured image of;
A plurality of images are captured by imaging the second location on the holding surface of the holding table while relatively moving the imaging camera in the approaching direction with respect to the second location different from the first location on the holding surface of the holding table. a second focus position detection step of forming an image and detecting a second focus position of the imaging camera based on the formed plurality of captured images;
a flatness detection step of detecting the flatness of the holding surface from the difference between the first focus position and the second focus position. If the flatness detected in the flatness detection step is out of a preset flatness tolerance, repair the processing apparatus including the holding table, or replace the holding table. do,
The maintenance method according to claim 1. It has a holding table including a holding surface for holding a workpiece, processing means for processing the workpiece held by the holding table, and an imaging camera for imaging the workpiece held by the holding table. A processing apparatus comprising imaging means,
The imaging means has moving means for moving the imaging camera with respect to the holding table,
The processing device comprises a controller that controls at least the imaging means,
The controller is
At predetermined timings set in advance, a plurality of locations on the holding surface of the holding table are imaged a plurality of times while the imaging camera is moved relative to each location in the approaching direction, thereby capturing images of the holding surface. an imaging means control unit that controls the imaging means so as to form a plurality of captured images for each of a plurality of locations;
a captured image storage unit that stores the plurality of captured images that have been formed;
a focus position detection unit that detects the focus position of the imaging camera for each of the plurality of locations based on the plurality of captured images stored in the captured image storage unit;
a flatness detection unit that detects the flatness of the holding surface from a plurality of focus positions detected for each of the plurality of locations;
a flatness tolerance storage unit that stores a preset flatness tolerance;
a pass/fail determination unit that compares the flatness of the holding surface detected by the flatness detection unit and the flatness tolerance value to make a pass/fail determination;
The processing apparatus further includes a warning transmission unit that issues a warning when the acceptance/rejection determination unit determines that the processing is negative.

Images