JP6440163B2 - Cylindrical chemical filter case - Google Patents

Description

  The present invention is a cylindrical chemical filter case installed in a supply path of supply gas such as nitrogen gas, compressed air, dry air, etc., and a chemical substance is placed in a cylindrical case having a supply gas inlet and outlet in series. Supply that is filled with filter material to be highly purified, removes chemical substances by passing the supply gas through the cylindrical case, and supplies clean supply gas that does not contain chemical substances to departments that need it The present invention relates to a gas cylindrical chemical filter case.

  When manufacturing equipment such as semiconductor integrated circuits and liquid crystal panels is installed in a clean room where dust is removed and purified gas is supplied, but it contains chemical substances that cannot be removed by ordinary air filters Since a clouding phenomenon appears in lenses and mirrors of exposure apparatuses and inspection apparatuses, a chemical filter case with a special filter material for removing chemical substances is installed in the supply path to remove the chemical substances. The chemical filter case is required to completely eliminate the spread of welding rods and the like from the welding point.

As this chemical filter case, for example, as described in Patent Document 1, a structure in which the front panel on the inlet side and the rear panel on the outlet side of the cylindrical case are screwed by covering with an open / close clamp, there is also a tubular case and a rear panel connected by welding engagement with meshing ridges of irregularities from the outside as to connect the structure simple, and the inlet side of the front panel to be attached because fitting screws.

JP 2002-102638 A

  However, the connection for welding the cylindrical case and the rear panel by engaging the concave and convex portions is as follows. As shown in FIG. There is a problem that a gap S is formed between the taper surface, and welding flaws, rubbing flaws, dust, and the like accumulate in the gap S and are scattered all over. In addition, when welding marks remain at the welding location, there is a problem that the welding rods are scattered in a similar manner and the supply gas is fouled.

Further, the cylindrical case the member to the tubular casing although with fit fitting induction member with legs in order to flow out Intention feed gas flow spreads from the inlet to the outlet, to facilitate the fitting fit with Since it is formed with a smaller diameter, there is a problem that an unpleasant noise is generated due to the occurrence of displacement, peristalsis, vibration, etc. in the cylindrical case.

In the present invention, the cylindrical case and the rear panel are flat-butted, and a wide V-shaped cut portion is provided at the butted portion, and welding is performed to fill the surface and finish polishing to remove the weld traces on the inner and outer surfaces. so as to connect, to eliminate the occurrence and welding marks the gap which occurs by engagement of irregularities in the tubular casing and the induction member with the leg of the feed gas to give fit fitting on the outlet side into the tubular casing The problem is solved by fixing firmly so as not to move, and eliminating the occurrence of noise due to the displacement movement, vibration, etc. of the member.

  In the chemical filter case of the present invention, since the outlet side of the cylindrical case and the rear panel are flat-butted and connected by filling welding and finish polishing of the V-shaped cut portion, the cylindrical case of either large or small diameter There is also an effect that a gap is generated in the connection part between the rear panel and the weld trace is completely eliminated, and the four spots such as welding flaws, scratches and dust caused by the presence of the gap and the weld trace can be completely eliminated. Arise.

  Since the guide member with legs is firmly fixed so as not to move in the cylindrical case, there is an effect of eliminating the unpleasant noise generated by the displacement movement, vibration, etc. of the guide member.

Front view showing the cylindrical case, front panel and rear panel in the state before assembly (A) is a state before the short ring of the rear panel and the cylindrical case are butted together, (b) is a partial cross-sectional view showing a state where the V-shaped cut portion is welded, and (c) is a welding mark inside and outside the same. Is a partial cross-sectional view showing the state after finishing polishing and connecting Perspective view showing an example of a guide member equipped with legs with mating fit insertion state before the tubular casing (A) to (d) are explanatory view showing the process of fixing abutting push the fit-insertion fitting into the tubular casing of the induction member with legs Cross-sectional view showing a state where the chemical filter material is filled in the cylindrical case and the front panel is bolted Explanatory drawing showing an installation example in a clean room Sectional view showing a conventional example

1 is a cylindrical case 2 is a rear panel 2a is a disk 2b is a supply gas outlet hole 2c is a cylindrical part 2d is a short ring 3 is a front panel 3a is a disk 3b is a supply gas inlet hole 3c is a cylindrical part 3d is a supply gas Diffusion member 4 is a V-shaped cut portion 5a is a bolt 5b is a nut 6 is a guide member with a leg 6a is a main plate 6b is a leg 6c is a guide hole 7 is a clean room 8 is a device for supplying a supply gas S is a gap W is a weld W1 , W2 is smooth surface F is filter material Y is induction space K is supply gas

In the present invention, the outer side V-shaped cut portion formed in a flat-butt-butted shape in which no gap is generated between the outlet side end of the cylindrical case and the rear panel, and finish polishing to remove the welding traces are formed. The gap S and the welding traces that have conventionally occurred on the inner surface of the cylindrical case are eliminated, and the gap accumulation such as the welding rod and the adhesion spread to the welding traces are not generated completely.
In addition, the guide member with the leg is a quadrangle in plan view that is large enough to fit the cylindrical case, and one of the vertical and horizontal sides is slightly elongated, and one of the fitting legs provided on the four circumferences is provided with an outward opening inclination. and to form, with order fitting the outer opening inclined leg side tilted forward to the cylinder-shaped case, and fixed by abutting strongly pressed to the inner wall of the guide member of the tubular casing by smoothing press late Make sure that it does not move so that it does not generate any noise due to misalignment or vibration.

As shown in FIG. 1, a cylindrical case 1 having an inlet and an outlet at both ends in series, a rear panel 2 connected to the outlet side, and a front panel 3 connected to the inlet side are individually formed of stainless steel.
The rear panel 2 is provided with a small cylindrical part 2c provided with an outlet hole 2b for supply gas at the center of a disk 2a larger than the diameter of the cylindrical case 1 facing outward, and is flush with the cylindrical case 1 on the inner side of the disk 2a. A short ring 2d having the same diameter is provided. The cylindrical case 1 and the short ring 2d are abutted by the same diameter, and as shown in FIG. 2, a large and deep V-shaped cut portion 4 is provided on the outer periphery, and welding W is buried to fill the V-shaped cut portion 4 to connect the two. The weld marks on the inner and outer surfaces are scraped off by finish polishing to form smooth surfaces W1 and W2.

  As apparent from FIG. 1, the front plate 3 protrudes outwardly from a cylindrical portion 3c provided with an inlet hole 3b for the supply gas K at the center of the circular plate 3a, and is removed between the circular plate 3a and the flange 1a at the end of the cylindrical case 1. The bolt 5a and nut 5b are fixed and attached freely. 3d is a cup-shaped porous diffusion member that diffuses the supply gas K into the cylindrical case 1, and is welded to the center of the inner surface of the disk 3a.

  FIG. 3 shows a homogeneous guiding member 6 with legs, a main plate 6a having a square shape of a size that fits into the cylindrical case 1 and slightly longer than 1 mm in either length or width, Four fitting legs 6b are provided around the four circumferences, and one of the slightly longer fitting legs is opened and inclined outward, and the facing leg is closed and inclined. The main plate 6a has a large number of guide holes 6c.

As shown in FIGS. 4 (a) to 4 (d), the legged guide member 6 is fitted outwardly and inclined before the front panel 3 is fastened with the bolt 5a, that is, in a state where the inlet of the cylindrical case 1 is opened. with it's fitted into the leg 6b side from the inlet side to the forward inclination is allowed by and the other side of the fitting because with legs 6b elastic bending inward to the tubular casing 1. The final stage of the fit-insertion fitting can be fitted by tilting in FIG 4 (c) to the fitting with the leg 6b is after Release 2 prior to indicate the rear end side of the main plate 6a when the contact with such push rod To push the main plate 6a flat from an oblique state as shown in FIG. 4 (d). In the process, the long side of the main plate 6a is firmly pressed against and fixed to the inner wall of the cylindrical case 1. Even if the guiding member 6 with legs is moved by defeating the cylindrical case 1 by the strong contact of the main plate 6a, it does not move at all. The rear fitting leg 6b that has been elastically bent returns to its original shape.

  Next, the cylindrical case 1 is filled from the inlet side with a high-precision chemical filter material F made of special fibers shown in FIG. An induction space Y for the supply gas K is formed before the outlet. After filling, the front panel 3 is fastened with bolts 5a and nuts 5b to close the cylindrical case 1, and the short cylinder 3c on the inlet side is connected to a supply path such as nitrogen gas or compressed air in the clean room 7 as shown in FIG. Then, the cylindrical portion 2c on the outlet side is connected to a supply path that supplies the exposure apparatus that requires clean gas, the inspection apparatus 8, and the like.

The supply gas K entering the cylindrical case 1 flows widely in the cylindrical case 1 by the diffusion member 3d, flows into the induction space Y by the guide member 6, and flows out from the outlet.
The supply gas K supplied in this way is an acidic substance such as hydrogen chloride, hydrogen sulfide, SOx, NOx, fluorine, ammonia, amine, etc. mixed in the supply gas K such as nitrogen gas or compressed air or dry air by the filter material F It adsorbs chemical contaminants such as alkaline substances such as boron, dopant substances such as boron, siloxane phthalates such as DPO, and organic substances such as BHT, HMDS, and TMS, and removes molecular contaminants with high accuracy.・ Prevents fogging of lenses and mirrors in inspection equipment, etc., prevents contamination in the circulation part of the exposure equipment, and prevents thin film adhesion on the substrate surface to improve manufacturing yield, product quality, optical parts, photomasks, etc. It will be effective in preventing pollution.

  Since the cylindrical chemical filter case of the present invention eliminates the gap generated inside the connection part between the rear panel, there is no accumulation of welding rods, etc. It is possible to prevent the welding rods from being scattered from the welding marks. In particular, the supply gas can be supplied to various apparatuses by using a chemical filter material as a supply gas which is purified with high accuracy and does not contain a chemical substance. In addition, the guiding member with legs is strongly pressed against and fixed in the cylindrical case, so that no shifting movement, peristalsis, vibration, etc. occur at all, so that generation of an unpleasant noise is eliminated.

  The cylindrical chemical filter case of the present invention is widely used because it can be supplied to various manufacturing apparatuses and the like that require a supply gas from which a chemical substance has been removed with high precision without any equipment burden.

Claims (1)

A cylindrical case having an inlet and an outlet for the supply gas, and a rear panel on the outlet side of the cylindrical case are connected to each other by plane butting, filling welding of the V-shaped cut portion, and finishing polishing to remove welding marks on the inner and outer surfaces, In addition, a square-shaped guide member fitted with an inner diameter of the cylindrical case is fitted with a legged guide member made of a main plate with a plurality of guide holes inserted from the opened inlet side to the outlet side before bolting the front plate of the cylindrical case. The long side of the guide member is made into the cylindrical shape by making the size and either one of the vertical and horizontal sides slightly longer than the other side, and tilting the cylindrical case and leveling the end of the inclined fitting. A method of manufacturing a cylindrical chemical filter case, wherein the case is firmly pressed against the inner surface of the case and fixed so as not to be displaced, oscillated, shaken, or the like.

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