JP6784497B2 - Inspection processing method of gas inspection machine - Google Patents

Description

The present invention supplies gas to the gas introduction section of the gas inspection machine for a gas inspection machine having a gas alarm function that outputs a predetermined gas alarm according to the state of a specific component in the introduced gas introduced from the gas introduction section. The present invention relates to an inspection processing method and an inspection processing system of a gas inspection machine that supplies inspection gas through a unit and executes a gas alarm confirmation process for confirming the presence or absence of an abnormality in the gas alarm function of the gas inspection machine.

When using a gas inspection machine that has a gas alarm function that outputs an alarm according to the state of a specific component such as carbon monoxide or flammable gas in the air, whether or not the state of the gas inspection machine is normal It needs to be inspected regularly. Therefore, an inspection processing system for automatically inspecting such a gas inspection machine is known (see, for example, Patent Document 1).

In the inspection processing system of the gas inspection machine of Patent Document 1, as the above inspection processing, a bump test is performed by supplying inspection gas to the gas introduction part of the gas inspection machine and confirming whether or not there is an abnormality in the gas alarm function of the gas inspection machine. The gas alarm confirmation process (confirmation test process), which is also called, is executed. Specifically, in this gas alarm confirmation process, the gas supply unit (gas supply tube connection unit 75) is compared with the gas inspection machine (gas detectors 10A, 10B) housed in the storage unit (mounting units 50, 55). The inspection gas (specific gas) is supplied through the gas detector to check whether the concentration indicated value of the gas inspection machine is appropriate.

Japanese Unexamined Patent Publication No. 2013-257160

In the inspection processing system of a conventional gas inspection machine, the inspection gas sealed in a gas container such as a cylinder is supplied to the gas inspection machine as it is, and the gas alarm confirmation processing is executed. Therefore, a large-capacity gas container corresponding to the required amount of inspection gas is required. Further, when inspection gas having the same composition but different concentration is used, a different gas container is required for each of the different concentrations, which causes an enormous installation space.

Further, the inspection gas sealed in the gas container was obtained by diluting specific components such as carbon monoxide and flammable gas with purified air, an inert gas, etc., and was in a dry state containing almost no water. When such a dry inspection gas is used in the gas alarm confirmation process of the gas inspection machine, the sensor part of the gas inspection machine becomes dry and operates under conditions different from those during normal use. As a result, it may not be possible to obtain accurate inspection results.

In view of this situation, a main problem of the present invention is in the inspection processing technique of the gas inspection machine that supplies the inspection gas to the gas inspection machine and executes the gas alarm confirmation processing for confirming the presence or absence of the abnormality of the gas alarm function. The point is to provide a technology that can obtain accurate inspection results by gas alarm confirmation processing while reducing the installation space of the gas container.

This onset Ming, to gas testing machine having a gas alarm function to output an alarm predetermined gas in accordance with the state of the specific component in the introduced gas introduced from the gas inlet, the gas in the gas inlet of the gas inspector It is an inspection processing method of a gas inspection machine that supplies inspection gas through a supply unit and executes a gas alarm confirmation processing for confirming whether or not there is an abnormality in the gas alarm function of the gas inspection machine.
It is preferable to carry out a dilution treatment in which the raw material gas taken out from the gas container is diluted with the atmosphere taken in from the open portion opened to the outside to generate the inspection gas.

According to this configuration, the inspection gas is not sealed and stored in the gas container as it is, but a high-concentration raw material gas is sealed in the gas container, and the raw material gas is diluted in the atmosphere by the above dilution treatment. Since the inspection gas is generated, the gas container can have a capacity smaller than the required amount of the inspection gas. Further, in the above dilution treatment, the air containing an appropriate amount of water is used as the dilution gas of the raw material gas, not the purified air or the inert gas in a dry state. Therefore, when the inspection gas generated in this dilution process is supplied to the gas inspection machine in the gas alarm confirmation process, the sensor portion of the gas inspection machine is maintained in a state similar to that of the atmosphere without being excessively dried. Therefore, it will operate under the same conditions as during normal use.
Therefore, the present invention provides a technique capable of obtaining an accurate inspection result by gas alarm confirmation processing while reducing the installation space of the gas container.

The first characteristic configuration of the present invention is for a gas inspection machine having a gas alarm function that outputs a predetermined gas alarm according to the state of a specific component in the introduced gas introduced from the gas introduction unit, and the gas of the gas inspection machine. This is an inspection processing method for a gas inspection machine that supplies inspection gas to the introduction unit via a gas supply unit and executes a gas alarm confirmation process for confirming the presence or absence of an abnormality in the gas alarm function of the gas inspection machine.
The gas inspection machine is configured as a suction type that sucks the introduced gas from the gas introduction portion.
The raw material gas taken out from the gas container is diluted with the atmosphere to generate the inspection gas.
In the gas alarm confirmation process, the inspection gas that is larger than the gas suction flow rate of the gas inspection machine is supplied to the gas supply unit, and the inspection gas that is not sucked into the gas introduction unit of the gas inspection machine is exhausted. At the point.

According to this configuration, in the above gas alarm confirmation process, when the inspection gas is supplied to the gas introduction part of the suction type gas inspection machine via the gas supply part, the same amount of inspection as the gas suction flow rate of the gas inspection machine is inspected. Instead of supplying the gas for inspection, the inspection gas that is larger than the gas suction flow rate is supplied, and the inspection gas that is not sucked into the gas introduction part of the gas inspection machine is exhausted. Then, the gas inspection machine sucks the inspection gas without shortage, and further maintains the suction flow rate at an appropriate suction flow rate regardless of the supply flow rate of the inspection gas on the system main body side. It will operate under the same conditions. Therefore, a more accurate inspection result can be obtained in this gas alarm confirmation process.

This onset Ming, temporarily in the execution start of the dilution process, the flow rate of the raw material gas, it is preferable to more than the set flow rate corresponding to the dilution ratio of the raw material gas.

According to this configuration, by temporarily increasing the flow rate of the raw material gas to be higher than the set flow rate at the start of execution of the dilution process, the concentration of the inspection gas generated by the dilution process can be made appropriate as soon as possible. Since the concentration can be reached, the gas alarm confirmation process using the inspection gas can be started at an early stage.
The second characteristic configuration of the present invention is a raw material gas path through which the raw material gas taken in from the gas container flows, an air supply path through which the air taken in from the open portion opened to the outside passes, and the raw material gas path. An inspection gas path from the merging section to the gas supply section to which the gas introduction section of the gas inspection machine is connected is provided.
While supplying the raw material gas taken out from the gas container to the merging portion from the raw material gas path, the air taken in from the open portion is supplied to the merging portion from the atmospheric supply path, and the raw material gas is supplied to the merging portion at the merging portion. While executing the diluting process of diluting to generate the inspection gas, the gas alarm confirmation process is executed, and the inspection gas generated at the confluence is taken from the confluence through the inspection gas path. It is at the point of supplying to the gas supply section.

The third characteristic configuration of the present invention is for a gas inspection machine having a gas alarm function that outputs a predetermined gas alarm according to the state of a specific component in the introduced gas introduced from the gas introduction unit, and the gas of the gas inspection machine. This is an inspection processing method for a gas inspection machine that supplies inspection gas to the introduction unit via a gas supply unit and executes a gas alarm confirmation process for confirming the presence or absence of an abnormality in the gas alarm function of the gas inspection machine.
The raw material gas taken out from the gas container is diluted with the atmosphere to generate the inspection gas.
In the dilution treatment, the raw material gas is passed through the raw material gas path, an atmosphere having a larger flow rate than the raw material gas is passed through the air supply path, and the raw material gas flowing through the raw material gas path is passed through the atmospheric supply path. Dilute with air flowing through the supply path,
When, instead of the dilution treatment, a non-dilution treatment of the raw material gas taken out from the gas container as the inspection gas is performed without diluting the raw material gas as it is, the raw material gas is used as the gas via the air supply path. It is at the point of supplying to the supply section.

According to this configuration, in the above dilution treatment, the raw material gas is diluted in the atmosphere having a larger flow rate than that, so that the air supply path through which the atmosphere passes and the flow meter provided in the path are used. In this case, it is configured to correspond to a larger flow rate than the raw material gas path through which the raw material gas flows. In this case, when the undiluted treatment of using the raw material gas as the inspection gas as it is is executed without diluting the raw material gas, the flow rate of the raw material gas becomes a relatively large flow rate corresponding to the required flow rate of the inspection gas. When the raw material gas is passed through the raw material gas path, it is necessary to configure the raw material gas path and the flow meter provided in the path as a complicated and large one corresponding to a wide range of flow rates from a small flow rate to a large flow rate. is there.
Therefore, in the above-mentioned non-dilution treatment, a relatively large flow rate of the raw material gas is supplied to the gas supply unit via an atmospheric supply path corresponding to the large flow rate, so that the raw material gas path and the flow meter provided in the path are made small. It can be configured as a relatively simple and compact one that supports only the flow rate.
The fourth characteristic configuration of the present invention is a concentration stabilization process for stabilizing the concentration of the inspection gas by exhausting the inspection gas generated in the dilution process to the outside before executing the gas alarm confirmation process. Is at the point of executing.
According to this configuration, before the execution of the gas alarm confirmation process, the concentration stabilization process is executed, and the inspection gas whose flow rate and concentration are not yet stable is exhausted to the outside. From the beginning of the confirmation process, inspection gas with a stable flow rate and concentration can be supplied to the gas inlet of the gas inspection machine to obtain accurate inspection results.

This onset Ming, to gas testing machine having a gas alarm function to output an alarm predetermined gas in accordance with the state of the specific component in the introduced gas introduced from the gas inlet, the gas in the gas inlet of the gas inspector It is an inspection processing system of a gas inspection machine equipped with an inspection processing means that supplies inspection gas through a supply unit and executes a gas alarm confirmation processing for confirming whether or not there is an abnormality in the gas alarm function of the gas inspection machine. hand,
The raw material gas taken out from the gas container, it is preferable that is diluted with air taken from the opening which is open to the outside Ru with a dilution process means capable of performing the dilution process of generating the inspection gas.

According to this configuration, an inspection processing means for executing the gas alarm confirmation process and a dilution processing means capable of executing the dilution process are provided. As a result, it is possible to construct an inspection processing system that executes the inspection processing method of the gas inspection machine according to the present invention, and similarly to the inspection processing method of the gas inspection machine according to the present invention, a plurality of gases to be inspected. The inspection process can be reasonably executed for the inspection machine.

External view of inspection processing system of gas inspection machine Top view explaining the schematic configuration of the gas inspection machine and the internal configuration of the adapter containing the gas inspection machine. An exploded perspective view of the adapter Flow chart showing the flow of the inspection processing method implemented by the inspection processing system A flow chart showing the flow of the inspection process executed by the inspection process method of FIG. The figure which shows the display example of the display of the inspection processing system The figure which shows the operating state and the gas flow state of various auxiliary machines in the initial confirmation process. The figure which shows the operating state and the gas flow state of various auxiliary machines in the blockage alarm confirmation process and the concentration stabilization process. The figure which shows the operating state of various auxiliary machines, and the gas flow state in the suction flow rate confirmation process and the concentration stabilization process. The figure which shows the operating state and the gas flow state of various auxiliary machines in the concentration stabilization process in a standby state. The figure which shows the operating state and the gas flow state of various auxiliary machines in the gas alarm confirmation process at the time of performing the dilution process. The figure which shows the operating state and the gas flow state of various auxiliary machines in a cleaning process. The figure which shows the operating state and the gas flow state of various auxiliary machines in the gas alarm confirmation process when the dilution process is not performed.

An embodiment of the present invention will be described with reference to the drawings.
The inspection processing system 100 shown in FIG. 1 is configured as a system that implements an inspection processing method for inspecting the state of the gas inspection machine 70, and an accommodating portion 5 for accommodating the gas inspection machine 70 is provided on the front surface. The system main body 1 is provided with an adapter 50 that is detachably attached to the accommodating portion 5 and is capable of accommodating the gas inspection machine 70 in the accommodating portion 5.

In the present application, the surface of the system main body 1 on which the accommodating portion 5 and the display 3 are provided (the surface on the front side in FIG. 1, the surface on the left side in FIG. 2, and the surface on the left front side in FIG. 3) is referred to as "front". The direction in which the front faces is called the "front direction". On the other hand, the surface opposite to the front surface is called the "back surface", and the direction in which the back surface faces is called the "depth direction". Further, the left side in the front view is simply called the "left side", and the right side in the front view is simply called the "right side".

[Gas inspection machine]
First, the configuration of the gas inspection machine 70 will be described with reference to FIGS. 1 and 2.
The gas inspection machine 70 will be described in detail later, but is determined according to the state of, for example, flammable gas (hydrogen, methane, propane, etc.) or carbon monoxide as a specific component in the introduced gas introduced from the gas introduction unit 72. It has a gas alarm function for outputting the gas alarm of the above, and also has a blockage alarm function for outputting a predetermined blockage alarm when the gas introduction unit 72 is blocked.

Specifically, the gas inspection machine 70 includes an inspection machine main body 71 and a gas introduction unit 72 for introducing gas into the inspection machine main body 71.
The gas introduction portion 72 is composed of a substantially tubular tubular portion 74 projecting from the inspection machine main body 71, and a pointed suction nozzle 73 connected to the tip end side of the tubular portion 74. On the other hand, a suction pump 75 for sucking external gas through the gas introduction unit 72 is provided in the inspection machine main body 71, whereby the gas inspection machine 70 positively operates from the suction nozzle 73. It is configured as a suction type that sucks gas into the air.
Further, inside the inspection machine main body 71, a sensor unit 76 composed of a sensor element or the like to which the introduced gas sucked by the suction pump 75 is supplied and is sensitive to a specific component in the introduced gas, and a control unit including a computer. 78 etc. are provided.

A display operation unit 80 for performing a predetermined display or input operation is provided on the front surface of the gas inspection machine 70, and the control unit 78 obtains the concentration of a specific component in the introduced gas from the output signal of the sensor unit 76. A predetermined gas is displayed on the display operation unit 80 provided on the inspection machine main body 71, and when the flammable gas concentration exceeds the permissible range, the display operation unit 80 is notified of the display. An alarm display (an example of a gas alarm) is displayed, and a speaker 82 provided in the inspection machine main body 71 is configured to generate a predetermined gas alarm sound (an example of a gas alarm). And such a function is called a gas alarm function.

Further, the control unit 78 of the gas inspection machine 70 monitors the load of the suction pump 75 (hereinafter referred to as “pump load”) by the current value of the drive power of the suction pump 75 or the like when the suction pump 75 is operating. If the pump load is abnormally high when the suction pump 75 is operating, it is determined that the state of the gas introduction unit 72 is a closed state in which the gas introduction unit 72 is blocked by dust or the like. Then, in order to notify the operator of this blockage state as a blockage abnormality, a predetermined blockage alarm display (an example of a blockage alarm) is displayed on the display operation unit 80, and the speaker 82 further causes a predetermined blockage alarm sound (blockage). It is configured to generate an example of an alarm). And such a function is called a blockage alarm function.

On the side surface side of the inspection machine main body 71, there is an exhaust unit 77 that discharges gas that has passed through the sensor unit 76, and a communication unit 79 for the control unit 78 to perform infrared communication (an example of wireless communication) with the outside. And are arranged.

[Inspection processing system]
Next, the detailed configuration of the inspection processing system 100, that is, the detailed configuration of the system main body 1 and the adapter 50 included in the inspection processing system 100 will be described in order.
In the following description, an example in which the inspection target of the inspection processing system 100 is the suction type gas inspection machine 70 will be described, but in addition to the suction type gas inspection machine 70, gas is naturally introduced into the sensor unit. A diffusion type gas inspection machine may be inspected. In this case, necessary processing may be added as appropriate or unnecessary processing may be omitted as appropriate.

[System body]
Next, the configuration of the system main body 1 included in the inspection processing system 100 will be described with reference to FIGS. 1, 2, and 7 to 13.
As shown in FIG. 1, four accommodating portions 5 for accommodating the gas inspection machine 70 are provided on the front surface of the system main body 1, so that a plurality of gas inspection machines 70 can be inspected. Is possible. In addition to the accommodating portion 5, devices such as a display 3, other operation switches, and a speaker are arranged on the front surface of the system main body 1, and further, a sensor portion 76 of the gas inspection machine 70 to be inspected. Two gas containers C1 and C2 for storing the raw material gas containing the specific component to which the sensor is sensitive are detachably attached. Although the details will be described later, the raw material gas stored in the gas containers C1 and C2 is appropriately diluted in the atmosphere and used as an inspection gas.

Each of the four accommodating portions 5 is formed as a common rectangular cross-sectional recess that opens to the front side.
As shown in FIGS. 1 and 2, on the inner inner surface side of the accommodating portion 5, the air supply unit is a gas supply unit for supplying gas such as inspection gas to the gas introduction unit 72 of the gas inspection machine 70. It is connected to the joint 5a, the exhaust joint 5b, which is an exhaust suction part for sucking the exhaust discharged from the gas inspection machine 70 and discharging it to the outside, and the connector 55 of the base 52 provided on the adapter 50. The connector 5c is arranged.
In FIG. 1, the accommodating portion 5 to which the adapter 50 is not attached is provided with a cover 5d on the front surface thereof in order to prevent the gas inspection machine 70 from being erroneously inserted.

The connector 5c is also connected to a control unit 2 composed of a computer provided in the system main body 1. Therefore, by connecting the connector 55 on the board 52 on the adapter 50 side and the connector 5c on the system body 1, the control unit 2 on the system body 1 can perform wired communication with the control unit 54 on the adapter 50 side. It will be possible. Further, as will be described in detail later, the control unit 54 on the adapter 50 side is configured to enable wireless communication with the control unit 78 of the gas inspection machine 70 housed in the gas inspection machine storage unit 60 of the adapter 50. ing. Therefore, the control unit 2 on the system main body 1 side can communicate with the control unit 54 on the adapter 50 side, and is accommodated via the control unit 54 with the adapter 50 interposed in the accommodating unit 5. Communication is also possible with the control unit 78 on the gas inspection machine 70 side.

As shown in FIG. 7 and the like, the control unit 2 on the system main body 1 side functions as an inspection processing means 2a for executing a predetermined inspection process by executing a predetermined program, which will be described in detail later.
Further, in addition to the above-mentioned inspection processing means 2a, the control unit 2 includes an adapter identification information acquisition means 2b capable of acquiring adapter identification information which is identification information of the adapter 50 mounted on the accommodation unit 5, and an accommodation unit 5. It also functions as a gas inspection machine identification information acquisition means 2c capable of acquiring gas inspection machine identification information which is identification information of the housed gas inspection machine 70.

That is, the adapter identification information acquisition means 2b communicates with the control unit 54 on the adapter 50 side mounted on the accommodating unit 5 to obtain adapter identification information such as the model of the adapter 50 from the control unit 54. Acquired in association with the accommodating portion 5 to which the adapter 50 is mounted.
On the other hand, the gas inspection machine identification information acquisition means 2c communicates with the control unit 78 on the gas inspection machine 70 side, which is housed by interposing the adapter 50 in the storage unit 5, from the control unit 78. The gas inspection machine identification information such as the model of the gas inspection machine 70 is acquired in association with the storage unit 5 in which the gas inspection machine 70 is housed.

Further, the control unit 2 can store the acquired various identification information in a storage unit 4 including a memory or the like, and can retrieve necessary information from the timely storage unit 4.
The timing of acquiring the adapter identification information can be the same as the timing of acquiring the gas inspection machine information at the time of accommodating the gas inspection machine 70 in the accommodating portion 5, but the information at the time of accommodating the gas inspection machine 70. It is said that the adapter 50 is attached to the accommodating portion 5 for the purpose of reducing the processing amount.

As shown in FIGS. 7 to 13, the system main body 1 is provided with open portions O1 to O4 for opening to the outside to take in atmospheric OA or exhaust exhaust EA to the outside, and is not shown. Although omitted, the opening portions O1 to O4 are provided on the back side of the system main body 1. Further, inside the system main body 1, various routes for connecting the air supply joint 5a and the exhaust joint 5b provided in the accommodating portion 5 and the open portions O1 to O4 and the gas containers C1 and C2 are provided. In these paths, pressure gauges Mp1 to Mp5, flow meters Mf1 to Mf3, valves V1 to V13, pumps P1 and P2, pressure regulators R1 and R2, filters F1 to F3 and the like are arranged. The pressure value measured by the pressure gauges Mp1 to Mp3 and the flow rate value measured by the flow meter Mf1 to Mf3 are input to the control unit 2, and the control unit 2 is based on the input signals and the like. Operation control of valves V1 to V13, pumps P1 and P2, and pressure regulators R1 to R3 is executed.
In FIGS. 7 to 13, in the valves V1 to V13, the closed port is indicated by a black triangle, and the open port is indicated by a white triangle.

For example, the raw material gas path 6b through which the raw material gas G0 taken in from the gas containers C1 and C2 in the dilution treatment described later passes through the respective gas containers C1 and C2, the respective pressure gauges Mp4 and Mp5, and the respective pressure regulators R1. , R2, each flow control valves V9, V10, three-way valve V8, two-way valve V7, and flow meter Mf2 are provided as a route to the confluence B1.
The inspection gas path 6c through which the inspection gas G1 passes is a path from the merging portion B1 to the air supply joint 5a via the three-way valve V4, the three-way valve V3, the branch portion B2, and the three-way valve V1. It is provided.
Then, a path through which the inspection gas G1 or the raw material gas G0 as a raw material thereof flows, such as the raw material gas path 6b and the inspection gas path 6c, is called a gas path.

Further, in the dilution process described later, the atmospheric supply path 6a through which the atmospheric OA for diluting the raw material gas G0 passes is from the open portion O3 to the filter F3, the pump P1, the three-way valve V13, the three-way valve V12, and the two-way valve V11. , And a path to the confluence B1 via the flow meter Mf3.
The path for opening the air supply joint 5a to the atmosphere is a route from the air supply joint 5a to the opening portion O2 via the three-way valve V1, the three-way valve V3, the flow meter Mf1, and the filter F2. It is provided as.

The raw material gas path 6b and the atmospheric supply path 6a are used as diluting processing means 6 capable of performing a dilution process of diluting the raw material gas G0 taken out from the gas containers C1 and C2 with the atmospheric OA to generate the inspection gas G1. Function.

〔adapter〕
Next, the configuration of the adapter 50 will be described with reference to FIGS. 1, 2, and 3.
As shown in FIG. 1, the adapter 50 is detachably attached to the accommodating portion 5 provided on the front surface of the system main body 1 so that the gas inspection machine 70 can be accommodated in the accommodating portion 5. It is configured. That is, the outer shape of the adapter 50 has a common rectangular cross section so as to be inserted and fitted inside the accommodating portion 5 from the front side, and the adapter 50 is placed above and below the front side of the adapter 50 with respect to the system main body 1. A mounting claw 64 for fixing the screw is formed so as to project in the vertical direction.
Then, the adapter 50 is inserted into the accommodating portion 5 from the front side in the depth direction, and the mounting claw 64 of the adapter 50 is fixed to the accommodating portion 5 with a screw. It is installed.

The adapter 50 may be attached to the system body 1 prior to the inspection of the gas inspection machine 70, but in order to prevent erroneous attachment, the supplier (manufacturer, etc.) does not attach the adapter 50 to the system body 1. ) It is desirable to do it on the side. That is, the supplier grasps the specifications of the gas inspection machine 70 used by the user in advance at the time of receiving an order for the inspection system 100, and based on this, attaches an appropriate adapter 50 to the system main body 1 in advance. To the user. In addition, the supplier can change the adapter 50 based on the change of the adapter 50 used by the user at the time of maintenance, overhaul, or the like.

The adapter 50 is provided with a gas inspection machine accommodating portion 60 which is a concave portion having a rectangular cross section for inserting and accommodating the gas inspection machine 70 through an opening on the front side. The gas inspection machine accommodating portion 60 is configured such that its shape and arrangement of various parts provided therein conform to a predetermined model of the gas inspection machine 70, and the gas inspection machine 70 of a plurality of types. A plurality of types of adapters 50 suitable for each are prepared. As a result, a plurality of types of gas inspection machines 70 can be accommodated in a form in which the adapter 50 is interposed in the common accommodating portion 5, and the accommodation unit 5 can accommodate the gas inspection machine 70 owned by the user. The adapter 50 is selected and mounted according to the model of.
The user may select and install the adapter 50 by himself / herself, but it is desirable that the seller of the inspection processing system 100 performs the selection and installation in order to prevent erroneous selection and installation.

As shown in FIG. 3, the adapter 50 is composed of an upper and lower two-divided structure including an upper casing 50a and a lower casing 50b, and the gas inspection machine accommodating portion 60 described above is a recess on the lower surface side of the upper casing 50a. It is formed in a form in which it is combined with a recess on the upper surface side of the lower casing 50b.
Exhaust guides provided with an exhaust tube 57 and a filter 58 on the lower surface side of the upper casing 50a of the adapter 50 and the upper surface side of the lower casing 50b, in addition to the gas inspection machine accommodating portion 60, will be described in detail later. A road 56, an air supply guide path 61 provided with an air supply tube 62, a base accommodating portion 51 accommodating a base 52 provided with a communication unit 53, a control unit 54, and the like, a communication passage 63, and the like are formed. Various recesses are provided for this purpose.

The exhaust guide path 56 is provided adjacent to the left side of the gas inspection machine accommodating portion 60 as a passage for guiding the exhaust gas from the gas inspection machine 70 accommodated in the accommodating portion 5 to the exhaust joint 5b. The exit direction is along the mounting direction (that is, the depth direction) of the adapter 50 to the accommodating portion 5. The exhaust guide path 56 has an opening 59 that opens from the side to the gas inspection machine accommodating portion 60, and the opening 59 is the gas inspection machine 70 accommodated in the gas inspection machine accommodating portion 60. It is arranged to face the exhaust unit 77 of the above at a predetermined interval. Further, the gas suction flow rate of the exhaust joint 5b (that is, the suction flow rate of the pump P2 (see FIGS. 7 to 13) on the system main body 1 side) is the exhaust flow rate of the gas inspection machine 70 (that is, the suction pump on the gas inspection machine 70 side). It is set to be larger than the suction flow rate of 75). As a result, the exhaust gas discharged from the exhaust gas 77 of the gas inspection machine 70 can be reliably sucked into the exhaust guide path 56 from the opening 59. Further, in addition to the exhaust gas from the gas inspection machine 70, the ambient air of the gas inspection machine accommodating portion 60 is taken into the opening 59. That is, the exhaust gas from the gas inspection machine 70 can be diluted with ambient air and sucked into the exhaust guide path 56 from the opening 59, and the diluted exhaust gas can be taken out from the system main body 1 side to the outside in a safe state. Can be discharged.

In the exhaust guide path 56, a filter 58 is provided in a space facing the opening 59, and an exhaust tube 57 is internally fitted in the space behind the filter 58. The rear end portion of the exhaust tube 57 is fitted and connected to the exhaust joint 5b provided on the inner inner surface side of the accommodating portion 5, and the connection direction is the mounting direction of the adapter 50 to the accommodating portion 5 ( That is, it is set in the direction along the depth direction). This makes it possible to easily connect the exhaust tube 57 to the exhaust joint 5b when the adapter 50 is attached to the accommodating portion 5.

The air supply guide path 61 is provided on the back side of the gas inspection machine accommodating portion 60 as a passage for guiding the inspection gas supplied to the air supply joint 5a to the gas introduction portion 72 of the gas inspection machine 70. The extending direction is along the mounting direction (that is, the depth direction) of the adapter 50 to the accommodating portion 5. An air supply tube 62 is internally fitted in the air supply guide path 61. The front end of the air supply tube 62 is fitted and connected to the suction nozzle 73 of the gas inspection machine 70 accommodated in the gas inspection machine accommodating portion 60, and the connection direction thereof is to the gas inspection machine accommodating portion 60. It is set in a direction along the insertion direction (that is, the depth direction) of the gas inspection machine 70. This makes it possible to easily connect the suction nozzle 73 to the air supply tube 62 when the gas inspection machine 70 is inserted into the gas inspection machine accommodating portion 60.

Further, the back end portion of the air supply tube 62 is fitted and connected to the air supply joint 5a provided on the inner back surface side of the accommodating portion 5, and the connection direction thereof is the adapter 50 to the accommodating portion 5. It is set in the direction along the mounting direction (that is, the depth direction) of. As a result, when the adapter 50 is attached to the accommodating portion 5, the air supply tube 62 can be easily connected to the air supply joint 5a.

The board accommodating portion 51 is provided adjacent to the left side of the exhaust guide path 56, and its extending direction is along the mounting direction (that is, the depth direction) of the adapter 50 to the accommodating portion 5. The plate-shaped base 52 is housed in the base accommodating portion 51 in a posture in which the plate surface is perpendicular to the left-right direction. Then, the connector 55 provided at the back end of the base 52 is fitted and connected to the connector 5c provided on the inner back side of the housing 5, and the connection direction is the adapter 50 to the housing 5. It is set in the direction along the mounting direction (that is, the depth direction) of. As a result, when the adapter 50 is attached to the accommodating portion 5, the connector 55 on the adapter 50 side can be easily connected to the connector 5c on the system main body 1 side.

Further, a control unit 54 composed of a CPU or the like is arranged on the board 52, and a gas inspection machine 70 housed in the gas inspection machine housing unit 60 is placed on a surface on the gas inspection machine housing unit 60 side. A communication unit 53 for performing infrared communication with the communication unit 79 is arranged.
The adapter 50 is formed with a communication passage 63 extending in the left-right direction for passing the communication infrared rays transmitted and received between the communication units 79 and 53. As a result, when the gas inspection machine 70 is accommodated in the gas inspection machine accommodating portion 60 of the adapter 50, infrared communication between these communication units 79 and 53 becomes possible when the gas inspection machine 70 is completely accommodated. Therefore, by detecting the state in which such infrared communication is possible, it is possible to determine the completion of accommodation of the gas inspection machine 70.
Regarding the board 52 on which the communication unit 53 is provided in the adapter 50, a plurality of types of communication unit 53 patterns are prepared so that they can be adopted by various adapters, and which communication unit is to be mounted at the time of manufacturing is determined. By making a decision, the base 52 is standardized.

[Inspection processing method]
Next, the inspection processing method executed by the inspection processing system 100 described above will be described with reference to FIGS. 4 to 13.
First, the operator inserts the gas inspection machine 70 to be inspected into the gas inspection machine housing 60 of the adapter 50 mounted on the housing 5 in a state of being operated. Then, as described above, the suction nozzle 73 on the gas inspection machine 70 side is connected to the air supply tube 62 on the adapter 50 side, and the communication unit 79 on the gas inspection machine 70 side and the communication unit 53 on the adapter 50 side. Infrared communication between the two is possible. Then, the control unit 2 on the system main body 1 side determines the state in which the infrared communication is possible as the completion of the accommodation of the gas inspection machine 70.

Then, the control unit 2 displays the initial screen (see FIG. 6A) on the display 3 with the gas inspection machine 70 housed in the storage unit 5, and the “bump test” button on the initial screen is displayed. When operated by the user, the execution of the inspection processing method is started.
Then, in the inspection processing method, as shown in FIG. 4, the consistency confirmation processing (# S1) and the predetermined grouping processing (# S2) are sequentially executed to determine the gas inspection machine 70 to be inspected (# S3). After that, the inspection process (# S4) is executed for the determined gas inspection machine 70. Further, after the inspection process (# S4) is executed, the cleaning process (# S6) is executed. Further, when a plurality of gas inspection machines 70 are accommodated in the four accommodating portions 5, a plurality of the gas inspection machines are set as inspection targets, and the plurality of gas inspection machines 70 as the inspection targets are subjected to. The inspection process (# S4) is sequentially executed in series. In the present embodiment, the various processes constituting the inspection process method are sequentially executed in series, but the process order thereof may be changed, at least a part of the plurality of processes may be duplicated, or another process may be performed. The execution procedure may be changed within an appropriate range, such as interposing processing in between.
Hereinafter, details of each process constituting these inspection process methods will be described in order.

[Consistency check processing]
In the consistency confirmation process (# S1) shown in FIG. 4, the adapter identification information acquired by the adapter identification information acquisition means 2b and the gas acquired by the gas inspection machine identification information acquisition means 2c before the inspection process (# S4) is executed. Check the consistency with the inspection machine identification information.
That is, in this consistency confirmation process (# S1), the adapter identification information of each storage unit 5 stored in advance in the storage unit 4 when the adapter 50 is attached is referred to, and the gas of the gas inspection machine 70 stored in the storage unit 5 is referred to. Whether or not an adapter 50 suitable for the gas inspection machine 70 to be inspected is used in a form of comparing whether or not the inspection machine identification information conforms to the adapter identification information associated with the same storage unit 5. Check if. Then, if it does not conform, the inspection process (# S4) is stopped and the user is notified to that effect, and conversely, if it conforms, the process proceeds to the next grouping process (# S2). ..
Then, by executing such a consistency confirmation process (# S1), for example, a subsequent inspection process (# S4) is executed with a gas inspection machine 70 that does not conform to the adapter 50 set. Is prevented. Therefore, it is possible to avoid problems such as leakage of inspection gas and erroneous inspection results due to the incompatibility of the combination of the gas inspection machine 70 and the adapter 50.

[Grouping process]
In the grouping process (# S2) shown in FIG. 4, a plurality of gas inspection machines 70 housed in the four storage portions 5 are targeted for inspection, and the plurality of gas inspection machines 70 housed in the four storage portions 5 are subjected to the inspection. Grouping is performed according to the inspection gas supplied to the gas inspection machine 70. Further, in this grouping process (# S2), various information about the inspection gas can be used as an index for grouping, but in the present embodiment, the composition and concentration of the inspection gas supplied to the gas inspection machine 70 are used. It is used as an index for grouping.

Such a grouping process (# S2) is executed, and after the subsequent inspection process (# S4) is executed, it is confirmed whether or not the next gas inspection machine 70 to be inspected belonging to the same group exists (# S5). ). Then, when the next gas inspection machine 70 to be inspected belonging to the same group exists, the inspection process (# S4) for the gas inspection machine 70 is preferentially executed, while if it does not exist, it will be described later. After executing the cleaning process (# S6), it is confirmed whether or not there is a gas inspection machine 70 to be inspected belonging to another group (# S7), and the gas inspection machine 70 belonging to the other group is checked. Move to inspection processing (# S4).
Then, by executing the grouping process (# S2) in this way and sequentially executing the inspection process (# S4) for each group, it is easy to change the composition and concentration of the inspection gas when the inspection target is switched. Has been transformed.

[Inspection process]
The detailed processing flow of the inspection processing (# S4) shown in FIG. 4 is shown in FIG. As shown in FIG. 5, in this inspection process, the operator confirmation process (# S10), the initial confirmation process (# S12), the blockage alarm confirmation process (# S13), and suction are applied to the gas inspection machine 70 to be inspected. The flow rate confirmation process (# S14) and the gas alarm confirmation process (# S15) are executed in order. Further, before executing the gas alarm confirmation process, specifically, in parallel with the execution of the initial confirmation process (# S12) to the suction flow rate confirmation process (# S14), the concentration stabilization process (# S11) is executed.
Hereinafter, details of various processes constituting these inspection processes will be described.

(Worker confirmation process)
In the worker confirmation process (# S10), the worker confirmation screen (see FIG. 6B) is displayed on the display 3. On this worker confirmation screen, inspection items that the worker should visually check are displayed, and the worker visually inspects the gas inspection machine 70 according to this display, and there is no problem. To operate the "Confirmation Complete" button displayed on the same screen. When the "confirmation completed" button is operated, the worker confirmation process (# S10) is terminated, and the worker confirmation screen (see FIG. 6 (b)) of the display 3 is displayed on the bump test screen (FIG. 6 (c)). (Refer to), and the execution of the next initial confirmation process (# S12) is started.

(Initial confirmation process)
FIG. 7 shows the operating state and gas flow state of various auxiliary machines in the initial confirmation process (# S12). In this initial confirmation process (# S12), auto-zero setting and battery level confirmation are performed.
In the auto zero setting, the switching state of the three-way valve V1 is set so that the air supply joint 5a to which the gas introduction portion 72 of the gas inspection machine 70 is connected is opened to the opening portion O1. Then, the gas inspection machine 70 is in a state of sucking the atmospheric OA from the gas introduction section 72 through the open section O1 and supplying the sucked atmospheric OA to the sensor section 76. In this state, the zero setting instruction is transmitted to the control unit 78 on the gas inspection machine 70 side, and the control unit 78 on the gas inspection machine 70 side receiving the zero setting instruction sets the output of the sensor unit 76 to zero. On the other hand, in the battery remaining amount confirmation, the battery remaining amount on the gas inspection machine 70 side is received from the control unit 78 of the gas inspection machine 70.
Then, when the auto zero setting and the battery remaining amount confirmation are completed, the fact that the above zero setting has been made and the battery remaining amount are displayed on the bump test screen (see FIG. 6C) displayed on the display 3, and then. This initial confirmation process (# S12) is terminated.

(Blockage alarm confirmation process)
FIG. 8 shows the operating state and gas flow state of various auxiliary machines in the blockage alarm confirmation process (# S13). In this blockage alarm confirmation process (# S13), the gas inspection machine 70 confirms whether or not there is an abnormality in the blockage alarm function that outputs a predetermined blockage alarm when the gas introduction unit 72 is blocked.
That is, in the blockage alarm confirmation process (# S13), the outflow of gas from the air supply joint 5a is blocked while the air supply joint 5a is connected to the gas introduction portion 72 of the gas inspection machine 70. The switching state of the three-way valves V1, V3, V4, V5 leading to the air supply joint 5a is set. Then, the state of the gas introduction unit 72 of the gas inspection machine 70 becomes a pseudo blockage state, and the presence or absence of the output of the blockage alarm by the blockage alarm function of the gas inspection machine 70 at that time is determined by the control unit 78 on the gas inspection machine 70 side. Confirm by communication of.

Then, when a blockage alarm is output as the gas outflow from the air supply joint 5a is shut off, it is determined that the blockage alarm function of the gas inspection machine 70 is operating normally. On the other hand, if the blockage alarm is not output due to the interruption of the gas outflow from the air supply joint 5a, it is determined that the blockage alarm function of the gas inspection machine 70 is not operating normally. Further, regarding the gas inspection machine 70 having an abnormality in the blockage alarm function in this way, the blockage abnormality in which the suction flow rate becomes substantially zero before having the suction flow rate abnormality in which the gas suction flow rate deviates from the appropriate flow rate range is observed. It can be judged that there is a possibility of having it.
Then, after displaying the presence or absence of abnormality in the blockage alarm function of the gas inspection machine 70 on the bump test screen (see FIG. 6C) displayed on the display 3, the blockage alarm confirmation process (# S13) is terminated. ..

Further, when the blockage alarm confirmation process (# S13) is completed, the next suction flow rate confirmation process (# S14) is executed only for the gas inspection machine 70 having no abnormality in the blockage alarm function. On the other hand, when it is determined that the blockage alarm function has an abnormality, it is abnormal as a comprehensive judgment in order to avoid unnecessary execution of the subsequent processing including the gas alarm confirmation processing (# S15) for the gas inspection machine 70. By displaying the fact (# S17) and ending the inspection process (# S4 in FIG. 4), the inspection process is rationalized.

(Suction flow rate confirmation process)
FIG. 9 shows the operating state and the gas flow state of various auxiliary machines in the suction flow rate confirmation process (# S14). In this suction flow rate confirmation process (# S14), it is confirmed whether or not there is a suction flow rate abnormality in which the gas suction flow rate from the gas introduction unit 72 of the gas inspection machine 70 deviates from the appropriate flow rate range.
That is, in the suction flow rate confirmation process (# S14), the switching state of the three-way valve V1 and the three-way valve V3 is set and opened with the air supply joint 5a connected to the gas introduction portion 72 of the gas inspection machine 70. The air supply joint 5a is opened to the atmosphere through an air opening path leading to the portion O2. Then, since the gas inspection machine 70 sucks the atmosphere OA from the gas introduction unit 72 through the air opening path, it is measured by the flow meter Mf1 (an example of the open flow rate measuring unit) provided in the atmosphere opening path. The gas flow rate is acquired as the gas suction amount of the gas inspection machine 70, and the presence or absence of an abnormality in the suction flow rate at which an appropriate gas suction flow rate cannot be secured in the gas inspection machine 70 is grasped.
Then, after displaying the presence or absence of the suction flow rate abnormality of the gas inspection machine 70 on the bump test screen (see FIG. 6C) displayed on the display 3, the suction flow rate confirmation process (# S14) is completed.

Further, when the suction flow rate abnormality confirmation process (# S14) is completed, the next gas alarm confirmation process (# S15) is executed only for the gas inspection machine 70 having no suction flow rate abnormality. On the other hand, when it is determined that the suction flow rate is abnormal, it is determined that the gas inspection machine 70 is abnormal as a comprehensive judgment in order to avoid unnecessary execution of the subsequent processing including the gas alarm confirmation processing (# S15). After displaying (# S17), the inspection process (# S4 in FIG. 4) is completed to rationalize the inspection process.

(Concentration stabilization treatment)
The operating state and gas flow state of various auxiliary machines in the concentration stabilization process (# S11) are shown in FIGS. 8 to 10. This concentration stabilization process (# S11) is accurate by supplying the inspection gas G1 whose flow rate and concentration are stable from the beginning of the subsequent gas alarm confirmation process (# S15) to the gas introduction unit 72 of the gas inspection machine 70. This is a process to be executed when the blockage alarm confirmation process (# S13) or the suction flow rate confirmation process (# S14) before the execution of the alarm confirmation process (# S15) is executed in order to obtain a detailed inspection result. It is executed in parallel with the execution of the initial confirmation process (# S12) to the suction flow rate confirmation process (# S14) (see FIGS. 8 and 9), and further, the inspection is performed even after the suction flow rate confirmation process (# S14) is executed. Until the flow rate and concentration of the gas G1 stabilize, the alarm confirmation process (# S15) is executed while waiting for the start of execution (see FIG. 10).

That is, in the concentration stabilization treatment (# S11), the inspection gas G1 generated by the dilution treatment by the dilution treatment means 6 described above is exhausted to the outside to stabilize the concentration of the inspection gas G1.
Specifically, by opening the two-way valve V7 and the flow rate adjusting valve V10 and setting the switching state of the three-way valve V8, the raw material gas G0 taken out from the gas container C1 (in this embodiment, stored in the gas container C1). The raw material gas G0 is used, but another gas container C2 may be used), and the pressure is stabilized by the pressure regulator R2 and then passed through the flow meter Mf2. And supplies it to the confluence B1. At the same time, by operating the pump P1 to open the two-way valve V11 and setting the switching state of the three-way valves V12 and V13, the atmospheric OA taken in from the open portion O3 is passed through the filter F3 and the flow meter Mf3. And supply it to the merging portion B1. As a result, in the confluence portion B1, the raw material gas G0 passed through the raw material gas path 6b provided with the flow meter Mf2 is diluted by the atmospheric OA passed through the atmospheric supply path 6a provided with the flow meter Mf3. The so-called dilution treatment is executed to generate the inspection gas G1.

Further, the flow rate of the raw material gas G0 supplied to the confluence B1 is controlled by adjusting the opening degree of the flow rate adjusting valve V10, while the flow rate of the atmospheric OA supplied to the confluence B1 is controlled by adjusting the output of the pump P1. Has been done. Then, by these controls, the flow rate and concentration of the inspection gas G1 are adjusted to a desired flow rate and concentration.
Then, in such a dilution process, the set flow rate of the raw material gas G0 set according to the dilution ratio of the raw material gas G0 corresponds to the dilution ratio so that the capacities of the gas containers C1 and C2 can be as small as possible. It is said that it is smaller than the set flow rate of the atmospheric OA set.
Then, in this concentration stabilization process (# S11), by setting the switching state of the three-way valves V4 and V5, the inspection gas G1 generated at the merging portion B1 is opened via the three-way valves V4 and V5. It is supplied to O4 and exhausted to the outside from the open portion O4. That is, the supply destination of the inspection gas G1 is configured so that the inspection gas G1 can be exhausted by switching from the air supply joint 5a on the gas inspection machine 70 side to the external open portion O4.

In this concentration stabilization process (# S11), by opening the two-way valves V2 and V6 while operating the pump P2, the ambient air taken in from the opening 59 of the adapter 50 is used as the exhaust EA from the opening O4. It is in a state of being discharged to the outside. That is, the inspection gas G1 exhausted to the outside through the open portion O4 is diluted with the ambient air taken in from the opening 59 of the adapter 50, and the inspection gas G1 is exhausted to the outside with a high concentration. Is being avoided.

Further, at the start of execution of the above-mentioned dilution treatment, that is, at the start of execution of this concentration stabilization treatment (# S11), the opening degree of the flow rate adjusting valve V10 is temporarily increased to increase the flow rate of the raw material gas G0. Set more than the set flow rate according to the dilution ratio of the raw material gas G0. As a result, the concentration of the inspection gas G1 generated at the confluence B1 rises early and reaches an appropriate concentration, and as a result, the alarm confirmation process (# S15) is waiting to be started. The execution time of the concentration stabilization process (# S11) can be made as short as possible.

Further, as shown in FIG. 9, while the concentration stabilization process (# S11) is executed while waiting for the start of execution of the alarm confirmation process (# S15), the same as the initial confirmation process (# S12) described above. By opening the air supply joint 5a to which the gas introduction portion 72 of the gas inspection machine 70 is connected to the opening portion O1, the gas inspection machine 70 releases the atmosphere OA from the gas introduction portion 72 through the opening portion O1. Try to suck.

(Gas alarm confirmation process (dilution process))
FIG. 11 shows the operating state and the gas flow state of various auxiliary machines in the gas alarm confirmation process (# S15) when the dilution process is performed. In this gas alarm confirmation process (# S15), the inspection gas generated by the gas introduction section 72 of the gas inspection machine 70 is diluted through the branch section B2 which is the gas supply section and the air supply joint 5a. G1 is supplied and it is confirmed whether or not there is an abnormality in the gas alarm function of the gas inspection machine 70.
In this gas alarm confirmation process (# S15), the inspection gas G1 diluted in the atmospheric OA that has not been dried by the dilution process is supplied to the gas inspection machine 70, so that the sensor of the gas inspection machine 70 The part 76 is maintained in a state similar to that of a normal atmospheric OA containing a moderate amount of moisture without being excessively dried, and operates under the same conditions as during normal use.

That is, in the gas alarm confirmation process (# S15) shown in FIG. 11, the three-way valve V4 is set by setting the switching state of the three-way valves V1, V4, V5 from the state of the concentration stabilization process (# S11) in FIG. The inspection gas G1 supplied to the gas inspection machine 70 is supplied to the gas introduction unit 72 of the gas inspection machine 70 via the branch portion B2 as the gas supply unit and the air supply joint 5a, and the inspection gas is supplied to the gas inspection machine 70. G1 is sucked. Then, the gas inspection machine 70 will introduce the inspection gas G1 containing a specific component from the gas introduction unit 72, and at that time, the gas alarm function of the gas inspection machine 70 operates normally and outputs a gas alarm. Whether or not it is confirmed by communication with the control unit 78 on the gas inspection machine 70 side, and whether or not there is an abnormality in the gas alarm function of the gas inspection machine 70 is confirmed.
Then, after displaying the presence or absence of abnormality in the gas alarm function of the gas inspection machine 70 on the bump test screen (see FIG. 6C) displayed on the display 3, the alarm confirmation process (# S15) is terminated.

Further, in the gas alarm confirmation process (# S15) shown in FIG. 11, the inspection gas G1 that is larger than the gas suction flow rate of the gas inspection machine 70, that is, the suction flow rate of the suction pump 75 on the gas inspection machine 70 side is the gas inspection machine. It is supplied to the branch portion B2 which is a gas supply portion leading to the gas introduction portion 72 of the 70. Then, the inspection gas G1 that has not been sucked into the gas introduction portion 72 of the gas inspection machine 70 is present, but the inspection gas G1 is discharged to the outside from the opening portion O4 via the three-way valve V5. As a result, the gas inspection machine 70 sucks the inspection gas G1 without shortage, and further maintains the suction flow rate at an appropriate suction flow rate regardless of the supply flow rate of the inspection gas G1 on the system main body 1 side. Therefore, it will operate under the same conditions as during normal use.

Further, when the gas alarm confirmation process (# S15) is completed, for the gas inspection machine 70 having no gas alarm abnormality, the previous blockage alarm confirmation process (# S13) and the suction flow rate confirmation process (# S14) are performed. Since it was also normal in the above, the inspection process (# S4 in FIG. 4) is terminated after displaying that it is normal as a comprehensive judgment (# S16). On the other hand, when it is determined that there is a gas alarm abnormality, the inspection process (# S4 in FIG. 4) is terminated after displaying that the abnormality is present as a comprehensive judgment (# S17).

(Gas alarm confirmation process (non-dilution process))
The gas alarm confirmation process (# S15) shown in FIG. 11 described above is a case where the raw material gas G0 taken out from the gas container C1 is diluted with atmospheric OA to generate the inspection gas G1. Instead of this diluting process, a gas alarm confirmation process can be performed when a non-diluted process of using the raw material gas G0 taken out from the gas container C1 as an inspection gas without diluting it as it is is performed. Add a detailed explanation.
In this gas alarm confirmation process (# S15), since the raw material gas G0 is used as it is as the inspection gas, the above-mentioned concentration stabilization process (# S11) is omitted.

FIG. 13 shows the operating state and the gas flow state of various auxiliary machines in the gas alarm confirmation process (# S15) when the non-dilution process is performed. In this gas alarm confirmation process (# S15), the gas introduction section 72 of the gas inspection machine 70 is subjected to a non-diluted process through the branch section B2 and the air supply joint 5a, which are gas supply sections, to produce gas as inspection gas. The raw material gas G0 taken out from the container C1 is supplied, and the presence or absence of abnormality in the gas alarm function of the gas inspection machine 70 is confirmed.

That is, in the gas alarm confirmation process (# S15) shown in FIG. 13, the operation of the pump P1 is stopped and the three-way valve V13 is closed to stop the intake of atmospheric OA from the opening portion O3. At the same time, by opening the flow rate adjusting valve V10 and setting the switching state of the three-way valve V8, the raw material gas G0 taken out from the gas container C1 is diluted by the pressure regulator R2 after stabilizing the pressure. In the process, the gas is passed through the air supply path 6a on the flow meter Mf3 side through which the atmospheric OA passes, and is supplied to the confluence portion B1 as an inspection gas. Then, the raw material gas G0 is supplied to the branch portion B2 as the gas supply unit for supplying the inspection gas to the gas introduction unit 72 of the gas inspection machine 70 and the air supply joint 5a.
As a result, when the raw material gas G0 is used as it is as the inspection gas, even if the flow rate of the raw material gas G0 becomes a relatively large flow rate corresponding to the required flow rate of the inspection gas, the raw material gas G0 can be used as described above. In the dilution process, a relatively large flow rate of the atmospheric OA is passed through the air supply path 6a corresponding to the relatively large flow rate, and for example, the flow rate of the raw material gas G0 is measured by a flow meter Mf3 corresponding to the relatively large flow rate. can do. On the other hand, in the above dilution treatment, the raw material gas supply path on the flow meter Mf2 side through which the raw material gas G0 having a relatively small flow rate passes is configured to be relatively simple and compact corresponding to only a small flow rate, for example, the flow rate. As the total Mf2, one corresponding to a relatively small flow rate is used.

The above is the detailed processing flow of the inspection process (# S4) in the inspection process method shown in FIG. 4, and after the execution of the inspection process (# S4), the next inspection target gas inspection machine 70 belonging to the same group If (# S5) exists, the gas inspection machine 70 to be inspected is changed in the same group, and the inspection process (# S4) is executed for the changed gas inspection machine 70. At that time, when the inspection gas G1 generated by the dilution process is used, the generated inspection gas G1 is temporarily passed through the three-way valves V4 and V5 when the inspection target is changed within the same group. The dilution process is continued in the form of supplying the gas to the open portion O4 and exhausting the gas. As a result, the concentration stabilization process at the time of changing the inspection target is omitted, and the time required for the change is shortened.

When shifting to the inspection process of the next gas inspection machine 70 to be inspected belonging to the same group, the predetermined first cleaning process (# S8) is executed, and the inspection process of the gas inspection machine 70 in the same group is executed. When all of the above are completed, a predetermined second cleaning process (# S9) is executed.

[Cleaning process]
In the first cleaning process (# S8) to be executed when shifting to the inspection process of the next gas inspection machine 70 to be inspected belonging to the same group, the gas introduction unit 72 of the gas inspection machine 70 is made to introduce the atmospheric OA. Cleaning of the gas inspection machine 70 (hereinafter referred to as "gas inspection machine cleaning") is performed.
On the other hand, in the second cleaning process (# S6), which is executed when all the inspection processes of the gas inspection machine 70 in the same group are completed, in addition to the gas inspection machine cleaning, the inspection gas G1 or the raw material gas as a raw material thereof is used. Atmospheric OA is passed through the gas path through which G0 passes to clean the gas path (hereinafter referred to as "gas path cleaning").
Note that FIG. 12 shows the operating state and the gas flow state of various auxiliary machines when the gas path cleaning and the gas inspection machine cleaning are performed at the same time.

(Gas path cleaning)
Specifically, in the gas path cleaning, the supply of the raw material gas G0 from the gas container C1 is stopped by closing the flow rate adjusting valve V10 from the state of the gas alarm confirmation process (# S15) in FIG. The switching state of the three-way valves V8 and V13 is set, and the atmospheric OA taken in from the open portion O3 is passed through the raw material gas G0 in the gas alarm confirmation process (# S15) or the like. Let it flow through. As a result, the raw material gas G0 remaining in the raw material gas path 6b is replaced with the atmospheric OA, and the raw material gas path 6b is cleaned.

Further, the atmospheric OA after passing through the raw material gas path 6b passes through the inspection gas path 6c from the confluence portion B1 to the branch portion B2 through which the inspection gas G1 has passed in the gas alarm confirmation process (# S15) or the like. Pass through. As a result, the inspection gas G1 remaining in the inspection gas path 6c is replaced with OA in the atmosphere, and the inspection gas path 6c is cleaned.
Then, by executing such gas path cleaning, in the inspection process for the next inspection target gas inspection machine 70, erroneous inspection due to the inspection gas G1 and the raw material gas G0 remaining in the gas path can be avoided. ..
In this gas path cleaning, the atmospheric OA supplied to the branch portion B2 after passing through the raw material gas path 6b and the inspection gas path 6c passes through the open portion O4 by setting the switching state of the three-way valves V1 and V5. Is exhausted to the outside.

In the gas path cleaning executed after the gas alarm confirmation process (# S15) in the case of performing the non-dilution treatment shown in FIG. 11, the path through which the raw material gas G0 flows in the gas gas alarm confirmation process (# S15) It is desirable to allow atmospheric OA to pass through. That is, by setting the switching state of the three-way valves V13, V8, and V12, the atmospheric OA taken in from the open portion O3 is supplied from the three-way valve V13 to the gas path 6b side, and the atmospheric OA is supplied from the three-way valve V8 to the three sides. It is returned to the valve 12 side and passed through the air supply path 6a on the downstream side of the three-way valve 12. As a result, in the gas alarm confirmation process (# S15) when the non-dilution treatment is performed, the raw material gas G0 remaining in the path through which the raw material gas G0 has passed is replaced with the atmospheric OA, and the path is cleaned. Become.

Further, in the gas path cleaning, when the gas inspection machine cleaning executed at the same time is completed, the switching state of the three-way valve V1 is set, and the atmospheric OA in the branch portion B2 is supplied to the three-way valve V1 side. Then, the inspection gas G1 and the raw material gas G0 remaining in the path from the branch portion B2 to the three-way valve V1 are replaced with the atmospheric OA, and the path is cleaned.

(Gas inspection machine cleaning)
On the other hand, in the gas inspection machine cleaning, as in the initial confirmation process (# S12) described above, the gas is opened to the opening portion O1 by opening the air supply joint 5a to which the gas introduction portion 72 of the gas inspection machine 70 is connected. An atmospheric OA taken in from the open portion O1, that is, a fresh atmospheric OA different from the one that has passed through the gas path is introduced into the gas introduction section 72 of the inspection machine 70. Then, the atmospheric OA is introduced into the gas inspection machine 70 via the gas introduction unit 72, and passes through the sensor unit 76. As a result, the inspection gas G1 remaining in the gas introduction unit 72 and the sensor unit 76 on the gas inspection machine 70 side is replaced with the atmospheric OA, and the gas inspection machine 70 is cleaned.
The cleaning of the gas inspection machine ends when it is determined from the output signal of the sensor unit 76 of the gas inspection machine 70 that the concentration of the specific component in the introduced gas has become substantially zero.

Then, by executing such cleaning of the gas inspection machine, when the gas inspection machine 70 is used immediately after the inspection process, erroneous detection caused by the inspection gas G1 remaining in the gas introduction unit 72 or the like is avoided.
In this gas inspection machine cleaning, the exhaust EA discharged from the exhaust portion 77 of the gas inspection machine 70 is taken in together with the ambient air from the opening 59 and discharged to the outside from the opening portion O4 via the exhaust joint 5b. To. This prevents the exhaust EA from being discharged from the front surface on the accommodating portion 5 side. Further, the exhaust EA sucked from the opening 59 is discharged together with the atmospheric OA after passing through the raw material gas path 6b and the inspection gas path 6c by the gas path cleaning. This simplifies the exhaust path for gas inspection machine cleaning and gas path cleaning.
It should be noted that these exhaust EA and atmospheric OA may be discharged to the outside separately.

In the present embodiment, the gas path cleaning and the gas inspection machine cleaning are configured to be performed in different atmospheric OA, but for example, the atmosphere passing through the gas path is introduced into the gas inspection machine 70, respectively. The cleaning may be configured to be performed in the same atmosphere.

[Another Embodiment]
(1) In the above embodiment, in addition to the inspection process (# S4) and the gas alarm confirmation process (# S15) when the dilution process is performed before and after the inspection process, various processes are executed. Other processes may be omitted or modified as appropriate.
Further, regarding the details of the gas alarm confirmation process (# S15) when performing these dilution processes, the configuration of the above-described embodiment does not substantially limit the scope of rights of the present invention, and may be appropriately modified. Absent.

(2) In the above embodiment, the gas inspection machine 70 is configured to be accommodated in the accommodating portion 5 by interposing an adapter 50 detachably attached to the accommodating portion 5, but the adapter 50 is omitted and the accommodating portion is used. By adapting 5 to the model of the gas inspection machine 70, the gas inspection machine 70 may be configured to be directly accommodated in the accommodating portion 5.

2a Inspection processing means 2b Adapter identification information acquisition means 2c Gas inspection machine identification information acquisition means 5 Containment section 5a Air supply joint (gas supply section)
5b Exhaust fitting (exhaust suction part)
6 Dilution processing means 50 Adapter 53 Communication unit 56 Exhaust guide path 59 Opening 60 Gas inspection machine storage unit 61 Air supply guide path 70 Gas inspection machine 72 Gas introduction unit 77 Exhaust unit 79 Communication unit 100 Inspection processing system B2 Branch (gas) Supply department)
C1, C2 gas container Mf1 flow meter (open flow rate measuring unit)

Claims (4)

For a gas inspection machine having a gas alarm function that outputs a predetermined gas alarm according to the state of a specific component in the introduced gas introduced from the gas introduction part, the gas introduction part of the gas inspection machine is connected to the gas introduction part via the gas supply part. It is an inspection processing method of a gas inspection machine that supplies inspection gas and executes a gas alarm confirmation processing for confirming whether or not there is an abnormality in the gas alarm function of the gas inspection machine.
The gas inspection machine is configured as a suction type that sucks the introduced gas from the gas introduction portion.
The raw material gas taken out from the gas container is diluted with the atmosphere to generate the inspection gas.
In the gas alarm confirmation process, the inspection gas that is larger than the gas suction flow rate of the gas inspection machine is supplied to the gas supply unit, and the inspection gas that is not sucked into the gas introduction unit of the gas inspection machine is exhausted. Inspection processing method of gas inspection machine. For a gas inspection machine having a gas alarm function that outputs a predetermined gas alarm according to the state of a specific component in the introduced gas introduced from the gas introduction part, the gas introduction part of the gas inspection machine is connected to the gas introduction part via the gas supply part. It is an inspection processing method of a gas inspection machine that supplies inspection gas and executes a gas alarm confirmation processing for confirming whether or not there is an abnormality in the gas alarm function of the gas inspection machine.
The raw material gas taken out from the gas container is diluted with the air taken in from the open portion opened to the outside to generate the inspection gas.
The raw material gas path through which the raw material gas taken in from the gas container flows, the atmospheric supply path through which the air taken in from the open portion opened to the outside passes, and the raw material gas path and the atmospheric supply path merge. An inspection gas path from the merging part to the gas supply part to which the gas introduction part of the gas inspection machine is connected is provided.
While supplying the raw material gas taken out from the gas container to the confluence from the raw material gas path, the air taken in from the open portion is supplied to the confluence from the air supply path, and the raw material gas is supplied to the confluence at the confluence. While executing the diluting process of diluting to generate the inspection gas, the gas alarm confirmation process is executed, and the inspection gas generated at the confluence is taken from the confluence through the inspection gas path. Inspection processing method for gas inspection machines supplied to the gas supply section . For a gas inspection machine having a gas alarm function that outputs a predetermined gas alarm according to the state of a specific component in the introduced gas introduced from the gas introduction part, the gas introduction part of the gas inspection machine is connected to the gas introduction part via the gas supply part. It is an inspection processing method of a gas inspection machine that supplies inspection gas and executes a gas alarm confirmation processing for confirming whether or not there is an abnormality in the gas alarm function of the gas inspection machine.
The raw material gas taken out from the gas container is diluted with the atmosphere to generate the inspection gas.
In the dilution treatment, the raw material gas is passed through the raw material gas path, an atmosphere having a larger flow rate than the raw material gas is passed through the air supply path, and the raw material gas flowing through the raw material gas path is passed through the atmospheric supply path. Dilute with air flowing through the supply path,
When, instead of the dilution treatment, a non-dilution treatment of the raw material gas taken out from the gas container as the inspection gas is performed without diluting the raw material gas as it is, the raw material gas is used as the gas via the air supply path. Inspection processing method for gas inspection machines supplied to the supply section . Claims 1 to 3 for executing a concentration stabilization process for stabilizing the concentration of the inspection gas by exhausting the inspection gas generated in the dilution process to the outside before executing the gas alarm confirmation process. The inspection processing method for the gas inspection machine according to any one item .

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