JP7124388B2 - Piezoelectric actuator, liquid ejection head, liquid ejection unit, device for ejecting liquid - Google Patents

Description

The present invention relates to a piezoelectric actuator, a liquid ejection head, a liquid ejection unit, and an apparatus for ejecting liquid.

A piezoelectric actuator is used as a liquid ejection head for ejecting liquid.

Conventionally, there is a piezoelectric member in which a plurality of columnar laminated piezoelectric elements are arranged. In addition, there is known a flexible wiring board in which an end face electrode serving as an individual electrode and an end face electrode serving as a common electrode are arranged, and a flexible wiring substrate having individual electrode wiring and common electrode wiring is connected (Patent Document 1).

JP-A-10-286951

However, in the configuration disclosed in Patent Document 1, a difference occurs in the distance from the common electrode wiring arranged at both ends of the flexible wiring board to the end face electrodes serving as the common electrodes of the piezoelectric elements. Therefore, in the arrangement direction of the piezoelectric elements, the impedance at the central portion becomes higher than the impedance at both ends, and there is a problem that variations in drive characteristics occur due to voltage fluctuations.

The present invention has been made in view of the above problems, and an object of the present invention is to reduce variations in drive characteristics.

In order to solve the above problems, a piezoelectric actuator according to the present invention includes:
columnar piezoelectric elements arranged in multiple rows;
an individual electrode wiring member and a common electrode wiring member connected to the piezoelectric elements of each row,
In the piezoelectric element, piezoelectric layers and internal electrodes are alternately laminated, the internal electrodes are alternately drawn out to different end surfaces, and individual external electrodes and a common external electrode connected to the internal electrodes are provided on the different end surfaces. death,
The individual external electrodes of the piezoelectric elements in each row are connected to the wiring pattern of the individual electrode wiring member,
The common external electrode provided for each of the piezoelectric elements is connected to a wiring pattern of a common electrode wiring member for each piezoelectric element ,
At least one of the common electrode wiring member and the individual electrode wiring member in each row is arranged to include a portion along the stacking direction of the piezoelectric elements and a portion along a direction orthogonal to the stacking direction. did.

According to the present invention, variations in drive characteristics can be reduced.

1 is an exploded perspective explanatory view of a piezoelectric actuator according to a first embodiment of the present invention; FIG. It is cross-sectional explanatory drawing along the direction orthogonal to the arrangement direction of a piezoelectric element similarly. It is a side explanatory view of one end face electrode (individual external electrode) side along the arrangement direction of the piezoelectric elements. It is a side cross-sectional explanatory view of the other end face electrode (common external electrode) side along the arrangement direction of the piezoelectric elements. FIG. 7 is a cross-sectional explanatory view along a direction perpendicular to the arrangement direction of piezoelectric elements of a piezoelectric actuator according to a second embodiment of the present invention; 1 is an external perspective explanatory view of an example of a liquid ejection head according to the present invention; FIG. It is a cross-sectional explanatory drawing of the direction orthogonal to the nozzle arrangement direction of the same head. 1 is a schematic illustration of an example of a device for ejecting liquid according to the present invention; FIG. It is a plane explanatory view of an example of the head unit of the apparatus. It is a block explanatory view of an example of a liquid circulation device. FIG. 10 is an explanatory plan view of essential parts of another example of the device for ejecting liquid according to the present invention; It is an explanatory side view of the main part of the device. FIG. 10 is an explanatory plan view of a main portion of another example of the liquid ejection unit according to the present invention; FIG. 11 is a front explanatory view of still another example of the liquid ejection unit according to the present invention;

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. A first embodiment of the present invention will be described with reference to FIGS. 1 to 4. FIG. FIG. 1 is an exploded perspective view of the piezoelectric actuator according to the same embodiment, and FIG. 2 is a cross-sectional view along a direction orthogonal to the arrangement direction of the piezoelectric elements. FIG. 3 is a side explanatory view of one end face electrode (individual external electrode) along the direction in which the piezoelectric elements are arranged, and FIG. 4 is a side view of the other end face electrode (common external electrode) along the direction in which the piezoelectric elements are arranged. It is a diagram.

Piezoelectric actuator 11 includes two stacked piezoelectric members 12 , 12 held together on base member 13 by adhesive 114 . In the piezoelectric member 12, grooves 130 are processed by half-cut dicing to form a required number of columnar piezoelectric elements 112 (112A, 112B) in a comb shape at predetermined intervals. As a result, a plurality of columns (here, two columns) of columnar piezoelectric elements 112 are arranged side by side on the base member 13 .

In this embodiment, the piezoelectric element 112A is used as a driving piezoelectric element, and the piezoelectric element 112B is used as a non-driving piezoelectric element. However, a normal pitch configuration in which both the piezoelectric elements 112A and 112B are used as driving piezoelectric elements is also possible.

The piezoelectric element 112 (piezoelectric member 12) is obtained by alternately laminating piezoelectric layers 121 and internal electrodes 122 (122A, 122B). A portion of the piezoelectric member 12 lower than the inner electrode 122 on the lowermost side (on the side of the base member 13 ) is formed only by the piezoelectric layer 121 without the inner electrode 122 .

Internal electrodes 122A and 122B are alternately drawn from both end faces in a direction orthogonal to the arrangement direction of the piezoelectric elements 112, and are connected to individual external electrodes 123 and common external electrodes 124, which are end face electrodes.

At this time, the two piezoelectric members 12, 12 are arranged so that the common external electrodes 124 of the piezoelectric element 112 face each other.

An individual electrode wiring member 115 connected to an individual external electrode 123, which is one end surface electrode of the piezoelectric element 112 (piezoelectric element 112A in this embodiment), and a common external electrode 124, which is the other end surface electrode of the piezoelectric element 112. and a common electrode wiring member 116 connected to the .

The individual electrode wiring member 115 is formed with a wiring pattern 115A connected to the individual external electrode 123 of the piezoelectric element 112A. The individual electrode wiring member 115 is arranged along the outer side surface 13a of the base member 13 in the direction along which the piezoelectric elements 112 are laminated, and is drawn out to the side opposite to the surface of the base member 13 that holds the piezoelectric member 12. there is

The common electrode wiring member 116 has a wiring pattern 116A connected to the common external electrode 124 of the piezoelectric element 112A. The width of the wiring pattern 116A in the piezoelectric element array direction is set wider than the width of the common external electrode 124, but is not limited to this.

The common electrode wiring member 116 is bent toward the bottom surface of the piezoelectric member 12, and passes between the bottom surface of the piezoelectric member 12 and the base member 13 at a portion 116b along the direction orthogonal to the stacking direction of the piezoelectric elements 112. 13 is pulled out to the side of the outer surface 13a.

The common electrode wiring member 116 is bent in the direction along the stacking direction of the piezoelectric elements 112 at the outer side surface 13 a of the base member 13 , and the portion 116 a along the stacking direction of the piezoelectric elements 112 is the side surface 13 a of the base member 13 . , to the opposite side of the surface of the base member 13 that holds the piezoelectric member 12 .

In this way, the individual electrode wiring member 115 and the common electrode wiring member 116 are pulled out along the stacking direction of the piezoelectric elements 112 and integrated by the integration member 117 . In this embodiment, they are integrated in the vicinity of the side opposite to the surface of the base member 13 that holds the piezoelectric member 12 .

In this way, the common electrode wiring member 116 connected to the common external electrode 124, which is the end surface electrode facing the piezoelectric element 112A, has a portion 116a along the stacking direction of the piezoelectric element 112 and a portion 116b along a direction orthogonal to the stacking direction. are arranged including

As a result, the common electrode wiring member 116 connected to the common external electrodes 124 , which are two rows of facing end surface electrodes, can be pulled out to the outside of the base member 13 and integrated with the individual electrode wiring member 115 .

Therefore, in the piezoelectric element arrangement direction of the piezoelectric member 12, the wiring pattern 116A of the common electrode wiring member 116 can be connected to the common external electrode 124 of each piezoelectric element 112A.

This reduces variations in impedance between the piezoelectric elements 112A due to differences in distance from the wiring pattern 116A to the common external electrode 124, thereby reducing variations in drive characteristics.

Next, a second embodiment of the invention will be described with reference to FIG. FIG. 5 is a cross-sectional explanatory view along a direction perpendicular to the arrangement direction of the piezoelectric elements of the piezoelectric actuator according to the same embodiment.

In this embodiment, a through hole 113 is formed in the base member 13 along the stacking direction of the piezoelectric elements 112 .

The common electrode wiring members 116, 116 connected to the respective piezoelectric members 12, 12 are bent after passing the portion 116a in the direction along the stacking direction of the piezoelectric element 112 through the through hole 113. A portion 116b extending in a direction perpendicular to the base member 13 is pulled out to the outer side surfaces 13a, 13a along a surface 13c opposite to the surface holding the piezoelectric member 12 of the base member 13. As shown in FIG.

A common electrode wiring member 116 extending to the side surfaces 13 a of the base member 13 is integrated with the individual electrode wiring member 115 .

With this configuration, since the common electrode wiring member 116 does not pass between the piezoelectric member 12 and the base member 13, the bonding strength of the piezoelectric member 12 to the base member 13 increases, and when the piezoelectric element 112 is driven, drive characteristics are improved.

In this embodiment, a driver IC (driving IC) 150 for driving the piezoelectric element 112A is mounted on the individual electrode wiring member 115, and the driver IC 150 is arranged in contact with the base member 13. FIG.

Thereby, the base member 13 can also be used as a heat dissipation member for the driver IC 150 .

Further, in each of the above-described embodiments, an example in which the facing end surface electrodes of the two rows of the piezoelectric elements 112 are common external electrodes is described. A configuration in which an electrode wiring member is connected can also be used. Alternatively, one of the facing end surface electrodes of the two rows of piezoelectric elements 112 may be an individual external electrode and the other may be a common external electrode, and the individual electrode wiring member and the common electrode member may be connected respectively.

Furthermore, the number of rows of piezoelectric elements may be three or more. Alternatively, the piezoelectric elements in each row may not be integrated, but may be individually joined and held by the base member.

Next, an example of the liquid ejection head according to the present invention will be described with reference to FIGS. 6 and 7. FIG. FIG. 6 is an explanatory perspective view of the external appearance of the head, and FIG. 7 is a cross-sectional explanatory view of the head along a direction perpendicular to the nozzle arrangement direction. Here, only one row of piezoelectric elements is illustrated.

This liquid ejection head 100 has a nozzle plate 1, a channel plate 2, and a vibration plate member 3 as a wall member which are laminated and joined together. A piezoelectric actuator 11 according to the present invention for displacing a vibration region (diaphragm) 30 of the diaphragm member 3 and a common flow path member 20 also serving as a frame member of the head are provided.

The nozzle plate 1 has a plurality of nozzles 4 for ejecting liquid.

The channel plate 2 includes a plurality of individual liquid chambers 6 each communicating with the plurality of nozzles 4 via the nozzle communication passages 5, a plurality of supply side fluid resistance portions 7 respectively communicating with the plurality of individual liquid chambers 6, 1 or 2 As described above, one or a plurality of supply-side liquid introducing portions 8 communicating with the supply-side fluid resistance portion 7 are formed. The supply-side liquid introducing portion 8 communicates with the supply-side common channel 10 through the supply-side opening 9 of the diaphragm member 3 .

In this embodiment, the supply-side opening portion 9, the supply-side liquid introduction portion 8, and the supply-side fluid resistance portion 7 constitute the supply channel 41, and the supply-side channel is constituted by the supply channel 41 and the supply-side common channel 10. Configure. In this embodiment, the channel plate 2 is constructed by stacking a plurality of plate-like members 2A to 2E, but the configuration is not limited to this.

The vibration plate member 3 has a deformable vibration region 30 that forms the walls of the individual liquid chambers 6 of the channel plate 2 . Here, the diaphragm member 3 has a two-layer structure (not limited), and is formed of a first layer forming a thin portion from the flow path plate 2 side and a second layer forming a thick portion. A deformable vibration region 30 is formed in a portion corresponding to the individual liquid chamber 6 .

A piezoelectric actuator 11 that deforms the vibration region 30 of the diaphragm member 3 is arranged on the opposite side of the diaphragm member 3 from the individual liquid chambers 6 . The piezoelectric element 112A of the piezoelectric actuator 11 is joined to the vibration area (diaphragm) 30 of the diaphragm member 3. As shown in FIG.

In addition, the channel plate 2 includes a plurality of individual recovery channels 56 extending along the surface direction of the channel plate 2 and communicating with the plurality of individual liquid chambers 6 via the nozzle communication passages 5, and one or more individual recovery channels. One or a plurality of recovery side liquid lead-out portions 58 leading to the channel 56 are formed. The recovery-side liquid lead-out portion 58 communicates with the recovery-side common channel 50 through the recovery-side opening 59 of the diaphragm member 3 .

The common channel member 20 forms a supply side common channel 10 and a recovery side common channel 50 . The supply-side common channel 10 communicates with the supply port 71 , and the recovery-side common channel 50 communicates with the recovery port 72 .

In the liquid ejection head 100, for example, by lowering the voltage applied to the piezoelectric element 112A from the reference potential (intermediate potential), the piezoelectric element 112A contracts, and the vibrating region 30 of the diaphragm member 3 is pulled. The liquid flows into the individual liquid chamber 6 due to the volume expansion.

After that, the voltage applied to the piezoelectric element 112A is increased to extend the piezoelectric element 112A in the stacking direction, deform the vibration region 30 of the diaphragm member 3 in the direction toward the nozzle 4, and shrink the volume of the individual liquid chamber 6. As a result, the liquid in the individual liquid chamber 6 is pressurized, and the liquid is discharged from the nozzle 4 .

In addition, the liquid that is not discharged from the nozzle 4 passes through the nozzle 4 and is recovered from the individual recovery channel 56 to the recovery side common channel 50, and from the recovery side common channel 50 to the supply side common channel 10 through the external circulation route. supplied again.

The method of driving the head is not limited to the above example (pull-push-hit), and it is also possible to perform pull-hit or push-hit depending on which drive waveform is applied.

As described above, since the liquid ejection head 100 includes the piezoelectric actuator 11 according to the present invention, variations in ejection characteristics due to variations in driving characteristics are reduced.

Next, an example of an apparatus for ejecting liquid according to the present invention will be described with reference to FIGS. 8 and 9. FIG. FIG. 8 is a schematic explanatory view of the same device, and FIG. 9 is a plane explanatory view of an example of a head unit of the same device.

A printing apparatus 500, which is a device for ejecting liquid, includes loading means 501 for loading a continuous body 510; It includes printing means 505 for printing to form an image by ejecting liquid onto 510 , drying means 507 for drying the continuous body 510 , carrying out means 509 for carrying out the continuous body 510 , and the like.

The continuous body 510 is sent out from the main winding roller 511 of the carry-in means 501 , guided and carried by rollers of the carry-in means 501 , the guide/conveyance means 503 , the drying means 507 and the carry-out means 509 , and is wound by the take-up roller 591 of the carry-out means 509 . is taken up by

This continuous body 510 is transported on the transport guide member 559 facing the head unit 550 and the head unit 555 in the printing means 505 , an image is formed by the liquid ejected from the head unit 550 , and the image is ejected from the head unit 555 . A post-treatment is performed with a treatment liquid to be applied.

Here, the head unit 550 includes, for example, full-line head arrays 551A, 551B, 551C, and 551D for four colors from the upstream side in the transport direction (hereinafter referred to as "head array 551" when the colors are not distinguished). are placed.

Each head array 551 is a liquid ejecting means, and ejects black K, cyan C, magenta M, and yellow Y liquids onto the conveyed continuous body 510 . Note that the types and number of colors are not limited to this.

The head array 551 is formed by, for example, arranging the liquid ejection heads (also simply referred to as “heads”) 100 according to the present invention in a zigzag manner on the base member 552, but is not limited to this.

Next, an example of the liquid circulation device will be described with reference to FIG. FIG. 10 is a block explanatory diagram of the circulation device. Although only one head is shown here, in the case of arranging a plurality of heads, a supply side liquid path and a recovery side liquid path are connected to the supply side and the recovery side of the plurality of heads via a manifold or the like. will connect.

The liquid circulation device 600 includes a supply tank 601, a recovery tank 602, a main tank 603, a first liquid-sending pump 604, a second liquid-sending pump 605, a compressor 611, a regulator 612, a vacuum pump 621, a regulator 622, and a supply-side pressure sensor 631. , recovery side pressure sensor 632 and the like.

Here, the compressor 611 and the vacuum pump 621 constitute means for creating a differential pressure between the pressure in the supply tank 601 and the pressure in the recovery tank 602 .

The supply-side pressure sensor 631 is connected to the supply-side liquid path connected to the supply port 71 of the head 100 between the supply tank 601 and the head 100 . The recovery side pressure sensor 632 is connected to the recovery side liquid path connected to the recovery port 72 of the head 100 between the head 1 and the recovery tank 602 .

One of the recovery tanks 602 is connected to the supply tank 601 via the first liquid-sending pump 604 , and the other of the recovery tanks 602 is connected to the main tank 603 via the second liquid-sending pump 605 .

As a result, the liquid flows from the supply tank 601 into the head 100 through the supply port 71 , is recovered from the recovery port 72 to the recovery tank 602 , and is transferred from the recovery tank 602 to the supply tank 601 by the first liquid feeding pump 604 . A circulation path through which the liquid circulates is constructed by being sent.

Here, a compressor 611 is connected to the supply tank 601 and controlled so that a predetermined positive pressure is detected by the supply side pressure sensor 631 . On the other hand, a vacuum pump 621 is connected to the collection tank 602 and controlled so that a predetermined negative pressure is detected by the collection side pressure sensor 632 .

Thereby, the negative pressure of the meniscus can be kept constant while the liquid is circulated through the head 100 .

Further, when the liquid is discharged from the nozzle 4 of the head 100, the amount of liquid in the supply tank 601 and the recovery tank 602 decreases. Therefore, the recovery tank 602 is replenished with liquid from the main tank 603 using the second liquid-sending pump 605 as appropriate.

The timing of liquid replenishment from the main tank 603 to the recovery tank 602 is set within the recovery tank 602, such as when the liquid level in the recovery tank 602 drops below a predetermined level. It can be controlled by the detection result of a liquid level sensor or the like.

Next, another example of a printing apparatus as an apparatus for ejecting liquid according to the present invention will be described with reference to FIGS. 11 and 12. FIG. FIG. 11 is an explanatory plan view of the essential parts of the device, and FIG. 12 is an explanatory side view of the essential parts of the same device.

The printing apparatus 500 is a serial type apparatus, and a main scanning movement mechanism 493 reciprocates the carriage 403 in the main scanning direction. The main scanning movement mechanism 493 includes a guide member 401, a main scanning motor 405, a timing belt 408, and the like. The guide member 401 is bridged between the left and right side plates 491A and 491B to movably hold the carriage 403 . A main scanning motor 405 reciprocates the carriage 403 in the main scanning direction via a timing belt 408 stretched between a drive pulley 406 and a driven pulley 407 .

The carriage 403 is equipped with a liquid ejection unit 440 in which the liquid ejection head 100 and the head tank 441 according to the present invention are integrated. The liquid ejection head 100 of the liquid ejection unit 440 ejects liquids of yellow (Y), cyan (C), magenta (M), and black (K), for example. In addition, the liquid ejection head 100 is mounted with a nozzle row having a plurality of nozzles arranged in a sub-scanning direction perpendicular to the main scanning direction, with the ejection direction directed downward.

The liquid ejection head 100 is connected to the liquid circulation device 600 described above, and the liquid of a desired color is circulated and supplied.

This printing apparatus 500 includes a transport mechanism 495 for transporting the paper 410 . The transport mechanism 495 includes a transport belt 412 as transport means and a sub-scanning motor 416 for driving the transport belt 412 .

The transport belt 412 attracts the paper 410 and transports it at a position facing the liquid ejection head 100 . The conveying belt 412 is an endless belt and stretched between a conveying roller 413 and a tension roller 414 . Adsorption can be performed by electrostatic adsorption, air suction, or the like.

The conveying belt 412 rotates in the sub-scanning direction when the conveying roller 413 is rotationally driven by the sub-scanning motor 416 via the timing belt 417 and the timing pulley 418 .

Further, on one side of the carriage 403 in the main scanning direction, a maintenance/recovery mechanism 420 for maintaining/recovering the liquid ejection head 100 is arranged on the side of the transport belt 412 .

The maintenance/recovery mechanism 420 includes, for example, a cap member 421 that caps the nozzle surface of the liquid ejection head 100 (a surface on which nozzles are formed), a wiper member 422 that wipes the nozzle surface, and the like.

The main scanning movement mechanism 493, maintenance recovery mechanism 420, and transport mechanism 495 are attached to a housing including side plates 491A and 491B and a back plate 491C.

In the printing apparatus 500 configured as described above, the paper 410 is fed onto the conveying belt 412 and attracted thereto, and the conveying belt 412 is rotated to convey the paper 410 in the sub-scanning direction.

Therefore, by moving the carriage 403 in the main scanning direction and driving the liquid ejection head 100 in accordance with the image signal, the liquid is ejected onto the stationary paper 410 to form an image.

Next, another example of the liquid ejection unit according to the invention will be described with reference to FIG. FIG. 13 is an explanatory plan view of the main part of the same unit.

Among the members constituting the liquid ejection unit 440 and the apparatus for ejecting the liquid, a housing portion composed of side plates 491A and 491B and a back plate 491C, a main scanning movement mechanism 493, a carriage 403, and liquid It is composed of an ejection head 100 .

It should be noted that a liquid ejection unit can be constructed in which the maintenance recovery mechanism 420 described above is further attached to the side plate 491B of the liquid ejection unit 440, for example.

Next, still another example of the liquid ejection unit according to the present invention will be described with reference to FIG. FIG. 14 is an explanatory front view of the same unit.

This liquid ejection unit 440 is composed of a liquid ejection head 100 to which a channel component 444 is attached, and a tube 456 connected to the channel component 444 .

Note that the channel component 444 is arranged inside the cover 442 . A head tank 441 can also be included in place of the channel component 444 . A connector 443 for electrical connection with the liquid ejection head 100 is provided above the channel component 444 .

In the present application, the liquid to be ejected is not particularly limited as long as it has a viscosity and surface tension that can be ejected from the head. It is preferable to be More specifically, solvents such as water and organic solvents, colorants such as dyes and pigments, functional-imparting materials such as polymerizable compounds, resins, and surfactants, biocompatible materials such as DNA, amino acids, proteins, and calcium. , edible materials such as natural pigments, solutions, suspensions, emulsions, etc. These are, for example, inkjet inks, surface treatment liquids, components of electronic elements and light emitting elements, and formation of electronic circuit resist patterns It can be used for applications such as liquids for liquids and material liquids for three-dimensional modeling.

Piezoelectric actuators (laminated piezoelectric element and thin film piezoelectric element), thermal actuators that use electrothermal conversion elements such as heating resistors, and electrostatic actuators that consist of a diaphragm and a counter electrode are used as energy sources for liquid ejection. includes those that

A "liquid ejection unit" is a liquid ejection head integrated with functional parts and mechanisms, and includes an assembly of parts related to ejection of liquid. For example, the "liquid ejection unit" includes a combination of at least one of a head tank, a carriage, a supply mechanism, a maintenance and recovery mechanism, a main scanning movement mechanism, and a liquid circulation device with a liquid ejection head.

Here, integration means, for example, that the liquid ejection head and functional parts or mechanisms are fixed to each other by fastening, adhesion, or engagement, or that one is held movably with respect to the other. include. Also, the liquid ejection head, the functional parts, and the mechanism may be configured to be detachable from each other.

For example, there is a liquid ejection unit in which a liquid ejection head and a head tank are integrated. Also, there is a type in which a liquid ejection head and a head tank are integrated by being connected to each other by a tube or the like. Here, it is also possible to add a unit including a filter between the head tank and the liquid ejection head of these liquid ejection units.

Further, there is a liquid ejection unit in which a liquid ejection head and a carriage are integrated.

Further, as a liquid ejection unit, there is one in which the liquid ejection head is movably held by a guide member constituting a part of the scanning movement mechanism, and the liquid ejection head and the scanning movement mechanism are integrated. Also, there is a type in which the liquid ejection head, the carriage, and the main scanning movement mechanism are integrated.

There is also a liquid ejection unit in which the liquid ejection head, the carriage, and the maintenance and recovery mechanism are integrated by fixing a cap member, which is a part of the maintenance and recovery mechanism, to a carriage to which the liquid ejection head is attached. .

Further, as a liquid ejection unit, there is one in which a tube is connected to a liquid ejection head to which a head tank or a channel component is attached, and the liquid ejection head and the supply mechanism are integrated. The liquid in the liquid storage source is supplied to the liquid discharge head through this tube.

It is assumed that the main scanning movement mechanism also includes a single guide member. Also, the supply mechanism includes a single tube and a single loading unit.

The "apparatus for ejecting liquid" includes an apparatus that includes a liquid ejection head or a liquid ejection unit, and drives the liquid ejection head to eject liquid. Devices that eject liquid include not only devices that can eject liquid onto an object to which liquid can adhere, but also devices that eject liquid into air or liquid.

The "liquid ejecting device" can include means for feeding, transporting, and ejecting an object to which liquid can adhere, as well as a pre-processing device, a post-processing device, and the like.

For example, as a "device that ejects liquid", an image forming device that ejects ink to form an image on paper, and powder is formed in layers to form a three-dimensional object (three-dimensional object). There is a three-dimensional modeling apparatus (three-dimensional modeling apparatus) that ejects a modeling liquid onto a formed powder layer.

Further, the "apparatus for ejecting liquid" is not limited to one that visualizes significant images such as characters and figures with the ejected liquid. For example, it includes those that form patterns that have no meaning per se, and those that form three-dimensional images.

The above-mentioned "substance to which a liquid can adhere" means a substance to which a liquid can adhere at least temporarily, such as a substance to which a liquid adheres and adheres, a substance which adheres and permeates, and the like. Specific examples include media such as recording media such as paper, recording paper, recording paper, film, and cloth, electronic components such as electronic substrates and piezoelectric elements, powder layers (powder layers), organ models, and test cells. Yes, and unless otherwise specified, includes anything that has liquid on it.

The material of the above-mentioned "thing to which a liquid can adhere" may be paper, thread, fiber, fabric, leather, metal, plastic, glass, wood, ceramics, etc., as long as the liquid can adhere even temporarily.

Further, the ``device for ejecting liquid'' includes a device in which a liquid ejection head and an object to which liquid can be adhered move relatively, but is not limited to this. Specific examples include a serial type apparatus in which the liquid ejection head is moved and a line type apparatus in which the liquid ejection head is not moved.

In addition, the "apparatus for ejecting liquid" also includes a treatment liquid coating device that ejects a treatment liquid onto the paper for the purpose of modifying the surface of the paper. There is an injection granulator that granulates fine particles of the raw material by injecting a composition liquid in which raw materials are dispersed in a solution through a nozzle.

The terms used in the present application, such as image formation, recording, printing, copying, printing, and molding, are synonymous.

REFERENCE SIGNS LIST 100 liquid ejection head 1 nozzle plate 4 nozzle 2 channel plate 3 vibration plate member 6 individual liquid chamber 10 supply side common channel 11 piezoelectric actuator 12 piezoelectric member 13 base member 20 common channel member 41 supply channel 42 recovery channel 50 Recovery side common channel 112 Piezoelectric element 115 Individual electrode wiring member 116 Common electrode wiring member 121 Piezoelectric layer 122A, 122B Internal electrode 123 Individual external electrode (end surface electrode 124 Common external electrode (end surface electrode 403 Carriage 440 Liquid discharge unit 500 Printer ( device that ejects liquid)
550 head unit 600 liquid circulation device

Claims (9)

columnar piezoelectric elements arranged in multiple rows;
an individual electrode wiring member and a common electrode wiring member connected to the piezoelectric elements of each row,
In the piezoelectric element, piezoelectric layers and internal electrodes are alternately laminated, the internal electrodes are alternately drawn out to different end surfaces, and individual external electrodes and a common external electrode connected to the internal electrodes are provided on the different end surfaces. death,
The individual external electrodes of the piezoelectric elements in each row are connected to the wiring pattern of the individual electrode wiring member,
The common external electrode provided for each of the piezoelectric elements is connected to a wiring pattern of a common electrode wiring member for each piezoelectric element ,
At least one of the common electrode wiring member and the individual electrode wiring member in each row is arranged to include a portion along the stacking direction of the piezoelectric elements and a portion along a direction orthogonal to the stacking direction. A piezoelectric actuator characterized by: The end surface of the piezoelectric element where the wiring pattern of the individual electrode wiring member and the individual external electrode are connected faces the end surface of the piezoelectric element where the wiring pattern of the common electrode wiring member and the common external electrode are connected.
The piezoelectric actuator according to claim 1, characterized in that: The plurality of rows of piezoelectric elements arranged side by side are held on a base member,
One of the common electrode wiring member and the individual electrode wiring member in each row is bent in a direction orthogonal to the stacking direction, passes between the piezoelectric element and the base member, and extends to the outer side surface of the base member. 3. The piezoelectric actuator according to claim 1, wherein the piezoelectric actuator is pulled out and bent in a direction along the stacking direction. The plurality of rows of piezoelectric elements arranged side by side are held on a base member,
Through holes are provided in the base member in a direction along the stacking direction between each row,
One of the common electrode wiring member and the individual electrode wiring member in each row is drawn out through the through hole to the surface of the base member opposite to the surface holding the piezoelectric elements, in a direction orthogonal to the stacking direction. 3. The piezoelectric actuator according to claim 1, wherein the piezoelectric actuator is arranged so as to be bent in two directions. A driving IC for driving the piezoelectric element is mounted on the individual electrode wiring member,
5. The piezoelectric actuator according to claim 3 , wherein said drive IC is in contact with said base member. A liquid ejection head comprising the piezoelectric actuator according to claim 1 . A liquid ejection unit comprising the liquid ejection head according to claim 6 . a head tank for storing the liquid to be supplied to the liquid ejection head, a carriage for mounting the liquid ejection head, a supply mechanism for supplying the liquid to the liquid ejection head, a maintenance and recovery mechanism for maintaining and recovering the liquid ejection head, and the liquid 8. A liquid ejection unit according to claim 7 , wherein at least one of main scanning movement mechanisms for moving the ejection head in the main scanning direction is integrated with the liquid ejection head. 9. A device for ejecting liquid, comprising the liquid ejection head according to claim 6 or the liquid ejection unit according to claim 7 or 8 .

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