JP6627077B2 - Control data calibration method and component mounting apparatus - Google Patents

Description

  The present invention relates to a control data calibration method and a component mounting apparatus.

  2. Description of the Related Art In the field of mounting, there is widely known a component mounting apparatus for mounting a component on a substrate by moving a mounting head holding components in a horizontal direction. As a means for moving the mounting head, a moving mechanism composed of a horizontal X-axis beam extending in a horizontal X-axis direction and a Y-axis beam extending in a Y-axis direction orthogonal to the X-axis direction and a horizontal plane is used in many component mounting apparatuses. It has been adopted in. The mounting head is provided movably in the X-axis direction with respect to the X-axis beam, and the X-axis beam is provided movably in the Y-axis direction with respect to the Y-axis beam.

  In the above-described component mounting apparatus, there may be a case where a deviation occurs between the actual position of the mounting head and the position specified on the control data due to distortion of each beam, assembling error, and the like. In order to cancel such a deviation and appropriately perform the movement control of the mounting head, so-called calibration for calibrating control data is executed at the time of manufacturing, installing, or performing maintenance of the equipment. More specifically, a calibration board provided with a plurality of calibration marks is transported and positioned by using a substrate transport mechanism, and a plurality of calibration marks are moved by a camera (imaging unit) that moves integrally with the mounting head. Are sequentially imaged. The control unit of the component mounting apparatus obtains a deviation amount between the actual position of the calibration mark and the position of the camera on the control data by recognizing the captured image, and calibrates the control data based on the deviation amount. .

  In the control data calibration method described above, it is possible to calibrate only the control data in the area within the plane of the calibration substrate where the calibration mark exists, and to calibrate the control data in the area outside the plane of the calibration substrate. could not. Conventionally, when a component mounting apparatus is of a so-called dual type in which a plurality of X-axis beams are provided, and a mounting head and a camera are mounted for each X-axis beam, an out-of-plane of the calibration substrate is used by using these mounting heads. A method of calibrating the control data in the region (1) has been proposed (for example, see Patent Document 1). In Patent Document 1, one mounting head having a plate-type gauge having a calibration mark is moved to an area outside the plane of the calibration substrate, and the calibration head is provided by a camera provided corresponding to the other mounting head. A component mounting apparatus for calibrating control data by imaging a mark is disclosed. According to this method, since the calibration mark can be positioned in an area outside the plane of the calibration substrate, the control data of the mounting head in the area can be calibrated.

Japanese Patent No. 5338767

  However, in the related art including Patent Literature 1, when a distortion or the like occurs in the X-axis beam for moving one of the mounting heads to which the plate-type gauge is attached, the calibration mark on the plate-type gauge is placed on the calibration substrate. The position deviates from the normal position to be aligned in the out-of-plane region. Therefore, even if the calibration mark of the plate-type gauge is imaged by a camera corresponding to the other mounting head, and the control data is calibrated based on the acquired captured image, the control data significantly lacks accuracy. As described above, the calibration of the control data using a plurality of beams for moving the mounting head and the camera lacks accuracy, and the movement control of the mounting head cannot be performed with high accuracy, and the mounting accuracy of the components is reduced. was there.

  Accordingly, an object of the present invention is to provide a control data calibration method and a component mounting apparatus capable of accurately calibrating control data.

The control data calibration method of the present invention includes a mounting head that mounts components on a board positioned at a work position, and a mounting head that extends in a first direction parallel to a board transport direction and moves the mounting head in the first direction. A first beam to be moved, a second beam extending in a second direction orthogonal to the first direction in a horizontal plane and moving the first beam in the second direction, and positioning at the working position. And an image pickup means for picking up an image of the substrate and moving the mounting head together with the mounting head, wherein the movement control of the mounting head along the first beam and the first control along the second beam are performed. A method of calibrating control data for calibrating control data obtained by combining beam movement control of a plurality of beams, comprising a plurality of calibrations provided along a first direction and a second direction of a calibration substrate. A first calculating step of calculating a displacement amount, which is an error generated between the center of the calibration mark and the actually measured value, based on an actually measured value obtained by sequentially imaging the calibration mark, and the first calculating step. Based on the amount of displacement, an in-plane region that is an in-plane region of the calibration substrate, and a slope with respect to an approximate straight line of the amount of displacement in an out-of-plane region that is a region set outside the in-plane region. A second calculation step of calculating an intercept, and a shape formed from the displacement amount calculated in the first calculation step, a slope calculated in the second calculation step, and the displacement amount formed by the intercept. A beam shape deriving step of deriving a shape of the first beam based on an approximate straight line; and an in-plane region based on the shape of the first beam derived in the beam shape deriving step; In the area including the outside area Including a calibration value calculation step of calculating a calibration value of the control data of the serial mounting head.
Also, a control data calibration method according to the present invention includes a mounting head for mounting components on a substrate positioned at a work position, and a first head extending in a first direction and moving the mounting head in the first direction. Imaging the substrate, a second beam extending in a second direction intersecting the first direction, and moving the first beam in the second direction, and mounting the substrate positioned at the working position. In a component mounting apparatus including: an imaging unit that moves together with a head, a combination of movement control of the mounting head along the first beam and movement control of the first beam along the second beam is combined. A method of calibrating control data for calibrating control data, the method comprising sequentially imaging a plurality of calibration marks provided on the calibration substrate along the first direction and the second direction. A first calculation step of calculating a displacement amount, which is an error generated between the center of the calibration mark and the measured value, based on the actually measured value, and the calibration based on the displacement amount calculated in the first calculation step. Second calculation for calculating the slope and intercept of the approximate straight line of the displacement amount in an in-plane area that is an area in the plane of the substrate for use and an out-of-plane area that is an area set outside the in-plane area. A step formed based on a shape formed from the displacement calculated in the first calculation step and an approximate straight line of the displacement calculated in the slope and intercept calculated in the second calculation step. A beam shape deriving step of deriving a first beam shape, and the in-plane area and the area in the area including the out-of-plane area, based on the shape of the first beam derived in the beam shape deriving step. Mounting head control data Including a calibration value calculation step of calculating a calibration value.

A component mounting apparatus according to the present invention includes a mounting head that mounts components on a substrate positioned at a work position, and a mounting head that extends in a first direction parallel to a substrate transport direction and moves the mounting head in the first direction. One beam, a second beam extending in a second direction orthogonal to the first direction in a horizontal plane and moving the first beam in the second direction, and a substrate positioned in the working position An image pickup unit having an imaging field directed to the side and movable with the mounting head, wherein the movement control of the mounting head along the first beam and the movement of the first beam along the second beam A component mounting apparatus for mounting the component held by the mounting head on a substrate by moving the mounting head based on control data obtained by combining control, wherein the first direction and the second direction of the calibration substrate are provided. In the direction A first calculator for calculating a displacement amount, which is an error generated between the center of the calibration mark and the actually measured value, based on an actually measured value obtained by sequentially imaging a plurality of calibration marks provided in the above-described manner; based on the displacement amount calculated in the first calculation unit, said in the the region in which the surface area in the plane of the calibration substrate, than the surface area which is an area that is set outward plane area A second calculator for calculating a slope and an intercept with respect to the approximate line of the displacement, a shape formed from the displacement calculated by the first calculator and a slope and an intercept calculated by the second calculator; A beam shape deriving unit that derives the shape of the first beam based on the approximated straight line of the displacement amount, and the in-plane shape based on the shape of the first beam that is derived in the beam shape deriving unit. In the region and the region including the out-of-plane region A calibration value calculation unit for calculating a calibration value of the control data of the mounting head, comprising a.
Also, the component mounting apparatus of the present invention includes a mounting head that mounts components on a substrate positioned at a work position, a first beam that extends in a first direction and moves the mounting head in the first direction, A second beam extending in a second direction intersecting the first direction and moving the first beam in the second direction; and mounting the imaging field toward the substrate positioned at the work position. Imaging means movable with the head, based on control data that combines movement control of the mounting head along the first beam and movement control of the first beam along the second beam. A component mounting apparatus that mounts components held by the mounting head on a substrate by moving the mounting head over the substrate, the plurality of components being provided along the first direction and the second direction of the calibration substrate. Calibration A first calculator for calculating a displacement amount, which is an error generated between the center of the calibration mark and the actually measured value, based on actually measured values obtained by sequentially imaging the marks; and a displacement calculated by the first calculator. Based on the amount, the slope and intercept of the approximate straight line of the displacement amount in an in-plane region that is an in-plane region of the calibration substrate and an out-of-plane region that is a region set outside the in-plane region. And a shape formed from the displacement calculated by the first calculator and an approximate straight line of the displacement calculated by the slope and intercept calculated by the second calculator. A beam shape deriving unit that derives the shape of the first beam based on the first beam shape, and an in-plane region and the out-of-plane region based on the shape of the first beam derived by the beam shape deriving unit. Of the control data of the mounting head in the area A calibration value calculation unit for calculating a positive value, with a.

  According to the present invention, control data can be accurately calibrated.

FIG. 1 is a plan view of a component mounting apparatus according to an embodiment of the present invention. FIG. 1 is a side view of a component mounting apparatus according to an embodiment of the present invention. FIG. 1 is a block diagram showing a configuration of a control system of a component mounting apparatus according to an embodiment of the present invention. FIG. 3 is an image diagram of a trajectory (curve R) when the mounting head 12 is moved in the X-axis direction for each predetermined y coordinate and a straight line L obtained by linearly approximating the trajectory (straight line L) according to the embodiment of the present invention. FIG. 1 is a plan view of a calibration substrate according to an embodiment of the present invention. Flowchart of calibration method according to one embodiment of the present invention (A) (b) Operation explanatory diagram of the calibration method in one embodiment of the present invention FIG. 1 is a plan view of a calibration substrate according to an embodiment of the present invention. The figure which shows the imaging visual field of the board | substrate recognition camera with which the component mounting apparatus in one Embodiment of this invention is provided. FIG. 1 is a plan view of a component mounting apparatus according to an embodiment of the present invention. FIG. 1 is a plan view of a calibration substrate according to an embodiment of the present invention. (A) A diagram showing the distribution of the slope m obtained for each row in one embodiment of the present invention. (B) A diagram showing the distribution of the intercept b obtained for each row in one embodiment of the present invention. (A) A diagram showing a relationship between a displacement amount Δx in a predetermined row and a value of each column (b) A diagram showing a relationship between a calculated difference amount and a value of each column in a predetermined row FIG. 1 is a plan view of a component mounting apparatus according to an embodiment of the present invention. The figure which shows the distribution of the displacement amount x (average value) in one Embodiment of this invention. FIG. 1 is a plan view of a calibration substrate according to an embodiment of the present invention. (A) (b) Image diagram showing the shape of the X-axis beam provided in the component mounting apparatus according to one embodiment of the present invention.

  First, a component mounting apparatus according to an embodiment of the present invention will be described with reference to FIGS. The component mounting apparatus 1 has a function of mounting the component 3 (FIG. 2) on the board 2 and forms a component mounting system together with other devices and a host computer connected via a communication network (not shown). Hereinafter, a direction parallel to the transport direction of the substrate 2 is an X-axis direction (first direction), a direction orthogonal to the X-axis direction in a horizontal plane is a Y-axis direction (second direction), and is orthogonal to the XY plane. The direction is defined as a Z-axis direction.

  Substrate transport mechanism 5 is arranged at substantially the center of base 4 in the Y-axis direction. The substrate transport mechanism 5 includes a pair of transport rails extending in parallel in the X-axis direction, and transports the substrate 2 in the X-axis direction and positions the substrate 2 at a predetermined work position. On both sides of the substrate transport mechanism 5 in the Y-axis direction, component supply units 6 are arranged. In the component supply unit 6, a plurality of tape feeders 7 are arranged in parallel in the X-axis direction. The tape feeder 7 intermittently feeds the component 3 held on the carrier tape and supplies the component 3 to a component take-out position by the mounting head 12 described later.

  At both ends in the X-axis direction of the base 4, long Y-axis beams (second beams) 8 extending in the Y-axis direction are provided. Two Y-axis beams (first beams) 9 extending in the X-axis direction are laid on the Y-axis beam 8 so as to be movable in the Y-axis direction. An L-shaped head mounting member 11 movable in the X direction is mounted on each of the two X-axis beams 9, and a mounting head 12 is mounted on the head mounting member 11. The Y-axis beam 8 moves the X-axis beam 9 in the Y direction, and the X-axis beam 9 moves the mounting head 12 together with the head mounting member 11 in the X-axis direction. The Y-axis beam 8 and the X-axis beam 9 constitute a head moving mechanism 10 for moving the mounting head 12 in the horizontal direction.

  The mounting head 12 includes a plurality of unit mounting heads. In FIG. 2, a suction nozzle 13 capable of sucking the component 3 is mounted at the lower end of the unit mounting head. The suction nozzle 13 moves in the Z-axis direction, that is, moves up and down by driving a nozzle elevating mechanism 14 (FIG. 3) built in the mounting head 12. By driving the head moving mechanism 10 and the nozzle elevating mechanism 14, the mounting head 12 sucks and picks up the component 3 supplied by the tape feeder 7 by the suction nozzle 13, and mounts the component 3 on the substrate 2 positioned at a predetermined work position. 3 is implemented.

  In FIGS. 1 and 2, a substrate recognition camera (imaging unit) 15 is provided on the lower surface of the head mounting member 11, with the imaging visual field directed downward on the side of the substrate 2 positioned at the work position. The board recognition camera 15 is movable with the mounting head 12 by driving the X-axis beam 9. The board recognition camera 15 images a pair of board marks 2a (FIG. 1) formed on the board 2 positioned at the work position. A component recognition camera 16 is provided between the substrate transport mechanism 5 and the tape feeder 7. When the mounting head 12 that has taken out the component 3 supplied by the tape feeder 7 moves above the component recognition camera 16, the component recognition camera 16 captures an image of the component 3 sucked by the suction nozzle 13 from below. The imaging data of the board 2 and the component 3 is used when correcting the position of the mounting head 12 at the time of component mounting.

  Next, the configuration of the control system will be described with reference to FIG. The control unit 20 included in the component mounting apparatus 1 includes a storage unit 21, a mechanism driving unit 22, a recognition processing unit 23, and a calibration execution unit 24. Further, the control unit 20 is connected to the substrate transport mechanism 5, the tape feeder 7, the head moving mechanism 10, the mounting head 12, the nozzle elevating mechanism 14, the substrate recognition camera 15, the component recognition camera 16, and the like.

  The storage unit 21 stores production data and the like necessary for producing the board 2 on which the components 3 are mounted. The production data includes control data (control parameters) 21 a necessary for controlling the movement of the mounting head 12. The control data 21 a is data obtained by combining movement control of the mounting head 12 along the X-axis beam 9 and movement control of the X-axis beam 9 along the Y-axis beam 8.

  The mechanism driving section 22 is controlled by the control section 20 to drive the substrate transport mechanism 5, the tape feeder 7, the head moving mechanism 10, the mounting head 12, and the nozzle elevating mechanism 14. Thereby, the operation of transporting the substrate 2 and the operation of mounting the component 3 are performed. The head moving mechanism 10 is driven based on the control data 21a, and moves the mounting head 12 in the horizontal direction. Thus, the mounting head 12 takes out the component 3 from the tape feeder 7 and mounts the component 3 on the substrate 2 positioned at a predetermined work position. As described above, the component mounting apparatus 1 mounts the component 3 held by the mounting head 12 on the board 2 by moving the mounting head 12 based on the control data 21a.

  The recognition processing unit 23 recognizes the image data acquired by the board recognition camera 15 and the component recognition camera 16 to detect the board 2 positioned at the work position and the component 3 held by the mounting head 12. The detection results of the board 2 and the component 3 are used when the mounting head 12 is positioned with respect to the board 2 when the component 3 is mounted.

  The calibration execution unit 24 executes calibration according to various members constituting the component mounting apparatus 1, and measures measured values as an internal processing mechanism, a first calculation unit 24b, a second calculation unit 24c, and a beam. It is configured to include a shape deriving unit 24d and a calibration value calculating unit 24e. Calibration refers to a calibration operation for correcting inherent variations and mounting errors of various members constituting the component mounting apparatus 1, and is performed at the time of manufacturing, installation, or maintenance of equipment.

  For example, since the Y-axis beam 8 and the X-axis beam 9 are long members, distortion may occur due to processing accuracy or assembly of various components. Here, the position of the mounting head 12 grasped when the control unit 20 controls the mounting head 12 is a position defined on the control data 21a. Therefore, when the Y-axis beam 8 or the X-axis beam 9 is distorted, an error occurs between the position of the mounting head 12 on the control data 21a and the actual position of the mounting head 12 shown in the machine coordinate system. . Therefore, in order to mount the component 3 accurately, it is necessary to calibrate the control data 21a so as to cancel the error. The calibration executing unit 24 performs an operation necessary for obtaining a calibration value of the control data 21a based on the shapes of the Y-axis beam 8 and the X-axis beam 9.

  Next, the shape and inclination of the X-axis beam 9 will be described in detail with reference to FIG. FIG. 4 is an image diagram of a trajectory (curve R) when the mounting head 12 is moved in the X-axis direction for each predetermined y coordinate and a straight line L obtained by linearly approximating the trajectory (curve R). The curve R has a shape affected by the distortion between the X-axis beam 9 and the Y-axis beam 8, and the straight line L is a linear approximation of the curve R (to a straight line). The received shape. Here, when each curve R in FIG. 4 is overlapped with a straight line L, the shape of each curve R substantially matches. That is, unless the shape of the X-axis beam 9 is affected by the distortion of the Y-axis beam 8, the shape tends to remain unchanged, and the shape of the X-axis beam 9 is affected only by the distortion of the Y-axis beam 8. The shape (straight line L) and the shape affected by only the distortion of the X-axis beam 9 (curve R obtained by superimposing each curve R on the straight line L) can be separated. Note that a straight line L indicated by a broken line indicates that the corresponding X-axis beam 9 is at a position deviated from above the substrate 2 positioned at the working position. Here, when the control data 21a is calibrated using only the board recognition camera 15 that moves the X-axis beam 9 in order to solve the above-described problem, the following problems occur. In the area where the mounting head 12 that moves the X-axis beam 9 mounts the component 3 on the board 2, there is an area that cannot be imaged by the board recognition camera 15 that moves the X-axis beam 9. Cannot obtain the shape of the X-axis beam 9. Under such circumstances, the inventor calibrates the control data 21a based on the relationship between the curve R and the straight line L, including an area that cannot be imaged by the board recognizing camera 15 that moves the X-axis beam 9, based on the above relationship. I thought.

  When the calibration is executed to obtain the calibration value of the control data 21a, the calibration substrate 17 shown in FIG. 5 is used. The calibration substrate 17 is a plate-like member that can be transported by the substrate transport mechanism 5 and has the same outer diameter as the substrate 2. On the upper surface of the calibration substrate 17, a plurality of calibration marks M are provided in the X-axis direction and the Y-axis direction in a lattice arrangement of pitches px and py, respectively. For convenience, a direction parallel to the transport direction (X-axis direction) of the substrate 2 is defined as a column direction, and a direction orthogonal to the column direction in a horizontal plane (Y-axis direction) is defined as a row direction. Also, in FIG. 5, the first column, the second column,..., The twelfth column are defined in order from the left side of the paper, and in FIG. 5, the first row, the second row,. . At the time of performing the calibration, the calibration substrate 17 is transported to a predetermined position by the substrate transport mechanism 5 and positioned, and thereafter, the individual calibration marks M are sequentially imaged by the substrate recognition camera 15. Note that the calibration substrate 17 may be installed at a predetermined position by an operator. Further, the size of the calibration substrate 17 is preferably the maximum size that can be positioned by the substrate transport mechanism 5, but even if it is not the maximum size, the calibration of the present invention can also be performed to calibrate the outer region of the calibration substrate 17. Can be.

  The measured value acquisition unit 24a acquires an image of the calibration mark M captured by the board recognition camera 15. The first calculation unit 24b obtains a displacement amount (Δx, Δy), which is an error generated between the center value of the calibration mark M and the measured value, based on the measured value acquired by the measured value acquiring unit 24a. The second calculating unit 24c calculates the slope of the approximate straight line of the X-axis beam 9 for each row from the displacement amount Δx calculated by the first calculating unit 24b and the value of each column and its intercept (hereinafter referred to as the slope m, intercept b). Is calculated. The beam shape deriving unit 24d derives the average shape of the X-axis beam 9 for each row from the displacement amount Δx calculated by the first calculating unit 24b and the value of each column. The calibration value calculator 24e calculates a calibration value of the control data 21a of the mounting head 12 based on the approximate straight line of the displacement amount Δx and the average shape of the X-axis beam 9. Details of these components will be described later.

  The component mounting apparatus 1 according to the present embodiment is configured as described above. Next, a method of calibrating the component mounting apparatus 1 for obtaining the calibration value of the control data 21a will be described with reference to the flowchart of FIG. When the execution of calibration is instructed by the operator, the calibration execution unit 24 detects the operation and controls the substrate transport mechanism 5. Thus, as shown in FIG. 7A, the substrate transport mechanism 5 transports the calibration substrate 17 (arrow a) and positions it at a predetermined work position (ST1: calibration substrate positioning step). That is, in (ST1), a plurality of calibration marks M are provided in a lattice shape along the first direction (X-axis direction) and the second direction (Y-axis direction). Positioning by

  Next, a process for acquiring the actual measurement value of the mounting head 12 at the position of the calibration mark M is executed (ST2: actual measurement value acquisition step). That is, as shown in FIG. 7B, the mounting head 12 moves above the calibration substrate 17 positioned at a predetermined work position (row and column) based on the control data 21a. At this time, the mounting head 12 is controlled so that the center of the imaging field of view of the board recognizing camera 15 moving integrally moves to the center α of each calibration mark M. As a result, the board recognition camera 15 sequentially captures images of the plurality of calibration marks M individually. The measured value acquisition unit 24a acquires the center α of each calibration mark M. The order of imaging the calibration marks M is arbitrary. In the present embodiment, as shown in FIG. 8, the board recognition camera 15 sequentially captures images of the calibration marks M while moving along the X-axis direction for each row (arrow b).

  FIG. 9 illustrates an imaging field of view 15a when the board recognition camera 15 has moved above a predetermined calibration mark M. When the Y-axis beam 8 and the X-axis beam 9 are distorted, an error occurs between the center β of the imaging field 15a and the center α of the calibration mark M. The first calculator 24b calculates this error as the displacement amount (Δx, Δy) (ST3: first calculation step).

  Next, the second calculation unit 24c calculates a slope m from an approximate line obtained by temporarily approximating a curve formed by the displacement amount Δx for each row calculated by the first calculation unit 24b and the value of each column. The intercept b is calculated (ST4: second calculation step). As shown in FIG. 10, the slope m and the intercept b are calculated with respect to an in-plane area E <b> 1 where the calibration mark M is provided in the plane of the calibration substrate 17. In addition, the slope m and the intercept b in a region including the out-of-plane region E2 which is a region set outside the in-plane region E1 (the Y-axis direction orthogonal to the longitudinal direction of the X-axis beam 9) are estimated values. Is calculated. In the case of a configuration in which a plurality of substrates are transported in parallel, the inclination m and the intercept b are calculated using the calibration substrate 17 for each pair of transport lanes. That is, the out-of-plane region E2 in this case also exists between the plurality of calibration substrates 17.

  Here, an example of a calculation method of the approximate straight line calculated by the second calculation unit 24c will be described. First, as shown in FIG. 11, the second calculator 24c calculates the center β (β1, β2, β2) of the individual imaging visual field 15a in a predetermined row (first row in FIG. 11) calculated by the first calculator 24b. ... Δ12 and the center α (α1, α2,..., Α12) of the individual calibration marks M. calculate. As a calculation method, an approximate straight line may be calculated using all displacement amounts, or an approximate straight line may be calculated using only the left and right ends of Δx1 and Δx12 as a simple calculation method. Then, the second calculation unit 24c calculates the slope m and the intercept b from the approximate straight line. The second calculating unit 24c calculates the slope m and the intercept b of the approximate straight line corresponding to the second row, the third row,..., The sixth row in the same manner.

  The second calculation unit 24c further calculates an estimated value of the slope m and the intercept b in the out-of-plane region E2 based on the slope m and the intercept b calculated for each row. First, an n-order approximate expression of the slope m and an n-order approximate expression of the intercept b in the in-plane area E1 are calculated. FIG. 12A is a diagram showing the distribution of the slope m obtained for each row, in which the horizontal axis represents the value of each row and the vertical axis represents the slope m. The second calculation unit 24c obtains an n-order approximation formula representing the correlation between the row and the slope m in the in-plane region E1 from the distribution of the slope m by a so-called interpolation method (interpolation method) (solid line shown in FIG. 12A). Curve). FIG. 12B is a diagram showing the distribution of the intercept b obtained for each row, in which the horizontal axis represents the value of each row and the vertical axis represents the intercept b. The second calculation unit 24c calculates an n-th order approximation formula representing the correlation between the row and the intercept b in the in-plane region E1 from the distribution of the intercept b by the same interpolation method (see the solid curve shown in FIG. 12B). ).

  Next, the estimated values of the slope m and the intercept b in the out-of-plane region E2 are calculated. That is, the second calculation unit 24c calculates the out-of-plane area by a so-called extrapolation method (interpolation method) based on an n-order approximation formula indicating the correlation between the row and the slope m in the in-plane area E1 shown in FIG. The gradient m in the row of E2 is obtained (see the broken curve shown in FIG. 12A). In addition, the second calculation unit 24c calculates the row of the out-of-plane area E2 by extrapolation based on the n-th approximation formula indicating the correlation between the value of each row and the intercept b in the in-plane area E1 shown in FIG. (See the broken-line curve shown in FIG. 12B). The second calculation unit 24c estimates the slope m in the row of the out-of-plane area E2 from an n-order approximation formula representing the correlation between the row and the slope m in the in-plane area E1, and calculates the correlation between the row and the intercept b in the in-plane area E1. The intercept b in the row of the out-of-plane region E2 is estimated from the n-th order approximation formula expressing Accordingly, the second calculation unit 24c is affected only by the straight line formed by the slope m and the intercept b in the row of the out-of-plane area E2, that is, only the distortion of the Y-axis beam 8 including the out-of-plane area E2. The shape of the X-axis beam 9 is obtained. As described above, in (ST4), the second calculation unit 24c calculates the slope m and the intercept b of the approximate straight line obtained by linearly approximating the shape of the X-axis beam 9 on the basis of the displacement amount Δx and the value of the row thereof. The calculation is performed for each row (the position of the X-axis beam 9 with respect to the Y-axis beam 8) including E2. Note that the above-described method of calculating the estimated values of the slope m and the intercept b in the out-of-plane area E2 is merely an example, and may be estimated from, for example, the change amounts of a plurality of values of the in-plane area E1 adjacent to the out-of-plane area E2. The value may be calculated.

  Next, the beam shape deriving unit 24d derives the shape of the X-axis beam 9 including the out-of-plane region E2 (ST5: beam shape deriving step). The shape of the X-axis beam 9 including the out-of-plane region E2 was calculated by the second calculation unit 24c from the curve formed by the displacement amount Δx for each row calculated by the first calculation unit 24b and the value of each column. It can be derived by subtracting the approximate straight line. FIG. 13A is a diagram illustrating the relationship between the displacement amount Δx in a predetermined row and the value of each column. FIG. 13B is a diagram illustrating the relationship between the calculated difference amount in a predetermined row and the value of each column. First, the shape of a curve formed by the displacement amount Δx in a predetermined row (here, the first row) and the value of each column is derived. In FIG. 13A, the beam shape deriving unit 24d calculates the displacement Δx of each column in the approximate straight line calculated by the second calculating unit 24c and the displacement amount Δx of each column of the first row calculated by the first calculating unit 24b. The difference from the displacement Δx is calculated. FIG. 13B shows the relationship between the calculated difference amount and the column value. As shown in FIG. 13B, the relationship between the calculated difference amount and the column value is such that the effects of the slope m and the intercept b of the approximate straight line calculated by the second calculating unit 24c have been removed. The shape formed by this difference amount is the shape of the X-axis beam 9 which is not affected only by the distortion of the Y-axis beam 8 in the first row of the in-plane area E1. In other words, the shape of the X-axis beam 9 is affected only by the distortion of the X-axis beam 9. Next, the same calculation is derived for the other rows, the shapes of the X-axis beams 9 are derived for all the rows, and then the average value of the difference amounts calculated for each column is calculated. This serves as a reference for the shape of the X-axis beam 9 affected by the distortion of the X-axis beam 9 in the in-plane region E1. Further, since the shape of the reference X-axis beam 9 is not affected by the distortion of the Y-axis beam 8, the same shape can be applied to the out-of-plane region E2.

  Next, the beam shape deriving unit 24d derives the inclination m of the out-of-plane area E2 and the displacement Δx of the primary line of the intercept b calculated in the second calculation step (ST4) and the beam shape derivation step (ST5). The displacement amount Δx of each row of the out-of-plane region E2 is calculated by combining the displacement amount Δx of the X-axis beam 9 and the reference shape in each column. The calibration value calculation unit 24e calculates a value that offsets this displacement amount at each coordinate point, and the calculated value becomes a calibration value (ST6: calibration value calculation step). The above steps (ST1) to (ST5) are also executed for the displacement amount Δy, and further executed for each X-axis beam 9.

  After calculating the calibration value of the control data 21a, a mounting operation for mounting the component 3 on the board 2 is thereafter performed. That is, the mounting head 12 takes out the component 3 supplied by the tape feeder 7 and mounts the component 3 on the substrate 2 positioned at a predetermined work position. In this mounting operation, the movement of the mounting head 12 is controlled based on the calibration value of the control data 21a. Accordingly, even when the Y-axis beam 8 and the X-axis beam 9 are distorted or the like, the component 3 can be accurately mounted at a position to be mounted on the substrate 2.

  As described above, according to the present embodiment, not only the in-plane area E1 of the calibration substrate 17 where the calibration mark M is provided, but also the out-of-plane area E2 set outside the in-plane area E1. Can be accurately calibrated. Further, since it is not necessary to use the board recognition camera 15 provided for each of the plurality of X-axis beams 9, a highly reliable calibration value can be obtained.

  As shown in FIG. 10, the calibration value of the control data 21a of the mounting head 12 that can be obtained by the above-described calibration method is the width W of the in-plane area E1 and the out-of-plane area E2 from which the shape of the X-axis beam 9 is derived. Limited to In the other calibration method described below, as shown in FIG. 14, the area is set to an area further extended in the longitudinal direction (X-axis direction) of the X-axis beam 9 from the width W of the in-plane area E1 and the out-of-plane area E2. The calibration value of the control data 21a of the mounting head 12 in the set out-of-plane area E3 can be obtained.

  Hereinafter, other calibration methods will be described, but steps overlapping with the steps already described will be simplified. First, the substrate transport mechanism 5 transports the calibration substrate 17 and positions it at a predetermined work position (ST11: substrate transport step). Next, the measured value acquisition unit 24a acquires an image of the calibration mark M captured by the board recognition camera 15 (ST12: actual measured value acquisition step). Then, the first calculation unit 24b calculates the amount of displacement (Δx, Δy) based on the measured values acquired by the measured value acquisition unit 24a (ST13: first calculation step). The second calculating unit 24c calculates, for each predetermined line, the slope m and the intercept b of the approximate straight line calculated using the displacement amounts Δx of the predetermined line calculated by the first calculating unit 24b (ST14: second). Calculation step).

  Next, the beam shape deriving unit 24d derives the shape of the X-axis beam 9 (ST15). Here, the shape of the X-axis beam 9 in the out-of-plane region E3 as well as the in-plane region E1 is derived. The specific method of deriving the shape of the X-axis beam 9 in the in-plane region E1 is as described above, and thus the description is omitted.

  A method for deriving the shape of the X-axis beam 9 corresponding to the out-of-plane region E3 will be described. Here, a case will be described in which the shape of the X-axis beam 9 corresponding to the out-of-plane area E3 on the left side of the paper shown in FIG. 14 is derived. The shape of the X-axis beam 9 corresponding to the out-of-plane region E3 is estimated from the shape of the X-axis beam 9 which is not affected only by the distortion of the Y-axis beam 8 derived in the in-plane region E1. FIG. 15A is a diagram showing the distribution of the displacement amount Δx (average value) for each x coordinate, where the horizontal axis represents the x coordinate and the vertical axis represents the displacement amount Δx. From the figure, the beam shape deriving unit 24d determines that the data point P1 indicating the displacement amount Δx (average value) of the first column and the data point P2 indicating the displacement amount Δx (average value) of the second column adjacent to the first column. (P1-P2) is obtained. Then, the beam shape deriving unit 24d obtains a data point P0 adjacent to the data point P1 and located in the out-of-plane area E3 by adding the change amount to the displacement amount Δx indicated by the data point P1 (PO = P1 + (P1 -P2)).

  The data points in the out-of-plane area E3 on the right side of the paper shown in FIG. 14 are derived in the same manner. Then, the beam shape deriving unit 24d converts the X-axis beam 9 including the displacement amount Δx of the approximate straight line calculated in the second calculation step (ST14) and the out-of-plane area E3 derived in the beam shape derivation step (ST15). The displacement amount Δx for each row including the out-of-plane area E3 is calculated by combining the average shape displacement amount Δx with the average shape displacement amount Δx for each column. As described above, the beam shape deriving unit 24d derives the shape of the X-axis beam 9 including the out-of-plane region E3 set to further extend in the longitudinal direction of the X-axis beam 9 from the width W of the in-plane region E1. Can be.

  The calibration value calculation unit 24e calculates a value that offsets the displacement amount Δx at each coordinate point, and the calculated value is a calibration value.

  The calibration method and the component mounting apparatus of the component mounting apparatus of the present invention are not limited to the present embodiment, and can be changed without changing the gist of the invention. For example, the shape of the X-axis beam 9 may be derived based on only the measured values belonging to one row. This is because it is considered that the shape of the X-axis beam 9 hardly changes even if it moves in the Y-axis direction. The inclination m and intercept b of the X-axis beam 9 for each row are obtained based on the position βn of the mounting head 12 in the mechanical coordinate system with respect to the calibration marks M located at both ends on the calibration substrate 17.

  Referring to FIG. 16 as an example, the board recognition camera 15 sequentially captures images of all calibration marks M1, M2,..., M12 belonging to the first row, while the second, third,. For the six rows, the board recognition camera 15 captures only the calibration marks M13, M24, M25, M36, M37, M48, M49, M60, M61, and M72 located at both ends. The shape of the X-axis beam 9 is derived from the measured values of the calibration marks M1, M2,..., M12, that is, the positions β1, β2,. The inclination m and intercept b of the X-axis beam 9 are measured values (positions β13, β24, β25, β36, β37, β48, β49, β60 in the machine coordinate system) corresponding to the calibration marks M located at both ends of each row. , Β61, β72).

  That is, in the actual measurement value acquiring step (ST2 (12)), the plurality of calibration marks M having at least one common y coordinate in the Y-axis direction (second direction) are sequentially imaged by the board recognition camera 15, An actual measurement value of the position of the mounting head 12 is acquired, and in a beam shape deriving step (ST5 (15)), a second measurement is performed based on the actual measurement value acquired by imaging a plurality of calibration marks M having a common y coordinate. The shape of one beam may be derived. According to this, the number of images of the calibration mark M can be reduced, and the time required for calibration can be reduced.

  After acquiring the data of the actually measured values, the following steps may be newly added. That is, as shown in FIG. 17A, the control unit 20 obtains an n-order approximation formula based on the position βn of the mounting head 12 in the mechanical coordinate system corresponding to each calibration mark M, thereby obtaining the X-axis beam. 9 is derived for each row. In FIG. 17A, the shape of the X-axis beam 9 is represented by curves R1, R2,. Then, the control unit 20 performs coordinate transformation of the position βn of the mounting head 12 in the mechanical coordinate system obtained from the nth-order approximation formula so that the inclination m of the X-axis beam 9 is canceled, and then, as shown in FIG. As shown, the shapes (curves R1 to R6) of the plurality of X-axis beams 9 are superimposed. Then, in a state where the shapes of the X-axis beams 9 are superimposed, the control unit 20 determines whether or not there is a position Sn * in the mechanical coordinate system of the mounting head 12 separated by a certain value or more. The cause of the occurrence of the position Sn * in the mechanical coordinate system of the mounting head 12 includes a case where the control unit 20 erroneously recognizes dust adhering to the calibration substrate 17 as the calibration mark M. . In this case, the control unit 20 takes measures such as retaking the image of the calibration mark M corresponding to the position Sn *. Alternatively, the control unit 20 corrects the data of the actual measurement value of the position of the mounting head 12 based on the average value of the displacement amounts Δx and Δy of the row belonging to the calibration mark M corresponding to the position Sn *. Thereby, the calibration value of the control data 21a can be calculated more accurately, and the mounting accuracy can be improved.

  According to the present invention, control data can be calibrated accurately, which is particularly useful in the field of component mounting.

DESCRIPTION OF SYMBOLS 1 Component mounting apparatus 2 Substrate 3 Component 5 Substrate transfer mechanism 8 Y-axis beam (second beam)
9 X-axis beam (first beam)
12 Mounting Head 15 Board Recognition Camera 24a Actual Measurement Value Acquisition Unit 24b First Calculation Unit 24c Second Calculation Unit 24d Beam Shape Derivation Unit 24e Calibration Value Calculation Unit

Claims (8)

A mounting head for mounting components on the board positioned at the work position, a first beam extending in a first direction parallel to the board transfer direction and moving the mounting head in the first direction; And a second beam extending in a second direction orthogonal to a horizontal plane and moving the first beam in the second direction, and an image of a substrate positioned at the work position and moving together with the mounting head And an imaging unit that performs
A control data calibration method for calibrating control data obtained by combining movement control of the mounting head along the first beam and movement control of the first beam along the second beam,
An error generated between the center of the calibration mark and the measured value based on the measured value obtained by sequentially imaging a plurality of calibration marks provided along the first direction and the second direction of the calibration substrate. A first calculating step of calculating the amount of displacement,
Based on the displacement calculated in the first calculation step, an in-plane region that is an in-plane region of the calibration substrate and an out-of-plane region that is a region set outside the in-plane region. A second calculation step of calculating a slope and an intercept of the approximate line of the displacement amount ;
Based on a shape formed from the displacement amount calculated in the first calculation step and an approximate straight line of the displacement amount formed by the slope and intercept calculated in the second calculation step, the first A beam shape deriving step of deriving a beam shape,
A calibration value calculating step of calculating a calibration value of the control data of the mounting head in an area including the in-plane area and the out-of-plane area based on the shape of the first beam derived in the beam shape deriving step; And a control data calibration method including:   In the beam shape deriving step, in addition to the shape of the first beam in a range corresponding to the in-plane region, a shape of the first beam in a range corresponding to the out-of-plane region is derived based on the measured value. The control data calibration method according to claim 1, wherein In the first calculating step, by sequentially imaging the plurality of calibration marks having at least one coordinate in the second direction by the imaging unit, an actual measurement value of the position of the mounting head is obtained,
In the beam shape deriving step, the first beam shape is derived based on the actually measured values obtained by imaging the plurality of calibration marks having the same coordinates. Calibration method of the described control data. A mounting head for mounting components on the board positioned at the work position, a first beam extending in a first direction parallel to the board transfer direction and moving the mounting head in the first direction; And a second beam extending in a second direction orthogonal to the horizontal direction in the horizontal plane and moving the first beam in the second direction, and mounting the imaging field toward the substrate positioned at the work position. Imaging means movable with the head, based on control data that combines movement control of the mounting head along the first beam and movement control of the first beam along the second beam. A component mounting apparatus for mounting the component held by the mounting head on a substrate by moving the mounting head.
An error generated between the center of the calibration mark and the measured value based on the measured value obtained by sequentially imaging a plurality of calibration marks provided along the first direction and the second direction of the calibration substrate. A first calculator for calculating a displacement amount that is:
Based on the amount of displacement calculated by the first calculation unit, an in-plane area that is an in-plane area of the calibration substrate and an out-of-plane area that is an area set outside the in-plane area. A second calculator for calculating a slope and an intercept of the approximate line of the displacement amount ;
The shape of the first beam based on a shape formed from the displacement calculated by the first calculator and an approximate straight line of the displacement calculated by the slope and intercept calculated by the second calculator. Beam shape deriving unit for deriving
A calibration value calculation unit configured to calculate a calibration value of the control data of the mounting head in an area including the in-plane area and the out-of-plane area based on the shape of the first beam derived in the beam shape derivation unit; , A component mounting apparatus.   In the beam shape deriving unit, in addition to the shape of the first beam in a range corresponding to the in-plane region, a shape of the first beam in a range corresponding to the out-of-plane region is derived based on the measured value. The component mounting apparatus according to claim 4, wherein In the first calculation unit, by sequentially imaging a plurality of calibration marks having at least one coordinate in the second direction by the imaging unit, an actual measurement value of the position of the mounting head is obtained,
The beam shape deriving unit according to claim 4 or 5, wherein the first beam shape is derived based on the actually measured values obtained by imaging the plurality of calibration marks having the same coordinate. The component mounting apparatus described in the above. A mounting head that mounts components on a substrate positioned at a work position; a first beam that extends in a first direction and moves the mounting head in the first direction; and a second beam that intersects the first direction. Component mounting, comprising: a second beam extending in the direction of (a) and moving the first beam in the second direction; and imaging means for capturing an image of the substrate positioned at the working position and moving the substrate together with the mounting head. In the device,
A control data calibration method for calibrating control data obtained by combining movement control of the mounting head along the first beam and movement control of the first beam along the second beam,
An error generated between the center of the calibration mark and the measured value based on the measured value obtained by sequentially imaging a plurality of calibration marks provided along the first direction and the second direction of the calibration substrate. A first calculating step of calculating the amount of displacement,
  Based on the displacement calculated in the first calculation step, an in-plane region that is an in-plane region of the calibration substrate and an out-of-plane region that is a region set outside the in-plane region. A second calculation step of calculating a slope and an intercept of the approximate line of the displacement amount;
Based on a shape formed from the displacement amount calculated in the first calculation step and an approximate straight line of the displacement amount formed by the slope and intercept calculated in the second calculation step, the first A beam shape deriving step of deriving a beam shape,
A calibration value calculating step of calculating a calibration value of the control data of the mounting head in an area including the in-plane area and the out-of-plane area based on the shape of the first beam derived in the beam shape deriving step; And a control data calibration method including: A mounting head that mounts components on a substrate positioned at a work position; a first beam that extends in a first direction and moves the mounting head in the first direction; and a second beam that intersects the first direction. A second beam extending in the direction of the first direction and moving the first beam in the second direction; and an imaging unit that moves an imaging field of view toward the substrate positioned at the work position and is movable with the mounting head. Comprising, by moving the mounting head based on control data that combines movement control of the mounting head along the first beam and movement control of the first beam along the second beam, A component mounting apparatus for mounting the component held by the mounting head on a substrate,
An error generated between the center of the calibration mark and the measured value based on the measured value obtained by sequentially imaging a plurality of calibration marks provided along the first direction and the second direction of the calibration substrate. A first calculator for calculating a displacement amount that is:
Based on the amount of displacement calculated by the first calculation unit, an in-plane area that is an in-plane area of the calibration substrate and an out-of-plane area that is an area set outside the in-plane area. A second calculator for calculating a slope and an intercept of the approximate line of the displacement amount;
The shape of the first beam based on a shape formed from the displacement calculated by the first calculator and an approximate straight line of the displacement calculated by the slope and intercept calculated by the second calculator. Beam shape deriving unit for deriving
A calibration value calculation unit configured to calculate a calibration value of the control data of the mounting head in an area including the in-plane area and the out-of-plane area based on the shape of the first beam derived in the beam shape derivation unit; , A component mounting apparatus.

Images