JP6479243B1 - Ultrasound imaging system - Google Patents

Abstract

An ultrasonic imaging system capable of suppressing undulation even when the moving speed of a probe is high.
An ultrasound imaging system includes an ultrasound imaging apparatus and a water tank, and an ultrasound propagation medium generated when an ultrasound probe of the ultrasound imaging apparatus is scanned at an end of the water tank. Reflected wave attenuating means 30 is provided for attenuating the reflected wave at the end of the wave of a certain liquid substance. The reflected wave attenuating means 30 has a plurality of protrusions 32. When the ultrasonic probe 20 of the ultrasonic imaging apparatus is scanned in the X axis direction, the reflected wave attenuating means 30 is provided at both ends of the water tank 10 in the X axis direction. Is arranged.
[Selection] Figure 5

Description

The present invention relates to ultrasound image system.

  The ultrasound imaging system uses an ultrasound imaging device to place an object such as a multi-layered semiconductor on a sample mounting table and store it in a liquid substance that is an ultrasound propagation medium stored in a liquid storage tank such as a water tank. The subject is immersed, the subject is irradiated with ultrasound from a probe provided in the ultrasound imaging apparatus, and the reflected or transmitted wave is received to image the target interface. The probe scans in the X-axis direction from the start point (one end point) to the end point (the other end point) of the subject at a predetermined speed while irradiating the subject with ultrasonic waves. When the probe reaches the end point, the probe is moved by a predetermined amount in the Y-axis direction and scanned in the opposite direction at a predetermined speed from the viewpoint to the end point in the X-axis direction. When the probe is scanned, bubbles are generated and undulated.

  In Patent Document 1, “an ultrasonic probe that emits ultrasonic waves to a subject via water and receives reflected waves thereof, and a scanner that performs ultrasonic scanning by moving the ultrasonic probe in a predetermined axial direction are provided. In the ultrasonic inspection apparatus, a water level detector for detecting the level of water, a calculation means for calculating the submerged amount of the probe based on the detected value of the water level detector and the position of the ultrasonic probe, and the moving speed by the scanner A storage unit that stores the relationship between the submergence amount and the submergence amount, and a level adjustment unit that adjusts the level of water so that the submergence amount obtained by the computing unit when the moving speed is determined matches the submergence amount obtained from the storage unit; An ultrasonic inspection apparatus characterized in that is provided. "Is disclosed.

JP-A-8-136518

  In Patent Document 1, the effect was obtained when the moving speed of the probe was low, but further countermeasures against waviness have become necessary as the speed increases.

  When the probe is scanned in the X-axis direction, the moving speed reaches 2000 mm / sec (depending on the applicant's product), depending on the size of the subject. Since the probe moves in the liquid material stored in the water tank, naturally, this movement generates a wave (traveling wave) on the surface of the liquid material in the traveling direction of the probe portion. The traveling wave collides with the wall in the X-axis direction of the water tank and generates a reflected wave. The reflected wave is combined with the traveling wave. By repeating this, a standing wave with a larger amplitude is formed. As a result, when the X-axis position of the probe unit matches the position (or a nearby position) where the displacement of the standing wave is minimized, the probe unit may come out of the liquid material. If the ultrasonic irradiation part of the probe part comes out of the liquid substance, there arises a problem that an image of the target interface cannot be acquired.

The present invention has been made in view of the above problems, an object of the moving speed of the probe to provide an ultrasonic image system that can suppress waving even when high speed.

To achieve the above object, an ultrasound imaging system of the present invention includes an ultrasound imaging device, and a water tank, at the end of the X-axis direction of the water tank, the gap position between the opposite sides in the wall of the X-axis direction Reflected wave attenuating means for attenuating the reflected wave at the end of the wave of the liquid substance that is an ultrasonic wave propagation medium generated when the probe of the ultrasonic imaging apparatus is scanned is arranged. The reflected wave attenuating means includes a square and plate-like base and a plurality of protrusions disposed on one side of the base, and the protrusions are disposed toward the probe side. In addition, a gap position changing means having an insertion groove for changing the gap position between the inner wall surfaces on both sides in the X-axis direction is provided at the end of the water tank. . Other aspects of the present invention will be described in the embodiments described later.

  According to the present invention, undulation can be suppressed even when the moving speed of the probe is high.

It is an external view which shows the structure of the ultrasonic imaging system which has a reflected wave attenuation means. It is explanatory drawing which shows the structure of a space | gap position change means, (a) is a figure which shows the method of arrange | positioning a reflected wave attenuation means, (b) It is a side view of a space | gap position change means. It is a top view which shows the arrangement | positioning position of the reflected wave attenuation means in a water tank. It is a block diagram which shows the structure of the control system and signal processing system of an ultrasonic imaging system. It is a structure schematic diagram which shows the reflected wave attenuation means which concerns on Example 1, (a) is a side view at the time of arrange | positioning in a water tank, (b) is a perspective view of a reflected wave attenuation means. It is a structure schematic diagram which shows the reflected wave attenuation means which concerns on Example 2, (a) is a side view at the time of arrange | positioning in a water tank, (b) is a disassembled perspective view of a reflected wave attenuation means. It is a structure schematic diagram which shows the reflected wave attenuation means which concerns on Example 3, (a) is a side view at the time of arrange | positioning in a water tank, (b) is a perspective view of a reflected wave attenuation means. It is a structure schematic diagram which shows the reflected wave attenuation means which concerns on Example 4, (a) is a side view at the time of arrange | positioning in a water tank, (b) is a perspective view of a reflected wave attenuation means. It is a structure schematic diagram which shows the reflected wave attenuation means which concerns on Example 5, (a) is a side view at the time of arrange | positioning in a water tank, (b) is a perspective view of a reflected wave attenuation means. It is a structure schematic diagram which shows the reflected wave attenuation means which concerns on Example 6, (a) is a side view at the time of arrange | positioning in a water tank, (b) is a perspective view of a reflected wave attenuation means. It is a structure schematic diagram which shows the reflected wave attenuation means which concerns on Example 7, (a) is a side view at the time of arrange | positioning in a water tank, (b) is a perspective view of a reflected wave attenuation means. It is a structure schematic diagram which shows the tank side wall top part return means based on Example 8, (a) is a side view at the time of arrange | positioning in a water tank, (b) is a perspective view of a tank side wall top part return means. It is a figure which shows the structure of the ultrasonic imaging device of a transmission method. It is explanatory drawing which shows the case where the reflected wave attenuation means which concerns on Example 1 is applied to the ultrasonic imaging device of a transmission method.

DESCRIPTION OF EMBODIMENTS Embodiments for carrying out the present invention will be described in detail with reference to the drawings as appropriate.
FIG. 1 is an external view showing a configuration of an ultrasound imaging system 100 having a reflected wave attenuation means 30. In FIG. 1, reference numeral 1 indicates a coordinate system of three orthogonal axes of X, Y, and Z. The ultrasound imaging system 100 includes an ultrasound imaging device 90 and a water tank 10.

  The ultrasonic imaging apparatus 90 includes an ultrasonic probe 20 that transmits and receives ultrasonic waves, an image display apparatus 50 that controls the ultrasonic imaging apparatus 90 to display an ultrasonic image, and the ultrasonic probe 20. A transmission / reception device 60 (see FIG. 4) that inputs and outputs electrical signals, an X-axis scanner 71 and a Y-axis scanner 72 that mechanically scans the ultrasonic probe 20, and a mechanism that controls the X-axis scanner 71 and the Y-axis scanner 72. And a control device 77 (see FIG. 4). The ultrasonic probe 20 is supported by the X-axis scanner 71 and the Y-axis scanner 72, is immersed in the water 11 filled in the water tank 10, and is disposed so as to face the subject 15. Note that the Z-axis scanner of the ultrasonic probe 20 is omitted.

  Water 11 is injected into the water tank 10, and the subject 15 is placed in the water 11 in a submerged state. The water 11 in the water tank 10 is a propagation medium necessary for efficiently propagating the ultrasonic wave radiated from the opening surface at the lower end of the ultrasonic probe 20 (ultrasonic probe) to the inside of the subject 15. It is a liquid substance. The subject 15 is a semiconductor package including, for example, a wafer, a multilayer structure (or a stacked structure), and the like.

  The ultrasonic probe 20 is supported and installed by a holder 73. The holder 73 is attached to the X-axis scanner 71. The ultrasonic probe 20 is immersed in the water 11 filled in the water tank 10 and is disposed so as to face the upper portion Z direction of the subject 120 at a predetermined distance.

  The arm-shaped X-axis scanner 71 has a function of moving the holder 18 in the X-axis direction, and the Y-axis scanner 72 has a function of moving the X-axis scanner 71 in the Y-axis direction. The X-axis scanner 71 and the Y-axis scanner 72 constitute a scanner device 70. The ultrasonic probe 20 can be freely moved in the XY directions by the scanner device 70. Based on this moving operation, the ultrasonic probe 20 scans a predetermined measurement range on the surface of the subject 15, transmits ultrasonic waves, and reflects echo waves at a plurality of measurement points set in advance within the measurement range. And defects in the internal structure included in the measurement range can be visualized and inspected. The ultrasonic probe 20 is connected to a transmission / reception device 60 (see FIG. 4) via a cable 23.

  In the ultrasonic imaging system 100 of the present embodiment, waves of water 11 (liquid substance) generated when the ultrasonic probe 20 of the ultrasonic imaging apparatus 90 is scanned at both ends in the X-axis direction of the water tank 10 A characteristic is that a reflected wave attenuating means 30 for attenuating the reflected wave reflected at the end is disposed. The reflected wave attenuating means 30 is disposed at the opposite end of the water tank 10 in the X-axis direction by the gap position changing means 40. The gap position changing means 40 will be described later with reference to FIG. Details of the reflected wave attenuation means 30 will be described later with reference to FIGS.

  The present inventors examined a subject 15 having a large size of about 600 mm square as the subject 15 as in recent panel level packaging (PLP). It has been found that when such a large subject 15 is scanned back and forth in the X-axis direction with the ultrasonic probe 20 at a high speed of, for example, 2000 mm / sec, there is a problem of water rippling. The reflected wave attenuating means 30 of the present embodiment is made to solve the problem of suppressing the influence of the combined wave of such a large subject. Note that PLP is not a silicon substrate, but a glass panel that has been used in liquid crystal manufacturing, and is intended to reduce costs.

  FIG. 2 is an explanatory view showing the configuration of the gap position changing means 40, (a) is a diagram showing a method of arranging the reflected wave attenuating means, and (b) is a side view of the gap position changing means. . The reflected wave attenuating means 30 shown in FIG. 2A is formed of a base 31 having a square shape and a lattice shape having a large number of protrusions 32. At the end of the water tank 10 in the X direction, there is provided a gap position changing means 40 having an insertion groove 41 for changing the gap position between the reflected wave attenuating means 30 and the inner wall surfaces on both sides in the X axis direction. . In the case of FIG. 2A, there are five insertion grooves 41, for example. By changing the insertion position into the insertion groove 41, the positions of the reflected wave attenuation means 30 and the wall surface of the aquarium can be changed. Further, the lower end of the gap position changing means 40 has a lower end 45 that can be positioned in the Z-axis direction. The reflected wave attenuating means 30A is locked at the lower end 45 as shown in FIG. Moreover, the space | gap position change means 40 has the reverse U-shaped latching | locking part 42 so that it can latch to the edge part of a water tank, as shown in FIG.2 (b).

  In the example shown in FIG. 2, the reflected wave attenuating means 30 is inserted into the insertion groove 41 of the gap position changing means 40, but the present invention is not limited to this. For example, the reflected wave attenuation means 30 may be inserted third and fifth from the left side of the insertion groove 41, respectively. Thereby, the undulation that occurs when the moving speed of the ultrasonic probe 20 is high can be effectively suppressed.

  To summarize the main points of FIG. 2, a gap having an insertion groove 41 in which the reflected wave attenuating means 30 is disposed at the end of the water tank 10 of the present embodiment while changing the gap position with the inner wall surfaces on both sides in the X-axis direction. Position changing means 40 is provided. The insertion groove 41 has a width for inserting the base 31 of the reflected wave attenuation means 30, and the gap position changing means 40 has a plurality of insertion grooves 41. By changing the insertion position of the reflected wave attenuating means 30 into the insertion groove 41, the positions of the reflected wave attenuating means 30 and the wall surface of the water tank can be changed.

  FIG. 3 is a top view showing the arrangement position of the reflected wave attenuation means 40 in the water tank 10. The water tank 10 includes four side surfaces and a bottom surface. A subject 15 is disposed on a sample mounting table 12 in the water tank 10. The gap position changing means 40 is locked to the left side surface portion 10L and the right side surface portion 10R of the water tank 10 in the X-axis direction. As shown in FIG. 3, in the left gap position changing means 40, the reflected wave attenuating means 30 is inserted into the third insertion groove 41 from the left side surface portion 10 </ b> L of the water tank 10. Similarly, in the right gap position changing means 40, the reflected wave attenuation means 30 is inserted into the third insertion groove 41 from the right side surface portion 10 </ b> R of the water tank 10.

  When the ultrasonic probe 20 (see FIG. 1) is scanned by one line in the X-axis direction and then scanned to the scanning position in the Y-axis direction, the reflected wave attenuating means 30 is at least one of the protrusions 32 (projections). One is outside the start point position 16s in the Y-axis direction of the subject 15 to be acquired, and at least one of the protrusions 32 (projections) is outside the end point position 16e in the Y-axis direction of the subject 15. It is preferable. Thereby, it is possible to suppress undulations on the outer side of the starting point position 16s in the Y-axis direction of the subject 15 and on the outer side of the end point position 16e in the Y-axis direction.

  In the Y-axis direction, the reflected wave attenuating means 30 has at least one end on the outside of the start point position 16s in the Y-axis direction of the subject 15 to be imaged and the other end is at least the subject 15. It is preferable to be outside the end point position 16e in the Y-axis direction. Thereby, it is possible to suppress undulations on the outer side of the starting point position 16s in the Y-axis direction of the subject 15 and on the outer side of the end point position 16e in the Y-axis direction.

  FIG. 4 is a block diagram illustrating a configuration of a control system and a signal processing system of the ultrasound imaging system. The ultrasonic probe 20 includes an encoder 21 that detects the scanning position of the ultrasonic probe 20 and a piezoelectric element 22 that converts electrical signals and ultrasonic signals into each other. The piezoelectric element 22 is a single focus type ultrasonic sensor.

  The video display device 50 includes a scanning control unit 51 that controls the scanning position of the ultrasonic probe 20, a frequency control unit 52 that controls the frequency of ultrasonic waves, a timing control unit 53 that controls transmission and reception timings of ultrasonic waves, And an image generation unit 54 that generates a sound wave image.

  The transmission / reception device 60 amplifies the reception signal received by the ultrasonic probe 20, the burst wave transmitter 61 that generates the electrical signal of the burst wave, the impulse wave transmitter 62 that generates the electrical signal of the impulse wave, and the switch 63. An amplifier 64, an A / D converter 65 that converts the received signal from an analog signal to a digital signal, and a signal processing unit 66 that processes the received signal.

  The scanning control unit 51 is connected to the mechanical control device 77 so as to be able to input and output. The scanning control unit 51 controls the scanning position of the ultrasonic probe 20 by the mechanical control device 77, the X-axis scanner 71, and the Y-axis scanner 72, and receives the current scanning position information of the ultrasonic probe 20 from the mechanical control device 77. To do.

  The output side of the mechanical control device 77 is connected to the X-axis scanner 71 and the Y-axis scanner 72. The mechanical control device 77 is connected to the output side of the encoder 21 of the ultrasonic probe 20. The mechanical control device 77 detects the scanning position of the ultrasonic probe 20 based on the output signal of the encoder 21, and controls the ultrasonic probe 20 to the designated scanning position by the X-axis scanner 71 and the Y-axis scanner 72. To do. The mechanical control device 77 receives a control instruction for the ultrasonic probe 20 from the scanning control unit 51 and responds with scanning position information of the ultrasonic probe 20.

  The timing control unit 53 outputs an ultrasonic transmission / reception timing signal (information) to the transmission / reception device 60 based on the scanning position information of the ultrasonic probe 20 acquired from the scanning control unit 51, and transmits the ultrasonic wave to the frequency control unit 52. Output frequency information.

  The frequency control unit 52 instructs the burst wave transmitter 61 to output a predetermined number of burst waves having a predetermined frequency based on the ultrasonic frequency information output from the timing control unit 53.

  The burst wave transmitter 61 outputs a burst wave having a predetermined frequency to the piezoelectric element 22 by a predetermined number of pulses based on the signal output from the frequency control unit 52. The impulse wave transmitter 62 outputs an impulse wave to the piezoelectric element 22 based on the timing signal output from the timing control unit 53. The switch 63 switches whether to output a burst wave or an impulse wave to the piezoelectric element 22 based on the output signal of the timing control unit 53.

  The piezoelectric element 22 has electrodes attached to both sides of the piezoelectric film, and is composed of zinc oxide (ZnO), ceramics, a fluorine-based copolymer, or the like. The piezoelectric element 22 transmits ultrasonic waves from the piezoelectric film when a voltage is applied between both electrodes. Further, the piezoelectric element 22 converts an echo wave (received wave) received by the piezoelectric film into a received signal that is a voltage generated between the electrodes. The amplifier 64 amplifies the received signal and outputs it as an output signal Vout. The A / D converter 65 converts the amplified received signal from an analog signal to a digital signal.

  The signal processing unit 66 processes the received signal. The signal processing unit 66 cuts out only a predetermined period of the received signal by the gate pulse Vgate output from the timing control unit 53. The signal processing unit 66 outputs the amplitude information of the reception signal for a predetermined period or the time information of the reception signal for a predetermined period to the image generation unit 54. The image generation unit 54 generates an ultrasonic image at a predetermined frequency based on the output signal of the signal processing unit 66.

(Operation of ultrasonic imaging equipment)
A series of operations of the ultrasound imaging apparatus 90 will be described with reference to FIG.
The scanning control unit 51 scans the ultrasonic probe 20 in the + X direction and acquires pixels for one line. If the scanning control unit 51 detects that the ultrasonic probe 20 is located at the end in the X direction, the scanning control unit 51 moves the ultrasonic probe 20 in the + Y direction by a predetermined pitch, and then scans in the −X direction. An image for one line is acquired. By repeating this, the scanning control unit 51 performs scanning within a predetermined range.

  The timing control unit 53 of the video display device 50 receives scanning position information of the ultrasonic probe 20 in the X direction and Y direction from the scanning control unit 51, and instructs the frequency control unit 52 on the frequency based on the scanning position information in the Y direction. Then, based on the scanning position information in the X direction, the transmitter / receiver 60 is instructed to transmit ultrasonic waves, and a gate pulse Vgate for signal processing of the received signal is output.

  The transmission / reception device 60 switches either the burst signal output from the burst wave transmitter 61 or the impulse signal output from the impulse wave transmitter 62 with the switch 63 and outputs a signal to the ultrasonic probe 20. Further, the transmission / reception device 60 amplifies the reception signal of the echo wave (reception wave) received by the ultrasonic probe 20 by the amplifier 64, and then converts it into a digital signal by the A / D converter 65. The signal processing unit 66 processes the received signal (digital signal) based on the gate pulse Vgate input from the timing control unit 53, and outputs the received signal to the video display device 50.

  The video display device 50 images the internal structure of the subject 15 using the information on the scanning position acquired by the scanning control unit 51 as the pixel position and the information on the received signal processed by the transmission / reception device 60 as the luminance information of the pixel. indicate. The ultrasonic image showing the inside of the subject 120 may be based on the amplitude information of the received signal, or may be based on time information when the received signal is equal to or greater than a predetermined amplitude.

Hereinafter, various reflected wave attenuation means 30 will be described.
Example 1
5A and 5B are schematic structural views showing the reflected wave attenuating means 30A according to the first embodiment. FIG. 5A is a side view when the reflected wave attenuating means 30A is disposed in the water tank 10, and FIG. It is the perspective view seen from the side which touches (facing) 10 walls. That is, FIG. 5B is a perspective view of the side surface portion 10R side (right side) of FIG. As shown in FIG. 5 (a), the reflected wave attenuating means 30A is disposed at a predetermined distance from the side surface portions 10L, 10R of the water tank 10. As shown in FIG. 5 (b), the reflected wave attenuating means 30 </ b> A is formed of a base 31 that has a large number of protrusions 32 and has a square shape and a lattice shape. The protrusion 32 is a soft material such as a resin material. For example, a resin such as PP (polypropylene), EPDM (ethylene-propylene rubber), ABS (acrylonitrile, butadiene, styrene) is preferable. The protrusion 32 may be a metal material such as a thin wire.

  When the sample mounting table 12 is installed in the liquid material 11A stored in the water tank 10 and the ultrasonic probe 20 is moved at a high speed above the subject 15, a traveling wave is generated on the surface of the liquid material in the water tank 10 and travels. The wave hits the inner wall of the aquarium (for example, the inner walls of the side surfaces 10L and 10R) to generate a reflected wave. By reciprocating the ultrasonic probe 20 in the X-axis direction, the traveling wave and the reflected wave are combined to generate a larger combined wave. As a result, the displacement of the surface of the liquid material 11A becomes large, and when the tip of the ultrasonic probe 20 is exposed from the liquid material 11A, an image of the subject 15 by ultrasonic waves cannot be acquired. Further, when the synthetic wave exceeds the height of the side surface of the water tank 10, the liquid substance 11A overflows from the water tank 10 and it is difficult to allow the subject 15 to stand still. Furthermore, by acquiring bubbles in the liquid material 11A, image acquisition by ultrasonic waves is inhibited.

  For this reason, in this embodiment, the reflection wave attenuating means 30A is disposed on the side wall of the water tank 10, so that the wave of the liquid substance 11A, which is an ultrasonic propagation medium, is reflected at the side surfaces 10L and 10R (ends). Waves can be suppressed. The reflected wave attenuating means 30A has a structure in which a plurality of thin protrusions 32 whose tips are slightly bent are provided on a base having a through hole (for example, a lattice-like base 31). By disposing the protrusion 32 toward the side wall of the water tank 10, the traveling wave passes through the base provided with the through hole and is diffused by the protrusion 32, whereby the reflected wave can be suppressed.

  In the reflected wave attenuating means 30 </ b> A, it is preferable that at least one of the protrusions 32 (protrusions) is at a height above the surface of the liquid substance 11 </ b> A in the water tank 10 in the vertical direction (Z-axis direction). In the reflected wave attenuating means 30 </ b> A, the upper end 30 </ b> Au is preferably at a height above the surface of the liquid substance 11 </ b> A in the water tank 10 in the vertical direction. Thereby, it is possible to suppress undulation above the surface of the liquid substance 11A.

  In the reflected wave attenuating means 30A, in the vertical direction (Z-axis direction), at least one of the protrusions 32 (projections) is preferably at a height position below the lower surface 12d of the subject mounting table. . In the reflected wave attenuating means 30A, the lower end 30Ad is preferably at least a height position below the lower surface 12d of the sample mounting table 12 of the subject 15 in the vertical direction. Thereby, it is possible to suppress undulations in the vicinity of the lower surface 12d of the mounting table of the subject in the liquid substance 11A.

  The reflected wave attenuating means 30A of the first embodiment includes a base that is rectangular and plate-like (for example, the base 31) and a plurality of protrusions (for example, the protrusions 32) that are disposed on one side of the base. The base has a plurality of openings serving as flow paths, and is characterized in that the protrusions are disposed toward the end side (side surface side) of the water tank 10.

(Example 2)
6A and 6B are schematic structural views showing the reflected wave attenuating means 30B according to the second embodiment. FIG. 6A is a side view when the reflected wave attenuating means 30B is disposed in the water tank 10, and FIG. It is the disassembled perspective view seen from the side which touches (facing) 10 walls. That is, FIG. 6B is an exploded perspective view of the side surface portion 10R side (right side) of FIG. As shown in FIG. 6A, the reflected wave attenuating means 30B is disposed at a position separated from the side surface portions 10L, 10R of the water tank 10 by a distance d. The reflected wave attenuating means 30B has a structure in which a square and plate-like first base 30B1 and a square and plate-like second base 30B2 are bonded together. As shown in FIG. 6B, the first base 10B1 has a plurality of through holes 33, and the second base 30B2 has a plurality of through holes 34 smaller than the opening ratio of the through holes 33 of the first base 30B1.

  In other words, the reflected wave attenuating means 30B has a structure in which a plate (second base 30B2) having a different aperture ratio is bonded to a plate (first base 30B1) provided with a through hole. A plate provided with a through-hole 33 having a large aperture ratio is arranged inside the ultrasonic probe 20 in the water tank 10 and a plate provided with a through-hole 34 having a small aperture ratio is arranged outside thereof. And When the ultrasonic probe 20 is moved at a high speed above the subject 15, a traveling wave is generated on the surface of the liquid material in the water tank 10. The traveling wave passes through the plate provided with the through hole 33 having a large aperture ratio, and the traveling wave is attenuated by the plate provided with the through hole 34 having a small aperture ratio. Further, the traveling wave that has passed through the plate provided with the through-hole 34 having a small aperture ratio is reflected by the side wall of the water tank 10, but the wave energy is attenuated, so that the plate provided with the through-hole 34 having a small aperture ratio. Cannot pass. The reflected wave attenuating means 30B of this embodiment is highly effective when installed with a distance d from the side wall of the water tank 10, but it must be determined by the magnitude of the traveling wave, the aperture ratio, etc., and the dimensions can be uniquely determined. Absent.

  In the reflected wave attenuating means 30B of the second embodiment, a rectangular and plate-like first base and a second base are joined, and the first base has a through-hole 33 (first opening) serving as a flow path. The second base has a plurality of through-holes 34 (second openings) serving as flow paths. The opening ratio of the second opening is smaller than the opening ratio of the first opening, and the second base side is arranged with the end side of the water tank facing.

(Example 3)
7A and 7B are schematic structural views showing the reflected wave attenuating means 30C according to the third embodiment. FIG. 7A is a side view when the reflected wave attenuating means 30C is disposed in the water tank 10, and FIG. It is the perspective view seen from the direction opposite to the side which touches (facing) 10 walls. That is, FIG. 7B is a perspective view of the side surface portion 10L side (left side) of FIG. As shown in FIG. 7A, the reflected wave attenuation means 30 </ b> C having a plurality of protrusions 32 </ b> C is disposed on the side surfaces 10 </ b> L and 10 </ b> R of the water tank 10. As shown in FIG. 7B, the reflected wave attenuating means 30C has a plurality of protrusions 32C having a triangular cross section (cross section on the XZ plane) and long in the Y-axis direction on a rectangular and plate-like base 31C.

  When the ultrasonic probe 20 is moved at a high speed above the subject 15, a traveling wave is generated on the surface of the liquid substance 11 </ b> A in the water tank 10. The traveling wave has its reflected wave direction changed by the protrusion 32C of the reflected wave attenuating means 30C. Thereby, it can suppress that a traveling wave and a reflected wave synthesize | combine and become a larger traveling wave.

  The reflected wave attenuating means 30C of Example 3 includes a square and plate-like base (for example, the base 31C) and a plurality of protrusions (for example, the protrusion 32C) disposed on one surface of the base, A feature is that the protrusions are arranged toward the ultrasonic probe 20 side. Note that the cross section of the protrusion 32C is triangular, but it may be semicircular, semielliptical, or the like.

Example 4
8A and 8B are schematic structural views showing the reflected wave attenuating means 30D according to the fourth embodiment. FIG. 8A is a side view when the reflected wave attenuating means 30D is disposed in the water tank 10, and FIG. It is the perspective view seen from the direction opposite to the side which touches (facing) 10 walls. That is, FIG. 8B is a perspective view of the side surface portion 10L side (left side) of FIG. As shown to Fig.8 (a), the reflected wave attenuation | damping means 30D which has several protrusion 32D is arrange | positioned by the side parts 10L and 10R of the water tank 10. FIG. As shown in FIG. 8B, the reflected wave attenuating means 30D has a square and plate-like base 31D having a plurality of protrusions 32D having a triangular cross section (cross section on the XZ plane) and long in the Y-axis direction. In the fourth embodiment, unlike the third embodiment, the protrusion 32D increases in the upward direction (the direction on the negative side of the Z axis).

  That is, the reflected wave attenuating means 30D has a structure in which the protrusion 32D is disposed so as to gradually increase upward. When the ultrasonic probe 20 is moved at a high speed above the subject 15, a traveling wave is generated on the surface of the liquid substance 11 </ b> A in the water tank 10. Since the amplitude of the traveling wave is proportional to the magnitude of the traveling wave, the direction of the reflected wave can be effectively changed by increasing the protrusion upward.

  The reflected wave attenuating means 30D of the fourth embodiment includes a square and plate-like base (for example, the base 31D) and a plurality of protrusions (for example, the protrusion 32D) disposed on one surface of the base, The protrusions are arranged facing the ultrasonic probe 20 side. The protrusion is characterized by gradually increasing upward. Note that the cross section of the protrusion 32C is triangular, but it may be semicircular, semielliptical, or the like.

(Example 5)
FIG. 9 is a structural schematic diagram showing the reflected wave attenuating means 30E according to the fifth embodiment, (a) is a side view when disposed in the water tank 10, and (b) is a water tank of the reflected wave attenuating means 30E. It is the perspective view seen from the direction opposite to the side which touches (facing) 10 walls. 9B is a perspective view of the side surface portion 10L side (left side) of FIG. 9A. As shown in FIG. 9A, reflected wave attenuation means 30 </ b> E having a plurality of protrusions 32 </ b> E is disposed on the side surface portions 10 </ b> L and 10 </ b> R of the water tank 10. As shown in FIG. 9B, the reflected wave attenuating means 30E has a plurality of protrusions 32E having a triangular cross section (cross section on the XZ plane) and long in the Y-axis direction on a square and lattice-shaped base 31E. The protrusions 32E are disposed on the base 31E with a predetermined interval in the vertical direction (the positive and negative directions of the Z axis), and the predetermined interval becomes a wave through hole.

  That is, the reflected wave attenuating means 30E is provided with a plate (for example, the base 31E) provided with a through-hole toward the inner side centering on the ultrasonic probe 20, and the protrusion 32E toward the side wall surface of the water tank 10 at a distance d. Structure. When the ultrasonic probe 20 is moved at a high speed above the subject 15, a traveling wave is generated on the surface of the liquid substance 11 </ b> A in the water tank 10. After the traveling wave passes through the plate provided with the through hole and is reflected by the side wall of the water tank 10, the reflected wave can be suppressed by changing the direction of the reflected wave by the protrusion 32E.

  The reflected wave attenuating means 30E of Example 5 includes a base that is rectangular and plate-like (for example, the base 31E) and a plurality of protrusions (for example, the protrusions 32E) disposed on one surface of the base. The base has a plurality of openings serving as flow paths, and the protrusions are arranged toward the end of the water tank 10. In addition, although the cross section of the protrusion 32E is triangular, it may be semicircular or semielliptical.

(Example 6)
10A and 10B are schematic structural views showing the reflected wave attenuating means 30F according to the sixth embodiment. FIG. 10A is a side view when the reflected wave attenuating means 30F is disposed in the water tank 10, and FIG. It is the perspective view seen from the direction opposite to the side which touches (facing) 10 walls. That is, FIG. 10B is a perspective view of the side surface portion 10L side (left side) of FIG. As shown in FIG. 10A, the reflected wave attenuation means 30 </ b> F having a plurality of flat plate-like protrusions 32 </ b> F is disposed on the side surface portions 10 </ b> L and 10 </ b> R of the water tank 10. As shown in FIG. 10B, the reflected wave attenuating means 30F has a plurality of protrusions 32F having a square cross section (cross section on the XZ plane) and long in the Y-axis direction on a square and plate-like base 31F. The flat projection 32F has a plurality of small holes 35.

  When the ultrasonic probe 20 is moved at a high speed above the subject 15, a traveling wave is generated on the surface of the liquid substance 11 </ b> A in the water tank 10. The direction of the reflected wave is changed by the protrusion 32F of the reflected wave attenuation means 30F. Thereby, it can suppress that a traveling wave and a reflected wave synthesize | combine and become a larger traveling wave. The wave changed in the vertical direction (the positive / negative direction of the Z axis) can attenuate the wave energy by passing through the small hole 35 formed in the flat plate.

  The reflected wave attenuating means 30F of Example 6 includes a square and plate-like base (for example, the base 31F) and a plurality of protrusions (for example, the protrusion 32F) disposed on one surface of the base, The protrusions are arranged facing the ultrasonic probe 20 side. The protrusion 32F is characterized by a flat plate shape with respect to the Y-axis direction.

(Example 7)
FIG. 11 is a structural schematic diagram showing the reflected wave attenuating means 30G according to the seventh embodiment, (a) is a side view when disposed in the water tank 10, and (b) is a water tank of the reflected wave attenuating means 30G. It is the perspective view seen from the direction opposite to the side which touches (facing) 10 walls. That is, FIG. 11B is a perspective view of the side surface portion 10L side (left side) of FIG. As shown in FIG. 11A, the reflected wave attenuating means 30G having a plurality of plate-like protrusions 32G is disposed on the side surface portions 10L and 10R of the water tank 10. As shown in FIG. 11B, the reflected wave attenuating means 30G has a plurality of protrusions 32G having a square cross section (cross section on the XZ plane) and long in the Y-axis direction on a rectangular and plate-like base 31G. The flat protrusion 32G has a plurality of small holes 35.

  That is, the reflected wave attenuating means 30G has a structure in which the protrusion 32G is disposed so as to gradually increase upward. When the ultrasonic probe 20 is moved at a high speed above the subject 15, a traveling wave is generated on the surface of the liquid substance 11 </ b> A in the water tank 10. Since the amplitude of the traveling wave is proportional to the magnitude of the traveling wave, the direction of the reflected wave can be effectively changed by increasing the protrusion upward.

  The reflected wave attenuating means 30G of the seventh embodiment includes a square and plate-like base (for example, the base 31G) and a plurality of protrusions (for example, the protrusion 32G) disposed on one surface of the base, The protrusions are arranged facing the ultrasonic probe 20 side. The protrusion is characterized by gradually increasing upward.

(Example 8)
12A and 12B are schematic structural views showing the aquarium sidewall top returning means 37 according to the eighth embodiment. FIG. 12A is a side view when the aquarium sidewall top returning means 37 is disposed in the aquarium 10, and FIG. It is the perspective view seen from the direction opposite to the side which touches the wall of the water tank 10 of (facing). That is, FIG. 12B is a perspective view of the side surface portion 10L side (left side) of FIG. As shown in FIG. 12A, water tank side wall top return means 37 is disposed on the side surface portions 10 </ b> L and 10 </ b> R of the water tank 10. The water tank side wall top portion returning means 37 includes a top portion returning portion 37a having an L-shaped cross section (cross section on the XZ plane) and an engaging portion 37b for engaging the top returning portion 37a with the side surface portion. As shown in FIG.12 (b), the water tank side wall top part return means 37 is a shape long in a Y-axis direction. In addition, you may integrally mold the top return part 37a and the engaging part 37b.

  When the sample mounting table 12 is installed in the liquid material 11A stored in the water tank 10 and the ultrasonic probe 20 is moved at a high speed above the subject 15, a traveling wave is generated on the surface of the liquid material in the water tank 10 and travels. The wave hits the inner wall of the aquarium (for example, the inner walls of the side surfaces 10L and 10R) to generate a reflected wave. By reciprocating the ultrasonic probe 20 in the X-axis direction, the traveling wave and the reflected wave are combined to generate a larger combined wave. As a result, the displacement of the surface of the liquid material 11A becomes large, and when the tip of the ultrasonic probe 20 is exposed from the liquid material 11A, an image of the subject 15 by ultrasonic waves cannot be acquired. Further, when the synthetic wave exceeds the height of the side surface of the water tank 10, the liquid substance 11A overflows from the water tank 10 and it is difficult to allow the subject 15 to stand still. Furthermore, by acquiring bubbles in the liquid material 11A, image acquisition by ultrasonic waves is inhibited.

  For this reason, in this embodiment, the water tank side wall top return means 37 is disposed on the side wall of the water tank 10, so that the wave side surfaces 10 </ b> L and 10 </ b> R (ends) of the liquid substance 11 </ b> A, which is an ultrasonic propagation medium. The reflected wave can be suppressed. Since the water tank side wall top return means 37 has a top return part 37a having an L-shaped cross section, the reflected wave can be inhibited by the top return part 37a and the reflected wave can be suppressed.

  In the first to eighth embodiments, the case where the ultrasound imaging apparatus 90 is the reflection method has been described. However, the present invention is not limited to this. For example, the ultrasonic imaging apparatus 90 may be a transmission method.

  FIG. 13 is a diagram illustrating a configuration of a transmission-type ultrasonic imaging apparatus. The subject 15 is placed on the examination subject holder 17 and is disposed between the first ultrasonic probe 81 (upper probe) and the second ultrasonic probe 82 (lower probe). The inspection object holder 17 is made of a material that transmits ultrasonic waves, for example, a plastic material such as polyethylene or polymethylpentene, an acrylic resin, or the like.

  The mounting component 85 fixes the X-axis scanning unit 80 and the first Z-axis scanning unit 83, and the mounting component 86 fixes the X-axis scanning unit 80 and the second Z-axis scanning unit 84. The attachment component 85 and the attachment component 86 are integrated with each other by a fastener such as a screw. The probe holder 87 is a holder for fixing the first ultrasonic probe 81, and can be driven in the ± Z-axis direction via the first Z-axis scanning unit 83. The L-shaped metal fitting 88 is a metal fitting for fixing the second ultrasonic probe section 82 and can be driven in the ± Z-axis direction via the second Z-axis scanning section 84.

  When the X-axis scanning unit 80 is driven in the X direction, both the first ultrasonic probe unit 81 and the second ultrasonic probe unit 82 are driven in the ± X direction. When the Y-axis scanning unit (not shown) is driven in the Y-axis direction, both the first ultrasonic probe unit 81 and the second ultrasonic probe unit 82 are driven in the ± Y direction. That is, the second ultrasonic probe 82 is driven following the first ultrasonic probe 81 in the ± X and ± Y directions.

  On the other hand, when the first Z-axis scanning unit 83 is driven in the Z-axis direction, the first ultrasonic probe unit 81 is driven in the ± Z direction, and the second Z-axis scanning unit 84 is driven in the Z-axis direction. , The second ultrasonic probe 2 is driven in the ± Z direction. That is, in the ± Z direction, the first ultrasonic probe 81 and the second ultrasonic probe 82 can be driven independently.

  FIG. 14 is an explanatory diagram illustrating a case where the reflected wave attenuating unit according to the first embodiment is applied to a transmission-type ultrasonic imaging apparatus. Similar to the first embodiment, the reflected wave attenuating means 30A is disposed at a predetermined distance from the side surface portions 10L, 10R of the water tank 10. The reflected wave attenuating means 30 </ b> A is formed by a base 31 having a square shape and a lattice shape having a large number of protrusions 32. The protrusion 32 is a soft material such as a resin material. For example, a resin such as PP (polypropylene), EPDM (ethylene-propylene rubber), ABS (acrylonitrile, butadiene, styrene) is preferable.

  In the reflected wave attenuating means 30A, in the vertical direction (Z-axis direction), at least one of the protrusions 32 (projections) is lower than the lower end part 82L of the second ultrasonic probe part 82 (lower probe part). It is preferable to have a height position. Thereby, it is possible to suppress undulation in the vicinity of the lower end portion 82L in the liquid material 11A.

  In the reflected wave attenuating means 30A, in the vertical direction (Z-axis direction), the lower end 30Ad is at least a height position below the lower end portion 82L of the second ultrasonic probe 82 (lower probe). preferable. Thereby, it is possible to suppress undulation in the vicinity of the lower end portion 82L in the liquid material 11A.

  The inspection object holder 17 is installed in the liquid substance 11A stored in the water tank 10, and the first ultrasonic probe 81 (upper probe) and the second ultrasonic probe 82 (above and below the subject 15). When the lower probe) is moved at a high speed, a traveling wave is generated on the surface of the liquid substance 11A in the water tank 10, and a traveling wave is also generated in the liquid substance 11A.

  For this reason, in the embodiment shown in FIG. 14, by providing the reflected wave attenuating means 30A on the side wall of the water tank 10, the side surfaces 10L and 10R (end portions) of the wave of the liquid substance 11A which is the ultrasonic wave propagation medium. The reflected wave at can be suppressed. The reflected wave attenuating means 30A has a structure in which a plurality of thin protrusions 32 whose tips are slightly bent are provided on a base having a through hole (for example, a lattice-like base 31). By disposing the protrusion 32 toward the side wall of the water tank 10, the traveling wave passes through the base provided with the through hole and is diffused by the protrusion 32, whereby the reflected wave can be suppressed.

  In FIG. 14, the example of the reflected wave attenuation means 30A (see FIG. 5) of the first embodiment has been described, but the present invention is not limited to this. The present invention can also be applied to the reflected wave attenuating means 30 of the second to seventh embodiments and the water tank side wall top returning means 37 of the eighth embodiment.

  The ultrasound imaging system 100 of this embodiment includes an ultrasound imaging device 90 and a water tank 10, and the ultrasound generated when the ultrasound probe 20 of the ultrasound imaging device 90 is scanned at the end of the water tank 10. Reflected wave attenuating means 30 is provided for attenuating the reflected wave at the end of the wave of the liquid substance that is the propagation medium. The reflected wave attenuating means 30 has a plurality of protrusions 32 (projections). When the ultrasonic probe 20 of the ultrasonic imaging apparatus 90 is scanned in the X-axis direction, both ends of the water tank 10 in the X-axis direction are Reflected wave attenuating means 30 is provided. Thereby, it is possible to suppress undulation even when the ultrasonic probe 20 is moved at high speed.

  As another effect, it is possible to reduce the momentum of the water that flows in when the sample mounting table 12 is submerged in water.

  In addition, this invention is not limited to above-described embodiment, Various modifications are included. For example, the protrusion 32 is preferably made of resin, but may be made of metal such as stainless steel. Stainless steel has water resistance. Further, the above-described embodiment has been described in detail for easy understanding of the present invention, and is not necessarily limited to one having all the configurations described. Further, it is possible to add, delete, and replace other configurations for a part of the configuration of each embodiment.

DESCRIPTION OF SYMBOLS 1 Coordinate system 10 Water tank 11 Water 11A Liquid substance 12 Sample mounting stand 15 Subject 17 Holder to be examined 20 Ultrasonic probe 30, 30A, 30B, 30C, 30D, 30E, 30F, 30G Reflected wave attenuation means 31 Base 32 Protrusion (protrusion) object)
37 Water tank side wall top portion returning means 40 Gap position changing means 41 Insertion groove 50 Video display device 70 Scanner device 71 X-axis scanner 72 Y-axis scanner 81 First ultrasonic probe (upper probe)
82 Second ultrasonic probe (lower probe)
90 Ultrasonic imaging system 100 Ultrasonic imaging system

Claims (10)

An ultrasonic imaging device and a water tank,
Propagation of ultrasonic waves generated when the probe of the ultrasonic imaging apparatus is scanned at the end of the water tank in the X-axis direction by changing the gap between the inner wall surfaces on both sides in the X-axis direction. Reflected wave attenuating means for attenuating the reflected wave at the end of the liquid substance wave as a medium is provided,
The reflected wave attenuating means includes a square and plate-shaped base and a plurality of protrusions disposed on one side of the base, and the protrusion is disposed toward the probe side,
The end of the water tank is provided with a gap position changing means having an insertion groove for changing the position of the gap between the reflected wave attenuating means and the inner wall surfaces on both sides in the X-axis direction. ultrasound imaging system that. An ultrasonic imaging device and a water tank,
Propagation of ultrasonic waves generated when the probe of the ultrasonic imaging apparatus is scanned at the end of the water tank in the X-axis direction by changing the gap between the inner wall surfaces on both sides in the X-axis direction. Reflected wave attenuating means for attenuating the reflected wave at the end of the liquid substance wave as a medium is provided,
The reflected wave attenuating means includes a square and plate-like base and a plurality of protrusions disposed on one side of the base, and the base has a plurality of openings serving as flow paths,
The protrusion is disposed toward the end of the water tank,
The end of the water tank is provided with a gap position changing means having an insertion groove for changing the position of the gap between the reflected wave attenuating means and the inner wall surfaces on both sides in the X-axis direction. ultrasound imaging system that. When the probe is scanned for one line in the X-axis direction and then scanned to the scanning position in the Y-axis direction, the reflected wave attenuating means is configured to detect at least one of the protrusions of a subject whose image is to be acquired. The superposition according to claim 1 or 2, wherein the position is outside a start position in the Y-axis direction, and at least one of the protrusions is outside an end position in the Y-axis direction of the subject. Sound image system. The reflected wave damping means in the vertical direction, according to 請 Motomeko 3 you, characterized in that in at least one of the upper height position than the surface of the liquid substance in said water tank of said projections super Sound image system. The reflected wave attenuating means is
When the measurement mode of the ultrasonic imaging apparatus is a reflection method, in the vertical direction, at least one of the protrusions is a height position below the lower surface of the mounting table of the subject,
When the measurement mode of the ultrasonic imaging apparatus is a transmission method, at least one of the protrusions is a height position below the lower end portion of the lower probe portion in the vertical direction. The ultrasound imaging system according to claim 3 or 4 . A scanner that scans the probe for one line in the X-axis direction and then scans to the scanning position in the Y-axis direction;
In the Y-axis direction, the reflected wave attenuating means has one end side outside at least the starting point position in the Y-axis direction of the subject to be imaged and the other end side is at least Y of the subject. ultrasound imaging system according to claim 1 or claim 2, characterized in that from the end position in the axial direction on the outside. The reflected wave damping means in the vertical direction, in any one of claims 1, 2 and 6 the upper end edges, characterized in that the height position of the upper side of the surface of the liquid material in at least said water tank The described ultrasound imaging system. The reflected wave attenuating means is
When the measurement mode of the ultrasonic imaging apparatus is a reflection method, in the vertical direction, the lower edge is at least a height position below the lower surface of the mounting table of the subject,
Wherein when the measurement mode of the ultrasound imaging device is a transmission method, in the vertical direction, it claims lower end edges, characterized in that at least the height position of the lower side of the lower end portion of the probe 1, 2, 6 8. The ultrasound imaging system according to any one of items 7 to 7 . The insertion groove has a width for inserting the reflected wave attenuation means,
Ultrasound imaging system according to claim 1 or claim 2 wherein the gap position changing means is characterized by a plurality chromatic said insertion groove. An ultrasonic imaging device and a water tank,
Propagation of ultrasonic waves generated when the probe of the ultrasonic imaging apparatus is scanned at the end of the water tank in the X-axis direction by changing the gap between the inner wall surfaces on both sides in the X-axis direction. Reflected wave attenuating means for attenuating the reflected wave at the end of the liquid substance wave as a medium is provided,
The reflected wave attenuating means has a rectangular and plate-like first base and second base joined together,
The first base has a plurality of first openings serving as flow paths,
The second base has a plurality of second openings serving as flow paths,
The aperture ratio of the second opening is smaller than the aperture ratio of the first opening,
The second base side is disposed toward the end side of the water tank ,
The end of the water tank is provided with a gap position changing means having an insertion groove for changing the position of the gap between the reflected wave attenuating means and both inner wall surfaces in the X-axis direction . ultrasound imaging system that.

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