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JP7037116B2 - Optical modulator - Google Patents

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JP7037116B2
JP7037116B2 JP2018067836A JP2018067836A JP7037116B2 JP 7037116 B2 JP7037116 B2 JP 7037116B2 JP 2018067836 A JP2018067836 A JP 2018067836A JP 2018067836 A JP2018067836 A JP 2018067836A JP 7037116 B2 JP7037116 B2 JP 7037116B2
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control electrode
electrical connection
signal
electrode
optical
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JP2019179123A (en
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将之 本谷
利夫 片岡
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Sumitomo Osaka Cement Co Ltd
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Sumitomo Osaka Cement Co Ltd
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Priority to US16/360,030 priority patent/US10514561B2/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305—Constructional arrangements
    • G02F1/0316—Electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0327—Operation of the cell; Circuit arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G02F1/0356—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure controlled by a high-frequency electromagnetic wave component in an electric waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G02F1/2255—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure controlled by a high-frequency electromagnetic component in an electric waveguide structure

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electromagnetism (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Description

本発明は、光変調器に関し、特に、電気光学効果を有する基板と、該基板に形成された光導波路と、該光導波路を伝播する光波を変調するため、該基板に形成された、高周波信号を印加する制御電極と、該高周波信号を該制御電極に受け渡すため中継線路を備えた中継基板とを有する光変調器に関する。 The present invention relates to an optical modulator, in particular, a substrate having an electro-optical effect, an optical waveguide formed on the substrate, and a high-frequency signal formed on the substrate in order to modulate a light wave propagating through the optical waveguide. The present invention relates to an optical modulator having a control electrode to which the light is applied and a relay substrate provided with a relay line for passing the high frequency signal to the control electrode.

光通信分野や光計測分野において、ニオブ酸リチウム基板（ＬＮ基板）などの電気光学効果を有する基板に光導波路や制御電極を組み込んだ光変調器が多用されている。これらの光変調器の制御電極に高周波信号を入力したり、制御電極の終端から高周波信号を出力する際に、中継基板や終端基板を用いている。本発明の説明においては、中継基板を中心に説明するが、終端基板であっても全く同様な構成が採用できることから、本発明の「中継基板」は終端基板も含む意味で使用されている。 In the field of optical communication and the field of optical measurement, an optical modulator in which an optical waveguide and a control electrode are incorporated in a substrate having an electro-optical effect such as a lithium niobate substrate (LN substrate) is widely used. A relay board or a terminal board is used when a high frequency signal is input to the control electrode of these light modulators or when a high frequency signal is output from the terminal of the control electrode. In the description of the present invention, the relay board will be mainly described, but since the same configuration can be adopted even for the terminal board, the "relay board" of the present invention is used in the sense of including the terminal board.

光変調器の制御電極と、中継基板に形成される中継線路は、高周波信号を伝送するため、コプレーナ線路構造を備えている。そして、制御電極を構成する信号電極と中継線路の信号線路や、制御電極を構成する接地電極と中継線路の接地線路は、お互いに金線や金リボンなどによりワイヤボンディングされている。 The control electrode of the optical modulator and the relay line formed on the relay board have a coplanar line structure for transmitting a high frequency signal. The signal electrode constituting the control electrode and the signal line of the relay line, and the ground electrode constituting the control electrode and the ground line of the relay line are wire-bonded to each other by a gold wire, a gold ribbon, or the like.

中継基板は、通常、アルミナなどの材料が使用されているため、光変調器を構成する基板（ＬＮ基板等）とは、誘電率が異なっている。このため、制御電極と中継線路との電気的接続においては、両者の特性インピーダンスが一致するように調整されているのが一般的である。 Since a material such as alumina is usually used for the relay board, the dielectric constant is different from that of the board (LN board or the like) constituting the optical modulator. Therefore, in the electrical connection between the control electrode and the relay line, the characteristic impedances of both are generally adjusted to match.

特許文献１にも示すように、制御電極と中継線路との電気的接続を行うためには、ワイヤボンディングする領域を確保するために信号電極や信号線路にパッド部を形成することが不可欠である。このため、信号電極のパッド部は、それ以外の信号電極の幅よりも広くなり、これに伴い、信号電極を挟むように配置される接地電極間の距離も広くなる。そして、信号電極の幅の変化に合わせて、接地電極間の距離も変化するように設定されている。 As shown in Patent Document 1, in order to electrically connect the control electrode and the relay line, it is indispensable to form a pad portion on the signal electrode or the signal line in order to secure a wire bonding area. .. Therefore, the pad portion of the signal electrode is wider than the width of the other signal electrodes, and the distance between the ground electrodes arranged so as to sandwich the signal electrode is also widened accordingly. The distance between the ground electrodes is also set to change according to the change in the width of the signal electrode.

このようなパッド部による電極形状の変化は、特に接地電極の電流経路を大きくするため、放射による高周波信号の伝搬損失を増大させる原因となる。このため、特許文献１では、制御電極と中継線路とを繋ぐワイヤボンディングの位置を調整する方法や、接地電極の信号電極側のエッジ形状を調整する方法を提案している。 Such a change in the electrode shape due to the pad portion increases the current path of the ground electrode in particular, which causes an increase in the propagation loss of the high frequency signal due to radiation. Therefore, Patent Document 1 proposes a method of adjusting the position of wire bonding connecting the control electrode and the relay line, and a method of adjusting the edge shape of the ground electrode on the signal electrode side.

しかしながら、これらの構成では、伝搬損失を十分に低減させることが難しく、特に、３０ＧＨｚを超え、さらには１００ＧＨｚにも達する広帯域化が可能な光変調器を提供する上で、高周波信号の伝搬損失の更なる低減が不可欠となっている。 However, with these configurations, it is difficult to sufficiently reduce the propagation loss, and in particular, in providing an optical modulator capable of widening the bandwidth exceeding 30 GHz and further reaching 100 GHz, the propagation loss of a high frequency signal can be reduced. Further reduction is essential.

特開２０１５－１９１１３７号公報Japanese Unexamined Patent Publication No. 2015-191137

本発明が解決しようとする課題は、上述したような問題を解決し、光変調器の制御電極と中継基板の中継線路との電気的接続における高周波信号の伝搬損失を低減した光変調器を提供することである。 The problem to be solved by the present invention is to solve the above-mentioned problems and provide an optical modulator in which the propagation loss of a high frequency signal in the electrical connection between the control electrode of the optical modulator and the relay line of the relay substrate is reduced. It is to be.

上記課題を解決するため、本発明の光変調器は、以下の技術的特徴を有する。
（１） 電気光学効果を有する基板と、該基板に形成された光導波路と、該光導波路を伝播する光波を変調するため、該基板に形成された、高周波信号を印加する制御電極と、該高周波信号を該制御電極に受け渡すため中継線路を備えた中継基板とを有する光変調器において、該制御電極と該中継線路は、少なくとも両者の電気的接続部を含んで、共にコプレーナ線路構造を備え、該制御電極は、該制御電極の電気的接続部と、該制御電極の電気接続部から該光導波路に電界を印加する作用部までの間にある取り回し部とを有し、該取り回し部は、コプレーナ線路構造を備え、該制御電極の電気的接続部における信号電極は、該中継線路から電気的接続が行われ最も幅広いパッド部と、該パッド部から該取り回し部に繋がるテーパー部とを有し、該制御電極の電気的接続部における信号電極を挟む接地電極間の距離Ｇ２は、該取り回し部の信号電極を挟む接地電極間の距離Ｇ１とほぼ等しいことを特徴とする。 In order to solve the above problems, the light modulator of the present invention has the following technical features.
(1) A substrate having an electro-optical effect, an optical waveguide formed on the substrate, a control electrode formed on the substrate to apply a high-frequency signal in order to modulate a light wave propagating on the optical waveguide, and the control electrode. In an optical modulator having a relay board provided with a relay line for passing a high frequency signal to the control electrode, the control electrode and the relay line include at least an electrical connection between the two, and both have a coplanar line structure. The control electrode has an electrical connection portion of the control electrode and a routing portion between the electrical connection portion of the control electrode and the acting portion for applying an electric field to the optical waveguide. Is provided with a coplanar line structure , and the signal electrode in the electrical connection portion of the control electrode has a widest pad portion that is electrically connected from the relay line and has a tapered portion that connects the pad portion to the routing portion. The distance G2 between the ground electrodes sandwiching the signal electrode in the electrical connection portion of the control electrode is substantially equal to the distance G1 between the ground electrodes sandwiching the signal electrode of the handling portion.

（２） 上記（１）に記載の光変調器において、該中継線路の電気的接続部における信号線路を挟む接地線路間の距離Ｇ３は、該制御電極の電気的接続部における信号電極を挟む接地電極間の距離Ｇ２とほぼ等しいことを特徴とする。 (2) In the optical modulator according to (1) above, the distance G3 between the ground lines sandwiching the signal line at the electrical connection portion of the relay line is the ground sandwiching the signal electrode at the electrical connection portion of the control electrode. It is characterized in that it is substantially equal to the distance G2 between the electrodes.

（３） 上記（１）又は（２）に記載の光変調器において、該パッド部の長さＬは、該高周波信号の波長の１０分の１以下であることを特徴とする。 (3) In the light modulator according to (1) or (2) above, the length L of the pad portion is characterized in that it is one tenth or less of the wavelength of the high frequency signal.

（４） 上記（１）乃至（３）のいずれかに記載の光変調器において、該パッド部の幅Ｓ２は、該高周波信号の波長の１０分の１以下であることを特徴とする。 (4) In the light modulator according to any one of (1) to (3) above, the width S2 of the pad portion is characterized in that it is 1/10 or less of the wavelength of the high frequency signal.

（５） 上記（１）乃至（４）のいずれかに記載の光変調器において、前記電気光学効果を有する基板の材料は、ニオブ酸リチウム、もしくは、ポリマー系材料であることを特徴とする。 (5) In the optical modulator according to any one of (1) to (4) above, the substrate material having the electro-optical effect is lithium niobate or a polymer-based material.

本発明は、電気光学効果を有する基板と、該基板に形成された光導波路と、該光導波路を伝播する光波を変調するため、該基板に形成された、高周波信号を印加する制御電極と、該高周波信号を該制御電極に受け渡すため中継線路を備えた中継基板とを有する光変調器において、該制御電極と該中継線路は、少なくとも両者の電気的接続部を含んで、共にコプレーナ線路構造を備え、該制御電極は、該制御電極の電気的接続部と、該制御電極の電気接続部から該光導波路に電界を印加する作用部までの間にある取り回し部とを有し、該取り回し部は、コプレーナ線路構造を備え、該制御電極の電気的接続部における信号電極は、該中継線路から電気的接続が行われ最も幅広いパッド部と、該パッド部から該取り回し部に繋がるテーパー部とを有し、該制御電極の電気的接続部における信号電極を挟む接地電極間の距離Ｇ２は、該取り回し部の信号電極を挟む接地電極間の距離Ｇ１とほぼ等しいため、光変調器の制御電極と中継基板の中継線路との電気的接続における電流経路の不連続性が解消され、高周波信号の伝搬損失を低減することが可能となる。 The present invention includes a substrate having an electro-optical effect, an optical waveguide formed on the substrate, and a control electrode formed on the substrate to apply a high-frequency signal in order to modulate a light wave propagating through the optical waveguide. In an optical modulator having a relay board provided with a relay line for passing the high frequency signal to the control electrode, the control electrode and the relay line include at least an electrical connection between the two, and both have a coplanar line structure. The control electrode has an electrical connection portion of the control electrode and a routing portion between the electrical connection portion of the control electrode and the acting portion for applying an electric current to the optical waveguide. The section includes a coplanar line structure , and the signal electrode in the electrical connection section of the control electrode has a widest pad section that is electrically connected from the relay line and a tapered section that connects the pad section to the routing section. The distance G2 between the ground electrodes sandwiching the signal electrode in the electrical connection portion of the control electrode is substantially equal to the distance G1 between the ground electrodes sandwiching the signal electrode of the routing portion. The discontinuity of the current path in the electrical connection between the current and the relay line of the relay board is eliminated, and the propagation loss of the high frequency signal can be reduced.

本発明の光変調器に係る第１の実施例を説明する図である。It is a figure explaining the 1st Embodiment which concerns on the optical modulator of this invention. 本発明の光変調器に係る第２の実施例を説明する図である。It is a figure explaining the 2nd Embodiment which concerns on the optical modulator of this invention.

以下、本発明の光変調器について、好適例を用いて詳細に説明する。
本発明の光変調器は、図１に示すように、電気光学効果を有する基板１と、該基板に形成された光導波路（不図示）と、該光導波路を伝播する光波を変調するため、該基板に形成された、高周波信号を印加する制御電極と、該高周波信号を該制御電極に受け渡すため中継線路を備えた中継基板４とを有する光変調器において、該制御電極と該中継線路は、少なくとも両者の電気的接続部を含んで、共にコプレーナ線路構造を備え、該制御電極は、該制御電極の電気的接続部（Ａ）と、該制御電極の電気接続部から該光導波路に電界を印加する作用部までの間にある取り回し部（Ｂ）とを有し、該取り回し部は、コプレーナ線路構造を備え、該制御電極の電気的接続部における信号電極を挟む接地電極間の距離Ｇ２は、該取り回し部の信号電極を挟む接地電極間の距離Ｇ１とほぼ等しいことを特徴とする。 Hereinafter, the light modulator of the present invention will be described in detail with reference to suitable examples.
As shown in FIG. 1, the light modulator of the present invention modulates a substrate 1 having an electro-optical effect, an optical waveguide formed on the substrate (not shown), and an optical wave propagating through the optical waveguide. In an optical modulator having a control electrode formed on the substrate to apply a high frequency signal and a relay board 4 provided with a relay line for passing the high frequency signal to the control electrode, the control electrode and the relay line are provided. Contains at least an electrical connection between the two, both of which have a coplanar line structure, wherein the control electrode is from the electrical connection (A) of the control electrode and the electrical connection of the control electrode to the optical waveguide. It has a routing portion (B) between the acting portion to which an electric field is applied, and the routing portion has a coplanar line structure, and the distance between the ground electrodes sandwiching the signal electrode in the electrical connection portion of the control electrode. G2 is characterized in that it is substantially equal to the distance G1 between the ground electrodes sandwiching the signal electrode of the handling portion.

図１において、制御電極は、信号電極３及びそれを挟む接地電極（２０，２１）によりコプレーナ線路構造を備えている。また、中継基板に形成された中継線路も、信号線路６とそれを挟む接地線路（５０，５１）によりコプレーナ線路構造を備えている。本発明において、コプレーナ線路構造は、全ての制御電極や中継線路に必要な構成ではなく、少なくとも、制御電極と中継線路とを電気的接続する部分と、制御電極の電気的接続部Ａに繋がる取り回し部Ｂの一部には、コプレーナ線路構造を備えることが必要となる。 In FIG. 1, the control electrode has a coplanar line structure with a signal electrode 3 and a ground electrode (20, 21) sandwiching the signal electrode 3. Further, the relay line formed on the relay board also has a coplanar line structure by the signal line 6 and the ground line (50, 51) sandwiching the signal line 6. In the present invention, the coplanar line structure is not a configuration required for all control electrodes and relay lines, but at least a portion that electrically connects the control electrode and the relay line and a routing that connects to the electrical connection portion A of the control electrode. It is necessary to provide a coplanar line structure in a part of the part B.

電気光学効果を有する基板の材料としては、公知の技術である、ニオブ酸リチウムやポリマー系材料が使用可能である。また、Ｔｉ拡散やリッジ形成による光導波路の形成や、金（Ａｕ）やチタンなどの下地電極上に金メッキで制御電極を形成する方法など、本発明にも従来より公知の技術が適用できることは言うまでもない。さらに、中継基板にアルミナなどの絶縁材料が利用可能である。 As a material for a substrate having an electro-optical effect, a known technique such as lithium niobate or a polymer-based material can be used. Needless to say, conventionally known techniques can be applied to the present invention, such as the formation of an optical waveguide by Ti diffusion and ridge formation, and the method of forming a control electrode by gold plating on a base electrode such as gold (Au) or titanium. stomach. Further, an insulating material such as alumina can be used for the relay board.

本発明の特徴は、電気的接続部Ａの信号電極のパッド部が形成された領域の接地電極間の距離（Ｇ２）と、取り回し部Ｂの接地電極間の距離（Ｇ１）とを、ほぼ等しくすることである。本発明における「ほぼ等しい」とは、同じであるだけでなく、本発明の効果（伝搬損失の低減効果）を奏する範囲において、同じからズレても良いという意味である。 The feature of the present invention is that the distance between the ground electrodes (G2) in the region where the pad portion of the signal electrode of the electrical connection portion A is formed and the distance (G1) between the ground electrodes of the handling portion B are substantially equal to each other. It is to be. "Almost equal" in the present invention means not only that they are the same, but also that they may deviate from the same within the range in which the effect of the present invention (effect of reducing propagation loss) is exhibited.

このように、接地電極（２０，２１）間の距離を、信号電極３の幅の変化とは無関係に一定とすることで、高周波信号の流れがスムーズとなり、伝搬損失が低減できることが確認されている。 In this way, it was confirmed that by making the distance between the ground electrodes (20, 21) constant regardless of the change in the width of the signal electrode 3, the flow of the high frequency signal becomes smooth and the propagation loss can be reduced. There is.

さらに、中継線路の電気的接続部における信号線路６を挟む接地線路（５０，５１）間の距離Ｇ３を、制御電極の電気的接続部Ａにおける信号電極３を挟む接地電極（２０，２１）間の距離Ｇ２とほぼ等しくすることで、より一層、伝搬損失を低減することが可能となる。 Further, the distance G3 between the ground lines (50, 51) sandwiching the signal line 6 in the electrical connection portion of the relay line is set between the ground electrodes (20, 21) sandwiching the signal electrode 3 in the electrical connection portion A of the control electrode. By making it substantially equal to the distance G2 of, it is possible to further reduce the propagation loss.

また、制御信号の電気的接続部Ａにおける信号電極３は、中継線路から電気的接続が行われ、最も幅が広いパッド部と、該パッド部から取り回し部Ｂに繋がるテーパー部（符号Ｔで示す部分）とを有し、該パッド部の長さＬは、高周波信号の波長の４分の１以下、より好ましくは、１０分の１以下とすることで、パッド部による信号電極の幅の変化が伝搬損失に与える影響を、極力抑制することが可能となる。例えば、３２ＧＨｚの高周波信号の場合は、線路の実効的な誘電率を考慮すると１０分の１波長で約０．５ｍｍ程度となる。 Further, the signal electrode 3 in the electrical connection portion A of the control signal is electrically connected from the relay line, and has the widest pad portion and the tapered portion (indicated by reference numeral T) connected to the routing portion B from the pad portion. The length L of the pad portion is one-fourth or less, more preferably one-tenth or less of the wavelength of the high-frequency signal, so that the width of the signal electrode is changed by the pad portion. It is possible to suppress the influence of the above on the propagation loss as much as possible. For example, in the case of a high frequency signal of 32 GHz, considering the effective dielectric constant of the line, it is about 0.5 mm at a wavelength of 1/10.

さらに、制御信号の電気的接続部Ａにおける信号電極３は、中継線路から電気的接続が行われ、最も幅が広いパッド部と、該パッド部から取り回し部Ｂに繋がるテーパー部とを有し、該パッド部の幅Ｓ２は、高周波信号の波長の４分の１以下、より好ましくは、１０分の１以下とすることで、パッド部による信号電極の幅の変化が伝搬損失に与える影響を、極力抑制することが可能となる。 Further, the signal electrode 3 in the electrical connection portion A of the control signal has a pad portion having the widest width and a tapered portion connected to the routing portion B from the pad portion, which is electrically connected from the relay line. By setting the width S2 of the pad portion to one-fourth or less, more preferably one-tenth or less of the wavelength of the high-frequency signal, the influence of the change in the width of the signal electrode by the pad portion on the propagation loss can be determined. It is possible to suppress as much as possible.

図２は、制御電極を構成する、パッド部がある電気的接続部Ａ、取り回し部Ｂ、及び光導波路に電界を印加する作用部Ｃを示した図である。本発明の光変調器は図２に限定されるものではないが、電気的接続部Ａ又はパッド部の長さＬは、取り回し部Ｂの接地電極間の距離Ｇ１が、電気接続部Ａの接地電極間の距離Ｇ２と同じとなる部分の長さより、短い方が、電気的接続部Ａの影響は、比較的抑制することが可能となる。 FIG. 2 is a diagram showing an electrical connection portion A having a pad portion, a routing portion B, and an action portion C that applies an electric field to an optical waveguide, which constitutes a control electrode. The optical modulator of the present invention is not limited to FIG. 2, but the length L of the electrical connection portion A or the pad portion is such that the distance G1 between the ground electrodes of the handling portion B is the grounding of the electrical connection portion A. The effect of the electrical connection portion A can be relatively suppressed when the length is shorter than the length of the portion where the distance between the electrodes is the same as G2.

図２では、取り回し部Ｂと作用部Ｃにおける信号電極の幅（Ｓ１，Ｓ０）を同じにしたが、これに限定されず、取り回し部Ｂの途中で信号電極の幅を変更することも可能である。また、取り回し部Ｂの接地電極間の距離Ｇ１は、作用部Ｃに繋がる直前に一度だけ変更しているが、これに限らず、取り回し部Ｂの途中で複数回、距離Ｇ１を変更することも可能である。 In FIG. 2, the widths (S1, S0) of the signal electrodes in the handling portion B and the working portion C are the same, but the width is not limited to this, and the width of the signal electrodes can be changed in the middle of the handling portion B. be. Further, the distance G1 between the ground electrodes of the handling portion B is changed only once immediately before connecting to the working portion C, but the distance G1 may be changed multiple times in the middle of the handling portion B. It is possible.

以上説明したように、本発明によれば、光変調器の制御電極と中継基板の中継線路との電気的接続における高周波信号の伝搬損失を低減した光変調器を提供することができる。 As described above, according to the present invention, it is possible to provide an optical modulator in which the propagation loss of a high frequency signal in the electrical connection between the control electrode of the optical modulator and the relay line of the relay substrate is reduced.

１ 変調基板（電気光学効果を有する基板）
２０，２１ 接地電極
３ 信号電極
４ 中継基板（終端基板）
５０，５１ 接地線路
６ 信号線路
Ａ 電気的接続部
Ｂ 取り回し部
Ｃ 作用部 1 Modulation board (board with electro-optic effect)
20, 21 Ground electrode 3 Signal electrode 4 Relay board (termination board)
50, 51 Grounding line 6 Signal line A Electrical connection part B Handling part C Working part

Claims (5)

電気光学効果を有する基板と、該基板に形成された光導波路と、該光導波路を伝播する光波を変調するため、該基板に形成された、高周波信号を印加する制御電極と、該高周波信号を該制御電極に受け渡すため中継線路を備えた中継基板とを有する光変調器において、
該制御電極と該中継線路は、少なくとも両者の電気的接続部を含んで、共にコプレーナ線路構造を備え、
該制御電極は、該制御電極の電気的接続部と、該制御電極の電気接続部から該光導波路に電界を印加する作用部までの間にある取り回し部とを有し、
該取り回し部は、コプレーナ線路構造を備え、
該制御電極の電気的接続部における信号電極は、該中継線路から電気的接続が行われ最も幅広いパッド部と、該パッド部から該取り回し部に繋がるテーパー部とを有し、
該制御電極の電気的接続部における信号電極を挟む接地電極間の距離Ｇ２は、該取り回し部の信号電極を挟む接地電極間の距離Ｇ１とほぼ等しいことを特徴とする光変調器。 A substrate having an electro-optical effect, an optical waveguide formed on the substrate, a control electrode formed on the substrate to apply a high-frequency signal in order to modulate a light wave propagating on the optical waveguide, and the high-frequency signal. In an optical modulator having a relay board provided with a relay line for passing to the control electrode.
The control electrode and the relay line include at least an electrical connection between the two and both have a coplanar line structure.
The control electrode has an electrical connection portion of the control electrode and a routing portion between the electrical connection portion of the control electrode and an action portion for applying an electric field to the optical waveguide.
The routing is provided with a Coplanar line structure.
The signal electrode in the electrical connection portion of the control electrode has a widest pad portion that is electrically connected from the relay line and a tapered portion that connects the pad portion to the handling portion.
A light modulator characterized in that the distance G2 between the ground electrodes sandwiching the signal electrode in the electrical connection portion of the control electrode is substantially equal to the distance G1 between the ground electrodes sandwiching the signal electrode of the routing portion. 請求項１に記載の光変調器において、
該中継線路の電気的接続部における信号線路を挟む接地線路間の距離Ｇ３は、該制御電極の電気的接続部における信号電極を挟む接地電極間の距離Ｇ２とほぼ等しいことを特徴とする光変調器。 In the light modulator according to claim 1,
The distance G3 between the ground lines sandwiching the signal line in the electrical connection portion of the relay line is substantially equal to the distance G2 between the ground electrodes sandwiching the signal electrode in the electrical connection portion of the control electrode. vessel. 請求項１又は２に記載の光変調器において、
該パッド部の長さＬは、該高周波信号の波長の１０分の１以下であることを特徴とする光変調器。 In the light modulator according to claim 1 or 2,
An optical modulator having a pad portion length L of 1/10 or less of the wavelength of the high frequency signal. 請求項１乃至３のいずれかに記載の光変調器において、
該パッド部の幅Ｓ２は、該高周波信号の波長の１０分の１以下であることを特徴とする光変調器。 In the optical modulator according to any one of claims 1 to 3,
The width S2 of the pad portion is 1/10 or less of the wavelength of the high frequency signal, which is an optical modulator. 請求項１乃至４のいずれかに記載の光変調器において、
前記電気光学効果を有する基板の材料は、ニオブ酸リチウム、もしくは、ポリマー系材料であることを特徴とする光変調器。 In the optical modulator according to any one of claims 1 to 4,
An optical modulator characterized in that the material of the substrate having an electro-optical effect is lithium niobate or a polymer-based material.
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