JP6406125B2 - Fluid transport device and method for manufacturing fluid transport device - Google Patents

Description

  The present invention relates to a fluid transport device and a method of manufacturing a fluid transport device.

  Conventionally, there has been known a working fluid that is energized between the electrode pair by applying a voltage between the electrode pair, and a fluid transport device that transports the working fluid by applying a voltage to the electrode pair. (For example, refer to Patent Document 1). In such a fluid transport device, conventionally, each electrode constituting the electrode pair has been manufactured by cutting, plating, and etching.

JP-A-2005-353887

  In such an electrode pair, the flow rate of the working fluid can be increased by increasing the height of the back of the electrode (that is, the length in the direction intersecting the direction in which the working fluid flows). However, when manufactured using conventional methods such as cutting, plating, and etching, it has been difficult to sufficiently increase the height of the electrodes.

  Specifically, in the method of forming electrodes by cutting, since the distance between the electrodes is small, it is necessary to use a cutter having a very small diameter (for example, 0.2 mm diameter), but such a cutter length is increased. Since it was not possible, it was difficult to manufacture a tall electrode. Further, in the method of forming electrodes by overlapping thin films like plating, it is difficult to ensure a sufficient height because the thin film is thin. Further, in the method of forming the electrode by melting the material as in etching, it is difficult to secure a sufficient height because the material droops if the melting depth is too large. In these cases, even if an attempt is made to forcibly make a tall electrode, the cost increases due to an increase in processing time.

  In view of the above points, the present invention can ensure the length of the electrode in the direction intersecting the direction in which the working fluid flows more easily than in the conventional case, in the fluid transport device that transports the working fluid by applying a voltage to the electrode pair. To.

In order to achieve the above object, the invention according to claim 1 comprises a slit electrode plate (51),
A fluid that includes a pointed electrode plate (52) and energizes and transports a working fluid between the slit electrode plate and the pointed electrode plate when a voltage is applied between the slit electrode plate and the pointed electrode plate In the transport device, the slit electrode plate is a plate-shaped conductive plate material , provided with a notch through which the working fluid flows while penetrating in the thickness direction of the plate material. The fluid transport device is characterized in that it is a plate bent in a convex shape and pointed toward the slit electrode plate.

The invention according to claim 8 includes a slit electrode plate (51) and a pointed electrode plate (52), and when a voltage is applied between the slit electrode plate and the pointed electrode plate, the slit electrode A method of manufacturing a fluid transportation device that energizes and transports a working fluid between a plate and the pointed electrode plate, the method comprising: manufacturing the slit electrode plate; and manufacturing the pointed electrode plate The step of manufacturing the slit electrode plate is performed by processing the plate-shaped conductive plate material by providing a notch through which the working fluid flows while passing through the plate material in the thickness direction. includes the step of forming, a step of manufacturing said pointed electrode plate, forming the pointed electrode plate sharp convex shape rather than a flat shape by pressurizing Engineering bending a conductive plate of plate shape, and The pointed electrode plate is A method of producing a fluid transportation device characterized by comprising the step of arranging so as to convex toward the slit electrode plate.

  As described above, the slit electrode plate can be obtained by performing a process of providing a notch penetrating in the thickness direction with respect to the plate material. Therefore, the height of the electrode can be simply increased by increasing the width of the original plate material. Can be secured. Also, the pointed electrode plate is bent so that it is pointed and bent into a convex shape instead of a flat plate shape (that is, three-dimensionally) by processing the plate material, and the convex shape toward the slit electrode plate Has been. Therefore, since the direction of the convex shape and the direction in which the working fluid flows are substantially the same, the height of the back of the electrode can be ensured only by increasing the width of the original plate material. Therefore, the height of the back of the electrode (that is, the length of the electrode in the direction crossing the direction in which the working fluid flows) can be ensured more easily than in the past.

  In addition, the code | symbol in the bracket | parenthesis in the said and the claim shows the correspondence of the term described in the claim, and the concrete thing etc. which illustrate the said term described in embodiment mentioned later. .

It is a perspective view of the cooling system in a 1st embodiment. It is an II arrow directional view (front view) of FIG. It is a III arrow directional view (bottom view) of FIG. It is IV-IV sectional drawing of FIG. FIG. 5 is an enlarged view of V in FIG. 4. It is VI-VI sectional drawing of FIG. 3 is a perspective view of a slit electrode plate 51. FIG. 4 is a perspective view of a pointed electrode plate 52. FIG. It is a figure which shows the electrical connection structure of the slit electrode plate 51, the pointed electrode plate 52, and the flow of a working fluid. It is a figure which shows the manufacturing process of the slit electrode plate 51. FIG. 5 is a diagram illustrating a manufacturing process of the pointed electrode plate 52. FIG. It is a figure which shows the manufacturing process of the slit electrode plate 51 in 2nd Embodiment. 5 is a diagram illustrating a manufacturing process of the pointed electrode plate 52. FIG. It is a figure which shows arrangement | positioning of the slit electrode plate 51 and the pointed electrode plate 52, an electrical connection structure, and the flow of a working fluid. It is a figure which shows arrangement | positioning of the slit electrode plate 51 in 3rd Embodiment, the pointed electrode plate 52, an electrical connection structure, and the flow of a working fluid. It is a figure which shows arrangement | positioning of the slit electrode plate 51 in 4th Embodiment, the pointed electrode plate 52, an electrical connection structure, and the flow of a working fluid. It is a figure which shows the arrangement | positioning of the slit electrode plate 51 in 5th Embodiment, the pointed electrode plate 52, an electrical connection structure, and the flow of a working fluid. It is a figure which shows the manufacturing process of the slit electrode plate 51 in 6th Embodiment. 5 is a diagram illustrating a manufacturing process of the pointed electrode plate 52. FIG. It is a figure which shows arrangement | positioning of the slit electrode plate 51 and the pointed electrode plate 52, an electrical connection structure, and the flow of a working fluid. In 7th Embodiment, it is sectional drawing showing a part of fluid transport apparatus 1 in the same format as FIG. It is a figure which shows the structure of the slit electrode plate 51, the pointed electrode plate 52, and the adhesive agent 80 in 8th Embodiment. It is XXIII-XXIII sectional drawing of FIG. It is a bottom view of the cooling system in a 9th embodiment. FIG. 6 is a cross-sectional view showing a part of the fluid transport device 1 in the same format as FIG. 5. It is sectional drawing showing a part of fluid transport apparatus 1 in the same format as FIG. 5 in 10th Embodiment. It is a figure which shows the manufacturing method of the pointed electrode plate 52 in other embodiment. FIG. 6 is a cross-sectional view showing a part of the fluid transport device 1 in the same form as in FIG. 5 in another embodiment. It is a figure which shows an example of the fluid transport apparatus in other embodiment.

(First embodiment)
The first embodiment will be described below. As shown in FIG. 1, the cooling system of the present embodiment includes a fluid transport device 1, a heating element 2, and a heat dissipation member 3. The fluid transport device 1 and the heat radiating member 3 constitute a cooling device that cools the heating element 2.

  The fluid transport device 1 circulates and transports the working fluid, and thereby transports the working fluid to which the heat is transmitted from the heat generating element 2 in the vicinity of the heat generating element 2 to the vicinity of the heat radiating member 3. It is a device that releases heat from the heat dissipation member 3 to the outside.

  The heating element 2 is an object that generates heat upon contact with the fluid transport device 1 in the vicinity of the fluid transport device 1. The heating element 2 may be, for example, a power card in which switching elements (for example, IGBT (Insulated Gate Bipolar Transistor)) constituting an inverter are accommodated. In this case, the inverter may be, for example, an inverter for driving a vehicle driving motor using electric power from a traveling battery mounted on a hybrid vehicle or an electric vehicle.

  The heat dissipating member 3 is a metal member that comes into contact with the fluid transport device 1 in the vicinity of the fluid transport device 1, and releases heat transferred from the working fluid to the surrounding air or the like. The heat dissipation member 3 is an air-cooled fin having a plurality of fin-shaped protrusions.

  In this embodiment, the working fluid transported by the fluid transport device 1 is an EHD fluid exhibiting an electrohydrodynamic (abbreviated EHD) phenomenon. Such an EHD fluid is a dielectric liquid that is difficult to discharge even when a high voltage of several kV is applied, and flows due to the application of a voltage due to the well-known EHD effect.

  In the present embodiment, any EHD fluid may be used. For example, florinate may be used. Further, for example, among EHD fluids, an electro-conjugate fluid (abbreviated as ECF) may be used.

  As the ECF, for example, as described in Japanese Patent Application Laid-Open Nos. 2000-2222072 and 11-125173, the horizontal axis is the conductivity σ, the vertical axis is the viscosity η, and the conductivity of the fluid at the operating temperature. In the graph showing the relationship between σ and viscosity η, conductivity σ = 4 × 10 −10 S / m, point P expressed by viscosity η = 1 × 100 Pa · s, conductivity σ = 4 × 10 −10 S / m , Point Q represented by viscosity η = 1 × 10 −4 Pa · s, conductivity R σ = 5 × 10 −6 S / m, point R represented by viscosity η = 1 × 10 −4 Pa · s It is possible to use a compound having conductivity σ and viscosity η located inside a right triangle or a mixture of two or more compounds prepared to have conductivity σ and viscosity η located inside the triangle. it can. For example, dibutyldecane-dioate can be used as the ECF. A flame-retardant / non-flammable halogen-containing liquid (fluorine, chlorine, bromine, etc.) can be used as the ECF.

  Hereinafter, the details of the fluid transport device 1 will be described. As shown in FIGS. 1, 2, 3, and 4, the fluid transport device 1 includes an outer peripheral wall 11, an inner peripheral wall 12, a top wall 13, a bottom wall 14, an insulating member 15, and a pump 16. . The outer peripheral wall 11, the inner peripheral wall 12, the top wall 13, the bottom wall 14, and the insulating member 15 constitute a casing containing the working fluid flow path and the pump 16.

  The outer peripheral wall 11 is a plate-shaped metal member that surrounds an annular flow path of fluid from the outer periphery. The outer peripheral wall 11 is connected to the top wall 13 at one end and is connected to the bottom wall 14 at the other end, and is opposed to the inner peripheral wall 12. Moreover, the above-mentioned heat radiating member 3 is fixedly connected to the outermost surface (surface opposite to the flow path) of the outer peripheral wall 11 at a portion farthest from the heating element 2.

  The inner peripheral wall 12 is a plate-shaped metal member that surrounds an annular flow path of fluid from the inner periphery. The inner peripheral wall 12 is connected to the top wall 13 at one end and to the bottom wall 14 at the other end, and the inner peripheral wall 12 faces the outer peripheral wall 11. Moreover, the above-mentioned heat radiating member 3 is fixedly connected to the outermost surface of the inner peripheral wall 12 (the surface on the side opposite to the flow path) farthest from the heating element 2.

  The heat radiating member 3 is connected to a part of the outer peripheral wall 11 and the inner peripheral wall 12, but when more heat dissipation is required, more portions of the outer peripheral wall 11 and the inner peripheral wall 12, the top wall 13, and the bottom wall 14. Also, the heat dissipating member 3 can be connected.

  The top wall 13 is a perforated flat plate-shaped metal member that covers the annular flow path of the fluid from above. The top wall 13 is connected to the outer peripheral wall 11 at the outer peripheral end and is connected to the inner peripheral wall 12 at the inner peripheral end. The top wall 13 faces the bottom wall 14 and the insulating member 15.

  The bottom wall 14 is a perforated flat plate-shaped metal member that covers the annular flow path of the fluid from below. The bottom wall 14 is connected to the outer peripheral wall 11 at the outer peripheral end, is connected to the inner peripheral wall 12 at the inner peripheral end of the central portion, and faces the top wall 15. The hole formed in the bottom wall 14 has a hole in the vicinity of the heating element 2 and the pump 16 in addition to the hole that is greatly opened in the center. The bottom wall 14 is connected to the insulating member 15 at the inner peripheral end surrounding the hole near the heating element 2.

  The insulating member 15 covers the annular channel of the fluid from below, the pump 16 is attached to the surface on the channel side, and the heating element 2 is attached to the surface opposite to the channel side. The insulating member 15 is a flat plate member made of an insulator (for example, resin, glass, polytetrafluoroethylene, ceramic). The insulating member 15 is fitted into a hole in the bottom wall 14 by press fitting, and an outer peripheral end thereof is connected to an inner peripheral end of the bottom wall and faces the top wall 13. The reason why the insulating member 15 is formed of an insulator is to prevent conduction through an anode-cathode casing (especially the insulating member 15) described later in the pump 16. The insulating member 15 is formed thinner than the surrounding bottom wall 14 as shown in FIG.

  As shown in FIG. 4, the pump 16 is fixed to the surface of the insulating member 15 on the flow path side and is in contact with the flow path. The pump 16 is a member that circulates the working fluid in the flow path by energizing the working fluid in the flow path. As shown in FIGS. 5 and 6, a plurality of (for example, 10) slits are provided. The electrode plate 51 has a plurality of (for example, ten) pointed electrode plates 52.

  The plurality of slit electrode plates 51 and the plurality of pointed electrode plates 52 are alternately spaced one by one in the longitudinal direction 40 (see also FIG. 4) of the flow path (for example, 0.2 mm in the longitudinal direction 40). Are stacked. The longitudinal direction 40 of the flow path is the direction of the main flow of the working fluid in the flow path.

  Each of the slit electrode plates 51 is laminated on the insulating member 15 in the longitudinal direction 40 of the flow path with the pointed electrode plates 52 alternately spaced one by one, and is fixed to the insulating member 15 by bonding, bonding or the like. The The slit electrode plate 51 is made of a conductor (for example, metal) in order to function as an electrode.

  The shape of each slit electrode plate 51 is a wave extending in a direction 41 (hereinafter referred to as a lateral direction 41 of the flow path) that is zigzag and orthogonal to the longitudinal direction of the flow path 40 and parallel to the inner wall surface of the insulating member 15. Shape.

  The thickness of each slit electrode plate 51 is, for example, 0.1 mm. The height of each slit electrode plate 51 is a constant value of 5 mm, for example. The height is a direction (vertical direction in FIG. 6) that intersects the longitudinal direction 40 and the lateral direction 41 of the flow path at 90 °. Each slit electrode plate 51 has a plurality of through holes in the thickness direction.

  The slit electrode plate 51 functions as an electrode (specifically, an anode) when a voltage is applied between the adjacent pointed electrode plates 52, and operates between the adjacent pointed electrode plates 52. Energize the fluid. Thereby, the working fluid flows through each through hole of the slit electrode plate 51.

  The individual pointed electrode plates 52 are laminated on the insulating member 15 in the longitudinal direction 40 of the flow path with the slit electrode plates 51 alternately spaced one by one, and are fixed to the insulating member 15 by bonding, bonding or the like. The The pointed electrode plate 52 is made of a conductor (for example, metal) in order to function as an electrode.

  The shape of each pointed electrode plate 52 is a wave shape extending in the lateral direction 41 of the flow path while bending in a zigzag manner.

  The thickness of each pointed electrode plate 52 is, for example, 0.1 mm. The height of each pointed electrode plate 52 is a constant value of 5 mm, for example. Each pointed electrode plate 52 has a plurality of through holes in the thickness direction.

  The pointed electrode plate 52 functions as an electrode (specifically, a cathode) when a voltage is applied between the adjacent slit electrode plates 51, and the working fluid flows between the adjacent slit electrode plates 51. Energize. Thereby, the working fluid flows through each through hole of the pointed electrode plate 52.

  Each slit electrode plate 51 has a plurality of (for example, ten) convex plates 511 as shown in FIG. Further, each pointed electrode plate 52 has the same plurality of convex plates 521 as shown in FIG. 7 and 8 are perspective views showing a single slit electrode plate 51 and a pointed electrode plate 52, respectively.

  Each of the convex plates 511 corresponds to one zigzag crest, and a plurality of the convex plates 511 are connected in the lateral direction of the flow path, so that one slit electrode plate 51 is formed. The convex plate 511 is orthogonal to the longitudinal direction 40 of the flow path and faces the longitudinal direction 40 of the flow path and the downstream side of the fluid flow (hereinafter referred to as the front direction) at the center of the lateral direction 41 of the flow path. It is a perforated plate-shaped member bent into a convex shape.

  In each convex plate 511, one or both of the end portions 513 in the lateral direction 41 are connected to the adjacent convex plate 511. More specifically, in the convex plate 511 positioned at both ends of a certain slit electrode plate 51, only one of the end portions 513 in the lateral direction 41 is connected to the end portion 513 of the adjacent convex plate 511. Further, in the convex plate 511 located at a position other than both ends of a certain slit electrode plate 51, both the end portions 513 in the lateral direction 41 are connected to the end portions 513 of the adjacent convex plate 511.

  Further, a hole forming portion that surrounds a substantially elliptical through-hole that allows fluid to flow from the back side (rear side) to the front side (front side) at the apex portion 512 that protrudes to the forefront of the convex shape and its vicinity. Only one 514 is formed. Here, the backward direction is a direction opposite to the forward direction.

  Further, a flat plate shape is formed from the apex portion 512 of the convex plate 511 to both end portions 513. Further, the vertex portions 512 of the individual convex plates 511 substantially coincide with the vertex portions 522 of the convex plates 521 adjacent in the front direction and the rear direction in the lateral direction 41 of the flow path. In addition, the distance between the two vertex parts 512 in the two convex-shaped board 511 adjacent in the same slit electrode plate 51 is 1 mm or more and 5 mm or less, for example.

  Each of the convex plates 521 corresponds to one zigzag crest, and a plurality of the convex plates 521 are connected in the lateral direction of the flow path to form one pointed electrode plate 52. The convex plate 521 is a perforated plate-shaped member that is orthogonal to the longitudinal direction 40 of the flow path and is bent in a convex shape toward the front in the center of the lateral direction 41 of the flow path.

  In each convex plate 521, one or both of the end portions 523 in the lateral direction 41 are connected to the adjacent convex plate 521. More specifically, in the convex plate 521 located at both ends of a certain pointed electrode plate 52, only one of the end portions 523 in the lateral direction 41 is connected to the end portion 523 of the adjacent convex plate 521. Further, in the convex plate 521 located at a position other than both ends of a certain pointed electrode plate 52, both the end portions 523 in the lateral direction 41 are connected to the end portions 523 of the adjacent convex plate 521.

  In addition, a hole forming portion 524 that surrounds a substantially elliptical through-hole through which fluid can flow from the back side to the front side is provided between the apex portion 522 protruding forward and the both ends 523 one by one. A total of two are formed.

  Further, the apex portion 522 (more specifically, the surface on the front side of the apex portion 522) is sharp. Specifically, the following holds true in all cross sections that cut all the end portions 523 included in one pointed electrode plate 52. That is, the line constituting the front surface of each end 523 in the cross section has a minimum radius of curvature in the line of 0.5 mm or less, preferably 0.2 mm or less.

  Further, a flat plate shape is formed from the apex portion 522 to both ends 523 of the convex plate 521. In addition, the vertex portions 522 of the individual convex plates 521 substantially coincide with the positions of the vertex portions 512 of the convex plates 511 adjacent in the front direction and the rear direction in the lateral direction 41 of the flow path. In addition, the distance between the two vertex parts 522 in the two convex plates 521 adjacent in the same pointed electrode plate 52 is, for example, 1 mm or more and 5 mm or less.

  Further, the adjacent slit electrode plate 51 and the pointed electrode plate 52 are arranged apart from each other so that the zigzag shape is fitted. Specifically, a part of the pointed electrode plate 52 adjacent to the front of the slit electrode plate 51 exists between the two apex portions 512 of the two convex plates 511 adjacent in the same slit electrode plate 51. . Further, a part of the slit electrode plate 51 adjacent to the front of the pointed electrode plate 52 exists between the two apex portions 522 of the two convex plates 521 adjacent in the same pointed electrode plate 52. By such fitting, the distance between the electrodes of the slit electrode plate 51 and the pointed electrode plate 52 can be shortened, and as a result, the EHD effect can be exerted strongly.

  Also, as shown in FIG. 9, the plurality of slit electrode plates 51 are connected to the positive electrode of the DC power supply 30 through conductive wires. Further, the plurality of pointed electrode plates 52 are connected to the negative electrode of the DC power supply 30 through conductive wires. Therefore, the two adjacent slit electrode plates 51 and the pointed electrode plate 52 become the anode and cathode of a pair of electrodes, respectively.

  Next, the operation of the cooling system configured as described above will be described. The DC power supply 30 is connected to each slit electrode plate 51 and each pointed electrode plate 52 in a state where the working fluid is accommodated in the flow path in the casing made up of the members 11 to 15.

  Then, each one of all the pointed electrode plates 52 in the pump 16 forms a pair of electrode pairs with the slit electrode plate 51 adjacent to the front. Specifically, the electric field concentrates on a plurality of apex portions 522 in each pointed electrode plate 52, so that there is no gap between the apex portion 522 and the hole forming portion 514 adjacent to the apex portion 522. A uniform electric field is generated.

  The non-uniform electric field here refers to the occurrence of electric field concentration in the vicinity of the point electrode, such as the electric field distribution between the flat electrode and the point electrode. An electric field that is relaxed and has a sparse equipotential line. When the hole forming portion 514 is immediately in front of the apex portion 512 of the pointed electrode plate 52 as in the present embodiment, a non-uniform electric field is generated.

  When the non-uniform electric field is generated, the working fluid between the apex portion 522 and the hole forming portion 514 is biased by the EHD effect. In this embodiment, when the slit electrode plate 51 becomes an anode and the pointed electrode plate 52 becomes a cathode, a working fluid (for example, (existing) new technology management) that is urged from the apex portion 522 to the hole forming portion 514. FF-3EHA2, FF-8EHA2, FF-101EHA2, FF-909EHA2, and FF-505EHA2) that are supplied and sold as ECF from E.C.

  Therefore, as shown by the arrows in FIG. 9, the working fluid is strongly urged so as to flow from each vertex 522 of each pointed electrode plate 52 into the through hole of the slit electrode plate 51 adjacent to the front. Accordingly, the working fluid repeats the behavior of flowing through the through hole of the slit electrode plate 51, further flowing through the through hole of the pointed electrode plate 52, and further flowing through the through hole of the slit electrode plate 51. In this case, in the pump 16 as a whole, the working fluid is urged from the rear side in the longitudinal direction 40 of the flow path to the front side, and the fluid is circulated and transported along the longitudinal direction 40 of the flow path.

  Then, in the vicinity of the insulating member 15, the working fluid is heated by receiving the heat of the heating element 2 through the insulating member 15, and is biased by the pump 16 to flow in the flow path and in the vicinity of the heat radiating member 3. Then, in the vicinity of the heat radiating member 3, it is cooled by passing heat to the heat radiating member 3 through the outer peripheral wall 11 and the inner peripheral wall 12 and returns to the vicinity of the insulating member 15 again. And the heat radiating member 3 discharge | releases the heat obtained from the working fluid to surrounding air. By such an operation, the heating element 2 is cooled.

  In the present embodiment, the rear surface of each end 513 of the slit electrode plate 51 is not pointed toward the rear pointed electrode plate 52 and faces the rear pointed electrode plate 52. So that it is chamfered. The rear surface of each end 523 of the pointed electrode plate 52 is not sharpened toward the rear slit electrode plate 51 and is chamfered so as to face the rear slit electrode plate 51. . Therefore, since the electric field does not concentrate strongly at the end portion 513 unlike the apex portion 522 of the pointed electrode plate 52, the EHD effect is hardly exhibited. Therefore, the working fluid is not strongly urged rearward from the end portions 513 and 523.

  Next, the manufacturing method of the cooling system of this embodiment is demonstrated. First, the heating element 2, the heat radiating member 3, the outer peripheral wall 11, the inner peripheral wall 12, the top wall 13, and the bottom wall 14 are manufactured and assembled together. Furthermore, first, the pump 16 and the insulating member 15 are manufactured. Then, the slit electrode plate 51 and the pointed electrode plate 52 are fixed to the insulating member 15. The insulating member 15 to which the slit electrode plate 51 and the pointed electrode plate 52 are fixed is joined to the bottom wall 14. Then, after putting the working fluid into the flow path, the DC power supply 30 is electrically connected to the slit electrode 51 and the pointed electrode 52, whereby the manufacturing of the cooling system is completed.

  The process of manufacturing the pump 16 includes a process of manufacturing the slit electrode plate 51 and a process of manufacturing the pointed electrode plate 52. Here, the detail of the manufacturing method of the slit electrode plate 51 is demonstrated using FIG. First, as many thin electrode-shaped conductive and horizontally long flat plate materials as slit electrode plates 51 are prepared as many as the number of slit electrode plates 51 to be manufactured. Next, as shown in FIG. 10A, a plurality of through holes are formed at equal intervals in the lateral direction for each of these plate materials. In addition, the broken line in Fig.10 (a) is a virtual line showing a bending position. As a drilling process for forming a through hole, for example, a drilling process using a press, a drill, a milling machine, a lathe or the like is employed. A plurality of hole forming portions 514 are formed by this drilling process.

  Subsequently, as shown in FIG. 10B, the slit electrode plate 51 is bent at each of the central positions of the through holes and at each position equidistant from two adjacent through holes. More specifically, a mountain fold is formed along a fold line extending in the height direction at the central position of the through hole, and a valley is formed along the fold line extending in the height direction at a position equidistant from two adjacent through holes. Fold it. As a bending process for bending the slit electrode plate 51, a press process using a mold or the like is employed.

  By this bending process, the mountain-folded portion becomes the apex portion 512, and the valley-folded portion becomes the end portion 513. After the bending process, the slit electrode plate 51 is completed.

  Next, the detail of the manufacturing method of the pointed electrode plate 52 is demonstrated using FIG. First, as many thin plate-shaped conductive and horizontally long flat plate materials as the base of the pointed electrode plate 52 are prepared as many as the number of the pointed electrode plates 52 to be manufactured. Next, as shown in FIG. 11A, a plurality of through holes are formed at equal intervals in the horizontal direction for each of these plate materials. This interval is a half of the interval at which the through-holes are formed in the slit electrode plate 51. In addition, the broken line in Fig.11 (a) is a virtual line showing a bending position. The same method as that for the slit electrode plate 51 is employed as the drilling process for forming the through hole.

  Subsequently, as shown in FIG. 11B, the pointed electrode plate 52 is bent at each of the positions equidistant from two adjacent through holes. More specifically, bending is performed so that mountain folds and valley folds appear alternately in the lateral direction. As a bending process for bending the pointed electrode plate 52, a press process using a mold or the like is employed.

  By this bending process, the mountain-folded portion becomes the apex portion 522, and the valley-folded portion becomes the end portion 523. In order to prevent the apex portion 522 from being sharp and the end portion 523 from being sharp, for example, the portion applied to the apex portion 522 of the mold is sharpened, and the portion applied to the end portion 523 of the mold is sharpened. Do not chamfer the shape.

  As described above, in the pump 16 according to the present embodiment, the slit electrode plate 51 has a through hole formed by drilling a through hole through which the working fluid flows in the thickness direction of the plate-shaped conductive plate material. Formed to be vacant.

  Further, the pointed electrode plate 52 is not formed in a flat plate shape by processing a plate-shaped conductive plate material, that is, three-dimensionally sharply bent in a convex shape, and protrudes toward the slit electrode plate 51. It is arranged to be in shape.

  As described above, the slit electrode plate 51 is obtained by processing a through hole in the thickness direction of the plate material. Therefore, the height in the direction intersecting the direction in which the working fluid flows is the same as that of the original plate material. It can be secured just by increasing the width. Further, the pointed electrode plate 52 is bent sharply into a convex shape instead of a flat plate shape (that is, three-dimensionally) by processing the plate material, and is convex toward the slit electrode plate 51. Is arranged. Therefore, since the direction of the convex shape and the direction in which the working fluid flows are substantially the same, the height in the direction intersecting the direction in which the working fluid flows can be ensured only by increasing the width of the original plate material. Therefore, the length of the electrode in the direction crossing the direction in which the working fluid flows can be ensured more easily than in the past.

  In the present embodiment, the insulating member 15 is joined to the inner peripheral end of the bottom wall 14. Therefore, since the bottom wall 14 is present as a structural member for ensuring strength in addition to the insulating member 15, the insulating member 15 can be thinned. Accordingly, the thermal resistance of the insulating member 15 is reduced, and heat conduction from the heating element 2 to the working fluid is further promoted.

  In addition, since the pump 16 of the present embodiment has a shape in which a large number of corrugated slit electrode plates 51 and pointed electrode plates 52 are stacked, the appearance of a heat exchanger in which corrugated louver fins are stacked is used. Similar to shape. However, in the corrugated louver fin of the heat exchanger, the main flow direction is the direction perpendicular to the stacking direction of the fins, whereas in this embodiment, the main flow direction is the stacking direction of the electrode plates 51 and 52. The point is different.

  In this embodiment, since the through holes are formed on both sides of the apex portion 522 of the pointed electrode plate 52, the working fluid flows into the front side of the apex portion 522 from both sides. Accordingly, the flow from the apex 522 to the through hole of the slit electrode plate 51 on the front side is smooth.

  Moreover, in this embodiment, since both the slit electrode plate 51 and the pointed electrode plate 52 have a wave shape, a large heat transfer area of the slit electrode plate 51 and the pointed electrode plate 52 can be ensured. As a result, the cooling effect of the heating element 2 is enhanced. Further, since the strength against the flow of the working fluid is increased, the slit electrode plate 51 and the pointed electrode plate 52 are unlikely to fall down.

(Second Embodiment)
Next, a second embodiment will be described. The cooling system of the present embodiment is obtained by reducing the number of through holes of the pointed electrode plate 52 in half with respect to the cooling system of the first embodiment. Specifically, as shown in FIG. 12, the slit electrode plate 51 is manufactured in the same manner as in the first embodiment. However, as shown in FIG. 13A, the pointed electrode plate 52 has through holes spaced at equal intervals as the slit electrode plate 51.

  In this case, the shape of the slit electrode plate 51 before the bending process is finished and the bending process is the same as the shape of the pointed electrode plate 52 before the drilling process and the bending process. Therefore, both the slit electrode plate 51 and the pointed electrode plate 52 can be manufactured by performing the same drilling process on the same plate material. Therefore, the slit electrode plate 51 and the pointed electrode plate 52 can be manufactured more inexpensively and easily by making the drilling process common.

  Subsequently, as shown in FIG. 13B, a position that bisects between two adjacent through holes is defined as a bisected position, and a distance between the bisected position and the adjacent through hole is further increased by 2 The pointed electrode plate 52 is bent at each of the equally divided positions. More specifically, bending is performed so that mountain folds and valley folds appear alternately in the lateral direction. By this bending process, the mountain-folded portion becomes the apex portion 522, and the valley-folded portion becomes the end portion 523.

  In each of the pointed electrode plates 52 formed in this way, as shown in FIG. 14, a substantially elliptical shape that allows fluid to flow from the back side to the front side between the apex portion 522 and only one end portion 523. One hole forming portion 524 surrounding the through hole is formed.

(Third embodiment)
Next, a third embodiment will be described. The cooling system of the present embodiment is obtained by changing the shapes of all the slit electrode plates 51 and all the pointed electrode plates 52 with respect to the cooling system of the first embodiment.

  Specifically, as shown in FIG. 15, in each slit electrode plate 51, the shape of the rear side surface of the end portion 513 is not pointed toward the rear side, and is opposed to the rear side. It is not chamfered. The shape of the rear side surface of the end portion 513 is changed with respect to the first embodiment so as to be a convex shape rounded toward the rear side. Specifically, the following holds true in every cross section that cuts all the end portions 513 included in one slit electrode plate 51. That is, the line constituting the rear surface of each end portion 513 in the cross section has a minimum radius of curvature in the line of 0.5 mm or more, preferably 0.7 mm or more.

  Therefore, since the electric field does not concentrate strongly at the end portion 513 unlike the apex portion 522 of the pointed electrode plate 52, the EHD effect is hardly exhibited. Therefore, the working fluid is not strongly urged rearward from the end portions 513 and 523. That is, it is possible to suppress a decrease in the output of the pump 16 (a working fluid transport amount) due to the backflow.

  If the shape of the rear surface of the end portion 513 is pointed toward the rear side in each slit electrode plate 51, the end portion 513 and the hole forming portion 524 of the rear pointed electrode plate 52 are provided. Therefore, there is a possibility that the working fluid is strongly urged at a portion between the end portion 513 and the hole forming portion 524 due to the EHD effect. If a working fluid that urges the hole forming portion 524 from the end 513 is used as the working fluid regardless of whether the electrode is positive or negative (for example, the above-described FF-909EHA2), the working fluid is applied backward in this portion. I will be forced. Since this biasing force is opposite to the forward biasing force generated between the apex portion 522 of the pointed electrode plate 52 and the hole forming portion 514 of the slit electrode plate 51, the output of the pump 16 may decrease as a whole. There is.

  Thus, in this embodiment, it is made into the shape which does not sharpen the edge part 513 which is the most effective part in order not to reduce the output of the pump 16 among the edge parts 513 and 523. That is, the roundness is given only to the part which wants to suppress a flow.

  In addition, in order to implement | achieve the shape of each edge part 513,523 in this embodiment by a bending process, the shape of the part applied to each edge part 513,523 of a metal mold | die should just be formed in a desired shape.

(Fourth embodiment)
Next, a fourth embodiment will be described. The cooling system of the present embodiment is obtained by changing the shape of all the slit electrode plates 52 with respect to the cooling system of the third embodiment. Specifically, as shown in FIG. 16, the shape of all end portions 523 of each pointed electrode plate 52 is the same as the shape of the end portions 513 of the slit electrode plate 51.

  As a result, the possibility that the EHD effect is exhibited between the end portion 523 and the hole forming portion 514 becomes lower than that in the third embodiment. Therefore, the output of the pump 16 can be further improved.

  Further, the bent shape of the slit electrode plate 51 and the pointed electrode plate 52 can be unified. Therefore, in the bending process, it is possible to make the mold used for the pressing process of the slit electrode plate 51 and the pointed electrode plate 52 common.

(Fifth embodiment)
Next, a fourth embodiment will be described. The cooling system of the present embodiment is obtained by changing the shape of all the slit electrode plates 51 with respect to the cooling system of the fourth embodiment. Specifically, as shown in FIG. 17, the slit electrode plate 51 has a flat plate shape. That is, the slit electrode plate 51 is only subjected to drilling as in the first to fourth embodiments, and is not bent.

  When the slit electrode plate 51 and the pointed electrode plate 52 are attached to the insulating member 15, the through hole of the slit electrode plate 51 and the apex portion 522 of the pointed electrode plate 52 are aligned in a straight line in the longitudinal direction of the flow path. It is like that. In order to do this, the distance in the left-right direction of the through hole when the slit electrode plate 51 is drilled is different from that in the first to fourth embodiments.

  Also in the present embodiment, a non-uniform electric field is generated at a portion between each of the apex portions 522 of the pointed electrode plate 52 and the through hole of the slit electrode plate 51 on the front side of the apex portion 522. Accordingly, the working fluid is biased forward in the portion, and the working fluid is transported in the longitudinal direction 41 of the flow path.

(Sixth embodiment)
Next, a sixth embodiment will be described. The cooling system of this embodiment is obtained by adding a plurality of protrusions 71 and 72 to the cooling system of the first embodiment.

  As shown in FIG. 18, in the manufacturing process of the slit electrode plate 51, the plurality of protrusions 71 are fixed and attached to one surface side of the plate material that is the source of the slit electrode plate 51 by bonding or the like. Specifically, for each of all the folds of the slit electrode plate 51, there are four protrusions 71 in total, two above and below the vicinity of one side of the fold and two above and below the vicinity of the other side. It is attached. These folds become the apex portion 512 and the end portion 513 after the bending step.

  As shown in FIG. 19, in the manufacturing process of the pointed electrode plate 52, the plurality of protrusions 72 are fixedly attached to one surface side of the plate material that is the source of the pointed electrode plate 52 by bonding or the like. . Specifically, for each of all the folds of the pointed electrode plate 52, a total of four protrusions 72, two above and below the vicinity of one side of the fold and two above and below the vicinity of the other side. Is attached. Note that these folds become a vertex portion 522 and an end portion 523 after the bending step.

  The protrusions 71 and 72 are, for example, hemispherical insulating members (for example, resin members), and the hemispherical flat portions are connected to the slit electrode plate 51 and the pointed electrode plate 52, respectively.

  When the plurality of slit electrode plates 51 and the plurality of pointed electrode plates 52 are attached to the insulating member 15, as shown in FIG. Between the pointed electrode plates 52 and in contact with the pointed electrode plates 52. At this time, each protrusion 72 is interposed between the pointed electrode plate 52 to be attached and the slit electrode plate 51 adjacent to the rear thereof, and is in contact with the slit electrode plate 51.

  Thus, the protrusions 71 and 72 function as spacers that keep the distance between the slit electrode plate 51 and the pointed electrode plate 52 appropriately. Due to the presence of such protrusions 71 and 72, the electrodes 51 and 52 can be positioned easily and with high accuracy simply by alternately laminating the electrodes 51 and 52.

(Seventh embodiment)
Next, a seventh embodiment will be described. The cooling system of the present embodiment is obtained by changing the configuration of the casing with respect to the cooling systems of the first to sixth embodiments. Specifically, as shown in FIG. 21, a plate-shaped metal structural member 17 is disposed under the insulating member 15.

  The insulating member 15 and the structural member 17 overlap each other in the thickness direction, and the surface of the insulating member 15 opposite to the flow path side and the surface of the structural member 17 on the flow path side are in contact with each other. The heating element 2 is in contact with the surface of the structural member 17 opposite to the flow path side. The thermal conductivity of the structural member 17 is higher than the thermal conductivity of the insulating member.

  In this way, the insulating member 15 can be made thin by bringing the structural member 17 for securing the strength into contact with the insulating member 15. Accordingly, the thermal resistance of the insulating member 15 is reduced, and heat conduction from the heating element 2 to the working fluid is further promoted.

(Eighth embodiment)
Next, an eighth embodiment will be described. The cooling system of this embodiment is obtained by changing the configuration of the insulating member 15 with respect to the cooling system of the seventh embodiment. Specifically, as shown in FIGS. 22 and 23, the shape of the end of the electrodes 51 and 52 on the side of the structural member 17 between the slit electrode plates 51 and the pointed electrode plates 52 and the structural member 17. A plurality of lines extend in a zigzag line. In this case, as the insulating member 15, a resin film may be used or an insulating adhesive may be used.

  By doing in this way, the insulating member 15 can be made still thinner. Accordingly, the thermal resistance of the insulating member 15 is reduced, and heat conduction from the heating element 2 to the working fluid is further promoted. In addition, the amount of material of the insulating member 15 can be further reduced.

(Ninth embodiment)
Next, a ninth embodiment will be described. The cooling system of the present embodiment is obtained by partially changing the cooling system of the first embodiment. Specifically, as shown in FIG. 24, the insulating member 15 is abolished and a hole for joining the insulating member 15 in the bottom wall 14 is closed.

  As shown in FIG. 25, the slit electrode plate 51 is fixed in contact with the bottom wall 14 and the pointed electrode plate 52 is fixed in contact with the top wall 13 in the flow path. Note that the arrangement of the electrodes 51 and 52 in the cross section of the slit electrode plate 51 and the pointed electrode plate 52 in the horizontal direction in FIG. 25 is as shown in FIG. 6 as in the first embodiment.

  A plurality of columnar insulating spacers 19 made of an insulator (for example, resin) are disposed between the top wall 13 and the bottom wall 14. The insulating spacer 19 contacts both the top wall 13 and the bottom wall 14. By securing a gap between the top wall 13 and the bottom wall 14 with the insulating spacer 19, the slit electrode plate 51 and the pointed electrode plate 52 can be prevented from conducting via the top wall 13 or the bottom wall 14. .

  Since both the slit electrode plate 51 and the bottom wall 14 are made of conductive metal, they may be joined by a joining method such as soldering, pressure welding, brazing, or ultrasonic waves. Similarly, since both the pointed electrode plate 52 and the top wall 13 are made of conductive metal, they may be joined by a joining method such as soldering, pressure welding, brazing, or ultrasonic waves.

  In this case, as shown in FIG. 25, the heating element 2 is disposed so as to contact the back surface of the portion of the bottom wall 14 to which the slit electrode plate 51 is joined. Or as another example, the heat generating body 2 may be arrange | positioned so that the back surface of the part to which the pointed electrode plate 52 was joined among the top walls 13 may be contacted. As yet another example, the heating element 2 may be disposed on both of them.

  When the heating element 2 is on both the top wall 13 and the bottom wall 14, the second fluid transport device 1 is further disposed on the heating element 2 on the top wall 13 side, and the heating element 2 on the bottom wall 14 side is arranged. A third fluid transport device 1 may be further disposed below. In this case, the bottom wall 14 of the second fluid transport device 1 is in contact with the heating element 2 on the top wall 13 side, and the top wall of the third fluid transport device 1 is on the heating element 2 on the bottom wall 14 side. 13 is in contact.

  As described above, in the present embodiment, an insulating member having low thermal conductivity is not interposed between the slit electrode plate 51 and the heating element 2 or between the pointed electrode plate 52 and the heating element 2. Therefore, heat conduction from the heating element 2 to the working fluid is further promoted. In the present embodiment, the bottom wall 14 corresponds to an example of a first base member, and the top wall 13 corresponds to an example of a second base member.

(10th Embodiment)
Next, a tenth embodiment will be described with reference to FIG. The cooling system of the present embodiment is obtained by replacing a plurality of resin spacers 19 with a plurality of resin spacers 20 with respect to the cooling system of the ninth embodiment.

  The material of each resin spacer 20 is the same as that of the resin spacer 19. Each resin spacer is interposed between the slit electrode plate 51 and the top wall 13 and is in contact with both the slit electrode plate 51 and the top wall 13. The insulating spacer 20 ensures a gap between the slit electrode plate 51 and the top wall 13 so that the slit electrode plate 51 and the pointed electrode plate 52 do not conduct through the top wall 13 or the bottom wall 14. it can.

  In addition, this invention is not limited to above-described embodiment, In the range described in the claim, it can change suitably. Further, the above embodiments are not irrelevant to each other, and can be combined as appropriate unless the combination is clearly impossible. In each of the above-described embodiments, the elements constituting the embodiment are not necessarily essential unless explicitly stated as essential and clearly considered essential in principle. Further, in each of the above embodiments, when numerical values such as the number, numerical value, quantity, range, etc. of the constituent elements of the embodiment are mentioned, it is clearly limited to a specific number when clearly indicated as essential and in principle. The number is not limited to the specific number except for the case. In particular, when a plurality of values are exemplified for a certain amount, it is also possible to adopt a value between the plurality of values unless specifically stated otherwise and in principle impossible. . Further, in each of the above embodiments, when referring to the shape, positional relationship, etc. of the component, etc., the shape, unless otherwise specified and in principle limited to a specific shape, positional relationship, etc. It is not limited to the positional relationship or the like. The present invention also allows the following modifications to the above embodiments. In addition, the following modifications can select application and non-application to the said embodiment each independently. In other words, any combination of the following modifications can be applied to the above-described embodiment.

(Modification 1)
For example, the shape of the through hole of the pointed electrode plate 52 may be changed with respect to the cooling system of the first embodiment. For example, in the first embodiment, two through holes that are adjacent to each other with the end portion 523 interposed therebetween may be replaced with one large horizontally long through hole that straddles the end portion 523 as shown in FIGS. . By enlarging the through hole in this way, the pressure loss of the working fluid can be reduced, and as a result, the output of the pump 16 can be improved.

(Modification 2)
In the above embodiment, the flow path of the working fluid is formed so as to circulate between the vicinity of the heating element 2 and the vicinity of the heat radiating member 3. However, the fluid transport device of the present invention does not necessarily have to be like this.

  For example, as shown in FIG. 29, the configuration in which the heating element 2 and the flow path in the vicinity thereof are extracted from the fluid transport device 1 of FIG. 1 also corresponds to the fluid transport device of the present invention. Such a fluid transport device may be configured, for example, such that the flow path of the working fluid is connected to one end of an external hose, and a radiator is disposed at the other end of the hose. Even in such an example, the heat of the heating element 2 is transferred to the working fluid through the slit electrode plate 51 and the pointed electrode plate 52 constituting the pump 16, and the working fluid is separated from the heating element 2 by the pump 16 together with the heat. It is transported to the place.

  Further, the pump 16 may be disposed in a flow path in the vicinity of the heat radiating member 3 instead of being disposed in the flow path in the vicinity of the heating element 2. In this case, the heat of the working fluid is transferred to the heat radiating unit 3 through the slit electrode plate 51 and the pointed electrode plate 52 constituting the pump 16, and as a result, the cooled working fluid is separated from the heat radiating unit 3 by the pump 16. To be transported to.

  Or the pump 16 of this invention may be used for the use which makes a working fluid flow in the flow path which is not the heat generating body vicinity or the heat dissipation part vicinity.

  The pump 16 may be disposed in an open space that is not surrounded by a wall and transports the working fluid around the pump 16.

(Modification 3)
In the above embodiment, since the slit electrode plate 51 and the pointed electrode plate 52 are bent as a result, the slit plate 51 and the pointed electrode plate 52 are subjected to a bending process. Yes. However, the processing method in which the slit electrode plate 51 and the pointed electrode plate 52 result in a bent shape is not limited to bending.

(Modification 4)
The shape of the through hole of the slit electrode plate 51 and the pointed electrode plate 52 in each of the above embodiments is not limited to a circular shape as in each of the above embodiments, and may be, for example, a quadrangle or a rhombus.

(Modification 5)
In the ninth embodiment, the slit electrode plate 51 is connected to the bottom wall 14, and the pointed electrode plate 52 is connected to the top wall 13. However, this is not necessarily the case. For example, two base plates made of a conductive metal are provided separately from the top wall 13 and the bottom wall 14, and these two base plates are disposed so as to be non-conductive with the top wall 13 and the bottom wall 14. Further, these two base plates are arranged so as to face each other and be separated from each other. Then, the slit electrode plate 51 is contacted and fixed to one of these two base plates (corresponding to an example of a first base member), and the other one (corresponding to an example of a second base member). The pointed electrode plate 52 may be contacted and fixed.

(Modification 6)
In the first to eighth embodiments, the top wall 13 may be eliminated. In this case, the flow path is exposed to the outside of the casing.

(Modification 7)
In the above embodiment, the electrodes 51 and 52 have through holes. The through hole is a kind of notch whose entire circumference is surrounded by electrodes. However, each of the electrodes 51 and 52 is not limited to a through-hole, as long as it is a notch that circulates in the thickness direction and allows working fluid to circulate. May be.

DESCRIPTION OF SYMBOLS 1 Fluid transport apparatus 2 Heat generating body 13 Top wall (2nd base member)
14 Bottom wall (first base member)
16 Pump 51 Slit electrode plate 52 Pointed electrode plates 71 and 72 Projection (spacer)

Claims (7)

A slit electrode plate (51);
A pointed electrode plate (52),
When a voltage is applied between the slit electrode plate and the pointed electrode plate, the fluid transport device energizes and transports the working fluid between the slit electrode plate and the pointed electrode plate,
The slit electrode plate is a plate-shaped conductive plate material , provided with a notch through which the working fluid flows while penetrating in the thickness direction of the plate material,
The fluid transport device according to claim 1 , wherein the pointed electrode plate is a plate that is bent and convex in a convex shape, and is arranged to be convex toward the slit electrode plate.   The fluid transport device according to claim 1, wherein an insulating spacer (71, 72) is disposed between the slit electrode plate and the pointed electrode plate. Of the conductive first base member (14) and the conductive second base member (13) disposed opposite to each other, the slit electrode plate is connected to the first base member, and the second fluid transportation device according to claim 1 or 2, characterized in that said pointed electrode plate is connected to the base member. The slit electrode plate and the pointed electrode plate cool the heating element by energizing and transporting the working fluid to which the heat of the heating element is transmitted in the vicinity of the heating element (2). fluid transportation device according to any one of claims 1 to 3, wherein. The fluid transport device according to any one of claims 1 to 4 , wherein the slit electrode plate and the pointed electrode plate extend in a wave shape. Wherein the pointed electrode plate, fluid transportation device according to any one of claims 1 to 5, characterized in that notches extending through the thickness direction are provided. A slit electrode plate (51) and a pointed electrode plate (52), and when a voltage is applied between the slit electrode plate and the pointed electrode plate, working fluid between the slit electrode plate and the pointed electrode plate A method of manufacturing a fluid transportation device for energized transportation,
Manufacturing the slit electrode plate;
A step of manufacturing the pointed electrode plate,
The step of manufacturing the slit electrode plate includes forming a slit electrode plate by processing a plate-shaped conductive plate material to provide a notch through which the working fluid flows while penetrating in the thickness direction of the plate material. Including the steps of:
The step of producing said pointed electrode plate, forming the pointed electrode plate sharp convex shape rather than a flat shape by pressurizing Engineering bending a conductive plate of plate shape, and the pointed electrode plate The method of manufacturing the fluid transport apparatus characterized by including the process arrange | positioned so that it may become convex shape toward the said slit electrode plate.

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