JP7044187B2 - Board with bulkhead and display device - Google Patents
Board with bulkhead and display device Download PDFInfo
- Publication number
- JP7044187B2 JP7044187B2 JP2021054556A JP2021054556A JP7044187B2 JP 7044187 B2 JP7044187 B2 JP 7044187B2 JP 2021054556 A JP2021054556 A JP 2021054556A JP 2021054556 A JP2021054556 A JP 2021054556A JP 7044187 B2 JP7044187 B2 JP 7044187B2
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- JQPNZGQJKDKWAZ-UHFFFAOYSA-N ethyl-dimethoxy-(2,2,2-trifluoroethyl)silane Chemical compound CC[Si](OC)(OC)CC(F)(F)F JQPNZGQJKDKWAZ-UHFFFAOYSA-N 0.000 description 1
- HROVXMRQCKFDTL-UHFFFAOYSA-N ethyl-dimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](CC)(OC)OC)CCC2OC21 HROVXMRQCKFDTL-UHFFFAOYSA-N 0.000 description 1
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- IFPWCRBNZXUWGC-UHFFFAOYSA-M gold(1+);triphenylphosphane;chloride Chemical compound [Cl-].[Au+].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 IFPWCRBNZXUWGC-UHFFFAOYSA-M 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
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- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
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- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000010954 inorganic particle Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- LZKLAOYSENRNKR-LNTINUHCSA-N iron;(z)-4-oxoniumylidenepent-2-en-2-olate Chemical compound [Fe].C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O LZKLAOYSENRNKR-LNTINUHCSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- GJRQTCIYDGXPES-UHFFFAOYSA-N iso-butyl acetate Natural products CC(C)COC(C)=O GJRQTCIYDGXPES-UHFFFAOYSA-N 0.000 description 1
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- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000007561 laser diffraction method Methods 0.000 description 1
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- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
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- 239000011572 manganese Substances 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
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- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- IZDROVVXIHRYMH-UHFFFAOYSA-N methanesulfonic anhydride Chemical compound CS(=O)(=O)OS(C)(=O)=O IZDROVVXIHRYMH-UHFFFAOYSA-N 0.000 description 1
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- BKXVGDZNDSIUAI-UHFFFAOYSA-N methoxy(triphenyl)silane Chemical compound C=1C=CC=CC=1[Si](C=1C=CC=CC=1)(OC)C1=CC=CC=C1 BKXVGDZNDSIUAI-UHFFFAOYSA-N 0.000 description 1
- YDKNBNOOCSNPNS-UHFFFAOYSA-N methyl 1,3-benzoxazole-2-carboxylate Chemical compound C1=CC=C2OC(C(=O)OC)=NC2=C1 YDKNBNOOCSNPNS-UHFFFAOYSA-N 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 229940057867 methyl lactate Drugs 0.000 description 1
- NYNUHRSRXWVIOK-UHFFFAOYSA-N methyl-di(propan-2-yloxy)-(2,2,2-trifluoroethyl)silane Chemical compound CC(C)O[Si](C)(CC(F)(F)F)OC(C)C NYNUHRSRXWVIOK-UHFFFAOYSA-N 0.000 description 1
- RPCWRMBLDBTWDT-UHFFFAOYSA-N methyl-di(propan-2-yloxy)-(3,3,3-trifluoropropyl)silane Chemical compound CC(C)O[Si](C)(OC(C)C)CCC(F)(F)F RPCWRMBLDBTWDT-UHFFFAOYSA-N 0.000 description 1
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- IBHBKWKFFTZAHE-UHFFFAOYSA-N n-[4-[4-(n-naphthalen-1-ylanilino)phenyl]phenyl]-n-phenylnaphthalen-1-amine Chemical compound C1=CC=CC=C1N(C=1C2=CC=CC=C2C=CC=1)C1=CC=C(C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C3=CC=CC=C3C=CC=2)C=C1 IBHBKWKFFTZAHE-UHFFFAOYSA-N 0.000 description 1
- FDIOSTIIZGWENY-UHFFFAOYSA-N n-[bis(diethylamino)phosphanyl]-n-ethylethanamine Chemical compound CCN(CC)P(N(CC)CC)N(CC)CC FDIOSTIIZGWENY-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- BMGNSKKZFQMGDH-FDGPNNRMSA-L nickel(2+);(z)-4-oxopent-2-en-2-olate Chemical compound [Ni+2].C\C([O-])=C\C(C)=O.C\C([O-])=C\C(C)=O BMGNSKKZFQMGDH-FDGPNNRMSA-L 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
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- 239000011368 organic material Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229940105570 ornex Drugs 0.000 description 1
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- 125000003566 oxetanyl group Chemical group 0.000 description 1
- DXGLGDHPHMLXJC-UHFFFAOYSA-N oxybenzone Chemical compound OC1=CC(OC)=CC=C1C(=O)C1=CC=CC=C1 DXGLGDHPHMLXJC-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical class [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- FZUGPQWGEGAKET-UHFFFAOYSA-N parbenate Chemical compound CCOC(=O)C1=CC=C(N(C)C)C=C1 FZUGPQWGEGAKET-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- RRRXPPIDPYTNJG-UHFFFAOYSA-N perfluorooctanesulfonamide Chemical compound NS(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RRRXPPIDPYTNJG-UHFFFAOYSA-N 0.000 description 1
- LYXOWKPVTCPORE-UHFFFAOYSA-N phenyl-(4-phenylphenyl)methanone Chemical compound C=1C=C(C=2C=CC=CC=2)C=CC=1C(=O)C1=CC=CC=C1 LYXOWKPVTCPORE-UHFFFAOYSA-N 0.000 description 1
- 125000003356 phenylsulfanyl group Chemical group [*]SC1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
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- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical class O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
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- 125000001424 substituent group Chemical group 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
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- OCGWQDWYSQAFTO-UHFFFAOYSA-N tellanylidenelead Chemical compound [Pb]=[Te] OCGWQDWYSQAFTO-UHFFFAOYSA-N 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- MDDUHVRJJAFRAU-YZNNVMRBSA-N tert-butyl-[(1r,3s,5z)-3-[tert-butyl(dimethyl)silyl]oxy-5-(2-diphenylphosphorylethylidene)-4-methylidenecyclohexyl]oxy-dimethylsilane Chemical compound C1[C@@H](O[Si](C)(C)C(C)(C)C)C[C@H](O[Si](C)(C)C(C)(C)C)C(=C)\C1=C/CP(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 MDDUHVRJJAFRAU-YZNNVMRBSA-N 0.000 description 1
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- WLPUWLXVBWGYMZ-UHFFFAOYSA-N tricyclohexylphosphine Chemical compound C1CCCCC1P(C1CCCCC1)C1CCCCC1 WLPUWLXVBWGYMZ-UHFFFAOYSA-N 0.000 description 1
- HVQICGRCUVJEJP-UHFFFAOYSA-N triethoxy(1-phenylethyl)silane Chemical compound CCO[Si](OCC)(OCC)C(C)C1=CC=CC=C1 HVQICGRCUVJEJP-UHFFFAOYSA-N 0.000 description 1
- NOBMQPILAFKJLD-UHFFFAOYSA-N triethoxy(2,2,2-trifluoroethyl)silane Chemical compound CCO[Si](CC(F)(F)F)(OCC)OCC NOBMQPILAFKJLD-UHFFFAOYSA-N 0.000 description 1
- ALVYUZIFSCKIFP-UHFFFAOYSA-N triethoxy(2-methylpropyl)silane Chemical compound CCO[Si](CC(C)C)(OCC)OCC ALVYUZIFSCKIFP-UHFFFAOYSA-N 0.000 description 1
- VBSUMMHIJNZMRM-UHFFFAOYSA-N triethoxy(2-phenylethyl)silane Chemical compound CCO[Si](OCC)(OCC)CCC1=CC=CC=C1 VBSUMMHIJNZMRM-UHFFFAOYSA-N 0.000 description 1
- ZLGWXNBXAXOQBG-UHFFFAOYSA-N triethoxy(3,3,3-trifluoropropyl)silane Chemical compound CCO[Si](OCC)(OCC)CCC(F)(F)F ZLGWXNBXAXOQBG-UHFFFAOYSA-N 0.000 description 1
- CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 1
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- UMFJXASDGBJDEB-UHFFFAOYSA-N triethoxy(prop-2-enyl)silane Chemical compound CCO[Si](CC=C)(OCC)OCC UMFJXASDGBJDEB-UHFFFAOYSA-N 0.000 description 1
- UUVZTKMMRCCGHN-OUKQBFOZSA-N triethoxy-[(e)-2-phenylethenyl]silane Chemical compound CCO[Si](OCC)(OCC)\C=C\C1=CC=CC=C1 UUVZTKMMRCCGHN-OUKQBFOZSA-N 0.000 description 1
- JXUKBNICSRJFAP-UHFFFAOYSA-N triethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCC1CO1 JXUKBNICSRJFAP-UHFFFAOYSA-N 0.000 description 1
- GAMLUOSQYHLFCT-UHFFFAOYSA-N triethoxy-[3-[(3-ethyloxetan-3-yl)methoxy]propyl]silane Chemical group CCO[Si](OCC)(OCC)CCCOCC1(CC)COC1 GAMLUOSQYHLFCT-UHFFFAOYSA-N 0.000 description 1
- CCNSKYGHGUBWFD-UHFFFAOYSA-N trimethoxy(1-phenylethyl)silane Chemical compound CO[Si](OC)(OC)C(C)C1=CC=CC=C1 CCNSKYGHGUBWFD-UHFFFAOYSA-N 0.000 description 1
- LLGVQQLZYJJDBZ-UHFFFAOYSA-N trimethoxy(2,2,2-trifluoroethyl)silane Chemical compound CO[Si](OC)(OC)CC(F)(F)F LLGVQQLZYJJDBZ-UHFFFAOYSA-N 0.000 description 1
- XYJRNCYWTVGEEG-UHFFFAOYSA-N trimethoxy(2-methylpropyl)silane Chemical compound CO[Si](OC)(OC)CC(C)C XYJRNCYWTVGEEG-UHFFFAOYSA-N 0.000 description 1
- UBMUZYGBAGFCDF-UHFFFAOYSA-N trimethoxy(2-phenylethyl)silane Chemical compound CO[Si](OC)(OC)CCC1=CC=CC=C1 UBMUZYGBAGFCDF-UHFFFAOYSA-N 0.000 description 1
- ZSOVVFMGSCDMIF-UHFFFAOYSA-N trimethoxy(naphthalen-1-yl)silane Chemical compound C1=CC=C2C([Si](OC)(OC)OC)=CC=CC2=C1 ZSOVVFMGSCDMIF-UHFFFAOYSA-N 0.000 description 1
- LFRDHGNFBLIJIY-UHFFFAOYSA-N trimethoxy(prop-2-enyl)silane Chemical compound CO[Si](OC)(OC)CC=C LFRDHGNFBLIJIY-UHFFFAOYSA-N 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- JRSJRHKJPOJTMS-MDZDMXLPSA-N trimethoxy-[(e)-2-phenylethenyl]silane Chemical compound CO[Si](OC)(OC)\C=C\C1=CC=CC=C1 JRSJRHKJPOJTMS-MDZDMXLPSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- UYUUAUOYLFIRJG-UHFFFAOYSA-N tris(4-methoxyphenyl)phosphane Chemical compound C1=CC(OC)=CC=C1P(C=1C=CC(OC)=CC=1)C1=CC=C(OC)C=C1 UYUUAUOYLFIRJG-UHFFFAOYSA-N 0.000 description 1
- DLQYXUGCCKQSRJ-UHFFFAOYSA-N tris(furan-2-yl)phosphane Chemical compound C1=COC(P(C=2OC=CC=2)C=2OC=CC=2)=C1 DLQYXUGCCKQSRJ-UHFFFAOYSA-N 0.000 description 1
- ODJMOVZKYZHQED-UHFFFAOYSA-N tris(trifluoromethoxy)-(1,1,2,2,3,3,4,4,5,5,5-undecafluoropentyl)silane Chemical compound FC(F)(F)O[Si](OC(F)(F)F)(OC(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F ODJMOVZKYZHQED-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
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- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
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- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
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- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
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- H10K59/8791—Arrangements for improving contrast, e.g. preventing reflection of ambient light
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Description
本発明は、パターン形成された隔壁を有する隔壁付き基板および表示装置に関する。 The present invention relates to a partition walled substrate having a patterned partition wall and a display device.
画像表示装置の1種である液晶表示装置は、一般的に、LED等の白色光源と、赤色、緑色および青色を選択的に通過させるカラーフィルターを用いて、カラー表示を行っている。しかしながら、このようなカラーフィルターを用いたカラー表示は、光利用効率が悪く、かつ、色再現性に課題があった。 A liquid crystal display device, which is a kind of image display device, generally performs color display by using a white light source such as an LED and a color filter that selectively passes red, green, and blue. However, the color display using such a color filter has poor light utilization efficiency and has a problem in color reproducibility.
そこで、光利用効率を高くしたカラー表示装置として、波長変換用蛍光体からなる波長変換部と、偏光分離手段と偏光変換手段を備えたカラー表示装置が提案されている(例えば、特許文献1参照)。例えば、青色光源と、液晶素子と、青色光により励起されて赤色の蛍光を発する蛍光体、青色光により励起されて緑色の蛍光を発する蛍光体、および青色光を散乱させる光散乱層を有する波長変換部とを含むカラー表示装置が提案されている(例えば、特許文献2参照)。
しかし、特許文献1、2に記載されるような色変換蛍光体を含むカラーフィルターは、蛍光があらゆる方向に発生することから、光の取り出し効率が低く、輝度が不十分である。特に、4K、8Kと言われる高精細表示装置においては、画素サイズが小さくなるため、輝度の課題が顕著となることから、より高い輝度が求められている。
Therefore, as a color display device having high light utilization efficiency, a color display device including a wavelength conversion unit composed of a wavelength conversion phosphor and a polarization separation means and a polarization conversion means has been proposed (see, for example, Patent Document 1). ). For example, a wavelength having a blue light source, a liquid crystal element, a phosphor excited by blue light to emit red fluorescence, a phosphor excited by blue light to emit green fluorescence, and a light scattering layer that scatters blue light. A color display device including a conversion unit has been proposed (see, for example, Patent Document 2).
However, a color filter containing a color conversion phosphor as described in Patent Documents 1 and 2 has low light extraction efficiency and insufficient brightness because fluorescence is generated in all directions. In particular, in high-definition display devices such as 4K and 8K, since the pixel size becomes small, the problem of luminance becomes remarkable, so that higher luminance is required.
表示装置の輝度を向上させるためには、色変換蛍光体を隔てる隔壁の反射率を高くすることが有効である。また、隣接画素間において光の混色が発生しないためには、隔壁の遮光性を高くする必要がある。以上から、高い反射率と遮光性を両立した隔壁材料が求められている。 In order to improve the brightness of the display device, it is effective to increase the reflectance of the partition wall separating the color conversion phosphors. Further, in order to prevent color mixing of light between adjacent pixels, it is necessary to improve the light-shielding property of the partition wall. From the above, there is a demand for a partition material that has both high reflectance and light-shielding properties.
発明者らは、高い反射率と遮光性を両立した隔壁を形成するために、まず、高反射率の白色隔壁材料に黒色顔料を添加した材料を使用する方法を検討した。しかし、この方法では、露光時に白色顔料と黒色顔料によって光が吸収され、膜の底部まで光が届かず、パターン加工性が悪いという課題が明らかになった。 In order to form a partition wall having both high reflectance and light-shielding property, the inventors first examined a method of using a material in which a black pigment is added to a white partition wall material having high reflectance. However, in this method, it has become clear that light is absorbed by the white pigment and the black pigment at the time of exposure, the light does not reach the bottom of the film, and the pattern processability is poor.
一方、特許文献3、4に記載されているように、特定の金属化合物を添加することで、パターン形成後の焼成によって黒色化する技術が提案されている。しかしながら、これらの黒色化技術は、400℃以上の焼成が必要であり、250℃以下の加熱では遮光性が向上しないという課題があった。 On the other hand, as described in Patent Documents 3 and 4, a technique has been proposed in which a specific metal compound is added to cause blackening by firing after pattern formation. However, these blackening techniques require firing at 400 ° C. or higher, and have a problem that the light-shielding property is not improved by heating at 250 ° C. or lower.
そこで、本発明は、250℃以下の加熱条件においても、高い反射率と遮光性を両立した隔壁を形成可能である樹脂組成物を提供することを目的とする。 Therefore, an object of the present invention is to provide a resin composition capable of forming a partition wall having both high reflectance and light-shielding property even under heating conditions of 250 ° C. or lower.
本発明は、下地基板上に(A-1)パターン形成された隔壁を有する隔壁付き基板であって、前記(A-1)パターン形成された隔壁が、樹脂と、白色顔料と、酸化パラジウム、酸化白金、酸化金、酸化銀、パラジウム、白金、金および銀からなる群より選ばれる少なくとも1種の金属酸化物または金属からなる粒子とを含有し、波長550nmにおける厚み10μmあたりの反射率が20%~60%、厚み10μmあたりのOD値が1.0~3.0である隔壁付き基板である。 The present invention is a substrate with a partition wall having a partition wall having a (A-1) pattern formed on a base substrate, wherein the partition wall having the (A-1) pattern formed is a resin, a white pigment, palladium oxide, and the like. It contains at least one metal oxide selected from the group consisting of platinum oxide, gold oxide, silver oxide, palladium, platinum, gold and silver, or particles made of metal, and has a reflectance of 20 per 10 μm thickness at a wavelength of 550 nm. A substrate with a partition wall having an OD value of 1.0 to 60% and an OD value of 1.0 to 3.0 per 10 μm thickness.
本発明の樹脂組成物は、製膜後にパターン露光する工程時には光を通すが、露光した膜を120℃以上250℃以下の温度で加熱した後に遮光性が上がるため、250℃以下の加熱条件においても、高い反射率と高い遮光性を有する微細厚膜隔壁パターンの形成が可能である。 The resin composition of the present invention allows light to pass through during the step of pattern exposure after film formation, but since the light-shielding property is improved after heating the exposed film at a temperature of 120 ° C. or higher and 250 ° C. or lower, the light-shielding property is improved, so that the heating conditions are 250 ° C. or lower. However, it is possible to form a fine thick film partition pattern having high reflectance and high light-shielding property.
以下、本発明に係る樹脂組成物、樹脂組成物から形成される遮光膜、遮光膜の製造方法、および隔壁付き基板の好適な実施の形態を具体的に説明するが、本発明は以下の実施の形態に限定されるものではなく、目的や用途に応じて種々に変更して実施することができる。 Hereinafter, a suitable embodiment of the resin composition according to the present invention, a light-shielding film formed from the resin composition, a method for producing the light-shielding film, and a substrate with a partition wall will be specifically described. The form is not limited to the above, and various changes can be made according to the purpose and use.
本発明の樹脂組成物は、色変換蛍光体を隔てる隔壁を形成するための材料として好適に用いることができる。本発明の樹脂組成物は、樹脂と、銀、金、白金およびパラジウムからなる群より選ばれる少なくとも1種の金属を含有する有機金属化合物(以下、「有機金属化合物」と記載する場合がある)と、光重合開始剤またはキノンジアジド化合物と、溶媒とを含有することが好ましい。 The resin composition of the present invention can be suitably used as a material for forming a partition wall separating the color conversion phosphors. The resin composition of the present invention contains an organometallic compound containing a resin and at least one metal selected from the group consisting of silver, gold, platinum and palladium (hereinafter, may be referred to as "organic metal compound"). , A photopolymerization initiator or a quinonediazide compound, and a solvent are preferably contained.
樹脂は、隔壁のクラック耐性および耐光性を向上させる機能を有する。樹脂組成物の固形分中に占める樹脂の含有量は、熱処理における隔壁のクラック耐性を向上させる観点から、10重量%以上が好ましく、20重量%以上がより好ましい。一方、耐光性を向上させる観点から、樹脂組成物の固形分中に占める樹脂の含有量は、60重量%以下が好ましく、50重量%以下がより好ましい。ここで、固形分とは、樹脂組成物に含まれる成分のうち、溶媒等の揮発性の成分を除いた全成分のことを意味する。固形分の量は、樹脂組成物を加熱して揮発性の成分を蒸発させた残分を計ることにより求めることができる。 The resin has a function of improving the crack resistance and light resistance of the partition wall. The content of the resin in the solid content of the resin composition is preferably 10% by weight or more, more preferably 20% by weight or more, from the viewpoint of improving the crack resistance of the partition wall in the heat treatment. On the other hand, from the viewpoint of improving the light resistance, the content of the resin in the solid content of the resin composition is preferably 60% by weight or less, more preferably 50% by weight or less. Here, the solid content means all the components contained in the resin composition excluding the volatile components such as the solvent. The amount of solid content can be determined by heating the resin composition and measuring the residue obtained by evaporating the volatile components.
樹脂としては、例えば、ポリシロキサン、ポリイミド、ポリイミド前駆体、ポリベンゾオキサゾール、ポリベンゾオキサゾール前駆体、(メタ)アクリルポリマなどが挙げられる。ここで、(メタ)アクリルポリマとは、メタクリル酸エステルおよび/またはアクリル酸エステルの重合体を意味する。これらを2種以上含有してもよい。これらの中でも、透明性、耐熱性および耐光性に優れることから、ポリシロキサンが好ましい。 Examples of the resin include polysiloxane, polyimide, polyimide precursor, polybenzoxazole, polybenzoxazole precursor, (meth) acrylic polymer and the like. Here, the (meth) acrylic polymer means a polymer of a methacrylic acid ester and / or an acrylic acid ester. Two or more of these may be contained. Among these, polysiloxane is preferable because it is excellent in transparency, heat resistance and light resistance.
ポリシロキサンは、オルガノシランの加水分解・脱水縮合物である。本発明の樹脂組成物がネガ型感光性を有する場合、ポリシロキサンは、少なくとも下記一般式(2)で表される繰り返し単位を含むことが好ましい。さらに他の繰り返し単位を含んでもよい。一般式(2)で表される2官能アルコキシシラン化合物由来の繰り返し単位を含むことにより、加熱によるポリシロキサンの過剰な熱重合(縮合)を抑制し、隔壁のクラック耐性を向上させることができる。ポリシロキサンにおける全繰り返し単位中、一般式(2)で表される繰り返し単位を10~80モル%含有することが好ましい。一般式(2)で表される繰り返し単位を10モル%以上含むことにより、クラック耐性をより向上させることができる。一般式(2)で表される繰り返し単位の含有量は、15モル%以上がより好ましく、20モル%以上がさらに好ましい。一方、一般式(2)で表される繰り返し単位を80モル%以下含むことにより、重合時にポリシロキサンの分子量を十分に高め、塗布性を向上させることができる。一般式(2)で表される繰り返し単位の含有量は、70モル%以下がより好ましい。 Polysiloxane is a hydrolyzed / dehydrated condensate of organosilane. When the resin composition of the present invention has a negative photosensitive property, the polysiloxane preferably contains at least a repeating unit represented by the following general formula (2). Further, other repeating units may be included. By containing the repeating unit derived from the bifunctional alkoxysilane compound represented by the general formula (2), excessive thermal polymerization (condensation) of polysiloxane due to heating can be suppressed, and crack resistance of the partition wall can be improved. It is preferable that 10 to 80 mol% of the repeating unit represented by the general formula (2) is contained in all the repeating units in the polysiloxane. By containing 10 mol% or more of the repeating unit represented by the general formula (2), the crack resistance can be further improved. The content of the repeating unit represented by the general formula (2) is more preferably 15 mol% or more, further preferably 20 mol% or more. On the other hand, by containing 80 mol% or less of the repeating unit represented by the general formula (2), the molecular weight of the polysiloxane at the time of polymerization can be sufficiently increased and the coatability can be improved. The content of the repeating unit represented by the general formula (2) is more preferably 70 mol% or less.
上記一般式(2)中、R1およびR2は、それぞれ同じでも異なってもよく、炭素数1~20の1価の有機基を表す。R1およびR2は、重合時のポリシロキサンの分子量調整を容易にする観点から、炭素数1~6のアルキル基および炭素数6~12のアリール基から選ばれた基が好ましい。ただし、アルキル基およびアリール基は、その水素の少なくとも一部がラジカル重合性基により置換されていてもよい。この場合、ネガ型感光性樹脂組成物の硬化物中においては、ラジカル重合性基はラジカル重合されていてもよい。 In the above general formula (2), R 1 and R 2 may be the same or different, respectively, and represent a monovalent organic group having 1 to 20 carbon atoms. R 1 and R 2 are preferably a group selected from an alkyl group having 1 to 6 carbon atoms and an aryl group having 6 to 12 carbon atoms from the viewpoint of facilitating the adjustment of the molecular weight of the polysiloxane during polymerization. However, the alkyl group and the aryl group may have at least a part of hydrogen substituted with a radically polymerizable group. In this case, the radically polymerizable group may be radically polymerized in the cured product of the negative photosensitive resin composition.
本発明の樹脂組成物がネガ型感光性を有する場合、ポリシロキサンは、さらに、下記一般式(3)で表される繰り返し単位および下記一般式(4)で表される繰り返し単位から選ばれた繰り返し単位を含むことが好ましい。一般式(3)または一般式(4)で表される、フッ素含有アルコキシシラン化合物由来の繰り返し単位を含むことにより、ポリシロキサンの屈折率を低減し、後述する白色顔料を含有する場合に、白色顔料との屈折率差を拡大して界面反射をより向上させ、反射率をより向上させることができる。一般式(3)で表される繰り返し単位および一般式(4)で表される繰り返し単位から選ばれた繰り返し単位をポリシロキサン中に合計20~80モル%含有することがより好ましい。一般式(3)で表される繰り返し単位と一般式(4)で表される繰り返し単位を合計20モル%以上含むことにより、後述する白色顔料を含有する場合に、ポリシロキサンと白色顔料の界面反射をより向上させ、反射率をより向上させることができる。一般式(3)で表される繰り返し単位と一般式(4)で表される繰り返し単位の合計含有量は、40モル%以上がより好ましい。一方、一般式(3)で表される繰り返し単位と一般式(4)で表される繰り返し単位を合計80モル%以下含むことにより、ポリシロキサンの過度な疎水化を抑制し、組成物中の他の成分との相溶性を向上させ、解像度を向上させることができる。一般式(3)で表される繰り返し単位と一般式(4)で表される繰り返し単位の合計含有量は、70モル%以下がより好ましい。さらに他の繰り返し単位を含んでもよい。 When the resin composition of the present invention has a negative photosensitive property, the polysiloxane is further selected from a repeating unit represented by the following general formula (3) and a repeating unit represented by the following general formula (4). It is preferable to include repeating units. By containing a repeating unit derived from a fluorine-containing alkoxysilane compound represented by the general formula (3) or the general formula (4), the refractive index of the polysiloxane is reduced, and when a white pigment described later is contained, the color is white. It is possible to increase the difference in refractive index with the pigment to further improve the interfacial reflection and further improve the reflectance. It is more preferable that the polysiloxane contains a total of 20 to 80 mol% of the repeating unit selected from the repeating unit represented by the general formula (3) and the repeating unit represented by the general formula (4). By containing a total of 20 mol% or more of the repeating unit represented by the general formula (3) and the repeating unit represented by the general formula (4), the interface between the polysiloxane and the white pigment is contained when the white pigment described later is contained. The reflection can be further improved and the reflectance can be further improved. The total content of the repeating unit represented by the general formula (3) and the repeating unit represented by the general formula (4) is more preferably 40 mol% or more. On the other hand, by containing a total of 80 mol% or less of the repeating unit represented by the general formula (3) and the repeating unit represented by the general formula (4), excessive hydrophobization of the polysiloxane is suppressed and the composition is contained. The compatibility with other components can be improved and the resolution can be improved. The total content of the repeating unit represented by the general formula (3) and the repeating unit represented by the general formula (4) is more preferably 70 mol% or less. Further, other repeating units may be included.
上記一般式(3)および(4)中、R3は、水素の全部または一部がフッ素で置換された、炭素数1~10のアルキル基、アルケニル基、アリール基またはアリールアルキル基を表す。R4は、単結合、-O-、-CH2-CO-、-CO-または-O-CO-を表す。R5は、炭素数1~20の1価の有機基を表す。R3は、ポリシロキサンの屈折率をより低減させる観点から、水素の全部または一部がフッ素で置換された炭素数1~6のアルキル基が好ましい。なお、ネガ型感光性樹脂組成物の光硬化物中においては、アルケニル基はラジカル重合されていてもよい。 In the above general formulas (3) and (4), R 3 represents an alkyl group having 1 to 10 carbon atoms, an alkenyl group, an aryl group or an arylalkyl group in which all or part of hydrogen is substituted with fluorine. R4 represents a single bond, -O-, -CH 2 -CO-, -CO- or -O-CO-. R 5 represents a monovalent organic group having 1 to 20 carbon atoms. From the viewpoint of further reducing the refractive index of the polysiloxane, R 3 is preferably an alkyl group having 1 to 6 carbon atoms in which all or part of hydrogen is substituted with fluorine. The alkenyl group may be radically polymerized in the photocured product of the negative photosensitive resin composition.
上記一般式(2)~(4)で表される繰り返し単位は、それぞれ下記一般式(5)~(7)で表されるアルコキシシラン化合物に由来する。すなわち、前記一般式(2)~(4)で表される繰り返し単位を含むポリシロキサンは、下記一般式(5)~(7)で表されるアルコキシシラン化合物を含むアルコキシシラン化合物を加水分解および重縮合することによって得ることができる。さらに他のアルコキシシラン化合物を用いてもよい。 The repeating units represented by the general formulas (2) to (4) are derived from the alkoxysilane compounds represented by the following general formulas (5) to (7), respectively. That is, the polysiloxane containing the repeating units represented by the general formulas (2) to (4) hydrolyzes and hydrolyzes the alkoxysilane compound containing the alkoxysilane compound represented by the following general formulas (5) to (7). It can be obtained by polycondensation. Further, other alkoxysilane compounds may be used.
上記一般式(5)~(7)中、R1~R5は、それぞれ一般式(2)~(4)における、R1~R5と同じ基を表す。R6は、同じでも異なってもよく、炭素数1~20の1価の有機基を表し、炭素数1~6のアルキル基が好ましい。 In the above general formulas (5) to (7), R 1 to R 5 represent the same groups as R 1 to R 5 in the general formulas (2) to (4), respectively. R 6 may be the same or different, and represents a monovalent organic group having 1 to 20 carbon atoms, and an alkyl group having 1 to 6 carbon atoms is preferable.
一般式(5)で表されるアルコキシシラン化合物としては、例えば、ジメチルジメトキシシラン、ジメチルジエトキシシラン、エチルメチルジメトキシシラン、エチルメチルジメトキシシラン、メチルプロピルジメトキシシラン、メチルプロピルジエトキシシラン、ジフェニルジメトキシシラン、ジフェニルジエトキシシラン、シクロヘキシルメチルジメトキシシラン、シクロヘキシルメチルジエトキシシラン、ビニルメチルジメトキシシラン、ビニルメチルジエトキシシラン、アリルメチルジメトキシシラン、アリルメチルジエトキシシラン、スチリルメチルジメトキシシラン、スチリルメチルジエトキシシラン、γ-メタクリロイルプロピルメチルジメトキシシラン、γ-メタクリロイルプロピルメチルジエトキシシラン、γ-アクリロイルプロピルメチルジメトキシシラン、γ-アクリロイルプロピルメチルジエトキシシラン、3-グリシドキシプロピルメチルジメトキシシラン、3-グリシドキシプロピルメチルジエトキシシラン、2-(3,4-エポキシシクロヘキシル)エチルメチルジメトキシシラン、2-(3,4-エポキシシクロヘキシル)エチルエチルジメトキシシラン、ジフェニルジメトキシシラン、ジフェニルジエトキシシラン、3-ジメチルメトキシシリルプロピルコハク酸無水物、3-ジメチルエトキシシリルプロピルコハク酸無水物、3-ジメチルメトキシシリルプロピオン酸、3-ジメチルエトキシシリルプロピオン酸、3-ジメチルメトキシシリルプロピルシクロヘキシルジカルボン酸無水物、3-ジメチルエトキシシリルプロピルシクロヘキシルジカルボン酸無水物、5-ジメチルメトキシシリル吉草酸、5-ジメチルエトキシシリル吉草酸、3-ジメチルメトキシシリルプロピルフタル酸無水物、3-ジメチルエトキシシリルプロピルフタル酸無水物、3-ジメチルメトキシシリルプロピルフタル酸無水物、3-ジメチルエトキシシリルプロピルフタル酸無水物、4-ジメチルメトキシシリル酪酸、4-ジメチルエトキシシリル酪酸等が挙げられる。これらを2種以上用いてもよい。 Examples of the alkoxysilane compound represented by the general formula (5) include dimethyldimethoxysilane, dimethyldiethoxysilane, ethylmethyldimethoxysilane, ethylmethyldimethoxysilane, methylpropyldimethoxysilane, methylpropyldiethoxysilane, and diphenyldimethoxysilane. , Diphenyldiethoxysilane, cyclohexylmethyldimethoxysilane, cyclohexylmethyldiethoxysilane, vinylmethyldimethoxysilane, vinylmethyldiethoxysilane, allylmethyldimethoxysilane, allylmethyldiethoxysilane, styrylmethyldimethoxysilane, styrylmethyldiethoxysilane, γ-methacryloylpropylmethyldimethoxysilane, γ-methacryloylpropylmethyldiethoxysilane, γ-acryloylpropylmethyldimethoxysilane, γ-acryloylpropylmethyldiethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 3-glycidoxypropyl Methyldiethoxysilane, 2- (3,4-epoxycyclohexyl) ethylmethyldimethoxysilane, 2- (3,4-epoxycyclohexyl) ethylethyldimethoxysilane, diphenyldimethoxysilane, diphenyldiethoxysilane, 3-dimethylmethoxysilylpropyl Succinic acid anhydride, 3-dimethylethoxysilylpropyl succinic acid anhydride, 3-dimethylmethoxysilylpropionic acid, 3-dimethylethoxysilylpropionic acid, 3-dimethylmethoxysilylpropylcyclohexyldicarboxylic acid anhydride, 3-dimethylethoxysilylpropyl Cyclohexyldicarboxylic acid anhydride, 5-dimethylmethoxysilyl valeric acid, 5-dimethylethoxysilyl valeric acid, 3-dimethylmethoxysilylpropyl phthalic acid anhydride, 3-dimethylethoxysilylpropyl phthalic acid anhydride, 3-dimethylmethoxysilylpropyl Examples thereof include phthalic acid anhydride, 3-dimethylethoxysilylpropyl phthalic acid anhydride, 4-dimethylmethoxysilyl butyric acid, 4-dimethylethoxysilyl butyric acid and the like. Two or more of these may be used.
一般式(6)で表されるアルコキシシラン化合物としては、例えば、トリフルオロプロピルトリメトキシシラン、トリフルオロプロピルトリエトキシシラン、パーフルオロペンチルトリメトキシシラン、パーフルオロペンチルトリエトキシシラン、トリデカフルオロオクチルトリメトキシシラン、トリデカフルオロオクチルトリエトキシシラン、トリデカフルオロオクチルトリプロポキシシラン、トリデカフルオロオクチルトリイソプロポキシシラン、ヘプタデカフルオロデシルトリメトキシシラン、ヘプタデカフルオロデシルトリエトキシシラン等が挙げられる。これらを2種以上用いてもよい。 Examples of the alkoxysilane compound represented by the general formula (6) include trifluoropropyltrimethoxysilane, trifluoropropyltriethoxysilane, perfluoropentyltrimethoxysilane, perfluoropentyltiltriethoxysilane, and tridecafluorooctylsilane. Examples thereof include methoxysilane, tridecafluorooctyl triethoxysilane, tridecafluorooctyl repropoxysilane, tridecafluorooctyl triisopropoxysilane, heptadecafluorodecyltrimethoxysilane, and heptadecafluorodecyltriethoxysilane. Two or more of these may be used.
一般式(7)で表されるアルコキシシラン化合物としては、ビス(トリフルオロメチル)ジメトキシシラン、ビス(トリフルオロプロピル)ジメトキシシラン、ビス(トリフルオロプロピル)ジエトキシシラン、トリフルオロプロピルメチルジメトキシシラン、トリフルオロプロピルメチルジエトキシシラン、トリフルオロプロピルエチルジメトキシシラン、トリフルオロプロピルエチルジエトキシシラン、ヘプタデカフルオロデシルメチルジメトキシシラン等が挙げられる。これらを2種以上用いてもよい。 Examples of the alkoxysilane compound represented by the general formula (7) include bis (trifluoromethyl) dimethoxysilane, bis (trifluoropropyl) dimethoxysilane, bis (trifluoropropyl) diethoxysilane, and trifluoropropylmethyldimethoxysilane. Examples thereof include trifluoropropylmethyldiethoxysilane, trifluoropropylethyldimethoxysilane, trifluoropropylethyldiethoxysilane, and heptadecafluorodecylmethyldimethoxysilane. Two or more of these may be used.
その他のアルコキシシラン化合物としては、例えば、メチルトリメトキシシラン、メチルトリエトキシシラン、エチルトリメトキシシラン、エチルトリエトキシシラン、プロピルトリメトキシシラン、プロピルトリエトキシシラン、イソブチルトリメトキシシラン、イソブチルトリエトキシシラン、シクロヘキシルトリメトキシシラン、シクロヘキシルトリエトキシシラン、3-イソシアネートプロピルトリメトキシシラン、3-イソシアネートプロピルトリエトキシシラン、3-アミノプロピルトリメトキシシラン、3-アミノプロピルトリエトキシシラン、3-ウレイドプロピルトリメトキシシラン、3-ウレイドプロピルトリエトキシシランなどの3官能アルコキシシラン化合物;テトラメトキシシラン、テトラエトキシシラン、シリケート51(テトラエトキシシランオリゴマー)などの4官能アルコキシシラン化合物;トリメチルメトキシシラン、トリフェニルメトキシシランなどの単官能アルコキシシラン化合物;3-グリシドキシプロピルトリメトキシシラン、3-グリシドキシプロピルトリエトキシシラン、2-(3,4-エポキシシクロヘキシル)エチルトリメトキシシラン、2-(3,4-エポキシシクロヘキシル)エチルトリエトキシシラン、3-エチル-3-{[3-(トリメトキシシリル)プロポキシ]メチル}オキセタン、3-エチル-3-{[3-(トリエトキシシリル)プロポキシ]メチル}オキセタンなどのエポキシ基またはオキセタン基含有アルコキシシラン化合物:フェニルトリメトキシシラン、フェニルトリエトキシシラン、1-ナフチルトリメトキシシラン、2-ナフチルトリメトキシシラン、2-ナフチルトリメトキシシラン、2-ナフチルトリメトキシシラン、トリルトリメトキシシラン、トリルトリエトキシシラン、1-フェニルエチルトリメトキシシラン、1-フェニルエチルトリエトキシシラン、2-フェニルエチルトリメトキシシラン、2-フェニルエチルトリエトキシシラン、3-トリメトキシシリルプロピルフタル酸無水物、3-トリエトキシシリルプロピルフタル酸無水物などの芳香環含有アルコキシシラン化合物;スチリルトリメトキシシラン、スチリルトリエトキシシラン、ビニルトリメトキシシラン、ビニルトリエトキシシラン、アリルトリメトキシシラン、アリルトリエトキシシラン、γ-アクリロイルプロピルトリメトキシシラン、γ-アクリロイルプロピルトリエトキシシラン、γ-メタクリロイルプロピルトリメトキシシラン、γ-メタクリロイルプロピルトリエトキシシランなどのラジカル重合性基含有アルコキシシラン化合物;3-トリメトキシシリルプロピオン酸、3-トリエトキシシリルプロピオン酸、4-トリメトキシシリル酪酸、4-トリエトキシシリル酪酸、5-トリメトキシシリル吉草酸、5-トリエトキシシリル吉草酸、3-トリメトキシシリルプロピルコハク酸無水物、3-トリエトキシシシリルプロピルコハク酸無水物、3-トリメトキシシリルプロピルシクロヘキシルジカルボン酸無水物、3-トリエトキシシリルプロピルシクロヘキシルジカルボン酸無水物、3-トリメトキシシリルプロピルフタル酸無水物、3-トリエトキシシリルプロピルフタル酸無水物などのカルボキシル基含有アルコキシシラン化合物等が挙げられる。 Examples of other alkoxysilane compounds include methyltrimethoxysilane, methyltriethoxysilane, ethyltrimethoxysilane, ethyltriethoxysilane, propyltrimethoxysilane, propyltriethoxysilane, isobutyltrimethoxysilane, and isobutyltriethoxysilane. Cyclohexyltrimethoxysilane, cyclohexyltriethoxysilane, 3-Isoxidepropyltrimethoxysilane, 3-Ixoxidepropyltriethoxysilane, 3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-ureidopropyltrimethoxysilane, Trifunctional alkoxysilane compound such as 3-ureidopropyltriethoxysilane; tetrafunctional alkoxysilane compound such as tetramethoxysilane, tetraethoxysilane and silicate 51 (tetraethoxysilane oligomer); simple such as trimethylmethoxysilane and triphenylmethoxysilane. Functional alkoxysilane compound; 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropyltriethoxysilane, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 2- (3,4-epoxycyclohexyl) Epoxy groups such as ethyltriethoxysilane, 3-ethyl-3-{[3- (trimethoxysilyl) propoxy] methyl} oxetane, 3-ethyl-3-{[3- (triethoxysilyl) propoxy] methyl} oxetane Or an oxetane group-containing alkoxysilane compound: phenyltrimethoxysilane, phenyltriethoxysilane, 1-naphthyltrimethoxysilane, 2-naphthyltrimethoxysilane, 2-naphthyltrimethoxysilane, 2-naphthyltrimethoxysilane, triltrimethoxysilane , Triltriethoxysilane, 1-phenylethyltrimethoxysilane, 1-phenylethyltriethoxysilane, 2-phenylethyltrimethoxysilane, 2-phenylethyltriethoxysilane, 3-trimethoxysilylpropylphthalic acid anhydride, 3 -Aromatic ring-containing alkoxysilane compound such as triethoxysilylpropylphthalic acid anhydride; styryltrimethoxysilane, styryltriethoxysilane, vinyltrimethoxysilane, vinyltriethoxysilane, allyltrimethoxysilane, allyltriethoxysilane, γ- Acryloylpropyltrimethoxysilane, γ-acrylo Radical polymerizable group-containing alkoxysilane compounds such as ylpropyltriethoxysilane, γ-methacryloylpropyltrimethoxysilane, γ-methacryloylpropyltriethoxysilane; 3-trimethoxysilylpropionic acid, 3-triethoxysilylpropionic acid, 4- Trimethoxysilyl butyric acid, 4-triethoxysilylbutyric acid, 5-trimethoxysilylvaleric acid, 5-triethoxysilylvaleric acid, 3-trimethoxysilylpropyl succinic acid anhydride, 3-triethoxysilylpropyl succinic acid anhydride , 3-Trimethoxysilylpropylcyclohexyldicarboxylic acid anhydride, 3-triethoxysilylpropylcyclohexyldicarboxylic acid anhydride, 3-trimethoxysilylpropylphthalic acid anhydride, 3-triethoxysilylpropylphthalic acid anhydride and other carboxyl groups. Examples thereof include a contained alkoxysilane compound.
ポリシロキサンの原料となるアルコキシシラン化合物中における、一般式(5)で表されるアルコキシシラン化合物の含有量は、ポリシロキサンの全繰り返し単位中の一般式(2)で表される繰り返し単位の含有量を前述の範囲にする観点から、10モル%以上が好ましく、15モル%以上がより好ましく、20モル%以上がさらに好ましい。一方、一般式(5)で表されるアルコキシシラン化合物の含有量は、同様の観点から、80モル%以下が好ましく、70モル%以下がより好ましい。また、一般式(6)および一般式(7)で表されるアルコキシシラン化合物の合計含有量についても、一般式(3)および一般式(4)で表される繰り返し単位の合計含有量を前述の範囲にする観点から、20モル%以上が好ましく、40モル%以上がより好ましい。一方で、一般式(6)および一般式(7)で表されるアルコキシシラン化合物の合計含有量は、同様の観点から、80モル%以下が好ましく、70モル%以下がより好ましい。 The content of the alkoxysilane compound represented by the general formula (5) in the alkoxysilane compound which is the raw material of the polysiloxane is the content of the repeating unit represented by the general formula (2) in all the repeating units of the polysiloxane. From the viewpoint of keeping the amount in the above range, 10 mol% or more is preferable, 15 mol% or more is more preferable, and 20 mol% or more is further preferable. On the other hand, the content of the alkoxysilane compound represented by the general formula (5) is preferably 80 mol% or less, more preferably 70 mol% or less, from the same viewpoint. Further, regarding the total content of the alkoxysilane compound represented by the general formula (6) and the general formula (7), the total content of the repeating units represented by the general formula (3) and the general formula (4) is described above. From the viewpoint of the above range, 20 mol% or more is preferable, and 40 mol% or more is more preferable. On the other hand, the total content of the alkoxysilane compounds represented by the general formula (6) and the general formula (7) is preferably 80 mol% or less, more preferably 70 mol% or less, from the same viewpoint.
ポリシロキサンの重量平均分子量(Mw)は、塗布性の観点から、1,000以上が好ましく、2,000以上がより好ましい。一方、現像性の観点から、ポリシロキサンのMwは、50,000以下が好ましく、20,000以下がより好ましい。ここで、本発明におけるポリシロキサンのMwとは、ゲルパーミエーションクロマトグラフィー(GPC)で測定されるポリスチレン換算値を言う。 The weight average molecular weight (Mw) of the polysiloxane is preferably 1,000 or more, more preferably 2,000 or more, from the viewpoint of coatability. On the other hand, from the viewpoint of developability, the Mw of the polysiloxane is preferably 50,000 or less, more preferably 20,000 or less. Here, Mw of polysiloxane in the present invention means a polystyrene-equivalent value measured by gel permeation chromatography (GPC).
ポリシロキサンは、前述のオルガノシラン化合物を加水分解した後、該加水分解物を溶媒の存在下または無溶媒で脱水縮合反応させることによって得ることができる。 The polysiloxane can be obtained by hydrolyzing the above-mentioned organosilane compound and then subjecting the hydrolyzate to a dehydration condensation reaction in the presence of a solvent or in the absence of a solvent.
加水分解における各種条件は、反応スケール、反応容器の大きさ、形状などを考慮して、目的とする用途に適した物性に合わせて設定することができる。各種条件としては、例えば、酸濃度、反応温度、反応時間などが挙げられる。 Various conditions for hydrolysis can be set according to the physical characteristics suitable for the intended use in consideration of the reaction scale, the size and shape of the reaction vessel, and the like. Examples of various conditions include acid concentration, reaction temperature, reaction time and the like.
加水分解反応には、塩酸、酢酸、蟻酸、硝酸、蓚酸、塩酸、硫酸、リン酸、ポリリン酸、多価カルボン酸やその無水物、イオン交換樹脂などの酸触媒を用いることができる。これらの中でも、蟻酸、酢酸およびリン酸から選ばれた酸を含む酸性水溶液が好ましい。 For the hydrolysis reaction, an acid catalyst such as hydrochloric acid, acetic acid, formic acid, nitric acid, oxalic acid, hydrochloric acid, sulfuric acid, phosphoric acid, polyphosphoric acid, polyvalent carboxylic acid and its anhydride, and an ion exchange resin can be used. Among these, an acidic aqueous solution containing an acid selected from formic acid, acetic acid and phosphoric acid is preferable.
加水分解反応に酸触媒を用いる場合、酸触媒の添加量は、加水分解をより速やかに進行させる観点から、加水分解反応に使用される全アルコキシシラン化合物100重量部に対して、0.05重量部以上が好ましく、0.1重量部以上がより好ましい。一方、加水分解反応の進行を適度に調整する観点から、酸触媒の添加量は、全アルコキシシラン化合物100重量部に対して、20重量部以下が好ましく、10重量部以下がより好ましい。ここで、全アルコキシシラン化合物量とは、アルコキシシラン化合物、その加水分解物およびその縮合物の全てを含む量のことを言う。以下同じとする。 When an acid catalyst is used for the hydrolysis reaction, the amount of the acid catalyst added is 0.05 weight based on 100 parts by weight of the total alkoxysilane compound used in the hydrolysis reaction from the viewpoint of allowing the hydrolysis to proceed more quickly. The amount is preferably 0.1 parts by weight or more, and more preferably 0.1 part by weight or more. On the other hand, from the viewpoint of appropriately adjusting the progress of the hydrolysis reaction, the amount of the acid catalyst added is preferably 20 parts by weight or less, more preferably 10 parts by weight or less, based on 100 parts by weight of the total alkoxysilane compound. Here, the total amount of the alkoxysilane compound means an amount containing all of the alkoxysilane compound, its hydrolyzate and its condensate. The same shall apply hereinafter.
加水分解反応は、溶媒中で行うことができる。溶媒は、樹脂組成物の安定性、濡れ性、揮発性などを考慮して、適宜選択することができる。 The hydrolysis reaction can be carried out in a solvent. The solvent can be appropriately selected in consideration of the stability, wettability, volatility and the like of the resin composition.
加水分解反応によって溶媒が生成する場合には、無溶媒で加水分解を行うことも可能である。樹脂組成物に用いる場合には、加水分解反応終了後に、さらに溶媒を添加することにより、樹脂組成物を適切な濃度に調整することも好ましい。また、加水分解後に加熱および/または減圧下により生成アルコール等の全量あるいは一部を留出、除去し、その後好適な溶媒を添加することも可能である。 When a solvent is produced by the hydrolysis reaction, it is also possible to carry out the hydrolysis without a solvent. When used in a resin composition, it is also preferable to adjust the resin composition to an appropriate concentration by further adding a solvent after the completion of the hydrolysis reaction. It is also possible to distill and remove all or part of the produced alcohol or the like by heating and / or under reduced pressure after hydrolysis, and then add a suitable solvent.
加水分解反応に溶媒を使用する場合、溶媒の添加量は、ゲルの生成を抑制する観点から、全アルコキシシラン化合物100重量部に対して、50重量部以上が好ましく、80重量部以上がより好ましい。一方、溶媒の添加量は、加水分解をより速やかに進行させる観点から、全アルコキシシラン化合物100重量部に対して、500重量部以下が好ましく、200重量部以下がより好ましい。 When a solvent is used for the hydrolysis reaction, the amount of the solvent added is preferably 50 parts by weight or more, more preferably 80 parts by weight or more, based on 100 parts by weight of the total alkoxysilane compound from the viewpoint of suppressing gel formation. .. On the other hand, the amount of the solvent added is preferably 500 parts by weight or less, more preferably 200 parts by weight or less, based on 100 parts by weight of the total alkoxysilane compound, from the viewpoint of allowing the hydrolysis to proceed more rapidly.
また、加水分解反応に用いる水としては、イオン交換水が好ましい。水の量は任意に設定することができるが、全アルコキシシラン化合物1モルに対して、1.0~4.0モルが好ましい。 Further, as the water used for the hydrolysis reaction, ion-exchanged water is preferable. The amount of water can be set arbitrarily, but is preferably 1.0 to 4.0 mol with respect to 1 mol of the total alkoxysilane compound.
脱水縮合反応の方法としては、例えば、オルガノシラン化合物の加水分解反応により得られたシラノール化合物溶液をそのまま加熱する方法などが挙げられる。加熱温度は、50℃以上、溶媒の沸点以下が好ましく、加熱時間は、1~100時間が好ましい。また、ポリシロキサンの重合度を高めるために、再加熱または塩基触媒の添加を行ってもよい。また、目的に応じて、脱水縮合反応後に、生成アルコールなどの適量を加熱および/または減圧下にて留出、除去し、その後好適な溶媒を添加してもよい。 Examples of the method of the dehydration condensation reaction include a method of heating the silanol compound solution obtained by the hydrolysis reaction of the organosilane compound as it is. The heating temperature is preferably 50 ° C. or higher and lower than the boiling point of the solvent, and the heating time is preferably 1 to 100 hours. Further, in order to increase the degree of polymerization of the polysiloxane, reheating or addition of a base catalyst may be performed. Further, depending on the purpose, after the dehydration condensation reaction, an appropriate amount of the produced alcohol or the like may be distilled off and removed under heating and / or reduced pressure, and then a suitable solvent may be added.
樹脂組成物の保存安定性の観点から、加水分解、脱水縮合後のシロキサン樹脂溶液には前記触媒が含まれないことが好ましく、必要に応じて触媒の除去を行うことができる。触媒除去方法としては、操作の簡便さと除去性の観点から、水洗浄、イオン交換樹脂による処理などが好ましい。水洗浄とは、ポリシロキサン溶液を適当な疎水性溶媒で希釈し、水で数回洗浄した後、得られた有機層をエバポレーター等で濃縮する方法である。イオン交換樹脂による処理とは、ポリシロキサン溶液を適当なイオン交換樹脂に接触させる方法である。 From the viewpoint of storage stability of the resin composition, it is preferable that the siloxane resin solution after hydrolysis and dehydration condensation does not contain the catalyst, and the catalyst can be removed if necessary. As the catalyst removing method, water washing, treatment with an ion exchange resin, or the like is preferable from the viewpoint of ease of operation and removability. The water washing is a method of diluting a polysiloxane solution with an appropriate hydrophobic solvent, washing with water several times, and then concentrating the obtained organic layer with an evaporator or the like. The treatment with an ion exchange resin is a method of contacting a polysiloxane solution with an appropriate ion exchange resin.
有機金属化合物は、後述の隔壁(A-1)のパターン形成に際し、露光工程および/または加熱工程において、分解・凝集することにより黒色粒子または黄色粒子となり、後述の隔壁(A-1)のOD値を向上させる機能を有する。露光前にはOD値が低く、パターン形成後にOD値が上昇することから、露光工程においては露光した光を底部まで十分に透過させて、光硬化または光分解させることができる。例えば、ネガ型感光性を有する樹脂組成物の場合、OD値の高い隔壁(A-1)を形成するために、予め黒色顔料を多量に含有する樹脂組成物を用いてパターン形成すると、底部における光硬化が不十分となりやすい。その結果、得られた隔壁(A-1)の形状が逆テーパー型になりやすい傾向にある。前述の有機金属化合物を含有する本発明の樹脂組成物を用いてパターン形成すると、底部まで十分に光硬化することから、テーパー角度を容易に後述の好ましい範囲にすることができる。 The organometallic compound becomes black particles or yellow particles by being decomposed and aggregated in the exposure step and / or the heating step in the pattern formation of the partition wall (A-1) described later, and becomes OD of the partition wall (A-1) described later. It has a function to improve the value. Since the OD value is low before exposure and increases after pattern formation, in the exposure step, the exposed light can be sufficiently transmitted to the bottom and photocured or photodecomposed. For example, in the case of a resin composition having negative photosensitive, when a pattern is formed in advance using a resin composition containing a large amount of black pigment in order to form a partition wall (A-1) having a high OD value, a pattern is formed at the bottom. Photocuring tends to be insufficient. As a result, the shape of the obtained partition wall (A-1) tends to be a reverse taper type. When the pattern is formed by using the resin composition of the present invention containing the above-mentioned organometallic compound, the taper angle can be easily set to the preferable range described later because the photocuring is sufficiently to the bottom.
有機金属化合物としては、例えば、ネオデカン酸銀、オクチル酸銀、サリチル酸銀などの銀を含有する有機金属化合物;クロロ(トリフェニルホスフィン)金、テトラクロロ金酸四水和物などの金を含有する有機金属化合物;ビス(アセチルアセトナト)白金、ジクロロビス(トリフェニルホスフィン)白金、ジクロロビス(ベンゾニトリル)白金などの白金を含有する有機金属化合物;ビス(アセチルアセトナト)パラジウム、ジクロロビス(トリフェニルホスフィン)パラジウム、ジクロロビス(ベンゾニトリル)パラジウム、テトラキス(トリフェニルホスフィン)パラジウム、ジベンジリデンアセトンパラジウムなどのパラジウムを含有する有機金属化合物などが挙げられる。これらを2種以上含有してもよい。 Examples of the organic metal compound include silver-containing organic metal compounds such as silver neodecanoate, silver octylate, and silver salicylate; gold such as chloro (triphenylphosphine) gold and tetrachlorogold acid tetrahydrate. Organic metal compounds; Organic metal compounds containing platinum such as bis (acetylacetonato) platinum, dichlorobis (triphenylphosphine) platinum, dichlorobis (benzonitrile) platinum; bis (acetylacetonato) palladium, dichlorobis (triphenylphosphine) Examples thereof include organic metal compounds containing palladium such as palladium, dichlorobis (benzonitrile) palladium, tetrakis (triphenylphosphine) palladium, and dibenzylidene acetone palladium. Two or more of these may be contained.
これらのうち、ネオデカン酸銀、オクチル酸銀、サリチル酸銀などの銀を含有する有機金属化合物を含有すると、露光工程において分解・凝集することにより黒色化し、その後の加熱工程において、さらに分解・凝集することにより黄色化する。 Of these, when an organic metal compound containing silver such as silver neodecanoate, silver octylate, and silver salicylate is contained, it decomposes and aggregates in the exposure process to cause blackening, and further decomposes and aggregates in the subsequent heating process. It turns yellow.
一方、ビス(アセチルアセトナト)白金、ジクロロビス(トリフェニルホスフィン)白金、ジクロロビス(ベンゾニトリル)白金などの白金を含有する有機金属化合物;ビス(アセチルアセトナト)パラジウム、ジクロロビス(トリフェニルホスフィン)パラジウム、ジクロロビス(ベンゾニトリル)パラジウム、テトラキス(トリフェニルホスフィン)パラジウム、ジベンジリデンアセトンパラジウムなどのパラジウムから選ばれた有機金属化合物を含有すると、露光工程および/または加熱工程において、分解・凝集することにより黒色化する。 On the other hand, organic metal compounds containing platinum such as bis (acetylacetonato) platinum, dichlorobis (triphenylphosphine) platinum, and dichlorobis (benzonitrile) platinum; bis (acetylacetonato) palladium, dichlorobis (triphenylphosphine) palladium, When an organic metal compound selected from palladium such as dichlorobis (benzonitrile) palladium, tetrakis (triphenylphosphine) palladium, and dibenzylideneacetone palladium is contained, it becomes black due to decomposition and aggregation in the exposure step and / or the heating step. do.
これらの中でも、OD値をより向上させる観点から、ビス(アセチルアセトナト)パラジウム、ジクロロビス(トリフェニルホスフィン)パラジウム、ジクロロビス(ベンゾニトリル)パラジウムおよびテトラキス(トリフェニルホスフィン)パラジウムから選ばれた有機金属化合物が好ましい。 Among these, organometallic compounds selected from bis (acetylacetonato) palladium, dichlorobis (triphenylphosphine) palladium, dichlorobis (benzonitrile) palladium and tetrakis (triphenylphosphine) palladium from the viewpoint of further improving the OD value. Is preferable.
本発明の樹脂組成物において、固形分中に占める有機金属化合物の含有量は、0.2~5重量%が好ましい。有機金属化合物の含有量を0.2重量%以上とすることにより、得られる隔壁のOD値をより向上させることができる。有機金属化合物の含有量は、1.5重量%以上がより好ましい。一方、有機金属化合物の含有量を5重量%以下とすることにより、反射率をより向上させることができる。 In the resin composition of the present invention, the content of the organometallic compound in the solid content is preferably 0.2 to 5% by weight. By setting the content of the organometallic compound to 0.2% by weight or more, the OD value of the obtained partition wall can be further improved. The content of the organometallic compound is more preferably 1.5% by weight or more. On the other hand, by setting the content of the organometallic compound to 5% by weight or less, the reflectance can be further improved.
本発明の樹脂組成物は、後述の隔壁(A-1)のパターン形成に用いられる場合、ネガ型またはポジ型の感光性を有することが好ましい。ネガ型感光性を付与する場合は、光重合開始剤を含有することが好ましく、高精細なパターン形状の隔壁を形成することができる。ネガ型感光性樹脂組成物は、さらに、光重合性化合物を含有することが好ましい。一方、ポジ型感光性を付与する場合はキノンジアジド化合物を含有することが好ましい。 When the resin composition of the present invention is used for pattern formation of the partition wall (A-1) described later, it is preferable that the resin composition has negative or positive photosensitivity. When negative photosensitivity is imparted, it is preferable to contain a photopolymerization initiator, and a partition wall having a high-definition pattern shape can be formed. The negative photosensitive resin composition preferably further contains a photopolymerizable compound. On the other hand, when imparting positive photosensitivity, it is preferable to contain a quinonediazide compound.
光重合開始剤は、光(紫外線、電子線を含む)の照射によって分解および/または反応し、ラジカルを発生させるものであればどのようなものでもよい。例えば、2-メチル-[4-(メチルチオ)フェニル]-2-モルフォリノプロパン-1-オン、2-ジメチルアミノ-2-(4-メチルベンジル)-1-(4-モルフォリン-4-イル-フェニル)-ブタン-1-オン、2-ベンジル-2-ジメチルアミノ-1-(4-モルフォリノフェニル)-ブタノン-1などのα-アミノアルキルフェノン化合物;2,4,6-トリメチルベンゾイルフェニルホスフィンオキサイド、ビス(2,4,6-トリメチルベンゾイル)-フェニルフォスフィンオキサイド、ビス(2,6-ジメトキシベンゾイル)-(2,4,4-トリメチルペンチル)-フォスフィンオキサイドなどのアシルホスフィンオキサイド化合物;1-フェニル-1,2-プロパンジオン-2-(O-エトキシカルボニル)オキシム、1,2-オクタンジオン-1-[4-(フェニルチオ)-2-(O-ベンゾイルオキシム)]、1-フェニル-1,2-ブタジオン-2-(O-メトキシカルボニル)オキシム、1,3-ジフェニルプロパントリオン-2-(O-エトキシカルボニル)オキシム、エタノン-1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル]-1-(O-アセチルオキシム)などのオキシムエステル化合物;ベンジルジメチルケタールなどのベンジルケタール化合物;2-ヒドロキシ-2-メチル-1-フェニルプロパン-1-オン、1-(4-イソプロピルフェニル)-2-ヒドロキシ-2-メチルプロパン-1-オン、4-(2-ヒドロキシエトキシ)フェニル-(2-ヒドロキシ-2-プロピル)ケトン、1-ヒドロキシシクロヘキシル-フェニルケトンなどのα-ヒドロキシケトン化合物;ベンゾフェノン、4,4-ビス(ジメチルアミノ)ベンゾフェノン、4,4-ビス(ジエチルアミノ)ベンゾフェノン、o-ベンゾイル安息香酸メチル、4-フェニルベンゾフェノン、4,4-ジクロロベンゾフェノン、ヒドロキシベンゾフェノン、4-ベンゾイル-4’-メチル-ジフェニルサルファイド、アルキル化ベンゾフェノン、3,3’,4,4’-テトラ(t-ブチルパーオキシカルボニル)ベンゾフェノンなどのベンゾフェノン化合物;2,2-ジエトキシアセトフェノン、2,3-ジエトキシアセトフェノン、4-t-ブチルジクロロアセトフェノン、ベンザルアセトフェノン、4-アジドベンザルアセトフェノンなどのアセトフェノン化合物;2-フェニル-2-オキシ酢酸メチルなどの芳香族ケトエステル化合物;4-ジメチルアミノ安息香酸エチル、4-ジメチルアミノ安息香酸(2-エチル)ヘキシル、4-ジエチルアミノ安息香酸エチル、2-ベンゾイル安息香酸メチルなどの安息香酸エステル化合物などが挙げられる。これらを2種以上含有してもよい。 The photopolymerization initiator may be any one as long as it decomposes and / or reacts with light (including ultraviolet rays and electron beams) to generate radicals. For example, 2-methyl- [4- (methylthio) phenyl] -2-morpholinopropane-1-one, 2-dimethylamino-2- (4-methylbenzyl) -1- (4-morpholin-4-yl). Α-Aminoalkylphenone compounds such as -phenyl) -butane-1-one, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1; 2,4,6-trimethylbenzoylphenyl Acylphosphine oxide compounds such as phosphine oxide, bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide, bis (2,6-dimethoxybenzoyl)-(2,4,4-trimethylpentyl) -phosphine oxide 1-Phenyl-1,2-propanedione-2- (O-ethoxycarbonyl) oxime, 1,2-octanedione-1- [4- (phenylthio) -2- (O-benzoyloxime)], 1- Phenyl-1,2-butadion-2- (O-methoxycarbonyl) oxime, 1,3-diphenylpropanthrion-2- (O-ethoxycarbonyl) oxime, etanone-1- [9-ethyl-6- (2-ethyl-6-) Oxyme ester compounds such as methylbenzoyl) -9H-carbazole-3-yl] -1- (O-acetyloxime); benzyl ketal compounds such as benzyl dimethyl ketal; 2-hydroxy-2-methyl-1-phenylpropan-1 -On, 1- (4-isopropylphenyl) -2-hydroxy-2-methylpropan-1-one, 4- (2-hydroxyethoxy) phenyl- (2-hydroxy-2-propyl) ketone, 1-hydroxycyclohexyl -Α-Hydroxyketone compounds such as phenylketone; benzophenone, 4,4-bis (dimethylamino) benzophenone, 4,4-bis (diethylamino) benzophenone, o-methyl benzoylbenzoate, 4-phenylbenzophenone, 4,4- Benzophenone compounds such as dichlorobenzophenone, hydroxybenzophenone, 4-benzoyl-4'-methyl-diphenylsulfide, alkylated benzophenone, 3,3', 4,4'-tetra (t-butylperoxycarbonyl) benzophenone; 2,2 -Acetophenone compounds such as diethoxyacetophenone, 2,3-diethoxyacetophenone, 4-t-butyldichloroacetophenone, benzalacetophenone, 4-azidobenzalacetophenone Aromatic ketoester compounds such as 2-phenyl-2-methyl oxyacetate; ethyl 4-dimethylaminobenzoate, 4-dimethylaminobenzoic acid (2-ethyl) hexyl, ethyl 4-diethylaminobenzoate, 2-benzoylbenzoic acid Examples thereof include benzoic acid ester compounds such as methyl. Two or more of these may be contained.
本発明の樹脂組成物中における光重合開始剤の含有量は、ラジカル硬化を効果的に進める観点から、固形分中、0.01重量%以上が好ましく、1重量%以上がより好ましい。一方、残留した光重合開始剤の溶出等を抑制し、黄変をより向上させる観点から、光重合開始剤の含有量は、固形分中、20重量%以下が好ましく、10重量%以下がより好ましい。 The content of the photopolymerization initiator in the resin composition of the present invention is preferably 0.01% by weight or more, more preferably 1% by weight or more, based on the solid content, from the viewpoint of effectively advancing radical curing. On the other hand, from the viewpoint of suppressing elution of the residual photopolymerization initiator and further improving yellowing, the content of the photopolymerization initiator is preferably 20% by weight or less, more preferably 10% by weight or less in the solid content. preferable.
本発明における光重合性化合物とは、分子中に2つ以上のエチレン性不飽和二重結合を有する化合物をいう。ラジカル重合性のしやすさを考えると、光重合性化合物は、(メタ)アクリル基を有することが好ましい。 The photopolymerizable compound in the present invention refers to a compound having two or more ethylenically unsaturated double bonds in the molecule. Considering the ease of radical polymerization, the photopolymerizable compound preferably has a (meth) acrylic group.
光重合性化合物としては、例えば、ジエチレングリコールジアクリレート、トリエチレングリコールジアクリレート、テトラエチレングリコールジアクリレート、ジエチレングリコールジメタクリレート、トリエチレングリコールジメタクリレート、テトラエチレングリコールジメタクリレート、トリメチロールプロパンジアクリレート、トリメチロールプロパントリアクリレート、トリメチロールプロパンジメタクリレート、トリメチロールプロパントリメタクリレート、1,3-ブタンジオールジアクリレート、1,3-ブタンジオールジメタクリレート、ネオペンチルグリコールジアクリレート、1,4-ブタンジオールジアクリレート、1,4-ブタンジオールジメタクリレート、1,6-ヘキサンジオールジアクリレート、1,9-ノナンジオールジメタクリレート、1,10-デカンジオールジメタクリレート、ジメチロール-トリシクロデカンジアクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールテトラアクリレート、ペンタエリスリトールトリメタクリレート、ペンタエリスリトールテトラメタクリレート、ジペンタエリスリトールペンタアクリレート、ジペンタエリスリトールヘキサアクリレート、トリペンタエリスリトールヘプタアクリレート、トリペンタエリスリトールオクタアクリレート、テトラペンタエリスリトールノナアクリレート、テトラペンタエリスリトールデカアクリレート、ペンタペンタエリスリトールウンデカアクリレート、ペンタペンタエリスリトールドデカアクリレート、トリペンタエリスリトールヘプタメタクリレート、トリペンタエリスリトールオクタメタクリレート、テトラペンタエリスリトールノナメタクリレート、テトラペンタエリスリトールデカメタクリレート、ペンタペンタエリスリトールウンデカメタクリレート、ペンタペンタエリスリトールドデカメタクリレート、ジメチロール-トリシクロデカンジアクリレートなどが挙げられる。これらを2種以上含有してもよい。 Examples of the photopolymerizable compound include diethylene glycol diacrylate, triethylene glycol diacrylate, tetraethylene glycol diacrylate, diethylene glycol dimethacrylate, triethylene glycol dimethacrylate, tetraethylene glycol dimethacrylate, trimethylolpropane diacrylate, and trimethylolpropane. Triacrylate, Trimethylol Propane Dimethacrylate, Trimethylol Propane Trimethacrylate, 1,3-Butanediol Diacrylate, 1,3-Butanediol Dimethacrylate, Neopentyl glycol Diacrylate, 1,4-Butanediol Diacrylate, 1, 4-Butandiol dimethacrylate, 1,6-hexanediol diacrylate, 1,9-nonanediol dimethacrylate, 1,10-decanediol dimethacrylate, dimethylol-tricyclodecanediacrylate, pentaerythritol triacrylate, pentaerythritol tetra Acrylate, pentaerythritol trimethacrylate, pentaerythritol tetramethacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, tripentaerythritol heptaacrylate, tripentaerythritol octaacrylate, tetrapentaerythritol nonaacrylate, tetrapentaerythritol decaacrylate, pentapenta Erislithol Undecaacrylate, Pentapentaerythritoleddecaacrylate, Trypentaerythritol heptamethacrylate, Tripentaerythritol octamethacrylate, Tetrapentaerythritol nonamethacrylate, Tetrapentaerythritol decamethacrylate, Pentapentaerythritol undecamethacrylate, Pentapentaerythritol dodecamethacrylate, Dimethyrole- Examples thereof include tricyclodecanediacrylate. Two or more of these may be contained.
本発明の樹脂組成物中における光重合性化合物の含有量は、ラジカル硬化を効果的に進める観点から、固形分中、1重量%以上が好ましい。一方、ラジカルの過剰反応を抑制し解像度を向上させる観点から、光重合性化合物の含有量は、固形分中、40重量%以下が好ましい。 The content of the photopolymerizable compound in the resin composition of the present invention is preferably 1% by weight or more in the solid content from the viewpoint of effectively advancing radical curing. On the other hand, from the viewpoint of suppressing the excessive reaction of radicals and improving the resolution, the content of the photopolymerizable compound is preferably 40% by weight or less in the solid content.
キノンジアジド化合物としては、フェノール性水酸基を有する化合物にナフトキノンジアジドのスルホン酸がエステルで結合した化合物が好ましい。ここで用いられるフェノール性水酸基を有する化合物としては、例えば、BIs-Z、TekP-4HBPA(テトラキスP-DO-BPA)、TrIsP-HAP、TrIsP-PA、BIsRS-2P、BIsRS-3P(以上、商品名、本州化学工業(株)製)、BIR-PC、BIR-PTBP、BIR-BIPC-F(以上、商品名、旭有機材工業(株)製)、4,4’-スルホニルジフェノール、BPFL(商品名、JFEケミカル(株)製)などが挙げられる。キノンジアジド化合物としては、これらフェノール性水酸基を有する化合物に、4-ナフトキノンジアジドスルホン酸または5-ナフトキノンジアジドスルホン酸をエステル結合で導入したものが好ましく、例えば、THP-17、TDF-517(商品名、東洋合成工業(株)製)、SBF-525(商品名、AZエレクトロニックマテリアルズ(株)製)などが挙げられる。 As the quinone diazide compound, a compound in which a sulfonic acid of naphthoquinone diazide is bonded to a compound having a phenolic hydroxyl group with an ester is preferable. Examples of the compound having a phenolic hydroxyl group used here include BIs-Z, TekP-4HBPA (Tetrakiss P-DO-BPA), TrisP-HAP, TrisP-PA, BIsRS-2P, and BIsRS-3P (hereinafter, commercial products). Name, manufactured by Honshu Chemical Industry Co., Ltd., BIR-PC, BIR-PTBP, BIR-BIPC-F (above, trade name, manufactured by Asahi Organic Materials Industry Co., Ltd.), 4,4'-sulfonyldiphenol, BPFL (Product name, manufactured by JFE Chemical Co., Ltd.) and the like. As the quinone diazide compound, a compound in which 4-naphthoquinone diazide sulfonic acid or 5-naphthoquinone diazido sulfonic acid is introduced into these compounds having a phenolic hydroxyl group by an ester bond is preferable, and for example, THP-17 and TDF-517 (trade name, TDF-517) are preferable. Examples thereof include Toyo Synthetic Industry Co., Ltd.) and SBF-525 (trade name, manufactured by AZ Electronic Materials Co., Ltd.).
本発明の樹脂組成物中におけるキノンジアジド化合物の含有量は、感度を向上させる観点から、固形分中、0.5重量%以上が好ましく、1重量%以上がより好ましい。一方、キノンジアジド化合物の含有量は、解像度を向上させる観点から、固形分中、25重量%以下が好ましく、20重量%以下がより好ましい。 The content of the quinonediazide compound in the resin composition of the present invention is preferably 0.5% by weight or more, more preferably 1% by weight or more, based on the solid content, from the viewpoint of improving the sensitivity. On the other hand, the content of the quinone diazide compound is preferably 25% by weight or less, and more preferably 20% by weight or less in the solid content from the viewpoint of improving the resolution.
溶媒は、樹脂組成物の粘度を塗布に適した範囲に調整し、隔壁の均一性を向上させる機能を有する。溶媒としては、大気圧下の沸点が150℃を超えて250℃以下の溶媒と、150℃以下の溶媒を組み合わせることが好ましい。 The solvent has a function of adjusting the viscosity of the resin composition to a range suitable for coating and improving the uniformity of the partition wall. As the solvent, it is preferable to combine a solvent having a boiling point of more than 150 ° C. and 250 ° C. or lower under atmospheric pressure and a solvent having a boiling point of 150 ° C. or lower.
溶媒としては、例えば、エタノール、プロパノール、イソプロパノール、ジアセトンアルコールなどのアルコール類;エチレングリコール、プロピレングリコールなどのグリコール類;エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノプロピルエーテル、プロピレングリコールモノブチルエーテルなどのエーテル類;メチルエチルケトン、アセチルアセトン、メチルプロピルケトン、メチルブチルケトン、メチルイソブチルケトン、ジイソブチルケトン、シクロペンタノンなどのケトン類;ジメチルホルムアミド、ジメチルアセトアミドなどのアミド類;エチルアセテート、プロピルアセテート、ブチルアセテート、イソブチルアセテート、エチレングリコールモノエチルエーテルアセテート、プロピレングリコールモノメチルエーテルアセテート、3-メトキシブチルアセテート、3-メチル-3-メトキシブチルアセテート、乳酸メチル、乳酸エチル、乳酸ブチルなどのアセテート類;トルエン、キシレン、ヘキサン、シクロヘキサンなどの芳香族あるいは脂肪族炭化水素、γ-ブチロラクトン、N-メチル-2-ピロリドン、ジメチルスルホキシドなどを挙げることができる。これらを2種以上含有してもよい。これらの中でも、塗布性の観点から、大気圧下の沸点が150℃を超えて250℃以下の溶媒としてジアセトンアルコールと、150℃以下の溶媒としてプロピレングリコールモノメチルエーテルを組み合わせることが好ましい。 Examples of the solvent include alcohols such as ethanol, propanol, isopropanol and diacetone alcohol; glycols such as ethylene glycol and propylene glycol; ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, propylene glycol monomethyl ether and propylene glycol monoethyl. Ethers such as ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether; ketones such as methyl ethyl ketone, acetyl acetone, methyl propyl ketone, methyl butyl ketone, methyl isobutyl ketone, diisobutyl ketone, cyclopentanone; dimethylformamide, dimethylacetamide, etc. Amids; ethyl acetate, propyl acetate, butyl acetate, isobutyl acetate, ethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, methyl lactate, ethyl lactate , Acetates such as butyl lactate; aromatic or aliphatic hydrocarbons such as toluene, xylene, hexane, cyclohexane, γ-butyrolactone, N-methyl-2-pyrrolidone, dimethylsulfoxide and the like. Two or more of these may be contained. Among these, from the viewpoint of coatability, it is preferable to combine diacetone alcohol as a solvent having a boiling point of more than 150 ° C. and 250 ° C. or lower under atmospheric pressure, and propylene glycol monomethyl ether as a solvent having a boiling point of 150 ° C. or lower.
溶媒の含有量は、塗布方法などに応じて任意に設定することができる。例えば、スピンコーティングにより膜形成を行う場合には、溶媒の含有量は、樹脂組成物中、50重量%以上、95重量%以下とすることが一般的である。 The content of the solvent can be arbitrarily set according to the coating method and the like. For example, when the film is formed by spin coating, the content of the solvent is generally 50% by weight or more and 95% by weight or less in the resin composition.
本発明の樹脂組成物は、さらに、リン原子を有する配位性化合物(以下、「配位性化合物」と記載する場合がある)を含有することが好ましい。配位性化合物は、樹脂組成物中の有機金属化合物に配位し、有機金属化合物の溶媒への溶解性を向上させて有機金属化合物の分解を促進し、得られる隔壁のOD値をより向上させることができる。配位性化合物としては、例えば、トリフェニルホスフィン、トリ-t-ブチルホスフィン、トリメチルホスフィン、トリシクロヘキシルホスフィン、テトラフルオロホウ酸トリ-t-ブチルホスフィン、トリ(2-フリル)ホスフィン、トリス(1-アダマンチル)ホスフィン、トリス(ジエチルアミノ)ホスフィン、トリス(4-メトキシフェニル)ホスフィン、トリス(O-トリル)ホスフィンなどが挙げられる。これらを2種以上含有してもよい。本発明の樹脂組成物中における配位性化合物の含有量は、有機金属化合物に対して0.5~3.0モル当量が好ましい。 The resin composition of the present invention preferably further contains a coordinating compound having a phosphorus atom (hereinafter, may be referred to as "coordinating compound"). The coordinating compound coordinates with the organometallic compound in the resin composition, improves the solubility of the organometallic compound in the solvent, promotes the decomposition of the organometallic compound, and further improves the OD value of the obtained partition wall. Can be made to. Examples of the coordinating compound include triphenylphosphine, tri-t-butylphosphine, trimethylphosphine, tricyclohexylphosphine, tri-t-butylphosphine tetrafluoroborate, tri (2-furyl) phosphine, and tris (1-frill). Examples thereof include adamantyl) phosphine, tris (diethylamino) phosphine, tris (4-methoxyphenyl) phosphine, and tris (O-tolyl) phosphine. Two or more of these may be contained. The content of the coordinating compound in the resin composition of the present invention is preferably 0.5 to 3.0 molar equivalent with respect to the organometallic compound.
本発明の樹脂組成物は、さらに、白色顔料および/または黒色顔料を含有することが好ましい。白色顔料は、隔壁の反射率をより向上させる機能を有する。黒色顔料は、OD値を調整する機能を有する。 The resin composition of the present invention preferably further contains a white pigment and / or a black pigment. The white pigment has a function of further improving the reflectance of the partition wall. The black pigment has a function of adjusting the OD value.
白色顔料としては、例えば、二酸化チタン、酸化ジルコニウム、酸化亜鉛、硫酸バリウム、これらの複合化合物などが挙げられる。これらを2種以上含有してもよい。これらの中でも、反射率が高く工業的利用が容易な二酸化チタンが好ましい。 Examples of the white pigment include titanium dioxide, zirconium oxide, zinc oxide, barium sulfate, and composite compounds thereof. Two or more of these may be contained. Among these, titanium dioxide having high reflectance and easy industrial use is preferable.
二酸化チタンの結晶構造は、アナターゼ型、ルチル型およびブルッカイト型に分類される。これらの中でも、光触媒活性が低いことから、ルチル型酸化チタンが好ましい。 The crystal structure of titanium dioxide is classified into anatase type, rutile type and brookite type. Among these, rutile-type titanium oxide is preferable because of its low photocatalytic activity.
白色顔料には、表面処理が施されていてもよい。Al、SiおよびZrから選ばれた金属による表面処理が好ましく、形成した隔壁の耐光性および耐熱性を向上させることができる。 The white pigment may be surface-treated. Surface treatment with a metal selected from Al, Si and Zr is preferable, and the light resistance and heat resistance of the formed partition wall can be improved.
白色顔料のメジアン径は、隔壁の反射率をより向上させる観点から、100~500nmが好ましい。ここで、白色顔料のメジアン径は、粒度分布測定装置(N4-PLUS;ベックマン・コールター(株)製)などを用いてレーザー回折法により測定された粒度分布から算出することができる。 The median diameter of the white pigment is preferably 100 to 500 nm from the viewpoint of further improving the reflectance of the partition wall. Here, the median diameter of the white pigment can be calculated from the particle size distribution measured by a laser diffraction method using a particle size distribution measuring device (N4-PLUS; manufactured by Beckman Coulter Co., Ltd.) or the like.
白色顔料として好ましく用いられる二酸化チタン顔料としては、例えば、R960;デュポン(株)製(ルチル型、SiO2/Al2O3処理、平均一次粒子径210nm)、CR-97;石原産業(株)製(ルチル型、Al2O3/ZrO2処理、平均一次粒子径250nm)、JR-301;テイカ(株)製(ルチル型、Al2O3処理、平均一次粒子径300nm)、JR-405;テイカ(株)製(ルチル型、Al2O3処理、平均一次粒子径210nm)、JR-600A;テイカ(株)(ルチル型、Al2O3処理、平均一次粒子径250nm)、JR-603;テイカ(株)(ルチル型、Al2O3/ZrO2処理、平均一次粒子径280nm)等が挙げられる。これらを2種以上含有してもよい。 Titanium dioxide pigments preferably used as white pigments include, for example, R960; manufactured by DuPont Co., Ltd. (rutile type, SiO 2 / Al 2 O3 treatment, average primary particle size 210 nm), CR-97; Ishihara Sangyo Co., Ltd. Made by (rutile type, Al 2 O 3 / ZrO 2 treatment, average primary particle diameter 250 nm), JR-301; manufactured by Teika Co., Ltd. (rutile type, Al 2 O 3 treatment, average primary particle diameter 300 nm), JR-405 Made by Teika Co., Ltd. (rutile type, Al 2 O 3 treatment, average primary particle diameter 210 nm), JR-600A; Teika Co., Ltd. (rutile type, Al 2 O 3 treatment, average primary particle diameter 250 nm), JR- 603; Teika Co., Ltd. (rutile type , Al2O3 / ZrO2 treatment, average primary particle size 280 nm) and the like can be mentioned. Two or more of these may be contained.
樹脂組成物における白色顔料の含有量は、反射率をより向上させる観点から、固形分中の20重量%以上が好ましく、30重量%以上がより好ましい。一方、隔壁の表面平滑性を向上させる観点から、白色顔料の含有量は、固形分中の60重量%以下が好ましく、55重量%以下がより好ましい。 The content of the white pigment in the resin composition is preferably 20% by weight or more, and more preferably 30% by weight or more in the solid content from the viewpoint of further improving the reflectance. On the other hand, from the viewpoint of improving the surface smoothness of the partition wall, the content of the white pigment is preferably 60% by weight or less, more preferably 55% by weight or less in the solid content.
黒色顔料としては、例えば、黒色有機顔料、混色有機顔料、黒色無機顔料等が挙げられる。 Examples of the black pigment include black organic pigments, mixed color organic pigments, black inorganic pigments and the like.
黒色有機顔料としては、例えば、カーボンブラック、ペリレンブラック、アニリンブラック、ベンゾフラノン系顔料などが挙げられる。これらは、樹脂で被覆されていてもよい。 Examples of the black organic pigment include carbon black, perylene black, aniline black, and benzofuranone pigments. These may be coated with a resin.
混色有機顔料としては、例えば、赤、青、緑、紫、黄色、マゼンダおよびシアン等から選ばれた2種以上の顔料を混合して疑似黒色化したものが挙げられる。これらの中でも、適度に高いOD値とパターン加工性を両立する観点から、赤色顔料と青色顔料との混合顔料が好ましい。混合顔料における赤色顔料と青色顔料の重量比は、20/80~80/20が好ましく、30/70~70/30がより好ましい。代表的な顔料の具体例をカラーインデックス(CI)ナンバーで示すと、次のようなものが挙げられる。赤色顔料としては、例えば、ピグメントレッド(以下PRと略す)9、PR48、PR97、PR122、PR123、PR144、PR149、PR166、PR168、PR177、PR179、PR180、PR192、PR209、PR215、PR216、PR217、PR220、PR223、PR224、PR226、PR227、PR228、PR240、PR254などが挙げられる。これらを2種以上含有してもよい。青色顔料としては、例えば、ピグメントブルー(以下PBと略す)15、PB15:3、PB15:4、PB15:6、PB22、PB60、PB64などが挙げられる。これらを2種以上含有してもよい。 Examples of the mixed color organic pigment include those obtained by mixing two or more kinds of pigments selected from red, blue, green, purple, yellow, magenta, cyan and the like to make a pseudo-black color. Among these, a mixed pigment of a red pigment and a blue pigment is preferable from the viewpoint of achieving both a moderately high OD value and pattern processability. The weight ratio of the red pigment to the blue pigment in the mixed pigment is preferably 20/80 to 80/20, more preferably 30/70 to 70/30. Specific examples of typical pigments by color index (CI) number include the following. Examples of the red pigment include Pigment Red (hereinafter abbreviated as PR) 9, PR48, PR97, PR122, PR123, PR144, PR149, PR166, PR168, PR177, PR179, PR180, PR192, PR209, PR215, PR216, PR217, PR220. , PR223, PR224, PR226, PR227, PR228, PR240, PR254 and the like. Two or more of these may be contained. Examples of the blue pigment include Pigment Blue (hereinafter abbreviated as PB) 15, PB15: 3, PB15: 4, PB15: 6, PB22, PB60, PB64. Two or more of these may be contained.
黒色無機顔料としては、例えば、グラファイト;チタン、銅、鉄、マンガン、コバルト、クロム、ニッケル、亜鉛、カルシウム、銀、金、白金、パラジウム等の金属の微粒子;金属酸化物;金属複合酸化物;金属硫化物;金属窒化物;金属酸窒化物;金属炭化物などが挙げられる。これらを2種以上含有してもよい。 Examples of the black inorganic pigment include graphite; fine particles of metals such as titanium, copper, iron, manganese, cobalt, chromium, nickel, zinc, calcium, silver, gold, platinum and palladium; metal oxides; metal composite oxides; Examples thereof include metal sulfides; metal nitrides; metal oxynitrides; and metal carbides. Two or more of these may be contained.
以上の黒色顔料の中でも、高い遮光性を有することから、窒化チタン、窒化ジルコニウム、カーボンブラック、および赤色顔料と青色顔料との重量比20/80~80/20の混合顔料から選ばれた顔料が好ましい。さらに、隔壁(A-1)のテーパー角度を後述の好ましい範囲に調整しやすい観点から、窒化チタン、窒化ジルコニウム、および赤色顔料と青色顔料との重量比20/80~80/20の混合顔料から選ばれた顔料がより好ましい。 Among the above black pigments, titanium nitride, zirconium nitride, carbon black, and a pigment selected from a mixed pigment having a weight ratio of a red pigment and a blue pigment of 20/80 to 80/20 are selected because they have high light-shielding properties. preferable. Further, from the viewpoint of easily adjusting the taper angle of the partition wall (A-1) to a preferable range described later, titanium nitride, zirconium nitride, and a mixed pigment having a weight ratio of a red pigment and a blue pigment of 20/80 to 80/20 are used. The selected pigment is more preferred.
樹脂組成物における黒色顔料の含有量は、反射率およびODを前述の範囲に調整して隣接画素における光の混色をより抑制する観点から、固形分中の0.01重量%以上が好ましく、0.05重量%以上がより好ましい。一方、反射率およびODを前述の範囲に調整する観点から、黒色顔料の含有量は、固形分中の5重量%以下が好ましく、3重量%以下がより好ましい。 The content of the black pigment in the resin composition is preferably 0.01% by weight or more in the solid content, preferably 0, from the viewpoint of adjusting the reflectance and OD to the above-mentioned ranges and further suppressing the color mixing of light in the adjacent pixels. More preferably, it is 0.05% by weight or more. On the other hand, from the viewpoint of adjusting the reflectance and OD within the above-mentioned ranges, the content of the black pigment is preferably 5% by weight or less, and more preferably 3% by weight or less in the solid content.
本発明の樹脂組成物は、さらに、光塩基発生剤を含有することが好ましい。光塩基発生剤を含有することにより、露光工程において塩基を発生して、樹脂組成物中の有機金属化合物の分解・凝集を促進することから、有機金属化合物をより効率よく黒色粒子または黄色粒子に変換し、得られる隔壁のOD値をより向上させることができる。 The resin composition of the present invention preferably further contains a photobase generator. By containing a photobase generator, a base is generated in the exposure process to promote decomposition and aggregation of the organometallic compound in the resin composition, so that the organometallic compound can be more efficiently converted into black particles or yellow particles. It can be converted and the OD value of the obtained partition wall can be further improved.
光塩基発生剤は、光(紫外線、電子線を含む)の照射によって分解および/または反応し、塩基を発生させるものであればどのようなものでもよい。例えば、2-(9-オキソキサンテン-2-イル)プロピオン酸1,5,7-トリアザシクロ[4,4,0]デカ-5-エン、N-シクロヘキシルカルバミン酸1-(アントラキノン-2-イル)エチル、N、N-ジエチルカルバミン酸9-アントリルメチル、N-シクロヘキシルカルバミン酸9-アントリルメチル、1-カルボン酸9-アントリルメチルピペリジン、N,N-ジシクロヘキシルカルバミン酸9-アントリルメチル、N,N-ジシクロヘキシルカルバミン酸1-(アントラキノン-2-イル)エチル、プロピオン酸シクロヘキシルアンモニウム2-(3-ベンゾイルフェニル)、ブチルトリフェニルボロン酸1,2-ジシクロヘキシルー4,4,5,5、-テトラメチルビグアニジニウム、2-(3-ベンゾイルフェニル)プロピオン酸1,2-ジイソプロピル-3-[ビス(ジメチルアミノ)メチレン]グアニジニウム、(2-ニトロフェニル)メチル4-ヒドロキシピペリジン-1-カルボン酸、2-(3-ベンゾイルフェニル)プロピオン酸グアニジニウムなどが挙げられる。これらを2種以上用いてもよい。 The photobase generator may be any agent as long as it decomposes and / or reacts with light (including ultraviolet rays and electron beams) to generate a base. For example, 2- (9-oxoxanthen-2-yl) propionic acid 1,5,7-triazacyclo [4,4,0] deca-5-ene, N-cyclohexylcarbamic acid 1- (anthraquinone-2-yl). Ethyl, N, N-diethylcarbamate 9-anthrylmethyl, N-cyclohexylcarbamate 9-anthrylmethyl, 1-carboxylic acid 9-anthrylmethylpiperidin, N, N-dicyclohexylcarbamate 9-anthrylmethyl, N, N-dicyclohexylcarbamic acid 1- (anthraquinone-2-yl) ethyl, cyclohexylammonium 2- (3-benzoylphenyl) propionate, butyltriphenylboronic acid 1,2-dicyclohexyl-4,4,5,5, -Tetramethylbiguanidinium, 2- (3-benzoylphenyl) propionic acid 1,2-diisopropyl-3- [bis (dimethylamino) methylene] guanidinium, (2-nitrophenyl) methyl 4-hydroxypiperidine-1- Examples thereof include carboxylic acids and guanidinium 2- (3-benzoylphenyl) propionate. Two or more of these may be used.
本発明の樹脂組成物中における光塩基発生剤の含有量は、OD値をより向上させる観点から、固形分中の0.5重量%以上が好ましい。一方、光塩基発生剤の含有量は、解像度を向上させる観点から、固形分中の2.0重量%以下が好ましい。 The content of the photobase generator in the resin composition of the present invention is preferably 0.5% by weight or more in the solid content from the viewpoint of further improving the OD value. On the other hand, the content of the photobase generator is preferably 2.0% by weight or less in the solid content from the viewpoint of improving the resolution.
本発明の樹脂組成物は、撥液化合物を含有してもよい。撥液化合物とは、樹脂組成物に水や有機溶媒をはじく性質(撥液性能)を付与する化合物である。このような性質を有する化合物であれば特に限定されないが、具体的には、フルオロアルキル基を有する化合物が好ましく用いられる。撥液化合物を含有することにより、隔壁(A-1)形成後に、隔壁の頂部に撥液性能を付与することができる。それにより、例えば、後述する(B)色変換発光材料を含有する画素を形成する際に、それぞれの画素に、組成の異なる色変換発光材料を、容易に塗り分けることができる。 The resin composition of the present invention may contain a liquid repellent compound. The liquid-repellent compound is a compound that imparts the property of repelling water or an organic solvent (liquid-repellent performance) to the resin composition. The compound having such properties is not particularly limited, but specifically, a compound having a fluoroalkyl group is preferably used. By containing the liquid-repellent compound, the liquid-repellent performance can be imparted to the top of the partition wall after the partition wall (A-1) is formed. Thereby, for example, when forming the pixels containing the color conversion light emitting material (B) described later, the color conversion light emitting materials having different compositions can be easily applied to each pixel.
撥液化合物としては、例えば、1,1,2,2-テトラフロロオクチル(1,1,2,2-テトラフロロプロピル)エーテル、1,1,2,2-テトラフロロオクチルヘキシルエーテル、オクタエチレングリコールジ(1,1,2,2-テトラフロロブチル)エーテル、ヘキサエチレングリコール(1,1,2,2,3,3-ヘキサフロロペンチル)エーテル、オクタプロピレングリコールジ(1,1,2,2-テトラフロロブチル)エーテル、ヘキサプロピレングリコールジ(1,1,2,2,3,3-ヘキサフロロペンチル)エーテル、パーフロロドデシルスルホン酸ナトリウム、1,1,2,2,8,8,9,9,10,10-デカフロロドデカン、1,1,2,2,3,3-ヘキサフロロデカン、N-[3-(パーフルオロオクタンスルホンアミド)プロピル]-N,N’-ジメチル-N-カルボキシメチレンアンモニウムベタイン、パーフルオロアルキルスルホンアミドプロピルトリメチルアンモニウム塩、パーフルオロアルキル-N-エチルスルホニルグリシン塩、リン酸ビス(N-パーフルオロオクチルスルホニル-N-エチルアミノエチル)、モノパーフルオロアルキルエチルリン酸エステルなどの末端、主鎖および/または側鎖にフルオロアルキルまたはフルオロアルキレン基を有する化合物などが挙げられる。また、市販の撥液化合物としては、“メガファック”(登録商標)F142D、F172、F173、F183、F444、F477(以上、大日本インキ化学工業(株)製)、エフトップEF301、303、352(新秋田化成(株)製)、フロラードFC-430、FC-431(住友スリーエム(株)製))、“アサヒガード”(登録商標)AG710、“サーフロン”(登録商標)S-382、SC-101、SC-102、SC-103、SC-104、SC-105、SC-106(旭硝子(株)製)、BM-1000、BM-1100(裕商(株)製)、NBX-15、FTX-218、DFX-18((株)ネオス製)などが挙げられる。これらを2種以上含有してもよい。これらの中でも、反応性が高く、樹脂と強固な結合を形成することができることから、光重合性基を有するものがより好ましい。フッ素原子および光重合性基を有する撥液化合物としては、例えば、“メガファック”(登録商標)RS-76-E、RS-56、RS-72-k、RS-75、RS-76-E、RS-76-NS、RS-76、RS-90(以上、商品名、DIC(株)製)等が挙げられる。なお、この場合、ネガ型感光性樹脂組成物の光硬化物からなる隔壁(A-1)中においては、光重合性基は光重合されていてもよい。 Examples of the liquid repellent compound include 1,1,2,2-tetrafluorooctyl (1,1,2,2-tetrafluoropropyl) ether, 1,1,2,2-tetrafluorooctylhexyl ether, and octaethylene. Glycoldi (1,1,2,2-tetrafluorobutyl) ether, hexaethylene glycol (1,1,2,2,3,3-hexafluoropentyl) ether, octapropylene glycol di (1,1,2, 2-Tetrafluorobutyl) ether, hexapropylene glycol di (1,1,2,2,3,3-hexafluoropentyl) ether, sodium perfluorododecylsulfonate, 1,1,2,2,8,8, 9,9,10,10-decafluorodecane, 1,1,2,2,3,3-hexafluorodecane, N- [3- (perfluorooctane sulfonamide) propyl] -N, N'-dimethyl- N-carboxymethyleneammonium betaine, perfluoroalkylsulfonamide propyltrimethylammonium salt, perfluoroalkyl-N-ethylsulfonylglycine salt, bis phosphate (N-perfluorooctylsulfonyl-N-ethylaminoethyl), monoperfluoroalkyl Examples thereof include compounds having a fluoroalkyl or fluoroalkylene group at the terminal, main chain and / or side chain such as ethyl phosphate ester. Commercially available liquid repellent compounds include "Megafuck" (registered trademark) F142D, F172, F173, F183, F444, F477 (all manufactured by Dainippon Ink and Chemicals Co., Ltd.), Ftop EF301, 303, 352. (Manufactured by Shin-Akita Kasei Co., Ltd.), Florard FC-430, FC-431 (manufactured by Sumitomo 3M Co., Ltd.), "Asahi Guard" (registered trademark) AG710, "Surflon" (registered trademark) S-382, SC -101, SC-102, SC-103, SC-104, SC-105, SC-106 (manufactured by Asahi Glass Co., Ltd.), BM-1000, BM-1100 (manufactured by Yusho Co., Ltd.), NBX-15, Examples include FTX-218 and DFX-18 (manufactured by Neos Co., Ltd.). Two or more of these may be contained. Among these, those having a photopolymerizable group are more preferable because they have high reactivity and can form a strong bond with the resin. Examples of the liquid repellent compound having a fluorine atom and a photopolymerizable group include "Megafuck" (registered trademark) RS-76-E, RS-56, RS-72-k, RS-75, RS-76-E. , RS-76-NS, RS-76, RS-90 (above, trade name, manufactured by DIC Co., Ltd.) and the like. In this case, the photopolymerizable group may be photopolymerized in the partition wall (A-1) made of a photocured product of the negative photosensitive resin composition.
隔壁の撥液性能を向上させ、インクジェット塗布性を向上させる観点から、樹脂組成物における撥液化合物の含有量は、固形分中の0.01重量%以上が好ましく、0.1重量%以上がより好ましい。一方、樹脂や白色顔料との相溶性を向上させる観点から、撥液化合物の含有量は、固形分中の10重量%以下が好ましく、5重量%以下がより好ましい。 From the viewpoint of improving the liquid-repellent performance of the partition wall and improving the inkjet coatability, the content of the liquid-repellent compound in the resin composition is preferably 0.01% by weight or more, preferably 0.1% by weight or more in the solid content. More preferred. On the other hand, from the viewpoint of improving the compatibility with the resin and the white pigment, the content of the liquid-repellent compound is preferably 10% by weight or less, more preferably 5% by weight or less in the solid content.
また、本発明の樹脂組成物は、必要に応じて、紫外線吸収剤、重合禁止剤、界面活性剤、密着性改良剤などを含有してもよい。 Further, the resin composition of the present invention may contain an ultraviolet absorber, a polymerization inhibitor, a surfactant, an adhesion improver and the like, if necessary.
本発明の樹脂組成物中に紫外線吸収剤を含有することにより、耐光性を向上させ、解像度をより向上させることができる。紫外線吸収剤としては、透明性および非着色性の観点から、2-(2H-ベンゾトリアゾール-2-イル)フェノール、2-(2H-ベンゾトリアゾール-2-イル)-4,6-tert-ペンチルフェノール、2-(2H-ベンゾトリアゾール-2-イル)-4-(1,1,3,3-テトラメチルブチル)フェノール、2(2H-ベンゾトリアゾール-2-イル)-6-ドデシル-4-メチルフェノール、2-(2’-ヒドロキシ-5’-メタクリロキシエチルフェニル)-2H-ベンゾトリアゾールなどのベンゾトリアゾール系化合物;2-ヒドロキシ-4-メトキシベンゾフェノンなどのベンゾフェノン系化合物;2-(4,6-ジフェニル-1,3,5トリアジン-2-イル)-5-[(ヘキシル)オキシ]-フェノールなどのトリアジン系化合物などが好ましく用いられる。 By containing the ultraviolet absorber in the resin composition of the present invention, the light resistance can be improved and the resolution can be further improved. Examples of the ultraviolet absorber include 2- (2H-benzotriazole-2-yl) phenol and 2- (2H-benzotriazole-2-yl) -4,6-tert-pentyl from the viewpoint of transparency and non-coloring property. Phenol, 2- (2H-benzotriazole-2-yl) -4- (1,1,3,3-tetramethylbutyl) phenol, 2 (2H-benzotriazole-2-yl) -6-dodecyl-4- Benzotriazole-based compounds such as methylphenol, 2- (2'-hydroxy-5'-methacryloxyethylphenyl) -2H-benzotriazole; benzophenone-based compounds such as 2-hydroxy-4-methoxybenzophenone; 2- (4, 6-Diphenyl-1,3,5-triazine-2-yl) -5-[(hexyl) oxy] -triazole compounds such as phenol are preferably used.
本発明の樹脂組成物中に重合禁止剤を含有することにより、解像度をより向上させることができる。重合禁止剤としては、例えば、ジ-t-ブチルヒドロキシトルエン、ブチルヒドロキシアニソール、ハイドロキノン、4-メトキシフェノール、1,4-ベンゾキノン、t-ブチルカテコールが挙げられる。また、市販の重合禁止剤としては、“IRGANOX”(登録商標)1010、1035、1076、1098、1135、1330、1726、1425、1520、245、259、3114、565、295(以上、商品名、BASFジャパン(株)製)などが挙げられる。これらを2種以上含有してもよい。 By containing a polymerization inhibitor in the resin composition of the present invention, the resolution can be further improved. Examples of the polymerization inhibitor include di-t-butylhydroxytoluene, butylhydroxyanisole, hydroquinone, 4-methoxyphenol, 1,4-benzoquinone, and t-butylcatechol. In addition, as a commercially available polymerization inhibitor, "IRGANOX" (registered trademark) 1010, 1035, 1076, 1098, 1135, 1330, 1726, 1425, 1520, 245, 259, 3114, 565, 295 (above, trade name, trade name, BASF Japan Co., Ltd.) and the like. Two or more of these may be contained.
本発明の樹脂組成物中に界面活性剤を含有することにより、塗布時のフロー性を向上させることができる。界面活性剤としては、例えば、“メガファック”(登録商標)F142D、F172、F173、F183、F445、F470、F475、F477(以上、商品名、大日本インキ化学工業(株)製)、NBX-15、FTX-218(以上、商品名、(株)ネオス製)などのフッ素系界面活性剤;“BYK”(登録商標)-333、301、331、345、307(以上、商品名、ビックケミー・ジャパン(株)製)などのシリコーン系界面活性剤;ポリアルキレンオキシド系界面活性剤;ポリ(メタ)アクリレート系界面活性剤などが挙げられる。これらを2種以上含有してもよい。 By containing a surfactant in the resin composition of the present invention, the flowability at the time of coating can be improved. Examples of the surfactant include "Megafuck" (registered trademark) F142D, F172, F173, F183, F445, F470, F475, F477 (trade name, manufactured by Dainippon Ink and Chemicals Co., Ltd.), NBX-. 15. Fluorosurfactants such as FTX-218 (trade name, manufactured by Neos Co., Ltd.); "BYK" (registered trademark) -333, 301, 331, 345, 307 (trade name, Big Chemie. Silicone-based surfactants such as (manufactured by Japan Co., Ltd.); polyalkylene oxide-based surfactants; poly (meth) acrylate-based surfactants and the like can be mentioned. Two or more of these may be contained.
本発明の樹脂組成物中に密着性改良剤を含有することにより、下地基板との密着性が向上し、信頼性の高い隔壁を得ることができる。密着性改良剤としては、例えば、脂環式エポキシ化合物や、シランカップリング剤などが挙げられる。これらの中でも、脂環式エポキシ化合物は、耐熱性が高いことから、加熱後の色変化をより抑制することができる。 By containing the adhesion improving agent in the resin composition of the present invention, the adhesion with the underlying substrate is improved, and a highly reliable partition wall can be obtained. Examples of the adhesion improving agent include an alicyclic epoxy compound and a silane coupling agent. Among these, the alicyclic epoxy compound has high heat resistance, so that the color change after heating can be further suppressed.
脂環式エポキシ化合物としては、例えば、3’,4’-エポキシシクロヘキシメチル-3,4-エポキシシクロヘキサンカルボキシレート、2,2-ビス(ヒドロキシメチル)-1-ブタノールの1,2-エポキシ-4-(2-オキシラニル)シクロヘキサン付加物、ε-カプロラクトン変性3’,4’-エポキシシクロヘキシルメチル3’,4’-エポキシシクロヘキサンカルボキシレート、1,2-エポキシ-4-ビニルシクロヘキサン、ブタンテトラカルボン酸テトラ(3,4-エポキシシクロヘキシルメチル)修飾ε-カプロラクトン、3,4-エポキシシクロヘキシルメチルメタアクリレート、水添ビスフェノールAジグリシジルエーテル、水添ビスフェノールFジグリシジルエーテル、水添ビスフェノールEジグリシジルエーテル、水添ビスフェノールAビス(プロピレングリコールグリシジルエーテル)エーテル、水添ビスフェノールAビス(エチレングリコールグリシジルエーテル)エーテル、1,4-シクロヘキサンジカルボン酸ジグリシジル、1,4-シクロヘキサンジメタノールジグリシジルエーテル等が挙げられる。これらを2種以上含有してもよい。 Examples of the alicyclic epoxy compound include 3', 4'-epoxycycloheximethyl-3,4-epoxycyclohexanecarboxylate and 1,2-epoxy of 2,2-bis (hydroxymethyl) -1-butanol. 4- (2-oxylanyl) cyclohexane adduct, ε-caprolactone modified 3', 4'-epoxycyclohexylmethyl 3', 4'-epoxycyclohexanecarboxylate, 1,2-epoxy-4-vinylcyclohexane, butanetetracarboxylic acid Tetra (3,4-epoxycyclohexylmethyl) modified ε-caprolactone, 3,4-epoxycyclohexylmethylmethacrylate, hydrogenated bisphenol A diglycidyl ether, hydrogenated bisphenol F diglycidyl ether, hydrogenated bisphenol E diglycidyl ether, water Examples thereof include bisphenol A bis (propylene glycol glycidyl ether) ether, hydrogenated bisphenol A bis (ethylene glycol glycidyl ether) ether, diglycidyl 1,4-cyclohexanedicarboxylate, and 1,4-cyclohexanedimethanol diglycidyl ether. Two or more of these may be contained.
本発明の樹脂組成物中における密着性改良剤の含有量は、下地基板との密着性をより向上させる観点から、固形分中の0.1重量%以上が好ましく、1重量%以上がより好ましい。一方、密着性改良剤の含有量は、加熱による色変化をより抑制する観点から、固形分中の20重量%以下が好ましく、10重量%以下がより好ましい。 The content of the adhesion improver in the resin composition of the present invention is preferably 0.1% by weight or more, more preferably 1% by weight or more in the solid content from the viewpoint of further improving the adhesion to the underlying substrate. .. On the other hand, the content of the adhesion improving agent is preferably 20% by weight or less, and more preferably 10% by weight or less in the solid content from the viewpoint of further suppressing the color change due to heating.
本発明の樹脂組成物は、例えば、前述の樹脂、有機金属化合物、光重合開始剤またはキノンジアジド化合物、溶媒および必要に応じてその他成分を混合することにより製造することができる。 The resin composition of the present invention can be produced, for example, by mixing the above-mentioned resin, organometallic compound, photopolymerization initiator or quinonediazide compound, solvent and, if necessary, other components.
次に、本発明の遮光膜について説明する。本発明の遮光膜は、前述の本発明の樹脂組成物を硬化して得られる。本発明の遮光膜は、後述の隔壁(A-1)の他、カバー基材用加飾パターンなどのOGSタイプのタッチパネルにおける遮光パターンとして好適に用いることができる。遮光膜の膜厚は、10μm以上が好ましい。 Next, the light-shielding film of the present invention will be described. The light-shielding film of the present invention is obtained by curing the above-mentioned resin composition of the present invention. The light-shielding film of the present invention can be suitably used as a light-shielding pattern in an OGS type touch panel such as a decorative pattern for a cover base material, in addition to the partition wall (A-1) described later. The film thickness of the light-shielding film is preferably 10 μm or more.
次に、本発明の遮光膜の製造方法について、例を挙げて説明する。本発明の遮光膜の製造方法は、下地基板上に本発明の樹脂組成物を塗布し、乾燥して乾燥膜を得る製膜工程、得られた乾燥膜をパターン露光する露光工程、露光後の乾燥膜における現像液に可溶な部分を溶解除去する現像工程および現像後の乾燥膜を加熱することにより硬化させる加熱工程を有することが好ましい。 Next, the method for producing the light-shielding film of the present invention will be described with reference to an example. The method for producing a light-shielding film of the present invention includes a film-forming step of applying the resin composition of the present invention on a base substrate and drying to obtain a dry film, an exposure step of pattern-exposing the obtained dry film, and post-exposure. It is preferable to have a developing step of dissolving and removing a portion of the dried film that is soluble in the developing solution and a heating step of heating the developed dried film to cure it.
本発明の遮光膜の製造方法は、前記加熱工程において、現像後の膜を120℃以上250℃以下の温度で加熱することにより、膜厚10μmあたりのOD値を0.3以上上昇させることを特徴とする。加熱工程時の加熱温度は、OD値をより向上する観点から、150℃以上が好ましく、180℃以上がより好ましい。加熱工程時の加熱温度は、加熱する膜のクラック発生を抑制する観点から、250℃以下が好ましく、240℃以下がより好ましい。加熱時間は15分間~2時間が好ましい。本発明の樹脂組成物から形成される膜は、露光時にはOD値が低く、かつ、パターン形成後にOD値が上昇することから、露光工程においては底部まで十分に光硬化させて、後述の好ましいテーパー角度を有する隔壁を得ることができる。加えて、パターン形成後の、OD値が高いことから高い反射率と遮光性を両立した隔壁を得ることができる。 In the method for producing a light-shielding film of the present invention, the OD value per 10 μm film thickness is increased by 0.3 or more by heating the developed film at a temperature of 120 ° C. or higher and 250 ° C. or lower in the heating step. It is a feature. The heating temperature during the heating step is preferably 150 ° C. or higher, more preferably 180 ° C. or higher, from the viewpoint of further improving the OD value. The heating temperature during the heating step is preferably 250 ° C. or lower, more preferably 240 ° C. or lower, from the viewpoint of suppressing the generation of cracks in the film to be heated. The heating time is preferably 15 minutes to 2 hours. The film formed from the resin composition of the present invention has a low OD value at the time of exposure and an OD value increases after pattern formation. It is possible to obtain a partition wall having an angle. In addition, since the OD value is high after pattern formation, it is possible to obtain a partition wall having both high reflectance and light-shielding property.
前記製膜工程における樹脂組成物の塗布方法としては、例えば、スリットコート法、スピンコート法などが挙げられる。乾燥装置としては、例えば、熱風オーブンやホットプレートなどが挙げられる。乾燥時間は80~120℃が好ましく、乾燥時間は1~15分間が好ましい。 Examples of the method for applying the resin composition in the film forming step include a slit coating method and a spin coating method. Examples of the drying device include a hot air oven and a hot plate. The drying time is preferably 80 to 120 ° C., and the drying time is preferably 1 to 15 minutes.
露光工程は、露光により乾燥膜の必要な部分を光硬化させて、または、乾燥膜の不要な部分を光分解させて、乾燥膜の任意の部分を、現像液に可溶とする工程である。露光工程においては、所定の開口部を有するフォトマスクを介して露光してもよいし、フォトマスクを用いずに、レーザー光等を用いて任意のパターンを直接描画してもよい。 The exposure step is a step of photocuring a necessary part of the dry film by exposure or photodecomposing an unnecessary part of the dry film to make any part of the dry film soluble in a developing solution. .. In the exposure step, exposure may be performed through a photomask having a predetermined opening, or an arbitrary pattern may be directly drawn using a laser beam or the like without using a photomask.
露光装置としては、例えば、プロキシミティ露光機が挙げられる。露光工程において照射する活性光線としては、例えば、近赤外線、可視光線、紫外線が挙げられ、紫外線が好ましい。また、その光源としては、例えば、低圧水銀灯、高圧水銀灯、超高圧水銀灯、ハロゲンランプ、殺菌灯などが挙げられ、超高圧水銀灯が好ましい。 Examples of the exposure apparatus include a proximity exposure machine. Examples of the active light beam to be irradiated in the exposure step include near infrared rays, visible light rays, and ultraviolet rays, and ultraviolet rays are preferable. Examples of the light source include a low-pressure mercury lamp, a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a halogen lamp, a germicidal lamp, and the like, and an ultra-high pressure mercury lamp is preferable.
露光条件は露光する乾燥膜の厚さにより適宜選択することができる。一般的に、1~100mW/cm2の出力の超高圧水銀灯を用いて、1~10,000mJ/cm2の露光量で露光することが好ましい。 The exposure conditions can be appropriately selected depending on the thickness of the dry film to be exposed. Generally, it is preferable to use an ultrahigh pressure mercury lamp having an output of 1 to 100 mW / cm 2 and expose with an exposure amount of 1 to 10,000 mJ / cm 2 .
現像工程は、露光後の乾燥膜における現像液に可溶な部分を現像液で溶解除去して、現像液に不溶な部分のみが残存した、任意のパターン形状にパターン形成された乾燥膜(以下、加熱前パターンと呼ぶ)を得る工程である。パターン形状としては、例えば格子状、ストライプ状などの形状が挙げられる。 In the developing step, the portion of the dried film after exposure that is soluble in the developing solution is dissolved and removed with the developing solution, and only the portion that is insoluble in the developing solution remains. , Called a pre-heating pattern). Examples of the pattern shape include a grid shape and a striped shape.
現像方法としては、例えば、浸漬法、スプレー法、ブラシ法などが挙げられる。 Examples of the developing method include a dipping method, a spraying method, and a brushing method.
現像液としては、露光後の乾燥膜における不要な部分を溶解することが可能な溶媒を適宜選択することができ、水を主成分とする水溶液が好ましい。例えば、樹脂組成物がカルボキシル基を有するポリマーを含有する場合、現像液としては、アルカリ水溶液が好ましい。アルカリ水溶液としては、例えば、水酸化ナトリウム、水酸化カリウム、炭酸ナトリウム、水酸化カルシウム等の無機アルカリ水溶液;テトラメチルアンモニウムヒドロキサイド、トリメチルベンジルアンモニウムヒドロキサイド、モノエタノールアミン、ジエタノールアミン等の有機アルカリ水溶液などが挙げられる。これらの中でも、解像度を向上させる観点から、水酸化カリウム水溶液または水酸化テトラメチルアンモニウム水溶液が好ましい。アルカリ水溶液の濃度は、現像性を向上させる観点から、0.05重量%以上が好ましく、0.1重量%以上がより好ましい。一方、アルカリ水溶液の濃度は、加熱前パターンの剥離や腐食を抑制する観点から、5重量%以下が好ましく、1重量%以下がより好ましい。現像温度は、工程管理を容易にするため、20~50℃が好ましい。 As the developing solution, a solvent capable of dissolving an unnecessary portion of the dried film after exposure can be appropriately selected, and an aqueous solution containing water as a main component is preferable. For example, when the resin composition contains a polymer having a carboxyl group, an alkaline aqueous solution is preferable as the developing solution. Examples of the alkaline aqueous solution include inorganic alkaline aqueous solutions such as sodium hydroxide, potassium hydroxide, sodium carbonate and calcium hydroxide; and organic alkaline aqueous solutions such as tetramethylammonium hydroxide, trimethylbenzylammonium hydrogenoxide, monoethanolamine and diethanolamine. Can be mentioned. Among these, an aqueous solution of potassium hydroxide or an aqueous solution of tetramethylammonium hydroxide is preferable from the viewpoint of improving the resolution. The concentration of the alkaline aqueous solution is preferably 0.05% by weight or more, more preferably 0.1% by weight or more, from the viewpoint of improving developability. On the other hand, the concentration of the alkaline aqueous solution is preferably 5% by weight or less, more preferably 1% by weight or less, from the viewpoint of suppressing peeling and corrosion of the pattern before heating. The development temperature is preferably 20 to 50 ° C. for facilitating process control.
加熱工程は、現像工程で形成された加熱前パターンを加熱硬化させる工程である。加熱装置としては、例えば、ホットプレート、オーブン等が挙げられる。好ましい加熱温度および加熱時間は先述の通りである。 The heating step is a step of heating and curing the preheating pattern formed in the developing step. Examples of the heating device include a hot plate, an oven, and the like. The preferred heating temperature and heating time are as described above.
次に、本発明の隔壁付き基板について説明する。本発明の隔壁付き基板は、下地基板上に(A-1)パターン形成された隔壁(以下、「隔壁(A-1)」と記載する場合がある)を有する。下地基板は、隔壁付き基板における支持体としての機能を有する。隔壁は、後述する色変換発光材料を含有する画素を有する場合、隣接する画素間における光の混色を抑制する機能を有する。 Next, the substrate with a partition wall of the present invention will be described. The substrate with a partition wall of the present invention has a partition wall (hereinafter, may be referred to as “partition wall (A-1)”) in which a (A-1) pattern is formed on a base substrate. The base substrate has a function as a support in a substrate with a partition wall. When the partition wall has pixels containing a color conversion light emitting material described later, it has a function of suppressing color mixing of light between adjacent pixels.
本発明の隔壁付き基板において、隔壁(A-1)は、波長550nmにおける厚み10μmあたりの反射率が20%~60%、厚み10μmあたりのOD値が1.0~3.0であることを特徴とする。反射率を20%以上、OD値を3.0以下とすることにより、(A-1)隔壁側面における反射を利用して表示装置の輝度を向上させることができる。一方、反射率を60%以下、OD値を1.0以上とすることにより、隔壁(A-1)を透過する光を抑制して隣接画素間における光の混色を抑制することができる。 In the substrate with a partition wall of the present invention, the partition wall (A-1) has a reflectance of 20% to 60% per 10 μm thickness and an OD value of 1.0 to 3.0 per 10 μm thickness at a wavelength of 550 nm. It is a feature. By setting the reflectance to 20% or more and the OD value to 3.0 or less, the brightness of the display device can be improved by utilizing the reflection on the side surface of the (A-1) partition wall. On the other hand, by setting the reflectance to 60% or less and the OD value to 1.0 or more, it is possible to suppress the light transmitted through the partition wall (A-1) and suppress the color mixing of the light between adjacent pixels.
図1に、パターン形成された隔壁を有する本発明の隔壁付き基板の一態様の断面図を示す。下地基板1上に、パターン形成された隔壁2を有する。 FIG. 1 shows a cross-sectional view of one aspect of the substrate with a partition wall of the present invention having a pattern-formed partition wall. A patterned partition wall 2 is provided on the base substrate 1.
<下地基板>
下地基板としては、例えば、ガラス板、樹脂板、樹脂フイルムなどが挙げられる。ガラス板の材質としては、無アルカリガラスが好ましい。樹脂板および樹脂フイルムの材質としては、ポリエステル、(メタ)アクリルポリマ、透明ポリイミド、ポリエーテルスルフォン等が好ましい。ガラス板および樹脂板の厚みは、1mm以下が好ましく、0.8mm以下が好ましい。樹脂フイルムの厚みは、100μm以下が好ましい。
<Base substrate>
Examples of the base substrate include a glass plate, a resin plate, a resin film, and the like. As the material of the glass plate, non-alkali glass is preferable. As the material of the resin plate and the resin film, polyester, (meth) acrylic polymer, transparent polyimide, polyether sulfone and the like are preferable. The thickness of the glass plate and the resin plate is preferably 1 mm or less, preferably 0.8 mm or less. The thickness of the resin film is preferably 100 μm or less.
<隔壁(A-1)>
隔壁(A-1)は、波長550nmにおける厚み10μmあたりの反射率が20~60%、OD値が1.0~3.0であることを特徴とする。ここで、隔壁(A-1)の厚みとは、隔壁(A-1)の下地基板と垂直な方向(高さ方向)の長さを指す。図1に示す隔壁付き基板の場合、隔壁2の厚みは符号Hで表される。なお、隔壁(A-1)の下地基板と水平な方向の長さは、隔壁(A-1)の幅とする。図1に示す隔壁付き基板の場合、隔壁2の幅は符号Lで表される。
<Septum (A-1)>
The partition wall (A-1) is characterized by having a reflectance of 20 to 60% and an OD value of 1.0 to 3.0 per 10 μm thickness at a wavelength of 550 nm. Here, the thickness of the partition wall (A-1) refers to the length in the direction (height direction) perpendicular to the base substrate of the partition wall (A-1). In the case of the substrate with a partition wall shown in FIG. 1, the thickness of the partition wall 2 is represented by the reference numeral H. The length of the partition wall (A-1) in the horizontal direction with the base substrate is the width of the partition wall (A-1). In the case of the substrate with a partition wall shown in FIG. 1, the width of the partition wall 2 is represented by the reference numeral L.
本発明においては、隔壁側面における反射率が表示装置の輝度向上に、隔壁の遮光性が混色抑制に、それぞれ寄与すると考えられる。一方で、厚みあたりの反射率およびOD値は、厚み方向、幅方向によらず同じであると考えられるため、本発明においては、隔壁の厚みあたりの反射率およびOD値に着目する。なお、後述するとおり、隔壁(A-1)の厚みは0.5~50μmが好ましく、幅は5~40μmが好ましい。そこで、本発明においては、隔壁(A-1)の厚みの代表値として10μmを選択し、厚み10μmあたりの反射率およびOD値に着目した。 In the present invention, it is considered that the reflectance on the side surface of the partition wall contributes to the improvement of the brightness of the display device, and the light-shielding property of the partition wall contributes to the suppression of color mixing. On the other hand, since the reflectance and OD value per thickness are considered to be the same regardless of the thickness direction and the width direction, the present invention focuses on the reflectance and OD value per thickness of the partition wall. As will be described later, the thickness of the partition wall (A-1) is preferably 0.5 to 50 μm, and the width is preferably 5 to 40 μm. Therefore, in the present invention, 10 μm was selected as a representative value for the thickness of the partition wall (A-1), and attention was paid to the reflectance and the OD value per 10 μm thickness.
厚み10μmあたりの反射率が20%未満であると、隔壁側面における反射が小さくなり、表示装置の輝度が不十分となる。厚み10μmあたりの反射率は、30%以上が好ましく、35%以上がより好ましい。反射率が高いほど、隔壁側面における反射が大きくなるため、表示装置の輝度を向上できるが、反射率が60%を超えると、隣接画素間において光の混色が発生する。厚み10μmあたりの反射率は、44%以下がより好ましい。 If the reflectance per 10 μm thickness is less than 20%, the reflection on the side surface of the partition wall becomes small, and the brightness of the display device becomes insufficient. The reflectance per 10 μm thickness is preferably 30% or more, more preferably 35% or more. The higher the reflectance, the greater the reflection on the side surface of the partition wall, so that the brightness of the display device can be improved. However, when the reflectance exceeds 60%, color mixing of light occurs between adjacent pixels. The reflectance per 10 μm thickness is more preferably 44% or less.
また、厚み10μmあたりのOD値が1.0未満であると、隣接画素間において光の混色が発生する。厚み10μmあたりのOD値は、1.5以上が好ましく、2.0以上がより好ましい。一方、厚み10μmあたりのOD値が3.0を超えると、隔壁側面における反射が小さくなり、表示装置の輝度が不十分となる。厚み10μmあたりのOD値は、2.5以下がより好ましい。 Further, when the OD value per 10 μm thickness is less than 1.0, color mixing of light occurs between adjacent pixels. The OD value per 10 μm thickness is preferably 1.5 or more, more preferably 2.0 or more. On the other hand, when the OD value per 10 μm thickness exceeds 3.0, the reflection on the side surface of the partition wall becomes small, and the brightness of the display device becomes insufficient. The OD value per 10 μm thickness is more preferably 2.5 or less.
隔壁(A-1)の波長550nmにおける厚み10μmあたりの反射率は、厚み10μmの隔壁(A-1)について、上面から分光測色計(例えば、コニカミノルタ(株)製CM-2600d)を用いて、SCIモードにより測定することができる。ただし、測定に十分な面積を確保できない場合や、厚み10μmの測定サンプルが採取できない場合において、隔壁(A-1)の組成が既知である場合には、隔壁(A-1)と同組成の厚み10μmのベタ膜を作製し、隔壁(A-1)にかえてベタ膜について同様に反射率を測定することにより、厚み10μmあたりの反射率を求めてもよい。例えば、隔壁(A-1)を形成した材料を用いて、厚みを10μmとし、パターン形成しないこと以外は隔壁(A-1)の形成と同じ加工条件によりベタ膜を作製し、得られたベタ膜について、上面から、同様に反射率を測定してもよい。 For the reflectance of the partition wall (A-1) at a wavelength of 550 nm per 10 μm thickness, a spectrocolorimeter (for example, CM-2600d manufactured by Konica Minolta Co., Ltd.) was used from the upper surface of the partition wall (A-1) having a thickness of 10 μm. It can be measured by the SCI mode. However, if a sufficient area for measurement cannot be secured or a measurement sample with a thickness of 10 μm cannot be collected and the composition of the partition wall (A-1) is known, the composition is the same as that of the partition wall (A-1). The reflectance per 10 μm thickness may be obtained by preparing a solid film having a thickness of 10 μm and measuring the reflectance of the solid film in the same manner instead of the partition wall (A-1). For example, using a material on which the partition wall (A-1) is formed, a solid film is produced under the same processing conditions as the partition wall (A-1) except that the thickness is 10 μm and no pattern is formed, and the solid film is obtained. The reflectance of the film may be measured from the upper surface in the same manner.
隔壁(A-1)の厚み10μmあたりのOD値は、厚み10μmの隔壁(A-1)について、上面から光学濃度計(例えば、X-rite社製361T(visual))を用いて入射光および透過光の強度を測定し、下記式(1)により算出することができる。ただし、測定に十分な面積を確保できない場合や、厚み10μmの測定サンプルが採取できない場合において、隔壁(A-1)の組成が既知である場合には、反射率の測定と同様に、隔壁(A-1)と同組成の厚み10μmのベタ膜を作製し、隔壁(A-1)にかえてベタ膜について同様にOD値を測定することにより、厚み10μmあたりのOD値を求めてもよい。
OD値 = log10(I0/I) ・・・ (1)
I0 : 入射光強度
I : 透過光強度。
The OD value per 10 μm thickness of the partition wall (A-1) is determined by using an optical densitometer (for example, 361T (visual) manufactured by X-rite) from the upper surface of the partition wall (A-1) having a thickness of 10 μm. The intensity of transmitted light can be measured and calculated by the following formula (1). However, if a sufficient area for measurement cannot be secured, or if a measurement sample with a thickness of 10 μm cannot be collected and the composition of the partition wall (A-1) is known, the partition wall (as in the measurement of reflectance) A solid film having the same composition as A-1) and having a thickness of 10 μm may be prepared, and the OD value per 10 μm thickness may be obtained by measuring the OD value of the solid film in the same manner instead of the partition wall (A-1). ..
OD value = log10 (I 0 / I) ... (1)
I 0 : Incident light intensity I: Transmitted light intensity.
なお、反射率およびOD値を上記範囲にするための手段としては、例えば、隔壁(A-1)を後述する好ましい組成とすることなどが挙げられる。 As a means for setting the reflectance and the OD value in the above range, for example, the partition wall (A-1) may have a preferable composition described later.
隔壁(A-1)のテーパー角度は、45°~110°が好ましい。隔壁(A-1)のテーパー角度とは、隔壁断面の側辺と底辺とがなす角度を指す。図1に示す隔壁付き基板の場合、隔壁2のテーパー角度は符号θで表される。テーパー角度を45°以上とすることにより、隔壁(A-1)の上部と底部の幅の差が小さくなり、隔壁(A-1)の幅を後述する好ましい範囲に容易に形成することができる。テーパー角度は、70°以上がより好ましい。一方、テーパー角度を110°以下とすることにより、後述する(B)色変換発光材料を含有する画素を、インクジェット塗布により形成する際に、インクの決壊を抑制し、インクジェット塗布性を向上させることができる。ここで、インクの決壊とは、インクが隔壁を乗り越えて隣の画素部分に混入する現象のことを言う。テーパー角度は、95°以下がより好ましい。隔壁(A-1)のテーパー角度は、隔壁(A-1)の任意の断面を、光学顕微鏡(FE-SEM(例えば、(株)日立製作所製S-4800))を用いて、加速電圧3.0kV、倍率2,500倍で観察し、隔壁(A-1)の断面の側辺と底辺とがなす角度を測定することにより求めることができる。 The taper angle of the partition wall (A-1) is preferably 45 ° to 110 °. The taper angle of the partition wall (A-1) refers to the angle formed by the side surface and the bottom surface of the partition wall cross section. In the case of the substrate with a partition wall shown in FIG. 1, the taper angle of the partition wall 2 is represented by the reference numeral θ. By setting the taper angle to 45 ° or more, the difference in width between the top and bottom of the partition wall (A-1) becomes small, and the width of the partition wall (A-1) can be easily formed in a preferable range described later. .. The taper angle is more preferably 70 ° or more. On the other hand, by setting the taper angle to 110 ° or less, when the pixels containing the color conversion light emitting material (B) described later are formed by inkjet coating, the ink breakage is suppressed and the inkjet coating property is improved. Can be done. Here, the ink breakage refers to a phenomenon in which the ink gets over the partition wall and mixes with the adjacent pixel portion. The taper angle is more preferably 95 ° or less. The taper angle of the partition wall (A-1) is an acceleration voltage 3 using an optical microscope (FE-SEM (for example, S-4800 manufactured by Hitachi, Ltd.)) for any cross section of the partition wall (A-1). It can be obtained by observing at 0.0 kV and a magnification of 2,500 and measuring the angle between the side and the bottom of the cross section of the partition wall (A-1).
なお、隔壁(A-1)のテーパー角度を上記範囲にするための手段としては、例えば、隔壁(A-1)を後述する好ましい組成とすること、前述の本発明の樹脂組成物を用いて形成することなどが挙げられる。 As a means for setting the taper angle of the partition wall (A-1) in the above range, for example, the partition wall (A-1) has a preferable composition described later, and the above-mentioned resin composition of the present invention is used. For example, forming.
隔壁(A-1)の厚みは、隔壁付き基板が後述する(B)色変換発光材料を含有する画素を有する場合には、その画素の厚みよりも大きいことが好ましい。具体的には、隔壁(A-1)の厚みは、0.5μm以上が好ましく、10μm以上がより好ましい。一方、画素底部における発光をより効率良く取り出す観点から、隔壁(A-1)の厚みは、50μm以下が好ましく、20μm以下がより好ましい。また、隔壁(A-1)の幅は、隔壁側面における光反射を利用し輝度をより向上させ、光漏れによる隣接画素における光の混色をより抑制するために十分なものであることが好ましい。具体的には、隔壁の幅は、5μm以上が好ましく、15μm以上がより好ましい。一方、画素の発光領域を多く確保して輝度をより向上させる観点から、隔壁(A-1)の幅は、50μm以下が好ましく、40μm以下がより好ましい。 When the substrate with a partition wall has pixels containing the color conversion light emitting material (B) described later, the thickness of the partition wall (A-1) is preferably larger than the thickness of the pixels. Specifically, the thickness of the partition wall (A-1) is preferably 0.5 μm or more, more preferably 10 μm or more. On the other hand, from the viewpoint of more efficiently extracting light emitted from the bottom of the pixel, the thickness of the partition wall (A-1) is preferably 50 μm or less, more preferably 20 μm or less. Further, it is preferable that the width of the partition wall (A-1) is sufficient to further improve the brightness by utilizing the light reflection on the side surface of the partition wall and further suppress the color mixing of light in the adjacent pixels due to light leakage. Specifically, the width of the partition wall is preferably 5 μm or more, more preferably 15 μm or more. On the other hand, the width of the partition wall (A-1) is preferably 50 μm or less, more preferably 40 μm or less, from the viewpoint of securing a large light emitting region of the pixel and further improving the brightness.
隔壁(A-1)は、画像表示装置の画面サイズに応じた所定画素数分の繰り返しパターンを有している。画像表示装置の画素数としては、例えば、横に4000個、縦に2000個が挙げられる。画素数は、表示される画像の解像度(きめ細かさ)に影響する。そのため、要求される画像の解像度と画像表示装置の画面サイズに応じた数の画素を形成する必要があり、それに併せて、隔壁のパターン形成寸法を決定することが好ましい。 The partition wall (A-1) has a repeating pattern for a predetermined number of pixels according to the screen size of the image display device. Examples of the number of pixels of the image display device include 4000 in the horizontal direction and 2000 in the vertical direction. The number of pixels affects the resolution (fineness) of the displayed image. Therefore, it is necessary to form a number of pixels according to the required image resolution and the screen size of the image display device, and it is preferable to determine the pattern formation dimension of the partition wall accordingly.
隔壁(A-1)は、樹脂と、白色顔料と、酸化パラジウム、酸化白金、酸化金、酸化銀、パラジウム、白金、金および銀からなる群より選ばれる少なくとも1種の金属酸化物または金属からなる粒子(以下、「金属酸化物粒子または金属粒子」と記載する場合がある)とを含有することが好ましい。樹脂は、隔壁のクラック耐性および耐光性を向上させる機能を有する。白色顔料は、隔壁の反射率をより向上させる機能を有する。金属酸化物粒子または金属粒子は、OD値を調整し、隣接画素における光の混色を抑制する機能を有する。 The partition wall (A-1) is made of a resin, a white pigment, and at least one metal oxide or metal selected from the group consisting of palladium oxide, platinum oxide, gold oxide, silver oxide, palladium, platinum, gold and silver. (Hereinafter, it may be referred to as "metal oxide particles or metal particles"). The resin has a function of improving the crack resistance and light resistance of the partition wall. The white pigment has a function of further improving the reflectance of the partition wall. The metal oxide particles or metal particles have a function of adjusting the OD value and suppressing color mixing of light in adjacent pixels.
樹脂と白色顔料は、樹脂組成物を構成する材料として先に説明した通りである。隔壁(A-1)中の樹脂の含有量は、熱処理における隔壁のクラック耐性を向上させる観点から、10重量%以上が好ましく、20重量%以上がより好ましい。一方、耐光性を向上させる観点から、隔壁(A-1)中の樹脂の含有量は、60重量%以下が好ましく、50重量%以下がより好ましい。 The resin and the white pigment are as described above as the materials constituting the resin composition. The content of the resin in the partition wall (A-1) is preferably 10% by weight or more, more preferably 20% by weight or more, from the viewpoint of improving the crack resistance of the partition wall in the heat treatment. On the other hand, from the viewpoint of improving the light resistance, the content of the resin in the partition wall (A-1) is preferably 60% by weight or less, more preferably 50% by weight or less.
隔壁(A-1)中の白色顔料の含有量は、反射率をより向上させる観点から、20重量%以上が好ましく、30重量%以上がより好ましい。一方、隔壁の表面平滑性を向上させる観点から、隔壁(A-1)中の白色顔料の含有量は、60重量%以下が好ましく、55重量%以下がより好ましい。 The content of the white pigment in the partition wall (A-1) is preferably 20% by weight or more, more preferably 30% by weight or more, from the viewpoint of further improving the reflectance. On the other hand, from the viewpoint of improving the surface smoothness of the partition wall, the content of the white pigment in the partition wall (A-1) is preferably 60% by weight or less, more preferably 55% by weight or less.
金属酸化物粒子または金属粒子は、先述した樹脂組成物中の有機金属化合物が露光工程および/または加熱工程において、分解・凝集することにより発生した黒色粒子または黄色粒子を指す。隔壁(A-1)中の金属酸化物粒子または金属粒子の含有量は、反射率およびODを前述の範囲に調整して隣接画素における光の混色をより抑制する観点から、0.2重量%以上が好ましく、0.5重量%以上がより好ましい。一方、反射率およびODを前述の範囲に調整する観点から、隔壁(A-1)中の金属酸化物粒子または金属粒子の含有量は、5重量%以下が好ましく、3重量%以下がより好ましい。 The metal oxide particles or metal particles refer to black particles or yellow particles generated by decomposition and aggregation of the organic metal compound in the resin composition described above in the exposure step and / or the heating step. The content of the metal oxide particles or the metal particles in the partition wall (A-1) is 0.2% by weight from the viewpoint of adjusting the reflectance and OD to the above-mentioned ranges and further suppressing the color mixing of light in the adjacent pixels. The above is preferable, and 0.5% by weight or more is more preferable. On the other hand, from the viewpoint of adjusting the reflectance and OD within the above-mentioned ranges, the content of the metal oxide particles or the metal particles in the partition wall (A-1) is preferably 5% by weight or less, more preferably 3% by weight or less. ..
隔壁(A-1)は、さらに撥液化合物を含有することが好ましい。撥液化合物を含有することにより、隔壁(A-1)に撥液性能を付与することができ、例えば、後述する(B)色変換発光材料を含有する画素を形成する際に、それぞれの画素に、組成の異なる色変換発光材料を、容易に塗り分けることができる。撥液化合物は、樹脂組成物を構成する材料として先述した通りである。 The partition wall (A-1) preferably further contains a liquid repellent compound. By containing the liquid-repellent compound, the partition wall (A-1) can be imparted with liquid-repellent performance. For example, when forming a pixel containing the color conversion light emitting material (B) described later, each pixel is formed. In addition, color-converting light-emitting materials having different compositions can be easily applied separately. The liquid-repellent compound is as described above as a material constituting the resin composition.
隔壁の撥液性能を向上させ、インクジェット塗布性を向上させる観点から、隔壁(A-1)中の撥液化合物の含有量は、0.01重量%以上が好ましく、0.1重量%以上がより好ましい。一方、樹脂や白色顔料との相溶性を向上させる観点から、隔壁(A-1)中の撥液化合物の含有量は、10重量%以下が好ましく、5重量%以下がより好ましい。 From the viewpoint of improving the liquid-repellent performance of the partition wall and improving the inkjet coating property, the content of the liquid-repellent compound in the partition wall (A-1) is preferably 0.01% by weight or more, preferably 0.1% by weight or more. More preferred. On the other hand, from the viewpoint of improving the compatibility with the resin and the white pigment, the content of the liquid-repellent compound in the partition wall (A-1) is preferably 10% by weight or less, more preferably 5% by weight or less.
隔壁(A-1)の、プロピレングリコールモノメチルエーテルアセテートに対する表面接触角は、インクジェット塗布性を向上させ、色変換発光材料の塗り分けを容易にする観点から、10°以上が好ましく、20°以上がより好ましく、40°以上がさらに好ましい。一方、隔壁と下地基板との密着性を向上させる観点から、隔壁(A-1)の表面接触角は、70°以下が好ましく、60°以下がより好ましい。ここで、隔壁(A-1)の表面接触角は、隔壁上部に対して、JIS R3257(制定年月日=1999/04/20)に規定される基板ガラス表面のぬれ性試験方法に準拠して測定することができる。なお、隔壁(A-1)の表面接触角を前記範囲にする方法としては、例えば、前述の撥液化合物を用いる方法などが挙げられる。 The surface contact angle of the partition wall (A-1) with respect to propylene glycol monomethyl ether acetate is preferably 10 ° or more, preferably 20 ° or more, from the viewpoint of improving the inkjet coatability and facilitating the separation of color conversion light emitting materials. More preferably, 40 ° or more is further preferable. On the other hand, from the viewpoint of improving the adhesion between the partition wall and the base substrate, the surface contact angle of the partition wall (A-1) is preferably 70 ° or less, more preferably 60 ° or less. Here, the surface contact angle of the partition wall (A-1) conforms to the wettability test method of the substrate glass surface specified in JIS R3257 (establishment date = 1999/04/20) with respect to the upper part of the partition wall. Can be measured. As a method for setting the surface contact angle of the partition wall (A-1) in the above range, for example, a method using the above-mentioned liquid repellent compound and the like can be mentioned.
下地基板上に隔壁(A-1)をパターン形成する方法としては、パターン形状の調整が容易であることから、感光性ペースト法が好ましい。感光性ペースト法により隔壁をパターン形成する方法としては、例えば、下地基板上に、前述の樹脂組成物を塗布し、乾燥して乾燥膜を得る塗布工程、得られた乾燥膜を、所望のパターン形状に応じてパターン露光する露光工程、露光後の乾燥膜における現像液に可溶な部分を溶解除去する現像工程および現像後の隔壁を硬化させる加熱工程を有する方法が好ましい。樹脂組成物は、ポジ型またはネガ型の感光性を持たせることが好ましい。パターン露光は、所定の開口部を有するフォトマスクを介して露光してもよいし、フォトマスクを用いずに、レーザー光等を用いて任意のパターンを直接描画してもよい。なお、隔壁付き基板が後述する遮光隔壁(A-2)を有する場合は、遮光隔壁(A-2)上に、同様にして隔壁(A-1)をパターン形成することができる。各工程については、遮光膜の製造方法として先に説明した通りである。 As a method for forming the partition wall (A-1) on the base substrate in a pattern, the photosensitive paste method is preferable because the pattern shape can be easily adjusted. As a method for forming a pattern of the partition wall by the photosensitive paste method, for example, a coating step of applying the above-mentioned resin composition on a base substrate and drying to obtain a dry film, and a desired pattern of the obtained dry film. A method having an exposure step of pattern exposure according to the shape, a development step of dissolving and removing a portion soluble in a developer in the dried film after exposure, and a heating step of curing the partition wall after development is preferable. The resin composition preferably has positive or negative photosensitive properties. The pattern exposure may be performed through a photomask having a predetermined opening, or an arbitrary pattern may be directly drawn using a laser beam or the like without using a photomask. When the substrate with a partition wall has a light-shielding partition wall (A-2) described later, the partition wall (A-1) can be similarly patterned on the light-shielding partition wall (A-2). Each step is as described above as a method for manufacturing a light-shielding film.
<遮光隔壁(A-2)>
本発明の隔壁付き基板は、前記下地基板と(A-1)パターン形成された隔壁との間に、さらに、さらに、(A-2)厚み1.0μmあたりのOD値が0.5以上である、パターン形成された隔壁(以下、「遮光隔壁(A-2)」と記載する場合がある)を有することが好ましい。遮光隔壁(A-2)を有することにより、遮光性を向上させて表示装置におけるバックライトの光漏れを抑制し、高コントラストで鮮明な画像を得ることができる。
<Shading partition (A-2)>
The substrate with a partition wall of the present invention has an OD value of 0.5 or more per (A-2) thickness of 1.0 μm between the base substrate and the partition wall on which the pattern is formed (A-1). It is preferable to have a certain patterned partition wall (hereinafter, may be referred to as "light-shielding partition wall (A-2)"). By having the light-shielding partition wall (A-2), it is possible to improve the light-shielding property, suppress the light leakage of the backlight in the display device, and obtain a high-contrast and clear image.
図6に、遮光隔壁を有する本発明の隔壁付き基板の一態様を示す断面図を示す。下地基板1上に、パターン形成された隔壁2および遮光隔壁7を有し、隔壁2および遮光隔壁7によって隔てられた領域に画素3が配列されている。 FIG. 6 shows a cross-sectional view showing an aspect of the substrate with a partition wall of the present invention having a light-shielding partition wall. A patterned partition wall 2 and a light-shielding partition wall 7 are provided on the base substrate 1, and pixels 3 are arranged in a region separated by the partition wall 2 and the light-shielding partition wall 7.
遮光隔壁(A-2)は、厚み1.0μmあたりのOD値が0.5以上である。ここで、遮光隔壁(A-2)の厚みは、後述するとおり、0.5~10μmが好ましい。そこで、本発明においては、隔壁(A-2)の厚みの代表値として1.0μmを選択し、厚み1.0μmあたりのOD値に着目した。厚み1.0μmあたりのOD値を0.5以上とすることにより、遮光性をより向上させ、より高コントラストで鮮明な画像を得ることができる。厚み1.0μmあたりのOD値は、1.0以上がより好ましい。一方、厚み1.0μmあたりのOD値は4.0以下が好ましく、パターン加工性を向上させることができる。厚み1.0μmあたりのOD値は、3.0以下がより好ましい。遮光隔壁(A-2)のOD値は、前述の隔壁(A-1)のOD値と同様に測定することができる。なお、OD値を上記範囲にするための手段としては、例えば、遮光隔壁(A-2)を後述する好ましい組成とすることなどが挙げられる。 The light-shielding partition wall (A-2) has an OD value of 0.5 or more per 1.0 μm in thickness. Here, the thickness of the light-shielding partition wall (A-2) is preferably 0.5 to 10 μm as described later. Therefore, in the present invention, 1.0 μm was selected as the representative value of the thickness of the partition wall (A-2), and attention was paid to the OD value per 1.0 μm thickness. By setting the OD value per 1.0 μm thickness to 0.5 or more, the light-shielding property can be further improved and a clear image with higher contrast can be obtained. The OD value per 1.0 μm thickness is more preferably 1.0 or more. On the other hand, the OD value per 1.0 μm thickness is preferably 4.0 or less, and the pattern processability can be improved. The OD value per 1.0 μm thickness is more preferably 3.0 or less. The OD value of the light-shielding partition wall (A-2) can be measured in the same manner as the OD value of the partition wall (A-1) described above. As a means for setting the OD value in the above range, for example, the light-shielding partition wall (A-2) may have a preferable composition described later.
遮光隔壁(A-2)の厚みは、遮光性を向上させる観点から、0.5μm以上が好ましく、1.0μm以上がより好ましい。一方、平坦性を向上させる観点から、遮光隔壁(A-2)の厚みは、10μm以下が好ましく、5μm以下がより好ましい。また、遮光隔壁(A-2)の幅は、前述の隔壁(A-1)と同程度が好ましい。 The thickness of the light-shielding partition wall (A-2) is preferably 0.5 μm or more, more preferably 1.0 μm or more, from the viewpoint of improving the light-shielding property. On the other hand, from the viewpoint of improving the flatness, the thickness of the light-shielding partition wall (A-2) is preferably 10 μm or less, more preferably 5 μm or less. Further, the width of the light-shielding partition wall (A-2) is preferably about the same as that of the above-mentioned partition wall (A-1).
遮光隔壁(A-2)は、樹脂および黒色顔料を含有することが好ましい。樹脂は、隔壁のクラック耐性および耐光性を向上させる機能を有する。黒色顔料は、入射した光を吸収し、射出光を低減する機能を有する。 The light-shielding partition wall (A-2) preferably contains a resin and a black pigment. The resin has a function of improving the crack resistance and light resistance of the partition wall. The black pigment has a function of absorbing incident light and reducing emitted light.
樹脂としては、例えば、エポキシ樹脂、(メタ)アクリルポリマ、ポリウレタン、ポリエステル、ポリイミド、ポリオレフィン、ポリシロキサンなどが挙げられる。これらを2種以上含有してもよい。これらの中でも、耐熱性および溶媒耐性に優れることから、ポリイミドが好ましい。 Examples of the resin include epoxy resins, (meth) acrylic polymers, polyurethanes, polyesters, polyimides, polyolefins, polysiloxanes, and the like. Two or more of these may be contained. Among these, polyimide is preferable because it has excellent heat resistance and solvent resistance.
黒色顔料としては、前述の樹脂組成物中における黒色顔料として例示したものや、酸化パラジウム、酸化白金、酸化金、酸化銀などが挙げられる。高い遮光性を有することから、窒化チタン、窒化ジルコニウム、カーボンブラック、酸化パラジウム、酸化白金、酸化金および酸化銀から選ばれた黒色顔料が好ましい。 Examples of the black pigment include those exemplified as the black pigment in the above-mentioned resin composition, palladium oxide, platinum oxide, gold oxide, silver oxide and the like. A black pigment selected from titanium nitride, zirconium nitride, carbon black, palladium oxide, platinum oxide, gold oxide and silver oxide is preferable because of its high light-shielding property.
下地基板上に遮光隔壁(A-2)をパターン形成する方法としては、例えば、特開2015-1654号公報に記載の感光性材料を用いて、前述の隔壁(A-1)と同様に感光性ペースト法によりパターン形成する方法が好ましい。 As a method for forming a pattern of the light-shielding partition wall (A-2) on the base substrate, for example, a photosensitive material described in JP-A-2015-1654 is used, and the light-shielding partition wall (A-1) is exposed to light in the same manner as the above-mentioned partition wall (A-1). A method of forming a pattern by the sex paste method is preferable.
本発明の隔壁付き基板は、さらに、前記隔壁(A-1)によって隔てられて配列した(B)色変換発光材料を含有する画素(以下、「画素(B)」と記載する場合がある)を有することが好ましい。画素(B)は、入射光の波長領域の少なくとも一部を変換して、入射光とは異なる波長領域の出射光を放出することにより、カラー表示を可能にする機能を有する。 The substrate with a partition wall of the present invention further includes pixels (hereinafter, may be referred to as “pixels (B)”) containing (B) color conversion light emitting materials arranged separated by the partition wall (A-1). It is preferable to have. The pixel (B) has a function of converting at least a part of the wavelength region of the incident light and emitting the emitted light in the wavelength region different from the incident light to enable color display.
図2に、パターン形成された隔壁(A-1)と色変換発光材料を含有する画素(B)を有する本発明の隔壁付き基板の一態様の断面図を示す。下地基板1上に、パターン形成された隔壁2を有し、隔壁2によって隔てられた領域に画素3が配列されている。 FIG. 2 shows a cross-sectional view of one aspect of the substrate with a partition wall of the present invention having a pattern-formed partition wall (A-1) and a pixel (B) containing a color conversion light emitting material. A pattern-formed partition wall 2 is provided on the base substrate 1, and pixels 3 are arranged in a region separated by the partition wall 2.
色変換材料は、無機蛍光体および有機蛍光体から選ばれた蛍光体を含有することが好ましい。 The color conversion material preferably contains a fluorescent substance selected from an inorganic fluorescent substance and an organic fluorescent substance.
本発明の隔壁付き基板は、例えば、青色光を発光するバックライトとTFT上に形成された液晶と画素(B)を組み合わせて、表示装置として用いることができる。この場合、赤色画素に対応する領域には、青色の励起光により励起されて赤色の蛍光を発する赤色用蛍光体を含有することが好ましい。同様に、緑色画素に対応する領域には、青色の励起光により励起されて緑色の蛍光を発する緑色用蛍光体を含有することが好ましい。青色画素に対応する領域には、蛍光体を含有しないことが好ましい。 The substrate with a partition wall of the present invention can be used as a display device by combining, for example, a backlight that emits blue light, a liquid crystal crystal formed on the TFT, and a pixel (B). In this case, it is preferable that the region corresponding to the red pixel contains a red phosphor that is excited by the blue excitation light and emits red fluorescence. Similarly, the region corresponding to the green pixel preferably contains a green phosphor that is excited by the blue excitation light and emits green fluorescence. It is preferable that the region corresponding to the blue pixel does not contain a phosphor.
基板上に白色の隔壁によって分離された、各画素に対応した青色LEDを多数並べた青色マイクロLEDをバックライトとして用いる方式の表示装置にも、本発明の隔壁付き基板を用いることができる。各画素のON/OFFは、青色マイクロLEDのON/OFFによって可能となり、液晶は必要ない。本発明の隔壁付き基板は、各画素を分離する隔壁と、バックライトにおいて青色マイクロLEDを分離する隔壁のいずれにも用いることができる。 The substrate with a partition wall of the present invention can also be used for a display device of a system in which a large number of blue LEDs corresponding to each pixel are arranged on a substrate separated by a white partition wall and a blue micro LED is used as a backlight. Each pixel can be turned on / off by turning on / off the blue micro LED, and no liquid crystal display is required. The substrate with a partition wall of the present invention can be used for both a partition wall for separating each pixel and a partition wall for separating a blue micro LED in a backlight.
無機蛍光体としては、青色の励起光により緑色や赤色などの各色を発光するもの、すなわち、波長400~500nmの励起光により励起され、発光スペクトルが500~700nmの領域にピークを有するものが好ましい。かかる無機蛍光体としては、例えば、YAG系蛍光体、TAG系蛍光体、サイアロン系蛍光体、Mn4+付活フッ化物錯体蛍光体、量子ドットと称される無機半導体等が挙げられる。これらを2種以上用いてもよい。これらの中でも、量子ドットが好ましい。量子ドットは他の蛍光体に比較して平均粒子径が小さいことから、(B)画素の表面を平滑化して表面における光散乱を抑制することができるため、光の取り出し効率をより向上させ、輝度をより向上させることができる。 As the inorganic phosphor, one that emits each color such as green or red by the excitation light of blue, that is, one that is excited by the excitation light having a wavelength of 400 to 500 nm and has a peak in the emission spectrum in the region of 500 to 700 nm is preferable. .. Examples of such inorganic phosphors include YAG-based phosphors, TAG-based phosphors, sialon-based phosphors, Mn 4+ activated fluoride complex phosphors, and inorganic semiconductors called quantum dots. Two or more of these may be used. Among these, quantum dots are preferable. Since quantum dots have a smaller average particle size than other phosphors, (B) the surface of the pixel can be smoothed and light scattering on the surface can be suppressed, so that the light extraction efficiency can be further improved. The brightness can be further improved.
量子ドットとしては、例えば、II-IV族、III-V族、IV-VI族、IV族の半導体などからなる粒子が挙げられる。これらの無機半導体としては、例えば、Si、Ge、Sn、Se、Te、B、C(ダイアモンドを含む)、P、BN、BP、BAs、AlN、AlP、AlAs、AlSb、GaN、GaP、GaAs、GaSb、InN、InP、InAs、InSb、ZnO、ZnS、ZnSe、ZnTe、CdS、CdSe、CdSeZn、CdTe、HgS、HgSe、HgTe、BeS、BeSe、BeTe、MgS、MgSe、GeS、GeSe、GeTe、SnS、SnSe、SnTe、PbO、PbS、PbSe、PbTe、CuF、CuCl、CuBr、CuI、Si3N4、Ge3N4、Al2O3などが挙げられる。これらを2種以上用いてもよい。 Examples of the quantum dots include particles made of group II-IV, group III-V, group IV-VI, and group IV semiconductors. Examples of these inorganic semiconductors include Si, Ge, Sn, Se, Te, B, C (including diamond), P, BN, BP, BAs, AlN, AlP, AlAs, AlSb, GaN, GaP, GaAs, and the like. GaSb, InN, InP, InAs, InSb, ZnO, ZnS, ZnSe, ZnTe, CdS, CdSe, CdSeZn, CdTe, HgS, HgSe, HgTe, BeS, BeSe, BeTe, MgS, MgSe, GeS, GeS Examples thereof include SnSe, SnTe, PbO, PbS, PbSe, PbTe, CuF, CuCl, CuBr, CuI, Si 3 N 4 , Ge 3 N 4 , and Al 2 O 3 . Two or more of these may be used.
量子ドットは、p型ドーパントまたはn型ドーパントを含有してもよい。また、量子ドットは、コアシェル構造を有してもよい。コアシェル構造においては、シェルの周囲に目的に応じて任意の適切な機能層(単一層または複数層)が形成されていてもよく、シェル表面に表面処理および/または化学修飾がなされていてもよい。 The quantum dots may contain a p-type dopant or an n-type dopant. Further, the quantum dots may have a core-shell structure. In the core-shell structure, any suitable functional layer (single layer or multiple layers) may be formed around the shell depending on the purpose, and the shell surface may be surface-treated and / or chemically modified. ..
量子ドットの形状としては、例えば、球状、柱状、燐片状、板状、不定形等が挙げられる。量子ドットの平均粒子径は、所望の発光波長に応じて任意に選択することができ、1~30nmが好ましい。量子ドットの平均粒子径が1~10nmであれば、青色、緑色および赤色のそれぞれにおいて、発光スペクトルにおけるピークをよりシャープにすることができる。量子ドットの平均粒子径は2nm以上が好ましく、8nm以下が好ましい。例えば、量子ドットの平均粒子径が約2nmの場合には青色光を、約3nmの場合には緑色光を、約6nmの場合には赤色光を発光する。量子ドットの平均粒子径は、動的光散乱法により測定することができる。平均粒子径の測定装置としては、ダイナミック光散乱光度計DLS-8000(大塚電子(株)製)などが挙げられる。 Examples of the shape of the quantum dot include a spherical shape, a columnar shape, a flaky shape, a plate shape, an amorphous shape, and the like. The average particle size of the quantum dots can be arbitrarily selected according to the desired emission wavelength, and is preferably 1 to 30 nm. When the average particle size of the quantum dots is 1 to 10 nm, the peak in the emission spectrum can be sharpened in each of blue, green and red. The average particle size of the quantum dots is preferably 2 nm or more, and preferably 8 nm or less. For example, when the average particle size of the quantum dots is about 2 nm, blue light is emitted, when it is about 3 nm, green light is emitted, and when it is about 6 nm, red light is emitted. The average particle size of the quantum dots can be measured by a dynamic light scattering method. Examples of the device for measuring the average particle size include a dynamic light scattering photometer DLS-8000 (manufactured by Otsuka Electronics Co., Ltd.).
有機蛍光体としては、青色の励起光により緑色や赤色などの各色を発光するものが好ましい。赤色の蛍光を発する蛍光体として、下記構造式(8)で表される基本骨格を有するピロメテン誘導体、緑色の蛍光を発する蛍光体として、下記構造式(9)で表される基本骨格を有するピロメテン誘導体などが挙げられる。その他には、置換基の選択により赤色または緑色の蛍光を発するペリレン系誘導体、ポルフィリン系誘導体、オキサジン系誘導体、ピラジン系誘導体などが挙げられる。これらを2種以上含有してもよい。これらの中でも、量子収率が高いことから、ピロメテン誘導体が好ましい。ピロメテン誘導体は、例えば、特開2011-241160号公報に記載の方法により得ることができる。 As the organic phosphor, one that emits each color such as green or red by the excitation light of blue is preferable. As a phosphor that emits red fluorescence, a pyrromethene derivative having a basic skeleton represented by the following structural formula (8), and as a phosphor that emits green fluorescence, pyrromethene having a basic skeleton represented by the following structural formula (9). Examples include derivatives. Other examples include perylene-based derivatives, porphyrin-based derivatives, oxazine-based derivatives, and pyrazine-based derivatives that emit red or green fluorescence depending on the selection of the substituent. Two or more of these may be contained. Among these, a pyrromethene derivative is preferable because of its high quantum yield. The pyrromethene derivative can be obtained, for example, by the method described in JP-A-2011-241160.
有機蛍光体は溶媒に可溶なため、所望の厚みの画素(B)を容易に形成することができる。 Since the organic phosphor is soluble in a solvent, pixels (B) having a desired thickness can be easily formed.
画素(B)の厚みは、色特性を向上させる観点から、0.5μm以上が好ましく、1μm以上がより好ましい。一方、画素(B)の厚みは、表示装置の薄型化や曲面加工性の観点から、30μm以下が好ましく、20μm以下がより好ましい。 The thickness of the pixel (B) is preferably 0.5 μm or more, more preferably 1 μm or more, from the viewpoint of improving the color characteristics. On the other hand, the thickness of the pixel (B) is preferably 30 μm or less, more preferably 20 μm or less, from the viewpoint of thinning the display device and workability of curved surfaces.
各画素(B)の大きさは、20~200μm程度が一般的である。 The size of each pixel (B) is generally about 20 to 200 μm.
画素(B)は、隔壁(A-1)によって隔てられて配列していることが好ましい。画素と画素の間に隔壁を設けることにより、発光した光の拡散や混色をより抑制することができる。 The pixels (B) are preferably arranged separated by a partition wall (A-1). By providing a partition wall between the pixels, it is possible to further suppress the diffusion and color mixing of the emitted light.
画素(B)の形成方法としては、例えば、色変換発光材料を含有する塗液(以下、色変換発光材料塗液)を、隔壁(A-1)によって隔てられた空間に充填する方法が挙げられる。色変換発光材料塗液は、さらに樹脂や溶媒を含有してもよい。 Examples of the method for forming the pixels (B) include a method of filling a space separated by a partition wall (A-1) with a coating liquid containing a color conversion light emitting material (hereinafter referred to as a color conversion light emitting material coating liquid). Be done. The color conversion light emitting material coating liquid may further contain a resin or a solvent.
色変換発光材料塗液の充填方法としては、各画素に種類の異なる色変換発光材料を容易に塗り分ける観点から、インクジェット塗布法などが好ましい。 As a method for filling the color-converting light-emitting material coating liquid, an inkjet coating method or the like is preferable from the viewpoint of easily applying different types of color-converting light-emitting materials to each pixel.
得られた塗布膜を減圧乾燥および/または加熱乾燥してもよい。減圧乾燥する場合、乾燥溶媒が減圧チャンバー内壁に再凝縮することを防ぐために、減圧乾燥温度は、80℃以下が好ましい。減圧乾燥の圧力は、塗布膜に含まれる溶媒の蒸気圧以下が好ましく、1~1000Paが好ましい。減圧乾燥時間は、10~600秒間が好ましい。加熱乾燥する場合、加熱乾燥装置としては、例えば、オーブンやホットプレートなどが挙げられる。加熱乾燥温度は、60~200℃が好ましい。加熱乾燥時間は、1~60分間が好ましい。 The obtained coating film may be dried under reduced pressure and / or dried by heating. In the case of vacuum drying, the vacuum drying temperature is preferably 80 ° C. or lower in order to prevent the drying solvent from recondensing on the inner wall of the vacuum chamber. The pressure for drying under reduced pressure is preferably equal to or lower than the vapor pressure of the solvent contained in the coating film, and is preferably 1 to 1000 Pa. The vacuum drying time is preferably 10 to 600 seconds. In the case of heat drying, examples of the heat drying device include an oven and a hot plate. The heating and drying temperature is preferably 60 to 200 ° C. The heating and drying time is preferably 1 to 60 minutes.
本発明の隔壁付き基板は、画素(B)上に、さらに、(C)波長550nmにおける屈折率が1.20~1.35である低屈折率層(以下、「低屈折率層(C)」と記載する場合がある)を有することが好ましい。低屈折率層(C)を有することにより、光の取り出し効率をより向上させ、表示装置の輝度をより向上させることができる。 In the substrate with a partition wall of the present invention, a low refractive index layer having a refractive index of 1.20 to 1.35 at a wavelength of (C) 550 nm is further placed on the pixel (B) (hereinafter, “low refractive index layer (C)). It may be described as). By having the low refractive index layer (C), it is possible to further improve the light extraction efficiency and further improve the brightness of the display device.
図3に、低屈折率層を有する本発明の隔壁付き基板の一態様の断面図を示す。下地基板1上に、パターン形成された隔壁2および画素3を有し、これらの上に、さらに低屈折率層4を有する。 FIG. 3 shows a cross-sectional view of one aspect of the substrate with a partition wall of the present invention having a low refractive index layer. It has a pattern-formed partition wall 2 and pixels 3 on the base substrate 1, and further has a low refractive index layer 4 on these.
表示装置において、バックライトの光の反射を適度に抑えて画素(B)に効率よく光を入射させる観点から、低屈折率層(C)の屈折率は、1.20以上が好ましく、1.23以上がより好ましい。一方、輝度を向上させる観点から、低屈折率層(C)の屈折率は、1.35以下が好ましく、1.30以下がより好ましい。ここで、低屈折率層(C)の屈折率は、プリズムカプラーを用いて、大気圧下、20℃の条件で、硬化膜面に対し垂直方向から波長550nmの光を照射して測定することができる。 In the display device, the refractive index of the low refractive index layer (C) is preferably 1.20 or more from the viewpoint of appropriately suppressing the reflection of the light of the backlight and efficiently incident the light on the pixel (B). 23 or more is more preferable. On the other hand, from the viewpoint of improving the brightness, the refractive index of the low refractive index layer (C) is preferably 1.35 or less, more preferably 1.30 or less. Here, the refractive index of the low refractive index layer (C) is measured by irradiating the cured film surface with light having a wavelength of 550 nm from the direction perpendicular to the cured film surface under the condition of 20 ° C. under atmospheric pressure using a prism coupler. Can be done.
低屈折率層(C)は、ポリシロキサンおよび中空構造を有しないシリカ粒子を含有することが好ましい。ポリシロキサンは、シリカ粒子などの無機粒子との相溶性が高く、透明な層を形成することができるバインダーとして機能する。また、シリカ粒子を含有することにより、低屈折率層(C)の中に微小な空隙を効率よく形成して屈折率を低減することができ、屈折率を前述の範囲に容易に調整することができる。さらに、中空構造を有しないシリカ粒子を用いることにより、硬化収縮時のクラックを生じやすい中空構造を有しないため、クラックを抑制することができる。なお、低屈折率層(C)において、ポリシロキサンと中空構造を有しないシリカ粒子は、それぞれ独立して含有されていてもよいし、ポリシロキサンと中空構造を有しないシリカ粒子とが結合した状態で含有されていてもよい。低屈折率層(C)の均一性の観点から、ポリシロキサンと中空構造を有しないシリカ粒子とが結合した状態で含有されていることが好ましい。 The low refractive index layer (C) preferably contains polysiloxane and silica particles having no hollow structure. Polysiloxane has high compatibility with inorganic particles such as silica particles and functions as a binder capable of forming a transparent layer. Further, by containing silica particles, it is possible to efficiently form minute voids in the low refractive index layer (C) to reduce the refractive index, and the refractive index can be easily adjusted to the above-mentioned range. Can be done. Furthermore, by using silica particles that do not have a hollow structure, cracks can be suppressed because they do not have a hollow structure that easily causes cracks during curing shrinkage. In the low refractive index layer (C), the polysiloxane and the silica particles having no hollow structure may be contained independently, or the polysiloxane and the silica particles having no hollow structure are bonded to each other. It may be contained in. From the viewpoint of the uniformity of the low refractive index layer (C), it is preferable that the polysiloxane and silica particles having no hollow structure are contained in a bonded state.
低屈折率層(C)に含まれるポリシロキサンは、フッ素を含有することが好ましい。フッ素を含有することにより、低屈折率層(C)の屈折率を1.20~1.35に容易に調整することができる。フッ素含有ポリシロキサンは、少なくとも下記一般式(10)で表されるフッ素含有アルコキシシラン化合物を含む複数のアルコキシシラン化合物を加水分解および重縮合することにより得ることができる。さらに他のアルコキシシラン化合物を用いてもよい。 The polysiloxane contained in the low refractive index layer (C) preferably contains fluorine. By containing fluorine, the refractive index of the low refractive index layer (C) can be easily adjusted to 1.20 to 1.35. The fluorine-containing polysiloxane can be obtained by hydrolyzing and polycondensing a plurality of alkoxysilane compounds including at least the fluorine-containing alkoxysilane compound represented by the following general formula (10). Further, other alkoxysilane compounds may be used.
上記一般式(10)中、R7はフッ素数3~17のフルオロアルキル基を表す。R6は、一般式(5)~(7)におけるR6と同じ基を表す。mは1または2を表す。4-m個のR6およびm個のR7は、それぞれ同じでも異なってもよい。 In the above general formula (10), R 7 represents a fluoroalkyl group having 3 to 17 fluorines. R 6 represents the same group as R 6 in the general formulas (5) to (7). m represents 1 or 2. The 4 -m R6 and m R7 may be the same or different, respectively.
一般式(10)で表されるフッ素含有アルコキシシラン化合物としては、例えば、トリフルオロエチルトリメトキシシラン、トリフルオロエチルトリエトキシシラン、トリフルオロエチルトリイソプロポキシシラン、トリフルオロプロピルトリメトキシシラン、トリフルオロプロピルトリエトキシシラン、トリフルオロプロピルトリイソプロポキシシラン、ヘプタデカフルオロデシルトリメトキシシラン、ヘプタデカフルオロデシルトリエトキシシラン、ヘプタデカフルオロデシルトリイソプロポキシシラン、トリデカフルオロオクチルトリエトキシシラン、トリデカフルオロオクチルトリメトキシシラン、トリデカフルオロオクチルトリイソプロポキシシラン、トリフルオロエチルメチルジメトキシシラン、トリフルオロエチルメチルジエトキシシラン、トリフルオロエチルメチルジイソプロポキシシラン、トリフルオロプロピルメチルジメトキシシラン、トリフルオロプロピルメチルジエトキシシラン、トリフルオロプロピルメチルジイソプロポキシシラン、ヘプタデカフルオロデシルメチルジメトキシシラン、ヘプタデカフルオロデシルメチルジエトキシシラン、ヘプタデカフルオロデシルメチルジイソプロポキシシラン、トリデカフルオロオクチルメチルジメトキシシラン、トリデカフルオロオクチルメチルジエトキシシラン、トリデカフルオロオクチルメチルジイソプロポキシシラン、トリフルオロエチルエチルジメトキシシラン、トリフルオロエチルエチルジエトキシシラン、トリフルオロエチルエチルジイソプロポキシシラン、トリフルオロプロピルエチルジメトキシシラン、トリフルオロプロピルエチルジエトキシシラン、トリフルオロプロピルエチルジイソプロポキシシラン、ヘプタデカフルオロデシルエチルジメトキシシラン、ヘプタデカフルオロデシルエチルジエトキシシラン、ヘプタデカフルオロデシルエチルジイソプロポキシシラン、トリデカフルオロオクチルエチルジエトキシシラン、トリデカフルオロオクチルエチルジメトキシシラン、トリデカフルオロオクチルエチルジイソプロポキシシランなどが挙げられる。これらを2種以上用いてもよい。 Examples of the fluorine-containing alkoxysilane compound represented by the general formula (10) include trifluoroethyltrimethoxysilane, trifluoroethyltriethoxysilane, trifluoroethyltriisopropoxysilane, trifluoropropyltrimethoxysilane, and trifluoro. Propyltriethoxysilane, trifluoropropyltriisopropoxysilane, heptadecafluorodecyltrimethoxysilane, heptadecafluorodecyltriethoxysilane, heptadecafluorodecyltriisopropoxysilane, tridecafluorooctyltriethoxysilane, tridecafluorooctyl Trimethoxysilane, Tridecafluorooctyltriopropoxysilane, Trifluoroethylmethyldimethoxysilane, Trifluoroethylmethyldiethoxysilane, Trifluoroethylmethyldiisopropoxysilane, Trifluoropropylmethyldimethoxysilane, Trifluoropropylmethyldiethoxy Silane, Trifluoropropylmethyldiisopropoxysilane, Heptadecafluorodecylmethyldimethoxysilane, Heptadecafluorodecylmethyldiethoxysilane, Heptadecafluorodecylmethyldiisopropoxysilane, Tridecafluorooctylmethyldimethoxysilane, Tridecafluorooctyl Methyldiethoxysilane, tridecafluorooctylmethyldiisopropoxysilane, trifluoroethylethyldimethoxysilane, trifluoroethylethyldiethoxysilane, trifluoroethylethyldiisopropoxysilane, trifluoropropylethyldimethoxysilane, trifluoropropylethyl Diethoxysilane, trifluoropropylethyldiisopropoxysilane, heptadecafluorodecylethyldimethoxysilane, heptadecafluorodecylethyldiethoxysilane, heptadecafluorodecylethyldiisopropoxysilane, tridecafluorooctylethyldiethoxysilane, tri Examples thereof include decafluorooctylethyldimethoxysilane and tridecafluorooctylethyldiisopropoxysilane. Two or more of these may be used.
低屈折率層(C)におけるポリシロキサンの含有量は、クラックを抑制する観点から、4重量%以上が好ましい。一方、ポリシロキサンの含有量は、シリカ粒子間のネットワークによるチキソ性を確保し、低屈折率層(C)中に適度に空気層を保ち、屈折率をより低減する観点から、32重量%以下が好ましい。 The content of polysiloxane in the low refractive index layer (C) is preferably 4% by weight or more from the viewpoint of suppressing cracks. On the other hand, the content of polysiloxane is 32% by weight or less from the viewpoint of ensuring the thixo property due to the network between the silica particles, maintaining an appropriate air layer in the low refractive index layer (C), and further reducing the refractive index. Is preferable.
低屈折率層(C)における中空構造を有しないシリカ粒子としては、例えば、日産化学工業(株)製“スノーテックス”(登録商標)や“オルガノシリカゾル”(登録商標)シリーズ(イソプロピルアルコール分散液、エチレングリコール分散液、メチルエチルケトン分散液、ジメチルアセトアミド分散液、メチルイソブチルケトン分散液、プロピレングリコールモノメチルアセテート分散液、プロピレングリコールモノメチルエーテル分散液、メタノール分散液、酢酸エチル分散液、酢酸ブチル分散液、キシレン-n-ブタノール分散液、トルエン分散液など。品番PGM-ST、PMA-ST、IPA-ST、IPA-ST-L、IPA-ST-ZL、IPA-ST-UPなど)が挙げられる。これらを2種以上含有してもよい。 Examples of silica particles having no hollow structure in the low refractive index layer (C) include "Snowtex" (registered trademark) and "organosilica sol" (registered trademark) series (isopropyl alcohol dispersion) manufactured by Nissan Chemical Industry Co., Ltd. , Ethylglycol dispersion, methylethylketone dispersion, dimethylacetamide dispersion, methylisobutylketone dispersion, propylene glycol monomethylacetate dispersion, propylene glycol monomethylether dispersion, methanol dispersion, ethyl acetate dispersion, butylacetate dispersion, xylene -N-Butanol dispersion, toluene dispersion, etc. Examples thereof include product numbers PGM-ST, PMA-ST, IPA-ST, IPA-ST-L, IPA-ST-ZL, IPA-ST-UP, etc.). Two or more of these may be contained.
低屈折率層(C)中における中空構造を有しないシリカ粒子の含有量は、シリカ粒子間のネットワークによるチキソ性を確保し、低屈折率層(C)中に適度に空気層を保ち、屈折率をより低減する観点から、68重量%以上が好ましい。一方、中空構造を有しないシリカ粒子の含有量は、クラックを抑制する観点から、96重量%以下が好ましい。 The content of the silica particles having no hollow structure in the low refractive index layer (C) ensures the thixo property due to the network between the silica particles, keeps an appropriate air layer in the low refractive index layer (C), and refracts. From the viewpoint of further reducing the rate, 68% by weight or more is preferable. On the other hand, the content of silica particles having no hollow structure is preferably 96% by weight or less from the viewpoint of suppressing cracks.
低屈折率層(C)の厚みは、画素(B)の段差をカバーして欠陥の発生を抑制する観点から、0.1μm以上が好ましく、0.5μm以上がより好ましい。一方、低屈折率層(C)の厚みは、低屈折率層(C)のクラックの原因となるストレスを低減する観点から、20μm以下が好ましく、10μm以下がより好ましい。 The thickness of the low refractive index layer (C) is preferably 0.1 μm or more, and more preferably 0.5 μm or more, from the viewpoint of covering the step of the pixel (B) and suppressing the occurrence of defects. On the other hand, the thickness of the low refractive index layer (C) is preferably 20 μm or less, more preferably 10 μm or less, from the viewpoint of reducing stress that causes cracks in the low refractive index layer (C).
低屈折率層(C)の形成方法としては、形成方法が容易であることから、塗布法が好ましい。例えば、ポリシロキサンとシリカ粒子を含有する低屈折率用樹脂組成物を画素(B)上に塗布し、乾燥した後、加熱することにより、低屈折率層(C)を形成することができる。 As a method for forming the low refractive index layer (C), a coating method is preferable because the forming method is easy. For example, the low refractive index layer (C) can be formed by applying a low refractive index resin composition containing polysiloxane and silica particles on the pixel (B), drying it, and then heating it.
また、本発明の隔壁付き基板は、前記低屈折率層(C)上に、さらに、厚み50~1,000nmの無機保護層Iを有することが好ましい。無機保護層Iを有することにより、大気中の水分が低屈折率層(C)に到達しにくくなるため、低屈折率層(C)の屈折率変動を抑制し、輝度劣化を抑制することができる。 Further, it is preferable that the substrate with a partition wall of the present invention further has an inorganic protective layer I having a thickness of 50 to 1,000 nm on the low refractive index layer (C). Since the presence of the inorganic protective layer I makes it difficult for moisture in the atmosphere to reach the low refractive index layer (C), it is possible to suppress fluctuations in the refractive index of the low refractive index layer (C) and suppress luminance deterioration. can.
図4に、低屈折率層および無機保護層Iを有する本発明の隔壁付き基板の一態様の断面図を示す。下地基板1上に、パターン形成された隔壁2および画素3を有し、これらの上に、さらに低屈折率層4および無機保護層I5を有する。 FIG. 4 shows a cross-sectional view of one aspect of the substrate with a partition wall of the present invention having the low refractive index layer and the inorganic protective layer I. A patterned partition wall 2 and pixels 3 are provided on the base substrate 1, and a low refractive index layer 4 and an inorganic protective layer I5 are further provided on the partition walls 2 and pixels 3.
また、本発明の隔壁付き基板は、前記画素(B)と前記低屈折率層(C)の間に、さらに、厚み50~1,000nmの無機保護層IIを有することが好ましい。無機保護層IIを有することにより、画素(B)から、低屈折率層に、画素(B)を形成する原料が移動しにくくなるため、低屈折率層(C)の屈折率変動を抑制し、輝度劣化を抑制することができる。 Further, the substrate with a partition wall of the present invention preferably further has an inorganic protective layer II having a thickness of 50 to 1,000 nm between the pixel (B) and the low refractive index layer (C). By having the inorganic protective layer II, it becomes difficult for the raw material forming the pixel (B) to move from the pixel (B) to the low refractive index layer, so that the refractive index fluctuation of the low refractive index layer (C) is suppressed. , Brightness deterioration can be suppressed.
図5に、低屈折率層および無機保護層IIを有する本発明の隔壁付き基板の一態様の断面図を示す。下地基板1上に、パターン形成された隔壁2および画素3を有し、これらの上に、さらに無機保護層II6および低屈折率層4を有する。 FIG. 5 shows a cross-sectional view of one aspect of the substrate with a partition wall of the present invention having the low refractive index layer and the inorganic protective layer II. A patterned partition wall 2 and pixels 3 are provided on the base substrate 1, and an inorganic protective layer II6 and a low refractive index layer 4 are further provided on the partition walls 2 and pixels 3.
また、本発明の隔壁付き基板は、下地基板と前記画素(B)の間に、さらに、厚み1~5μmのカラーフィルター(以下、「カラーフィルター」と記載する場合がある)を有することが好ましい。カラーフィルターは、特定波長域の可視光を透過させて透過光を所望の色相とする機能を有する。カラーフィルターを有することにより、表示装置の色純度を向上させることができる。カラーフィルターの厚みを1μm以上とすることにより、色純度をより向上させることができる。一方、カラーフィルターの厚みを5μm以下とすることにより、輝度をより向上させることができる。 Further, it is preferable that the substrate with a partition wall of the present invention further has a color filter having a thickness of 1 to 5 μm (hereinafter, may be referred to as “color filter”) between the base substrate and the pixel (B). .. The color filter has a function of transmitting visible light in a specific wavelength range and making the transmitted light a desired hue. By having a color filter, the color purity of the display device can be improved. By setting the thickness of the color filter to 1 μm or more, the color purity can be further improved. On the other hand, by setting the thickness of the color filter to 5 μm or less, the brightness can be further improved.
図6に、カラーフィルターを有する本発明の隔壁付き基板の一態様の断面図を示す。下地基板1上に、パターン形成された隔壁2およびカラーフィルター7を有し、カラーフィルター7上に画素3を有する。 FIG. 6 shows a cross-sectional view of one aspect of the substrate with a partition wall of the present invention having a color filter. The pattern-formed partition wall 2 and the color filter 7 are provided on the base substrate 1, and the pixels 3 are provided on the color filter 7.
カラーフィルターとしては、例えば、液晶ディスプレイ等のフラットパネルディスプレイに用いられる、フォトレジストに顔料を分散させた顔料分散型材料を用いたカラーフィルターなどが挙げられる。より具体的には、400nm~550nmの波長を選択的に透過する青色カラーフィルター、500nm~600nmの波長を選択的に透過する緑色カラーフィルター、500nm以上の波長を選択的に透過する黄色カラーフィルター、600nm以上の波長を選択的に透過する赤色カラーフィルターなどが挙げられる。また、カラーフィルターは、色変換発光材料を含有する画素(B)から離隔して積層されていてもよいし、一体化して積層されていてもよい。 Examples of the color filter include a color filter using a pigment-dispersed material in which a pigment is dispersed in a photoresist, which is used for a flat panel display such as a liquid crystal display. More specifically, a blue color filter that selectively transmits a wavelength of 400 nm to 550 nm, a green color filter that selectively transmits a wavelength of 500 nm to 600 nm, and a yellow color filter that selectively transmits a wavelength of 500 nm or more. Examples thereof include a red color filter that selectively transmits a wavelength of 600 nm or more. Further, the color filter may be laminated apart from the pixel (B) containing the color conversion light emitting material, or may be integrally laminated.
また、本発明の隔壁付き基板は、カラーフィルターと前記画素(B)の間に、さらに厚み50~1,000nmの無機保護層IIIおよび/または黄色有機保護層を有することが好ましい。無機保護層IIIを有することにより、カラーフィルターから、色変換発光材料を含有する画素(B)に、カラーフィルターの形成原料が到達しにくくなるため、色変換発光材料を含有する画素(B)の輝度劣化を抑制することができる。また、黄色有機保護層を有することにより、色変換発光材料を含有する画素(B)によって変換しきれなかった青色漏れ光をカットし、色再現性を向上させることができる。 Further, the substrate with a partition wall of the present invention preferably further has an inorganic protective layer III and / or a yellow organic protective layer having a thickness of 50 to 1,000 nm between the color filter and the pixel (B). Since the inclusion of the inorganic protective layer III makes it difficult for the material for forming the color filter to reach the pixel (B) containing the color conversion light emitting material from the color filter, the pixel (B) containing the color conversion light emitting material Brightness deterioration can be suppressed. Further, by having the yellow organic protective layer, it is possible to cut the blue leakage light that could not be completely converted by the pixel (B) containing the color conversion light emitting material, and to improve the color reproducibility.
図7に、カラーフィルターおよび無機保護層IIIおよび/または黄色有機保護層を有する本発明の隔壁付き基板の一態様の断面図を示す。下地基板1上に、パターン形成された隔壁2およびカラーフィルター7を有し、これらの上に、無機保護層IIIおよび/または黄色有機保護層8を有し、無機保護層IIIおよび/または黄色有機保護層8で覆われた隔壁2で隔てられて配列した画素3を有する。 FIG. 7 shows a cross-sectional view of an aspect of the substrate with a partition wall of the present invention having a color filter and an inorganic protective layer III and / or a yellow organic protective layer. A patterned partition wall 2 and a color filter 7 are provided on the base substrate 1, an inorganic protective layer III and / or a yellow organic protective layer 8 is provided on these, and an inorganic protective layer III and / or a yellow organic layer is provided. It has pixels 3 arranged separated by a partition wall 2 covered with a protective layer 8.
また、本発明の隔壁付き基板は、前記下地基板上に、さらに厚み50~1,000nmの無機保護層IVおよび/または黄色有機保護層を有することが好ましい。無機保護層IVおよび/または黄色有機保護層が屈折率調整層として作用し、画素(B)から出る光をより効率的に取り出し、表示装置の輝度をより向上させることができる。また、黄色有機保護層は、色変換発光材料を含有する画素(B)によって変換しきれなかった青色漏れ光をカットし、色再現性を向上させることができる。無機保護層IVおよび/または黄色有機保護層は、下地基板と隔壁(A)および画素(B)との間に設けられることがより好ましい。 Further, the substrate with a partition wall of the present invention preferably further has an inorganic protective layer IV and / or a yellow organic protective layer having a thickness of 50 to 1,000 nm on the base substrate. The inorganic protective layer IV and / or the yellow organic protective layer acts as a refractive index adjusting layer, and can more efficiently extract the light emitted from the pixel (B) and further improve the brightness of the display device. Further, the yellow organic protective layer can cut the blue leakage light that could not be completely converted by the pixel (B) containing the color conversion light emitting material, and can improve the color reproducibility. It is more preferable that the inorganic protective layer IV and / or the yellow organic protective layer is provided between the base substrate and the partition wall (A) and the pixel (B).
図8に、無機保護層IVおよび/または黄色有機保護層を有する本発明の隔壁付き基板の一態様の断面図を示す。下地基板1上に、無機保護層IVおよび/または黄色有機保護層9を有し、これらの上にパターン形成された隔壁2およびカラーフィルター7を有し、これらの上に、パターン形成された隔壁2および画素3を有する。 FIG. 8 shows a cross-sectional view of one aspect of the substrate with a partition wall of the present invention having the inorganic protective layer IV and / or the yellow organic protective layer. An inorganic protective layer IV and / or a yellow organic protective layer 9 is provided on the base substrate 1, a partition wall 2 and a color filter 7 are patterned on these, and a partition wall on which a pattern is formed is formed. It has 2 and 3 pixels.
無機保護層I~IVを構成する材料としては、例えば、酸化ケイ素、酸化インジウムスズ、酸化ガリウム亜鉛などの金属酸化物;窒化ケイ素などの金属窒化物;フッ化マグネシウムなどのフッ化物等が挙げられる。これらを2種以上含有してもよい。これらの中でも、水蒸気透過性が低く、透過性が高いことから、窒化ケイ素または酸化ケイ素がより好ましい。 Examples of the material constituting the inorganic protective layers I to IV include metal oxides such as silicon oxide, indium tin oxide, and zinc gallium oxide; metal nitrides such as silicon nitride; and fluorides such as magnesium fluoride. .. Two or more of these may be contained. Among these, silicon nitride or silicon oxide is more preferable because it has low water vapor permeability and high permeability.
無機保護層I~IVの厚みは、水蒸気等の物質透過を充分に抑制する観点から、50nm以上が好ましく、100nm以上がより好ましい。一方、透過率の低下を抑制する観点から、無機保護層I~IVの厚みは、800nm以下が好ましく、500nm以下がより好ましい。 The thickness of the inorganic protective layers I to IV is preferably 50 nm or more, more preferably 100 nm or more, from the viewpoint of sufficiently suppressing the permeation of substances such as water vapor. On the other hand, from the viewpoint of suppressing the decrease in transmittance, the thickness of the inorganic protective layers I to IV is preferably 800 nm or less, more preferably 500 nm or less.
無機保護層I~IVの厚みは、クロスセクションポリッシャー等の研磨装置を用いて、下地基板に対して垂直な断面を露出させ、走査型電子顕微鏡または透過型電子顕微鏡を用いて断面を拡大観察することにより測定することができる。 For the thickness of the inorganic protective layers I to IV, use a polishing device such as a cross section polisher to expose a cross section perpendicular to the base substrate, and magnify the cross section using a scanning electron microscope or a transmission electron microscope. This can be measured.
無機保護層I~IVの形成方法としては、例えば、スパッタ法などが挙げられる。無機保護層は、無色透明または黄色透明であることが好ましい。 Examples of the method for forming the inorganic protective layers I to IV include a sputtering method. The inorganic protective layer is preferably colorless and transparent or yellow transparent.
黄色有機保護層は、例えば、有機金属化合物として、銀を含有する有機金属化合物を含有する本発明の樹脂組成物をパターン加工して得られる。銀を含有する有機金属化合物は、先述の通り、パターン形成に際し、加熱工程において分解・凝集することにより黄色粒子となり、保護層を黄色化する機能を有する。銀を含有する有機金属化合物としては、例えば、ネオデカン酸銀、オクチル酸銀、サリチル酸銀などが挙げられる。これらの中でも、より黄色化する観点から、ネオデカン酸銀が好ましい。黄色有機保護層用樹脂組成物において、銀を含有する有機金属化合物の含有量は、固形分中の0.2~5重量%が好ましい。銀を含有する有機金属化合物の含有量を0.2重量%以上とすることにより、より黄色化することができる。銀を含有する有機金属化合物の含有量は、固形分中の1.5重量%以上がより好ましい。一方、銀を含有する有機金属化合物の含有量を固形分中の5重量%以下とすることにより、透過率をより向上させることができる。 The yellow organic protective layer is obtained, for example, by pattern-processing the resin composition of the present invention containing an organometallic compound containing silver as an organometallic compound. As described above, the silver-containing organometallic compound has a function of yellowing the protective layer by decomposing and aggregating in the heating step during pattern formation to form yellow particles. Examples of the silver-containing organic metal compound include silver neodecanoate, silver octylate, and silver salicylate. Among these, silver neodecanoate is preferable from the viewpoint of yellowing. In the resin composition for a yellow organic protective layer, the content of the organic metal compound containing silver is preferably 0.2 to 5% by weight in the solid content. By setting the content of the organometallic compound containing silver to 0.2% by weight or more, more yellowing can be achieved. The content of the silver-containing organometallic compound is more preferably 1.5% by weight or more in the solid content. On the other hand, by setting the content of the organometallic compound containing silver to 5% by weight or less of the solid content, the transmittance can be further improved.
黄色有機保護層を形成する樹脂組成物は、黄色顔料を含有してもよい。黄色顔料としては、例えば、ピグメントイエロー(以下PYと略す)PY12、PY13、PY17、PY20、PY24、PY83、PY86、PY93、PY95、PY109、PY110、PY117、PY125、PY129、PY137、PY138、PY139、PY147、PY148、PY150、PY153、PY154、PY166、PY168、PY185などが挙げられる。中でも、青色光を選択的に遮光する観点から、PY139、PY147、PY148およびPY150から選ばれた黄色顔料が好ましい。
黄色有機保護層をパターン形成する方法としては、前述の隔壁(A-1)と同様に感光性ペースト法によりパターン形成する方法が好ましい。
The resin composition forming the yellow organic protective layer may contain a yellow pigment. Examples of the yellow pigment include pigment yellow (hereinafter abbreviated as PY) PY12, PY13, PY17, PY20, PY24, PY83, PY86, PY93, PY95, PY109, PY110, PY117, PY125, PY129, PY137, PY138, PY139, PY14. , PY148, PY150, PY153, PY154, PY166, PY168, PY185 and the like. Among them, a yellow pigment selected from PY139, PY147, PY148 and PY150 is preferable from the viewpoint of selectively blocking blue light.
As a method for forming a pattern of the yellow organic protective layer, a method of forming a pattern by a photosensitive paste method is preferable as in the above-mentioned partition wall (A-1).
図7のように、カラーフィルター7上に黄色有機保護層8を形成する場合、黄色有機保護層8は、カラーフィルターの各画素を平坦化するオーバーコート層としての役割を持たせてもよい。 When the yellow organic protective layer 8 is formed on the color filter 7 as shown in FIG. 7, the yellow organic protective layer 8 may serve as an overcoat layer for flattening each pixel of the color filter.
黄色有機保護層の厚みは、青色漏れ光を充分に遮光する観点から、100nm以上が好ましく、500nm以上がより好ましい。一方、光取り出し効率の低下を抑制する観点から、黄色有機保護層の厚みは、3000nm以下が好ましく、2000nm以下がより好ましい。 The thickness of the yellow organic protective layer is preferably 100 nm or more, more preferably 500 nm or more, from the viewpoint of sufficiently blocking blue leakage light. On the other hand, from the viewpoint of suppressing a decrease in light extraction efficiency, the thickness of the yellow organic protective layer is preferably 3000 nm or less, more preferably 2000 nm or less.
次に、本発明の表示装置について説明する。本発明の表示装置は、前記隔壁付き基板と、発光光源とを有する。発光光源としては、液晶セル、有機ELセル、ミニLEDセルおよびマイクロLEDセルから選ばれた発光光源が好ましい。発光特性に優れることから、発光光源としては、有機ELセルがより好ましい。ここで、ミニLEDセルとは、縦横の長さが100μm~10mm程度であるLEDを多数並べたセルのことを指す。マイクロLEDセルとは、縦横の長さが100μm未満であるLEDを多数並べたセルのことを指す。 Next, the display device of the present invention will be described. The display device of the present invention has the substrate with a partition wall and a light emitting light source. As the light emitting light source, a light emitting light source selected from a liquid crystal cell, an organic EL cell, a mini LED cell and a micro LED cell is preferable. An organic EL cell is more preferable as the light emitting light source because of its excellent light emitting characteristics. Here, the mini LED cell refers to a cell in which a large number of LEDs having a vertical and horizontal length of about 100 μm to 10 mm are arranged. The micro LED cell refers to a cell in which a large number of LEDs having a length and width of less than 100 μm are arranged.
本発明の表示装置の製造方法について、本発明の隔壁付き基板と有機ELセルを有する表示装置の一例を挙げて説明する。ガラス基板上に、感光性ポリイミド樹脂を塗布し、フォトリソグラフィー法を用いて、開口部を有する絶縁膜を形成する。その上に、アルミニウムをスパッタした後、フォトリソグラフィー法によりアルミニウムのパターニングを行い、絶縁膜の無い開口部にアルミニウムからなる背面電極層を形成する。続いて、その上に、電子輸送層としてトリス(8-キノリノラト)アルミニウム(以下、Alq3と略す)を真空蒸着法により成膜した後、発光層としてAlq3にジシアノメチレンピラン、キナクリドンおよび4,4’-ビス(2,2-ジフェニルビニル)ビフェニルをドーピングした白色発光層を形成する。次に、正孔輸送層としてN,N’-ジフェニル-N,N’-ビス(α-ナフチル)-1,1’-ビフェニル-4,4’-ジアミンを真空蒸着法にて成膜する。最後に、透明電極としてITOをスパッタリングにて成膜し、白色発光層を有する有機ELセルを作製する。前述の隔壁付き基板と、このようにして得られた有機ELセルを対向させて封止剤により貼り合せることにより、表示装置を作製することができる。 The manufacturing method of the display device of the present invention will be described with reference to an example of the display device having the substrate with a partition wall and the organic EL cell of the present invention. A photosensitive polyimide resin is applied onto a glass substrate, and an insulating film having an opening is formed by using a photolithography method. After spattering aluminum on it, patterning of aluminum is performed by a photolithography method to form a back electrode layer made of aluminum in an opening without an insulating film. Subsequently, tris (8-quinolinolat) aluminum (hereinafter abbreviated as Alq3) was formed on it as an electron transport layer by a vacuum vapor deposition method, and then dicyanomethylenepyran, quinacridone and 4,4'are formed on Alq3 as a light emitting layer. -Forms a white light emitting layer doped with bis (2,2-diphenylvinyl) biphenyl. Next, N, N'-diphenyl-N, N'-bis (α-naphthyl) -1,1'-biphenyl-4,4'-diamine is formed as a hole transport layer by a vacuum vapor deposition method. Finally, ITO is formed into a film by sputtering as a transparent electrode to produce an organic EL cell having a white light emitting layer. A display device can be manufactured by adhering the above-mentioned substrate with a partition wall and the organic EL cell thus obtained to face each other with a sealing agent.
以下に実施例および比較例を挙げて本発明をさらに具体的に説明するが、本発明はこれらの範囲に限定されない。なお、用いた化合物のうち略語を使用しているものについて、名称を以下に示す。
PGMEA:プロピレングリコールモノメチルエーテルアセテート
DAA:ジアセトンアルコール
BHT:ジブチルヒドロキシトルエン。
Hereinafter, the present invention will be described in more detail with reference to Examples and Comparative Examples, but the present invention is not limited to these scopes. The names of the compounds used that use abbreviations are shown below.
PGMEA: Propylene glycol monomethyl ether acetate DAA: Diacetone alcohol BHT: Dibutylhydroxytoluene.
合成例1~4におけるポリシロキサン溶液の固形分濃度は、以下の方法により求めた。アルミカップにポリシロキサン溶液を1.5g秤取し、ホットプレートを用いて250℃で30分間加熱して液分を蒸発させた。加熱後のアルミカップに残った固形分の重量を秤量して、加熱前の重量に対する割合からポリシロキサン溶液の固形分濃度を求めた。 The solid content concentration of the polysiloxane solution in Synthesis Examples 1 to 4 was determined by the following method. 1.5 g of the polysiloxane solution was weighed in an aluminum cup and heated at 250 ° C. for 30 minutes using a hot plate to evaporate the liquid. The weight of the solid content remaining in the aluminum cup after heating was weighed, and the solid content concentration of the polysiloxane solution was determined from the ratio to the weight before heating.
合成例1~4におけるポリシロキサンの重量平均分子量は、以下の方法により求めた。GPC分析装置(HLC-8220;東ソー(株)製)を用い、移動相としてテトラヒドロフランを用いて、「JIS K7252-3(制定年月日=2008/03/20)」に基づきGPC分析を行い、ポリスチレン換算の重量平均分子量を測定した。 The weight average molecular weight of the polysiloxane in Synthesis Examples 1 to 4 was determined by the following method. GPC analysis was performed based on "JIS K7252-3 (establishment date = 2008/03/20)" using a GPC analyzer (HLC-8220; manufactured by Tosoh Corporation) and tetrahydrofuran as a mobile phase. The polystyrene-equivalent weight average molecular weight was measured.
合成例1~4におけるポリシロキサン中の各繰り返し単位の含有比率は、以下の方法により求めた。ポリシロキサン溶液を直径10mmの“テフロン”(登録商標)製NMRサンプル管に注入して29Si-NMR測定を行い、オルガノシランに由来するSi全体の積分値に対する、特定のオルガノシランに由来するSiの積分値の割合から各繰り返し単位の含有比率を算出した。29Si-NMR測定条件を以下に示す。
装置:核磁気共鳴装置(JNM-GX270;日本電子(株)製)
測定法:ゲーテッドデカップリング法
測定核周波数:53.6693MHz(29Si核)
スペクトル幅:20000Hz
パルス幅:12μs(45°パルス)
パルス繰り返し時間:30.0秒
溶媒:アセトン-d6
基準物質:テトラメチルシラン
測定温度:23℃
試料回転数:0.0Hz。
The content ratio of each repeating unit in the polysiloxane in Synthesis Examples 1 to 4 was determined by the following method. A polysiloxane solution is injected into an NMR sample tube made of "Teflon" (registered trademark) with a diameter of 10 mm, and 29 Si-NMR measurement is performed. Si derived from a specific organosilane with respect to the integrated value of the entire Si derived from organosilane. The content ratio of each repeating unit was calculated from the ratio of the integrated values of. 29 Si-NMR measurement conditions are shown below.
Device: Nuclear magnetic resonance device (JNM-GX270; manufactured by JEOL Ltd.)
Measurement method: Gated decoupling method Measurement nuclear frequency: 53.6693 MHz ( 29 Si nucleus)
Spectral width: 20000Hz
Pulse width: 12 μs (45 ° pulse)
Pulse repetition time: 30.0 seconds Solvent: Acetone-d6
Reference substance: Tetramethylsilane Measurement temperature: 23 ° C
Sample rotation speed: 0.0 Hz.
合成例1 ポリシロキサン(PSL-1)溶液
1000mlの三口フラスコに、トリフルオロプロピルトリメトキシシランを147.32g(0.675mol)、3-メタクリロキシプロピルメチルジメトキシシランを40.66g(0.175mol)、3-トリメトキシシリルプロピルコハク酸無水物を26.23g(0.10mol)、3-(3,4-エポキシシクロヘキシル)プロピルトリメトキシシランを12.32g(0.05mol)、BHTを0.808g、およびPGMEAを171.62g仕込み、室温で撹拌しながら水52.65gにリン酸2.265g(仕込みモノマーに対して1.0重量%)を溶かしたリン酸水溶液を30分間かけて添加した。その後、フラスコを70℃のオイルバスに浸けて90分間撹拌した後、オイルバスを30分間かけて115℃まで昇温した。昇温開始1時間後に溶液温度(内温)が100℃に到達し、そこから2時間加熱撹拌し(内温は100~110℃)、ポリシロキサン溶液を得た。なお、昇温および加熱撹拌中、窒素95体積%、酸素5体積%の混合気体を0.05リットル/分流した。反応中に副生成物であるメタノールおよび水が合計131.35g留出した。得られたポリシロキサン溶液に、固形分濃度が40重量%となるようにPGMEAを追加し、ポリシロキサン(PSL-1)溶液を得た。なお、得られたポリシロキサン(PSL-1)の重量平均分子量は4,000であった。また、ポリシロキサン(PSL-1)における、トリフルオロプロピルトリメトキシシラン、3-メタクリロキシプロピルメチルジメトキシシラン、3-トリメトキシシリルプロピルコハク酸無水物、および3-(3,4-エポキシシクロヘキシル)プロピルトリメトキシシランに由来する各繰り返し単位のモル比は、それぞれ67.5mol%、17.5mol%、10mol%および5mol%であった。
Synthesis Example 1 147.32 g (0.675 mol) of trifluoropropyltrimethoxysilane and 40.66 g (0.175 mol) of 3-methacryloxypropylmethyldimethoxysilane in a three-necked flask containing a 1000 ml polysiloxane (PSL-1) solution. , 3-Trimethoxysilylpropyl succinate anhydride 26.23 g (0.10 mol), 3- (3,4-epoxycyclohexyl) propyltrimethoxysilane 12.32 g (0.05 mol), BHT 0.808 g , And PGMEA were charged in 171.62 g, and an aqueous phosphoric acid solution prepared by dissolving 2.265 g of phosphoric acid (1.0% by weight based on the charged monomer) in 52.65 g of water was added over 30 minutes while stirring at room temperature. Then, the flask was immersed in an oil bath at 70 ° C. and stirred for 90 minutes, and then the temperature of the oil bath was raised to 115 ° C. over 30 minutes. One hour after the start of temperature rise, the solution temperature (internal temperature) reached 100 ° C., and the mixture was heated and stirred for 2 hours (internal temperature was 100 to 110 ° C.) to obtain a polysiloxane solution. During the temperature rise and heating and stirring, a mixed gas of 95% by volume of nitrogen and 5% by volume of oxygen was flowed at 0.05 liter / fraction. A total of 131.35 g of by-products methanol and water were distilled off during the reaction. PGMEA was added to the obtained polysiloxane solution so that the solid content concentration was 40% by weight to obtain a polysiloxane (PSL-1) solution. The weight average molecular weight of the obtained polysiloxane (PSL-1) was 4,000. Also, in polysiloxane (PSL-1), trifluoropropyltrimethoxysilane, 3-methacryloxypropylmethyldimethoxysilane, 3-trimethoxysilylpropylsuccinic anhydride, and 3- (3,4-epoxycyclohexyl) propyl. The molar ratio of each repeating unit derived from trimethoxysilane was 67.5 mol%, 17.5 mol%, 10 mol% and 5 mol%, respectively.
合成例2 ポリシロキサン(PSL-2)溶液
1000mlの三口フラスコに、ジフェニルジメトキシシランを116.07g(0.475mol)、ジメチルジメトキシシラン(0.20mol)、3-メタクリロキシプロピルトリメトキシシランを43.46g(0.175mol)、3-トリメトキシシリルプロピルコハク酸無水物を26.23g(0.10mol)、3-(3,4-エポキシシクロヘキシル)プロピルトリメトキシシランを12.32g(0.05mol)、BHTを0.843g、およびPGMEAを176.26g仕込み、室温で撹拌しながら水43.65gにリン酸2.221g(仕込みモノマーに対して1.0重量%)を溶かしたリン酸水溶液を30分間かけて添加した。その後、合成例1と同様にしてポリシロキサン溶液を得た。反応中に副生成物であるメタノールおよび水が合計136.90g留出した。得られたポリシロキサン溶液に、固形分濃度が40重量%となるようにPGMEAを追加し、ポリシロキサン(PSL-2)溶液を得た。なお、得られたポリシロキサン(PSL-2)の重量平均分子量は2,800であった。また、ポリシロキサン(PSL-2)における、ジフェニルジメトキシシラン、3-メタクリロキシプロピルトリメトキシシラン、3-トリメトキシシリルプロピルコハク酸無水物および3-(3,4-エポキシシクロヘキシル)プロピルトリメトキシシランに由来する各繰り返し単位のモル比は、それぞれ47.5mol%、20mol%、17.5mol%、10mol%および5mol%であった。
Synthesis Example 2 Polysiloxane (PSL-2) solution In a 1000 ml three-necked flask, 116.07 g (0.475 mol) of diphenyldimethoxysilane, dimethyldimethoxysilane (0.20 mol), and 3-methacryloxypropyltrimethoxysilane were placed in 43. 46 g (0.175 mol), 26.23 g (0.10 mol) of 3-trimethoxysilylpropyl succinate anhydride, 12.32 g (0.05 mol) of 3- (3,4-epoxycyclohexyl) propyltrimethoxysilane , BHT 0.843 g, and PGMEA 176.26 g, and phosphoric acid aqueous solution prepared by dissolving 2.221 g of phosphoric acid (1.0% by weight with respect to the charged monomer) in 43.65 g of water while stirring at room temperature. It was added over a minute. Then, a polysiloxane solution was obtained in the same manner as in Synthesis Example 1. A total of 136.90 g of by-products methanol and water were distilled off during the reaction. PGMEA was added to the obtained polysiloxane solution so that the solid content concentration was 40% by weight to obtain a polysiloxane (PSL-2) solution. The weight average molecular weight of the obtained polysiloxane (PSL-2) was 2,800. Further, in polysiloxane (PSL-2), diphenyldimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-trimethoxysilylpropylsuccinic anhydride and 3- (3,4-epoxycyclohexyl) propyltrimethoxysilane The molar ratios of each derived repeat unit were 47.5 mol%, 20 mol%, 17.5 mol%, 10 mol% and 5 mol%, respectively.
合成例3 ポリシロキサン(PSL-3)溶液
1000mlの三口フラスコに、トリフルオロプロピルトリメトキシシランを147.32g(0.675mol)、3-メタクリロキシプロピルトリメトキシシシランを43.46g(0.175mol)、3-トリメトキシシリルプロピルコハク酸無水物を26.23g(0.10mol)、3-(3,4-エポキシシクロヘキシル)プロピルトリメトキシシランを12.32g(0.05mol)、BHTを0.810g、およびPGMEAを172.59g仕込み、室温で撹拌しながら水54.45gにリン酸2.293g(仕込みモノマーに対して1.0重量%)を溶かしたリン酸水溶液を30分間かけて添加した。その後、合成例1と同様にしてポリシロキサン溶液を得た。反応中に副生成物であるメタノールおよび水が合計140.05g留出した。得られたポリシロキサン溶液に、固形分濃度が40重量%となるようにPGMEAを追加し、ポリシロキサン(PSL-3)溶液を得た。なお、得られたポリシロキサン(PSL-3)の重量平均分子量は4,100であった。また、ポリシロキサン(PSL-3)における、トリフルオロプロピルトリメトキシシラン、3-メタクリロキシプロピルトリメトキシシラン、3-トリメトキシシリルプロピルコハク酸無水物および3-(3,4-エポキシシクロヘキシル)プロピルトリメトキシシランに由来する各繰り返し単位のモル比は、それぞれ67.5mol%、17.5mol%、10mol%および5mol%であった。
Synthesis Example 3 Polysiloxane (PSL-3) solution In a 1000 ml three-necked flask, 147.32 g (0.675 mol) of trifluoropropyltrimethoxysilane and 43.46 g (0.175 mol) of 3-methacryloxypropyltrimethoxycisilane. ), 2-323 g (0.10 mol) of 3-trimethoxysilylpropyl succinic anhydride, 12.32 g (0.05 mol) of 3- (3,4-epoxycyclohexyl) propyltrimethoxysilane, and 0. 810 g and 172.59 g of PGMEA were charged, and an aqueous phosphoric acid solution prepared by dissolving 2.293 g of phosphoric acid (1.0% by weight based on the charged monomer) in 54.45 g of water was added over 30 minutes while stirring at room temperature. .. Then, a polysiloxane solution was obtained in the same manner as in Synthesis Example 1. A total of 140.05 g of by-products methanol and water were distilled off during the reaction. PGMEA was added to the obtained polysiloxane solution so that the solid content concentration was 40% by weight to obtain a polysiloxane (PSL-3) solution. The weight average molecular weight of the obtained polysiloxane (PSL-3) was 4,100. In addition, trifluoropropyltrimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-trimethoxysilylpropylsuccinic anhydride and 3- (3,4-epoxycyclohexyl) propyltri in polysiloxane (PSL-3). The molar ratio of each repeating unit derived from methoxysilane was 67.5 mol%, 17.5 mol%, 10 mol% and 5 mol%, respectively.
合成例4 ポリシロキサン(PSL-4)溶液
1000mlの三口フラスコに、メチルトリメトキシシランを34.05g(0.250mol)、フェニルトリメトキシシランを99.15g(0.500mol)、テトラエトキシシランを31.25g(0.150mol)、3-(3,4-エポキシシクロヘキシル)プロピルトリメトキシシランを24.64g(0.100mol)、およびPGMEAを174.95g仕込み、室温で撹拌しながら水56.70gにリン酸0.945g(仕込みモノマーに対して0.50重量%)を溶かしたリン酸水溶液を30分間かけて添加した。その後、合成例1と同様にしてポリシロキサン溶液を得た。反応中に副生成物であるメタノールおよび水が合計129.15g留出した。得られたポリシロキサン溶液に、固形分濃度が40重量%となるようにPGMEAを追加し、ポリシロキサン(PSL-4)溶液を得た。なお、得られたポリシロキサン(PSL-4)の重量平均分子量は4,200であった。また、ポリシロキサン(PSL-4)における、メチルトリメトキシシラン、フェニルトリメトキシシラン、テトラエトキシシラン、および3-(3,4-エポキシシクロヘキシル)プロピルトリメトキシシランに由来する各繰り返し単位のモル比は、それぞれ25mol%、50mol%、15mol%および10mol%であった。
Synthesis Example 4 Polysiloxane (PSL-4) solution In a 1000 ml three-necked flask, 34.05 g (0.250 mol) of methyltrimethoxysilane, 99.15 g (0.500 mol) of phenyltrimethoxysilane, and 31 of tetraethoxysilane. Add 24.64 g (0.100 mol) of .25 g (0.150 mol), 3- (3,4-epoxycyclohexyl) propyltrimethoxysilane, and 174.95 g of PGMEA to 56.70 g of water with stirring at room temperature. An aqueous phosphate solution in which 0.945 g of silane (0.50% by weight based on the charged monomer) was dissolved was added over 30 minutes. Then, a polysiloxane solution was obtained in the same manner as in Synthesis Example 1. A total of 129.15 g of by-products methanol and water were distilled off during the reaction. PGMEA was added to the obtained polysiloxane solution so that the solid content concentration was 40% by weight to obtain a polysiloxane (PSL-4) solution. The weight average molecular weight of the obtained polysiloxane (PSL-4) was 4,200. In addition, the molar ratio of each repeating unit derived from methyltrimethoxysilane, phenyltrimethoxysilane, tetraethoxysilane, and 3- (3,4-epoxycyclohexyl) propyltrimethoxysilane in polysiloxane (PSL-4) is , 25 mol%, 50 mol%, 15 mol% and 10 mol%, respectively.
合成例1~4の組成をまとめて表1に示す。 The compositions of Synthesis Examples 1 to 4 are summarized in Table 1.
合成例5 緑色有機蛍光体
3,5-ジブロモベンズアルデヒド(3.0g)、4-t-ブチルフェニルボロン酸(5.3g)、テトラキス(トリフェニルホスフィン)パラジウム(0)(0.4g)、および炭酸カリウム(2.0g)をフラスコに入れ、窒素置換した。ここに脱気したトルエン(30mL)および脱気した水(10mL)を加え、4時間還流した。反応溶液を室温まで冷却し、分液した後に、有機層を飽和食塩水で洗浄した。この有機層を硫酸マグネシウムで乾燥し、ろ過後、溶媒を留去した。得られた反応生成物をシリカゲルカラムクロマトグラフィーにより精製し、3,5-ビス(4-t-ブチルフェニル)ベンズアルデヒド(3.5g)の白色固体を得た。次に、3,5-ビス(4-t-ブチルフェニル)ベンズアルデヒド(1.5g)と2,4-ジメチルピロール(0.7g)をフラスコに入れ、脱水ジクロロメタン(200mL)およびトリフルオロ酢酸(1滴)を加えて、窒素雰囲気下、4時間撹拌した。この反応混合物に2,3-ジクロロ-5,6-ジシアノ-1,4-ベンゾキノン(0.85g)の脱水ジクロロメタン溶液を加え、さらに1時間撹拌した。反応終了後、三弗化ホウ素ジエチルエーテル錯体(7.0mL)およびジイソプロピルエチルアミン(7.0mL)を加えて、4時間撹拌した後、さらに水(100mL)を加えて撹拌し、有機層を分液した。この有機層を硫酸マグネシウムで乾燥し、ろ過後、溶媒を留去した。得られた反応生成物をシリカゲルカラムクロマトグラフィーにより精製し、緑色粉末0.4gを得た(収率17%)。得られた緑色粉末の1H-NMR分析結果は次の通りであり、上記で得られた緑色粉末が、下記構造式で表される[G-1]であることが確認された。
1H-NMR(CDCl3(d=ppm)):7.95(s,1H)、7.63-7.48(m,10H)、6.00(s,2H)、2.58(s,6H)、1.50(s,6H)、1.37(s,18H)。
Synthesis Example 5 Green organic phosphor 3,5-dibromobenzaldehyde (3.0 g), 4-t-butylphenylboronic acid (5.3 g), tetrakis (triphenylphosphine) palladium (0) (0.4 g), and Potassium carbonate (2.0 g) was placed in a flask and replaced with nitrogen. Degassed toluene (30 mL) and degassed water (10 mL) were added thereto, and the mixture was refluxed for 4 hours. The reaction solution was cooled to room temperature, separated, and then the organic layer was washed with saturated brine. The organic layer was dried over magnesium sulfate, filtered, and then the solvent was distilled off. The obtained reaction product was purified by silica gel column chromatography to obtain a white solid of 3,5-bis (4-t-butylphenyl) benzaldehyde (3.5 g). Next, put 3,5-bis (4-t-butylphenyl) benzaldehyde (1.5 g) and 2,4-dimethylpyrrole (0.7 g) in a flask, dehydrated dichloromethane (200 mL) and trifluoroacetic acid (1). Drops) were added, and the mixture was stirred for 4 hours under a nitrogen atmosphere. A dehydrated dichloromethane solution of 2,3-dichloro-5,6-dicyano-1,4-benzoquinone (0.85 g) was added to this reaction mixture, and the mixture was further stirred for 1 hour. After completion of the reaction, boron trifluorinated diethyl ether complex (7.0 mL) and diisopropylethylamine (7.0 mL) were added and stirred for 4 hours, then water (100 mL) was further added and stirred to separate the organic layer. did. The organic layer was dried over magnesium sulfate, filtered, and then the solvent was distilled off. The obtained reaction product was purified by silica gel column chromatography to obtain 0.4 g of green powder (yield 17%). The 1 H-NMR analysis result of the obtained green powder is as follows, and it was confirmed that the green powder obtained above is [G-1] represented by the following structural formula.
1 1 H-NMR (CDCl 3 (d = ppm)): 7.95 (s, 1H), 7.63-7.48 (m, 10H), 6.00 (s, 2H), 2.58 (s) , 6H), 1.50 (s, 6H), 1.37 (s, 18H).
合成例6 赤色有機蛍光体
4-(4-t-ブチルフェニル)-2-(4-メトキシフェニル)ピロール300mg、2-メトキシベンゾイルクロリド201mgおよびトルエン10mlの混合溶液を、窒素気流下、120℃で6時間加熱した。室温に冷却後、溶媒をエバポレートした。得られた残留物をエタノール20mlで洗浄し、真空乾燥することにより、2-(2-メトキシベンゾイル)-3-(4-t-ブチルフェニル)-5-(4-メトキシフェニル)ピロール260mgを得た。次に、2-(2-メトキシベンゾイル)-3-(4-t-ブチルフェニル)-5-(4-メトキシフェニル)ピロール260mg、4-(4-t-ブチルフェニル)-2-(4-メトキシフェニル)ピロール180mg、メタンスルホン酸無水物206mgおよび脱気したトルエン10mlの混合溶液を、窒素気流下、125℃で7時間加熱した。この反応混合物を室温に冷却後、水20mlを注入し、ジクロロメタン30mlで抽出した。有機層を水20mlで2回洗浄した後、エバポレートし、真空乾燥することにより、残留物としてピロメテン体を得た。次に、得られたピロメテン体とトルエン10mlの混合溶液に、窒素気流下、ジイソプロピルエチルアミン305mgおよび三フッ化ホウ素ジエチルエーテル錯体670mgを加え、室温で3時間撹拌した。この反応混合物に水20mlを注入し、ジクロロメタン30mlで抽出した。有機層を水20mlで2回洗浄し、硫酸マグネシウムで乾燥後、エバポレートした。シリカゲルカラムクロマトグラフィーにより精製し、真空乾燥した後、赤紫色粉末0.27gを得た(収率70%)。得られた赤紫色粉末の1H-NMR分析結果は次の通りであり、上記で得られた赤紫色粉末が、下記構造式で表される[R-1]であることが確認された。
1H-NMR(CDCl3(d=ppm)):1.19(s,18H),3.42(s,3H),3.85(s,6H),5.72(d,1H),6.20(t,1H),6.42-6.97(m,16H),7.89(d,4H)。
Synthesis Example 6 A mixed solution of red organic phosphor 4- (4-t-butylphenyl) -2- (4-methoxyphenyl) pyrrole 300 mg, 2-methoxybenzoyl chloride 201 mg and toluene 10 ml at 120 ° C. under a nitrogen stream. It was heated for 6 hours. After cooling to room temperature, the solvent was evaporated. The obtained residue was washed with 20 ml of ethanol and vacuum dried to obtain 260 mg of 2- (2-methoxybenzoyl) -3- (4-t-butylphenyl) -5- (4-methoxyphenyl) pyrrole. rice field. Next, 2- (2-methoxybenzoyl) -3- (4-t-butylphenyl) -5- (4-methoxyphenyl) pyrrole 260 mg, 4- (4-t-butylphenyl) -2- (4-) A mixed solution of 180 mg of methoxyphenyl) pyrrole, 206 mg of methanesulfonic acid anhydride and 10 ml of degassed toluene was heated at 125 ° C. for 7 hours under a nitrogen stream. After cooling the reaction mixture to room temperature, 20 ml of water was injected and the mixture was extracted with 30 ml of dichloromethane. The organic layer was washed twice with 20 ml of water, then evaporated and vacuum dried to obtain a pyrromethene as a residue. Next, 305 mg of diisopropylethylamine and 670 mg of boron trifluoride diethyl ether complex were added to the obtained mixed solution of pyrromethene and 10 ml of toluene under a nitrogen stream, and the mixture was stirred at room temperature for 3 hours. 20 ml of water was poured into this reaction mixture and extracted with 30 ml of dichloromethane. The organic layer was washed twice with 20 ml of water, dried over magnesium sulfate, and then evaporated. After purification by silica gel column chromatography and vacuum drying, 0.27 g of reddish purple powder was obtained (yield 70%). The 1 H-NMR analysis result of the obtained reddish purple powder is as follows, and it was confirmed that the reddish purple powder obtained above is [R-1] represented by the following structural formula.
1 1 H-NMR (CDCl 3 (d = ppm)): 1.19 (s, 18H), 3.42 (s, 3H), 3.85 (s, 6H), 5.72 (d, 1H), 6.20 (t, 1H), 6.42-6.97 (m, 16H), 7.89 (d, 4H).
合成例7 シリカ粒子含有ポリシロキサン溶液(LS-1)
500mlの三口フラスコに、メチルトリメトキシシランを0.05g(0.4mmol)、トリフルオロプロピルトリメトキシシランを0.66g(3.0mmol)、トリメトキシシリルプロピルコハク酸無水物を0.10g(0.4mmol)、γ-アクリロキシプロピルトリメトキシシランを7.97g(34mmol)、および15.6重量%のシリカ粒子のイソプロピルアルコール分散液(IPA-ST-UP:日産化学工業(株)製)を224.37g入れ、エチレングリコールモノ-t-ブチルエーテル163.93gを加えた。室温で撹拌しながら、水4.09gにリン酸0.088gを溶かしたリン酸水溶液を3分間かけて添加した。その後、フラスコを40℃のオイルバスに浸けて60分間撹拌した後、オイルバスを30分間かけて115℃まで昇温した。昇温開始1時間後に溶液の内温が100℃に到達し、そこからさらに2時間加熱撹拌することにより(内温は100~110℃)、シリカ粒子含有ポリシロキサン溶液(LS-1)を得た。なお、昇温および加熱撹拌中、窒素を0.05l(リットル)/分流した。反応中に副生成物であるメタノールおよび水が合計194.01g留出した。得られたシリカ粒子含有ポリシロキサン溶液(LS-1)の固形分濃度は24.3重量%、固形分中のポリシロキサンとシリカ粒子の含有量は、それぞれ15重量%および85重量%であった。得られたシリカ粒子含有ポリシロキサン(LS-1)におけるポリシロキサンの、メチルトリメトキシシラン、トリフルオロプロピルトリメトキシシラン、3-トリメトキシシリルプロピルコハク酸無水物、およびγ-アクリロキシプロピルトリメトキシシランに由来する各繰り返し単位のモル比は、それぞれ1.0mol%、8.0mol%、1.0mol%および90.0mol%であった。
Synthesis Example 7 Silica particle-containing polysiloxane solution (LS-1)
In a 500 ml three-necked flask, 0.05 g (0.4 mmol) of methyltrimethoxysilane, 0.66 g (3.0 mmol) of trifluoropropyltrimethoxysilane, and 0.10 g (0) of trimethoxysilylpropylsuccinic acid anhydride. .4 mmol), 7.97 g (34 mmol) of γ-acryloxypropyltrimethoxysilane, and 15.6 wt% isopropyl alcohol dispersion of silica particles (IPA-ST-UP: manufactured by Nissan Chemical Industry Co., Ltd.). 224.37 g was added, and 163.93 g of ethylene glycol mono-t-butyl ether was added. While stirring at room temperature, an aqueous phosphoric acid solution prepared by dissolving 0.088 g of phosphoric acid in 4.09 g of water was added over 3 minutes. Then, the flask was immersed in an oil bath at 40 ° C. and stirred for 60 minutes, and then the temperature of the oil bath was raised to 115 ° C. over 30 minutes. The internal temperature of the solution reached 100 ° C. 1 hour after the start of temperature rise, and the mixture was further heated and stirred for 2 hours (internal temperature was 100 to 110 ° C.) to obtain a silica particle-containing polysiloxane solution (LS-1). rice field. During the temperature rise and heating and stirring, 0.05 liter (liter) / fraction of nitrogen was flowed. A total of 194.01 g of by-products methanol and water were distilled off during the reaction. The solid content concentration of the obtained silica particle-containing polysiloxane solution (LS-1) was 24.3% by weight, and the contents of the polysiloxane and silica particles in the solid content were 15% by weight and 85% by weight, respectively. .. Methyltrimethoxysilane, trifluoropropyltrimethoxysilane, 3-trimethoxysilylpropylsuccinate anhydride, and γ-acryloxypropyltrimethoxysilane of the polysiloxane in the obtained silica particle-containing polysiloxane (LS-1). The molar ratio of each repeating unit derived from was 1.0 mol%, 8.0 mol%, 1.0 mol% and 90.0 mol%, respectively.
実施例1 隔壁用樹脂組成物(P-1)
白色顔料として、二酸化チタン顔料(R-960;BASFジャパン(株)製(以下「R-960」))5.00gに、樹脂として、合成例1により得られたポリシロキサン(PSL-1)溶液5.00gを混合し、ジルコニアビーズが充填されたミル型分散機を用いて分散し、顔料分散液(MW-1)を得た。また、有機金属化合物として、ビス(アセチルアセトナト)パラジウムを1.00gと、リン原子を有する配位性化合物として、トリフェニルホスフィンを0.861g(有機金属化合物に対して等モル量)をDAA8.139gに溶解して、有機金属化合物溶液(OM-1)を得た。
Example 1 Resin composition for partition wall (P-1)
As a white pigment, 5.00 g of a titanium dioxide pigment (R-960; manufactured by BASF Japan Ltd. (hereinafter, “R-960”)) and as a resin, a polysiloxane (PSL-1) solution obtained in Synthesis Example 1 5.00 g was mixed and dispersed using a mill-type disperser filled with zirconia beads to obtain a pigment dispersion (MW-1). Further, as an organometallic compound, 1.00 g of bis (acetylacetonato) palladium and 0.861 g of triphenylphosphine as a coordinating compound having a phosphorus atom (equal molar amount with respect to the organometallic compound) are DAA8. It was dissolved in 139 g to obtain an organometallic compound solution (OM-1).
次に、前記顔料分散液(MW-1)9.98g、前記有機金属化合物溶液(OM-1)1.86g、ポリシロキサン(PSL-1)溶液0.98g、光重合開始剤として、エタノン,1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル]-,1-(О-アセチルオキシム)(“イルガキュア”(登録商標)OXE-02、BASFジャパン(株)製(以下「OXE-02」))0.050g、ビス(2,4,6-トリメチルベンゾイル)-フェニルフォスフィンオキサイド(“イルガキュア”819、BASFジャパン(株)製(以下「IC-819」))0.400g、光塩基発生剤として、2-(3-ベンゾイルフェニル)プロピオン酸1,2-ジイソプロピル-3-[ビス(ジメチルアミノ)メチレン]グアニジニウム(WPBG-266(商品名)、富士フイルム和光純薬(株)製(以下「WPBG-266」))0.100g、光重合性化合物として、ジペンタエリスリトールヘキサアクリレート(“KAYARAD”(登録商標)DPHA、新日本薬業(株)製(以下「DPHA」))1.20g、撥液化合物として、光重合性フッ素含有化合物(“メガファック”(登録商標)RS-76-E、DIC(株)製(以下「RS-76-E」))の40重量%PGMEA希釈溶液1.00g、3’,4’-エポキシシクロヘキシルメチル-3,4-エポキシシクロヘキサンカルボキシレート(“セロキサイド”(登録商標)2021P、ダイセル(株)製(以下「セロキサイド(登録商標)2021P」))0.100g、エチレンビス(オキシエチレン)ビス[3-(5-tert-ブチル-4-ヒドロキシ-m-トリル)プロピオネート](“イルガノックス”(登録商標)1010、BASFジャパン(株)製(以下「IRGANOX(登録商標)1010」))0.030g、およびアクリル系界面活性剤(“BYK”(登録商標)352、ビックケミージャパン(株)製(以下「BYK-352」))のPGMEA10重量%希釈溶液0.100g(濃度500ppmに相当)を、溶媒PGMEA4.20gに溶解させ、撹拌した。得られた混合物を、5.0μmのフィルターでろ過し、隔壁用樹脂組成物(P-1)を得た。 Next, 9.98 g of the pigment dispersion liquid (MW-1), 1.86 g of the organic metal compound solution (OM-1), 0.98 g of a polysiloxane (PSL-1) solution, and etanone as a photopolymerization initiator. 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazole-3-yl]-, 1- (О-acetyloxime) ("Irgacure" (registered trademark) OXE-02, BASF Japan Co., Ltd. (Hereinafter "OXE-02")) 0.050 g, bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide ("Irgacure" 819, manufactured by BASF Japan Co., Ltd. (hereinafter "IC-819") )) 0.400 g, as a photobase generator, 2- (3-benzoylphenyl) propionic acid 1,2-diisopropyl-3- [bis (dimethylamino) methylene] guanidinium (WPBG-266 (trade name), Fujifilm) Wako Junyaku Co., Ltd. (hereinafter referred to as "WPBG-266")) 0.100 g, as a photopolymerizable compound, dipentaerythritol hexaacrylate ("KAYARAD" (registered trademark) DPHA, manufactured by Shin Nihon Yakuhin Co., Ltd. ( 1.20 g of (hereinafter "DPHA")), as a liquid-repellent compound, a photopolymerizable fluorine-containing compound ("Megafuck" (registered trademark) RS-76-E, manufactured by DIC Co., Ltd. (hereinafter "RS-76-E"") )) 40 wt% PGMEA diluted solution 1.00 g, 3', 4'-epoxycyclohexylmethyl-3,4-epoxycyclohexanecarboxylate ("Selokiside" (registered trademark) 2021P, manufactured by Daicel Co., Ltd. (hereinafter "Selokiside") (Registered Trademark) 2021P ")) 0.100 g, ethylene bis (oxyethylene) bis [3- (5-tert-butyl-4-hydroxy-m-tolyl) propionate] ("Irganox" (registered trademark) 1010, Made by BASF Japan Co., Ltd. (hereinafter "IRGANOX (registered trademark) 1010") 0.030 g, acrylic solvent ("BYK" (registered trademark) 352, manufactured by Big Chemie Japan Co., Ltd. (hereinafter "BYK-") 0.100 g (corresponding to a concentration of 500 ppm) of a 10 wt% diluted solution of PGMEA of 352 ”)) was dissolved in 4.20 g of the solvent PGMEA and stirred. The obtained mixture was filtered through a 5.0 μm filter to obtain a resin composition for partition walls (P-1).
実施例2~3 隔壁用樹脂組成物(P-2)~(P-3)
ポリシロキサン(PSL-1)溶液の代わりに、それぞれ前記ポリシロキサン(PSL-2)または(PSL-3)溶液を使用した以外は、実施例1と同様にして隔壁用樹脂組成物(P-2)および(P-3)を得た。
Examples 2 to 3 Resin compositions for partition walls (P-2) to (P-3)
Resin composition for partition wall (P-2) in the same manner as in Example 1 except that the polysiloxane (PSL-2) or (PSL-3) solution was used instead of the polysiloxane (PSL-1) solution, respectively. ) And (P-3).
実施例4 隔壁用樹脂組成物(P-4)
RS-76-Eの40重量%PGMEA希釈溶液の代わりに、“メガファック”(登録商標)F477(大日本インキ化学工業(株)製)40重量%PGMEA希釈溶液を用いた以外は、実施例1と同様にして隔壁用樹脂組成物(P-4)を得た。
Example 4 Resin composition for partition wall (P-4)
Examples except that "Megafuck" (registered trademark) F477 (manufactured by Dainippon Ink and Chemicals Co., Ltd.) 40% by weight PGMEA diluted solution was used instead of the 40% by weight PGMEA diluted solution of RS-76-E. A resin composition for partition walls (P-4) was obtained in the same manner as in 1.
実施例5 隔壁用樹脂組成物(P-5)
白色顔料として、R-960を5.00g、樹脂としてポリシロキサン(PSL-4)溶液を5.00g混合し、ジルコニアビーズが充填されたミル型分散機を用いて分散し、顔料分散液(MW-4)を得た。前記顔料分散液(MW-4)を9.98g、前記有機金属化合物溶液(OM-1)を1.86g、前記ポリシロキサン(PSL-4)溶液を1.16g、光塩基発生剤としてWPBG-266を0.10g、撥液化合物としてF477の40重量%PGMEA希釈溶液を1.00g、セロキサイド(登録商標)2021Pを0.100g、キノンジアジド化合物としてTHP-17(商品名、東洋合成工業(株)製)を1.60g、界面活性剤BYK-352のPGMEA10重量%希釈溶液を0.100g、およびPGMEAを4.10g混合し、撹拌した。得られた混合物を、5.0μmのフィルターでろ過し、隔壁用樹脂組成物(P-5)を得た。
Example 5 Resin composition for partition wall (P-5)
5.00 g of R-960 as a white pigment and 5.00 g of a polysiloxane (PSL-4) solution as a resin were mixed and dispersed using a mill-type disperser filled with zirconia beads, and the pigment dispersion liquid (MW) was used. -4) was obtained. 9.98 g of the pigment dispersion (MW-4), 1.86 g of the organic metal compound solution (OM-1), 1.16 g of the polysiloxane (PSL-4) solution, WPBG- as a photobase generator. 0.10 g of 266, 1.00 g of a 40 wt% PGMEA diluted solution of F477 as a liquid repellent compound, 0.100 g of celoxide (registered trademark) 2021P, and THP-17 as a quinonediazide compound (trade name, Toyo Synthetic Industry Co., Ltd.) 1.60 g of PGMEA, 0.100 g of a 10 wt% diluted solution of PGMEA of the surfactant BYK-352, and 4.10 g of PGMEA were mixed and stirred. The obtained mixture was filtered through a 5.0 μm filter to obtain a resin composition for partition walls (P-5).
実施例6 隔壁用樹脂組成物(P-6)
有機金属化合物として、ビス(アセチルアセトナト)パラジウムの代わりにネオデカン酸銀を用いた以外は、前記有機金属化合物溶液(OM-1)と同様にして、有機金属化合物溶液(OM-2)を調製した。有機金属化合物溶液(OM-1)の代わりに、有機金属化合物溶液(OM-2)を用いた以外は、実施例1と同様にして隔壁用樹脂組成物(P-6)を得た。
Example 6 Resin composition for partition wall (P-6)
An organic metal compound solution (OM-2) was prepared in the same manner as the organic metal compound solution (OM-1) except that silver neodecanoate was used instead of bis (acetylacetonato) palladium as the organic metal compound. did. A resin composition for partition walls (P-6) was obtained in the same manner as in Example 1 except that the organometallic compound solution (OM-2) was used instead of the organometallic compound solution (OM-1).
実施例7 隔壁用樹脂組成物(P-7)
有機金属化合物として、ビス(アセチルアセトナト)パラジウムの代わりにクロロトリフェニルホスフィン金を用いた以外は、前記有機金属化合物溶液(OM-1)と同様にして、有機金属化合物溶液(OM-3)を調製した。有機金属化合物溶液(OM-1)の代わりに、有機金属化合物溶液(OM-3)を用いた以外は、実施例1と同様にして隔壁用樹脂組成物(P-7)を得た。
Example 7 Resin composition for partition wall (P-7)
The organometallic compound solution (OM-3) is the same as the organometallic compound solution (OM-1) except that chlorotriphenylphosphine gold is used instead of bis (acetylacetonato) palladium as the organometallic compound. Was prepared. A resin composition for partition walls (P-7) was obtained in the same manner as in Example 1 except that the organometallic compound solution (OM-3) was used instead of the organometallic compound solution (OM-1).
実施例8 隔壁用樹脂組成物(P-8)
有機金属化合物として、ビス(アセチルアセトナト)パラジウムの代わりにビス(アセチルアセトナト)白金を用いた以外は、前記有機金属化合物溶液(OM-1)と同様にして、有機金属化合物溶液(OM-4)を調製した。有機金属化合物溶液(OM-1)の代わりに、有機金属化合物溶液(OM-4)を用いた以外は、実施例1と同様にして隔壁用樹脂組成物(P-8)を得た。
Example 8 Resin composition for partition wall (P-8)
The organic metal compound solution (OM-1) is the same as that of the organic metal compound solution (OM-1) except that bis (acetylacetonato) platinum is used instead of bis (acetylacetonato) palladium as the organic metal compound. 4) was prepared. A resin composition for partition walls (P-8) was obtained in the same manner as in Example 1 except that the organometallic compound solution (OM-4) was used instead of the organometallic compound solution (OM-1).
実施例9 隔壁用樹脂組成物(P-9)
有機金属化合物溶液(OM-1)の添加量を0.929g、ポリシロキサン(PSL-1)溶液の添加量を1.41gに変更し、溶媒としてPGMEA4.20gをPGMEA4.70gに変更した以外は、実施例1と同様にして隔壁用樹脂組成物(P-9)を得た。
Example 9 Resin composition for partition wall (P-9)
Except for changing the addition amount of the organometallic compound solution (OM-1) to 0.929 g, the addition amount of the polysiloxane (PSL-1) solution to 1.41 g, and changing PGMEA 4.20 g to PGMEA 4.70 g as the solvent. , A resin composition for partition walls (P-9) was obtained in the same manner as in Example 1.
実施例10 隔壁用樹脂組成物(P-10)
有機金属化合物溶液(OM-1)の添加量を0.400g、ポリシロキサン(PSL-1)溶液の添加量を1.940gに変更し、溶媒としてPGMEA4.20gをPGMEA6.27gに変更した以外は、実施例1と同様にして隔壁用樹脂組成物(P-10)を得た。
Example 10 Resin composition for partition wall (P-10)
Except for changing the addition amount of the organometallic compound solution (OM-1) to 0.400 g, the addition amount of the polysiloxane (PSL-1) solution to 1.940 g, and changing PGMEA 4.20 g to PGMEA 6.27 g as a solvent. , A resin composition for partition walls (P-10) was obtained in the same manner as in Example 1.
実施例11 隔壁用樹脂組成物(P-11)
有機金属化合物溶液(OM-1)の添加量を4.595g、ポリシロキサン(PSL-1)溶液の添加量を0.010gに変更し、溶媒としてPGMEA4.20gをPGMEA2.92gに変更した以外は、実施例1と同様にして隔壁用樹脂組成物(P-11)を得た。
Example 11 Resin composition for partition wall (P-11)
Except that the addition amount of the organometallic compound solution (OM-1) was changed to 4.595 g, the addition amount of the polysiloxane (PSL-1) solution was changed to 0.010 g, and 4.20 g of PGMEA as a solvent was changed to 2.92 g of PGMEA. , A resin composition for partition wall (P-11) was obtained in the same manner as in Example 1.
実施例12 隔壁用樹脂組成物(P-12)
白色顔料としてR-960を5.00g、樹脂として、ポリシロキサン(PSL-1)溶液を5.00g、黒色顔料として窒化チタンを0.01g混合し、ジルコニアビーズが充填されたミル型分散機を用いて分散し顔料分散液(MW-2)を得た。顔料分散液(MW-1)の代わりに、顔料分散液(MW-2)を9.99g添加し、ポリシロキサン(PSL-1)溶液の添加量を1.38gに変更し、溶媒としてPGMEA4.72gを用いた以外は、実施例9と同様にして隔壁用樹脂組成物(P-12)を得た。
Example 12 Resin composition for partition wall (P-12)
A mill-type disperser filled with zirconia beads by mixing 5.00 g of R-960 as a white pigment, 5.00 g of a polysiloxane (PSL-1) solution as a resin, and 0.01 g of titanium nitride as a black pigment. The pigment dispersion liquid (MW-2) was obtained. Instead of the pigment dispersion (MW-1), 9.99 g of the pigment dispersion (MW-2) was added, the amount of the polysiloxane (PSL-1) solution added was changed to 1.38 g, and PGMEA 4. A resin composition for partition walls (P-12) was obtained in the same manner as in Example 9 except that 72 g was used.
実施例13 隔壁用樹脂組成物(P-13)
樹脂として、ポリシロキサン(PSL-1)溶液を10.0g、黒色顔料として窒化チタンを0.15g混合し、ジルコニアビーズが充填されたミル型分散機を用いて分散し、顔料分散液(MW-3)を得た。顔料分散液(MW-1)の代わりに、顔料分散液(MW-3)を9.99g添加し、ポリシロキサン(PSL-1)溶液の添加量を15.16gに変更し、PGMEAの添加量を4.20gから0.11gに変更した以外は、実施例1と同様にして隔壁用樹脂組成物(P-13)を得た。
Example 13 Resin composition for partition wall (P-13)
10.0 g of a polysiloxane (PSL-1) solution as a resin and 0.15 g of titanium nitride as a black pigment were mixed and dispersed using a mill-type disperser filled with zirconia beads, and a pigment dispersion (MW-) was used. 3) was obtained. Instead of the pigment dispersion liquid (MW-1), 9.99 g of the pigment dispersion liquid (MW-3) was added, the amount of the polysiloxane (PSL-1) solution added was changed to 15.16 g, and the amount of PGMEA added. A resin composition for partition walls (P-13) was obtained in the same manner as in Example 1 except that the amount was changed from 4.20 g to 0.11 g.
実施例14 隔壁用樹脂組成物(P-14)
有機金属化合物溶液(OM-1)の代わりに、有機金属化合物として、ビス(アセチルアセトナト)パラジウムの10%DAA溶液を1.85g用いて、ポリシロキサン(PSL-1)溶液の添加量を1.34gに変更し、溶媒としてPGMEA4.20gをPGMEA3.85gに変更した以外は、実施例1と同様にして隔壁用樹脂組成物(P-14)を得た。
Example 14 Resin composition for partition wall (P-14)
Instead of the organometallic compound solution (OM-1), 1.85 g of a 10% DAA solution of bis (acetylacetonato) palladium was used as the organometallic compound, and the amount of the polysiloxane (PSL-1) solution added was 1. A resin composition for partition walls (P-14) was obtained in the same manner as in Example 1 except that the amount was changed to .34 g and 4.20 g of PGMEA was changed to 3.85 g of PGMEA as a solvent.
実施例15 隔壁用樹脂組成物(P-15)
光塩基発生剤WPBG-266を添加せず、ポリシロキサン(PSL-1)溶液の添加量を1.21gに変更し、溶媒としてPGMEA4.20gをPGMEA4.07gに変更した以外は、実施例1と同様にして隔壁用樹脂組成物(P-15)を得た。
Example 15 Resin composition for partition wall (P-15)
Example 1 and Example 1 except that the photobase generator WPBG-266 was not added, the amount of the polysiloxane (PSL-1) solution added was changed to 1.21 g, and 4.20 g of PGMEA as a solvent was changed to 4.07 g of PGMEA. Similarly, a resin composition for partition walls (P-15) was obtained.
実施例16 隔壁用樹脂組成物(P-16)
撥液化合物RS-76-Eの40重量%PGMEA希釈溶液を添加せず、ポリシロキサン(PSL-1)溶液の添加量を2.01gに変更し、溶媒としてPGMEA4.20gをPGMEA4.17gに変更した以外は、実施例1と同様にして隔壁用樹脂組成物(P-16)を得た。
Example 16 Resin composition for partition wall (P-16)
Without adding the 40 wt% PGMEA diluted solution of the liquid repellent compound RS-76-E, the amount of the polysiloxane (PSL-1) solution added was changed to 2.01 g, and 4.20 g of PGMEA as the solvent was changed to 4.17 g of PGMEA. A resin composition for partition walls (P-16) was obtained in the same manner as in Example 1.
比較例1 隔壁用樹脂組成物(P-17)
有機金属化合物溶液(OM-1)の代わりに、リン原子を有する配位性化合物としてトリフェニルホスフィンを1.861g、DAAを8.139g用いて得た有機金属化合物溶液(OM-5)を0.867g添加し、ポリシロキサン(PSL-1)溶液の添加量を1.41gに変更し、PGMEAの添加量を4.20gから4.76gに変更した以外は、実施例1と同様にして隔壁用樹脂組成物(P-17)を得た。
Comparative Example 1 Resin composition for partition wall (P-17)
Instead of the organometallic compound solution (OM-1), the organometallic compound solution (OM-5) obtained by using 1.861 g of triphenylphosphine and 8.139 g of DAA as a coordinating compound having a phosphorus atom was 0. The partition wall was the same as in Example 1 except that .867 g was added, the amount of the polysiloxane (PSL-1) solution added was changed to 1.41 g, and the amount of PGMEA added was changed from 4.20 g to 4.76 g. A resin composition for use (P-17) was obtained.
比較例2 隔壁用樹脂組成物(P-18)
白色顔料としてR-960を5.00g、樹脂として、ポリシロキサン(PSL-1)溶液を5.00g、および黒色顔料として窒化チタンを0.10g混合し、ジルコニアビーズが充填されたミル型分散機を用いて分散し、顔料分散液(MW-4)を得た。次に、前記顔料分散液(MW-4)を10.02g、前記ポリシロキサン(PSL-1)溶液を1.73g、光重合開始剤としてOXE-02を0.050g、IC-819を0.400g、光塩基発生剤としてWPBG-266を0.10g、光重合性化合物としてDPHAを1.20g、撥液化合物としてRS-76-Eの40重量%PGMEA希釈溶液を1.00g、セロキサイド(登録商標)2021Pを0.100g、IRGANOX(登録商標)1010を0.030g、界面活性剤としてBYK-352のPGMEA10重量%希釈溶液を0.100g、および溶媒としてPGMEAを5.31g混合し、撹拌した。得られた混合物を、5.0μmのフィルターでろ過し、隔壁用樹脂組成物(P-18)を得た。
Comparative Example 2 Resin composition for partition wall (P-18)
A mill-type disperser filled with zirconia beads by mixing 5.00 g of R-960 as a white pigment, 5.00 g of a polysiloxane (PSL-1) solution as a resin, and 0.10 g of titanium nitride as a black pigment. To obtain a pigment dispersion liquid (MW-4). Next, 10.02 g of the pigment dispersion liquid (MW-4), 1.73 g of the polysiloxane (PSL-1) solution, 0.050 g of OXE-02 as a photopolymerization initiator, and 0. 400 g, 0.10 g of WPBG-266 as a photobase generator, 1.20 g of DPHA as a photopolymerizable compound, 1.00 g of a 40 wt% PGMEA diluted solution of RS-76-E as a liquid repellent compound, celoxide (registered). The mixture was mixed with 0.100 g of 2021P, 0.030 g of IRGANOX®, 0.100 g of PGMEA 10 wt% diluted solution of BYK-352 as a surfactant, and 5.31 g of PGMEA as a solvent, and stirred. .. The obtained mixture was filtered through a 5.0 μm filter to obtain a resin composition for partition walls (P-18).
比較例3 隔壁用樹脂組成物(P-19)
白色顔料としてR-960を5.00g、樹脂として、ポリシロキサン(PSL-1)溶液を5.00g、および黒色顔料として窒化ジルコニウムを0.10g混合し、ジルコニアビーズが充填されたミル型分散機を用いて分散し、顔料分散液(MW-5)を得た。顔料分散液(MW-4)の代わりに、顔料分散液(MW-5)を用いた以外は、比較例2と同様にして隔壁用樹脂組成物(P-19)を得た。
Comparative Example 3 Resin composition for partition wall (P-19)
A mill-type disperser filled with zirconia beads by mixing 5.00 g of R-960 as a white pigment, 5.00 g of a polysiloxane (PSL-1) solution as a resin, and 0.10 g of zirconium nitride as a black pigment. To obtain a pigment dispersion liquid (MW-5). A resin composition for partition walls (P-19) was obtained in the same manner as in Comparative Example 2 except that the pigment dispersion liquid (MW-5) was used instead of the pigment dispersion liquid (MW-4).
比較例4 隔壁用樹脂組成物(P-20)
白色顔料としてR-960を5.00g、樹脂として、ポリシロキサン(PSL-1)溶液を5.00g、および黒色顔料として、赤色顔料PR254と青色顔料PB64の重量比60/40の混合顔料を0.05g混合し、ジルコニアビーズが充填されたミル型分散機を用いて分散し、顔料分散液(MW-6)を得た。顔料分散液(MW-4)の代わりに、顔料分散液(MW-6)を用いた以外は、比較例2と同様にして隔壁用樹脂組成物(P-20)を得た。
Comparative Example 4 Resin composition for partition wall (P-20)
5.00 g of R-960 as a white pigment, 5.00 g of a polysiloxane (PSL-1) solution as a resin, and 0 as a black pigment, a mixed pigment having a weight ratio of 60/40 of the red pigment PR254 and the blue pigment PB64. A mixture of 0.05 g was dispersed using a mill-type disperser filled with zirconia beads to obtain a pigment dispersion (MW-6). A resin composition for partition walls (P-20) was obtained in the same manner as in Comparative Example 2 except that the pigment dispersion liquid (MW-6) was used instead of the pigment dispersion liquid (MW-4).
比較例5 隔壁用樹脂組成物(P-21)
有機金属化合物として、ビス(アセチルアセトナト)パラジウムの代わりにトリス(アセチルアセトナト)鉄を用いた以外は、前記有機金属化合物溶液(OM-1)と同様にして、有機金属化合物溶液(OM-5)を調製した。有機金属化合物溶液(OM-1)の代わりに、有機金属化合物溶液(OM-5)を用いた以外は、実施例1と同様にして隔壁用樹脂組成物(P-21)を得た。
Comparative Example 5 Resin composition for partition wall (P-21)
The organic metal compound solution (OM-1) is the same as that of the organic metal compound solution (OM-1) except that tris (acetylacetonato) iron is used instead of bis (acetylacetonato) palladium as the organic metal compound. 5) was prepared. A resin composition for partition walls (P-21) was obtained in the same manner as in Example 1 except that the organometallic compound solution (OM-5) was used instead of the organometallic compound solution (OM-1).
比較例6 隔壁用樹脂組成物(P-22)
有機金属化合物として、ビス(アセチルアセトナト)パラジウムの代わりにビス(アセチルアセトナト)ニッケルを用いた以外は、前記有機金属化合物溶液(OM-1)と同様にして、有機金属化合物溶液(OM-5)を調製した。有機金属化合物溶液(OM-1)の代わりに、有機金属化合物溶液(OM-6)を用いた以外は、実施例1と同様にして隔壁用樹脂組成物(P-22)を得た。
Comparative Example 6 Resin composition for partition wall (P-22)
The organic metal compound solution (OM-1) is the same as that of the organic metal compound solution (OM-1) except that bis (acetylacetonato) nickel is used instead of bis (acetylacetonato) palladium as the organic metal compound. 5) was prepared. A resin composition for partition walls (P-22) was obtained in the same manner as in Example 1 except that the organometallic compound solution (OM-6) was used instead of the organometallic compound solution (OM-1).
実施例1~16および比較例1~6の組成をまとめて表2~3に示す。 The compositions of Examples 1 to 16 and Comparative Examples 1 to 6 are collectively shown in Tables 2 to 3.
調製例1 色変換発光材料組成物(CL-1)
緑色量子ドット材料(Lumidot 640 CdSe/ZnS、平均粒子径6.3nm:アルドリッチ社製)の0.5重量%トルエン溶液を20重量部、DPHAを45重量部、“イルガキュア”(登録商標)907(BASFジャパン(株)製)を5重量部、アクリル樹脂(SPCR-18(商品名)、昭和電工(株)製)の30重量%PGMEA溶液を166重量部およびトルエンを97重量部混合して撹拌し、均一に溶解した。得られた混合物を0.45μmのシリンジフィルターで濾過し、色変換発光材料組成物(CL-1)を調製した
調製例2 色変換発光材料組成物(CL-2)
緑色量子ドット材料にかえて合成例5により得られた緑色蛍光体G-1を0.4重量部用い、トルエンの添加量を117重量部に変更した以外は、調製例1と同様にして色変換発光材料組成物(CL-2)を調製した
調製例3 色変換発光材料組成物(CL-3)
緑色量子ドット材料にかえて合成例6により得られた赤色蛍光体R-1を0.4重量部用い、トルエンの添加量を117重量部に変更した以外は、調製例1と同様にして色変換発光材料組成物(CL-3)を調製した
調製例4 カラーフィルター形成材料(CF-1)
C.I.ピグメントグリーン59を90g、C.I.ピグメントイエロー150を60g、高分子分散剤(“BYK”(登録商標)-6919(商品名)ビックケミー社製(以下「BYK-6919」))を75g、バインダー樹脂(“アデカアークルズ”(登録商標)WR301(商品名)(株)ADEKA製)を100g、およびPGMEAを675g混合してスラリーを作製した。スラリーを入れたビーカーをダイノーミルとチューブでつなぎ、メディアとして直径0.5mmのジルコニアビーズを使用して、周速14m/sで8時間の分散処理を行い、ピグメントグリーン59分散液(GD-1)を作製した。
Preparation Example 1 Color conversion light emitting material composition (CL-1)
20 parts by weight of 0.5 wt% toluene solution of green quantum dot material (Lumidot 640 CdSe / ZnS, average particle diameter 6.3 nm: manufactured by Aldrich), 45 parts by weight of DPHA, "Irgacure" (registered trademark) 907 (registered trademark). Mix 5 parts by weight of BASF Japan Co., Ltd., 166 parts by weight of 30% by weight PGMEA solution of acrylic resin (SPCR-18 (trade name), manufactured by Showa Denko Corporation) and 97 parts by weight of toluene and stir. And dissolved uniformly. The obtained mixture was filtered through a 0.45 μm syringe filter to prepare a color-converting luminescent material composition (CL-1). Preparation Example 2 Color-converting luminescent material composition (CL-2)
The color was the same as in Preparation Example 1 except that 0.4 parts by weight of the green phosphor G-1 obtained in Synthesis Example 5 was used instead of the green quantum dot material and the amount of toluene added was changed to 117 parts by weight. Preparation Example 3 for which the conversion light emitting material composition (CL-2) was prepared 3 color conversion light emitting material composition (CL-3)
The color was the same as in Preparation Example 1 except that 0.4 parts by weight of the red phosphor R-1 obtained in Synthesis Example 6 was used instead of the green quantum dot material and the amount of toluene added was changed to 117 parts by weight. Preparation Example 4 for which the conversion light emitting material composition (CL-3) was prepared Preparation example 4 Color filter forming material (CF-1)
C. I. Pigment Green 59 90g, C.I. I. Pigment Yellow 150 60 g, polymer dispersant (“BYK” (registered trademark) -6919 (trade name) manufactured by Big Chemie (hereinafter “BYK-6919”)) 75 g, binder resin (“ADEKA ARCULDS” (registered trademark)) ) 100 g of WR301 (trade name) manufactured by ADEKA CORPORATION and 675 g of PGMEA were mixed to prepare a slurry. A beaker containing the slurry was connected to a dyno mill with a tube, and zirconia beads having a diameter of 0.5 mm were used as a medium for dispersion treatment at a peripheral speed of 14 m / s for 8 hours. Pigment Green 59 dispersion liquid (GD-1). Was produced.
ピグメントグリーン59分散液(GD-1)56.54g、アクリル樹脂(“サイクロマー”(登録商標)P(ACA)Z250(商品名)ダイセル・オルネクス(株)製(以下「P(ACA)Z250」))を3.14g、DPHAを2.64g、光重合開始剤(“オプトマー”(登録商標)NCI-831(商品名)(株)ADEKA製(以下「NCI-831」))0.330g、界面活性剤(BYK”(登録商標)-333(商品名)ビックケミー社製(以下「BYK-333」))を0.04g、重合禁止剤としてBHTを0.01g、および溶媒としてPGMEAを37.30g混合し、カラーフィルター形成材料(CF-1)を作製した。 Pigment Green 59 Dispersion (GD-1) 56.54g, Acrylic Resin ("Cyclomer" (registered trademark) P (ACA) Z250 (trade name) manufactured by Daicel Ornex Co., Ltd. (hereinafter "P (ACA) Z250"" )) 3.14 g, DPHA 2.64 g, photopolymerization initiator (“Optomer” (registered trademark) NCI-831 (trade name) manufactured by ADEKA Co., Ltd. (hereinafter “NCI-831”)) 0.330 g, 0.04 g of a surfactant (BYK (registered trademark) -333 (trade name) manufactured by Big Chemie (hereinafter referred to as “BYK-333”)), 0.01 g of BHT as a polymerization inhibitor, and 37. PGMEA as a solvent. 30 g was mixed to prepare a color filter forming material (CF-1).
調製例5 遮光隔壁用樹脂組成物
カーボンブラック(MA100(商品名)三菱化学(株)製)150g、高分子分散剤BYK-6919を75g、P(ACA)Z250を100g、およびPGMEAを675g混合してスラリーを作製した。スラリーを入れたビーカーをダイノーミルとチューブでつなぎ、メディアとして直径0.5mmのジルコニアビーズを使用して、周速14m/sで8時間の分散処理を行い、顔料分散液(MB-1)を作製した。
Preparation Example 5 Resin composition for light-shielding partition carbon black (MA100 (trade name) manufactured by Mitsubishi Chemical Corporation) 150 g, polymer dispersant BYK-6919 (75 g), P (ACA) Z250 (100 g), and PGMEA (675 g) are mixed. To prepare a slurry. A beaker containing the slurry was connected to a dyno mill with a tube, and zirconia beads having a diameter of 0.5 mm were used as a medium for dispersion treatment at a peripheral speed of 14 m / s for 8 hours to prepare a pigment dispersion liquid (MB-1). did.
顔料分散液(MB-1)56.54g、P(ACA)Z250を3.14g、DPHAを2.64g、NCI-831を0.330g、BYK-333を0.04g、重合禁止剤としてターシャリブチルカテコール0.01g、およびPGMEA37.30gを混合し、遮光隔壁用樹脂組成物を作製した。 Pigment dispersion (MB-1) 56.54 g, P (ACA) Z250 3.14 g, DPHA 2.64 g, NCI-831 0.330 g, BYK-333 0.04 g, as a polymerization inhibitor. 0.01 g of butylcatechol and 37.30 g of PGMEA were mixed to prepare a resin composition for a light-shielding partition wall.
調製例6 低屈折率層形成材料
合成例6により得られたシリカ粒子含有ポリシロキサン溶液(LS-1)を5.350g、エチレングリコールモノ-t-ブチルエーテルを1.170g、およびDAAを3.48g混合した後、0.45μmのシリンジフィルターで濾過し、低屈折率層形成材料を調製した。
調製例7 黄色有機保護層形成材料(YL-1)
C.I.ピグメントイエロー150を150g、高分子分散剤(“BYK”(登録商標)-6919(商品名)ビックケミー社製(以下「BYK-6919」))を75g、バインダー樹脂(“アデカアークルズ”(登録商標)WR301(商品名)(株)ADEKA製)を100g、およびPGMEAを675g混合してスラリーを作製した。スラリーを入れたビーカーをダイノーミルとチューブでつなぎ、メディアとして直径0.5mmのジルコニアビーズを使用して、周速14m/sで8時間の分散処理を行い、ピグメントイエロー150分散液(YD-1)を作製した。
Preparation Example 6 Low Refractive Index Layer Forming Material 5.350 g of silica particle-containing polysiloxane solution (LS-1) obtained in Synthesis Example 6, 1.170 g of ethylene glycol mono-t-butyl ether, and 3.48 g of DAA. After mixing, filtration was performed with a 0.45 μm syringe filter to prepare a low refractive index layer forming material.
Preparation Example 7 Yellow Organic Protective Layer Forming Material (YL-1)
C. I. Pigment Yellow 150 g, polymer dispersant (“BYK” (registered trademark) -6919 (trade name) manufactured by Big Chemie (hereinafter “BYK-6919”)) 75 g, binder resin (“ADEKA ARCULDS” (registered trademark)) ) 100 g of WR301 (trade name) manufactured by ADEKA CORPORATION and 675 g of PGMEA were mixed to prepare a slurry. A beaker containing the slurry was connected to a dyno mill with a tube, and zirconia beads having a diameter of 0.5 mm were used as a medium for dispersion treatment at a peripheral speed of 14 m / s for 8 hours. Pigment Yellow 150 dispersion liquid (YD-1). Was produced.
ピグメントイエロー150分散液(YD-1)3.09g、樹脂としてポリシロキサン(PSL-1)溶液を23.54g、光重合性化合物としてDPHAを6.02g、有機金属化合物としてネオデカン酸銀を用いて調製した有機金属化合物溶液(OM-2)を6.02g、光重合開始剤としてOXE-02を0.20g、IC-819を0.40g、IRGANOX(登録商標)1010を0.060g、およびBYK-352のPGMEA10重量%希釈溶液0.050g(濃度500ppmに相当)を、溶媒PGMEA61.15gに溶解させ、撹拌した。得られた混合物を、5.0μmのフィルターでろ過し、黄色有機保護層形成材料(YL-1)を得た。 Pigment Yellow 150 dispersion (YD-1) 3.09 g, polysiloxane (PSL-1) solution 23.54 g as resin, DPHA 6.02 g as photopolymerizable compound, and silver neodecanoate as organic metal compound. 6.02 g of the prepared organic metal compound solution (OM-2), 0.20 g of OXE-02 as a photopolymerization initiator, 0.40 g of IC-819, 0.060 g of IRGANOX® 1010, and BYK. 0.050 g of a 10 wt% diluted solution of PGMEA of -352 (corresponding to a concentration of 500 ppm) was dissolved in 61.15 g of the solvent PGMEA and stirred. The obtained mixture was filtered through a 5.0 μm filter to obtain a yellow organic protective layer forming material (YL-1).
(実施例17~20、実施例22~28、実施例38~45、比較例7~9)
下地基板として10cm角の無アルカリガラス基板(AGCテクノグラス(株)製、厚み0.7mm)を用いた。その上に、表4~5に示す隔壁用樹脂組成物をスピンコートし、ホットプレート(商品名SCW-636、大日本スクリーン製造(株)製)を用いて、温度90℃で2分間乾燥し、乾燥膜を作製した。作製した乾燥膜を、パラレルライトマスクアライナー(商品名PLA-501F、キヤノン(株)製)を用いて、超高圧水銀灯を光源とし、フォトマスクを介して、露光量200mJ/cm2(i線)で露光した。その後、自動現像装置(滝沢産業(株)製「AD-2000(商品名)」)を用いて、0.045重量%水酸化カリウム水溶液を用いて100秒間シャワー現像し、次いで水を用いて30秒間リンスした。さらに、オーブン(商品名IHPS-222、エスペック(株)製)を用いて、空気中、温度230℃で30分間加熱し、ガラス基板上に、高さ10μm、幅20μmの隔壁が、短辺30μm、長辺150μmのピッチ間隔の格子状パターンに形成された隔壁を形成した。
(Examples 17 to 20, Examples 22 to 28, Examples 38 to 45, Comparative Examples 7 to 9)
A 10 cm square non-alkali glass substrate (manufactured by AGC Technoglass Co., Ltd., thickness 0.7 mm) was used as the base substrate. The resin composition for partition walls shown in Tables 4 to 5 is spin-coated on the resin composition and dried at a temperature of 90 ° C. for 2 minutes using a hot plate (trade name SCW-636, manufactured by Dainippon Screen Mfg. Co., Ltd.). , A dry film was prepared. The prepared dry film was subjected to a parallel light mask aligner (trade name PLA-501F, manufactured by Canon Inc.) using an ultrahigh pressure mercury lamp as a light source, and an exposure amount of 200 mJ / cm 2 (i-line) via a photomask. Exposed with. Then, using an automatic developing device (“AD-2000 (trade name)” manufactured by Takizawa Sangyo Co., Ltd.), shower-development was performed for 100 seconds using a 0.045 wt% potassium hydroxide aqueous solution, and then 30 using water. Rinse for a second. Further, using an oven (trade name IHPS-222, manufactured by ESPEC CORPORATION), the partition is heated in air at a temperature of 230 ° C. for 30 minutes, and a partition wall having a height of 10 μm and a width of 20 μm is formed on a glass substrate with a short side of 30 μm. , A partition wall formed in a grid pattern with a pitch interval of 150 μm on the long side was formed.
得られた隔壁付き基板の隔壁で隔てられた領域に、窒素雰囲気下、インクジェット法を用いて、表4~5に示す色変換発光材料組成物を塗布し、100℃で30分間乾燥し、厚み5.0μmの画素を形成し、図2に示す構成の隔壁付き基板を得た。 The color conversion luminescent material composition shown in Tables 4 to 5 was applied to the region separated by the partition wall of the obtained substrate with partition wall under a nitrogen atmosphere by an inkjet method, dried at 100 ° C. for 30 minutes, and thickened. A 5.0 μm pixel was formed, and a substrate with a partition wall having the configuration shown in FIG. 2 was obtained.
(実施例21)
下地基板として10cm角の無アルカリガラス基板(AGCテクノグラス(株)製、厚み0.7mm)を用いた。その上に、表4に示す隔壁用樹脂組成物をスピンコートし、ホットプレート(商品名SCW-636、大日本スクリーン製造(株)製)を用いて、温度90℃で2分間乾燥し、乾燥膜を作製した。作製した乾燥膜を、パラレルライトマスクアライナー(商品名PLA-501F、キヤノン(株)製)を用いて、超高圧水銀灯を光源とし、フォトマスクを介して、露光量200mJ/cm2(i線)で露光した。その後、自動現像装置(滝沢産業(株)製「AD-2000(商品名)」)を用いて、2.38重量%水酸化テトラメチルアンモニウム水溶液で90秒間シャワー現像し、次いで水で30秒間リンスした。その後、先と同様に、フォトマスクを介さずに露光量500mJ/cm2(i線)で露光し、ブリーチを行った。さらに、オーブン(商品名IHPS-222、エスペック(株)製)を用いて、空気中、温度230℃で30分間加熱し、ガラス基板上に、高さ10μm、幅20μmの隔壁が、短辺30μm、長辺150μmのピッチ間隔の格子状パターンに形成された隔壁を形成した。
(Example 21)
A 10 cm square non-alkali glass substrate (manufactured by AGC Technoglass Co., Ltd., thickness 0.7 mm) was used as the base substrate. The resin composition for a partition wall shown in Table 4 is spin-coated on the resin composition, and dried using a hot plate (trade name SCW-636, manufactured by Dainippon Screen Mfg. Co., Ltd.) at a temperature of 90 ° C. for 2 minutes. A membrane was prepared. The prepared dry film was subjected to a parallel light mask aligner (trade name PLA-501F, manufactured by Canon Inc.) using an ultrahigh pressure mercury lamp as a light source, and an exposure amount of 200 mJ / cm 2 (i-line) via a photomask. Exposed with. Then, using an automatic developing device (“AD-2000 (trade name)” manufactured by Takizawa Sangyo Co., Ltd.), shower develop with 2.38 wt% tetramethylammonium hydroxide aqueous solution for 90 seconds, and then rinse with water for 30 seconds. did. Then, in the same manner as before, exposure was performed with an exposure amount of 500 mJ / cm 2 (i-line) without using a photomask, and bleaching was performed. Further, using an oven (trade name IHPS-222, manufactured by ESPEC CORPORATION), the partition is heated in air at a temperature of 230 ° C. for 30 minutes, and a partition wall having a height of 10 μm and a width of 20 μm is formed on a glass substrate with a short side of 30 μm. , A partition wall formed in a grid pattern with a pitch interval of 150 μm on the long side was formed.
得られた隔壁付き基板の隔壁で隔てられた領域に、窒素雰囲気下、インクジェット法を用いて、表4~5に示す色変換発光材料組成物を塗布し、100℃で30分間乾燥し、厚み5.0μmの画素を形成し、図2に示す構成の隔壁付き基板を得た。 The color conversion luminescent material composition shown in Tables 4 to 5 was applied to the region separated by the partition wall of the obtained substrate with partition wall under a nitrogen atmosphere by an inkjet method, dried at 100 ° C. for 30 minutes, and thickened. A 5.0 μm pixel was formed, and a substrate with a partition wall having the configuration shown in FIG. 2 was obtained.
(実施例29)
実施例18と同様の方法により画素を形成した後の隔壁付き基板に、低屈折率層形成材料をスピンコートし、ホットプレート(商品名SCW-636、大日本スクリーン製造(株)製)を用いて、温度90℃で2分間乾燥し、乾燥膜を作製した。さらに、オーブン(商品名IHPS-222、エスペック(株)製)を用いて、空気中、温度90℃で30分間加熱し、低屈折率層を形成し、図3に示す構成の隔壁付き基板を得た。
(Example 29)
A low refractive index layer forming material is spin-coated on a substrate with a partition wall after pixels are formed by the same method as in Example 18, and a hot plate (trade name SCW-636, manufactured by Dainippon Screen Mfg. Co., Ltd.) is used. Then, it was dried at a temperature of 90 ° C. for 2 minutes to prepare a dry film. Further, using an oven (trade name IHPS-222, manufactured by ESPEC CORPORATION), the substrate with a partition wall having the configuration shown in FIG. 3 is formed by heating in air at a temperature of 90 ° C. for 30 minutes to form a low refractive index layer. Obtained.
(実施例30)
実施例29により得られた低屈折率層を有する隔壁付き基板の低屈折率層上に、プラズマCVD装置(PD-220NL、サムコ社製)を用いて、厚み50~1,000nmの無機保護層Iに相当する、膜厚300nmの窒化ケイ素膜を形成し、図4に示す構成の隔壁付き基板を得た。
(Example 30)
An inorganic protective layer having a thickness of 50 to 1,000 nm was used on a low refractive index layer of a substrate with a partition wall having a low refractive index layer obtained in Example 29 using a plasma CVD apparatus (PD-220NL, manufactured by SAMCO). A silicon nitride film having a thickness of 300 nm corresponding to I was formed, and a substrate with a partition wall having the configuration shown in FIG. 4 was obtained.
(実施例31)
実施例18により得られた隔壁付き基板上に、プラズマCVD装置(PD-220NL、サムコ社製)を用いて、厚み50~1,000nmの無機保護層IIに相当する、膜厚300nmの窒化ケイ素膜を画素上層に形成した。その後、無機保護層II上に、調製例6により得られた低率層形成材料を用いて、実施例29と同様の方法により厚み1.0μmの低屈折率層を形成し、図5に示す構成の隔壁付き基板を得た。
(Example 31)
On the substrate with a partition wall obtained in Example 18, a plasma CVD apparatus (PD-220NL, manufactured by SAMCO Corporation) was used to make silicon nitride having a thickness of 300 nm, which corresponds to an inorganic protective layer II having a thickness of 50 to 1,000 nm. A film was formed on the upper layer of the pixel. Then, on the inorganic protective layer II, a low refractive index layer having a thickness of 1.0 μm was formed by the same method as in Example 29 using the low rate layer forming material obtained in Preparation Example 6, and is shown in FIG. A substrate with a partition wall having a configuration was obtained.
(実施例32)
実施例17と同様の方法により得られた、画素形成前の隔壁付き基板の隔壁で隔てられた領域に、硬化後の膜厚が2.5μmになるように、調製例4により得られたカラーフィルター形成材料(CF-1)を塗布し、真空乾燥した。隔壁付き基板の開口部の領域に露光されるように設計したフォトマスクを介して、露光量40mJ/cm2(i線)で露光した。0.3重量%テトラメチルアンモニウム水溶液により50秒間現像を行った後、230℃で30分間加熱硬化を行い、隔壁で隔てられた領域に、厚み2.5μm、50μm幅のカラーフィルターを形成した。その後、カラーフィルター上に、窒素雰囲気下、インクジェット法を用いて、調製例2により得られた色変換発光材料組成物(CL-2)を塗布し、100℃で30分間乾燥し、厚み5.0μmの画素を形成し、図6に示す構成の隔壁付き基板を得た。
(Example 32)
The color obtained by Preparation Example 4 so that the film thickness after curing is 2.5 μm in the region separated by the partition wall of the substrate with the partition wall before pixel formation, which was obtained by the same method as in Example 17. A filter forming material (CF-1) was applied and vacuum dried. Exposure was performed at an exposure rate of 40 mJ / cm 2 (i-line) through a photomask designed to be exposed to the area of the opening of the substrate with a partition wall. After developing for 50 seconds with a 0.3 wt% tetramethylammonium aqueous solution, heat curing was performed at 230 ° C. for 30 minutes to form a color filter having a thickness of 2.5 μm and a width of 50 μm in a region separated by a partition wall. Then, the color conversion light emitting material composition (CL-2) obtained in Preparation Example 2 was applied onto the color filter under a nitrogen atmosphere using an inkjet method, dried at 100 ° C. for 30 minutes, and the thickness was 5. A 0 μm pixel was formed, and a substrate with a partition wall having the configuration shown in FIG. 6 was obtained.
(実施例33)
実施例32と同様の方法により得られた、厚み2.5μm、50μm幅のカラーフィルターが形成された、画素形成前の隔壁付き基板のカラーフィルター上に、プラズマCVD装置(PD-220NL、サムコ社製)を用いて、厚み50~1,000nmの無機保護層IIIに相当する、膜厚300nmの窒化ケイ素膜を形成した。さらに、無機保護層III上に、窒素雰囲気下、インクジェット法を用いて、調製例2により得られた色変換発光材料組成物(CL-2)を塗布し、100℃で30分間乾燥し、厚み5.0μmの画素を形成し、図7に示す構成の隔壁付き基板を得た。
(Example 33)
A plasma CVD apparatus (PD-220NL, SAMCO) was obtained on a color filter of a substrate with a partition wall before pixel formation, in which a color filter having a thickness of 2.5 μm and a width of 50 μm was formed, which was obtained by the same method as in Example 32. A silicon nitride film having a thickness of 300 nm, which corresponds to an inorganic protective layer III having a thickness of 50 to 1,000 nm, was formed. Further, the color conversion light emitting material composition (CL-2) obtained in Preparation Example 2 was applied onto the inorganic protective layer III under a nitrogen atmosphere using an inkjet method, dried at 100 ° C. for 30 minutes, and thickened. A 5.0 μm pixel was formed, and a substrate with a partition wall having the configuration shown in FIG. 7 was obtained.
(実施例34)
下地基板として10cm角の無アルカリガラス基板(AGCテクノグラス(株)製、厚み0.7mm)を用いた。その上に、プラズマCVD装置(PD-220NL、サムコ社製)を用いて、厚み50~1,000nmの無機保護層IVに相当する、膜厚300nmの窒化ケイ素膜を形成した。上記基板を、10cm角の無アルカリガラス基板の代わりに使用する以外は、実施例31と同様の方法により、図8に示す構成の隔壁付き基板を得た。
(実施例35)
実施例32と同様の方法により得られた、厚み2.5μm、50μm幅のカラーフィルターが形成された、画素形成前の隔壁付き基板のカラーフィルター上に、調製例7により得られた黄色有機保護層形成材料(YL-1)を塗布し、真空乾燥した。隔壁付き基板の開口部の領域に露光されるように設計したフォトマスクを介して、露光量40mJ/cm2(i線)で露光した。0.3重量%テトラメチルアンモニウム水溶液により50秒間現像を行った後、230℃で30分間加熱硬化を行い、厚み1.0μm、50μm幅の黄色有機保護層を形成した。さらに、黄色有機保護層上に、窒素雰囲気下、インクジェット法を用いて、調製例2により得られた色変換発光材料組成物(CL-2)を塗布し、100℃で30分間乾燥し、厚み5.0μmの画素を形成し、図7に示す構成の隔壁付き基板を得た。
(Example 34)
A 10 cm square non-alkali glass substrate (manufactured by AGC Technoglass Co., Ltd., thickness 0.7 mm) was used as the base substrate. On it, a plasma CVD apparatus (PD-220NL, manufactured by SAMCO Corporation) was used to form a silicon nitride film having a film thickness of 300 nm, which corresponds to an inorganic protective layer IV having a thickness of 50 to 1,000 nm. A substrate with a partition wall having the configuration shown in FIG. 8 was obtained by the same method as in Example 31 except that the substrate was used instead of the 10 cm square non-alkali glass substrate.
(Example 35)
The yellow organic protection obtained by Preparation Example 7 was placed on the color filter of the substrate with a partition wall before pixel formation, in which a color filter having a thickness of 2.5 μm and a width of 50 μm was formed, which was obtained by the same method as in Example 32. The layer forming material (YL-1) was applied and vacuum dried. Exposure was performed at an exposure rate of 40 mJ / cm 2 (i-line) through a photomask designed to be exposed to the area of the opening of the substrate with a partition wall. After developing with a 0.3 wt% tetramethylammonium aqueous solution for 50 seconds, it was heat-cured at 230 ° C. for 30 minutes to form a yellow organic protective layer having a thickness of 1.0 μm and a width of 50 μm. Further, the color conversion light emitting material composition (CL-2) obtained in Preparation Example 2 was applied onto the yellow organic protective layer under a nitrogen atmosphere using an inkjet method, dried at 100 ° C. for 30 minutes, and thickened. A 5.0 μm pixel was formed, and a substrate with a partition wall having the configuration shown in FIG. 7 was obtained.
(実施例36)
下地基板として10cm角の無アルカリガラス基板(AGCテクノグラス(株)製、厚み0.7mm)を用いた。その上に、調製例7により得られた黄色有機保護層形成材料(YL-1)を塗布し、真空乾燥した。乾燥膜をフォトマスクを介さずに、露光量40mJ/cm2(i線)で露光した後、0.3重量%テトラメチルアンモニウム水溶液により50秒間現像を行い、230℃で30分間加熱硬化を行うことで、厚み1.0μmの黄色有機保護層を形成した。上記基板を、10cm角の無アルカリガラス基板の代わりに使用する以外は、実施例31と同様の方法により、図8に示す構成の隔壁付き基板を得た。
(Example 36)
A 10 cm square non-alkali glass substrate (manufactured by AGC Technoglass Co., Ltd., thickness 0.7 mm) was used as the base substrate. The yellow organic protective layer forming material (YL-1) obtained in Preparation Example 7 was applied thereto, and the mixture was vacuum dried. The dried film is exposed to an exposure amount of 40 mJ / cm 2 (i-line) without using a photomask, then developed with a 0.3 wt% tetramethylammonium aqueous solution for 50 seconds, and heat-cured at 230 ° C. for 30 minutes. As a result, a yellow organic protective layer having a thickness of 1.0 μm was formed. A substrate with a partition wall having the configuration shown in FIG. 8 was obtained by the same method as in Example 31 except that the substrate was used instead of the 10 cm square non-alkali glass substrate.
(実施例37)
下地基板として10cm角の無アルカリガラス基板(AGCテクノグラス(株)製、厚み0.7mm)を用いた。その上に、調製例5により得られた遮光隔壁形成材料をスピンコートし、ホットプレート(商品名SCW-636、大日本スクリーン製造(株)製)を用いて、温度90℃で2分間乾燥し、乾燥膜を作製した。作製した乾燥膜を、パラレルライトマスクアライナー(商品名PLA-501F、キヤノン(株)製)を用いて、超高圧水銀灯を光源とし、フォトマスクを介して、露光量40mJ/cm2(i線)で露光した。その後、自動現像装置(滝沢産業(株)製「AD-2000(商品名)」)を用いて、0.3重量%テトラメチルアンモニウム水溶液により50秒間現像を行い、次いで水を用いて30秒間リンスした。さらに、オーブン(商品名IHPS-222、エスペック(株)製)を用いて、空気中、温度230℃で30分間加熱し、ガラス基板上に、高さ2.0μm、幅20μm、厚み1.0μmあたりのOD値が2.0である隔壁が、短辺30μm、長辺150μmのピッチ間隔の格子状パターンに形成された遮光隔壁付き基板を得た。その後、実施例17と同様の方法により、遮光隔壁上に、高さ10μm、幅20μmの隔壁が、短辺30μm、長辺150μmのピッチ間隔の遮光隔壁と同様の格子状パターンに形成された隔壁付き基板を得た。得られた隔壁付き基板の隔壁で隔てられた領域に、窒素雰囲気下、インクジェット法を用いて、調製例22により得られた色変換発光材料組成物(CL-2)を塗布し、100℃で30分間乾燥し、厚み5.0μmの画素を形成し、図9に示す構成の隔壁付き基板を得た。
(Example 37)
A 10 cm square non-alkali glass substrate (manufactured by AGC Technoglass Co., Ltd., thickness 0.7 mm) was used as the base substrate. On it, the light-shielding partition wall forming material obtained in Preparation Example 5 was spin-coated and dried at a temperature of 90 ° C. for 2 minutes using a hot plate (trade name SCW-636, manufactured by Dainippon Screen Mfg. Co., Ltd.). , A dry film was prepared. The prepared dry film was subjected to a parallel light mask aligner (trade name PLA-501F, manufactured by Canon Inc.) using an ultrahigh pressure mercury lamp as a light source, and an exposure amount of 40 mJ / cm 2 (i-line) via a photomask. Exposed with. Then, using an automatic developing device (“AD-2000 (trade name)” manufactured by Takizawa Sangyo Co., Ltd.), develop with a 0.3 wt% tetramethylammonium aqueous solution for 50 seconds, and then rinse with water for 30 seconds. did. Further, using an oven (trade name IHPS-222, manufactured by ESPEC CORPORATION), the mixture is heated in air at a temperature of 230 ° C. for 30 minutes, and is placed on a glass substrate with a height of 2.0 μm, a width of 20 μm, and a thickness of 1.0 μm. A substrate with a light-shielding partition was obtained in which the partition wall having an OD value of 2.0 was formed in a grid pattern with a pitch interval of 30 μm on the short side and 150 μm on the long side. Then, by the same method as in Example 17, a partition wall having a height of 10 μm and a width of 20 μm is formed on the light-shielding partition wall in a grid pattern similar to that of the light-shielding partition wall having a pitch interval of 30 μm on the short side and 150 μm on the long side. Obtained a substrate with. The color conversion light emitting material composition (CL-2) obtained in Preparation Example 22 was applied to the region of the obtained substrate with a partition wall separated by the partition wall in a nitrogen atmosphere by an inkjet method, and at 100 ° C. After drying for 30 minutes, pixels having a thickness of 5.0 μm were formed, and a substrate with a partition wall having the configuration shown in FIG. 9 was obtained.
各実施例および比較例の構成を表4~5に示す。 The configurations of each Example and Comparative Example are shown in Tables 4 to 5.
各実施例および比較例における評価方法を以下に示す。 The evaluation methods in each Example and Comparative Example are shown below.
<白色顔料の屈折率>
各実施例および比較例に用いた白色顔料について、JIS K7142-2014(制定年月日=2014/04/20)に規定されるプラスチックの屈折率測定方法のうち、B法(顕微鏡を用いる液浸法(ベッケ線法))によって屈折率を測定した。測定波長は550nmとした。ただし、JIS K7142-2014で使用される浸液に代えて、(株)島津デバイス製造製「接触液」を使用し、浸液温度:20℃の条件で測定した。顕微鏡として、偏光顕微鏡「オプチフォト」((株)ニコン製)を使用した。白色顔料のサンプルを各30個準備し、それぞれの屈折率を測定し、その平均値を屈折率とした。
<Refractive index of white pigment>
For the white pigments used in each Example and Comparative Example, among the methods for measuring the refractive index of plastics specified in JIS K7142-2014 (establishment date = 2014/04/20), the B method (immersion using a microscope) The refractive index was measured by the method (Becke line method). The measurement wavelength was 550 nm. However, instead of the immersion liquid used in JIS K712-2014, "contact liquid" manufactured by Shimadzu Device Co., Ltd. was used, and the measurement was performed under the condition of immersion liquid temperature: 20 ° C. As a microscope, a polarizing microscope "Optiphoto" (manufactured by Nikon Corporation) was used. Thirty samples of white pigment were prepared, the refractive index of each was measured, and the average value was taken as the refractive index.
<ポリシロキサンおよび低屈折率層の屈折率>
各実施例および比較例において用いた隔壁形成樹脂組成物の原料であるポリシロキサンおよび調製例26により得られた低屈折率層形成材料を、それぞれシリコンウェハ上に、スピナーにより塗布し、ホットプレート(商品名SCW-636、大日本スクリーン製造(株)製)を用いて、温度90℃で2分間乾燥した。その後、オーブン(IHPS-222;エスペック(株)製)を用いて、空気中230℃で30分間加熱して、硬化膜を作製した。プリズムカプラー(PC-2000(Metricon(株)製))を用いて、大気圧下、20℃の条件で、硬化膜面に対し垂直方向から波長550nmの光を照射して、屈折率を測定し、小数点以下第三位を四捨五入した。
<Refractive index of polysiloxane and low refractive index layer>
The polysiloxane as a raw material for the partition wall forming resin composition used in each Example and Comparative Example and the low refractive index layer forming material obtained in Preparation Example 26 were each applied on a silicon wafer with a spinner, and a hot plate ( Using the product name SCW-636, manufactured by Dainippon Screen Mfg. Co., Ltd., the product was dried at a temperature of 90 ° C. for 2 minutes. Then, using an oven (IHPS-222; manufactured by ESPEC CORPORATION), the film was heated in air at 230 ° C. for 30 minutes to prepare a cured film. Using a prism coupler (PC-2000 (manufactured by Metricon Co., Ltd.)), the cured film surface is irradiated with light having a wavelength of 550 nm from the direction perpendicular to the cured film surface under atmospheric pressure and at 20 ° C., and the refractive index is measured. , Rounded to the third decimal place.
<解像度>
スピンコーター(商品名1H-360S、ミカサ(株)製)を用いて、各実施例および比較例において用いた隔壁用樹脂組成物を、10cm角の無アルカリガラス基板上に、加熱後の膜厚が10μmとなるようにスピンコートし、ホットプレート(商品名SCW-636、大日本スクリーン製造(株)製)を用いて、温度90℃で2分間乾燥し、膜厚10μmの乾燥膜を作製した。
<Resolution>
Using a spin coater (trade name 1H-360S, manufactured by Mikasa Co., Ltd.), the resin composition for partition walls used in each Example and Comparative Example was placed on a 10 cm square non-alkali glass substrate with a film thickness after heating. Was spin-coated to a thickness of 10 μm and dried using a hot plate (trade name SCW-636, manufactured by Dainippon Screen Mfg. Co., Ltd.) at a temperature of 90 ° C. for 2 minutes to prepare a dry film having a film thickness of 10 μm. ..
作製した乾燥膜を、パラレルライトマスクアライナー(商品名PLA-501F、キヤノン(株)製)を用いて、超高圧水銀灯を光源とし、100μm、80μm、60μm、50μm、40μm、30μmおよび20μmの各幅のライン&スペースパターンを有するマスクを介して露光量200mJ/cm2(i線)で、100μmのギャップで露光した。その後、自動現像装置(滝沢産業(株)製「AD-2000(商品名)」)を用いて、0.045重量%水酸化カリウム水溶液を用いて100秒間シャワー現像し、次いで水を用いて30秒間リンスした。 The prepared dry film is used with a parallel light mask aligner (trade name PLA-501F, manufactured by Canon Inc.) and an ultra-high pressure mercury lamp as a light source, and has widths of 100 μm, 80 μm, 60 μm, 50 μm, 40 μm, 30 μm and 20 μm. Exposure was performed with a gap of 100 μm at an exposure rate of 200 mJ / cm 2 (i-line) through a mask having the line & space pattern of. Then, using an automatic developing device (“AD-2000 (trade name)” manufactured by Takizawa Sangyo Co., Ltd.), shower-development was performed for 100 seconds using a 0.045 wt% potassium hydroxide aqueous solution, and then 30 using water. Rinse for a second.
倍率100倍に調整した顕微鏡を用いて、現像後のパターンを拡大観察し、未露光部に残渣が認められないパターンのうち、最も狭い線幅を解像度とした。ただし、100μm幅のパターン付近の未露光部にも残渣がある場合は「>100μm」とした。 The pattern after development was magnified and observed using a microscope adjusted to a magnification of 100 times, and the narrowest line width was used as the resolution among the patterns in which no residue was observed in the unexposed area. However, if there is a residue in the unexposed portion near the pattern having a width of 100 μm, it is set to “> 100 μm”.
<反射率>
各実施例および比較例において用いた隔壁形成樹脂組成物を、露光時にフォトマスクを介さずに全体を露光したこと以外は、各実施例および比較例と同条件で加工し、ガラス基板上にベタ膜を作製した。得られたベタ膜を各実施例および比較例により得られた隔壁付き基板の隔壁のモデルとして、ベタ膜を有するガラス基板について、分光測色計(商品名CM-2600d、コニカミノルタ(株)製)を用いて、ベタ膜側からSCIモードで波長550nmにおける反射率を測定した。ただし、ベタ膜にクラックが発生した場合は、亀裂などが原因で正確な値を得ることができないため、反射率の測定は実施しなかった。
<Reflectance>
The partition wall-forming resin composition used in each Example and Comparative Example was processed under the same conditions as in each Example and Comparative Example except that the entire partition-forming resin composition was exposed without using a photomask at the time of exposure, and was solid on a glass substrate. A membrane was made. Using the obtained solid film as a model of the partition wall of the substrate with a partition wall obtained in each Example and Comparative Example, a spectrocolorimeter (trade name CM-2600d, manufactured by Konica Minolta Co., Ltd.) was used for a glass substrate having a solid film. ) Was used to measure the reflectance at a wavelength of 550 nm from the solid film side in the SCI mode. However, when a crack occurred in the solid film, the reflectance was not measured because an accurate value could not be obtained due to the crack or the like.
<クラック耐性>
各実施例および比較例において用いた隔壁形成樹脂組成物を、加熱後の膜厚がそれぞれ5μm、10μm、15μmおよび20μmとなるようにスピンコートした。その後の工程については、露光時にフォトマスクを介さずに全体を露光したこと以外は、各実施例および比較例と同条件で加工し、ガラス基板上にベタ膜を作製した。得られたベタ膜を各実施例および比較例により得られた隔壁付き基板の隔壁のモデルとして、ベタ膜を有するガラス基板を目視観察し、ベタ膜のクラックの有無を評価した。1つでもクラックが確認された場合には、その膜厚におけるクラック耐性はないと判断した。例えば、膜厚15μmではクラックがなく、膜厚20μmではクラックがあった場合には、耐クラック膜厚を「≧15μm」と判定した。また、20μmでもクラックがない場合の耐クラック膜厚を「≧20μm」、5μmでもクラックがある場合の耐クラック膜厚を「<5μm」と、それぞれ判定し、クラック耐性とした。
<Crack resistance>
The partition wall-forming resin compositions used in each Example and Comparative Example were spin-coated so that the film thickness after heating was 5 μm, 10 μm, 15 μm, and 20 μm, respectively. In the subsequent steps, a solid film was produced on a glass substrate by processing under the same conditions as in each Example and Comparative Example except that the entire surface was exposed without using a photomask at the time of exposure. The obtained solid film was used as a model of the partition wall of the substrate with a partition wall obtained in each Example and Comparative Example, and the glass substrate having the solid film was visually observed and the presence or absence of cracks in the solid film was evaluated. If even one crack was confirmed, it was judged that there was no crack resistance at that film thickness. For example, when there were no cracks when the film thickness was 15 μm and there were cracks when the film thickness was 20 μm, the crack resistance film thickness was determined to be “≧ 15 μm”. Further, the crack-resistant film thickness when there was no crack even at 20 μm was determined as “≧ 20 μm”, and the crack-resistant film thickness when there was a crack even at 5 μm was determined as “<5 μm”, respectively, and the crack resistance was determined.
<OD値>
各実施例および比較例により得られた隔壁付き基板の隔壁のモデルとして、反射率の評価と同様に、ガラス基板上にベタ膜を作製した。得られたベタ膜を有するガラス基板について、光学濃度計(361T(visual);X-rite社製)を用いて入射光および透過光の強度を測定し、先述の式(1)によりOD値を算出した。なお、OD値については、加熱工程前のベタ膜と、加熱工程後のOD値をそれぞれ測定し、その差を含め表6~7に記載した。
<OD value>
As a model of the partition wall of the substrate with a partition wall obtained in each Example and Comparative Example, a solid film was prepared on the glass substrate in the same manner as the evaluation of the reflectance. With respect to the obtained glass substrate having a solid film, the intensities of incident light and transmitted light were measured using an optical densitometer (361T (visual); manufactured by X-rite), and the OD value was determined by the above formula (1). Calculated. Regarding the OD value, the solid film before the heating step and the OD value after the heating step were measured, and the differences are shown in Tables 6 to 7.
また、実施例37について、遮光隔壁(A-2)のモデルとして、同様にガラス基板上にベタ膜を作製した。得られたベタ膜を有するガラス基板について、光学濃度計(361T(visual);X-rite社製)を用いて入射光および透過光の強度を測定し、先述の式(1)により算出した。 Further, for Example 37, a solid film was similarly produced on a glass substrate as a model of the light-shielding partition wall (A-2). With respect to the obtained glass substrate having a solid film, the intensities of incident light and transmitted light were measured using an optical densitometer (361T (visual); manufactured by X-Rite Co., Ltd.) and calculated by the above formula (1).
<テーパー角度>
各実施例および比較例において、画素形成前の隔壁付き基板の任意の断面を、光学顕微鏡(FE-SEM(S-4800);(株)日立製作所製)を用いて、加速電圧3.0kVで観測し、テーパー角度を測定した。
<Taper angle>
In each Example and Comparative Example, an arbitrary cross section of the substrate with a partition wall before pixel formation was measured with an optical microscope (FE-SEM (S-4800); manufactured by Hitachi, Ltd.) at an acceleration voltage of 3.0 kV. It was observed and the taper angle was measured.
<表面接触角>
各実施例および比較例により得られた隔壁付き基板における隔壁のモデルとして、反射率の評価と同様に、ガラス基板上にベタ膜を作製した。得られたベタ膜の表面について、協和界面科学(株)製 DM-700、マイクロシリンジ:協和界面科学(株)製 接触角計用テフロン(登録商標)コート針22Gを用いて、25℃、大気中において、JIS R3257(制定年月日=1999/04/20)に規定される基板ガラス表面のぬれ性試験方法に準拠して、表面接触角を測定した。ただし、水の代わりにプロピレングリコールモノメチルエーテルアセテートを使用し、ベタ膜の表面とプロピレングリコールモノメチルエーテルアセテートとの接触角を測定した。
<Surface contact angle>
As a model of the partition wall in the partition walled substrate obtained in each Example and Comparative Example, a solid film was prepared on the glass substrate in the same manner as the evaluation of the reflectance. For the surface of the obtained solid film, DM-700 manufactured by Kyowa Interface Science Co., Ltd., Microsyringer: Teflon (registered trademark) coated needle 22G for contact angle meter manufactured by Kyowa Interface Science Co., Ltd. was used at 25 ° C. for the atmosphere. Among them, the surface contact angle was measured in accordance with the wettability test method for the surface of the substrate glass specified in JIS R3257 (establishment date = 1999/04/20). However, propylene glycol monomethyl ether acetate was used instead of water, and the contact angle between the surface of the solid film and propylene glycol monomethyl ether acetate was measured.
<インクジェット塗布性>
各実施例および比較例により得られた、画素を形成する前の隔壁付き基板において、格子状の隔壁で囲われた画素部分に対して、PGMEAをインクとして、インクジェット塗布装置(InkjetLabo、クラスターテクノロジー(株)製)を用いて、インクジェット塗布を行った。1つの格子状パターンあたり160pLのPGMEAを塗布して、決壊(インクが隔壁を乗り越えて隣の画素部分に混入する現象)の有無を観察し、下記基準によりインクジェット塗布性を評価した。決壊が少ないほど撥液性能が高く、インクジェット塗布性が優れていることを示す。
A:インクが画素内からあふれなかった。
B:一部分においてインクが画素内から隔壁の上面にあふれ出した。
C:全面においてインクが画素内から隔壁の上面にあふれ出した。
<Inkjet applicability>
In the substrate with a partition wall before forming the pixels obtained in each Example and Comparative Example, an inkjet coating device (InkjetLabo, Cluster Technology) using PGMEA as an ink for the pixel portion surrounded by the grid-like partition walls. Inkjet coating was performed using (manufactured by Co., Ltd.). 160 pL of PGMEA was applied to one grid pattern, and the presence or absence of breakage (a phenomenon in which the ink got over the partition wall and mixed into the adjacent pixel portion) was observed, and the inkjet coatability was evaluated according to the following criteria. The smaller the number of breaks, the higher the liquid repellency and the better the inkjet coating property.
A: The ink did not overflow from the inside of the pixel.
B: Ink overflowed from the inside of the pixel to the upper surface of the partition wall in a part.
C: Ink overflowed from the inside of the pixel to the upper surface of the partition wall on the entire surface.
<厚み>
各実施例および比較例により得られた隔壁付き基板について、サーフコム触針式膜厚測定装置を用いて、画素(B)形成前後の構造体の高さを測定し、その差分を算出することにより、画素(B)の厚みを測定した。実施例29~31についてはさらに低屈折率層(C)の膜厚を、実施例32~36についてはさらにカラーフィルターの膜厚を、実施例37についてはさらに遮光隔壁の厚み(高さ)を、それぞれ同様に測定した。
<Thickness>
For the substrates with partition walls obtained in each example and comparative example, the height of the structure before and after the formation of the pixel (B) was measured using a surfcom stylus type film thickness measuring device, and the difference was calculated. , The thickness of the pixel (B) was measured. For Examples 29 to 31, the film thickness of the low refractive index layer (C) is further set, for Examples 32 to 36, the film thickness of the color filter is further set, and for Example 37, the thickness (height) of the light-shielding partition wall is further set. , Each was measured in the same manner.
また、実施例30~31および33~34については、クロスセクションポリッシャー等の研磨装置を用いて、下地基板に対して垂直な断面を露出させ、走査型電子顕微鏡または透過型電子顕微鏡で断面を拡大観察することにより、それぞれ無機保護層I~IVの厚みを測定した。 Further, in Examples 30 to 31 and 33 to 34, a cross section perpendicular to the base substrate is exposed by using a polishing device such as a cross section polisher, and the cross section is enlarged by a scanning electron microscope or a transmission electron microscope. By observing, the thicknesses of the inorganic protective layers I to IV were measured.
<輝度>
市販のLEDバックライト(ピーク波長465nm)を搭載した面状発光装置を光源として、画素部が光源側になるように各実施例および比較例により得られた隔壁付き基板を設置した。この面状発光装置に30mAの電流を流してLED素子を点灯させ、分光放射輝度計(CS-1000、コニカミノルタ社製)を用いて、CIE1931規格に基づく輝度(単位:cd/m2)を測定し、初期輝度とした。ただし、輝度の評価は、実施例45の初期輝度を標準の100とする相対値により行った。
<Brightness>
Using a planar light emitting device equipped with a commercially available LED backlight (peak wavelength 465 nm) as a light source, a substrate with a partition wall obtained by each Example and Comparative Example was installed so that the pixel portion was on the light source side. A current of 30 mA is passed through this planar light emitting device to light the LED element, and a spectral radiance meter (CS-1000, manufactured by Konica Minolta) is used to measure the brightness (unit: cd / m 2 ) based on the CIE 1931 standard. It was measured and used as the initial brightness. However, the evaluation of the luminance was performed by a relative value with the initial luminance of Example 45 as the standard 100.
また、室温(23℃)にて、LED素子を、48時間点灯した後、同様に輝度を測定し、輝度の経時変化を評価した。ただし、輝度の評価は、実施例45の初期輝度を標準の100とする相対値により行った。 Further, after the LED element was turned on for 48 hours at room temperature (23 ° C.), the brightness was measured in the same manner to evaluate the change with time of the brightness. However, the evaluation of the luminance was performed by a relative value with the initial luminance of Example 45 as the standard 100.
<色特性>
市販の白色反射板上に、各実施例および比較例により得られた隔壁付き基板を、画素が白色反射板側に配置されるように設置した。分光測色計(CM-2600d、コニカミノルタ社製、測定径φ8mm)を用いて、隔壁付き基板の下地基板側から光を照射し、正反射光込みのスペクトルを測定した。
<Color characteristics>
On a commercially available white reflector, the substrates with partition walls obtained in each Example and Comparative Example were installed so that the pixels were arranged on the white reflector side. Using a spectrophotometer (CM-2600d, manufactured by Konica Minolta, measurement diameter φ8 mm), light was irradiated from the base substrate side of the substrate with a partition wall, and the spectrum including specular reflected light was measured.
自然界の色をほぼ再現できる色規格BT.2020が定める色域は、色度図に示されるスペクトル軌跡上の赤、緑および青を三原色として規定されており、赤、緑および青の波長はそれぞれ630nm、532nmおよび467nmに相当している。得られた反射スペクトルの470nm、530nmおよび630nmの3つの波長の反射率(R)から、画素の発光色について以下の基準により評価した。
A:R530/(R630+R530+R470)≧0.55
B:R530/(R630+R530+R470)<0.55。
Color standard BT that can almost reproduce the colors of the natural world. The color gamut defined by 2020 defines red, green, and blue as the three primary colors on the spectral trajectory shown in the chromaticity diagram, and the wavelengths of red, green, and blue correspond to 630 nm, 532 nm, and 467 nm, respectively. From the reflectances (R) of the three wavelengths of 470 nm, 530 nm and 630 nm of the obtained reflection spectrum, the emission color of the pixel was evaluated according to the following criteria.
A: R 530 / (R 630 + R 530 + R 470 ) ≧ 0.55
B: R 530 / (R 630 + R 530 + R 470 ) <0.55.
<表示特性>
各実施例および比較例により得られた隔壁付き基板と有機EL素子を組み合わせて作製した表示装置の表示特性を、以下の基準に基づき評価した。
A:緑表示が非常に色鮮やかであり、鮮明でコントラストに優れた表示装置である。
B:色彩にやや不自然さが見られるものの、問題のない表示装置である。
<Display characteristics>
The display characteristics of the display device manufactured by combining the substrate with a partition wall and the organic EL element obtained in each Example and Comparative Example were evaluated based on the following criteria.
A: The green display is very colorful, and it is a clear and high-contrast display device.
B: It is a display device that has no problem, although the colors are slightly unnatural.
<混色>
各実施例および比較例により得られた、画素を形成する前の隔壁付き基板において、格子状の隔壁で囲われた画素部分の一部に、インクジェット法を用いて、色変換発光材料組成物(CL-2)を塗布し、100℃で30分間乾燥し、厚み5.0μmの画素を形成した。その後、格子状の隔壁で囲われた画素部分のうち、色変換発光材料組成物(CL-2)を塗布した領域の隣の領域に、インクジェット法を用いて、色変換発光材料組成物(CL-3)を塗布し、100℃で30分間乾燥し、厚み5.0μmの画素を形成した。
<Mixing color>
In the substrate with a partition wall before forming the pixels obtained in each Example and Comparative Example, a color-converted light-emitting material composition (a color-converted light-emitting material composition) was used on a part of the pixel portion surrounded by the lattice-shaped partition walls by using an inkjet method. CL-2) was applied and dried at 100 ° C. for 30 minutes to form pixels having a thickness of 5.0 μm. Then, in the pixel portion surrounded by the lattice-shaped partition wall, the area adjacent to the area to which the color-converting light-emitting material composition (CL-2) is applied is subjected to the color-converting light-emitting material composition (CL) by using the inkjet method. -3) was applied and dried at 100 ° C. for 30 minutes to form pixels having a thickness of 5.0 μm.
一方、格子状の隔壁で囲われた画素部分と同じ幅をもつ青色有機ELセルを作製し、前述の隔壁付き基板と青色有機ELセルを対向させて封止剤により貼り合せ、図10に示す構成の表示装置を得た。 On the other hand, a blue organic EL cell having the same width as the pixel portion surrounded by the grid-shaped partition wall is produced, and the above-mentioned substrate with partition wall and the blue organic EL cell are opposed to each other and bonded with a sealing agent, and are shown in FIG. Obtained a configuration display device.
図10における青色有機ELセル11のうち、色変換発光材料組成物(CL-2)で形成された画素3(CL-2)の直下に貼り合わせた青色有機ELセルのみを点灯させた状態で、色変換発光材料組成物(CL-3)で形成された画素3(CL-3)部分について、顕微分光光度計LVmicro-V(ラムダビジョン(株)製)を用いて、波長630nmにおける吸光強度A(630nm)を測定した。吸光強度A(630nm)の値が小さいほど、混色を起こしにくいことを示している。下記の判定基準により混色を判定した。
A:A(630nm)<0.01
B:0.01≦A(630nm)≦0.5
C:0.5<A(630nm)。
Of the blue organic EL cells 11 in FIG. 10, only the blue organic EL cells bonded directly under the pixel 3 (CL-2) formed of the color conversion light emitting material composition (CL-2) are lit. , The absorption intensity of the pixel 3 (CL-3) portion formed of the color conversion light emitting material composition (CL-3) at a wavelength of 630 nm using a microspectrophotometer LVmicro-V (manufactured by Lambda Vision Co., Ltd.). A (630 nm) was measured. The smaller the value of the absorption intensity A (630 nm), the less likely it is that color mixing will occur. Color mixing was determined according to the following criteria.
A: A (630 nm) <0.01
B: 0.01 ≤ A (630 nm) ≤ 0.5
C: 0.5 <A (630 nm).
各実施例および比較例評価結果を表6~7に示す。 The evaluation results of each example and comparative example are shown in Tables 6 to 7.
1:下地基板
2:隔壁
3:画素
3(CL-2):色変換発光材料組成物(CL-2)で形成された画素
3(CL-3):色変換発光材料組成物(CL-3)で形成された画素
4:低屈折率層
5:無機保護層I
6:無機保護層II
7:カラーフィルター
8:無機保護層IIIおよび/または黄色有機保護層
9:無機保護層IVおよび/または黄色有機保護層
10:遮光隔壁
11:青色有機ELセル
H:隔壁の厚み
L:隔壁の幅
θ:テーパー角度
1: Base substrate 2: Partition 3: Pixel 3 (CL-2): Pixel 3 (CL-3) formed of the color conversion light emitting material composition (CL-2): Color conversion light emitting material composition (CL-3) ): Pixel 4: Low refractive index layer 5: Inorganic protective layer I
6: Inorganic protective layer II
7: Color filter 8: Inorganic protective layer III and / or yellow Organic protective layer 9: Inorganic protective layer IV and / or yellow Organic protective layer 10: Light-shielding partition 11: Blue organic EL cell H: Thickness of partition L: Width of partition θ: Taper angle
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JP2021113977A (en) | 2021-08-05 |
TW202006045A (en) | 2020-02-01 |
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JP2022033154A (en) | 2022-02-28 |
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