JP6566069B2 - Compound semiconductor device and manufacturing method thereof - Google Patents

Description

  The present invention relates to a compound semiconductor device and a manufacturing method thereof.

A nitride semiconductor has characteristics such as a high saturation electron velocity and a wide band gap.
For this reason, various studies have been conducted on applying nitride semiconductors to high breakdown voltage and high output semiconductor devices using these characteristics. For example, the band gap of GaN, which is a kind of nitride semiconductor, is 3.4 eV, which is larger than the band gap of Si (1.1 eV) and the band gap of GaAs (1.4 eV). For this reason, GaN has a high breakdown electric field strength and is extremely promising as a material for a semiconductor device for a power supply that obtains high voltage operation and high output.

  As semiconductor devices using nitride semiconductors, many reports have been made on field effect transistors, particularly high electron mobility transistors (HEMTs). For example, in a GaN-based HEMT, an AlGaN / GaN-HEMT using GaN as a channel layer and AlGaN as a carrier supply layer has attracted attention. In AlGaN / GaN-HEMT, strain is generated in AlGaN due to the difference in lattice constant between GaN and AlGaN. A high-concentration two-dimensional electron gas (2DEG) is obtained by the piezoelectric polarization generated by this strain and the spontaneous polarization of AlGaN. Therefore, AlGaN / GaN-HEMT is expected as a high-efficiency switch element, a high voltage power device for electric vehicles, and the like.

  However, it is extremely difficult to manufacture a GaN substrate with good crystallinity. For this reason, conventionally, a GaN layer, an AlGaN layer, etc. are mainly formed by heteroepitaxial growth above a silicon substrate, a sapphire substrate, and a silicon carbide substrate. In particular, a silicon substrate having a large diameter and high quality is easily available at low cost. For this reason, research on a structure in which a channel layer and a carrier supply layer are grown above a silicon substrate has been actively conducted.

  However, in a conventional GaN-based HEMT using a semiconductor substrate such as a silicon substrate, it is difficult to suppress leakage current flowing between the drain electrode and the semiconductor substrate. This leakage current limits the maximum operating voltage (maximum operating breakdown voltage) of the HEMT.

JP 2009-26975 A Japanese Patent Laid-Open No. 1-96964

  An object of the present invention is to provide a compound semiconductor device capable of suppressing a leakage current flowing between a drain electrode and a semiconductor substrate, a manufacturing method thereof, and the like.

One aspect of the compound semiconductor device includes a semiconductor substrate, a channel layer above the semiconductor substrate, a carrier supply layer above the channel layer, and a gate electrode, a source electrode, and a drain electrode above the carrier supply layer. The semiconductor substrate has an impurity-containing region containing Mg or Mg and C as impurities.

One aspect of a method for manufacturing a compound semiconductor device includes a step of forming an impurity-containing region containing Mg or Mg and C as impurities in a semiconductor substrate, a step of forming a channel layer above the semiconductor substrate, and the channel Forming a carrier supply layer above the layer; and forming a gate electrode, a source electrode, and a drain electrode above the carrier supply layer.

  According to the above compound semiconductor device and the like, since a suitable impurity-containing region is included in the semiconductor substrate, a leakage current flowing between the drain electrode and the semiconductor substrate can be suppressed.

1 is a diagram illustrating a compound semiconductor device according to a first embodiment. It is a figure which shows the compound semiconductor device which concerns on 2nd Embodiment. It is sectional drawing which shows the compound semiconductor device which concerns on 3rd Embodiment. It is sectional drawing which shows the manufacturing method of the compound semiconductor device which concerns on 3rd Embodiment to process order. FIG. 4B is a cross-sectional view illustrating the manufacturing method of the compound semiconductor device in the order of steps, following FIG. 4A. It is a figure which shows the relationship between drain voltage and leak current. It is sectional drawing which shows the manufacturing method of the compound semiconductor device which concerns on 4th Embodiment in process order. It is a figure which shows the discrete package which concerns on 5th Embodiment. It is a connection diagram which shows the PFC circuit which concerns on 6th Embodiment. It is a connection diagram which shows the power supply device which concerns on 7th Embodiment. It is a connection diagram which shows the amplifier which concerns on 8th Embodiment.

  The inventor of the present application studied the cause of leakage current flowing between the drain electrode and the semiconductor substrate in the conventional GaN-based HEMT. As a result, due to the high voltage applied to the drain electrode, the depletion layer enters the semiconductor substrate beyond the nitride semiconductor layers such as the carrier supply layer and the channel layer, and electron-hole pairs are generated in the semiconductor substrate. It has been found. In particular, when silicon or silicon carbide having a small band gap is used for a semiconductor substrate, electron-hole pairs are likely to be generated. Furthermore, when a GaN-based HEMT is used for a power device that is responsible for a large current operation, the temperature of the GaN-based HEMT exceeds 100 ° C., so that generation of electron-hole pairs is significantly accelerated by thermal excitation. The electron-hole pairs are separated by the internal electric field, and the electrons flow into the nitride semiconductor layer. A leakage current is generated as the electrons move.

  The inventor of the present application has made further studies to suppress the leakage current based on the above new knowledge. As a result, by allowing the semiconductor substrate to contain a predetermined impurity, the electron-hole pairs generated in the semiconductor substrate can be quickly recombined and the movement of electrons to the nitride semiconductor layer can be suppressed. It was found.

  Hereinafter, embodiments will be described in detail with reference to the accompanying drawings.

(First embodiment)
First, the first embodiment will be described. The first embodiment is an example of a GaN-based HEMT. FIG. 1 is a diagram illustrating the compound semiconductor device according to the first embodiment. FIG. 1A shows an outline of a cross-sectional structure, and FIG. 1B shows an outline of a band structure.

  As shown in FIG. 1A, the compound semiconductor device 100 according to the first embodiment includes a semiconductor substrate 101, a channel layer 103 above the semiconductor substrate 101, and a carrier supply layer 104 above the channel layer 103. ing. The semiconductor substrate 101 includes an impurity-containing region 102 containing impurities. The level formed by this impurity is 0.25 eV or more lower than the lower end of the conduction band of silicon and higher than the upper end of the valence band of silicon. The compound semiconductor device 100 also includes a gate electrode 105g, a source electrode 105s, and a drain electrode 105d above the carrier supply layer 104.

An outline of the band structure in the stacking direction including the drain electrode 105d in the first embodiment is shown in FIG. In the first embodiment, when a positive high voltage is applied to the drain electrode 105d, the depletion layer enters the semiconductor substrate 101, and as shown in FIG. A hole 112 is generated. That is, electron-hole pairs are generated in the semiconductor substrate 101. In the first embodiment, the semiconductor substrate 101 includes the impurity containing region 102, and the level formed by the impurity contained in the impurity containing region 102 is 0.25 eV or more lower than the lower end of the conduction band of silicon, It is higher than the upper end of the valence band of silicon. Such an impurity forms a deep level in the semiconductor substrate 101, so that a recombination center 113 for annihilating electrons and holes exists in the semiconductor substrate 101. Therefore, as shown in FIG. 1B, the electrons 111 and the holes 112 generated in the semiconductor substrate 101 are rapidly recombined due to the influence of impurities. That is, the impurities in the impurity-containing region 102 shorten the carrier lifetime. Therefore, the electrons disappear before the electron-hole pairs are separated. For example, the carrier lifetime in the semiconductor substrate 101 is 1 × 10 ⁻⁹ seconds or less. For this reason, according to the first embodiment, it is possible to suppress the leakage current associated with the generation of the electrons 111 and the holes 112.

  If the difference between the level formed by the impurity contained in the impurity-containing region 102 and the lower end of the conduction band of silicon is less than 0.25 eV, the impurity may function as a donor, and leakage current may increase.

(Second Embodiment)
Next, a second embodiment will be described. The second embodiment is an example of a GaN-based HEMT. FIG. 2 is a diagram illustrating a compound semiconductor device according to the second embodiment. FIG. 2A shows an outline of the cross-sectional structure, and FIG. 2B shows an outline of the band structure.

  As shown in FIG. 2A, the compound semiconductor device 200 according to the second embodiment includes a semiconductor substrate 201, a channel layer 203 above the semiconductor substrate 201, and a carrier supply layer 204 above the channel layer 203. ing. The semiconductor substrate 201 includes an impurity-containing region 202 containing impurities. The level formed by this impurity is preferably 0.25 eV or more lower than the lower end of the conduction band of silicon, higher than the upper end of the valence band of silicon, and higher by 0.25 eV or more. The compound semiconductor device 200 also includes an initial layer 206 between the semiconductor substrate 201 and the channel layer 203 and a buffer layer 207 between the initial layer 206 and the channel layer 203. The compound semiconductor device 200 also includes a gate electrode 205g, a source electrode 205s, and a drain electrode 205d above the carrier supply layer 204.

The semiconductor substrate 201 is, for example, a silicon substrate having an upper surface mirror index of (111). The semiconductor substrate 201 may be a silicon carbide substrate or the like. The impurity contained in the impurity-containing region 202 is, for example, Fe, C, Mg, Au, B, or any combination thereof. For example, a region from the upper surface of the semiconductor substrate 201 to a depth of at least 50 μm is an impurity-containing region 202 having an average impurity concentration of 1 × 10 ¹⁸ cm ⁻³ or more.

The initial layer 206 is an AlN layer having a thickness of about 200 nm, for example. The buffer layer 207 is an AlGaN layer, for example. The channel layer 203 is, for example, an i-GaN layer having a thickness of about 1 μm and not intentionally doped with impurities. The carrier supply layer 204 is an n-type n-Al _0.2 Ga _0.8 N layer having a thickness of about 20 nm, for example. The carrier supply layer 204 is doped with, for example, Si as an n-type impurity at a concentration of about 5 × 10 ¹⁸ cm ⁻³ . The source electrode 205s and the drain electrode 205d include, for example, a Ti film and an Al film thereon, and are in ohmic contact with the carrier supply layer 204 and the channel layer 203. The gate electrode 205g includes, for example, a Ni film and an Au film thereon, and is in Schottky contact with the carrier supply layer 204 and the channel layer 203.

An outline of the band structure in the stacking direction including the drain electrode 205d in the second embodiment is shown in FIG. In the second embodiment, when a positive high voltage is applied to the drain electrode 205d, the depletion layer penetrates into the semiconductor substrate 201, and as shown in FIG. A hole 212 is generated. That is, electron-hole pairs are generated in the semiconductor substrate 201. In the second embodiment, the semiconductor substrate 201 includes the impurity-containing region 202, and the level formed by the impurity contained in the impurity-containing region 202 is 0.25 eV or more lower than the lower end of the conduction band of silicon, It is higher than the upper end of the valence band of silicon. Such an impurity forms a deep level in the semiconductor substrate 201, so that a recombination center 213 for annihilating electrons and holes exists in the semiconductor substrate 201. Accordingly, as shown in FIG. 2B, the electrons 211 and the holes 212 generated in the semiconductor substrate 201 are rapidly recombined due to the influence of impurities. That is, the impurities in the impurity-containing region 202 shorten the carrier lifetime. Therefore, the electrons disappear before the electron-hole pairs are separated. For example, the carrier lifetime in the semiconductor substrate 201 is 1 × 10 ⁻⁹ seconds or less. For this reason, according to the second embodiment, it is possible to suppress the leakage current accompanying the generation of the electrons 211 and the holes 212.

If the difference between the level formed by the impurity contained in the impurity-containing region 202 and the lower end of the conduction band of silicon is less than 0.25 eV, the impurity functions as a donor and the recombination center 213 cannot be obtained. There is a risk that the leakage current increases. When the difference between the level formed by the impurity contained in the impurity-containing region 202 and the upper end of the valence band of silicon is less than 0.25 eV, the impurity functions as an acceptor, and sufficient recombination centers 213 are formed. May not be obtained.

(Third embodiment)
Next, a third embodiment will be described. The third embodiment is an example of a GaN-based HEMT. FIG. 3 is a sectional view showing the compound semiconductor device according to the third embodiment.

  As shown in FIG. 3, the compound semiconductor device 300 according to the third embodiment includes a semiconductor substrate 301, a channel layer 303 above the semiconductor substrate 301, and a carrier supply layer 304 above the channel layer 303. The semiconductor substrate 301 includes an impurity-containing region 302 containing impurities. The compound semiconductor device 300 also includes an initial layer 306 between the semiconductor substrate 301 and the channel layer 303, and a buffer layer 307 between the initial layer 306 and the channel layer 303. The compound semiconductor device 300 also includes a gate electrode 305g, a source electrode 305s, and a drain electrode 305d above the carrier supply layer 304.

The semiconductor substrate 301 is, for example, a silicon substrate having an upper surface mirror index of (111). The impurity contained in the impurity-containing region 302 is, for example, Fe. For example, a region from the upper surface of the semiconductor substrate 301 to a depth of at least 50 μm is an impurity-containing region 302 having an average impurity concentration of 1 × 10 ¹⁸ cm ⁻³ or more. The concentration of Fe is about 1 × 10 ¹⁹ cm ^{−3 on} the upper surface of the semiconductor substrate 301 and about 1 × 10 ¹⁷ cm ^{−3 in} a region about 100 nm deep from the upper surface. The level formed by Fe is 0.25 eV or more lower than the lower end of the conduction band of silicon and 0.25 eV or more higher than the upper end of the valence band of silicon.

The initial layer 306 is an AlN layer having a thickness of about 200 nm, for example. The buffer layer 307 includes a buffer layer 307a and a buffer layer 307b thereon. The buffer layer 307a is an Al _0.4 Ga _0.6 N layer, for example. The buffer layer 307b is a superlattice buffer layer in which an AlN layer and an Al _0.2 Ga _0.8 N layer are repeatedly stacked for about 80 periods. For example, the thicknesses of the AlN layer and the Al _0.2 Ga _0.8 N layer in one cycle of the superlattice buffer layer are 1.5 nm and 20 nm, respectively. The thickness of the AlN layer is desirably 2 nm or less in order to avoid a decrease in breakdown voltage due to generation of residual electrons. The channel layer 303 is, for example, an i-GaN layer having a thickness of about 1 μm and not intentionally doped with impurities. The carrier supply layer 304 is an n-type n-Al _0.2 Ga _0.8 N layer having a thickness of about 20 nm, for example. The carrier supply layer 304 is doped with, for example, Si as an n-type impurity at a concentration of about 5 × 10 ¹⁸ cm ⁻³ . The source electrode 305 s and the drain electrode 305 d include, for example, a Ti film and an Al film thereon, and are in ohmic contact with the carrier supply layer 304 and the channel layer 303. The gate electrode 305g includes, for example, a Ni film and an Au film thereon, and is in Schottky contact with the carrier supply layer 304 and the channel layer 303.

  The band structure in the stacking direction including the drain electrode 305d in the third embodiment is the same as the band structure in the stacking direction including the drain electrode 205d in the second embodiment. Therefore, even when a positive high voltage is applied to the drain electrode 305d and an electron-hole pair is generated, a leakage current accompanying the generation of the electron-hole pair can be suppressed.

  Next, a method for manufacturing a compound semiconductor device according to the third embodiment will be described. 4A to 4B are cross-sectional views illustrating the method of manufacturing the compound semiconductor device according to the third embodiment in the order of steps.

First, as shown in FIG. 4A (a), a protective film 310 is formed on a semiconductor substrate 301. The protective film 310 is a silicon oxide film having a thickness of about 20 nm, for example. The protective film 310 can be formed by, for example, heat treatment in an O ₂ gas atmosphere, that is, thermal oxidation. The temperature of heat processing is 950 degreeC, for example. The protective film 310 may be formed by chemical vapor deposition (CVD).

Next, as shown in FIG. 4A (b), Fe ions are implanted into the semiconductor substrate 301 through the protective film 310. The concentration of Fe is about 1 × 10 ¹⁹ cm ^{−3 on} the upper surface of the semiconductor substrate 301 and about 1 × 10 ¹⁷ cm ^{−3 in} a region about 100 nm deep from the upper surface. Thereafter, annealing is performed to recover crystal damage caused by ion implantation. For example, this annealing is performed in an N ₂ atmosphere, and the temperature and time are about 950 ° C. and about 30 minutes, respectively.

  Subsequently, as shown in FIG. 4A (c), the protective film 310 is removed. The protective film 310 can be removed in about 5 minutes, for example, by immersing the semiconductor substrate 301 together with the protective film 310 in a hydrofluoric acid solution diluted to about 10% with pure water.

Next, as illustrated in FIG. 4B (d), the initial layer 306, the buffer layer 307 a, the buffer layer 307 b, the channel layer 303, and the carrier supply layer 304 are formed over the semiconductor substrate 301. The initial layer 306, the buffer layer 307a, the buffer layer 307b, the channel layer 303, and the carrier supply layer 304 are formed by, for example, metal organic chemical vapor deposition (MOCVD) method or molecular beam epitaxy (MBE) method. It can be formed by a crystal growth method such as. As the source gas, for example, a mixed gas of trimethylaluminum (TMA) gas, trimethylgallium (TMG) gas, and ammonia (NH ₃ ) gas is used.

In the formation of the initial layer 306 (AlN layer), for example, the V / III ratio is about 1000 to 2000, the growth temperature is about 1000 ° C., and the pressure is about 50 mbar. It is preferable to select a condition in which the C impurity is less taken into the initial layer 306. In the formation of the buffer layer 307a (Al _0.4 Ga _0.6 N layer), for example, the V / III ratio is about 100 to 300, the growth temperature is about 1000 ° C., and the pressure is about 50 mbar. The reason why the V / III ratio at the time of forming the buffer layer 307a is lower than that at the time of forming the initial layer 306 is to obtain high flatness.

In the formation of the buffer layer 307b (superlattice buffer layer), the formation of the AlN layer and the formation of the Al _0.2 Ga _0.8 N layer are repeated about 80 times. In the formation of the AlN layer and the formation of the Al _0.2 Ga _0.8 N layer, for example, the growth temperature is set to about 1020 ° C. and the pressure is set to about 50 mbar, and the source gas is switched. Thus, for example, in the formation of the AlN layer and the formation of the Al _0.2 Ga _0.8 N layer, the growth temperature and pressure are made common.

In forming the channel layer 303 (i-GaN layer), for example, the V / III ratio is about 600, the growth temperature is about 1000 ° C., and the pressure is about 200 mbar. In the formation of the carrier supply layer 304 (n-AlGaN layer), the V / III ratio is 3000 or more, the growth temperature is about 1040 ° C., and the pressure is about 400 mbar. In order to suppress the current collapse phenomenon, it is preferable to select a condition for reducing the C concentration. When growing an n-type compound semiconductor layer (eg, carrier supply layer 304), for example, SiH ₄ gas containing Si is added to the mixed gas at a predetermined flow rate, and Si is doped into the compound semiconductor layer.

After the carrier supply layer 304 is formed, an element isolation region that defines an element region is formed. In the formation of the element isolation region, for example, a photoresist pattern exposing the region where the element isolation region is to be formed is formed on the carrier supply layer 304, and ion implantation of Ar or the like is performed using this pattern as a mask. Dry etching using a chlorine-based gas may be performed using this pattern as an etching mask. Thereafter, as shown in FIG. 4B (e), the source electrode 305s and the drain electrode 305d are formed on the carrier supply layer 304 in the element region. The source electrode 305s and the drain electrode 305d can be formed by, for example, a lift-off method. That is, a region where the source electrode 305s is to be formed and a region where the drain electrode 305d is to be formed are exposed, a photoresist pattern covering the other region is formed, and a metal film is formed by vapor deposition using this pattern as a growth mask. Then, the pattern is removed together with the metal film thereon. In the formation of the metal film, for example, a Ti film having a thickness of about 100 nm is formed, and an Al film having a thickness of about 300 nm is formed thereon. Next, for example, heat treatment (for example, rapid thermal annealing (RTA)) is performed at 400 ° C. to 1000 ° C. (for example, 600 ° C.) in an atmosphere of N ₂ to obtain ohmic contact. Further, a gate electrode 305g is formed on the carrier supply layer 304 between the source electrode 305s and the drain electrode 305d. The gate electrode 305g can be formed by, for example, a lift-off method. That is, a photoresist pattern exposing a region where the gate electrode 305g is to be formed is formed, a metal film is formed by vapor deposition using this pattern as a growth mask, and this pattern is removed together with the metal film thereon. In the formation of the metal film, for example, a Ni film having a thickness of about 50 nm is formed, and an Au film having a thickness of about 300 nm is formed thereon.

  And a protective film, wiring, etc. are formed as needed and a compound semiconductor device is completed.

  The inventors of the present invention manufactured a compound semiconductor device according to the third embodiment and measured the leakage current with various drain voltages. The result shown in FIG. 5 was obtained. FIG. 5 also shows the measurement result of the leakage current of the reference example in which the formation of the impurity-containing region 302 is omitted. As shown in FIG. 5, in the third embodiment including the impurity-containing region 302, the leakage current can be significantly reduced.

  The inventor of the present application also verified the change in crystallinity due to ion implantation of impurities. Here, Fe was ion-implanted according to the third embodiment, and after removing the protective film, the GaN layer was grown, and its crystallinity was measured by the X-ray rocking curve method. The same measurement was performed when Au was ion-implanted instead of Fe. Furthermore, the same measurement was performed when no impurity ion implantation was performed. These results are shown in Table 1.

  As shown in Table 1, crystallinity equal to or higher than that obtained when no ion implantation of impurities was performed was obtained in both cases where Fe was ion-implanted and Au was ion-implanted. That is, no decrease in crystallinity due to impurity ion implantation was observed.

  Fe may be introduced by a method other than ion implantation. For example, an Fe film may be formed on the semiconductor substrate 301 by vapor deposition or the like, and Fe may be thermally diffused into the semiconductor substrate 301 by heat treatment.

(Fourth embodiment)
Next, a fourth embodiment will be described. In the fourth embodiment, a compound semiconductor device similar to that of the third embodiment is manufactured by a method different from the method shown in FIGS. 4A to 4B. FIG. 6 is a cross-sectional view showing the method of manufacturing the compound semiconductor device according to the fourth embodiment in the order of steps.

  In the fourth embodiment, first, an initial layer 306 is formed on a semiconductor substrate 301 as shown in FIG. The initial layer 306 can be formed by a crystal growth method such as an MOCVD method or an MBE method. Next, as shown in FIG. 6B, Fe ions are implanted into the semiconductor substrate 301 through the initial layer 306. Thereafter, annealing is performed to recover crystal damage caused by ion implantation. Subsequently, as illustrated in FIG. 6C, the buffer layer 307 a, the buffer layer 307 b, the channel layer 303, and the carrier supply layer 304 are formed on the initial layer 306. Next, an element isolation region is formed, and as shown in FIG. 6D, a source electrode 305s and a drain electrode 305d are formed, and a gate electrode 305g is formed.

  And a protective film, wiring, etc. are formed as needed and a compound semiconductor device is completed.

  According to the fourth embodiment, the same effects as those of the third embodiment can be obtained. According to the fourth embodiment, since a deep level can also be formed in the initial layer 306, the leakage current can be further suppressed. Further, the impurity concentration profile across the interface between the initial layer 306 and the semiconductor substrate 301 can be made continuous.

  Note that the semiconductor substrate 301 may be a silicon carbide substrate or the like. The impurity contained in the impurity-containing region 302 may be Fe, C, Mg, Au, B, or any combination thereof. The buffer layer 307b is not necessarily a superlattice buffer layer. For example, an AlGaN layer whose Al composition decreases as it approaches the channel layer 303 side may be used for the buffer layer 307b. In this case, the composition of Al at the interface with the buffer layer 307a is, for example, not more than the Al composition of the buffer layer 307a. The change in the Al composition is, for example, stepwise. Further, the initial layer 306 and the like may be formed using a GaN substrate or a sapphire substrate as a growth substrate. In this case, for example, after the formation of the source electrode 305s, the drain electrode 305d, and the gate electrode 305g is completed, the growth substrate is removed, and the semiconductor substrate 301 including the impurity-containing region 302 is attached.

(Fifth embodiment)
The fifth embodiment relates to a GaN-based HEMT discrete package. FIG. 7 is a view showing a discrete package according to the fifth embodiment.

  In the fifth embodiment, as shown in FIG. 7, the back surface of the GaN-based HEMT HEMT chip 1210 of any of the first to third embodiments is land (die pad) using a die attach agent 1234 such as solder. 1233 is fixed. Further, a wire 1235d such as an Al wire is connected to the drain pad 1226d to which the drain electrode 105d, 205d or 305d is connected, and the other end of the wire 1235d is connected to a drain lead 1232d integrated with the land 1233. . A wire 1235s such as an Al wire is connected to the source pad 1226s connected to the source electrode 105s, 205s or 305s, and the other end of the wire 1235s is connected to a source lead 1232s independent of the land 1233. A wire 1235g such as an Al wire is connected to the gate pad 1226g connected to the gate electrode 105g, 205g, or 305g, and the other end of the wire 1235g is connected to a gate lead 1232g independent of the land 1233. The land 1233, the HEMT chip 1210, and the like are packaged with the mold resin 1231 so that a part of the gate lead 1232g, a part of the drain lead 1232d, and a part of the source lead 1232s protrude.

  Such a discrete package can be manufactured as follows, for example. First, the HEMT chip 1210 is fixed to the land 1233 of the lead frame using a die attach agent 1234 such as solder. Next, by bonding using wires 1235g, 1235d and 1235s, the gate pad 1226g is connected to the gate lead 1232g of the lead frame, the drain pad 1226d is connected to the drain lead 1232d of the lead frame, and the source pad 1226s is connected to the source of the lead frame. Connect to lead 1232s. Thereafter, sealing using a mold resin 1231 is performed by a transfer molding method. Subsequently, the lead frame is separated.

(Sixth embodiment)
Next, a sixth embodiment will be described. The sixth embodiment relates to a PFC (Power Factor Correction) circuit including a GaN-based HEMT. FIG. 8 is a connection diagram showing a PFC circuit according to the sixth embodiment.

  The PFC circuit 1250 is provided with a switch element (transistor) 1251, a diode 1252, a choke coil 1253, capacitors 1254 and 1255, a diode bridge 1256, and an AC power supply (AC) 1257. The drain electrode of the switch element 1251 is connected to the anode terminal of the diode 1252 and one terminal of the choke coil 1253. A source electrode of the switch element 1251 is connected to one terminal of the capacitor 1254 and one terminal of the capacitor 1255. The other terminal of the capacitor 1254 and the other terminal of the choke coil 1253 are connected. The other terminal of the capacitor 1255 and the cathode terminal of the diode 1252 are connected. A gate driver is connected to the gate electrode of the switch element 1251. An AC 1257 is connected between both terminals of the capacitor 1254 via a diode bridge 1256. A direct current power supply (DC) is connected between both terminals of the capacitor 1255. In this embodiment, the GaN-based HEMT according to any one of the first to third embodiments is used for the switch element 1251.

  In manufacturing the PFC circuit 1250, the switch element 1251 is connected to the diode 1252, the choke coil 1253, and the like using, for example, solder.

(Seventh embodiment)
Next, a seventh embodiment will be described. The seventh embodiment relates to a power supply device including a GaN-based HEMT. FIG. 9 is a connection diagram illustrating the power supply device according to the seventh embodiment.

  The power supply device is provided with a high-voltage primary circuit 1261 and a low-voltage secondary circuit 1262, and a transformer 1263 disposed between the primary circuit 1261 and the secondary circuit 1262.

  The primary circuit 1261 is provided with an inverter circuit connected between both terminals of the PFC circuit 1250 according to the sixth embodiment and the capacitor 1255 of the PFC circuit 1250, for example, a full bridge inverter circuit 1260. The full bridge inverter circuit 1260 is provided with a plurality (here, four) of switch elements 1264a, 1264b, 1264c, and 1264d.

  The secondary side circuit 1262 is provided with a plurality (three in this case) of switch elements 1265a, 1265b, and 1265c.

  In this embodiment, the switch element 1251 of the PFC circuit 1250 and the switch elements 1264a, 1264b, 1264c, and 1264d of the full-bridge inverter circuit 1260 that constitute the primary side circuit 1261 are any of the first to third embodiments. A GaN-based HEMT is used. On the other hand, normal MIS type FETs (field effect transistors) using silicon are used for the switch elements 1265a, 1265b, and 1265c of the secondary side circuit 1262.

(Eighth embodiment)
Next, an eighth embodiment will be described. The eighth embodiment relates to an amplifier including a GaN-based HEMT. FIG. 10 is a connection diagram illustrating an amplifier according to the eighth embodiment.

  The amplifier is provided with a digital predistortion circuit 1271, mixers 1272a and 1272b, and a power amplifier 1273.

  The digital predistortion circuit 1271 compensates for nonlinear distortion of the input signal. The mixer 1272a mixes the input signal compensated for nonlinear distortion and the AC signal. The power amplifier 1273 includes the GaN-based HEMT according to any one of the first to third embodiments, and amplifies an input signal mixed with an AC signal. In the present embodiment, for example, by switching the switch, the signal on the output side can be mixed with the AC signal by the mixer 1272b and sent to the digital predistortion circuit 1271. This amplifier can be used as a high-frequency amplifier or a high-power amplifier.

  Hereinafter, various aspects of the present invention will be collectively described as supplementary notes.

(Appendix 1) a semiconductor substrate;
A channel layer above the semiconductor substrate;
A carrier supply layer above the channel layer;
A gate electrode, a source electrode and a drain electrode above the carrier supply layer;
Have
The compound semiconductor device, wherein the semiconductor substrate has an impurity-containing region containing C, Mg, or any combination thereof as an impurity.

  (Supplementary note 2) The compound semiconductor device according to supplementary note 1, wherein the semiconductor substrate is a silicon substrate or a silicon carbide substrate.

  (Supplementary note 3) The compound semiconductor device according to supplementary note 1 or 2, wherein the impurity is Fe, C, Au, B, Mg, or any combination thereof.

  (Supplementary note 4) The level formed by the impurities is 0.25 eV or more lower than the lower end of the conduction band of the semiconductor substrate crystal and higher than the upper end of the valence band of the semiconductor substrate crystal. 4. The compound semiconductor device according to any one of 1 to 3.

  (Supplementary note 5) The compound semiconductor device according to any one of supplementary notes 1 to 4, wherein a level formed by the impurities is 0.25 eV or more higher than an upper end of a valence band of silicon.

  (Supplementary note 6) The compound semiconductor device according to any one of supplementary notes 1 to 5, further comprising an initial layer containing AlN between the semiconductor substrate and the channel layer.

  (Supplementary note 7) The compound semiconductor device according to any one of supplementary notes 1 to 6, further comprising a buffer layer containing AlGaN between the semiconductor substrate and the channel layer.

  (Supplementary note 8) A superlattice buffer layer in which a first nitride semiconductor layer and a second nitride semiconductor layer are repeatedly laminated is provided between the semiconductor substrate and the channel layer. 8. The compound semiconductor device according to any one of items 1 to 7.

(Supplementary note 9) Any one of Supplementary notes 1 to 8, wherein a region from the upper surface of the semiconductor substrate to a depth of at least 50 nm is the impurity-containing region having an average impurity concentration of 1 × 10 ¹⁸ cm ⁻³ or more. 2. The compound semiconductor device according to claim 1.

(Supplementary note 10) The compound semiconductor device according to any one of supplementary notes 1 to 9, wherein a carrier lifetime in the semiconductor substrate is 1 × 10 ⁻⁹ seconds or less.

  (Additional remark 11) It has a compound semiconductor device of any one of Additional remark 1 thru | or 10, The power supply device characterized by the above-mentioned.

  (Supplementary note 12) An amplifier comprising the compound semiconductor device according to any one of supplementary notes 1 to 10.

(Additional remark 13) The process of forming the impurity containing area | region which contains C or Mg, or these arbitrary combinations as an impurity in a semiconductor substrate,
Forming a channel layer above the semiconductor substrate;
Forming a carrier supply layer above the channel layer;
Forming a gate electrode, a source electrode, and a drain electrode above the carrier supply layer;
A method for producing a compound semiconductor device, comprising:

100, 200, 300: Compound semiconductor device 101, 201, 301: Semiconductor substrate 102, 202, 302: Impurity-containing region 103, 203, 303: Channel layer 104, 204, 304: Carrier supply layer

Claims (11)

A semiconductor substrate;
A channel layer above the semiconductor substrate;
A carrier supply layer above the channel layer;
A gate electrode, a source electrode and a drain electrode above the carrier supply layer;
Have
The compound semiconductor device, wherein the semiconductor substrate has an impurity-containing region containing Mg or Mg and C as impurities.   The compound semiconductor device according to claim 1, wherein the semiconductor substrate is a silicon substrate or a silicon carbide substrate. The semiconductor substrate is a silicon substrate;
Level of the impurity is formed, a compound semiconductor device according to claim 1, wherein the higher than an upper end of 0.25eV or less than the lower end of the conduction band of silicon, and the valence band of silicon. 4. The compound semiconductor device according to claim 3, wherein a level formed by the impurities is 0.25 eV or more higher than an upper end of a valence band of silicon. Wherein between said channel layer and the semiconductor substrate, a compound semiconductor device according to any one of claims 1 to 4, characterized in that it has an initial layer containing AlN. Wherein between said channel layer and the semiconductor substrate, a compound semiconductor device according to any one of claims 1 to 5, characterized in that a buffer layer containing AlGaN. Wherein between the semiconductor substrate and the channel layer and, of claims 1 to 6, wherein a first nitride semiconductor layer and the second nitride semiconductor layer and the superlattice buffer layer are laminated repeatedly The compound semiconductor device according to any one of claims. The compound semiconductor device according to any one of claims 1 to 7, wherein the carrier lifetime in a semiconductor substrate is not more than 1 × 10 ^-9 seconds. Power supply, characterized in that it comprises a compound semiconductor device according to any one of claims 1 to 8. Amplifier, characterized in that it comprises a compound semiconductor device according to any one of claims 1 to 8. Forming an impurity-containing region containing Mg or Mg and C as impurities in a semiconductor substrate;
Forming a channel layer above the semiconductor substrate;
Forming a carrier supply layer above the channel layer;
Forming a gate electrode, a source electrode, and a drain electrode above the carrier supply layer;
A method for producing a compound semiconductor device, comprising:

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