JP7014267B2 - Physical quantity sensors and electronic devices - Google Patents

Description

The present invention relates to a physical quantity sensor and an electronic device using the same.

In recent years, angular velocity sensors that detect angular velocities have been widely used for image stabilization of imaging devices such as digital cameras and attitude control of moving object navigation systems such as vehicles using GPS signals. Further, as an angular velocity sensor, one that can detect the angular velocity around each of the three axes orthogonal to each other with one sensor is also known (see, for example, Patent Document 1).

The sensor described in Patent Document 1 has an annular driving mass, an anchor arranged at the center thereof, an elastic anchor element connecting the driving mass and the anchor, and a substrate 2 to which the anchor is fixed. It is configured to detect the angular velocity around each axis while the drive mass is rotationally vibrated.
However, in such a configuration, the vibration of the driving mass is transmitted to the substrate 2 via the elastic anchor element and the anchor, and vibration leakage occurs. When such vibration leakage occurs, the Q value of the vibration of the sensor decreases (that is, it causes energy loss). When the Q value of vibration decreases, the desired vibration amplitude cannot be obtained, and the detection sensitivity of the sensor deteriorates. In addition, a drive device having a high drive capacity is required to obtain the required amplitude, which leads to an increase in the size of the sensor.

Japanese Unexamined Patent Publication No. 2007-2716111

An object of the present invention is to provide a small physical quantity sensor having a high Q value and high detection sensitivity and an electronic device using the same.

Such an object is achieved by the following invention.
In the physical quantity sensor of the present invention, when two axes orthogonal to each other are defined as the first axis and the second axis,
Ring part that can vibrate in a circle and
The four support parts that support the ring part and
Four beams connecting each of the support portions and the ring portion of the ring portion to be a node of the annular vibration,
A pair of first mass parts having a movable part and arranged to face each other in a direction parallel to the first axis via the ring part.
A pair of second mass parts having a movable part and arranged to face each other in a direction parallel to the second axis via the ring part.
A pair of first springs connecting each of the first mass parts and the ring portion so that each of the first mass parts can vibrate in a direction parallel to the first axis with respect to the ring portion. Department and
A pair of second springs connecting each of the second mass parts and the ring portion so that each of the second mass parts can vibrate in a direction parallel to the second axis with respect to the ring portion. Department and
Vibration that causes at least one of the pair of first mass parts and the pair of second mass parts to vibrate in a plane direction including the first axis and the second axis so as to be in opposite phase to each other at the first frequency. Means and
It has at least one transducer that converts the displacement amount of the movable part of each of the first mass parts and the movable part of each of the second mass parts into an electric signal.
The ring portion is characterized in that it vibrates in an annulus in a direction parallel to the first axis and a direction parallel to the second axis according to the first frequency.
This makes it possible to provide a small physical quantity sensor having a high Q value and high detection sensitivity.

The physical quantity sensor of the present invention has two axes orthogonal to each other as the first axis and the second axis.
Ring part that can vibrate in a circle and
The four support parts that support the ring part and
Four beams connecting each of the support portions and the four fixed points serving as the nodes of the ring vibration of the ring portion,
It has a first movable portion that can be displaced around an axis parallel to the second axis and a second movable portion that can be displaced in a direction parallel to the second axis, and is parallel to the first axis via the ring portion. A pair of first mass parts arranged to face each other in parallel directions,
It has a third movable portion that can be displaced around an axis parallel to the first axis and a fourth movable portion that can be displaced in a direction parallel to the first axis, and is parallel to the second axis via the ring portion. A pair of second mass parts arranged so as to face each other in parallel directions,
A pair of first spring portions connecting each of the first mass parts and the ring so that each of the first mass parts can vibrate in a direction parallel to the first axis with respect to the ring portion. When,
A pair of second spring portions connecting each of the second mass parts and the ring so that each of the second mass parts can vibrate in a direction parallel to the second axis with respect to the ring. ,
Vibration that causes at least one of the pair of first mass parts and the pair of second mass parts to vibrate in a plane direction including the first axis and the second axis so as to be in opposite phase to each other at the first frequency. Means and
A transducer that converts the displacement amount of the first movable part of each of the first mass parts and the displacement amount of the third movable part of each of the second mass parts into an electric gain signal.
It has a transducer that converts the displacement amount of the second movable part of each of the first mass parts and the displacement amount of the fourth movable part of each of the second mass parts into an electric gain signal.
The ring portion is characterized in that it vibrates in an annulus in a direction parallel to the first axis and a direction parallel to the second axis according to the first frequency.
This makes it possible to provide a small physical quantity sensor having a high Q value and high detection sensitivity.

The physical quantity sensor of the present invention has a substrate that supports the ring portion, and has a substrate.
The substrate is preferably composed of a semiconductor substrate, an insulating substrate, or a composite substrate in which a semiconductor layer and an insulating layer are laminated.
This simplifies the device configuration.
In the physical quantity sensor of the present invention, it is preferable that the ring portion has an outer diameter and an inner diameter, the inner side of the inner diameter is a gap, and the ring portion is elastically deformable.
This makes it possible to vibrate the ring portion more efficiently.

In the physical quantity sensor of the present invention, the first spring portion is deformed in a direction parallel to the second axis and deformed in a direction parallel to an axis orthogonal to the first axis and the second axis, respectively. It is regulated and
It is preferable that the second spring portion is restricted from being deformed in a direction parallel to the first axis and deformed in a direction parallel to an axis orthogonal to the first axis and the second axis, respectively. ..
As a result, the first mass part can be stably vibrated in the direction parallel to the first axis, and the second mass part can be stably vibrated in the direction parallel to the second axis.

In the physical quantity sensor of the present invention, the four support portions are located inside the pair of first mass parts and the pair of second mass parts and outside the ring portion, and intersect with the center of the ring portion. It is preferable that the first axis and the second axis are provided at positions symmetrical with respect to the mirror plane.
As a result, the size of the device can be reduced. In addition, the ring portion can be stably supported.

In the physical quantity sensor of the present invention, it is preferable that the displacement of each of the beams in the radial direction from the center of the ring is regulated.
Thereby, vibration leakage can be prevented or suppressed more effectively.
In the physical quantity sensor of the present invention, it is preferable that the vibration means is either electrostatically driven or piezoelectrically driven.
Thereby, the first mass part and the second mass part can be vibrated efficiently.

In the physical quantity sensor of the present invention, it is preferable that the transducer has a detection capability of any of electrostatic type, piezoelectric type and piezo resistance type.
This makes the physical quantity sensor excellent in detection ability.
In the physical quantity sensor of the present invention, the transducer measures the angular velocity around the first axis, the angular velocity around the second axis, and the angular velocity around the third axis orthogonal to both the first axis and the second axis. It is preferable to detect it.
This makes it possible to use it as an angular velocity sensor.

In the physical quantity sensor of the present invention, it is preferable that the transducers are paired with the other transducers to electrically cancel the linear acceleration in a predetermined direction.
This improves the detection accuracy of the angular velocity.
In the physical quantity sensor of the present invention, it is preferable that each of the transducers also has a unique resonance frequency.
As a result, it is possible to drive in the resonance mode, so that the detection accuracy of the angular velocity is further improved.

In the physical quantity sensor of the present invention, the annular vibration of the ring portion contracts in a direction parallel to the first axis and expands in a direction parallel to the second axis, and is parallel to the first axis. It is preferable that the vibration repeats a state of expanding in a direction and contracting in a direction parallel to the second axis.
In the physical quantity sensor of the present invention, each of the first spring portion and each of the second spring portion is connected to a portion of the ring portion that is inclined by 45 degrees from both the first axis and the second axis. Is preferable.
This makes it possible to effectively prevent or suppress the ring vibration of the ring portion from leaking to the outside.

The physical quantity sensor of the present invention is characterized in that the projected outer shape of the aggregate of the pair of first mass parts and the pair of second mass parts is substantially circular.
As a result, the size of the device can be reduced.
The physical quantity sensor of the present invention is characterized in that the projected outer shape of the aggregate of the pair of first mass parts and the pair of second mass parts is substantially rectangular.
As a result, the size of the device can be reduced.

In the physical quantity sensor of the present invention, it is preferable that the vibrating means is connected to the inside of each of the first mass parts and each of the second mass parts.
As a result, the size of the device can be reduced.
In the physical quantity sensor of the present invention, it is preferable that the transducer is connected to the inside of each of the first mass parts and each of the second mass parts.
As a result, the size of the device can be reduced.

In the physical quantity sensor of the present invention, when two axes orthogonal to each other are defined as the first axis and the second axis,
With a stretchable connection
Four support portions that are provided at positions inclined by a predetermined angle from both axes of the first axis and the second axis that intersect the center of the connecting portion of the connecting portion and support the connecting portion, and
Four beams connecting each of the support portions and the connecting portion, and
A pair of first mass parts having a movable part and arranged to face each other in a direction parallel to the first axis via the ring part.
A pair of second mass parts having a movable part and arranged to face each other in a direction parallel to the second axis via the ring part.
A pair of first springs connecting each of the first mass parts and the ring portion so that each of the first mass parts can vibrate in a direction parallel to the first axis with respect to the ring portion. Department and
A pair of second springs connecting each of the second mass parts and the ring portion so that each of the second mass parts can vibrate in a direction parallel to the second axis with respect to the ring portion. Department and
Vibration that causes at least one of the pair of first mass parts and the pair of second mass parts to vibrate in a plane direction including the first axis and the second axis so as to be in opposite phase to each other at the first frequency. Means and
It has at least one transducer that converts the displacement amount of the movable part of each of the first mass parts and the movable part of each of the second mass parts into an electric signal.
When the connecting portion expands and contracts according to the first frequency, the connecting portion between the beam and the connecting portion becomes a node.
This makes it possible to provide a small physical quantity sensor having a high Q value and high detection sensitivity.
The electronic device of the present invention is characterized in that the physical quantity sensor of the present invention is used.
This makes it possible to provide a highly reliable electronic device.

It is a schematic plan view which shows the 1st Embodiment of the physical quantity sensor of this invention. It is a detailed plan view of the physical quantity sensor shown in FIG. It is a top view for demonstrating the vibration of the ring part which the physical quantity sensor shown in FIG. 2 has. It is a top view for demonstrating the structure of the detection means which the physical quantity sensor shown in FIG. 2 has. It is a figure for demonstrating the drive of a physical quantity sensor. It is a figure for demonstrating the drive of a physical quantity sensor. It is a figure for demonstrating the drive of a physical quantity sensor. It is a top view which shows the 2nd Embodiment of the physical quantity sensor of this invention. It is a top view which shows the 3rd Embodiment of the physical quantity sensor of this invention. It is a top view which shows the 4th Embodiment of the physical quantity sensor of this invention. It is a top view which shows the 5th Embodiment of the physical quantity sensor of this invention. It is a top view which shows the 6th Embodiment of the physical quantity sensor of this invention. It is a top view which shows the 7th Embodiment of the physical quantity sensor of this invention. It is a top view which shows the 8th Embodiment of the physical quantity sensor of this invention. It is an electronic device (notebook type personal computer) provided with the physical quantity sensor of the present invention. It is an electronic device (mobile phone) provided with the physical quantity sensor of the present invention. It is an electronic device (digital still camera) provided with the physical quantity sensor of the present invention.

Hereinafter, the physical quantity sensor of the present invention will be described in detail based on the preferred embodiments shown in the accompanying drawings.
<First Embodiment>
1 is a schematic plan view showing a first embodiment of the physical quantity sensor of the present invention, FIG. 2 is a detailed plan view of the physical quantity sensor shown in FIG. 1, and FIG. 3 is a ring included in the physical quantity sensor shown in FIG. A plan view for explaining the vibration of the portion, FIG. 4 is a plan view for explaining the configuration of the detection means included in the physical quantity sensor shown in FIG. 2, and FIGS. 5, 6, and 7 are the physical quantity sensors, respectively. It is a figure for demonstrating the drive. In each figure, for convenience of explanation, the X-axis, the Y-axis, and the Z-axis are shown as three axes orthogonal to each other. In the following, the direction parallel to the X axis (first axis) is the "X axis direction", the direction parallel to the Y axis (second axis) is the Y axis direction, and the direction parallel to the Z axis (third axis). Is called "Z-axis direction".

1. 1. Physical quantity sensor The physical quantity sensor 1 of the present embodiment is an angular velocity sensor capable of detecting an angular velocity around the X axis, an angular velocity around the Y axis, and an angular velocity around the Z axis. According to such an angular velocity sensor, one sensor can independently detect the angular velocities around the three axes, so that excellent convenience can be exhibited.

As shown in FIG. 1, the physical quantity sensor 1 includes a ring portion 31 capable of circular vibration, four substrate fixing portions (support portions) 61, 62, 63, 64 supporting the ring portion 31, and a substrate fixing portion 61. , 62, 63, 64 and four beams 71, 72, 73, 74 connecting the ring portion 31 and the portion of the ring portion 31 that becomes a node of the annular vibration, and a movable portion having a movable portion in the X-axis direction via the ring portion 31. A pair of first vibrating parts (first mass part) 51 and 52 arranged facing each other and a pair of second vibrating parts (second mass part) having movable parts and arranged facing each other in the Y-axis direction via the ring portion 31. Part) 53, 54 and a pair of first vibrating parts 51, 52 connecting the first vibrating part 51, 52 and the ring part 31 so that the first vibrating part 51, 52 can vibrate with respect to the ring part 31 in the X-axis direction. The inner spring portions (first spring portion) 81, 82 and the second vibrating portions 53, 54 so that the second vibrating portions 53, 54 can vibrate in the direction parallel to the Y axis with respect to the ring portion 31. It has a pair of second inner spring portions (second spring portions) 83 and 84 that connect the ring portion 31. Further, a vibrating means 4 that vibrates the first vibrating portions 51 and 52 so as to be in opposite phase to each other at the first frequency in the X-axis direction, and a movable portion and a second vibrating portion included in the first vibrating portions 51 and 52. It has a transducer (detecting means 9) that converts the displacement amount of the movable portion included in the 53 and 54 into an electric signal.
The ring portion 31 vibrates in an annulus in the X-axis direction and the Y-axis direction according to the first frequency. According to such a physical quantity sensor 1, since the vibration of the ring portion 31 does not leak to the substrate, it is possible to increase the Q value of the vibration while reducing the size of the device. Therefore, it is possible to provide a small physical quantity sensor having excellent detection accuracy.

Hereinafter, the physical quantity sensor 1 will be described in detail.
As shown in FIG. 2, the physical quantity sensor 1 includes a vibration system structure 3 provided in the XY plane, a substrate 2 that supports the vibration system structure 3, and a vibration means 4 that vibrates the vibration system structure 3. It also has a detecting means 9 for detecting an angular velocity applied to the physical quantity sensor 1.
-Vibration system structure-
As shown in FIG. 2, the vibration system structure 3 has a ring portion (connecting portion) 31 and a pair of first vibrating portions (first mass portions) 51 arranged to face each other in the X-axis direction via the ring portion 31. 52, first inner spring portions (first spring portions) 81 and 82 connecting the first vibrating portions 51 and 52 and the ring portion 31, and a pair arranged facing each other in the Y-axis direction via the ring portion 31. Second inner spring part (second spring part) 83, 84 connecting the second vibrating part (second mass part) 53, 54, the second vibrating part 53, 54, and the ring part 31, and the ring part 31. The inner fixing portions (supporting portions) 61, 62, 63, 64 provided around the above, and the beams 71, 72, 73, 74 connecting the ring portion 31 and the inner fixing portions 61, 62, 63, 64, and The outer fixing portions 651, 652, 661, 662, 671, 672, 681, 682 provided outside the vibrating portions 51, 52, 53, 54, and the vibrating portions 51, 52, 53, 54 and the outer fixing portion 651, It is composed of outer spring portions 851, 852, 861, 862, 871, 872, 881, 882 connecting the 652, 661, 662, 671, 672, 681, and 682.

The vibration system structure 3 of the present embodiment is composed of silicon as a main material, and has thin film forming technology (for example, deposition technology such as epitaxial growth technology and chemical vapor deposition technology) on a silicon substrate (silicon wafer) and various types. Each of the above-mentioned parts is integrally formed by processing into a desired outer shape using a processing technique (for example, an etching technique such as dry etching or wet etching). Alternatively, each of the above-mentioned parts can be formed by laminating the silicon substrate and the glass substrate and then processing only the silicon substrate into a desired outer shape.

At least, by using silicon as the main material of the vibration system structure 3, excellent vibration characteristics can be realized and excellent durability can be exhibited. Further, it becomes possible to apply the fine processing technology used for manufacturing a silicon semiconductor device, and it is possible to reduce the size of the physical quantity sensor 1. Further, by using silicon as the main material of the vibration system structure 3, the physical quantity sensor 1 can be driven without forming an electrode on the vibration system structure 3, as will be described later, so that the structure of the device can be driven. Can be made simpler. Even if it is a material other than silicon, for example, a material such as an insulator, it is possible to form the vibration system structure of the present invention by covering the outer periphery thereof with a metal film.

The main material of the substrate 2 is not limited to silicon, and may be, for example, quartz or various types of glass.
In the vibration system structure 3 of the present embodiment, the projected outer shape of the aggregate of the vibration portions 51, 52, 53, 54 is substantially circular in a plan view with the Z-axis direction as a normal. As a result, the physical quantity sensor 1 can be downsized.

(Ring part)
The ring portion 31 has an annular shape having a circular shape whose outer diameter and inner diameter are concentric with each other, and has a structure having no structure inside the inner diameter. In the following, the center of the ring portion 31 is referred to as "center O".
Further, the ring portion 31 is arranged so that its axis is parallel to the Z axis. The ring portion 31 is elastically deformable, and as shown in FIG. 3, the first vibrating portion 51 and 52 vibrating by the vibrating means 4 contracts in the X-axis direction and expands in the Y-axis direction. And a second state that expands in the X-axis direction and contracts in the Y-axis direction. In the following, the vibration that repeats the first state and the second state is also referred to as "annulus vibration".

(1st vibrating part)
The first vibrating portion 51 has a plate shape. Further, the first vibrating portion 51 is a Z-axis direction displacement portion (first movable portion, which is connected to the frame portion 511 constituting the edge portion of the first vibrating portion 51 and the frame portion 511 via the shaft portions 513 and 514. It is composed of a movable portion) 512, a comb-shaped drive electrode 515, and a Y-axis direction displacement portion (second movable portion, movable portion) 516 connected to the frame via a spring portion 517.

Similarly, the first vibrating portion 52 also has a plate shape. Further, the first vibrating portion 52 also has a frame portion 521 constituting the edge portion of the first vibrating portion 52 and a Z-axis direction displacement portion (first movable portion, which is connected to the frame portion 521 via the shaft portion 523 and 524. It is composed of a movable portion) 522, a comb-shaped drive electrode 525, and a Y-axis direction displacement portion (second movable portion, movable portion) 526 connected to the frame via a spring portion 527.

Hereinafter, the first vibrating units 51 and 52 will be described in detail, but since the first vibrating units 51 and 52 have the same configuration as each other, the first vibrating unit 51 will be described below as a representative of the first vibrating unit 51. The description of the vibrating unit 52 will be omitted.
The outer shape of the frame portion 511 has a fan shape of approximately 90 degrees in a plan view with the Z axis as a normal. A pair of first openings 511a, a pair of second openings 511b, and a third opening 511c are formed in the frame portion 511.

A plurality of comb-shaped drive electrodes 515 are arranged in each first opening 511a. Each drive electrode 515 extends in the Y-axis direction and is provided so as to be separated from each other in the X-axis direction. The drive electrode 515 constitutes a part of the vibrating means 4.
A displacement portion 516 in the Y-axis direction is provided inside each second opening 511b. The Y-axis direction displacement portion 516 is composed of a frame portion 516a and a plurality of detection electrodes 516b provided inside the frame portion 516a. The detection electrodes 516b extend in the X-axis direction and are provided apart from each other in the Y-axis direction.

Each Y-axis displacement portion 516 is connected to the frame portion 511 by four spring portions 517. Each spring portion 517 has a shape extending in the Y-axis direction while reciprocating in the X-axis direction. By forming each spring portion 517 in such a shape, the spring portion 517 can be smoothly expanded and contracted in the Y-axis direction, and the spring portion 517 can be expanded and contracted in directions other than the Y-axis direction (that is, the X-axis direction and the Z-axis direction). It is possible to effectively prevent or suppress deformation in the direction). Therefore, each Y-axis direction displacement portion 516 can be smoothly displaced in the Y-axis direction.

A displacement portion 512 in the Z-axis direction is provided inside the third opening 511c. The Z-axis direction displacement portion 512 is connected to the frame portion 511 by the shaft portion 513 and 514. The shaft portions 513 and 514 extend in the Y-axis direction and are provided coaxially. Therefore, when stress in the Z-axis direction is applied to the physical quantity sensor 1, the displacement portion 512 in the Z-axis direction rotates around the shaft portion 513 and 514 while twisting and deforming the shaft portion 513 and 514 around the axis.
The first vibration unit 51 has been described above. As described above, the first vibrating portion 52 has the same configuration as the first vibrating portion 51, and is symmetrical with respect to the Y axis intersecting the center O of the ring portion 31 in a plan view with the Z axis as the normal line. It is provided as a target. However, the requirement of the present invention is a configuration that minimizes vibration leakage to the substrate 2, and the components need not be completely symmetrical with respect to the central O and Y axes.

(2nd vibrating part)
The second vibrating portion 53 has a plate shape. Further, the second vibrating portion 53 includes a frame portion 531 constituting the edge portion of the second vibrating portion 53 and a Z-axis direction displacement portion (third movable portion, which is connected to the frame portion 531 via the shaft portion 533 and 534. It is composed of a movable portion) 532 and an X-axis direction displacement portion (fourth movable portion, movable portion) 536 connected to the frame via a spring portion 537.
Similarly, the second vibrating portion 54 also has a plate shape. Further, the second vibrating portion 54 also has a frame portion 541 constituting the edge portion of the second vibrating portion 54 and a Z-axis direction displacement portion (third movable portion, which is connected to the frame portion 541 via the shaft portions 543 and 544. It is composed of a movable portion) 542 and an X-axis direction displacement portion (fourth movable portion, movable portion) 546 connected to the frame via a spring portion 547.

Hereinafter, the second vibrating section 53, 54 will be described in detail, but since the second vibrating section 53, 54 has the same configuration as each other, the second vibrating section 53 will be described as a representative of the second vibrating section 53. The description of the vibrating unit 54 will be omitted.
The outer shape of the frame portion 531 has a fan shape of approximately 90 degrees in a plan view with the Z axis as a normal. The outer shape of the frame portion 531 is the same as that of the frame portions 511 and 521 of the first vibrating portions 51 and 52. A pair of second openings 531b and a third opening 531c are formed in the frame portion 531.

Inside each of the second openings 511b, a displacement portion 536 in the X-axis direction is provided. The displacement portion 536 in the X-axis direction is composed of a frame portion 536a and a plurality of detection electrodes 536b provided inside the frame portion 536a. The detection electrodes 536b extend in the Y-axis direction and are provided apart from each other in the X-axis direction.
Such an X-axis direction displacement portion 536 is connected to the frame portion 531 by four spring portions 537. Each spring portion 537 has a shape extending in the X-axis direction while reciprocating in the Y-axis direction. By forming each spring portion 537 in such a shape, the spring portion 537 can be smoothly expanded and contracted in the X-axis direction, and the spring portion 537 can be expanded and contracted in directions other than the X-axis direction (that is, the Y-axis direction and the Z-axis direction). It is possible to effectively prevent or suppress deformation in the direction). Therefore, the displacement portion 536 in the X-axis direction can be smoothly displaced in the X-axis direction.

Inside the third opening 531c, a displacement portion 532 in the Z-axis direction is provided. The displacement portion 532 in the Z-axis direction is connected to the frame portion 531 by the shaft portion 533 and 534. The shaft portions 533 and 534 extend in the X-axis direction and are provided coaxially. Therefore, when stress in the Z-axis direction is applied to the physical quantity sensor 1, the displacement portion 532 in the Z-axis direction rotates around the shaft portion 533 and 534 while twisting and deforming the shaft portion 533 and 534 around the axis.
The second vibration unit 53 has been described above. As described above, the second vibrating portion 54 has the same configuration as the second vibrating portion 53, and is symmetrical with respect to the X axis intersecting the center O of the ring portion 31 in a plan view with the Z axis as the normal line. It is provided as a target. However, the second vibrating portions 53 and 54 do not have to be completely symmetrical with respect to the center O and the X axis as described above.

(1st inner spring part)
The first inner spring portion 81 connects the first vibrating portion 51 and the ring portion 31. Further, the first inner spring portion 82 connects the first vibrating portion 52 and the ring portion 31. Since such first inner spring portions 81 and 82 have the same configuration as each other, the first inner spring portion 81 will be described as a representative below, and the description of the first inner spring portion 82 will be omitted. do.

The first inner spring portion 81 is composed of a pair of spring portions 811 and 812, and each of the spring portions 811 and 812 has a shape extending in the X-axis direction while reciprocating in the Y-axis direction. Further, the spring portions 811 and 812 are provided symmetrically with respect to the X axis intersecting the center O of the ring portion 31 in a plan view with the Z axis as a normal. By forming the spring portions 811 and 812 in such a shape, the first inner spring portion 81 can be smoothly expanded and contracted in the X-axis direction while suppressing (regulating) deformation in the Y-axis direction and the Z-axis direction. Can be done. Therefore, as will be described later, the first vibrating portion 51 can be smoothly vibrated in the X-axis direction while the first inner spring portion 81 is expanded and contracted in the X-axis direction.

(2nd inner spring part)
The second inner spring portion 83 connects the second vibrating portion 53 and the ring portion 31. Further, the second inner spring portion 84 connects the second vibrating portion 54 and the ring portion 31. Since such second inner spring portions 83 and 84 have the same configuration as each other, the second inner spring portion 83 will be described as a representative below, and the description of the first inner spring portion 84 will be omitted. do.

The second inner spring portion 83 is composed of a pair of spring portions 831 and 832, and each of the spring portions 831 and 832 has a shape extending in the Y-axis direction while reciprocating in the X-axis direction. Further, the spring portions 831 and 832 are provided symmetrically with respect to the Y axis intersecting the center O of the ring portion 31 in a plan view with the Z axis as a normal. By having the second inner spring portion 83 having such a configuration, the second inner spring portion 83 can be smoothly expanded and contracted in the Y-axis direction while suppressing (regulating) deformation in the X-axis direction and the Z-axis direction. Can be done. Therefore, as will be described later, the second vibrating portion 53 can be smoothly vibrated in the Y-axis direction while the second inner spring portion 83 is expanded and contracted in the Y-axis direction.

(Inner fixing part)
The inner fixing portions 61, 62, 63, 64 have a function of supporting the ring portion 31. Such inner fixing portions 61, 62, 63, 64 are provided inside the four vibrating portions 51, 52, 53, 54, respectively. By arranging the inner fixing portions 61, 62, 63, 64 in this way, the space can be effectively utilized and the physical quantity sensor 1 can be miniaturized. Further, since the lengths of the beams 71, 72, 73, and 74 can be shortened, the ring portion 31 can be supported more stably. Further, by arranging the inner fixing portions 61, 62, 63, 64 in this way, it is possible to serve as a stopper for the first vibrating portions 51, 52 and the second vibrating portions 53, 54.

The inner fixing portions 61, 62, 63, 64 are provided around the outer periphery of the ring portion 31 at intervals of 90 degrees in a plan view with the Z axis as a normal. Specifically, in a plan view with the Z axis as the normal, a pair of axes that intersect the center O of the ring portion 31 and are tilted 45 degrees with respect to the respective axes of the X axis and the Y axis are designated as J1 and J2. At this time, the inner fixing portions 61 and 63 are located on the shaft J1 and are arranged so as to face each other via the ring portion 31. Further, the inner fixing portions 62 and 64 are located on the shaft J2 and are arranged to face each other via the ring portion 31.
In other words, the four inner fixing portions 61, 62, 63, 64 are provided at positions that are mirrored with respect to both the X-axis and the Y-axis. As a result, the ring portion 31 can be stably supported.

(Beam)
The beams 71, 72, 73, 74 connect the ring portion 31 and the inner fixing portions 61, 62, 63, 64. The beam 71 extends linearly along the axis J1 and connects the ring portion 31 and the inner fixing portion 61. Similarly, the beam 72 extends linearly along the axis J2 and connects the ring portion 31 and the inner fixing portion 62. Further, the beam 73 extends linearly along the axis J1 and connects the ring portion 31 and the inner fixing portion 63. Further, the beam 74 extends linearly along the axis J2 and connects the ring portion 31 and the inner fixing portion 64.

Each of such beams 71, 72, 73, 74 is inclined by 45 degrees with respect to each of the X-axis and Y-axis of the side surface of the ring portion 31, respectively (fixed point, fixed point of the first group). It is connected to the. As shown in FIG. 3, each of these fixed points is a portion (that is, a portion where displacement / deformation does not substantially occur) that becomes a node of the annular vibration of the ring portion 31. By connecting the beams 71, 72, 73, 74 to each of such fixed points, the annular vibration of the ring portion 31 is not hindered by the beams 71, 72, 73, 74, and is caused by the annular vibration. Vibration is prevented or suppressed from leaking to the outside of the vibration system structure 3 via the beams 71, 72, 73, 74 and the fixing portions 61, 62, 63, 64. As a result, the Q value of the vibration of the vibration system structure 3 becomes high, and the detection accuracy of the physical quantity sensor 1 is improved. Further, since the vibration system structure 3 can be vibrated efficiently, the output of the vibration means 4 can be reduced, and as a result, the physical quantity sensor 1 can be miniaturized.
Further, the beams 71, 72, 73, and 74 are restricted from moving (deforming) in the radial direction (extending direction) with respect to the center O of the ring portion 31. As a result, the ring portion 31 can be supported more stably by the inner fixing portions 61, 62, 63, 64, and vibration leakage can be prevented or suppressed more effectively.

(Outer fixing part)
The outer fixing portions 651, 652, 661, 662, 671, 672, 681, and 682 are provided outside the four vibrating portions 51, 52, 53, and 54, respectively. Further, the outer fixing portions 651 and 652 are provided corresponding to the first vibrating portion 51 and are separated from each other in the Y-axis direction. Similarly, the outer fixing portions 661 and 662 are provided corresponding to the first vibrating portion 52 and are separated from each other in the Y-axis direction. Further, the outer fixing portions 671 and 672 are provided corresponding to the second vibrating portion 53, and are separated from each other in the X-axis direction. Further, the outer fixing portions 681 and 682 are provided corresponding to the second vibrating portion 54, and are provided so as to be separated from each other in the X-axis direction.

(Outer spring part)
The outer spring portions 851, 852, 861, 862, 871, 872, 881, 882 have the outer fixing portions 651, 652, 661, 662, 671, 672, 681, 682 and the vibrating portions 51, 52, 53, 54. It is connected. Specifically, the outer spring portions 851 and 852 connect the first vibrating portion 51 and the outer fixing portions 651 and 652, and the outer spring portions 861 and 862 are the first vibrating portion 52 and the outer fixing portion 661. , 656 are connected, the outer spring portions 871 and 872 are connected to the second vibrating portion 53 and the outer fixing portions 671 and 672, and the outer spring portions 881 and 882 are connected to the second vibrating portion 54 and the outer side. The portions 681 and 682 are connected to each other.

The outer spring portions 851 and 852 have a shape extending in the X-axis direction while reciprocating in the Y-axis direction. Further, the outer spring portions 851 and 852 are provided symmetrically with respect to the X axis intersecting the center O of the ring portion 31.
Similarly, the outer spring portions 861 and 862 have a shape extending in the X-axis direction while reciprocating in the Y-axis direction. Further, the outer spring portions 861 and 862 are provided symmetrically with respect to the X axis intersecting the center O of the ring portion 31.
The outer spring portions 871 and 872 have a shape extending in the Y-axis direction while reciprocating in the X-axis direction. Further, the outer spring portions 871 and 872 are provided symmetrically with respect to the Y axis intersecting the center O of the ring portion 31.

Similarly, the outer spring portions 881 and 882 have a shape extending in the Y-axis direction while reciprocating in the X-axis direction. Further, the outer spring portions 881 and 882 are provided symmetrically with respect to the Y axis intersecting the center O of the ring portion 31. However, it is not an essential condition of the present invention that the outer spring portions 851 and 852, 861 and 862, 871 and 872, 881 and 882 are completely symmetrical with respect to the central O, X axis, or Y axis.
The vibration system structure 3 as described above has a unique resonance frequency. As a result, as will be described later, the vibration system structure 3 can be driven in the resonance mode, and the detection accuracy of the angular velocity can be improved.

-substrate-
The substrate 2 supports the vibration system structure 3. As shown in FIG. 2, the substrate 2 has a plate shape and is provided in the XY plane. Then, vibration is caused by joining the inner fixing portions 61, 62, 63, 64 and the outer fixing portions 651, 652, 661, 662, 671, 672, 681, 682 of the vibration system structure 3 to the upper surface of the substrate 2. The system structure 3 is fixed and supported on the substrate 2.

The bonding method between the substrate 2 and the inner fixing portions 61, 62, 63, 64 and the outer fixing portions 651, 652, 661, 662, 671, 672, 681, 682 is not particularly limited, and various types such as direct bonding and anode bonding are not particularly limited. Depending on the constituent materials of the vibration system structure 3 and the substrate 2, which may be joined by a joining method, a support member such as an adhesive may be used for joining.
Further, a recess is formed on the upper surface of the substrate 2 (the surface on the side facing the vibration system structure 3) as needed. This recess has a function of preventing contact between the substrate 2 and the actually vibrating portion (for example, the first vibrating portion 51, 52 and the second vibrating portion 53, 54) of the vibrating system structure 3.
In such a substrate 2, for example, a semiconductor substrate such as silicon, an insulating substrate such as glass or quartz, or a composite substrate in which a semiconductor layer and an insulating layer are laminated is processed into a desired outer shape by using various processing techniques. It is formed by that. This simplifies the configuration of the physical quantity sensor 1.

-Vibration means-
The vibrating means 4 has a function of vibrating the first vibrating portions 51 and 52 at a predetermined frequency (first frequency) in the X-axis direction in opposite phases to each other. That is, the vibrating means 4 displaces the first vibrating portions 51 and 52 in a direction (inside) approaching the ring portion 31 and a direction in which the first vibrating portions 51 and 52 are separated from the ring portion 31 (outside). ) Is repeated, and the first vibrating portions 51 and 52 are vibrated.

Such a vibrating means 4 has a plurality of fixed electrodes 41 provided corresponding to the driving electrode 515 of the first vibrating portion 51. Each fixed electrode 41 has a pair of comb-shaped electrode pieces 411 and 412 arranged to face each other in the X-axis direction via a drive electrode 515. Similarly, the vibrating means 4 has a plurality of fixed electrodes 42 provided corresponding to each driving electrode 525 of the first vibrating unit 52. Each fixed electrode 42 has a pair of comb-shaped electrode pieces 421 and 422 arranged to face each other in the X-axis direction via a drive electrode 525.

Then, the vibrating means 4 applies an alternating voltage 180 degrees out of phase to each of the electrode pieces 411 and 421 and each of the electrode pieces 412 and 422 by a power source (not shown), thereby causing each drive electrode 515 and 525 and each electrode. Electrostatic forces are generated between the pieces 411 and 421 and between the drive electrodes 515 and 525 and the electrode pieces 412 and 422, respectively, and the first inner spring portions 81 and 82 and the outer spring portions 851, 852 and 861 are generated. , 862 expands and contracts in the X-axis direction, and the first vibrating portions 51 and 52 vibrate in the X-axis direction in opposite phases to each other and at a predetermined frequency.

The frequency of the alternating voltage is not particularly limited, but is preferably substantially equal to the resonance frequency of the vibration system structure 3. As a result, the vibration system structure 3 can be driven in the resonance mode, so that the detection accuracy of the angular velocity can be improved.
When the first vibrating portions 51 and 52 vibrate in opposite phases to each other, the vibration is transmitted to the first inner spring portions 81 and 82 and transmitted to the ring portion 31. Then, when the first vibrating portions 51 and 52 are displaced inward, the ring portion 31 is deformed so as to contract in the X-axis direction and extend in the Y-axis direction, and the first vibrating portions 51 and 52 are deformed. When displaced outward, it expands in the X-axis direction and contracts in the Y-axis direction. That is, the ring portion 31 vibrates in an annulus in synchronization with the vibration of the first vibrating portions 51 and 52.

Further, when the ring portion 31 contracts in the X-axis direction and is deformed so as to extend in the Y-axis direction due to the annular vibration, the second vibrating portions 53 and 54 are both displaced outward due to the deformation, and conversely, X. When deformed so as to extend in the axial direction and contract in the Y-axis direction, the second vibrating portions 53 and 54 are both displaced inward. That is, the second vibrating portions 53 and 54 vibrate in the Y-axis direction in opposite phases to each other in synchronization with the annular vibration of the ring portion 31.

That is, in the physical quantity sensor 1, the ring vibration of the ring portion 31 is used to displace the first vibrating portions 515 and 52 inward and the second vibrating portions 53 and 54 outward. , The vibrating portions 51, 52, 53, 54 can be vibrated so that the state in which the first vibrating portions 51, 52 are displaced outward and the second vibrating portions 53, 54 are displaced inward is repeated. can.

The fixed point to which the beams 71, 72, 73, 74 of the ring portion 31 are connected is a portion (that is, a portion where displacement / deformation does not substantially occur) that becomes a node of the annular vibration of the ring portion 31. Therefore, the annular vibration of the ring portion 31 is not hindered by the beams 71, 72, 73, 74, and the vibration caused by the annular vibration is caused by the beams 71, 72, 73, 74 and the fixed portions 61, 62, 63. , 64 is prevented or suppressed from leaking to the outside of the vibration system structure 3. As a result, the Q value of the vibration of the vibration system structure 3 becomes high, and the detection accuracy of the physical quantity sensor 1 is improved. Further, since the vibration system structure 3 can be vibrated efficiently, the output of the vibration means 4 can be reduced, and as a result, the physical quantity sensor 1 can be miniaturized.
Further, according to the electrostatic drive as in the present embodiment, the above-mentioned vibration can be generated more smoothly and surely. Further, in the present embodiment, since the vibrating means 4 is connected to the inside of each vibrating portion 51, 52, 53, 54, the space can be effectively utilized and the physical quantity sensor 1 can be miniaturized.

-Detecting means 9-
As shown in FIG. 4, the detecting means 9 has displacement transducers 91, 92, 93, 94 and rotary transducers 95, 96, 97, 98. In FIG. 4, for convenience of explanation, some of the components of the physical quantity sensor 1 are not shown.
The displacement transducer 91 has a Y-axis direction displacement portion 516 provided in the first vibration portion 51 and a fixed electrode 911 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 911 are provided corresponding to the detection electrodes 516b included in the Y-axis direction displacement portion 516. Each fixed electrode 911 has a pair of electrode pieces 911a and 911b arranged so as to face each other via the detection electrode 516b, and these electrode pieces 911a and 911b are provided extending in the X-axis direction. ..

The displacement transducer 92 has a Y-axis direction displacement portion 526 provided in the first vibration portion 52 and a fixed electrode 921 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 921 are provided corresponding to the detection electrodes 526b included in the Y-axis direction displacement portion 526. Each fixed electrode 921 has a pair of electrode pieces 921a and 921b arranged to face each other with the detection electrode 526b interposed therebetween, and these electrode pieces 921a and 921b are provided extending in the X-axis direction. ..

The displacement transducer 93 has an X-axis direction displacement portion 536 provided in the second vibration portion 53 and a fixed electrode 931 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 931 are provided corresponding to the detection electrodes 536b included in the displacement portion 536 in the X-axis direction. Each fixed electrode 931 has a pair of electrode pieces 931a and 931b which are arranged to face each other with the detection electrode 536b interposed therebetween, and these electrode pieces 931a and 931b are provided extending in the Y-axis direction. ..

The displacement transducer 94 has an X-axis direction displacement portion 546 provided in the second vibration portion 54 and a fixed electrode 941 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 941 are provided corresponding to the detection electrodes 546b included in the displacement portion 546 in the X-axis direction. Each fixed electrode 941 has a pair of electrode pieces 941a and 941b arranged to face each other with the detection electrode 546b interposed therebetween, and these electrode pieces 941a and 941b are provided extending in the Y-axis direction. ..
In the present embodiment, since these displacement transducers 91, 92, 93, 94 are connected to the inside of the vibrating portions 51, 52, 53, 54, the space of the device can be effectively utilized and the physical quantity sensor 1 can be downsized. Can be planned.

The rotary transducer 95 faces the Z-axis direction displacement portion 512 provided on the first vibrating portion 51 via the shaft 513 and 514 and the Z-axis direction displacement portion 512 fixed to the substrate 2 so as to be separated from each other in the Z-axis direction. It has an arranged fixed electrode 951 and.
The rotary transducer 96 faces the Z-axis direction displacement portion 522 provided on the first vibrating portion 52 via the shaft 523 and 524, and the Z-axis direction displacement portion 522 fixed to the substrate 2 so as to be separated from each other in the Z-axis direction. It has an arranged fixed electrode 961 and.

The rotary transducer 97 faces the Z-axis direction displacement portion 532 provided on the second vibrating portion 53 via the shaft 533 and 534, and the Z-axis direction displacement portion 532 fixed to the substrate 2 so as to be separated from each other in the Z-axis direction. It has an arranged fixed electrode 971 and.
The rotary transducer 98 has a Z-axis direction displacement portion 542 provided on the second vibrating portion 54 via a shaft 543 and 544, and is fixed to the substrate 2 and faces the Z-axis direction displacement portion 542 separated from each other in the Z-axis direction. It has an arranged fixed electrode 981 and.
In the present embodiment, since these rotary transducers 95, 96, 97, 98 are connected to the inside of the vibrating portions 51, 52, 53, 54, the space of the device can be effectively utilized and the physical quantity sensor 1 can be downsized. Can be planned.

Hereinafter, a method of detecting the angular velocity by such a detecting means 9 will be briefly described with reference to FIGS. 5, 6 and 7. Note that, in FIGS. 5, 6 and 7, for convenience of explanation, a part of the configuration of the physical quantity sensor 1 is not shown.
-Detection of angular velocity around the Z axis-
As shown in FIG. 5, the physical quantity sensor 1 Z in a state where the first vibrating portions 51 and 52 are vibrated in the X-axis direction and the second vibrating portions 53 and 54 are vibrated in the Y-axis direction by the vibrating means 4. When the angular velocity ω around the axis is applied, a colliorative force in the Y-axis direction acts on the first vibrating portions 51 and 52 that vibrate in the X-axis direction, and the second vibrating portions 53 and 54 vibrating in the Y-axis direction are in the X-axis direction. The collior force of is acting.

When such a collior force acts, in the first vibrating section 51, the Y-axis direction displacement section 516 is displaced in the Y-axis direction with respect to the frame section 511, whereby the static force between the detection electrode 516b and the electrode piece 911a is static. The capacitance and the capacitance between the detection electrode 516b and the electrode piece 911b change, and a difference occurs in these capacitances. Similarly, in the first vibrating section 52, the Y-axis direction displacement section 526 is displaced in the Y-axis direction with respect to the frame section 521, whereby the capacitance between the detection electrode 526b and the electrode piece 921a and the detection electrode are detected. The capacitance between the 516b and the electrode piece 921b changes, resulting in a difference in these capacitances.

Further, in the second vibrating portion 53, the X-axis direction displacement portion 536 is displaced in the X-axis direction with respect to the frame portion 531, whereby the capacitance between the detection electrode 536b and the electrode piece 931a and the detection electrode 536b The capacitance between the electrode piece 931b and the electrode piece 931b changes, and a difference occurs in these capacitances. Similarly, in the second vibrating portion 54, the X-axis direction displacement portion 546 is displaced in the X-axis direction with respect to the frame portion 541, whereby the capacitance between the detection electrode 546b and the electrode piece 941a and the detection electrode are detected. The capacitance between 546b and the electrode piece 941b changes, resulting in a difference in these capacitances.
Then, the detection means 9 detects such a change in electrostatic capacitance that occurs in each vibrating unit 51, 52, 53, 54, and detects the angular velocity around the Z axis applied to the physical quantity sensor 1 from the detection result. Can be done.

-Detection of angular velocity around the X-axis-
As shown in the perspective view shown in FIG. 6, the physical quantity is in a state where the first vibrating portion 51, 52 is vibrated in the X-axis direction and the second vibrating portion 53, 54 is vibrated in the Y-axis direction by the vibrating means 4. When an angular velocity around the X axis is applied to the sensor 1, a collior force in the Z axis direction acts on the second vibrating portions 53 and 54 that vibrate in the Y axis direction.

When such a Coriolis force acts, in the second vibrating portion 53, the Z-axis direction displacement portion 532 rotates around the shaft portion 533, 534, whereby the static force between the Z-axis direction displacement portion 532 and the fixed electrode 971 is static. The electric capacity changes. Similarly, in the second vibrating portion 54, the Z-axis direction displacement portion 542 rotates around the shaft portion 543 and 544, whereby the capacitance between the Z-axis direction displacement portion 542 and the fixed electrode 981 changes.
Then, the detection means 9 can detect such a change in electrostatic capacitance that occurs in the second vibrating units 53 and 54, and can detect the angular velocity around the X axis applied to the physical quantity sensor 1 from the detection result.

-Detection of angular velocity around the Y-axis-
As shown in FIG. 7, the physical quantity sensor 1 is Y in a state where the first vibrating portions 51 and 52 are vibrated in the X-axis direction and the second vibrating portions 53 and 54 are vibrated in the Y-axis direction by the vibrating means 4. When the angular velocity around the axis is applied, a collior force in the Z-axis direction acts on the first vibrating portions 51 and 52 that vibrate in the X-axis direction.

When such a Coriolis force acts, in the first vibrating portion 51, the Z-axis direction displacement portion 512 rotates around the shaft portion 513 and 514, whereby the static force between the Z-axis direction displacement portion 512 and the fixed electrode 951 is static. The electric capacity changes. Similarly, in the first vibrating portion 52, the Z-axis direction displacement portion 522 rotates around the shaft portion 523, 524, whereby the capacitance between the Z-axis direction displacement portion 522 and the fixed electrode 961 changes.

Then, the detection means 9 can detect such a change in electrostatic capacitance that occurs in the first vibrating units 51 and 52, and can detect the angular velocity around the X axis applied to the physical quantity sensor 1 from the detection result.
As described above, according to the physical quantity sensor 1, it is possible to detect the angular velocities around all the X-axis, Y-axis, and Z-axis. Therefore, the physical quantity sensor 1 is compact and has excellent convenience. Further, in the present embodiment, since the electrostatic detection means 9 is used, it is possible to improve the detection accuracy while reducing the size of the device.

The physical quantity sensor 1 has a function of canceling the acceleration (linear acceleration) in the Y-axis direction applied to the physical quantity sensor 1 by combining the displacement transducers 91 and 92 as a set. Further, the displacement transducers 93 and 94 are combined to have a function of canceling the acceleration in the X-axis direction applied to the physical quantity sensor 1. Further, the rotary transducers 95, 96, 97, and 98 are paired to have a function of canceling the acceleration in the Z-axis direction applied to the physical quantity sensor 1.

Specifically, for example, when an acceleration is applied to the physical quantity sensor 1 in the Y-axis direction, the Y-axis displacement portion 516 of the first vibrating portion 51 and the Y-axis displacement portion 526 of the first vibrating portion 52 are both Y-axis. Displace to the same side in the direction. The displacement of the Y-axis displacement portions 516 and 526 is different from the displacement when the angular velocity around the Z-axis is applied (that is, the displacements of the Y-axis displacement portions 516 and 526 in opposite directions in the Y-axis direction). ing. Therefore, according to the physical quantity sensor 1, the physical quantity sensor 1 is based on the change in the capacitance between the detection electrode 516b and the electrode pieces 911a and 911b and the capacitance between the detection electrode 526b and the electrode pieces 921a and 921b. The applied acceleration can be detected, and when this angular velocity is detected, the detected acceleration can be electrically canceled by a correction process or the like. As a result, the detection accuracy of the angular velocity of the physical quantity sensor 1 is further improved. The acceleration in the X-axis direction and the acceleration in the Z-axis direction can be canceled in the same manner.

<Second Embodiment>
FIG. 8 is a plan view showing a second embodiment of the physical quantity sensor of the present invention.
The physical quantity sensor of the present embodiment will be described mainly on the differences from the above-described embodiment, and the description of the same matters will be omitted.
The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the vibration means is different. In FIG. 8, the same reference numerals are given to the same configurations as those of the first embodiment described above.

In the physical quantity sensor 1 of the present embodiment, the vibrating means 4 is also connected to the second vibrating portions 53 and 54. That is, the second vibrating unit 53 is provided with a plurality of drive electrodes 535 extending in the X-axis direction, and the second vibrating unit 54 is also provided with a plurality of drive electrodes 545 extending in the X-axis direction. There is.
Further, the vibrating means 4 has a plurality of fixed electrodes 43 provided corresponding to the driving electrodes 535 of the second vibrating unit 53. Each fixed electrode 43 has a pair of comb-shaped electrode pieces 431 and 432 arranged to face each other in the Y-axis direction via a drive electrode 535. Similarly, the vibrating means 4 has a plurality of fixed electrodes 44 provided corresponding to each driving electrode 545 of the second vibrating unit 54. Each fixed electrode 44 has a pair of comb-shaped electrode pieces 441 and 442 arranged to face each other in the Y-axis direction via a drive electrode 545.

Then, the vibrating means 4 applies an alternating voltage 180 degrees out of phase to the electrode pieces 411, 421, 432, 442 and the electrode pieces 421, 422, 431, 441 by a power source (not shown). While the vibrating portions 51 and 52 are vibrated in the opposite phase to each other in the X-axis direction, the second vibrating portions 53 and 54 are vibrated in the opposite phase to each other and to the opposite side of the first vibrating portions 51 and 52 in the Y-axis direction.
Even with such a second embodiment, the same effect as that of the first embodiment described above can be exhibited.

<Third Embodiment>
FIG. 9 is a plan view showing a third embodiment of the physical quantity sensor of the present invention.
The physical quantity sensor of the present embodiment will be described mainly on the differences from the above-described embodiment, and the description of the same matters will be omitted.
The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the projected shape of the vibration system structure is different. In FIG. 9, the same reference numerals are given to the same configurations as those of the first embodiment described above.

In the physical quantity sensor 1 of the present embodiment, the outer shapes of the vibrating portions 51, 52, 53, and 54 are trapezoidal in a plan view with the Z axis as a normal. Then, in a plan view with the Z-axis direction as a normal, the projected outer shape of the aggregate of the vibrating portions 51, 52, 53, 54 is substantially rectangular. As a result, the physical quantity sensor 1 can be downsized. Further, for example, when the physical quantity sensor 1 is mounted in the chip, it corresponds to the shape of the chip, so that the mounting on the chip becomes easy.
Even with such a third embodiment, the same effect as that of the above-mentioned first embodiment can be exhibited.

<Fourth Embodiment>
FIG. 10 is a plan view showing a fourth embodiment of the physical quantity sensor of the present invention.
The physical quantity sensor of the present embodiment will be described mainly on the differences from the above-described embodiment, and the description of the same matters will be omitted.
The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the vibration means is different. In FIG. 10, the same reference numerals are given to the same configurations as those of the first embodiment described above.

The vibrating means 4 of the present embodiment is configured to vibrate the first vibrating portions 51 and 52 in the X-axis direction by piezoelectric drive. Hereinafter, the first vibrating unit 51 will be described as a representative, and the description of the first vibrating unit 52 will be omitted.
The first vibrating portion 51 is provided inside the first opening 511a and is fixed to the substrate 2, and is provided inside the first opening 511a to connect the fixing portion 518a and the frame portion 511. It has a plurality of connecting portions 518b. Each connecting portion 518b is provided so as to extend in the Y-axis direction, and is arranged so as to be separated from each other in the X-axis direction.
The vibrating means 4 has a pair of piezoelectric elements 45 and 46 provided in each connecting portion 518b. The piezoelectric elements 45 and 46 are provided so as to extend in the Y-axis direction and are provided apart from each other in the X-axis direction.

The piezoelectric elements 45 and 46 are composed of a pair of electrodes arranged to face each other in the Z-axis direction and a piezoelectric layer having piezoelectricity interposed between the pair of electrodes, and a voltage is applied between the pair of electrodes. By doing so, it expands or contracts in the Y-axis direction. Therefore, when each piezoelectric element 45 is stretched and each piezoelectric element 46 is contracted, each connecting portion 518b is curved and deformed, and the end portion on the side connected to the frame portion 511 is displaced toward the ring portion 31 side. As a result, the first vibrating portion 51 is displaced inward. On the contrary, when each piezoelectric element 45 is contracted and each piezoelectric element 46 is expanded, each connecting portion 518b is curved and deformed, and the end portion on the side connected to the frame portion 511 is opposite to the ring portion 31. It is displaced to the side, and as a result, the first vibrating portion 51 is displaced to the outside.

In the vibrating means 4 having the configuration, a state in which each piezoelectric element 45 is stretched and each piezoelectric element 46 is contracted and a state in which each piezoelectric element 45 is contracted and each piezoelectric element 46 is stretched alternate with each other. By applying a voltage to each of the piezoelectric elements 45 and 46 so as to be repeated, the first vibrating portions 51 and 52 are vibrated in the X-axis direction in opposite phases to each other.
Even with such a fourth embodiment, the same effect as that of the first embodiment described above can be exhibited.

<Fifth Embodiment>
FIG. 11 is a plan view showing a fifth embodiment of the physical quantity sensor of the present invention.
The physical quantity sensor of the present embodiment will be described mainly on the differences from the above-described embodiment, and the description of the same matters will be omitted.
The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In FIG. 11, the same reference numerals are given to the same configurations as those of the first embodiment described above. Further, since the configurations of the first vibrating section 51 and 52 are similar to each other and the configurations of the second vibrating section 53 and 54 are similar to each other, the first vibrating section 51 and the second vibrating section 53 are represented below. The description of the first vibrating unit 52 and the second vibrating unit 54 will be omitted.

The first vibrating portion 51 is provided inside the second opening 511b, and has a plate-shaped Y-axis direction displacement portion 519a that can be displaced in the Y-axis direction with respect to the frame portion 511, a Y-axis direction displacement portion 519a, and a frame portion. It has a plurality of spring portions 519b connecting with 511. Each spring portion 519b is provided so as to extend in the X-axis direction.
The second vibrating portion 53 is provided inside the second opening 531b, and has a plate-shaped displacement portion 539a in the X-axis direction that can be displaced in the X-axis direction with respect to the frame portion 531, and the X-axis direction displacement portion 539a and the frame portion. It has a plurality of spring portions 539b connecting the 531 and the spring portion 539b. Each spring portion 539a is provided so as to extend in the Y-axis direction.

The detecting means 9 has a pair of piezoelectric elements 991 and 992 provided in each spring portion 519b of the first vibrating portion 51. The piezoelectric elements 991 and 992 extend in the X-axis direction and are provided apart from each other in the Y-axis direction. Further, the detecting means 9 has a pair of piezoelectric elements 993 and 994 provided in each spring portion 539b of the second vibrating portion 53. The piezoelectric elements 993 and 994 extend in the Y-axis direction and are provided apart from each other in the X-axis direction.

Each of the piezoelectric elements 991, 992, 993, and 994 is composed of a pair of electrodes arranged to face each other in the Z-axis direction and a piezoelectric layer having piezoelectricity interposed between the pair of electrodes. Such piezoelectric elements 991, 992, 993, and 994 have a property of generating electric charges by deformation, and the larger the amount of deformation, the larger the electric charge is generated.
Therefore, when the angular velocity around the Z axis is applied to the physical quantity sensor 1 and the displacement portion in the Y-axis direction of the first vibrating portion 51 is displaced in the Y-axis direction while bending and deforming the spring portion 519b in the Y-axis direction, the piezoelectric element 991, When 992 generates a charge having a magnitude corresponding to the amount of deformation of the spring portion 519b and the displacement portion in the X-axis direction of the second vibrating portion 53 bends and deforms the connecting portion 539b in the X-axis direction and displaces in the X-axis direction. The piezoelectric elements 993 and 994 generate a charge having a magnitude corresponding to the amount of deformation of the connecting portion 539b.
The detecting means 9 detects the angular velocity around the Z axis by detecting the magnitude of the electric charge generated from such the piezoelectric elements 991, 992, 993, 994.

<Sixth Embodiment>
FIG. 12 is a plan view showing a sixth embodiment of the physical quantity sensor of the present invention.
The physical quantity sensor of the present embodiment will be described mainly on the differences from the above-described embodiment, and the description of the same matters will be omitted.
The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In FIG. 12, the same reference numerals are given to the same configurations as those of the first embodiment described above. Further, since the configurations of the first vibrating section 51 and 52 are similar to each other and the configurations of the second vibrating section 53 and 54 are similar to each other, the first vibrating section 51 and the second vibrating section 53 are represented below. The description of the first vibrating unit 52 and the second vibrating unit 54 will be omitted.

The first vibrating portion 51 is provided inside the second opening 511b, and has a plate-shaped Y-axis direction displacement portion 519a that can be displaced in the Y-axis direction with respect to the frame portion 511, a Y-axis direction displacement portion 519a, and a frame portion. It has a plurality of spring portions 519b connecting with 511. Each spring portion 519b is provided so as to extend in the X-axis direction.
The second vibrating portion 53 is provided inside the second opening 531b, and has a plate-shaped displacement portion 539a in the X-axis direction that can be displaced in the X-axis direction with respect to the frame portion 531, and the X-axis direction displacement portion 539a and the frame portion. It has a plurality of spring portions 539b connecting the 531 and the spring portion 539b. Each spring portion 539a is provided so as to extend in the Y-axis direction.

The detection means 9 of the present embodiment has a piezo resistance portion 995 provided in each spring portion 519b of the first vibrating portion 51 and a piezo resistance portion 996 provided in each spring portion 539b of the second vibrating portion 53. is doing. In the piezo resistance portions 995 and 996, for example, when the vibration system structure 3 is formed using an n-type silicon substrate, impurities such as boron are diffused at a high concentration, and a p-type silicon layer is formed in the diffused portion. It can be formed by forming.

The piezo resistance portions 995 and 996 have a property that the resistance value changes due to deformation, and the larger the deformation amount, the larger the change amount of the resistance value. Therefore, when the angular velocity around the Z axis is applied to the physical quantity sensor 1 and the displacement portion in the Y-axis direction of the first vibrating portion 51 is displaced in the Y-axis direction while bending and deforming the spring portion 519b in the Y-axis direction, the piezo resistance portion 995 is displaced. When the resistance value changes to a magnitude corresponding to the amount of deformation of the spring portion 519b and the displacement portion in the X-axis direction of the second vibrating portion 53 bends and deforms the connecting portion 539b in the X-axis direction and is displaced in the X-axis direction, the piezo The resistance portion 996 changes to a resistance value having a size corresponding to the amount of deformation of the connecting portion 539b.
The detecting means 9 detects the angular velocity around the Z axis by detecting such a change in the resistance value of the piezo resistance portions 995 and 996.

<7th Embodiment>
FIG. 13 is a plan view showing a seventh embodiment of the physical quantity sensor of the present invention. In FIG. 13, for convenience of explanation, the illustration of a part of the configuration of the physical quantity sensor is omitted.
The physical quantity sensor of the present embodiment will be described mainly on the differences from the above-described embodiment, and the description of the same matters will be omitted.

The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In FIG. 13, the same reference numerals are given to the same configurations as those of the first embodiment described above. Further, since the configurations of the four vibrating parts are the same as each other except that the arrangement around the Z axis is different, the first vibrating part 51 will be described as a representative below, and the first vibrating part 52 and the second vibrating part will be described. The description of parts 53 and 54 will be omitted.

In the first vibrating portion 51, the Y-axis direction displacement portion 516 is provided on the outside of the frame portion 511, and is connected to the frame portion 511 by a plurality of spring portions 517. Such a displacement portion 516 in the Y-axis direction is composed of a plate-shaped base portion 516c and a plurality of detection electrodes 516d protruding from the base portion 516c in the X-axis direction.
The displacement transducer 91 of the detection means 9 of the present embodiment has a Y-axis direction displacement portion 516 provided in the first vibration portion 51 and a fixed electrode 911 fixed to the substrate 2 via an anchor. .. A plurality of fixed electrodes 911 are provided corresponding to the detection electrodes 516d included in the Y-axis direction displacement portion 516. Each fixed electrode 911 has a pair of electrode pieces 911a and 911b arranged so as to face each other with the detection electrode 516d interposed therebetween, and these electrode pieces 911a and 911b are provided extending in the X-axis direction. ..

<8th Embodiment>
FIG. 14 is a plan view showing an eighth embodiment of the physical quantity sensor of the present invention. In FIG. 13, for convenience of explanation, the illustration of a part of the configuration of the physical quantity sensor is omitted.
The physical quantity sensor of the present embodiment will be described mainly on the differences from the above-described embodiment, and the description of the same matters will be omitted.

The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In FIG. 14, the same reference numerals are given to the same configurations as those of the first embodiment described above. Further, since the configurations of the four vibrating parts are the same as each other except that the arrangement around the Z axis is different, the first vibrating part 51 will be described as a representative below, and the first vibrating part 52 and the second vibrating part will be described. The description of parts 53 and 54 will be omitted.

In the first vibrating portion 51, the Z-axis displacement portion 516A provided on the outside of the frame portion 511 is connected to the frame portion 511 by a pair of connecting springs 517A. Further, each of the pair of connecting springs 517A extends along the radial direction with respect to the center O of the ring portion 31. Further, the Z-axis displacement portion 516A has a plate-shaped base portion 516Aa and a plurality of fixed electrodes 516Ab protruding from the base portion 516Aa in the radial direction with respect to the center O of the ring portion 31.

In such a first vibrating portion 51, the Z-axis displacement portion 516A bends and deforms the pair of connecting springs 517A due to the Coriolis force in the Y-axis direction generated when the angular velocity around the Z-axis is applied, while the Z-axis. Rotate around. According to such a configuration, since the Coriolis force in the Y-axis direction can be changed to the stress around the Z-axis, the displacement amount of the displacement portion 516A around the Z-axis can be increased.

The rotary transducer 91 of the detection means 9 of the present embodiment has a Z-axis displacement portion 516A provided in the first vibration portion 51 and a fixed electrode 911 fixed to the substrate 2 via an anchor. .. A plurality of fixed electrodes 911 are provided corresponding to the fixed electrodes 516Ab included in the displacement portion 516A around the Z axis. Each fixed electrode 911 has a pair of electrode pieces 911a and 911b arranged so as to face each other via the fixed electrode 516Ab.
The vibrating pieces of each embodiment as described above can be applied to various electronic devices, and the obtained electronic devices are highly reliable.

Here, the electronic device including the vibrating piece of the present invention will be described in detail with reference to FIGS. 15 to 17.
FIG. 15 is a perspective view showing the configuration of a mobile (or notebook) personal computer to which an electronic device equipped with the physical quantity sensor of the present invention is applied.
In this figure, the personal computer 1100 is composed of a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display unit 100, and the display unit 1106 rotates with respect to the main body portion 1104 via a hinge structure portion. It is movably supported.
Such a personal computer 1100 has a built-in physical quantity sensor 1 that functions as an angular velocity detecting means (gyro sensor).

FIG. 16 is a perspective view showing the configuration of a mobile phone (including PHS) to which an electronic device provided with the physical quantity sensor of the present invention is applied.
In this figure, the mobile phone 1200 includes a plurality of operation buttons 1202, earpiece 1204, and earpiece 1206, and a display unit 100 is arranged between the operation button 1202 and the earpiece 1204.
Such a mobile phone 1200 has a built-in physical quantity sensor 1 that functions as an angular velocity detecting means (gyro sensor).

FIG. 17 is a perspective view showing the configuration of a digital still camera to which an electronic device including the physical quantity sensor of the present invention is applied. It should be noted that this figure also briefly shows the connection with an external device.
Here, while a normal camera exposes a silver halide photographic film by the light image of the subject, the digital still camera 1300 photoelectrically converts the light image of the subject by an image pickup device such as a CCD (Charge Coupled Device). Generates an image pickup signal (image signal).

A display unit is provided on the back surface of the case (body) 1302 of the digital still camera 1300, and the display unit is configured to display based on the image pickup signal by the CCD. The display unit serves as a finder for displaying the subject as an electronic image. Function.
Further, on the front side (back side in the drawing) of the case 1302, a light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided.

When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the image pickup signal of the CCD at that time is transferred and stored in the memory 1308.
Further, in the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. Then, as shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312, and a personal computer 1440 is connected to the input / output terminal 1314 for data communication, respectively, as needed. Further, the image pickup signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.
Such a digital still camera 1300 has a built-in physical quantity sensor 1 that functions as an angular velocity detecting means (gyro sensor).

In addition to the personal computer (mobile personal computer) of FIG. 15, the mobile phone of FIG. 16, and the digital still camera of FIG. 17, the electronic device provided with the vibrating piece of the present invention is, for example, an inkjet ejection device (for example). Inkjet printer), laptop personal computer, TV, video camera, video tape recorder, car navigation device, pager, electronic notebook (including communication function), electronic dictionary, calculator, electronic game equipment, word processor, workstation, TV Telephones, security TV monitors, electronic binoculars, POS terminals, medical equipment (eg electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiogram measuring devices, ultrasonic diagnostic devices, electronic endoscopes), fish finder, various measuring devices, instruments It can be applied to a class (for example, a vehicle, an aircraft, a ship's instrument), a flight simulator, and the like.

Although the physical quantity sensor of the present invention has been described above based on the illustrated embodiment, the present invention is not limited to this, and the configuration of each part may be replaced with an arbitrary configuration having the same function. Can be done.
Further, any other constituent may be added to the present invention. Further, the present invention may be a combination of any two or more configurations (features) in each of the above embodiments.

1 ‥‥ Physical quantity sensor 2 ‥‥‥ Substrate 3 ‥‥‥ Vibration system structure 31 ‥‥‥ Ring part 4 ‥‥‥ Vibration means 41 ‥‥‥ Fixed electrode 411, 412 ‥‥‥ Electrode piece 42 ‥‥‥ Fixed electrode 421 ‥‥‥ Electrode piece 43, 44 ‥‥ Fixed electrode 431, 432 ‥‥‥ Electrode piece 441, 442 ‥‥‥ Electrode piece 45,46 ‥‥‥ Fried material element 51 ‥‥‥ First vibration part 511 ‥‥‥ Frame part 511a ‥‥‥ First opening 511b ‥‥‥ 2nd opening 511c ‥‥ 3rd opening 512 ‥‥ Z-axis direction displacement part 513 514 ‥‥ Axis part 515 ‥‥ Drive electrode 516 ‥‥ Y-axis direction displacement part 516A ‥‥ Displacement part 516Aa ‥‥ Base 516Ab ‥‥ Electrode 516a ... Frame part 516b ... Detection electrode 516c ... Base part 516d ... Detection electrode 517 ... Spring part 517A ... Pair of connecting springs 518a ... Fixed part 518b ... 519b ... Spring part 52 ... First vibration part 521 ... Frame part 522 ... Z-axis direction displacement part 523 .... Shaft part 525 ... Drive electrode 526 ... Y-axis direction displacement part 526b ... 527 Spring part 53 Second vibration part 531 Frame part 531a First opening 531b Second opening 531c Third opening 532 Z-axis direction displacement part 533 534 Shaft part 535 ... Drive electrode 536 ... X-axis displacement part 536a ... Frame part 536b ... Detection electrode 537 ... Spring part 539a ... Spring part 539b ... Connection part 519a ... X-axis direction displacement part 519b ... Spring Part 54: Second vibration part 541: Frame part 542: Z-axis direction displacement part 543: 544: Shaft part: 545: Drive electrode 546: Detection electrode 546b: Y-axis direction extension part: 547: Spring part 61, 62, 63, 64 ... Inner fixing part 651, 652, 661, 662, 671, 672, 681, 682 ... Outer fixing part 71, 72, 73, 74 ... Beam 81 ... First inner Spring part 811, 812 ‥‥‥ Spring part 82 ‥‥‥ 1st inner spring part 83 ‥‥‥ 2nd inner spring part 831, 832 ‥‥‥ Spring part 84 ‥‥‥ 2nd inner spring part 851,852,861,862,871, 872, 881, 882 ... Outer spring part 9 ... Inspection Output means 91 ... Displacement transducer 911, 912 ... Fixed electrode 911a, 911b ... Electrode piece 92 ... Displacement transducer 921, 922 ... Fixed electrode 921a, 921b ... 932 ... Fixed electrode 931a, 931b ... Electrode piece 94 ... Displacement transducer 941, 942 ... Fixed electrode 941a, 941b ... Electrode piece 95 ... Rotational transducer 951 ... Fixed electrode 96 ... Rotational transducer 961 Fixed electrode 97 ‥‥ Rotating transducer 971 ‥‥ Fixed electrode 98 ‥‥ Rotating transducer 981 ‥‥ Fixed electrode 991, 992 ‥‥ Piezoelectric element 993, 994 ‥‥ Piezoelectric element 995, 996 ‥‥ Piezo resistance part 100 ‥‥ Display unit 1100 ‥‥ Personal computer 1102 ‥‥ Keyboard 1104 ‥‥ Main unit 1106 ‥‥ Display unit 1200 ‥‥ Mobile phone 1202 ‥‥ Operation button 1204 ‥‥ Earpiece 1206 ‥‥‥ Mouthpiece 1300 ‥‥ Digital still Camera 1302 ‥‥ Case 1304 ‥‥ Light receiving unit 1306 ‥‥ Shutter button 1308 ‥‥ Memory 1312 ‥‥ Video signal output terminal 1314 ‥‥‥ Input / output terminal 1430 ‥‥ TV monitor 1440 ‥‥ Personal computer J1, J2 ‥‥ Axis

Claims (5)

When the three axes orthogonal to each other are the X-axis, Y-axis, and Z-axis,
With the board
A structure supported by the substrate and separated from the substrate in the Z-axis direction along the Z-axis.
Including
The structure is
A pair of first and second vibrating parts,
A pair of 3rd and 4th vibrating parts,
The first vibrating section and the second vibrating section are vibrated in the X-axis direction along the X axis and in opposite phases to each other, and the third vibrating section and the fourth vibrating section are Y along the Y axis. A vibrating means that vibrates in the axial direction and in opposite phases to each other,
The first detection electrode provided in the first vibration unit and
With respect to the first detection electrode, the first fixed electrode provided on the substrate, separated from the first detection electrode in the Y-axis direction,
The second detection electrode provided in the second vibration unit and
A second fixed electrode provided on the substrate, separated from the second detection electrode in the Y-axis direction,
A first movable portion provided in the first vibrating portion and displaced in the Z-axis direction along the Z-axis, and a first movable portion.
A third fixed electrode, which is separated from the first movable portion in the Z-axis direction and is provided on the substrate ,
A second movable portion provided in the second vibrating portion and displaced in the Z-axis direction, and a second movable portion.
A fourth fixed electrode, which is separated from the second movable portion in the Z-axis direction and is provided on the substrate ,
A third movable portion provided in the third vibrating portion and displaced in the Z-axis direction, and a third movable portion.
A fifth fixed electrode provided on the substrate separated from the third movable portion in the Z-axis direction,
A fourth movable portion provided in the fourth vibrating portion and displaced in the Z-axis direction, and a fourth movable portion.
With the sixth fixed electrode provided on the substrate separated from the fourth movable portion in the Z-axis direction,
A connecting portion arranged between the first vibrating portion and the second vibrating portion and between the third vibrating portion and the fourth vibrating portion.
The four support portions that support the connecting portion via a beam and are attached to the substrate, and
Including
A physical sensor characterized in that the projected outer shape of the structure is substantially rectangular. In claim 1,
The connecting portion is a physical sensor characterized by including an arc-shaped beam. In claim 1 or 2,
The structure is
The first side extending in the first direction and
A second side extending in the second direction orthogonal to the first direction, and
A third side facing the first side and extending in the first direction,
A fourth side facing the second side and extending in the second direction,
A physical sensor characterized by including. In any one of claims 1 to 3,
A plurality of first fixing portions for fixing each of the first vibrating portion and the second vibrating portion to the substrate, and
A plurality of second fixing portions for fixing each of the third vibrating portion and the fourth vibrating portion to the first surface of the substrate, and
A physical sensor characterized by containing. An electronic device comprising the physical quantity sensor according to any one of claims 1 to 4.

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