JP6120310B2 - MICROSTRUCTURE DETECTION DEVICE AND METHOD, AND DETECTION DISC - Google Patents

Description

  The present invention relates to a detection apparatus and method for detecting a minute structure contained in a gas or a liquid, and a detection disk suitable for the detection.

  2. Description of the Related Art Conventionally, for example, a particle counter is widely known as an apparatus for detecting fine structures such as fine particles contained in a gas or a liquid. A region in which a gas or liquid containing fine particles flows is irradiated with laser light, and the intensity of the scattered light is measured to indirectly evaluate the size of the fine particles. However, since the counter cannot identify the type of the microstructure, for example, a device such as a flow cytometer that causes a fluorescent dye-attached antibody to specifically react with a detection target cell and emit light is known. . In addition, a method of detecting a minute structure by attaching it to a substrate or the like instead of floating or moving is also being studied.

  Optical discs are usually used for recording / playback of video, music, data, etc., but recently they have been studied for use as a device for detecting microstructures by taking advantage of the ability to scan a disk-shaped substrate plane at high speed. (See Patent Documents 1 and 2, Non-Patent Document 1, etc.). In an optical disc, data can be recorded depending on the presence or absence of pits or marks and the pit row or mark row can be reproduced in the original information recording application. For example, it is possible to detect the minute structure by regarding it as the pit or mark.

  The present inventors have conducted research and development on detection and analysis of microstructures using optical disks (see Non-Patent Document 1).

  In Patent Document 1, a mechanism of a specific reaction for capturing a specific microstructure is provided on a disk substrate in advance, and the detection is performed based on a change in optical characteristics caused by the reaction and attachment of the object.

  In Patent Document 2, in an analysis disc in which an analysis target is partially arranged, a marker is formed in the radial direction at the front and rear positions in the rotation direction with respect to the reading area in which the analysis target is disposed, and the pickup follows the track. The analysis method is shown in which the analysis target read in time series and the read signal of the marker are subjected to video processing for aligning the time axis based on the marker position, and the analysis target is acquired or the shape is counted. .

JP 2007-298470 A JP 2003-270128 A

59th Joint Conference on Applied Physics, Proceedings, 17p-B9-8, (Spring 2012)

  Conventionally, in the detection and analysis of microscopic structures such as various fungi (size: 0.1 μm to 10 μm) contained in the air or water, the method of detecting the microscopic structures by attaching them to a substrate and using optical means has high accuracy. It was low.

  For example, in the technique of Patent Document 1, a functional molecule having a molecular recognition function is immobilized on the outermost surface of an optical disk, and is intended for molecular detection. In Patent Document 1, in addition to unavoidable physical adsorption (non-specific adsorption), when the sample surface is dried, the specific reaction no longer functions, rather, the chemical substance becomes soil on the surface, and the detection of the micro structure is performed. There is a problem that it becomes difficult.

  In the technique of Patent Document 2, there is a possibility that the type of the microstructure can be specified based on the shape information of the analysis target, but the assumed size of the microstructure is exemplified by blood or the like, which is about 10 μm. is there. Therefore, in order to detect various fungi (size: 0.1 μm to 10 μm) contained in the air or water and to clearly reproduce the shape, it is necessary to perform measurement with higher accuracy.

  The technique of Non-Patent Document 1 developed by the inventors enables detection at the level of one influenza virus for the purpose of virus detection, and is effective in detecting a minute structure of about 100 nm. There is a problem that it is not suitable for detecting the shape and type of a microstructure having a size exceeding this.

  The present invention is intended to solve these problems, and the present invention detects or detects a microstructure contained in a gas or a liquid, for example, a microstructure smaller than 10 μm and larger than 0.1 μm. The purpose of this is to evaluate the shape of the microstructure by using a higher accuracy.

  The present invention has the following features in order to achieve the above object.

  The microstructure detection disk of the present invention is a disk in which a thin film layer is provided on a substrate having a track structure for tracking, and is optically readable in alignment with a plurality of tracks in the radial direction of the disk. A marker is formed, and the marker and the surface of the thin film layer to which the microstructure is attached are located within a focal depth of one detection light.

  In the microstructure detection method of the present invention, a microstructure is attached to the surface of a disk having a thin film layer on a substrate having a track structure for tracking, the detection light is scanned, and the disk is recorded on a plurality of tracks. By processing the detection signals from the markers formed in alignment in the radial direction of the thin film and the fine structure attached to the surface of the thin film layer with respect to the marker over a plurality of tracks, the position of the fine structure or It is characterized by detecting the shape.

  The microstructure detecting device of the present invention includes a rotating means for rotating a disk having a thin film layer on a substrate, a light irradiating means for irradiating the disk with light, and a detecting means for detecting light reflected from the disk. Signal processing means for processing the detected signal, the signal processing means comprising a plurality of markers arranged in a radial direction on a plurality of tracks of the disk, and a surface of the thin film layer of the disk The position or shape of the microstructure is detected by processing a signal of a plurality of tracks detected by scanning the microstructure attached to the surface with the marker as a reference.

  In the microstructure detection of the present invention, the marker can be formed in advance on a disk, or can be formed by recording on a thin film layer formed on a disk substrate by a laser beam scanning technique of a detection device. The total layer thickness of the thin film layer of the present invention is desirably 5 nm or more and 3.9 μm or less. Each of the markers of the present invention preferably has a length in the disc tangential direction longer than 10 μm. The thin film layer of the present invention is preferably composed of a single layer or a plurality of layers of nitrides, oxides, carbides, and sulfides. The thin film layer of the present invention is formed of a single layer of any one of nitride, oxide, carbide, and sulfide, and has an extinction coefficient of greater than 0 and less than or equal to 1 at the wavelength of the laser beam used for recording. preferable. When recording is not performed on the thin film layer, the extinction coefficient may be zero.

  In the fine structure detection method and apparatus of the present invention, the fine structure can be analyzed by using a marker extending in the radial direction and mapping the scan information of the read signal with the marker as a reference and performing mapping. .

  In the microstructure detection method and apparatus of the present invention, it is desirable that the side of the detection disk on which the microstructure is attached is separated from the reading side by the laser beam via the disk.

  The microstructure in the microstructure detection of the present invention is, for example, a microorganism.

  As in the present invention, in the structure of a detection disk used in a method of performing optical detection by attaching a microstructure to the surface of a disk, a marker is placed on a substrate or a thin film layer on the substrate, a plurality of tracks, and a radius. By arranging to be arranged in the direction, and providing the track portion marker, which is the focal position, and the surface of the thin film layer to which the micro structure adheres at the same height in the thickness direction of the disk, about 0.1 to 10 μm It is possible to detect, count, and observe the shape of the microstructure with high accuracy.

  The disc for detection of the present invention does not have a special structure for arranging the analysis target, and allows the analysis target to be uniformly attached to the surface of the disc, and the structure of the disc is simple. Therefore, the practical effect is great. In addition, the detection disk of the present invention can be used repeatedly. In addition, the detection disk of the present invention uses a single layer or a plurality of layers of nitride, oxide, carbide, and sulfide as a thin film layer, so that high-precision detection is possible even when used for a long period of time. Can be realized.

  According to the detection method of the present invention, the position and the shape of the microstructure are attached using an optical device that irradiates the disk with the detection light of the laser beam and detects the reflected light by attaching the microstructure to the disk surface. Can be detected with high accuracy, and the accuracy of specifying the type of microstructure based on the evaluation of the shape is improved.

  According to the detection apparatus of the present invention, by using the detection disk of the present invention with the detection apparatus improved from the conventional recording / reproducing apparatus for optical disks, it is possible to detect and count a fine structure of about 0.1 to 10 μm. , Shape observation, and type identification can be performed with high accuracy.

The figure which shows typically the cross-section of the disc for a detection in this invention. The top view which shows typically the fine structure of the track | truck and marker of the disc for detection in this invention. In the Example of this invention, the optical microscope image figure which shows that a marker and a microstructure are on the substantially the same surface. The figure showing the reflected light intensity signal (7a-7h) when the track | truck containing each marker (5a-5h) of FIG. 3 is scanned with a laser beam. The figure showing the result of having arranged each data of the reflected light intensity signal of FIG. 4 on the basis of a marker, and performing two-dimensional mapping.

  Embodiments of the present invention will be described below.

  The microstructure detection disk of the present invention will be described. FIG. 1 schematically shows a detection disk in the detection of a microstructure according to the present invention. The detection disk includes a substrate 1 provided with a track 2 having a groove structure and a thin film layer 3 formed on the substrate 1 so that a microstructure 4 to be detected can adhere to the surface of the detection disk. Is. FIG. 2 schematically shows the fine structure of the track and marker of the detection disk of the present invention. In the detection disc, a plurality of markers 5 aligned in a direction orthogonal to the plurality of tracks 2 (disc radial direction) are formed at the time of manufacturing the disc, or the markers 5 are formed by a light detection device, so that at the time of inspection A reference signal for measuring the position and shape of the microstructure can be obtained.

  The detection disk is a disk-shaped plate and has a structure similar to that of the optical disk. The cross section of the detection disk has a track structure for tracking for optical detection, as shown in FIG. FIG. 2 shows a part of the plane of the detection disk. As shown in the drawing as the tangential direction and the radial direction, the disk on which the thin film layer 3 is formed on the substrate 1 is provided with lands and grooves. The plurality of markers 5 aligned in the radial direction of the plurality of tracks 2 are formed with a predetermined length in the disc tangential direction along the tracks. In FIG. 2, the marker is formed on the groove, but it is obvious that the marker may be formed on the land. It suffices to form them at least in a direction perpendicular to the track.

  The microstructure detection apparatus of the present invention will be described. The detection apparatus of the present invention is basically the same as the structure and operation principle of the conventional optical recording / reproducing apparatus, except that the reflected light from the minute structure is detected instead of the information recording / reproducing function. To do. The fine structure detection apparatus of the present invention detects a light reflected from the disk, a rotating means for rotating a detection disk for attaching the fine structure to the surface, a light irradiating means for irradiating the disk with light. And a signal processing means for processing the detected signal. The signal processing means performs processing based on a marker signal from a marker signal provided on the disk aligned in a radial direction on a plurality of tracks and a signal of each track of the microstructure. The position and shape of the microstructure are detected.

  The microstructure detection method of the present invention will be described. In the detection method of the present invention, a microstructure is attached to the surface of a detection disk, light reflected from the disk is detected to obtain scanning information, and a plurality of tracks are aligned on the disk in the radial direction. The position and shape of the microstructure are analyzed from the signal of the marker portion and the signal of each track of the microstructure. Also, by mapping the marker signal and the signal of each track of the microstructure based on the marker signal, the position and shape of the microstructure can be analyzed and evaluated, and the type of the microstructure can be specified can do.

  In the present invention, since the microstructure contained in the gas or liquid is detected with high sensitivity, the entire sample surface can be used as the detection surface. Therefore, the detection probability can be improved and the sensitivity can be increased by increasing the detection area by always exposing the surface to the atmosphere or flowing water.

  In the above-mentioned Patent Document 2, an analysis target is set in an analysis target area, and markers are provided before and after the area. In addition, it is said that the shape analysis of the attached microstructure can be performed by arranging and reconstructing information obtained by a plurality of track scans based on the markers extending in the radial direction.

  By the way, as a marker for implementing high sensitivity, it is important to satisfy the following three points. First, the marker and the microstructure are at the same height in the thickness direction of the detection disk. Next, a marker is formed on the surface of the detection disk. Finally, markers are well distinguished from microstructures. The present invention satisfies these three points.

  In addition, in the above-mentioned patent document 2, what differs in the height in the sample of a marker and a micro structure is shown as a representative example. Since the size of the analysis target assumed in Patent Document 2 is relatively large, for example, 10 μm, the height of the marker and the microstructure in the sample is not a problem.

  Laser light for reading information from the disc is focused on the surface where the track (groove and / or land) is present. When the microstructure is in this focal plane, the information of the microstructure can be reproduced clearly, but when it is far from the focal plane and farther than the range of the depth of focus (which is the allowable range of deviation from the focus). As a result, information on the minute structure cannot be obtained, or only unclear information can be obtained. Note that since the depth of focus in an optical disk is generally given by wavelength / numerical aperture / numerical aperture, it is 3.9 μm for a CD optical system, 1.8 μm for a DVD optical system, and 1.0 μm for an HDDVD optical system. . Compared with the typical thickness of the optical disk substrate of 1.2 mm, it can be seen that this is a very narrow region of 1/300 or less.

  As the microstructure becomes smaller, it is important for detection and shape evaluation to obtain a clear scanned image with the marker. Therefore, the marker and the microstructure are positioned at the same height as possible in the thickness direction of the optical disk. It is optimal to have.

  The technique of the non-patent document 1 by the present inventors was able to detect both the marker and the polystyrene bead (micro structure) having a diameter of 100 nm in one scan by being at the same height position. A good example. However, since a polycarbonate disk substrate having a groove width of 0.34 μm and a groove pitch of 0.68 μm is used, one microstructure is only on one groove, on one land, or on the boundary thereof. There was no need to handle radial distribution in detection. The track pitch of the HDDVD-R / RW standard substrate using a laser light source having the same wavelength of 405 nm is 0.4 μm, and that of the current mainstream BD-RE standard is 0.32 μm. Even if the groove width is estimated to be about half of the track pitch, it is still larger than 0.1 μm. In other words, the measurement of a microstructure larger than the track width and smaller than 10 μm, or the upper limit thereof, is not limited to the clear reproduction of the shape of the microstructure. It is possible and realized only by being in the same focal plane in the vertical direction.

  In Patent Document 2, the analysis area is limited for the analysis target, and the analysis area is provided inside the disk, not on the disk surface.

  The marker provided on the track of the inspection disk of the present invention can be formed by two methods. The first is a method in which a marker is separately provided in advance on the land, the groove, or both when the substrate is manufactured. A thin film may be formed on the substrate on which the marker is formed, and optical adjustment such as reflectance may be performed. The second method is a method of forming a marker on a substrate having a general land and groove, and forming the marker by light irradiation. It is important that the thin film provided on the substrate has a property that does not change or hardly changes even when exposed to air or water.

  In the present invention, since the entire surface of the detection disk is used as a detection surface, there is a possibility that a fine structure may adhere to a portion where a marker is present. For this reason, the marker is required to be clearly distinguishable in length at least in a direction parallel to the track from the microstructure. In this way, high sensitivity of detection is realized by using the entire surface of the disk as a detection surface. Further, by making the focal plane the disk surface, clear shape information can be obtained with high accuracy. Stable measurement can be performed continuously by making the surface of the detection disk tough in an atmosphere of air or water.

  Regarding the production of the marker, as shown in FIG. 2, for example, as shown in FIG. 2, after forming the marker in a part of the tangential direction of an arbitrary or specific track, the end positions of the marker are aligned in the radial direction. Thus, it can be produced by forming similar markers in order on adjacent or neighboring tracks. When recording on a thin film, a marker extending in the radial direction can be prepared after the sample is prepared. On the other hand, in the case where it is provided in advance on the substrate, it is necessary to prepare it on a stamper which is a substrate copy source.

  The markers extending in the radial direction do not need to be provided from the inner circumference side to the outer circumference side of the radius portion where the track of the optical disk is located, and may be longer in the radial direction than at least the size of the minute object. The length in the tangential direction of the marker is a length that is significantly different from the size of the microstructure (0.1 to 10 μm), for example, 20 to 200 μm. desirable.

  As for the number of markers, it is preferable that there are at least three in order to specify the size of the microstructure in the radial direction. Thus, for example, if the presence of a microstructure is detected in a certain track and is not detected in both adjacent tracks, the size of the microstructure is the distance between the innermost track and the outermost track of the three tracks. You can see that it is smaller.

  In the present invention, the thin film layer is used to adjust the optical detection sensitivity when the microstructure is attached to the surface of the same layer. When the microstructure is read with transmitted light and when read with reflected light from the substrate side, it is desirable that the thin film layer has sufficient light transmittance.

  In the thin film layer, when a marker extending in the radial direction is not formed in advance on a track formed on the substrate, the marker is recorded by laser beam irradiation or the like by appropriately selecting the type of the thin film material. be able to. If the substrate has a marker extending in the radial direction in advance, the recording function of the thin film layer may be omitted. Here, recording specifically refers to a change in optical characteristics of the thin film layer when viewed from the reading side as a result of irradiation with high-power laser light. Further, when low-power laser light for reading evaluation is irradiated after recording, the optical constants of the unrecorded portion and the recorded portion are basically unchanged.

  The material of the thin film layer is generally used for optical discs for information recording, taking into consideration the optical transmittance at the wavelength of the laser beam used, the implementation of recording, etc. It can be used by appropriately selecting from materials and the like.

  In FIG. 1, the measurement of the fine structure by laser light irradiation can be performed from either the side where the fine structure adheres to the track or the side where there is no track and no fine structure is attached. For the following reason, it is preferable to perform the process from the direction where there is no track and the minute structure is not attached. If the gas and liquid containing the micro structure are on the same side as the optical system such as the optical pickup including the laser light source, the optical system will be easily contaminated or water will enter, and will not perform its function sufficiently. . In addition, when the measurement is performed constantly or frequently, the optical pickup covers a part of the surface of the sample (the detection disk and the microstructure are also referred to as a sample), so that the disk rotates, but the entire surface of the sample can be detected. It will be disturbed. Therefore, it is appropriate to use a system in which the disks are separated from each other.

  The thin film layer may be a single layer or a plurality of layers. In the case of multiple layers, each layer can have a function. Specifically, the recording layer and the protective layer can be separated, and recording can also be performed by reaction between two layers. However, from the viewpoint of easily producing a disc, it is better that the number of layers is small, and it is desirable to perform each function of optical adjustment, protection, and recording in a single layer.

  As a material for the thin film layer, various dielectric materials having optical transparency with respect to the laser beam wavelength used in the evaluation optical system can be used. Specifically, Al, Si, Ti, V, Cr, Mn, Co, Ni, Cu, Zn, Ga, Ge, Y, Zr, Mo, Pd, In, Sn, Sb, Te, Ce, Hf, Ta N, W, Pt, Bi and the like, oxides, carbides, and sulfides are preferable. Not only binary but also ternary and quaternary compounds may be used as appropriate.

  In order to provide a recording function, the material having light absorption with respect to the laser beam wavelength used in the evaluation optical system may be used. Even if each nitride, oxide, carbide, and sulfide is transparent at a constant ratio, it is possible to design a material that absorbs light by changing the ratio. For recording, specifically, the extinction coefficient at the wavelength of the laser beam to be used is preferably greater than 0 and 1 or less.

  As a recording mechanism for the thin film layer, there is an irreversible change caused by the thin film layer absorbing the laser beam and raising the temperature, for example, deformation, crystallization, change in composition ratio including thermal decomposition, etc. It is done.

  The lower limit of the layer thickness of the individual layers constituting the thin film layer is a layer thickness that finally leaves the range where the film formation of the thin film layer material to be used cannot cover the entire surface and becomes particulate, and finally becomes a film. The upper limit of the total thickness of the thin film layer is such that both sides of the thin film layer cannot be distinguished by the evaluation optical system (detection optical system), but in order to clearly reproduce the shape of the microstructure, the same optical It is preferably within the depth of focus of the system. Specifically, the total thickness of the thin film layer is desirably 5 nm or more and 3.9 μm or less. In an HDDVD-based optical system, the total thickness of the thin film layer is 5 nm or more and 1 μm or less. desirable.

  The thin film layer may be basically capable of capturing an unspecified number of microstructures, such as having adhesiveness on the surface of the same layer.

  The thin film layer does not need to be newly provided when markers perpendicular to a plurality of tracks are already formed on the substrate and it is not particularly necessary to adjust the optical detection sensitivity.

  It is desirable that the substrate has sufficient light transmittance in order to read out the microstructure with transmitted light or reflected light. Specifically, quartz, glass, etc. can be used in addition to plastics such as polycarbonate that are generally used for optical disks for information purposes. In order to read the adhesion of the minute structure by rotating the substrate, it is desirable that the shape of the substrate is a disk shape as in the case of an optical disk for information recording. The thickness of the substrate is at least thick enough to maintain its shape during rotation, and is preferably equal to or less than that of a CD for compatibility with an optical disc for current information recording. Specifically, it is preferably 0.1 mm or more and 1.2 mm or less.

  The track specification may be basically the same as that for information recording, and may be appropriately selected and adjusted according to the optical system to be used. The narrower the track pitch, the more the number of micro-structures scanned in the radial direction of the disk is expected to increase. Therefore, the wavelength of the laser light used is shorter than 350 nm and 800 nm or less so as to reduce the focused diameter. It is preferable that

  Even after the microstructure has adhered to the surface of the detection disk, the disk of the present invention can be used continuously. If the scanning information when the microstructure is attached by laser light is stored in a memory or the like, even if the microstructure is detected at the next scanning, it can be determined that it is the amount attached in the past. By subtracting past adhesions and obtaining the difference, it is possible to sequentially analyze based on new scanning information.

  When a sufficient signal-to-noise ratio cannot be obtained with one scan for the number of scans per track, a plurality of scans may be performed as necessary. By superimposing markers that are scanned at the same time as a reference, the signal-to-noise ratio can be greatly improved.

  In the optical design, when the kind of the deposit can be predicted in advance, quantitative evaluation can be performed from the prediction or actual measurement of the change in optical characteristics at the time of deposition. It can also be clearly distinguished from the reflected light intensity change of the marker portion.

(Example)
Embodiments of the present invention will be described below with reference to the drawings. The microstructure was detected using a disk-shaped detection disk as shown in FIG.

  A detection disk was produced in the following process. An InSn oxide thin film having a thickness of 140 nm was formed by sputtering on a polycarbonate disk substrate having a groove pitch of 0.68 μm and a thickness of 0.6 mm. The InSn oxide thin film corresponds to the thin film layer 3 in FIG. Specifically, an InSn oxide was used as a target, and the pressure in the film formation chamber was maintained at 0.5 Pa with argon gas and oxygen gas flowing at 4 sccm and 6 sccm, respectively, and the film was formed at a substrate temperature of room temperature. . When the complex refractive index of the obtained thin film layer was measured by a spectroscopic ellipsometry method, the refractive index at a wavelength of 405 nm was 2.2 and the extinction coefficient was 0.05.

  An experiment was conducted using an optical disk evaluation apparatus comprising an optical system having a wavelength of 405 nm and a numerical aperture of 0.65, and a marker was recorded at a linear velocity of 2.2 m / s and a laser light power of 8.5 to 9.5 mW. Eight markers having a length of about 145 μm were formed in the tangential direction at every other groove, that is, at a pitch of 1.36 μm. A plurality of markers from the markers 5a to 5h were formed so as to be arranged in the radial direction (see FIG. 3 described later). In the present application, these markers are also referred to as markers extending in the radial direction. In this embodiment, the marker extending in the radial direction is produced by recording an electrical signal output from the evaluation apparatus every time the disk rotates once, under the conditions of a period of 150 Hz and a duty ratio of 1%. A monotone mark (length 800 nm, 1.6 μm, 3.2 μm) with a duty ratio of 50% was recorded over the entire circumference of the disk and used to know the radial position of the marker in the radial direction.

  E. coli was grown overnight at 37 ° C. in a solution containing Luria-Bertani medium, and then separated into E. coli and the solution using a centrifuge. After discarding the solution and adding pure water, absorbance at a wavelength of 600 nm was measured. In this example, pure water was added to adjust the concentration of Escherichia coli so that the optical density was 0.1. 10 μl of the solution containing E. coli was dropped on a test disk on which markers in the radial direction were recorded.

  FIG. 3 shows an optical microscope image showing that the marker and the microstructure (E. coli 6) are substantially on the same plane. FIG. 3 shows the tangential direction of the track and the radial direction perpendicular thereto. The left side of FIG. 3 is an optical microscope image showing the end portion of the marker, and it can be seen that a plurality of markers from the markers 5a to 5h are arranged in the radial direction. FIG. 3 is an optical microscope image observed after the solution is naturally dried, and shows that Escherichia coli having a size of about 1 μm to several μm is dispersed.

  Using an optical disk evaluation apparatus, the laser light was scanned from the substrate side along the track from each marker, and the reflected light intensity signal was measured. For example, the marker 5c is scanned on the broken line in FIG.

  FIG. 4 shows the measurement results (7a to 7h) of reflected light intensity signals obtained by scanning 8 tracks including the markers (5a to 5h). Scanning was performed under the conditions of a linear velocity of 4.9 m / s and a laser beam power of 1.0 mW. The left side of the figure corresponds to the marker portion.

  FIG. 5 shows the result of arranging the measurement results on the basis of the marker in FIG. 4 and displaying the difference in reflected light intensity in shades of color. Compared with the optical microscope image of FIG. 3, there is a dark portion of a color indicating that the reflected light intensity is low at substantially the same position, and it can be seen that the distribution of E. coli in FIG. 3 could be reproduced.

  In this embodiment, the markers are produced every other groove, but by producing each groove, the marker pitch can be halved and a clearer image can be obtained. If the marker is formed on both the groove and the land and scanned, the marker pitch can be further halved.

  In addition, the example shown by the said embodiment etc. was described in order to make invention easy to understand, and is not limited to this form.

  The present invention can detect a microstructure or its shape optically with high accuracy using a detection disk, and in particular, various fungi contained in air or water (size: 0.1 μm to 10 μm). It is industrially useful because it is suitable for detection and analysis of microstructures such as

DESCRIPTION OF SYMBOLS 1, Board | substrate 2, Track 3, Thin film layer 4, Microstructure 5, 5a-5h Marker 6, E. coli 7a-7h Reflected light intensity at the time of track scanning including 5a-5h marker

Claims (4)

A disk having a thin film layer on a substrate having a track structure for tracking,
A plurality of tracks are formed with optically readable markers aligned along the radial direction of the disk,
The thin film layer is composed of a single layer or a plurality of layers of nitride, oxide, carbide, sulfide ,
The microstructure detection disk, wherein the marker and the surface of the thin film layer to which the microstructure is attached are located within a focal depth of one detection light.   2. The microstructure detection disk according to claim 1, wherein a total layer thickness of the thin film layer is 5 nm or more and 3.9 μm or less. Nitride on a substrate having a track structure for taking tracking, oxides, carbides, on the surface of the disk with a thin layer ing from either a single layer or multiple layers of sulfides, adhering the minute structure Let
Scanning the detection light, the detection signal from the marker formed by aligning the plurality of tracks in the radial direction of the disk and the fine structure adhering to the surface of the thin film layer is used as a reference for the marker over the plurality of tracks. A method for detecting a fine structure, wherein the position or shape of the fine structure is detected by processing as follows. Rotating means for rotating a disk having a thin film layer on a substrate, light irradiating means for irradiating the disk with light, detecting means for detecting light reflected from the disk, and signal processing for processing the detected signal Means and
The signal processing means includes a plurality of markers arranged in a radial direction on a plurality of tracks of the disk, and a single layer or a plurality of any of nitride, oxide, carbide, and sulfide of the disk The position or shape of the microstructure is detected by processing the signals of a plurality of tracks detected by scanning the microstructure attached to the surface of the thin film layer composed of layers with the marker as a reference. A microstructure detection device characterized by that.

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