JP5871550B2 - Transfer robot and vacuum device - Google Patents

Description

  The present invention relates to a transfer apparatus that transfers a transfer object such as a substrate, and more particularly to a transfer robot technique suitable for a vacuum apparatus in a semiconductor manufacturing apparatus or the like.

Conventionally, as this kind of transfer robot, one provided with two transfer mechanisms each having a substrate mounting portion is known in order to improve throughput.
However, when two transport mechanisms are provided, it is necessary to arrange the transport mechanisms up and down in order to avoid contact between the transport mechanisms, and as a result, there is a problem that the height of the vacuum device in which the transport robot is disposed is increased. There is.

  The present invention has been made in order to solve the above-described problems of the prior art, and an object of the present invention is to improve throughput in a transfer robot having a plurality of transfer mechanisms, An object of the present invention is to provide a technique for reducing the height of a vacuum device to be arranged.

The present invention, which has been made to achieve the above object, includes first, second and third drive shafts which are rotatably provided in a horizontal plane around a predetermined rotation shaft, and are fixed to the first drive shaft. A first upper drive arm, a second upper drive arm fixed to the second drive shaft below the first upper drive arm, and tips of the first and second upper drive arms. A first upper parallel crank mechanism composed of a first upper driven arm and a second upper driven arm that are rotatably connected to each other in a horizontal plane, and are disposed above the first upper parallel crank mechanism. , said second upper follower arm, and the third upper driven arm and the fourth upper follower arm of which is rotatably coupled at the second upper follower arm, respectively in a horizontal plane at both ends of the third Upper follower A second upper parallel crank mechanism comprising a fifth upper driven arm rotatably connected in a horizontal plane to the front end of the first upper arm and the fourth upper driven arm, and a front end of the fifth upper driven arm An upper transport mechanism, an upper transport mechanism, a first lower drive arm fixed to the third drive shaft below the second upper drive arm, and the second upper drive. A second lower drive arm fixed to the second drive shaft at a predetermined angle with respect to the second upper drive arm, below the arm and above the first lower drive arm; A first lower parallel crank comprising a first lower driven arm and a second lower driven arm that are rotatably connected to the front ends of the first and second lower drive arms in a horizontal plane, respectively. A mechanism and the second A side driven arm, a third lower driven arm and a fourth lower driven arm, which are rotatably connected in a horizontal plane at both ends of the second lower driven arm, and the third lower side A second lower parallel crank mechanism comprising a fifth lower driven arm rotatably connected to the distal ends of the driven arm and the fourth lower driven arm in a horizontal plane, and the fifth lower side A lower conveying portion provided at a height position between the first upper parallel crank mechanism and the second upper parallel crank mechanism at a distal end portion of the driven arm and formed so as not to contact other members ; have a, a lower transport mechanism having the time of expanding and contracting the upper transport mechanism, the third drive shaft and the second drive shaft is rotated in the same direction, and stretching the lower conveying mechanism The first drive shaft and the second drive shaft Is a transfer robot configured to rotate the drive shaft in the same direction .
In this invention, it is effective also when the said upper conveyance part and the said lower conveyance part each have two mounting parts.
Moreover, this invention is a vacuum apparatus which has a vacuum chamber and one of the conveyance robots mentioned above provided in the said vacuum chamber.

  In the case of the present invention, the upper transport mechanism composed of the first and second upper drive arms fixed to the first and second drive shafts, and the first and second fixed to the second and third drive shafts. A lower transport mechanism including a second lower drive arm, and the first, second, and third drive shafts are provided concentrically, so that the upper transport mechanism and the lower transport mechanism are provided. The mechanism can be arranged and operated laterally with respect to the rotation axis, thereby improving the throughput by simultaneously transporting a plurality of transported objects, and improving the height of the transport robot and the vacuum device in which the transport robot is disposed. Can be kept low. It is also possible to transport the transported object in a large vacuum chamber.

According to the present invention, in a transfer robot having a plurality of transfer mechanisms, it is possible to improve the throughput and to provide a technique for reducing the height of the transfer robot and a vacuum device in which the transfer robot is arranged.
Moreover, the vibration at the time of conveyance of a conveyed product can be minimized.

(A): Plan view showing the configuration of the embodiment of the transfer robot according to the present invention (b): Front view showing the configuration of the transfer robot Sectional drawing which shows the structure of the 1st-3rd drive shaft Top view showing the upper transfer mechanism of the transfer robot Top view showing the lower transfer mechanism of the transfer robot A top view showing the extension operation of the upper transfer mechanism of the transfer robot (part 1) Plan view showing the extension operation of the upper transfer mechanism of the transfer robot (part 2) Top view showing the extension operation of the upper transfer mechanism of the transfer robot (part 3) Top view showing the extension operation of the upper transfer mechanism of the transfer robot (part 4) Plan view showing the extension operation of the upper transfer mechanism of the transfer robot (part 5) FIG. 6 is a plan view showing the extension operation of the upper transfer mechanism of the transfer robot (No. 6). Top view showing extension operation of lower transfer mechanism of transfer robot (Part 1) Plan view showing the extension operation of the lower transfer mechanism of the transfer robot (part 2) Top view showing extension operation of lower transfer mechanism of transfer robot (Part 3) Plan view showing the extension operation of the lower transfer mechanism of the transfer robot (part 4) Top view showing extension operation of lower transfer mechanism of transfer robot (Part 5)

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1A is a plan view showing the configuration of the embodiment of the transfer robot according to the present invention, and FIG. 1B is a front view showing the configuration of the transfer robot.
FIG. 2 is a cross-sectional view showing the configuration of the first to third drive shafts. FIG. 3 is a plan view showing an upper transfer mechanism of the transfer robot, and FIG. 4 is a plan view showing a lower transfer mechanism of the transfer robot.

  As shown in FIG. 1A, the transfer robot 1 of the present invention transfers a substrate 10 which is a transfer object in, for example, a vacuum chamber (not shown), and includes an upper transfer mechanism 1A shown in FIG. , And a lower transport mechanism 1B shown in FIG.

As shown in FIG. 2, in the present embodiment, concentric first, second, and third torques transmitted in the clockwise direction or the counterclockwise direction are respectively transmitted from independent drive sources (not shown). Drive shafts 11, 12, and 13.
Here, the first drive shaft 11 is arranged on the innermost side, and the second drive shaft 12 and the third drive shaft 13 are arranged around the first drive shaft 11 so as to rotate in the horizontal direction around the rotation axis O. It is configured.
The second drive shaft 12 is formed in a stepped shape, and a first connecting portion 12a is provided on the upper portion thereof, and a second larger diameter than the first connecting portion 12a is provided below the first connecting portion 12a. The connecting portion 12b is provided.

  As shown in FIG. 3, the upper transport mechanism 1 </ b> A includes a first upper drive arm 21, a second upper drive arm 22, a first upper driven arm 31, and a second upper side, each extending linearly. The first upper parallel crank mechanism 4 constituted by the driven arm 32 is provided.

Here, the first upper drive arm 21 is connected to the first drive shaft 11, and the second upper drive arm 22 is connected to the first connection portion 12 a of the second drive shaft 12.
At the other end (front end) of the first upper drive arm 21, one end (base end) of the first upper driven arm 31 is a support shaft below the first upper drive arm 21. It is attached so as to be rotatable in the horizontal direction around A.

  In addition, one end (base end) of the second upper driven arm 32 is located above the second upper drive arm 22 at the other end (tip) of the second upper drive arm 22. It is attached so as to be rotatable in the horizontal direction around the support shaft B.

  Further, the other end portion (tip portion) of the first upper driven arm 31 and the other end portion (tip portion) of the second upper driven arm 32 are supported below the second upper driven arm 32. The shafts C and B are attached so as to be rotatable in the horizontal direction.

In the case of the present embodiment, the inter-axis distance between the support shafts AC is set to be the same as the distance between the rotation shaft O and the support shaft B. Further, the distance between the support shafts BC is set to be the same as the distance between the rotation shaft O and the support shaft A.
Note that the distance between the support shafts AC and the distance between the rotation shaft O and the support shaft B are longer than the distance between the support shafts BC and the distance between the rotation shaft O and the support shaft A. Yes.

A second upper parallel crank mechanism 5 is connected to a tip end portion, that is, an operation side end portion of the first upper parallel crank mechanism 4.
The second upper parallel crank mechanism 5 includes a second upper driven arm 32, a third upper driven arm 33, a fourth upper driven arm 34, and a fifth It is comprised by the part 36 of the upper end effector 40 which is an upper driven arm.

  Here, the end of the second upper driven arm 32 on the first upper driven arm 31 side is located above one end (base) of the third upper driven arm 33 above the second upper driven arm 32. (End part) is attached so that rotation in the horizontal direction centering | focusing on the spindle C mentioned above is possible.

Further, one end portion (base end) of the fourth upper driven arm 34 is provided above the second upper driven arm 32 at the end portion of the second upper driven arm 32 on the second upper drive arm 22 side. Part) is attached so as to be rotatable in the horizontal direction around the above-mentioned support shaft B.
The third and fourth upper driven arms 33 and 34 are configured to have the same inter-axis distance as the second upper drive arm 22 and the first upper driven arm 31.

  Further, the other ends (tip portions) of the third and fourth upper driven arms 33 and 34 are provided below the upper end effector 40 at a position having the same inter-axis distance as the distance between the support shafts BC. The shafts D and E are attached so as to be rotatable in the horizontal direction.

  In the present embodiment, the second upper driven arm 32 is configured such that the rotation directions of the first upper drive arm 22 and the third upper driven arm 33 are opposite and at the same angle. A power transmission mechanism 35 is provided.

That is, the power of the second upper drive arm 22 is transmitted via the power transmission mechanism 35 of the second upper driven arm 32, and the third upper driven arm 33 is opposite to the first upper drive arm 22 at the same angle. It is configured to rotate in the direction.
With such a configuration, the support shafts D and E at the operating tip of the second upper parallel crank mechanism 5 travel straight along the substrate transport direction P and pass on the rotation axis O.

  The upper end effector 40 of the present embodiment has two support arms 41 and 42 that extend in the substrate transport direction P from the support shafts D and E described above, and are provided at predetermined intervals. Substrate placement portions 43 and 44 for placing the substrate 10 are provided at the distal end portions, respectively.

As shown in FIG. 4, the lower transport mechanism 1B includes a first lower drive arm 51, a second lower drive arm 52, a first lower driven arm 61, each extending linearly, It has a first lower parallel crank mechanism 6 constituted by a second lower driven arm 62.
Here, the first lower drive arm 51 is connected to the third drive shaft 13, and the second lower drive arm 52 is connected to the second connection portion 12 b of the second drive shaft 12. .

  One end portion (base end portion) of the first lower driven arm 61 is located above the first lower drive arm 51 at the other end portion (front end portion) of the first lower drive arm 51. In FIG. 1, the shaft is mounted so as to be rotatable in the horizontal direction around the support shaft F.

In addition, one end portion (base end portion) of the second lower driven arm 62 is connected to the other end portion (front end portion) of the second lower drive arm 52. It is rotatably mounted in the horizontal direction about the support shaft G in the upper.

  By the way, in the present embodiment, as shown in FIG. 2, the second lower drive arm 52 of the first lower parallel crank mechanism 6 is connected to the second connection portion 12 b of the second drive shaft 12. The second upper drive arm 22 of the first upper parallel crank mechanism 4 is connected to the first connection portion 12 a of the second drive shaft 12.

  Here, the second lower drive arm 52 of the first lower parallel crank mechanism 6 is fixed to the second drive shaft 12 together with the second upper drive arm 22 of the first upper parallel crank mechanism 4 described above. Therefore, when the second drive shaft 12 is rotated, the second drive shaft 12 rotates in the same direction by the same angle.

  In the present embodiment, the second upper drive arm 22 of the first upper parallel crank mechanism 4 and the second lower drive arm 52 of the first lower parallel crank mechanism 6 have the same axis. As shown in FIGS. 1, 3, and 4, this angle is determined so as to be axisymmetric with respect to the substrate transport direction P when in the home position.

Then, the other end portion (tip portion) of the first lower driven arm 61 of the first lower parallel crank mechanism 6 and the other end portion (tip portion) of the second lower drive arm 52 are connected. , spindle H below the second lower follower arm 62 is attached rotatably respectively in the horizontal direction about the G.

In the case of the present embodiment, the inter-axis distance between the support shafts FH is set to be the same as the distance between the rotation shaft O and the support shaft G. The inter-axis distance between the support shafts GH is set to be the same as the distance between the rotation shaft O and the support shaft F.
The distance between the support shafts FH and the distance between the rotation shaft O and the support shaft G are longer than the distance between the support shafts GH and the distance between the rotation shaft O and the support shaft F. Yes.

A second lower parallel crank mechanism 7 is connected to a tip end portion of the first lower parallel crank mechanism 6, that is, an operation side end portion.
The second lower parallel crank mechanism 7 includes a second lower driven arm 62, a third lower driven arm 63, and a fourth lower driven arm 64 of the first lower parallel crank mechanism 6. And a part 66 of the lower end effector 70.

Here, one end of the third lower driven arm 63 is located above the second lower driven arm 62 at the end of the second lower driven arm 62 on the first lower driven arm 61 side. An end portion (base end portion) is attached so as to be rotatable in the horizontal direction around the support shaft H described above.

Further, one end of the fourth lower driven arm 64 is located above the second lower driven arm 62 at the end of the second lower driven arm 62 on the second lower drive arm 52 side. The portion (base end portion) is attached so as to be rotatable in the horizontal direction around the above-described support shaft G.
The third and fourth lower driven arms 63 and 64 are configured to have the same inter-axis distance as the second lower drive arm 52 and the first lower driven arm 61.

  Further, the other end portions (tip portions) of the third and fourth lower driven arms 63 and 64 are positioned below the lower end effector 70 and have the same inter-axis distance as the distance between the support shafts GH. It is attached so that it can rotate in the horizontal direction about the spindles I and J provided on the center.

  In the present embodiment, the second lower driven arm 62 is configured such that the rotation directions of the second lower drive arm 52 and the third lower driven arm 63 are opposite and at the same angle. A power transmission mechanism 65 comprising a gearbox is provided.

That is, the power of the second lower drive arm 52 is transmitted via the power transmission mechanism 65 of the second lower driven arm 62, and the third lower driven arm 63 is connected to the second lower drive arm 52. It is configured to rotate in the opposite direction at the same angle.
With such a configuration, the support shafts I and J at the operating tip of the second lower crank mechanism 7 go straight along the substrate transport direction P and pass on the rotary shaft O.

  The lower end effector 70 according to the present embodiment has two support arms 71 and 72 extending from the above-described support shafts I and J in the substrate transport direction P and provided at a predetermined interval. Substrate mounting portions 73 and 74 for mounting the substrate are provided at the front end portion of each.

  Further, as shown in FIG. 1B, the lower end effector 70 is provided at a height position between the first upper parallel crank mechanism 4 and the second upper parallel crank mechanism 5 of the upper transport mechanism 1A. In addition, the shape and size of each member are determined so that the members do not contact each other.

Hereinafter, the operation of the present embodiment will be described.
First, the case where the upper transport mechanism is extended from the origin position shown in FIG. 5 will be described with reference to FIGS.

In this case, as shown in FIG. 6, the second drive shaft 12 is rotated by a predetermined angle in the clockwise direction, and at the same time, the third drive shaft 13 is rotated in the clockwise direction by the same angle as shown in FIG. Let
In the present embodiment, since the second lower drive arm 52 of the lower transport mechanism 1B is fixed to the second drive shaft 12, the second lower drive arm 52 is also rotated in the clockwise direction. To a predetermined angle.

  As a result of this rotation operation, the first upper parallel crank mechanism 4 and the second upper parallel crank mechanism 5 move in the substrate transport direction P, and the upper end effector 40 moves relative to the rotation axis O as shown in FIG. And disposed downstream of the substrate transport direction P.

On the other hand, the lower transport mechanism 1B turns around the rotation axis O by a predetermined angle clockwise and assumes the posture shown in FIG.
As a result of the above operation, as shown in FIG. 10, the upper transport mechanism 1A is extended and the lower transport mechanism 1B is turned by a predetermined angle.

  The lower end effector 70 of the lower transport mechanism 1B is provided at a height position between the first upper parallel crank mechanism 4 and the second upper parallel crank mechanism 5 of the upper transport mechanism 1A. It does not contact the upper transport mechanism 1A.

  On the other hand, when the upper transport mechanism 1A and the lower transport mechanism 1B are returned to the origin positions, the second drive shaft 12 is rotated counterclockwise by a predetermined angle and at the same time the third drive shaft 13 is rotated counterclockwise. Rotate the same angle in the direction.

Next, a case where the lower transport mechanism 1B is extended from the origin position shown in FIG. 5 will be described with reference to FIGS.
In this case, as shown in FIG. 11, the second drive shaft 12 is rotated by a predetermined angle in the counterclockwise direction, and at the same time, the first drive shaft is rotated at the same angle in the counterclockwise direction as shown in FIG. Rotate.
In the case of the present embodiment, since the second upper drive arm 22 of the upper transport mechanism 1A is fixed to the second drive shaft 12, the second upper drive arm 22 is also predetermined in the counterclockwise direction. Rotate the angle.

As a result of this rotating operation, the first lower parallel crank mechanism 6 and the second lower parallel crank mechanism 7 move in the substrate transport direction P, and the lower end effector 70 rotates as shown in FIG. It is arranged downstream of the substrate transport direction P with respect to O.
Further, the upper transport mechanism 1A turns around the rotation axis O by a predetermined angle in the counterclockwise direction and assumes the posture shown in FIG.

With the above operation, as shown in FIG. 15, the lower transport mechanism 1 </ b> B extends and the upper transport mechanism 1 </ b> A is turned by a predetermined angle.
The lower end effector 70 of the lower transport mechanism 1B is provided at a height position between the first upper parallel crank mechanism 4 and the second upper parallel crank mechanism 5 of the upper transport mechanism 1A. It does not contact the upper transport mechanism 1A.

On the other hand, when the upper transport mechanism 1A and the lower transport mechanism 1B are returned to the origin positions, the second drive shaft 12 is rotated counterclockwise by a predetermined angle and at the same time the third drive shaft 13 is rotated counterclockwise. Rotate the same angle in the direction.
Note that when the transport robot 1 is turned, the first to third drive shafts 11 to 13 may be simultaneously rotated in the same direction by the same angle in the home position state.

  As described above, in the present embodiment, the upper transport mechanism 1A configured by the first and second upper drive arms 21 and 22 fixed to the first and second drive shafts 11 and 12; , The lower transport mechanism 1B configured by the first and second lower drive arms 51 and 52 fixed to the second and third drive shafts 12 and 13, and these first to third drives Since the shafts 11 to 13 are provided concentrically, the upper transport mechanism 1 </ b> A and the lower transport mechanism 1 </ b> B are arranged on the side with respect to the first to third drive shafts 11 to 13 and operated. Thus, the throughput can be improved by simultaneously transporting a plurality of transported objects, and the height of the transport robot and the vacuum device in which the transport robot is disposed can be kept low. It is also possible to transport the transported object in a large vacuum chamber.

The present invention is not limited to the above-described embodiment, and various changes can be made.
For example, in the above embodiment, the distance between the axes of the corresponding arms of the upper transport mechanism 1A and the lower transport mechanism 1B is the same, but the present invention is not limited to this, and the upper transport mechanism 1A and the lower The distance between the axes of each arm may be different from that of the transport mechanism 1B.
Furthermore, in the above-described embodiment, each of the end effectors is provided with two mounting portions. However, the present invention is not limited to this, and one or three or more can be provided.

DESCRIPTION OF SYMBOLS 1 ... Transfer robot 1A ... Upper transfer mechanism 1B ... Lower transfer mechanism 4 ... First upper parallel crank mechanism 5 ... Second upper parallel crank mechanism 6 ... First lower parallel crank mechanism 7 ... Second lower side Parallel crank mechanism 10 ... board 11 ... first drive shaft 12 ... second drive shaft 13 ... third drive shaft 21 ... first upper drive arm 22 ... second upper drive arm 40 ... upper end effector (upper side) (Transport section)
51 ... First lower drive arm 52 ... Second lower drive arm 70 ... Lower end effector (lower transport section)

Claims (3)

First, second and third drive shafts provided so as to be rotatable in a horizontal plane around a predetermined rotation axis;
A first upper drive arm fixed to the first drive shaft; a second upper drive arm fixed to the second drive shaft below the first upper drive arm;
A first upper parallel crank mechanism comprising a first upper driven arm and a second upper driven arm, which are rotatably connected to the distal ends of the first and second upper drive arms, respectively, in a horizontal plane;
A third upper driven arm disposed above the first upper parallel crank mechanism and rotatably connected to the second upper driven arm and both ends of the second upper driven arm in a horizontal plane. And a fourth upper driven arm, and a second upper driven arm that is rotatably connected to the distal ends of the third upper driven arm and the fourth upper driven arm in a horizontal plane, respectively. A parallel crank mechanism;
An upper transport mechanism having an upper transport section attached to the tip of the fifth upper driven arm;
A first lower drive arm fixed to the third drive shaft below the second upper drive arm; a lower side of the second upper drive arm and of the first lower drive arm; A second lower drive arm fixed on the second drive shaft at a predetermined angle with respect to the second upper drive arm on the upper side;
A first lower parallel crank comprising a first lower driven arm and a second lower driven arm that are rotatably connected to the front ends of the first and second lower drive arms in a horizontal plane, respectively. Mechanism,
A second lower driven arm, a third lower driven arm and a fourth lower driven arm, which are rotatably connected in a horizontal plane at both ends of the second lower driven arm, A second lower parallel crank mechanism comprising a fifth lower driven arm rotatably connected in a horizontal plane to the distal ends of the third lower driven arm and the fourth lower driven arm;
The tip of the fifth lower driven arm is provided at a height position between the first upper parallel crank mechanism and the second upper parallel crank mechanism so as not to contact other members. and lower conveying mechanism having a lower conveying section has, have a,
When expanding and contracting the upper transport mechanism, the second drive shaft and the third drive shaft are rotated in the same direction, and when expanding and contracting the lower transport mechanism, the first drive shaft and the first drive shaft A transfer robot configured to rotate two drive shafts in the same direction . The upper conveyance unit and the lower conveyance unit, the transfer robot according to claim 1 Symbol mounting each have two mounting portions. A vacuum chamber;
The vacuum apparatus which has the conveyance robot of any one of Claim 1 or Claim 2 provided in the said vacuum chamber.

Images