JP7115925B2 - Imprint apparatus and imprint method using the same - Google Patents

Description

The present invention relates to an imprinting apparatus and an imprinting method using the imprinting apparatus, and more particularly to an imprinting apparatus using a pressure roll and an imprinting method using the imprinting apparatus.

2. Description of the Related Art Recently, with the development of technology, display products with reduced size and weight and improved performance have been produced. In the past, the existing cathode ray tube (CRT) was widely used as a display device due to its many advantages in terms of performance and price, but it overcomes the disadvantages of CRT in terms of miniaturization and portability. However, display devices having advantages such as miniaturization, light weight, and low power consumption, such as plasma display devices, liquid crystal display devices, and organic light emitting display devices, are receiving attention.

There have been efforts to form the structure of said display device by means of imprinting methods. For example, a wire grid polarizing element and, by extension, a fine pattern can be formed by an imprint method or the like. However, in the imprint method, it is necessary to uniformly press the stamp (mold) against the imprint resin layer in order to transfer a uniform imprint pattern to the imprint resin layer.

JP 2009-145742 A JP 2015-132825 A

Here, the technical problem of the present invention is focused on such points, and the object of the present invention is to provide an imprint apparatus including a pressure roller capable of applying uniform pressure. be.

Another object of the present invention is to provide an imprint method using an imprint apparatus.

An imprint apparatus according to one embodiment for realizing the above-described object of the present invention includes a stage for supporting a substrate to be processed, a first frame horizontally movable on the stage, and a second frame vertically movably supported; a first vertical moving unit vertically moving the second frame with respect to the first frame; vertically movably supported by the second frame a first pressure roller supporter; a second pressure roller supporter supported by the second frame so as to be movable in the vertical direction and separated from the first pressure roller supporter; a first fine vertical shifter for vertically moving the first pressure roller support; a second fine vertical shifter for vertically moving the second pressure roller support with respect to the second frame; and the first fine vertical shifter for vertically moving the second pressure roller supporter. A pressure roller supported by a pressure roller support and the second pressure roller support is included.

In one embodiment of the present invention, the imprint apparatus includes a first vertical linear guide disposed between the second frame and the first frame, and a first vertical linear guide coupled with the first vertical linear guide. A linear guide coupling may be further included. The first vertical linear guide and the first vertical linear guide joint may allow the second frame to move only in the vertical direction with respect to the first frame. The first vertical movement part may be installed in the first frame to move the second frame along the vertical direction.

In one embodiment of the present invention, the imprinting apparatus includes a first fine vertical linear guide disposed between the second frame and the first pressure roller support, and the first fine vertical linear guide It may further include a first fine vertical linear guide coupling part coupled with the. The first fine vertical movement part may be installed on the second frame to move the first pressure roller support part along the vertical direction.

In one embodiment of the present invention, the imprinting device is coupled with a second fine vertical linear guide disposed between the second frame and the second pressure roller support and the second fine vertical linear guide. A second fine vertical linear guide coupling part may be further included. The second fine vertical movement part may be installed on the second frame to move the second pressure roller support part along the vertical direction.

In one embodiment of the present invention, the imprint apparatus includes a first sensor unit disposed between the first fine vertical movement unit and the first pressure roller support unit, and the second fine vertical movement unit. A second sensor unit may be further included between the unit and the second pressure roller support unit. The first and second sensor units detect the pressure between the first fine vertical movement part and the first pressure roller supporting part and the pressure between the second fine vertical movement part and the second pressure roller, respectively. The pressure between the supports can be measured.

In one embodiment of the present invention, the first and second sensor units may be load cell or capacitance type pressure sensors.

In one embodiment of the present invention, the imprint apparatus may further include a support formed with a first horizontal linear guide. The first frame is formed with a first horizontal linear guide coupling part coupled with the first horizontal linear guide, so that the first frame can move in the horizontal direction along the first horizontal linear guide. .

In one embodiment of the present invention, the first pressure roller support part and the second pressure roller support part are arranged on the left and right sides of the pressure roller, respectively, and support the first pressure roller. and the second pressure roller supporting portion may be spaced apart from each other in another horizontal direction perpendicular to the one horizontal direction. The first fine vertical movement unit and the second fine vertical movement unit may be independently drivable.

In one embodiment of the present invention, the imprint apparatus may further include a first roll that provides a film, a second roll that collects the film, and a stamp providing unit that provides a stamp on the film. The pressure roller presses and presses the film on which the stamp is formed against the substrate to be processed on the stage, and advances while rotating in the one horizontal direction together with the first frame. , the imprinting process can be performed.

In one embodiment of the present invention, the first vertical shifter may be a servo motor, and both the first fine vertical shifter and the second fine vertical shifter may be piezo motors (ultrasonic motors).

An imprinting method according to an embodiment for realizing the object of the present invention includes a stage, a first frame horizontally movable on the stage, and vertically movable from the first frame. a supported second frame; a first vertical moving part vertically moving the second frame with respect to the first frame; a second pressure roller supporting portion supported by the second frame so as to be movable in the vertical direction and separated from the first pressure roller supporting portion; supporting the first pressure roller with respect to the second frame; a first minute vertical movement part for vertically moving a part, a second minute vertical movement part for vertically moving the second pressure roller supporter with respect to the second frame, the first pressure roller supporter, and the An imprinting apparatus can be used that includes a pressure roller supported by a second pressure roller support. The imprint method includes a preparatory step of loading a substrate to be processed onto the stage, moving the second frame in the vertical direction with respect to the first frame, and moving the pressure roller to a first position. moving the first pressure roller support and the second pressure roller support independently and vertically to move the pressure roller from the first position to a fine vertical movement step of vertically moving the substrate to be processed to a second position, which is a pressure position for applying pressure; A pressing step may be included in which a roller moves in the horizontal direction while pressing the substrate to be processed. In the present application, the terms "pressing position", "first position" and "second position" are used to mean the posture of the pressure roller, that is, the position and posture including the direction in which the roller shaft extends. .

In one embodiment of the present invention, the imprint method may further include a position correction step of pre-correcting the pressure position of the pressure roller in the imprint apparatus. The position correcting step includes testing a state of pressure applied by the pressure roller to the film on the substrate at a position preset as the pressure position, and adjusting the pressure position based on the pressure state. A pressure position correcting step of correcting and a confirmation step of confirming the state of pressure applied by the pressure roller to the film on the substrate using the corrected pressure position can be included.

In one embodiment of the present invention, the imprint apparatus includes a first sensor unit disposed between the first fine vertical movement unit and the first pressure roller support unit, and the second fine vertical movement unit. and the second pressure roller supporting portion, wherein the first and second sensor portions respectively correspond to the first fine vertical movement portion and the first pressure roller support portion. The pressure between the roller support and the pressure between the second fine vertical movement part and the second pressure roller support can be measured. The step of testing the pressurized state in the position correcting step includes, when the pressure roller presses the substrate to be processed, a first reference pressure value obtained by the first sensor unit and a reference pressure value obtained by the second sensor unit. 2. A reference pressure value is measured, and at the same time, a pressure measurement film is positioned between the substrate to be processed and the pressure roller, and based on the pressure measurement film after pressing, the pressure during pressing is The pressurization conditions, including distribution, can be measured.

In one embodiment of the present invention, in the step of correcting the pressure position of the pressure roller, the first fine vertical movement part and the second fine vertical movement are performed based on the result of the measurement in the step of testing the pressure state. By moving the parts independently of each other, it is possible to determine a corrected pressing position for the pressure roller to uniformly press the substrate to be processed.

In one embodiment of the present invention, the confirmation step includes pressing a new pressure measurement film on the stage with the pressure roller at the corrected pressure position to confirm the pressure state, , a first corrected pressure value and a second corrected pressure value, which are pressure values measured by the first sensor unit and the second sensor unit, may be determined as corrected pressure values.

In one embodiment of the present invention, in the fine vertical movement step, the first and second sensor units continuously measure the pressure while the pressure roller presses the substrate to be processed. The first fine vertical shifter and the second fine vertical shifter may be independently driven so as not to deviate from the corrected pressure value and the second corrected pressure value.

In one embodiment of the present invention, in the pressurizing step, the first and second sensor units continuously measure the pressure while the pressurizing roller presses the substrate to be processed, and the first correction is performed. The first fine vertical shifter and the second fine vertical shifter may be independently driven so as not to deviate from the pressure value and the second corrected pressure value.

In one embodiment of the present invention, the imprint apparatus includes a first vertical linear guide disposed between the second frame and the first frame, and a first vertical linear guide coupled with the first vertical linear guide. A linear guide coupling may be further included. The second frame can move only in the vertical direction with respect to the first frame by the first vertical linear guide and the first vertical linear guide connecting portion, and the first vertical moving portion moves along the first frame. is provided to move the second frame along the vertical direction.

In one embodiment of the present invention, the imprinting apparatus includes a first fine vertical linear guide disposed between the second frame and the first pressure roller support, and the first fine vertical linear guide It may further include a first fine vertical linear guide coupling part coupled with the. The first fine vertical movement part may be installed on the second frame to move the first pressure roller support part along the vertical direction.

In one embodiment of the present invention, the imprinting apparatus includes a second fine vertical linear guide disposed between the second frame and the second pressure roller support, and the second fine vertical linear guide A second fine vertical linear guide coupling part may be further included. The second fine vertical movement part is installed on the second frame and moves the second pressure roller supporting part along the vertical direction to move the first fine vertical movement part and the second minute vertical movement part. The moving parts can be driven separately.

According to the imprinting apparatus and imprinting method according to the embodiment of the present invention, the second frame is vertically moved to temporarily move the pressure roller to the first position, and then the first pressure roller By moving the first pressure roller support part and the second pressure roller support part in the vertical direction by moving the support part and the second pressure roller support part independently of each other, the pressure is The roller can be moved to a second position, which is a pressure position. As a result, the pressure position of the pressure roller can be precisely controlled, and uniform pressure can be applied in the imprint process.

Also, the imprint apparatus includes a first sensor unit and a second sensor unit, and drives the first and second fine vertical movement units using the pressure values measured by the first and second sensor units. to enable uniform pressurization.

In addition, the imprint method may further include a position correction step of pre-correcting the pressure position of the pressure roller using pressure values measured through the first sensor unit and the second sensor unit. This can allow for uniform pressurization.

However, the effects of the present invention are not limited to the above effects, and can be variously expanded without departing from the spirit and scope of the present invention.

1 is a side view schematically showing an imprint apparatus according to one embodiment of the present invention; FIG. 2 is a vertical cross-sectional view of the imprint apparatus of FIG. 1 in the left-right direction; FIG. 4 is a flow chart showing an imprint method according to another embodiment of the present invention; 4 is a flowchart detailing the position correction step of FIG. 3; Figure 4 is a flow chart detailing the imprinting step of Figure 3;

Preferred embodiments of the present invention will now be described in more detail with reference to the drawings.

FIG. 1 is a side view schematically showing an imprint apparatus according to one embodiment of the invention.

Referring to FIG. 1, the imprint apparatus includes a first roll 20, a second roll 30, a first guide roller 40, a second guide roller 50, a stamp providing unit 60, a stage 100, and a pressure roller 500. can be done.

The first roll 20 provides film 2 which can be collected onto the second roll 30 . That is, when the first roll 20 and the second roll 30 rotate, the film 2 wound around the first roll 20 is transferred to the stamp providing unit 60, the first guide roller 40, and the pressure roller. 500 and the second guide roller 50 to be wound on the second roll 30 .

The film 2 wound on the first roll 20 may be provided to the stamp providing unit 60 . The stamp providing unit 60 may provide a stamp (not shown) having a pattern formed on the film 2 .

The film 2 on which the stamp is formed may be guided by the first guide roller 40 and the second guide roller 50 and pressed onto the substrate 10 to be processed by the pressure roller 500 . . For example, the pressure roller 500 is lowered along a third direction (D3) that is vertically downward to bring the film 20 into contact with the substrate 10 to be processed, and then the pressure roller 500 can be moved in a first direction (D1), which is horizontally rearward. Accordingly, the pattern of the stamp can be imprinted on the imprint resin layer on the substrate 10 to be processed.

Although not shown, the imprint apparatus may further include a UV irradiator that irradiates the imprint resin layer on the substrate 10 to which the pattern has been transferred with ultraviolet rays. The imprint resin layer on the substrate 10 to which the pattern is transferred may be cured by the ultraviolet rays generated by the UV irradiation unit. Thereafter, the pressure roll 500 and the first and second guide rollers 40 and 50 are moved to separate the film 2 having the stamp formed thereon from the substrate 10 to be processed.

The film 2 used for imprinting may be provided to the second roll 30 and wound on the second roll 30 . The above procedure can be repeated to perform the imprinting process on a plurality of substrates to be processed.

FIG. 2 is a cross-sectional view of the imprint apparatus of FIG. 1 along the vertical direction and the left-right direction (second direction; roller axial direction).

1 and 2, the imprint apparatus includes a stage 100, a support part 110, a first horizontal linear guide 120a, a second horizontal linear guide 120b, a first frame 200, a first horizontal linear guide coupling part 210a, a second 2 horizontal linear guide coupling part 210b, first vertical linear guide 220a, second vertical linear guide 220b, first vertical moving part 230a, second vertical moving part 230b, second frame 300, first vertical linear guide coupling part 310a, second vertical linear guide coupling part 310b, first fine vertical linear guide 320a, second fine vertical linear guide 320b, first fine vertical moving part 330a, second fine vertical moving part 330b, first pressure roller supporting part 400a, A first fine vertical linear guide coupling part 410a, a first sensor part 420a, a second pressure roller support part 400b, a second fine vertical linear guide coupling part 410b, a second sensor part 420b, and a pressure roller 500 may be included. can.

The stage 100 can be arranged on a plane along a first direction (D1) and a second direction (D2) perpendicular to the first direction (D1). A substrate to be processed 10 may be placed on the stage 100 .

The first horizontal linear guide 120 a and the second horizontal linear guide 120 b may be disposed on the support part 110 . The first horizontal linear guide 120a and the second horizontal linear guide 120b may guide the first frame 200 to horizontally move along the first direction (D1).

The first frame 200 can move forward and backward on the stage 100 along the first direction (D1). The first frame 200 may include the first horizontal linear guide coupling part 210a, the second horizontal linear guide coupling part 210b, the first vertical moving part 230a, and the second vertical moving part 230b.

The first horizontal linear guide coupling part 210a and the second horizontal linear guide coupling part 210b are coupled to the first horizontal linear guide 120a and the second horizontal linear guide 120b, respectively, so that the first frame 200 is It can be guided to move along a first direction (D1). The first frame 200 can be moved along the first direction (D1) by various known driving means such as a servomotor.

The first vertical linear guide 220a and the second vertical linear guide 220b may guide the second frame 300 to move vertically along a third direction (D3), which is the vertical direction. Referring to FIG. 2, the first vertical linear guide 220a and the second vertical linear guide 220b may be arranged on the left and right sides of the first frame 200, respectively.

The first vertical movement part 230a and the second vertical movement part 230b may move the second frame 300 along the third direction (D3). Referring to FIG. 2, the first vertical moving part 230a and the second vertical moving part 230b are provided on the left and right sides of the first frame 200, respectively, to move the second frame 300 in the third direction (D3 ) can be moved along. The first vertical moving part 230a and the second vertical moving part 230b can be implemented with various known driving means capable of controlling movement displacement, such as a linearly movable servomotor.

The second frame 300 includes the first vertical linear guide coupling part 310a, the second vertical linear guide coupling part 310b, the first fine vertical linear guide 320a, the second fine vertical linear guide 320b, the first fine vertical linear guide A vertical moving part 330a and the second fine vertical moving part 330b may be installed.

The first vertical linear guide coupling part 310a and the second vertical linear guide coupling part 310b are coupled to the first vertical linear guide 220a and the second vertical linear guide 220b, respectively, so that the second frame 300 can It can be guided to move along a third direction (D3).

The first fine vertical linear guide 320a may guide the first pressure roller supporter 400a to move vertically along the third direction (D3).

The second fine vertical linear guide 320b may guide the second pressure roller supporter 400b to move vertically along the third direction (D3).

The first fine vertical movement part 330a and the second fine vertical movement part 330b move the first pressure roller support part 400a and the second pressure roller support part 400b, respectively, along the third direction (D3). can be moved by Referring to FIG. 2, the first fine vertical movement part 330a and the second fine vertical movement part 330b are installed on the left and right sides of the second frame 300, respectively, and the first pressure roller support part 400a is provided. And the second pressure roller support part 400b can be moved along the third direction (D3). The first fine vertical movement part 330a and the second fine vertical movement part 330b can be implemented with various known driving means capable of controlling movement displacement, such as a linearly movable servo motor. For the first fine vertical movement part 330a and the second fine vertical movement part 330b, a driving means capable of more precise control than the first vertical movement part 230a and the second vertical movement part 230b may be used. preferable. For example, a servo motor may be used for the first vertical moving part 230a and the second vertical moving part 230b, and a piezo motor may be used for the first fine vertical moving part 330a and the second fine vertical moving part 330b.

The first fine vertical linear guide coupling part 410a may be installed on the first pressing roller support part 400a. The first fine vertical linear guide coupling part 410a is coupled to the first fine vertical linear guide 320a to guide the first pressure roller support part 400a to move along the third direction (D3). can do.

The second fine vertical linear guide coupling part 410b may be installed on the second pressure roller support part 400b. The second fine vertical linear guide coupling part 410b is coupled to the second fine vertical linear guide 320b to guide the second pressure roller support part 400b to move along the third direction (D3). be able to.

The first sensor part 420a is disposed between the first fine vertical movement part 330a and the first pressure roller support part 400a to support the first fine vertical movement part 330a and the first pressure roller support part 400a. The pressure applied between the portion 400a can be measured. The first sensor part 420a may be a load cell such as a strain gauge type or a piezoelectric type, or a capacitance type pressure sensor.

The second sensor part 420b is disposed between the second fine vertical movement part 330b and the second pressure roller support part 400b to support the first fine vertical movement part 330a and the second pressure roller support part 400b. The pressure applied between the portion 400b can be measured. The second sensor part 420b may be a load cell such as a strain gauge type or a piezoelectric type, or a capacitance type pressure sensor.

The pressure roller 500 is supported by the first pressure roller support portion 400a and the second pressure roller support portion 400b, and is configured to press the film 2 onto the substrate 10 to be processed in the first direction ( D1) can move and rotate. The pressure roller 500 may have a cylindrical shape extending in the second direction (D2). 2, the shaft of the pressure roller 500 is supported by the first pressure roller support part 400a and the second pressure roller support part 400b on the left and right sides of the pressure roller 500, respectively, The pressure roller 500 can rotate around the axis.

Here, the first pressure roller support part 400a and the second pressure roller support part 400b are separated from each other and configured separately, and the first fine vertical movement part 330a and the second fine vertical movement part 330a are separated from each other. Since each can be moved by the portion 330b, the first pressure roller support portion 400a and the second pressure roller support portion 400b can move independently of each other. For example, when the substrate to be processed 10 is slightly tilted to the left or right, the pressing roller 500 moves in the second direction with different movement displacements of the first fine vertical movement part 330a and the second fine vertical movement part 330b. At (D2), the substrate to be processed 10 can be uniformly pressed.

The first and second sensor units 420a and 420b are for measuring the pressure of the pressure roller 500 pressing the film 20 and the substrate 10, and it is difficult to directly measure the pressure. There's a problem. Therefore, the first and second sensor parts 420a and 420b are located between the first pressure roller support part 400a and the first fine vertical movement part 330a, which are closest to the pressure roller 500. And by disposing it between the second pressure roller support part 400b and the second fine vertical movement part 330b, the pressure measurement error and the structural simplicity of the imprint apparatus can be satisfied at the same time.

Referring again to FIGS. 1 and 2, the imprinting process can proceed using the imprinting apparatus. First, the substrate 10 to be processed can be loaded onto the stage 100 . Then, the imprint resin layer (not shown) may be formed on the substrate 10 to be processed.

After that, the first frame 200 may be moved in the first direction D<b>1 to position the pressure roller 500 on the substrate 10 to be processed.

First, the first and second vertical moving parts 230a and 230b are driven to move the second frame 300 in the third direction (D3), thereby temporarily moving the pressure roller 500 to a first position. can be made The first position is a position where the pressure roller 500 approaches the substrate 10 to be processed.

Next, the first fine vertical movement part 330a and the second fine vertical movement part 330b are independently driven to move the first pressure roller support part 400a and the second pressure roller support part 400b in the third direction. (D3) can be moved. Accordingly, the pressure roller 500 can move to the second position, which is the pressure position. At this time, as described above, the pressure roller 500 presses the substrate to be processed 10 and the film 20 even when the substrate to be processed 10 is slightly tilted. uniform pressure across the entire width of the film).

After that, by moving the first frame 100 in the first direction (D1), that is, backward, the pressure roller 500 rotates and the substrate 10 to be processed is moved in the first direction (D1). can move along. This allows the stamp formed on the film 10 (see description of FIG. 1) to be imprinted on the imprint resin layer.

FIG. 3 is a flow chart showing an imprint method according to another embodiment of the invention. FIG. 4 is a flow chart detailing the position correction step of FIG. FIG. 5 is a flow chart showing the imprint method of FIG. The imprinting method can be performed using the imprinting apparatus of FIGS.

1 to 5, the imprint method may include a position correction step (S100) and an imprint step (S200). The position correcting step (S100) may include a step of testing the pressing state (S110), a step of correcting the pressing position of the pressure roller (S120), and a confirmation step (S130). The imprint step (S200) may include a preparation step (S210), a vertical movement step (S220), a fine vertical movement step (S230), and a pressing step (S240).

In the position correction step (S100), the pressure position of the pressure roller 500 in the imprint apparatus can be corrected in advance before the imprint step of pressing the film on the substrate to be processed.

In the step of testing the pressure state ( S110 ), the pressure roller 500 may press the substrate to be processed 10 to perform imprinting. At this time, a first reference pressure value of the first sensor part 420a and a second reference pressure value of the second sensor part 420b can be measured. At the same time, the pressure distribution is measured by using means capable of measuring the pressure state, such as placing a pressure measuring film (prescale) or a pressure sensor sheet on the substrate 10 to be processed. can do. This makes it possible to confirm the presence, position, and range of portions where the pressure is uneven.

In the pressure position correction step (S120) of the pressure roller, the presence or absence and the position/range of the portion where the pressure is uneven is confirmed based on the pressure state indicated on the pressure measurement film after the pressure is applied. Based on this, the position of the pressure roller 500 can be corrected. Specifically, the first fine vertical movement part 330a and the second fine vertical movement part 330b are independently moved, and the pressure roller 500 uniformly presses the substrate 10 to be processed. A pressure position can be defined.

In the confirming step (S130), after placing a new pressure measurement film on the substrate 10 to be processed, imprinting may be performed using the pressure roller 500 at the corrected pressure position. can. If the pressurization state detected by the pressure measurement film is uniform, the first corrected pressure value of the first sensor unit 420a and the second corrected pressure value of the second sensor unit 420b measured at this time are It can be used as a corrected value. That is, if the pressure values measured by the first and second sensor units 420a and 420b are the first corrected pressure value and the second corrected pressure value, respectively, then the pressure roller 500 is in contact with the substrate. 10 can be determined to be uniformly pressurized.

In the imprinting step (S200), the substrate to be processed 10 may be positioned on the stage to perform imprinting on the substrate to be processed. For example, after forming an imprint resin layer (not shown) on the substrate 10 to be processed, the uneven pattern of the stamp on the film 2 can be transferred to the imprint resin layer. At this time, after curing the imprint resin layer to which the uneven pattern of the stamp has been transferred using the UV irradiation unit, the film 2 is separated from the imprint resin layer to proceed with the imprint. can do. Using the imprint, a wire grid polarizing element of a display device can be manufactured.

In the preparation step ( S<b>210 ), after the pressure roller 500 is separated from the stage 100 in the direction opposite to the third direction ( D<b>3 ), ie vertically upward, the substrate 10 to be processed is placed on the stage 100 . can be loaded. After that, the first frame 200 can be moved along the first direction (D1), particularly forward, so that the pressure roller 500 can be positioned on the substrate 10 to be processed.

In the vertical movement step (S220), the second frame 300 may be moved in the third direction (D3), particularly vertically downward, to temporarily move the pressure roller 500 to a first position. can. The first position is a position where the pressure roller 500 approaches the substrate 10 to be processed.

In the fine vertical movement step (S230), the first pressure roller support part 400a and the second pressure roller support part 400b are independently moved, so that the first pressure roller support part 400a and the second pressure roller support part 400b Each of the two pressure roller support parts 400b can be moved in the third direction (D3) by a predetermined distance. Accordingly, the pressure roller 500 can move to the second position, which is the pressure position. At this time, the first and second sensor units 420a and 420b can continuously measure the pressure while the pressure roller 500 presses the substrate 10 to be processed, so that the first corrected pressure value can be measured. In addition, the first fine vertical movement part 330a and the second fine vertical movement part 330b may be independently driven to maintain the proper pressure of the pressure roller 500 so as not to deviate from the second corrected pressure value. can.

In the pressing step ( S<b>240 ), the film 2 may be transferred to the entire substrate 10 to be processed by moving the pressing roller 500 in the first direction ( D<b>1 ). As the first frame 200 moves in the first direction (D1), the pressing roller 500 may move in the first direction (D1). This allows imprinting to occur. At this time, the first and second sensor units 420a and 420b can continuously measure the pressure while the pressure roller 500 presses the substrate 10, and based on this measurement, By independently driving the first fine vertical moving part 330a and the second fine vertical moving part 330b so that the pressure does not deviate from the first corrected pressure value and the second corrected pressure value, the pressure is Appropriate pressure can be maintained between the roller 500 and the substrate 10 to be processed at any point and at any time.

According to the imprinting apparatus and imprinting method according to the embodiment of the present invention, the second frame is vertically moved to temporarily move the pressure roller to the first position, and then the first pressure roller By moving the support part and the second pressure roller support part independently of each other, the first pressure roller support part and the second pressure roller support part are moved in the vertical direction by respective required distances. Thus, the pressure roller can be moved to the second position, which is the pressure position. As a result, the pressure position of the pressure roller, particularly the slight lateral tilt, can be precisely controlled, and uniform pressure can be applied in the imprint process.

In addition, since the imprint apparatus includes a first sensor unit and a second sensor unit, the pressure values measured by the first and second sensor units are used in real time to detect the first and second fine vertical movement units. Uniform pressurization can be achieved by driving the .

Also, the imprinting method may further include a position correction step of pre-correcting the pressure position of the pressure roller using pressure values measured through the first sensor unit and the second sensor unit. , which can allow uniform pressurization.

Although the above has been described with reference to the embodiments, those skilled in the relevant technical field may make various modifications and changes to the present invention without departing from the spirit and scope of the present invention described in the claims. can understand what is possible.

A preferred embodiment of the present invention is as follows.

Wire grid polarizers are used to suppress the reflection of external light in liquid crystal display devices and organic light emitting display devices. When providing on the top, after transferring the uneven pattern from the metal stamp (mold) to the long resin film, this resin film is pressed against the uncured resin layer for forming the etching resist on another long film. , it has also been proposed to provide an uneven pattern (JP2009-145742A).

In order to address such problems, according to preferred embodiments, the imprint apparatus of the present application has features A to H below.

A. A stage 100 on which the substrate 10 is placed and supported, and a pressing force for pressing the long film 2 onto which the uneven pattern is transferred by the stamp (mold) of the stamp applying unit 60 against the uncured resin layer on the substrate 10. A pressure roller 500 is provided.

B. A first frame 200 having a first beam extending in the horizontal direction above the pressure roller 500 and left and right first columnar portions connected to both ends of the first frame 200 extends from the support base 110. , are slidably supported in the front-rear direction.

C. A second beam extending in the horizontal direction above the pressure roller 500, left and right second columnar portions extending in the vertical direction from both ends thereof, and left and right columnar portions extending downward from the second beams in the vicinity of these. A second frame 300 having three columnar portions is vertically slidably supported from the first frame 200 by a slidable connection between the first and second columnar portions. .

D The left and right pressure roller support portions 400a and 400b that support both ends of the shaft of the pressure roller 500 have a first portion extending in the vertical direction and a second portion extending inward in the horizontal direction from the first portion. and is vertically slidably supported from the second frame 300 by a slidable connection between the first portion and the third columnar portion.

E. Between the first beam and the second beam, the second frame 300 is attached to the first frame at a position overlapping the left and right pressure roller support portions 400a and 400b in the vertical direction, for example Left and right vertical moving parts 230a and 230b are provided as telescopic actuators of self-locking type (fixed position when not driven) that moves up and down in the minimum unit of 100 nanometers to 1 micrometer.

F Between the second beam and the second portions of the left and right pressure roller support portions 400a and 400b, the pressure roller support portions 400a and 400b are arranged with respect to the second frame 300, for example, 1 to 400b. Left and right fine vertical movement parts 330a, 330b are provided as self-locking telescoping actuators that move up and down in units of 10 nanometers. The moving speed and movable range of these fine vertical moving parts 330a, 330b are, for example, 1 to 10% of those of the vertical moving parts 230a, 230b.

G Left and right fine vertical movement sections 330a, 330b comprise left and right sensor sections 420a, 420b that measure the pressure between the second beam and said second portion in real time.

H The left and right fine vertical movement units 330a and 330b can be independently controlled in real time based on the measurement results of the left and right sensor units 420a and 420b.

According to a preferred embodiment, the imprinting method of the present application further comprises features I to M below.

I Before the imprint step to obtain the product, whether or not the position and posture of the pressure roller ("pressure position") that have already been set at the time of pressing for uneven pattern transfer are appropriate. After confirming the position, a "position correction step S100" is performed to correct the position as appropriate.

J In the first step of the "position correction step S100" ("step S110 of testing the pressurized state"), a pressure measuring film (prescale) is placed between the pressure roller 500 and the substrate 10, Pinch and pressurize. That is, instead of sandwiching and pressurizing the resin film 2 onto which the uneven pattern is transferred and the uncured resin layer (imprint resin layer), a pressure measuring film (prescale) is sandwiched and pressurized. During this pressurization period, the left and right sensor units 420a and 420b continue to measure the pressure.

K In the second step ("pressurized position correcting step S120") of the "position correcting step S100", the pressurized state indicated on the pressure measurement film after pressurization and the pressure by the left and right sensor units 420a and 420b are compared. A corrected pressing position is determined based on the measurement result. Then, this corrected pressure position is set in the imprint apparatus. If there is a difference between the overall thickness of the resin film 2 and the uncured resin layer (imprinted resin layer) to which the uneven pattern has been transferred and the thickness of the pressure measurement film, the difference is taken into account for correction. Determine the applied pressure position.

L In the third step ("confirmation step S130") of the "position correction step S100", a new pressure measurement film is used to perform the same operation as in the "step S110 of testing the pressurized state", thereby obtaining a uniform Make sure there is adequate pressurization. As a result, if it is insufficient, the "pressing position correction step S120" and the "confirmation step S130" are performed again.

M In the "imprint step S200" after the "position correction step S100", the following "preparation step S210", "vertical movement step S220", "fine vertical movement step S230", and "pressure step S240" are performed. .

"Preparation step S210": The pressure roller 500 is raised by the left and right vertical moving parts 230a and 230b, and the substrate to be processed 10 on which the uncured resin layer is formed is set on the stage 100.

"Vertical movement step S220": The pressure roller 500 is lowered to the "first position" by the left and right vertical movement units 230a and 230b. That is, the resin film 2 to which the concave-convex pattern has been transferred approaches or contacts the uncured resin layer (imprinted resin layer) on the substrate 10, or reaches a position where partial pressure is applied. lower.

"Fine vertical movement step S230": Left and right fine vertical movement units 330a and 330b move the pressure roller 500 slightly downward from the "first position" to the "second position". As a result, an uneven pattern having a predetermined depth is formed in the uncured resin layer (imprint resin layer). That is, the concave and convex pattern of the stamp (mold) of the stamp applying portion 60 is duplicated at the linear portions pressed by the pressure roller 500 . The stamp of the stamp providing part 60 is made of metal or inorganic material and may be in the form of a pressure roller or the like.

・"Pressure step S240": While maintaining the height of the "second position", the pressure roller 500 is rolled back and forth to form an uncured resin layer (imprint resin layer) on the substrate 10. Imprinting (formation of a predetermined concave/convex pattern) is performed on the entire surface of the substrate. At this time, the left and right sensor units 420a and 420b continue to measure the pressure, and if there is a deviation from the target pressure value, for example, the deviation from the target pressure value is 5% or more, 3% or more, or 1% or more. In this case, the imprint apparatus can be controlled to finely adjust the pressing position in real time by driving the left and right fine vertical movement units 330a and 330b. It should be noted that ultraviolet rays may be irradiated immediately after the uneven pattern is transferred by the pressurization, so that at least partial curing can be performed.

According to one embodiment, the apparatus and method described above are used to form a wire grid polarizer for a liquid crystal display. That is, the imprint resin layer formed on the metal layer forms a resist pattern during etching. In this case, the imprint can form a pattern of parallel, equidistant grooves with a depth approximately corresponding to the thickness of the imprinted resin layer. The thickness of the imprint resin layer is, for example, 40-100 nm. Further, each metal line forming the obtained wire grid polarizing element can have a width of 10 to 20 nm, a height of 30 to 60 nm, and a mutual interval of 10 to 20 nm, for example. The wire grid polarizing element can be provided, for example, on the inner surface side of at least one substrate of the liquid crystal display device, that is, on the pattern forming surface (in-cell type).

2 film 10 substrate to be processed 20 first roll 30 second roll 40 first guide roller 50 second guide roller 100 stage 200 first frame 300 second frame 400a first pressure roller support 400b second pressure roller support 500 pressure roller

Claims (20)

a stage for supporting a substrate to be processed;
a first frame horizontally movable on the stage;
a second frame vertically movably supported from the first frame;
a first vertical movement unit that vertically moves the second frame with respect to the first frame;
a first pressure roller support supported by the second frame so as to be movable in the vertical direction;
a second pressure roller supporting part supported by the second frame so as to be movable in the vertical direction and separated from the first pressure roller supporting part;
a first fine vertical movement unit vertically moving the first pressure roller support with respect to the second frame;
a second fine vertical movement unit that vertically moves the second pressure roller support with respect to the second frame;
a pressure roller supported by the first pressure roller support and the second pressure roller support;
including
further comprising a first vertical linear guide disposed between the second frame and the first frame, and a first vertical linear guide coupling part coupled with the first vertical linear guide;
the first vertical linear guide and the first vertical linear guide coupling portion allow the second frame to move only in the vertical direction with respect to the first frame;
the first vertical movement unit is provided on the first frame and moves the second frame along the vertical direction;
It further comprises a first fine vertical linear guide disposed between the second frame and the first pressure roller supporting part, and a first fine vertical linear guide coupling part coupled with the first fine vertical linear guide. ,
the first fine vertical movement part is installed on the second frame to move the first pressure roller support part along the vertical direction;
It further comprises a second fine vertical linear guide disposed between the second frame and the second pressure roller support, and a second fine vertical linear guide coupling unit coupled with the second fine vertical linear guide. ,
the second fine vertical movement part is installed on the second frame to move the second pressure roller support part along the vertical direction;
a first roll that provides a film;
a second roll for collecting the film;
a stamp providing unit for providing a stamp on the film;
The pressure roller presses and presses the film on which the stamp is formed against the substrate to be processed on the stage, and advances while rotating in the one horizontal direction together with the first frame. to carry out the imprinting process,
the first and second vertical movement units are telescoping actuators extending vertically between the horizontal beams of the first frame and the horizontal beams of the second frame;
The first and second vertical moving parts are positioned vertically above bearing portions where the first and second pressure roller support parts rotatably support shafts at both ends of the pressure roller, respectively;
The first and second fine vertical movement parts are extendable vertically between the horizontal beams of the first and second pressure roller support parts and the horizontal beams of the second frame, respectively. An imprinting device that is an actuator of The first and second fine vertical linear guides are provided on the inner surface of a lower columnar portion extending downward from the horizontal beam portion of the second frame. The imprint apparatus according to claim 1, wherein the first and second fine vertical movement portions are positioned inside in the left-right direction from the bearing portion. 3. The imprinting apparatus according to claim 2, wherein the first and second vertical linear guide coupling portions are provided on the outer surface of an upper columnar portion extending upward from the horizontal beam portion of the second frame. A first guide roller and a second guide roller are provided behind and in front of the pressure roller, respectively. , moves backward together with the pressure roller, while the second guide roller remains near the front edge of the substrate to be processed;
4. The stamp-donor provides a patterned stamp on the underside of the film in the path between the first guide roller and the first roll. The imprinting apparatus according to any one of the above. a first sensor unit disposed between the first fine vertical movement unit and the first pressure roller support unit;
further comprising a second sensor unit disposed between the second fine vertical movement unit and the second pressure roller support unit;
The first and second sensor units detect the pressure between the first fine vertical movement part and the first pressure roller supporting part and the pressure between the second fine vertical movement part and the second pressure roller, respectively. 5. The imprinting apparatus according to any one of claims 1 to 4 , wherein the pressure between the imprinting apparatus and the supporting portion is measured. 6. The imprinting apparatus of claim 5, wherein the first and second sensor units are load cell or capacitance type pressure sensors. further comprising a support on which the first horizontal linear guide is formed;
The first frame is formed with a first horizontal linear guide coupling part coupled with the first horizontal linear guide, and the first frame moves in the horizontal direction along the first horizontal linear guide. The imprinting apparatus according to any one of claims 1 to 4, wherein: The first pressure roller support part and the second pressure roller support part are arranged on the left side and the right side respectively with the pressure roller interposed therebetween, and the first pressure roller support part and the second pressure roller are arranged. The support portions are separated from each other in another horizontal direction perpendicular to the one horizontal direction,
The imprint apparatus according to any one of claims 1 to 4, wherein the first fine vertical movement section and the second fine vertical movement section can be driven independently of each other. the first vertical movement unit includes a servomotor;
The imprint apparatus according to any one of claims 1 to 4, wherein both the first fine vertical movement unit and the second fine vertical movement unit include piezo motors. Using the imprinting apparatus according to any one of claims 1 to 9 ,
a preparation step of loading a substrate to be processed onto the stage;
a primary vertical movement step of moving the second frame in the vertical direction with respect to the first frame to temporarily move the pressure roller to a first position;
The first pressure roller supporting part and the second pressure roller supporting part are vertically moved independently of each other, and the pressure roller moves from the first position to a pressure position for pressing the substrate to be processed. a fine vertical movement step of moving vertically to a second position;
a pressing step of moving the first frame in the horizontal direction from the second position so that the pressure roller moves in the horizontal direction while pressing the substrate to be processed;
imprinting methods, including 11. The imprinting method according to claim 10, which is used to form a wire grid polarizing element for a liquid crystal display device. further comprising a position correction step of pre-correcting the pressure position of the pressure roller in the imprint apparatus;
The position correction step includes:
testing the state of pressure applied to the film on the substrate by the pressure roller at a position preset as the pressure position;
a pressurized position correction step of correcting the pressurized position based on the pressurized state;
a confirmation step of confirming the state of pressure applied to the film on the substrate by the pressure roller using the corrected pressure position;
12. The imprinting method according to claim 11, comprising: The imprint apparatus includes a first sensor unit disposed between the first fine vertical movement unit and the first pressure roller supporting unit, and the second fine vertical movement unit and the second pressure roller. a second sensor unit disposed between the support unit, wherein the first and second sensor units detect the pressure between the first fine vertical movement unit and the first pressure roller support unit, respectively; and measuring the pressure between the second fine vertical movement portion and the second pressure roller support;
In the step of testing the pressurized state in the position correction step,
measuring a first reference pressure value by the first sensor unit and a second reference pressure value by the second sensor unit when the substrate to be processed is pressed by the pressure roller;
At the same time, a pressure measurement film is positioned between the substrate to be processed and the pressure roller, and the pressure state including the pressure distribution at the time of pressing is determined based on the pressure measurement film after pressing. 13. The imprinting method according to claim 12, characterized by measuring. In the pressure position correction step of the pressure roller,
By independently moving the first fine vertical movement part and the second fine vertical movement part based on the result of the measurement in the step of testing the pressing state, the pressure roller presses the substrate to be processed. 14. The imprinting method according to claim 13, wherein a corrected pressing position is determined for uniform pressing. The verification step includes:
pressing a new pressure measurement film on the stage with the pressure roller at the corrected pressure position to confirm the pressure state;
At this time, a first corrected pressure value and a second corrected pressure value, which are pressure values measured by the first sensor unit and the second sensor unit, are determined as corrected pressure values. 15. The imprinting method according to 14. In the fine vertical movement step,
The first and second sensor units continuously measure the pressure while the pressure roller presses the substrate to be processed so as not to deviate from the first corrected pressure value and the second corrected pressure value. 16. The imprinting method of claim 15, further comprising driving the first fine vertical shifter and the second fine vertical shifter independently of each other. In the pressurizing step,
The first and second sensor units continuously measure the pressure while the pressure roller presses the substrate to be processed so as not to deviate from the first corrected pressure value and the second corrected pressure value. 16. The imprinting method of claim 15, further comprising driving the first fine vertical shifter and the second fine vertical shifter independently of each other. The imprinting apparatus further includes a first vertical linear guide disposed between the second frame and the first frame, and a first vertical linear guide coupling part coupled with the first vertical linear guide,
The first vertical linear guide and the first vertical linear guide connecting portion allow the second frame to move only in the vertical direction with respect to the first frame, and the first vertical moving portion moves the first frame. 12. The imprinting method according to claim 11, wherein the second frame is moved along the vertical direction. The imprinting apparatus includes a first fine vertical linear guide disposed between the second frame and the first pressure roller support, and a first fine vertical linear guide coupled with the first fine vertical linear guide. further comprising a guide joint;
19. The imprinting method of claim 18, wherein the first fine vertical movement unit is installed on the second frame to move the first pressure roller supporter along the vertical direction. . The imprinting apparatus includes a second fine vertical linear guide disposed between the second frame and the second pressure roller support, and a second fine vertical linear guide coupled with the second fine vertical linear guide. further comprising a guide joint;
The second fine vertical movement part is installed on the second frame and moves the second pressure roller supporting part along the vertical direction to move the first fine vertical movement part and the second minute vertical movement part. 20. The imprinting method according to claim 19, wherein the moving part is driven separately.

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