JP6625007B2 - Measurement jig - Google Patents

Description

  TECHNICAL FIELD The present invention relates to a measuring jig for measuring a straight-moving accuracy in a cutting feed direction and a straight-moving accuracy in an index feed direction in a cutting device.

  For example, a wafer in which a plurality of devices such as ICs and LSIs are defined by dividing lines and formed on the surface is cut by a cutting device having a rotatable cutting blade, divided into individual devices, and divided into various electronic devices. It's being used.

  The cutting apparatus generally includes a holding table for holding a wafer, cutting means for rotatably mounting a cutting blade for cutting the wafer, and the holding table and the cutting means in a cutting feed direction (X-axis direction). Cutting feed means for cutting feed, index feed means for index feeding the holding table and the cutting means relatively in the index feed direction (Y-axis direction), and cutting feed for the cutting means in the cut feed direction (Z-axis direction). Cutting feed means. Then, in order to accurately cut the wafer along the dividing line, a measuring device is used in each of the cutting feed direction of the cutting feed means and the index feed direction of the index feed means (for example, see Patent Document 1). Then, the pitching and the yawing are respectively measured to check whether the pitching and the yawing are within allowable values, respectively. The pitching refers to, for example, a posture change of the holding table in the Z-axis direction with respect to the cutting feed direction (X-axis direction), that is, a degree of rotational vibration in the vertical direction. The yawing is, for example, a change in posture of the cutting means in the X-axis direction with respect to the index feed direction (Y-axis direction), that is, the degree of rotational vibration in the lateral direction.

JP-A-07-055422

  In a cutting device, a rotating cutting blade is cut into a wafer for cutting. The processing point where the rotating cutting blade contacts the wafer moves as the holding table holding the wafer moves in the X-axis direction. Therefore, it is particularly important to measure pitching and yawing within the moving range (within the moving distance) of the processing point in the X-axis direction when cutting the wafer in order to cut the wafer accurately. Further, in order to position the cutting blade on the scheduled dividing line of the wafer to be cut, as the index feeding means moves the cutting means in the Y-axis direction, the processing point at which the rotating cutting blade comes into contact with the wafer is also changed along the Y-axis. Move in the direction. Therefore, it is also important to measure pitching and yawing within the moving range (moving distance) of the processing point in the Y-axis direction when cutting a wafer, in order to cut the wafer accurately. That is, in both the cutting feed direction and the index feed direction, it is preferable to measure the pitching and the yawing at the processing point.

  Therefore, in the cutting device, when measuring the pitching and yawing in the cutting feed direction and the index feed direction using a measuring jig, the cutting blade is moved within a moving range of a processing point where the measuring blade comes into contact with the wafer. There is a problem that the pitching and the yawing are measured by making the measurement point coincide with the processing point.

  The present invention for solving the above problems, a holding table having a holding surface for holding the workpiece, a cutting means for cutting by cutting a cutting blade into the workpiece held on the holding table, Cutting feed means for cutting and feeding the cutting means and the holding table relatively in the X-axis direction; and a Y-axis direction which is a holding surface direction orthogonal to the cutting means and the holding table relatively in the X-axis direction. Index feed means for feeding an index to the cutting means, and cutting feed means for cutting and feeding the cutting means and the holding table relatively in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction and orthogonal to the holding surface. A measuring jig for measuring the straight-moving accuracy in the X-axis direction and the straight-moving accuracy in the Y-axis direction in a cutting device comprising: a blade cover surrounding the cutting blade; A shaft that can be attached to a bar and extends in the Z-axis direction, and a gauge attachment portion to which a lever-type dial gauge is attached; the shaft can be fastened to the shaft and extends in the direction perpendicular to the extension direction of the shaft and in the direction of the holding surface; And a measuring jig for measuring a position of the measuring point by positioning a measuring point of the lever type dial gauge at a processing point where the cutting blade cuts a workpiece.

  The measuring jig according to the present invention has a shaft that can be attached to a blade cover surrounding a cutting blade and extends in the Z-axis direction, and a gauge attachment portion to which a lever type dial gauge is attached. With an arm extending perpendicular to the direction of extension and extending in the direction of the holding surface, it is possible to measure the position of the measurement point by positioning the measurement point of this type dial gauge at the processing point where the cutting blade cuts the workpiece Therefore, the pitching and yawing are accurately measured within the movement range of the processing point where the cutting blade comes into contact with the wafer, and the linearity of the drive shaft of the cutting feed means and the linearity of the drive axis of the index feed means are allowable. It can be appropriately determined whether or not it is within.

It is a perspective view showing an example of a cutting device. It is a front view which shows an example of a cutting means. It is a perspective view showing the state where the slide cover was slid from the blade cover base and the blade cover was opened. It is a perspective view showing an example of a measuring jig. It is a perspective view which shows the state which measures the pitching of the holding table in the cutting feed direction. It is the side view which looked at the state which measures the yawing of the holding table in the cutting feed direction from the cutting feed direction. It is a front view which shows the state which measures the pitching of the cutting means in the index feed direction. FIG. 7 is a front view showing a state in which yawing of the cutting means in the index feed direction is measured.

  The cutting device 1 illustrated in FIG. 1 is a device that performs a cutting process on a workpiece held by a holding table 30 by a cutting unit 6 including a cutting blade 63.

  On the base 10 of the cutting device 1, cutting feed means 11 for reciprocating the holding table 30 in the X-axis direction is provided. The cutting and feeding means 11 includes a ball screw 110 having an axis in the X-axis direction, a pair of guide rails 111 disposed in parallel with the ball screw 110, a motor 112 for rotating the ball screw 110, and an internal nut serving as the ball screw 110. And a movable plate 113 whose bottom is in sliding contact with the guide rail 111. When the motor 112 rotates the ball screw 110, the movable plate 113 is guided by the guide rail 111 and moves in the X-axis direction, and the holding table 30 disposed on the movable plate 113 moves the movable plate 113. The workpiece held by the holding table 30 is cut and fed by moving in the X-axis direction with the movement of the workpiece.

  The holding table 30 has, for example, a circular outer shape, and includes a suction unit 300 that suctions a workpiece and a frame body 301 that supports the suction unit 300. The suction unit 300 communicates with a suction source (not shown), and suction-holds the workpiece on a holding surface 300 a which is an exposed surface of the suction unit 300 and is flush with the upper surface of the frame 301. The direction of the holding surface of the holding surface 300a is horizontal. The holding table 30 is rotatable by being driven by rotating means 31 disposed on the bottom side of the holding table 30. Around the holding table 30, four fixed clamps 304 are provided in the illustrated example.

  On the base 10, a portal column 14 is erected so as to straddle the cutting feed means 11. On a surface on the + X direction side of the portal column 14, an index feeding means 12 for reciprocating the cutting means 6 in the Y-axis direction is provided. The index feeding means 12 includes a ball screw 120 having an axis whose axis direction is perpendicular to the moving direction (X-axis direction) of the holding table 30 in the horizontal direction (holding surface direction) (Y-axis direction), and the ball screw 120. It comprises a pair of guide rails 121 disposed in parallel, a motor 122 for rotating the ball screw 120, and a movable plate 123 in which an internal nut is screwed to the ball screw 120 and a side portion slides on the guide rail 121. . When the motor 122 rotates the ball screw 120, the movable plate 123 is guided by the guide rail 121 and moves in the Y-axis direction, and the cutting means 6 disposed on the movable plate 123 moves the movable plate 123. Is fed in the Y-axis direction with the movement of.

  On the movable plate 123, a notch feeding means 16 for reciprocating the cutting means 6 in a Z-axis direction (vertical direction) orthogonal to the X-axis direction and the Y-axis direction and orthogonal to the holding surface direction is provided. The notch feed means 16 includes a ball screw (not shown) having an axis in the Z-axis direction, a pair of guide rails 161 disposed in parallel with the ball screw, a motor 162 for rotating the ball screw, and an internal nut screwed onto the ball screw. And a support member 163 whose sliding portion is in sliding contact with the guide rail 161. Then, when the motor 162 rotates the ball screw 160, the support member 163 is guided by the guide rail 161 and moves in the Z-axis direction, and the cutting means 6 supported by the support member 163 moves along with the movement of the support member 163. As a result, the sheet is cut and fed in the Z-axis direction. In the cutting device 1 shown in FIG. 1, the index feed unit 12, the cut feed unit 16, and the cutting unit 6 are also provided on the front surface of the portal column 14 on the −Y direction side. It is not done.

  The cutting means 6 includes a spindle 60 whose axial direction is the Y-axis direction, a housing 61 fixed to the lower end of the support member 163 and rotatably supporting the spindle 60, a motor (not shown) for rotating the spindle 60, and a spindle 60. The cutting blade 63 is fixed, and the cutting blade 63 rotates at high speed as the motor drives the spindle 60 to rotate.

  On the side surface on the + X direction side of the housing 61, an alignment means 64 for imaging and detecting a position where the workpiece is to be cut is provided. The alignment means 64 is provided with an alignment camera 640 that captures an image of the cut surface of the workpiece, and a position where the workpiece is to be cut by image processing such as pattern matching based on an image acquired by the alignment camera 640. Can be detected.

  The cutting means 6 includes, for example, a blade cover 65 shown in FIG. The blade cover 65 includes a blade cover base 650 and a slide cover 651 disposed on the rear side (−X direction side) of the blade cover base 650 and slidable in the X-axis direction with respect to the blade cover base 650. ing.

  A cutting water block 652 is provided on the front side (+ X direction side) of the blade cover base 650, and the cutting water is supplied to the cutting water block 652 from the outer peripheral direction of the cutting blade 63 toward the cutting blade 63. A cutting water nozzle 652a is provided. The cutting blade 63 is cooled and washed by the cutting water injected through the injection port 652c of the cutting water nozzle 652a.

  As shown in FIG. 2, the slide cover 651 is connected to the blade cover base 650 via an air cylinder 653. As shown in FIG. 3, a cover opening / closing means provided on the upper surface of the blade cover base 650. As the piston rod 653b of the air cylinder 653 moves in the X-axis direction due to the air supplied through 653a, the piston rod 653b slides in the X-axis direction. For example, the front surface 650a of the blade cover base 650 is exposed by sliding the slide cover portion 651 toward the −X direction, and the front surface 650a is for mounting the measuring jig 9 shown in FIG. A screw hole 650b is formed.

  After the blade cover 65 is mounted on the front surface 61a of the housing 61 and the cutting blade 63 is mounted on the spindle 60, the slide cover 651 is slid in the + X direction to close the blade cover 65, as shown in FIG. The cutting blade 63 can be accommodated inside the blade cover 65. The blade cover 65 accommodating the cutting blade 63 is in a state where the center of the opening 65 a formed by the blade cover base 650 and the slide cover 651 is roughly positioned on the axis extending in the Y-axis direction of the spindle 60. .

  As shown in FIG. 3, the slide cover portion 651 supports a pair of substantially L-shaped cutting water nozzles 655 when viewed from the −Y direction side. That is, each of the pair of cutting water nozzles 655 has its upper end side fixed to the slide cover portion 651 by the fixing nut 655a, extends downward through the slide cover portion 651, and then sandwiches the lower portion of the cutting blade 63 with + X. Extend parallel to each other on the direction side. The respective upper ends of the pair of cutting water nozzles 655 communicate with a cutting water supply source (not shown). The pair of cutting water nozzles has a plurality of slits 655b facing the side surface of the cutting blade 63, and the cutting blade 63 is cooled and washed by the cutting water injected through the slit 655b. For example, the height position of the pair of cutting water nozzles 655 can be adjusted by adjusting screws 655d.

  The measuring jig 9 shown in FIG. 4 has a shaft 92 that can be attached to the blade cover 65 shown in FIG. 3 and extends in the Z-axis direction, and a gauge attaching portion 900 to which a lever type dial gauge 91 is attached. At least an arm 90 that can be fastened and extends in the direction of the holding surface (in the illustrated example, the X-axis direction) perpendicular to the direction in which the shaft 92 extends (the Z-axis direction).

  The gauge mounting portion 900 is, for example, fastened to the arm 90 by a fixing screw 900d on one end 90a side (−X direction side) of the arm 90, and is inclined downward at a predetermined angle in the + X direction. Extending. By loosening the fixing screw 900d, the mounting angle of the gauge mounting section 900 with respect to the arm 90 can be changed. The gauge mounting portion 900 has a mounting hole formed so as to penetrate from the lower surface 900b to the upper surface 900a, and the diameter of the mounting hole can be enlarged or reduced by a mounting screw 900e. By inserting the connecting portion 911 into the mounting hole and then tightening the mounting screw 900e, the lever type dial gauge 91 can be mounted on the gauge mounting portion 900. For example, the position of the lever-type dial gauge 91 can be changed in the direction of the arrow R1 depending on the degree of insertion of the connection portion 911 into the gauge attachment portion 900.

  The lever type dial gauge 91 includes, for example, a gauge main body 910, a rod-shaped connection part 911 having one end fixed to the gauge main body 910 and the other end attached to the gauge mounting part 900, and a front end face 910 b of the gauge main body 910. And a spindle 912 having a tracing stylus 912a which is extended and serves as a measuring point at the tip. The lever type dial gauge 91 mechanically transmits a minute movement of the spindle 912 forming a part of the lever in the direction of the arrow R2 to a gear (not shown) inside the gauge main body 910 as a rotational movement, and this gear moves the spindle 912. The displayed amount is enlarged and displayed on the circular scale plate 910a by a pointer. The operator determines, based on the display on the scale plate 910a, whether the amount of movement of the spindle 912, that is, pitching or yawing in the feed direction of each feed means is within an allowable value. The lever dial gauge 91 can set the probe 912 by rotating the spindle 912 in the direction of arrow R2 so that the tracing stylus 912a can be brought into contact with the measurement surface while the spindle 912 is horizontal with respect to the measurement surface. It should be noted that the pitching or yawing data read by the lever type dial gauge 91 may be transmitted to a control unit (not shown) of the cutting apparatus 1.

  On the other end 90b side (+ X direction side) of the arm 90, for example, an elbow portion 902 extending in the + Z direction and further extending in the + X direction is integrally formed, and the end of the elbow portion 902 on the + X direction side is formed by an arm. 90 is the other end 90b. On the other end 90b of the arm 90, a screw clamp 903 for fastening the arm 90 to the shaft 92 by rotating and tightening the screw 903a is integrally formed. The other end 90b side of the arm 90 is orthogonal to the shaft 92, and the height position of the arm 90 in the Z-axis direction can be changed by loosening the screw 903a. Can be rotated.

  At the upper end of the shaft 92 extending in the Z-axis direction, for example, a shaft fixing portion 920 that is fixed by screwing a fixing screw 920a into a screw hole 650b of the front surface 650a of the blade cover base 650 shown in FIG. Have been. On the outer peripheral surface of the shaft 92, for example, graduations for grasping the height position of the arm 90, that is, the height position of the tracing stylus 912a are formed at predetermined intervals in the Z-axis direction. Good.

  Hereinafter, the operation of the measuring jig 9 when measuring the pitching of the holding table 30 in the cutting feed direction in the cutting device 1 with the measuring jig 9 using the measuring jig 9 will be described with reference to FIGS.

  In order to measure pitching in the cutting feed direction in the cutting device 1, an operator or the like determines a processing point position (for example, a cutting point position of the cutting blade 63 from the outer diameter or the like of the cutting blade 63 mounted on the spindle 60 shown in FIG. 1). , The lowermost position of the cutting blade 63) is recognized in advance with reference to the center of the spindle 60, for example.

  The cutting blade 63 shown in FIG. 1 is detached from the spindle 60, and the opening 65a of the blade cover 65 mounted on the housing 61 is made empty as shown in FIG. Next, the slide cover 651 is slid in the −X direction to open the blade cover 65.

  The fixing jig 920a of the shaft fixing portion 920 is screwed into the screw hole 650b of the blade cover 65 shown in FIG. For example, by attaching the measurement jig 9 to the front surface 650a of the blade cover base 650, the center of the spindle 60 is positioned on the axis L1 of the shaft 92.

  For example, the screw 903a shown in FIG. 4 is loosened to change the height position of the arm 90 in the Z-axis direction, the spindle 912 of the lever type dial gauge 91 is rotated in the direction of the arrow R2, and the fixing screw 900d is loosened to make the gauge mounting portion 900 By changing the mounting angle of the connecting portion 911 to the arm 90 or by loosening the mounting screw 900e to change the degree of insertion of the connecting portion 911 into the gauge mounting portion 900, as shown in FIG. The tracing stylus 912a is positioned at the processing point position of the cutting blade 63 and the tracing stylus 912a, that is, the measuring point is positioned on the axis L1 extending in the Z-axis direction of the shaft 92. Preferably, the spindle 912 is parallel to the holding surface 300a of the holding table and perpendicular to the pitching measurement direction (Z-axis direction).

  At the center on the holding surface 300a of the holding table 30, for example, a rectangular parallelepiped straight edge 8 having a predetermined thickness is placed so that its longitudinal direction is parallel to the X-axis direction. Then, a suction source (not shown) communicating with the holding surface 300 a is operated to suction-hold the straight edge 8 on the holding surface 300 a of the holding table 30. The upper surface 8a of the straight edge 8 is a horizontal plane parallel to the holding surface 300a.

  The holding table 30 holding the straight edge 8 is fed in the −X direction by the cutting feed unit 11, and the upper surface 8 a of the straight edge 8 is imaged by the alignment unit 64 shown in FIG. The cutting means 6 is driven in the Y-axis direction by the index feed means 12 so that the tracing stylus 912a of the measuring jig 9 is approximately positioned on a center line (not shown) extending in the X-axis direction of 8a.

  The holding table 30 holding the straight edge 8 is further fed in the −X direction, and the straight edge 8 is positioned directly below the measuring jig 9. Next, while the spindle 912 of the measuring jig 9 is in contact with the upper surface 8a of the straight edge 8 and does not move, the cutting means 6 cuts and feeds so that the tracing stylus 912a contacts the upper surface 8a of the straight edge 8. The sheet is cut and fed in the -Z direction by the means 16 and positioned at a predetermined height position. For example, when the tracing stylus 912a contacts the upper surface 8a of the straight edge 8, the pointer of the scale plate 910a is adjusted based on zero.

  Next, while the operator monitors the scale plate 910a, the holding table 30 holding the straight edge 8 is cut and fed in the −X direction in the same manner as in the actual processing by the cutting blade 63, and the measurement jig 9 is used. Pitching in the cutting feed direction in the cutting device 1 is measured. When the holding table 30 is fed in the −X direction by the cutting feed unit 11, the tracing stylus 912 a does not vibrate in the Z-axis direction, that is, if the pointer of the scale plate 910 a does not change without swinging, It can be determined that there is no pitching which is a posture change in the Z-axis direction with respect to the cutting feed direction (X-axis direction). On the other hand, when the tracing stylus 912a vibrates in the Z-axis direction, that is, when the pointer of the scale plate 910a swings, the change can be confirmed and the pitching of the holding table 30 in the cutting feed direction (X-axis direction) can be confirmed. It is determined whether or not the pitching confirmed by the operator is within an allowable value. When the pitching is out of the allowable range, it can be determined that there is a problem in, for example, the straight traveling accuracy of the ball screw 110 of the cutting and feeding means 11 shown in FIG.

  In the pitching measurement of the holding table 30 in the cutting feed direction in the cutting device 1 by the measuring jig 9, after the measuring jig 9 is brought into contact with the upper surface 8 a of the straight edge 8, for example, by the same distance as the diameter of the holding table 30. This is completed by cutting and feeding the holding table 30 in the −X direction. By performing the measurement in this manner, when the workpiece such as the wafer is suction-held on the holding table 30 and the cutting is performed, the holding table within the moving range of the processing point where the cutting blade 63 comes into contact with the wafer. 30 pitchings can be measured.

  The operation of the measuring jig 9 when measuring the yawing in the cutting feed direction of the holding table 30 in the cutting device 1 with the measuring jig 9 will be described below with reference to FIGS.

  Until the measuring jig 9 is attached to the blade cover 65, the measurement is performed in the same manner as in the case of measuring the pitching. Next, for example, the arm 90 is rotated 90 degrees counterclockwise as viewed from the + Z direction around the shaft 92 such that the extending direction (longitudinal direction) of the arm 90 shown in FIG. 5 is parallel to the Y-axis direction. Let it. Further, the height position of the arm 90 in the Z-axis direction is changed, the spindle 912 of the lever type dial gauge 91 is rotated in the direction of the arrow R2, the mounting angle of the gauge mounting section 900 to the arm 90 is changed, or the connecting section 911 is connected. By changing the degree of insertion into the gauge mounting portion 900, for example, the tracing stylus 912a is positioned at the processing point position of the cutting blade 63 with respect to the center of the spindle 60, and the axis extending in the Z-axis direction of the shaft 92. The tracing stylus 912a, that is, the measurement point is positioned on the core line L1. Preferably, the spindle 912 is in a state perpendicular to the holding surface 300a of the holding table.

  The straight edge 8 is placed at the center on the holding surface 300a of the holding table 30 so that its longitudinal direction is parallel to the X-axis direction, and is suction-held on the holding table 30. The side surface 8b on the −Y direction side of the straight edge 8 in the suction-held state is a surface perpendicular to the holding surface 300a.

  The holding table 30 for holding the straight edge 8 is fed in the −X direction by the cutting feed means 11, and the cutting means 6 is cut and fed in the −Z direction by the cut feeding means 16, as shown in FIG. 912 a is positioned at a height position where it contacts the side surface 8 b of the straight edge 8. In FIG. 6, a part of the configuration of the cutting means 6 is omitted.

  The upper surface 8a of the straight edge 8 is imaged by the alignment means 64 shown in FIG. 1, and the spindle 912 of the measuring jig 9 is kept in contact with the side surface 8b of the straight edge 8 so as not to move. The cutting means 6 is index-fed by the index feeding means 12 in the -Y direction so that the tracing stylus 912a contacts the side surface 8b of the straight edge 8. When the tracing stylus 912a contacts the side surface 8b on the −Y direction side of the straight edge 8, the pointer of the scale plate 910a is adjusted based on zero.

  Next, for example, while the operator monitors the scale plate 910a, the holding table 30 holding the straight edge 8 is further sent out in the −X direction, as in the actual processing by the cutting blade 63, and the measurement jig 9 The yawing in the cutting feed direction in the cutting device 1 is measured. When the holding table 30 is sent in the −X direction by the cutting feed unit 11, the tracing stylus 912 a does not vibrate in the Y-axis direction, that is, if the pointer of the scale plate 910 a does not change without swinging. It can be determined that there is no yawing that is a posture change in the Y-axis direction with respect to the cutting feed direction (X-axis direction). On the other hand, when the tracing stylus 912a vibrates in the Y-axis direction, that is, when the pointer of the scale plate 910a can confirm a change in deflection and yawing in the cutting feed direction (X-axis direction) of the holding table 30 can be confirmed, It is determined whether or not the confirmed yawing is within an allowable value. If the yawing is out of the allowable range, it can be determined that there is a problem in, for example, the straight traveling accuracy of the ball screw 110 of the cutting and feeding means 11 shown in FIG.

  In the yawing measurement of the holding table 30 in the cutting feed direction in the cutting device 1 by the measuring jig 9, after the measuring jig 9 is brought into contact with the side surface 8 b of the straight edge 8, for example, by the same distance as the diameter of the holding table 30. This is completed by cutting and feeding the holding table 30 in the −X direction. By performing the measurement in this manner, the yawing of the holding table 30 within the movement range of the processing point where the cutting blade 63 comes into contact with the wafer when the workpiece such as the wafer is suction-held on the holding table 30 for cutting. Can be measured.

  The operation of the measuring jig 9 when measuring the pitching of the cutting means 6 in the cutting device 1 in the index feed direction by the measuring jig 9 will be described below with reference to FIGS.

  In order to measure the pitching in the index feed direction in the cutting device 1, the processing point position of the cutting blade 63 shown in FIG. 1 (for example, the lowermost position of the cutting blade 63) is recognized in advance based on, for example, the center of the spindle 60. . Then, as shown in FIG. 7, the opening 65a of the blade cover 65 is in an empty state, and the slide cover 651 is slid in the −X direction to open the blade cover 65. Then, the measuring jig 9 is attached to the blade cover 65. For example, by attaching the measurement jig 9 to the front surface 650 a of the blade cover base 650, the center of the spindle 60 shown in FIG. 1 is positioned on the axis L1 of the shaft 92.

  For example, the screw 903a is loosened to change the height position of the arm 90 in the Z-axis direction, the spindle 912 of the lever type dial gauge 91 is rotated in the direction of the arrow R2, the mounting angle of the gauge mounting section 900 to the arm 90 is changed, or By changing the degree of insertion of the connecting portion 911 into the gauge mounting portion 900, the measuring element 912a is positioned at the processing point of the cutting blade 63, and the measuring element is positioned on the axis L1 extending in the Z-axis direction of the shaft 92. 912a, that is, a state where the measurement point is positioned. Preferably, the spindle 912 is parallel to the holding surface 300a of the holding table and perpendicular to the pitching measurement direction (Z-axis direction).

  The straight edge 8 is placed at the center on the holding surface 300a of the holding table 30 so that its longitudinal direction is parallel to the Y-axis direction, and the straight edge 8 is suction-held on the holding surface 300a. The upper surface 8a of the straight edge 8 sucked and held on the holding surface 300a of the holding table 30 is a horizontal plane parallel to the holding surface 300a.

  The holding table 30 holding the straight edge 8 is fed in the −X direction by the cutting feed unit 11, and the upper surface 8 a of the straight edge 8 is imaged by the alignment unit 64 shown in FIG. After the holding table 30 is positioned with respect to the cutting means 6 so that the tracing stylus 912a of the measuring jig 9 is approximately positioned on a center line (not shown) extending in the Y-axis direction of 8a, the movement in the -X direction is performed. Suspended

  Next, while preventing the spindle 912 of the measuring jig 9 from moving by contacting the upper surface 8 a of the straight edge 8, cutting is performed so that the tracing stylus 912 a of the measuring jig 9 contacts the upper surface 8 a of the straight edge 8. The means 6 is cut and fed in the −Z direction by the cut feeding means 16 and positioned. When the tracing stylus 912a contacts the upper surface 8a of the straight edge 8, the pointer of the scale plate 910a is adjusted to zero.

  For example, while the operator monitors the scale plate 910a, the cutting means 6 is index-fed in the Y-axis direction by the index feeding means 12 in the same manner as in actual processing by the cutting blade 63, and the cutting device 1 by the measuring jig 9 is used. Is measured in the index feed direction. When the holding table 30 is fed in the Y-axis direction by the index feeding means 12, the tracing stylus 912a does not vibrate in the Z-axis direction, that is, if the pointer of the scale plate 910a does not change without swinging. It can be determined that there is no pitching which is a posture change in the Z-axis direction with respect to the index feed direction (Y-axis direction). On the other hand, when the tracing stylus 912a vibrates in the Z-axis direction, that is, when the pointer of the scale plate 910a can be confirmed to change in swing and the pitching of the holding table 30 in the index feed direction (Y-axis direction) can be confirmed, Then, it is determined whether or not the confirmed pitching is within an allowable value. If the pitching is out of the allowable range, it can be determined that there is a problem, for example, in the linear running accuracy of the ball screw 120 of the index feed unit 12 shown in FIG.

  In the pitching measurement in the index feed direction in the cutting device 1 by the measuring jig 9, after the measuring jig 9 is brought into contact with the upper surface 8 a of the straight edge 8, for example, the holding table 30 is moved by the same distance as the diameter of the holding table 30. This is completed by index feeding in the Y-axis direction. By performing the measurement in this manner, the pitching of the cutting means 6 within the movement range of the processing point where the cutting blade 63 comes into contact with the wafer when the workpiece such as the wafer is suction-held on the holding table 30 and cut. Can be measured.

  The operation of the measuring jig 9 when measuring the yawing of the cutting means 6 in the cutting device 1 in the index feed direction by the measuring jig 9 will be described below with reference to FIGS.

  Until the measuring jig 9 is attached to the blade cover 65, the measurement is performed in the same manner as in the case of measuring the pitching. As shown in FIG. 8, for example, the spindle 912 of the lever type dial gauge 91 is rotated by rotating the arm 90 by a predetermined angle around the shaft 92, loosening the screw 903a and changing the height position of the arm 90 in the Z-axis direction. By turning in the direction of arrow R2, changing the mounting angle of the gauge mounting portion 900 with respect to the arm 90, or changing the degree of insertion of the connecting portion 911 into the gauge mounting portion 900, the cutting blade 63 can be moved to the processing point position. Position the tracing stylus 912a. Preferably, the spindle 912 is in a state perpendicular to the holding surface 300a of the holding table.

  The straight edge 8 is placed at the center on the holding surface 300a of the holding table 30 so that its longitudinal direction is parallel to the Y-axis direction, and is suction-held on the holding table 30. The side surface 8b on the −X direction side of the straight edge 8 in the suction-held state is a surface perpendicular to the holding surface 300a.

  The holding table 30 for holding the straight edge 8 is fed in the −X direction by the cutting feed means 11, and the cutting means 6 is cut and fed in the −Z direction by the cut feeding means 16, as shown in FIG. The cutting means 6 is positioned at a height position where 912a contacts the side surface 8b of the straight edge 8.

  The upper surface 8a of the straight edge 8 is imaged by the alignment means 64 shown in FIG. 1, and the spindle 912 of the measuring jig 9 is kept in contact with the side surface 8b of the straight edge 8 so as not to move. The cutting means 6 is cut and fed in the −X direction by the cutting and feeding means 11 so that the tracing stylus 912 a contacts the side surface 8 b of the straight edge 8. When the tracing stylus 912a contacts the side surface 8b on the −X direction side of the straight edge 8, the pointer of the scale plate 910a is adjusted based on zero.

  Next, for example, while the operator monitors the scale plate 910a, the holding table 30 holding the straight edge 8 is index-fed in the Y-axis direction in the same manner as in the actual processing by the cutting blade 63, and the measuring jig 9 is used. The yawing in the index feed direction in the cutting device 1 is measured. When the holding table 30 is fed in the Y-axis direction by the index feed means 12, the tracing stylus 912a does not vibrate in the X-axis direction, that is, if the pointer of the scale plate 910a does not change without swinging. It can be determined that there is no yawing, which is a change in posture in the X-axis direction with respect to the index feed direction (Y-axis direction). On the other hand, when the tracing stylus 912a vibrates in the X-axis direction, that is, when the pointer of the scale plate 910a can confirm a change in deflection and yawing in the index feed direction of the holding table 30 can be confirmed, the yawing that the operator has confirmed can be confirmed. Is determined to be within the allowable value. If the yawing is out of the allowable range, it can be determined that there is a problem in, for example, the straight running accuracy of the ball screw 120 of the cutting and feeding means 12 shown in FIG.

  In the yawing measurement in the cutting feed direction in the cutting device 1 by the measuring jig 9, after the measuring jig 9 is brought into contact with the side surface 8 b of the straight edge 8, for example, the holding table 30 is moved by the same distance as the diameter of the holding table 30. This is completed by index feeding in the Y-axis direction. By performing the measurement in this manner, when the workpiece such as the wafer is suction-held on the holding table 30 and the cutting is performed, the yawing of the cutting means 6 within the movement range of the processing point where the cutting blade 63 comes into contact with the wafer. Can be measured.

  The measuring jig 9 according to the present invention includes a shaft 92 that can be attached to the blade cover 65 surrounding the cutting blade 63 and extends in the Z-axis direction, and a gauge attachment portion 900 to which a lever type dial gauge 91 is attached. An arm 90 that can be fastened to the shaft 92 and extends in the direction of the holding surface perpendicular to the direction in which the shaft 92 extends, and the measuring point of the dial gauge 91 is positioned at the processing point where the cutting blade 63 cuts the workpiece. Therefore, the pitching and yawing are accurately measured within the movement range of the processing point where the cutting blade 63 comes into contact with the wafer, and the linearity of the cutting feed means 11 and the linearity of the index feed means 12 are measured. Can be appropriately determined whether or not is within the allowable value.

  Note that the measuring jig 9 according to the present invention is not limited to the above-described embodiment, and the size and shape of each component illustrated in the accompanying drawings are not limited thereto. It can be changed appropriately within a range where the effect can be exhibited.

1: cutting device 10: base 14: portal column 11: cutting feed means 110: ball screw 111: pair of guide rails 112: motor 113: movable plate 12: index feed means 120: ball screw 121: pair of guide rails 122: Motor 123: Movable plate 16: Cut feed means 161: A pair of guide rails 162: Motor 163: Support member 30: Holding table 300: Suction unit 300a: Holding surface 301: Frame 31: Rotating means 32: Fixed clamp 6: Cutting Means 60: spindle 61: housing 61a: front of housing 63: cutting blade
64: alignment means 640: alignment camera 65: blade cover 65a: opening 650: blade cover base
651: Slide cover
652: cutting water block 652a: cutting water nozzle 653: air cylinder 653a: cover opening / closing means 653b: piston rod 655: pair of cutting water nozzles
9: Measurement jig
90: Arm 90a: One end of arm 90b: The other end of arm 900: Gauge mounting part 902: Elbow part 903: Screw clamp 903a: Screw 91: Lever type dial gauge 910: Gauge body part 910a: Scale plate 911: Connection part 912 : Spindle 912a: Contact point
92: Shaft 920: Shaft fixing part 8: Straight edge

Claims (1)

A holding table having a holding surface for holding the workpiece, cutting means for cutting the workpiece held by the holding table by cutting a cutting blade, and cutting the cutting means and the holding table relative to each other; Cutting feed means for cutting and feeding in the X-axis direction; index feeding means for index-feeding the cutting means and the holding table in the Y-axis direction, which is a holding surface direction orthogonal to the X-axis direction; A cutting device comprising cutting means for cutting and feeding the holding table relative to the holding table in a Z-axis direction orthogonal to the X-axis direction and the Y-axis direction and orthogonal to the holding surface. A measuring jig for measuring the accuracy and the straight-moving accuracy in the Y-axis direction,
The cutting means includes a blade cover surrounding the cutting blade,
A shaft mountable to the blade cover and extending in the Z-axis direction, and a gauge mounting portion to which a lever-type dial gauge is mounted, the shaft mountable to the shaft and orthogonal to the extending direction of the shaft, the holding surface direction A measurement jig for measuring the position of the measurement point by positioning the measurement point of the lever type dial gauge at a processing point where the cutting blade cuts a workpiece.

Images