JP5969863B2 - Piezoelectric element, sound generator, sound generator, and electronic device - Google Patents

Description

  The present invention relates to a piezoelectric element, a sound generator, a sound generator, and an electronic apparatus.

  Conventionally, an acoustic generator typified by a piezoelectric speaker has been known as a small-sized, low-current driving acoustic device using a piezoelectric body as an electroacoustic transducer, for example, a small electronic device such as a mobile computing device. It is used as an integrated sound generator.

  For example, an acoustic generator using a piezoelectric body as an electroacoustic transducer has a structure in which a piezoelectric element in which an electrode made of a silver thin film or the like is attached to a vibration plate such as a metal or a resin film. The sound generation mechanism of an acoustic generator using a piezoelectric body as an electroacoustic transducer generates shape distortion in the piezoelectric element by applying an AC voltage to both sides of the piezoelectric element, and transmits the shape distortion of the piezoelectric element to the diaphragm. Sound is generated by vibrating.

  Specifically, the piezoelectric element has a structure in which a plurality of internal electrode layers alternately connected to one of two external electrodes and a plurality of piezoelectric layers polarized in the thickness direction of the piezoelectric element are laminated. Have Here, each internal electrode layer has the same size, and is laminated so that the positions of the non-contact ends that are not connected to the external electrode overlap. Each piezoelectric layer is polarized in a predetermined direction, and has a property of contracting in a plane direction if the polarization direction and the applied electric field direction are the same direction, and the polarization direction and the applied electric field direction If they are in the same direction, they have the property of extending in the plane direction.

  When an alternating signal is applied to the internal electrode layer connected to each external electrode, such a piezoelectric element is bent and vibrated as a whole because one piezoelectric layer extends and the other piezoelectric layer contracts. By transmitting such bending vibration to the diaphragm, the piezoelectric element can generate sound.

JP 2010-177867 A

  However, the piezoelectric element is laminated so that the positions of the non-contact ends of the internal electrode layers overlap each other, and when stress is concentrated on the surface where the non-contact ends of the internal electrode layers exist during bending vibration, Cracks may occur.

  This invention is made | formed in view of the above, Comprising: It aims at providing the piezoelectric element which can suppress generation | occurrence | production of a crack, an acoustic generator, an acoustic generator, and an electronic device.

In the piezoelectric element according to the present invention, two opposing external electrodes, a plurality of internal electrode layers connected to one of the external electrodes every other layer, and a plurality of piezoelectric layers are laminated, and the same a plurality of inner electrode layers connected to the external electrodes, together are formed from a non-contact end that is not in contact with the external electrodes, respectively Re distance pixels of the first direction to the other external electrode different from the The positions of the ends in the second direction perpendicular to the first direction are different from each other .

  According to one aspect of the acoustic generator according to the present invention, there is an effect that generation of cracks can be suppressed.

FIG. 1A is a plan view showing a sound generator of a first form. FIG. 1B is a cross-sectional view illustrating a sound generator according to the first embodiment. FIG. 2 is a diagram for explaining the formation position of the internal electrode layer included in the piezoelectric element of the first embodiment. FIG. 3 is a diagram for explaining a position where stress is generated. FIG. 4 is a diagram for explaining the piezoelectric element according to the second embodiment. FIG. 5 is a diagram for explaining the piezoelectric element according to the third embodiment. FIG. 6 is a diagram for explaining the piezoelectric element according to the fourth embodiment. FIG. 7 is a diagram for explaining a variation of the piezoelectric element according to the fourth embodiment. FIG. 8 is a diagram for explaining an example of a position where a crack occurs when the amount of deviation of the non-contact end is small. FIG. 9 is a diagram for explaining an example of a position where a crack occurs when the amount of deviation of the non-contact end is large. FIG. 10 is a table for explaining the number of cracks generated in the piezoelectric element produced in Example 1.

  Hereinafter, embodiments of a piezoelectric element, a sound generator, a sound generator, and an electronic device according to the present invention will be described in detail with reference to the drawings. Note that this embodiment does not limit the present invention. And each form illustrated below as embodiment can be suitably combined in the range which does not contradict the shape and dimension of each member which comprise an acoustic generator.

(First form)
[Structure of sound generator]
First, the 1st form of an acoustic generator is demonstrated based on FIG. 1A and FIG. 1B. FIG. 1A is a plan view showing a sound generator of the first form, and FIG. 1B is a cross-sectional view showing the sound generator of the first form. 1B shows a cross-sectional view along the line AA shown in FIG. 1A. Further, in FIG. 1B, for easy understanding, the thickness direction (y-axis direction) of the multilayer piezoelectric element 1 is shown enlarged. In the following description, the longitudinal direction of the piezoelectric element 1 is referred to as the x-axis direction, and the short direction of the piezoelectric element 1 is referred to as the z-axis direction.

  1A and 1B includes a laminated piezoelectric element 1 on the upper surface of a film 3 serving as a support plate sandwiched between a pair of frame-shaped frame members 5. Yes. In other words, as shown in FIG. 1B, the sound generator of the first form is configured such that the film 3 is held in the first and second frame members 5a and 5b by holding the film 3 in a tensioned state. The laminated piezoelectric element 1 is disposed on the upper surface of the film 3 and is fixed to the second frame members 5a and 5b.

  Among these, the piezoelectric element 1 is formed in a plate shape, and upper and lower main surfaces are formed in a square shape, a rectangular shape, or a polygonal shape. The piezoelectric element 1 includes a laminate 13 in which piezoelectric layers 7 made of four ceramic layers and three internal electrode layers 9 are alternately laminated, and surface electrodes formed on both upper and lower surfaces of the laminate 13. The layers 15a and 15b and a pair of external electrodes 17 and 19 provided at both ends of the laminated body 13 in the x-axis direction are included.

  The external electrode 17 is connected to the surface electrode layers 15a and 15b and one internal electrode layer 9b. The external electrode 19 is connected to the two internal electrode layers 9a and 9c. That is, the internal electrode layers 9a to 9c and the surface electrode layers 15a and 15b are alternately connected to either one of the external electrodes 17 and 19.

  The upper and lower end portions of the external electrode 19 are extended to the upper and lower surfaces of the multilayer body 13 to form folded external electrodes 19a. These folded external electrodes 19a are formed on the surface of the multilayer body 13. A predetermined distance is extended between the surface electrode layers 15a and 15b so as not to contact the surface electrode layers 15a and 15b.

  In addition, as shown by arrows in FIG. 1B, each of the piezoelectric layers 7a to 7d is already polarized without applying a voltage (with a voltage of 0 volts). Specifically, the piezoelectric layer 7a and the piezoelectric layer 7d are polarized upward in the y-axis direction, and the piezoelectric layer 7b and the piezoelectric layer 7c are polarized downward in the y-axis direction. That is, the piezoelectric layers 7a to 7d are polarized in the opposite directions in the set of the piezoelectric layers 7a and 7d and the set of the piezoelectric layers 7b and 7c.

  Here, the piezoelectric layers 7a to 7d contract in the plane direction when an electric field in the same direction as the polarization direction is applied, and in the plane direction when an electric field in a direction different from the polarization direction is applied. Has the property of stretching. Therefore, a voltage is applied to the external electrodes 17 and 19, and a positive electric field is applied to the surface electrode layer 15a, the surface electrode layer 15b, and the internal electrode layer 9b, while the external electrode 19, the folded external electrode 19a, and the internal electrode layer When a negative electric field is applied to 9a and 9c, the direction of the electric field is directed to the internal electrode layers 9a and 9c, and an electric field in the same direction as the polarization direction is applied to the piezoelectric layers 7a and 7b. Since the voltage is applied, the piezoelectric layers 7a and 7b contract in the plane direction. On the other hand, in the piezoelectric layers 7c and 7d, since an electric field opposite to the polarization direction is applied, the piezoelectric layers 7c and 7d extend in the plane direction. Next, when the polarity of the electric field is reversed, the piezoelectric layers 7a and 7d and the piezoelectric layers 7c and 7d are reversely deformed.

  The four piezoelectric layers 7 and the three internal electrode layers 9 are fired at the same time in a stacked state, and the surface electrode layers 15 a and 15 b are the stacked bodies 13. Thereafter, the paste is applied and baked.

  Further, in the piezoelectric element 1, the main surface on the film 3 side and the film 3 are joined by an adhesive layer 21. The thickness of the adhesive layer 21 between the piezoelectric element 1 and the film 3 is 20 μm or less. In particular, the thickness of the adhesive layer 21 is preferably other than 10 μm. Thus, when the thickness of the adhesive layer 21 is 20 μm or less, the vibration of the laminated body 13 is easily transmitted to the film 3.

  As the adhesive for forming the adhesive layer 21, known ones such as an epoxy resin, a silicon resin, and a polyester resin can be used. As a method for curing the resin used for the adhesive, the vibrating body can be produced by using any method such as thermosetting, photocuring or anaerobic curing.

  Furthermore, in the acoustic generator of the first form, the resin layer 20 is formed by filling the inside of the frame member 5a with the resin so that the piezoelectric element 1 is embedded. In FIG. 1A, the resin layer is not shown for easy understanding.

  For the resin layer 20, an epoxy resin, an acrylic resin, a silicon resin, rubber, or the like can be used. The resin layer 20 is preferably applied in a state of completely covering the piezoelectric element 1 from the viewpoint of suppressing spurious. Further, since the film 3 serving as a support plate also vibrates integrally with the piezoelectric element 1, the region of the film 3 that is not covered with the piezoelectric element 1 is similarly covered with the resin layer 20.

  As described above, in the acoustic generator of the first embodiment, by embedding the piezoelectric element 1 with the resin layer 20, it is possible to induce an appropriate damping effect against the peak dip associated with the resonance phenomenon of the piezoelectric element 1. Such a damping effect can suppress the resonance phenomenon and suppress the peak dip. As a result, the frequency dependence of the sound pressure can be reduced.

  Here, as the piezoelectric layer 7, existing piezoelectric ceramics such as lead-free piezoelectric materials such as lead zirconate (PZ), lead zirconate titanate (PZT), Bi layered compounds, and tungsten bronze structure compounds are used. be able to. The thickness of the piezoelectric layer 7 is set to 10 to 100 μm from the viewpoint of low voltage driving.

  The internal electrode layer 9 preferably includes a metal component composed of silver and palladium and a material component constituting the piezoelectric layer 7. By including the ceramic component constituting the piezoelectric layer 7 in the internal electrode layer 9, the stress due to the difference in thermal expansion between the piezoelectric layer 7 and the internal electrode layer 9 can be reduced, and the piezoelectric element 1 without stacking failure can be obtained. Can do. The internal electrode layer 9 is not particularly limited to a metal component made of silver and palladium, and may be another metal component. In addition, the internal electrode layer 9 may be a material component constituting the piezoelectric layer 7 as a ceramic component. It is not limited and other ceramic components may be used.

  The surface electrode layers 15a and 15b and the external electrodes 17 and 19 preferably contain a glass component in a metal component made of silver. By containing the glass component in this way, a strong adhesion can be obtained between the piezoelectric layer 7 and the internal electrode layer 9 and the surface electrode layer 15 or the external electrodes 17 and 19.

  The frame member 5 has a rectangular shape, and is configured by bonding two rectangular frame-shaped frame members 5a and 5b as shown in FIG. 1B. Between the frame member 5a and the frame member 5b, the outer peripheral portion of the film 3 is sandwiched and fixed in a state where a tension is applied. The frame members 5a and 5b are made of stainless steel having a thickness of 100 to 1000 μm, for example. The material of the frame members 5a and 5b is not limited to stainless steel and may be any material that is more difficult to deform than the resin layer 20. For example, hard resin, plastic, engineering plastic, ceramics, etc. can be used. In the form, the material and thickness of the frame members 5a and 5b are not particularly limited. Furthermore, the frame shape is not limited to a rectangular shape, and part or all of the inner peripheral portion or the outer peripheral portion may be circular or elliptical, or the inner peripheral portion or the outer peripheral portion may be rhombus.

  The film 3 is fixed to the frame members 5a and 5b in a state where the film 3 is tensioned in the surface direction by sandwiching the outer peripheral portion of the film 3 between the frame members 5a and 5b, and the film 3 serves as a diaphragm. Plays. The thickness of the film 3 is, for example, 10 to 200 μm, and the film 3 is made of, for example, a resin such as polyethylene, polyimide, polypropylene, polystyrene, or tenn, or paper made of pulp, fiber, or the like. The peak dip can be suppressed by using these materials.

[Formation position of each electrode layer]
Next, formation positions of the internal electrode layers 9a to 9c included in the acoustic generator of the first embodiment of the present embodiment will be described with reference to FIG. FIG. 2 is a diagram for explaining the formation position of the internal electrode layer included in the piezoelectric element of the first embodiment.

  The non-contact end of the internal electrode layer 9a shown in FIG. 2A and the non-contact end of the internal electrode layer 9c shown in FIG. 2B are formed at different positions. Specifically, the distance L1 from the non-contact end of the internal electrode layer 9a to the external electrode 17 to which the internal electrode layer 9a is not connected, and the internal electrode layer 9c is connected from the non-contact end of the internal electrode layer 9c. The internal electrode layers 9a and 9c are formed so that the distance L2 to the external electrode 17 that does not exist is different from each other.

  As described above, when the distances L1 and L2 from the non-contact ends of the internal electrode layers 9a and 9c to the external electrode 17 are different, the position where stress is generated when the piezoelectric element 1 undergoes flexural vibration is determined. Since they can be shifted, the occurrence of cracks in the piezoelectric layer 7 can be suppressed. Hereinafter, the point that the occurrence of cracks can be suppressed by shifting the position where the stress is generated when the piezoelectric element 1 undergoes bending vibration and the position where the stress is generated will be described with reference to FIG.

  FIG. 3 is a diagram for explaining a position where stress is generated. FIG. 3 shows how the piezoelectric element 1 is deformed when an electric field is applied to the piezoelectric layer 7 in the cross section taken along line AA shown in FIG. 1A. Specifically, a cross-sectional view of the piezoelectric element 1 when no electric field is applied is shown in FIG. 3C, and a cross-sectional view of the piezoelectric element 1 when expanded in the y-axis direction by the application of the electric field is shown in FIG. A cross-sectional view of the piezoelectric element 1 shown in the middle (D) and indented in the y-axis direction by application of voltage is shown in FIG. In the example shown in FIG. 3, the distance from the non-contact ends of the internal electrode layers 9 a and 9 c to the external electrode 17 is the same in order to make it easy to understand how the piezoelectric element 1 is deformed when bending and vibrating. Shown about the case.

  For example, as shown in FIG. 3F, in the region closer to the external electrode 17 than the internal electrode layers 9a and 9c, the thickness in the y-axis direction does not change so much. On the other hand, the regions included in (G) to (H) in FIG. 3 are deformation regions that expand or dent in the y-axis direction by application of an electric field. As described above, the piezoelectric element 1 is greatly deformed in a region where all the internal electrode layers 9a to 9c are overlapped, and is not so deformed in a region where any of the internal electrode layers is not overlapped. As shown, a large stress is generated at the non-contact ends of the internal electrode layers 9a to 9c. As a result, as shown in FIG. 3I, a large stress is generated on the surface of the piezoelectric layer 7 where the non-contact ends of the internal electrode layers 9a and 9c are present, and cracks are likely to occur. .

  Therefore, the piezoelectric element 1 according to the first embodiment is formed so as to shift the distance between the non-contact ends of the internal electrode layers 9 a and 9 c and the external electrode 17. As a result, since the piezoelectric element 1 can disperse the position where the stress is generated during the bending vibration, the occurrence of cracks in the piezoelectric layer 7 can be prevented.

  Further, when the piezoelectric element 1 is formed so that the distance between the non-contact ends of the internal electrode layers 9a and 9c and the external electrode 17 is shifted, a position where distortion occurs in the piezoelectric layer near the non-contact ends. Can be scattered. As a result, the vibration loss inside the piezoelectric element 1 increases, so that the acoustic generator having the piezoelectric element 1 can reduce the peak dip in the frequency characteristic of the sound pressure and reduce the variation in the sound pressure. it can.

[Production method]
A method for producing the acoustic generator of the present invention will be described.

  First, the bimorph type piezoelectric element 1 is prepared. In the piezoelectric element 1, a binder, a dispersant, a plasticizer, and a solvent are kneaded with a piezoelectric material powder to produce a slurry. As the piezoelectric material, any of lead-based and non-lead-based materials can be used.

  Next, the slurry can be formed into a sheet shape to obtain a green sheet, and an internal electrode paste is printed on the green sheet to form an internal electrode pattern, and the green sheet on which the electrode pattern is formed 3 Laminated sheets are laminated, and only a green sheet is laminated on the uppermost layer to produce a laminated molded body. Here, among the internal electrode patterns formed in the green sheet shape to be laminated, the internal electrode pattern to be the internal electrode layer 9 a and the internal electrode pattern to be the internal electrode layer 9 c are the non-contact end and the external electrode 17. The distances are different from each other.

  Next, the laminated body 13 can be obtained by degreasing and firing the laminated molded body and cutting it to a predetermined size. The laminated body 13 processes the outer peripheral part as necessary, prints the paste of the surface electrode layers 15a and 15b on the main surface in the lamination direction of the piezoelectric layer 7 of the laminated body 13, and then continues in the longitudinal direction of the laminated body 13 The bimorph piezoelectric element 1 shown in FIGS. 1A and 1B can be obtained by printing the external electrodes 17 and 19 on both end faces of x and baking the electrodes at a predetermined temperature.

  Next, in order to impart piezoelectricity to the bimorph type piezoelectric element 1, a DC voltage is applied through the surface electrode layers 15 a and 15 b or the external electrodes 17 and 19, so that the piezoelectric layer 7 of the bimorph type piezoelectric element 1 Perform polarization. Such polarization is performed by applying a DC voltage so as to be in the direction indicated by the arrow in FIG. 1B.

  Next, the film 3 which becomes a support is prepared, the outer peripheral portion of the film 3 is sandwiched between the frame members 5a and 5b, and the film 3 is fixed in a tensioned state. Thereafter, an adhesive is applied to the film 3, the surface electrode 15a side of the bimorph type piezoelectric element 1 is pressed onto the film 3, and then the adhesive is cured by irradiation with heat or ultraviolet rays. Then, the resin is poured into the frame member 5a. On top of that, the bimorph piezoelectric element 1 is completely embedded and the resin layer 20 is cured to obtain the acoustic generator of the first form.

  In the acoustic generator configured as described above, the internal electrode layers 9a and 9c having different distances from the non-contact end to the external electrode 17 are formed. For this reason, since the acoustic generator according to the first embodiment can disperse the position where the stress is generated when the piezoelectric element 1 is flexibly vibrated, the occurrence of cracks in the piezoelectric layer 7 can be prevented. In addition, since the acoustic generator of the first embodiment can vary the position where the distortion occurs with respect to the piezoelectric layer 7 near the non-contact end, the vibration loss inside the piezoelectric element 1 is increased, and the sound is generated. The peak dip in the frequency characteristic of the pressure can be reduced, and the variation in the sound pressure can be reduced.

  In the first embodiment described above, the distance between the non-contact end of the internal electrode layer 9a and the external electrode 17 is different from the distance between the non-contact end of the other internal electrode layer 9c and the external electrode 17. Was described. However, this embodiment may be implemented in various different forms other than the forms described above.

  That is, when there are three or more internal electrode layers connected to the external electrode 19, the piezoelectric element 1 determines the distance between the non-contact end of one of the internal electrode layers and the external electrode 17 to the other internal electrode layer. What is necessary is just to shift | deviate from the distance of the non-contact end in an electrode layer, and the external electrode 17. FIG. In addition, when there are a plurality of internal electrode layers connected to the external electrode 17, the piezoelectric layer determines the distance between the non-contact end of any one of the internal electrode layers and the external electrode 19 as the other internal electrode layer. The distance between the non-contact end and the external electrode 19 may be shifted. As described above, when the distance between the non-contact end and the external electrode in any one of the internal electrode layers is shifted, the position where the stress is generated can be dispersed. Can be prevented.

(Second form)
Although the first embodiment has been described so far, the present embodiment may be implemented in various different forms other than the above-described forms. Therefore, in the following, three or more internal electrode layers are connected to each of the external electrodes 17 and 19 so that the distance between the non-connected end of each internal electrode layer and the external electrode layer that is not connected is different. An acoustic generator having the piezoelectric element 1a will be described.

  The acoustic generator of the second form has the same configuration as the acoustic generator of the first form shown in FIGS. 1A and 1B. In the following description, the acoustic generator of the second form is The piezoelectric element 1a having the above will be described.

  FIG. 4 is a diagram for explaining the piezoelectric element according to the second embodiment. As shown in FIG. 4, the piezoelectric element 1 a includes a laminated body in which eight piezoelectric layers 7 a to 7 h made of ceramics and seven internal electrode layers 9 a to 9 g are alternately laminated, and the laminated body 13. Surface electrode layers 15a and 15b formed on both upper and lower surfaces of the substrate, and a pair of external electrodes 17 and 19 provided at both ends in the x-axis direction of the laminate.

  Here, the internal electrode layers 9 a, 9 c, 9 e, 9 g are connected to the external electrode 19, and the internal electrode layers 9 b, 9 d, 9 f are connected to the external electrode layer 17. That is, each of the external electrode layers 17 and 19 is connected to three or more external electrode layers.

  Here, each internal electrode layer 9a, 9c, 9e, 9g is formed such that the distance between the non-contact end and the external electrode layer 17 is different. The internal electrode layers 9b, 9d, and 9f are formed such that the distance between the non-contact end and the external electrode layer 19 is different. That is, the internal electrode layers 9a to 9g of the piezoelectric element 1a are formed such that the distance between the external electrode layer that is not connected and the non-contact end is different.

  As a result, the piezoelectric element 1 a can disperse the position where the stress is generated during bending vibration more than the piezoelectric element 1. For this reason, the acoustic generator of the second embodiment can further prevent the occurrence of cracks in the piezoelectric layer 7. Moreover, since the acoustic generator of the second form can disperse the position where the distortion occurs with respect to the piezoelectric layer 7 near the non-contact end as compared with the acoustic generator of the first form, The internal vibration loss can be further increased, the peak dip in the frequency characteristic of the sound pressure can be further reduced, and the variation in the sound pressure can be further reduced.

(Third form)
In the first embodiment and the second embodiment described above, the piezoelectric elements 1 and 1a in which the distance between the non-contact end of each internal electrode layer 9 and the external electrodes 17 and 19 are varied have been described. However, this embodiment may be implemented in various different forms other than the above-described forms. Therefore, in the following, an acoustic generator having a piezoelectric element 1b in which a set of a plurality of internal electrode layers with gradually increasing areas is repeatedly arranged will be described as a third embodiment.

  The sound generator of the third form has the same configuration as the sound generator of the first form shown in FIGS. 1A and 1B, and in the following description, the sound generator of the third form is The piezoelectric element 1b having the above will be described.

  FIG. 5 is a diagram for explaining the piezoelectric element according to the third embodiment. FIG. 5 shows a cross-sectional view of the piezoelectric element 1b along the line BB shown in FIG. 1A. In FIG. 5, the description is omitted for easy understanding, but the piezoelectric element 1 b has external electrode layers 15 a and 15 b as in the piezoelectric element 1.

  As shown in FIG. 5, the piezoelectric element 1b has a laminated body in which eight internal electrode layers 9a to 9h are alternately laminated with piezoelectric layers made of ceramics. Here, each internal electrode layer 9a-9d is laminated | stacked so that an area may become large downward in the y-axis direction. That is, the internal electrodes 9a to 9d are formed so that the lengths in the z-axis direction are different when the lengths in the x-axis direction are the same. Further, the positions of the non-contact ends in the z-axis direction of the internal electrode layers 9a to 9d are formed at different positions so as not to overlap when stacked.

  In addition, the internal electrode layers 9e to 9h are stacked so that the area gradually increases downward in the y-axis direction, similarly to the internal electrode layers 9a to 9d. That is, the internal electrode layers 9e to 9h are formed so that the lengths in the z-axis direction are different when the lengths in the x-axis direction are the same. Similarly, the positions of the non-contact ends in the z-axis direction of the internal electrode layers 9e to 9h are also formed at different positions so as not to overlap when stacked.

  Thus, the piezoelectric element 1b is formed by laminating a set of internal electrode layers 9a to 9d laminated so that the area gradually increases and a set of internal electrode layers 9e to 9h laminated so that the area gradually increases. Since the positions of the non-contact ends in the z-axis direction of the internal electrode layers 9a to 9h are dispersed, the positions where stress is generated on the yz plane can be dispersed. For this reason, the acoustic generator of the 3rd form which has the piezoelectric element 1b can prevent generation | occurrence | production of the crack on the yz plane in the piezoelectric material layer 7. FIG. In addition, since the acoustic generator of the third embodiment can vary the position where distortion occurs with respect to the piezoelectric layer 7 near the non-contact end, the vibration loss inside the piezoelectric element 1b is further increased, The peak dip in the frequency characteristic of the sound pressure can be further reduced, and the variation in the sound pressure can be further reduced.

The piezoelectric element 1b not only disperses the positions of the non-contact ends ( ends in the second direction) in the z-axis direction of the internal electrode layers 9a to 9h, but similarly to the piezoelectric elements 1 and 1a, You may shift the position of the non-contact end in the x-axis direction (1st direction) of electrode layer 9a-9h. As described above, the piezoelectric element 1b can disperse the positions of the non-contact ends of the internal electrode layers 9a to 9h, thereby dispersing the positions where the stress is generated and preventing the occurrence of cracks.

  In addition, the piezoelectric element 1b is formed by stacking two sets of internal electrode layers stacked so that the area gradually increases. More preferably, each set of internal electrode layers includes four or more internal electrode layers. A structure in which four or more sets are stacked is desirable.

(4th form)
In the first to third embodiments described above, the piezoelectric elements 1, 1 a, and 1 b that prevent the occurrence of cracks by dispersing the positions where the stress is generated by shifting the position of the non-contact end of each internal electrode layer 9. explained. However, this embodiment may be implemented in various different forms other than the above-described forms. Therefore, hereinafter, an acoustic generator having the piezoelectric element 1c formed at a position shifted from the internal electrode layer as viewed from the stacking direction will be described as a fourth embodiment.

  The acoustic generator of the fourth form has the same configuration as that of the acoustic generator of the first form shown in FIGS. 1A and 1B. In the following description, the acoustic generator of the fourth form is The piezoelectric element 1c having this will be described. In the following description, it is assumed that the piezoelectric element 1 c has the same configuration as the piezoelectric element 1.

  FIG. 6 is a diagram for explaining the piezoelectric element according to the fourth embodiment. FIG. 6 shows a plan view of the piezoelectric element 1c viewed from the upper surface in the y-axis direction. In FIG. 6, the external electrode 17, the surface electrode layers 15 a and 15 b connected to the external electrode 17, and the internal electrode 22 including the internal electrode 9 b are indicated by dotted lines, and the external electrode 19 and the folded electrode connected to the external electrode 19 are connected. The internal electrode 23 including the external electrode 19a and the internal electrode layers 9a and 9c is indicated by a solid line.

  As shown in FIG. 6, the internal electrode 23 is formed at a position rotated with respect to the internal electrode 22 by a predetermined angle (θ in FIG. 6) with the stacking direction as the central axis. As a result, the non-contact end in the longitudinal direction of the internal electrode layer 9b included in the internal electrode 22 and the non-contact end in the longitudinal direction of the internal electrode layers 9a and 9c included in the internal electrode 23 are formed at different positions on the xz plane. Will be. For this reason, the piezoelectric element 1c can disperse the position where the stress is generated on the xz plane. In addition, the rotation angle (θ) of the internal electrode 23 with respect to the internal electrode 22 is preferably 10 ° or less, particularly 1 ° to 7 ° in that the overlapping area between the internal electrodes 22 and 23 can be maintained larger.

  As a result, the acoustic generator of the fourth embodiment having the piezoelectric element 1c can prevent the occurrence of cracks in the piezoelectric layer 7. In addition, since the acoustic generator according to the fourth embodiment can vary the position where the distortion occurs with respect to the piezoelectric layer 7 near the non-contact end, the vibration loss inside the piezoelectric element 1c is further increased. The peak dip in the frequency characteristic of the sound pressure can be further reduced, and the variation in the sound pressure can be further reduced.

  The central axis for rotating the internal electrode 23 and the angle for rotating the internal electrode 23 can be set to any parameters according to the performance required for the piezoelectric element 1c, the magnitude of stress allowed by the piezoelectric element 1c, and the like. Can be applied. Moreover, the piezoelectric element 1c shifted the position of the non-contact end of the internal electrode layer 9 by rotating the internal electrode 23 with the stacking direction as the central axis. However, the present embodiment is not limited to this. For example, the piezoelectric element 1c is formed at a position where the internal electrode 23 is moved in parallel on the xz plane with respect to the internal electrode 22, thereby forming the internal electrode layer. The position of the non-contact end of 9 may be shifted.

FIG. 7 is a diagram for explaining a variation of the piezoelectric element according to the fourth embodiment. FIG. 7 shows a plan view of the piezoelectric element 1c as seen from the upper surface in the y-axis direction, as in FIG. As shown in FIG. 7, the internal electrode 23 is formed at a position translated from the internal electrode 22 by a predetermined distance in the second direction on the xz plane. As described above, when the internal electrode 23 is moved in parallel with the internal electrode 22 in the second direction on the xz plane, the piezoelectric element 1c has the non-contact ends (second Since the positions of the stresses on the z plane are dispersed, the occurrence of cracks in the piezoelectric layer 7 can be prevented. The moving amount is preferably 1/20 to 1/10 of the width (length of the short side) of the internal electrode 23.

(5th form)
Now, although each form of the embodiment has been described so far, this embodiment may be implemented in various different forms other than the form described above. Therefore, hereinafter, other modes included in the present embodiment will be described.

[Scope of application]
For example, in the above first to fourth embodiments, a bimorph type piezoelectric element has been exemplified, but the present invention is not limited to this. That is, the present invention is not limited to the case where the piezoelectric element is a bimorph type, and even if it is a unimorph type, the non-contact end in each axial direction of the internal electrode layer is the same as in the first to fourth embodiments. A similar effect can be obtained by shifting the position.

[Speaker device]
Further, the sound generator described in the first to fourth embodiments is configured as a sound generator, a so-called “speaker device” by being housed in a housing that houses the sound generator, a so-called resonance box. You can also. For example, if it can be configured as a large-sized speaker device used for a television, a personal computer, etc., it can be a medium-sized or small-sized device mounted on a mobile terminal such as a smartphone, a mobile phone, a PHS (Personal Handyphone System), or a PDA (Personal Digital Assistants). It can also be configured as a speaker device. In addition, a speaker apparatus is not limited to said use, It can comprise as a speaker apparatus mounted in arbitrary electronic devices, such as a vacuum cleaner, a washing machine, and a refrigerator.

[Electronics]
Furthermore, the sound generator described in the first to fourth embodiments includes at least an electronic circuit connected to the sound generator and a housing that houses the electronic circuit and the sound generator. The electronic device can also be configured as an electronic device having a function of generating sound from the sound generator. Examples of such electronic devices include televisions, personal computers, various mobile terminals, vacuum cleaners, washing machines, refrigerators, and the like.

  In this embodiment, the optimum range of the amount by which the non-contact end of the internal electrode layer is shifted will be described. First, with reference to FIG. 8 and FIG. 9, description will be made on the point that cracks in the piezoelectric element can be effectively prevented by setting the amount of shifting the non-contact end of the internal electrode layer within the optimum range.

  FIG. 8 is a diagram for explaining an example of a position where a crack occurs when the amount of deviation of the non-contact end is small. FIG. 8 shows the non-contact end portions of two adjacent internal electrode layers. A crack generated in the piezoelectric element is likely to occur on a line connecting non-contact ends of adjacent internal electrode layers as indicated by a one-dot broken line in FIG. Here, when the distance shown in (K) in FIG. 8 is smaller than the distance shown in (J) in FIG. 8, that is, the distance obtained by shifting the non-connected ends of the adjacent internal electrodes is smaller than the distance between the electrodes. In this case, since the one-dot broken line is nearly vertical, the stress is concentrated and cracks are likely to occur. For this reason, it is desirable that the distance by which the non-contact ends of adjacent internal electrodes are shifted is somewhat larger than the distance between the electrodes.

  On the other hand, FIG. 9 is a diagram for explaining an example of a position where a crack occurs when the amount of deviation of the non-contact end is large. 9 shows the non-contact end portions of two adjacent internal electrode layers as in FIG. As shown in FIG. 9 (L), when the displacement amount of the non-contact end is too large compared to the inter-electrode distance, a bending moment is generated in one of the internal electrode layers. Then, stress concentrates on the central portion of the piezoelectric element, and cracks are likely to occur in the central portion of the piezoelectric element.

  Therefore, in this example, a piezoelectric element in which the displacement amount of the internal electrode layer was changed was created, and the created piezoelectric element was operated to evaluate the presence or absence of cracks. Specifically, in the above-described manufacturing method, a 10 × 10-liter internal electrode layer is printed with an accuracy of 10 μm or less, and a laminated body in which four layers are stacked at the center of the internal electrode layer so that the stacking accuracy is within an accuracy of 10 μm or less. 32 were prepared, and 8 laminates were arranged on a firing base plate, and four base plates were laminated and fired, thereby producing a piezoelectric element having 16 layers. Then, a speaker is created with the created piezoelectric element, a sawtooth wave is applied to the piezoelectric element at twice the specified voltage, and the piezoelectric element is operated for 14 days in an environment of 80 degrees Celsius. evaluated.

  Here, in this example, a plurality of piezoelectric elements having a distance between the electrodes of 25 μm and varying the amount of deviation were prepared by the above-described manufacturing method. Specifically, Example 1 in which the displacement amount of the non-contact end is 75 μm, Example 2 in which the displacement amount of the non-contact end is 100 μm, Example 3 in which the displacement amount of the non-contact end is 150 μm, Example 4 was created with a displacement of 200 μm. For comparison, Comparative Example 1 with a non-contact end deviation of 0 μm, Comparative Example 2 with a deviation of 50 μm, and Comparative Example 3 with a deviation of 250 μm were prepared.

  FIG. 10 is a table for explaining the number of cracks generated in the piezoelectric element created in the example. As shown in FIG. 10, in Comparative Example 1 in which the amount of deviation at the non-contact end was 0 μm, Comparative Example 2 in which 12 cracks occurred at the end of the internal electrode and the amount of deviation at the non-contact end was 50 μm. Then, four cracks occurred. On the other hand, Example 1 in which the displacement amount of the non-contact end is 75 μm, Example 2 in which the displacement amount of the non-contact end is 100 μm, Example 3 in which the displacement amount of the non-contact end is 150 μm, and the displacement amount of the non-contact end In Example 4 in which the thickness was 200 μm, no crack was generated. In Comparative Example 3 in which the amount of deviation at the non-contact end was 250, two cracks occurred at the center portion of the electrode.

  As described above, in the piezoelectric element in which the displacement amount of the non-contact end is in the range of 3 to 10 times the distance between the electrodes, the displacement amount of the non-contact end is less than 3 times or more than 10 times the distance between the electrodes. The occurrence of cracks can be suppressed as compared with the piezoelectric element. In addition, in a piezoelectric element in which the amount of misalignment at the non-contact end is in the range of 3 to 10 times the distance between the electrodes, the distortion applied to the piezoelectric layer near the non-contact end is appropriately dispersed. Therefore, it is possible to increase the vibration loss inside the piezoelectric element and reduce the peak dip in the frequency characteristic of the sound pressure. As a result, an acoustic generator having a small variation in sound pressure can be obtained.

DESCRIPTION OF SYMBOLS 1 Piezoelectric element 3 Film 5, 5a, 5b Frame member 7, 7a, 7b, 7c, 7d, 7e, 7f, 7g, 7h Piezoelectric layer 9, 9a, 9b, 9c, 9d, 9e, 9f, 9g, 9h Inside Electrode layer 13 Laminate 15a, 15b Surface electrode layer 17, 19 External electrode 20 Resin layer 22, 23 Internal electrode x Longitudinal direction of piezoelectric element y Thickness direction of piezoelectric element z Short direction of piezoelectric element

Claims (7)

Two opposing external electrodes ;
A plurality of internal electrode layers connected to every other one of the external electrodes;
A plurality of piezoelectric layers are laminated,
A plurality of inner electrode layers connected to the same external electrode, together are formed from a non-contact end that is not in contact with the external electrodes, respectively Re distance pixels of the first direction to the other external electrode different The piezoelectric element is formed so that the positions of the ends in the second direction perpendicular to the first direction are different from each other .   2. The piezoelectric element according to claim 1, wherein a set of a plurality of internal electrode layers that gradually increase in area is repeatedly arranged in the stacking direction of the piezoelectric elements.   Formed so that the difference between the distance between the non-contact end of adjacent internal electrode layers connected to the same external electrode and the other external electrode falls within the range of 3 to 10 times the distance between the internal electrode layers The piezoelectric element according to claim 1 or 2, wherein the piezoelectric element is formed. The internal electrode layer connected to one external electrode is formed at a position shifted in the second direction with respect to the internal electrode layer connected to the other external electrode. 4. The piezoelectric element according to any one of 3. With film,
A frame member provided on the outer periphery of the film;
The piezoelectric element according to any one of claims 1 to 4 , provided on the film in a frame of the frame member,
And a resin layer filled in the frame of the frame member so as to embed the piezoelectric element. An acoustic generator according to claim 5 ;
And a housing for housing the sound generator. An acoustic generator according to claim 5 ;
An electronic circuit connected to the acoustic generator;
A housing for housing the electronic circuit and the acoustic generator,
An electronic apparatus having a function of generating sound from the sound generator.

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