JP7022884B2 - Electric field asymmetry ion mobility spectrometer and mixture separation method using it - Google Patents

Description

The present invention relates to an electric field asymmetric ion mobility spectrometer and a mixture separation method using the same.

Patent Document 1 and Patent Document 2 disclose an electric field asymmetric ion mobility spectrometer.
A field asymmetric ion mobility spectrometer is used to selectively separate at least one substance from a mixture containing two or more substances. At least one separated substance is detected by a detector included in an electric field asymmetric ion mobility spectrometer.

Japanese Patent No. 5221954 Japanese Patent No. 5015395

An object of the present invention is to provide an electric field asymmetric ion mobility spectrometer having a high separation ability.

The electric field asymmetric ion mobility spectrometer according to the present invention is an electric field asymmetric ion mobility spectrometer for selectively separating at least one kind of substance from a mixture containing two or more kinds of substances.
An ionizing device for ionizing two or more kinds of substances contained in the mixture, and a filter for selecting at least one kind of substance from the two or more kinds of ionized substances.
Equipped with.
here,
The filter is adjacent to the ionizer and
The filter comprises a first electrode group and a second electrode group.
The filter includes a flat plate-shaped first electrode, a flat plate-shaped second electrode, a flat plate-shaped third electrode, and a flat plate-shaped fourth electrode.
The first electrode group includes the flat plate-shaped first electrode and the flat plate-shaped third electrode.
The second electrode group includes the flat plate-shaped second electrode and the flat plate-shaped fourth electrode.
Each of the flat plate-shaped first to fourth electrodes has a main surface parallel to the direction from the ionizing device to the filter.
The flat plate-shaped second electrode is located between the flat plate-shaped first electrode and the flat plate-shaped third electrode.
The flat plate-shaped third electrode is located between the flat plate-shaped second electrode and the flat plate-shaped fourth electrode.
The flat plate-shaped third electrode is electrically connected to the flat plate-shaped first electrode.
The flat plate-shaped fourth electrode is electrically connected to the flat plate-shaped second electrode.
A first gap is formed between the flat plate-shaped first electrode and the second electrode.
A second gap is formed between the flat plate-shaped second electrode and the third electrode.
A third gap is formed between the flat plate-shaped third electrode and the fourth electrode.
The first electrode group is electrically isolated from the second electrode group.
The filter comprises a lower insulating substrate and an upper insulating substrate parallel to each other.
The flat plate-shaped first to fourth electrodes are located between the lower insulating substrate and the upper insulating substrate.
The normal direction of the flat plate-shaped first to fourth electrodes is orthogonal to the normal of the lower insulating substrate.
In a cross section including both the normal of the flat plate-shaped first electrode and the normal of the lower insulating substrate, the lower insulating substrate is provided with a lower first recess on the upper surface thereof.
In the cross section, the lower insulating substrate includes a lower first convex portion and a lower second convex portion on the upper surface thereof.
In the cross section, the lower first concave portion is located between the lower first convex portion and the lower second convex portion.
In the cross section, the flat plate-shaped first electrode is located on the lower first convex portion, and in the cross section, the flat plate-shaped second electrode is located on the lower second convex portion. ing.

The object of the present invention also includes a method of selectively separating at least one kind of substance from a mixture containing two or more kinds of substances by using the above-mentioned electric field asymmetric ion mobility spectrometer.

The present invention provides an electric field asymmetric ion mobility spectrometer with high separation capability.

FIG. 1 shows a schematic diagram of an electric field asymmetric ion mobility spectrometer. FIG. 2 is a graph showing the relationship between the ratio of electric field intensity and ion mobility. FIG. 3 shows a schematic diagram of a filter according to an embodiment. FIG. 4A is a graph showing the relationship between the asymmetrical AC voltage applied to the first electrode group and time. FIG. 4B is a graph showing the relationship between the asymmetric AC voltage applied to the first electrode group and time. FIG. 4C is a graph showing the relationship between the asymmetric AC voltage applied to the first electrode group and time. FIG. 4D is a graph showing the relationship between the asymmetric AC voltage applied to the first electrode group and time. FIG. 5 shows a schematic plan view of the movement of two types of ionized gas between a pair of flat plate electrodes included in a conventional filter. FIG. 6 shows a schematic plan view of the movement of two types of ionized gas between the flat plate-shaped first electrode and the fourth electrode included in the filter according to the embodiment. FIG. 7A shows a schematic diagram of one step included in the method of manufacturing a filter according to the embodiment. FIG. 7B shows a schematic diagram of one step included in the method of manufacturing a filter according to an embodiment, following FIG. 7A. FIG. 7C shows a schematic diagram of one step included in the method of manufacturing a filter according to an embodiment, following FIG. 7B. FIG. 7D shows a schematic diagram of one step included in the method of manufacturing a filter according to an embodiment, following FIG. 7C. FIG. 8A shows a plan view of the filter according to the embodiment. FIG. 8B shows a cross-sectional view taken along line 8B-8B included in FIG. 8A. FIG. 8C shows an enlarged view of the portion surrounded by the broken line included in FIG. 8B. FIG. 8D shows an enlarged view of a portion included in FIG. 8C when there is no lower first recess. FIG. 9A shows a plan view of the filter according to the first modification of the embodiment. FIG. 9B shows a cross-sectional view taken along line 9B-9B included in FIG. 9A. FIG. 10A shows a plan view of the filter according to the second modification of the embodiment. FIG. 10B shows a cross-sectional view taken along line 10B-10B included in FIG. 10A. FIG. 10C shows a cross-sectional view taken along line 10C-10C included in FIG. 10A. FIG. 11A shows a plan view of the filter according to the third modification of the embodiment. FIG. 11B shows a cross-sectional view taken along line 11B-11B included in FIG. 11A. FIG. 12A shows a plan view of the filter according to the fourth modification of the embodiment. FIG. 12B shows a cross-sectional view taken along line 12B-12B included in FIG. 12A. FIG. 12C shows a cross-sectional view taken along line 12C-12C included in FIG. 12A.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. The present invention relates to an improvement in an electroasymmetric ion mobility spectrometer disclosed in Japanese Patent Application No. 2016-217738 (changed to the corresponding US application 15/350155 in the English specification). Japanese Patent Application No. 2016-217738 (in English specification, changed to the corresponding US application 15/350155) is incorporated herein by reference.

First, an electric field asymmetric ion mobility spectrometer (hereinafter, may be referred to as "FAIMS") will be described. The user prepares FAIMS according to the present embodiment. That is, the user assembles the FAIMS according to the present embodiment. Alternatively, the user purchases FAIMS according to the present embodiment from the patentee or its licensee. The user then turns on the FAIMS according to the present embodiment to enable the use of the FAIMS.

A field asymmetric ion mobility spectrometer is used to selectively separate at least one substance from a mixture containing two or more substances.

FIG. 1 shows a schematic diagram of an electric field asymmetric ion mobility spectrometer. As shown in FIG. 1, the electric field asymmetric ion mobility spectrometer includes an ionizer 301 and a filter 302. Using the ionizing device 301, two or more kinds of substances contained in the mixture are ionized. At least one substance is selected from two or more ionized substances via the filter 302.

(Ionizer 301)
The mixture supplied to the ionizer 301 is a liquid or a gas. As used herein, the mixture is said to contain three types of gases 202-204. The gases 202 to 204 are ionized using the ionizing device 301.

For details of the ionizing apparatus 301, refer to Patent Document 1 and Patent Document 2. These documents are incorporated herein by reference.

(Filter 302)
Next, the ionized gases 202 to 204 are supplied to the filter 302 arranged adjacent to the ionizing device 301.

The filter 302 includes a flat plate-shaped first electrode 201a and a flat plate-shaped second electrode 201b arranged in parallel with each other. The first electrode 201a is grounded. On the other hand, the second electrode 201b is connected to the power supply 205. The power supply 205 is used to apply an asymmetric AC voltage to the second electrode 201b. A compensation voltage CV may be superimposed on the asymmetric AC voltage. The asymmetric AC voltage applied to the second electrode 201b will be described later.

Three types of ionized gases 202 to 204 are supplied between the grounded first electrode 201a and the second electrode 201b to which an asymmetric AC voltage is applied. The three types of gases 202 to 204 are affected by the electric field generated between the first electrode 201a and the second electrode 201b.

FIG. 2 is a graph showing the relationship between the ratio of electric field intensity and ion mobility. As shown by reference numeral 701 included in FIG. 2, some ionized gases move more actively as the strength of the electric field increases. Ions with a mass-to-charge ratio of less than 300 exhibit this behavior.

As shown by reference numeral 702 included in FIG. 2, some ionized gases move more actively when the strength of the electric field increases, but the degree of movement decreases when the strength of the electric field is further increased. There is also.

As shown by reference numeral 703 included in FIG. 2, some ionized gases decrease in the degree of movement as the strength of the electric field increases. Ions with a mass-to-charge ratio of 300 or higher exhibit this behavior.

Due to such differences in characteristics, as shown in FIG. 1, three types of gases 202 to 204 travel in different directions inside the filter 302. Only the gas 203 is discharged from the filter 302, while the gas 202 is trapped on the surface of the first electrode 201a and the gas 204 is trapped on the surface of the second electrode 201b. In this way, only the gas 203 is selectively separated from the three types of gas. In other words, only the gas 203 is discharged from the filter 302.

The strength of the electric field is appropriately set according to the type of ions to be separated.

Next, the features of the electric field asymmetric ion mobility spectrometer according to this embodiment will be described below.

The electric field asymmetric ion mobility spectrometer according to the present embodiment is characterized by the structure of the filter 302.

FIG. 3 shows a schematic diagram of the filter 302 according to the present embodiment. As shown in FIG. 3, the filter 302 includes a first electrode group 102 and a second electrode group 103. Needless to say, the filter 302 according to the present embodiment is included in the electric field asymmetric ion mobility spectrometer.

The filter 302 includes a flat plate-shaped first electrode 106a, a flat plate-shaped second electrode 106b, a flat plate-shaped third electrode 106c, and a flat plate-shaped fourth electrode 106d.

The first electrode group 102 includes a flat plate-shaped first electrode 106a and a flat plate-shaped third electrode 106c. The second electrode group 103 includes a flat plate-shaped second electrode 106b and a flat plate-shaped fourth electrode 106d. Inside the filter 302, the first electrode group 102 is electrically isolated from the second electrode group 103.

Each of the flat plate-shaped first to fourth electrodes 106a to 106d has a main surface parallel to the direction from the ionizing device 301 toward the filter 302 (that is, the flow direction of the mixture). The black arrow included in FIG. 3 indicates the flow direction of the mixture (that is, the direction from the ionizer 301 toward the filter 302).

As shown in FIG. 3, the flat plate-shaped second electrode 106b is located between the flat plate-shaped first electrode 106a and the flat plate-shaped third electrode 106c. The flat plate-shaped third electrode 106c is located between the flat plate-shaped second electrode 106b and the flat plate-shaped fourth electrode 106f.

The filter 302 shown in FIG. 1 further includes a flat plate-shaped fifth electrode 106e and a flat plate-shaped sixth electrode 106f. The flat plate-shaped fifth electrode 106e is included in the first electrode group 102. The flat plate-shaped sixth electrode 106f is included in the second electrode group 103.

The filter 103 may include more flat plate electrodes 106. The flat plate-shaped n-th electrode 106 is located between the flat plate-shaped (n-1) electrode 106 and the flat plate-shaped (n + 1) th electrode 106 (n represents a natural number of 2 or more). The flat plate-shaped n-th electrode 106 has a main surface parallel to the direction from the ionizing device 301 toward the filter 302 (that is, the flow direction of the mixture). The first electrode group 102 includes a flat plate-shaped second m-1 electrode 106 (m represents an integer of 1 or more). The second electrode group 103 includes a flat plate-shaped second m electrode 106.

A gap 108 is formed between two adjacent flat plate-shaped electrodes 106. Specifically, a first gap 108a is formed between the flat plate-shaped first electrode 106a and the flat plate-shaped second electrode 106b. Similarly, a second gap 108b is formed between the flat plate-shaped second electrode 106b and the flat plate-shaped third electrode 106c. A third gap 108c is formed between the flat plate-shaped third electrode 106c and the flat plate-shaped fourth electrode 106d.

Hereinafter, a method for selectively separating at least one kind of substance from a mixture containing two or more kinds of substances inside the filter 302 according to the present embodiment will be described. Hereinafter, the mixture will contain two types of gases 202 to 203.

The gases 202 to 203 ionized by the ionizing device 301 are supplied to the filter 302. While the second electrode group 103 is grounded, an asymmetric AC voltage is applied to the first electrode group 102 from the power supply 205.

FIG. 4A is a graph showing the relationship between the asymmetric AC voltage applied to the first electrode group 102 and time. In FIG. 4A, the compensation voltage is 0 volt. During the period t1, a positive voltage V1 (> 0) is applied to the first electrode group 102. During the period t2, a negative voltage V2 (<0) is applied to the first electrode group 102. This is repeated. The area S1 defined by the product V1 · · t1 is equal to the area S2 defined by the product | V2 | · t2.

Desirably, the time t1 is 6 nanoseconds or more and 100 nanoseconds or less. Desirably, the positive voltage V1 is 67.5 volts or more and 118.125 volts or less, and the negative voltage V2 is 16 volts or more and 28.4 volts or less. Generally, the absolute value of the positive voltage V1 is larger than the absolute value of the negative voltage V2. However, as shown in FIGS. 4C and 4D, the absolute value of the positive voltage V1 may be smaller than the absolute value of the negative voltage V2. Desirably, the asymmetric AC voltage has a frequency of 2 MHz or more and 30 MHz or less.

The asymmetric AC voltage shown in FIG. 4A is a square wave. However, instead of the square wave, the asymmetric AC voltage may be a sine wave.

FIG. 4B is also a graph showing the relationship between the asymmetric AC voltage applied to the first electrode group 102 and time. In FIG. 4B, the compensation voltage CV is superimposed on the asymmetric AC voltage. Duty ratio of asymmetric AC voltage while keeping the frequency constant so that the area S3 defined by the product (V1 + CV) · t1'is equal to the area S4 defined by the product | −V2 + CV | · t2' Is adjusted. Desirably, the compensation voltage CV is -20 volts or more and +20 volts or less.

FIG. 5 shows a schematic plan view of the movements of the two types of ionized gases 902 to 903 between the pair of flat plate electrodes 900a and 900b included in the conventional filter. The flat plate-shaped electrode 900a is grounded, and the flat plate-shaped electrode 900b is electrically connected to the power supply 205. The arrows included in FIG. 5 indicate the flow direction of the mixture (ie, the direction from the ionizer 301 to the filter 302).

As shown in FIG. 5, during period t1, the ionized gases 902 and 903 are attracted towards the flat electrode 900b. On the other hand, during the period t2, the ionized gases 902 and 903 are attracted toward the flat electrode 900a. For the gas 903, the lateral travel distance in period t1 is substantially equal to the lateral travel distance in period t2. On the other hand, for the gas 902, the lateral travel distance in the period t1 is larger than the lateral travel distance in the period t2. Therefore, the gas 903 travels along the pair of flat plate electrodes 900a and 900b, while the gas 902 is trapped on the surface of the flat plate 900.

However, if the electric field applied to the gas 902 during the period t1 is too small, the length of the electrodes 900 is too short, or the distance between the electrodes 900 is too large, the gas 902 is applied to the surface of the flat plate-shaped electrode 900. Not trapped. In other words, the gas 902 is discharged from the filter together with the gas 903. As a result, the gas 902 is not separated from the mixture containing the gas 902 and the gas 903. As such, the conventional filter shown in FIG. 5 has a low separation capacity.

On the other hand, FIG. 6 shows a schematic plan view of the movements of the two types of ionized gases 202 to 203 between the flat plate-shaped first electrodes 106a and the fourth electrodes 104d included in the filter 302 according to the present embodiment. As described above, the flat plate-shaped first electrode 106a and the flat plate-shaped third electrode 106c are electrically connected to the power supply 205. On the other hand, the flat plate-shaped second electrode 106b and the flat plate-shaped fourth electrode 106d are grounded.

During period t1, the ionized gases 202 and 203 are directed towards one of the flat plates contained in the first electrode group 102 (ie, the flat first electrode 106a or the flat third electrode 106c). Gravitate. On the other hand, in the period t2, the ionized gases 202 and 203 become one of the flat plate-shaped electrodes included in the second electrode group 103 (that is, the flat plate-shaped second electrode 106b or the flat plate-shaped fourth electrode 106d). I'm drawn towards you.

For the gas 203, the lateral travel distance in period t1 is substantially equal to the lateral travel distance in period t2. On the other hand, for the gas 202, the lateral travel distance in the period t1 is larger than the lateral travel distance in the period t2.

As is clear from comparing FIG. 6 with FIG. 5, the ionized gas 202 is a flat plate even when the electric field applied to the gas 202 during the period t1 is small or the length of the flat plate electrode 106 is short. While trapped on the surface of the shaped electrode 106, the ionized gas 203 travels straight through the filter 302 along the flat plate-shaped electrode 106 and is discharged from the filter 302. As described above, at least one type of ion of interest (that is, ionized gas 203) is efficiently separated from the mixture containing two or more types of ions by using the filter 302 according to the present embodiment. Ion. As described above, the filter according to the present embodiment shown in FIG. 6 has a high separation ability.

The electric field applied to the gas is adjusted depending on the type (nature) of the ionized gas of interest (ie, the ionized gas 203). As an example, in the filter 302 according to the present embodiment, the distance 801 between two adjacent plate-shaped electrodes 106 may be 10 micrometers or more and 35 micrometers or less. The length of the flat plate electrode 106 can be 300 micrometers or more and 10,000 micrometers or less. In period t1, an electric field of 20,000 volts / cm or more and 70,000 volts / cm or less can be applied to the gas. In period t2, an electric field of 1000 volts / cm or more and 10,000 volts / cm or less may be applied to the gas.

The filter 302 according to the present embodiment will be described in more detail below.

As shown in FIG. 3, the filter 302 has a rectangular parallelepiped shape. It is desirable that the filter 302 includes a lower insulating substrate 101 and an upper insulating substrate 105 parallel to each other. A flat plate-shaped electrode 106 is located between the lower insulating substrate 101 and the upper insulating substrate 105. Each of the flat plate-shaped electrodes 106 has a normal line orthogonal to the thickness direction of the lower insulating substrate 101 (that is, the vertical direction on the paper surface). Further, each of the flat plate-shaped electrodes 106 has a main surface parallel to the flow direction of the mixture (that is, the direction from the ionizing device 301 toward the filter 302).

As described above, the flat plate-shaped electrode 106 is provided between the lower insulating substrate 101 and the upper insulating substrate 105 so as to stand in the vertical direction on the lower insulating substrate 101.

A first band-shaped electrode 112 and a second band-shaped electrode 114 are provided on the lower surface of the upper insulating substrate 105. The first band-shaped electrode 112 is included in the first electrode group 102, and has a flat plate-shaped second m-1 electrode 106 (for example, a flat plate-shaped first electrode 106a, a flat plate-shaped third electrode 106c, and a flat plate-shaped second electrode 106). It is electrically connected to the fifth electrode 106e) of. The second band-shaped electrode 114 is included in the second electrode group 103, and has a flat plate-shaped second m electrode 106 (for example, a flat plate-shaped second electrode 106b, a flat plate-shaped fourth electrode 106d, and a flat plate-shaped second electrode 106). It is electrically connected to the 6 electrodes 106f). As shown in FIG. 3, the first band-shaped electrode 112 and the second band-shaped electrode 114 extend in a direction parallel to the normal line of the flat plate-shaped first electrode 106a (that is, in the left-right direction on the paper). Is desirable.

As described above, it is desirable that the first electrode group 102 and the second electrode group 103 have a comb shape. In a plan view, the first electrode group 102 and the second electrode group 103 having a comb shape are engaged with each other.

It is desirable that the first electrode group 102 includes a first wall surface electrode 122 located at one end (left end on the paper) of the filter 302. Similarly, it is desirable that the second electrode group 103 includes a second wall electrode 124 located at the other end of the filter 302 (the right end on the paper). Needless to say, a pair of openings are provided on the other two sides of the filter 302 (front and rear on paper). The mixture enters the interior of the filter 302 through one opening (the rear opening on paper). At least one substance of interest is expelled from the filter 302 through the other opening (the front opening on paper).

The upper insulating substrate 105 is provided with a first through hole 106 and a second through hole 107. Through the first through hole 106, the first wall electrode 122 is electrically connected to the power supply 205. Similarly, the second wall electrode 124 is grounded through the second through hole 107.

During period t1, a very high voltage is applied between two adjacent electrodes 106. Therefore, creeping discharge can occur along the surface of the lower insulating substrate 101 between two adjacent flat plate electrodes 106. In the present embodiment, the lower first recess is provided on the upper surface of the lower insulating substrate 101. The lower first recess suppresses creeping discharge.

Hereinafter, the lower insulating substrate 101 according to the present embodiment will be described in detail. FIG. 8A shows a plan view of the filter 302 according to the embodiment. This plan view includes the first electrode 106a to the sixth electrode 106f. FIG. 8B shows a cross-sectional view taken along line 8B-8B included in FIG. 8A. The cross-sectional view shown in FIG. 8B is also a front view of the filter 302.

The arrow X included in FIG. 3 is parallel to the normal line (that is, the left-right direction of the paper surface) of the flat plate-shaped first electrode 106a. The arrow Y is parallel to the flow direction of the mixture (that is, the front-back direction of the paper). The arrow Z is parallel to the normal line (that is, the vertical direction of the paper surface) of the lower insulating substrate 101. FIG. 8A appears when the filter 302 is cut along a plane containing arrows X and Y. FIG. 8B appears when the filter 302 is cut along a plane containing arrows X and Z.

As shown in FIG. 8B, the lower insulating substrate 101 has a lower first recess 131a, a lower second recess 131b, a lower third recess 131c, a lower fourth recess 131d, and a lower fifth recess. The 131e is provided on the upper surface. Further, the lower insulating substrate 101 includes a lower first convex portion 141a, a lower second convex portion 141b, a lower third convex portion 141c, a lower fourth convex portion 141d, and a lower fifth convex portion 141e. And the lower sixth convex portion 141f is provided on the upper surface. The lower first concave portion 131a is located between the lower first convex portion 141a and the lower second convex portion 141b. The lower second concave portion 131b is located between the lower second convex portion 141b and the lower third convex portion 141c.

The first electrode 106a is located on the lower first convex portion 141a. Desirably, one side surface of the first electrode 106a having the shape of a thin rectangular parallelepiped is in contact with the lower first convex portion 141a. Similarly, the second electrode 106b to the sixth electrode 106e are located on the lower second convex portion 141b to the lower sixth convex portion 141f, respectively.

Although not shown, similarly, the upper insulating substrate 105 also has an upper first concave portion to an upper fifth concave portion and an upper first convex portion to an upper sixth convex portion on the lower surface.

As shown in FIG. 3, each recess 131 has the shape of a groove parallel to the arrow Y.

FIG. 8C shows an enlarged view of the portion surrounded by the broken line included in FIG. 8B. FIG. 8D shows an enlarged view of the portion in the case where the lower first recess 131a is not provided. As indicated by the arrow L2 included in FIG. 8D, a creeping discharge can occur between two adjacent flat plate electrodes 106 along the surface of the lower insulating substrate 101. On the other hand, in the present embodiment, as shown by the arrow L1 included in FIG. 8C, the surface of the lower insulating substrate 101 between the two adjacent flat plate-shaped electrodes 106 due to the lower first recess 131a. The distance L1 along the line is longer than that in the case where the lower first recess 131a is not provided. In other words, the distance L1 is longer than the distance L2. Therefore, the possibility of creeping discharge is reduced.

As an example, if the depth D (see FIG. 8C) of the lower first recess 131a is 5 micrometers or more, the electric field strength between two adjacent electrodes 106 is applied even if a voltage of 70,000 volts / cm is applied. Does not exceed the creepage discharge threshold. Depth D can be 10 micrometers or less. The recess 131 having a depth D of 10 micrometers or less can be formed by the Bosch process.

FIG. 9A shows a plan view of the filter according to the first modification of the embodiment. FIG. 9B shows a cross-sectional view taken along line 9B-9B included in FIG. 9A. As shown in FIG. 9B, two or more grooves may be formed between the lower first convex portion 141a and the lower second convex portion 141b. In other words, the lower insulating substrate 101 is provided with not only the lower first recess 131a to the lower fifth recess 131e but also the lower first additional recess 151a to the lower fifth additional recess 151e on the upper surface. There is. Although not shown, the upper insulating substrate 105 may also have such additional recesses on its lower surface.

FIG. 10A shows a plan view of the filter according to the second modification of the embodiment. FIG. 10B shows a cross-sectional view taken along line 10B-10B included in FIG. 10A. FIG. 10C shows a cross-sectional view taken along line 10C-10C included in FIG. 10A. In FIG. 10B, the lower recess 131 is provided, but in FIG. 10C, the lower recess 131 is not provided. That is, in the plan view, the length L3 of the groove (that is, the recess 131 in the cross-sectional view) may be smaller than the length L4 of the short side of the lower insulating substrate 101. As described above, the lower recess 131 may be provided only in the portion where suppression of creeping discharge is required. The upper insulating substrate 105 may also have a structure similar to that shown in FIGS. 10A-10C.

FIG. 11A shows a plan view of the filter according to the third modification of the embodiment. FIG. 11B shows a cross-sectional view taken along line 11B-11B included in FIG. 11A. As shown in FIG. 11A, the distance between the first electrode 106a and the second electrode 106b may be different from the distance between the second electrode 106b and the third electrode 106c in a plan view. Similar to the case of the second modification shown in FIGS. 10A to 10C, in the third modification shown in FIGS. 11A and 11B, the portion where suppression of creeping discharge is required (for example, between adjacent electrodes 106). The lower recess 131 may be provided only in a portion where the distance between the two is particularly narrow.

FIG. 12A shows a plan view of the filter according to the fourth modification of the embodiment. FIG. 12B shows a cross-sectional view taken along line 12B-12B included in FIG. 12A. FIG. 12C shows a cross-sectional view taken along line 12C-12C included in FIG. 12A. The electric field strength generated at one end of the electrode 106 may be different from the electric field strength generated at the center of the electrode 106. Specifically, the electric field tends to be locally concentrated at one end of the electrode 106. Therefore, as shown in FIGS. 12A to 12C, a lower recess 131 may be formed at one end of the electrode 106. As shown in FIG. 12A, a lower additional recess 151 may be formed at the other end of the electrode 106. Similarly, an upper concave portion (not shown) and an upper additional convex portion (not shown) may be formed at one end of the electrode 106.

Hereinafter, a method for manufacturing the filter 302 according to the present embodiment will be described.

First, as shown in FIG. 7A, a silicon substrate 501 having a gold layer (not shown) on its surface is glass on a lower insulating substrate 101 such as a glass substrate having an aluminum layer (not shown) on its surface. The layers are laminated so as to form a layer / aluminum layer / silicon layer / gold layer. The silicon substrate 501 may have a thickness of 300 micrometers or more and 700 micrometers or less. The silicon substrate 501 is doped with impurities such as antimony. Therefore, the silicon substrate 501 has conductivity. The gold layer can be formed by coating the lower insulating substrate 101 with gold by a sputtering method or a vapor deposition method. The gold layer can have a thickness of 200 nanometers or more and 300 nanometers or less. The aluminum layer can be formed by coating a silicon substrate doped with an impurity such as antimony with aluminum by a sputtering method or a vapor deposition method. The aluminum layer can have a thickness of approximately 1 micrometer. The silicon substrate 501 having an aluminum layer on the surface is bonded onto the lower insulating substrate 101 by an anode bonding method.

Next, the photoresist is applied onto the gold layer exposed on the outermost surface. The photoresist is exposed using a mask to form a resist pattern (not shown). A part of the gold layer is removed by wet etching using the resist pattern as a mask. Further, using the resist pattern as a mask, a part of the silicon layer is removed by the Bosch method. A portion of the aluminum layer is removed using the resist pattern as a mask. In this way, the flat plate-shaped electrode 106, the first wall surface electrode 122, and the second wall surface electrode 124 are formed on the lower insulating substrate 101.

The glass layer is then further etched, as shown in FIG. 7C. Using the flat plate electrode 106, the first wall surface electrode 122, and the second wall surface electrode 124 as masks, and using a fluorocarbon gas such as tetrafluoromethane represented by the chemical formula CF ₄ , the glass layer is formed in the thickness direction thereof. Etched along. In this way, the lower recess 131 is formed between the two adjacent electrodes 106.

Instead, the lower recess 131 may be formed on the glass substrate before the silicon substrate 501 is laminated on the glass substrate. In this case, a photoresist layer is formed on the surface of the glass substrate. Then, by the photolithography technique, only the portion where the lower recess 131 is formed is removed by the developing process. Using the photoresist layer left on the glass substrate as a mask, the surface of the glass substrate is etched to form the lower recess 131. The photoresist layer is removed through a remover treatment and an oxygen ashing treatment. Next, the silicon substrate 501 is laminated on the glass substrate. After that, the electrode 106 is formed according to the above process. The upper recess (not shown) can be formed on the lower surface of the upper insulating substrate 105 in this way. Needless to say, alignment (ie, alignment) is performed if necessary for the formation of the photoresist layer and the formation of the recesses.

Finally, as shown in FIG. 7D, the upper insulating substrate 105 having the first strip-shaped electrode 112 and the second strip-shaped electrode 114 on the lower surface is joined onto the lower insulating substrate 101. At the time of joining, the first band-shaped electrode 112 is electrically connected to the flat plate-shaped second m-1 electrode 106 (for example, the flat plate-shaped first electrode 106a, the flat plate-shaped third electrode 106c, and the flat plate-shaped fifth electrode 106e). Connected to. Similarly, the second band-shaped electrode 114 is electrically connected to the flat plate-shaped second m electrode 106 (for example, the flat plate-shaped second electrode 106b, the flat plate-shaped fourth electrode 106d, and the flat plate-shaped sixth electrode 106f). Will be done. In this way, the filter 302 shown in FIG. 3 is obtained.

(others)
(Ion detector)
As shown in FIG. 1, the electric field asymmetric ion mobility spectrometer may include an ion detection unit 303. The ion detection unit 303 is arranged adjacent to the filter 302. In other words, the filter 302 is arranged between the ionizing device 301 and the ion detecting unit 303.

A known ion detection unit 303 as disclosed in Patent Document 1 and Patent Document 2 can be used. At least one substance (that is, gas 203) that has passed through the filter 302 is detected by the ion detection unit 303. At least one substance (that is, gas 203) that has reached the ion detection unit 303 transfers an electric charge to the electrode 310 included in the ion detection unit 303. The value of the current flowing in proportion to the amount of electric charge passed is measured by the ammeter 311. The gas 203 is specified based on the value of the current measured by the ammeter.

(Pump or electrostatic field)
As shown in FIG. 1, the electric field asymmetric ion mobility spectrometer may include a pump 304. The pump 304 sucks the mixture from the ionizer 301 through the filter 302 to the ion detector 303.

An electrostatic field may be used instead of the pump 304. In other words, the electrostatic field can allow the mixture to flow from the ionizer 301 through the filter 302 to the ion detector 303. In this case, the field asymmetric ion mobility spectrometer comprises a pair of electrodes (not shown). The ionization device 301, the filter 302, and the ion detection unit 303 are sandwiched between the pair of electrodes. A DC voltage is applied to the pair of electrodes. The ionized mixture can flow from the ionizing device 301 through the filter 302 to the ion detector 303 by the DC voltage applied between the pair of electrodes.

The electric field asymmetric ion mobility spectrometer according to the present invention can be used to detect a component contained in a biological gas released from a living body or to detect a dangerous component contained in an environmental gas.

101 Lower insulating substrate 102 1st electrode group 103 2nd electrode group 105 Upper insulating substrate 106a Flat plate-shaped 1st electrode 106b Flat plate-shaped 2nd electrode 106c Flat plate-shaped 3rd electrode 106d Flat plate-shaped 4th electrode 106e Flat plate-shaped fifth electrode 106f Flat plate-shaped sixth electrode 108a First gap 108b Second gap 108c Third gap

112 1st band-shaped electrode 114 2nd band-shaped electrode 122 1st wall electrode 124 2nd wall electrode

131a Lower 1st recess 131b Lower 2nd recess 131c Lower 3rd recess 131d Lower 4th recess 131e Lower 5th recess

141a Lower 1st convex part 141b Lower 2nd convex part 141c Lower 3rd convex part 141d Lower 4th convex part 141e Lower 5th convex part 141f Lower 6th convex part

151a Lower 1st additional recess 151b Lower 2nd additional recess 151c Lower 3rd additional recess 151d Lower 4th additional recess 151a Lower 5th additional recess 151a

201a Flat plate-shaped first electrode 201b Flat plate-shaped second electrode 202 Gas 203 Gas 204 Gas 205 Power supply

301 Ionizer 302 Filter 303 Ion detector 304 Pump 311 Ammeter

900a Flat electrode 900b Flat electrode 902 gas 903 gas

Claims (40)

An electric field asymmetric ion mobility spectrometer for selectively separating at least one substance from a mixture containing two or more substances, comprising:
An ionizing device for ionizing two or more kinds of substances contained in the mixture, and a filter for selecting at least one kind of substance from the two or more kinds of ionized substances.
here,
The filter is adjacent to the ionizer and
The filter comprises a first electrode group and a second electrode group.
The filter includes a flat plate-shaped first electrode, a flat plate-shaped second electrode, a flat plate-shaped third electrode, and a flat plate-shaped fourth electrode.
The first electrode group includes the flat plate-shaped first electrode and the flat plate-shaped third electrode.
The second electrode group includes the flat plate-shaped second electrode and the flat plate-shaped fourth electrode.
Each of the first to fourth flat plates has a main surface parallel to the flow direction of the mixture .
The flat plate-shaped second electrode is located between the flat plate-shaped first electrode and the flat plate-shaped third electrode.
The flat plate-shaped third electrode is located between the flat plate-shaped second electrode and the flat plate-shaped fourth electrode.
The flat plate-shaped third electrode is electrically connected to the flat plate-shaped first electrode.
The flat plate-shaped fourth electrode is electrically connected to the flat plate-shaped second electrode.
A first gap is formed between the flat plate-shaped first electrode and the second electrode.
A second gap is formed between the flat plate-shaped second electrode and the third electrode.
A third gap is formed between the flat plate-shaped third electrode and the fourth electrode.
The first electrode group is electrically isolated from the second electrode group.
The filter comprises a lower insulating substrate and an upper insulating substrate parallel to each other.
The flat plate-shaped first to fourth electrodes are located between the lower insulating substrate and the upper insulating substrate.
The normal direction of the flat plate-shaped first to fourth electrodes is orthogonal to the normal of the lower insulating substrate.
In a cross section including both the normal of the flat plate-shaped first electrode and the normal of the lower insulating substrate, the lower insulating substrate is provided with a lower first recess on the upper surface thereof.
In the cross section, the lower insulating substrate includes a lower first convex portion and a lower second convex portion on the upper surface thereof.
In the cross section, the lower first concave portion is located between the lower first convex portion and the lower second convex portion.
In the cross section, the flat plate-shaped first electrode is located on the lower first convex portion, and in the cross section, the flat plate-shaped second electrode is located on the lower second convex portion. ing,
Electric field asymmetric ion mobility spectrometer.
The electric field asymmetric ion mobility spectrometer according to claim 1.
In the cross section, a lower second recess is provided on the upper surface of the lower insulating substrate.
In the cross section, a lower third convex portion is provided on the upper surface of the lower insulating substrate.
In the cross section, the lower second concave portion is located between the lower second convex portion and the lower third convex portion, and in the cross section, the lower third convex portion is above the lower third convex portion. The flat third electrode is located,
Electric field asymmetric ion mobility spectrometer. The electric field asymmetric ion mobility spectrometer according to claim 2.
In the cross section, a lower third recess is provided on the upper surface of the lower insulating substrate.
In the cross section, the lower fourth convex portion is provided on the upper surface of the lower insulating substrate.
In the cross section, the lower third concave portion is located between the lower third convex portion and the lower fourth convex portion, and in the cross section, the lower fourth convex portion is above the lower fourth convex portion. The flat fourth electrode is located,
Electric field asymmetric ion mobility spectrometer. The electric field asymmetric ion mobility spectrometer according to claim 1.
In the cross section, the upper first recess is provided on the lower surface of the upper insulating substrate.
In the cross section, an upper first convex portion and an upper second convex portion are provided on the lower surface of the upper insulating substrate.
In the cross section, the upper first concave portion is located between the upper first convex portion and the upper second convex portion.
In the cross section, the upper first convex portion is located on the flat plate-shaped first electrode, and in the cross section, the upper second convex portion is located on the flat plate-shaped second electrode. ing,
Electric field asymmetric ion mobility spectrometer. The electric field asymmetric ion mobility spectrometer according to claim 4.
In the cross section, the upper second recess is provided on the lower surface of the upper insulating substrate.
In the cross section, the upper third convex portion is provided on the lower surface of the upper insulating substrate.
In the cross section, the upper second concave portion is located between the upper second convex portion and the upper third convex portion, and in the cross section, the upper third convex portion is the flat plate-shaped third. Located on the electrode,
Electric field asymmetric ion mobility spectrometer. The electric field asymmetric ion mobility spectrometer according to claim 5.
In the cross section, the upper third recess is provided on the lower surface of the upper insulating substrate.
In the cross section, the upper fourth convex portion is provided on the lower surface of the upper insulating substrate.
In the cross section, the upper third concave portion is located between the upper third convex portion and the upper fourth convex portion, and in the cross section, the upper fourth convex portion is the flat plate-shaped fourth. An electric field asymmetric ion mobility spectrometer located on an electrode.
The electric field asymmetric ion mobility spectrometer according to claim 1.
In the cross section, a lower first additional recess is provided on the upper surface of the lower insulating substrate.
Moreover, in the cross section, the lower first additional concave portion is located between the lower first convex portion and the lower second convex portion.
Electric field asymmetric ion mobility spectrometer. The electric field asymmetric ion mobility spectrometer according to claim 1.
The lower first recess does not appear in another cross section including both the normal of the flat plate-shaped first electrode and the normal of the lower insulating substrate.
Electric field asymmetric ion mobility spectrometer. The electric field asymmetric ion mobility spectrometer according to claim 1.
The first electrode group includes a first band-shaped electrode and has a first band-shaped electrode.
The second electrode group includes a second band-shaped electrode and has a second band-shaped electrode.
The first band-shaped electrode is provided on at least one of the lower surface of the upper insulating substrate or the upper surface of the lower insulating substrate.
The second band-shaped electrode is provided on at least one of the lower surface of the upper insulating substrate or the upper surface of the lower insulating substrate.
The first band-shaped electrode is electrically connected to the flat plate-shaped first electrode and the flat plate-shaped third electrode, and the second band-shaped electrode is the flat plate-shaped second electrode and the flat plate-shaped second electrode. Electrically connected to the 4th electrode of
Electric field asymmetric ion mobility spectrometer. The electric field asymmetric ion mobility spectrometer according to claim 9 .
The first band-shaped electrode and the second band-shaped electrode extend in a direction parallel to the normal of the flat plate-shaped first electrode.
Electric field asymmetric ion mobility spectrometer.
The electric field asymmetric ion mobility spectrometer according to claim 1, further comprising a detection unit for detecting at least one kind of substance selected by the filter.
The filter is located between the ionizer and the detector.
Electric field asymmetric ion mobility spectrometer. The electric field asymmetric ion mobility spectrometer according to claim 1.
The lower first recess has a depth of 5 micrometers or more and 10 micrometers or less.
Electric field asymmetric ion mobility spectrometer. The electric field asymmetric ion mobility spectrometer according to claim 1.
The first gap, the second gap, and the third gap all have a width of 10 micrometers or more and 35 micrometers or less.
Electric field asymmetric ion mobility spectrometer. The electric field asymmetric ion mobility spectrometer according to claim 1.
Each of the flat plate-shaped first electrodes to the fourth electrode has a length of 300 micrometers or more and 10,000 micrometers or less.
Electric field asymmetric ion mobility spectrometer. A method of selectively separating at least one substance from a mixture containing two or more substances using an electric field asymmetric ion mobility spectrometer.
Step (a) of preparing the electric field asymmetric ion mobility spectrometer having the following.
An ionizing device for ionizing two or more kinds of substances contained in the mixture, and a filter for selecting at least one kind of substance from the two or more kinds of ionized substances.
here,
The filter is adjacent to the ionizer and
The filter comprises a first electrode group and a second electrode group.
The filter includes a flat plate-shaped first electrode, a flat plate-shaped second electrode, a flat plate-shaped third electrode, and a flat plate-shaped fourth electrode.
The first electrode group includes the flat plate-shaped first electrode and the flat plate-shaped third electrode.
The second electrode group includes the flat plate-shaped second electrode and the flat plate-shaped fourth electrode.
Each of the first to fourth flat plates has a main surface parallel to the flow direction of the mixture .
The flat plate-shaped second electrode is located between the flat plate-shaped first electrode and the flat plate-shaped third electrode.
The flat plate-shaped third electrode is located between the flat plate-shaped second electrode and the flat plate-shaped fourth electrode.
The flat plate-shaped third electrode is electrically connected to the flat plate-shaped first electrode.
The flat plate-shaped fourth electrode is electrically connected to the flat plate-shaped second electrode.
A first gap is formed between the flat plate-shaped first electrode and the second electrode, and a second gap is formed between the flat plate-shaped second electrode and the third electrode. A third gap is formed between the third electrode and the fourth electrode, and the first electrode group is electrically insulated from the second electrode group.
The filter comprises a lower insulating substrate and an upper insulating substrate parallel to each other.
The flat plate-shaped first to fourth electrodes are located between the lower insulating substrate and the upper insulating substrate.
The normal direction of the flat plate-shaped first to fourth electrodes is orthogonal to the normal of the lower insulating substrate.
In a cross section including both the normal of the flat plate-shaped first electrode and the normal of the lower insulating substrate, the lower insulating substrate is provided with a lower first recess on the upper surface thereof.
In the cross section, the lower insulating substrate includes a lower first convex portion and a lower second convex portion on the upper surface thereof.
In the cross section, the lower first concave portion is located between the lower first convex portion and the lower second convex portion.
In the cross section, the flat plate-shaped first electrode is located on the lower first convex portion, and in the cross section, the flat plate-shaped second electrode is located on the lower second convex portion. And
The step (b) of supplying a mixture containing the two or more kinds of substances to the ionization apparatus and ionizing the two or more kinds of substances contained in the mixture, and the filter of the two or more kinds of the ionized substances. (C), a step of supplying the substance to the filter and separating the at least one substance through the filter.
Equipped with
here,
An asymmetric AC voltage was applied between the first electrode group and the second electrode group, and the ionized at least one kind of substance passed through the first to third gaps, while the other substances were ionized. The substance is trapped on the main surface of the flat plate-shaped first to fourth electrodes.
Method.
The method according to claim 15.
In the cross section, a lower second recess is provided on the upper surface of the lower insulating substrate.
In the cross section, a lower third convex portion is provided on the upper surface of the lower insulating substrate.
In the cross section, the lower second concave portion is located between the lower second convex portion and the lower third convex portion, and in the cross section, the lower third convex portion is above the lower third convex portion. The flat third electrode is located,
Method. The method according to claim 16.
In the cross section, a lower third recess is provided on the upper surface of the lower insulating substrate.
In the cross section, the lower fourth convex portion is provided on the upper surface of the lower insulating substrate.
In the cross section, the lower third concave portion is located between the lower third convex portion and the lower fourth convex portion, and in the cross section, the lower fourth convex portion is above the lower fourth convex portion. The flat fourth electrode is located,
Method. The method according to claim 15.
In the cross section, the upper first recess is provided on the lower surface of the upper insulating substrate.
In the cross section, an upper first convex portion and an upper second convex portion are provided on the lower surface of the upper insulating substrate.
In the cross section, the upper first concave portion is located between the upper first convex portion and the upper second convex portion.
In the cross section, the upper first convex portion is located on the flat plate-shaped first electrode, and in the cross section, the upper second convex portion is located on the flat plate-shaped second electrode. ing,
Method. The method according to claim 18.
In the cross section, the upper second recess is provided on the lower surface of the upper insulating substrate.
In the cross section, the upper third convex portion is provided on the lower surface of the upper insulating substrate.
In the cross section, the upper second concave portion is located between the upper second convex portion and the upper third convex portion, and in the cross section, the upper third convex portion is the flat plate-shaped third. Located on the electrode,
Method. The method according to claim 19.
In the cross section, the upper third recess is provided on the lower surface of the upper insulating substrate.
In the cross section, the upper fourth convex portion is provided on the lower surface of the upper insulating substrate.
In the cross section, the upper third concave portion is located between the upper third convex portion and the upper fourth convex portion, and in the cross section, the upper fourth convex portion is the flat plate-shaped fourth. The method, located on the electrodes.
The method according to claim 15.
In the cross section, a lower first additional recess is provided on the upper surface of the lower insulating substrate.
Moreover, in the cross section, the lower first additional concave portion is located between the lower first convex portion and the lower second convex portion.
Method. The method according to claim 15.
The lower first recess does not appear in another cross section including both the normal of the flat plate-shaped first electrode and the normal of the lower insulating substrate.
Method. The method according to claim 15.
The first electrode group includes a first band-shaped electrode and has a first band-shaped electrode.
The second electrode group includes a second band-shaped electrode and has a second band-shaped electrode.
The first band-shaped electrode is provided on at least one of the lower surface of the upper insulating substrate or the upper surface of the lower insulating substrate.
The second band-shaped electrode is provided on at least one of the lower surface of the upper insulating substrate or the upper surface of the lower insulating substrate.
The first band-shaped electrode is electrically connected to the flat plate-shaped first electrode and the flat plate-shaped third electrode, and the second band-shaped electrode is the flat plate-shaped second electrode and the flat plate-shaped second electrode. Electrically connected to the 4th electrode of
Method. The method according to claim 23.
The first band-shaped electrode and the second band-shaped electrode extend in a direction parallel to the normal of the flat plate-shaped first electrode.
Method. The method according to claim 23.
The electric field asymmetric ion mobility spectrometer further comprises a detector for detecting at least one substance selected by the filter, and the filter is placed between the ionizer and the detector. positioned,
Method. The method according to claim 15.
The lower first recess has a depth of 5 micrometers or more and 10 micrometers or less.
Method. The method according to claim 15.
The first gap, the second gap, and the third gap all have a width of 10 micrometers or more and 35 micrometers or less.
Method. The method according to claim 15.
Each of the flat plate-shaped first electrodes to the fourth electrode has a length of 300 micrometers or more and 10,000 micrometers or less.
Method. A filter used for an electric field asymmetric ion mobility spectrometer that selectively separates at least one substance from a mixture containing two or more substances, comprising:
Flat plate-shaped first electrode,
Flat plate-shaped second electrode,
A flat plate-shaped third electrode and a flat plate-shaped fourth electrode, where
The flat plate-shaped first electrode and the flat plate-shaped third electrode are included in the first electrode group.
The flat plate-shaped second electrode and the flat plate-shaped fourth electrode are included in the second electrode group.
Each of the first to fourth flat plates has a main surface parallel to the flow direction of the mixture .
The flat plate-shaped second electrode is located between the flat plate-shaped first electrode and the flat plate-shaped third electrode.
The flat plate-shaped third electrode is located between the flat plate-shaped second electrode and the flat plate-shaped fourth electrode.
The flat plate-shaped third electrode is electrically connected to the flat plate-shaped first electrode.
The flat plate-shaped fourth electrode is electrically connected to the flat plate-shaped second electrode.
A gap is formed between the flat plate-shaped first to fourth electrodes.
The first electrode group is electrically isolated from the second electrode group.
The filter comprises a lower insulating substrate and an upper insulating substrate parallel to each other.
The flat plate-shaped first to fourth electrodes are located between the lower insulating substrate and the upper insulating substrate.
The normal direction of the flat plate-shaped first to fourth electrodes is orthogonal to the thickness direction of the lower insulating substrate.
In a cross section including both the normal of the flat plate-shaped first electrode and the normal of the lower insulating substrate, the lower insulating substrate is provided with a lower first recess on the upper surface thereof.
In the cross section, the lower insulating substrate includes a lower first convex portion and a lower second convex portion on the upper surface thereof.
In the cross section, the lower first concave portion is located between the lower first convex portion and the lower second convex portion.
In the cross section, the flat plate-shaped first electrode is located on the lower first convex portion, and in the cross section, the flat plate-shaped second electrode is located on the lower second convex portion. And
The first electrode group includes a first band-shaped electrode and has a first band-shaped electrode.
The second electrode group includes a second band-shaped electrode and has a second band-shaped electrode.
The first band-shaped electrode is provided on at least one of the lower surface of the upper insulating substrate or the upper surface of the lower insulating substrate.
The second band-shaped electrode is provided on at least one of the lower surface of the upper insulating substrate or the upper surface of the lower insulating substrate.
The first band-shaped electrode is electrically connected to the flat plate-shaped first electrode and the flat plate-shaped third electrode.
The second band-shaped electrode is electrically connected to the flat plate-shaped second electrode and the flat plate-shaped fourth electrode.
filter. The filter according to claim 29.
In the cross section, a lower second recess is provided on the upper surface of the lower insulating substrate.
In the cross section, a lower third convex portion is provided on the upper surface of the lower insulating substrate.
In the cross section, the lower second concave portion is located between the lower second convex portion and the lower third convex portion, and in the cross section, the lower third convex portion is above the lower third convex portion. The flat third electrode is located,
filter. The filter according to claim 30.
In the cross section, a lower third recess is provided on the upper surface of the lower insulating substrate.
In the cross section, the lower fourth convex portion is provided on the upper surface of the lower insulating substrate.
In the cross section, the lower third concave portion is located between the lower third convex portion and the lower fourth convex portion, and in the cross section, the lower fourth convex portion is above the lower fourth convex portion. The flat fourth electrode is located,
filter. The filter according to claim 29.
In the cross section, the upper first recess is provided on the lower surface of the upper insulating substrate.
In the cross section, an upper first convex portion and an upper second convex portion are provided on the lower surface of the upper insulating substrate.
In the cross section, the upper first concave portion is located between the upper first convex portion and the upper second convex portion.
In the cross section, the upper first convex portion is located on the flat plate-shaped first electrode, and in the cross section, the upper second convex portion is located on the flat plate-shaped second electrode. ing,
filter. The filter according to claim 32.
In the cross section, the upper second recess is provided on the lower surface of the upper insulating substrate.
In the cross section, the upper third convex portion is provided on the lower surface of the upper insulating substrate.
In the cross section, the upper second concave portion is located between the upper second convex portion and the upper third convex portion, and in the cross section, the upper third convex portion is the flat plate-shaped third. Located on the electrode,
filter. The filter according to claim 33.
In the cross section, the upper third recess is provided on the lower surface of the upper insulating substrate.
In the cross section, the upper fourth convex portion is provided on the lower surface of the upper insulating substrate.
In the cross section, the upper third concave portion is located between the upper third convex portion and the upper fourth convex portion, and in the cross section, the upper fourth convex portion is the flat plate-shaped fourth. A filter located on the electrodes.
The filter according to claim 29.
In the cross section, a lower first additional recess is provided on the upper surface of the lower insulating substrate.
Moreover, in the cross section, the lower first additional concave portion is located between the lower first convex portion and the lower second convex portion.
filter. The filter according to claim 29.
The lower first recess does not appear in another cross section including both the normal of the flat plate-shaped first electrode and the normal of the lower insulating substrate.
filter. The filter according to claim 29.
The first band-shaped electrode and the second band-shaped electrode extend in a direction parallel to the normal of the flat plate-shaped first electrode.
filter. The filter according to claim 29.
The lower first recess has a depth of 5 micrometers or more and 10 micrometers or less.
filter. The filter according to claim 29.
The first gap, the second gap, and the third gap are all filters having a width of 10 micrometers or more and 35 micrometers or less.
The filter according to claim 29.
Each of the flat plate-shaped first electrodes to the fourth electrode is a filter having a length of 300 micrometers or more and 10,000 micrometers or less.

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