JP5901743B2 - Linear motor device - Google Patents

Description

  The present invention relates to a linear motor device, and more particularly to a heat dissipation structure that suppresses a temperature rise on a moving body side.

  There are solder printing machines, component mounters, solder reflow machines, board inspection machines, etc. as board work equipment that produces boards with a large number of parts mounted on them. There are many cases to do. Many of these substrate working devices include a moving body that moves on the substrate and performs a predetermined operation, and a linear motor device can be used as one means for driving the moving body. A linear motor device of this type is generally configured to include a raceway member in which N and S poles of a plurality of magnets are alternately arranged along a moving direction, and an armature having a core and a coil. With body.

  Considering a component mounting machine as an example, a component mounting head as a moving body includes a driven portion that engages and slides on a track member in addition to an armature. Since the driven part is disposed close to the armature, there is a possibility that the driven part may be affected by heat generated by the coil. In particular, when the propulsive force of the linear motor device is increased, it is effective to increase the drive current flowing through the coil, but the amount of heat generation increases accordingly. For this reason, the driven portion or the mounting member for mounting the driven portion is thermally expanded or deformed, resulting in a decrease in positioning accuracy, an increase in sliding friction of the sliding portion, and various members provided in the driven portion. Detrimental effects such as thermal degradation of the ash are likely to occur. In order to suppress such harmful effects, cooling structures for linear motor devices exemplified in Patent Documents 1 to 3 have been proposed.

  A linear motor cooling device disclosed in Patent Document 1 includes an armature mounting plate for mounting an armature, a table for mounting a load mounted on the armature mounting plate via a heat insulating material, and an armature. And a cooling unit provided so as to be sandwiched between the mounting plate and the table. The load corresponds to a driven part that performs a predetermined process, and corresponds to a component mounting head and a driving mechanism in the example of the component mounting machine. In this technical example, an armature mounting plate, a load (table), and a cooling unit are disposed above the armature. Accordingly, it is described that heat generated by the armature can be transferred from the armature mounting plate only to the cooling unit side, and thermal deformation accompanying heat transfer to the load (table) can be eliminated.

  Further, the linear motor armature disclosed in claim 6 of Patent Document 2 is provided with a cooling pipe provided with a plurality of air outlets for ejecting air downwards on the bottom surface of the armature. Thereby, the ejected air is reflected upward by the stator base, and the armature can be forcedly cooled. Further, the linear motion device disclosed in Patent Document 3 includes a beam and a guide, a slider, and a linear motor including a mover (armature) on the slider and a stator on the beam. Further, the movable element is provided with a heat radiating fin, and an air flow forming means is further provided so that the air flow hits the heat radiating fin. Accordingly, it is described that the heat generated in the mover is radiated from the radiation fins, so that the thermal deformation generated in the slider and the beam is suppressed as much as possible.

Japanese Patent No. 4636354 No. 2008/133017 JP 2008-108950 A

  By the way, in the cooling device of patent document 1, since heat is transferred from the armature to the cooling unit via the armature mounting plate, the armature mounting plate becomes high temperature, and a heat insulating material having a sufficient thickness between the armature mounting plate and the load (table). Need to be placed. Nevertheless, the temperature of the load (table) arranged close to the high-temperature armature mounting plate tends to increase, and adverse effects such as a decrease in positioning accuracy are likely to occur. In addition, since the load (table) and the cooling unit are both disposed above the armature, restrictions on size and shape are severe.

  Moreover, although the forced air cooling structure is employ | adopted in patent document 2, depending on the magnitude | size of an armature, it may be unable to fully cool only with the ventilation from the outside. In addition, it is unknown whether the armature-side driven part is efficiently cooled. Furthermore, although the forced air cooling structure is employ | adopted also in patent document 3, it cannot necessarily say that it is a favorable heat dissipation structure. That is, in order to send sufficient air to the radiating fins, it is necessary to widen the distance between the movable element provided with the radiating fins and the slider, but this is contrary to the reduction in size and weight of the apparatus. Also, if a fan is attached to the fixed beam and blown to a moving mover, only part of the wind hits the heat dissipation fins, resulting in low cooling efficiency and a reduction in the linear motor's movable range by the amount of fan installation space. To do.

  The present invention has been made in view of the problems of the background art described above, and a driven part that engages and slides on a raceway member and a radiator that cools the armature are arranged separately in the moving body. Suppresses the temperature rise of the drive unit to ensure positioning accuracy, suppresses adverse effects such as increased sliding friction at the sliding part and thermal deterioration of various members, and increases the degree of freedom in cooling design to achieve good cooling performance It is an object to be solved to provide a linear motor device provided.

An invention of a linear motor device according to a first aspect of the present invention for solving the above-described problem has a raceway member in which N poles and S poles of a plurality of magnets are alternately arranged along a moving direction, and an armature having a core and a coil. And a moving body movably mounted on the track member, and when the coil is energized, the magnetic flux induced in the core and the magnet of the track member are moved in the moving direction. A linear motor device that generates a propulsive force, wherein the movable body is fixed to the core below or on one side of the armature, and is driven to slide by engaging with the track member; A heat conductive member having a high thermal conductivity that extends inside the armature and partially extends outside the armature, and transfers heat generated by the coil to the outside of the armature; and the armature Fixed to the core above or on the other side of the Wherein at a child against phase to the driven part, and a radiator where the heat conduction member to dissipate the transported heat is connected, a mounting member attached to the driven parts while spaced apart from the coil and the core A heat insulating fixing member having a low thermal conductivity fixed to the heat dissipation member, the heat conductive member being coupled to the heat radiator and extending, and a cooling member disposed inside the armature A heat collecting portion that extends over the entire length of the groove, has one end that extends into the heat insulating fixing member and extends to the vicinity of the driven portion, and the other end that communicates with the heat radiating portion.

The invention according to claim 2 is the invention according to claim 1 , wherein the moving body further includes a heat transfer fixing member having high thermal conductivity for fixing the radiator to the core, or the radiator is the It is fixed directly to the core.

The invention according to claim 3 is the fastening member according to claim 1 or 2 , wherein the movable body integrally fastens the driven portion or the attachment member, the core of the armature, and the radiator. It has further.

The invention according to claim 4 is the heat insulation fixing member according to any one of claims 1 to 3 , wherein the heat insulating fixing member is a heat insulating material having low thermal conductivity between the mounting member to which the driven portion is attached and the coil. it is obtained by filling molding the resin as well as placement.

A fifth aspect of the present invention provides the heat sink according to any one of the first to fourth aspects, wherein the radiator includes a base extending in a planar shape and a plurality of heat radiation fins standing vertically from the surface of the base. The heat conducting member is a heat pipe, the heat dissipating part is a heat pipe heat dissipating part connected to and extended from the back surface of the base of the radiator , and the heat collecting part is the heat pipe heat dissipating part. This is a heat pipe heat collecting part communicating with the part .

  In the invention of the linear motor device according to the first aspect, since the driven part and the radiator are spaced apart from each other with the armature in the moving body, heat conduction from the radiator that tends to be high temperature to the driven part is performed. It is suppressed. Further, since the heat conducting member disposed inside the armature extends to the vicinity of the driven part, the driven part and its vicinity are efficiently cooled. These comprehensive actions can suppress the temperature rise of the driven parts, reduce thermal expansion and deformation, ensure positioning accuracy, and adverse effects such as increased sliding friction of sliding parts and thermal deterioration of various members. Can be suppressed. In addition, since there is no need to arrange the structural members related to the driven parts around the radiator, it is easy to secure a sufficient heat radiation area, and the blower fan can be arranged at an appropriate position if necessary. In addition, the degree of freedom in cooling design can be increased and good cooling performance can be provided.

Further, the driven portion and the attachment member are separated from the coil and fixed to the core by using the heat insulating fixing member. Therefore, the heat conduction from the coil which is a heat source to the driven part is significantly reduced, and the temperature rise of the driven part can be further suppressed. Furthermore, since one end of the heat collecting portion of the heat conducting member enters the heat insulating fixing member and performs cooling, the temperature rise of the mounting member and the driven portion is remarkably suppressed.

In the invention which concerns on Claim 2 , a heat radiator is fixed to a core using a heat-transfer fixing member, or a heat radiator is directly fixed to a core. Therefore, the heat conduction from the coil as the heat source to the heat radiator via the core is remarkably increased, and the temperature rise of the entire armature can be suppressed by cooperation with the heat transfer by the heat conducting member. Thereby, finally, the temperature rise of the driven part can be further suppressed.

In the invention which concerns on Claim 3 , it has a fastening member which fastens a to-be-driven part or an attachment member, the core of an armature, and a heat radiator integrally. Therefore, a simple and robust structure can be realized while reducing the number of components.

In the invention according to claim 4 , a heat insulating material having low thermal conductivity is disposed between the mounting member to which the driven portion is attached and the coil, and the resin is filled and molded. By performing resin molding, the mechanical strength of the coil can be increased, or the coil can be shielded from the outside air to improve the environmental resistance. However, on the other hand, the heat conduction by the resin increases. Therefore, by disposing a heat insulating material between the attachment member and the coil, heat conduction from the coil to the driven part via the resin can be reduced, and an increase in temperature of the driven part can be suppressed.

In the invention which concerns on Claim 5 , a heat radiator consists of a base | substrate and a radiation fin, and the heat conductive member is made into the heat pipe which consists of a heat pipe thermal radiation part and a heat pipe heat collecting part. Therefore, by using the phase change and convection of the refrigerant in the heat pipe to cool much more efficiently, the temperature rise of the entire armature can be suppressed, and finally the temperature rise of the driven part can be suppressed.

It is the perspective view which showed the structural example of the component mounting apparatus which can implement the linear motor apparatus of this invention. It is sectional drawing orthogonal to the moving direction which showed typically the whole structure of the linear motor apparatus of 1st Embodiment. It is the figure which showed the detailed structure of the moving body typically, (1) is front sectional drawing orthogonal to a moving direction, (2) is a top view. It is a vertical sectional view of the track member and the moving body along the moving direction. It is front sectional drawing orthogonal to the moving direction which showed the detailed structure of the moving body of the linear motor apparatus of 2nd Embodiment typically. It is the figure which showed typically the detailed structure of the moving body of the linear motor apparatus of 3rd Embodiment, (1) is a front view orthogonal to a moving direction, (2) is a top view.

  First, a configuration example of a component mounter 9 that can implement the linear motor device of the present invention will be described with reference to FIG. FIG. 1 is a perspective view showing a configuration example of a component mounting device 9 that can implement the linear motor device of the present invention. FIG. 1 shows two component mounting apparatuses 9 arranged side by side on a common base 90, and one unit will be described below. The component mounting device 9 is configured by assembling a substrate transport device 91, a component supply device 92, a component transfer device 93, a component camera 94, a control computer (not shown), and the like on a base 99 (the symbol is the front right side). This is attached only to the component mounting apparatus 9). As shown by the XYZ coordinate axes in the upper right of FIG. 1, the horizontal width direction of the component mounter 9 (the direction from the upper left to the lower right of FIG. 1) is the X axis direction, and the horizontal longitudinal direction of the component mounter 9 (FIG. 1). The direction from the upper right to the lower left of the drawing) is the Y-axis direction, and the vertical height direction is the Z-axis direction.

  The board transfer device 91 is provided in the middle of the component mounting machine 9 in the longitudinal direction. The substrate transfer device 91 is a so-called double conveyor type device in which the first transfer device 911 and the second transfer device 912 are arranged in parallel, and the two substrates K are operated in parallel to carry in and position in the X-axis direction. Take it out. Each of the first and second transfer apparatuses 911 and 912 places a pair of guide rails (not shown) parallel to the X-axis direction on the base 99 and a substrate K guided by the guide rails. And a pair of conveyor belts (not shown). Each of the first and second transfer devices 911 and 912 is provided with a clamp device (not shown) that pushes up and positions the board K transferred to the component mounting position from the base 99 side.

  The component supply device 92 is a feeder-type device, and is provided at the front portion in the longitudinal direction of the component mounter 9 (the left front side in FIG. 1). The component supply device 92 is configured by arranging a plurality of cassette-type feeders 921 side by side on a base 99. Each cassette type feeder 921 includes a main body 922 that is detachably attached to the base 99, a supply reel 923 that is rotatably and detachably attached to a rear portion of the main body 922 (a front side of the component mounting machine 9), and a main body 922. And a component supply unit 924 provided at the front end (near the center of the component mounter 9). The supply reel 923 is a medium for supplying parts, and is wound with a carrier tape (not shown) holding a predetermined number of parts at regular intervals. The leading end of the carrier tape is pulled out to the component supply unit 924, and different components are supplied for each carrier tape.

  The component transfer device 93 is a so-called XY robot type device that can move in the X-axis direction and the Y-axis direction, and supplies components from the rear part (right rear side in FIG. 1) in the longitudinal direction of the component mounting machine 9 to the front part. It is disposed over the device 92. The component transfer device 93 includes an XY axis head drive mechanism 931 (most of which is hidden in FIG. 1), a mounting head 932, and the like. The XY axis head drive mechanism 931 drives the mounting head 932 in the X axis direction and the Y axis direction. The linear motor device 1 according to the first embodiment can be used as a mechanism for driving in the X-axis direction among the XY-axis head drive mechanism 931. Further, as a mechanism for driving in the Y-axis direction, a linear motor device may be used, or another mechanism such as a known ball screw feeding mechanism may be used.

  Below the mounting head 932, there is provided a nozzle holder 933 that holds a plurality of suction nozzles for picking up and mounting parts by suction using negative pressure. The mounting head 932 has a Z-axis direction drive mechanism (not shown) that drives the suction nozzle to move up and down in the vertical Z-axis direction, and an R-axis rotation drive mechanism (not shown) that rotates the nozzle holder 933 around the Z axis. doing. The mounting head 932 includes a substrate camera (not shown) that images the positioned substrate K.

  The component camera 94 is a device that images the state when the suction nozzle of the component transfer device 93 sucks the component, and is disposed on the base 99 near the component supply unit 924 of the component supply device 92. The control computer (not shown) is connected to the substrate transfer device 91, the component supply device 92, the component transfer device 93, and the component camera 94 by a communication cable, obtains necessary information, performs calculation and determination, and appropriately A command is issued to control the operation of each part. A display operation device 96 is arranged on the upper front side of the upper cover 95 so that the operator can confirm information from the control computer and perform necessary operations and settings.

  Next, the linear motor device 1 according to the first embodiment will be described in detail. FIG. 2 is a cross-sectional view orthogonal to the moving direction schematically showing the overall configuration of the linear motor device 1 of the first embodiment. The linear motor device 1 includes a track member 2 and a moving body 3, and the moving body 3 moves in the X-axis direction (the front and back direction in FIG. 2) as the moving direction.

  The track member 2 is configured such that an upper track member 21 and a lower track member 22 which are divided into upper and lower parts extend in parallel to the moving direction, and the moving body 3 is between the upper and lower track members 21 and 22. The movement path of the moving body 3 is closed by connecting both ends of the upper and lower track members 21 and 22 in the X-axis direction. An upper guide rail 23 and a lower guide rail 24 are provided on the left side surfaces 211 and 221 of the upper track member 21 and the lower track member 22 in the drawing so as to extend in the movement direction, respectively. The cross-sectional shape orthogonal to the moving direction of the upper and lower guide rails 23, 24 is an uneven shape with a narrowed middle.

  The upper magnet fixing member 25 is provided on the bottom surface 212 of the upper track member 21 so as to extend in the movement direction. A plurality of magnets 251 are arranged in the moving direction of the bottom surface of the upper magnet fixing member 25. Similarly, the lower magnet fixing member 26 is provided on the upper surface 222 of the lower track member 22 so as to extend in the moving direction. A plurality of magnets 261 are arranged in the moving direction of the upper surface of the lower magnet fixing member 26.

  The moving body 3 includes an armature 4, a driven part 5, a radiator 6, and the like that are integrally formed, and is movably mounted on the track member 2. The armature 4 has a substantially symmetrical structure in the vertical direction, is disposed between the upper and lower track members 21 and 22, and has a slight gap with respect to the upper and lower magnets 251 and 261.

  A driven portion 5 is attached to one side of the armature 4 (left side in the figure) via an attachment member 51. The driven portion 5 is a portion corresponding to the mounting head 932 in FIG. 1 and extends in the vertical direction. An upper engaging member 52 and a lower engaging member 53 are fixedly provided near the upper end and the lower end of the right side surface 501 in the drawing of the driven portion 5. The upper and lower engagement members 52 and 53 have engagement recesses 521 and 531, respectively. The respective engagement recesses 521 and 531 are movable by being fitted to the concavo-convex shapes of the upper and lower guide rails 23 and 24 of the track member 2, whereby the entire moving body 3 is mounted. Various members (not shown) constituting the mounting head 932 are attached to the left side surface 502 of the driven unit 5 in the drawing.

  On the other hand, a radiator 6 is attached to the other side of the armature 4 (the right side in the drawing) via an attachment member 61. The radiator 6 is disposed so as to be opposed to the driven portion 5 with the armature 4 interposed therebetween. The radiator 6 dissipates heat transferred from the armature 4 as will be described in detail later. The above-mentioned “other side” and the above-mentioned “one side” mean two opposite side surfaces of the armature 4 and do not include two adjacent side surfaces that intersect.

  The configurations of the track member 2 and the moving body 3 will be described in further detail. FIG. 3 is a diagram schematically showing the detailed structure of the moving body 3, where (1) is a front sectional view orthogonal to the moving direction, and (2) is a plan view. FIG. 4 is a vertical sectional view of the track member 2 and the moving body 3 along the moving direction. The armature 4 of the moving body 3 includes cores 41U, 41V, 41W, coils 43U, 43V, 43W, and the like. In addition, the moving body 3 further includes heat pipes 71 and 72 corresponding to the heat conducting member, and a fastening rod 8 corresponding to the fastening member.

  As shown in FIG. 4, the magnets 251 and 261 of the track member 2 arranged above and below the moving body 3 are alternately arranged with a plurality of N poles and S poles along the moving direction (left and right in the figure). Has been. The upper and lower magnets 251 and 261 facing each other across the moving body 3 have different polarities.

  Also, as shown in FIG. 3 (2) and FIG. 4, the armature 4 of the moving body 3 has cores 41U, 41V, 41W and coils 43U, 43V, 43W for each phase, and three phases move. They are arranged side by side. The moving body 3 may include at least one set of three-phase armatures 4 and may include a plurality of sets of armatures 4 arranged in the movement direction.

  The cores 41U, 41V, 41W are formed by laminating a large number of electromagnetic steel sheets punched by a press. As shown in FIG. 4, the planar shape of the cores 41U, 41V, and 41W is generally a cross shape, and the yoke portion 411 extends in the width direction (vertical direction in FIG. 4) perpendicular to the moving direction to generate the magnetic flux H. It has come to pass. At both ends of the yoke portion 411, magnetic pole forming portions 412 that are widened like a scissors are formed. When a current is passed through the coils 43U, 43V, and 43W, an N pole is induced in one of the magnetic pole forming portions 412, and an S pole is induced in the other, and a propulsive force is generated between the magnets 251 and 261 of the raceway member 2.

  Abutment convex portions 413 are projected forward and rearward from the center of the side surfaces of the yoke portion 411 before and after the moving direction, respectively. The abutting convex portion 413 partially enlarges the cross-sectional area through which the magnetic flux H passes. Between the adjacent front core 41U and the central core 41V, and between the central core 41V and the rear core 41W, the abutment protrusions 413 abut against each other at the abutment surface 414 at the tip. Is specified. Further, the abutting surface 414 of the abutting convex portion 413 faces outward on the front side of the front core 41U and the rear side of the rear core 41W.

  A fastening hole 415 penetrating in the width direction is formed in the center of each core 41U, 41V, 41W. As shown in FIG. 3, the fastening rod 8 is inserted into the fastening hole 415. Both ends of the fastening rod 8 are fastened to the attachment member 51 of the drive unit 5 and the attachment member 61 of the radiator 6. Thereby, the driven part 5, the cores 41U, 41V, 41W of the armature 4 and the radiator 6 are integrally fastened. In addition, a cooling groove 416 having a semicircular cross section and extending in the width direction is formed on the abutting surface 414 of each abutting convex portion 413 of the cores 41U, 41V, 41W. The fastening hole 415 and the cooling groove 416 can be formed without increasing the number of steps by changing the punching die of the press machine from the conventional one.

  On the other hand, the coils 43U, 43V, 43W are separately formed on both sides of the yoke part 411 separated by the abutment convex part 413 of the cores 41U, 41V, 41W, and the number of turns is equal on both sides. . The three-phase coils 43U, 43V, and 43W are connected to the Y connection or the Δ connection, and are energized by adjusting the magnitude and direction of current flow from a power supply unit (not shown) mounted on the moving body 3. It is like that.

  As shown in FIG. 3, in order to fix the plate-like attachment member 51 to which the driven portion 5 is attached to the cores 41U, 41V, and 41W while being separated from the coils 43U, 43V, and 43W, heat insulation having low thermal conductivity is provided. A fixing member 45 is used. The heat insulating fixing member 45 is a rectangular bar-shaped member common to the three phases, and is interposed between the attachment member 51 and the end faces of the three-phase cores 41U, 41V, 41W, and extends in the moving direction. A total of three fastening rods 8 of three phases are inserted through the heat insulating fixing member 45. The heat insulating fixing member 45 supports the mounting member 51 and the coils 43U, 43V, and 43W at a distance. As a constituent material of the heat insulating fixing member 45, a material that is strong in compression force of fastening and low in thermal conductivity is suitable, and a glass epoxy laminated board can be exemplified.

  On the other hand, in order to fix the plate-like attachment member 61 to which the radiator 6 is attached to the cores 41U, 41V, 41W, a heat transfer fixing member 47 having high thermal conductivity is used. The heat transfer fixing member 47 is an individual member for three phases, and is interposed between the attachment member 61 and the end faces of the phase cores 41U, 41V, 41W, respectively. A fastening rod 8 for each phase is inserted through each heat transfer fixing member 47. The heat transfer fixing member 47 supports the mounting member 61 and the cores 41U, 41V, 41W with good heat conduction. As the constituent material of the heat transfer fixing member 47, a material that is strong against the compressive force of fastening and has high thermal conductivity is suitable, and a metal material such as iron can be exemplified.

  In addition, you may make it fix the heat radiator 6 directly to the cores 41U, 41V, and 41W without using the heat-transfer fixing member 47 using the shaping | molding attachment member. According to this aspect, the heat conduction from the armature 4 to the radiator 6 is further improved.

  In order to cool the armature 4, two heat pipes 71 and 72 corresponding to the radiator 6 and the heat conducting member are provided. More specifically, a space having a circular cross section is formed by the two cooling grooves 416 between the rear abutting convex portion 413 of the front core 41U and the front abutting convex portion 413 of the central core 41V. The The heat pipe heat collecting part 711 of the heat pipe 71 is disposed in this space (see FIG. 4). Similarly, a space having a circular cross section is formed by the two cooling grooves 416 between the rear abutting convex portion 413 of the central core 41V and the front abutting convex portion 413 of the rear core 41W. A heat pipe heat collecting part 721 of the heat pipe 72 is disposed (see FIG. 4).

Each heat pipe heat collecting part 711, 721 extends over the entire length of the cooling groove 416, and its one end 712, 722 enters the inside of the heat insulating fixing member 45 and extends to the vicinity of the driven part 5. (See FIG. 3). The other ends 713 and 723 of the heat pipe heat collecting portions 711 and 721 extend to the outside of the armature 4 and extend to the heat pipe heat radiating portions 715 and 725, respectively. The two heat pipe heat radiating portions 715 and 725 are alternately connected to the back surface of the attachment member 61 of the radiator 6 and extend.

  For example, water can be used as the refrigerant sealed in the heat pipes 71 and 72, and the refrigerant is not limited to this, and other refrigerants may be used. In the first embodiment, the heat conducting member does not necessarily need to be the heat pipes 71 and 72 accompanied with the phase change of the refrigerant. For example, the heat conducting member is a cooling pipe that circulates and circulates cooling oil in the cooling pipe. There may be.

  The radiator 6 is composed of a base body 62 having a size comparable to that of the armature 4 and extending in a planar shape, and a plurality of thin plate-like heat radiation fins 63 erected in a vertical direction from the surface of the base body 62. In the configuration example shown in (1) of FIG. 3, eight radiating fins 63 are erected in parallel with the moving direction. Thereby, as the moving body 3 moves, air passes between the heat radiating fins 63 and is efficiently cooled. The base 62 is provided in close contact with the mounting member 61, so that heat conduction from the heat pipe heat radiation portions 715 and 725 to the radiator 6 through the mounting member 61 is favorably conducted. The radiator 6 is preferably made of a metal having high thermal conductivity and good heat dissipation, and is preferably lightweight in order to suppress an increase in the weight of the moving body 3, and is manufactured by casting using, for example, aluminum. be able to.

  Next, the cooling effect | action of the coils 43U, 43V, and 43W in the linear motor apparatus 1 of 1st Embodiment comprised as mentioned above is demonstrated. When the coils 43U, 43V, and 43W are energized to move the moving body 3, heat due to copper loss is generated. Here, since the heat conduction of the cores 41U, 41V, and 41W is good, the heat generated in the coils 43U, 43V, and 43W is transmitted to the heat pipe heat collecting units 711 and 721 via the cores 41U, 41V, and 41W. Then, water evaporates inside the heat pipe heat collecting parts 711 and 721 and changes into water vapor, and a cooling action for the latent heat of evaporation occurs. On the other hand, the water vapor convects and moves to the heat pipe heat radiation units 715 and 725, is cooled by the heat radiator 6, returns to liquid phase water, and returns to the heat pipe heat collection units 711 and 721.

  Here, in parallel with the heat pipes 71 and 72, heat is efficiently transmitted from the cores 41 </ b> U, 41 </ b> V, 41 </ b> W to the radiator 6 through the heat transfer fixing member 47. The heat transfer by the heat pipes 71 and 72 and the heat transfer fixing member 47 similarly acts on the heat of iron loss generated in the cores 41U, 41V, and 41W. In addition, natural cooling is performed on the outer surfaces of the coils 43U, 43V, 43W and the cores 41U, 41V, 41W. By continuing these cooling actions, the temperature rise of the armature 4 is kept below an allowable value.

  On the other hand, on the driven portion 5 side, heat conduction from the cores 41U, 41V, 41W to the mounting member 51 of the driven portion 5 is suppressed by the action of the heat insulating fixing member 45. In addition, since the one ends 712 and 722 of the heat pipe heat collecting portions 711 and 721 enter the heat insulating fixing member 45 and perform cooling, the temperature rise of the mounting member 51 and the driven portion 5 is remarkably suppressed.

  According to the linear motor device 1 of the first embodiment, unlike the Patent Document 1, the driven part 5 and the radiator 6 are spaced apart from each other with the armature 4 in the moving body 3, so that the temperature becomes high. The heat conduction from the radiator 6 to the driven part 5 is suppressed. In addition, it is possible to remarkably efficiently cool the refrigerant by using the phase change and convection of the refrigerant in the heat pipes 71 and 72, and the heat pipes 71 and 72 extend to the vicinity of the driven part 5, so that the mounting member 51 and the driven part 5 can be efficiently cooled.

  In addition, since the driven part 5 and the mounting member 51 are fixed to the cores 41U, 41V, 41W using the heat insulating fixing member 45, the heat conduction from the coils 43U, 43V, 43W to the driven part 5 is remarkable. Decrease. Further, since the heat radiator 6 is fixed to the cores 41U, 41V, 41W using the heat transfer fixing member 47, heat conduction from the coils 43U, 43V, 43W to the heat radiator 6 via the cores 41U, 41V, 41W. Significantly increases and cooperates with heat transfer by the heat pipes 71, 72. Furthermore, since it is not necessary to arrange the structural member related to the driven unit 5 around the radiator 6, it is easy to secure a sufficient heat radiation area. For example, the radiator 6 having a size comparable to the armature 4 is adopted. it can

  With these comprehensive actions, the temperature rise of the driven part 5 can be suppressed and thermal expansion and deformation can be reduced. As a result, the positional relationship between the upper and lower engaging members 52, 53 of the driven portion 5 and the upper and lower guide rails 23, 24 of the track member 2 is stabilized, positioning accuracy can be ensured, and the sliding between them can be ensured. Increase in dynamic friction can be suppressed. Furthermore, it is possible to suppress adverse effects such as thermal deterioration of various members attached to the driven portion 5 to form the mounting head 932, for example, resin members.

  Further, the fastening rod 8 integrally fastens the driven part 5, the cores 41U, 41V, 41W of the armature 4 and the radiator 6, and is simple and robust while reducing the number of components. The structure can be realized.

  Next, the linear motor device of the second embodiment will be described mainly with respect to differences from the first embodiment. FIG. 5 is a front cross-sectional view orthogonal to the moving direction schematically showing the detailed structure of the moving body 3A of the linear motor device of the second embodiment. In the second embodiment, the parts other than the armature 4A have the same configuration as in the first embodiment. In the armature 4A of the second embodiment, the resin 43 is filled and molded in the coils 43U, 43V, and 43W to increase the mechanical strength. At the same time, the coils 43U, 43V, and 43W are shielded from the outside air to enhance the environmental resistance, thereby preventing foreign matters from being mixed in and getting wet.

  As shown in FIG. 5, in the second embodiment, a heat insulating fixing insertion member 48 is used instead of the heat insulating fixing member 45 between the armature 4 </ b> A and the mounting member 51 of the driven part 5. The heat insulation fixing insertion member 48 is formed integrally with a heat insulation fixing portion 481 corresponding to the heat insulation fixing member 45 and a heat insulation insertion portion 482 arranged between the mounting member 51 and the coils 43U, 43V, 43W. ing. As in the first embodiment, the heat insulating fixing portion 481 separates the attachment member 51 from the coils 43U, 43V, and 43W and fixes it to the cores 41U, 41V, and 41W. The heat insulating insertion part 482 extends in a planar shape and is in close contact with the substantially entire surface of the mounting member 51, and is separated from the coils 43 U, 43 V, and 43 W. The constituent material of the heat insulation fixing insertion member 48 can be exemplified by the same glass epoxy laminate as in the first embodiment. Note that one end 711 of the heat pipe 71 reaches the vicinity of the attachment member 51 of the heat insulating fixing portion 481.

  Resin 49 is injected and filled into the space between the heat insulating fixed insertion member 48 and the coils 43U, 43V, 43W. The resin 49 is also cast on the heat insulation fixing insertion member 48 and the outer surfaces of the coils 43U, 43V, and 43W, and these are integrally molded.

  On the other hand, the resin 49 is also injected and filled into a separation space between the armature 4A and the attachment member 61 of the radiator 6. The resin 49 is also cast on the outer surfaces of the coils 43U, 43V, and 43W, and the heat transfer fixing member 47 and the heat pipes 71 and 72 are integrally formed in addition to the coils 43U, 43V, and 43W. . The material of the resin 49 is appropriately selected in consideration of heat conduction characteristics, electrical characteristics, mechanical strength, and the like.

  According to the linear motor device of the second embodiment, the heat insulating insertion portion 482 with low thermal conductivity is disposed between the mounting member 51 to which the driven portion 5 is attached and the coils 43U, 43V, 43W, and the resin 49 is disposed. Filled and molded. Therefore, the heat conduction from the coils 43U, 43V, 43W to the driven part 5 via the resin 49 can be reduced by the heat insulating insertion part 482, and the temperature rise of the driven part 5 can be suppressed.

  Next, the linear motor device according to the third embodiment will be described mainly with respect to differences from the first embodiment. FIG. 6 is a diagram schematically illustrating a detailed structure of the moving body 3B of the linear motor device according to the third embodiment, in which (1) is a front view orthogonal to the moving direction, and (2) is a plan view. In the third embodiment, the track member has the same configuration as in the first and second embodiments, but the design specifications of the armature 4B of the moving body 3B are different from those in the first embodiment, and the coils 43U, 43V, 43W are different. The calorific value is relatively large. For this reason, the forced air cooling using the ventilation fan 64 is employ | adopted.

  As shown in FIG. 6, the driven portion 5B is fixed to the end surfaces of the cores 41U, 41V, and 41W by the heat insulating fixing member 45 without using an attachment member. The radiator 6B is also fixed to the end surfaces of the cores 41U, 41V, and 41W by the spacer member 47B without using an attachment member. The spacer member 47B corresponds to the heat transfer fixing member 47 of the first embodiment, and is formed of a metal material.

  Four heat pipes 73 to 76 are provided inside the armature 4B. One end of each of the heat pipes 73 to 76 enters the inside of the heat insulating fixing member 45 and extends to the vicinity of the driven part 5B. The other ends of the heat pipes 73 to 76 are pulled out to the outside of the armature 4B and are coupled along the back surface of the base 62 of the radiator 6B.

  The radiator 6B includes a base 62 extending in a planar shape with a size comparable to that of the armature 4B, a plurality of thin plate-like heat dissipation fins 63 erected vertically from the surface of the base 62, and a blower fan 64. Has been. In the illustrated example, twelve heat dissipating fins 63 are erected in parallel with the moving direction to enhance the cooling performance as compared with the first embodiment, and further, forced air cooling is performed by two blower fans 64. Is called. The two blower fans 64 are configured to send air from the front in the standing direction to almost the entire radiating fin 63 as indicated by a broken arrow F1 in the drawing. The wind that hits the radiating fins 63 blows forward and backward in the movement direction as indicated by the broken arrow F2 in the figure.

  According to the linear motor device of the third embodiment, unlike Patent Document 3, most of the wind from the blower fan 64 is distributed evenly over the entire heat radiation fins 63, so that the cooling efficiency is extremely good. Since the blower fan 64 does not hinder the movement of the moving body 3, there is no adverse effect such as a reduction in the movement range. Thus, since it is not necessary to arrange the structural member related to the driven part around the radiator 6B, it is easy to secure a sufficient heat radiation area, and the blower fan 64 is disposed at an appropriate position. Can do. That is, the degree of freedom in cooling design is increased, and it becomes easy to ensure good cooling performance corresponding to the heat generation amount of the coils 43U, 43V, and 43W.

  In each embodiment, the driven parts 5 and 5B and the radiators 6 and 6B are fixed to opposite side surfaces of the armatures 4, 4A, and 4B, and are opposed to each other with the armatures 4, 4A, and 4B interposed therebetween. However, it is not limited to this. In other words, the driven part may be fixed below the armature, and the radiator may be fixed above, so as to face each other up and down. Further, the structure of the armatures 4, 4A, 4B is not limited to the embodiment, and for example, an armature using a three-phase core may be used. Further, although the linear motor device 1 drives the mounting head 932 of the component transfer device 93 in the X-axis direction, the linear motor device 1 can also be implemented as a mechanism that drives in the Y-axis direction. Various other applications and modifications are possible for the present invention.

  The present invention can be used for work equipment for substrates other than the component mounter 9, and can also be used for other types of industrial assembly machines and industrial machine tools.

1: Linear motor device 2: Track member
21: Upper race member 22: Lower race member
23: Upper guide rail 24: Lower guide rail
251,261: Magnet 3, 3A, 3B: moving body 4, 4A, 4B: armature
41U, 41V, 41W: Core 411: Yoke part
415: Fastening hole 413: Abutting projection 416: Cooling groove
43U, 43V, 43W: Coil
45: Heat insulation fixing member 47: Heat transfer fixing member 47B: Spacer member
48: Heat insulation fixing insertion member 49: Resin 5: Driven part
51: Mounting member 52: Upper engaging member 53: Lower engaging member 6: Radiator
61: Mounting member 62: Base body 63: Radiation fin
64: Blower fan 71-76: Heat pipe
711, 721: Heat pipe heat collecting part
715, 725: Heat pipe heat radiation part 8: Fastening rod 9: Component mounting device
90: Common base 91: Substrate transfer device 92: Component supply device
93: Component transfer device 932: Mounting head 94: Component camera
95: Cover 96: Display operation device 99: Base

Claims (5)

A track member in which N poles and S poles of a plurality of magnets are alternately arranged along a moving direction, and a moving body that has an armature having a core and a coil and is movably mounted on the track member. A linear motor device that generates a propulsive force in the moving direction between the magnetic flux induced in the core and the magnet of the track member when a current is passed through the coil,
The moving body is
A driven part that is fixed to the core below or on one side of the armature and that engages and slides on the track member;
A heat conducting member having a high thermal conductivity that extends to the outside of the armature and partially extends to the outside of the armature, and transfers heat generated by the coil to the outside of the armature;
A radiator that is fixed to the core above or on the other side of the armature, is opposed to the driven part across the armature, and is connected to the heat conducting member to dissipate the transferred heat;
A heat insulating fixing member having low thermal conductivity for fixing the mounting member to which the driven portion is attached to the core while being spaced apart from the coil; and
The heat conducting member is
A heat dissipating part coupled to the heat radiator and extending;
The cooling groove disposed inside the armature extends over the entire length, and one end of the cooling groove extends to the inside of the heat insulating fixing member and extends to the vicinity of the driven portion, and the other end is the heat dissipation portion. A linear motor device comprising: a heat collecting portion communicating with the heat collecting portion . In claim 1 ,
The moving body further includes a heat transfer fixing member having high thermal conductivity for fixing the radiator to the core,
Alternatively, a linear motor device in which the radiator is directly fixed to the core. 3. The linear motor device according to claim 1 , wherein the movable body further includes a fastening member that integrally fastens the driven portion or the attachment member, the core of the armature, and the radiator. The heat insulation fixing member according to any one of claims 1 to 3 , wherein a heat insulating material having low thermal conductivity is disposed between the mounting member to which the driven portion is attached and the coil, and the resin is filled and molded. A linear motor device. In any one of Claims 1-4 ,
The radiator is composed of a substrate extending in a planar shape and a plurality of heat radiation fins standing vertically from the surface of the substrate,
The heat conducting member is a heat pipe, the heat dissipating part is a heat pipe heat dissipating part connected to and extended from the back surface of the base of the radiator , and the heat collecting part communicates with the heat pipe heat dissipating part. A linear motor device that is a heat pipe heat collecting part.

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