JP6141681B2 - Motor control device and motor control method - Google Patents

Description

  The present invention relates to a motor control device and a motor control method.

  An alignment stage that can move a load placed on the upper surface of the table plate in a straight line X direction, a straight line Y direction orthogonal to the X direction, and a rotational Θ direction on the XY plane is an electronic component manufacturing site, etc. Is used. The alignment stage includes a plurality of motors and transmits the thrust of each motor to the table plate via a motion guide mechanism to realize movement of the table plate (Patent Document 1).

For example, since the alignment stage described in Patent Document 1 includes a motor for each moving direction, it is necessary to enlarge each motor when a large thrust is required in each moving direction. . However, an increase in the size of the motor is not preferable because the alignment stage itself is increased in size.
Therefore, it is conceivable to provide a plurality of motors for each movement direction and increase the thrust while suppressing an increase in size of each motor. In addition, in order to drive a plurality of motors synchronously with high accuracy, it has been studied to control while suppressing disturbance caused by mechanical rigidity of a guide mechanism or the like driven by the motors (Patent Document 2).

Japanese Patent Laid-Open No. 08-099243 JP 2003-263228 A

  However, the technique described in Patent Document 2 is based on the premise that control is performed using the same command for a motor that is driven synchronously, and control is performed using different commands for a plurality of motors. Absent. Therefore, when a plurality of motors are driven in different directions to generate thrust in a predetermined direction, there is a problem that each motor cannot be controlled.

  The present invention has been made to solve the above problems, and its object is to suppress and control the influence of disturbance even when controlling a plurality of motors that perform linked driving using different commands. It is an object of the present invention to provide a motor control device and a motor control method capable of performing the above.

In order to solve the above problem, the present invention is a motor control device that controls any one of a plurality of motors that perform linked driving, and the moving speed of the mover of the motor that is controlled by the device itself And a first estimated thrust value, which is an estimated value of the thrust generated by the motor, and an estimated value of the thrust generated by the motor based on the current value flowing through the motor. A second estimated thrust value is calculated, and a correction value calculation unit that calculates a correction value for driving the motor from the first estimated thrust value and the second estimated thrust value, and is input from the host controller. Based on the command value and the correction value calculated by the correction value calculation unit, and a control unit that controls the drive of the motor that is controlled by the own device, and the movers of the plurality of motors are mutually connected Machine through the guide mechanism Are coupled to it is a motor control device according to claim.
In order to solve the above problem, the present invention provides a motor control device that controls any one of a plurality of motors that perform linked driving, and includes a mover of the motor that is controlled by the device itself. A first estimated thrust value, which is an estimated value of the thrust generated by the motor, is calculated based on the moving speed, and the thrust generated by the motor is estimated based on a current value flowing through the motor. A correction value calculation unit that calculates a second estimated thrust value that is a value, calculates a correction value for driving the motor from the first estimated thrust value and the second estimated thrust value, and a host controller A control unit that controls the driving of the motor that is controlled by the device based on the input command value and the correction value calculated by the correction value calculating unit; The motor is fixed to the base A base plate, two X-direction thrust generation guide mechanisms installed on the base plate for generating and guiding thrust in the straight line X direction, and a horizontal line in the straight X direction installed above the X-direction thrust generation guide mechanism. A pair of lower plates that move, a pair of upper plates provided corresponding to each of the pair of lower plates, and a lower plate installed between the pair of lower plates and the pair of upper plates A pair of rotary bearings that realize relative free movement in the rotational Θ direction of the upper plate with respect to the shaft, and generation of thrust in a straight line Y direction that is installed above each of the pair of upper plates and is orthogonal to the straight line X direction And a Y-direction thrust generation guide mechanism for guiding the load and a load placed on the upper surface by being installed above the Y-direction thrust generation guide mechanism as a straight line X Four motors used to generate thrust in each of the X-direction thrust generation guide mechanism and the Y-direction thrust generation guide mechanism in an alignment stage including a table plate that moves in a direction, a straight line Y direction, and a rotation Θ direction, The host controller sets the distance between the axes of the X-direction thrust generation guide mechanism to l _ofs , moves the center of the table plate x in the straight X direction, moves y in the straight Y direction, and rotates θ in the rotational Θ direction. When moving, the displacement amounts l ₁ and l ₂ calculated by the equation (14) in paragraph 0096 are used as commands for the motors used in the X-direction thrust generation guide mechanisms, and the displacement amounts u ₁ and u ₂ are used. Calculated as a command for the motor used in each of the Y-direction thrust generation guide mechanisms, and any of the calculated displacements is calculated as the command value Is output as a motor control device.

Further, in order to solve the above problem, the present invention is a motor control method performed by a motor control device that controls any one of a plurality of motors that perform linked driving, wherein the device is a control target. A first estimated thrust value, which is an estimated value of the thrust generated by the motor, is calculated based on the moving speed of the mover of the motor, and is generated by the motor based on the current value flowing through the motor. A correction value calculating step of calculating a second estimated thrust value, which is an estimated value of the thrust, and calculating a correction value for driving the motor from the first estimated thrust value and the second estimated thrust value; , a command value input from the host controller, on the basis of the correction value calculated in the correction value calculation step, possess a controlling step of controlling the driving of the motor by the local apparatus is the control target, the double Motor mover is a motor control method characterized in that, being mechanically connected via the guide mechanism together.
Further, in order to solve the above problem, the present invention is a motor control method performed by a motor control device that controls any one of a plurality of motors that perform linked driving, wherein the device is a control target. A first estimated thrust value, which is an estimated value of the thrust generated by the motor, is calculated based on the moving speed of the mover of the motor, and is generated by the motor based on the current value flowing through the motor. A correction value calculating step of calculating a second estimated thrust value, which is an estimated value of the thrust, and calculating a correction value for driving the motor from the first estimated thrust value and the second estimated thrust value; A control step for controlling the driving of the motor that is controlled by the device based on the command value input from the host control device and the correction value calculated in the correction value calculation step. The plurality of motors that perform the driving includes a base plate fixed to a base, two X-direction thrust generation guide mechanisms that are installed on the base plate and generate and guide a thrust in a straight line X direction, and the X-direction thrust A pair of lower plates installed above the generation guide mechanism and moving horizontally in the straight line X direction, a pair of upper plates provided corresponding to each of the pair of lower plates, the pair of lower plates, and the pair of And a pair of rotary bearings that realize relative free movement in the rotational Θ direction of the upper plate relative to the lower plate by being installed between the upper plate and the upper plate, A Y-direction thrust generation guide mechanism for generating and guiding thrust in a straight line Y direction orthogonal to the straight X direction, and installed above the Y-direction thrust generation guide mechanism Thus, the X-direction thrust generation guide mechanism and the Y-direction thrust generation guide mechanism in the alignment stage including a table plate that moves the load loaded on the upper surface in the straight X direction, the straight Y direction, and the rotation Θ direction. 4 motors used to generate thrust in each of the motors, and the host controller sets the distance between the axes of the X direction thrust generation guide mechanism to l _ofs and moves the center of the table plate in the straight X direction by x. When moving y in the straight line Y direction and θ moving in the rotational Θ direction, the displacement amounts l ₁ and l ₂ calculated by the equation (14) in paragraph 0096 are used for the X direction thrust generation guide mechanisms. As commands for the motors that are present, displacements u ₁ and u ₂ are calculated as commands for the motors used in the Y-direction thrust generation guide mechanisms. One of the calculated and calculated displacement amounts is output as the command value.

  According to this invention, in the motor to be controlled, the first estimated thrust value estimated from the moving speed of the mover of the motor, and the second estimated thrust value estimated from the current flowing through the motor, The motor is controlled based on the difference (thrust deviation). Thereby, even when a disturbance due to a movement error of a motor other than the motor occurs, the magnitude of the disturbance can be estimated from the thrust deviation and the motor can be controlled. Accordingly, even when a plurality of motors that perform linked driving are controlled using different commands, the influence of disturbance can be suppressed and controlled.

It is a schematic block diagram which shows the structure of the alignment stage system 100 in one Embodiment of this invention. It is an external appearance perspective view of the alignment stage 10 in this embodiment. It is a disassembled perspective view at the time of disassembling the component of the alignment stage 10 in this embodiment to a perpendicular direction. It is sectional drawing at the time of seeing the center part of the alignment stage 10 in this embodiment in the longitudinal cross-section orthogonal to the straight line X direction. It is a fragmentary sectional view of the linear guide 14 in this embodiment. It is the schematic which shows the operation | movement principle of the alignment stage 10 in this embodiment. It is a schematic block diagram which shows the structure of the motor control apparatus 140 and the slave motor control apparatus 170 in this embodiment. It is a flowchart which shows the step of the control which the slave motor control apparatus 170 in this embodiment performs. It is a wave form diagram which shows a motion of the table plate 51 in this embodiment. It is a wave form diagram which shows the position of the needle | mover of each of the four linear motors in this embodiment. FIG. 10 is a waveform diagram showing a positional deviation generated with respect to the linear motor 43 of the waveform Y2 when the response speed of the linear motor 13 of the waveform X2 is delayed when the table plate 51 is moved as shown in FIG. As shown in FIG. 9, when the table plate 51 is moved, a waveform indicating a positional deviation generated with respect to the linear motor 43 having the waveform Y2 when the response speed of the linear motor 13 having the waveform Y1 is delayed by 0.001 [seconds]. FIG. It is the figure which looked at the table plate 51 of the alignment stage 10 in this embodiment from the vertical direction of the upper surface. FIG. 14 is a graph showing the amount of displacement in the X direction, the amount of displacement in the Y direction, and the amount of displacement in the Θ direction when the table plate 51 is moved as shown in FIG. It is a 1st graph which shows the position command value (calculation command) based on the movement of the plate center in this embodiment, and the position command value (trapezoid command) by trapezoid drive. It is a 2nd graph which shows the position command value (calculation command) based on the movement of the plate center in this embodiment, and the position command value (trapezoid command) by trapezoid drive. It is a 1st graph which shows the thrust at the time of moving the table plate 51. FIG. It is a 2nd graph which shows the thrust at the time of moving the table plate 51. FIG.

  Hereinafter, a motor control device and a motor control method according to an embodiment of the present invention will be described with reference to the drawings.

<First Embodiment>
FIG. 1 is a schematic block diagram showing the configuration of an alignment stage system 100 (motor control system) according to an embodiment of the present invention. As shown in the figure, an alignment stage system 100 includes an alignment stage 10, three motor control devices 140 (140 a, 140 b, 140 c) that control each linear motor provided in the alignment stage 10, and a slave motor control device. 170 and a host controller 110 that outputs a drive command to the motor controller 140 and the slave motor controller 170.

  An operation instruction for the alignment stage 10 is input to the host controller 110 in accordance with a user operation. The host controller 110 outputs a position command for causing each linear motor provided in the alignment stage 10 to perform an operation corresponding to the input operation instruction to each motor controller 140 and slave motor controller 170. The motor control device 140 and the slave motor control device 170 drive a plurality of linear motors that perform linked driving via a guide mechanism and a rotary bearing, which will be described later, in accordance with a position command input from the host control device 110.

  FIG. 2 is an external perspective view of the alignment stage 10 in the present embodiment. FIG. 3 is an exploded perspective view when the components of the alignment stage 10 in the present embodiment are disassembled in the vertical direction. Further, FIG. 4 is a cross-sectional view of the central portion of the alignment stage 10 in the present embodiment as viewed in a vertical cross section orthogonal to the straight line X direction.

  The alignment stage 10 in this embodiment has a horizontal plate-like member 11 at the lowest position. The base plate 11 can be fixed to the base and is a member serving as a reference for the alignment stage 10. The base plate 11 has a substantially square outer shape, but any arbitrary shape can be adopted as the outer shape.

  Above the base plate 11, a pair of X-direction thrust generation guide mechanisms 12 and 12 for generating and guiding thrust in the straight X direction are installed. The pair of X-direction thrust generation guide mechanisms 12 and 12 are arranged in parallel to the straight line X direction, and any of the X-direction thrust generation guide mechanisms 12 and 12 generates and guides the thrust along the straight line X direction. Can be done.

  The X-direction thrust generation guide mechanism 12 is configured by combining one linear motor 13 as a linear drive source serving as a thrust generation source and two linear guides 14 and 14 serving as linear guide devices serving as a guide mechanism. In addition, two linear guides 14 and 14 are arranged so as to sandwich both sides of one linear motor 13.

  The linear motor 13 is a synchronous linear motor that generates thrust in the direction of the straight line X, and includes a plurality of coil members 13a arranged in a line with respect to the upper surface of the base plate 11, and a slight gap between these coil members 13a. It is comprised from the magnet member 13b fixed with respect to the lower surface of the lower plate 31 mentioned later so that it may oppose via.

  The magnet member 13b is arranged so that the N pole and the S pole are alternately directed to the coil member 13a along the straight line X direction. The magnet member 13b is fixedly arranged on the lower plate 31 with an adhesive. However, the magnet member 13b can be integrated with the lower plate 31 by injection forming the lower plate 31.

  On the other hand, the coil member 13 a arranged on the base plate 11 is formed by winding a coil around a core member formed of a ferromagnetic material such as iron, and the tip of the core member is attached to the lower plate 31. It faces the installed magnet member 13b with a slight gap. The coil member 13a is provided corresponding to the u-phase, v-phase, and w-phase of the three-phase alternating current, and the three coil members 13a are combined to generate a moving magnetic field when the three-phase alternating current is energized. It is supposed to be.

  A magnetic attractive force or a magnetic repulsive force acts between the magnet member 13b and the coil member 13a according to the moving magnetic field generated by the coil member 13a, and the magnet member 13b is moved along the arrangement direction of the coil member 13a. That is, the magnet member 13b can be propelled toward the straight line X direction. In addition, although the linear motor with a core is employ | adopted for the linear motor 13, the linear motor of a coreless structure can also be employ | adopted for the linear motor of this invention. By adopting a coreless structure without an iron core, there is no cogging force and smooth thrust can be obtained even at low speeds.

  Further, as shown in FIGS. 2 and 3, since the stopper members 16 are installed at both ends of the linear motor 13 in the straight line X direction, the magnet member 13b protrudes from the arrangement range of the coil member 13a. Thus, it is physically prevented from reciprocating in the straight line X direction.

  Further, the lower plate 31 is provided with a linear encoder 31a for measuring the driving amount of the X-direction thrust generation guide mechanism 12. As a specific mechanism of the linear encoder 31a, a scale (not shown) which is formed on the front surface of the base plate 11 and becomes a ruler, and a scale (not shown) disposed at the center of the side surface of the lower plate 31 are provided. It can be configured by a head (detector, a member indicated by reference numeral 31a) that detects position information by being arranged at a position opposite to the (scale). The linear encoder 31a can detect the amount of movement of the lower plate 31 relative to the base plate 11. Further, by using the linear encoder 31a as an electrical limit stopper and the stopper member 16 as a physical limit stopper in combination, the safety factor of the alignment stage 10 can be further improved. As for the linear encoder 31a, there are an optical type that uses reflection of light for detection and a magnetic type that uses magnetism, and an absolute type that performs absolute position measurement and an incremental type that measures relative position. However, any linear encoder 31a can be used depending on the application, budget, and the like.

The linear guide 14 constituting the X-direction thrust generation guide mechanism 12 will be described.
FIG. 5 is a partial cross-sectional view of the linear guide 14 in the present embodiment. As shown in the figure, the linear guide 14 is a moving member that is movably attached to the track rail 21 as a starting member and a plurality of balls 22,... The moving block 23 is a member configured.

  The track rail 21 is a long member having a substantially rectangular cross section, and ball rolling grooves 21 a that can transfer the balls 22 are formed over the entire length of the track rail 21. In the case of the linear guide 14 illustrated in FIG. 4, a total of two ball rolling grooves 21 a are formed, one on each side of the track rail 21. A plurality of bolt mounting holes 21b are formed in the track rail 21 at appropriate intervals in the longitudinal direction thereof, and the track rail 21 is formed on the base plate 11 by bolts (not shown) screwed into the bolt mounting holes 21b. Fixed on top.

The moving block 23 includes a block main body 24 and a pair of side lids 25 and 25. The pair of side lids 25 and 25 are fixed to both ends of the block main body 24 with bolts, and the moving block 23 is completed.
The block main body 24 is provided with two load transfer grooves 24 a that face the two ball rolling grooves 21 a formed on the track rail 21. A combination of these ball rolling grooves 21 a and load transfer grooves 24 a forms two load transfer paths 26 between the track rail 21 and the moving block 23. Note that a plurality of female screws 24b (only three of the four portions are depicted in FIG. 5) are formed on the upper surface of the block body 24. The moving block 23 is fixed to the lower surface of the lower plate 31 using these female screws 24b.

  In the block main body 24, two return paths 24 c extending in parallel with the load transfer paths 26 are formed so as to penetrate the block main body 24. A pair of ball guide portions (not shown) projecting in an arch shape between the load transfer groove 24a and the return path 24c are installed on both end faces of the block body 24. Further, the side cover 25 is formed with a ball guide groove (not shown) that is recessed in an arch shape corresponding to a ball guide portion (not shown).

  By fixing the side lid 25 to the block body 24, a ball guide portion (not shown) and a ball guide groove (not shown) are combined, and a U-shape connecting the load transfer path 26 and the return path 24c therebetween. A direction change path (a path for realizing the return of the ball 22 indicated by the symbol A in FIG. 5) is formed. The return path 24c and the direction change path constitute a no-load transfer path for the ball 22, and the combination of the no-load transfer path and the load transfer path 26 constitutes an infinite circulation path.

  Since the linear guide 14 in this embodiment has the above-described configuration, the moving block 23 can reciprocate along the longitudinal direction of the track rail 21. The X-direction thrust generation guide mechanism 12 is configured by a combination of the one linear motor 13 and the two linear guides 14 and 14 described above. The X-direction thrust generating and guiding mechanism 12 is arranged and configured so that both sides of one linear motor 13 are sandwiched between two linear guides 14 and 14, so that the thrust and guide motion are stably applied to the lower plate 31. Can be done.

  In addition, since the pair of X-direction thrust generation guide mechanisms 12 and 12 included in the present embodiment are disposed in parallel with respect to the straight line X direction, the pair of lower plates 31 and 31 disposed above the It can be moved in the same direction along the straight line X direction, or can be moved in opposite directions. A predetermined distance D1 is provided between the pair of lower plates 31 and 31 installed above the pair of X-direction thrust generation guide mechanisms 12 and 12, respectively. The presence of the distance D1 does not hinder horizontal movement in the direction of the straight line X between the pair of lower plates 31 and 31, so that the two lower plates 31 and 31 can be smoothly moved horizontally. .

  As described above, a pair of lower plates 31 and 31 that perform horizontal movement in the straight X direction are provided above each of the pair of X-direction thrust generation guide mechanisms 12 and 12. A pair of rotary bearings 32, 32 is installed above the plates 31, 31. A pair of upper plates 33, 33 corresponding to the pair of lower plates 31, 31 are installed above the pair of rotary bearings 32, 32.

  As shown in FIG. 4, the rotary bearing 32 installed between the upper and lower plate pairs 31 and 33 in this way has the outer ring of the rotary bearing 32 fixed to the lower plate 31, while the rotary bearing 32. The inner ring is fixed to the upper plate 33. Since the rotary bearing 32 is configured so that the inner and outer rings can move relative to each other in a free state without restriction, the rotary bearing 32 acts to cause the relative free movement of the upper plate 33 relative to the lower plate 31 in the rotational Θ direction. Is possible.

  A gap D <b> 2 having a predetermined interval is also provided between the pair of upper plates 33, 33 installed above each of the pair of rotary bearings 32. The gap D2 is set so as to have substantially the same distance as the gap D1 received between the lower plates 31 and 31 in the initial state. Further, the gap D2 corresponds to the movement of the two upper plates 33 and 33. The interval of D2 is configured to change in the opening direction (the state change of the gap D2 will be described in detail when the operation is described). Accordingly, even in the pair of upper plates 33, 33, the presence of the gap D2 does not hinder the movement of the upper plate pair in the XY plane when rotating in the rotation Θ direction. Smooth horizontal movement of the plates 33 and 33 is possible.

  Two linear guides 44 serving as a linear guide device composed of one track rail 21 and two moving blocks 23 are installed above the pair of upper plates 33, 33. The two linear guides 44 and 44 are installed so that the axial direction of the track rail 21 faces the straight line Y direction, that is, the direction orthogonal to the straight line X direction. In each of the two linear guides 44, 44, two moving blocks 23 are fixedly installed one on each upper surface of the pair of upper plates 33, 33, while one track rail 21 is fixedly installed on the lower surface of a table plate 51 to be described later.

  In the present embodiment, a linear motor 43 serving as a linear drive source serving as a thrust generation source in the straight Y direction is provided for each of the pair of upper plates 33 and 33 described above. The Y-direction thrust generation guide mechanism 42 installed above each of the pair of upper plates 33, 33 combines a linear motor 43 serving as a thrust generation source and two linear guides 44 serving as a guide mechanism. It consists of Since the structures and mechanisms of the linear motor 43 and the linear guide 44 are the same as those of the linear motor 13 and the linear guide 14 included in the X-direction thrust generation guide mechanism 12 described above, description thereof is omitted. However, for the linear motor 43 included in the Y-direction thrust generation guide mechanism 42, as shown in FIG. 4, the magnet member 43b constituting the linear motor 43 is installed on the upper surface of the upper plate 33, and the coil member 43a is It arrange | positions at the lower surface of the table plate 51 mentioned later.

  The one linear motor 43 and the two linear guides 44, 44 included in the Y-direction thrust generation guide mechanism 42 can generate and guide thrust in the straight Y direction.

  Here, with respect to the straight line X direction and the straight line Y direction shown in FIG. 2, when the installation surface of the base plate 11 is used as a reference surface and this reference surface is viewed from above, it is an arbitrary one extending in parallel to the reference surface. The direction can be defined as the straight line X direction, and one direction orthogonal to the straight line X direction and extending in parallel with the reference plane can be defined as the straight line Y direction. That is, the straight line X direction and the straight line Y direction can be grasped in a plane parallel to the reference plane that exists infinitely in the reference plane and in the vertical direction of the reference plane.

  The linear motor 13 and the linear guide 14 included in the X-direction thrust generation guide mechanism 12 and the linear X direction that is the thrust generation direction and the guide direction, and the linear motor 43 and linear included in the Y-direction thrust generation guide mechanism 42 are provided. The thrust generation direction realized by the guide 44 and the straight line Y direction which is the guide direction are configured so that they can be grasped in an orthogonal state in the initial state when the installation surface of the base plate 11 is viewed from above. Yes.

  That is, in this embodiment, the linear guide 14 included in the X-direction thrust generation guide mechanism 12 and the linear guide 44 included in the Y-direction thrust generation guide mechanism 42 are obtained when the alignment stage 10 is viewed from above in the initial state. The track rails of the linear guides 14 and 44 are configured so that the cross rails are arranged.

  As shown in FIGS. 2 and 3, the stopper member 46 can be disposed at the end of the linear motor 43 in the straight line Y direction as in the straight line X direction. By this stopper member 46, it is possible to physically prevent the magnet member 43b from reciprocating in the straight line Y direction outside the arrangement range of the coil member 43a. Also in this case, the drive limit of the linear motor 43 can be set in a controllable manner by installing the linear encoder 31a and the like described above, and the alignment stage 10 can be determined by combining the linear encoder 31a and the like with the stopper member 46. It is possible to further improve the safety factor.

  A table plate 51 is installed above the Y-direction thrust generation guide mechanism 42 and the linear guide 44 included therein. The table plate 51 is a horizontal plate-like member disposed at the uppermost position of the alignment stage 10, and is fixedly connected to the track rail 21 of the linear guide 44 included in the Y-direction thrust generation guide mechanism 42. Further, the table plate 51 has a substantially square outer shape like the base plate 11 arranged at the lowermost position of the alignment stage 10, and it is possible to place a load on the upper surface thereof. It has become. Therefore, by driving and controlling the alignment stage 10 of the present embodiment having the above-described mechanism, the mounted object placed on the table plate 51 is moved in the straight X direction, the straight Y direction, and the rotational Θ direction. It is possible to position at a desired position. Note that the outer shape of the table plate 51 can be changed to an arbitrary shape.

The specific configuration of the alignment stage 10 in the present embodiment has been described above. Next, the operation principle of the alignment stage 10 will be described.
FIG. 6 is a schematic diagram illustrating the operation principle of the alignment stage 10 in the present embodiment. It should be noted that a pair of X-direction thrust generation guide mechanisms 12 and 12 for generating and guiding thrust in the straight line X direction and a pair of Y-direction thrust generating and guiding mechanisms 42 and 42 for generating and guiding thrust in the straight Y direction. Is represented by only one thick line for convenience of explanation.

  FIG. 6A shows an initial state of the alignment stage 10. In the initial state, the base plate 11 and the table plate 51 included in the alignment stage 10 are disposed so as to be completely overlapped so that a deviation amount does not occur when viewed from above. When it is desired to move the table plate 51 in the straight line X direction from the initial state shown in FIG. 6A, the pair of X-direction thrust generation guide mechanisms 12 and 12 are set to the same arbitrary value as shown in FIG. 5B. May be driven in the same arbitrary direction by the same amount. With this driving operation, the table plate 51 is translated in an arbitrary direction by an arbitrary movement amount in the straight line X direction.

  On the other hand, when it is desired to move the table plate 51 in the straight line Y direction, as shown in FIG. 6C, if the Y-direction thrust generation guide mechanisms 42, 42 are driven in an arbitrary direction by an arbitrary amount of movement. Good. With this driving operation, the table plate 51 is translated in an arbitrary direction by an arbitrary amount of movement in the straight line Y direction.

  Further, the table plate 51 can be moved in the rotation Θ direction with the plate center as the rotation center. At this time, as shown in FIG. 6D, the pair of X-direction thrust generation guide mechanisms 12 and 12 are driven in the opposite directions by the same arbitrary movement amount, and the Y-direction thrust generation guide mechanisms 42 and 42 are moved. It is only necessary to drive the pair of X-direction thrust generation guide mechanisms 12 and 12 in the opposite direction by the amount of movement relative to the amount of movement. That is, when the pair of X-direction thrust generation guide mechanisms 12 and 12 are driven in opposite directions, the distance between the pair of rotary bearings 32 and 32 is increased. Since the rotary bearing 32 can rotate in a state where the inner and outer rings are free, the pair of upper plates 33 and 33 connected to the pair of rotary bearings 32 and 32 respectively has a linear guide 44. Therefore, in order to maintain the parallel arrangement, it is rotated in the rotation Θ direction.

  As a result of the rotational movement of the pair of upper plates 33 and 33 in the rotational Θ direction, the table plate 51 is rotationally moved in the rotational Θ direction. During this rotational movement, the Y-direction thrust generation guide mechanisms 42 and 42 are driven to translate the table plate 51 by a movement amount relative to the movement amount of the pair of X-direction thrust generation guide mechanisms 12 and 12. By doing so, the rotation center during the rotational movement in the rotation Θ direction is maintained at the plate center of the table plate 51.

  Further, when the table plate 51 moves in the rotation Θ direction with the plate center as the rotation center, the movement amounts of the pair of X-direction thrust generation guide mechanisms 12 and 12 may be the same. Similarly, the amount of movement of the pair of Y-direction thrust generation guide mechanisms 42, 42 may be the same. At this time, in the linear guide 44 included in the Y-direction thrust generation guide mechanism 42, 42, the two rails disposed on the lower surface of the table plate 51 on the track rail 21 above the upper plates 33, 33 respectively. The moving blocks 23 and 23 move so as to change the distance between them while maintaining the serial position in the straight line Y direction. This indicates that the alignment stage 10 according to the present embodiment has a configuration that can be driven easily.

  Incidentally, regarding the movement in the rotation Θ direction about the center of the table plate 51 shown in FIG. 6D, for example, the amount of movement in the straight Y direction by the Y direction thrust generation guide mechanisms 42, 42 is arbitrarily set. Since the center of rotation can be changed by changing, it is possible to realize all movement operations on the XY plane with respect to the table plate 51.

  Further, as shown in FIG. 6D, when the table plate 51 is moved in the rotation Θ direction, the pair of X-direction thrust generation guide mechanisms 12 and 12 are driven in the opposite directions. The distance between the pair of rotary bearings 32 and 32 is increased. Therefore, the distance between the pair of upper plates 33 and 33 connected to the pair of rotary bearings 32 and 32 also increases. That is, the gap D2 (see FIG. 4) that exists between the pair of upper plates 33 and 33 in the initial state increases as the amount of movement in the rotational Θ direction increases. The pair of upper plates 33 and 33 and one table plate 51 are connected to each other via a linear guide 44 composed of one track rail 21 and two moving blocks 23 and 23. The amount of movement in the rotational Θ direction is reliably transmitted to the table plate 51.

  Such a configuration is technically different from a structure in which modules corresponding to each of the XYΘ directions are prepared and the modules for XYΘ directions are stacked, as in the technique described in Patent Document 1 shown in the background art. It was created based on. Thereby, the alignment stage 10 can be comprised compactly. In addition, in driving in any of the straight line X direction, straight line Y direction, and rotation Θ direction, a plurality of linear motors are driven synchronously, so that it is easy to ensure thrust.

  As described above, the rotational movement of the table plate 51 in the rotational Θ direction is realized by driving the pair of X-direction thrust generation guide mechanisms 12 and 12 in the opposite directions. As for the direction, it is possible to select clockwise or counterclockwise by changing the combination of directions in which the pair of X-direction thrust generation guide mechanisms 12 and 12 are driven. That is, as shown in FIG. 6D, the X-direction thrust generation guide mechanism 12 on the upper side of the paper is driven to the left side of the paper, and the X-direction thrust generation guide mechanism 12 on the lower side of the paper is reversed. When driven, the table plate 51 rotates and moves counterclockwise. Naturally, when the X direction thrust generation guide mechanism 12 above the paper surface is driven to the right side of the paper surface, and conversely, the X direction thrust generation guide mechanism 12 below the paper surface is driven to the left side of the paper surface, the table plate 51 Will rotate clockwise.

  FIG. 7 is a schematic block diagram showing configurations of the motor control device 140 and the slave motor control device 170 in the present embodiment. The three motor control devices 140 (140a, 140b, 140c) have the same configuration, and the slave motor control device 170 has a configuration different from that of the motor control device 140. The motor control device 140a and the motor control device 140b control the linear motor 13 that generates the thrust in the straight line X direction described above. The motor control device 140 c controls one of the two linear motors 43 that generate the thrust in the straight line Y direction, and the slave motor control device 170 controls the other of the two linear motors 43. In the present embodiment, the configuration in which the slave motor control device 170 controls the linear motor 43 that generates thrust in the straight line Y direction will be described. However, the linear motor 13 that generates thrust in the straight line X direction is controlled. Also good.

The motor control device 140 includes a subtraction unit 141, a position control unit 142, a subtraction unit 143, a current control unit 144, a power conversion unit 145, and a current measurement unit 146.
A position command value indicating a target position for moving the mover of the linear motor 13 or the linear motor 43 to be controlled by the own apparatus is input to the subtracting unit 141 from the host controller 110. In addition, a value indicating the position of the mover of the linear motor 13 or the linear motor 43 that is controlled by the own apparatus is input to the subtracting unit 141 from the linear encoder 31a. The subtraction unit 141 subtracts the input value indicating the position of the mover from the input position command value to calculate a position deviation with respect to the position command value. The position control unit 142 calculates a current command value for moving the mover of the linear motor 13 or the linear motor 43 to be controlled to the target position based on the position deviation calculated by the subtraction unit 141. In other words, the position control unit 142 calculates a current command value that makes the position deviation 0 (zero).

  The subtracting unit 143 subtracts the current value measured by the current measuring unit 146 from the current command value calculated by the position control unit 142 to calculate a current deviation with respect to the current command value. Based on the current deviation calculated by the subtraction unit 143, the current control unit 144 outputs a control signal for the power conversion unit 145 to supply current to the linear motor 13 so that the current deviation becomes 0 (zero). Specifically, the current control unit 144 performs, for example, two-phase / three-phase conversion on the current deviation calculated by the subtraction unit 143, and calculates a voltage value to be applied to each of the three-phase coils included in the linear motor 13. . Then, the current control unit 144 outputs a control signal corresponding to the calculated voltage value of each phase to the power conversion unit 145.

The power conversion unit 145 converts a voltage supplied from the outside into a voltage of each phase calculated by the current control unit 144 and supplies the converted voltage to the linear motor 13. The power conversion unit 145 is an inverter circuit configured using a switching element such as an IGBT (Insulated Gate Bipolar Transistor), and performs PWM control according to the voltage value calculated by the current control unit 144, for example. By doing so, a desired voltage is supplied to the coils of each phase of the linear motor 13.
The current measurement unit 146 measures the current supplied from the power conversion unit 145 to the linear motor 13 and outputs the measured current value to the subtraction unit 143. The current measurement unit 146 is configured using, for example, an instrument current transformer.

As described above, the motor control device 140 controls the linear motor 13 by feeding back the position of the mover of the linear motor 13 and the current flowing through the coil of the linear motor 13.
Note that the position control unit 142 and the current control unit 144 calculate a command value from each input deviation using, for example, PI control or PID control.

  The slave motor control device 170 includes an addition unit 171, a position control unit 172, a subtraction unit 143, a current control unit 144, a power conversion unit 145, a current measurement unit 146, and a correction value calculation unit 177. The slave motor control device 170 includes an addition unit 171 instead of the subtraction unit 141, a point including a position control unit 172 instead of the position control unit 142, and a correction value calculation unit 177. This is different from the motor control device 140. In the slave motor control device 170, the same reference numerals are given to the same functional units as those of the motor control device 140, and the description thereof is omitted.

A position command value indicating a target position when moving the mover of the linear motor 43 that is an object of control of the own apparatus is input to the adder 171 from the host controller 110. Further, the correction value for the position command value is input from the correction value calculation unit 177 to the addition unit 171. The adding unit 171 calculates a corrected position command value by adding the input position command value and the input correction value.
The position control unit 172 calculates a current command value for moving the mover of the linear motor 43 to be controlled to the target position based on the corrected position command value calculated by the adding unit 171. The position control unit 172 calculates a current command value from the corrected position command value that is input using, for example, PI control or PID control.

  The correction value calculation unit 177 receives a value (position information) indicating the position of the mover of the linear motor 43 that is controlled by the own apparatus from the linear encoder 31a. The correction value calculation unit 177 receives the current value measured by the current measurement unit 146. The correction value calculation unit 177 calculates the moving speed of the movable element from the amount of change per unit time of the value indicating the position of the movable element. The correction value calculation unit 177 calculates a first estimated thrust value, which is an estimated value of the thrust acting on the movement of the mover, based on the calculated speed. Further, the correction value calculation unit 177 calculates a second estimated thrust value (theoretical value) that is an estimated value of the thrust generated in the linear motor 43 from the input current value. The mass of the mover of the linear motor 43 used when calculating the moving speed of the mover, and the thrust coefficient used when calculating the second estimated thrust value from the current value are measured in an actual machine or simulated. Obtain in advance.

The correction value calculation unit 177 calculates a thrust deviation by subtracting the second estimated thrust value from the first estimated thrust value. This thrust deviation corresponds to a disturbance that occurs based on the linear motor 13 other than the linear motor 43 that is controlled by the slave motor control device 170 and an error in the movement of the mover in the linear motor 43.
The correction value calculation unit 177 calculates a correction value by multiplying a predetermined correction coefficient and the calculated thrust deviation, and outputs the calculated correction value to the addition unit 171. The correction coefficient is obtained in advance by measurement with an actual machine, simulation, or the like, like the mass of the mover and the thrust coefficient. That is, the correction value calculation unit 177 calculates a correction value for correcting the position command value according to the disturbance received by the linear motor 43.

FIG. 8 is a flowchart illustrating control steps performed by the slave motor control device 170 according to this embodiment.
When the slave motor control device 170 starts control using torque correction, the functional units of the power conversion unit 145 from the addition unit 171 operate based on the position command value input from the host control device 110, and the linear motor 43 is driven (step S101). Since the speed cannot be detected at the first timing, the control is performed without using the correction value.

  When the mover of the linear motor 43 is moved by the drive in step S101, the correction value calculation unit 177 calculates the speed of the mover from the position information that changes according to the movement in the slave motor control device 170 (step S102). A first estimated thrust value is calculated from the calculated speed (step S103).

  Further, the correction value calculation unit 177 calculates the second estimated thrust value from the current value of the current flowing through the linear motor 43 to be controlled (step S104). The correction value calculation unit 177 calculates a thrust deviation by subtracting the second estimated thrust value from the first estimated thrust value (step S105), and calculates a correction value from the thrust deviation (step S106).

The adder 171 adds the correction value calculated by the correction value calculator 177 and the position command value to correct the position command value (step S107).
Each functional unit from the position control unit 142 to the power conversion unit 145 drives the linear motor 43 based on the corrected position command value (step S108), and returns the process to step S102.

  Thereafter, the processes from step S102 to step S108 are repeatedly performed, so that the linear motor 43 can be driven so as to suppress rattling caused by movement errors of the other linear motors 13, 13, and 43.

  As described above, the alignment stage system 100 according to the present embodiment has the movement error of the other linear motor 13 and the linear motor 43 in the control of one of the two linear motors 13 and the two linear motors 43. The slave motor control device 170 performs control based on disturbance caused by the above. Thus, when controlling the four linear motors 13, 13, 43, 43 mechanically connected via the guide mechanism using different position command values, for example, generating thrust in the rotational Θ direction In this case, it is possible to perform control while suppressing the influence of disturbance.

Hereinafter, the results of the computer simulation will be shown, and the movement of the four linear motors 13, 13, 43, 43 will be described with reference to FIGS.
FIG. 9 is a waveform diagram showing the movement of the table plate 51 in the present embodiment. In the figure, the vertical axis indicates the amount of movement in the straight line XY direction and the rotation Θ direction, and the horizontal axis indicates time. In this computer simulation, as shown in FIG. 9, the table plate 51 is reciprocated in the straight line X direction, then reciprocated in the straight line Y direction, and further reciprocated in the rotation Θ direction and the straight line Y direction. It was.

FIG. 10 is a waveform diagram showing the positions of the movers of the four linear motors 13, 13, 43, 43 in this embodiment. In the figure, the vertical axis indicates the amount of movement in the straight line XY direction and the rotation Θ direction, and the horizontal axis indicates time. The waveforms of X1 and X2 in the figure correspond to the movement of the linear motors 13 and 13 that drive in the straight line X direction, and the waveforms of Y1 and Y2 correspond to the movement of the linear motors 43 and 43 that drive in the straight line Y direction. Correspond. Further, the slave motor control device 170 controls the linear motor 43 corresponding to the waveform of Y2.
As shown in the figure, the linear motor 43 controlled by the slave motor control device 170 is delayed in control with respect to the linear motor 43 corresponding to the waveform of Y1. This is because the operation is performed so as to suppress the influence of disturbance caused by movement errors or the like in the other linear motors 13, 13, 43.

FIG. 11 shows a position generated with respect to the linear motor 43 of the waveform Y2 when the response speed of the linear motor 13 of the waveform X2 is delayed by 0.001 [seconds] when the table plate 51 is moved as shown in FIG. It is a wave form diagram which shows a deviation. In the figure, the vertical axis indicates the amount of movement in the straight line XY direction and the rotation Θ direction, and the horizontal axis indicates time. As shown in the figure, when the movement of the linear motor 13 corresponding to the waveform X2 is delayed, the movement of the linear motor 43 corresponding to the waveform Y2 is delayed due to the stress (disturbance) generated from the distortion caused by the delay. Become.
In the movement only in the straight line X direction or the straight line Y direction, the linear motor 43 corresponding to the waveform Y2 is not affected by the movement delay of the linear motor 13 corresponding to the waveform X2. However, in the movement in the rotational Θ direction, the influence (disturbance) of the movement of the linear motor 13 corresponding to the waveform X2 is received through the rotary bearing 32, and therefore the case where the delay does not occur is shown in FIG. Position deviation occurs.

FIG. 12 shows the position generated with respect to the linear motor 43 of the waveform Y2 when the response speed of the linear motor 13 of the waveform Y1 is delayed by 0.001 [seconds] when the table plate 51 is moved as shown in FIG. It is a wave form diagram which shows a deviation. In the figure, the vertical axis indicates the amount of movement in the straight line XY direction and the rotation Θ direction, and the horizontal axis indicates time.
As shown in the figure, when a delay occurs in the other linear motor 43 arranged in parallel with the linear motor 43 corresponding to the waveform Y2, the linear motor 43 corresponding to the waveform Y2 also moves in the straight line Y direction. The operation will also be delayed. In addition, the movement of the linear motor 43 corresponding to the waveform Y2 is also delayed in the movement in the rotation Θ direction.

  As described above, in the alignment stage system 100 according to the present embodiment, the slave motor control device 170 causes the linear motor 43 to respond to the disturbance generated in the guide device, the upper plate 33, and the lower plate 31 by driving the other three linear motors. To control. As a result, it is possible to perform control on the linear motor 43 while suppressing rattling caused by movement errors of the linear motors 13 and 43 mechanically connected via the guide mechanism. As a result, the control for smoothly moving the alignment stage 10 can be performed.

  Further, the alignment stage system 100 according to the present embodiment, when moving the alignment stage 10 in the rotation Θ direction, the thrust of the linear motors 13 and 13 that are driven in the straight line X direction, and the linear motor 43 that is driven in the straight line Y direction, Since 43 thrusts are used together, a large thrust can be generated. Thereby, even if it is a case where a big thrust is requested | required in rotation (theta) direction, the enlargement of each linear motor 13 and 43 can be suppressed.

In the present embodiment, the configuration in which the slave motor control device 170 controls any one of the four linear motors provided in the alignment stage 10 is shown. However, the present invention is not limited to this, and the slave motor control device 170 is used for any one of the linear motors when controlling a plurality of linear motors that are linked via the guide mechanism and the rotary bearing. Also good.
In the above-described embodiment, the configuration in which the motor control device 140 and the slave motor control device 170 control the linear motors 13 and 43 has been described. However, the rotary motor may be controlled.

  In the present embodiment, the configuration in which the four linear motors 13 and 43 arranged on the alignment stage 10 are controlled is shown. However, the number of linear motors controlled by combining the motor control device 140 and the slave motor control device 170 may be four or more, for example, five or six. When four or more linear motors are linked and driven, the motor controller 140 is assigned to each of the three linear motors, and the slave motor controller 170 is assigned to each of the other linear motors. May be. As a result, it is possible to perform control while suppressing rattling caused by a movement error of the linear motor.

  In the present embodiment, a configuration is shown in which a position command value is input from the host controller 110, and the correction value calculation unit 177 calculates a correction value for correcting the position command value. However, the present invention is not limited to this, and the correction value calculation unit 177 may calculate a correction value corresponding to the command value input from the host controller 110. For example, when a speed command value is input from the host controller 110, the correction value calculation unit 177 may calculate a correction value for correcting the speed command value. In this case, the correction coefficient is determined in advance according to a command value to be corrected based on an actual measurement value or a value obtained by simulation.

<Second Embodiment>
In the present embodiment, the host controller 110 performs control while suppressing the occurrence of disturbance on the position command value output to the motor controllers 140a to 140c and the slave motor controller 170. In addition, since the alignment stage system 100 in this embodiment is the same structure as the alignment stage system 100 in 1st Embodiment, description of a structure is abbreviate | omitted. The procedure for calculating the position command values output from the host control device 100 to the motor control devices 140a to 140c and the slave motor control device 170, that is, the position command values for the four linear motors 13, 13, 43, 43 will be described below. To do.

  FIG. 13 is a view of the table plate 51 of the alignment stage 10 in the present embodiment as viewed from the vertical direction on the upper surface. Here, as shown in the figure, when the table plate is rotated counterclockwise while being moved in the X and Y directions, that is, the plate center of the table plate 51 is x in the X direction, y in the Y direction, and the rotational Θ direction. Next, a case of moving θ will be described.

  FIG. 14 is a graph showing the amount of displacement in the X direction, the amount of displacement in the Y direction, and the amount of displacement in the Θ direction when the table plate 51 is moved as shown in FIG. In the figure, the horizontal axis indicates time, and the vertical axis indicates the amount of displacement in each direction. Here, the acceleration / deceleration time is 50 [ms], the constant speed time is 50 [ms], and the command time is 150 [ms].

Here, as shown in FIG. 13, the distance between the axes of the two X-direction thrust generating mechanisms 12 is l _ofs, and the displacement amount of the X-direction thrust generating mechanism 12 is l _i (i = 1, 2). The displacement amount of the two Y-direction thrust generating mechanisms 42 is assumed to be u _i (i = 1, 2). The displacement l _i and the displacement u _i are determined as follows.
Displacement l _i = (plate center) − (initial position in X direction)
Displacement u _i = (initial position in Y direction) − (plate center)
In this case, x, y, and θ are obtained as the following expressions (1) to (3).

Further, the following equation (4) is obtained with respect to the distance l _ofs between the axes.

  When the one obtained by multiplying both sides of the equation (1) by cos θ and the one obtained by multiplying both sides of the equation (2) by sin θ, the following equation (5) is obtained.

  Further, when the equation (5) is modified, the following equation (6) is obtained.

  Moreover, following Formula (7) is obtained from Formula (3).

  The following equation (8) is obtained by subtracting the equation (7) from the equation (6) and dividing by two, and the following equation (9) is obtained by adding the equation (6) and the equation (7) and dividing by two. can get.

  When formula (4) is transformed, the following formula (10) is obtained, and when formula (2) is transformed, formula (11) is obtained.

  The following equation (12) is obtained by subtracting the equation (11) from the equation (10) and dividing by two, and the following equation (13) is obtained by adding the equation (10) and the equation (11) and dividing by two. can get.

  From the above, the following equation (14) is obtained.

The host controller 110 outputs the displacement amounts l ₁ and l ₂ obtained by the equation (14) to the motor controllers 140a and 140b as position command values for the two linear motors 13 and 13, respectively. In addition, the host controller 10 outputs the displacement amounts u ₁ and u ₂ obtained by Expression (14) to the motor controller 140 c and the motor controller 170 as position command values for the two linear motors 43 and 43.

Here, the difference between the position command value based on the displacement amount based on the movement center of the plate center obtained by the equation (14) and the position command value based on the trapezoidal drive based on the target position of the plate center is shown. 15 and 16 are graphs showing a position command value (calculation command) based on movement of the plate center and a position command value (trapezoid command) by trapezoidal driving in the present embodiment. FIG. 15 shows position command values (l ₁ , l ₂ ) for the linear motors 13 and 13 that generate thrust in the straight line X direction. FIG. 15A shows the position command value l ₁ and FIG. 15B shows the position command value l ₂ . FIG. 16 shows position command values (u ₁ , u ₂ ) for the linear motors 43 and 43 that generate thrust in the straight line Y direction. Position command value _{u 1} is shown in FIG. 16 (A), has been shown to position instruction value _{u 2} in FIG. 16 (B). In these drawings, the horizontal axis indicates time, and the vertical axis indicates each position command value.

As shown in FIG. 16, there is almost no difference in the position command values for the linear motors 43 and 43. However, it is seen from the figure that a large difference is the position command value l ₁ of a position command value to the linear motor 13, 13. In the alignment stage 10 in this embodiment, the position of the axis in the moving direction in the Y-direction thrust generation guide mechanisms 42, 42 is uniquely determined by the deviation angle θ and the position in the straight line Y direction. Thus, if a position command value for a target position when moving the plate center is given based on trapezoidal driving, a position command value that cannot be realized in the movement process may be calculated. Such a position command value appears in the position command value 11 shown in FIG.

In addition, a difference in thrust of each linear motor 13, 13, 43, 43 when using a position command value based on a movement locus of the plate center and when using a position command value by trapezoidal driving is shown. 17 and 18 are graphs showing thrusts when the table plate 51 is moved. FIG. 17 shows the thrusts of the linear motors 13 and 13 that generate thrust in the straight line X direction. FIG. 17A shows the thrust when position command values l ₁ and l ₂ based on the movement locus of the plate center are used, and FIG. 17B shows position command values l ₁ and l by trapezoidal driving. The thrust when ₂ is used is shown. FIG. 18 shows thrusts of the linear motors 43 and 43 that generate thrust in the straight line Y direction. Figure 18 is the (A) shows the thrust in the case of using the position command value _u 1, _{u 2,} based on the locus of movement of the plate center, 18 position command value _u 1 by trapezoidal drive in (B), _{u 2} The thrust when using is shown.

  As shown in FIG. 17, there is almost no difference in the thrust of the linear motors 13 and 13. However, as shown in FIG. 18, a large difference appears in the thrust of the linear motors 43 and 43. The thrust when the position command value based on the movement locus of the plate center is used changes in a range from −6 [N] to 10 [N]. On the other hand, the thrust when the position command value by trapezoidal driving is used changes in a range from about -80 [N] to 80 [N]. This is because the above-described unrealizable position command value is calculated, so that the drive of each linear motor 13, 13 interferes with the drive of the linear motor 43, 43 via the rotary bearings 32, 32. Because.

The host controller 110 of the present embodiment moves the displacements l _i , u _i (i = 1, 2) calculated by the equation (14) in order to move the plate center as shown in FIG. Can be prevented from being calculated as a position command value, which cannot be realized in the structure of the alignment stage 10. As a result, the occurrence of disturbance caused by interference between the linear motors 13 and 13 that generate thrust in the straight line X direction and the linear motors 43 and 43 that generate thrust in the straight line Y direction via the rotary bearings 32 and 32 is suppressed. Control can be performed.

  In this embodiment, by using a combination of the host controller 110 that calculates the position command value based on the movement locus of the plate center and the slave motor controller 170 described in the first embodiment, linked driving is performed. Even when a plurality of motors to be controlled are controlled using different commands, it is possible to perform smooth motor drive control that further suppresses the occurrence of disturbance.

  The host controller 110, the motor controller 140, and the slave motor controller 170 described above may have a computer system therein. In this case, the motor control process described above is stored in a computer-readable recording medium in the form of a program, and the above process is performed by the computer reading and executing this program. Here, the computer-readable recording medium means a magnetic disk, a magneto-optical disk, a CD-ROM, a DVD-ROM, a semiconductor memory, or the like. Alternatively, the computer program may be distributed to the computer via a communication line, and the computer that has received the distribution may execute the program.

  The motor control device described in the present invention corresponds to the slave motor control device 170 in the embodiment. The control unit described in the present invention corresponds to the position control unit 142 in the embodiment.

DESCRIPTION OF SYMBOLS 13, 43 ... Linear motor (motor), 110 ... High-order control apparatus (high-order control part), 142 ... Position control part, 170 ... Slave motor control apparatus, 177 ... Correction value calculation part

Claims (5)

A motor control device that controls any one of a plurality of motors that perform linked driving,
Based on the moving speed of the mover of the motor to be controlled by the own device, a first estimated thrust value, which is an estimated value of the thrust generated by the motor, is calculated, and the current value flowing through the motor is calculated. Based on this, a second estimated thrust value, which is an estimated value of the thrust generated by the motor, is calculated, and a correction value for driving the motor from the first estimated thrust value and the second estimated thrust value A correction value calculation unit for calculating
A control unit that controls the drive of the motor that is controlled by the device based on a command value input from a host control device and a correction value calculated by the correction value calculation unit ;
The movers of the plurality of motors are mechanically connected to each other via a guide mechanism.
The motor control apparatus characterized by the above-mentioned. The motor control device according to claim 1,
The correction value calculation unit
Subtracting the second estimated thrust value from the first estimated thrust value to calculate a thrust deviation, and multiplying the calculated thrust deviation by a predetermined correction coefficient to calculate the correction value. A motor control device. A motor control device that controls any one of a plurality of motors that perform linked driving,
Based on the moving speed of the mover of the motor to be controlled by the own device, a first estimated thrust value, which is an estimated value of the thrust generated by the motor, is calculated, and the current value flowing through the motor is calculated. Based on this, a second estimated thrust value, which is an estimated value of the thrust generated by the motor, is calculated, and a correction value for driving the motor from the first estimated thrust value and the second estimated thrust value A correction value calculation unit for calculating
A control unit that controls the driving of the motor that is controlled by the device based on a command value input from a host control device and a correction value calculated by the correction value calculation unit;
With
The plurality of motors that perform the linked driving are:
A base plate which is fixed to the base, and two X-direction thrust generating guiding mechanism for generating and guiding the thrust to installed straight line X direction on the base plate, linearly disposed above the X-direction thrust generating guiding mechanism A pair of lower plates that perform horizontal movement in the X direction, a pair of upper plates provided corresponding to each of the pair of lower plates, and the pair of lower plates and the pair of upper plates. A pair of rotary bearings that realize relative free movement of the upper plate relative to the lower plate in the rotational Θ direction, and a straight line Y direction that is installed above each of the pair of upper plates and that is orthogonal to the straight line X direction A Y-direction thrust generation guide mechanism for generating and guiding thrust, and a tower mounted on the upper surface by being installed above the Y-direction thrust generation guide mechanism Four types used for generating thrust in each of the X-direction thrust generation guide mechanism and the Y-direction thrust generation guide mechanism in an alignment stage that includes a table plate that moves an object in a straight X direction, a straight Y direction, and a rotational Θ direction. Motor,
The host controller is
When the distance between the axes of the X direction thrust generation guide mechanism is l _ofs , the center of the table plate is moved x in the straight line X direction, y is moved in the straight line Y direction, and θ is moved in the rotational Θ direction. Using the displacement amounts l ₁ and l ₂ calculated by the equation (A) as commands for the motors used in the X direction thrust generation guide mechanisms, the displacement amounts u ₁ and u ₂ are used as the Y direction thrust generation guide mechanisms. Is calculated as a command for the motor used for the motor, and any calculated displacement is output as the command value.

The motor control apparatus characterized by the above-mentioned. A motor control method performed by a motor control device that controls any one of a plurality of motors that perform linked driving,
Based on the moving speed of the mover of the motor to be controlled by the own device, a first estimated thrust value, which is an estimated value of the thrust generated by the motor, is calculated, and the current value flowing through the motor is calculated. Based on this, a second estimated thrust value, which is an estimated value of the thrust generated by the motor, is calculated, and a correction value for driving the motor from the first estimated thrust value and the second estimated thrust value A correction value calculating step for calculating
A command value input from the host controller, on the basis of the correction value calculated in the correction value calculation step, possess a controlling step of controlling the drive of the motor device itself is a control target,
The movers of the plurality of motors are mechanically connected to each other via a guide mechanism.
The motor control method characterized by the above-mentioned. A motor control method performed by a motor control device that controls any one of a plurality of motors that perform linked driving,
Based on the moving speed of the mover of the motor to be controlled by the own device, a first estimated thrust value, which is an estimated value of the thrust generated by the motor, is calculated, and the current value flowing through the motor is calculated. Based on this, a second estimated thrust value, which is an estimated value of the thrust generated by the motor, is calculated, and a correction value for driving the motor from the first estimated thrust value and the second estimated thrust value A correction value calculating step for calculating
A command value input from the host controller, on the basis of the correction value calculated in the correction value calculation step, possess a controlling step of controlling the drive of the motor device itself is a control target,
The plurality of motors that perform the linked driving are:
A base plate fixed to the base, two X-direction thrust generation guide mechanisms installed on the base plate for generating and guiding thrust in the straight line X direction, and a straight line installed above the X-direction thrust generation guide mechanism A pair of lower plates that perform horizontal movement in the X direction, a pair of upper plates provided corresponding to each of the pair of lower plates, and the pair of lower plates and the pair of upper plates. A pair of rotary bearings that realize relative free movement of the upper plate relative to the lower plate in the rotational Θ direction, and a straight line Y direction that is installed above each of the pair of upper plates and that is orthogonal to the straight line X direction A Y-direction thrust generation guide mechanism for generating and guiding thrust, and a tower mounted on the upper surface by being installed above the Y-direction thrust generation guide mechanism Four types used for generating thrust in each of the X-direction thrust generation guide mechanism and the Y-direction thrust generation guide mechanism in an alignment stage that includes a table plate that moves an object in a straight X direction, a straight Y direction, and a rotational Θ direction. Motor,
The host controller is
When the distance between the axes of the X direction thrust generation guide mechanism is l _ofs , the center of the table plate is moved x in the straight line X direction, y is moved in the straight line Y direction, and θ is moved in the rotational Θ direction. Using the displacement amounts l ₁ and l ₂ calculated by the equation (A) as commands for the motors used in the X direction thrust generation guide mechanisms, the displacement amounts u ₁ and u ₂ are used as the Y direction thrust generation guide mechanisms. Is calculated as a command for the motor used for the motor, and any calculated displacement is output as the command value.

The motor control apparatus characterized by the above-mentioned.

Images