JP5978169B2 - Environmental test equipment - Google Patents

Description

  The present invention relates to an environmental test apparatus capable of controlling a test chamber in which a sample body is arranged in a desired environment.

  In recent years, the market for power semiconductor elements (power devices), which is the core technology of electric vehicles and next-generation power networks, has been expanding. This power device is mainly used as a switch for power control, and typical examples thereof include a thyristor and a power transistor. These are basically the same in principle as semiconductor devices such as memories and microcomputers, but have the feature of being able to control higher voltages and larger currents. On the other hand, since this type of power device is used for automobiles, power networks, and the like that require high safety as described above, high reliability is required.

  For example, there is an environmental test apparatus as one apparatus for evaluating the reliability of such a product or the like (hereinafter simply referred to as a sample body). The environmental test apparatus mainly evaluates quality reliability (hereinafter, also referred to as durability) against temperature changes and humidity changes. That is, this type of environmental test apparatus has a test chamber in which a specimen to be tested is placed, and has a function of adjusting the temperature and humidity in the test chamber to a desired test environment. As one of such environmental test apparatuses, there is known a thermal shock test apparatus that applies a thermal shock to a sample body and evaluates its durability (for example, Patent Document 1).

  The thermal shock test equipment uses a high-temperature exposure mode that introduces a gas adjusted to a high temperature into the test chamber to form a high-temperature environment, and introduces a gas adjusted to a low temperature into the test chamber to create a low-temperature environment. It has an operation function by the low temperature exposure mode, and it is possible to carry out a cooling cycle operation that sequentially executes these modes. In other words, this type of thermal shock test apparatus repeatedly performs the thermal cycle operation, thereby abruptly changing the environment in the test chamber and applying a thermal shock to the sample body.

Japanese Patent Laid-Open No. 11-160217

  By the way, when testing the durability of a product such as the above-described power device using an environmental test apparatus, a plurality of temperature conditions may be prepared and implemented in order to ensure higher quality. In general, three temperature conditions are prepared. Specific temperature conditions are, for example, as shown below.

(1) Low temperature environment: minus 40 degrees Celsius, high temperature environment: 230 degrees Celsius (2) Low temperature environment: minus 40 degrees Celsius, high temperature environment: 250 degrees Celsius (3) Low temperature environment: minus 40 degrees Celsius, High temperature environment: 280 degrees Celsius Every time

A sample body is prepared for each temperature condition, and the test is performed individually.
Therefore, when only one environmental test apparatus is installed in a laboratory or the like, it takes time as many as the number of test conditions, which is inefficient. In order to shorten the test time, it is conceivable to prepare as many environmental test equipments as the number of test conditions. However, in laboratories where environmental test equipment is installed, the space itself is not so large. It may be difficult to install an environmental test apparatus. Moreover, even if environmental test apparatuses can be installed as many as the number of test conditions, the power consumption increases and the running cost increases.

  Accordingly, an object of the present invention is to provide an environmental test apparatus capable of saving space, suppressing power consumption, and shortening test time in view of the problems of the prior art.

The invention according to claim 1, which is provided to solve the above problem, has a device main body, and there are a plurality of independent test chambers in which a desired test environment is formed. each Alternatively, the test chamber is divided into a predetermined group has the air conditioning chamber provided for each or in groups each test chamber, each air-conditioned room, the plurality as a whole are installed individually evaporator The evaporators are arranged on a refrigeration circuit where at least the compressor and the condenser are common, and the maximum capacity of the cooling capacity of the refrigeration circuit is the capacity of the plurality of independent test chambers as a whole. an environmental test apparatus according to claim inadequate Rukoto respect.

  Since the environmental test apparatus of the present invention has a plurality of independent test chambers, the durability test of a plurality of sample bodies can be simultaneously performed with this single apparatus. That is, in the present invention, even if there are a plurality of test conditions, an environmental test can be performed efficiently. As a result, the time can be shortened.

  Moreover, in this invention, the air conditioning room is provided for every test room or every group which divided the test room into the predetermined group, and the evaporator is provided in each of the air conditioning room. These evaporators are arranged on a refrigeration circuit where at least the compressor and the condenser are common. That is, in the present invention, there are only a plurality of evaporators, and there is only one refrigeration circuit. With this configuration, in the present invention, the entire apparatus is not excessive. As a result, the environmental test apparatus of the present invention does not require a wide installation space as in the case where a plurality of environmental test apparatuses are installed, and can save space. At the same time, by consolidating the refrigeration circuit, power consumption can be reduced and running costs can be reduced.

According to a second aspect of the present invention, each air conditioning room has a low temperature room in which the evaporator is arranged and a high temperature room in which heating means are arranged, and the test room forms a low temperature environment and a high temperature environment. The low-temperature environment is formed by introducing a low-temperature gas generated in a low-temperature chamber, and the high-temperature environment is formed by introducing a high-temperature gas generated in a high-temperature chamber. 2. The environment according to claim 1, further comprising a function that makes it possible to control at least one of the other test chambers to a high temperature environment on the condition that the temperature is controlled to a low temperature environment. Test equipment.

Further, in the invention according to claim 3 proposed based on the same knowledge, each air-conditioning room is one space, and the evaporator and the heating means are arranged in the space, respectively. It is possible to form a low temperature environment and a high temperature environment, the low temperature environment is mainly formed by introducing the low temperature gas generated by the evaporator, and the high temperature environment mainly introduces the high temperature gas generated by the heating means And is provided with a function that makes it possible to control at least one of the other test chambers to a high temperature environment on the condition that one of the test chambers is controlled to a low temperature environment. The environmental test apparatus according to claim 1, wherein:

The invention according to claim 2 or 3 is provided with a function of controlling at least one other test chamber to a high temperature environment when any one of the test chambers is controlled to a low temperature environment. It is possible to design the refrigeration circuit with a reduced refrigeration capacity. In other words, since control to operate all the evaporators at once can be intentionally avoided, for example, even if three evaporators are provided, the three evaporators are operated with normal capacity There is no need to have a freezing capacity. As a result, in addition to further saving the installation space, the introduction cost can be suppressed.

The invention described in claim 4 is the environmental test apparatus according to any one of claims 1 to 3 , wherein the test chambers are arranged at different positions in the height direction.

  Since the environmental test apparatus of the present invention has a configuration in which a plurality of test chambers are arranged in the height direction, the size in the horizontal direction (width direction) is the same as that of an apparatus having only one test chamber. . In other words, according to the environmental test apparatus of the present invention, the size in the width direction is the same as that of the conventional one even though a plurality of test chambers are provided. Can be achieved.

  The environmental test apparatus of the present invention includes a plurality of independent test rooms, and each test room or each test room is divided into a predetermined group, and an air conditioning room is provided for each group. While aiming, it is possible to reduce power consumption and shorten test time.

It is a perspective view which shows the environmental test apparatus which concerns on embodiment of this invention. It is a conceptual diagram which shows the internal structure of the environmental test apparatus of FIG. It is a time chart which shows the mode of control of the environmental test apparatus of FIG. It is a conceptual diagram which shows the modification of an environmental test apparatus. It is a conceptual diagram which shows another modification of an environmental test apparatus. It is a conceptual diagram which shows another modification of an environmental test apparatus. It is a time chart which shows the mode of control of the environmental test apparatus of FIG. It is a conceptual diagram which shows the environmental test apparatus which abbreviate | omitted the high temperature chamber of the environmental test apparatus of FIG. It is a perspective view which shows the environmental test apparatus which arranged three test chambers in the width direction of the apparatus main body.

Below, the environmental test apparatus which concerns on embodiment of this invention is demonstrated.
The environmental test apparatus 1 of the present embodiment is a thermal shock test apparatus, which has a test chamber 5 in which a sample body such as an electronic component or an electronic device is placed, and the test chamber 5 in which the sample body is arranged. It has a basic function of sending hot air or cold air in a predetermined cycle and applying thermal stress to the sample body (cold thermal shock test). In this embodiment, a plurality of independent (three in this embodiment) test chambers 5a to 5c are provided so that a thermal shock test under different conditions can be simultaneously performed by one apparatus.

  That is, as shown in FIG. 1, the environmental test apparatus 1 of the present embodiment has a rectangular parallelepiped apparatus main body 4, and three independent test chambers 5 a to 5 c are provided inside the apparatus main body 4. ing. Each of the test chambers 5a to 5c is provided with a test chamber-side temperature sensor 34 so that the atmospheric temperature in each chamber can be detected (FIG. 2). The approximate size of the apparatus main body 4 is, for example, a height of about 1.8 to 2.3 m, a width of about 1.0 to 1.2 m, and a depth of about 1.3 to 1.5 m.

  Moreover, as shown in FIG. 2, the apparatus main body 4 is provided with an air-conditioning chamber 7 (7a to 7c) corresponding to each of the test chambers 5a to 5c. That is, in this embodiment, there are three air conditioning chambers 7a to 7c, and the environment in each of the test chambers 5a to 5c can be controlled independently. Each of the air conditioning chambers 7a to 7c includes a high temperature chamber 12 and a low temperature chamber 13. The apparatus main body 4 is provided with apparatus openings 11a to 11c communicating with the test chambers 5a to 5c on the front side, and three doors 6a to 6c that can be opened and closed with respect to the apparatus main body 4. Thus, the device openings 11a to 11c can be opened and closed.

  The high greenhouse 12 is a part for adjusting the ambient temperature in the test chamber 5 to a high temperature range (for example, 200 to 300 degrees Celsius). That is, the high temperature chamber 12 heats the gas in the chamber to a preset temperature on the high temperature side, and circulates the heated gas between the test chamber 5 and raises the temperature in the test chamber 5. Let Specifically, the high-temperature chamber 12 includes, as main components, a heater (heating means) 22 that heats a gas, a high-temperature side fan 23 that circulates the gas, and a high-temperature side that detects the ambient temperature in the high-temperature chamber 12. A temperature sensor 45 is provided.

  Furthermore, a high temperature side return side port 20 and a high temperature side return side port 21 are provided between the high temperature chamber 12 and the test chamber 5. It circulates between chambers (between the high temperature chamber 12 and the test chamber 5) through the side port 21. Note that ventilation dampers 38 and 39 for restricting the passage of gas through the openings are provided in the high temperature side return side port 20 and the high temperature side return side port 21, respectively.

  In the present embodiment, the high temperature chamber 12 is provided with a function for adjusting the atmospheric temperature in the test chamber 5 to a normal temperature range (hereinafter referred to as RT (room temperature)). That is, the high-temperature chamber 12 is provided with an air supply unit 40 for taking outside air into the room and an exhaust unit 41 for exhausting room gas to the outside. The air supply unit 40 includes an air supply opening 42 that communicates with the high temperature chamber 12, an air supply blower 43 that sends outside air into the room, and an air supply side damper 44 that restricts the flow of gas in the air supply opening 42. It is configured. On the other hand, the exhaust part 41 includes an exhaust opening 46 that communicates with the high temperature chamber 12 and an exhaust side damper 49 that restricts the flow of gas in the exhaust opening 46.

The low greenhouse 13 is a part for adjusting the atmospheric temperature in the test chamber 5 to a low temperature range (for example, minus 20 to 50 degrees Celsius). That is, the low temperature chamber 13 cools the gas in the room to a preset temperature on the low temperature side, and cools the inside of the test chamber 5 by circulating the cooled gas between the test chamber 5 and the low temperature chamber 13. . Specifically, the low-temperature chamber 13 detects an atmospheric temperature in the low-temperature chamber 13 as an evaporator 27 that cools the gas, a low-temperature side fan 28 that circulates the gas, and the main components in order to exert a cooling function. A low temperature side temperature sensor 29 is provided.
The evaporator 27 is a part of a refrigeration circuit configured with a compressor, a condenser, and an expansion valve.

  Furthermore, between the low temperature chamber 13 and the test chamber 5, a low temperature side forward side port 25 and a low temperature side return side port 26 are provided, and the gas in the room is the low temperature side forward side port 25 and the low temperature side. It circulates between chambers (between the low temperature chamber 13 and the test chamber 5) via the return side port 26. It should be noted that ventilation dampers 47 and 48 for restricting the passage of gas through the openings are provided at the low temperature side return side port 25 and the low temperature side return side port 26, respectively.

  Here, as described above, when a plurality of test chambers are provided and each refrigeration circuit is simply provided in each test chamber, the environmental test apparatus itself becomes excessively large. Therefore, it has been difficult to save the installation space required for the environmental test apparatus. In addition, when a plurality of refrigeration circuits are individually provided, there is a concern that the running cost increases because the energy consumption increases unnecessarily in a situation where the individual refrigeration circuits must be operated simultaneously.

  Therefore, in order to solve such a problem, the present embodiment includes the following characteristic configuration. That is, the environmental test apparatus 1 has a configuration in which the respective evaporators 27 installed in the three test chambers 5 a to 5 c are arranged on one refrigeration circuit 15. In the following, for convenience, the evaporators corresponding to the test chambers 5a to 5c will be described as the evaporators 27a to 27c.

  More specifically, each of the evaporators 27 a to 27 c is provided in parallel on one refrigeration circuit 15. That is, the refrigeration circuit 15 includes a main flow path 35 and three branch paths 37a to 37c branched in parallel from the main flow path 35, and each branch path 37a to 37c passes through the corresponding low temperature chamber 13. It has become. And the evaporators 27a-27c are distribute | arranged to each branch path 37a-37c which passed the low temperature chamber 13. As shown in FIG.

  Specifically, one branch passage 37a passes through the low temperature chamber 13 adjacent to one test chamber 5a, and one evaporator 27a is disposed on the branch passage 37a. In addition, another one branch passage 37b passes through the low temperature chamber 13 adjacent to another one test chamber 5b, and another evaporator 27b is arranged on the branch passage 37b. . Furthermore, another branch passage 37c passes through the low temperature chamber 13 adjacent to another one test chamber 5c, and another evaporator 27c is arranged on the branch passage 37c.

  Various valves are arranged on the branch paths 37a to 37c and before and after the evaporators 27a to 27c. Specifically, on the branch paths 37a to 37c, with respect to the evaporators 27a to 27c, the solenoid valve 30 and the expansion valve 31 are disposed on the upstream side, and the check valve 32 is disposed on the downstream side. ing. In the present embodiment, the electromagnetic valve 30 is provided on the upstream side of the expansion valve 31.

  Therefore, in this embodiment, the inflow of the refrigerant to each of the evaporators 27a to 27c is restricted by the electromagnetic valve 30 provided in each of the branch paths 37a to 37c, and each of the evaporators 27a to 27c is controlled by the check valve 32. The refrigerant that has passed through can be prevented from flowing backward.

  Further, in this embodiment, in order to further reduce the installation space, the maximum capacity of the cooling capacity in the refrigeration circuit 15 is roughly based on one circuit when the refrigeration circuit is individually installed for each low temperature chamber. The cooling capacity is about twice. That is, in this embodiment, the three evaporators 27a to 27c are provided on the refrigeration circuit 15, but when trying to exhibit the same cooling capacity as the conventional, three evaporators that can be operated simultaneously are three. Two of the evaporators 27a to 27c.

  However, in this embodiment, only the maximum capacity of the cooling capacity that can be exhibited in the refrigeration circuit 15 is limited, and the three evaporators 27a to 27c cannot be controlled simultaneously. In other words, when the three evaporators 27a to 27c are operated at the same time, the cooling capacity is only slightly reduced as compared with the case where any two evaporators 27a to 27c are operated simultaneously. .

Next, a basic operation during the environmental test of the environmental test apparatus 1 of the present embodiment will be described.
As described above, the environmental test apparatus 1 of the present embodiment is a thermal shock test apparatus, and in each of the test chambers 5a to 5c, it is possible to perform a thermal shock test (hereinafter referred to as a single thermal test) similar to a known one. It is.
Therefore, in the following, a series of cycle operations in which the low temperature exposure test and the high temperature exposure test are repeated a predetermined number of times will be described while paying attention to one test chamber 5a.
In the following description, a series of cycles are repeated in the order of the low temperature exposure test and the high temperature exposure test.

  When the single cooling test is started in the test chamber 5a, the first cycle low temperature exposure test is started. That is, in the environmental test apparatus 1, the evaporator 27 a and the low temperature side blower 28 in the low temperature chamber 13 are driven on the condition that all the dampers 38, 39, 47, 48 are first confirmed to be closed. Then, the inside of the low temperature chamber 13 is cooled to a preset target set temperature (for example, minus 40 degrees Celsius) (precooling operation). Thereafter, when the atmospheric temperature in the low temperature chamber 13 reaches the target set temperature, the ventilation dampers 47 and 48 are controlled to be opened, and the low temperature exposure test is started.

  In the low temperature exposure test, a low temperature gas is sent from the low temperature chamber 13 side to the test chamber 5a side after the pre-cooling operation. The low-temperature gas is introduced into the test chamber 5 a through the low-temperature side going-out port 25. And the low temperature gas which flowed in in the test chamber 5a returns to the low temperature chamber 13 side again via the low temperature side return side port 26. That is, the cold air generated in the low temperature chamber 13 circulates between the low temperature chamber 13 and the test chamber 5a. Thereby, the inside of the test chamber 5a is rapidly cooled by the cold air sent from the low temperature chamber 13, and falls to the target temperature. Along with this, a low-temperature thermal shock is given to the sample body placed in the test chamber 5a. In this way, the low temperature exposure test is performed for a predetermined time set in advance.

  When a predetermined time elapses after the low temperature exposure test is started, the evaporator 27a and the low temperature side fan 28 are stopped, the low temperature exposure test is terminated, and the high temperature exposure test of the same cycle is started.

  That is, in the environmental test apparatus 1, when the low temperature exposure test is completed, the ventilation dampers 47 and 48 provided between the low temperature chamber 13 and the test chamber 5a are controlled to be closed. At the same time, the high temperature exposure test is started. When the high temperature exposure test is started, first, the ventilation dampers 38 and 39 provided between the high temperature chamber 12 and the test chamber 5a are controlled to be opened, and the high temperature gas generated in the high temperature chamber 12 is supplied to the test chamber. Feed to the 5a side.

  Here, when the high temperature exposure test is executed, a preheating operation for preheating the inside of the high temperature chamber 12 is performed before the test operation is started. That is, simultaneously with the start of the low temperature exposure test or at different timings, the heater 22 and the high temperature side blower 23 are driven to heat the inside of the high temperature chamber 12 to a preset target temperature (for example, 280 degrees Celsius). And in the state which heated the inside of the high temperature chamber 12 in this way, the completion | finish of a low temperature exposure test is waited.

  Therefore, when the low temperature exposure test is completed, the environmental test apparatus 1 controls the ventilation dampers 47 and 48 between the high temperature chamber 12 and the test chamber 5a to be in an open state, and starts the high temperature exposure test.

  In the high temperature exposure test, high temperature gas is sent from the high temperature chamber 12 side to the test chamber 5a side. The high-temperature gas is introduced into the test chamber 5 a through the high-temperature side forward side port 20. And the high temperature gas which flowed in in the test chamber 5a returns to the high temperature chamber 12 side again via the high temperature side return side port 21. That is, the hot air generated in the high temperature chamber 12 circulates between the high temperature chamber 12 and the test chamber 5a. Thereby, the inside of the test chamber 5a is rapidly heated by the hot air sent from the high temperature chamber 12, and the temperature is raised to the target temperature. Along with this, a high-temperature thermal shock is given to the sample body placed in the test chamber 5a. Thus, the high-temperature exposure test is performed for a predetermined time set in advance.

In this flow, when the test operation of the first cycle is completed, the next cycle is entered, and the low temperature exposure test and the high temperature exposure test are performed as described above. This single cooling test is repeated until a predetermined number of cycles set in advance is reached. When the predetermined number of cycles are completed, all the controls related to the low temperature exposure test and the high temperature exposure test are stopped, and the inside of the test chamber 5a is exposed to a normal temperature atmosphere. That is, the air supply side damper 44 and the exhaust side damper 49 are controlled in the opening direction, and the air supply blower 43 is driven. Then, the gas in the test chamber 5a is replaced with outside air. When the ambient temperature of the test chamber 5a reaches RT or near RT, the supply side damper 44 and the exhaust side damper 49 are controlled in the closing direction, and the supply blower 43 is stopped.
In the test chambers 5b and 5c, the same cycle operation can be performed.

Next, characteristic functions of the environmental test apparatus 1 of the present embodiment will be described.
In the present embodiment, as described above, three test chambers 5a to 5c are provided, and individual evaporators 27a to 27c are installed in the respective test chambers 5a to 5c. Further, each of the evaporators 27a to 27c is provided on one refrigeration circuit 15, and the maximum capacity of the cooling capacity is approximately twice that of the conventional individual refrigeration circuit. ing. Therefore, when the low temperature exposure test is simultaneously performed in the three test chambers 5a to 5c, the cooling capacity becomes insufficient, and the test accuracy may be somewhat affected.

  Therefore, in the present embodiment, when the sample body is placed in the three test chambers 5a to 5c and the thermal shock test is performed at the same time, the three test chambers 5a to 5c do not simultaneously perform the low temperature exposure test. Features are provided. That is, when the thermal shock test is simultaneously performed in the three test chambers 5a to 5c, the control is performed such that the cycle operation of at least one test chamber and the cycle operation of the other test chamber are in an opposite phase relationship ( Hereinafter, the anti-phase cycle control) is executed.

  Specifically, the cycle operation in any two test chambers is controlled to be in phase by the anti-phase cycle control, and the cycle operation in the remaining one test chamber is controlled to be in the opposite phase of the cycle operation. . In the present embodiment, the cycle operations of the test chambers 5a and 5b are controlled in the same phase, and the cycle operations of the remaining test chambers 5c are controlled in the opposite phases of the test chambers 5a and 5b. For example, when such control is performed, while the test chambers 5a and 5b are performing a low temperature exposure test, the remaining test chambers 5c are in a relationship of performing a high temperature exposure test.

  When anti-phase cycle control is performed under such conditions, as shown by the thick line in FIG. 3, first, in the test chamber 5c, the first cycle low temperature exposure test (target temperature: minus 40 degrees Celsius) is performed. Be started. Then, the low temperature exposure test is performed only in the test chamber 5c for a certain time. When a certain period of time has elapsed after the low temperature exposure test in the test chamber 5c is started, in the remaining test chambers 5a and 5b, as shown by the thin line and the two-dot chain line in FIG. : Minus 40 degrees Celsius) is started. That is, in both of the remaining two test chambers 5a and 5b, the low temperature exposure test of the first cycle is started so as to be shifted from the low temperature exposure test in the test chamber 5c by a certain time. As described above, in the antiphase cycle control, the low temperature exposure test is started in one test chamber 5c in advance, and the remaining two test chambers 5a are matched with the end timing of the low temperature exposure test in the test chamber 5c. Start the low temperature exposure test at 5b.

  When the low temperature exposure test is started simultaneously in the two test chambers 5a and 5b, in the test chamber 5c in which the low temperature exposure test was performed prior to them, the first cycle high temperature exposure test (target temperature: 250 degrees Celsius). ) Is started. Then, a high temperature exposure test is performed on the test chamber 5c side for a certain period of time. On the other hand, a low temperature exposure test is performed in the two test chambers 5a and 5b. That is, at this timing, the first cycle high temperature exposure test in the test chamber 5c and the first cycle low temperature exposure test in the two test chambers 5a and 5b are performed in parallel. As described above, in the anti-phase cycle control, when the low temperature exposure test is started simultaneously in the two test chambers 5a and 5b, the high temperature exposure test is started in the test chamber 5c in which the low temperature exposure test has been performed in advance.

  Then, in the test chamber 5c, when a certain time has elapsed after the first cycle high temperature exposure test is started, the high temperature exposure test is terminated and the second cycle low temperature exposure test is started. At the same time, in the test chambers 5a and 5b, the low temperature exposure test for the first cycle is completed. Therefore, the low temperature exposure test is completed and the high temperature exposure test for the first cycle (target temperature of the test chamber 5a: 280 degrees Celsius, test). The target temperature of the chamber 5b: 230 degrees Celsius) is started. That is, the second cycle low temperature exposure test in the test chamber 5c and the first cycle high temperature exposure test in the test chambers 5a and 5b are performed at the same timing.

  Thus, when a predetermined number of cycles are performed in each of the test chambers 5a to 5c, the control related to the low temperature exposure test or the high temperature exposure test is stopped in the test chambers 5a to 5c. In the present embodiment, since the operation in the latter half of each cycle is a high-temperature exposure test, the high-temperature exposure test in the final cycle (two cycles in this embodiment) is completed in the test chamber 5c in which the low-temperature exposure test was performed in advance. Then, control related to the test is stopped. At the same time, a normal temperature exposure operation is performed in which the inside of the test chamber 5c is exposed to a normal temperature atmosphere.

  When the normal temperature exposure operation is started, in the test chamber 5c, the air supply side damper 44 and the exhaust side damper 49 are left with the ventilation dampers 38 and 39 provided between the high temperature chamber 12 and the test chamber 5a open. To open. As a result, the air supply opening 42 and the exhaust opening 46 communicate with the outside. In the room temperature exposure operation, the air supply blower 43 is driven. Therefore, outside air is introduced into the test chamber 5 c through the air supply opening 42. At the same time, the hot gas in the test chamber 5 c is pushed out through the exhaust opening 46. Thus, when the high-temperature gas in the test chamber 5c is completely replaced with the outside air by the normal temperature exposure operation, and the ambient temperature in the test chamber 5c reaches RT or near RT, the operation is terminated.

  Further, during the normal temperature exposure operation in the test chamber 5a or after the normal temperature exposure operation is completed, the high temperature exposure test in the final cycle (two cycles in the present embodiment) in the remaining two test chambers 5a and 5b is completed. As in the test chamber 5c, the control related to the high temperature exposure test is stopped in the remaining two test chambers 5a and 5b. That is, in the test chambers 5a and 5b, the air supply side damper 44 and the exhaust side damper 49 are controlled to be opened, and the air supply blower 43 is driven. Thereby, as for each test chamber 5a, 5b, internal high temperature gas is substituted by external air. As a result, when the ambient temperature of the test chamber 5c reaches RT or near RT, the room temperature exposure operation is terminated.

In the above description, the control in which the cycle operations in the test chambers 5a and 5b are synchronized is shown. However, the same operation is performed even if the cycle operations in the test chambers 5a and 5c or the test chambers 5b and 5c are synchronized. Can be expected.
Moreover, as described above, a series of cycles performed in the test chambers 5a to 5c may be repeated a predetermined number of times or may be only once.

  As described above, the environmental test apparatus 1 according to the present embodiment includes a plurality of independent test chambers 5, and the air conditioning chambers 7 are provided for the respective test chambers 5. It is possible to suppress the test time and shorten the test time. Moreover, in this embodiment, since the function to perform anti-phase cycle control in the thermal shock test is provided, the cycle operations of the two test chambers 5a and 5b are intentionally performed in the same phase while the remaining phase is controlled. The cycle operation of one test chamber 5c can be performed in reverse phase. Therefore, even if the maximum capacity of the cooling capacity in the refrigeration circuit 15 is not sufficient for the capacity of the test chambers 5a to 5c (the number and size of the test chambers to be cooled), The same cooling capacity can be demonstrated. As a result, in this embodiment, it is possible to expect a test accuracy equivalent to that of an environmental test apparatus including a refrigeration circuit for each evaporator.

In the said embodiment, although the structure which provided the low temperature chamber 13 in each of each test chamber 5a-5c was shown, this invention is not limited to this. For example, the test chambers 5a to 5c may be divided into several groups, and the low temperature chamber 13 may be provided for each group. Specifically, as shown in FIG. 4, there is an environmental test apparatus 50 divided into two groups . Further, as a related aspect, as shown in FIG. 5, there is an environmental test apparatus 51 that is grouped into one group.

  The environmental test apparatus 50 has a configuration in which one low temperature chamber 52 shared by the two test chambers 5a and 5b is provided, and another low temperature chamber 53 is provided in the test chamber 5c. When the environmental test apparatus 50 performs the anti-phase cycle control, the cycle operation of the test chambers 5a and 5b sharing one cold chamber 52 is controlled in the same phase, and the cycle operation of the test chamber 5c is controlled in the anti-phase. It is preferable to control. If the cycle operations of the test chambers 5a and 5c are controlled in the same phase, or if the cycle operations of the test chambers 5b and 5c are controlled in the same phase, the ventilation dampers 47 and 48 corresponding to the test chambers 5a to 5c. By switching the open / close state, the same anti-phase cycle control as described above can be performed.

On the other hand, the environmental test apparatus (an aspect of the related invention) 51 has a configuration in which only one low temperature chamber 55 shared by the three test chambers 5a to 5c is provided. For this reason, when the anti-phase cycle control is performed in the environmental test apparatus 51, it is possible to switch the open / close state of the ventilation dampers 47 and 48 corresponding to the test chambers 5a to 5c.

  In the said embodiment, although the high temperature chamber 12 and the low temperature chamber 13 were provided as the air-conditioning chamber 7, and the environmental test apparatus 1 suitable as a thermal shock test apparatus was shown, this invention is not limited to this. For example, as shown in FIG. 6, a temperature cycle in which the heater 22 and the evaporator 27 have an air conditioning chamber 61 installed in one space, and the ambient temperature in the test chamber 5 can be adjusted by the air conditioning chamber 61. An environmental test apparatus 60 suitable as a test apparatus (or a temperature and humidity cycle test apparatus) may be used. For example, when the environmental test apparatus 60 is a temperature cycle test apparatus, the following operation is performed when the anti-phase cycle control is performed.

That is, in the environmental test apparatus 60, each of the test chambers 5a to 5c forms a low-temperature environment or a high-temperature environment by a desired gas sent from the air-conditioning chamber 61 that communicates with each other. And like the said embodiment, the three test chambers 5a-5c are controlled by antiphase cycle control so that a low temperature environment may not be formed simultaneously.
In the following description, it is assumed that a series of cycle operations that are repeated a predetermined number of times in the order of low temperature cycle operation and high temperature cycle operation are performed.

  More specifically, in the environmental test apparatus 60, when the anti-phase cycle control is performed, first, the low temperature cycle operation of the first cycle is started in the test chamber 5c as shown by the thick line in FIG. That is, the evaporator 27 in the air conditioning chamber 61 is operated to cool the gas in the air conditioning chamber 61. At the same time, the blower 63 in the air conditioning chamber 61 is activated, and the low-temperature gas generated in the air conditioning chamber 61 is sent to the test chamber 5c side. That is, the low temperature gas is circulated between the air conditioning chamber 61 and the test chamber 5c. Thereby, the ambient temperature in the test chamber 5c is cooled to a preset target temperature (for example, minus 55 degrees Celsius) (hereinafter simply referred to as cooling control). In the test chamber 5c, when the target temperature is reached, the temperature is controlled to be maintained for a certain time. Then, in the test chamber 5c, when the predetermined time has elapsed, the operation of the evaporator 27 is stopped, and the first high-temperature cycle operation is started.

  On the other hand, when a certain period of time has elapsed after the low temperature cycle operation of the first cycle is started in the test chamber 5c, the first cycle in the remaining test chambers 5a and 5b as shown by the thin line and the two-dot chain line in FIG. A low-temperature cycle operation is started (target temperature: minus 55 degrees Celsius). That is, in the remaining two test chambers 5a and 5b, the same cooling control is started by shifting the cooling control in the test chamber 5c for a certain time. As described above, also in the environmental test apparatus 60, the remaining two test chambers are controlled in advance so that the cooling control is performed in one test chamber 5c and the end of the low-temperature cycle operation in the test chamber 5c is matched. The low-temperature cycle operation in 5a and 5b is started.

  In the test chamber 5c, when the first high-temperature cycle operation is started, the heater 22 is activated to heat the gas in the air conditioning chamber 61. That is, the high temperature gas is circulated between the air conditioning chamber 61 and the test chamber 5c. As a result, the ambient temperature in the test chamber 5c is heated to a preset target temperature (for example, 125 degrees Celsius) (hereinafter simply referred to as heating control). In the test chamber 5c, when the target temperature is reached, the temperature is controlled to be maintained for a certain time.

  In the test chamber 5c, when a certain time has elapsed after the high temperature cycle operation is started, the operation of the heater 22 is stopped, and the second cycle low temperature cycle operation is started. At the same time, since the low temperature cycle operation of the first cycle is completed in the test chambers 5a and 5b, the low temperature cycle operation is completed and the high temperature cycle operation of the first cycle (target temperature of the test chamber 5a: 150 degrees Celsius, test The target temperature of the chamber 5b: 100 degrees Celsius) is started. That is, the second cycle low-temperature cycle operation in the test chamber 5c and the first cycle high-temperature cycle operation in the test chambers 5a and 5b are performed at the same timing.

  Thus, when a predetermined number of cycle operations are performed in each of the test chambers 5a to 5c, the control related to the low temperature cycle operation or the high temperature cycle operation is stopped in the test chambers 5a to 5c. In the present embodiment, since the operation in the latter half of each cycle is a high-temperature cycle operation, the high-temperature cycle operation in the final cycle (2 cycles in the present embodiment) is completed in the test chamber 5c that has previously performed the low-temperature cycle operation. Then, control related to the test is stopped. At the same time, a normal temperature exposure operation is performed in which the inside of the test chamber 5c is exposed to a normal temperature atmosphere.

  When the normal temperature exposure operation is started, the supply side damper 44 and the exhaust side damper 49 are controlled to be in an open state. As a result, the air supply opening 42 and the exhaust opening 46 communicate with the outside. In the room temperature exposure operation, the air supply blower 43 is driven. Therefore, outside air is introduced into the test chamber 5 c through the air supply opening 42. At the same time, the hot gas in the test chamber 5 c is pushed out through the exhaust opening 46. Thus, when the high-temperature gas in the test chamber 5c is completely replaced with the outside air by the normal temperature exposure operation, and the ambient temperature in the test chamber 5c reaches RT or near RT, the operation is terminated.

Further, the remaining two test chambers 5a and 5b are the same as the test chamber 5c, and when the high-temperature cycle operation of the final cycle (2 cycles in the present embodiment) is completed, the control related to the test is stopped and the test chamber is stopped. A normal temperature exposure operation is performed in which the inside of 5a and 5b is exposed to a normal temperature atmosphere. As a result, when the ambient temperature of the test chambers 5a and 5b reaches RT or near RT, the normal temperature exposure operation is terminated.
The series of cycles performed in the test chambers 5a to 5c may be repeated a predetermined number of times as in the above embodiment, or may be only once.

As described above, the environment test apparatus 60 is also provided with the plurality of test chambers 5 and the air-conditioning chamber 61 and further provided with the anti-phase cycle control. Therefore, the same operational effects as those of the above-described embodiment can be expected.
In the environmental test apparatus 60, a configuration is shown in which a damper is not provided between the air conditioning chamber 61 and the test chamber 5 and always communicated. However, a damper is provided, and if necessary, air conditioning is performed by the damper. The chamber 61 and the test chamber 5 may be configured to communicate with each other.

In the above embodiment, the thermal shock test apparatus capable of repeatedly performing the low temperature exposure test and the high temperature exposure test has been described as an example, but the present invention is not limited to this, and the cold heat capable of performing the low temperature exposure test and the normal temperature exposure test is described. An impact test apparatus may be used. For example, as the environmental test apparatus 65, the structure shown in FIG. 8 is mentioned. That is, the environmental test apparatus 65 has a configuration in which only the low temperature chamber 13 is provided as the air conditioning chamber 7 and the high temperature chamber 12 is not provided. In addition, the environmental test apparatus 65 includes an air supply unit 40 and an exhaust unit 41 that enable a normal temperature exposure test.
Further, as a similar configuration, a configuration in which the high temperature chamber 12 is omitted from the environmental test apparatuses 50 and 51 shown in FIGS.

  In the said embodiment, although the structure which provided the expansion valve 31 on each branch path 37a-37c of the refrigerating circuit 15 and upstream of the evaporators 27a-27c was shown, this invention is not limited to this. For example, the configuration may be such that one expansion valve 31 is provided on the main flow path 35 and immediately before reaching the branch paths 37a to 37c. When such a configuration is employed, the same operational effects as in the above embodiment can be obtained by opening / closing control of the electromagnetic valve 30 provided on each of the branch paths 37a to 37c.

  In the said embodiment, the three evaporators 27a-27c are provided on the refrigerating circuit 15, and the maximum capacity | capacitance of the cooling capacity in the refrigerating circuit 15 is based on one circuit in the case of installing an individual refrigerating circuit for every air conditioned room. However, the present invention is not limited to this. For example, a configuration having a cooling capacity of about 3 times may be used. According to such a configuration, the installation space can be saved as in the above embodiment. Further, even in this configuration, if it is used so as to reduce power consumption, it is possible to save energy as compared with the conventional embodiment as in the above embodiment.

  In the above embodiment, a control configuration is shown in which a series of cycles is repeated in the order of the low temperature exposure test (or low temperature cycle operation) and the high temperature exposure test (or high temperature cycle operation) in the thermal shock test (or temperature cycle test). The present invention is not limited to this, and a control configuration that repeats a series of cycles in the order of a high temperature exposure test (or high temperature cycle operation) and a low temperature exposure test (or low temperature cycle operation) may be adopted.

In addition, for example, the test chamber 5c repeats a series of cycles in the order of a high temperature exposure test (or high temperature cycle operation) and a low temperature exposure test (or low temperature cycle operation), and the test chambers 5a and 5b are cycles of the test chamber 5c. Control in which a series of cycles is repeated in the reverse order, that is, the low temperature exposure test (or low temperature cycle operation) and the high temperature exposure test (or high temperature cycle operation) may be employed.
However, when this control configuration is adopted and anti-phase cycle control is performed, as in the above embodiment, one of the test chambers precedes the other test chamber (half cycle preceding), and the low temperature exposure test (Or low temperature cycle operation) is not performed, and the start timing of all the test chambers is made simultaneously, or the start timing of any test chamber is shifted by n (n: a natural number of 1 or more) cycles. It is desirable to do it.

  In the said embodiment, although the environmental test apparatus 1 which arranged the three test chambers 5a-5c in the height direction was shown, this invention is not limited to this, As shown in FIG. It may be the environmental test device 62 in which 5c are arranged in the width direction.

  In the said embodiment, although the structure provided with three test chambers 5a-5c was shown, this invention is not limited to this, It is the structure provided with two test chambers, or was provided with four or more test chambers. It may be a configuration.

  In the above embodiment, in the thermal shock test, the control in which the target temperature of the low temperature exposure test is fixed to minus 40 degrees Celsius is shown in any of the test chambers 5a to 5c, but the control is performed by changing the target temperature for each test chamber. It doesn't matter. For example, the target temperature of each of the test chambers 5a to 5c is minus 20 degrees Celsius, minus 30 degrees Celsius, minus 40 degrees Celsius, and so on.

1, 60, 62, 65 Environmental test apparatus 5 Test room 7, 61 Air-conditioning room 12 High greenhouse 13, 52, 53, 55 Low greenhouse 15 Refrigeration circuit 22 Heating heater (heating means)
27 Evaporator

Claims (4)

Has a device main body, the interior of the apparatus main body, a plurality of independent laboratories desired test environment is formed,
For each test room, or to divide the test room into a predetermined group, and have an air conditioning room provided for each test room or for each group,
Each air conditioning room has a plurality of evaporators as a whole, and each evaporator is arranged on a refrigeration circuit where at least the compressor and the condenser are common,
Maximum capacity environmental test apparatus according to claim inadequate Rukoto to the plurality of independent laboratory total capacity of the cooling capability of the refrigeration circuit. Each air conditioning room has a low temperature room in which the evaporator is arranged and a high temperature room in which heating means are arranged,
The test chamber can form a low temperature environment and a high temperature environment. The low temperature environment is formed by introducing a low temperature gas generated in the low temperature room, and the high temperature environment is introduced by introducing a high temperature gas generated in the high temperature room. Is formed,
A function is provided that makes it possible to control at least one other test room to a high temperature environment on the condition that one of the test rooms is controlled to a low temperature environment. environmental testing apparatus according to 1. Each air conditioning room is one space, and the evaporator and the heating means are arranged in the space,
The test chamber can form a low temperature environment and a high temperature environment, the low temperature environment is mainly formed by introducing a low temperature gas generated by an evaporator, and the high temperature environment is mainly generated by a heating means. It is formed by introducing gas,
A function is provided that makes it possible to control at least one other test room to a high temperature environment on the condition that one of the test rooms is controlled to a low temperature environment. environmental testing apparatus according to 1. Each test chamber, environmental testing apparatus according to any one of claims 1 to 3, characterized in that are arranged at different positions in the height direction.

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