JP6221461B2 - Defect analysis method, uneven pattern structure manufacturing method, and imprint system - Google Patents

Description

  The present invention relates to a method for analyzing a defect in a concavo-convex pattern structure produced through imprinting, a method for manufacturing a concavo-convex pattern structure using the method, and an imprint system.

  Nanoimprint technology, known as microfabrication technology, uses a mold member (imprint mold) in which a fine concavo-convex pattern is formed on the surface of a substrate, and transfers the fine concavo-convex pattern to a workpiece to produce fine concavo-convex This is a pattern formation technique for transferring a pattern at an equal magnification (see Patent Document 1). In particular, with further miniaturization of wiring patterns and the like in semiconductor devices, nanoimprint technology has attracted attention in its manufacturing process and the like.

  In this nanoimprint technology, generally, an imprint resin as a workpiece is applied on a substrate by an inkjet method or the like, and the imprint resin is cured in a state where the imprint resin and the imprint mold are in contact with each other. Then, a fine uneven pattern structure formed by transferring the fine uneven pattern of the imprint mold is formed. Further, by performing the etching process on the substrate using the fine concavo-convex pattern structure thus formed as a mask, the fine concavo-convex pattern of the imprint mold can be transferred onto the substrate.

  The fine concavo-convex pattern structure formed of the imprint resin and the fine concavo-convex pattern formed on the substrate by the etching process of the substrate using the imprint resin, which is formed through the imprint process in this way. If a defect occurs in the structure, the product yield decreases. In particular, when imprint processing is performed repeatedly and repeatedly using the same imprint mold, if the same type of defect repeatedly occurs in substantially the same location, the cause of the occurrence of the defect is Since the normal imprint process can be continued by eliminating, it is important to analyze the cause of the occurrence of defects immediately.

  Conventionally, as a method of imprinting by eliminating the cause of defects that may occur due to imprinting, when forming patterned media by nanoimprinting, the same stamper (imprint mold) is used to imprint onto the resist film on the substrate. When the formed pattern is inspected and the region where the abnormality has occurred in the pattern is extracted, and the abnormality is detected in the same region as that of the region, and also in the plurality of substrates inspected immediately before that, the stamper is defective. A stamper inspection method for determining is proposed (see Patent Document 2).

  In addition, when transferring the pattern of a semiconductor integrated circuit onto a transfer substrate by imprint using an imprint mold, the defect pattern of the uneven pattern formed on the transfer substrate is inspected to form defect image data. Then, the imprint that extracts the defect contour from the image data and reflects it in the pattern data of the semiconductor integrated circuit and optimizes the dropping position of the imprint resin based on the pattern data of the semiconductor integrated circuit in which the defect contour is reflected A method has been proposed (see Patent Document 3).

US Pat. No. 5,772,905 JP 2012-18734 A JP 2012-69701 A

  In the method disclosed in Patent Document 2, when a defect of the same kind is generated in substantially the same place by a plurality of imprint processes using the same stamper (imprint mold), It is determined that the print mold is defective (stamper is defective). Then, by taking measures such as exchanging a stamper (imprint mold), it is possible to produce an effect that a patterned medium (fine concavo-convex pattern structure) with very few defects can be formed.

  Similarly, in the method disclosed in Patent Document 3, the defect outline extracted from the defect image data is reflected, and the dropping position of the imprint resin is optimized. Thereby, it is possible to produce an effect that a semiconductor integrated circuit (fine concavo-convex pattern structure) with extremely few defects can be manufactured.

  However, a fine concavo-convex pattern structure obtained through an imprint process using an imprint mold (a fine concavo-convex pattern structure composed of an imprint resin, or transferred onto a substrate by etching the substrate using it as a mask) The cause of the occurrence of defects in the fine concavo-convex pattern structure) is not limited to the defects in the imprint mold and the dropping position of the imprint resin, and various other factors are also conceivable.

  As in the method disclosed in Patent Document 2 above, when the same type of defect is continuously generated at substantially the same location, the possibility of a defect in the stamper (imprint mold) is denied. I can't. For example, when a fine uneven pattern of a stamper (imprint mold) is missing, if imprint processing is continuously performed using the stamper (imprint mold), defects of the same type are found at substantially the same location. May occur continuously. As described above, when the defect is derived from the defect of the stamper (imprint mold), the method disclosed in Patent Document 2 is effective, but the defect generated in the fine uneven pattern structure. However, when the stamper (imprint mold) is not derived from the defect, there is a problem that the stamper (imprint mold) is replaced although it is not necessary to replace it.

  Further, as in the method disclosed in Patent Document 3, the occurrence of defects is suppressed by optimizing the dropping position of the imprint resin based on the pattern data of the semiconductor integrated circuit in which the defect contour is reflected. Sometimes you can. However, in general, in order to perform imprint processing with as few defects as possible, various imprint conditions including the imprint resin dropping position are optimized. Therefore, changing the imprint resin dripping position may cause new defects unless the other imprint conditions are optimized again, and the dimensional accuracy of the resulting fine concavo-convex pattern structure There is also a risk of worsening. It may take a long time to optimize all the imprint conditions including the position where the imprint resin is dropped, so it is not necessary to reset the imprint conditions every time a defect occurs in the fine concavo-convex pattern structure. On the other hand, it may cause a decrease in product yield.

  As described above, when a defect occurs in the fine concavo-convex pattern structure manufactured through the imprint process, although various causes can be considered for the occurrence of the defect, it is described in Patent Documents 2 and 3 above. However, since the possibility is not considered, there is a problem in that the occurrence of defects may not be removed. When a defect occurs in a fine concavo-convex pattern structure manufactured through imprint processing, the cause of the defect can be identified as desired, but it is inefficient and results in a decrease in product yield. I can not.

  In view of the above problems, the present invention can efficiently identify the cause of occurrence of a defect when a defect occurs in a fine concavo-convex pattern structure produced through an imprint process using an imprint mold. An object of the present invention is to provide a defect analysis method that can be performed, a method for manufacturing a fine uneven pattern structure using the defect analysis method, and an imprint system.

In order to solve the above-mentioned problem, the present invention is a method for analyzing a defect generated in an uneven pattern structure obtained through an imprint process using an imprint mold, wherein the defect in the uneven pattern structure is analyzed . The defect-related information related to the position is acquired, and the defect-related information and information related to the occurrence of the defect, the information that can be acquired in advance from the imprint process using the imprint mold and the imprint mold are used. The concavo-convex pattern structure is compared with each of a plurality of defect factor information including at least information that can be acquired during imprint processing, and based on the comparison result and defect type information regarding the type of defect in the concavo-convex pattern structure. identify the defect causes in the body, the type of the defect, the convex portions defects and recesses defect least contains Re provides defect analysis method comprising Rukoto (invention 1).

  In the above invention (Invention 1), it is preferable that the plurality of defect factor information is information unified in a format that can be directly compared with the defect related information (Invention 2).

  In the above inventions (Inventions 1 and 2), the degree of coincidence between the defect related information and each of the plurality of defect factor information is obtained, and the cause of defect occurrence in the concavo-convex pattern structure is specified based on the degree of coincidence. It is preferable (Invention 3).

  In the said invention (invention 3), it is preferable to rank the plurality of defect factor information based on the degree of coincidence, and to specify the cause of defect occurrence in the concavo-convex pattern structure based on the ranking (invention). 4).

In the said invention (invention 1-4), it is preferable that the said defect relevant information is coordinate information which shows the position of the defect in the said uneven | corrugated pattern structure (invention 5).

In the above inventions (Inventions 1 to 5), based on the comparison result between the defect related information and each of the plurality of defect factor information, the defect type information and information on the reproducibility of defects in the concavo-convex pattern structure, It is preferable to specify the cause of the occurrence of defects in the uneven pattern structure (Invention 6).

Further, the present invention provides an imprint process for producing an uneven pattern structure through an imprint process using an imprint mold, and a defect for detecting the presence or absence of defects in the uneven pattern structure produced by the imprint process. When the defect is detected by the detection step, and the defect detection step, the defect generation cause specifying step for specifying the cause of defect generation by the defect analysis method according to the above inventions (Inventions 1 to 6 ), and the defect generation cause specification A defect occurrence cause eliminating step that eliminates the cause of defect occurrence specified by the process, and the imprint process is repeatedly performed after the defect occurrence cause is eliminated by the defect occurrence cause elimination step. A method for producing a pattern structure is provided (Invention 7 ).

Furthermore, the present invention performs imprint processing using an imprint mold, and detects the presence or absence of a defect in the imprint portion for producing the concave / convex pattern structure and the concave / convex pattern structure produced by the imprint portion. A defect detection unit, a defect-related information acquisition unit that acquires defect-related information related to the position of the defect when the defect is detected by the defect detection unit, and information related to defect occurrence, the imprint a defect factor information storing unit for storing a plurality of defect factor information including at least information obtainable during imprinting process using the pre-information that can be obtained and the imprint mold from the pre-imprinting using a mold, the Defect type information on the types of defects including at least convex defects and concave defects in the concavo-convex pattern structure A defect type information acquiring unit which Tokusuru, and a defect cause identifying unit that identifies the cause of the defect detected by the defect detector, the defect cause identifying unit is acquired by the defect related information obtaining unit The defect-related information is compared with each of the plurality of defect factor information stored in the defect factor information storage unit, and the cause of the defect is determined based on the comparison result and the defect type information. An imprint system is provided in which the uneven pattern structure is manufactured by the imprint unit after specifying and eliminating the cause of the defect specified by the defect cause specifying unit (Invention 8). ).

In the above invention (invention 8 ), it is preferable that the plurality of defect factor information is information unified in a format that can be directly compared with the defect related information (invention 9). In the above inventions (Inventions 8 and 9), the defect factor information can be acquired in advance before imprint processing using the imprint mold and during imprint processing using the imprint mold. A defect factor information acquisition unit that includes at least information and acquires information that can be acquired during imprint processing using the imprint mold among the plurality of defect factor information during imprint processing using the imprint mold (Invention 10).

In the said invention (invention 8-10 ), it further has the defect reproducibility information acquisition part which acquires the defect reproducibility information regarding the reproducibility of the defect in the said uneven | corrugated pattern structure, The said defect generation cause specific | specification part is the said defect related It is preferable to specify the cause of defect occurrence in the concavo-convex pattern structure based on the comparison result between the information and each of the plurality of defect factor information, the defect type information, and the defect reproducibility information (Invention 11 ).

  ADVANTAGE OF THE INVENTION According to this invention, when the defect arises in the fine concavo-convex pattern structure produced through the imprint process using the imprint mold, the defect analysis method capable of efficiently specifying the cause of the defect In addition, it is possible to provide a manufacturing method and an imprint system for a fine concavo-convex pattern structure using the defect analysis method.

FIG. 1 is a flowchart showing each step of a defect analysis method and an imprint method using the same according to an embodiment of the present invention. FIG. 2 is a cross-sectional view schematically showing each step of the imprint method according to the embodiment of the present invention. FIG. 3 is a cross-sectional view schematically showing another aspect of the imprint mold used in the imprint method according to the embodiment of the present invention. FIG. 4 is a plan view schematically showing the trajectory of the separation boundary line during normal imprint processing. FIG. 5 is a plan view schematically showing an example in which distortion occurs in the shape constituted by the separation boundary line during the imprint process. FIG. 6 is a perspective view showing an example of a convex defect that may occur in a fine concavo-convex pattern structure manufactured by the imprint method according to an embodiment of the present invention. FIG. 7 is a perspective view showing an example of a concave defect that may occur in a fine concavo-convex pattern structure manufactured by an imprint method according to an embodiment of the present invention. FIG. 8 is a block diagram schematically showing the configuration of the imprint system in one embodiment of the present invention. FIG. 9 is a schematic configuration diagram illustrating an imprint apparatus according to an embodiment of the present invention. FIG. 10 is a block diagram schematically showing the configuration of the control device in one embodiment of the present invention.

Embodiments of the present invention will be described with reference to the drawings.
[Defect analysis method / imprint method]
FIG. 1 is a flowchart showing each step of a defect analysis method and an imprint method using the same according to the present embodiment, and FIG. 2 is a cross-sectional view schematically showing each step of the imprint method according to the present embodiment. It is.

  In the imprint method according to the present embodiment, as shown in FIGS. 1 and 2, the fine concavo-convex pattern 12 is formed on the main surface 11 a side of the base material 11 (opposite surface side to the transfer substrate 20 during imprint processing). A formed imprint mold 10 and a transfer substrate 20 on which a fine uneven pattern structure 40 (see FIG. 2C) is formed by an imprint method are prepared (S101). The imprint resin 30 is dropped on the one surface 20a by ink jet (S102, see FIG. 2A).

In the present embodiment, as shown in FIG. 2, the imprint mold 10 has fine irregularities on the main surface 11 a (opposite surface to the transfer substrate during imprint processing, pattern formation surface) side of the flat substrate 11. The pattern 12 is formed, and a release layer (not shown) for facilitating peeling (release) from the cured imprint resin 30 is provided on the main surface 11a.
The imprint mold 10 that can be used in the present embodiment is not limited to the above-described aspect. For example, as shown in FIG. 3, a protrusion protruding from the main surface 11a ′ side of the base material 11 ′. A structure portion (so-called mesa structure portion) 13 ′ is provided, and an upper surface of the mesa structure portion 13 ′ (a surface facing the transfer substrate during imprint processing, a pattern forming surface) 13 a ′ is on the transfer substrate 20. The fine uneven | corrugated pattern 12 which should be transcribe | transferred to the imprint resin 30 may be formed.

  As a base material which comprises the imprint mold 10, as long as it is a base material normally used as a base material for imprint molds, there is no restriction | limiting in particular. For example, a quartz glass substrate, a soda glass substrate, a calcium fluoride substrate, a magnesium fluoride substrate, an acrylic glass, etc., a laminated substrate formed by laminating two or more substrates selected from these, a silicon substrate, Examples thereof include semiconductor substrates such as gallium nitride substrates; metal substrates such as nickel substrates, titanium substrates, and aluminum substrates.

  As will be described later, in the defect analysis method according to the present embodiment, in order to identify the cause of defects generated in the fine concavo-convex pattern structure 40 obtained through the imprint process, bubbles generated during the imprint process ( Information regarding bubbles) trapped in the imprint resin 30 and information regarding a separation boundary line at the time of separation between the imprint mold 10 and the cured imprint resin 30 are acquired. In order to acquire such information, an image (moving image or still image) showing the wetting and spreading behavior of the imprint resin 30 during the imprint process, and an image showing the trace of the peeling boundary line when the imprint mold 10 is peeled off. A (moving image or still image) is imaged from above the imprint mold 10. Therefore, the base material constituting the imprint mold 10 is preferably a base material that can transmit imaging light.

  Further, as another aspect of the present embodiment, the image may be taken from below the transfer substrate 20. In this case, as the base material constituting the imprint mold 10, it is not necessary to use the above-described base material that can transmit the imaging light, and the base material that cannot transmit the imaging light (for example, a nickel substrate or a titanium substrate). Alternatively, a metal substrate such as an aluminum substrate may be used.

  In the present embodiment, “transmittable” means that the imaging light can be transmitted to such an extent that an image showing the wetting and spreading behavior of the imprint resin 30 and the locus of the separation boundary line can be captured. For example, “transmittable” means that when the above-described image is captured using a visible light camera, the transmittance of light with a wavelength of 380 to 810 nm is 50% or more, preferably 80% or more. When the above-mentioned image is picked up using, it means that the transmittance of light having a wavelength of 1 μm or more is 50% or more, preferably 80% or more.

  The shape of the fine uneven pattern 12 is not particularly limited. For example, the imprint mold 10 in the present embodiment is a so-called master mold, and is used for producing a replica mold having a fine concavo-convex pattern in which the concavo-convex structure is inverted from the fine concavo-convex pattern 12 of the master mold. In this case, the shape of the fine concavo-convex pattern 12 can be the same as the shape of the fine concavo-convex pattern required in a product (for example, a semiconductor device) manufactured by imprint lithography using a replica mold.

  Further, the size of the fine concavo-convex pattern 12 is not particularly limited, and a product (for example, a semiconductor device or the like) manufactured by imprint lithography using the imprint mold 10 in the present embodiment or a replica mold manufactured therefrom. ) Can be appropriately set according to the size of the fine uneven pattern required.

  In addition, the fine uneven | corrugated pattern 12 in the imprint mold 10 is formed by electron beam lithography etc. based on the pattern design data showing the shape, dimension, etc.

  As the substrate 20 to be transferred, for example, a quartz glass substrate, a soda glass substrate, a calcium fluoride substrate, a magnesium fluoride substrate, an acrylic glass, or the like, or two or more substrates arbitrarily selected from these are laminated. Examples include a laminated substrate and the like; a semiconductor substrate such as a silicon substrate and a gallium nitride substrate; and a metal substrate such as a nickel substrate, a titanium substrate, and an aluminum substrate. It is preferable that an adhesion layer (not shown) is provided at least in a region where the imprint resin 30 gets wet during the imprint process on the surface of the transferred substrate 20 on which the fine uneven pattern structure 40 is formed.

  In addition, as another aspect of the present embodiment, an image (moving image or still image) showing the wetting and spreading behavior of the imprint resin 30 during the imprint process, and the locus of the separation boundary line when the imprint mold 10 is peeled off are used. When an image to be shown (moving image or still image) is imaged from below the substrate to be transferred 20, the substrate to be transferred 20 needs to be configured by a substrate that can transmit imaging light.

  The imprint resin 30 is dropped onto the transfer substrate 20 by an inkjet method based on a predetermined drop map. The drop map is data indicating the dropping position of the imprint resin 30, and includes the shape of the fine concavo-convex pattern 12 in the imprint mold 10, the remaining film thickness in the fine concavo-convex pattern structure 40 formed on the transferred substrate 20, and the like. It can be set appropriately according to

  Next, the fine uneven pattern 12 of the imprint mold 10 and the imprint resin 30 on the transferred substrate 20 are brought into contact with each other, and the imprint resin 30 is wetted and spread between the imprint mold 10 and the transferred substrate 20 ( S103, see FIG. 2 (b)).

  At this time, an image (moving image or a plurality of images) showing the wetting and spreading behavior of the imprint resin 30 for a predetermined time from the start of contact between the fine uneven pattern 12 of the imprint mold 10 and the imprint resin 30 on the transferred substrate 20. Still image). And the information regarding the bubble contained in the imprint resin 30 is acquired from the imaged image.

  Examples of the information related to the bubbles include position data (coordinate data) indicating a region where bubbles remain in the image, and image data such as a raster image or a vector image represented by bitmap data indicating the regions where the bubbles remain. . In addition, the area | region where a bubble remains shall mean the area | region where a bubble does not lose | disappear in the said predetermined time in the whole area | region where the imprint resin 30 spreads, an area | region where a bubble does not lose | disappear.

  In this embodiment, as will be described later, in order to identify the cause of the occurrence of a defect when a defect in the fine concavo-convex pattern structure is detected, information on the position of the defect in the fine concavo-convex pattern structure (defect The related information) and the information on the bubbles are compared. For this reason, it is preferable that the information on the bubbles is acquired as information in a format that can be compared with the defect-related information.

  The imaging time is at least the time from when the imprint mold 10 comes into contact with the imprint resin 30 until the imprint resin 30 wets and spreads over the entire surface of the imprint mold 10 on which the fine concavo-convex pattern 12 is formed. If there is, there is no particular limitation. For example, when imprinting is performed under a predetermined imprint condition using a clean imprint mold 10 (which has a good surface condition), a pattern defect due to unfilling of the imprint resin 30 does not occur (imprinting). The time (filling time) of the degree that the imprint resin 30 can be sufficiently filled in the fine concavo-convex pattern 12 of the print mold 10 is measured in advance, and imaging may be performed for the time of the filling time.

  Subsequently, the imprint resin 30 wet and spread between the imprint mold 10 and the transferred substrate 20 is cured (S104), and then the imprint mold 10 is peeled from the cured imprint resin 30 (S105, FIG. 2 (c)).

  At this time, an image (moving image or a plurality of still images) indicating the trajectory of the peeling boundary line is taken from the start of peeling between the imprint mold 10 and the imprint resin 30 to the end of peeling. And the information regarding a peeling boundary line is acquired from the imaged image.

  Generally, when the imprint mold 10 is peeled from the cured imprint resin 30, the peeling proceeds from the outer edge portion of the imprint resin 30 toward the center. That is, as shown in FIG. 4, in plan view, the boundary line (peeling boundary line) BL where the imprint mold 10 and the imprint resin 30 are in contact gradually moves toward the center C as the peeling progresses. Move. At this time, in a normal imprint process, the substantially rectangular peeling boundary line BL becomes a substantially circular shape as the peeling progresses, and follows a trajectory that gradually decreases while maintaining the shape (see FIG. 4 (a) to (c)). However, the shape formed by the peeling boundary line BL (the locus of the peeling boundary line BL) may be distorted (see FIG. 5), and at this time, a defect may occur in the fine concavo-convex pattern structure 40. This is considered to be caused by a difference in the partial peeling rate due to partial peeling of the peeling layer of the imprint mold 10 and the adhesion layer of the transferred substrate 20.

  Therefore, by acquiring information related to the peeling boundary line and comparing it with defect-related information in the fine concavo-convex pattern structure 40, the relationship between the generation of the distortion formed by the peeling boundary line BL and the cause of the defect is analyzed. can do. The information about the separation boundary line is information regarding whether or not a change such as distortion has occurred in the shape constituted by the separation boundary line BL from the start of peeling to the end of peeling. It includes coordinate data relating to the area where the change has started or image data indicating the area where the change has started to occur.

  In the present embodiment, as will be described later, when a defect of the fine concavo-convex pattern structure 40 is detected, information on the position of the defect in the fine concavo-convex pattern structure 40 is specified in order to specify the cause of the defect. (Defect related information) is compared with information related to the separation boundary line. Therefore, it is preferable that the information regarding the peeling boundary line is acquired as information in a format that can be compared with the defect-related information.

  Next, it is inspected whether or not a defect (unacceptable defect) has occurred in the fine concavo-convex pattern structure 40 formed of the imprint resin 30 formed on the transfer substrate 20 (S106). Usually, in the imprint process using the imprint mold 10, imprint conditions (imprint process capable of forming the fine concavo-convex pattern structure 40 having no unacceptable defects) are possible. The dropping position of the imprint resin 30, the contact speed between the imprint mold 10 and the transferred substrate 20, the filling time of the imprint resin 30, the amount of energy for curing the imprint resin 30, and the like are set in advance. Defects that are directly caused by the imprint conditions set optimally in this way (defects that cannot be allowed) hardly occur in the fine uneven pattern structure 40 at the beginning of the imprint process. However, a defect (unacceptable defect) occurs in the fine concavo-convex pattern structure 40 due to factors other than the optimally set imprint conditions, or an imprint process using one imprint mold 10 is performed in one process. If the process is continuously repeated for a plurality of regions of the transfer substrate 20 or a plurality of the transfer target substrates 20, a defect may occur in the fine uneven pattern structure 40 continuously. Unless such a defect occurs accidentally, it is necessary to quickly determine the cause and restart normal imprint processing in order to prevent a decrease in yield.

  The defects generated in the fine concavo-convex pattern structure 40 formed through the imprint process are roughly classified into a convex defect and a concave defect. As shown in FIG. 6, when the pattern in the fine concavo-convex pattern structure 40 is a line / space shape, as the convex defect, the convex defect 51 in which a part of one line pattern is missing, and the one line pattern is cut off. Convex part defect 52, and convex part defect 53 generated so as to straddle a plurality of line patterns. Further, as shown in FIG. 7, as the recess defect, the recess defect 61 in which a part of one space pattern is filled with the imprint resin, the one space pattern is cut off (adjacent line patterns are joined together). ) A concave defect 62, a concave defect 63 generated so as to straddle a plurality of space patterns, and the like.

  There are various possible causes for the occurrence of such convex and concave defects. For example, the cause of the occurrence of a convex defect or a concave defect is roughly classified as follows: abnormality of the used imprint mold 10, abnormality of the imprint resin 30, unfilling of the imprint resin 30 during imprint processing, imprint mold 10 And a partial defect of the fine uneven pattern structure 40 at the time of peeling.

  When a convex defect or a concave defect is generated due to an abnormality in the imprint mold 10, a specific cause of the defect is a defect in the imprint mold 10 (a defect that has been recognized in advance (a defect having a size within an allowable range)). , A defect newly generated in the middle of the imprint process, and the like, and various causes such as a defect correction portion in the imprint mold 10 can be considered.

  When a convex part defect or a concave part defect occurs due to an abnormality in the imprint resin 30, various causes such as foreign matter mixed in the imprint resin dropped on the transfer substrate 20, agglomerates of the imprint resin, etc. Possible causes.

  Moreover, when a convex part defect arises by the unfilling of the imprint resin 30, the part which the imprint resin 30 does not spread enough depending on the shape of the fine uneven | corrugated pattern 12 of the imprint mold 10 as the specific generation | occurrence | production cause. There are various causes such as a foreign matter adhering to the imprint mold 10, a region having a poor flatness on the transfer substrate 20, and an improper dropping position of the imprint resin 30.

  Furthermore, when a convex defect or a concave defect occurs due to a partial defect of the fine concavo-convex pattern structure 40 when the imprint mold 10 is peeled, a specific cause of the partial defect of the adhesion layer of the transferred substrate 20 is as follows. Various causes such as peeling, partial peeling of the release layer of the imprint mold 10, and fluctuations in the release speed of the imprint mold 10 can be considered.

  As described above, when a defect (such as a convex defect or a concave defect) occurs in the fine concavo-convex pattern structure 40, there are a plurality of possible causes for the defect, and various specific causes are considered. It is done. Therefore, if it is determined that the cause of the defect is an abnormality in the imprint mold 10 or an improper dropping position of the imprint resin 30, unnecessary cleaning or replacement of the imprint mold 10, imprint resin Unnecessary change of the dropping position of 30 etc. will be performed, and as a result, possibility that a new defect will arise cannot be denied.

  Therefore, in the present embodiment, when a defect is detected in the fine concavo-convex pattern structure 40 in S106, defect-related information related to the position of the region where the defect has occurred (defect region) is acquired (S107). Then, the defect-related information is compared with a plurality of defect factor information related to the specific cause of the defect, and the degree of coincidence between the defect-related information and each defect factor information is calculated (S108). By calculating the degree of coincidence in this way, it is possible to narrow down the defect factor information having a high probability among a plurality of pieces of defect factor information based on the degree of coincidence, so that the cause of the defect is efficiently estimated (specified). can do.

  In the present embodiment, the defect factor information includes information related to the bubbles acquired in S103 and S105 and information related to the peeling boundary line, information related to the defect position in the imprint mold 10, and a defect correction position in the imprint mold 10. Information, information on the flatness defect area in the substrate 20 to be transferred, information on the dropping position of the imprint resin 30, and the like.

  The defect factor information other than the information about the bubbles and the information about the separation boundary line is information that can be acquired in advance from the imprint processing in the present embodiment, and is acquired as information in a format that can be compared with the defect-related information. It is preferable.

  Specifically, when the defect-related information is coordinate data indicating a defect area in the fine concavo-convex pattern structure 40, each defect factor information is also preferably coordinate data that can be directly compared with the defect-related information. .

  In addition, when the defect-related information is image data indicating a defect area in the fine concavo-convex pattern structure 40 as a graphic, each defect factor information is also preferably image data that can be directly compared with the defect-related information. For example, the information related to the defect position and the defect correction position in the imprint mold 10 is preferably image data indicating the defect position and the defect correction position (a region including them) by a figure such as a rectangle or a circle. Furthermore, it is preferable that the information regarding the dropping position of the imprint resin 30 is image data indicating each dropping position of the imprint resin 30 (substantially circular regions each including a droplet size) by a figure. The image data (defect related information and image data as defect factor information) is more preferably in the same data format.

  In S107 described above, it is preferable to acquire defect type information related to the type of defect (convex defect, concave defect, pattern collapse, etc.) generated in the fine concavo-convex pattern structure 40 together with the defect-related information. Furthermore, it is more preferable to acquire information on the reproducibility of defects generated in the fine concavo-convex pattern structure 40 (information on whether or not the defect occurrence position is the same in a plurality of consecutive imprint processes). . As will be described later, the cause of the defect can be estimated in consideration of the type and reproducibility of the defect, and the cause of the defect can be estimated more efficiently.

  As a method for calculating the degree of coincidence between defect-related information and each defect factor information, for example, when the information is coordinate data, coordinate data indicating a defect region and coordinates indicating each region as each defect factor information By calculating the difference with the data and determining whether the difference is within a predetermined threshold (threshold that can be obtained experimentally or empirically), the overlap between the coordinate data is calculated. A calculation method and the like can be given.

  Also, for example, when those pieces of information are image data, a process (AND process) is performed to extract an overlapping portion between a graphic indicating a defective area and a graphic indicating each area as each defect factor information. And a method for calculating the overlapping number of the figures.

  After calculating the degree of coincidence in S108, the defect factor information is ranked based on the degree of coincidence (S109), and a likely cause of defect occurrence is estimated based on the defect factor information having a high degree of coincidence. (Specify) (S110). Then, a countermeasure is taken to prevent the fine uneven pattern structure 40 from causing defects or to reduce the number of defects generated.

  For example, when the order of information regarding bubbles is high among the defect factor information, the imprint resin is insufficient in the defected area, and the foreign matter is attached to the part in the imprint mold 10 corresponding to the area. It can be presumed that this is the cause of the highly likely defect. Therefore, in this case, it is possible to take measures such as resetting the dropping position of the imprint resin 30 and inspecting / cleaning the pattern forming surface 11a of the imprint mold 10.

  In addition, when the order of the information regarding the defect correction position in the imprint mold 10 is high, the defect occurrence cause that the defect correction in the imprint mold 10 is insufficient, the defect is likely to occur again in the defect correction portion, etc. It can be estimated that. Therefore, in this case, it is possible to take measures such as inspecting the defect correction site in the imprint mold 10 and recorrecting the defect correction site.

  Furthermore, when the order of the information regarding the defect position in the imprint mold 10 is high, it is estimated that the defect in the imprint mold 10 is of a size that the defect cannot be tolerated is a likely cause of the defect. be able to. Therefore, in this case, it is possible to take measures such as correcting a defective part in the imprint mold 10.

  Furthermore, when the order of the information regarding the dropping position of the imprint resin 30 is high, it is estimated that contamination of the ink jet head, piping, filter, etc. in the ink jet apparatus, deterioration of the imprint resin 30 and the like are likely causes of defects. can do. Therefore, in this case, it is possible to take measures such as cleaning and replacement of the ink jet head, piping, and filters, replacement of the imprint resin 30, and the like.

  Further, when the order of the information regarding the peeling boundary line is high, partial peeling of the release layer of the imprint mold 10 and partial peeling of the adhesion layer of the substrate 20 to be transferred are highly likely causes of defects. Can be estimated. Therefore, in this case, it is possible to take measures such as re-formation of the release layer of the imprint mold 10 and re-formation of the adhesion layer of the transfer substrate 20.

  In S110, it is desirable to estimate (specify) a highly likely cause of a defect in consideration of defect factor information having a high degree of coincidence and the type of defect that has occurred in the fine concavo-convex pattern structure 40. As a result, it is possible to narrow down highly likely cause of defect occurrence and efficiently estimate (specify) the cause of defect occurrence.

  For example, the defect factor information having a high degree of coincidence is the dropping position of the imprint resin 30, the type of the defect is both a convex defect and a concave defect, and the defect occurrence position changes in continuous imprint processing ( In the case where there is no defect reproducibility), it can be presumed that the most likely cause of the defect is contamination of the inkjet head, piping, filter, etc. in the inkjet apparatus or contamination of the inkjet resin.

  Similarly, the defect factor information having a high degree of coincidence is the dropping position of the imprint resin 30, the type of the defect is a convex defect, and the occurrence position is the same in the continuous imprint process (defect reproduction). If there is a possibility, it can be estimated that the most likely cause of the defect is the contamination of the ink jet resin 30 and the adhesion of the foreign matter to the imprint mold.

  Furthermore, it is possible if the defect factor information having a high degree of coincidence is the dropping position of the imprint resin 30 and the type of the defect is a concave defect, and the occurrence position is the same in successive imprints. It can be presumed that the cause of occurrence of a highly defective defect is contamination of the ink-jet resin and damage to the imprint mold by the foreign matter.

  In addition, when a defect is not detected in the fine concavo-convex pattern structure 40 in S106, the steps after S101 are repeated to produce the fine concavo-convex pattern structure 40.

  As described above, according to the defect analysis method and the imprint method using the defect analysis method according to the present embodiment, when a defect occurs in the fine concavo-convex pattern structure, there is a possibility among many causes of the defect. It is possible to estimate (specify) the cause of high defect occurrence, so it is possible to efficiently eliminate the specific cause of defect during imprint processing, and normal defect without causing a decrease in yield It is possible to continue the manufacturing process of the fine concavo-convex pattern structure that does not cause the problem.

[Imprint system]
Next, an embodiment of an imprint system capable of implementing the above-described defect detection method and an imprint method using the defect detection method will be described with reference to the drawings. FIG. 8 is a block diagram schematically showing the configuration of the imprint system in this embodiment, FIG. 9 is a schematic configuration diagram showing the imprint apparatus in this embodiment, and FIG. 10 is in this embodiment. It is a block diagram which shows the structure of a control apparatus schematically.

  As shown in FIG. 8, the imprint system 1 according to the present embodiment is manufactured by the imprint apparatus 2 that produces the fine uneven pattern structure 40 by the imprint process using the imprint mold 10, and the imprint apparatus 2. The defect detection device 3 that detects the presence or absence of a defect in the fine concavo-convex pattern structure 40, and when a defect occurs in the fine concavo-convex pattern structure 40, various information processing is performed to estimate the cause of the defect (specification) And a control device 4.

  As the imprint apparatus 2, an apparatus having a conventionally known configuration can be used. For example, as shown in FIG. 9, an ink jet unit (not shown) for dropping the imprint resin 30 discretely onto the transfer substrate 20, a substrate stage 2A on which the transfer substrate 20 is placed, and a transfer substrate 20, a mold holder 2 </ b> B that holds the imprint mold 10 so as to face the imprint mold 20, and a curing means (imprint for curing the imprint resin 30 that has contacted the imprint mold 10 and spread on the substrate 20 to be transferred. When the resin is an ultraviolet curable resin, a UV light source or the like (not shown) is positioned above the imprint mold 10 and the wetting and spreading behavior of the imprint resin 20 during imprint processing or when the imprint mold 10 is peeled off. An imprint apparatus 2 having an imaging unit 2C capable of imaging the locus of the peeling boundary line BL can be used.

  As the imaging unit 2C, an imaging device that can capture a moving image or a plurality of still images at the time of imprint processing or when the imprint mold 10 is peeled off, such as a visible light camera or an infrared camera, can be used.

  The defect detection device 3 is not particularly limited as long as it is a device that can detect defects in the fine concavo-convex pattern structure 40 formed on the transfer substrate 20. Specifically, examples of the defect detection apparatus 3 include a defect inspection apparatus (MAGICS series, MATRICS series, etc.) manufactured by Lasertec. Note that the type of defect can be specified in detail by using a scanning electron microscope in combination.

  The control device 4 has a configuration capable of data processing using image data captured by the imaging unit 2C of the imprint apparatus 2 and coordinate data / image data indicating the position of the defect detected by the defect detection apparatus 3 and the like. The computer apparatus etc. which have can be used.

  For example, as shown in FIG. 10, as the control device 4, calculation processing of information (coordinate data) related to bubbles and information (coordinate data) related to the separation boundary line from image data captured by the imaging unit 2 </ b> C of the imprint apparatus 2. CPU 4A for performing calculation processing for calculating the degree of coincidence between defect-related information and each defect factor information, calculation processing for ranking each defect factor information, etc., main storage unit 4B for storing various programs and the like, and imaging unit A computer device or the like that includes at least an auxiliary storage unit 4C that stores image data captured by 2C, information (coordinate data) on bubbles or separation boundary lines calculated therefrom, and other defect factor information can be used.

  In the imprint system 1 having the above-described configuration, the fine uneven pattern structure 40 made of the imprint resin 30 is formed on the transfer substrate 20 by the imprint apparatus 2. Then, whether or not a defect has occurred in the fine uneven pattern structure 40 is inspected by the defect detection device 3, and if a defect has occurred, the control device 4 is subjected to the defect analysis method according to the present embodiment described above. Estimate (specify) the specific cause of the defect.

  As described above, according to the imprint system 1 in the present embodiment, when a defect occurs in the fine concavo-convex pattern structure 40 manufactured through the imprint process using the imprint mold 10, a continuous imprint is particularly continuous. When defects of the same type are continuously generated at substantially the same location during processing, the specific cause of the defects can be efficiently estimated (specified), so that a decrease in yield can be suppressed.

  The embodiment described above is described for facilitating understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

  In the above embodiment, the method for analyzing the defects generated in the fine uneven pattern structure 40 made of the imprint resin 30 formed on the transfer substrate 20 has been described as an example. It is not limited. For example, a method may be used in which a defect generated in the product formed by etching the transfer substrate 20 using the fine concavo-convex pattern structure 40 made of the imprint resin 30 as an etching mask may be used.

  The present invention is useful for manufacturing an imprint mold used in a nanoimprint process for forming a fine uneven pattern, manufacturing a semiconductor device using the imprint mold, and the like.

DESCRIPTION OF SYMBOLS 1 ... Imprint system 2 ... Imprint apparatus 2A ... Substrate stage 2B ... Mold holder 2C ... Imaging part 3 ... Defect detection apparatus 4 ... Control apparatus 10 ... Imprint mold 11 ... Base material 11a ... Main surface 12 ... Fine uneven pattern 20 ... Transfer substrate 30 ... Imprint resin 40 ... Fine uneven pattern structure (uneven pattern structure)

Claims (11)

A method for analyzing defects generated in a concavo-convex pattern structure obtained through an imprint process using an imprint mold,
Obtain defect related information regarding the position of the defect in the uneven pattern structure,
The defect-related information and information related to the occurrence of defects, information that can be acquired in advance before imprint processing using the imprint mold and information that can be acquired during imprint processing using the imprint mold Each of a plurality of defect factor information including at least , and based on the comparison result and defect type information regarding the type of defect in the concavo-convex pattern structure, identify the cause of the defect occurrence in the concavo-convex pattern structure ,
The types of the defect, the defect analysis method and protrusion defects and recesses defects characterized Rukoto contains at least.   The defect analysis method according to claim 1, wherein each of the plurality of defect factor information is information unified in a format that can be directly compared with the defect related information.   The degree of coincidence between the defect-related information and each of the plurality of defect factor information is obtained, and the cause of defect occurrence in the concavo-convex pattern structure is specified based on the degree of coincidence. Defect analysis method described in 1.   4. The defect analysis method according to claim 3, wherein the plurality of defect factor information is ranked based on the degree of coincidence, and the cause of defect occurrence in the concavo-convex pattern structure is specified based on the rank. . The defect related information, defect analysis method according to any one of claims 1 to 4, characterized in that a coordinate information indicating a position of defect in the concavo-convex pattern structure. Based on the comparison result between the defect-related information and each of the plurality of defect factor information, the defect type information, and information on the reproducibility of defects in the concavo-convex pattern structure, the cause of the defect occurrence in the concavo-convex pattern structure is identified The defect analysis method according to any one of claims 1 to 5, wherein: An imprint process for producing a concavo-convex pattern structure through an imprint process using an imprint mold;
A defect detection step of detecting the presence or absence of defects in the concave-convex pattern structure produced by the imprint step;
When the defect is detected by the defect detection step, a defect occurrence cause identifying step for identifying a defect occurrence cause by the defect analysis method according to any one of claims 1 to 6 ,
A defect occurrence cause elimination step of eliminating the defect occurrence cause identified by the defect occurrence cause identification step,
The method of manufacturing a concavo-convex pattern structure, wherein the imprint process is repeated after the defect cause is eliminated by the defect cause elimination process. An imprint process using an imprint mold to produce an uneven pattern structure,
A defect detection unit for detecting the presence or absence of defects in the uneven pattern structure produced by the imprint unit;
When the defect is detected by the defect detection unit, a defect related information acquisition unit that acquires defect related information related to the position of the defect;
A plurality of defects that are information related to the occurrence of defects and include at least information that can be acquired in advance before imprint processing using the imprint mold and information that can be acquired during imprint processing using the imprint mold. A defect factor information storage unit for storing factor information;
In the concavo-convex pattern structure, a defect type information acquisition unit that acquires defect type information regarding the type of defect including at least a convex defect and a concave defect,
A defect occurrence cause identifying unit that identifies the cause of occurrence of the defect detected by the defect detection unit;
The defect occurrence cause identifying unit compares the defect related information acquired by the defect related information acquisition unit with each of the plurality of defect factor information stored in the defect factor information storage unit, and compares Based on the result and the defect type information , identify the cause of the defect,
An imprint system characterized in that, after eliminating the cause of occurrence of the defect specified by the defect occurrence cause specifying unit, the concavo-convex pattern structure is produced by the imprint unit. The imprint system according to claim 8 , wherein each of the plurality of defect factor information is information unified in a format that can be directly compared with the defect-related information. During imprint process using the pre-Symbol imprint mold, further comprise a defect factor information acquisition unit that acquires information that can be obtained during the imprinting process using the imprint mold of the plurality of defect factor information The imprint system according to claim 8 or 9 , characterized in that. It further comprises a defect reproducibility information acquisition unit for acquiring defect reproducibility information regarding the reproducibility of defects in the uneven pattern structure,
The defect occurrence cause identifying unit is configured to determine a cause of defect occurrence in the concavo-convex pattern structure based on a comparison result between the defect related information and each of the plurality of defect factor information, the defect type information, and the defect reproducibility information. The imprint system according to claim 8, wherein the imprint system is specified.

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