JP6127379B2 - Actuator, robot hand, robot, transfer device, electronic component transfer device, and electronic component inspection device - Google Patents

Description

  The present invention relates to an actuator, a robot hand, a robot, a transfer device, an electronic component transfer device, and an electronic component inspection device.

  In an electronic component inspection apparatus, for example, a semiconductor (IC) inspection apparatus, an IC is moved from a tray or the like containing an IC to be inspected to an inspection table having a probe for connection in order to inspect electrical performance. In the transfer device, the IC is moved by driving a component gripping portion having gripping means such as a robot hand by a driving device that enables high-speed movement in order to shorten the inspection time.

  As a drive source provided in the transport device, a servo motor or an ultrasonic motor capable of accurate positioning control and high-speed driving is used to shorten the inspection time (for example, Patent Document 1).

  However, in order to drive the stage at high speed and stop the table at a predetermined position as in Patent Document 1, it is necessary to further include a brake device as shown in Patent Document 2, for example.

JP 2008-218163 A JP 2004-60746 A

  However, in recent electronic component inspection devices, high accuracy is required for positioning when placing the electronic component of the inspection object on the inspection table, in addition to the drive device that moves the table having the component gripping portion at high speed, A table has come to be provided with a driving device that finely drives the component gripping portion. As a drive device provided in this table, a piezoelectric actuator that vibrates a piezoelectric element and drives an object to be driven is preferably used.

  However, when the table is braked by the brake device shown in Patent Document 2, an inertia force generated by the weight of the gripping portion is applied to the piezoelectric actuator that drives the gripping portion. When this inertial force exceeds the pressing force that drives the vibration transmission part provided in the piezoelectric element of the piezoelectric actuator against the driving object, slip occurs between the piezoelectric element and the driving object, and the accurate Positioning has become difficult. Further, by providing a brake device between the piezoelectric element and the driven object, slipping can be suppressed, but the device becomes large and complicated.

  Therefore, even when a piezoelectric actuator is used as the driving means, an actuator that can reliably brake without further provision of a braking device as a braking means, and a robot hand that enables accurate positioning control using the actuator , A robot, a transfer device, an electronic component transfer device, and an inspection device including the electronic component transfer device.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 An actuator according to this application example is provided with a piezoelectric element that vibrates when the flexural vibration mode is excited or vibrates when the flexural vibration mode and the longitudinal vibration mode are simultaneously excited, and the piezoelectric element. A driven body that comes into contact with the contact portion and is driven by vibration of the contact portion, a holding portion that includes holding means for holding the piezoelectric element, and the contact portion of the piezoelectric element via the holding portion. And a base having first urging means for urging the driving body, wherein the holding portion is a protrusion that abuts the driven body, and a second that urges the protrusion to the driven body. And an urging means.

  According to the actuator of this application example, the protrusion having the second urging unit that urges the braking unit to the driven body causes the driven body that is generated when the driven body is shifted from the driving state to the stopped state. In addition to the frictional force between the contact portion and the driven body when the piezoelectric element is stopped, that is, the braking force of the driven body generated by the contact portion, the friction between the braking means and the driven body against the inertial force of the driving body By generating a force, that is, a braking force that causes the braking means to stop the driven body, the driven body can be stopped at a predetermined position accurately in a short time. Therefore, even when the driven body is driven at a high driving speed, an actuator that can stop the driven body at an accurate stop position in a short time can be obtained.

  [Application Example 2] In the above application example, the frictional force between the contact portion of the piezoelectric element and the driven body is F0, and the total frictional force between the protruding portion and the driven body is FB. F0> FB.

  According to the application example described above, the driven body is reduced by reducing the sum of the frictional forces between the braking means and the driven body relative to the frictional force between the contact portion that drives the driven body and the driven body. As the braking force to be braked, the frictional force between the contact part and the driven body and the sum of the frictional force between the braking means and the driven body act to reliably brake and stop the driven body. An actuator capable of driving the driven body can be obtained.

  Application Example 3 In the application example described above, at least two protrusions are provided, and at least one of the protrusions is disposed on one driving direction side of the driven body with respect to the contact portion, At least one of the protrusions is disposed on the other driving direction side of the driving direction.

  According to the above application example, when the driving direction of the driven body is configured to be reciprocable with respect to the contact portion, a braking force that is not biased with respect to the reciprocating driving direction can be applied to the driven body. .

  [Application Example 4] The robot hand of this application example is a robot hand that grips an object using a plurality of fingers, and a base on which the plurality of fingers are movably installed, A drive unit that is provided on the base and drives a base end of the finger unit to change an interval between the plurality of finger units, and the drive unit includes the actuator described above. It is characterized by.

  According to the robot hand of this application example, even if a large number of motors are provided to increase the degree of freedom of movement, the robot hand can be made smaller and lighter than a robot hand using an electromagnetic motor or the like. Furthermore, since it is not necessary to provide a braking device separately from the actuator, a small and lightweight robot hand can be realized, and even when the finger is driven at high speed by the braking means, it is possible to stop at an accurate position, A robot hand that can realize fine movement can be obtained.

  Application Example 5 A robot according to this application example includes a piezoelectric element that vibrates when the flexural vibration mode is excited or vibrates when the flexural vibration mode and the longitudinal vibration mode are simultaneously excited, and a contact provided in the piezoelectric element. A driven body driven by vibration of the contact portion, a holding portion having holding means for holding the piezoelectric element, and the driven portion of the piezoelectric element via the holding portion. An actuator including a first urging means for urging the body, wherein the actuator includes a protrusion that contacts the driven body, and a protrusion that contacts the driven body. And second urging means for urging the body.

  According to the robot of this application example, since the driving resolution is fine and the driving is performed by the actuator including the driven body driven by the vibration of the contact portion in the flexural vibration mode of the piezoelectric element that vibrates at high speed, the work target is accurately And the robot can be accurately transported at high speed to the target position, shortening the operation time of the robot, and realizing high productivity. In addition, it is possible to assemble complex electronic devices. Further, when stopping a connecting portion such as a frame (arm portion) driven by an actuator, the frame can be accurately stopped at a predetermined position by providing the actuator with a protruding portion. Therefore, it is possible to obtain a robot capable of performing assembly work and inspection of complex electronic devices. Furthermore, since the runaway can be suppressed by the inertial force when the frame is stopped, a robot that enables safe work can be obtained. In addition, since the actuator is built in the robot hand connection part, the robot hand can be used to accurately grip the object, thus providing a robot capable of assembling and inspecting complex electronic devices. can do.

  Application Example 6 In the above application example, the frictional force between the contact portion of the piezoelectric element and the driven body is F0, and the total frictional force between the protruding portion and the driven body is FB. F0> FB.

  According to the application example described above, the driven body is reduced by reducing the sum of the frictional forces between the braking means and the driven body relative to the frictional force between the contact portion that drives the driven body and the driven body. As the braking force to be braked, the frictional force between the contact part and the driven body and the sum of the frictional force between the braking means and the driven body act to reliably brake and stop the driven body. A robot including an actuator that can drive a driven body can be obtained.

  Application Example 7 In the application example described above, at least two of the protrusions are provided, and at least one of the protrusions is disposed on one driving direction side in the driving direction of the driven body with respect to the contact portion. At least one of the protrusions is disposed on the other driving direction side of the driving direction.

  According to the above application example, when the driving direction of the driven body is configured to be reciprocable with respect to the contact portion, a braking force that is not biased with respect to the reciprocating driving direction can be applied to the driven body. A robot provided with an actuator can be obtained.

  Application Example 8 The conveyance device according to this application example includes a gripping unit that grips an object to be transported, and a driving unit that drives the gripping unit, and the driving unit vibrates by being excited in a bending vibration mode. Or a piezoelectric element that vibrates when the bending vibration mode and the longitudinal vibration mode are excited simultaneously, a driven body that is in contact with a contact portion provided in the piezoelectric element, and that is driven by the vibration of the contact portion; An actuator comprising: a holding unit including a holding unit that holds an element; and a base including a first biasing unit that biases the contact portion of the piezoelectric element to the driven body via the holding unit; The actuator includes a protrusion that abuts the driven body and a second urging unit that urges the protrusion toward the driven body.

  According to the transport device of this application example, the drive unit is provided with an actuator having a high drive resolution that can accurately stop the driven body at a predetermined position by providing the protrusion. The object to be conveyed can be accurately conveyed to the conveyance target position.

  [Application Example 9] In the above application example, the frictional force between the contact portion of the piezoelectric element and the driven body is F0, and the total frictional force between the protruding portion and the driven body is FB. F0> FB.

  According to the transport device of this application example, the driven member is driven by reducing the sum of the frictional force between the braking means and the driven body relative to the frictional force between the contact portion that drives the driven body and the driven body. As the braking force for braking the body, the frictional force between the contact part and the driven body and the sum of the frictional force between the braking means and the driven body act to make sure that the driven body is braked and stopped without fail. It is possible to obtain a transport device including an actuator that can drive the driven body.

  Application Example 10 In the above-described transfer device, at least two protrusions are provided, and at least one protrusion is disposed on one driving direction side of the driven body with respect to the contact portion. At least one of the protrusions is disposed on the other driving direction side of the driving direction.

  According to the above application example, when the driving direction of the driven body is configured to be reciprocable with respect to the contact portion, a braking force that is not biased with respect to the reciprocating driving direction can be applied to the driven body. A transfer device including an actuator can be obtained.

  Application Example 11 An electronic component transport apparatus according to this application example includes a gripping unit that grips an electronic component and a driving unit that drives the gripping unit, and the driving unit vibrates by being excited in a bending vibration mode. Or a piezoelectric element that vibrates when the bending vibration mode and the longitudinal vibration mode are excited simultaneously, a driven body that is in contact with a contact portion provided in the piezoelectric element, and is driven by vibration of the contact portion; An actuator comprising: a holding unit including a holding unit that holds the piezoelectric element; and a base including a first biasing unit that biases the contact portion of the piezoelectric element to the driven body via the holding unit. The actuator is provided with a projecting portion that contacts the driven body and a second urging means that urges the projecting portion against the driven body. .

  According to the electronic component conveying apparatus of this application example, since the driving resolution is fine and the driving is performed by the actuator including the driven body driven by the vibration of the contact portion in the flexural vibration mode of the piezoelectric element that vibrates at high speed, Can be accurately transported to the target position at high speed, and the electronic component transport operation time can be shortened, thereby realizing high productivity. Further, since the actuator is provided with the protruding portion, the gripping portion can be accurately stopped at a predetermined position. Therefore, the operation time of the electronic component conveying apparatus can be shortened, and high productivity can be realized.

  [Application Example 12] In the above application example, the frictional force between the contact portion of the piezoelectric element and the driven body is F0, and the total frictional force between the protruding portion and the driven body is FB. F0> FB.

  According to the application example described above, the driven body is reduced by reducing the sum of the frictional forces between the braking means and the driven body relative to the frictional force between the contact portion that drives the driven body and the driven body. As the braking force to be braked, the frictional force between the contact part and the driven body and the sum of the frictional force between the braking means and the driven body act to reliably brake and stop the driven body. An electronic component transport apparatus including an actuator capable of driving a driven body can be obtained.

  Application Example 13 In the application example described above, at least one of the protrusions is provided, and at least one of the protrusions is disposed on one driving direction side of the driven body with respect to the contact portion. At least one of the protrusions is disposed on the other driving direction side of the driving direction.

  According to the above application example, when the driving direction of the driven body is configured to be reciprocable with respect to the contact portion, a braking force that is not biased with respect to the reciprocating driving direction can be applied to the driven body. An electronic component transport device including an actuator can be obtained.

  Application Example 14 An electronic component holding unit including an electronic component holding unit that holds an electronic component, an electronic component holding unit moving device that moves the electronic component holding unit, and an electronic component transport unit An electronic component inspection unit that inspects, the electronic component transport unit includes a gripping unit that grips the electronic component, and a drive unit that drives the gripping unit, and the drive unit has a bending vibration mode. A driven piezoelectric element that is excited and vibrates, or a piezoelectric element that vibrates when the bending vibration mode and the longitudinal vibration mode are simultaneously excited and a contact portion provided in the piezoelectric element abuts, and is driven by vibration of the contact portion. A base including a body, a holding unit including a holding unit that holds the piezoelectric element, and a first biasing unit that biases the contact portion of the piezoelectric element to the driven body via the holding unit; Actu with And the actuator includes, on the holding portion, a protruding portion that comes into contact with the driven body, and second urging means that urges the protruding portion toward the driven body. And

  According to the electronic component inspection apparatus, since the driving resolution is fine and the driving is performed by the actuator including the driven body driven by the vibration of the contact portion in the flexural vibration mode of the piezoelectric element that vibrates at high speed, the grip portion is positioned at the target position. It is possible to accurately convey at a high speed, shorten the time for transporting electronic components, shorten the inspection time, and realize high productivity. Further, since the actuator is provided with the protruding portion, the gripping portion can be accurately stopped at a predetermined position. Therefore, the operation time of the electronic component inspection apparatus can be shortened, and high productivity can be realized.

  Application Example 15 In the above application example, the frictional force between the contact portion of the piezoelectric element and the driven body is F0, and the total frictional force between the protruding portion and the driven body is FB. F0> FB.

  According to the application example described above, the driven body is braked by reducing the sum of the frictional forces between the braking means and the driven body relative to the frictional force between the contact portion that drives the driven body and the driven body. As the braking force to be applied, the frictional force between the contact portion and the driven body and the sum of the frictional forces between the braking means and the driven body act to reliably brake and stop the driven body, but the contact portion is An electronic component inspection apparatus including an actuator that can drive a driving body can be obtained.

  Application Example 16 In the application example described above, at least two protrusions are provided, and at least one protrusion is disposed on one driving direction side of the driven body with respect to the contact portion. At least one of the protrusions is disposed on the other driving direction side of the driving direction.

  According to the above application example, when the driving direction of the driven body is configured to be reciprocable with respect to the contact portion, a braking force that is not biased with respect to the reciprocating driving direction can be applied to the driven body. An electronic component inspection apparatus including an actuator can be obtained.

The piezoelectric actuator which concerns on 1st Embodiment is shown, (a) is a top view, (b) is AA 'part sectional drawing shown to (a), (c) is BB' part sectional drawing shown to (a). The figure, (d) is CC 'part sectional drawing shown to (a). The piezoelectric element which concerns on 1st Embodiment is shown, (a) Front top view, (b) Side view, (c) Back plan view. The top view which illustrates typically operation | movement of the piezoelectric element which concerns on 1st Embodiment. The schematic diagram explaining the effect | action of the protrusion part in the piezoelectric actuator which concerns on 1st Embodiment. The schematic diagram explaining the effect | action of the protrusion part at the time of the drive in the piezoelectric actuator which concerns on 1st Embodiment. Sectional drawing which shows the other form of a protrusion part. The external view which shows the robot hand which concerns on 2nd Embodiment. The external view which shows the robot which concerns on 3rd Embodiment. The external view which shows the electronic component inspection apparatus which concerns on 4th Embodiment. The perspective view which shows schematic structure of Z moving apparatus of the electronic component conveyance part with which the electronic component inspection apparatus which concerns on 4th Embodiment is equipped.

  Embodiments according to the present invention will be described below with reference to the drawings.

(First embodiment)
1A and 1B show a piezoelectric actuator according to a first embodiment. FIG. 1A is a plan view, FIG. 1B is a cross-sectional view taken along line AA ′ shown in FIG. 1A, and FIG. B 'section sectional drawing, (d) is CC' section sectional drawing shown to (a). As shown in FIG. 1A, the piezoelectric actuator 100 (hereinafter referred to as actuator 100) biases the holding case 20 as a holding member, the piezoelectric element 10 held by the holding case 20, and the holding case 20. A base 50 including a spring fixing portion 50a to which a case spring 60 as a first urging means is attached, and a driven body 70 are provided.

  The driven body 70 is linearly driven in the H direction shown in the figure. The actuator 100 according to the present embodiment will be described by linear driving in the H direction indicated by the driven body 70, but the driven body may be driven to rotate. To the driven body 70, the urging portion 20 a of the holding case 20 is urged by the case spring 60 against the spring fixing portion 50 a provided in the base 50, and the piezoelectric element 10 is moved through the urged holding case 20. Be energized. The piezoelectric element 10 is provided with a protrusion 10a as a contact portion having a contact portion that contacts the contact surface 70a of the driven body 70. Although details will be described later, the protrusion 10a is elliptical by vibration of the piezoelectric element 10. It swings in a trajectory, and the driven body 70 is linearly driven in the H direction by this elliptical motion.

  As shown in FIGS. 1B and 1C, the holding case 20 includes a case main body 21 and pressing plates 22 a and 22 b that are fixed to the case main body 21 with screws 23. The piezoelectric element 10 is disposed between the support surface 21a of the case body 21 and the pressing plates 22a and 22b. The piezoelectric element 10 is disposed between the piezoelectric element 10 and the support surface 21a of the holding case 20, and the third support part 32 and the fourth support part 42 disposed between the piezoelectric element 10 and the pressing plate 22a. The first support portion 31 disposed opposite to the third support portion 32 via the piezoelectric element 10 is disposed between the piezoelectric element 10 and the pressing plate 22b, and the fourth support portion 42 is interposed via the piezoelectric element 10. Are held and fixed to the holding case 20 by being sandwiched by the second support portion 41 disposed opposite to the first support portion 41.

  The support portions 31, 32, 41, and 42 are formed of a buffer material and suppress the vibration of the piezoelectric element 10 from leaking to the holding case 20. As a buffer material for forming the support portions 31, 32, 41, 42, the dynamic viscoelasticity (tan δ) is 0.05 or less as a performance of preventing the vibration excited by the piezoelectric element 10 from leaking to the holding case 20. Is preferred. In dynamic viscoelasticity (tan δ), when a material is given a sinusoidal strain ε in a tensile mode, a phase δ that is delayed with respect to the input strain is generated in the generation of the stress σ generated in the material. It is dynamic viscoelasticity (tan δ) that uses this phase δ to quantify the dynamic viscosity of the material. That is, the fact that the dynamic viscoelasticity is large, that is, the phase δ is large, causes a delay in transmission of the applied strain inside the material. In other words, the transmission of vibration can be made slower, and vibration leakage to the holding case 20 can be suppressed. For example, rubber, elastomer, polyimide, polyethersulfone, or the like is preferably used as a buffer material for forming the support portions 31, 32, 41, and 42. However, since heat is easily generated by driving the actuator 100, heat resistance is improved. An excellent polyimide can be used more suitably.

  As shown in FIGS. 1A and 1D, the case body 21 has a braking terminal 81 as a protruding portion so as to contact the driven body 70, and the braking terminal 81 is biased toward the driven body 70. The braking terminal spring 82 as the second urging means is accommodated in the protruding portion accommodating hole 21b to constitute the braking portion 80. The braking portions 80 are respectively arranged on the left and right in the drawing along the driving direction H of the driven body 70 with respect to the protrusion 10 a of the piezoelectric element 10. In the present embodiment, an example in which the braking portions 80 are arranged at two locations is shown, but the present invention is not limited to this. For example, one or more braking portions 80 may be disposed on either the left or right side of the drawing along the driving direction H of the driven body 70 with respect to the protrusion 10 a of the piezoelectric element 10. Further, one or more braking portions 80 may be arranged on the left and right of the drawing along the driving direction H of the driven body 70 with respect to the protrusion 10 a of the piezoelectric element 10.

  As shown in the present embodiment, the braking unit 80 is preferably arranged on the left and right sides of the piezoelectric element 10 in the direction of the driving direction H with the projection 10a interposed therebetween. By arranging in this way, it is possible to appropriately distribute and act on the braking force to the driven body 70 described later. Moreover, although the brake terminal spring 82 of the coil spring is illustrated as the second urging means, the present invention is not limited to this. For example, you may form with resin, such as a leaf | plate spring, elastic rubber, or an elastic elastomer.

  FIG. 2 shows the form of the piezoelectric element 10, (a) is a front plan view, (b) is a side view, and (c) is a back plan view. As shown in FIG. 2A, in the piezoelectric element 10, electrodes 11, 12, 13, and 14 that excite bending vibration are formed on one surface 10c of the piezoelectric body 10b. Further, a common electrode 15 is formed on the other surface 10d. The piezoelectric body 10b is not limited as long as it is a piezoelectric material, but PZT (lead zirconate titanate) is preferably used. The electrode is not limited as long as it is a conductive metal. For example, Al, Au, Ag, W, Cu or the like is formed by a method such as sputtering or vapor deposition. Further, since the protrusion 10a comes into contact with the driven body 70 and drives the driven body 70 by its friction, the protrusion 10a is made of a material having a high coefficient of friction with the driven body 70 and having excellent wear resistance. And are fixed by a method not shown. Alternatively, it can be formed by coating the surface of the protrusion 10a formed integrally with the piezoelectric body 10b with a material having a high friction coefficient with the driven body 70 and having excellent wear resistance. As a material having excellent wear resistance used for the protrusion 10a, ceramics such as alumina is preferably used.

FIG. 3 is a plan view schematically illustrating the operation of the piezoelectric element 10. As shown in FIG. 3A, charges are applied between the electrodes 11 and 13 and the common electrode 15 shown in FIG. The vertical vibration indicated by the arrow shown in FIG. However, since the electrodes 12 and 14 are not charged, the longitudinal vibration is not excited, and as a result, the piezoelectric element 10 undergoes bending vibration due to the longitudinal vibration caused by the electrodes 11 and 13 and the no vibration of the electrodes 12 and 14. vibrates as the piezoelectric elements 10A, swings in the arrow direction of the elliptical orbit S _R of the protrusion 10a is illustrated. Swinging of S _R direction by elliptical orbit of the projections 10a is, to drive the driven body 70 that contacts the illustrated H _R direction.

Operation of the piezoelectric element 10, as will be explained with reference to FIG. 3 (b), in a state the driving direction of the driven member 70 in the H _R direction described with reference to FIG. 3 (a) described above is driven in the reverse H _L direction is there. As shown in FIG. 3B, the electrodes 12 and 14 and the common electrode 15 shown in FIG. 2 are charged, and the electrodes 11 and 13 are not charged. The vertical vibration indicated by the arrow shown in FIG. However, since the electrodes 11 and 13 are not charged, the longitudinal vibration is not excited, and as a result, the piezoelectric element 10 undergoes bending vibration due to the longitudinal vibration caused by the electrodes 12 and 14 and the no vibration of the electrodes 11 and 13. It vibrates as the piezoelectric elements 10B, swings in the arrow direction of the elliptical orbit S _L of the protrusion 10a is illustrated. Swinging of S _L direction by elliptical orbit of the projections 10a is, to drive the driven body 70 that contacts the illustrated H _L direction. Thus, by switching the addition of electric charges to the electrodes 11, 12, 13, and 14, the direction of bending vibration of the piezoelectric element 10 can be changed, and the driving direction of the driven body 70 can be easily switched.

Although it has been described with reference to FIGS. 3A and 3B that the driven body 70 is driven by the elliptical orbits S _R and S _L of the protrusion 10a, for example, as shown in FIG. FIG. 3 (c) shows details of the contact portion between the protrusion 10a and the driven body 70 in the case of driving in the _HR direction. As shown in FIG. 3 (c), the piezoelectric element 10 in the contact portion between the driven member 70 in the protruding portion 10a, the contact portion with respect to the driven member 70 by the elliptical orbit S _R by the vibration of the protrusion 10a A driving force F is generated by friction. With this driving force F, the driven body 70 is driven in the _HR direction. At this time, the contact portion F'acts as a reaction force of the driving force F with respect to the protrusion 10a, while the projections 10a and the H _R direction to try to move in the opposite direction, the reaction force F' The driving force F is transmitted to the driven body 70 by restricting and suppressing the movement of the protruding portion 10a, that is, the piezoelectric element 10, so that the bending vibration of the piezoelectric element 10 can be efficiently converted into driving of the driven body 70. it can.

  FIG. 4 shows the action of the braking unit 80 (see FIG. 1) for reliably stopping the driven body 70 driven by the bending vibration of the piezoelectric element 10 described above when the bending vibration of the piezoelectric element 10 is stopped. It is a schematic diagram explaining about. As shown in FIGS. 4A and 1, the protrusion 10 a of the piezoelectric element 10 is in contact with the contact surface 70 a of the driven body 70. Further, the braking terminal 81 of the braking unit 80 is also in contact with the driven body 70. As described above, the actuator 100 includes the case spring 60 as the first urging means for urging the driven body 70 with the predetermined force, and the driven body 70 has the braking terminal 81 of the braking section 80. A braking terminal spring 82 is provided as a second urging means for urging the power with a predetermined force. The case spring 60 applies a biasing force P <b> 1 to the case main body 21, and a biasing force to the driven body 70 of the protrusion 10 a is applied via the case main body 21. In addition, the urging force of the braking terminal 81 to the driven body 70 is applied to the braking terminal spring 82 by the urging force P2.

The operation when the actuator 100 shifts from the operating state to the stopped state will be described with reference to FIG. As shown in FIG. 4 (b), the case of the stop state from the state of being driven in the H _R direction driven body 70 are illustrated, the driven member 70 which is driven at a speed v and H _R direction An acceleration α is applied in the reverse direction to stop. At this time, the driven member 70 inertial force K acts on H _R direction. This inertial force K is calculated by assuming that the weight of the driven body 70 is weight m.
K = α × m
It becomes. Meanwhile, as means for damping the movement of H _R direction of the driven member 70, the frictional force between the contact surface 70a by the protrusion 10a of the piezoelectric element 10 is urged to the driven member 70, and the braking portion The frictional force with the contact surface 70a due to the braking terminal 81 provided in 80 being urged by the driven body 70 brakes and stops the driven body 70. These frictional forces are the frictional force R, the coefficient of friction between the contact surface 70a of the driven body 70 and the protrusion 10a or the braking terminal 81 is the coefficient μ, and the protrusion 10a or the braking terminal 81 is biased to the driven body 70. When the biasing force to be used is biasing force P,
R = μ × P
It becomes. The relationship between the frictional force R and the inertial force K is
K ≦ R
As a result, the driven body 70 is braked so as to stop.

In the actuator 100 according to this embodiment shown in FIG. 4A, the protrusions 10 a of the piezoelectric element 10 and the braking terminals 81 arranged at two locations are biased with respect to the driven body 70. . Therefore, the braking force _RT as the actuator 100 generated by the protruding portion 10a of the piezoelectric element 10 and the two braking terminals 81 is obtained as follows.

When the actuator 100 is in a stopped state, the braking force R ₁ by the protrusion 10a is expressed as follows: the friction coefficient between the protrusion 10a and the driven body 70 is the coefficient μ ₁ , and the urging force by the case spring 60 is the urging force P ₁ .
R ₁ = μ ₁ × P ₁ (1)
It becomes. Further, the braking force R ₂ by one braking terminal 81 is defined as a coefficient μ ₂ of a friction coefficient between the braking terminal 81 and the driven body 70 and an urging force of the braking terminal 81 by the braking terminal spring 82 as an urging force P _2. ,
R ₂ = μ ₂ × P ₂ (2)
It becomes. Therefore, the braking force _RT as the actuator 100 is
R _T = R ₁ + 2R ₂
= Μ ₁ × P ₁ + 2 × μ ₂ × P ₂ (3)
And
K ≦ R _T (4)
As a result, the driven body 70 is stopped. That is,
K ≦ (μ ₁ × P ₁ + 2 × μ ₂ × P ₂ ) (5)
It is expressed.

On the other hand, the case where the actuator 100 is driven will be described with reference to the conceptual diagram of FIG. FIG. 5 is a schematic diagram for explaining an operation in which the driven body 70 is driven by the bending vibration of the piezoelectric element 10 described above. As described with reference to FIG. 3, the actuator 100 has an elliptical orbit S that causes the bending vibration of the piezoelectric element 10 to be drawn on the protrusion 10 a and the protrusion 10 a generated by the biasing force of the case spring 60 (P <b> 1 shown in FIG. 4). The driven body 70 is driven by using the frictional force of the contact portion with the contact surface 70 a of the driving body 70 as the driving force of the driven body 70. Therefore, as shown in FIG. 5, the driving force F _H of the driven body 70 is
F _H ≒ μ ₁ × P ₁ (6)
It becomes. On the other hand, the brake unit 80 is always braked terminal 81 as described above is urged by the urging force P ₂ by the braking pin spring 81 to the driven member 70, the braking in the opposite direction to the driving direction H _R force R ₂ Is added.

Therefore, in order to drive the driven body 70 in the driving direction H _R in the actuator 100,
(2 × R ₂ ) <F _H (7)
That is, the total braking force applied to the driven body 70 by the braking terminal 81, that is, the total braking force (2 × R ₂ ) as the total friction force FB shown in the application example is the bending vibration of the piezoelectric element 10. Must be smaller than the driving force F _H as the frictional force F 0 between the protrusion 10 a and the driven body 70 shown in the application example.

Equation (2) and Equation (6) to Equation (7) above are
(2 × μ ₂ × P ₂ ) <μ ₁ × P ₁ (8)
It becomes. Here, when the protruding portion 10a of the piezoelectric element 10 and the braking terminal 81 are the same material, for example, alumina (Al ₂ O ₃ ), the material formed on the surface,
μ ₁ = μ ₂
Therefore, from equation (8),
(2 × P ₂ ) <P ₁ (9)
Can be derived. That is, by forming the protruding portions 10a and braking terminals 81 of the piezoelectric element 10 of the same material, against the biasing force P ₁ of the case the spring 60 is a first urging means, the brake terminals a second biasing means The actuator 100 can drive the driven body 70 in a predetermined direction by reducing the total sum of the urging forces P ₂ of the springs 82.

  As described above, the actuator 100 having the braking portion 80 including the braking terminal spring 82 as the second urging means that urges the braking terminal 81 toward the driven body 70 shifts the driven body 70 from the driving state to the stopped state. In this case, in addition to the braking force of the driven body 70 generated by the protrusion 10 a when the piezoelectric element 10 is stopped with respect to the inertial force K of the driven body 70, the braking terminal 81 of the braking section 80 is applied to the driven body 70. By generating the braking force, the driven body 70 can be accurately stopped at a predetermined position. Further, the bending vibration of the piezoelectric element 10 is reduced by reducing (weakening) the total spring force of the braking terminal spring 82 as the second biasing means relative to the spring force of the case spring 60 as the first biasing means. The driven body 70 can be driven without being obstructed by the braking unit 80.

  FIG. 6 shows another form of the braking unit 80. The braking unit 80A shown in FIG. 6 is in the form of a unit in which a braking terminal 81 and a braking terminal spring 82 are housed in a container 83. By accommodating the braking unit in the protruding portion accommodation hole 21b of the case body 21, the same operation and operation as the above-described braking unit 80 (see FIG. 1) can be obtained. By using such a braking unit 80A, a braking unit 80A having a different spring force of the braking terminal spring 82 is prepared, and the braking terminal spring 80A is recombined according to the situation of the braking force and the driving force by recombination of the braking unit 80A. By adjusting the spring force of 82, the actuator 100 having the optimum braking force and driving force can be obtained.

(Second Embodiment)
FIG. 7 is an external view showing a robot hand 1000 including the actuator 100 (see FIG. 1) according to the first embodiment. The actuator 100 provided in the robot hand 1000 shown in FIG. 7 is the actuator 100 according to the first embodiment, and the driven body 70 shown in FIG. It is used as a rotational drive motor for the joint part of the robot hand 1000. The robot hand 1000 includes a finger part 1200 connected to the base part 1100. An actuator 100 as a rotational drive motor is incorporated in a connection portion 1300 between the base portion 1100 and the finger portion 1200 and a joint portion 1400 of the finger portion 1200. The robot hand 1000 includes a control unit 1500, and the control unit 1500 drives the actuator 100 to rotate the connection unit 1300 and the joint unit 1400 to deform the finger unit 1200 into a desired form like a human finger. it can.

  By using the actuator 100 according to the first embodiment to the robot hand 1000 according to the present embodiment, when the finger unit 1200 is driven and a desired object is gripped, the finger unit 1200 is accurately stopped at a predetermined position. Therefore, when it is necessary to avoid strongly gripping a very fragile object or the like, it is possible to obtain the robot hand 1000 that does not damage the object by accurately driving the finger unit 1200.

(Third embodiment)
FIG. 8 is an external view showing a configuration of a robot 2000 provided with the robot hand 1000 according to the third embodiment. The robot 2000 includes a main body 2100, an arm 2200, and a robot hand 1000. The illustrated robot 2000 is classified as a so-called articulated robot. The main body 2100 is fixed on, for example, a floor, a wall, a ceiling, or a movable carriage. The arm unit 2200 is provided so as to be movable with respect to the main body unit 2100. The main body unit 2100 incorporates an actuator (not shown) that generates power for rotating the arm unit 2200, a control unit that controls the actuator, and the like. ing.

  The arm portion 2200 includes a first frame 2210, a second frame 2220, a third frame 2230, a fourth frame 2240, and a fifth frame 2250. The first frame 2210 is connected to the main body 2100 via a rotational refraction axis so as to be rotatable or refractable. The second frame 2220 is connected to the first frame 2210 and the third frame 2230 via a rotational refraction axis. The third frame 2230 is connected to the second frame 2220 and the fourth frame 2240 via a rotational refraction axis. The fourth frame 2240 is connected to the third frame 2230 and the fifth frame 2250 via the rotational refraction axis. The fifth frame 2250 is connected to the fourth frame 2240 via the rotational refraction axis. In the arm unit 2200, the frames 2210 to 2250 are rotated or refracted around each rotational refraction axis by the control of the control unit. The actuator 100 according to the first embodiment can be used as a drive device for the rotating / bending shaft connecting these frames.

  The robot hand connection unit 2300 is connected to the other of the fifth frames 2250 of the arm unit 2200 where the fourth frame 2240 is provided, and the robot hand 1000 is attached to the robot hand connection unit 2300. The robot hand connection unit 2300 incorporates an actuator 100 that applies a rotational motion to the robot hand 1000, and the robot hand 1000 can grip an object.

  When the actuator 100 according to the first embodiment is used for the rotating and bending shaft to which each frame is connected to the robot 2000 according to the present embodiment, the actuator 100 includes the braking unit 80 when the driven frame is stopped. Therefore, the frame can be accurately stopped at a predetermined position. Therefore, it is possible to obtain a robot capable of performing assembly work and inspection of complex electronic devices. Furthermore, since the runaway can be suppressed by the inertial force when the frame is stopped, a robot that can perform a safe work can be obtained. Further, since the robot hand connection unit 2300 incorporates the actuator 100 according to the first embodiment, the robot hand 1000 can accurately perform an operation of gripping an object, so that assembly work of a complicated electronic device is possible. And a robot capable of inspection and the like can be provided.

(Fourth embodiment)
FIG. 9 is an external view showing an electronic component inspection apparatus including an electronic component transfer apparatus as a transfer apparatus as an embodiment of the orthogonal robot including the actuator 100 (see FIG. 1) according to the first embodiment. An electronic component inspection apparatus 5000 (hereinafter referred to as an inspection apparatus 5000) illustrated in FIG. 9 includes a part 3000 (hereinafter referred to as an inspection unit 3000) having a function of inspecting electrical characteristics of an electronic component, and the electronic component between predetermined positions. And a transfer device part 4000 (hereinafter referred to as a transfer device unit 4000) as an electronic component transfer robot that is an electronic component transfer device that is transferred by the machine.

  An inspection apparatus 5000 shown in FIG. 9 includes a rectangular parallelepiped apparatus base 3010. The longitudinal direction of the apparatus base 3010 is defined as the Y direction, and the direction orthogonal to the Y direction in the horizontal plane is defined as the X direction. The vertical direction is the Z (−) direction.

On the device base 3010, a material supply device 3020 is installed on the left side in the drawing. A pair of guide rails 3031 a and 3031 b extending in the Y direction are provided on the upper surface of the material supply device 3020 so as to protrude over the entire width of the material supply device 3020 in the Y direction. A stage 3040 having a linear motion mechanism is attached to the upper side of the pair of guide rails 3031a and 3031b. The linear motion mechanism of the stage 3040 is, for example, a linear motion mechanism that extends in the Y direction along the guide rails 3031a and 3031b. When a drive signal corresponding to a predetermined number of steps is input to the linear motion mechanism, the linear motion mechanism moves the stage forward or backward, and the stage 3040 is moved along the Y direction by an amount corresponding to the number of steps. Move forward or backward. Surface facing the Z direction of the stage 3040 is mounting surface 3040A, the mounting surface 3040A is placed the electronic component E _D. The stage 3040 is provided with a suction-type substrate chuck mechanism. The substrate chuck mechanism is adapted to secure the surface 3040a mounting the electronic component E _D.

A second imaging unit 3052 as an imaging unit is installed on the Y direction side of the material supply device 3020 in the device base 3010. The second imaging unit 3052 includes an electric circuit board equipped with a CCD (Charge Coupled Devices) element that converts received light into an electric signal, an objective lens having a zoom mechanism, an epi-illumination device, and an automatic focusing mechanism. Yes. Thereby, when the electronic component E _D is located at a location facing the second imaging unit 3052, the second imaging unit 3052 can take an image of the electronic component E _D. The second imaging unit 3052 by taking after focusing by irradiating light to the electronic component E _D, it is possible to capture an image in focus.

In the apparatus base 3010, an inspection table 3060 is installed on the Y direction side of the second imaging unit 3052. The inspection table 3060 is a jig for receiving and transmitting electrical signals when inspecting the electronic component E _D.

A material removal device 3070 is installed on the device base 3010 on the Y direction side of the inspection table 3060. A pair of guide rails 3032a and 3032b extending in the Y direction are provided on the upper surface of the material removal device 3070 so as to protrude over the entire width. A stage 3080 having a linear motion mechanism is attached to the upper side of the pair of guide rails 3032a and 3032b. As the linear motion mechanism of the stage 3080, a mechanism similar to the linear motion mechanism included in the material supply device 3020 can be used. The stage 3080 moves forward or backward along the guide rails 3032a and 3032b. Surface facing the Z direction of the stage 3080 is the mounting surface 3080 a, the mounting surface 3080 a is placed the electronic component E _D.

  A rectangular parallelepiped support base 4010 is installed in the X (−) direction of the apparatus base 3010. Compared to the device base 3010, the support base 4010 has a higher shape in the Z (+) direction. Drive rails 4021a and 4021b as a pair of driven bodies extending in the Y direction are provided on the surface of the support base 4010 facing the X direction so as to protrude over the entire width of the support base 4010 in the Y direction. A Y stage 4030 having a linear motion mechanism that moves along a pair of drive rails 4021a and 4021b is attached to the X direction side of the drive rails 4021a and 4021b. At least one of the drive rail 4021a and the drive rail 4021b is the driven body 70 (see FIG. 1) of the actuator 100 according to the first embodiment. The linear motion mechanism of the Y stage 4030 includes the drive rail 4021a and the drive rail 4021b. The Y stage 4030 is provided relative to the fixed drive rails 4021a and 4021b by vibrating the piezoelectric element 10 provided in the Y stage 4030. It moves forward or backward along the drive rails 4021a and 4021b.

  A prismatic arm portion 4040 extending in the X direction is provided on a surface facing the X direction in the Y stage 4030. In the arm portion 4040, a pair of drive rails 4022a and 4022b extending in the X direction are provided on the surface facing the -Y direction so as to protrude over the entire width of the arm portion 4040 in the X direction. An X stage 4050 having a linear motion mechanism that moves along the drive rails 4022a and 4022b is attached to the −Y direction side of the pair of drive rails 4022a and 4022b. At least one of the drive rail 4022a or the drive rail 4022b is a driven body 70 (see FIG. 1) of the actuator 100 according to the first embodiment. The linear motion mechanism of the X stage 4050 includes the drive rail 4022a and the drive rail 4022b. The X stage 4050 is provided relative to the fixed drive rails 4022a and 4022b by vibrating the piezoelectric element 10 provided to the X stage 4050. It moves forward or backward along the drive rails 4022a, 4022b.

  The X stage 4050 is provided with a first imaging unit 3051 as an imaging unit and a Z moving device 4060. The first imaging unit 3051 has the same structure and function as the second imaging unit 3052. The first imaging unit 3051 and the second imaging unit 3052 constitute an imaging unit. The Z moving device 4060 includes a linear motion mechanism inside, and the linear motion mechanism moves the Z stage up and down. A rotating device 4070 is connected to the Z stage. The Z moving device 4060 can move the rotating device 4070 up and down in the Z direction. The linear movement mechanism of the Z moving device 4060 includes the Y stage 4030 driven along the drive rails 4021a and 4021b, the X stage 4050 driven along the drive rails 4022a and 4022b, and the actuator according to the first embodiment. 100 or the actuator 300 according to the second embodiment can be provided.

  The rotating device 4070 includes a rotating shaft 4070a, and a grip portion 3090 is connected to the rotating shaft 4070a. Thereby, the rotating device 4070 can rotate the gripping portion 3090 with the Z direction as an axis. The rotation device 4070 uses a rotation drive mechanism that is used to drive the driven body 70 (see FIG. 1) in the actuator 100 according to the first embodiment in the rotation direction, and is combined with a reduction device. It is comprised and rotates the rotating shaft 4070a to a predetermined angle. A step motor or a servo motor can be used as the rotation mechanism. In the case of a servo motor, the type of motor is not particularly limited, and an AC motor, a DC motor, a coreless motor, an ultrasonic motor, or the like can be used. The above-described Y stage 4030, X stage 4050, Z moving device 4060, rotating device 4070, and the like constitute a movable portion 4080.

A control device 3100 as a control unit is installed on the X direction side of the device base 3010. The control device 3100 has a function of controlling the operation of the inspection device 5000. Further, the control device 3100 has a function of inspecting the electronic component E _D. Each control device 3100 includes an input device 3100a and an output device 3100b. The input device 3100a is a keyboard, an input connector, or the like, and is a device that inputs an operator instruction in addition to signals and data. The output device 3100b is an output connector or the like that outputs to a display device or an external device, and outputs signals and data to other devices. In addition, it is a device that transmits the status of the inspection device 5000 to the operator.

In the above-described configuration, the main configuration of the inspection unit 3000 includes an apparatus base 3010, a material supply device 3020, a stage 3040, a first imaging unit 3051, a second imaging unit 3052, an inspection table 3060, a material removal device 3070, and a stage 3080. , and the like, removing feed material for electronic components E _D to be inspected, image processing, electrical characteristic measurement, and the like are performed. The main structure of the transport unit 4000 includes a support base 4010, drive rails 4021a and b, a Y stage 4030, an arm 4040, drive rails 4022a and b, an X stage 4050, a Z moving unit 4060, a rotating unit 4070, and the like. Yes, the electronic component E _D is transported from the material supply device 3020 to the inspection table 3060 and the material removal device 3070.

The inspection device 5000 for inspecting the electronic component E _D is generally installed in a clean environment, that is, a dust-proof environment. Although not shown, a plurality of probes for measuring the electrical characteristics of the electronic component E _D is disposed on the inspection table 3060, precisely position the probe should contact the electronic component E _D is for all of the probes The electronic component E _D must be transported from the material supply device 3020 to the inspection table 3060 so that the electronic component E _D is disposed on the inspection table 3060. Before the electronic component E _D is placed on the inspection table 3060, the probe position provided in the inspection table 3060 by performing image processing from the image of the electronic component E _D obtained by the first imaging unit 3051 and the second imaging unit 3052. Are accurately aligned by the transfer device unit 4000 and placed on the inspection table 3060.

Furthermore, since the electronic component E _D is the smaller and precise and multiple functions in progress, so-called total inspection has become common. Thus, the electronic components E series of inspection time of _D occupies since the quantity of the electronic parts E _D to be inspected is extremely large amount, it is required to allow a shorter time of the inspection process, especially inspection time shorten the transport time of the electronic parts e _D has been demanded. Therefore, by providing the inspection apparatus 5000 with the Y stage 4030, the X stage 4050, and further the Z moving apparatus 4060 provided with the actuator 100 according to the first embodiment, the acceleration time to a predetermined moving speed is shortened, that is, the acceleration. It is possible to shorten the transport time by increasing the speed and increasing the moving speed. Furthermore, the deceleration time from the increased moving speed to the stop is short, and the brake unit 80 provided in the actuator 100 brakes each stage in order to stop at an accurate position. Therefore, it is possible to control shorter transport time of the electronic parts E _D, it is possible to obtain a short electronic component testing device inspection time. Incidentally, as the electronic component E _D, it can be applied for example a semiconductor, a display device such as LCD, quartz devices, various sensor devices, ink jet head, as an electronic component testing apparatus for testing the various MEMS devices.

  FIG. 10 is a transparent perspective view showing a schematic configuration of the Z moving device 4060. As shown in FIG. 10, the Z moving device 4060 includes a plurality of driving devices that drive a rotating device 4070 including a grip portion 3090 in a predetermined direction. The driving apparatus includes piezoelectric actuators 100x, 100y, and 100θ serving as driving sources, and driven bodies 71 and 72 as driven bodies that are driven by the piezoelectric actuators 100x, 100y, and 100θ (hereinafter referred to as actuators 100x, 100y, and 100θ). , And a rotating device 4070 that is rotationally driven. Further, a linear motion mechanism (not shown) for linearly moving the rotating device 4070 in the Z direction shown in the drawing is provided.

As described above, Z movement device 4060 to grip the electronic component E _D by the gripping unit 3090 is moved by the Y stage 4030, X-stage 4050, to transport driving an electronic component E _D gripping the inspection station 3060. The inspection table 3060, a probe comprising a electrical contacts are arranged for inspecting the electrical performance of the electronic components E _D, electronic components E _D so that the electrode pads of the electronic component E _D contacts the probe position inspection It is placed on a table 3060. Electronic components E _D to be tested, a small, are densely many electrode pads arranged, the probe also thin electrode needles disposed examination table 3060 corresponding thereto are densely arranged. Thus, the alignment accuracy when mounting the electronic component E _D to the test stand 3060, a high level is required.

  As means for realizing this alignment accuracy, actuators 100x, 100y, and 100θ are provided as drive devices for driving the rotation device 4070 to the Z movement device 4060 as shown in FIG.

  The actuator 100x, 100y, 100θ provided inside the Z moving device 4060 shown in FIG. The actuator 100x drives the driven body 71, the actuator 100y drives the driven body 72, and the actuator 100θ drives the rotating device 4070. The actuator 100x is mounted on the Z moving device 4060 so as to drive the driven body 71 in the direction indicated by the arrow P, that is, in the X direction shown in the drawing, which is the moving direction of the X stage 4050. Although not shown, the driven body 71 includes a slide mechanism that can move only in the driving direction P. The actuator 100y is mounted so as to move in synchronization with the driven body 71 so as to drive the driven body 72 in the direction indicated by the arrow Q, that is, in the Y direction shown in FIG. Has been. In other words, the actuator 100 y is fixed to the driven body 71. The driven body 72 includes a slide mechanism (not shown) that can be driven in the P direction of the actuator 100x together with the actuator 100y and can move only in the Q direction relative to the actuator 100y.

  The actuator 100θ is fixed to the driven body 72, and rotates the rotation device 4070 relative to the driven body 72. By arranging the actuator 100x, the actuator 100y, and the actuator 100θ in this way, the Z moving device 4060 is moved to a predetermined stop position by the Y stage 4030 and the X stage 4050 (see FIG. 1) and stopped. The grip portion 1090 can be moved minutely, and the positional accuracy of the grip portion 1090 can be significantly improved.

The Z moving device 4060 grips the electronic component E _D from the material supply device 3020 and is moved to the inspection table 3060 at a high speed by the Y stage 4030 and the X stage 4050. The movement of the X stage 4050 and the Y stage 4030 is decelerated immediately before reaching the inspection table 3060, and the Z moving device 4060 stops at a predetermined position. At this time, an inertia force due to the stop acceleration of the Z moving device 4060 is generated in a portion having a weight such as the rotating device 4070 and the gripping portion 3090 provided in the Z moving device 4060. In response to this inertial force, the actuators 100x, 100y, and 100θ using the actuator 100 according to the first embodiment described above generate a sufficient braking force that does not cause the driven bodies 71 and 72 and the rotation device 4070 to slip. be able to.

Thus, actuators 100x, 100y, can be suppressed that the shift occurs in the relative position of the 100θ and the driven member 71 and the rotating device 4070, precisely probe position with the electronic component E _D in inspection table 3060 Can be positioned and mounted. Accordingly, even when a conveying device section 4000 for conveying the electronic components E _D at a high speed, it is possible to obtain an accurate electronic component E can be performed in a short time inspection and _D, highly productive electronic component testing device 5000 . In addition, the transfer device unit 4000 can be suitably used as an electronic component transfer device that can transfer electronic components with high accuracy and can position and place electronic components on an inspection table or a substrate with high accuracy. .

DESCRIPTION OF SYMBOLS 10 ... Piezoelectric element, 20a, 20b ... Holding part, 31 ... 1st support part, 32 ... 2nd support part, 41 ... 3rd support part, 42 ... 4th support part, 50 ... Base, 60 ... Case spring, 70: driven body, 80: braking section, 100: actuator.

Claims (16)

A piezoelectric element in which a flexural vibration mode is excited to vibrate, or the flexural vibration mode and the longitudinal vibration mode are simultaneously excited to vibrate;
A driven body that comes into contact with a contact portion provided in the piezoelectric element and is driven by vibration of the contact portion;
A holding unit comprising holding means for holding the piezoelectric element;
A base including first urging means for urging the contact portion of the piezoelectric element to the driven body via the holding portion;
The holding portion includes a protruding portion that comes into contact with the driven body, and a second biasing unit that biases the protruding portion toward the driven body,
The longitudinal vibration mode occurs along the direction in which the piezoelectric element and the driven body are aligned,
The first urging means and the second urging means are arranged along the direction in which the piezoelectric element and the driven body are arranged.
An actuator characterized by that. When the frictional force between the contact portion of the piezoelectric element and the driven body is F0, and the total frictional force between the protruding portion and the driven body is FB,
F0> FB
Is,
The actuator according to claim 1. Comprising at least two protrusions;
At least one protrusion is disposed on one drive direction side of the driven body with respect to the contact portion, and at least one protrusion is disposed on the other drive direction side of the drive direction. Yes,
The actuator according to claim 1 or 2, wherein A robot hand that grips an object using a plurality of fingers,
A base on which the plurality of fingers are vertically movable;
A drive unit that is provided on the base and drives the base end of the finger unit to change the interval between the plurality of finger units; and
The drive unit includes the actuator according to any one of claims 1 to 3.
Robot hand characterized by that. A piezoelectric element in which a flexural vibration mode is excited to vibrate, or the flexural vibration mode and the longitudinal vibration mode are simultaneously excited to vibrate;
A driven body that comes into contact with a contact portion provided in the piezoelectric element and is driven by vibration of the contact portion;
A holding unit comprising holding means for holding the piezoelectric element;
A base including a first urging means for urging the contact portion of the piezoelectric element to the driven body via the holding portion;
The actuator includes, in the holding portion, a protruding portion that comes into contact with the driven body, and a second biasing unit that biases the protruding portion toward the driven body .
The longitudinal vibration mode occurs along the direction in which the piezoelectric element and the driven body are aligned,
The first urging means and the second urging means are arranged along the direction in which the piezoelectric element and the driven body are arranged.
A robot characterized by that. When the frictional force between the contact portion of the piezoelectric element and the driven body is F0, and the total frictional force between the protruding portion and the driven body is FB,
F0> FB
Is,
The robot according to claim 5. Comprising at least two protrusions;
At least one protrusion is disposed on one driving direction side of the driven body with respect to the contact portion, and at least one protrusion is disposed on the other driving direction side of the driving direction. Yes,
The robot according to claim 5 or 6, wherein A gripping part for gripping the object to be transported, and a drive part for driving the gripping part,
The drive unit is
A piezoelectric element in which a flexural vibration mode is excited to vibrate, or the flexural vibration mode and the longitudinal vibration mode are simultaneously excited to vibrate;
A driven body that comes into contact with a contact portion provided in the piezoelectric element and is driven by vibration of the contact portion;
A holding unit comprising holding means for holding the piezoelectric element;
An actuator comprising: a base provided with first biasing means for biasing the contact portion of the piezoelectric element to the driven body via the holding portion;
The actuator includes, in the holding portion, a protruding portion that comes into contact with the driven body, and a second biasing unit that biases the protruding portion toward the driven body .
The longitudinal vibration mode occurs along the direction in which the piezoelectric element and the driven body are aligned,
The first urging means and the second urging means are arranged along the direction in which the piezoelectric element and the driven body are arranged.
A conveying apparatus characterized by that. When the frictional force between the contact portion of the piezoelectric element and the driven body is F0, and the total frictional force between the protruding portion and the driven body is FB,
F0> FB
Is,
The conveying apparatus according to claim 8, wherein Comprising at least two protrusions;
At least one protrusion is disposed on one driving direction side of the driven body with respect to the contact portion, and at least one protrusion is disposed on the other driving direction side of the driving direction. Yes,
The conveying apparatus according to claim 8 or 9, wherein A gripping part that grips an electronic component; and a drive part that drives the gripping part;
The drive unit is
A piezoelectric element in which a flexural vibration mode is excited to vibrate, or the flexural vibration mode and the longitudinal vibration mode are simultaneously excited to vibrate;
A driven body that comes into contact with a contact portion provided in the piezoelectric element and is driven by vibration of the contact portion;
A holding unit comprising holding means for holding the piezoelectric element;
An actuator comprising: a base provided with first biasing means for biasing the contact portion of the piezoelectric element to the driven body via the holding portion;
The actuator includes, in the holding portion, a protruding portion that comes into contact with the driven body, and a second biasing unit that biases the protruding portion toward the driven body .
The longitudinal vibration mode occurs along the direction in which the piezoelectric element and the driven body are aligned,
The first urging means and the second urging means are arranged along the direction in which the piezoelectric element and the driven body are arranged.
An electronic component conveying apparatus characterized by the above. When the frictional force between the contact portion of the piezoelectric element and the driven body is F0, and the total frictional force between the protruding portion and the driven body is FB,
F0> FB
Is,
The electronic component carrying apparatus according to claim 11. Comprising at least two protrusions;
At least one protrusion is disposed on one drive direction side of the driven body with respect to the contact portion, and at least one protrusion is disposed on the other drive direction side of the drive direction. Yes,
The electronic component conveying apparatus according to claim 11 or 12, An electronic component holding unit including an electronic component holding unit that holds an electronic component, an electronic component holding unit moving device that moves the electronic component holding unit, and an electronic component inspection that inspects the electronic component And comprising
The electronic component transport unit includes a gripping unit that grips the electronic component, and a drive unit that drives the gripping unit,
The drive unit vibrates when the flexural vibration mode is excited, or a piezoelectric element that vibrates when the flexural vibration mode and the longitudinal vibration mode are simultaneously excited, and a contact portion provided in the piezoelectric element abuts, A driven body driven by vibration of the section; a holding section having a holding means for holding the piezoelectric element; and a first biasing the contact portion of the piezoelectric element to the driven body via the holding section. A base including an urging means, and an actuator including:
The actuator includes, in the holding portion, a protruding portion that comes into contact with the driven body, and a second biasing unit that biases the protruding portion toward the driven body .
The longitudinal vibration mode occurs along the direction in which the piezoelectric element and the driven body are aligned,
The first urging means and the second urging means are arranged along the direction in which the piezoelectric element and the driven body are arranged.
An electronic component inspection apparatus. When the frictional force between the contact portion of the piezoelectric element and the driven body is F0, and the total frictional force between the protruding portion and the driven body is FB,
F0> FB
Is,
The electronic component carrying device according to claim 14. Comprising at least two protrusions;
At least one protrusion is disposed on one drive direction side of the driven body with respect to the contact portion, and at least one protrusion is disposed on the other drive direction side of the drive direction. Yes,
The electronic component inspection apparatus according to claim 14 or 15,

Images