JP5998684B2 - Glove box equipment - Google Patents

Description

  The present invention relates to a glove box device.

  As a general method for producing a semiconductor crystal, a crystal growth method is known in which a crystal carrier is immersed in a high-temperature raw material melt in a high-pressure atmosphere, and a semiconductor crystal is grown on the crystal carrier. In this method, it is necessary to fill the crucible with the raw material while keeping the crucible in contact with air and to store the crucible in a predetermined manner in a predetermined container.

  In general, a glove box is used when it is necessary to perform work away from the atmosphere, and work in the glove box is performed by an operator's hand through a glove attached to the glove box (Patent Document 1). reference). By the way, when working inside the glove box, the work is performed via the glove port, so that there is a problem that the workable area is limited. Conventionally, this problem has been addressed by providing a glove port on the opposite side so that work can be performed from both sides of the glove box (see FIGS. 4, 10, and 14 of Patent Document 1).

Japanese Patent No. 397980

However, the above prior art has the following problems.
When the work object becomes large, such as when the crucible is enlarged to industrially produce large crystals, there are cases where it is difficult to work with access from the front / back side of the glove port. . In particular, when a large crucible is installed in a container in a nested manner, it is essential to lift the crucible or container, making it difficult to access the container suspension point.
Also, if a glove port is provided on the front / rear side of the glove box, one worker will work around the front / rear side, or one worker on the front side and one worker on the rear side. There is a problem that the work becomes inefficient.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a glove box device that can improve workability in a closed space where a workable area is limited.

In order to solve the above problems, the present invention provides a glove comprising: a container for forming a sealed work space; and a glove that is airtightly attached to the container for work in the work space. A box device, which is provided in the work space and has a turntable for adjusting the direction of the work object with respect to the globe, is adopted.
By adopting this configuration, in the present invention, the work object is placed on a turntable and can be rotated, so that the orientation of the work object can be arbitrarily adjusted with respect to the globe having a limited work movable region. can do. For this reason, since the worker can access the work object in all directions from one glove port, workability is improved.

Further, in the present invention, a transfer device provided in the work space for transferring the work object, the transfer device includes a hand device for gripping the work object; A configuration is adopted in which the hand device includes a float device for allowing the hand device to rotate around a rotation axis of the turntable.
By adopting this configuration, in the present invention, the hand device can be rotated in synchronization with the turntable while the work target is placed on the turntable, so the direction of the work target is arbitrarily adjusted. The gripping work by the hand device can be performed. Therefore, the setup work for lifting and transferring the work object by the transfer device is facilitated.

In the present invention, the float device further adopts a configuration in which the hand device is movable on a plane orthogonal to the rotation axis of the turntable.
By adopting this configuration, in the present invention, even if there is an error such as a positional deviation due to distortion of the work object, the hand device can move on a plane orthogonal to the rotation axis. Accordingly, the gripping operation can be performed by shifting the hand device. Therefore, the setup work for lifting and transferring the work object by the transfer device becomes easier.

Moreover, in this invention, the said float apparatus employ | adopts the structure of having the plate member which supports the said hand apparatus, and the free bear which supports the said plate member.
By adopting this configuration, in the present invention, since the plate-like plate member is supported by the spherical free bear, the hand device supported by the plate member is in a float state in which it can rotate and move.

Moreover, in this invention, the said transfer apparatus employ | adopts the structure that it has a fixing device which fixes the said plate member in the predetermined initial position.
By adopting this configuration, in the present invention, even if the hand device in the float state is displaced for the gripping operation of the work object, it can be returned to the normal initial position and locked by the fixing device. The transfer operation of the work object can be executed according to a predetermined control program.

Moreover, in this invention, the said transfer apparatus employ | adopts the structure of having a 2nd fixing device which fixes the said plate member in arbitrary positions.
By adopting this configuration, in the present invention, when the hand device in the float state is displaced for gripping the work object, the hand device is locked at an arbitrary position, and the work object remains in that state. The lifting stability can be increased.

  ADVANTAGE OF THE INVENTION According to this invention, the glove box apparatus which can improve the workability | operativity in the sealed space where a workable area | region is restrict | limited is obtained.

It is a front view which shows the structure of the glove box apparatus in embodiment of this invention. It is a side view which shows the structure of the glove box apparatus in embodiment of this invention. It is a front view which shows the structure of the turntable and transfer apparatus in embodiment of this invention. It is a side view which shows the structure of the turntable and transfer apparatus in embodiment of this invention. It is a top view which shows the structure of the float apparatus in embodiment of this invention. It is a top view which shows the structure of the 1st fixing device in embodiment of this invention. It is the front view and CC sectional drawing which show the structure of the hanging jig | tool which mounts the crucible in embodiment of this invention. It is the front view and DD sectional drawing which show the structure of the outer container which accommodates the crucible in the shape of a nesting in embodiment of this invention.

Embodiments of the present invention will be described below with reference to the drawings.
In the following description, an XYZ orthogonal coordinate system may be set, and the positional relationship of each member may be described with reference to this XYZ orthogonal coordinate system. A predetermined direction in the horizontal plane is defined as an X-axis direction, a direction orthogonal to the X-axis direction in the horizontal plane is defined as a Y-axis direction, and a direction orthogonal to each of the X-axis direction and the Y-axis direction (that is, a vertical direction) is defined as a Z-axis direction.

FIG. 1 is a front view showing a configuration of a glove box device 1 according to an embodiment of the present invention. FIG. 2 is a side view showing the configuration of the glove box device 1 according to the embodiment of the present invention.
The glove box device 1 of the present embodiment is for performing preparatory work before setting the crucible 2 to a semiconductor crystal growth device (not shown).

In the preparatory work, for example, the crucible 2 for holding the raw material is set in the hanging jig 3 and the outer container 4 is stored in a nested manner (see FIG. 3 described later). For this reason, the glove box device 1 of this embodiment handles the crucible 2, the hanging jig 3, and the outer container 4. Hereinafter, these are collectively referred to as a work object W.
As shown in FIGS. 1 and 2, the glove box device 1 includes a container 10 that forms a work space S partitioned from the atmosphere, and a glove 11 for handling the work object W in the work space S.

  The container 10 is for forming the sealed working space S. The container 10 is formed according to the work object W and the size of the space required for the work. The container 10 has a window that allows the inside to be visually recognized from the outside, and is formed of a transparent member such as transparent PVC or acrylic. A vacuum pump (not shown) that sucks air in the work space S and an inert gas supply device (not shown) that supplies an inert gas (argon in the present embodiment) to the work space S are connected to the container 10. For this reason, the working space S in the container 10 can be replaced with an inert gas (argon) atmosphere.

  The globe 11 is airtightly attached to the container 10 for work in the work space S. A plurality of globes 11 according to the present embodiment are provided at a predetermined interval on the front side of the container 10. The globe 11 is made of an elastic member such as rubber, and is formed along the outer shape of a human hand and arm. The globe 11 is connected to a circular opening formed on the front side of the container 10. For this reason, the operator can work through the glove 11 fitted to the hand and arm of the person by passing the hand through the hole of the container 10.

  As shown in FIGS. 1 and 2, the glove box device 1 has a turntable 20 for adjusting the orientation of the work object W with respect to the glove 11, and the work object W with respect to the plurality of turntables 20. And a transfer device 30 for transferring in order. The turntable 20 and the transfer device 30 are provided in the work space S. The turntable 20 has a configuration in which a disc table that supports the bottom surface of the work object W is supported by a bearing (not shown), and extends in the Z-axis direction and passes through the center of the disc table (see FIG. 1). In addition, it is configured to be rotatable around (not shown in FIG. 2, see FIG. 3 described later). As shown in FIG. 1, a plurality of turntables 20 are arranged in a row along the X-axis direction.

  The transfer device 30 includes a hand device 31 that holds the work object W. The transfer device 30 includes a first moving device 32 for moving the hand device 31 along the X-axis direction, and a second moving device 33 for moving the hand device 31 along the Z-axis direction. . The first moving device 32 moves the hand device 31 in the X-axis direction together with the second moving device 33 along a guide rail 32a extending in the X-axis direction by a belt device or the like driven by a motor (not shown). . Further, the second moving device 33 moves the hand device 31 in the Z-axis direction along the elevating shaft 33b extending in the Z-axis direction by rotating a ball screw connected to the motor 33a by a timing belt (not shown). It is to be moved.

  FIG. 3 is a front view showing configurations of the turntable 20 and the transfer device 30 in the embodiment of the present invention. FIG. 4 is a side view showing configurations of the turntable 20 and the transfer device 30 in the embodiment of the present invention. FIG. 5 is a plan view showing the configuration of the float apparatus 40 in the embodiment of the present invention. 5 corresponds to the AA cross section in FIG. FIG. 6 is a plan view showing the configuration of the first fixing device 50 according to the embodiment of the present invention. 6 corresponds to the BB cross section in FIG. FIG. 7 is a front view and a C-C cross-sectional view showing the configuration of the hanging jig 3 for mounting the crucible 2 in the embodiment of the present invention. FIG. 8: is the front view and DD sectional drawing which show the structure of the outer container 4 which accommodates the crucible 2 in embodiment of this invention in a nested form.

  The transfer device 30 includes a hand device 31, a float device 40, and a first fixing device (fixing device) 50 shown in FIG. 3, and a second fixing device 60 shown in FIG. And a control device. The control device constitutes a computer system that controls the operation of the first moving device 32, the second moving device 33, the first fixing device 50, and the second fixing device 60. The control device controls the drive of each device based on an operation control program stored in advance in the memory, and executes an operation of transferring the work object W to the turntable 20 or the table 21 as shown in FIG. It has a configuration.

  As shown in FIG. 3, the hand device 31 has a pin 35 for hooking and lifting the work object W. The pin 35 is configured to be linearly movable horizontally by a linear guide 36. The linear guide 36 is provided with a plunger (not shown) for fixing the pin 35 at a predetermined position. The plunger can be locked with the pin 35 protruding, and can be locked with the pin 35 retracted. Yes. A total of four pins 35 and linear guides 36 are provided at intervals of 90 degrees, so that the pins 35 and the linear guides 36 can be projected and retracted in four directions. Each pin 35 can be manually moved independently.

  The arrangement of the pins 35 corresponds to the arrangement of the hooks 5 as the hanging points of the hanging jig 3 shown in FIG. 7 and the arrangement of the hooks 6 as the hanging points of the outer container 4 shown in FIG. The hanging jig 3 is a jig for nesting the cylindrical crucible 2 in the outer container 4 or for taking it out of the outer container 4. As shown in FIG. 7B, the hook 5 of the hanging jig 3 is provided at a position higher than the crucible 2. According to this configuration, the pin 35 can be attached to the hook 5 without interfering with the crucible 2.

  A total of four hooks 5 of the hanging jig 3 are arranged around the crucible 2 at intervals of 90 degrees. The suspension jig 3 has a bottom portion 3a formed of a metal plate material (for example, SUS) crossed in a substantially cross shape in plan view (see FIG. 7A). The suspension jig 3 of the present embodiment includes a thermal shock relaxation member 3b that relaxes the thermal shock between the bottom 3a and the bottom of the crucible 2 as shown in FIG. The thermal shock relaxation member 3b of this embodiment is made of a ceramic material processed into a disk shape. The ceramic material is preferably a ceramic material having a thermal shock resistance than that of the crucible 2, and is preferably a porous ceramic material having a low thermal conductivity even if it is the same material.

  As shown in FIG. 8B, the hook 6 of the outer container 4 is provided at a position higher than the hanging jig 3. According to this configuration, the pin 35 can be attached to the hook 6 without interfering with the hanging jig 3. A total of four hooks 6 of the outer container 4 are arranged at intervals of 90 degrees around the crucible 2 in the same manner as the hooks 5 of the hanging jig 3. The outer container 4 is a metal container (for example, SUS) having a bottomed cylindrical barrel portion 7 having a diameter slightly larger than that of the crucible 2 and a lid portion 8 provided at an upper opening of the barrel portion 7. . The lid portion 8 is fixed to the body portion 7 by a plurality of screw members 9.

  As shown in FIG. 8A, the hanging jig 3 is interposed in the gap between the crucible 2 and the outer container 4 when the crucible 2 is installed. In addition, the code | symbol C1 shown to Fig.8 (a) shows the outer peripheral surface of the crucible 2, and the code | symbol C2 shows the inner peripheral surface of the outer container 4. FIG. Thus, the hanging jig 3 exists between the outer peripheral surface C1 of the crucible 2 and the inner peripheral surface C2 of the outer container 4. The inner shape of the hanging jig 3 has a tolerance defined by the relationship with the outer peripheral surface C1 of the crucible 2, and the outer shape of the hanging jig 3 has a defined tolerance by the relationship with the inner peripheral surface C2 of the outer container 4. Is done. As described above, the hanging jig 3 is configured not only to handle the crucible 2 but also to be interposed in the gap between the crucible 2 and the outer container 4 to suppress backlash and restrict the position.

  As shown in FIG. 3, the float device 40 is for making the hand device 31 rotatable about the rotation axis L of the turntable 20. The float device 40 further allows the hand device 31 to move on an XY plane orthogonal to the rotation axis L of the turntable 20. Therefore, in the present embodiment, the float device 40 enables the hand device 31 to rotate around the Z axis and move the hand device 31 in the XY plane. Accordingly, the hand device 31 is in a float state that can be displaced following the rotation of the turntable 20 and the position of the work target W. The float device 40 includes a plate member 41 that supports the hand device 31 and a free bear 42 that supports the plate member 41.

  The plate member 41 has an annular shape with an opening 43 formed in the center. A ring member 44 is integrally attached to the downward surface side of the plate member 41. As shown in FIG. 5, the ring member 44 has an annular shape capable of coming into contact with a plurality of free bears 42, and the downward surfaces thereof are supported by the plurality of free bears 42. . At the four corners of the plate member 41, columns 46 are provided for supporting the connection member 48 connected to the hand device 31 shown in FIG. The column 46 integrally connects the plate member 41 and the connection member 48.

  The opening 43 of the plate member 41 has a smaller diameter than the inner diameter of the ring member 44. A shaft 45 is inserted into the opening 43 in the Z-axis direction. The opening 43 has a larger diameter than the outer diameter of the shaft 45. Thus, a gap is formed between the plate member 41 and the shaft 45. A support plate 47 that supports the free bear 42 is connected to the lower end of the shaft 45. As shown in FIG. 5, the support plate 47 has a rectangular shape with four corners cut away, and does not interfere with the column 46 by the rotation / movement of the plate member 41.

  The support plate 47 supports the plurality of free bears 42. A total of four free bears 42 are arranged around the crucible 2 at intervals of 90 degrees. The free bear 42 is configured such that a ball exposed upward can freely rotate at a fixed position, and supports a member on the ball in a freely displaceable manner. The plate member 41 supported by the free bear 42 is in a float state capable of rotating around the Z axis and moving in the XY plane. Further, the hand device 31 supported by the plate member 41 is also in a float state in which the rotation around the Z axis and the movement in the XY plane are possible. A shaft 45 is inserted into the opening 43 of the plate member 41, and the displacement of the hand device 31 in the XY plane is regulated to a predetermined width by the plate member 41 being engaged with the shaft 45. It is like that.

  As shown in FIG. 3, the 1st fixing device 50 fixes the plate member 41 made into the float state in the predetermined initial position. The first fixing device 50 includes a fixing piece 51 provided integrally with the plate member 41 and a cylinder device 52 that can be engaged with the fixing piece 51 in the horizontal direction. The fixed piece 51 and the cylinder device 52 are respectively provided on both sides of the opening 43 of the plate member 41 in the X-axis direction. As shown in FIG. 6, the fixed piece 51 is a combination of two triangular prisms, and forms a tapered groove 54 that gradually decreases in width as it advances in the direction in which the tip of the rod 53 of the cylinder device 52 faces. It has become.

  In addition, when driving under the control of the control device described above, the two cylinder devices 52 are driven in synchronization. The cylinder device 52 engages with the groove 54 of the fixed piece 51 (see the left side in FIG. 6), and disengages with the groove 54 of the fixed piece 51 (see the right side in FIG. 6). )), The rod 53 is moved. A roller follower 55 is provided at the tip of the rod 53. The roller follower 55 is a roller that is rotatable around an axis extending in the Z-axis direction. When the rod 53 is protruded toward the engagement position, the roller follower 55 is finally engaged at the back of the groove 54 even if the contact position is deviated. It becomes possible to lock at the set initial position (reference position for program control).

  As shown in FIG. 4, the 2nd fixing device 60 fixes the plate member 41 made into the float state in arbitrary positions. The second fixing device 60 includes a cylinder device 61 that can contact the plate member 41 in the vertical direction. The cylinder devices 61 are respectively provided on both sides of the opening 43 of the plate member 41 in the Y-axis direction. In addition, when driving under the control of the above-described control device, the two cylinder devices 61 are driven in synchronization. The cylinder device 61 is between a contact position (see the left side in FIG. 4) that contacts the upward surface of the plate member 41 and a non-contact position (see the right side in FIG. 4) that separates from the upward surface of the plate member 41. The rod 62 is moved.

  A friction member 63 is provided at the tip of the rod 62. For example, a urethane material can be used for the friction member 63 of the present embodiment. The friction member 63 can come into surface contact with the upward surface of the plate member 41 within a predetermined range. Thereby, even if the plate member 41 is displaced, the cylinder device 61 can come into contact with the upward surface of the plate member 41. When the rod 62 is projected toward the contact position, the friction member 63 comes into contact with the upward surface of the plate member 41, and the plate member 41 can be pressed against the free bear 42. By this pressing, a frictional force is generated between the friction member 63 and the plate member 41, the plate member 41 cannot be rotated around the Z axis and moved in the XY plane, and the plate member 41 is displaced arbitrarily. It will be possible to lock in position.

  Next, preparation work for setting the crucible 2 by the glove box device 1 having the above-described configuration will be described.

  As shown in FIG. 1, the preparatory work of the present embodiment is a work in which the crucible 2, the hanging jig 3, and the outer container 4 are sequentially nested in a sealed work space S of the container 10. In this operation, it is essential to lift the crucible 2 and the outer container 4 on which the hanging jig 3 is mounted. As shown in FIG. 2, the worker works using a glove 11 with a limited work movable region. If the crucible 2 becomes large and the work object W becomes large in order to industrially produce large crystals as in this embodiment, the work becomes difficult. In particular, it becomes difficult to access the suspension point (the hook 5 of the hanging jig 3 and the hook 6 of the outer container 4) on the back side of the work object W.

  The glove box device 1 is provided in the work space S and has a turntable 20 for adjusting the direction of the work object W with respect to the glove 11. As described above, in this embodiment, the work object W is placed on the turntable 20 and can be rotated, so that the work object W can be freely oriented with respect to the globe 11 having a limited work movable region. Can be adjusted. In particular, by rotating the turntable 20, access to the hanging point on the back side of the work object W is facilitated. Thus, since the worker can access the work target W in all directions from one glove port, the workability is improved.

  The glove box device 1 is provided in the work space S, and has a transfer device 30 for transferring the work object W. The transfer device 30 holds the work object W as shown in FIG. And a float device 40 for allowing the hand device 31 to rotate about the rotation axis L of the turntable 20. According to this configuration, since the hand device 31 can be rotated in synchronization with the turntable 20 while the work object W is placed on the turntable 20, the direction of the work object W is adjusted arbitrarily. A gripping operation by the hand device 31 can be performed. Therefore, the setup work for lifting and transferring the work object W by the transfer device 30 is facilitated.

  For example, when holding the hanging jig 3 with the crucible 2 by the hand device 31, the pin 35 is inserted into the hook 5 which is a hanging point on the front side of the globe port and locked. Next, the turntable 20 is rotated by ¼ around the rotation axis L, and the next hanging point is moved to the front side of the globe port. When the turntable 20 rotates, the hand device 31 together with the work target W also rotates by a quarter of the rotation axis L by the float device 40. For this reason, the next pin 35 can be inserted and locked to the next hook 5 moved to the front side of the globe port. Thus, the gripping operation by the hand device 31 can be easily performed by inserting the pin 35 while sequentially moving the suspension point toward the front side of the globe port. This also applies to the case where the outer container 4 is gripped by the hand device 31.

  Further, in the present embodiment, the float device 40 is configured to further move the hand device 31 on the XY plane orthogonal to the rotation axis L of the turntable 20. According to this configuration, even if there is an error such as a positional deviation due to distortion of the work object W, the hand device 31 can move on a plane orthogonal to the rotation axis L. The gripping operation can be performed by shifting the device 31. Therefore, the setup work for lifting and transferring the work object W by the transfer device 30 becomes easier. As the error, for example, since the hook 5 of the hanging jig 3 and the hook 6 of the outer container 4 are provided above, even if the lower position is placed at the normal position, mechanical distortion or the like Depending on the case, the suspension point may be displaced in the XY plane.

  Since the float device 40 includes a plate member 41 that supports the hand device 31 and a free bear 42 that supports the plate member 41, the plate-like plate member 41 is supported by the spherical free bear 42, and the plate member 41 The supported hand device 31 is in a float state in which it can rotate and move. For this reason, the hand device 31 in the float state can be displaced to an arbitrary position on the XY plane according to the distortion of the work object W, and the error can be absorbed. Accordingly, the pin 35 can be reliably inserted into the hanging point of the work object W.

  When all the pins 35 are inserted into the suspension points, the transfer device 30 raises the hand device 31 by the second moving device 33 and lifts the work object W. As shown in FIG. 6, the transfer device 30 includes a first fixing device 50 that fixes the plate member 41 at a predetermined initial position. The first fixing device 50 is fixed to the roller follower 55 at the tip of the first fixing device 50 by driving the cylinder device 52 and positioning the rod 53 at the engaging position in a state where the work object W is separated from the turntable 20 by lifting. The groove 54 of the piece 51 is engaged and locked. According to this configuration, even if the floating hand device 31 is displaced for gripping the work object W, the first fixing device 50 can return to the normal initial position and lock it. The transfer operation (the nested transfer operation shown in FIG. 1) of the object W can be executed according to a predetermined control program.

  Moreover, the transfer apparatus 30 of this embodiment has the 2nd fixing device 60 which fixes the plate member 41 in arbitrary positions, as shown in FIG. The second fixing device 60 drives the cylinder device 61 and positions the rod 62 at the contact position before the work object W is lifted, that is, in a state where the work object W is placed on the turntable 20. As a result, the friction member 63 at the tip is pressed against the upward surface of the plate member 41 to lock it. According to this configuration, when the floating hand device 31 is displaced for gripping the work object W, the hand device 31 is locked at an arbitrary position and the work object W is lifted in that state. This increases the lifting stability. Therefore, the work object W and its contents (raw material) do not shake during the lifting.

When the work object W is lifted up to a predetermined position, the lock by the second fixing device 60 is released and the hand device 31 is released, and then the first fixing device 50 is locked to move the hand device 31 to the initial position. Return to. Thereafter, as shown in FIG. 1, the transfer device 30 causes the hand device 31 to traverse by the first moving device 32 to move the work object W above the next turntable 20 or the table 21. Then, the transfer device 30 lowers the hand device 31 by the second moving device 33 and places the work object W on the next turntable 20 or table 21. It should be noted that the outer container 4 having the lid 8 closed with the crucible 2 nested therein is finally placed on the table 21.
Thus, the preparation work for setting the crucible 2 by the glove box device 1 is completed.

Therefore, according to the above-described embodiment, the container 10 for forming the sealed working space S and the globe 11 that is airtightly attached to the container 10 for working in the working space S are provided. The workable area is limited by adopting the configuration of the glove box device 1 that includes the turntable 20 that is provided in the work space S and adjusts the direction of the work object W with respect to the glove 11. The workability in the sealed space can be improved.
Further, according to the above-described embodiment, the transfer device 30 is configured to allow the hand device 31 for gripping the work target W and the hand device 31 to be rotatable around the rotation axis L of the turntable 20. By adopting the configuration of having the float device 40, the gripping operation by the hand device 31 can be performed in cooperation with the turntable 20, so that the work object W is lifted and transferred by the transfer device 30. This makes the setup work much easier.

  As mentioned above, although preferred embodiment of this invention was described referring drawings, this invention is not limited to the said embodiment. Various shapes, combinations, and the like of the constituent members shown in the above-described embodiments are examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.

  For example, in the above-described embodiment, the configuration in which the turntable 20 is manually rotated has been described. However, the turntable 20 may be configured to be electrically rotated by a motor or the like.

  Further, for example, in the above embodiment, the configuration in which the float device 40 has two functions of rotation and movement by the plate member 41 and the free bear 42 has been described, but the present invention is limited to this configuration. Alternatively, the rotation function and the movement function may be configured separately, and may be configured by combining them.

  Further, for example, in the above embodiment, the glove box device 1 is applied to the operation of setting the crucible 2 of the semiconductor crystal growth apparatus, but it is needless to say that the present invention can be applied not only to this operation but also to other operations.

  DESCRIPTION OF SYMBOLS 1 ... Glove box apparatus, 10 ... Container, 11 ... Globe, 20 ... Turntable 20, 30 ... Transfer apparatus, 31 ... Hand apparatus, 40 ... Float apparatus, 41 ... Frame member, 42 ... Free bear, 50 ... First fixation Device (fixing device), 60 ... second fixing device, L ... rotary shaft, S ... work space, W ... work object

Claims (6)

A glove box device comprising: a container for forming a sealed work space; and a glove that is airtightly attached to the container for work in the work space,
A turntable for adjusting the orientation of the work object with respect to the glove provided in the work space ;
A transfer device provided in the work space for transferring the work object;
The transfer device includes a hand device for gripping the work object, and a float device for allowing the hand device to rotate around a rotation axis of the turntable. Box equipment. The glove box device according to claim 1 , wherein the float device further allows the hand device to move on a plane orthogonal to a rotation axis of the turntable. The glove box device according to claim 1 , wherein the float device includes a plate member that supports the hand device and a free bear that supports the plate member. The glove box device according to claim 3 , wherein the transfer device includes a fixing device that fixes the plate member at a predetermined initial position. The glove box device according to claim 3 , wherein the transfer device includes a second fixing device that fixes the plate member at an arbitrary position. With the globe,
A worktable is disposed in the workable area of the globe, and a turntable capable of supporting the bottom surface;
A glove box device comprising: a hand device capable of gripping the work object and movable in a direction orthogonal to a rotation axis of the turntable.

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