JP6160293B2 - Manufacturing method of scribing wheel - Google Patents

Description

The present invention relates to a method for manufacturing a scribing wheel Lumpur for scribing by pressure-connecting and rolled on a brittle material substrate.

  A conventional scribing wheel uses, as a base material, a disc made of cemented carbide or polycrystalline sintered diamond (hereinafter referred to as PCD), as shown in Patent Document 1 and the like. The PCD disk is obtained by sintering diamond particles together with cobalt or the like. The scribing wheel is constructed by cutting the circumferential edges obliquely from both sides of a disk as a base material and forming a V-shaped cutting edge on the circumferential surface. The scribing wheel formed in this way can be rotatably attached to a scribing head of a scribing device, pressed against the brittle material substrate with a predetermined load, and scribed by moving along the surface of the brittle material substrate. it can.

  Patent Document 2 discloses a cemented carbide alloy by providing a cobalt removal layer with a reduced cobalt content on the surface portion of the cemented carbide alloy before the diamond film is coated on the surface of the cemented carbide cutting tool. There has been proposed a cutting tool that improves the adhesion between the diamond film and the diamond film. Similarly, Patent Document 3 proposes a scribing wheel in which a diamond film is formed on a blade edge.

International Publication WO2003 / 51784 Japanese Patent Application Laid-Open No. 07-223101 JP 2011-012675 A

If a diamond film is formed on the surface of the cemented carbide, the durability of the cutting tool is increased. However, the cobalt contained in the cemented carbide decreases the adhesion of the diamond film, and the film peels off. However, in Patent Document 2 described above, in order to reduce the cobalt content on the surface, the cutting tool is immersed in an acidic solution such as HNO ₃ to form a cobalt removal layer on the surface of the tool substrate, and the film adheres. It was improving sex. Even in the scribing wheel, since the diamond film is coated on the scribing wheel base material disclosed in Patent Document 1, if a cemented carbide is used as the material, the adhesion of the diamond film is lowered. On the other hand, when an attempt is made to form such a decobalt layer on the scribing wheel substrate as in Patent Document 3, the decobalt treatment is also performed on the inner wall of the through hole at the center of the scribing wheel. When a brittle material substrate is scribed using a scribing wheel that has undergone such cobalt removal treatment and a diamond coating is formed on the cutting edge, cobalt is removed from the inner wall surface of the through hole, so that the tungsten carbide particles fall off. It becomes easy. For this reason, a new problem has been found that wear powder is generated in the through-hole and adheres to the pin, resulting in high rotational resistance. Further, there is a problem that the surface from which the cobalt is dropped becomes a rough surface or the mechanical strength is lowered.

The present invention was made in view of such problems, and aims to provide a scribing wheel Lumpur manufacturing method capable of solving the cobalt removal process involves problems of substrate scribing wheel To do.

  In order to solve this problem, a method for manufacturing a scribing wheel according to the present invention is a method for manufacturing a scribing wheel having a through hole into which a pin is inserted at the center position of a disc and having a cutting edge along a circumferential portion. In addition, a through hole is formed at the center position of a disc made of a cemented carbide containing tungsten carbide particles as a main component and cobalt as a binder, and a cutting edge portion is formed on the circumferential portion of the disc. A wheel base material is formed, a sealant is applied to the opening of the through hole of the scribing wheel base material, and a cobalt removal treatment is performed, and a diamond film is formed on the cutting edge portion of the scribing wheel base material by a chemical vapor deposition method. Is.

  In order to solve this problem, a method for manufacturing a scribing wheel according to the present invention is a method for manufacturing a scribing wheel having a through hole into which a pin is inserted at the center position of a disc and having a cutting edge along a circumferential portion. A scribing wheel in which a through hole is formed at the center position of a disc made of a cemented carbide containing tungsten carbide particles as a main component and cobalt as a binder, and a cutting edge portion is formed on the outer periphery of the disc. Forming a base material, subjecting the scribing wheel base material to decobalt treatment, grinding the decobalt layer on the inner wall of the through hole to remove the decobalt layer, and applying a chemical vapor to the cutting edge portion of the scribing wheel base material A diamond film is formed by a growth method.

  Here, the decobalt layer removal step may remove the decobalt layer by inserting a pin having abrasive grains fixed on the surface of the through hole of the scribing wheel base material and performing a dummy scribe.

  Here, the decobalt layer removal step may be configured to remove the decobalt layer by causing a fluid containing abrasive grains to flow through the through holes of the scribing wheel base material.

  Here, the removal process of the cobalt removal layer may be performed by removing the cobalt removal layer by performing a honing process on the through hole of the scribing wheel base material.

  According to the present invention having such a feature, a cemented carbide containing cobalt as a binder is used for a tungsten carbide particle having a particle size in a predetermined range as a scribing wheel base material, and the surface is subjected to decobalt treatment. A diamond film is formed and polished to form a scribing wheel. For this reason, the adhesion of the diamond film can be improved, the wear resistance of the scribing wheel can be improved, and the life can be extended. Further, since there is no decobalted layer in the inner diameter portion of the scribing wheel base material, there is an effect that the wear powder does not adhere to the pin and the rotational resistance is not increased and the mechanical strength is not lowered.

FIG. 1A is a front view of a scribing wheel according to the first and second embodiments of the present invention. FIG. 1B is a side view of the scribing wheel according to the first and second embodiments. FIG. 2A is a diagram illustrating a state in which a sealing material is applied to both ends of the through hole of the scribing wheel base material. FIG. 2B is a diagram showing a state in which a sealing material is applied to both ends through pins through through holes of a plurality of scribing wheel base materials. FIG. 3A is an enlarged cross-sectional view of a ridge line portion of a blade edge according to the first and second embodiments. FIG. 3B is an enlarged cross-sectional view of a ridge line portion after polishing according to the first and second embodiments. FIG. 4 is a diagram showing an example of the weight percentage of cobalt in the through hole of the first and second embodiments before and after the scribing wheel base material and the cobalt removal treatment. FIG. 5 is a graph showing changes in scribe resistance when 100 m of scribe is applied to each wheel shown in FIG.

  FIG. 1A is a front view of a scribing wheel according to the first and second embodiments of the present invention, and FIG. 1B is a side view thereof. When manufacturing a scribing wheel, a cemented carbide is used for the material of the disk used as a scribing wheel base material. This cemented carbide is formed by sintering using tungsten carbide (WC) particles as a main component and cobalt (Co) as a binder. First, a through hole 12 serving as a shaft hole is formed in the center of the cemented carbide disc 11 as shown in FIG. 1A.

  Next, a rotating shaft such as a motor is communicated with the through-hole 12 and rotated around the central axis 12a of the disk 11, and the entire circumference of the disk 11 is polished from both sides, as shown in FIG. 1B. And a cutting edge having a substantially V-shaped vertical section having a ridge line. A scribing wheel base material 14 having the V-shaped slope formed in this way as a polishing surface 13 is formed.

  Here, as for the cemented carbide of the scribing wheel base material 14, the average particle size of the tungsten carbide (WC) particles as the main component is 0.5 μm or more, preferably 0.7 μm or more, and 2.0 μm or less, preferably Select a cemented carbide using fine particles of 1.2 μm or less. If the particle size of tungsten carbide particles, which is a material of cemented carbide, is too small, the bonding strength between tungsten carbide particles is weak when sintered to form a cemented carbide, resulting in a decrease in strength of the cemented carbide. To do. For this reason, the diamond film formed on the cemented carbide easily peels off together with the surface layer of the cemented carbide, and the life of the film is reduced. If the particle diameter of the tungsten particles is too large, the gap between the tungsten carbide particles becomes large. Therefore, the strength of the cemented carbide surface layer is reduced by removing cobalt, and the diamond film is easily peeled off.

  The weight ratio of cobalt, which is a cemented carbide binder, is, for example, 3% or more, preferably 4% or more, and 8% or less, preferably 6% or less. If the cobalt content is too large, the strength of the cemented carbide surface layer is greatly reduced by the removal of cobalt, and the diamond film is easily peeled off. Also, if the cobalt content is too small, the gap between the tungsten particles is reduced after the cobalt is removed. Therefore, it is difficult to sufficiently attach the diamond particles as a nucleus when forming the diamond film, and the film is uniformly formed. It becomes difficult to form.

  Next, the decobalt treatment and the formation of the diamond film will be described. First, the polishing surface 13 of the cutting edge of the scribing wheel base material 14 is roughened in advance. By making the polished surface 13 rough, diamond particles serving as nuclei are likely to adhere.

When cobalt is present on the surface of the cutting edge of the scribing wheel substrate, when the diamond film is formed, the diamond is graphitized and it is difficult to form the film. On the other hand, when the cobalt is removed, the gaps between the tungsten particles become minute irregularities, so that the diamond particles serving as nuclei are easily attached. Therefore, a decobalt process is performed to remove cobalt on the surface layer of the polished surface 13 where at least the diamond film is formed. At this time, as shown in FIG. 2A, the sealing material 15 is applied to both sides of the opening portion of the through hole 12 of the scribing wheel base material 14, and pretreatment is performed in advance so that the acidic liquid does not penetrate into the through hole 12. Further, as shown in FIG. 2B, the side walls of the plurality of scribing wheel base materials 14 are brought into contact with each other, the pins 16 are passed through and fixed therein, and then the sealing material 15 is applied only to the wall surfaces of the scribing wheel base materials 14 at both ends thereof. May be applied. Here, while the sealing material 15 has high acid resistance, a resin such as an acrylic resin, an epoxy resin, a phenol resin, or nitrocellulose that can be easily removed using a solvent is used. And immersing the scribing wheel base 14 in an acid solution comprising an aqueous solution such as HNO _3, to form the cobalt removal layer on the surface of the scribing wheel base. The thickness of the decobalt layer formed at this time increases as the time of immersion in the acid solution increases, but the average thickness is, for example, 1 to 15 μm, preferably 1 to 10 μm, more preferably 1 to 7 μm. Say it. In this case, even if the scribing wheel base material 14 is immersed in the acid solution, the liquid does not enter the inside of the through hole 12, so that the decobalt treatment is not performed on the inner surface of the through hole. It should be noted that the cobalt removal treatment needs to be performed only at least on the blade edge portion where the diamond film is formed, and the seal treatment may be performed on a portion where the diamond film is not formed, such as around a through hole.

  After performing the cobalt removal treatment in this way, the scribing wheel base material 14 is immersed in a solvent for melting the resin, and the sealing material 15 is removed.

  Next, as shown in the enlarged cross-sectional view of the edge portion of the cutting edge in FIG. 3A, after forming diamond as a core having a particle size of submicron or less on the polished surface 13, a diamond thin film is formed by chemical vapor deposition (CVD). Grow. In this way, the diamond film 17 having a film thickness of, for example, 20 to 30 μm is formed on the V-shaped slope portion of the scribing wheel by chemical vapor deposition. Then, it grind | polishes so that a front-end | tip part may become sharp. For polishing, various polishing methods such as mechanical polishing are performed. For example, it may be performed by mechanical polishing using an abrasive. FIG. 3B is a partially enlarged sectional view showing the state after the polishing. In this way, the polishing may be performed at an obtuse angle of, for example, about 5 ° with respect to the original diamond film 17. Then, the surface including the circle formed by the ridge line after polishing is made perpendicular to the through hole 12. The region to be polished here may be only a belt-like portion including the ridge line in the center. A region with a width w in FIG. 3B indicates a polishing region at the tip, and for example, the width w is 10 to 20 μm.

  By polishing in this way, compared with the conventional scribing wheel, all the portions in contact with the brittle material substrate become diamond, and the roughness of the ridgeline can be made fine. By removing cobalt on the surface of the scribing wheel base material 14, diamond particles serving as nuclei are easily attached, and thus the diamond film is difficult to peel off. Therefore, the wear resistance of the scribing wheel can be improved. Therefore, when the scribing wheel is used to scribe and divide the brittle material substrate, the end face accuracy of the cut surface of the brittle material substrate is improved, and the end face strength can be improved accordingly. Therefore, the scribing wheel of the present invention is suitable for scribing a hard brittle material substrate such as a ceramic substrate.

  Next, the manufacturing method of the scribing wheel by the 2nd Embodiment of this invention is demonstrated. In the first embodiment described above, the liquid is prevented from entering the through-hole when the entire scribing wheel base material is immersed in the acidic liquid. In this embodiment, the entire scribing wheel base material 14 is immersed in the acidic liquid. After that, the inner surface of the through-hole 12 is polished to remove the decobalt layer on the inner wall surface. The thickness of the layer to be polished depends on the depth of the part from which the cobalt has been removed. For example, the thickness is 1 to 15 μm from the surface, preferably 1 to 10 μm, more preferably 1 to 7 μm. Processes other than the removal of the cobalt removal layer are the same as those in the first embodiment. This polishing includes, for example, the following method, but is not limited to the following method as long as the decobalt layer on the inner surface of the through hole can be removed.

  The first method is a method of performing a dummy scribe using a pin having abrasive grains fixed to the surface. As a method of fixing the abrasive grains to the surface of the pin, for example, there is a method (electrodeposition) in which diamond particles as abrasive grains are fixed to the surface by electroplating the surface with a nickel plating solution in which diamond particles are dispersed. Hereinafter, a pin in which abrasive grains are fixed to the surface by electrodeposition is also referred to as an electrodeposition pin. This electrodeposition pin is penetrated through the through hole 12 of the scribing wheel 10 to perform a predetermined distance dummy scribe. By doing so, the inner wall of the through hole 12 can be polished by, for example, about 5 μm inward from the surface of the inner wall to remove the surface decobalt layer in the through hole 12. The surface roughness (arithmetic mean roughness Ra) of the surface layer after this treatment is 0.35 μm or less, preferably 0.30 μm or less. This is because when the arithmetic average roughness Ra is larger than 0.35 μm, the rotational resistance becomes high when scribing with a normal pin inserted.

  The second method is a method of polishing using loose abrasive grains such as wire wrap. By pouring a fluid (slurry) containing an abrasive into the through hole 12 of the scribing wheel 10 and sliding a wire or the like, the inner wall can be polished and the decobalt layer can be removed.

  The third method is a honing process using fixed abrasive grains. A honing process for polishing the inner wall of the through hole is performed to remove the cobalt removal layer on the surface of the inner wall. Even in this manner, the cobalt removal layer can be removed from the inner wall of the through hole 12 of the scribing wheel 10.

  Next, FIG. 4 shows the weight percentage of cobalt of the scribing wheel base material in the surface portion before and after performing the cobalt removal treatment of the scribing wheel base material according to the first and second embodiments. Further, in the case of the first embodiment in which the cobalt removal treatment is performed after applying the sealing material to the surface, and the second embodiment in which the cobalt removal layer is removed by polishing the inside of the through hole with an electrodeposition pin. Also shown in FIG. 4 is the weight percent of cobalt in the through-holes in the form. According to this measurement result, the scribing wheel base material 14 itself has a cobalt amount of about 4%, for example, and becomes less than 1% by performing the cobalt removal treatment. In FIG. 4, only one measured value of the cobalt amount after the decobalt treatment is shown, but this is because there was a sample with a small amount of cobalt that could not be detected. In addition, the amount of cobalt in the through hole is about 2% when sealing is performed so that acidic liquid does not enter the through hole, and the amount of cobalt is about 3.5% when the inside of the through hole is polished. .

  FIG. 5 shows a scribing resistance value of 0 m (at the start of scribing) and a scribing resistance of 100 m when scribing with a scribing load of 500 g using these scribing wheel base materials and attaching a diamond film. It is a graph which shows the change of scribe resistance value. When the cobalt removal treatment is performed also in the through hole of the scribing wheel, the scribe resistance is greatly increased when the scribe distance is 100 m as shown by the straight line B in FIG. However, when the scribing wheel is not subjected to cobalt removal treatment (straight line A), when the cobalt removal seal is formed in the through hole (straight line C), or when polished (straight line D), the scribe resistance changes so much. Not done. For this reason, according to the present invention, it is possible to realize a scribing wheel in which wear powder does not adhere to the pin and rotation resistance increases and mechanical strength does not decrease.

  The scribing wheel according to the present invention can provide a scribing wheel having high wear resistance and capable of cutting a brittle material substrate having high end face strength, and can be suitably used for a scribing apparatus.

DESCRIPTION OF SYMBOLS 10 Scribing wheel 11 Disc 12 Through-hole 13 Polishing surface 14 Scribing wheel base material 15 Sealing material 16 Pin 17 Diamond film

Claims (5)

A method of manufacturing a scribing wheel having a through hole into which a pin is inserted at the center position of a disc and having a cutting edge along a circumferential portion,
A through hole is formed at the center position of a disc using a cemented carbide containing tungsten carbide particles as a main component and cobalt as a binder,
A scribing wheel base material is formed by forming a cutting edge portion on the circumferential portion of the disc,
Applying a sealant to the opening of the through-hole of the scribing wheel base material to give a cobalt removal treatment,
A manufacturing method of a scribing wheel, wherein a diamond film is formed on a cutting edge portion of the scribing wheel base material by chemical vapor deposition. A method of manufacturing a scribing wheel having a through hole into which a pin is inserted at the center position of a disc and having a cutting edge along a circumferential portion,
A through hole is formed at the center position of a disc using a cemented carbide containing tungsten carbide particles as a main component and cobalt as a binder,
A scribing wheel base material is formed by forming a cutting edge portion on the circumferential portion of the disc,
Applying a cobalt removal treatment to the scribing wheel base material,
Grinding the decobalt layer on the inner wall of the through hole to remove the decobalt layer;
A manufacturing method of a scribing wheel, wherein a diamond film is formed on a cutting edge portion of the scribing wheel base material by chemical vapor deposition. The removal process of the cobalt removal layer includes:
The manufacturing method of the scribing wheel of Claim 2 which removes a cobalt removal layer by inserting the pin by which the abrasive grain was fixed to the surface in the through-hole of the said scribing wheel base material, and performing a dummy scribe. The removal process of the cobalt removal layer includes:
The method for producing a scribing wheel according to claim 2, wherein the decobalt layer is removed by allowing a fluid containing abrasive grains to flow through the through hole of the scribing wheel base material. The removal process of the cobalt removal layer includes:
The manufacturing method of the scribing wheel of Claim 2 which removes a cobalt removal layer by performing a honing process to the through-hole of the said scribing wheel base material.