JP6148717B2 - Rotor disk - Google Patents

Description

  The present invention relates to a rotor disk for a rotor of a vacuum pump and a method for manufacturing such a rotor disk.

  An exemplary turbomolecular vacuum pump has a rotor with a rotor shaft. The rotor shaft is provided with a plurality of roller discs offset in the axial direction, or exactly one roller disc is provided on the rotor shaft. Each rotor disk has a plurality of blades distributed in the circumferential direction. To ensure vacuum technical performance values, such as suction performance and compression ratio (which are as constant as possible over the radial extension of each blade), each blade is directed radially outward. It is known to be tapered and formed into a conical shape. That is, the blades are thicker radially inward and gradually thinner radially outward. The manufacture of a rotor disk with blades so formed is complex and requires costly tool machines and tools.

U.S. Pat. No. 3,623,826A German Patent Application Publication No. 2046693A1 German Patent Application Publication No. 2923632A1 European Patent Application Publication No. 0965561A2

  The object of the present invention is to simplify the manufacture of a rotor disk for the rotor of a vacuum pump.

  This problem is solved by the rotor disk according to claim 1. In particular, at least one blade is solved by having a thickness profile with at least one step separating two parts of the blade.

  The rotor disk according to the invention can be manufactured particularly simply. This is because when a thickness profile with a step is allowed, the path of movement of the processing tool and the form of the tool can obviously be simplified. For example, this allows the blades to be produced by only one-dimensional processing steps in one possible embodiment of the invention, i.e. the tool follows a single linear path during the processing steps. Only moved. This replaces, for example, a complete three-dimensional processing path (which requires a complex and cost intensive processing machine with multiple processing degrees of freedom).

  The prior art starts from the point that a rotor disk with blades formed continuously (ie without stages) provides the best vacuum technical performance, as is the case in, for example, a turbine. In accordance with the invention, it has been found that even if the vanes with stages reduce the performance of the vacuum pump relative to that formed continuously, it is only marginal. On the contrary, a significant simplification of the manufacturing process of the rotor disk according to the invention takes place, which clearly reduces the manufacturing costs.

  Thus, the present invention represents a reversal from the image that only a rotor disk with continuous blades or blades that always taper will be able to achieve sufficient vacuum technical performance values. In doing so, overcoming the preconceived invention presents significant saving potential in the production of rotor disks.

  The number of steps is basically arbitrary according to the invention. With a large number of steps, it is possible to approach the ideal blade shape, at least in terms of theory, for example, tapering outward in the radial direction. In that case, the advantage according to the present invention of simple manufacturability is basically guaranteed. Even if multiple stages are associated with high manufacturing costs.

  Preferably, all the blades of the rotor disk are formed identically. However, this is not essential.

  In one embodiment, the thickness profile is defined by the plane portions of the blades facing each other. The plane portion has at least an element whose normal is parallel to the axial direction element, that is, an axis of rotation of the rotor disk. Each flat surface portion is different from the narrow surface portion of the blade. This extends for example perpendicular to the axis of rotation. The narrow surface portion and the flat surface portion are at least different from the front surface portion of the blade. This means the restricting portion of the blade that faces radially outward in the radial direction. In so doing, the transition between the flat part, the narrow part and the front part is, however, inevitably discontinuous, i.e. not formed, for example, as a sharp edge, but such a configuration is in accordance with the invention Is possible.

  In another embodiment, the step is formed in the flat portion between the radially inner thick portion and the radially outer thin portion of the vane. In this embodiment, the vanes have a thickness that becomes thinner towards the outside in the radial direction. In this case, such a decrease is not continuous but is gradual.

  In at least one of the portions, at least one of the planar portions can be flat. This further simplifies the manufacturing process.

  The thickness is particularly constant over the radial extension of each part. This also simplifies the manufacturing process. This is because, for example, the degree of freedom of the machine can be omitted during processing.

  Both these parts of the vane can have a single parallelogram shaped cross section each. The cross section, however, can also be different from the parallelogram. The cross-section can be, for example, rectangular, trapezoidal, irregular triangular or polygonal, and / or can have rounded restriction lines. A cross section is understood to be a cross section that penetrates the blades in a direction perpendicular to the radius of the rotor disk.

  In one embodiment, the blades are inclined with respect to a plane that is essentially perpendicular to the axis of rotation. In this case, each part has one attachment angle, and the attachment angle of the radially inner part is larger than the attachment angle of the radially outer part. The wings can in other words be “twisted”. In doing so, being continuously “twisted” can be brought closer or replaced by something like a step. This is to further simplify the manufacturing process, but to ensure a sufficiently good vacuum pump performance value. In the frame of this disclosure, an angle with respect to a plane that changes in a direction perpendicular to the rotation axis is taken as an attachment angle.

  In one embodiment, the step has at least a chamfer and / or a rounded portion. This avoids sharp edges and / or improves blade stability.

  The problem is a vacuum pump, in particular a turbomolecular pump, which is provided in an overlapping manner and has at least one rotor with a plurality of independent rotor disks mounted on the rotor shaft, or just one independent mounted on the rotor shaft This is solved by a vacuum pump having a rotor with a rotor disk. Here, at least one rotor disk is formed by the method according to the invention.

  A further object is to provide a vacuum pump having a plurality of independent rotor disks mounted on the rotor shaft, or having at least one rotor with exactly one independent roller disk mounted on the rotor shaft, provided in an overlapping manner. A method of manufacturing a rotor, in particular for a turbomolecular pump, or a method of manufacturing such a vacuum pump, in particular a turbomolecular pump, in which the rotor disk is manufactured in one piece from a disk made of solid material. , And in this case, the disk is provided with a material removal and distributed in the circumferential direction to form a plurality of vanes, wherein at least one vane moves radially inwardly from the inside to the outside Given a thickness profile, this thickness profile separates the two parts of the blade. It is solved by a method having the steps.

  The disc can in particular be formed as a circular disc or a cylinder disc and, alternatively or additionally, has a central, in particular circular opening, before the formation of the vanes. This is used, for example, for the penetration of the rotor shaft. Material removal can include a cutting process (machining process) such as sawing or turning, for example, but other forms are possible.

  In one embodiment, the tool performs at least one processing step for the formation of each blade. This process involves the radial elements of the tool entering the disc. In this embodiment, it is possible that only one tool movement axis is intended. In so doing, it is sufficient that the disk is simply rotated relative to the tool, especially about its axis of rotation, in order to form a plurality of blades. The process requires in this case only two ground degrees. This makes the opportunity for manufacturing particularly cheap.

  Alternatively or additionally, an axial element of the tool can be passed through the disk corresponding to the blade mounting angle. Again, the disc can be easily rotated for the production of each subsequent blade. According to one embodiment, the tool has at least one circular saw blade. Here, there is an advantage that the processing base, that is, a region corresponding to the processing depth in the radial direction can be formed straight.

  The tool can have two simultaneously active double or twin tools that are spaced apart from each other. These single tools are, for example, connected to each other so as to rotate, rotationally fixed or non-rotatably connected to each other, connected via gears, and having parallel axes of rotation, and / or It is possible to have a coincident axis of rotation. A tool, in particular a single tool, can have one or more of, for example, a saw, a saw blade, a milling machine (German: Fraesser), a double saw (Doppelsage), and / or a twin saw (Zwillingsage). The spacing between the single tools determines the thickness of each part of the blade. In so doing, the spacing can be adjustable for the production of parts of different thickness and / or tools with different spacing between single tools can be retained. .

  In one embodiment, single tools can be provided in parallel for the formation of a vane portion having a thickness that is constant over its radial extension. “Parallel”, in this case, for example, relates to the rotation axis of each single tool, relates to the processing surface of the single tool, and / or relates to the direction or plane of extension of the single tool. Is possible. The machine for carrying out the method according to the invention is thereby further simplified.

  In a further development, a plurality of processing steps are carried out one after the other in order to form individual parts of each blade, wherein these processing steps are mutually connected with respect to the radial processing depth. Is different. In this case, the thickness profile step can be formed under each radial processing depth or with each radial processing depth. The process can alternatively or additionally have different spacing between single tools. Each part of the blade can be provided with a treatment process, for example.

  Moreover, different tools and / or different adjustments of the tools can be used for individual processes. Differences can exist, for example, in single tool type, number of teeth, diameter, and / or spacing.

  In one embodiment, a single double tool or twin tool with two simultaneously active single tools spaced apart from each other is used for the individual processing steps. In so doing, the spacing is adjusted differently for the individual processing steps. The manufacturing process is thereby accelerated. For example, each processing step can be performed for the first time on a plurality of blades of the rotor disk, in particular on all blades. This is done before further processing steps are carried out for the blade.

  In another embodiment, the tool moves at least essentially perpendicular to the axis of rotation for the individual processing steps to form different mounting angles for the individual parts of each blade. Different orientations with respect to the plane are selected. This makes the mounting angle not dependent on the tool itself but on its orientation. In other words, the tool can be adjusted to each desired mounting angle.

  The method can be further improved, for example, corresponding to the above-described embodiments of the apparatus, and conversely, the rotor disk and the vacuum pump are manufactured corresponding to the individually described tool embodiments. Or can be developed.

  The present invention relates to a rotor of a vacuum pump, particularly a turbo molecular pump. It has one rotor shaft, to which the rotor shaft is fitted with just one independent rotor disk formed according to the invention or provided in an overlapping manner, each formed according to the invention, Multiple independent rotor disks are installed. In particular (but not limited to) when the rotor has just one rotor disk, the vacuum pump, turbomolecular pump stage with rotor, in the pump direction, one molecular pump stage, eg Holbeck type Things can continue. In doing so, the rotor shaft of the turbomolecular pump stage simultaneously forms the axis of the molecular pump stage. That is, the turbomolecular pump stage and the molecular pump stage have one common axis in such an embodiment.

  Further embodiments are described in the dependent claims, the description and the drawings.

  The present invention will now be described by way of example only with reference to the accompanying drawings.

Cross section of the vacuum pump according to the invention Isometric view of the rotor disk according to the invention Top view of the rotor disk of FIG. Sectional view of the rotor disk of FIG. Figure 2 shows two parts of a rotor blade according to the invention. Have different mounting angles. Process for forming rotor blades according to the invention Another process for the formation of part of the rotor blades according to the invention Tool illustration. According to the invention, it is processed in a direction corresponding to the blade mounting angle.

  Formed as a turbomolecular pump 10 shown in FIG. 1, the vacuum pump comprises a pump inlet 34 surrounded by an inlet flange 32 and a plurality of pump stages for transporting gas spanning the pump inlet 34 to a pump outlet 35. Have. The turbomolecular pump 10 has a stator having a static (or stationary, German) housing 36 and a rotor provided in the housing 36. The rotor has a rotor shaft 4 that is rotatably supported about a rotation axis R.

  The turbomolecular pump 10 has a plurality of turbomolecular pump stages connected in series to each other. This includes a plurality of turbomolecular rotor disks 12 connected to the rotor shaft 14 and a plurality of turbomolecular stator disks 38 provided between the rotor disks 12 in the axial direction and fixed to the housing 16. Have. These are held at a desired axial distance from each other by the spacer ring 40. The rotor disk 12 and the stator disk 38 provide the suction area 42 with an axial pumping action directed in the direction of the pump direction P.

  For this purpose, the turbomolecular pump 10 has three Holbeck pump stages that are nested in each other in the radial direction, are serially connected to each other and perform a pumping action. The member on the rotor side of the Holbeck pump stage has two holbeck rotor sleeves 46 and 48 which are fixed to the rotor shaft 14 and are carried by the rotor shaft 14. These are oriented coaxially with respect to the rotation axis R and are connected in a nested manner. Further, holbeck stator sleeves 50 and 52 having a cylinder side shape are provided. They are likewise oriented coaxially with the axis of rotation R and are connected in a nested manner. The pumping surfaces of the Holbeck pump stage are each formed by radial side surfaces facing each other forming a narrow radial Holbeck gap, ie the Holbeck rotor sleeves 46, 48 and the Holbeck stator sleeve 50. , 52 are formed by the respective side surfaces. In this case, each surface that produces the pump effect (in this case, for example, that of the Holbeck rotor sleeve 46 or 48) is formed smoothly. In that case, the pump effect surface located opposite each Holbeck stator sleeve 50 or 52 has a structured part with a plurality of grooves that transition axially around the rotation axis R in a screw line shape. Yes. In these grooves, the gas is conveyed by the rotation of the rotor, and pumping is thereby performed.

  The rotor shaft 14 is rotatably supported by a roller bearing 54 in the area of the pump outlet 35 and a permanent magnet bearing 56 in the area of the pump inlet 34.

  The permanent magnet bearing 56 has a rotor-side bearing half 60 and a stator-side bearing half 58. Each of these has one ring stack. The ring lamination part is composed of a plurality of rings of permanent magnets laminated together in the axial direction. In this case, the magnet rings face each other while forming a radial bearing gap.

  An emergency or safety support portion is provided inside the permanent magnet support portion 56. This is formed as a non-lubricated roller bearing and idles without contact during normal operation of the vacuum pump. The rotor is then engaged only when it is excessively deflected in the radial direction with respect to the stator, forming a radial stopper for the rotor. This prevents the rotor-side structure from colliding with the stator-side structure.

  In the region of the roller support portion 54, a conical splash nut 64 is provided on the rotor shaft 14. This has an outer diameter that increases towards the roller bearing 54. The splash nut is in sliding contact with a working medium reservoir skimmer having a plurality of absorbent discs containing a working medium such as a lubricant (German: Abstriefer). During operation, the working medium is transferred from the working medium reservoir to the rotating splash nut 64 via the skimmer by the capillary effect. And then, it is conveyed toward the roller support part 54 in the direction of the outer diameter which the splash nut 64 becomes large along with the splash nut 64 with a centrifugal force. Therefore, for example, it exhibits a lubricating function.

  The turbo molecular pump 10 has a drive motor 68 for rotating the rotor. The rotor is formed by a rotor shaft 14. A control unit not shown drives the drive motor 68.

  Each rotor disk 12 has a plurality of blades 16 distributed in the radial direction. In FIG. 1, which is a partial view, two blades 16 of the rotor disk can be seen. Each vane 16 has two steps 22 (only one step 22 can be seen in FIG. 1). These separate the two parts of the vane 16. The stages 22 of the blades 16 of the rotor disk 12 are all provided at the same interval with respect to the rotation axis R in this example. However, it is also possible that the intervals are different. In addition, the stage 22 transitions parallel to the rotation axis R. In this case, other transitions, for example, transitions inclined with respect to the rotation axis, are possible.

  FIG. 2 shows the rotor disk 12. This is for use, for example, in the turbomolecular pump 10 of FIG. The rotor disk 12 has a plurality of blades 16 distributed in the circumferential direction. These occur (beginning at) the rotor hub 27 radially inward of the rotor hub 27 and extend radially outward.

  Each blade 16 has two narrow surface portions 23. They bound the vanes 16 in the axial direction and extend perpendicular to the axis of rotation R. In addition, the vane 16 has two planar portions 24 and a front face 25 directed radially outward.

  Each vane 16 has two portions 18, 20 that are continuous with each other in the radial direction. These are defined by a plurality of steps 22 formed by the planar portion 24. The radially inner portion 18 is formed thicker than the radially outer portion 20. The step 22 results in a shape in which the vanes 16 narrow, so to speak radially outward, and thus continuously taper radially outward, as is known from the prior art. It will be brought closer.

  Each of the portions 18 and 22 has two flat portions 24 that are flat and parallel to each other. The cross section of each portion 18, 20 that runs perpendicular to the radius of the rotor disk 12 has a parallelogram shape. This is because the blades 16 are oriented obliquely, and the narrow surface portion 23 of the blades 16 is located in a plane that moves perpendicular to the rotation axis R (see also FIG. 5).

  The blades 16 are oriented obliquely with respect to a plane perpendicular to the rotation axis R, and the mounting angle (German: Anstelwinkel) is larger in the radially inner portion 18 than in the radially outer portion 20. It has. The angular ratio of the blades 16 is explained in detail in FIG.

  In FIG. 3, the rotor disk 12 of FIG. 2 is shown as a top view. The vanes 16 are provided with portions 18, 20 separated by a step 22 distributed evenly over the periphery. For this reason, the blades 16 are formed identically.

  In FIG. 4, the rotor disk 12 is shown as a cross-sectional view along the partial plane S shown in FIG. The narrow surface portions 23 of the plurality of blades 16 facing each other are oriented parallel to each other and perpendicular to the rotation axis R.

  FIG. 5 shows the relative orientation of the radially inner portion 18 with respect to the radially outer portion 20. FIG. 5 shows a simplified side view of the blade 16 from the radially outer side.

  The radially inner portion 16 has a greater thickness than the radially outer portion 20. Moreover, the radially inner part 18 has a mounting angle A1. This angle is measured with respect to a plane perpendicular to the rotation axis R and parallel to the narrow surface portion 23 of the blade 16 and is larger than the mounting angle A2 of the radially outer portion 20. Portions 18 and 20 are separated by a step 22, of which a step plane that is essentially parallel to the drawing plane can be seen.

  The radially outer portion 20 is represented as a parallelogram. This parallelogram is narrower than the parallelogram representing the radially inner portion 18. The portions 18 and 20 end at one common point in the tangential direction, i.e. right or left in the figure. This achieves the maximum difference between the mounting angles A1 and A2 of the parts 18,20. This again leads to an advantageous overlap ratio of the rotor disk 16. Moreover, the vanes 16 can be formed by two linear (German) processing steps.

  However, different mounting angles A1, A2 of both parts 18, 20 are not essential. That is, the attachment angles A1 and A2 of both portions can be the same size.

  The inventive method for manufacturing the rotor disk 12 is described in detail in FIGS. 6 and 7 are top views of the disk parallel to the axis of rotation of the disk, while FIG. 8 is a view in the radial direction and thus perpendicular to the axis of rotation of the disk.

  In FIG. 6, a double tool with two saw blades 28 is introduced radially in one disk 26 (used as a semi-finished product for manufacturing the rotor disc 12) or Indicates whether it can be passed through in the axial direction. The saw blade 28 then has the maximum radial processing depth. This processing depth corresponds to the radially inner end of the blade 16 and thus corresponds to the blade base. The saw blades 28 are spaced from one another by a thickness corresponding to the radially inner portion 18. The saw blades 28 can be non-rotatably mounted on a common drive shaft or can be driven independently of each other.

  After the processing process that can be seen in FIG. 6 (hereinafter referred to as the first processing process), the second processing process (which can be seen in FIG. 7) is carried out. In FIG. 7, the double tool (or double tool, German: Doppelwerkzeug) has two saw blades 28. These saw blades have a spacing that is smaller than the spacing between the saw blades 28 of FIG. The smaller spacing between the saw blades 28 provides a thinner thickness in the second, radially outer portion 20. Due to the formation of the radially outer portion 20, the second processing step has a smaller radial processing depth than in the first processing step. As a result, a radially outer portion 20 is formed. This portion is thinner than the radially inner portion. The radially inner part is “stood up” by the second process. Between the portions 18, 20, two steps 22 remain. That is, one step 22 remains on each planar portion 24. These separate the portions 18, 20 in the radial direction.

  FIGS. 6 and 7 show the manufacturing concept according to the invention in that the parts 18 and 20 thus manufactured have a flat part that runs parallel to the axis of rotation of the disc, ie a mounting angle of 90 °. Used for representation only.

  In the manufacturing method according to FIGS. 6 and 7, how the blade 16 can be manufactured with a mounting angle A2 of a value of less than 90 ° of the radially outer part 20 cited here by way of example. Is shown in FIG. The two saw blades 28 are arranged in parallel and spaced from each other, corresponding to the thickness of the radially outer portion 20. The saw blade 28 is oriented to correspond to the desired mounting angle A2 of the outer portion 20 relative to the axis of rotation of the disk 26 or to a plane that runs perpendicular to the axis of rotation. To form the radially outer portion 20, for example, a plurality of saw blades 28 provided on one common drive shaft are moved through the disk 26 in the process direction Q, or with respect to the figure. You can enter vertically. In doing so, the maximum radial processing depth is maintained or achieved.

  The tool can basically be rotated especially continuously about the axis in the radial direction, ie perpendicular to the view in FIG. 8, during the course of processing, while the tool is It can be entered into or passed through the disk 26. In doing so, the tool is not rotated over a predetermined radial path, which results in alternating straight parts and intersecting parts or parts that are bent by a particularly small angle. Preferably, however, each is a linear tool motion.

  The processing process shown in FIG. 8 corresponds to the second processing process of FIG. The first process for forming the radially inner portion 18 can be carried out analogously to this second process. In that case, however, the saw blade 28 is oriented, for example, at the mounting angle A1 in FIG. 5 and can be moved through the disk 26, for example, along the processing direction Q, which is correspondingly steep. Is possible. The distance between the saw blades 28 corresponds to the thickness of the radially inner part 18.

  Based on the exemplary described manufacturing method for the rotor disk 12 of the turbomolecular pump 10, two special simple processes are used to manufacture the blades of the rotor disk 12 for the high performance turbomolecular pump 10. It can be seen that it is sufficient for this purpose. Each of the described processing steps then has only one linear movement path of the tool. During the process, only the spacing of the saw blade 28 and its angular orientation with respect to the disk 26 need to be adjusted, and again in the second process again here only a linear process is performed. In doing so, it may be advantageous to perform the first process on all the blades of each rotor disk 12 before the second process is performed on all the blades 16. During the first process for the first vane 16 and the first process for the second vane 16, the disk 26 is rotated relative to the tool about the axis of rotation R. However, as an alternative, the tool can alternatively be guided around the disk 26. The tool orientation corresponding to the mounting angles A1, A2 can also be adjusted by a corresponding part of the disk 26 and / or by the tool orientation.

DESCRIPTION OF SYMBOLS 10 Turbo molecular pump 12 Rotor disc 14 Rotor shaft 16 Blade 18 Radial inner part 20 Radial outer part 22 Step 23 Narrow part 24 Plane part 25 Front part 26 Disk 27 Rotor hub 28 Saw blade 32 Inlet flange 34 Pump inlet 35 Pump outlet 36 Housing 38 Stator disk 40 Spacer ring 42 Suction area (German: Schoeffbereich)
46 Holbeck rotor sleeve 48 Holbeck rotor sleeve 50 Holbeck stator sleeve 52 Holbeck stator sleeve 54 Roller bearing part 56 Permanent magnet bearing part 58 Permanent magnet bearing half part 60 on the rotor side Permanent magnet bearing half part 62 on the rotor side Bearing 64 Splash nut 66 Absorbent disc 68 Drive motor A1 Mounting angle A2 Mounting angle P Pump direction Q Processing direction R Rotating shaft S Cross section

Claims (13)

It provided overlapping, attached to the rotor shaft (14), a plurality of independent rotor disk (12), or, attached to the rotor shaft (14), having a separate one of the rotor disk, the vacuum pump A rotor disk (12) for the rotor,
The rotor disk (12) has a plurality of vanes (16) distributed in the circumferential direction, each having a thickness profile that transitions radially from the inside to the outside. And at least one blade (16) has a thickness profile having at least one step (22) separating the two portions (18, 20) of the blade (16), the blade (16) Provided to be inclined with respect to a plane that is essentially perpendicular to the axis of rotation (R), wherein each part (18, 20) has a respective mounting angle; and A rotor disk (12) characterized in that the mounting angle (A1) of the radially inner part (18) is larger than the mounting angle (A2) of the radially outer part (20 ). 2. A rotor disk (12) according to claim 1, characterized in that the thickness profile is defined by the planar portions of the blade (16) facing each other. A step (22) is formed on one of the flat portions and formed between the radially inner thicker portion (18) and the radially outer thinner portion (20) of the vane (16). Rotor disk (12) according to claim 1 or 2, characterized in that A rotor disk (12) according to any one of the preceding claims, characterized in that the thickness is constant over the radial extension of each part (18, 20). The rotor disk (12) according to any one of claims 1 to 4 , characterized in that the step (22) has at least one chamfer and / or a rounded part. At least one of a plurality of independent rotor disks (12) provided in an overlapping manner and attached to the rotor shaft (14) or just one independent rotor disk (12) attached to the rotor shaft (14) a vacuum pump having a rotor, where the vacuum pump and at least one rotor disk (12) is formed of any one of claims 1 to 5. A method for the manufacture of the rotor disk (12) for the vacuum pump, provided overlapping, multiple independent rotor disk (12) was attached to the rotor shaft (14), or a rotor shaft (14 a rotor having exactly one independent rotor disk (12) attached to), or a method for producing such a vacuum pump, whereby the rotor disk (12) A plurality of vanes (16), which are produced in one piece from a disc (26) of solid material and are distributed in the circumferential direction by material removal, are formed on the disc (26), In this case, at least one blade (16) has a thickness profile that changes from the inside to the outside in the radial direction. Le is, to have at least one stage (22) separating the two parts (18, 20) of the blade (16), different attachment angles for the individual parts of each vane (16) (18, 20) Due to the formation of (A1, A2), different orientations of the tool are selected for the individual processing steps with respect to a plane that is at least essentially perpendicular to the axis of rotation (R). And how to. The tool (28) performs at least one processing step for the formation of each vane (22), which processing step is a radial element, and the tool (28) is placed in the disc (26). Advancing and / or axial elements are included which are moved through the disc (26) in accordance with the mounting angle (A1, A2) of the vanes (16). Item 8. The method according to Item 7 . 9. Method according to claim 7 or 8 , characterized in that the tool comprises a double tool or a twin tool which are spaced apart from each other and have two single tools (28) active at the same time. 9. that for over the radial extension of the formation of the blade portions (18, 20) having a constant thickness, a plurality of single tools (28), characterized in that provided in parallel The method described in 1. In order to form the individual parts (18, 20) of each vane (16), a plurality of processing steps are carried out in tandem with each other, with these processing steps taking place in the radial processing depth. 11. A method according to any one of claims 7 to 10 , characterized in that they differ from each other with respect to. 12. Method according to claim 11 , characterized in that a plurality of different tools are used and / or different adjustments of the tools are made for individual processing steps. For each process, a single double tool or twin tool with two single tools (28) which are spaced apart from each other and are active at the same time is used, with the individual process 13. A method according to claim 11 or 12 , wherein the spacing is adjusted to be different.

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