JP6595568B2 - Evaporation source apparatus and vapor deposition apparatus - Google Patents

Description

  The present invention relates to an evaporation source device and a vapor deposition device.

  In recent years, an organic EL device provided with an organic EL element using electroluminescence of an organic material has attracted attention as a kind of display. In manufacturing an organic electronic device such as an organic EL display, there is a step of forming a film by evaporating an evaporation material such as an organic material or a metal electrode material on a substrate using an evaporation source device.

  The evaporation source device used in the vapor deposition process has a function as a container for accommodating the vapor deposition material, and a heating function for increasing the temperature of the vapor deposition material to evaporate it and adhere it to the surface of the substrate. Conventionally, in order to improve the heating function and perform good film formation, an evaporation source device that can uniformly heat the vapor deposition material has been proposed.

  In Patent Document 1, the heater is arranged near the nozzle to prevent the nozzle temperature of the evaporation source from being reduced by heat radiation.

Japanese Patent Laying-Open No. 2015-67847

  In the conventional configuration, there is no description about a method for supporting a crucible containing an evaporating material. It is desirable that the mechanism for supporting the crucible containing the vapor deposition material has as few contacts with the crucible as possible in order to uniformly heat the vapor deposition material. In particular, by reducing the number of contacts with the support mechanism in the upper part of the crucible that is likely to decrease in temperature due to radiant heat, the temperature of the crucible can be prevented from decreasing from the contacts.

  However, when the crucible upper part is arranged without being fixed, it is difficult to finely adjust the position of the opening through which the vapor deposition material passes. Since the position of the opening affects the uniformity of the film thickness to be deposited on the deposition target, it is important to control the position.

  An object of the present invention is to provide an evaporation source device capable of controlling the position of an opening through which a vapor deposition material passes while suppressing a decrease in temperature in the evaporation source device.

For the above purpose, the present invention adopts the following configuration. That is,
A container having an opening for containing a vapor deposition material;
Heating means for heating the container;
An evaporation source device having the container and a housing member that houses the heating means,
The housing member includes a container support portion, a side surface portion, and a positioning portion,
The container support portion supports the part of the outer bottom of the container in a first direction,
The positioning portion is provided so as to protrude from the side surface portion in a rod shape or a plate shape with respect to the container, the container relative to the housing member, a second direction intersecting the first direction, and the third direction crossing the first direction and the second direction, have rows positioned in at least one of,
The evaporation source device is characterized in that the container does not come into contact with the side surface portion of the housing member .
The present invention also employs the following configuration. That is,
A container having an opening for containing a vapor deposition material;
Heating means for heating the container;
An evaporation source device having the container and a housing member that houses the heating means,
The housing member includes a container support,
The container support portion supports the part of the outer bottom of the container in a first direction,
The container includes a material storage portion and a positioning portion,
The positioning portion is provided so as to protrude in a rod shape or a plate shape from the outer surface of the material accommodating portion with respect to the accommodating member, and a second crossing the first direction of the container relative to the accommodating member. direction, and the first direction and a third direction crossing the second direction, have rows positioned in at least one of,
The evaporation source apparatus is characterized in that the container does not come into contact with a side surface portion of the housing member .
The present invention also employs the following configuration. That is,
A container having an opening for containing a vapor deposition material;
Heating means for heating the container;
An evaporation source device having the container and a housing member that houses the heating means,
The housing member includes a container support portion, a side surface portion, and a positioning portion,
The container support portion supports at least a part of the outside of the bottom of the container in a first direction;
The positioning portion is provided so as to protrude from the side surface portion in a rod shape or a plate shape with respect to the container, the second direction of the container relative to the housing member, the second direction intersecting the first direction, and the Positioning in at least one of a first direction and a third direction intersecting the second direction;
The positioning portion is in point contact or line contact with the container.
This is an evaporation source device.
The present invention also employs the following configuration. That is,
A container having an opening for containing a vapor deposition material;
Heating means for heating the container;
An evaporation source device having the container and a housing member that houses the heating means,
The housing member includes a container support,
The container support portion supports at least a part of the outer side of the bottom of the container in a first direction;
The container includes a material storage portion and a positioning portion,
The positioning portion is provided so as to protrude in a rod shape or a plate shape from the outer surface of the material accommodating portion with respect to the accommodating member, and a second crossing the first direction of the container relative to the accommodating member. Positioning in at least one of a direction and a third direction intersecting the first direction and the second direction;
The positioning portion is in point contact or line contact with the housing member.
This is an evaporation source device.

  ADVANTAGE OF THE INVENTION According to this invention, position control of the opening which vapor deposition material passes can be performed, suppressing the fall of the temperature of an evaporation source apparatus.

Schematic cross-sectional view of vapor deposition equipment Schematic diagram of the evaporation source device of Example 1 Schematic diagram of the evaporation source device of Example 2 Schematic diagram of the evaporation source device of Example 3 Schematic diagram of the evaporation source device of Example 4 Schematic diagram of the evaporation source device of Example 5 Illustration of organic EL display device

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be exemplarily described in detail with reference to the drawings. However, the dimensions, materials, shapes, and relative arrangements of the components described in this embodiment should be appropriately changed according to the configuration of the apparatus to which the invention is applied and various conditions. That is, it is not intended to limit the scope of the present invention to the following embodiments.

[Example 1]
<Schematic configuration of vacuum device>
FIG. 1 is a schematic diagram showing a configuration of a vapor deposition apparatus (film formation apparatus). The vapor deposition apparatus has a chamber 200. The interior of the chamber 200 is maintained in a reduced pressure atmosphere. Inside the vacuum chamber 200, there are roughly provided a substrate 10, which is a target object held by a target object mounting table 210, a mask 220, and an evaporation source device 240. The target object mounting table 210 holds the substrate by a support tool such as a receiving claw for placing the substrate 10 and a pressing tool such as a clamp for pressing and holding the substrate.

  After the substrate 10 is transferred into the vacuum chamber 200 by a transfer robot (not shown), the substrate 10 is held by the workpiece mounting table 210 and is fixed to be parallel to the horizontal plane (XY plane) during film formation. The mask 220 is a mask having an opening pattern corresponding to a predetermined thin film pattern formed on the substrate 10, for example, a metal mask. The substrate 10 is placed on the mask 220 during film formation.

  In addition, a cooling plate (not shown) that suppresses the temperature rise of the substrate 10 may be provided in the vacuum chamber 200. Further, on the vacuum chamber, a mechanism for alignment of the substrate 10, for example, a driving means such as an actuator in the X direction or the Y direction, an actuator for a clamp mechanism for holding the substrate, the substrate 10 or the mask 220 is imaged. A camera (both not shown) may be provided.

  The evaporation source device 240 includes a container 244 having an opening in which an evaporation material 242 is accommodated, a heater 246 (heating means) for heating the container 244, and a housing member for housing the container 244 and the heater 246. 248. In FIG. 1, the heater 246 is provided on the outer surface of the container 244, and the housing member 248 is provided so as to face the outer surface of the container 244 and the outer side of the bottom, but other arrangements are possible as will be described later. is there. In addition, a shutter, a film thickness monitor, and the like may be provided (all not shown). Each of these components will be described in detail later. Further, an evaporation source driving mechanism 250 that moves the evaporation source device 240 may be provided in order to perform film formation uniformly. In addition, the shape, positional relationship, and size ratio of each component of the evaporation source device 240 in FIG. 1 are merely examples.

  As the material of the container 244, for example, ceramic, metal, carbon material, and the like are known, but the material is not limited thereto, and a preferable material is used in relation to the physical properties of the vapor deposition material 242 and the heating temperature by the heater 246. As the heater 246, for example, a resistance heating type heater such as a sheath heater or a metal wire is known, but is not limited to this, and any heating performance that evaporates the vapor deposition material 242 may be used. In addition to the wire shape as shown in FIG. 1, any shape such as a plate shape or a mesh shape can be adopted as the shape of the heater. The housing member 248 is formed of a heat insulating material (heat insulating material) that enhances thermal efficiency, and for example, metal can be used, but is not limited thereto.

  The vapor deposition apparatus has a control unit 270. The control unit 270 performs control of the evaporation source device 240, for example, heating start and end timing control, temperature control, opening / closing timing control when a shutter is provided, movement control when an evaporation source drive mechanism 250 is provided, and the like. . The control unit 270 may be configured by combining a plurality of control means. Examples of the plurality of control means include a heating control means, a shutter control means, and an evaporation source drive control means. In addition, when the heater 246 can be controlled for each part, a heating control unit may be provided for each part. The control unit 270 may also serve as a control unit for a mechanism other than the evaporation source device 240, such as a transport and alignment control unit for the substrate 10.

  The control unit 270 can be configured by a computer having a processor, memory, storage, I / O, UI, and the like, for example. In this case, the function of the control unit 270 is realized by the processor executing a program stored in the memory or storage. As the computer, a general-purpose computer may be used, or a built-in computer or a PLC (programmable logic controller) may be used. Alternatively, some or all of the functions of the control unit 270 may be configured by a circuit such as an ASIC or FPGA. In addition, the control part 270 may be provided for every vapor deposition apparatus, and the one control part 270 may control a several vapor deposition apparatus.

  When the vapor deposition material 242 is accommodated in the container 244 and preparations such as placement of the substrate 10 on the mask 220 and alignment are completed, the heater 246 starts operating under the control of the control unit 270 and the vapor deposition material 242 is heated. . When the temperature rises sufficiently, the vapor deposition material 242 evaporates and adheres to the surface of the substrate 10 to form a film. Co-evaporation is also possible by storing different types of vapor deposition materials in a plurality of containers. By controlling the formed film while measuring it with a film thickness monitor (not shown) or the like, a film having a desired thickness is formed on the substrate. In order to form a film with a uniform thickness, for example, vapor deposition may be performed while rotating the substrate 10 or moving the evaporation source device 240 by the evaporation source driving mechanism 250. Further, depending on the size of the substrate 10, it is also preferable to heat a plurality of evaporation source devices in parallel. The shape of the container 244 is arbitrary. The type of the evaporation source may be any of a point-like evaporation source, a linear evaporation source, and a planar evaporation source.

  As will be described later, a multilayer structure can be formed by depositing another type of vapor deposition material on a substrate on which a certain type of vapor deposition material is deposited. In that case, the vapor deposition material in the container may be exchanged, or the container itself may be exchanged for one in which another kind of vapor deposition material is stored. In addition, a plurality of evaporation source devices may be provided in the vacuum chamber and replaced, or another substrate having the evaporation source device in which the substrate 10 is unloaded from the current evaporation device and another type of evaporation material is stored is provided. It may be carried into the device.

<Detailed configuration of evaporation source device>
FIG. 2A is a schematic cross-sectional view for explaining the configuration of the evaporation source device 240 of the present embodiment. 2B and 2C are schematic top views of the evaporation source device 240. FIG. Constituent elements common to those in FIG. The housing member 248 of this embodiment includes a side part 248a, a positioning part 248c, and a container support part 248b.

  The side surface portion 248 a is provided so as to face the outer surface of the container 244. A heater 246 is disposed between the container 244 and the side surface portion 248a. The side surface portion 248 a is disposed in order to increase the heating efficiency from the heater 246 to the container 244.

  The container support part 248 b supports the bottom part of the container 244. In FIG. 2A, the container support portion 248 b has a convex shape and supports a part of the outside of the bottom portion of the container 244. By the shape that supports a part of the outside of the bottom, the contact area between the container 244 and the container support 248b is reduced, and the temperature drop of the container 244 can be reduced. Moreover, the container support part 248b has the effect of increasing the heating efficiency from the heater 246 to the container 244, similarly to the side surface part 248a.

  The positioning portion 248c is provided to protrude from the side surface portion 248a toward the outer surface of the container 244. By providing the positioning portion 248c, the position of the container 244 can be set within a predetermined range. The allowable range of the position of the container is different in each situation. For example, when the diameter of the container is 1, the diameter of the allowable range of the position of the container determined by the positioning unit 248c is 1.01 to 1.05. Can be determined. Further, by providing the positioning portion 248c, there is an effect of increasing the heating efficiency from the heater 246 to the container 244, similarly to the container support portion 248b and the side surface portion 248a.

  The height of the positioning part 248c is not particularly limited. However, by providing the container 244 at the same height as the opening, the position of the container 244 can be accurately determined even if the contact area between the container support 248b and the outside of the bottom of the container 244 is small. .

  As an example of the shape of the positioning portion 248c, FIG. 2B shows an example in which the positioning portion 248c is provided so as to protrude from the side surface portion 248a. FIG. 2C shows an example in which four positioning portions 248c are provided so as to protrude from the side surface portion 248a in a rod shape. The number of rod-shaped positioning portions 248c is not limited. The shape of the positioning portion 248c is not limited to these two examples, and a plurality of plate-like positioning portions 248c may be provided, the connecting portion to the side surface portion 248a is plate-like, and the tip portion to the container 244 is rod-like. It may be. In addition, as a definition of a plate shape or a rod shape, when the positioning portion 248c is in contact with the container 244, the positioning portion 248c whose contact is a line contact is a plate shape, and the positioning portion 248c which is a point contact is a rod shape.

  Although the side surface portion 248a, the container support portion 248b, and the positioning portion 248c of the housing member 248 are integrally illustrated in FIG. 2A, they may be configured by connecting other mechanisms. It is desirable that the material has a low emissivity and can withstand high temperatures, and specific examples include molybdenum and tantalum.

  Although not shown in the drawing, the container 244 may be provided with a protruding portion that protrudes in a rod shape or a plate shape with respect to the positioning portion 248c.

[Example 2]
In this embodiment, a configuration in which a positioning portion is provided in the container 244 is shown. Constituent elements common to the other embodiments are denoted by the same reference numerals, and the description is simplified. As shown in FIG. 3A, the container 244 includes a material storage portion 244a and a positioning portion 244b. The housing member 248 includes a side surface portion 248a and a container support portion 248b.

The positioning portion 244 b is provided so as to protrude from the material storage portion 244 a of the container 244 toward the side surface portion 248 a of the storage member 248. By providing the positioning portion 244b, the position of the container 244 can be set within a predetermined range as in the first embodiment. In addition, positioning part 2
The provision of 44b also has the effect of increasing the heating efficiency from the heater 246 to the container 244, as in the first embodiment.

  The height of the positioning part 244b is not particularly limited. However, by providing the container 244 at the same height as the opening, the position of the container 244 can be accurately determined even if the contact area between the container support 248b and the outside of the bottom of the container 244 is small. .

  As an example of the shape of the positioning portion 244b, FIG. 3B shows an example in which the positioning portion 244b is provided so as to protrude from the material accommodating portion 244a. FIG. 3C shows an example in which four positioning portions 244b are provided so as to protrude in a rod shape from the material accommodating portion 244a. The number of rod-shaped positioning portions 244b is not limited. The shape of the positioning portion 244b is not limited to these two examples, and a plurality of plate-like positioning portions 244b may be provided, and the connection portion with the material storage portion 244a is plate-shaped, and the distal end portion to the storage member 248 is It may be rod-shaped. In addition, as a definition of a plate shape or a rod shape, when the positioning portion 244b is in contact with the housing member 248, the positioning portion 244b where the contact is a line contact is a plate shape, and the positioning portion 244b where the contact is a point contact is a rod shape.

  The side surface portion 248a and the container support portion 248b of the storage member 248 and the material storage portion 244a and the positioning portion 244b of the container 244 are integrally described in FIG. May be configured.

  Although not shown in the drawing, the housing member 248 may be provided with a protruding portion that protrudes in a rod shape or a plate shape with respect to the positioning portion 244b.

[Example 3]
In this embodiment, a configuration in which a positioning portion is provided in the housing member 248 and a protruding portion and a lid portion are provided in the container 244 is shown. Constituent elements common to the other embodiments are denoted by the same reference numerals, and the description is simplified. As shown in FIG. 4, the container 244 includes a material storage portion 244a and a positioning portion 244b. The housing member 248 includes a side surface portion 248a, a container support portion 248b, and a protruding portion 248d.

  The positioning portion 244b is provided to protrude from the material accommodating portion 244a of the container 244. The protruding portion 248d is provided to protrude from the housing member 248. The positioning portion 244b is provided toward the protruding portion 248d. The protruding portion 248d is provided toward the positioning portion 244b. As described above, the projecting portion 248d and the positioning portion 244b are provided toward each other, and the position of the container 244 can be set within a predetermined range as in the first and second embodiments. Further, by providing the positioning portion 244b and the protruding portion 248d, there is an effect of increasing the heating efficiency from the heater 246 to the container 244 as in the first and second embodiments.

  A lid 244c having an opening through which a vapor deposition material that has been sublimated or vaporized passes may be provided on the opening of the container 244 so as to cover the opening. In this case, the outer peripheral end portion of the lid portion 244c is provided so as to protrude with respect to the protruding portion 248d of the housing member 248, similarly to the positioning portion 244b of the container 244. By configuring the lid 244c in such a configuration, there is an effect that directivity can be given in the scattering direction of the vapor deposition material, and the opening provided in the lid 244c can be more accurately positioned. .

  In the present embodiment, the housing member 248 is provided with the protruding portion 248d, but the protruding portion 248d is not provided, and the outer peripheral end portions of the positioning portion 244b and the lid portion 244c are relative to the side surface portion 248a of the housing member 248. It is good also as a structure protruding and provided. In such a case, the same effect as described above can be obtained.

[Example 4]
In this embodiment, a configuration in which an inclination adjusting mechanism is provided below the housing member 248 is shown. Constituent elements common to the other embodiments are denoted by the same reference numerals, and the description is simplified. As shown in FIG. 5A, the housing member 248 is installed on a pedestal 320 disposed inside the chamber 200. The pedestal 320 has a screw hole, and an inclination adjusting mechanism 322 made of a screw is disposed in the screw hole.

  The tilt adjustment mechanism 322 is disposed from the lower surface of the pedestal 320 toward the upper surface, and the screw member of the tilt adjustment mechanism 322 is disposed at a position higher than the upper surface of the pedestal 320, thereby accommodating the member disposed on the pedestal 320. 248 can be tilted. As shown in FIG. 5B, the pedestal 320 has a plurality of tilt adjustment mechanisms 322. By adjusting these tilt adjustment mechanisms 322, the tilt direction of the housing member 248 is adjusted. FIG. 5B is a schematic plan view of the pedestal 320 having the tilt adjustment mechanism 322. In FIG. 5B, the tilt adjustment mechanism 322 has six points, but is not limited thereto.

  By providing the tilt adjustment mechanism 322 of the present embodiment, the placement error within the allowable range of the container position is adjusted even after the container 244 is positioned within the allowable range of the container position determined by the positioning portion 248c. can do. In the present embodiment, the tilt adjustment mechanism 322 using a screw is described as the tilt adjustment mechanism 322. However, the pedestal 320 itself may be tilted.

[Example 5]
The above embodiments can be combined with each other as much as possible. FIG. 6 shows an example. In the fifth embodiment, the configuration having the lid portion 244c and the protruding portion 248d of the third embodiment and the configuration having the inclination adjusting mechanism 322 of the fourth embodiment are used. Further, in order to increase the heating efficiency, a first shielding plate 420 is provided on the outer periphery of the side surface portion 248a, and a second shielding plate 422 is also provided on the outer side of the bottom of the material accommodating portion 244a. The heater 246 is divided into an upper part and a lower part, each of which can be controlled individually, and the upper part of the material accommodating part 244a that is easier to cool can be controlled to a higher temperature. A cooling pipe 440 is provided outside the first shielding plate 420 so that the heat of the heater 246 does not reach the outside. By setting it as the said structure, it is set as the structure which can prevent the fall of the temperature of an evaporation source apparatus more, and can perform position control of the opening which vapor deposition material passes. Constituent elements common to the other embodiments are denoted by the same reference numerals. Matters not specifically described in the present embodiment are the same as those in the above embodiment.

[Example 6]
<Specific Example of Manufacturing Method of Organic Electronic Device>
In this embodiment, an example of a method for manufacturing an organic electronic device using a vapor deposition apparatus including an evaporation source apparatus will be described. Hereinafter, an organic EL display device will be taken up as an example of an organic electronic device, and its configuration and manufacturing method will be exemplified. First, an organic EL display device to be manufactured will be described. FIG. 7A shows an overall view of the organic EL display device 60, and FIG. 7B shows a cross-sectional structure of one pixel. As the evaporation source device 240 (FIG. 1) provided in the vapor deposition device of this embodiment, the device described in any of the above embodiments is used.

As shown in FIG. 7A, in the display region 61 of the organic EL display device 60, a plurality of pixels 62 including a plurality of light emitting elements are arranged in a matrix. Although details will be described later, each of the light-emitting elements has a structure including an organic layer sandwiched between a pair of electrodes. Here, the pixel refers to a minimum unit that enables display of a desired color in the display area 61. In the case of the organic EL display device of this figure, the pixel 62 is configured by a combination of the first light emitting element 62R, the second light emitting element 62G, and the third light emitting element 62B that emit different light. The pixel 62 is often composed of a combination of a red light emitting element, a green light emitting element, and a blue light emitting element, but may be a combination of a yellow light emitting element, a cyan light emitting element, and a white light emitting element. It is not limited.

  FIG. 7B is a partial schematic cross-sectional view taken along the line AB of FIG. The pixel 62 includes a first electrode (anode) 64, a hole transport layer 65, one of the light emitting layers 66R, 66G, and 66B, an electron transport layer 67, and a second electrode on a substrate 63 that is a deposition target. (Cathode) 68. Among these, the hole transport layer 65, the light emitting layers 66R, 66G, and 66B, and the electron transport layer 67 correspond to the organic layer. In the present embodiment, the light emitting layer 66R is an organic EL layer that emits red, the light emitting layer 66G is an organic EL layer that emits green, and the light emitting layer 66B is an organic EL layer that emits blue. The light emitting layers 66R, 66G, and 66B are formed in patterns corresponding to light emitting elements that emit red, green, and blue (sometimes referred to as organic EL elements). The first electrode 64 is formed separately for each light emitting element. The hole transport layer 65, the electron transport layer 67, and the second electrode 68 may be formed in common with the plurality of light emitting elements 62R, 62G, and 62B, or may be formed for each light emitting element. Note that an insulating layer 69 is provided between the first electrodes 64 in order to prevent the first electrode 64 and the second electrode 68 from being short-circuited by foreign matter. Furthermore, since the organic EL layer is deteriorated by moisture and oxygen, a protective layer 70 for protecting the organic EL element from moisture and oxygen is provided.

Next, an example of a method for manufacturing an organic EL display device will be specifically described.
First, a circuit (not shown) for driving the organic EL display device and a substrate 63 on which the first electrode 64 is formed are prepared.

  An acrylic resin is formed by spin coating on the substrate 63 on which the first electrode 64 is formed, and the acrylic resin is patterned by a lithography method so that an opening is formed in a portion where the first electrode 64 is formed. 69 is formed. This opening corresponds to a light emitting region where the light emitting element actually emits light.

  The substrate 63 on which the insulating layer 69 is patterned is carried into the first vapor deposition apparatus, and the substrate is held on the processing object mounting base 210, and the hole transport layer 65 is shared on the first electrode 64 in the display region. A film is formed as a layer to be formed. The hole transport layer 65 is formed by vacuum deposition. Actually, since the hole transport layer 65 is formed in a size larger than the display region 61, a high-definition mask is not necessary. Here, the vapor deposition apparatus used in the film formation in this step and the following film formation of each layer includes the evaporation source apparatus described in any of the above embodiments.

  Next, the substrate 63 on which the hole transport layer 65 is formed is carried into the second vapor deposition apparatus, and is held on the workpiece installation base 210. The substrate and the mask are aligned, the substrate is placed on the mask, and the light emitting layer 66R that emits red is formed on the portion of the substrate 63 where the element that emits red is disposed. According to this example, the mask and the substrate can be satisfactorily overlapped, and highly accurate film formation can be performed.

  Similarly to the formation of the light emitting layer 66R, the light emitting layer 66G emitting green is formed by the third vapor deposition apparatus, and the light emitting layer 66B emitting blue is formed by the fourth vapor deposition apparatus. After the formation of the light emitting layers 66R, 66G, and 66B is completed, the electron transport layer 67 is formed over the entire display region 61 by the fifth vapor deposition apparatus. The electron transport layer 65 is formed as a layer common to the three-color light emitting layers 66R, 66G, and 66B.

  The substrate on which the electron transport layer 65 is formed is moved to the sputtering apparatus, the second electrode 68 is formed, and then the protective layer 70 is formed by moving to the plasma CVD apparatus, and the organic EL display device 60 is completed. To do.

  When the substrate 63 patterned with the insulating layer 69 is carried into the vapor deposition apparatus and after the formation of the protective layer 70 is completed, if it is exposed to an atmosphere containing moisture or oxygen, the light-emitting layer made of the organic EL material becomes moisture. Or may be deteriorated by oxygen. Therefore, in this example, the carrying-in / carrying-out of the substrate between the vapor deposition apparatuses is performed under a vacuum atmosphere or an inert gas atmosphere.

  In the organic EL display device thus obtained, a light emitting layer is accurately formed for each light emitting element. Therefore, if the manufacturing method is used, it is possible to suppress the occurrence of defects in the organic EL display device due to the displacement of the light emitting layer. According to the vapor deposition apparatus which concerns on this embodiment, since position control of the opening which vapor deposition material passes can be performed, suppressing the fall of the temperature of an evaporation source apparatus, favorable vapor deposition is attained.

  240: evaporation source device, 244: container, 246: heating means, 248: housing member, 248a: side surface portion, 248b: container support portion, 248c: positioning portion

Claims (16)

A container having an opening for containing a vapor deposition material;
Heating means for heating the container;
An evaporation source device having the container and a housing member that houses the heating means,
The housing member includes a container support portion, a side surface portion, and a positioning portion,
The container support portion supports the part of the outer bottom of the container in a first direction,
The positioning portion is provided so as to protrude from the side surface portion in a rod shape or a plate shape with respect to the container, the container relative to the housing member, a second direction intersecting the first direction, and the third direction crossing the first direction and the second direction, have rows positioned in at least one of,
The evaporation source apparatus , wherein the container does not come into contact with the side surface portion of the housing member . The said positioning part performs the positioning of the said container with respect to the said accommodating member by contacting with respect to the said container in at least one of the said 2nd direction and the said 3rd direction. Evaporation source device. The evaporation source apparatus according to claim 1, wherein the positioning unit is in point contact or line contact with the container. The evaporation source according to any one of claims 1 to 3, wherein the container has a protruding portion that protrudes in a rod shape or a plate shape with respect to the positioning portion from an outer surface of the container. apparatus. The positioning unit performs positioning of the container with respect to the housing member by contacting the projection in at least one of the second direction and the third direction. The evaporation source apparatus as described. A container having an opening for containing a vapor deposition material;
Heating means for heating the container;
An evaporation source device having the container and a housing member that houses the heating means,
The housing member includes a container support,
The container support portion supports the part of the outer bottom of the container in a first direction,
The container includes a material storage portion and a positioning portion,
The positioning portion is provided so as to protrude in a rod shape or a plate shape from the outer surface of the material accommodating portion with respect to the accommodating member, and a second crossing the first direction of the container relative to the accommodating member. direction, and the first direction and a third direction crossing the second direction, have rows positioned in at least one of,
The evaporation source device according to claim 1, wherein the container does not come into contact with a side surface portion of the housing member . The positioning unit performs positioning of the container with respect to the housing member by contacting the housing member in at least one of the second direction and the third direction. The evaporation source apparatus as described. The evaporation source device according to claim 6, wherein the positioning portion is in point contact or line contact with the housing member. The said accommodating member has the protrusion part which protrudes in a rod shape or plate shape with respect to the said positioning part from the side part of the said accommodating member, The Claim 6 thru | or 8 characterized by the above-mentioned. Evaporation source device. The positioning unit performs positioning of the container with respect to the housing member by contacting the projection in at least one of the second direction and the third direction. The evaporation source apparatus as described. The container includes a lid that covers the opening and has an opening through which sublimated or vaporized deposition material passes,
The evaporation source device according to claim 6, wherein an outer peripheral end portion of the lid portion is provided so as to protrude with respect to the housing member. 12. The positioning unit performs positioning of the container with respect to the housing member by contacting the outer peripheral end in at least one of the second direction and the third direction. The evaporation source apparatus according to 1.   A container having an opening for containing a vapor deposition material;
  Heating means for heating the container;
  An evaporation source device having the container and a housing member that houses the heating means,
  The housing member includes a container support portion, a side surface portion, and a positioning portion,
  The container support portion supports at least a part of the outside of the bottom of the container in a first direction;
  The positioning portion is provided so as to protrude from the side surface portion in a rod shape or a plate shape with respect to the container, the container relative to the housing member, a second direction intersecting the first direction, and the Positioning in at least one of a first direction and a third direction intersecting the second direction;
  The positioning portion is in point contact or line contact with the container.
An evaporation source device characterized by that.   A container having an opening for containing a vapor deposition material;
  Heating means for heating the container;
  An evaporation source device having the container and a housing member that houses the heating means,
  The housing member includes a container support,
  The container support portion supports at least a part of the outside of the bottom of the container in a first direction;
  The container includes a material storage portion and a positioning portion,
  The positioning portion is provided so as to protrude in a rod shape or a plate shape from the outer surface of the material accommodating portion with respect to the accommodating member, and a second crossing the first direction of the container relative to the accommodating member. Positioning in at least one of a direction and a third direction intersecting the first direction and the second direction;
  The positioning portion is in point contact or line contact with the housing member.
An evaporation source device characterized by that. The positioning unit, the evaporation source device according to any one of claims 1 to 1 4, characterized in that opening of the container is provided at the same height as the height of the position. A chamber;
A target object mounting table on which a target object is placed, a pedestal on which an evaporation source device is installed;
A vapor deposition apparatus comprising:
The evaporation source device is an evaporation source apparatus according to any one of claims 1 to 1 5,
The pedestal has a tilt adjusting mechanism for adjusting a tilt of the evaporation source device.

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