JP6054499B1 - Porous graphene filter manufacturing method, porous graphene filter manufactured using the same, and filter device using the same - Google Patents

Abstract

A method of manufacturing a porous graphene filter by artificially forming pores having a very small size in graphene having a carbon monoatomic layer structure and using a plurality of porous graphene filters having pores, and the manufacture A porous graphene filter manufactured by the method is provided. During deposition of carbon atoms generated from a carbon source for graphene formation, a first cell having a first size is substituted by replacing some of the carbon atoms with substituted atoms generated from a substitution source. Forming a first graphene filter with pores and replacing some of the carbon atoms with substitution atoms generated from the substitution source during the deposition of the carbon atoms generated from the carbon source for graphene formation; To form a second graphene filter in which second pores having a second size larger than the first size are formed in the graphene, and the first and second graphene filters are disposed inside the filter body including the inlet and the outlet. By arranging, a specific substance can be selectively filtered from a mixture of a plurality of substances. [Selection] Figure 1

Description

  The present invention relates to a method for manufacturing a porous graphene filter and a porous graphene filter manufactured using the method, and more specifically, the present invention relates to a specific method from a mixture in which at least two different substances are mixed. The present invention relates to a porous graphene filter manufacturing method capable of selectively filtering a substance using porous graphene, a porous graphene filter manufactured using the same, and a filter device using the same.

  In recent years, the technological development of graphene containing carbon monoatomic layers has been progressing rapidly.

  Graphene includes a monoatomic layer formed of a single carbon atom. It has excellent conductivity compared to copper, high electron mobility compared to silicon, and very high strength compared to steel. It is a new material with various advantages, and is applied to various fields such as ultra-high-speed semiconductors, flexible displays using transparent electrodes, computer parts, and high-efficiency solar cells.

  Patent Document 1 discloses a method for producing a graphene-polymer composite filter using a solution containing graphene.

  BACKGROUND ART Graphene used for conventional semiconductors, displays, computer parts, solar cells, and the like has been developed in a direction that prevents defects such as through holes from being formed in graphene.

Korean Published Patent No. 10-2013-0033794

  Therefore, the present invention has been made in view of the above circumstances, and the object thereof is to provide graphene in which extremely small pores are artificially formed in graphene during the formation of graphene having a carbon monoatomic layer structure. A porous graphene filter including a plurality of porous graphene filters for selectively filtering a specific substance from a mixture in which a plurality of substances are mixed, a method for manufacturing a porous graphene filter, and a filter device using the same Is to provide.

  In one embodiment, a method for manufacturing a porous graphene filter replaces some carbon atoms with substitution atoms generated from a substitution source during deposition of carbon atoms generated from the carbon source for graphene formation. During the step of forming the first graphene filter in which the first pores having the first size are formed and the deposition of carbon atoms generated from the carbon source for graphene formation, some carbon atoms are removed. Forming a second graphene filter in which second pores having a second size larger than the first size are formed in graphene by substituting with substitution atoms generated from a substitution source; and first and second graphenes Placing the filter inside a filter body comprising an inlet and an outlet.

  In some embodiments, the substitution source that forms the first pores in the first graphene filter and the substitution source that forms the second pores in the second graphene filter include nitrogen atoms.

  In some embodiments, the supply amount of the substitution source in the step of forming the first graphene filter is smaller than the supply amount of the substitution source in the step of forming the second graphene filter.

In some embodiments, the carbon source is methane (CH ₄ ), methanol (CH ₃ OH), carbon monoxide (CO), ethane (C ₂ H ₆ ), ethylene (C ₂ H ₄ ), ethanol (C ₂ H ₅ OH), acetylene (C ₂ H ₂ ), acetone (CH ₃ COCH ₃ ), propane (C ₃ H ₈ ), propylene (C ₃ H ₆ ), butane (C ₄ H ₁₀ ), pentane (C ₅ H ₁₂ ), pentene (C ₅ H ₁₀ ), cyclopentadiene (C ₅ H ₆ ), hexane (C ₆ H ₁₄ ), cyclohexane (C ₆ H ₁₂ ), benzene (C ₆ H ₆ ), toluene (C ₇ H ₈ ) and at least one selected from the group consisting of xylene (C ₈ H ₁₀ ).

In some embodiments, the substitution source is ammonia (NH ₃ ), hydrazine (N ₂ H ₄ ), pyridine (C ₅ H ₅ N), pyrrole (C ₄ H ₅ N), acetonitrile (CH ₃ CN), Nitric acid (HNO ₃ ), silver nitrate (AgNO ₃ ), barium nitrate (Ba (NO ₃ ) ₂ ), N, N-dimethylformamide ((CH ₃ ) ₂ NCHO), lithium nitride (Li ₃ N) and cyanuric chloride (C _At least one selected from the group consisting of ₃ Cl ₃ N ₃ ).

  In some embodiments, when the first or second graphene filter is formed, the carbon source and the substitution source are supplied to a vapor deposition furnace that is vaporized simultaneously to form the first or second graphene filter.

  In the porous graphene filter of one embodiment, first pores having a first size formed by substituting a part of carbon atoms having a crystal defect in a covalent bond portion in graphene with a substitution atom are formed. And a second pore having a second size formed by substituting a part of a carbon atom having a crystal defect in a covalent bond portion in the graphene with a substitution atom. A graphene filter, and a filter body in which the first and second graphene filters are fixed on a path along which the mixture moves after the mixture of a plurality of substances is introduced into the filter body.

  In some embodiments, the first and second graphene filters of the porous graphene filter are each independently formed in a film shape or a cylindrical shape.

  In one embodiment, the present invention provides a mixture supply apparatus for sequentially supplying a predetermined amount of a mixture containing substances having different sizes from each other, and at least two on the inlet and the side through which the mixture is introduced. At least one graphene in which pores are formed, which are arranged between the filter body with one outlet and the outlet in the filter body for separating individual substances in the mixture, respectively Provided is a filter device comprising a thin film and a recovery unit connected to a discharge port for recovering each substance separated from a mixture.

  In some embodiments, the mixture supply device of the filter device includes a mixture providing unit for providing a mixture, a storage container for receiving a predetermined amount of the mixture, and a discharge unit for discharging the mixture from the storage container. Prepare.

  In some embodiments, the discharge unit of the filter device comprises a blower that provides air or inert gas to the storage container.

  In some embodiments, the filter device further comprises an electronic valve coupled to the mixture supply device, the graphene filter, and the recovery unit, and a valve controller that controls the electronic valve.

  In some embodiments, the graphene filter of the filter device includes a first graphene filter disposed inside the filter body and having first pores having a first size, and the first graphene inside the filter body. A second graphene filter disposed to face the filter and having second pores having a second size.

  A method for manufacturing a porous graphene filter according to the present invention and a porous graphene filter manufactured using the method are a graphene thin film having a carbon monoatomic layer structure, and the graphene thin film is artificially very thin during graphene formation. By having a graphene thin film that can be manufactured by a method in which small-sized pores are formed, it is possible to selectively filter and separate a specific substance from a mixture of a plurality of substances.

It is a flowchart which shows the manufacturing method of the porous graphene filter which concerns on one Embodiment of this invention. It is a top view which shows the 1st graphene filter of FIG. It is a top view which shows the 2nd graphene filter of FIG. It is a block diagram which shows the apparatus which manufactures the 1st graphene filter or 2nd graphene filter shown in FIG. It is sectional drawing which shows the porous graphene filter which concerns on one Embodiment of this invention. It is a conceptual diagram which shows the filter process of the porous graphene filter of FIG. It is a perspective view of a film-form 1st or 2nd graphene filter. It is a perspective view of a cylindrical 1st or 2nd graphene filter. It is a block diagram which shows the filter apparatus which concerns on other embodiment of this invention.

  In the following description, it should be noted that only parts necessary for understanding the embodiments of the present invention are described, and descriptions of other parts are omitted so as not to obscure the gist of the present invention. It is.

  Terms and words used in the specification and claims described below should not be construed as limited to ordinary or lexicographic meanings, and the inventor shall best understand his invention. In order to explain in a method, it should be interpreted in a meaning and concept consistent with the technical idea of the present invention in accordance with the principle that it can be appropriately defined by the concept of terms. Accordingly, the embodiments described in the present specification and the configurations shown in the drawings are merely preferred embodiments of the present invention and do not represent any technical ideas of the present invention. It should be understood that various equivalents and modifications may be substituted for them.

  The term “graphene”, which is a technical term frequently used in the present invention, is a structure of one atomic layer of carbon atoms, in which the carbon atoms constituting the monoatomic layer are basic repeating units. As a covalent bond in a hexagonal ring skeleton.

  However, in the present invention, a monoatomic layer structure in which five carbon atoms are covalently bonded together to form a basic repeating unit, or seven carbon atoms are covalently bonded together to form a basic repeating unit is also “ May be defined as "graphene".

  In addition, “crystal defect” or “defect”, which is a technical term frequently used in the present invention, is to replace graphene with a nitrogen atom or the like for the purpose of substituting a carbon atom forming graphene with a nitrogen atom or the like. It is defined as the cleavage of at least one of the covalent bonds between several forming carbon atoms.

  FIG. 1 is a flowchart showing a method for manufacturing a porous graphene filter according to an embodiment of the present invention. FIG. 2 is a plan view showing the first graphene filter of FIG. FIG. 3 is a plan view showing the second graphene filter of FIG.

1 and 2, in order to manufacture a porous graphene filter, first, a first graphene filter 1 in which first pores H ₁ having a first size S1 on average are formed is formed. (Step S10).

In step S10, in order to form a first graphene filter 1 first aperture H ₁ having a first size S1 on average is formed, firstly, the carbon precursor can be decomposed into carbon and hydrogen atoms at elevated temperatures A carbon source containing carbon is vaporized to form a graphene thin film.

  In one embodiment of the present invention, when a carbon source is vaporized and provided to a vapor deposition furnace or the like, a porous graphene filter can be manufactured by a very simple process compared to the conventional method.

In an embodiment of the present invention, examples of materials that can be used as a carbon source for forming the first graphene filter 1 include methane (CH ₄ ), methanol (CH ₃ OH), carbon monoxide (CO), Ethane (C ₂ H ₆ ), ethylene (C ₂ H ₄ ), ethanol (C ₂ H ₅ OH), acetylene (C ₂ H ₂ ), acetone (CH ₃ COCH ₃ ), propane (C ₃ H ₈ ), propylene (C ₃ H ₆ ), butane (C ₄ H ₁₀ ), pentane (C ₅ H ₁₂ ), pentene (C ₅ H ₁₀ ), cyclopentadiene (C ₅ H ₆ ), hexane (C ₆ H ₁₄ ), cyclohexane ( C ₆ H _12), benzene (C ₆ H _6), like toluene (C ₇ H ₈₎ and xylene (C ₈ H _10), such as, heat by hydrocarbons are decomposed into carbon and hydrogen atoms (Hydro carbon) is It is done.

Further, during the formation of graphene by the carbon atoms generated by the vaporization of the carbon source, in order to form the first pores H ₁ having the first size S1 on average in the graphene, among the carbon atoms in the graphene A process of causing a crystal defect in some carbon atoms and vaporizing a substitution source (or doping source) for substituting a substitution atom and bonding to a covalent bond part cut by the crystal defect is performed.

  In one embodiment of the present invention, a nitrogen precursor containing a nitrogen compound can be used as a substitution source.

Examples of the nitrogen compounds which may be used as a replacement source for forming a first aperture H ₁ in a first graphene filter 1, ammonia (NH _3), hydrazine (N ₂ H _4), pyridine (C ₅ H ₅ N), pyrrole (C ₄ H ₅ N), acetonitrile (CH ₃ CN), nitric acid (HNO ₃ ), silver nitrate (AgNO ₃ ), barium nitrate (Ba (NO ₃ ) ₂ ), N, N-dimethylformamide (( And nitrogen compounds such as CH ₃ ) ₂ NCHO), lithium nitride (Li ₃ N), and cyanuric chloride (C ₃ Cl ₃ N ₃ ).

In one embodiment of the present invention, the carbon source that provides the carbon atoms that form the first graphene filter 1 and the first pores that on average have a first size S1 during the formation of the first graphene filter 1 The substitution source for forming H ₁ is vaporized in a simultaneous vaporization manner in separate containers in order to produce a good first graphene filter.

  In order to form the first graphene filter 1, the carbon source and the substitution source vaporized by the simultaneous vaporization method are deposition furnaces each having a process condition suitable for forming the first graphene filter 1. Are introduced into the interior of the chamber and mixed inside the vapor deposition furnace.

  The carbon source introduced into the vapor deposition furnace is thermally decomposed into carbon atoms and hydrogen atoms inside the vapor deposition furnace, the hydrogen atoms are exhausted to the outside of the vapor deposition furnace, and the carbon atoms are arranged inside the vapor deposition furnace. To form a monoatomic layer structure.

  While carbon atoms are deposited on the substrate inside the vapor deposition furnace, the substitution source introduced into the vapor deposition furnace is decomposed into nitrogen atoms inside the vapor deposition furnace, and the nitrogen atoms are one of the carbon atoms. A crystal defect is induced by acting (or doping) on the covalently bonded portion of the portion, and a nitrogen atom is bonded to the cut covalent bond portion of the carbon atom where the crystal defect is generated.

The first pores H ₁ having an average first size S1 were formed on the substrate placed inside the vapor deposition furnace by replacing the portion where the covalent bond of the carbon atom was broken with nitrogen atoms. A first graphene filter 1 is formed.

In an embodiment of the present invention, when the number of carbon atom covalent bond breaks is increased and more nitrogen atoms are bonded to the crystal defect portion, the first pore H of the first graphene filter 1 is formed. first size S1 of ₁ increases.

That is, the number of first pores H ₁ formed in the first graphene filter 1 and the average first size S1 of the first pores H ₁ are determined by the ratio of the carbon source and the substitution source or the concentration of the substitution source. The

When the amount of the substitution source is increased with respect to a certain amount of carbon source, crystal defects are generated with respect to a larger number of carbon atoms in graphene, and nitrogen atoms are bonded instead of carbon atoms. As the number of holes H ₁ increases, the average first size S 1 of the first holes H ₁ of the first graphene filter 1 increases.

On the other hand, when the amount of the substitution source is decreased with respect to a certain amount of carbon source, a crystal defect occurs with respect to a smaller number of carbon atoms in graphene, and nitrogen atoms are bonded instead of carbon atoms. The number of first pores H ₁ of the first graphene filter 1 and the averaged first size S 1 are reduced.

In one embodiment of the present invention, the average data of the first size S1 of the first pores H ₁ formed in the graphene and the deviation data of the first size S1 of the first pores H ₁ are the carbon source and the substitution source. This can be obtained by experimenting while changing the ratio.

Referring to FIGS. 1 and 3, after the first graphene filter 1 is manufactured or during the manufacture of the first graphene filter 1, second pores H ₂ having an average second size S < _b > ₂ are formed. The second graphene filter 2 is formed (step S20).

In order to form the second graphene filter 2 in which the second pores H ₂ having the second size S2 on the average are formed in step S20 of FIG. 1, first, carbon for forming the second graphene filter 2 is formed. A step of vaporizing the carbon source including the precursor is performed.

In an embodiment of the present invention, examples of materials that can be used as a carbon source for forming the second graphene filter 2 include methane (CH ₄ ), methanol (CH ₃ OH), carbon monoxide (CO), Ethane (C ₂ H ₆ ), ethylene (C ₂ H ₄ ), ethanol (C ₂ H ₅ OH), acetylene (C ₂ H ₂ ), acetone (CH ₃ COCH ₃ ), propane (C ₃ H ₈ ), propylene (C ₃ H ₆ ), butane (C ₄ H ₁₀ ), pentane (C ₅ H ₁₂ ), pentene (C ₅ H ₁₀ ), cyclopentadiene (C ₅ H ₆ ), hexane (C ₆ H ₁₄ ), cyclohexane ( C ₆ H _12), benzene (C ₆ H _6), like toluene (C ₇ H ₈₎ and xylene (C ₈ H _10), such as, heat by hydrocarbons are decomposed into carbon and hydrogen atoms (Hydro carbon) is It is done.

  In one embodiment of the present invention, the carbon source used when forming the second graphene filter 2 may be the same as or different from the carbon source used when forming the first graphene filter 1. Also good.

In addition, during the production of the second graphene filter 2 by the carbon source generated by the vaporization of the carbon source, in order to form the second pore H ₂ having the second size S2 on the average, the carbon atoms in the graphene A process of causing a crystal defect in some of the carbon atoms and vaporizing a substitution source (or doping source) for substituting and bonding a substitution atom to a covalent bond portion cut by the crystal defect is performed.

  In an embodiment of the present invention, a nitrogen precursor containing a nitrogen compound may be used as a replacement source for the second graphene filter 2.

Examples of nitrogen compounds that can be used as a substitution source for the second graphene filter 2 include ammonia (NH ₃ ), hydrazine (N ₂ H ₄ ), pyridine (C ₅ H ₅ N), and pyrrole (C ₄ H ₅ N). , Acetonitrile (CH ₃ CN), nitric acid (HNO ₃ ), silver nitrate (AgNO ₃ ), barium nitrate (Ba (NO ₃ ) ₂ ), N, N-dimethylformamide ((CH ₃ ) ₂ NCHO), lithium nitride (Li ₃ N) and nitrogen compounds such as cyanuric chloride (C ₃ Cl ₃ N ₃ ).

  In one embodiment of the present invention, the substitution source for forming the second graphene filter 2 and the substitution source for forming the first graphene filter 1 may be the same or different.

In one embodiment of the present invention, the second pore having an average second size S2 during the formation of the carbon source providing the carbon atoms used in the formation of the second graphene filter 2 and the second graphene filter 2 In order to mass-produce the second graphene filter 2, the substitution source used in the formation of H ₂ is vaporized in a simultaneous vaporization manner in each of the other containers.

  In order to form the second graphene filter 2, the carbon source and the substitution source that are vaporized by the simultaneous vaporization method are respectively disposed inside the vapor deposition furnace that is set as a process condition suitable for forming the second graphene filter 2. It is introduced and mixed inside the vapor deposition furnace.

  The carbon source introduced into the vapor deposition furnace is thermally decomposed into carbon atoms and hydrogen atoms inside the vapor deposition furnace, the hydrogen atoms are exhausted to the outside of the vapor deposition furnace, and the carbon atoms are arranged inside the vapor deposition furnace. To form a monoatomic layer structure.

  While carbon atoms are deposited on the substrate inside the vapor deposition furnace, the substitution source introduced into the vapor deposition furnace is decomposed into nitrogen atoms inside the vapor deposition furnace, and the nitrogen atoms are part of the carbon atoms. A crystal defect is induced by acting (or doping) on the covalently bonded portion of the nitrogen atom, and the nitrogen atom is bonded to the broken covalent bond portion of the carbon atom in which the crystal defect is generated.

A second pore H ₂ having an average second size S2 was formed on the substrate disposed inside the vapor deposition furnace by replacing the portion where the covalent bond of the carbon atom was broken with a nitrogen atom. A second graphene filter 2 is formed.

In one embodiment of the present invention, the number of second pores H ₂ formed in the second graphene filter 2 and the average second size S2 of the second pores H ₂ are the ratio or substitution of the carbon source and the substitution source. Determined by source concentration.

Specifically, when the supply amount of the substitution source is increased with respect to a certain amount of carbon source, a larger number of carbon atoms in graphene are substituted with nitrogen atoms, and the number of second pores H ₂ is increased. as a result, the average second size S2 of the second pores H ₂ is increased.

On the other hand, when the amount of the substitution source is decreased with respect to a certain amount of the carbon source, a smaller number of carbon atoms in the graphene are substituted with nitrogen atoms, so that the number of the second pores H ₂ is reduced. as a result, the average second size S2 of the second pores H ₂ decreases.

In one embodiment of the present invention, data of the second pores H average of the second size S2 of ₂ formed graphene, deviation data of the second pores H ₂ of the second size S2 is a carbon source and substituted sources This can be obtained by experimenting while changing the ratio.

In one embodiment of the present invention, a second size S2, which second average pore of H ₂ second graphene filter 2 formed in step S20, the first information on the first graphene filter 1 formed in the step S10 it may be smaller than the average first size S1 of the hole H _1.

At this time, the second pore H ₂ having the largest size among the second pores H ₂ of the second graphene filter ₂ is formed to be smaller than the smallest size among the first pores H ₁ of the first graphene filter 1. obtain.

In one embodiment of the example the present invention, the second graphene second pore H second size S2 average of filter ₂ formed in step S20 is, the first graphene filter 1 formed in step S10 first even smaller than the first size S1 of the average pore H ₁ has been shown and described, unlike this embodiment, the second graphene second second size average pore H ₂ S2 filter 2 there may be first size S2 or more first average pore H ₁ of the first graphene filter 1.

In an embodiment of the present invention, a first graphene filter 1 having first pores H ₁ having an average first size S1 and a second pore H ₂ having an average second size S2 are formed. The formed second graphene filter 2 may be sequentially formed in one vapor deposition furnace or individually formed in different vapor deposition furnaces.

The first graphene filter 1 in which the first pores H ₁ having the first size S1 on average are formed in the step S10 is formed, and the second pores S2 having the second size S2 on average in the step S20 are formed. After the formed second graphene filter 2 is formed, the first and second graphene filters 1 and 2 are attached to the filter body to produce a porous graphene filter (step S30).

The filter body provides a path through which a mixture in which at least two substances are mixed passes, and the first graphene filter 1 manufactured in step S10 and the second graphene filter 2 manufactured in step S20 include the first and In order to remove a target substance with a filter through the first pore H ₁ and the second pore H _{2 of} the second graphene filters 1 and 2, the second graphene filters ₁ and 2 are disposed in the path.

  For example, a porous graphene filter can be applied to selectively filter carbon dioxide from air, impurities from water, specific substances from automobile exhaust, and impurities or specific substances from blood.

  FIG. 4 is a block diagram illustrating an apparatus for manufacturing the first graphene filter or the second graphene filter illustrated in FIG. 1.

  Referring to FIG. 4, a porous graphene filter manufacturing apparatus 700 manufactures the first graphene filter and the second graphene filter shown in FIG.

  In an embodiment of the present invention, both the first graphene filter 1 and the second graphene filter 2 may be manufactured from one porous graphene filter manufacturing apparatus 700. Unlike this, the first graphene filter 1 or the second graphene filter 2 may be manufactured from different porous graphene filter manufacturing apparatuses 700.

  The porous graphene filter manufacturing apparatus 700 includes a sample supply apparatus 200, a simultaneous vaporizer 300, and a vapor deposition furnace 400. In addition, the porous graphene filter manufacturing apparatus 700 may further include a carrier gas supply unit 500.

  The sample supply device 200 includes a first sample supply device 210 and a second sample supply device 220.

  As will be described later, the first sample supply device 210 supplies a carbon source for forming graphene to the first vaporizer 310 of the simultaneous vaporizer 300.

  The carbon source supplied from the first sample supply device 210 to the first vaporizer 310 may be a carbon precursor containing hydrocarbons that are decomposed into carbon atoms and hydrogen atoms inside the vapor deposition furnace 400.

Examples of the carbon precursor supplied from the first sample supply device 210 include methane (CH ₄ ), methanol (CH ₃ OH), carbon monoxide (CO), ethane (C ₂ H ₆ ), ethylene (C ₂ H _4), ethanol (C ₂ H ₅ OH), acetylene (C ₂ H _2), acetone (CH ₃ COCH _3), propane (C ₃ H _8), propylene (C ₃ H _6), butane (C ₄ H _10), pentane (C ₅ H _12), pentene (C ₅ H _10), cyclopentadiene (C ₅ H _6), hexane (C ₆ H _14), cyclohexane (C ₆ H _12), benzene (C ₆ H ₆ ), Toluene (C ₇ H ₈ ) and xylene (C ₈ H ₁₀ ), hydrocarbons that are decomposed to carbon and hydrogen atoms by heat.

  In an embodiment of the present invention, when the carbon precursor is stored as a gas phase in the first sample supply device 210, the carbon precursor supplied from the first sample supply device 210 is the first of the simultaneous vaporizer 300. The vaporizer 310 may be bypassed and supplied to the deposition furnace 400.

  The second sample supply device 220 supplies a substitution source (or doping source) that forms a through-hole in graphene to the second vaporizer 320 of the simultaneous vaporizer 300.

  In an embodiment of the present invention, the second sample supply device 220 that supplies the substitution source to the vaporizer 300 is coupled with a sample adjustment device 225 that precisely controls the concentration of the substitution source and the supply amount of the substitution source.

The first pore H ₁ having the first size S 1 shown in FIG. 2 is formed by changing the supply amount of the replacement source supplied to the second vaporizer 320 using the sample conditioner 225. The formed first graphene filter 1 and the second graphene filter 2 in which the second pores H ₂ having the second size S2 shown in FIG. 3 are formed may be formed.

  In one embodiment of the present invention, it is shown and described that the concentration of the substitution source supplied from the second sample supply device 220 to the second vaporizer 320 and the supply amount of the substitution source are controlled by the sample adjustment device 225. However, unlike this, the first and second sample supply devices 210 and 220 are each provided with an electronic valve or a flow rate controller (MFC) for individually adjusting the supply amounts of the carbon source and the substitution source. Also good.

  The substitution source supplied from the second sample supply device 220 to the second vaporizer 320 may be a nitrogen precursor containing a nitrogen compound.

Examples of nitrogen precursors that are substitution sources supplied from the second sample supply device 220 shown in FIG. 4 include ammonia (NH ₃ ), hydrazine (N ₂ H ₄ ), pyridine (C ₅ H ₅ N), and pyrrole. (C ₄ H ₅ N), acetonitrile (CH ₃ CN), nitric acid (HNO ₃ ), silver nitrate (AgNO ₃ ), barium nitrate (Ba (NO ₃ ) ₂ ), N, N-dimethylformamide ((CH ₃ ) ₂ NCHO), lithium nitride (Li ₃ N), cyanuric chloride (C ₃ Cl ₃ N ₃ ) and the like.

  In an embodiment of the present invention, when the nitrogen precursor is supplied in a gas phase from the second sample supply device 220, the nitrogen precursor supplied from the second sample supply device 220 is the second of the simultaneous vaporizer 300. The vaporizer 320 may be bypassed and supplied to the deposition furnace 400.

  The simultaneous vaporizer 300 includes a first vaporizer 310 and a second vaporizer 320.

  The first vaporizer 310 is communicated with the first sample supply device 210, whereby the first vaporizer 310 is supplied with, for example, a carbon precursor as a carbon source from the first sample supply device 210.

  The first vaporizer 310 is a container having an inlet through which vaporized carbon precursor is introduced into the container and an outlet through which the vaporized carbon precursor is discharged from the container. As will be described later, the inlet is in communication with the first sample supply device 210, and the outlet is in communication with the inside of the vapor deposition furnace 400.

  In order to vaporize the carbon precursor supplied to the first vaporizer 310 by heat, a first heating furnace 315 is disposed outside the first vaporizer 310 and heat is generated inside the first heating furnace 315. A hot wire 316 can be placed. In the first heating furnace 315, various heat generating devices can be arranged in addition to the hot wire 316.

  The second vaporizer 320 communicates with the second sample supply device 220, whereby a replacement source such as a nitrogen precursor is supplied to the second vaporizer 320 from the second sample supply device 220.

  The second vaporizer 320 is a container comprising an inlet through which the vaporized nitrogen precursor is introduced into the container and an outlet through which the vaporized nitrogen precursor is discharged from the container. As described later, the inlet is in communication with the second sample supply device 220, and the outlet is in communication with the inside of the vapor deposition furnace 400.

  In order to vaporize the nitrogen precursor supplied to the second vaporizer 320 by heat, a second heating furnace 325 is disposed outside the second vaporizer 320 and heat is generated inside the second heating furnace 325. A hot wire 326 is disposed. In the second heating furnace 325, various heat generating devices other than the hot wire 326 may be arranged.

  In one embodiment of the present invention, first and second heating furnaces provided with hot wires 316 and 326 to vaporize the carbon precursor and nitrogen precursor supplied to the first and second vaporizers 310 and 320, respectively. Even if 315 and 325 are used, the carbon precursor and the nitrogen precursor may be chemically vaporized by supplying a reaction gas to the carbon precursor and the nitrogen precursor.

  On the other hand, the carrier gas for supplying the carrier gas so that the carbon precursor vaporized from the first vaporizer 310 and the nitrogen precursor vaporized from the second vaporizer 320 can be transported to the deposition furnace 400, respectively. The supply unit 500 is in communication with both the first vaporizer 310 and the second vaporizer 320.

  The carrier gas supply unit 500 supplies an inert gas such as nitrogen or argon to the first vaporizer 310 and the second vaporizer 320, and the carbon precursor vaporized by the first vaporizer 310 and the second vaporizer 320. Each of the nitrogen precursors vaporized in (1) is transported to the vapor deposition furnace 400 by the inert gas supplied from the carrier gas supply unit 500.

  In an embodiment of the present invention, the carrier gas supply unit 500 and the first vaporizer 310, and the carrier gas supply unit 500 and the second vaporizer 320 are communicated with each other by inert gas supply pipes 510 and 520, respectively. A flow rate controller (Mass Flow Controller, MFC) for controlling the flow rate of the inert gas may be connected to the inert gas supply pipes 510 and 520, respectively.

In one embodiment of the present invention, the carrier gas supply unit 500 controls the first vaporizer 310 and the second vaporizer 320 so that the flow rates of the inert gas are different from each other. The first graphene filter 1 having the first pores H ₁ having the size S1 and the second graphene filter 2 having the second pores H ₂ having the second size S2 shown in FIG. 3 can be formed. .

  Referring further to FIG. 4, the outlet of the first vaporizer 310 from which the carbon precursor vaporized in the first vaporizer 310 is discharged is communicated with the first pipe 317, and the second vaporizer 320 The discharge port of the second vaporizer 320 from which the vaporized nitrogen precursor is discharged is communicated with the second pipe 327.

  The first pipe 317 and the second pipe 327 are joined to the common pipe 330, and the common pipe 330 is communicated with the vapor deposition furnace 400.

  Since the vaporized carbon precursor supplied by the first pipe 317 and the vaporized nitrogen precursor supplied by the second pipe 327 are mixed in the common pipe 330 and then supplied to the vapor deposition furnace 400, vaporization is performed. The carbon and nitrogen precursors can be sent toward the deposition furnace 400 in the form of a uniform mixture.

  In one embodiment of the present invention, due to the temperature change of the vaporized carbon precursor supplied to the common pipe 330 by the first pipe 317 and the vaporized nitrogen precursor supplied to the common pipe 330 by the second pipe 327, In order to prevent the vaporized carbon and nitrogen precursor from being liquefied again or being deposited on the inner walls of the first and second pipes 317 and 327, the common pipe 330 includes a heating unit 335. May be provided.

  The heating unit 335 may include, for example, a heat ray that consumes electric energy to generate heat, and the heating unit 335 heats the common pipe 330 and the temperature of vaporized carbon and nitrogen precursors. Minimize changes.

  In one embodiment of the present invention, it is illustrated and described that the heating unit 335 is provided in the common pipe 330 in which the vaporized carbon precursor and the vaporized nitrogen precursor are mixed. The heating unit 335 may be further provided in each of the first pipe 317 and the second pipe 327.

  Still referring to FIG. 4, the vapor deposition furnace 400 includes a carbon precursor supplied from the first vaporizer 310 through the first pipe 317 and the common pipe 330, and a second pipe 327 from the second vaporizer 320 and Functions to establish process conditions and atmosphere for manufacturing the first and second graphene filters 1 and 2 shown in FIGS. 2 and 3 by using the nitrogen precursor supplied through the common pipe 330 To do.

  Examples of the vapor deposition furnace 400 that establishes the process conditions and atmosphere for forming the first and second graphene filters 1 and 2 include, for example, a chemical vapor deposition apparatus and a thermal chemical vapor deposition apparatus (Thermal). Chemical Vapor Deposition equipment, Rapid Thermal Chemical Vapor Deposition equipment, Inductive Coupled Plasma Chemical Vapor Deposition equipment, Atomic Layer Deposition equipment Any one of them may be used.

  In one embodiment of the present invention, the atomic layer deposition method (ALD) is preferably used because the monoatomic layer is formed on a substrate disposed inside the vapor deposition furnace 400.

  The substrate disposed in the vapor deposition furnace 400 on which the first and second graphene filters 1 and 2 are deposited is, for example, the first and second graphene filters 1 and 2 formed by vapor deposition on the substrate. It can be made of a metal material that allows easy separation from the substrate and does not undergo shape deformation with high temperature heat.

  The metal material disposed inside the vapor deposition furnace 400 may include, for example, a copper plate or a copper plated plate having weak adhesion to the first and second graphene filters 1 and 2.

  In one embodiment of the present invention, it is described that the substrate disposed in the vapor deposition furnace 400 and on which the first and second graphene filters 1 and 2 are formed is a copper plate or a copper-plated plate. However, different from this, various metal materials may be used as long as the substrate disposed in the vapor deposition furnace 400 enables easy separation of the first and second graphene filters 1 and 2 from the substrate.

  FIG. 5 is a cross-sectional view showing a porous graphene filter according to an embodiment of the present invention. FIG. 6 is a conceptual diagram showing a filter process of the porous graphene filter of FIG.

  5 and 6, the porous graphene filter 800 includes a first graphene filter 1, a second graphene filter 2, and a filter body 750.

  Referring to FIGS. 2 and 5, the first graphene filter 1 is used to manufacture the porous graphene filter shown in FIG. 4 by the method of manufacturing the first and second graphene filters 1 and 2 shown in FIG. 1. The first graphene filter 1 has the structure shown in FIG.

  In the first graphene filter 1, during the formation of graphene using carbon atoms generated by the decomposition of the carbon source, the substitution source causes crystal defects in some of the carbon atoms, and crystal defects are generated. It is produced by a method of vaporizing to generate a substitution atom for replacing the carbon atom, that is, a nitrogen atom.

As shown in FIG. 2, the first graphene filter 1 includes first pores H ₁ having a first size S1.

  As shown in FIG. 7, the first graphene filter 1 may be formed in a film shape. When the first graphene filter 1 is formed in a film shape, a rectangular frame is formed on the frame of the first graphene filter 1. Combined.

  By coupling the first graphene filter 1 to the rectangular frame, the first graphene filter 1 has a very high tensile strength and compressive strength.

  In an embodiment of the present invention, the first graphene filter 1 may be formed in a cylindrical shape as shown in FIG. 8, and when the first graphene filter 1 is formed in a cylindrical shape, A ring-shaped frame can be coupled to both ends.

  By joining the cylindrical first graphene filter 1 to the ring-shaped frame, the first graphene filter has very high tensile strength and compressive strength.

  2 and 5, the second graphene filter 2 is used to manufacture the porous graphene filter shown in FIG. 4 by the manufacturing method of the first and second graphene filters 1 and 2 shown in FIG. The second graphene filter 2 has a structure as shown in FIG.

  In the second graphene filter 2, during the formation of graphene using carbon atoms generated by the decomposition of the carbon source, the substitution source causes crystal defects in some of the carbon atoms, and crystal defects are generated. It is produced by a method of vaporizing to generate a substitution atom for replacing the carbon atom, that is, a nitrogen atom.

Second graphene filter 2, as shown in FIG. 3, a second pore H ₂ having a second size S2, second graphene second pore H second size S2 of the _second filter 2, It is formed with a larger size than the first first first size S1 of the pores H ₁ graphene filter 1.

In one embodiment of the present invention, the second graphene second second size S2 of the pores of H ₂ filter 2 can be changed by adjusting the feed rate of the concentration and substitution source replacement source to carbon source.

  As shown in FIG. 7, the second graphene filter 2 can be formed in a film shape. When the second graphene filter 2 is formed in a film shape, a rectangular frame is formed on the frame of the second graphene filter 2. Can be combined. By coupling the second graphene filter 2 to the rectangular frame, the second graphene filter 2 has a very high tensile strength and compressive strength.

  In an embodiment of the present invention, the second graphene filter 2 may be formed in a cylindrical shape as shown in FIG. 8, and when the second graphene filter 2 is formed in a cylindrical shape, A ring-shaped frame can be coupled to both ends.

  By joining the cylindrical second graphene filter 2 to the ring-shaped frame, the second graphene filter 2 has a very high tensile strength and compressive strength.

  In an embodiment of the present invention, both the first and second graphene filters 1 and 2 are formed in a film shape as shown in FIG. 7, for example, and the film-shaped first and second graphene filters 1 and 2 are formed. A rectangular frame is coupled to each frame.

  In one embodiment of the present invention, the first and second graphene filters 1 and 2 are each formed in a rectangular film shape, and a rectangular frame is coupled to the frame of the first and second graphene filters 1 and 2. Although illustrated and described, the first and second graphene filters 1 and 2 are formed in a circular shape, and a circular frame is coupled to each of the circular first and second graphene filters 1 and 2. Also good.

  The first and second graphene filters 1 and 2 coupled to the corresponding frames may be disposed at a predetermined distance from each other inside the filter body 750.

  The filter body 750 may be formed in a cylindrical shape with both ends opened or a cylindrical shape with only one end opened.

  For example, the filter main body 750 may be formed in a cylindrical shape in which both end portions are opened and each constitutes an inflow portion 752 and a discharge portion 754 on the opposite side of the inflow portion 752. The filter body 750 may be formed from, for example, a highly rigid metal material or synthetic resin material.

  Through the inflow portion 752 of the filter body 750, a mixture of at least two substances is introduced into the filter body, and a substance obtained as a result of filtering from the mixture is discharged from the discharge section 754 of the filter body 750.

Referring to FIG. 6, the average of the first pores H ₁ of the first graphene filter 1 is within the filter body 750 in which the first and second graphene filters 1 and 2 are disposed at a predetermined distance from each other. first size S1 larger material a than of, but smaller than the first graphene first aperture H first size S1 average of _first filter 1 of the second average pore H ₂ of the second graphene filter 2 second A mixture in which a substance B that is a target substance for filtering, which is smaller than the average second size S2 of the second pore H ₂ of the second graphene filter 2 and the substance B that is larger than the two sizes S2, is mixed. When introduced from the inflow portion 752 of the main body 750, the target substance C passes through the first pore H ₁ of the first graphene filter ₁ and the second pore H ₂ of the second graphene filter 2, Substance A Fine material B can not pass through the second pores of H ₂ first graphene first aperture H ₁ or second graphene filter 2 of the filter 1.

  FIG. 9 is a block diagram showing a filter device according to another embodiment of the present invention.

  The filter device shown in FIG. 9 makes it possible to separate a mixture of at least two substances having different sizes from one another.

  The filter device 900 includes a mixture supply device 910, a graphene filter 950, a recovery unit 960, and a valve controller 980.

  As will be described later, the mixture supply device 910 supplies a mixture of at least two substances having different sizes to the graphene filter 950.

  The mixture supply device 910 includes a mixture providing unit 912 for providing a mixture, a storage container 914, a discharge unit 916, and electronic valves 918 and 919.

  The mixture providing unit 912 has, for example, a substance A having an average first size, a substance B having a second size smaller than the first size on the average, and a third size smaller than the second size on the average. In response to an external supply of the mixture of the substance C, the mixture is provided to the storage container 914.

  The mixture providing unit 912 and the storage container 914 are connected to each other by a pipe 913, and the pipe 913 is provided with an electronic valve 918 for providing the mixture to the storage container 914 or blocking the supply of the mixture to the storage container 914. The electronic valve 918 is opened and closed by a control signal from the valve controller 980, as will be described later.

  The storage container 914 is connected to the pipe 913, and the storage container 914 functions to temporarily store a predetermined amount of the mixture.

  The storage container 914 is connected to a discharge pipe 915 for discharging a predetermined amount of the temporarily stored mixture, and the discharge pipe 915 is provided with an electronic valve 919. The electronic valve 919 adjusts the supply of the mixture temporarily stored in the storage container 914 to the graphene filter 950, as will be described later.

  Similarly, the electronic valve 919 is opened and closed by a control signal from the valve controller 980 as will be described later.

  The discharge unit 916 functions to supply the graphene filter 950 with the mixture temporarily stored in the storage container 914.

  The discharge unit 916 can include, for example, a blower that can be coupled to the piping 913 and that discharges air or inert gas to force the mixture stored in the storage container 914 into the graphene filter 950. It may be.

  The graphene filter 950 includes a filter main body 920 including an inlet 921 and outlets 922, 924, and 926 connected to the discharge pipe 915 of the storage container 914, and a graphene thin film 930 and 940 disposed in the filter main body 920. Prepare.

  The filter body 920 may be formed in a cylindrical shape with both ends closed, and an inflow port 921 is formed at the upper end of the filter body 920 and communicates with the discharge pipe 915 of the storage container 914. The mixture stored in the storage container 914 is introduced into the filter body 920 through the inlet 921.

  The filter body 920 is formed with a number of outlets corresponding to the number of substances present in the mixture.

  In the embodiment of the present invention, the mixture is composed of the substance A, the substance B, and the substance C. Therefore, the filter body 920 includes the three outlets 922, 924, and 926, and the outlet 922 is provided. , 924, and 926 are spaced apart from each other at a predetermined interval.

  The graphene thin films 930 and 940 can be manufactured by the method illustrated and described in FIGS. 1 to 4 described above, and thus, the description of the configuration of the graphene thin films 930 and 940 and the manufacturing method thereof is omitted.

  One graphene thin film 930 out of the graphene thin films 930 and 940 is disposed inside the filter main body 920 in a form that blocks a path through the filter main body 920.

  For example, the graphene thin film 930 has first pores of a first size through which the substance A contained in the mixture cannot pass but the substance B and the substance C can pass.

  The graphene thin film 930 is disposed between the discharge port 922 and the discharge port 924.

  One graphene thin film 940 out of the graphene thin films 930 and 940 is disposed in a form that faces the graphene thin film 930 inside the filter main body 920 and similarly blocks a path passing through the filter main body 920.

  For example, the graphene thin film 940 has second pores of a second size through which the substance B contained in the mixture cannot pass but the substance C can pass.

  The graphene thin film 940 is disposed between the outlet 924 and the outlet 926. The recovery unit 960 communicates with the discharge ports 922, 924, and 926 to separate and recover the substance A, the substance B, and the substance C from the mixture and store them.

  The collection unit 960 includes electronic valves 962, 964, 966 that are used to selectively collect and store substance A, substance B, and substance C.

  The valve controller 980 provides control signals for opening and closing the electronic valves 918, 919, 962, 964 and 966 to selectively separate each substance from the mixture.

  The graphene filter shown in FIG. 6 is suitable for selectively filtering or separating any one of the substances A, B and C from the mixture, but separates each of the substances A, B and C individually. Although difficult to do, the filter device shown and described in FIG. 9 makes it possible to individually filter or separate substances A, B and C having different sizes.

  Hereinafter, a process of individually separating or filtering each substance from the mixture by the filter device shown in FIG. 9 will be described.

  First, the mixture of the substance A, the substance B, and the substance C is provided from the mixture providing unit 912 of the mixture supply apparatus 910 to the storage container 914 through the pipe 913.

  At this time, the valve controller 980 applies a control signal for instructing opening of the electronic valve 918 for a predetermined period to the electronic valve 918, and a predetermined amount of the mixture passes through the pipe 913 during the predetermined period. Provided in the storage container 914.

  When a predetermined amount of the mixture is provided to the storage container 914, the valve controller 980 applies a control signal to the electronic valve 918 to close the electronic valve 918 and block the supply of the mixture to the storage container 914.

  On the other hand, when a predetermined amount of the mixture is provided to the storage container 914, the valve controller 980 opens the electronic valve 919 connected to the discharge pipe 915 of the storage container 914, thereby air or inert from the discharge unit 916. Gas is provided to the storage container 914, and at the same time, the mixture inside the storage container 914 is sent into the graphene filter 950.

  After entering the inside of the graphene filter 950 from the storage container 914 through the inflow portion 921, the mixture reaches the graphene thin film 930 in which the first pores having the first size are formed. Substance B and substance C in the mixture can pass through the first pores of the graphene thin film 930, but the substance A cannot pass through the graphene thin film 930 and remains on the graphene thin film 930.

  The substance B and the substance C that form the mixture that has passed through the graphene thin film 930 reach the graphene thin film 940 in which the second pores having the second size are formed. The substance C passes through the second pores of the graphene thin film 940, and the substance B remains on the graphene thin film 940.

  Accordingly, as long as a predetermined amount of the mixture is provided from the storage container 914 to the graphene filter 950, the substance A, the substance B, and the substance C remain separated by the graphene thin films 930 and 940 of the graphene filter 950, respectively.

  In this manner, the substance A, the substance B, and the substance C are distributed in a state of being separated by the graphene thin films 930 and 940, respectively. The substance A has the outlet 922, the substance B has the outlet 924, and the substance C has the outlet 926. Each is recovered to the recovery unit 960. Valve controller 980 provides control signals for opening and closing electronic valves 962, 964 and 966 connected to each outlet 922, 924 and 926, respectively, and individually opening and closing each electronic valve 962, 964 and 966. Control.

  In one embodiment of the present invention, the mixture may include gaseous, liquid or solid materials having different sizes.

  In one embodiment of the present invention, the filter device can be widely used in the medical field such as dialysis of blood, the filter field such as separation of a specific gas, and the like.

  According to the above detailed explanation, during the formation of a graphene thin film having a carbon monoatomic layer structure, pores of very small size were artificially formed in the graphene thin film, and the finely formed finely formed in the graphene. By using a porous graphene filter having pores, it is possible to selectively filter and separate a specific substance from a mixture of a plurality of substances.

  On the other hand, the embodiments disclosed in the drawings are merely specific examples for facilitating understanding, and are not intended to limit the scope of the present invention. It will be apparent to those skilled in the art to which the present invention pertains that other variations based on the technical idea of the present invention are possible in addition to the embodiments disclosed herein.

200 Sample supply device 210 First sample supply device 220 Second sample supply device 225 Sample adjustment device 300 Simultaneous vaporizer 310 First vaporizer 320 Second vaporizer 315 First heating furnace 325 Second heating furnace 400 Deposition furnace 500 Carrier gas Supply unit 700, 800 Porous graphene filter manufacturing apparatus 900 Filter apparatus 910 Mixture supply apparatus 912 Mixture providing unit 914 Storage container 916 Discharge unit 920 Filter body 930, 940 Graphene thin film 950 Graphene filter 960 Recovery unit

Claims (10)

During the deposition of carbon atoms generated from a carbon source for graphene formation, first pores having a first size by replacing some of the carbon atoms with substituent atoms generated from a substitution source comprising pyridine Forming a first graphene filter in which is formed,
During the deposition of carbon atoms generated from a carbon source for graphene formation, the graphene is made to be larger than the first size by replacing some carbon atoms with substituent atoms generated from a substitution source including pyridine. Forming a second graphene filter in which second pores having a large second size are formed;
And disposing the first and second graphene filters inside a filter main body having an inlet and an outlet. The porous material according to claim 1, wherein a supply amount of the substitution source in the step of forming the first graphene filter is smaller than a supply amount of the substitution source in the step of forming the second graphene filter. Manufacturing method of graphene filter. The carbon source is methane (CH ₄ ), methanol (CH ₃ OH), carbon monoxide (CO), ethane (C ₂ H ₆ ), ethylene (C ₂ H ₄ ), ethanol (C ₂ H ₅ OH), Acetylene (C ₂ H ₂ ), acetone (CH ₃ COCH ₃ ), propane (C ₃ H ₈ ), propylene (C ₃ H ₆ ), butane (C ₄ H ₁₀ ), pentane (C ₅ H ₁₂ ), pentene ( C ₅ H ₁₀ ), cyclopentadiene (C ₅ H ₆ ), hexane (C ₆ H ₁₄ ), cyclohexane (C ₆ H ₁₂ ), benzene (C ₆ H ₆ ), toluene (C ₇ H ₈ ) and xylene (C _The method for producing a porous graphene filter according to claim 1, comprising at least one selected from the group consisting of ₈ H ₁₀ ). When the first or second graphene filter is formed, the carbon source and the substitution source are vaporized at the same time and provided to a deposition furnace in which the first and second graphene filters are formed. The manufacturing method of the porous graphene filter of Claim 1. A first pore having a first size formed by substituting a part of a carbon atom having a crystal defect in a covalent bond portion in graphene with a nitrogen atom generated from a substitution source containing pyridine is formed. A first graphene filter;
A second pore having a second size larger than the first size is obtained by substituting a part of the carbon atom having a crystal defect in a covalent bond part in graphene with a nitrogen atom generated from a substitution source containing pyridine. A second graphene filter formed;
A porous graphene filter comprising: a filter body in which the first and second graphene filters are fixed on a path along which the mixture moves after a mixture of a plurality of substances is introduced into the filter body. The porous graphene filter according to claim 5 , wherein the first and second graphene filters are independently formed in a film shape or a cylindrical shape. A mixture supply device for sequentially supplying a predetermined amount of a mixture containing substances having different sizes from each other;
A filter body having an inlet for introducing the mixture and at least two outlets on a side surface, and an outlet in the filter body, for separating individual substances contained in the mixture a grayed Rafen filter for,
A first pore having a first size formed by substituting a part of a carbon atom having a crystal defect in a covalent bond portion in graphene with a nitrogen atom generated from a substitution source containing pyridine is formed. A first graphene filter and a second size larger than the first size can be obtained by substituting a part of carbon atoms having a crystal defect in a covalent bond portion in the graphene with a nitrogen atom generated from a substitution source containing pyridine. A second graphene filter in which second pores are formed, and a graphene filter comprising:
A filter device comprising: a recovery unit connected to the discharge port and recovering each substance separated from the mixture. The mixture supply device comprises:
A mixture providing unit for providing the mixture;
A storage container for receiving a predetermined amount of the mixture;
The filter device according to claim 7 , further comprising a discharge unit for discharging the mixture from the storage container. The filter device according to claim 8 , wherein the discharge unit includes a blower that supplies air or an inert gas to the storage container. An electronic valve coupled to the mixture supply device, the graphene filter and the recovery unit;
The filter device according to claim 7 , further comprising a valve controller that controls the electronic valve.

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