JP6561920B2 - Electrical characteristic measuring apparatus and electrical characteristic measuring method - Google Patents

Description

  The present invention relates to an electrical property measuring apparatus and an electrical property measuring method.

  As background art of this technical field, there is JP-A-2003-121459 (Patent Document 1). In this publication, “a microprobe such as a cantilever provided in a scanning probe microscope such as an atomic force microscope is used as a probe, and the pressure or displacement is controlled within the range of the atomic force, and the microprobe is measured on the material to be measured. Measured by the four-probe method while controlling the contact pressure of the microprobe to the object to be measured within the range of the atomic force, and the electrical resistivity depends on the contact pressure or displacement Can be obtained. "

  There is JP-A-2003-344257 (Patent Document 2). This publication states: “Atomic force microscope (AFM) for inspecting the sample, including a probe assembly including a first tip and a second tip, each directed to the surface of the sample. The microscope further includes a voltage source that applies a potential between the first tip and the second tip, at least one mechanism that produces a relative motion between the surface and the probe, and a first And at least one sensor for detecting a current flowing between the tip portion and the second tip portion.

JP 2003-121459 A JP 2003-344257 A

  Patent Document 1 describes a method for measuring electrical characteristics of a measurement target. However, Patent Document 1 does not have means for measuring the surface shape of the measurement target. Therefore, it is impossible to evaluate the electrical characteristics of a minute region. Further, Patent Document 1 is a method for evaluating electrical characteristics using a plurality of probes, but it is a method for measuring the average voltage on the surface of a measurement target because electrical characteristics cannot be evaluated in a minute region.

  Patent Document 2 describes a method for measuring electrical characteristics of a measurement target. However, Patent Document 2 does not have means for measuring the surface shape of the measurement target. For this reason, it is impossible to evaluate the electrical characteristics of a minute region on the surface of the measurement target.

  Therefore, in the present invention, an electrical characteristic measuring apparatus that solves the above-described problems of the prior art and makes it possible to measure the electrical characteristics of a minute region of the surface of the measurement target in correspondence with the surface shape of the measurement target. And a method for measuring electrical characteristics.

In order to solve the above problems, for example, the configuration described in the claims is adopted.
The present invention includes a plurality of means for solving the above-described problems. To give an example, the electrical property measuring device includes a sample stage that is movable with a sample mounted thereon, and a voltage applied to the sample mounted on the sample stage. A voltage application unit that applies voltage, a current value measurement unit that includes a pair of electrodes that measure a current value flowing through the sample mounted on the sample stage, and a state in which a voltage is applied to the sample mounted on the sample stage by the voltage application unit The surface property measurement unit that measures the distribution of the electric field on the surface of the sample with the image generation unit that generates an image of the sample based on the distribution of the electric field on the surface of the sample measured by the surface property measurement unit, and the current value measurement unit A display unit for displaying the measured current value data and the sample image generated by the image generation unit is provided.

  Further, in order to solve the above-described problems, in the present invention, in the electrical characteristic measurement method, the measurement of the current value flowing between the electrodes by contacting the electrode mounted on the sample stage is performed at a predetermined pitch on the sample. The region where the current value flowing between the electrodes is abnormal is extracted, the current value flowing between the electrodes is measured at a region where the extracted current value is abnormal, and the voltage is applied to the sample. This is the measurement of the electric field distribution on the surface of the sample in the region where the current value is abnormal by scanning the upper part of the region where the current value extracted in the state is abnormal with a probe attached to the tip of the support plate to which the voltage is applied. An image based on the distribution of the electric field is generated, and the image based on the generated electric field distribution and the current value data measured for the region where the current value is abnormal are displayed on the screen.

According to the present invention, the electrical information and the surface shape information are acquired at the same time by acquiring the electrical information of the micro area on the surface of the object to be measured. I can do it now. In addition, the electrical information is measured by processing data related to the current value flowing between the sample and the electrode, so that resistance information on the sample surface can be provided from the obtained electrical information.
Problems, configurations, and effects other than those described above will be clarified by the following description of embodiments.

It is a block diagram which shows the schematic structure of the electrical property measuring apparatus which concerns on Example 1 of this invention. It is a flowchart which shows the flow of a process of the electrical property measurement using the electrical property measuring apparatus which concerns on Example 1 of this invention. It is a flowchart which shows the flow of a process of the electrical property measurement using the electrical property measuring apparatus which concerns on Example 1 of this invention. It is a front view of the screen which outputs the result of a measurement of the electrical property measuring device concerning Example 1 of the present invention. It is a block diagram which shows the schematic structure of the principal part of the electrical property measuring apparatus which concerns on Example 2 of this invention. It is a block diagram which shows the schematic structure of the principal part of the electrical property measuring apparatus which concerns on Example 3 of this invention. It is a block diagram which shows the schematic structure of the principal part of the electrical property measuring apparatus which concerns on Example 4 of this invention. It is a block diagram which shows the schematic structure of the principal part of the electrical property measuring apparatus which concerns on Example 5 of this invention. It is sectional drawing of the base material with a transparent conductive film of the object which measures an electrical property with the electrical property measuring apparatus which concerns on Example 6 of this invention.

In the present invention, the probe is disposed close to the surface of the sample, and a voltage is applied between the probe and the sample while relatively scanning the probe and the sample, thereby making it possible to place the probe between the surface of the sample and the tip of the probe. An apparatus and method for measuring the electrical characteristics of a sample surface for observing the surface of the sample by utilizing the physical phenomenon that occurs. A pair of electrodes are brought into contact with or pierced with the surface of the sample. By applying a voltage to the sample and measuring the current flowing between them, the electrical information of the sample is obtained, and the electrical information of the micro area on the surface of the object to be measured and the surface shape information By simultaneously acquiring the information, the deviation between the electrical information and the surface shape information is eliminated, and more accurate measurement can be performed.
Hereinafter, embodiments will be described with reference to the drawings.

In this embodiment, an example of an electrical property measuring apparatus and an electrical property measuring method will be described.
FIG. 1 is a block diagram showing the overall configuration of an electrical characteristic measuring apparatus 100 according to this embodiment. The electrical property measuring apparatus 100 according to the present embodiment includes a stage unit 110, a surface property measuring unit 120, an electrical property measuring unit 130, and a processing control unit 140.

  The stage unit 110 includes a sample stage 1, a stage drive mechanism 3, a DC power supply 4, and a charge removal device 5. The sample stage 1 carries the sample 2 and is driven by the stage driving mechanism 3 to move in the XY plane and in the Z direction perpendicular to the XY plane and the θ direction rotating in the XY plane. The sample stage 1 and the sample 2 are formed of a conductive material such as a metal, and a DC voltage is applied from the DC power source 4. By connecting the neutralization device 5 to the DC power source 4, the sample stage 1 and the sample 2 are neutralized when the application of voltage to the sample stage 1 and the sample 2 by the DC power source 4 is stopped.

  The surface characteristic measurement unit 120 includes a support plate 6 having a probe 7 formed at the free end of the tip, a power supply 8 that applies a necessary voltage to the support plate 6, and a deflection amount detection that detects the deflection amount of the support plate 6. A portion 9 and a Z-axis drive portion 51 for setting the height of the support plate 6 in the Z direction are provided. The power source 8 is connected between the negative electrode side of the DC power source 4 and the support plate 6. The Z-axis drive unit 51 is configured by, for example, a piezo element, and sets the position (height) of the support plate 6 in the Z direction with a voltage applied to the piezo element from a power source (not shown).

  When measuring the surface characteristics of the sample 2, the surface characteristic measuring unit 120 first applies a DC voltage from the DC power source 4 to the sample stage 1 on which the sample 2 is mounted, and applies a predetermined voltage from the power source 8 to the support plate 6. Apply.

  At this time, a uniform electric field is not necessarily generated on the surface of the sample 2 to which a DC voltage is applied, and a distribution (potential distribution) is generated in the electric field on the surface according to the internal state of the sample 2. There is. By measuring the distribution of the surface electric field, the internal state of the sample 2 can be predicted. The surface characteristic measurement unit 120 measures the distribution of the electric field on the surface (potential distribution) and obtains information inside the sample 2.

  In a state where a predetermined voltage is applied to the support plate 6, the height of the support plate 6 is adjusted by the Z-axis drive unit 51 to set the distance between the tip of the probe 7 and the surface of the sample 2 to a predetermined amount. In this state, the probe 7 receives attraction or repulsion according to the potential of the sample surface. Next, when the sample stage 1 is driven in the X direction (Y direction) at a constant speed by the stage driving mechanism 3, the probe 7 is displaced by the attractive force or repulsive force that is received according to the change in the potential of the sample surface. As the probe 7 is displaced, the tip portion of the support plate 6 to which the probe 7 is attached bends. The displacement due to the deflection of the support plate 6 is detected by the deflection amount detection unit 9.

  The mechanism of the deflection amount detection unit 9 is not particularly limited. For example, the surface characteristic measuring unit 120 is configured to include a laser light source and a light receiving element, and the laser beam emitted from the laser light source is irradiated on the surface opposite to the sample 2 of the support plate 6 and reflected by the support plate 6. Is detected by the light receiving element.

  For example, when a four-divided light receiving element is used as the light receiving element, the difference in the amount of light received between the light receiving elements is detected as a positional deviation of the laser reflected by the support plate 6 on the light receiving element. It is output to the control unit 35. The control unit 35 controls the Z-axis drive unit 51 so that the output value from the deflection amount detection unit 9 (the difference in output between the light receiving elements of the four-divided light receiving elements) becomes zero. A signal for controlling the Z-axis drive unit 51 is sent to the data processing unit 32 and processed as displacement amount data of the probe 7.

  The electrical characteristic measurement unit 130 mounts the support plate 21 with the electrode 10 attached to the tip, the Z-axis drive unit 22 that sets the position (height) of the support plate 21 in the Z direction, and the Z-axis drive unit 22. An X table 221 movable in the X direction, a support plate 23 having the electrode 11 attached to the tip, a Z axis drive unit 24 for setting the position (height) of the support plate 23 in the Z direction, and a Z axis drive There is provided an X table 231 on which the unit 24 is placed and movable in the X direction. The electrical characteristic measuring unit 130 includes a DC power source 12, an ammeter 13, an arithmetic processing unit 31, and a static elimination device 15.

  The DC power source 12 and the ammeter 13 are connected between the electrodes 10 and 11, and when the electrodes 10 and 11 come into contact with the sample 2 mounted on the sample stage 1, a closed loop is formed, and the DC power source 12, electricity flows between the electrodes 10 and 11 and is detected by the ammeter 13, and calculation is performed by the arithmetic processing unit 31 using the data of the detected current.

  The processing control unit 140 includes a data processing unit 32, an input / output unit 33, and a control unit 35. The data processing unit 32 receives the output from the arithmetic processing unit 31, the output from the deflection amount detection unit 9, and the position information of the sample stage 1 from the control unit 35, and the electrical processing of the sample 2 mounted on the sample stage 1. Characteristic distribution and sample surface characteristic distribution (for example, electric field distribution) information are calculated and output to the input / output unit 33.

  The input / output unit 33 includes a display screen 34 and displays the distribution of the electrical characteristics of the sample 2 and the shape information of the sample surface output from the data processing unit 32 on the display screen 34.

  The control unit 35 controls the stage driving mechanism 3 to move the sample 2 placed on the sample stage 1 to a predetermined position. Further, the X table 221 and the X table 231 are controlled to set the distance between the electrodes 10 and 11 to a desired distance. Further, the Z-axis driving unit 51, the Z-axis driving unit 22, and the Z-axis driving unit 24 are controlled to adjust the positions (heights) of the probe 7, the electrode 10, and the electrode 11 in the Z-axis direction.

  Next, a series of operations for measuring the electrical characteristics of the sample 2 using the electrical characteristics measuring apparatus 100 described with reference to FIG. 1 will be described with reference to the flowcharts of FIGS. 2A and 2B.

  First, the sample 2 is placed on the sample stage 1 (S201), and in this state, the X table 221 and the X table 231 of the electrical characteristic measuring unit 130 are driven in the X direction, and the electrode 10 and the electrode 11 are moved to the sample 2's state. It is located at both ends in the X direction of the region to be inspected (S202). At this time, the stage drive mechanism 3 is controlled to drive the sample stage 1 in the Y direction so that the electrode 10 and the electrode 11 are positioned on the end of the sample 2 in the Y direction. Next, in a state where the DC power supply 12 is operated, the Z-axis drive unit 22 and the Z-axis drive unit 24 are controlled to bring the electrode 10 and the electrode 11 into contact with the sample 2 (S203). The current value flowing through the ammeter 13 with the electrodes 10 and 11 in contact with the sample 2 is read by the arithmetic processing unit 31 (S204).

  Next, the Z-axis drive unit 22 and the Z-axis drive unit 24 are controlled to raise the electrode 10 and the electrode 11 so that they are separated from the sample 2 (S205). In this state, it is checked whether or not the position measured this time has reached the end of the sample 2 in the Y direction (S206). If it has not reached the end of the sample 2 in the Y direction (NO in S206) Then, the stage driving mechanism 3 is controlled to drive the sample stage 1 in the Y direction to move the sample 2 in the predetermined pitch Y direction (S207), and the processing from S203 is repeated.

  Next, when the electrode 10 and the electrode 11 reach the end in the Y direction (YES in S206), it is checked whether the entire region is measured in the X direction and the Y direction of the sample 2 (S208). If measurement of the entire region of the sample 2 has not been completed (NO in S208), the stage driving mechanism 3 is controlled to drive the sample stage 1 in the θ direction to rotate the sample 2 by 90 ° (S209). ), The operation from S202 is repeated. Thereby, matrix-like data is provided for the current value in the inspection region of the sample 2.

  When the measurement of the entire region of the sample 2 is completed (YES in S208), the data processing unit 32 checks whether there is an abnormality in the detected current value (S210), and if no abnormality is found (in S210) In the case of NO), the process is terminated.

  On the other hand, if the detected current value is abnormal (YES in S210), the stage drive mechanism 3 is controlled and the X table 221 and the X table 231 of the electrical characteristic measuring unit 130 are driven in the X direction. The electrodes 10 and 11 are positioned at the ends in the Y direction and on both ends in the X direction of the current value abnormal region detected in S210 (S211).

  Next, in a state where the DC power supply 12 is operated, the Z-axis drive unit 22 and the Z-axis drive unit 24 are controlled to bring the electrode 10 and the electrode 11 into contact with the sample 2 (S212). The current value flowing through the ammeter 13 with the electrode 10 and the electrode 11 in contact with the sample 2 is read by the arithmetic processing unit 31 (S213).

  Next, the Z-axis drive unit 22 and the Z-axis drive unit 24 are controlled to raise the electrode 10 and the electrode 11 so that they are separated from the sample 2 (S214). In this state, it is checked whether the position measured this time has reached the end in the Y direction of the current value abnormal region of the sample 2 (S215). (In the case of NO in S215), the stage drive mechanism 3 is controlled to drive the sample stage 1 in the Y direction to move the sample 2 in the Y direction at a predetermined pitch (a fine pitch compared to the pitch in S207) (S216). ), The process from S212 is repeated.

  Next, when the electrode 10 and the electrode 11 reach the end of the current value abnormal region in the Y direction (YES in S215), the entire region is measured in the X direction and Y direction of the current value abnormal region of the sample 2. It is checked whether it has been done (S217). When the measurement of the entire region of the sample 2 is not completed (NO in S217), the stage driving mechanism 3 is controlled to drive the sample stage 1 in the θ direction to rotate the sample 2 by 90 ° (S218). ), The operation from S211 is repeated.

  When the measurement of the entire area of the sample 2 is completed (YES in S217), the stage drive mechanism 3 is controlled to move the sample 2 so that the abnormal current value area is directly below the probe 7 (S219). Then, the DC power supply 4 is operated to apply a DC voltage to the sample stage 1 and the sample 2, and a voltage is applied from the power supply 8 to the support plate 6 to which the probe 7 is attached (S220). With the voltages applied to the sample 2 and the support plate 6, respectively, the Z-axis drive unit 51 is driven to set the probe 7 to a predetermined height from the surface of the sample 2 (S221).

  Next, in this state, the stage driving mechanism 3 is controlled to alternately scan the sample stage 1 in the X direction and the step feed in the Y direction, and the probe 7 scans the entire current value abnormal region of the sample 2 ( S222). In the data processing unit 32, when the probe 7 scans the current value abnormal region of the sample 2 over the entire surface, the vertical position control circuit 36 corrects the deflection of the support plate 6 detected by the deflection amount detection unit 9 from the Z-axis. A surface image of the current value abnormal region is generated based on the value output to the drive unit 51 and the positional information in the XY plane of the probe 7 (S223).

  Finally, the generated surface image of the abnormal current value region and the current value profile are displayed on the display screen 34 of the input / output unit 33, and the process is terminated (S224). FIG. 3 shows an example of the output screen. On the display screen 34, a surface image 341 of a current value abnormal region and current value profiles 342 to 344 on a line designated on the surface image 341 are displayed.

  In the above-described embodiment, the abnormal region of the current value is detected in steps S202 to S208 of FIG. 2A, and the abnormal region of the current value is measured in detail from S211 of FIG. 2A to S224 of FIG. 2B. Although the method for obtaining the image of the surface has been described, the present invention is not limited to this. For example, in steps S202 to S208, the movement amount of one pitch in the Y direction in S207 is increased to detect an abnormal region of the current value, and the detected abnormal region of the current value is further increased to 1 in the Y direction in S207. It is also possible to narrow down the amount of movement of the pitch and narrow the abnormal region of the current value, and narrow down the region of the surface image by measuring in detail from S211 in FIG. 2A to S224 in FIG. 2B.

  According to the present embodiment, the surface image of the current value abnormality region and the current value profile can be confirmed at the same time, so that a plurality of information relating to the electrical characteristics of the sample can be visualized and displayed simultaneously. became.

  Moreover, resistance information on the surface of the sample can be obtained from the obtained electrical information by calculating and measuring data on the value of the current flowing between the sample and the electrode obtained in the present embodiment.

  In FIG. 4, the structure of the principal part of the electrical property measuring apparatus 100-1 in Example 2 of this invention is shown. The positions of the probe 7 and the electrodes 10 and 11 are not particularly limited as long as the surface state of the sample 2 can be imaged by the probe 7 and the electrical property evaluation region can be specified. FIG. 4 shows an example in which the probe 7 is positioned between the two electrodes 10 and 11. 4, illustration of the same components as those of the electrical characteristic measuring apparatus 100 shown in FIG. 1 described in the first embodiment is omitted.

  In FIG. 5, the structure of the principal part of the electrical property measuring apparatus 100-2 in Example 3 of this invention is shown. The positions of the probe 7 and the electrodes 10 and 11 are not particularly limited as long as the surface state of the sample 2 can be imaged by the probe 7 and the electrical property evaluation region can be specified. FIG. 5 shows an example in which two electrodes 10 and 11 are positioned so that the probe 7 is positioned in the center after the probe 7 is scanned. In FIG. 5, the same components as those of the electrical characteristic measuring apparatus 100 shown in FIG.

  In FIG. 6, the structure of the principal part of the electrical property measuring apparatus 100-3 in Example 4 of this invention is shown. When there is a region in which the electrical identification is evaluated inside the sample surface, the electrodes 10 and 11 are made to pierce the sample 2 based on the image detected by the probe 7 as shown in FIG. After the piercing, a voltage is applied from the DC power source 12 to the electrodes 10 and 11, the current value is measured by the ammeter 13, and the electric characteristic values such as resistance and electric capacity are calculated by the arithmetic processing unit 31. In FIG. 6, the same components as those of the electrical characteristic measuring apparatus 100 shown in FIG.

  In FIG. 7, the structure of the principal part of the electrical property measuring apparatus 100-4 in Example 4 of this invention is shown. When a voltage is applied to the sample 2 from the DC power supply 4, a conductive material 16 such as silver paste can be applied to the conductive portion of the sample 2, and the DC power supply 4 can be connected thereto. This is shown in FIG. In FIG. 7, the same components as those of the electrical characteristic measuring apparatus 100 illustrated in FIG. 1 described in the first embodiment are not illustrated.

The example which evaluated the electrical property of the conventional base material with a transparent conductive film is shown.
For example, a conventional substrate with a transparent conductive film described in JP-A-2015-201023 will be described.

  As shown in FIG. 8, a transparent base material 840 with an easy adhesion layer 830, a transparent electrode layer 820 formed on the easy adhesion layer 830 and containing a metal nanowire 860 in a binder portion 850, and the transparent electrode A base 810 with a transparent conductive film having a colored layer 870 formed on the layer 820 is formed.

  As shown in Example 4, the transparent conductive film-coated substrate 810 is made to pierce the sample 2 with the electrodes 10 and 11 based on the image detected by the probe 7. After the piercing, a voltage was applied to the electrodes 10 and 11 by the DC power source 12, a current value was measured by the ammeter 13, and an electric characteristic value such as resistance and electric capacity was calculated by the arithmetic processing unit 31.

  In addition, this invention is not limited to an above-described Example, Various modifications are included. For example, the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described. Further, a part of the configuration of one embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of one embodiment. Further, it is possible to add, delete, and replace other configurations for a part of the configuration of each embodiment.

  Each of the above-described configurations, functions, processing units, processing means, and the like may be realized by hardware by designing a part or all of them with, for example, an integrated circuit. Each of the above-described configurations, functions, and the like may be realized by software by interpreting and executing a program that realizes each function by the processor. Information such as programs, tables, and files for realizing each function can be stored in a recording device such as a memory, a hard disk, an SSD (Solid State Drive), or a recording medium such as an IC card, an SD card, or a DVD.

  Further, the control lines and information lines indicate what is considered necessary for the explanation, and not all the control lines and information lines on the product are necessarily shown. Actually, it may be considered that almost all the components are connected to each other.

DESCRIPTION OF SYMBOLS 1 ... Sample stage 2 ... Sample 3 ... Stage drive mechanism 4 ... DC power supply
DESCRIPTION OF SYMBOLS 5 ... Static elimination apparatus 6 ... Support plate 7 ... Probe 8 ... Power supply 9 ... Deflection amount detection part
DESCRIPTION OF SYMBOLS 10,11 ... Electrode 12 ... DC power supply 13 ... Ammeter 15 ... Static elimination apparatus
DESCRIPTION OF SYMBOLS 21 ... Support plate 22 ... Z-axis drive part 23 ... Support plate 24 ... Z-axis drive part
31 ... Calculation processing unit 32 ... Data processing unit 33 ... Input / output unit 34 ... Display screen
35 ... Control unit 36 ... Vertical position control circuit 51 ... Z-axis drive unit
100, 100-1, 100-2, 100-3, 100-4 ... Electrical characteristic measuring device
DESCRIPTION OF SYMBOLS 110 ... Stage part 120 ... Surface characteristic measurement part 130 ... Electrical characteristic measurement part
140 ... processing control unit 221 ... X table 231 ... X table.

Claims (10)

A sample stage that can be moved by loading the sample;
A voltage application unit for applying a voltage to the sample mounted on the sample stage;
A current value measuring unit including a pair of electrodes for measuring a current value flowing through a sample mounted on the sample stage;
A surface property measurement unit that measures the distribution of the electric field on the surface of the sample in a state where a voltage is applied to the sample mounted on the sample stage in the voltage application unit;
An image generating unit that generates an image of the sample based on a distribution of an electric field on the surface of the sample measured by the surface property measuring unit;
An electrical characteristic measuring apparatus comprising: a display unit configured to display current value data measured by the current value measuring unit and an image of the sample generated by the image generating unit.   2. The electrical characteristic measuring apparatus according to claim 1, wherein the current value measuring unit includes a DC power source, and the pair of electrodes are brought into contact with the sample in a state where the DC power source is operated. An electrical characteristic measuring device for measuring a current flowing between them.   The electrical property measurement apparatus according to claim 1, wherein the surface property measurement unit includes a support plate having a probe attached to a tip portion, a voltage application unit that applies a voltage to the support plate, and a deflection of the support plate. An electrical property measuring apparatus comprising: a deflection detecting unit to detect; and a height adjusting unit for adjusting a height of the supporting plate according to the deflection of the supporting plate detected by the deflection detecting unit.   The electrical property measurement apparatus according to claim 3, wherein the image generation unit generates the image based on a signal from a height adjustment unit that adjusts a height of the support plate. apparatus.   The electrical property measuring apparatus according to claim 1, wherein the display unit displays the current value data of a specified region on the displayed sample image side by side with the sample image. measuring device. A current flowing between the pair of electrodes is measured on the sample at a predetermined pitch by bringing a pair of electrodes into contact with a sample mounted on the sample stage and measuring a current value flowing between the pair of electrodes. Extract areas with abnormal values,
For the region where the extracted current value is abnormal, measure the current value flowing between the pair of electrodes at a pitch finer than the predetermined pitch,
The surface of the sample in the region where the current value is abnormal by scanning the upper part of the region where the extracted current value is abnormal with a voltage applied to the sample with a probe attached to the tip of the support plate to which the voltage is applied Measure the electric field distribution of
Generating an image based on the measured electric field distribution;
An electrical characteristic measurement method comprising: displaying an image based on the generated electric field distribution and current value data measured for an area where the current value is abnormal on a screen.   The electrical property measurement method according to claim 6, wherein the predetermined pitch for measuring a current value flowing between the pair of electrodes is gradually narrowed and repeatedly performed a plurality of times, thereby performing the measurement between the pair of electrodes. A method for measuring electrical characteristics, characterized by extracting a region where a flowing current value is abnormal.   The electrical property measurement method according to claim 6, wherein measuring the distribution of the electric field on the surface of the sample optically detects warping of the support plate due to attractive force or repulsive force that the probe receives from the electric field. A method for measuring electrical characteristics, characterized in that   9. The electrical property measurement method according to claim 8, wherein measuring the distribution of the electric field on the surface of the sample corrects the height of the support plate based on information obtained by optically detecting the warp of the support plate. A method for measuring electrical characteristics, characterized in that measurement is performed using a signal to be transmitted.   7. The electrical property measurement method according to claim 6, wherein the current value data displayed on the screen is data of a current value of a region designated on the image based on an electric field distribution displayed on the screen. An electrical property measuring method characterized by the above.

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