JP6117589B2 - Stage device and electron beam application device - Google Patents

Description

  The present invention is applied to an electron beam application apparatus such as an electron beam inspection apparatus or an electron beam drawing apparatus that irradiates a specimen held in a vacuum with a charged particle beam of an electron beam or an ion beam (hereinafter collectively referred to as an electron beam). The present invention relates to the structure of the stage device to be equipped.

  Conventionally, in an electron beam application apparatus using an electron beam such as a scanning electron microscope, a container in which a stage device for holding and moving a sample such as a wafer or a mask is incorporated is to minimize the influence of magnetism on the electron beam. When the container itself is made of a magnetic material, or when the container is made of a non-magnetic material, a magnetic material for magnetic shielding is integrally provided outside or inside the container so that the influence of magnetism outside the container It is magnetically shielded so as not to reach

  In order to prevent the generation and fluctuation of magnetism in the container, the stage device itself is basically made of non-magnetic materials such as ceramics, aluminum alloy, titanium alloy, etc. Means are provided to minimize the effect of magnetism on the lines.

As a driving method of a conventional stage apparatus, a ball screw method that converts a rotational motion of a motor or the like into a linear motion is frequently used. In this method, for example, as shown in FIGS. 15 and 16, guide rails 102 and 102 are installed on the stage base plate 101 of the container 100, and the guide rails 102 and 102 are connected to a ball screw shaft 103. The first stage 104 is installed, and guide rails 105 and 105 are installed on the first stage 104 in a direction orthogonal to the guide rails 102 and 102, and a ball screw is inserted on the guide rails 105 and 105 via a guide. The second stage 107 connected to the shaft 106 is installed, and the motors 108 and 109 installed on the outside of the container 100 are driven to rotate the ball screw shafts 103 and 106, respectively, along the guide rails 102 and 102. The first stage 104 is moved along the guide rails 105, 105 to the second stage 107. By sliding, the stage apparatus is configured to displace the installed specimen holding stage on the second stage 107 to a predetermined position. In the figure, reference numeral 110 denotes a stage mirror attached along the upper surfaces of both sides across the corner of the sample holding stage 111.

As a sample such as a wafer to be inspected or processed is miniaturized, the stage device displaces the sample accurately in a predetermined direction by a minute distance or stably displaces the predetermined distance without unevenness in speed. There are demands for high-precision and high-performance functions. In the ball screw type stage apparatus shown in the figure, during inspection and processing using an electron beam, high-frequency vibrations generated from a large number of ball bearings due to motion conversion through the ball screw shaft are processed as noise and disturbance. There is a problem that the movement performance of the stage apparatus is remarkably deteriorated.
Another method of driving the stage device is to use an air servo or an ultrasonic motor as the stage drive means. The former is configured to keep the container in a vacuum while increasing the size of the container in which the stage device is stored. It is necessary to increase the processing accuracy of the parts, and the material cost tends to be high, and the latter has problems in deterioration with time and maintenance due to generation and use of dust.

  On the other hand, the use of a linear motor that is a so-called linear motion system that does not require a force transmission element such as the ball screw shaft as a stage drive means is considered from the viewpoint of simplicity of configuration and superiority of motion performance. In addition, a stage apparatus of an electron beam application apparatus in which a linear motor is used as a stage driving means has been put into practical use (see, for example, Patent Documents 1 and 2).

JP 2003-123680 A JP 2011-65956 A

  When the stage device of an electron beam application device is configured using a linear motor, the linear motor is a device that drives an object by electromagnetic force, so it must be considered so that the influence of the magnetic force by the linear motor is minimized. There is.

  As described in Patent Document 1, in a configuration in which a linear motor as a driving source is arranged outside the container, the magnetic force of the linear motor hardly affects the inside of the container, but the apparatus including the container can be downsized. It is difficult, the structure of the force transmission element and the like is complicated, the mechanical characteristics of the stage are lowered, and the original performance of the stage apparatus incorporating the linear motor is hindered and lowered.

On the other hand, when a stage apparatus incorporating a linear motor is installed in a magnetically shielded container, there are the following problems.
In other words, the stage that holds and moves the sample is usually a stage that can be displaced in two orthogonal directions defined by the X and Y axes, but the lower axis is small so that it occupies a small area and is compact. In general, an upper and lower biaxial stage structure is arranged such that an upper axis stage is superimposed on a stage. When such a biaxial stage is driven by a linear motor, the linear motor that drives the upper axis stage is installed on the lower axis stage together with the upper axis stage, and is displaced together with the upper axis stage by driving the lower axis stage. .
The upper-axis stage is a stage that holds a sample via a sample-holding stage installed on the upper surface thereof, and is placed close to the area where the specimen is inspected and processed by electron beam irradiation. As the upper axis stage is displaced, the magnetic force of the linear motor directly affects the electron beam irradiation area (magnetic field strength and fluctuating magnetic field), and drives the upper axis stage installed on the lower axis stage. Under the influence of the magnetic force of the linear motor, the magnetic field fluctuation in the electron beam irradiation region becomes large.

  When installing a stage device incorporating a linear motor in a container, as described in Patent Document 2, the movable element intersects with a pair of linear motors arranged so as to move in the same direction. A pair of linear motors are arranged so that the mover can move in the direction to be connected, and the opposite sides of the lower axis stage and the upper axis stage that are arranged vertically intersecting each other are respectively connected to the movers of the linear motor arranged at corresponding positions. If the stage device is configured, the linear motor that drives the upper axis stage is not close to the region to which the electron beam is irradiated, so that the influence of the magnetic force by the linear motor is reduced. However, this structure has a complicated structure, and the container for housing it must be large. Since the structure is complicated, the assembly is not easy, and adjustment is required to obtain the assembly accuracy of the constituent members. With this structure, it is difficult to configure the electron beam application apparatus at a low cost.

  In addition, the magnetically shielded container of the electron beam application device is maintained in a vacuum state in order to secure the incident trajectory of the electron beam, but when the linear motor is incorporated in the stage device, the heat generated by the excitation coil of the motor The surroundings are insulative due to the vacuum and the motor itself is heated to lower its performance and function, and the surrounding structure is also heated by heat transfer and radiant heat as the motor is heated. Will adversely affect the inspection and processing.

  In view of such problems of the prior art, the present invention is a simple and compact stage device for an electron beam application device that irradiates a sample with an electron beam, and can be used for a process for inspecting and processing a sample. On the other hand, it is configured to be able to minimize the influence of the magnetic force of the linear motor, thereby contributing to the cost reduction of the electron beam application apparatus.

  As described above, in a stage device in which a linear motor that drives the upper axis stage is installed on the lower axis stage to form an upper and lower two-axis stage configuration, when the linear motor is installed on the upper axis stage, The magnetic force of the linear motor is likely to be affected. Therefore, the stage apparatus according to the present invention is configured so that the linear motor is installed at a position away from the electron beam irradiation area and the motor stator of the linear motor is stationary when the lower shaft stage is moved. The stage device was configured so that the influence of the magnetic force of the linear motor on the irradiation region was minimized, and the configuration was simple and compact, and assembly and adjustment were easy.

That is, in order to solve the above-described problem, the present invention provides a stage device installed in a magnetic shielding container having an opening on an upper surface to which an electronic column is integrally attached . In the stage device configured to arrange the stage and the second stage so as to overlap each other and move linearly in directions orthogonal to each other by the first linear motor and the second linear motor, respectively.
On surface of the stage base plate, a pair of guide rails is installed, the motor fixing constituted by the first linear motor of the permanent magnet between the guide rail and one side of the sides of the stage base plate A child is arranged in parallel with the guide rail, and the permanent magnet of the second linear motor is interposed between the side rail on one side and the side rail on the other side adjacent to the guide rail and the guide rail. The configured motor stator is arranged in a direction perpendicular to the guide rail,
The first stage is attached so that its bottom part engages with the guide rails and can slide and displace on both rails, and a motor mover of the first linear motor is provided on the side part thereof. A pair of guide rails are installed on the upper surface of the first stage in a direction perpendicular to the traveling direction of the first stage along the guide rails;
The second stage is attached so that the bottom of the second stage can be slid and displaced on both rails by engaging the bottom part with the guide rail, and a sample holding stage for holding a sample is installed on the top. ,
Linear guide said the second stage a second linear motor of the motor mover, the stage coupling guide which is connected to the motor mover, provided along a side edge of at least one side of the second stage It has the structure attached and connected to the rail so that sliding was possible.

In the general stage having two orthogonal axes, the upper axis stage (second stage) is installed on the movable side of the lower axis stage (first stage). Here, a linear motor is used as the drive source for the upper axis stage, the side on which the magnet that is the magnetic generation source of the linear motor is provided is positioned away from the electron beam irradiation area, and the lower axis stage is moved. If it is configured so as not to move, the electron beam irradiation region is hardly affected by the magnetic force of the linear motor, and accurate sample inspection and processing accuracy can be ensured.
Further, as described above, if a linear motor is also used as the drive source for the lower axis stage and the motor stator side is a permanent magnet and is disposed at a position away from the electron beam irradiation area as described above, the linear motor The effect of magnetic force is reduced and magnetic fluctuations are eliminated, and the advantages of stage driving with a linear motor are provided on both axes.
In addition, when the container for accommodating the stage device is made entirely of a magnetic material or made of a non-magnetic material, a magnetic shielding magnetic material is integrally provided outside or inside the container to provide a magnetic shielding structure. By forming the periphery of the opening on the top surface to which the electron column is attached with a magnetic material, the magnetic lines of force in the container flow into the container peripheral surface on the magnetic material side, and in the opening, particularly in the central part thereof Magnetic field lines are less likely to flow, and can be made less susceptible to the effects of magnetic force from the linear motor.

In the stage apparatus configured as described above, the motor stators of the pair of linear motors that drive and displace the first stage and / or the second stage are respectively disposed on the stage base plates on both sides of the stage. be able to.
According to this, by connecting and driving a linear motor on both sides of the stage, the posture accuracy when moving the stage is improved, and the driving force required per motor is reduced, and the motor can be downsized. In addition, the influence of the magnetic force can be reduced by making the magnetic distribution of the linear motor symmetrical with respect to the electron beam irradiation region. Even if only one of the first stage and the second stage is arranged and driven on both sides thereof, the same effect can be expected.

Further, in the stage device having the above-described configuration, the motor stator of the linear motor that drives and displaces the first stage along one opposing two sides on the stage base plate, and the second stator along the other opposing two sides. The motor stators of the linear motors that drive and displace the two stages are arranged, and these motor stators are arranged between the magnets at the end of the motor stator adjacent to each other with the corner portion of the stage base plate interposed therebetween. It can be set as the structure installed so that polarity may differ.
In this way, by setting the magnetic poles of the magnets at the ends of the motor stators of adjacent linear motors to be different polarities, a magnetic field is formed between the ends of the adjacent motor stators, and the leakage magnetic field is eliminated. It is possible to reduce the influence of the magnetic field on the periphery of the stage apparatus.

Furthermore, in the stage apparatus having the above-described configuration, instead of installing the motor stator of the linear motor on the stage base plate, the motor stator is close to or in contact with the inner surface of the container made of a magnetic material, or is in contact with the motor stator. It can be set as the structure arrange | positioned so that it may overlap with the container inner surface through the member which consists of magnetic materials.
By doing so, the magnetic lines of force of the magnet of the motor stator of the linear motor flow into the container made of a magnetic material, and the influence of the magnetism inside the container and the influence of the magnetic field on the electron beam irradiation region in the opening are further increased. Can be reduced.

Moreover, in the stage apparatus having the above-described configuration, it is preferable that the linear motor is arranged outside the projection area on the stage base plate of the container opening.
According to this, a linear motor for driving the upper and lower stages is arranged outside the projection area on the stage base plate of the container opening so as not to enter the electron beam irradiation area as the projection area. By configuring, in the electron beam irradiation region, it becomes difficult to be affected by the magnetic force by the linear motor, and the accuracy of inspection and processing of the sample is ensured.

Furthermore, it is preferable that the stage device configured as described above has a configuration in which cooling means is integrally attached to the surface of the motor movable element of the linear motor.
According to this, the temperature rise of the linear motor is effectively suppressed to prevent its performance and function from being deteriorated, and the surrounding structure is heated by heat transfer or radiant heat due to the heat generated by the motor. In addition, it is possible to prevent the accuracy of inspection and processing of the sample from being lowered due to the heat generated by the linear motor.
As the cooling means, for example, a cooling jacket is integrally attached to the surface of the motor movable element, a cooling pipe block filled with an appropriate refrigerant is installed on the motor stator side, and the cooling jacket and the cooling pipe block are paired with a flexible. It can be configured so that the refrigerant flows between the cooling piping block and the cooling jacket by connecting with the conductive piping.

In addition, the electron beam application apparatus of the present invention is characterized by having a configuration including a container in which the stage device configured as described above is accommodated.
That is, the stage device having the above-described configuration is housed in a magnetically shielded container, and an evacuation unit such as a vacuum pump is provided to vacuum the interior of the container. Can be integrally attached to form an electron beam application apparatus.
According to this, it is possible to construct a high-performance electron beam application device with a simple structure and low cost by combining a high-precision stage with excellent motion performance and an electron column that is not easily affected by magnetism. .

In the electron beam application apparatus having the above-described configuration, it is preferable that the moving direction of the first stage of the stage device is a step axis and the moving direction of the second stage is a scan axis.
That is, in a stage that can be displaced in two orthogonal axes, in the case of an upper and lower stage in which the upper axis stage is placed on the lower axis stage, the movable mass of the upper axis stage is inevitably reduced, so it is continuous. The ability and accuracy of traveling (scanning ability and accuracy) are superior to those of the lower axis stage. On the other hand, the ability / accuracy (step ability / accuracy) of moving and stopping for a short distance is not significantly disturbed even if the movable mass increases. Therefore, if the moving direction of the first stage (lower axis stage) is set to the step axis and the moving direction of the second stage (upper axis stage) is set to the skip axis, a so-called scanning method stage is repeated. Ideal form.

  Moreover, if it is set as the structure which provided the collar part which protruded below in the periphery of the opening part of the container in which an electronic column is attached, a magnetic field line will become difficult to flow into the opening part of a container, and the influence of the magnetic force of a linear motor will be reduced more. It is possible.

It is a schematic plan view which shows the structure of one Embodiment of the stage apparatus of this invention. They are a side view (A) on the arrow A side in FIG. 1 and a side view (B) on the arrow B side. It is a schematic external view of the container in which a stage apparatus is accommodated. It is an expanded sectional view of the opening part of a container. FIG. 4 is a schematic plan view of a state in which the stage device of FIG. FIG. 6 is a transmission side view (A) on the arrow A side and a transmission side view (B) on the arrow B side in FIG. 5. It is a schematic plan view which shows the structure of other embodiment of the stage apparatus of this invention. FIG. 8 is a transmission side view (A) on the arrow A side and a transmission side view (B) on the arrow B side in FIG. 7. It is a schematic plan view which shows the structure of other embodiment of the stage apparatus of this invention. FIG. 10 is a transmission side view (A) on the arrow A side and a transmission side view (B) on the arrow B side in FIG. 9. It is a schematic plan view which shows the structure of other embodiment of the stage apparatus of this invention. They are the transmission side view (A) by the arrow A side in FIG. 11, and the transmission side view (B) by the arrow B side. It is the figure which showed the structure of the cooling means attached to a linear motor. It is the XIV-XIV sectional view taken on the line in FIG. It is a schematic plan view which shows the structure of the conventional ball screw type stage apparatus. It is the permeation | transmission side view (A) of the arrow A side in FIG. 16, and the permeation | transmission side view (B) of the arrow B side.

Preferred embodiments of the present invention will be described with reference to the drawings.
1 and 2 show an embodiment of a stage apparatus according to the present invention. This stage apparatus 1 includes a step axis stage (first stage) 12 and a scan axis stage (first stage) on a stage base plate 11. 2 stage) 13 are arranged in an overlapping manner on the upper and lower stages, and are configured so that the linear motor 14 of the step axis and the linear motor 15 of the scan axis move linearly in directions orthogonal to each other. In each of the linear motors 14 and 15, the motor stator is constituted by a permanent magnet and the motor movable element is constituted by an electromagnetic coil.

Specifically, the stage base plate 11 has a substantially square shape in plan view, and a pair of guide rails 16 and 16 are installed on the upper surface thereof with an appropriate interval therebetween, and on one side of the linear motor 14. The motor stator 14a is arranged in parallel with the guide rails 16 and 16, and the motor stator 15a of the linear motor 15 is placed on the guide rail on the other side adjacent to the one side and the corner. 16 and 16 are arranged in a direction orthogonal to the direction.

  The step shaft stage 12 has a rectangular shape in plan view, and is attached so that its bottom part can be slidably displaced on both rails by engaging the guide rails 16 and 16, and a linear motor is provided on the side part thereof. 14 motor movable elements 14b are integrally connected via a movable element connecting portion 14c, and are driven to move along the guide rails 16 and 16 by driving the linear motor 14.

  A pair of guide rails 17 and 17 are installed on the upper surface of the step axis stage 12 at an appropriate interval in a direction orthogonal to the guide rails 16 and 16, that is, a direction orthogonal to the traveling direction of the step axis stage 12. It is.

The scan axis stage 13 has a square shape in plan view, and is attached so that its bottom part can be slidably displaced on both rails by engaging the guide rails 17 and 17, and a linear guide rail is provided on the side part thereof. 13a is attached integrally.
A stage coupling guide 15d, which is connected to the motor movable element 15b of the linear motor 15 via a movable element coupling portion 15c and extends in parallel with the traveling direction of the step shaft stage 12, is the linear guide. When the linear motor 15 is driven, the power is transmitted to the scan axis stage 13 via the stage connection guide 15d, and the scan axis stage 13 is connected to the guide rails 17 and 13a. When the step axis stage 12 is displaced along the step axis stage 12, the stage connecting guide 15d is relatively slid along the linear guide rail 13a, so that the scan axis stage 13 is moved to the step axis. It is provided so as to be displaced integrally with the stage 12.

  A sample holding stage 18 for holding a sample is installed on the scan axis stage 13, and a stage serving as a measurement target (target) of a length meter used for stage position control is provided on the upper surface of the sample holding stage 18. Mirrors 19 and 19 are placed so that the length can be measured in two orthogonal directions, which are the movement axes of the stage.

As shown in FIG. 3, the stage apparatus 1 configured as described above is accommodated in a substantially cubic box-shaped container 2 made of a magnetic material. An opening 21 to which the electronic column 3 is integrally attached is formed on the upper surface of the container 2, and a flange 21 a protruding downward is provided on the periphery of the opening 21 as shown in FIG. 4.
Then, the stage device 1 is installed in the container 2, the electron column 3 is integrally attached to the opening 21, and an evacuation unit such as a vacuum pump that evacuates the container 2, and other samples are irradiated with an electron beam. An electron beam application apparatus is configured with a means and means for transporting a sample to the stage.

  As shown in FIGS. 5 and 6, in the stage apparatus 1, the linear motors 14 and 15 are arranged outside the projection area of the opening 21 onto the stage base plate 11, thereby allowing the stage apparatus 1 to In the beam irradiation region, it becomes difficult to be affected by the magnetic force of the linear motor, and accurate sample inspection and processing accuracy can be ensured.

7 and 8 show the form of the stage device 1, in which linear guide rails 13 a and 13 a are integrally attached to both sides of the scan axis stage 13, and the motor movable element 15 b of the linear motor 15 is connected to a motor. A mover connecting portion 15e guided by a linear guide 15f installed in the vicinity of the stator 15a is connected, and stage connecting guides 15d and 15d are attached to both ends of the mover connecting portion 15e, and both stage connecting guides 15d and 15d are attached. Are slidably coupled to the linear guide rails 13a and 13a, and both sides of the scan axis stage 13 are supported by stage coupling guides 15d and 15d.
According to this, by connecting the stage connection guides 15d and 15d to both sides of the scan axis stage 13, the cantilever type of the above-described form in which the stage connection guide 15d is connected only to one side of the scan axis stage 13 is provided. It is possible to run the scan axis stage 13 more stably than that.

9 and 10 show other forms of the stage device 1, in which the motor stators 14a and 15a of the linear motors 14 and 15 are directly placed on the lower surface of the container 2 made of a magnetic material. It was installed to touch.
By doing in this way, the magnetic lines of force of the magnets of the motor stators 14a, 15a of the linear motors 14, 15 flow directly to the container 2, and the influence of magnetism inside the container 2 can be reduced. Even if a member made of a magnetic material is interposed between the motor stators 14a and 15a and the inner surface of the container 2, the same effect can be expected.

11 and 12 show another form of the stage device 1, which is a motor stator 14 a, 14 a of the linear motor 14, 14 along one opposing two sides on the stage base plate 11. The motor stators 15a and 15a of the linear motors 15 and 15 are disposed along the other two opposite sides, and the linear motors 14 and 15 are disposed on both sides of the step axis stage 12 and the scan axis stage 13, respectively. Both stages are connected so that both stages are driven by a pair of linear motors 14 and 15.
By doing this, the attitude accuracy when moving the stage is improved, the motor can be miniaturized, and the magnetic distribution of the linear motor with respect to the electron beam irradiation area is symmetrized to reduce the influence of magnetic force. It is possible.
In this case, as shown in FIG. 11, the motor stators 14a and 15a have different polarities between the magnets at the end portions of the motor stators 14a and 15a adjacent to each other with the corner portion of the stage base plate 11 in between. If it arrange | positions, a magnetic field will be formed between the edge parts of adjacent motor stators 14a and 15a, a leakage magnetic field will be lost, and the influence of the magnetic field to the stage apparatus 1 periphery can be reduced.

  13 and 14 show cooling means attached to the motor movable elements 14b and 15b of the linear motors 14 and 15, and this cooling means 4 is a cooling jacket 41 attached integrally to the surface of the motor movable elements 14b and 15b. And a cooling pipe block 42, which is an appropriate refrigerant distribution and concentrating portion, installed on the motor stators 14a and 15a side, and the cooling jacket 41 and the cooling pipe block 42 are appropriately provided with flexibility such as a tube. The refrigerant is circulated between the cooling pipe block 42 and the cooling jacket 41 by connecting with a pair of flexible pipes 43 and 43 so that the reaction force is constant so as not to disturb the stage movement. Thus, the motor movable elements 14b and 15b are configured to be cooled. The cooling jacket 41 is formed of a material having good thermal conductivity. The cooling pipe block 42 is connected to a pipe (not shown) that enables supply and discharge of the refrigerant from the outside of the container 2.

  In addition, the form shown in figure is an example, This invention is not limited to this, Moreover, it is possible to comprise in another appropriate form combining the said form.

DESCRIPTION OF SYMBOLS 1 Stage apparatus, 11 Stage base board, 12 Step axis stage (1st stage), 13 Scan axis stage (2nd stage), 13a Linear guide rail, 14, 15 Linear motor, 14a, 15a Motor stator, 14b , 15b Motor movable element, 14c, 15c, 15e Movable element coupling part, 15d Stage coupling guide, 15f Linear guide, 16, 17 Guide rail, 18 Sample holding stage, 19 Stage mirror, 2 container, 21 Opening part, 21a collar part 3, electronic column, 4 cooling means, 41 cooling jacket, 42 cooling piping block, 43 flexible piping

Claims (9)

A stage device (1) installed in a magnetic shielding container having an opening on an upper surface to which an electronic column is integrally attached , wherein a first stage (12) and a second stage are placed on a stage base plate (11). The stage device (13) is arranged so as to overlap the upper and lower stages, and the first linear motor (14) and the second linear motor (15) respectively move in a direction perpendicular to each other. In 1)
On surface of the stage base plate (11), a pair of guide rails (16, 16) is disposed, between the and the one side of the sides of the stage base plate (11) guide rails (16, 16) A motor stator (14a) constituted by a permanent magnet of the first linear motor (14) is arranged in parallel to the guide rails (16, 16), and the side and corner portions on the one side are arranged. A motor stator (15a) composed of a permanent magnet of the second linear motor (15) is interposed between the guide rails (16, 16) between the other side and the guide rails (16, 16). 16) is arranged in a direction orthogonal to
The first stage (12) is attached so that the bottom of the first stage (12) can be slidably displaced on both rails by engaging the bottom of the first stage (12, 16). The motor movable element (14b) of the linear motor (14) is connected, and the first stage (12) travels along the guide rails (16, 16) on the upper surface of the first stage (12). A pair of guide rails (17, 17) are installed in a direction perpendicular to the direction,
The second stage (13) is attached so that the bottom part of the second stage (13) engages with the guide rails (17, 17) and can slide and displace on both rails, and holds the sample on the upper part thereof. A sample holding stage (18) is installed,
It said second stage (13) and said second motor movable element of the linear motor (15) (15b) is, the stage was connected to the motor movable element (15b) connecting guide (15d), a second stage ( 13) A stage apparatus (1) characterized by having a configuration in which it is slidably attached to and connected to a linear guide rail (13a) provided along a side end of at least one side of 13).   Motor stators (14a, 15a) of a pair of linear motors (14, 15) that drive and displace the first stage (12) and / or the second stage (13), respectively, are stage bases on both sides of the stage. The stage device (1) according to claim 1, characterized in that it has a configuration arranged on a plate (11).   The motor stator (14a) of the linear motor (14) that drives and displaces the first stage (12) along one opposite two sides on the stage base plate (11), and the other opposite two sides A motor stator (15a) of a linear motor (15) for driving and displacing the second stage (12) along each is disposed, and the motor stators (14a, 15a) are arranged on a stage base plate ( 11. The stage apparatus (1) according to claim 1, wherein the stage apparatus (1) has a configuration in which the magnets at the end portions of the motor stator adjacent to each other across the corner portion of 11) are arranged to have different polarities.   Instead of installing the motor stator (14a, 15a) of the linear motor (14, 15) on the stage base plate (11), close to or in contact with the inner surface of the container (2) made of a magnetic material. Or a structure arranged to overlap the inner surface of the container (2) through a member made of a magnetic material in contact with the motor stator (14a, 15a). Stage equipment.   A linear motor (14, 15) has the structure arrange | positioned on the outer side of the projection area | region on the stage base plate (11) of a container opening part (21) in any one of Claims 1-4 characterized by the above-mentioned. The stage apparatus as described.   The stage device according to any one of claims 1 to 5, wherein the cooling device (4) is integrally attached to the surface of the motor movable element (14b, 15b) of the linear motor (14, 15). (1).   The electron beam application apparatus provided with the container (2) which accommodated the stage apparatus (1) in any one of Claims 1-6.   The electronic device according to claim 7, wherein the moving direction of the first stage (12) of the stage device (1) is a step axis and the moving direction of the second stage (13) is a scan axis. Wire application equipment.   9. The electron beam application apparatus according to claim 7 or 8, characterized in that a flange (21a) projecting downward is provided at the periphery of the opening (21) of the container (2) to which the electronic column is attached. .

Images