JP6559274B2 - Tool measuring device and workpiece measuring device calibration method, calibration device and standard device - Google Patents

Description

  The present invention relates to a tool measuring apparatus for measuring a tool dimension on a machine tool, a calibration method for calibrating a workpiece measuring apparatus for measuring a workpiece dimension, and a calibration apparatus for automatically executing a series of steps of the calibration method, And a standard device used for the calibration.

  In a machine tool controlled by an NC device, measurement of the dimensions and cutting edge position of the tool mounted on the spindle and the origin position of the workpiece mounted on the table before, during or after machining And dimensions are measured. Various methods are used for measuring the tool. Patent Document 1 describes a tool measuring method using a tool measuring element that irradiates a laser beam. In addition to calibration by the manufacturer, the tool measuring element is also calibrated by the user prior to measurement using a reference tool attached to the tip of the spindle.

  The workpiece is measured by attaching a workpiece measuring element such as a workpiece measuring probe to the tip of the spindle and bringing the workpiece measuring element into contact with a predetermined position of the workpiece. In addition to calibration by the manufacturer, the workpiece measuring apparatus is also performed by the user prior to workpiece measurement using a standard device. In Patent Document 2, a tool setting probe used for setting a cutting tool has a pre-calibrated dimension and a stylus disk attached thereto, and the stylus disk is used to attach a workpiece detection probe to a spindle. A method for calibrating a workpiece detection probe is described.

JP 11-138392 A Special table 2017-518487 gazette

  Conventionally, the calibration of the tool measuring device by the user and the calibration of the workpiece measuring device are performed by methods that are not related to each other. For this reason, when machining one workpiece, the dimensions of the tool and the cutting edge position used for machining and the dimensions and origin position of the workpiece are measured and determined based on two different criteria. Since there is inevitably a dimensional error between the two standards, a product processed by the conventional technique includes a processing error based on the dimensional error between the two standards.

  An object of the present invention is to provide a standard that can be used in common for calibration of a tool measurement device and calibration of a workpiece measurement device. Furthermore, an object of the present invention is to provide a calibration method and a calibration device for a tool measuring device and a workpiece measuring device using the standard device.

  In order to achieve the above object, according to the present invention, a tool measuring element for measuring a dimension of a tool, which is attached to a table of a machine tool controlled by an NC device, and attached to a spindle of a machine tool, In a tool measuring device having a workpiece measuring element for measuring the size of a workpiece mounted on a table and a method for calibrating the workpiece measuring device, a reference tool having a known size is attached to a spindle, and a standard device having a known size is installed. A first step of attaching to a table, contacting them, detecting the contact between them with a deformation amount less than the measurement accuracy required by the deformation of the standard, and reading the coordinates of the feed axis of the machine tool at that time; A second step of causing the reference tool to approach the tool measuring element and reading coordinates when the tool measuring element reacts; The workpiece measuring element is attached to the standard device, the third step for reading the coordinates when the standard device reacts, the coordinates read in the first, second and third steps, and the reference tool And a fourth step of calibrating the tool measuring device and the workpiece measuring device based on the known dimensions of the standard device, and the calibration of the tool measuring device and the calibration of the workpiece measuring device are common to the standard. Provided are a tool measuring device and a workpiece measuring device calibration method performed using a tool.

  Furthermore, according to the present invention, a tool measuring device for measuring the size of a tool attached to a table of a machine tool controlled by an NC device on the machine, and a workpiece measurement for measuring the dimension of a workpiece attached to the table on the machine. In the apparatus calibration apparatus, a coordinate reading unit that reads each coordinate of a feed axis that relatively moves the spindle of the machine tool and the table, a tool measurement element that is attached to the table and measures the dimensions of the tool, and the spindle The contact between the workpiece measuring element for measuring the workpiece dimensions and the reference tool attached to the table and attached to the spindle or the workpiece measuring element is detected with a deformation amount less than the required measurement accuracy. A standard device for outputting a contact signal to the coordinate reading unit, a reference tool attached to the spindle, and the standard device. The coordinates read by the coordinate reading unit when the tool contacts, the coordinates read by the coordinate reading unit when the tool measuring element reacts with the reference tool approaching the tool measuring element, and attached to the spindle The tool measurement based on the coordinates read by the coordinate reading unit based on the output of the standard device when the workpiece measuring element and the standard device are in contact with each other and the known dimensions of the reference tool and the standard device A tool for calibrating the tool measurement and workpiece measurement device using a common standard according to an NC program command input to the NC device, the tool measurement device and workpiece measurement device for calibrating the device and the workpiece measurement device A calibration device for a measuring device and a workpiece measuring device is provided.

  According to the present invention, the calibration of the tool measuring device and the calibration of the workpiece measuring device are performed on the machine tool using a common standard, that is, the same standard. As a result, the reference used for calibration in the Z-axis direction of the tool measuring device and workpiece measuring device on the machine tool machine is the upper end of the standard element attached to the aforementioned standard device, for example, a sphere. Because of the setting on the top of the sphere, even if there is an error in the size of the standard device or the dimensions of the reference tool mentioned above, the relative result of measuring the position of the tool or workpiece using the tool measuring device and workpiece measuring device Thus, there is an effect that the machining error is not affected when machining is performed based on the position of the tool and the workpiece, which is measured using the tool measuring device and the workpiece measuring device.

  Further, in the present invention, an element such as an automatic tool changer capable of attaching a reference tool or workpiece measuring probe that can be automatically attached to and detached from the spindle, and a standard device installed on the table and a reference tool attached to the spindle are relative to each other. A standard device having elements such as a feed axis and a rotary axis that can be automatically operated automatically, and a high-precision sphere or cylinder that can serve as a reference in any direction of the X, Y, and Z axes The calibration work can be automatically completed by using a machine tool having an element that allows the standard device, the tool measuring device, and the workpiece measuring device to generate a signal at the time of measurement, and the machine tool can receive the signal.

It is a block diagram which shows typically the machine tool which implements the tool measuring apparatus of the machine tool of this invention, and the calibration method of a workpiece | work measuring apparatus. It is a block diagram which shows typically the tool measuring apparatus of the machine tool of this invention. It is a block diagram showing typically the work measuring device of the machine tool of the present invention. 1 is a side view of a standard device according to a preferred embodiment of the present invention. FIG.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.
In FIG. 1, a machine tool 10 is provided on a bed 21 as a base fixed to the floor of a factory, and provided on the upper surface of the bed 21 so as to be capable of reciprocating in the left-right direction or the X-axis direction (left-right direction in FIG. 1). A column (not shown), a spindle head 12 provided on the front surface of the column so as to be able to reciprocate in the vertical direction or the Z-axis direction (vertical direction in FIG. 1), and rotatable about a rotation axis O extending in the vertical direction. A spindle 14 supported by the spindle head 12 and a table 20 provided on the upper surface of the bed 21 so as to be reciprocable in the front-rear direction or the Y-axis direction and facing the spindle 14 are provided.

  A touch probe 18 as a workpiece measuring element is attached to the tip of the main shaft 14 via a tool holder 16. The touch probe 18 can also be replaced with a reference tool (not shown) mounted on the tool holder 16. The reference tool is a tool used as a reference for measurement whose dimensions such as tool length and tool diameter are known. The touch probe 18 and the reference tool can be exchanged manually by the operator of the machine tool 10, but preferably, a calibration program is input as the NC program 42 and a tool change command is written in the calibration program. The automatic tool changer (not shown) of the machine tool 10 is used. A tool measuring element 28 is attached to the upper surface of the table 20. When the tool measuring device 56 and the workpiece measuring device 66 are calibrated, the calibration standard 30 can be attached to the upper surface of the table 20. The standard device 30 may be always attached to the upper surface of the table 20 like the tool measuring element 28.

  The tool measuring element 28 is an optical measuring device that generates a single laser beam 28a. In FIGS. 1 and 2, the tool measuring element 28 is a table that irradiates the laser beam 28a in a direction parallel to the X axis. It is attached to the upper surface of 20. The tool measuring element 28 has a pair of arms that extend upward, and a projector (not shown) that irradiates a thin laser beam 28a between a frame that is generally U-shaped or U-shaped, and the laser beam 28a. A receiver (not shown) for receiving the light is provided on the arm portion of the U-shaped frame. Further, the tool measuring element 28 outputs a skip signal from the receiver 44 to the coordinate reading unit 48 when the laser beam 28a is interrupted.

  1 and 2 show only the tool measuring element 28 that irradiates the laser beam 28a in the X-axis direction, the tool measuring element (FIG. 1) that irradiates the laser beam in the Y-axis direction that forms a pair with the tool measuring element 28. (Not shown) may also be attached to the upper surface of the table 20.

  The machine tool 10 is also provided with X-axis, Y-axis, and Z-axis linear feed devices (not shown) in order to move the spindle 14 and the table 20 relative to each other. The linear feed device includes a ball screw (not shown) extending in the X-axis, Y-axis, and Z-axis directions, a column (not shown), a table 20, and a nut (not shown) that is engaged with the ball screw. And X-axis, Y-axis, and Z-axis servo motors coupled to one end of each of the X-axis, Y-axis, and Z-axis ball screws and controlled based on the NC program 42 input to the NC device 40 ( (Not shown).

  The machine tool 10 further includes an X scale 22, a Y scale 24, and a Z scale 26 for reading the coordinates of the X-axis, Y-axis, and Z-axis feeding devices. Readings of the scales 22, 24, and 26 of the X-axis, Y-axis, and Z-axis are fed back to the NC device 40 via the coordinate reading unit 48, and based on this, the servos of the X-axis, Y-axis, and Z-axis are based. The motor is controlled.

  The touch probe 18 includes a stylus having, for example, a spherical contactor 18a at the tip and a wireless transmitter (not shown). After the contactor 18a contacts the workpiece, the stylus is pushed a predetermined distance. The touch signal is output from the wireless transmitter to the receiver 46, and the skip signal is output from the receiver 46 to the coordinate reading unit 48.

  Referring to FIG. 4, the standard device 30 includes a base plate 32 that is placed and fixed on the upper surface of the table 20, a column 34 that has a sphere 34 a that stands on the upper surface of the base plate 32 and provides a reference surface at the upper end, and the base plate 32. And a contact sensor 36 sandwiched between the upper surface of the support 34 and the lower end surface of the column 34. In the present embodiment, for example, a piezoelectric element that is a force sensor is used as the contact sensor.

  The contact sensor 36 is connected to a contact detection processing unit 38. The contact detection processing unit 38 performs processing such as removing noise from the signal from the contact sensor 36 through a filter (not shown) or comparing the received signal with a threshold value, so that the received signal becomes a sphere 34a. It is determined whether or not it indicates that the reference tool has touched. When contact is detected by the contact detection processing unit 38, the contact detection processing unit 38 outputs a skip signal to the coordinate reading unit 48. Here, the contact sensor 36 is a force sensor, and the threshold value (the magnitude of the contact force for outputting the contact signal) when the skip signal is generated from the contact detection unit 38 can be changed according to the measurement accuracy. Is desirable.

  The contact sensor 36 is not limited to a piezoelectric element as long as it can detect that the reference tool has contacted the sphere 34a. The contact sensor 36 may be any sensor that can detect contact between the reference tool and the sphere 34a with a deformation amount of the standard device 30 that is less than the required measurement accuracy. The contact sensor 36 may be, for example, an acoustic sensor or a vibration sensor that detects vibration caused by contact between the reference tool and the sphere 34a. Further, the contact sensor 36 has rigidity sufficiently larger than the spring force of a spring (not shown) that floats and supports the stylus of the touch probe 18, and the support 34 is not displaced by contact with the touch probe 18. ing.

  The dimensions of the elements used as a reference, such as the dimensions of the sphere 34a attached to the standard device 30, the tool length and tool diameter of the reference tool, and the diameter of the tip sphere of the workpiece measurement probe, are precise coordinate measuring machines, etc. Is a known value measured in advance. The coordinate measuring machine and other devices used for the measurement are preferably calibrated based on a traceable standard with a clear calibration path. It can also be calibrated using a calibration service of an external calibration company. The calibration company has been audited by a certification body such as NITE and has been certified to meet the requirements of the standards (ISO / IEC 17025) for calibration bodies established by the International Organization for Standardization and the International Electrotechnical Commission It is desirable to be a calibration company. Instead of the sphere 34a, a reference of another shape such as a cylinder or a rectangular parallelepiped may be used.

  The coordinate reading unit 48 is one function of the machine control device of the machine tool 10 and is connected not only to the NC device 40 but also to the tool measurement calibration device 50 and the workpiece measurement calibration device 52. Coordinate values read from the X-axis, Y-axis, and Z-axis scales 22, 24, and 26 in the measurement calibration process and workpiece measurement calibration process are output from the coordinate reading unit 48 to the tool measurement calibration device 50 and the workpiece measurement calibration device 52, respectively. Is done.

  The tool measurement / calibration device 50 and the workpiece measurement / calibration device 52 can be formed of a subtractor and a memory. The tool measurement / calibration device 50 receives the reference tool attached to the spindle 14 and the tool length and tool diameter of the touch probe 18 as correct values from the input device 54 and is stored in the memory. The reference tool or touch probe 18 is measured by the tool measuring element 28 to be calibrated, and the difference between the measured value and the correct value is used as the calibration value. The diameter of the sphere 34a attached to the standard device 30 is input to the workpiece measurement / calibration device 52 as a correct value from the input device 54 and stored in the memory. The position of the sphere 34a in the X-axis and Y-axis directions is measured by the touch probe 18, and the position in the Z-axis direction is measured by contact detection of the standard device 30, and is similarly stored in the memory. When the diameter and position of the sphere 34a are set to correct values, the coordinates of the surface of the sphere 34a can be accurately obtained. The surface of the sphere 34a is measured with the touch probe 18 to be calibrated, and the difference between the measured value and the correct value previously determined is stored in the workpiece measurement / calibration apparatus 52 as a calibrated value.

  The input device 54 can be formed from a keyboard (not shown) or a touch panel (not shown) attached to a control panel (not shown) of the machine tool 10. The calibration results in the tool measurement calibration device 50 and the workpiece measurement calibration device 52 are output to the tool measurement device 56 and the workpiece measurement device 66, respectively.

  Referring to FIG. 2, the tool measurement device 56 includes a storage unit 58 that stores a calibration result in the tool measurement calibration device 50. The tool measuring device 56 moves the tool T mounted on the tip end portion of the main spindle 14 of the machine tool 10 via the tool holder 16 relative to the table 20 by an X-axis, Y-axis, and Z-axis feeding device. . When the tool T crosses the laser beam 28 a of the tool measuring element 28, a light blocking signal is output from the tool measuring element 28 to the receiver 44.

  When the receiver 44 receives the light blocking signal, it outputs a skip signal to the coordinate reading unit 48. The coordinate reading unit 48 reads the X-axis, Y-axis, and Z-axis coordinate values from the X-axis, Y-axis, and Z-axis scales 22, 24, and 26 when the skip signal is received from the receiver 44. The read X-axis, Y-axis, and Z-axis coordinate values are corrected by adding the calibration result in the tool measurement / calibration apparatus 50 stored in the storage unit 58 in the adder 60. The corrected coordinate values of the X axis, the Y axis, and the Z axis are output to the calculation unit 62, and the calculation unit 62 calculates the tool length and the tool diameter of the tool T. The calculation result in the calculation unit 62 is output to the NC device 40, and the X-axis, Y-axis, and Z-axis feeding devices are corrected and controlled based on the measured tool length and tool diameter of the tool T.

  Referring to FIG. 3, the workpiece measurement device 66 includes a storage unit 68 that stores the calibration result in the workpiece measurement calibration device 52. The workpiece measuring device 66 is configured to attach a touch probe 18 mounted on the tip of the spindle 14 fixed to the table 20 of the machine tool 10 via a tool holder 16 by using an X-axis, Y-axis, and Z-axis feeding device. , Relative to the table 20. When the contact 18 a of the touch probe 18 contacts the work W fixed to the table 20, a touch signal is output from the touch probe 18.

  When receiving the touch signal, the receiver 46 outputs a skip signal to the coordinate reading unit 48. The coordinate reading unit 48 reads the X-axis, Y-axis, and Z-axis coordinate values from the X-axis, Y-axis, and Z-axis scales 22, 24, and 26 when the skip signal is received from the receiver 46. The read X-axis, Y-axis, and Z-axis coordinate values are corrected by adding the calibration result in the work measurement calibration device 52 stored in the storage unit 68 in the adder 70. The corrected X-axis, Y-axis, and Z-axis coordinate values are output to the calculation unit 72, and the calculation unit 72 causes the origin position of the workpiece W, the inclination of the workpiece W relative to the X-axis and / or Y-axis, and the workpiece in the Z-axis direction. The height of W and the like are calculated. Calculation results (the origin position, inclination, height, etc. of the workpiece W) in the calculation unit 72 are output to the NC device 40, and X-axis, Y-axis, and Z-axis feeding devices are corrected and controlled based on the calculation results. Instead of the touch probe 18, an optical or ultrasonic non-contact detection device may be used as the workpiece measurement element.

Hereinafter, the calibration method for the tool measuring apparatus and the workpiece measuring apparatus according to the present invention will be described in more detail.
First, the reference tool is mounted on the tip of the spindle 14 via the tool holder 16. The tool length and tool diameter of the reference tool are known, and values are input to the tool measurement / calibration apparatus 50. The position of the reference tool tip can be determined by adding a known tool length value to the gauge line which is the reference position of the spindle 14. In addition, if the tool length and the tool diameter are known and deformation due to measurement does not become a problem, the touch probe 18 of the workpiece measuring element may be used as a reference tool. By doing so, the labor for attaching the reference tool to the spindle 14 can be saved, and the calibration time can be shortened.

  Next, the position of the tip of the reference tool or touch probe 18 to be measured in the Z-axis direction and the tool diameter are measured using the tool measuring element 28. For details of the tool diameter, the Y-axis of the laser beam 28a irradiated in the X-axis direction along the Y-axis, for example, when the measurement object is approached from the positive direction and the measurement object blocks the laser beam 28a. The coordinate value is read by the coordinate reading unit 48. Furthermore, the coordinate reading unit 48 reads the coordinate value of the Y axis when the measurement object is approached from the negative direction and the measurement object blocks the laser beam 28a, and the difference between the two coordinate values can be used as the tool diameter. . The measured value of the tool diameter is compared with the input known tool diameter, and the difference is stored in the tool measurement / calibration apparatus 50 as the calibration value of the tool diameter. This operation can also be performed from the X-axis direction with respect to the laser beam 28a irradiated in the Y-axis direction.

  The position of the measurement target in the Z-axis direction is described in detail. The coordinate reading unit 48 determines the coordinates of the position when the measurement target approaches the laser beam 28a from the Z-axis direction and the measurement target blocks the laser beam 28a. This can be done by reading. The measured tip position and tool diameter are compared with known tool positions and tool diameters, and the difference is stored in the storage unit 58 as a calibration value.

  Next, an accurate diameter of the sphere 34 a of the standard device 30 installed on the table 20 is input to the workpiece measurement calibration device 52. A touch probe 18 for workpiece measurement is attached to the spindle 14. When the known tool length and tool diameter of the touch probe 18 are not used for calibration of the tool measuring device, the touch probe 18 is measured by the tool measuring element 28 and the tool length and tool diameter are input to the workpiece measuring and calibrating device 52. To do. When the known tool length and tool diameter of the touch probe 18 are used for calibration of the tool measuring device, the tool length and tool diameter are input to the workpiece measuring and calibrating device 52.

  Next, the touch probe 18 is brought into contact with the sphere 34 a attached to the standard device 30 from the Z-axis direction, and contact is detected by the contact sensor 36 of the standard device 30. In this contact, the length of the touch probe 18 is desirably the same as the length when the tool measuring apparatus is calibrated. Further, it is desirable that the standard device 30 is not deformed by contact force. When both of these hold, the Z-axis direction position where the tool measuring element 28 measures the tool and the Z-axis direction reference point of the sphere 34a are the same point as the tip of the touch probe 18, and the relative position thereof is determined by the machine tool 10. Is specified by the scale 26 in the Z-axis direction. The coordinates of the position where the contact is detected are read by the coordinate reading unit 48, and the coordinate value of the reference surface in the Z-axis direction is taken into account by taking into account the tool length of the touch probe 18, and stored in the workpiece measurement / calibration device 52.

  It supplements about the force at the time of contact detection. When the standard device 30 is used simultaneously with a non-contact type tool measuring element 28 such as a laser beam, the contact force on the tool measuring element 28 side is 0 (zero). It is necessary to detect contact so that the deformation amount is smaller than the measurement accuracy. Further, when the tool measuring element 28 is a contact type, it is desirable that the contact detection of the standard device 30 is to detect the contact with a contact force close to the contact force of the tool measuring element 28. This is because the Z-axis direction reference point on the sphere 34a is determined in consideration of deformation of the touch probe 18 due to the contact force of the tool measuring element 28. This is also a desirable reason that the contact sensor 36 can change the magnitude of the contact force that outputs the contact signal.

  Next, the touch probe 18 is brought into contact with the sphere 34 a from any one direction in the X-axis direction, the contact is detected, and the coordinate read by the coordinate reading unit 48 is read. In this case, the contact detection may be performed using the contact sensor 36 of the standard device 30 or the sensor of the touch probe 18. Further, the touch probe 18 is rotated by 180 ° using the main shaft 14 and stopped. Thereafter, the touch probe 18 is brought into contact with the sphere 34a from the opposite direction to the previous direction in the X-axis direction, and the coordinates of the contact point are similarly read. The center of the read two coordinates is set as the center of the sphere 34a in the X-axis direction, and is stored in the workpiece measurement / calibration device 52. This operation is also performed in the Y-axis direction. Thus, the center coordinates of the sphere 34a in the X-axis and Y-axis directions are stored in the workpiece measurement / calibration device 52.

  With the above operation, the workpiece measurement / calibration device 52 stores the coordinates and accurate diameters in the X-axis, Y-axis, and Z-axis directions of the sphere 34a of the standard device 30. Thus, the coordinates of the surface of the sphere 34a can be accurately determined. Next, the touch probe 18 is brought into contact with the sphere 34a from the direction required for measuring the workpiece, the contact is detected by the sensor of the touch probe 18, and the coordinates at the time of contact are read by the coordinate reading unit 48. The measurement result. The measurement result is compared with the correct value obtained previously, and the difference is used as a calibration value, which is stored in the workpiece measurement calibration device 52. Generally, the calibration value is often obtained by measuring from the X-axis, Y-axis, and Z-axis directions. The obtained calibration value is stored in the workpiece measurement calibration device 52. The above series of operations can be automatically executed by the NC program 42.

DESCRIPTION OF SYMBOLS 10 Machine tool 14 Spindle 18 Touch probe 20 Table 22 X-axis scale 24 Y-axis scale 26 Z-axis scale 28 Tool measurement element 30 Standard 48 Coordinate reading part 50 Tool measurement calibration apparatus 52 Work measurement calibration apparatus

Claims (4)

A tool measuring element for measuring the size of a tool mounted on a table of a machine tool controlled by an NC device, and a workpiece measurement for measuring the size of a workpiece mounted on a spindle of a machine tool and mounted on the table In a tool measuring device having an element and a workpiece measuring device calibration method,
A standard tool with a known size is attached to the spindle, a standard device with a known size is attached to the table, and both are brought into contact with each other. A first step of reading the coordinates of the feed axis of the machine tool at that time;
A second step of causing the reference tool to approach the tool measuring element and reading coordinates when the tool measuring element reacts;
A third step of attaching the workpiece measurement element to the spindle, contacting the standard device, and reading coordinates when the standard device has reacted;
A fourth step of calibrating the tool measuring device and the workpiece measuring device based on the coordinates read in the first, second and third steps and the known dimensions of the reference tool and standard device;
A tool measuring device and a workpiece measuring device calibration method, wherein calibration of the tool measuring device and calibration of the workpiece measuring device are performed using the common standard device.   The reference tool is a workpiece measuring element having a known dimension. In the first step, the workpiece measuring element having a known dimension is attached to a spindle, and is brought into contact with the standard device attached to a table. The coordinates when the contact of the workpiece measuring element is detected in response are read, and the second step causes the workpiece measuring element having the known dimensions to approach the tool measuring element, and the tool measuring element reacts. 2. The tool measuring device and the workpiece measuring device are calibrated based on the coordinates read in the first and second steps and the known dimensions of the workpiece measuring element and the standard device. And a calibration method for the workpiece measuring apparatus. In a tool measuring device that measures the size of a tool attached to a table of a machine tool controlled by an NC device on the machine, and a calibration device for a workpiece measuring device that measures the dimension of a workpiece attached to the table on the machine,
A coordinate reading unit that reads each coordinate of a feed axis that relatively moves the spindle of the machine tool and the table;
A tool measuring element attached to the table for measuring the dimensions of the tool;
A workpiece measuring element attached to the spindle for measuring the dimension of the workpiece;
A standard device that is attached to a table and detects contact with a reference tool attached to a spindle or the workpiece measuring element with a deformation amount equal to or less than the required measurement accuracy, and outputs a contact signal to the coordinate reading unit;
The coordinates read by the coordinate reading unit when the reference tool attached to the spindle and the standard device contact each other, and the coordinates when the tool measurement element reacts with the reference tool approaching the tool measurement element The coordinates read by the reading unit, the coordinates read by the coordinate reading unit based on the output of the standard device when the workpiece measuring element attached to the spindle contacts the standard device, the reference tool and the standard device A tool measuring device and a workpiece measuring device for calibrating the tool measuring device and the workpiece measuring device based on known dimensions of
A tool measuring device and a workpiece measuring device calibration device, wherein the tool measuring device and the workpiece measuring device are calibrated using a common standard in accordance with an NC program command input to the NC device.   A workpiece measuring element having a known dimension is used instead of the reference tool, and the workpiece measuring element attached to a spindle is in contact with the standard device, instead of the tool measuring calibration device and the workpiece measuring calibration device. 4. The tool measuring device and the workpiece measuring device are calibrated based on the coordinates read by the coordinate reading unit by the output of the standard device and the known dimensions of the workpiece measuring element and the standard device. The tool measuring apparatus and workpiece measuring apparatus calibration apparatus described.

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