JP6020619B2 - Both ends sealed short arc flash lamp - Google Patents

Description

  The present invention relates to a double-end sealed short arc flash lamp, and more particularly to a double-end sealed short arc flash lamp in which one sealed tube portion has a double tube structure.

A discharge lamp that performs flash lighting is widely used in industrial applications such as flash annealing in a semiconductor manufacturing process, and the lamp of the present invention is particularly used in an exposure process using vacuum ultraviolet light.
In the above exposure process, it is required to use light close to parallel light, which can irradiate a small area with high-density light in a short time, has relatively little unevenness in the directionality and distribution of light.
For this purpose, it is desirable that the flash lamp is condensed by a concave reflecting mirror or the like to form parallel light. It is advantageous.

Such a double-end sealed short arc flash lamp is disclosed in Japanese Patent No. 5360033.
The schematic structure is shown in FIG. 4, and in a double-end sealed short arc flash lamp, a first sealing tube 2 and a second sealing tube 3 are connected to both ends of the arc tube 1. And the glass tube 4 for sealing is inserted in the said 2nd sealing tube 3, and both are welded.
A pair of first main electrode 5 and second main electrode 6 are disposed opposite to each other in the arc tube 1. The first main electrode 5 has a core wire 7 supported and sealed to the first sealing tube 2 by means such as a step glass, and is led out to the outside, while the second main electrode 6 is The core wire 8 is supported and sealed on the sealing glass tube 4 by means such as step glass, and is led out to the outside.

Between the main electrodes 5 and 6 in the arc tube 1, a pair of first start auxiliary electrode 10 and second start auxiliary electrode 11 are disposed, and the internal leads 12 and 15 and the external leads 13 and 16, respectively. Are electrically connected via metal foils 14 and 17 in the welded region between the second sealing tube 3 and the sealing glass tube 4.
In the arc tube portion 1, for example, xenon gas is enclosed as a luminescent gas.
This both-end sealed short arc flash lamp is preliminarily discharged between the starting auxiliary electrodes 10 and 11 by applying a predetermined voltage, and charged particles for assisting the discharge between the main electrodes 5 and 6 are discharged into the arc tube. 1 is generated in the interior.

  Such a both-end-sealed short arc flash lamp irradiates light emitted from the lamp as parallel light by, for example, arranging the light emitting point (bright spot) of the lamp at the focal point of the parabolic reflector. A light source device is configured.

By the way, on the second sealing portion side having such a double tube structure, the inner leads 12, 15 of the auxiliary starting electrodes 10, 11 and the outer leads 13 are formed on the outer peripheral surface of the sealing glass tube 4 in the welding step. , 16 and metal foils 14 and 17 are inserted into the second sealing tube 3 and heated from the outer periphery by a burner to weld the sealing glass tube 4 and the second sealing tube. The work of doing is done.
In such a welding operation, it is difficult to weld the inner leads 12, 15 and the outer leads 13, 16 and the metal foils 14, 17 on the outer periphery of the sealing glass tube 4 in an accurate position, There was a problem that an assembly structure at an accurate position could not be obtained after welding.

Japanese Patent No. 5360033

  In view of the above-mentioned problems of the prior art, the problem to be solved by the present invention is that a glass arc tube has a pair of main electrodes and a starting auxiliary electrode, and a first seal is formed at both ends of the arc tube. A stop tube and a second sealing tube, wherein the core wire of the first main electrode is sealed in the first sealing tube and led out of the arc tube, and the second sealing tube includes the second sealing tube 2 A sealing glass tube inserted inside the sealing tube is welded, and the sealing glass tube is sealed at both ends in which the core wire of the second main electrode is sealed and led out of the arc tube In the type short arc flash lamp, during the welding operation of the second sealing tube and the sealing glass tube, an accurate fixing position such as an internal lead, an external lead, and a metal foil of the starting auxiliary electrode is obtained, It is to provide a structure that can greatly simplify the sealing operation.

In order to solve the above-mentioned problems, a short-arc-flash lamp with both ends sealed according to the present invention has an internal lead, an external surface on an outer peripheral surface of a welding region of the sealing glass tube with the second sealing tube. A glass member for primary sealing is welded so as to cover the lead and the metal foil.
The material of the glass member for primary sealing is anhydrous quartz glass, and the glass of the second sealing tube is hydrated quartz glass.

According to the both-end-sealed short arc flash lamp of the present invention, since the outer peripheral surface of the sealing glass tube inserted and welded to the second sealing tube is coated and welded, the sealing member is sealed. The internal lead, the external lead and the metal foil of the starting auxiliary electrode on the outer periphery of the glass tube for use are accurately positioned and covered by the primary sealing glass member, and the sealing glass tube in this state is covered with the second sealing tube. When welding, the welding operation is greatly simplified. Therefore, when the final lamp shape is formed, the internal lead, the external lead, and the metal foil are accurately positioned and fixed.
In addition, since the glass member for primary sealing is anhydrous quartz glass and the second sealing tube is hydrated quartz glass, compressive stress acts on the interface in the welded portion after welding. Even when a high pressure noble gas of 0.1 MPa or higher, that is, substantially equal to or higher than atmospheric pressure, is sealed, the pressure resistance of the sealed portion is improved and the risk of lamp explosion is reduced.

Cross-sectional view of a double-side sealed short arc flash lamp of the present invention 1 is an exploded enlarged cross-sectional view of the main part of FIG. Manufacturing process diagram of the lamp of the present invention Cross-sectional view of a conventional double-end sealed short arc flash lamp

FIG. 1 is an overall cross-sectional view of a both-end sealed short arc flash lamp having a base fixed thereto according to the present invention, and FIG.
This short arc type flash lamp is a so-called both-end sealed type, and its basic configuration is the same as the conventional example shown in FIG. That is, for example, an elliptical bulb-shaped arc tube 1 that forms a light-emitting space, a first sealing tube 2 that continues to one end of the arc tube 1 and extends outward along the tube axis direction, and the arc tube 1 A second sealing tube 3 extending outwardly along the tube axis direction continuously to the end, and a sealing glass tube 4 is inserted into the second sealing tube 3, and the overlap Both are welded in the region.

  A pair of first main electrode 5 and second main electrode 6 are disposed in the arc tube 1 so as to face each other. The first main electrode 5 has its core wire 7 sealed to the first sealing tube 2 by means such as a step glass, and is led out in an airtight manner, while the second main electrode 6 is The core wire 8 is sealed to the sealing glass tube 4 by means such as step glass, and is led out in an airtight manner.

Between the pair of main electrodes 5 and 6 in the arc tube 1, a pair of first start auxiliary electrode 10 and second start auxiliary electrode 11 are disposed, and the internal leads 12 and 15 External leads 13 and 16 are electrically connected via metal foils 14 and 17 in the welding region between the second sealing tube 3 and the sealing glass tube 4.
In this embodiment, the sealing glass tube 4 is inserted into the second sealing tube 4 and overlapped and welded, and the outer diameter thereof is reduced. The external leads 13 and 16 from 11 are led out of the second sealed tube 3 from this reduced diameter region.

As apparent from the exploded enlarged view of FIG. 2, the internal leads 12, 15 are disposed on the outer periphery of the overlapping region of the sealing glass tube 4 with the second sealing tube 3, that is, in the welding region. A glass member 20 for primary sealing is welded so as to cover the external leads 13 and 16 and the metal foils 14 and 17.
Thus, the sealing glass tube 4 with the primary sealing glass member 20 welded in the distal end region is inserted into the second sealing tube 4, and the second sealing tube 4 and the sealing glass tube 4 are inserted. And are to be welded.

By the way, in the description of the present invention, the first main electrode 5 constitutes an anode, and the second main electrode 6 constitutes a cathode, but the relationship between the first sealing tube 2 and the second sealing tube 3. In FIG. 5, the reverse relationship may be adopted, in which the core wire 8 of the second main electrode 6 serving as the cathode is led out from the first sealing tube 2 side, and the core wire 7 of the first main electrode 5 serving as the anode is connected to the second seal. It may be derived from the sealing glass tube 4 side welded to the stop tube 3.
In other words, the internal leads 12 and 15 and the external leads 13 and 16 of the auxiliary starting electrodes 10 and 11 are derived from the cathode 6 side, but are derived from the opposite anode side 5 side. It may be a configuration.

It is preferable to use hydrated quartz glass as the material of the second sealing tube 3 and anhydrous quartz glass as the material of the glass member 20 for primary sealing.
Here, the water-containing quartz glass generally refers to water, that is, quartz glass containing 50 wt ppm or more of OH groups, and the anhydrous quartz glass refers to quartz glass containing OH groups of less than 50 ppm. .
Quartz glass is known to have a lower glass softening temperature and a higher thermal expansion coefficient as more OH groups are contained. Due to the difference in thermal expansion coefficient between the sealing tube 3 and the primary sealing glass member 20 having a small thermal expansion coefficient, a compressive stress acts on the primary sealing glass member 20 side at the welding interface during cooling. .
Due to the action of compressive stress on the primary sealing glass member 20, even when a high-pressure rare gas of atmospheric pressure or higher is sealed in the arc tube 1, the pressure resistance at the welded portion is improved and the lamp The risk of rupture is reduced.

A method for manufacturing the both-end sealed short arc flash lamp of the present invention will be described with reference to FIG.
(A) The core wire 8 of the cathode 6 is inserted into the inside of the sealing glass tube 4, and the end portion thereof is subjected to a step seal.
(B) The internal leads 12 and 15 and the metal foils 14 and 17 and the external leads 13 and 16 of the auxiliary starting electrodes 10 and 11 are arranged in the welding region on the tip side of the sealing glass tube 4.
(C) The primary sealing glass member 20 is fitted into the welding region of the sealing glass tube 4. This is heated and welded for primary sealing.
(D) Thereby, the primary sealing glass member 20 is welded to the welding region of the sealing glass tube 4 so as to cover the internal leads 12 and 15, the metal foils 14 and 17, and the external leads 13 and 16. The cathode mount 21 is formed.
On the other hand, the core wire 7 of the anode 5 is inserted into the bulb 22 in which the first sealing tube 2 and the second sealing tube 3 are connected to the arc tube 1, and a step is formed at the end of the first sealing tube 2. It is joint-sealed.
The cathode mount 21 is inserted into the second sealing tube 3 of the bulb 22, and the primary sealing glass member 20 is positioned at the end of the second sealing tube 3.
(E) Next, the second sealing tube 3 is heated with an oxyhydrogen burner or the like to weld the second sealing tube 3 and the glass member 20 for primary sealing of the sealing glass tube 4 (shrink seal). )

As described above, in the both-end sealed short arc flash lamp according to the present invention, the primary sealing glass member is welded to the welding region on the front end side of the sealing glass tube, and this is sealed in the second sealing tube. By adopting the welding configuration, the internal lead, the external lead and the metal foil of the starting auxiliary electrode positioned on the outer periphery of the sealing glass tube are accurately positioned, and this is welded to the second sealing tube. The welding operation is greatly simplified, and the internal leads, external leads, and metal foil are accurately positioned.
The primary sealing glass member, which is a simple cylindrical tube, is welded to the sealing glass tube, and the long arc tube, the first sealing tube, and the second sealing tube with the anode sealed. In the case of welding a valve, it is apparent that the work is easier when the glass member for primary sealing is welded as in the present invention. And the glass tube for sealing to which the glass member for primary sealing was welded can be easily welded to the second sealing tube with the internal lead and the external lead metal foil being accurately positioned and fixed.

DESCRIPTION OF SYMBOLS 1 Light emission tube 2 1st sealing tube 3 2nd sealing tube 4 Glass tube for sealing 5 1st main electrode 6 2nd main electrode 7 Core wire of 1st main electrode 8 Core wire of 2nd main electrode 10 1st start assistance Electrode 11 Second starting auxiliary electrode 12 Internal lead of first starting auxiliary electrode 13 External lead of first starting auxiliary electrode 14 Metal foil 15 Internal lead of second starting auxiliary electrode 16 External lead of second starting auxiliary electrode 17 Metal foil 20 Glass member for primary sealing 21 Cathode mount 22 Valve

Claims (2)

The glass arc tube has a pair of main electrodes and a starting auxiliary electrode, and includes a first sealing tube and a second sealing tube at both ends of the arc tube,
In the first sealing tube, the core wire of the first main electrode is sealed and led out of the arc tube,
A sealing glass tube inserted into the second sealing tube is welded to the second sealing tube, and the core wire of the second main electrode is sealed to the sealing glass tube. Led out of the arc tube,
Both-end sealing type in which the internal lead and the external lead of the starting auxiliary electrode and the metal foil that electrically connects them are sealed between the second sealing tube and the glass tube for sealing In short arc flash lamp,
A glass member for primary sealing is welded to the outer peripheral surface of the welding region with the second sealing tube in the glass tube for sealing so as to cover the internal lead, the external lead, and the metal foil. Both-end sealed short arc flash lamp. The material of the primary sealing glass member is anhydrous quartz glass,
The both-end sealed short arc flash lamp according to claim 1, wherein the glass of the second sealing tube is hydrated quartz glass.

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