JP6285156B2 - Recovery jig and board inspection device - Google Patents

Description

  The present invention relates to a substrate inspection apparatus for inspecting a substrate and a recovery jig used therefor. In particular, the present invention relates to a substrate inspection apparatus suitable for causing a droplet to adhere to an edge of a substrate and moving it along the edge in order to inspect the substrate, and a recovery jig used therefor.

Substrate inspection devices are used in semiconductor and liquid crystal manufacturing facilities and inspection facilities.
The substrate inspection apparatus is an apparatus that inspects a substrate. For example, the substrate is a substrate such as a semiconductor wafer or a liquid crystal substrate. The semiconductor wafer is a wafer of silicon, gallium, silicon carbide or the like.
The substrate inspection apparatus needs to position the substrate. Usually, a simple and reliable positioning mechanism is required to prevent substrate contamination.
In addition, some substrate inspection apparatuses are used to accurately measure the amount of impurities such as sodium, potassium, and iron in thin films such as oxide films and nitride films formed on the surface of a semiconductor wafer. In this substrate inspection apparatus, it is important to accurately position the substrate in order to accurately measure the amount of impurities.

The purpose and method for accurately measuring impurities on the surface of a semiconductor wafer will be briefly described.
If an impurity is contained in a thin film such as an oxide film or a nitride film formed on the surface of a semiconductor wafer, even if the amount of the impurity is very small, the electrical characteristics of the semiconductor element are greatly affected.
Accordingly, there is a demand for suppressing the contamination of impurities from the wafer surface as much as possible in a semiconductor device manufacturing facility.
For this purpose, the amount of impurities present on the surface of the semiconductor wafer is accurately measured.

Instead of secondary ion mass spectrometry, Auger spectroscopy, or neutron activation analysis, which has recently been used to measure the amount of impurities present on the wafer surface, it has a fluoride solution, and the amount of impurities Measure. For example, the fluoride solution is an aqueous HF (hydrogen fluoride) solution.
After the oxide film on the surface of the silicon wafer is dissolved in an HF (hydrogen fluoride) aqueous solution, the HF (hydrogen fluoride) aqueous solution is collected and the impurities in the HF (hydrogen fluoride) aqueous solution are analyzed. Done. When the amount of the collected HF (hydrogen fluoride) aqueous solution is small, the impurity concentration increases, and the measurement accuracy is improved.
For example, after exposing the substrate to the vapor of HF (hydrogen fluoride) aqueous solution and dissolving the oxide layer of the substrate, a droplet of HF (hydrogen fluoride) aqueous solution is dropped on the surface of the substrate, and the droplet is applied to the substrate. Move while attached to the surface. Impurities in the oxide film are collected in the droplets. The amount of impurities on the substrate surface is inspected by measuring the amount of impurities in the droplet.

  In order to improve measurement accuracy, there is a need for a substrate inspection apparatus that can accurately position a substrate and measure the amount of impurities only in a specific measurement region. In particular, there is a need for a substrate inspection apparatus, a substrate inspection method, and a recovery jig that are suitable for moving a droplet while adhering to the edge of the substrate and collecting impurities in the droplet. For example, when the droplet is hydrophilic to the surface of the substrate, there is a need for a substrate inspection apparatus, a substrate inspection method, and a recovery jig suitable for collecting impurities in the droplet.

  The present invention has been devised in view of the above-described problems. A substrate inspection apparatus and a recovery jig that can further improve the measurement accuracy, and a droplet attached to the edge of the substrate to the edge. An object of the present invention is to provide a substrate inspection apparatus and a recovery jig suitable for moving along a substrate.

  In order to achieve the above object, a recovery jig for attaching and holding droplets on the substrate for inspecting the substrate according to the present invention, gas supply means for supplying gas, and droplets attached to the edge of the substrate A first jig that holds the gas, and guides the gas to be sprayed onto the surface of the substrate along the outline of the adhesion region, which is an area where the droplets retained by the first jig adhere to the edge of the substrate. And a second jig.

With the configuration of the present invention, the gas supply means supplies gas. The first jig holds the droplets attached to the edge of the substrate. The second jig guides the gas so as to be sprayed onto the surface of the substrate along the outline of the adhesion area, which is an area where the droplet held by the first jig adheres to the edge of the substrate.
As a result, the droplets adhering to the edge of the substrate can be held without leaking from the adhesion region.

  Below, the collection jig | tool which concerns on embodiment of this invention is demonstrated. The present invention includes any of the embodiments described below, or a combination of two or more of them.

Further, in the recovery jig according to the embodiment of the present invention, the first jig has a cylindrical portion whose axis is directed in a direction along the central axis of the substrate, and the cylindrical portion is on a side surface on the edge of the substrate. There is provided a recess for holding the attached droplet, and the second jig has a wall portion that covers the cylindrical portion by providing a gap space between at least a portion of the side surface where the recess is provided. Is provided with an opening communicating with the gap space and the atmosphere space at a position facing the recess, and the gas is supplied to the gap space.
With the configuration of the embodiment according to the present invention, the first jig has a cylindrical portion that directs the axis in the direction along the central axis of the substrate, and the cylindrical portion adheres to the edge of the substrate on the side surface. A recess is provided to hold the drop. The second jig has a wall portion that covers the cylindrical portion by providing a clearance space between at least a portion of the side surface where the recess is provided, and the wall portion and the clearance space at a position facing the recess. An opening communicating with the atmosphere space is provided.
The gas is supplied to the gap space.
As a result, gas enters the gap space and is sprayed from the opening to the surface of the substrate along the contour of the adhesion region of the droplet held in the depression, and the droplet adhered to the edge of the substrate is the adhesion region. Can be held without leaking,

The recovery jig according to the embodiment of the present invention is formed by a second groove which is a groove having a width dimension slightly larger than the thickness of the substrate and extending in a direction intersecting the central axis of the substrate.
With the configuration of the embodiment according to the present invention,
The opening is formed by a second groove which is a groove having a width dimension slightly larger than the thickness of the substrate and extending in a direction intersecting the central axis of the substrate.
As a result, the gap dimension between the edge of the substrate inserted into the opening and the opening formed by the second groove can be stably maintained.

In addition, the recovery jig according to the embodiment of the present invention is a pair of a pair of the second groove facing the surface of the substrate, the surface facing the back surface of the substrate, and the edge of the substrate. Formed with a surface.
With the configuration of the embodiment according to the present invention,
In the in-use posture, the second groove is formed by a surface facing the surface of the substrate, a surface facing the back surface of the substrate, and a pair of surfaces facing the edge of the substrate.
As a result, the gap size between the edge of the substrate inserted into the opening and the opening formed by the second groove can be maintained more stably.

Further, in the recovery jig according to the embodiment of the present invention, the wall portion covers the cylindrical portion by providing the gap space between the side surfaces.
With the configuration of the embodiment according to the present invention, the wall portion covers the cylindrical portion with the gap space between the side surfaces.
As a result, after the gas fills the gap space provided between the entire circumference of the side surface, it exits from the gap between the opening and the edge of the substrate, and the droplets adhering to the edge of the substrate are removed from the attached fishing area. Can be held without leaking.

In the recovery jig according to the embodiment of the present invention, the gas is supplied to the gap space from one end side of the cylindrical portion.
With the configuration of the embodiment according to the present invention, the gas is supplied to the gap space from one end side of the cylindrical portion.
As a result, after the gas fills the gap space, it can be held out without leaking from the attached fishing area by coming out of the gap between the opening and the edge of the substrate and adhering to the edge of the substrate.

Further, in the recovery jig according to the embodiment of the present invention, the cylindrical portion has an end face at the other end,
The wall portion covers the tubular portion by providing the gap space between the side surface and the end surface.
With the configuration of the embodiment according to the present invention, the cylindrical portion has an end surface at the other end, and the wall portion covers the cylindrical portion with the gap space between the side surface and the end surface.
As a result, the gap space between the entire circumference of the side face, the end face, and the wall portion is filled, and then the liquid droplets attached to the edge portion of the substrate are leaked from the attached fishing region through the gap between the opening and the edge portion of the substrate. It can be held without.

Further, in the recovery jig according to the embodiment of the present invention, the cylindrical portion has an end surface that has a convex shape at the other end, and the wall portion defines the cylindrical portion as a whole circumference of the side surface and the end surface. The gap space is provided between and covered.
According to the configuration of the embodiment according to the present invention, the cylindrical portion has an end face having a convex shape at the other end. The wall portion covers the cylindrical portion by providing the gap space between the entire circumference of the side surface and the end surface.
As a result, after filling the gap space between the wall with the entire circumference of the side surface and the convex shape, it comes out of the gap between the opening and the edge of the substrate and attaches the droplets attached to the edge of the substrate. Can be held without leaking from the fishing area.

Further, the recovery jig according to the embodiment of the present invention is formed by a first groove that is a groove extending in a direction in which the dent intersects the central axis of the substrate, and the first groove is the first groove when the opening is viewed from the front. I began to peek through the second groove,
With the configuration of the embodiment according to the present invention, the recess is formed by a first groove that is a groove extending in a direction intersecting the central axis of the substrate.
The first groove can be seen from the second groove when the opening is viewed from the front.
As a result, the edge of the substrate inserted into the opening following the second groove faces the dent following the first groove, and the droplets adhering to the edge of the substrate can be held without leaking from the attached fishing region.

In the recovery jig according to the embodiment of the present invention, the first jig has an internal space in which droplets can be stored, and the recess communicates with the internal space.
With the configuration of the embodiment according to the present invention, the first jig has an internal space in which liquid can be stored. The recess communicates with the internal space.
As a result, a part of the liquid stored in the internal space can adhere to the edge of the substrate as a droplet.

In the recovery jig according to the embodiment of the present invention, the wall portion covers the cylindrical portion by providing the gap space between the entire circumference of the side surface.
According to the configuration of the embodiment according to the present invention, the wall portion covers the cylindrical portion by providing the gap space between the entire circumference of the side surface.
As a result, after the gas fills the gap space provided between the entire circumference of the side surface, it exits from the gap between the opening and the edge of the substrate, and the droplets adhering to the edge of the substrate are removed from the attached fishing area. Can be held without leaking.

Further, in the recovery jig according to the embodiment of the present invention, the cylindrical portion has an end face at the other end,
The wall portion covers the tubular portion by providing the gap space between the end surfaces.
With the configuration of the embodiment according to the present invention, the cylindrical portion has an end face at the other end. The wall portion covers the tubular portion by providing the gap space between the end surfaces.
As a result, after filling the gap space between the end face and the wall portion, the liquid droplets coming out from the gap between the opening and the edge portion of the substrate and attached to the edge portion of the substrate can be held without leaking from the attached fishing region.

  In order to achieve the above object, a substrate inspection apparatus for adhering and moving droplets to a substrate for inspecting the substrate according to the present invention, a substrate rotating device that holds the substrate and rotates it about the central axis of the substrate, and The recovery jig according to one of the above and a recovery jig holding device capable of holding the recovery jig.

With the configuration of the present invention, the substrate rotating device holds the substrate and rotates it around the central axis of the substrate. The collection jig holding device can hold the collection jig described in one of the above.
As a result, the droplets can adhere to the edge of the substrate and move along the periphery of the substrate.

  Below, the board | substrate inspection apparatus which concerns on embodiment of this invention is demonstrated. The present invention includes any of the embodiments described below, or a combination of two or more of them.

The substrate inspection apparatus according to the embodiment of the present invention adjusts the relative distance between the substrate and the recovery jig according to the pressure in the gap space when the edge of the substrate is inserted into the opening.
With the configuration of the embodiment according to the present invention, when the edge portion of the substrate is inserted into the opening, the relative distance between the substrate and the recovery jig is adjusted according to the pressure in the gap space.
As a result, the gap between the surface of the substrate, the opening of the recovery jig and the recess can be adjusted based on the pressure in the gap space.

In addition, the substrate inspection apparatus according to the embodiment of the present invention responds to pressure at a location close to the opening on either the front surface or the back surface of the substrate when the edge of the substrate is inserted into the opening. Adjusting the relative distance between the substrate and the recovery jig.
According to the configuration of the embodiment according to the present invention, when the edge of the substrate is inserted into the opening, the substrate and the substrate according to the pressure at the location near the opening on either the front surface or the back surface of the substrate. The relative distance from the collection jig is adjusted.
As a result, the gap between the surface of the substrate and the opening and the recess of the recovery jig can be adjusted based on the pressure at a location near the opening on the surface of the substrate.

As described above, the recovery jig according to the present invention has the following effects due to its configuration.
The first jig holds the droplets attached to the edge of the substrate, and the gas is sprayed on the surface of the substrate along the outline of the adhesion region where the droplets held by the first jig adhere to the edge. As a result, the droplets adhering to the edge of the substrate can be held without leaking from the adhesion region.
In addition, the cylindrical portion having an axis oriented in the direction along the central axis of the substrate is provided with a recess for holding droplets adhering to the edge of the substrate, and the wall portion of the second jig has at least the cylindrical portion on the side surface. Since a gap space is provided and covered with the portion where the recess is provided, an opening that communicates the gap space and the atmosphere is provided at a position facing the recess of the wall portion, and gas is supplied to the gap space. The gas enters the gap space and is sprayed onto the surface of the substrate along the outline of the adhesion region of the droplet held in the recess D, and the droplet adhered to the edge of the substrate 1 is leaked from the adhesion region. Can be held without
In addition, since the opening is formed by the second groove which is a groove having a width dimension slightly larger than the thickness of the substrate and extending in a direction intersecting the central axis of the substrate, the edge of the substrate inserted into the opening The gap dimension between the opening and the opening W formed by the second groove can be stably maintained.
Further, in the posture during use, the second groove is formed by a surface facing the surface of the substrate, a surface facing the back surface of the substrate, and a pair of surfaces facing the edge of the substrate. The gap dimension between the edge of the substrate inserted into the opening and the opening formed by the second groove can be maintained more stably.
In addition, since the wall portion covers the cylindrical portion with the gap space provided between the side surfaces, the gas is opened after the gap space S provided between the side surfaces and the entire circumference of the side surface is fully filled. The liquid droplets coming out of the gap between the substrate and the edge of the substrate and adhering to the edge of the substrate can be held without leaking from the adhesion region.
Further, since the gas is supplied to the gap space from one end side of the cylindrical portion, the gas fills the gap space and then comes out of the gap between the opening and the edge of the substrate. In addition, the droplets attached to the edge of the substrate can be held without leaking from the attachment region.
In addition, since the wall portion covers the cylindrical portion by providing the gap space between the side surface and the end surface, the gap portion between the entire circumference of the side surface and the end surface and the wall portion is filled before opening. The liquid droplets coming out of the gap between the substrate and the edge of the substrate and adhering to the edge of the substrate can be held without leaking from the attached fishing area.
Further, since the wall portion covers the cylindrical portion by providing the gap space between the entire circumference of the side surface and the end surface having a convex shape, the end surface having a convex shape and the entire circumference of the side surface. After the space between the wall and the wall is filled, the liquid droplets coming out from the gap between the opening and the edge of the substrate and adhering to the edge of the substrate can be held without leaking from the attached fishing area.
Further, since the first groove extending in the direction intersecting the central axis of the substrate when viewed from the front is viewed from the second groove, the edge of the substrate inserted into the opening following the second groove is It follows the first groove to face the dent and can hold the droplets adhering to the edge of the substrate without leaking from the attached fishing area.
Further, since the recess communicates with the internal space where the liquid can be stored, a part of the liquid stored in the internal space can adhere to the edge of the substrate as a droplet.
In addition, since the wall portion covers the cylindrical portion by providing the gap space between the entire circumference of the side surface, the gas fills the gap space provided between the entire circumference of the side surface. The liquid droplets coming out from the gap between the opening and the edge of the substrate and adhering to the edge of the substrate can be held without leaking from the attached fishing area.
Further, since the wall portion covers the cylindrical portion with the gap space between the end surfaces, the gap space between the opening and the edge of the substrate is filled after filling the gap space between the end surface and the wall portion. It is possible to hold the liquid droplets coming out of the substrate and adhering to the edge of the substrate without leaking from the attached fishing area.

As described above, the substrate inspection apparatus according to the present invention has the following effects due to its configuration.
The recovery jig holding device holds the recovery jig described in one of the above, and the substrate rotating device holds the substrate and rotates it around the central axis of the substrate. It can be attached to the edge and moved along the periphery of the substrate.
In addition, when the edge of the substrate is inserted into the opening, the relative distance between the substrate and the recovery jig is adjusted according to the pressure in the gap space. The gap between the surface of the substrate and the opening and recess of the recovery jig can be adjusted.
Further, when the edge of the substrate is inserted into the opening, the relative distance between the substrate and the recovery jig is set according to the pressure at a location near the opening on either the front surface or the back surface of the substrate. Since the adjustment is made, the gap between the surface of the substrate and the opening and recess of the recovery jig can be adjusted based on the pressure at a location near the opening of the surface of the substrate. ,
As a result, the substrate inspection apparatus and the recovery jig that can further improve the measurement accuracy, and the substrate inspection apparatus and the recovery jig suitable for attaching a droplet to the edge portion of the substrate and moving it along the edge portion. And can provide.

It is a top view of the board | substrate inspection apparatus which concerns on embodiment of this invention. It is a front view of the board | substrate inspection apparatus which concerns on embodiment of this invention. It is a side view of the board | substrate inspection apparatus which concerns on embodiment of this invention. It is a front sectional view of the recovery jig concerning a first embodiment of the present invention. It is side surface sectional drawing of the collection jig | tool which concerns on 1st embodiment of this invention. It is an AA sectional view of a recovery jig concerning a first embodiment of the present invention. It is a fragmentary sectional view of the recovery jig concerning a first embodiment of the present invention. It is a fragmentary sectional view of the recovery jig concerning a second embodiment of the present invention. It is a fragmentary sectional view of the recovery jig concerning a third embodiment of the present invention.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

First, a substrate inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a plan view of the substrate inspection apparatus according to the embodiment of the present invention. FIG. 2 is a front view of the substrate inspection apparatus according to the embodiment of the present invention. FIG. 3 is a side view of the substrate inspection apparatus according to the embodiment of the present invention.
Hereinafter, a case where the central axis of the substrate 1 is vertical will be described as an example.

  A substrate inspection apparatus 2 according to an embodiment of the present invention is an apparatus that attaches and moves droplets 4 to a substrate 1 for inspecting the substrate 1.

Below, the board | substrate inspection apparatus 2 is demonstrated to an example when the quantity of the impurity which exists in the board | substrate 1 is test | inspected.
When the substrate 1 is a silicon wafer, the first method for inspecting the amount of impurities present in the substrate 1 is to convert the surface of the substrate into liquid vapor (for example, vapor of HF (hydrogen fluoride) aqueous solution). By exposing, the oxide film on the surface of the substrate 1 is dissolved by the liquid. Thereafter, using the substrate inspection apparatus, the droplet 4 is attached to the substrate 1 and moved in order to inspect the substrate 1. In the second method, a liquid (for example, vapor of HF (hydrogen fluoride) aqueous solution) is dropped onto the surface of the substrate. The oxide film on the surface of the substrate 1 is dissolved by the liquid. Thereafter, using the substrate inspection apparatus, the droplet 4 is attached to the substrate 1 and moved in order to inspect the substrate 1.
The substrate inspection apparatus 2 drops a droplet (for example, HF (hydrogen fluoride) aqueous solution) on the surface of the substrate 1 and moves the droplet 4 so as to trace the surface of the substrate 1 in a predetermined region. 4 is collected. When the amount of impurities mixed in the droplet 4 is measured, the amount of impurities present in a predetermined region on the surface of the substrate 1 can be specified.

The substrate inspection apparatus 2 includes a substrate rotating device 10, a recovery jig 30, and a recovery jig holding device 20.
The substrate inspection apparatus 2 may include the lower structure 3, the substrate rotating device 10, the recovery jig holding device 20, the recovery jig 30, the liquid recovery device 40, and the substrate centering device 50.

  The lower structure 3 has a substrate rotating device 10, a collecting jig holding device 20, a collecting jig 30, a liquid collecting device 40, and a substrate centering device 50 on the upper surface, and a controller or control panel surface for controlling these devices. It is a structure provided with.

The substrate rotating device 10 is a device that holds the substrate 1 and rotates it around the central axis of the substrate 1.
For example, the substrate rotating device 10 is a device that holds the lower surface of the horizontal substrate 1 with a holding surface from below and rotates it around a vertical rotation center axis, and includes a substrate holding member (not shown) and a substrate holding base. And a stand (not shown).
The substrate holding member is a member that holds the lower surface of the horizontal substrate 1 with the holding surface M from below. A vacuum chuck mechanism is provided on the holding surface M. The vacuum chuck mechanism fixes the substrate 1 held on the holding surface M by negative pressure.
The substrate holding base is a device that supports a substrate holding member so as to be rotatable about a rotation center axis.

The recovery jig 30 is a jig that holds the droplets 4 attached to the substrate 1 in order to inspect the substrate 1.
Details of the recovery jig 30 will be described later.

The collection jig holding device 20 is a device that can hold the collection jig 30.
The collection jig holding device 20 can hold a collection jig that takes a posture for holding the droplet 4 attached to the edge 1 a of the substrate 1.

For example, the recovery jig holding device 20 includes a horizontal arm 21, an arm rotation shaft 22, an arm rotation base 23, and a rotation jig holder 24.
The horizontal arm 21 has a beam structure in which the recovery jig folder 24 is fixed to the front end portion and the rear end portion is fixed to the arm rotation shaft 22.
The arm rotation shaft 22 is a structure that fixes the rear end portion of the horizontal arm 21 and rotates around a vertical rotation shaft.
The arm rotation base 23 is a structure that rotatably holds the arm rotation shaft 22, and is attached to the lower structure 3.
The collection jig folder 24 is a structure that holds the collection jig 30. The distal end portion of the collection jig folder 24 has a fitting portion into which the collection jig 30 is fitted.

The liquid recovery device 40 is a device that recovers the liquid from the recovery jig 30.
For example, the liquid recovery device 40 recovers the droplet 4 held by the recovery jig 30 in a container.

  The substrate centering device 50 is a device that takes out the core of the substrate 1 and sets it on the substrate rotating device 10.

Below, the collection jig concerning the embodiment of the present invention is explained based on a figure.
FIG. 4 is a front sectional view of the recovery jig according to the first embodiment of the present invention. FIG. 5 is a side sectional view of the recovery jig according to the first embodiment of the present invention. FIG. 6 is an AA cross-sectional view of the recovery jig according to the first embodiment of the present invention. FIG. 7 is a partial cross-sectional view of the recovery jig according to the first embodiment of the present invention. FIG. 8 is a partial cross-sectional view of the recovery jig according to the second embodiment of the present invention. FIG. 9 is a partial cross-sectional view of the recovery jig according to the third embodiment of the present invention.

The recovery jig 30 according to the embodiment of the present invention holds the droplets 4 attached to the substrate 1 in order to inspect the substrate 1.
The recovery jig 30 includes a gas supply means 34, a first jig 31, and a second jig 32.
For example, the recovery jig 30 includes a gas supply unit 34, a first jig 31, a second jig 32, and a flange 33.
The recovery jig 30 may include a gas supply means 34, a first jig 31, a second jig 32, and a pressure measuring device 35.
For example, the recovery jig 30 includes a gas supply unit 34, a first jig 31, a second jig 32, a flange 33, and a pressure measuring device 35.

The gas supply means 34 is a means for supplying gas.
The gas is air, nitrogen, or the like.
The gas supply means 34 supplies gas to the gap space S described later.
The gas supply means 34 supplies the gas through the gas introduction hole K to the gap space S described later.

The first jig 31 holds the droplet 4 attached to the edge 1 a of the substrate 1.
The first jig 31 has a cylindrical portion 31 a whose axis is directed in the direction along the central axis of the substrate 1, and the cylindrical portion holds a droplet D attached to the edge portion 1 a of the substrate 1 on the side surface. May be provided.
For example, when the central axis of the substrate 1 is vertical, the first jig 31 has a cylindrical portion 31a whose axis is directed in the vertical direction, and the cylindrical portion 31a is attached to the edge 1a of the substrate 1 on the side surface. A recess D for holding the droplet 4 is provided.

  The side surface of the cylindrical portion 31a may be cylindrical.

  One end of the cylindrical portion 31a may be connected to a flange 33 described later.

The first jig 31 may have a convex end surface at the other end of the cylindrical portion 31a.
The first jig 31 may have a spherical convex end surface at the other end of the cylindrical portion 31a.

The recess D may be formed by a first groove 31 b that is a groove extending in a direction intersecting the central axis of the substrate 1.
A first groove 31b, which will be described later, may be seen from a second groove 32b, which will be described later, when an opening OA described later is viewed from the side.

  When a later-described opening O is viewed from the front, a later-described recess D may be seen from a second groove 32b described later.

  The first jig 31 may have an internal space H in which liquid can be stored, and the recess D may communicate with the internal space H.

The first jig 31 may have an internal space H in which liquid can be stored, and the first groove 31b may communicate the internal space H with a gap space S described later.
The width of the first groove 31 b may be larger than the thickness of the substrate 1.

The second jig 32 guides the gas to be sprayed onto the surface of the substrate 1 along the outline of the adhesion area, which is an area where the droplet 4 held by the first jig 31 adheres to the edge 1 a of the substrate 1. To do.
The second jig 32 sprays the gas onto the surface of the substrate 1 along the entire circumference of the adhesion area, which is an area where the droplet 4 held by the first jig 31 adheres to the edge 1 a of the substrate 1. You may be guided.

The second jig 32 has a wall portion 32a that covers and covers the cylindrical portion 31a with at least a portion where the recess D is provided on the side surface, and the wall portion 32a has a gap at a position facing the recess D. An opening W that communicates with the space S and the space of the atmosphere may be provided.
Gas is supplied to the gap space S.

  The opening W may be formed by a second groove which is a groove having a width dimension slightly larger than the thickness of the substrate 1 and extending in a direction intersecting the central axis of the substrate 1.

In the posture during use, the second groove 32b may be formed of a surface facing the surface of the substrate 1, a surface facing the back surface of the substrate 1, and a pair of surfaces facing the edge 1a of the substrate 1.
For example, in the posture during use, the second groove 32b is formed by a surface facing parallel to the surface of the substrate 1, a surface facing parallel to the back surface of the substrate 1, and a pair of surfaces facing the edge 1a of the substrate 1. Is done.

  The wall portion 32a may cover the tubular portion 31a by providing a gap space S between the side surfaces.

  The wall portion 32a may cover the tubular portion 31a by providing a gap space S between the entire periphery of the side surfaces.

  The wall portion 32a may cover the tubular portion 31a by providing a gap space S between the side surface and the end surface.

  The wall portion 32a may cover the cylindrical portion 31a by providing a gap space S between the end surfaces.

  Gas is supplied to the gap space S.

The gas may be supplied to the gap space S from one end side of the cylindrical portion 31a.
For example, when the axial center of the cylindrical member extends in the vertical direction, the gas is supplied to the gap space S from above.

  The flange 33 is a flange-shaped portion for attaching the recovery jig 30 to the recovery jig holder 24.

  The pressure measuring device 35 is a measuring tube for measuring the pressure 2 at a location near the opening W on either the front surface or the back surface of the substrate 1.

FIG. 9 shows a state where the recovery jig 30 has a pressure measuring device 35.
FIG. 8 shows a state where the recovery jig 30 does not have the pressure measuring device 35.

  1 to 7 show a state in which the first jig 31 is provided with the internal space H, and gas is supplied to the gap space S from above.

  FIG. 8 shows a state where the first jig 31 is not provided with the internal space H and the recess D is a groove shape.

  Below, the usage method of the collection | recovery jig in the board | substrate inspection apparatus concerning embodiment of this invention is demonstrated.

When the edge 1a of the substrate 1 is inserted into the opening W, the relative distance between the substrate 1 and the recovery jig may be adjusted according to the pressure in the gap space S.
When the edge 1a of the substrate 1 is inserted into the opening W, the relative distance of the substrate 1 and the recovery jig 30 in the direction along the central axis of the substrate 1 is adjusted according to the pressure in the gap space S. Good.
When the center axis of the substrate 1 is vertical, when the edge 1a of the substrate 1 is inserted into the opening W, the relative distance in the vertical direction between the substrate 1 and the recovery jig 30 is set according to the pressure in the gap space. You may adjust.
When the central axis of the substrate 1 is vertical, when the edge 1a of the substrate 1 is inserted into the opening W, the recovery jig holding device 20 moves in the vertical direction of the recovery jig 30 according to the pressure in the gap space. The distance may be adjusted.
When the central axis of the substrate 1 is vertical, when the edge portion 1a of the substrate 1 is inserted into the opening W, the recovery jig holding device 20 causes the recovery jig 30 to You may adjust the distance of an up-down direction.
The predetermined pressure is a value set in advance so that the gap between the opening W and the front and back surfaces of the substrate 1 has a predetermined value.

When the edge 1a of the substrate 1 is inserted into the opening W, the relative distance between the substrate 1 and the recovery jig 30 according to the pressure near the opening W on either the front surface or the back surface of the substrate 1 May be adjusted.
When the edge portion 1a of the substrate 1 is inserted into the opening W, the substrate 1 of the substrate 1 and the recovery jig 30 according to the pressure at a location close to the opening W on either the front surface or the back surface of the substrate 1. The relative distance in the direction along the central axis may be adjusted.
When the edge 1a of the substrate 1 is inserted into the opening W when the central axis of the substrate 1 is vertical, the pressure depends on the pressure at a location close to the opening W on either the front surface or the back surface of the substrate 1. Thus, the relative distance in the vertical direction between the substrate 1 and the collection jig 30 may be adjusted.
When the edge 1a of the substrate 1 is inserted into the opening W when the central axis of the substrate 1 is vertical, the pressure depends on the pressure at a location close to the opening W on either the front surface or the back surface of the substrate 1. Thus, the collection jig holding device 20 may adjust the vertical distance of the collection jig 30.
For example, when the central axis of the substrate 1 is vertical, when the edge 1a of the substrate 1 is inserted into the opening W, the pressure at a location near the opening W on either the front surface or the back surface of the substrate 1 The recovery jig holding device 20 adjusts the vertical distance of the recovery jig 30 so that the pressure becomes a predetermined pressure.
The predetermined pressure is a value set in advance so that the gap between the opening W and the front and back surfaces of the substrate 1 has a predetermined value.

As described above, the recovery jig according to the embodiment of the present invention has the following effects due to its configuration.
The first jig 31 holds the droplet 4 attached to the edge 1a of the substrate 1, and the gas follows the outline of the attachment region where the droplet 4 held on the first jig 31 adheres to the edge 1a. Since the liquid is sprayed on the surface of the substrate 1, the droplet 4 attached to the edge 1a of the substrate 1 can be held without leaking from the attachment region.
In addition, a recess for holding the droplet 4 attached to the edge 1a of the substrate 1 is provided in the cylindrical portion having an axial center directed in the direction along the central axis of the substrate 1, and the wall portion of the second jig 32 is cylindrical. A gap space S is provided between the portion 31a and at least a portion where the depression D is provided on the side surface, and an opening W that communicates the gap space S and the atmosphere is provided at a position facing the depression D of the wall portion. Since the gas is supplied to the gas, the gas enters the gap space S and is sprayed on the surface of the substrate 1 along the outline of the adhesion region of the droplet 4 held in the recess D, so that the edge 1a of the substrate 1 is blown. It is possible to hold the droplet 4 attached to the liquid without leaking from the adhesion area.
Further, since the opening W is formed by the second groove 32b having a width dimension slightly larger than the thickness of the substrate 1 and extending in a direction intersecting the central axis of the substrate 1, the opening W is inserted into the opening W. The gap dimension between the edge 1a of the substrate 1 and the opening W formed by the second groove 32b can be stably maintained.
Further, in the posture during use, the second groove 32b is formed by a surface facing the surface of the substrate 1, a surface facing the back surface of the substrate 1, and a pair of surfaces facing the edge 1a of the substrate 1. Therefore, the gap dimension between the edge 1a of the substrate 1 inserted into the opening W and the opening W formed by the second groove 32b can be maintained more stably.
Further, in the posture during use, the second groove 32b is formed by a surface facing parallel to the surface of the substrate 1, a surface facing parallel to the back surface of the substrate 1, and a pair of surfaces facing the edge 1a of the substrate 1. Thus, the gap dimension between the edge 1a of the substrate 1 inserted into the opening W and the opening W formed by the second groove 32b can be maintained more stably.
Further, since the wall portion 32a covers the cylindrical portion 31a with the gap space S between the side surfaces, the opening W is formed after the gap space S provided between the gas and the entire circumference of the side surface is fully filled. It is possible to hold the droplets 4 coming out of the gap between the substrate 1 and the edge 1a of the substrate 1 without leaking from the adhesion region.
In addition, since the gas is supplied to the gap space S from one end side of the cylindrical portion 31a, the gas fills the gap space S and then from the gap between the opening W and the edge 1a of the substrate 1. It is possible to hold the droplet 4 that has come out and adhered to the edge 1a of the substrate 1 without leaking from the adhesion region.
Further, since the wall portion 32a covers the cylindrical portion 31a by providing a gap space S between the side surface and the end surface, the entire space of the side surface and the gap space S between the end surface and the wall portion 32a are filled before opening. It is possible to hold the droplets 4 that come out of the gap between the edge 1a of the substrate 1 and adhere to the edge 1a of the substrate 1 without leaking from the attached fishing region.
Further, since the wall portion 32a covers the cylindrical portion 31a by providing a gap space S between the side surface and the end surface having the convex shape, the end surface and the wall having the entire side surface and the convex shape are provided. After the gap space S with the portion is filled, the droplets 4 coming out of the gap between the opening W and the edge 1a of the substrate 1 and adhering to the edge 1a of the substrate 1 can be held without leaking from the attached fishing region.
In addition, since the first groove extending in the direction intersecting the central axis of the substrate 1 when viewed from the front is viewed from the second groove, the substrate 1 inserted into the opening W following the second groove 32b. The edge faces the dent D following the first groove 31b, and the droplet 4 attached to the edge 1a of the substrate 1 can be held without leaking from the attached fishing area.
Further, since the recess D communicates with the internal space H in which the liquid can be stored, a part of the liquid stored in the internal space H can adhere to the edge 1 a of the substrate 1 as the droplet 4.
Further, since the wall portion 32a covers the cylindrical portion 31a by providing the gap space S between the entire circumference of the side surface, the gas fills the gap space S provided between the entire circumference of the side surface. From the gap between the opening W and the edge 1a of the substrate 1, the droplet 4 attached to the edge 1a of the substrate 1 can be held without leaking from the attached fishing area.
Further, since the wall portion 32a covers the cylindrical portion 31a with a gap space S provided between the end surfaces, the gap portion S between the end surface and the wall portion 32a fills the opening W and the edge portion of the substrate 1. It is possible to hold the droplets 4 coming out of the gap with 1a and adhering to the edge 1a of the substrate 1 without leaking from the attached fishing area.

As described above, the substrate inspection apparatus 2 according to the embodiment of the present invention has the following effects due to its configuration.
Since the collection jig holding device 20 holds the collection jig 30 described in one of the above, and the substrate rotating device 10 holds the substrate 1 and rotates it around the central axis of the substrate 1, The droplet 4 can be attached to the edge 1 a of the substrate 1 and moved along the periphery of the substrate 1.
In addition, when the edge 1a of the substrate 1 is inserted into the opening W, the relative distance between the substrate 11 and the recovery jig 30 is adjusted according to the pressure in the gap space S. Based on this, the gap between the surface of the substrate 1 and the opening and recess of the recovery jig can be adjusted.
When the edge 1a of the substrate 1 is inserted into the opening W, the relative distance of the substrate 1 and the recovery jig 30 in the direction along the central axis of the substrate 1 is adjusted according to the pressure in the gap space S. Thus, the gap between the surface of the substrate 1, the opening W of the recovery jig 30 and the recess D can be adjusted based on the pressure in the gap space S.
Further, when the edge portion 1a of the substrate 1 is inserted into the opening W, the substrate 1 and the recovery jig 30 are changed according to the pressure at a location close to the opening W on either the front surface or the back surface of the substrate 1. Since the relative distance is adjusted, the gap between the surface of the substrate 1 and the opening W of the recovery jig and the recess D can be adjusted based on the pressure near the opening W on the surface of the substrate 1. ,
Further, when the edge portion 1a of the substrate 1 is inserted into the opening W, the substrate 1 and the recovery jig 30 are changed according to the pressure at a location close to the opening W on either the front surface or the back surface of the substrate 1. Since the relative distance in the direction along the central axis of the substrate 1 is adjusted, the surface of the substrate 1, the opening W of the recovery jig 30, and the dent D are based on the pressure near the opening W of the surface of the substrate 1. And the gap can be adjusted. ,

The present invention is not limited to the embodiments described above, and various modifications can be made without departing from the scope of the invention.
Although the case where the central axis of the substrate 1 is vertical has been described as an example, the present invention is not limited to this. For example, the central axis of the substrate 1 may be horizontal. For example, the central axis of the substrate 1 may be inclined.

H Internal space W Opening D Recess K Gas introduction hole 1 Substrate 1a Edge 1a
DESCRIPTION OF SYMBOLS 2 Substrate inspection apparatus 3 Substructure 4 Droplet 10 Substrate rotation apparatus 20 Collection jig holding apparatus 21 Horizontal arm 22 Arm rotation shaft 23 Arm rotation base 24 Collection jig folder 30 Collection jig 31 First jig 31a Cylindrical shape Portion 31b First groove 32 Second jig 32a Wall 32b Second groove 33 Flange 34 Gas supply means 35 Pressure measuring device 40 Droplet recovery device 50 Substrate centering device

JP 02-272359 A JP 02-028533 JP 08-233709 A Japanese Patent Laid-Open No. 02-229428 WO2005 / 073692 JP 2010-040548 A

Claims (15)

A recovery jig for attaching and holding droplets on a substrate to inspect the substrate,
Gas supply means for supplying gas;
A first jig for holding droplets adhering to the edge of the substrate;
Second droplets held the gas to the first jig guide as blown to the front surface and the back surface and edge of the substrate along the contour of the attachment region is a region adhered to the edge of the substrate A jig,
Comprising
A recovery jig characterized by that. A recovery jig for attaching and holding droplets on a substrate to inspect the substrate,
Gas supply means for supplying gas;
A first jig for holding droplets adhering to the edge of the substrate;
A second jig for guiding the gas to be sprayed onto the surface of the substrate along the outline of the adhesion region, which is an area where the droplets held in the first jig adhere to the edge of the substrate;
With
The first jig has a cylindrical portion whose axis is directed in the direction along the central axis of the substrate, and the liquid adhered to the edge portion of the substrate when the cylindrical portion is in a posture in which the edge portion of the substrate is inserted into the side surface. Provided with a dent to hold the drop,
The second jig has a wall portion that covers the cylindrical portion by providing a clearance space between at least a portion of the side surface where the recess is provided, and the wall portion and the clearance space at a position facing the recess. An opening communicating with the atmosphere space is provided,
The gas is supplied to the gap space.
A recovery jig characterized by that. The opening is formed by a second groove which is a groove having a width dimension slightly larger than the thickness of the substrate and extending in a direction intersecting the central axis of the substrate.
The recovery jig according to claim 2, wherein: In posture during use, the second groove is formed in a surface facing the edge of the surface and the substrate which faces the back side of the surface and the substrate facing the surface of the substrate,
The recovery jig according to claim 3. The wall portion covers the cylindrical portion by providing the gap space between the side surfaces;
The recovery jig according to claim 4, wherein: The gas is supplied to the gap space from one end side of the cylindrical portion,
The recovery jig according to claim 5, wherein: The cylindrical portion has an end face at the other end,
The wall portion covers the tubular portion by providing the gap space between the side surface and the end surface;
The recovery jig according to claim 6. Has an end face the cylindrical portion has a convex shape at the other end,
The wall portion covers the cylindrical portion by providing the gap space between the entire circumference of the side surface and the end surface;
The recovery jig according to claim 7, wherein: The recess is formed by a first groove which is a groove extending in a direction intersecting the central axis of the substrate,
The first groove can be seen from the second groove when the opening is viewed from the front,
The recovery jig according to claim 2, wherein: The first jig has an internal space in which liquid can be stored, and the recess communicates with the internal space;
The recovery jig according to claim 9. The wall portion covers the tubular portion by providing the gap space between the entire circumference of the side surface;
The recovery jig according to claim 2, wherein: The cylindrical portion has an end face at the other end,
The wall portion covers the cylindrical portion by providing the gap space between the end faces;
The recovery jig according to claim 2, wherein: A substrate inspection apparatus for attaching and moving droplets on a substrate for inspecting the substrate,
A substrate rotating device that holds the substrate and rotates it around the central axis of the substrate;
A recovery jig according to one of claims 1 to 12,
A collection jig holding device capable of holding the collection jig;
A board inspection apparatus comprising: A substrate inspection apparatus for attaching and moving droplets on a substrate for inspecting the substrate,
A substrate rotating device that holds the substrate and rotates it around the central axis of the substrate;
The recovery jig according to claim 2;
A collection jig holding device capable of holding the collection jig and adjusting the relative distance from the substrate ;
With
When the edge of the substrate is inserted into the opening, the recovery jig holding device adjusts the relative distance between the substrate and the recovery jig in accordance with the pressure in the gap space;
A substrate inspection apparatus. A substrate inspection apparatus for attaching and moving droplets on a substrate for inspecting the substrate,
A substrate rotating device that holds the substrate and rotates it around the central axis of the substrate;
The recovery jig according to claim 2;
A collection jig holding device capable of holding the collection jig and adjusting the relative distance from the substrate ;
With
When the edge of the substrate is inserted into the opening, the recovery jig holding device is adapted to the substrate and the recovery jig according to the pressure at a location close to the opening on either the front surface or the back surface of the substrate. Adjust the relative distance between
A substrate inspection apparatus.

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