JP6293967B2 - Spectrometer and method of manufacturing the spectrometer - Google Patents

Description

  The present invention relates to a spectroscope for spectrally detecting light and a method for manufacturing the spectroscope.

  For example, Patent Document 1 discloses a light incident part, a spectroscopic part that splits and reflects light incident from the light incident part, a light detection element that detects light reflected and reflected by the spectroscopic part, and light. A spectroscope is described that includes an incident part, a spectroscopic part, and a box-like support that supports a light detection element.

JP 2000-298066 A

  The spectroscope as described above is required to be further downsized in accordance with the expansion of applications. However, the smaller the spectroscope is, the more easily the detection accuracy of the spectroscope decreases due to various causes.

  Therefore, an object of the present invention is to provide a spectroscope capable of reducing the size while suppressing a decrease in detection accuracy, and a method of manufacturing a spectroscope capable of easily manufacturing such a spectroscope. To do.

  The spectroscope of the present invention is a support body fixed to a light detection unit so that a space is formed between the light detection unit provided with the light passage part and the light detection part, and the light passage part and the light detection part. And a wiring provided in the support, a first reflection part provided in the support and reflecting light that has passed through the light passage part in the space, and a first reflection part provided in the light detection unit. A spectroscopic unit that spectrally reflects and reflects the light reflected by the light source, a second reflective unit that is provided on the support and reflects the light that is spectroscopically reflected by the spectroscopic unit and reflected to the light detection unit in the space, The light detection unit and the wiring are electrically connected, and the light detection unit is provided on the space-side surface of the substrate of the light detection unit and is built in a substrate made of a semiconductor material. The spectroscopic section is the surface of the substrate on the space side It is provided.

  The spectroscope manufacturing method of the present invention includes a first step of preparing a support provided with a first reflecting portion, a second reflecting portion, and wiring, and a light provided with a light passing portion, a spectroscopic portion, and a light detecting portion. After the second step of preparing the detection unit, and the first step and the second step, the support and the light detection unit are fixed so that a space is formed, so that the light that has passed through the light passage unit is the first. The light reflected by the reflecting portion and reflected by the first reflecting portion is dispersed and reflected by the spectroscopic portion, and the light that is split and reflected by the spectroscopic portion is reflected by the second reflecting portion, and the second reflecting portion. And a third step of electrically connecting the light detection unit and the wiring, wherein the light detection unit has the light detection unit. Provided on the surface of the substrate on the space side, built into a substrate made of semiconductor material Spectroscopic portion is provided on the surface of the space side of the substrate.

  The spectroscope of the present invention is provided between a light detection element provided with a light passage portion, a first light detection portion, and a second light detection portion, and the light passage portion, the first light detection portion, and the second light detection portion. A support body fixed to the light detection element so as to form a space, a first optical section that is provided on the support body and reflects light that has passed through the light passage section in the space, and a light detection element; A second optical unit that reflects light reflected by the first optical unit in the space and a support are provided, and the light reflected by the second optical unit is reflected to the first light detection unit in the space. A third optical unit, wherein the second optical unit or the third optical unit disperses and reflects incident light in a space, and a plurality of second light detection units are provided in a region surrounding the second optical unit. Has been placed.

  In this spectrometer, an optical path from the light passage part to the first light detection part is formed in the space formed by the light detection element and the support. Thereby, size reduction of a spectrometer can be achieved. Further, the plurality of second light detection units are arranged in a region surrounding the second optical unit. This makes it possible to monitor the state of the light before being split in the region surrounding the second optical unit, and to appropriately adjust the incident NA, the incident direction, etc. of the light passing through the light passing unit. it can. Therefore, according to this spectrometer, it is possible to reduce the size while suppressing a decrease in detection accuracy.

  In the spectroscope of the present invention, the first optical unit is a first reflecting unit that reflects light that has passed through the light passing unit in space, and the second optical unit is reflected by the first reflecting unit in space. The second reflecting unit that reflects light, and the third optical unit may be a spectroscopic unit that splits and reflects the light reflected by the second reflecting unit in the space with respect to the first photodetecting unit. . According to this configuration, the light that has passed through the light passing portion is sequentially reflected by the first reflecting portion and the second reflecting portion and enters the spectroscopic portion. This makes it easy to adjust the incident direction of light incident on the spectroscopic unit and the spread or convergence state of the light, so that even if the optical path length from the spectroscopic unit to the first light detection unit is shortened, It is possible to focus the light dispersed by the unit at a predetermined position of the first light detection unit with high accuracy.

  In the spectroscope of the present invention, the first optical unit is a first reflecting unit that reflects light that has passed through the light passing unit in space, and the second optical unit is reflected by the first reflecting unit in space. The third optical unit is a second reflection unit that reflects and reflects the light that is split and reflected by the spectroscopic unit in space to the first light detection unit. Also good. According to this configuration, since the spectroscopic unit is provided in the photodetecting element together with the light passing unit, the first photodetecting unit, and the second photodetecting unit, the light passing unit, the spectroscopic unit, the first photodetecting unit, and the second The mutual positional relationship of the photodetecting parts can be maintained with high accuracy. Furthermore, by providing the light detecting element together with the light passing part, the first light detecting part, and the second light detecting part, a spectral part that is more complicated to manufacture than the first reflecting part and the second reflecting part is provided. Yield, and hence the yield of the spectrometer can be improved.

  In the spectroscope of the present invention, when the light passage unit, the first optical unit, the second optical unit, the third optical unit, and the first light detection unit are viewed from the optical axis direction of the light passing through the light passage unit, The plurality of second light detection units are arranged along the reference line, and when viewed from the optical axis direction, the plurality of second light detection units are arranged in a direction parallel to the reference line and a direction perpendicular to the reference line. They may be opposed to each other. According to this configuration, it is possible to monitor how the light incident on the second optical unit shifts in each of a direction parallel to the reference line and a direction perpendicular to the reference line.

  In the spectrometer of the present invention, the plurality of second light detection units may be arranged along the outer edge of the second optical unit so as to surround the second optical unit. According to this configuration, it is possible to monitor how the light incident on the second optical unit is shifted over the entire periphery of the second optical unit.

  In the spectrometer of the present invention, the plurality of second light detection units may be two-dimensionally arranged in a region surrounding the second optical unit. According to this configuration, it is possible to monitor how the light incident on the second optical unit shifts as an image in the entire periphery of the second optical unit.

  In the spectrometer of the present invention, the support is provided with wirings electrically connected to the first light detection unit and the second light detection unit, and the first light detection unit and the second light detection unit in the wiring. The end on the side may be connected to a terminal provided on the light detection element in a fixing portion between the light detection element and the support.

  In the spectrometer of the present invention, the support material may be ceramic. According to this configuration, it is possible to suppress the expansion and contraction of the support due to the temperature change of the environment in which the spectroscope is used. Accordingly, it is possible to suppress a decrease in detection accuracy (such as a shift in peak wavelength in the light detected by the first light detection unit) due to a shift in the positional relationship between the spectroscopic unit and the first light detection unit. .

  In the spectrometer of the present invention, the space may be hermetically sealed by a package including a light detection element and a support as components. According to this configuration, it is possible to suppress a decrease in detection accuracy caused by deterioration of members in the space due to moisture and generation of condensation in the space due to a decrease in outside air temperature.

  In the spectrometer of the present invention, the space may be hermetically sealed by a package that houses the light detection element and the support. According to this configuration, it is possible to suppress a decrease in detection accuracy caused by deterioration of members in the space due to moisture and generation of condensation in the space due to a decrease in outside air temperature.

  The spectroscope of the present invention is a support body fixed to a light detection element so that a space is formed between the light detection element provided with the light passage part and the light detection part, and the light passage part and the light detection part. And a first reflection part that is provided in the support and reflects light that has passed through the light passage part in the space; and a light detection element that disperses light reflected by the first reflection part in the space. A spectroscopic unit that reflects the light, and a second reflective unit that is provided on the support and reflects in the space the light that is split and reflected by the spectroscopic unit with respect to the light detection unit.

  In this spectrometer, an optical path from the light passage part to the light detection part is formed in the space formed by the light detection element and the support. Thereby, size reduction of a spectrometer can be achieved. Further, a spectroscopic unit is provided in the photodetecting element together with the light passing unit and the photodetecting unit. Thereby, the mutual positional relationship of the light passage part, the spectroscopic part, and the light detection part is accurately maintained. Therefore, according to this spectrometer, it is possible to reduce the size while suppressing a decrease in detection accuracy.

  The method of manufacturing a spectroscope according to the present invention includes a first step of preparing a support body provided with a first reflecting portion and a second reflecting portion, and a light detecting element provided with a light passing portion, a spectroscopic portion, and a light detecting portion. After the first step and the first step and the second step, the light passing through the light passage part is fixed by fixing the support and the light detection element so that a space is formed. Is reflected by the first reflecting unit, and the light reflected by the first reflecting unit is dispersed and reflected by the spectroscopic unit, and the light that is split and reflected by the spectroscopic unit is the second reflecting unit. And a third step of forming, in the space, an optical path in which the light reflected by the second reflection part and reflected by the second reflection part is incident on the light detection part.

  In this method of manufacturing a spectroscope, the space provided by simply fixing the support provided with the first reflecting portion and the second reflecting portion and the light detecting element provided with the light passing portion, the spectroscopic portion, and the light detecting portion can be obtained. Inside, an optical path from the light passing part to the light detecting part is formed. Therefore, according to this method for manufacturing a spectrometer, it is possible to easily manufacture a spectrometer that can be reduced in size while suppressing a decrease in detection accuracy. In addition, the execution order of a 1st process and a 2nd process is arbitrary.

  According to the present invention, it is possible to provide a spectroscope that can be downsized while suppressing a decrease in detection accuracy, and a method of manufacturing a spectroscope that can easily manufacture such a spectroscope. Become.

It is sectional drawing of the spectrometer of 1st Embodiment of this invention. It is a top view of the spectrometer of a 1st embodiment of the present invention. It is a top view of the photon detection element of the spectrometer of a 1st embodiment of the present invention. It is a top view of the photon detection element of the modification of the spectroscope of a 1st embodiment of the present invention. It is a top view of the 2nd reflection part and the 2nd photon detection part of the modification of the spectroscope of a 1st embodiment of the present invention. It is sectional drawing of the spectrometer of 2nd Embodiment of this invention. It is a top view of the photon detection element of the spectrometer of a 2nd embodiment of the present invention.

DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, in each figure, the same code | symbol is attached | subjected to the same or an equivalent part, and the overlapping description is abbreviate | omitted.
[First Embodiment]

  As shown in FIGS. 1 and 2, the spectroscope 1 </ b> A includes a photodetecting element 20, a support 30, a first reflecting unit (first optical unit) 11, and a second reflecting unit (second optical unit). 12 </ b> A, a spectroscopic unit (third optical unit) 40 </ b> A, and a cover 50. The light detection element 20 is provided with a light passage part 21, a first light detection part 22, a plurality of second light detection parts 26, and a zero-order light capturing part 23. The support 30 is provided with wiring 13 for inputting and outputting electrical signals to the first light detection unit 22 and the second light detection unit 26. The support 30 is fixed to the light detection element 20 so that a space S is formed between the light passage part 21, the first light detection part 22, the plurality of second light detection parts 26, and the zero-order light capture part 23. Has been. As an example, the spectroscope 1A is formed in a rectangular parallelepiped shape in which the length in each of the X-axis direction, the Y-axis direction, and the Z-axis direction is 10 mm or less. In addition, the wiring 13 and the support body 30 are comprised as a molded circuit component (MID: Molded Interconnect Device).

  The light passing unit 21, the first reflecting unit 11, the second reflecting unit 12 </ b> A, the spectroscopic unit 40 </ b> A, the first light detecting unit 22, and the zero-order light capturing unit 23 are arranged in the optical axis direction of the light L <b> 1 that passes through the light passing unit 21 ( That is, they are aligned along the reference line RL extending in the X-axis direction when viewed from the Z-axis direction). In the spectroscope 1A, the light L1 that has passed through the light passage unit 21 is sequentially reflected by the first reflecting unit 11 and the second reflecting unit 12A, enters the spectroscopic unit 40A, and is split and reflected by the spectroscopic unit 40A. . And light L2 other than the 0th order light L0 out of the light split and reflected by the spectroscopic unit 40A enters the first light detection unit 22 and is detected by the first light detection unit 22, and the 0th order light. L0 enters the 0th-order light capturing unit 23 and is captured by the 0th-order light capturing unit 23. The optical path of the light L1 from the light passing part 21 to the spectroscopic part 40A, the optical path of the light L2 from the spectroscopic part 40A to the first light detection part 22, and the 0th order light L0 from the spectroscopic part 40A to the zeroth order light capturing part 23 The optical path is formed in the space S.

  The light detection element 20 has a substrate 24. The substrate 24 is formed in a rectangular plate shape by a semiconductor material such as silicon. The light passing part 21 is a slit formed in the substrate 24 and extends in the Y-axis direction. The zero-order light capturing unit 23 is a slit formed in the substrate 24, and extends in the Y-axis direction between the light passage unit 21 and the first light detection unit 22. Note that the end of the light passing portion 21 on the incident side of the light L1 spreads toward the incident side of the light L1 in each of the X-axis direction and the Y-axis direction. Further, the end of the 0th-order light capturing unit 23 opposite to the incident side of the 0th-order light L0 is opposite to the incident side of the 0th-order light L0 in each of the X-axis direction and the Y-axis direction. It is spreading towards the end. By configuring the 0th-order light L0 to be incident on the 0th-order light capturing unit 23 obliquely, the 0th-order light L0 incident on the 0th-order light capturing unit 23 can be more reliably suppressed from returning to the space S. it can.

  The first light detection unit 22 is provided on the surface 24 a on the space S side of the substrate 24. More specifically, the first light detection unit 22 is not attached to the substrate 24 but is formed on the substrate 24 made of a semiconductor material. That is, the first light detection unit 22 includes a plurality of photodiodes formed by a first conductivity type region in the substrate 24 made of a semiconductor material and a second conductivity type region provided in the region. It is configured. The first light detection unit 22 is configured as, for example, a photodiode array, a C-MOS image sensor, a CCD image sensor, or the like, and has a plurality of light detection channels arranged along the reference line RL. . Light L2 having different wavelengths is incident on each light detection channel of the first light detection unit 22. Each second light detection unit 26 is a photodiode built in the substrate 24, similarly to the first light detection unit 22, and is disposed in a region surrounding the second reflection unit 12 </ b> A. A plurality of terminals 25 for inputting / outputting electric signals to / from the first light detection unit 22 and the second light detection unit 26 are provided on the surface 24 a of the substrate 24. Note that the first light detection unit 22 and the second light detection unit 26 may be configured as front-illuminated photodiodes or back-illuminated photodiodes.

  As shown in FIG. 3, the plurality of second light detection units 26 are perpendicular to the reference line RL and the direction parallel to the reference line RL when viewed from the optical axis direction of the light L1 that passes through the light passing unit 21. In each direction, the two reflecting portions 12A are opposed to each other. Each of the second light detection units 26 facing each other in the direction parallel to the reference line RL has a long shape extending in the Y-axis direction. Each of the second light detection units 26 facing each other in the direction perpendicular to the reference line RL has a long shape extending in the X-axis direction.

As shown in FIGS. 1 and 2, the support body 30 includes a base wall portion 31, a pair of side wall portions 32, and a pair of side wall portions 33. The base wall portion 31 is opposed to the light detection element 20 in the Z-axis direction via the space S. The base wall 31 has a recess 34 that opens to the space S side, a plurality of protrusions 35 that protrude to the opposite side of the space S side, and a plurality of through holes 36 that open to the space S side and the opposite side thereof. Is formed. The pair of side wall portions 32 face each other in the X-axis direction with the space S interposed therebetween. The pair of side wall portions 33 oppose each other in the Y axis direction with the space S interposed therebetween. The base wall portion 31, the pair of side wall portions 32, and the pair of side wall portions 33 are integrally formed of ceramic such as AlN, Al ₂ O ₃ or the like.

  The first reflecting portion 11 is provided on the support 30. More specifically, the first reflecting portion 11 is provided on the spherical region of the inner surface 34 a of the recess 34 in the space 31 side surface 31 a of the base wall portion 31 via the molding layer 41. The first reflecting portion 11 is a concave mirror made of a metal deposition film such as Al or Au and having a mirror surface, and the light L1 that has passed through the light passing portion 21 in the space S is directed to the second reflecting portion 12A. reflect. In addition, the 1st reflection part 11 may be directly provided in the spherical area | region of the inner surface 34a of the recessed part 34, without passing through the shaping | molding layer 41. FIG.

  The second reflecting portion 12 </ b> A is provided in the light detection element 20. More specifically, the second reflecting portion 12 </ b> A is provided in a region between the light passing portion 21 and the zero-order light capturing portion 23 on the surface 24 a of the substrate 24. The second reflecting portion 12A is a flat mirror made of a metal vapor deposition film such as Al or Au and having a mirror surface. For example, the light L1 reflected by the first reflecting portion 11 in the space S is transmitted to the spectroscopic portion 40A. reflect.

  The spectroscopic unit 40 </ b> A is provided on the support 30. More specifically, it is as follows. That is, the molding layer 41 is disposed on the surface 31 a of the base wall portion 31 so as to cover the recess 34. The molding layer 41 is formed in a film shape along the inner surface 34 a of the recess 34. In the predetermined region of the molding layer 41 corresponding to the spherical region of the inner surface 34a, for example, a grating pattern corresponding to a blazed grating having a sawtooth cross section, a binary grating having a rectangular cross section, a holographic grating having a sinusoidal cross section, etc. 41a is formed. On the surface of the molding layer 41, a reflective film 42 made of a metal vapor deposition film such as Al or Au is formed so as to cover the grating pattern 41a. The reflective film 42 is formed along the shape of the grating pattern 41a, and this portion is a spectroscopic portion 40A that is a reflective grating. The molding layer 41 is pressed against a molding material (for example, a photocurable epoxy resin, acrylic resin, fluororesin, silicone, replica optical resin such as an organic / inorganic hybrid resin), and the state Then, the molding material is cured (for example, photocuring with UV light or the like, thermosetting or the like).

  As described above, the spectroscopic portion 40 </ b> A is provided in the spherical region of the inner surface 34 a of the recess 34 in the surface 31 a of the base wall portion 31. The spectroscopic unit 40A has a plurality of grating grooves arranged along the reference line RL, and in the space S, splits the light L1 reflected by the second reflecting unit 12A with respect to the first light detecting unit 22. Reflect with. Note that the spectroscopic unit 40A is not limited to the one directly formed on the support 30 as described above. For example, the spectroscopic unit 40 </ b> A may be provided on the support 30 by attaching a spectroscopic element having the spectroscopic unit 40 </ b> A and a substrate on which the spectroscopic unit 40 </ b> A is formed to the support 30.

  Each wiring 13 is connected to an end 13a on the first light detection unit 22 and the second light detection unit 26 side, and an end 13b on the opposite side to the first light detection unit 22 and the second light detection unit 26 side. Part 13c. The end 13 a of each wiring 13 is located on the end surface 32 a of each side wall 32 so as to face each terminal 25 of the light detection element 20. The end 13b of each wiring 13 is located on the surface of each convex portion 35 in the surface 31b on the side opposite to the space S side in the base wall portion 31. The connection portion 13c of each wiring 13 extends from the end portion 13a to the end portion 13b on the surface 32b on the space S side in each side wall portion 32, the surface 31a of the base wall portion 31, and the inner surface of each through hole 36. In this way, the wiring 13 can be prevented from being deteriorated by being routed around the space S side surface of the support 30.

  The terminals 25 of the opposing light detection elements 20 and the end portions 13a of the wiring 13 are connected by bumps 14 made of, for example, Au or solder. In the spectroscope 1 </ b> A, the support 30 is fixed to the light detection element 20 by the plurality of bumps 14, and the plurality of wirings 13 are connected to the first light detection unit 22 and the second light detection unit 26 of the light detection element 20. Electrically connected. As described above, the end portion 13 a of each wiring 13 is connected to each terminal 25 of the light detection element 20 at the fixing portion between the light detection element 20 and the support 30.

  The cover 50 is fixed to the surface 24 b of the substrate 24 of the photodetecting element 20 on the side opposite to the space S side. The cover 50 includes a light transmission member 51 and a light shielding film 52. The light transmitting member 51 is formed in a rectangular plate shape by a material that transmits light L1, such as quartz, borosilicate glass (BK7), Pyrex (registered trademark) glass, Kovar glass, or the like. The light shielding film 52 is formed on the surface 51 a on the space S side in the light transmission member 51. A light passage opening 52a is formed in the light shielding film 52 so as to face the light passage portion 21 of the light detection element 20 in the Z-axis direction. The light passage opening 52a is a slit formed in the light shielding film 52, and extends in the Y-axis direction. In the spectroscope 1 </ b> A, the incident NA of the light L <b> 1 incident on the space S is defined by the light passage opening 52 a of the light shielding film 52 and the light passage portion 21 of the light detection element 20.

  When detecting infrared rays, silicon, germanium, or the like is also effective as a material for the light transmission member 51. Further, the light transmission member 51 may be provided with an AR (Anti Reflection) coat or may have a filter function of transmitting only light of a predetermined wavelength. Further, as a material of the light shielding film 52, for example, black resist, Al, or the like can be used. However, from the viewpoint of suppressing the 0th-order light L0 incident on the 0th-order light capturing unit 23 from returning to the space S, a black resist is effective as the material of the light shielding film 52.

  Further, the cover 50 may further include a light shielding film formed on the surface of the light transmission member 51 opposite to the space S side. In that case, the light passage opening of the light shielding film and the light passage opening of the light shielding film 52 are formed in the light shielding film so as to face the light passage portion 21 of the light detection element 20 in the Z-axis direction. The incident NA of the light L1 incident on the space S can be defined with higher accuracy using the light passing part 21 of the light detection element 20a. As the material of the light shielding film, for example, black resist, Al, or the like can be used in the same manner as the light shielding film 52. When the cover 50 further includes the above-described light shielding film, a light passage opening may be formed in the light shielding film 52 so as to face the 0th-order light capturing unit 23 of the light detection element 20 in the Z-axis direction. Good. In this case, it is possible to more reliably suppress the 0th-order light L0 incident on the 0th-order light capturing unit 23 from returning to the space S.

  Between the surface 24a of the substrate 24, the end surface 32a of each side wall portion 32, and the end surface 33a of each side wall portion 33, a sealing member 15 made of, for example, resin is disposed. Further, in the through hole 36 of the base wall portion 31, for example, a sealing member 16 made of glass beads or the like is disposed and a sealing member 17 made of resin is filled. In the spectroscope 1 </ b> A, the space S is hermetically sealed by a package 60 including the light detection element 20, the support 30, the cover 50, and the sealing members 15, 16, and 17 as components. When the spectrometer 1A is mounted on an external circuit board, the end portion 13b of each wiring 13 functions as an electrode pad. Instead of disposing the cover 50 on the surface 24b of the substrate 24, the light transmitting portion 21 of the substrate 24 is hermetically sealed by filling the light transmitting portion 21 of the substrate 24 with a light transmitting resin. May be. Alternatively, only the sealing member 17 made of resin may be filled in the through hole 36 of the base wall portion 31 without arranging the sealing member 16 made of, for example, glass beads.

  As described above, in the spectroscope 1 </ b> A, an optical path from the light passage unit 21 to the first light detection unit 22 is formed in the space S formed by the light detection element 20 and the support 30. Thereby, size reduction of the spectrometer 1A can be achieved. Further, a plurality of second light detection units 26 are arranged in a region surrounding the second reflection unit 12A. This makes it possible to monitor the state of the light L1 before being split in the region surrounding the second reflecting portion 12A, and appropriately determines the incident NA and the incident direction of the light L1 that passes through the light passing portion 21. Can be adjusted. Therefore, according to the spectroscope 1A, it is possible to reduce the size while suppressing a decrease in detection accuracy.

  In the spectroscope 1A, when the plurality of second light detection units 26 are viewed from the optical axis direction of the light L1 that passes through the light passage unit 21, the direction parallel to the reference line RL and perpendicular to the reference line RL. In each direction, the second reflecting portions 12A are opposed to each other. Accordingly, it is possible to monitor the deviation of the light L1 incident on the second reflecting portion 12A in each of the direction parallel to the reference line RL and the direction perpendicular to the reference line RL.

  As shown in FIG. 4, the plurality of second light detection units 26 may be arranged along the outer edge of the second reflection unit 12A so as to surround the second reflection unit 12A. In this case, it is possible to monitor how the light incident on the second reflecting portion 12A is shifted over the entire periphery of the second reflecting portion 12A. Further, as shown in FIG. 5A, the plurality of second light detection units 26 includes the second light detection unit 26 on both sides of the second reflection unit 12A in the direction parallel to the reference line RL and in the direction perpendicular to the reference line RL. The two reflecting portions 12A may be arranged one-dimensionally on both sides. In this case, it is possible to monitor in more detail how the light L1 incident on the second reflecting portion 12A is shifted in each of the direction parallel to the reference line RL and the direction perpendicular to the reference line RL. Further, as illustrated in FIG. 5B, the plurality of second light detection units 26 may be two-dimensionally arranged in a region surrounding the second reflection unit 12A. In this case, it is possible to monitor how the light L1 incident on the second reflecting portion 12A shifts as an image in the entire periphery of the second reflecting portion 12A.

  In the spectroscope 1A, the light L1 that has passed through the light passage portion 21 is sequentially reflected by the first reflecting portion 11 and the second reflecting portion 12A and enters the spectroscopic portion 40A. This makes it easy to adjust the incident direction of the light L1 incident on the spectroscopic unit 40A and the spread or convergence state of the light L1, so the optical path length from the spectroscopic unit 40A to the first light detection unit 22 is shortened. Even so, the light L2 split by the spectroscopic unit 40A can be condensed at a predetermined position of the first light detection unit 22 with high accuracy.

  In the spectroscope 1A, the first reflecting portion 11 is a concave mirror. Accordingly, since the spread angle of the light L1 is suppressed by the first reflecting unit 11, the incident NA of the light L1 passing through the light passing unit 21 is increased to increase the sensitivity, or from the spectroscopic unit 40A to the first light detecting unit. It is possible to further reduce the size of the spectroscope 1B by shortening the optical path length to 22. Specifically, it is as follows. That is, when the 1st reflection part 11 is a concave mirror, light L1 is irradiated to 40 A of spectroscopic parts in the state collimated. Therefore, compared to the case where the light L1 is spread and irradiated to the spectroscopic unit 40A, the distance that the spectroscopic unit 40A collects the light L2 on the first light detection unit 22 can be shortened. Therefore, the incident NA of the light L1 is increased to increase sensitivity, or the optical path length from the spectroscopic unit 40A to the first light detection unit 22 is further shortened to further reduce the size of the spectroscope 1B. Can do.

  In the spectroscope 1 </ b> A, the support 30 is provided with the wiring 13 that is electrically connected to the first light detection unit 22 and the second light detection unit 26. The end 13 a of the wiring 13 on the first light detection unit 22 and the second light detection unit 26 side is connected to the terminal 25 provided on the light detection element 20 in the fixing portion between the light detection element 20 and the support 30. It is connected. Thereby, the electrical connection between the first light detection unit 22 and the second light detection unit 26 and the wiring 13 can be ensured.

  In the spectroscope 1A, the material of the support 30 is ceramic. Thereby, the expansion | swelling and shrinkage | contraction of the support body 30 resulting from the temperature change of the environment where the spectrometer 1A is used, the heat_generation | fever in the 1st photon detection part 22 and the 2nd photon detection part, etc. can be suppressed. Therefore, a decrease in detection accuracy (such as a shift in peak wavelength in the light detected by the first light detection unit 22) due to a shift in the positional relationship between the spectroscopic unit 40A and the first light detection unit 22 is suppressed. be able to. Since the spectroscope 1A is downsized, even a slight change in the optical path may greatly affect the optical system and lead to a decrease in detection accuracy. Therefore, especially as described above, when the spectroscopic portion 40A is directly formed on the support 30, it is extremely important to suppress the expansion and contraction of the support 30.

  In the spectroscope 1A, the space S is hermetically sealed by a package 60 including the light detection element 20 and the support 30 as components. Thereby, the deterioration of the detection accuracy resulting from the generation | occurrence | production of the dew condensation in the space S by the deterioration of the member in the space S by humidity, and the fall of external temperature can be suppressed.

  Further, in the spectroscope 1A, a flat region (may be slightly inclined) exists around the recess 34 in the surface 31a of the base wall portion 31. Thereby, even if reflected light is generated in the first light detection unit 22, the reflected light can be prevented from reaching the first light detection unit 22 again. Further, when the molding layer 41 is formed on the inner surface 34 a of the recess 34 by pressing the molding die against the resin, and between the surface 24 a of the substrate 24, the end surface 32 a of each side wall portion 32, and the end surface 33 a of each side wall portion 33. In addition, when the sealing member 15 made of resin is disposed, the flat region becomes an escape place for excess resin. At this time, if an excess resin is poured into the through hole 36 of the base wall portion 31, the sealing member 16 made of, for example, glass beads becomes unnecessary, and the resin functions as the sealing member 17.

  Here, the merit by disposing the plurality of second light detection units 26 not in the region surrounding the first light detection unit 22 but in the region surrounding the second reflection unit 12A will be described in more detail. For example, when a plurality of second light detection units 26 are arranged so as to face each other across the first light detection unit 22 in a direction parallel to the reference line RL, the plurality of second light detection units 26 are: Since the short wavelength light or the long wavelength light is detected in the dispersed light L2, the detection wavelength is limited, and the detection intensity varies. In addition, when a plurality of second light detection units 26 are arranged in the direction perpendicular to the reference line RL so as to face each other with the first light detection unit 22 interposed therebetween, the optical path deviation in the Y-axis direction is monitored. Although it is possible, the result including the shift of the position of the spectroscopic unit 40A, the shift of the direction of the grating groove, and the like is monitored.

  As described above, when the plurality of second light detection units 26 are arranged in the region surrounding the first light detection unit 22, the dispersed light L2 is detected. It cannot be determined whether this is due to the positional deviation between the element 20 and the support 30 or due to the positional deviation of the spectroscopic unit 40A on the support 30 or the like.

  On the other hand, when the plurality of second light detection units 26 are arranged in the region surrounding the second reflection unit 12A, the light L1 before being dispersed is detected. In addition to the detection result of the light L2, it is possible to acquire more detailed information on the deviation of the optical path. In particular, the deviation of the optical path in the direction parallel to the reference line RL is likely to lead to deterioration in detection accuracy. Therefore, at least in the direction parallel to the reference line RL, the second reflector 12A (in the second embodiment described later, the spectroscopic unit). It is important to arrange the plurality of second light detection units 26 so as to face each other across 40B).

  In addition, when the area of the first reflecting unit 11 and the area of the spectroscopic unit 40A are wide with respect to the incident NA of the light L1, and the area of the second reflecting unit 12A defines the incident NA of the light L1, for example, Even if a positional deviation occurs between the light detection element 20 and the support 30, all the light L <b> 1 is reflected by the first reflecting portion 11. Furthermore, since the light L1 for the specified incident NA is reflected by the second reflecting unit 12A, the light L1 for the specified incident NA enters the spectroscopic unit 40A. At this time, the deviation of the optical path in the second reflecting portion 12A can be monitored using the plurality of second light detecting portions 26 arranged in the region surrounding the second reflecting portion 12A.

  In addition, when the light detection element 20 is inclined with respect to the support 30, the reflection angle of the light L <b> 1 reflected by the first reflection unit 11 is changed, so that the plurality of second light detection units 26 have the reflection angle. The shift direction can be known. If the light detection element 20 is inclined with respect to the support 30, the collimation state of the light L <b> 1 is likely to be lost due to the first reflection unit 11, and the position shift in the Z-axis direction is likely to be reduced. By combining the detection results of the light L1 by the plurality of second light detection units 26 and the detection results of the light L2 by the first light detection unit 22, there is simply a displacement in the Z-axis direction, or a support It is possible to know whether the light detection element 20 is inclined with respect to 30.

  Further, when the light L1 is incident on the second reflecting portion 12A with an incident NA larger than the incident NA defined by the second reflecting portion 12A, the spectroscope is configured so that the plurality of second light detecting portions 26 do not detect the light L1. If the incident NA of the light L1 incident on 1A is adjusted, the detection accuracy can be further improved. Even when there is a deviation in the incident direction of the light L1 incident on the spectroscope 1A, the incident direction can be adjusted while monitoring the state of the light L1 with the plurality of second light detection units 26. It becomes possible.

  Further, when the spectroscope 1A is manufactured, the support 30 provided with the first reflecting portion 11 and the spectroscopic portion 40A is prepared (first step), the light passing portion 21, the second reflecting portion 12A, the first The light detection element 20 provided with the light detection unit 22 and the plurality of second light detection units 26 is prepared (second step), and after that, the support 30 and the light detection element 20 are formed so that the space S is formed. Is formed in the space S from the light passage part 21 to the first light detection part 22 (third step). In this way, an optical path from the light passage part 21 to the first light detection part 22 is formed in the space S only by fixing the support 30 and the light detection element 20. Therefore, according to the manufacturing method of the spectroscope 1A, it is possible to easily manufacture the spectroscope 1A that can be downsized while suppressing a decrease in detection accuracy. In addition, the execution order of the process which prepares the support body 30, and the process which prepares the photon detection element 20 is arbitrary.

In particular, when the spectroscope 1A is manufactured, the wiring 13, the first light detection unit 22, and the first light detection unit 22 are simply connected to the terminal 25 of the light detection element 20 by connecting the end 13a of the wiring 13 provided on the support 30. Not only the electrical connection with the two-light detection unit 26 but also the fixing of the support 30 and the light detection element 20 and the formation of an optical path from the light passage unit 21 to the first light detection unit 22 are realized.
[Second Embodiment]

  As shown in FIG. 6, in the spectroscope 1 </ b> B, the light detection element 20 is provided with a spectroscopic part (second optical part) 40 </ b> B, and the support 30 is provided with a second reflecting part (third optical part) 12 </ b> B. This is mainly different from the spectroscope 1A described above.

  In the spectroscope 1 </ b> B, the first reflecting portion 11 is provided on a flat inclined surface 37 that is inclined at a predetermined angle in the surface 31 a of the base wall portion 31 via the molding layer 41. The first reflection unit 11 is a flat mirror made of a metal vapor deposition film such as Al or Au and having a mirror surface, and reflects the light L1 that has passed through the light passage unit 21 in the space S to the spectroscopic unit 40B. . In addition, the 1st reflection part 11 may be directly provided in the inclined surface 37 of the support body 30 without the molding layer 41 interposed.

  The spectroscopic unit 40 </ b> B is provided in a region between the light passage unit 21 and the first light detection unit 22 on the surface 24 a of the substrate 24. The spectroscopic unit 40B is a reflective grating, and in the space S, the light L1 reflected by the first reflective unit 11 is dispersed and reflected to the second reflective unit 12B.

  The second reflecting portion 12 </ b> B is provided on the spherical concave surface 38 of the surface 31 a of the base wall portion 31 via the molding layer 41. The second reflecting portion 12B is a concave mirror made of a metal vapor deposition film such as Al or Au and having a mirror surface. For example, in the space S, the light L1 that is split and reflected by the spectroscopic portion 40B is first detected. Reflected with respect to the portion 22. In addition, the 2nd reflection part 12B may be directly provided in the concave surface 38 of the support body 30 without the shaping | molding layer 41 interposed.

  As shown in FIG. 7, the plurality of second light detection units 26 are arranged in a region surrounding the spectroscopic unit 40B. More specifically, the plurality of second light detection units 26 are parallel to the reference line RL and perpendicular to the reference line RL when viewed from the optical axis direction of the light L1 that passes through the light passage unit 21. Are opposed to each other with the spectroscopic unit 40B interposed therebetween. Each of the second light detection units 26 facing each other in the direction parallel to the reference line RL has a long shape extending in the Y-axis direction. Each of the second light detection units 26 facing each other in the direction perpendicular to the reference line RL has a long shape extending in the X-axis direction.

  As shown in FIG. 6, the 0th-order light L <b> 0 of the light that is split and reflected by the spectroscopic unit 40 </ b> B is formed on the flat inclined surface 39 that is inclined at a predetermined angle among the surface 31 a of the base wall portion 31. Reflected by layer 41. The reflection surface of the molding layer 41 on the inclined surface 39 functions as the zero-order light reflection control unit 41b. By making the inclined surface 39 different from the inclined surface 37 and the concave surface 38, multiple reflection of the 0th-order light L0 can be suppressed. Note that, similarly to the spectroscope 1 </ b> A, the zero-order light capturing unit 23 may be provided in the light detection element 20.

  The 0th-order light reflection control unit 41b is provided in a region of the surface 31a of the base wall portion 31 where the 0th-order light L0 is incident from the spectroscopic unit 40B. In the spectroscope 1B, the 0th-order light reflection control unit 41b is parallel to the reference line RL (that is, when viewed from the optical axis direction (that is, the Z-axis direction) of the light L1 that passes through the light passage unit 21 (that is, In the X-axis direction), it is located between the first reflecting portion 11 and the second reflecting portion 12. The inclination of the 0th-order light reflection control unit 41 b is set so that the 0th-order light does not enter the first light detection unit 22. Therefore, if the inclination is such that the 0th-order light is not incident on the first light detection unit 22, the 0th-order light reflection control unit 41b has an inclination to reflect the 0th-order light L0 toward the first light detection unit 22 side. It may be. Of course, from the viewpoint of reliably eliminating the influence of the 0th-order light, the 0th-order light reflection control unit 41b has an inclination to reflect the 0th-order light L0 on the side opposite to the first light detection unit 22 side. It is preferable.

  In the manufacturing process of the spectroscope 1B, as described above, the molding layer is used to form the smooth molding layer 41 on the inclined surface 37 of the base wall portion 31, and the first reflection portion 11 is formed on the molding layer 41. Is forming. At the same time, a smooth molding layer 41 is formed on the inclined surface 39 of the base wall portion 31, and the surface of the molding layer 41 is used as a 0th-order light reflection control unit 41b. Usually, since the surface of the molding layer 41 is smoother with less unevenness than the surface of the support 30, the first reflection part 11 and the 0th-order light reflection control part 41 b can be formed with higher accuracy. However, the first reflecting portion 11 is directly formed on the inclined surface 37 of the base wall portion 31 without using the molding layer 41, or the inclined surface 39 of the base wall portion 31 is used as the 0th-order light reflection control portion 41b. Also good. In this case, since the molding material used for the molding layer 41 can be reduced and the shape of the molding die can be simplified, the molding layer 41 can be easily formed.

  According to the spectroscope 1B configured as described above, for the same reason as the spectroscope 1A described above, it is possible to reduce the size while suppressing a decrease in detection accuracy. Further, in the spectroscope 1B, since the spectroscopic unit 40B is provided in the photodetecting element 20 together with the light passing unit 21, the first photodetecting unit 22, and the second photodetecting unit 26, the light passing unit 21, the spectroscopic unit 40B, The mutual positional relationship between the first light detection unit 22 and the second light detection unit 26 can be accurately maintained. Furthermore, the spectroscopic unit 40B, which is more complicated to manufacture than the first reflecting unit 11 and the second reflecting unit 12B, is combined with the light passing unit 21, the first photodetecting unit 22, and the second photodetecting unit 26 in the photodetecting element 20. By providing, the yield of the support body 30 and the yield of the spectrometer 1B can be improved.

  Since the spectroscopic portion 40B can be collectively formed on the front surface 24a of the substrate 24, the spectroscopic portion 40B can be spectroscopically obtained with higher accuracy than the case where it is formed on a curved surface using a photo process (using a stepper or the like) or a nanoimprint process. The part 40B can be formed. Therefore, the alignment of the spectroscopic unit 40B is facilitated, and high positional accuracy is obtained. On the other hand, since it is not necessary to form a spectroscopic portion on the support 30, the support 30 can be easily formed.

  The plurality of second light detection units 26 may be arranged along the outer edge of the spectroscopic unit 40B so as to surround the spectroscopic unit 40B. In this case, it is possible to monitor how the light incident on the second reflecting portion 12A is shifted over the entire periphery of the spectroscopic portion 40B. The plurality of second light detection units 26 are arranged in a one-dimensional manner on both sides of the spectroscopic unit 40B in a direction parallel to the reference line RL and on both sides of the spectroscopic unit 40B in a direction perpendicular to the reference line RL. Also good. In this case, it is possible to monitor in more detail how the light L1 incident on the spectroscopic unit 40B is shifted in each of a direction parallel to the reference line RL and a direction perpendicular to the reference line RL. The plurality of second light detection units 26 may be two-dimensionally arranged in a region surrounding the spectroscopic unit 40B. In this case, it is possible to monitor how the light L1 incident on the spectroscopic unit 40B shifts as an image in the entire periphery of the spectroscopic unit 40B.

  Moreover, when manufacturing the spectrometer 1B, the support body 30 provided with the 1st reflection part 11 and the 2nd reflection part 12B is prepared (1st process), the light passage part 21, the spectroscopy part 40B, the 1st The light detection element 20 provided with the light detection unit 22 and the plurality of second light detection units 26 is prepared (second step), and after that, the support 30 and the light detection element 20 are formed so that the space S is formed. Is formed in the space S from the light passage part 21 to the first light detection part 22 (third step). In this way, an optical path from the light passage part 21 to the first light detection part 22 is formed in the space S only by fixing the support 30 and the light detection element 20. Therefore, according to the method for manufacturing the spectrometer 1B, it is possible to easily manufacture the spectrometer 1B that can be downsized while suppressing a decrease in detection accuracy. In addition, the execution order of the process which prepares the support body 30, and the process which prepares the photon detection element 20 is arbitrary.

  In particular, when the spectroscope 1B is manufactured, the wiring 13, the first light detection unit 22, and the first light detection unit 22 are simply connected to the terminal 25 of the light detection element 20 by connecting the end 13a of the wiring 13 provided on the support 30. Not only the electrical connection with the two-light detection unit 26 but also the fixing of the support 30 and the light detection element 20 and the formation of an optical path from the light passage unit 21 to the first light detection unit 22 are realized.

  The first and second embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments. For example, in each of the above embodiments, the incident NA of the light L1 incident on the space S is the light passage portion 21 of the light detection element 20 and the light passage opening 52a of the light shielding film 52 (in some cases, the space S side in the light transmission member 51). However, the present invention is not limited to this. In the first embodiment, the incident NA of the light L1 incident on the space S is substantially defined by adjusting the shape of at least one region of the first reflecting unit 11, the second reflecting unit 12A, and the spectroscopic unit 40A. can do. Since the light L2 incident on the first light detection unit 22 is diffracted light, it is possible to substantially define the incident NA by adjusting the shape of a predetermined region where the grating pattern 41a is formed in the molding layer 41. it can. In the second embodiment, the incident NA of the light L1 incident on the space S is substantially defined by adjusting the shape of at least one region of the first reflecting unit 11, the spectroscopic unit 40B, and the second reflecting unit 12B. can do.

  The space S may be hermetically sealed by a package that houses the light detection element 20 and the support 30 instead of the package 60 that includes the light detection element 20 and the support 30 as a configuration. Even in such a case, it is possible to suppress a decrease in detection accuracy due to the deterioration of the members in the space S due to moisture and the occurrence of dew condensation in the space S due to a decrease in the outside air temperature. Here, the package can be configured by a stem in which a plurality of lead pins are inserted, and a cap provided with a light incident portion for allowing the light L1 to enter the light passage portion 21. Then, by connecting the end portion of each lead pin in the package to the end portion 13b of each wiring 13 provided on the support 30 on the surface 31b of the base wall portion 31, the corresponding lead pin and the wiring 13 can be electrically connected. Connection and positioning of the photodetecting element 20 and the support 30 with respect to the package can be realized.

  Since the light detection element 20 and the support 30 are accommodated in the package, it is not necessary to dispose the sealing members 15 and 16 or provide the cover 50 as in the above-described spectrometer 1A. . In addition, the end portion of the lead pin in the package is disposed in the through hole or in the through hole formed in the base wall portion 31 or in the recess formed in the surface 31b of the base wall portion 31. You may be connected to the edge part 13b of the wiring 13 extended in a recessed part. Further, the end portion of the lead pin in the package and the end portion 13b of the wiring 13 may be electrically connected via a wiring substrate on which the support 30 is mounted by bump bonding or the like. In this case, the end portion of the lead pin in the package may be arranged so as to surround the support 30 when viewed from the thickness direction of the stem (that is, the Z-axis direction). The wiring board may be arranged on the stem in contact with the stem, or may be supported by a plurality of lead pins in a state of being separated from the stem.

  Further, the material of the support 30 is not limited to ceramic, and may be other molding materials such as resins such as LCP, PPA, and epoxy, and glass for molding. Further, when the space S is hermetically sealed by a package that accommodates the light detection element 20 and the support 30, the support 30 includes a pair of side walls 32 and a pair of side walls that surround the space S. It may replace with 33 and may have a some pillar part or several side wall part which mutually spaces apart. Thus, the materials and shapes of the components of the spectrometers 1A and 1B are not limited to the materials and shapes described above, and various materials and shapes can be applied.

  In the spectroscope 1A, the first reflecting portion 11 may be a plane mirror. In that case, the incident NA of the light L1 passing through the light passage 21 is reduced, and “the optical path length of the light L1 having the same spread angle as that of the light L1 that has passed through the light passage 21 is The optical path length from the unit 21 to the spectroscopic unit 40A ”>“ the optical path length from the spectroscopic unit 40A to the first light detection unit 22 ”(reduction optical system) allows the resolution of the light L2 split by the spectroscopic unit 40A to be reduced. Can be high. Specifically, it is as follows. That is, when the 1st reflection part 11 is a plane mirror, the light L1 is irradiated to 40 A of spectroscopy parts, spreading. Therefore, from the viewpoint of suppressing the area of the spectroscopic unit 40A from being widened and from the viewpoint of suppressing the distance that the spectroscopic unit 40A collects the light L2 on the first light detection unit 22 from increasing, It is necessary to reduce the incident NA of the light L <b> 1 passing through 21. Therefore, by reducing the incident NA of the light L1 and using a reduction optical system, the resolution of the light L2 split by the spectroscopic unit 40A can be increased.

  In the spectroscope 1B, the light detection element 20 may not include the second light detection unit 26. Even in that case, since the optical path from the light passage part 21 to the first light detection part 22 is formed in the space S formed by the light detection element 20 and the support 30, the spectrometer 1 </ b> B can be downsized. Can be planned. Furthermore, since the spectroscopic unit 40B is provided in the photodetecting element 20 together with the light passing unit 21 and the first photodetecting unit 22, the positional relationship between the light passing unit 21, the spectroscopic unit 40B, and the first photodetecting unit 22 is mutually. Is maintained with high accuracy. Therefore, also in that case, it is possible to reduce the size while suppressing a decrease in detection accuracy.

  In the spectrometer 1B in which the second light detection unit 26 is not provided, the first reflection unit 11 is not limited to a plane mirror, and may be a concave mirror. Further, the spectroscopic unit 40B is not limited to a planar grating, and may be a concave grating. Moreover, the 2nd reflection part 12B is not limited to a concave mirror, A plane mirror may be sufficient. However, regardless of whether the first reflecting portion 11 is a plane mirror or a concave mirror, the optical system in which the spectroscopic portion 40B is a plane grating and the second reflecting portion 12B is a concave mirror is a small size of the spectroscope 1B. This is advantageous for achieving high accuracy and high accuracy. The reason is that it is difficult to form the spectroscopic unit 40B that is a concave grating on the surface 24a of the substrate 24 that is a flat surface. In this case, in order to collect the light L2 on the first light detection unit 22, This is because the second reflecting portion 12B needs to be a concave mirror. Furthermore, it is more preferable that the first reflecting portion 11 is a plane mirror in order to reduce the size of the spectrometer 1B. This is because the light L1 enters the spectroscopic unit 40B while having a predetermined divergence angle.

  Further, when manufacturing the spectrometer 1B not provided with the second light detection unit 26, a support 30 provided with the first reflection unit 11 and the second reflection unit 12B is prepared (first step), The light detection element 20 provided with the light passage part 21, the spectroscopic part 40B, and the first light detection part 22 is prepared (second step), and the support 30 and the light detection are performed so that the space S is formed after them. By fixing the element 20, an optical path from the light passage part 21 to the first light detection part 22 is formed in the space S (third step). In this way, an optical path from the light passage part 21 to the first light detection part 22 is formed in the space S only by fixing the support 30 and the light detection element 20. Therefore, according to the method for manufacturing the spectrometer 1B, it is possible to easily manufacture the spectrometer 1B that can be downsized while suppressing a decrease in detection accuracy. In addition, the execution order of the process which prepares the support body 30, and the process which prepares the photon detection element 20 is arbitrary.

  In particular, when the spectroscope 1B is manufactured, the connection between the wiring 13 and the first light detection unit 22 can be achieved by simply connecting the end 13a of the wiring 13 provided on the support 30 to the terminal 25 of the light detection element 20. In addition to the electrical connection, the fixing of the support 30 and the light detection element 20 and the formation of an optical path from the light passage part 21 to the first light detection part 22 are realized.

  Further, in each of the above embodiments, the terminal 25 of the opposing light detection element 20 and the end 13a of the wiring 13 are connected by the bump 14, but the terminal 25 of the opposing light detection element 20 and the end of the wiring 13 are connected. 13a may be connected by soldering. Further, the connection between the terminal 25 of the photodetecting element 20 and the end portion 13 a of the wiring 13 is not limited to the end surface 32 a of each side wall portion 32 of the support 30, but also the end surface 33 a of each side wall portion 33 of the support 30. Or may be performed on the end surface 32 a of each side wall portion 32 and the end surface 33 a of each side wall portion 33 of the support 30. In the spectroscopes 1A and 1B, the wiring 13 may be routed on the surface of the support 30 opposite to the space S side. Thereby, scattering of light by the wiring 13 exposed to the space S can be prevented.

  DESCRIPTION OF SYMBOLS 1A, 1B ... Spectroscope, 11 ... 1st reflection part (1st optical part), 12A ... 2nd reflection part (2nd optical part), 12B ... 2nd reflection part (3rd optical part), 13 ... Wiring, 13a ... end, 20 ... light detection element, 21 ... light passage part, 22 ... first light detection part, 25 ... terminal, 26 ... second light detection part, 30 ... support, 40A ... spectroscopic part (third optical unit) Part), 40B ... spectral part (second optical part), 60 ... package, S ... space, RL ... reference line.

Claims (9)

A light detection unit provided with a light passage part and a light detection part;
A support fixed to the light detection unit so that a space is formed between the light passage part and the light detection part;
Wiring provided on the support,
A first reflecting portion that is provided on the support and reflects light that has passed through the light passing portion in the space;
A spectroscopic unit that is provided in the photodetecting unit and that splits and reflects the light reflected by the first reflecting unit in the space;
A second reflection unit provided on the support, and in the space, the second reflection unit that reflects light reflected and reflected by the beam splitting unit to the light detection unit,
The light detection unit and the wiring are electrically connected,
The light detection unit is provided on the space-side surface of the substrate included in the light detection unit, and is built in the substrate made of a semiconductor material,
The spectroscopic unit is a spectroscope provided on the surface of the substrate on the space side.   The spectroscope according to claim 1, wherein the first reflection unit is a plane mirror.   The spectroscope according to claim 1 or 2, wherein the second reflecting portion is a concave mirror.   The spectroscope according to any one of claims 1 to 3, wherein the first reflecting portion is provided on the support via a molding layer.   The spectroscope according to any one of claims 1 to 3, wherein the second reflecting portion is provided on the support via a molding layer.   The spectroscope according to any one of claims 1 to 3, wherein the first reflecting portion and the second reflecting portion are provided on the support via a molding layer.   The spectroscope according to any one of claims 1 to 6, wherein the light detection unit is electrically connected to the wiring via a bump, and is fixed to the support via the bump.   The spectroscope according to claim 1, wherein the light detection unit includes a light detection element provided with the light detection unit and a cover. A first step of preparing a support provided with a first reflecting portion, a second reflecting portion, and wiring;
A second step of preparing a light detection unit provided with a light passage part, a spectroscopic part and a light detection part;
After the first step and the second step, by fixing the support and the light detection unit so that a space is formed, the light that has passed through the light passage part is reflected by the first reflection part. The light reflected by the first reflection unit is split and reflected by the spectroscopic unit, and the light that is split and reflected by the spectroscopic unit is reflected by the second reflection unit and the second reflection. Forming a light path in the space where the light reflected by the part enters the light detection part, and electrically connecting the light detection unit and the wiring,
The light detection unit is provided on the space-side surface of the substrate included in the light detection unit, and is built in the substrate made of a semiconductor material,
The spectroscopic unit is a method of manufacturing a spectroscope provided on the surface of the substrate on the space side.

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