JP5858355B2 - Workpiece conveying apparatus and conveying method - Google Patents

Description

  The present invention relates to a workpiece conveying device and a conveying method, and more particularly to a conveying device and a conveying method for loading / discharging a thin plate-shaped workpiece with respect to a liquid in a storage tank.

  For example, a thin plate-like workpiece such as a printed circuit board or a lead frame is provided with a process of charging / discharging the storage tank liquid in a series of manufacturing processes, such as a plating process and a cleaning process.

  Here, the conventional example of the conveying apparatus which inputs / discharges the workpiece | work with respect to the liquid of a storage tank is shown below. 6 and 7 show an example of a horizontal rail type conveying apparatus 100 (see Patent Document 1). FIG. 8 shows an example of an inclined rail type conveying apparatus 200 (see Patent Document 2). FIG. 9 is an example of a rail lift type conveying apparatus 300 (see Patent Document 3).

JP 2000-20993 A JP-A-8-199398 Japanese Utility Model Publication No. 6-38274

  Here, in the transport apparatus 100 described in Patent Document 1, the end portions 102a and 102a of the workpiece (here, the printed circuit board 102) are held on the transport surfaces of the substrate placement sections 101a and 101b. And the printed circuit board 102 is provided with the structure moved to the next process, ie, the next process along the guide rails 101 and 101 by the conveyance pusher 103 (refer FIG. 6, 7). 7A is a front view (schematic diagram) of the transfer device 100, and FIG. 7B is a side view (schematic diagram). In the case of a horizontal rail type transfer device exemplified by the transfer device 100, the work (printed circuit board 102) is stored in the storage tank 104 at the entrances 104 a and 104 b of the storage tank 104 storing the liquid L as shown in FIG. A gap is needed to enter and exit. Therefore, considering the deflection of the workpiece, the opening shape of the entrances 104a and 104b is designed to be large, so there is a problem that the amount of liquid leakage (shown by L1 and L2 in FIG. 7) is large. Further, when the leaked liquid is placed on the workpiece, there is a problem that the deflection of the workpiece increases due to the mass of the liquid, and there is a risk of dropping from the guide rails 101 and 101.

  Moreover, as for the conveying apparatus 200 of patent document 2, the liquid (here electrodeposition material 202) is stored in the storage tank (here electrodeposition tank 201). The workpiece W is put into the storage tank (electrodeposition tank 201) using the inclined rail 203 with respect to this storage tank (electrodeposition tank 201). Next, the workpiece W is moved while being immersed in the liquid (electrodeposition material 202) in the storage tank (electrodeposition tank 201). Then, the structure which discharges | emits the workpiece | work W from the storage tank (electrodeposition tank 201) using the inclination rail 204 is provided (refer FIG. 8). In the case of the inclined rail type transfer device exemplified in the transfer device 200, the amount of liquid leakage can be reduced compared to the horizontal rail type transfer device, and a thin plate-like workpiece can be formed by gradually charging and discharging. Can reduce stress. However, there is a problem that the overall length of the apparatus becomes long due to the configuration in which the inclined rail is provided.

  In addition, in the transport apparatus 300 described in Patent Document 3, a rotation shaft 305 is attached to a platform 303 that can be raised and lowered via an arm 304. A work holding portion (here, a printed board holder 307) is mounted on a bearing 306 rotatable around a rotation shaft 305, and a work (here, a printed board) is inserted therein. In this way, the workpiece is immersed in the liquid L, and after the cleaning, the workpiece is taken out (see FIG. 9). In the case of the lifting rail type transfer device exemplified in the transfer device 300, the liquid mass / liquid resistance is applied to the entire surface of the thin plate-like workpiece during the lifting, so that the bending of the workpiece increases and breaks, or There was a problem that there was a risk of falling off the work holding part.

  The present invention has been made in view of the above circumstances. In other words, the load on the workpiece during charging / discharging of the liquid can be reduced to prevent breakage of the workpiece and drop-off from the device, the amount of liquid leaking from the storage tank can be reduced, and the overall length of the device can be shortened. It is an object of the present invention to provide a transporting device that can perform the above.

  As an embodiment, the above-described problem is solved by a solution as disclosed below.

The disclosed transport apparatus includes a work holding means that is rotatably supported and has a holding unit that holds the work in a transport apparatus that inputs and discharges a plate-shaped work with respect to the liquid in the storage tank. the workpiece holding means is configured to have a pair of holding surfaces that face perpendicular to the rotation axis, the rotary shaft is located in the plane so as to be interposed the pair of holding surfaces, said holding portion Each of the holding surfaces, the two opposing sides of the workpiece are held between the pair of holding surfaces, and the workpiece holding means holding the workpiece is rotated to remove the workpiece from the liquid in the storage tank. It is a requirement to input and discharge at an angle with respect to.

  According to the disclosed transfer device, it is possible to reduce the load on the workpiece when the liquid is charged / discharged, and to prevent the workpiece from being broken or detached from the device. In addition, the amount of liquid leaking from the storage tank can be reduced, and the overall length of the apparatus can be shortened.

It is the schematic (front view) which shows the example of the conveying apparatus which concerns on 1st embodiment of this invention. It is the schematic (perspective view) which shows the example of the 1st workpiece | work holding means of the conveying apparatus shown in FIG. It is explanatory drawing which shows a locus | trajectory when rotating the 1st workpiece | work holding means of the conveying apparatus shown in FIG. It is the schematic (front view) which shows the example of the conveying apparatus which concerns on 2nd embodiment of this invention. It is the schematic (sectional drawing) which shows the example of the horizontal rail of the conveying apparatus shown in FIG. It is the schematic which shows the example of the conveying apparatus which concerns on the conventional embodiment. It is the schematic (front view) of the conveying apparatus shown in FIG. It is the schematic which shows the other example of the conveying apparatus which concerns on conventional embodiment. It is the schematic which shows the other example of the conveying apparatus which concerns on conventional embodiment.

(First embodiment)
Hereinafter, a first embodiment of the present invention will be described in detail with reference to the drawings. Fig.1 (a) is a front view (schematic diagram) which shows the example of the conveying apparatus 1 which concerns on this embodiment, and FIG.1 (b) is the side view (schematic diagram). Note that components having the same function are denoted by the same reference symbols throughout the drawings for describing the embodiments, and the repetitive description thereof may be omitted.

  The transfer device 1 according to the present embodiment is a device that inputs and discharges a thin plate-like workpiece W with respect to the liquid L in the storage tank 30. Here, a description will be given by taking a printed board as an example of the thin plate-like workpiece W. In addition, as the transfer device 1, a device that inputs and discharges the printed circuit board with respect to the plating solution in the plating tank or a device that inputs and discharges the printed circuit board with respect to the cleaning solution in the cleaning tank as the printed circuit board production line. A case will be described as an example.

  As shown in FIG. 1, the transport apparatus 1 according to the present embodiment includes a first work holding means 10 and a second work holding means 20 as work holding means. Here, an enlarged view (perspective view) of the first work holding means 10 is shown in FIG. 2, and its configuration and operation will be described.

As shown in FIG. 2, the first workpiece holding means 10 has a pair of opposing holding surfaces 10 a and 10 b that sandwich and hold the workpiece W, and the in-plane direction of the holding surfaces 10 a and 10 b, that is, the direction of the arrow T Is supported by a rotating shaft 13 so as to be rotatable. Examples of configurations for holding the workpiece W, the first workpiece holding means 10, two holding portions (first holding portion 11 and the second holding portion 12) is axisymmetric with respect to the axis of rotation 13 In the position. Each of the first holding unit 11 and the second holding unit 12 is formed in a groove shape that can be held by inserting two opposing sides of the workpiece W. According to this, the workpiece W can be held by the contact of only the side portion (that is, only the end portion) without contacting the center portion of the workpiece W.

  Here, a locus (particularly, a locus of the first holding unit 11) when the first work holding means 10 is rotated is shown in FIG. As shown in FIG. 3, when the first work holding means 10 is rotated in the direction of arrow T by a predetermined angle (here, 180 [°]), the first holding unit 11 moves from the outside of the liquid L to the inside. And the same arrangement as the second holding part 12 before rotation. On the other hand, the 2nd holding | maintenance part 12 moves outside out of the liquid L, and becomes the same arrangement | positioning as the 1st holding | maintenance part 11 before rotation. Thus, the first work holding means 10 is arranged so that when one of the first holding part 11 or the second holding part 12 is located in the liquid L, the other is located outside the liquid L. It is installed. The rotating shaft 13 is disposed at a position higher than the liquid level of the liquid L.

  According to this configuration, the held work W is thrown into the liquid L in the storage tank 30 by rotating the first work holding means 10 in the direction of arrow T by a predetermined angle (here, 180 [°]). Is obtained. At this time, the workpiece W is charged / discharged with respect to the liquid from one side of the front which is not held with respect to the liquid L with an angle larger than 0 [°] and smaller than 180 [°]. It can be performed. Accordingly, since the liquid mass and resistance applied to the workpiece W can be reduced and the load on the workpiece W can be reduced, it is possible to solve the problems such as breakage of the workpiece W and dropping from the apparatus (rail, holding unit, etc.). it can. In addition, the workpiece transfer surface can be classified by the height difference between inside and outside the storage tank, and it is not necessary to provide an opening through which the work enters and exits the storage tank, so that the amount of liquid leakage can be reduced. Furthermore, since it is not necessary to provide an inclined rail that allows the work to enter and exit the storage tank, the overall length of the apparatus can be shortened as compared with a conventional inclined rail type apparatus.

  On the other hand, the second workpiece holding means 20 is disposed so as to face the first workpiece holding means 10. More specifically, as shown in FIG. 1, in the liquid L, the opening 12 a of the second holding part 12 in the first work holding means 10 and the first in the second work holding means 20. It arrange | positions so that the opening part 21a of the holding | maintenance part 21 may oppose (facing). In addition, since it is axially symmetric with respect to the rotating shaft 13, the same operation and effect can be obtained even if the second holding portion 12 is replaced with the first holding portion 11 in the first work holding means 10. Further, since the axis is symmetrical with respect to the rotating shaft 23, the same action and effect can be obtained even if the first holding portion 21 is replaced with the second holding portion 22 in the second work holding means 20.

  Note that the configuration and operation of the second workpiece holding means 20 are the same as those of the first workpiece holding means 10, and thus the description thereof is omitted.

  Next, with reference to FIG. 1, a transport method for loading and discharging a thin plate-like work W with respect to the liquid L in the storage tank 30 using the transport apparatus 1 having the above-described configuration will be described.

  First, a step of holding the workpiece W (referred to as “work W1” for convenience of description) in the first holding unit 11 of the first workpiece holding means 10 is executed (step A1). More specifically, the workpiece W1 whose left and right sides are supported by the transport rail R1 is pushed by a pusher (not shown) from the rear side (in the direction of arrow S1 in FIGS. 1 and 2). As a result, the workpiece W is caused to enter the groove from the opening 11 a of the first holding portion 11 in the first workpiece holding means 10 and is held by the first holding portion 11. Although the first holding unit 11 is used here, the second holding unit 12 may be used.

  After the step A1, the first work holding means 10 is rotated by a predetermined angle (here, 180 [°]) (in the direction of arrow T), and the work W1 held by the first holding unit 11 is made of the liquid L. The step of throwing in is executed (step A2). At this time, the first holding unit 11 moves from the outside of the liquid L to the inside, and the second holding unit 12 moves from the inside of the liquid L to the outside.

  After the step A2, in the liquid L, the step of transferring and holding the workpiece W1 from the holding portion of the first workpiece holding means to the holding portion of the opposing second workpiece holding means 20 is executed ( Step A3). The holding part of the first work holding means is the first holding part 11, but may be the second holding part 12. Further, the holding part of the second work holding means 20 is the first holding part 21, but may be the second holding part 22.

  Here, the transfer from the holding part of the first work holding means 10 to the holding part of the second work holding means 20 is performed by pushing the work W1 from one side of the rear side by a pusher (not shown). (The direction of arrow S2 in FIG. 2). Therefore, it is preferable that the holding part of the first work holding means 10 and the holding part of the second work holding means 20 to be transferred are arranged so that the work transfer surfaces have the same height.

  On the other hand, after step A2, outside the liquid L, another work W (referred to as “work W2” for convenience of description) is held by the holding part (here, the second holding) of the first work holding means 10. Step 12) holds the step (Step A4).

  Next, after the step A3 and after the step A4, the first work holding means 10 is rotated by a predetermined angle (here, 180 [°]) (in the direction of the arrow T), and the second holding unit. The step of putting the work W2 held by the liquid 12 into the liquid L is executed (step A5).

  On the other hand, after step A3, the second work holding means 20 is rotated by a predetermined angle (here, 180 [°]) (in the direction of arrow T), and the work W1 held by the first holding unit 21 is liquidized. A step of discharging outside L is executed (step B1). At this time, the first holding unit 21 moves from the inside of the liquid L to the outside, and the second holding unit 22 moves from the outside to the inside of the liquid L.

  After step B1, a step of taking out the workpiece W1 from the first holding portion 21 of the second workpiece holding means 20 is executed (step B2). More specifically, the workpiece W1 held by the first holding portion 21 in the second workpiece holding means 20 is pushed by a pusher (not shown) from the rear side (in the direction of arrow S3 in FIG. 1). ), Advance from the first holding unit 21. Thereby, the workpiece W1 is moved to the transport rail R2, and the left and right sides are supported by the transport rail R2. Further, the workpiece W1 is supported by the transport rail R2, and is pushed by a pusher (not shown) from one side of the rear, and moves to the next manufacturing process.

  Next, after step A5 and after step B1, in the liquid L, the work W2 is moved from the holding part (here, the second holding part 12) of the first work holding means 10 to the second. The step of moving to the holding part (here, the second holding part 22) of the second work holding means 20 and holding it is executed (step A6). Since this step is the same as step A3, detailed description is omitted.

  Next, after the step A6 and after the step B2, the second work holding means 20 is rotated by a predetermined angle (here, 180 [°]) (in the direction of the arrow T), and the second holding unit A step of discharging the workpiece W2 held by the workpiece 22 out of the liquid L is executed (step B3).

  After step B3, a step of taking out the workpiece W2 from the second holding portion 22 of the second workpiece holding means 20 is executed (step B4). More specifically, the workpiece W2 held by the second holding portion 22 in the second workpiece holding means 20 is pushed by a pusher (not shown) from the rear side (in the direction of arrow S3 in FIG. 1). ), Advance from the second holding unit 22. Thereby, the workpiece W2 is moved to the transport rail R2, and the left and right sides are supported by the transport rail R2. Furthermore, the workpiece W2 is supported by the transport rail R2, is pushed by a pusher (not shown) from one side of the rear, and moves to the next manufacturing process.

(Second embodiment)
Hereinafter, a second embodiment of the present invention will be described in detail with reference to the drawings. FIG. 4 is a front view (schematic diagram) illustrating an example of the transport apparatus 1 according to the present embodiment. Since the side view is the same as FIG. 1B, the description is omitted.

  The transport apparatus 1 according to the second embodiment has the same basic configuration as that of the first embodiment described above, but differs in that it includes a horizontal rail 31 (details will be described later). Hereinafter, with reference to the drawings, the present embodiment will be described in detail focusing on the difference.

  As shown in FIG. 4, in the transport device 1 according to the present embodiment, a horizontal rail 31 through which the workpiece W passes is provided between the first workpiece holding means 10 and the second workpiece holding means 20. . Here, a cross-sectional view (enlarged view) of the horizontal rail 31 is shown in FIG. As shown in FIG. 5, the horizontal rail 31 has a configuration in which members having a substantially L-shaped cross section are arranged to face each other so that both the left and right sides of the workpiece W can be supported. A pusher (not shown) is disposed between the opposing members so as to be movable in the longitudinal direction. The height of the support surface 31c of the horizontal rail 31 is the same as the height of the first holding part 11 or the second holding part 12 in the first work holding means 10 when it is positioned in the liquid L by rotation. It is comprised so that it may become. Furthermore, the height of the support surface 31c is the same as the height of the first holding part 21 or the second holding part 22 in the second work holding means 20 when it is positioned in the liquid L by rotation. It is configured.

  According to this configuration, the workpiece W can be transferred from the first workpiece holding means 10 to the horizontal rail 31 and held. Further, the workpiece W can be held while being moved on the horizontal rail 31. Furthermore, the workpiece W can be transferred from the horizontal rail 31 to the second workpiece holding means 20 and held. Further, by setting the length of the horizontal rail 31 to a desired length, the time for immersing the workpiece W in the liquid L can be set to a desired length without increasing the tact time. A remarkable effect is obtained.

  Next, with reference to FIG. 4, a transport method for loading and discharging a thin plate-like work W with respect to the liquid L in the storage tank 30 using the transport apparatus 1 having the above configuration will be described. Here, the workpiece conveyance method using the conveyance device 1 according to the second embodiment has the same basic configuration as the workpiece conveyance method using the conveyance device 1 according to the first embodiment described above. Therefore, it demonstrates in detail focusing on a difference.

  First, step A1 is executed. The step A1 is the same as the step A1 according to the first embodiment.

  Step A2 is executed after Step A1. The step A2 is the same as the step A2 according to the first embodiment.

  After the step A2, a step of transferring the workpiece W1 from the holding portion of the first workpiece holding means 10 to the horizontal rail 31 and supporting it in the liquid L is executed (step A3 '). The holding part of the first work holding means 10 is the first holding part 11 as an example, but may be the second holding part 12.

  Here, the transfer from the holding portion of the first workpiece holding means 10 to the horizontal rail 31 is performed by pushing the workpiece W1 from one side of the rear side by a pusher (not shown) (first implementation described above). The same as the arrow S2 direction in FIG. Therefore, the holding part of the first work holding means 10 to be transferred and the support part (here, the support surface 31c) of the horizontal rail 31 may be arranged so that the work transfer surfaces are at the same height. Is preferred.

  After the step A3 ', a step of supporting the workpiece W1 by the horizontal rail 31 and moving the workpiece W1 on the horizontal rail 31 from the start end portion 31a to the end portion 31b at a predetermined speed is executed (step C1). The movement is performed by pushing the workpiece W1 from one side of the rear side by a pusher (not shown) (in the direction of arrow S2 in FIG. 4). Here, the moving speed of the workpiece W1 is set according to the tact time in the production line. On the other hand, by appropriately setting the length of the horizontal rail 31, it is possible to adjust the time for which the workpiece W1 is immersed in the liquid L. That is, the remarkable effect that the time for immersing the workpiece W in the liquid L can be set to a desired length without increasing the tact time is obtained.

  After Step C1, a step of transferring and holding the workpiece W1 from the horizontal rail 31 to the holding portion of the second workpiece holding means 20 in the liquid L is performed (Step C2). The holding part of the second work holding means 20 is the first holding part 21 as an example, but may be the second holding part 22.

  Here, the transfer from the horizontal rail 31 to the holding portion of the second workpiece holding means 20 is performed by pushing the workpiece W1 from one side of the rear side by a pusher (not shown) (in the direction of arrow S2 in FIG. 4). ). Therefore, the supporting portion (here, the supporting surface 31c) of the horizontal rail 31 to be transferred and the holding portion of the second workpiece holding means 20 may be arranged so that the workpiece conveying surface has the same height. Is preferred.

  Step B1 is executed after Step C2. The step B1 is the same as the step B1 according to the first embodiment.

  Step B2 is executed after Step B1. The step B2 is the same as the step B2 according to the first embodiment.

  Step A4 is executed after Step A2. Step A4 is the same as step A4 according to the first embodiment.

  Step A5 is executed after step A3 'and after step A4. Step A5 is the same as Step A5 according to the first embodiment.

  After the step A5 and after the step C1, in the liquid L, the work W2 is moved from the holding part (here, the second holding part 12) of the first work holding means 10 to the horizontal rail 31. The step of changing to and supporting is executed (step A6 ′). Since this step is the same as step A3 'described above, detailed description thereof is omitted.

  After the step A6 ', a step of supporting the workpiece W2 by the horizontal rail 31 and moving the workpiece W2 on the horizontal rail 31 from the start end portion 31a to the end portion 31b at a predetermined speed is executed (step C3). Since this step is the same as step C1, detailed description is omitted.

  After the step C3, in the liquid L, the step of transferring and holding the workpiece W2 from the horizontal rail 31 to the holding portion (here, the second holding portion 22) of the second workpiece holding means 20 is executed. (Step C4). In addition, since this step is the same as that of the said step C2, detailed description is abbreviate | omitted.

  Step B3 is executed after Step B2 and after Step C4. The step B3 is the same as the step B3 according to the first embodiment.

  Step B4 is executed after Step B3. Step B4 is the same as Step B4 according to the first embodiment.

  As described above, according to the disclosed transfer device, it is not necessary to provide an opening for arranging the horizontal rail that enters and exits the storage tank, in particular, as compared with the conventional transfer device of the horizontal rail system. The amount of liquid leaking from the tank can be reduced.

  In addition, since it is not necessary to provide an inclined rail as compared with a conventional inclined rail type conveying apparatus, the entire length of the apparatus can be shortened.

In particular, compared to conventional horizontal rail type transfer devices and rail lifting type transfer devices, it reduces the load on the workpiece when it is charged and discharged into the liquid. It is possible to prevent the workpiece from falling off.
In particular, in the case of a thin plate-shaped workpiece, since the workpiece is easily broken, the effect is remarkable.

  Furthermore, since the liquid on the printed circuit board flows down due to the posture change during the conveyance (turning) of the workpiece exemplified in the printed circuit board, the amount of air used in the liquid draining process provided until the next process is reduced. Can do. Therefore, it is possible to reduce energy used in the liquid draining process.

  Needless to say, the present invention is not limited to the embodiment described above, and various modifications can be made without departing from the present invention. In particular, the printed circuit board has been described as an example of the work, but the present invention is not limited to this, and can be applied to various plate-like works such as a lead frame or other shapes. .

  Moreover, although the structure provided with the 1st holding | maintenance part and the 2nd holding | maintenance part was mentioned as an example and demonstrated as a holding | maintenance part in a workpiece | work holding means, it is not limited to this, It comprises by one holding | maintenance part. It is also possible. Alternatively, the work holding means may be configured to include three or more holding portions.

  Moreover, although the structure provided with the 1st workpiece holding means and the 2nd workpiece holding means was mentioned as an example and demonstrated as a workpiece | work holding means, it is not limited to this, It comprises by one workpiece holding means. Is also possible. As an example, when the work holding means is rotated by a predetermined angle, the work to be held is put into the liquid in the storage tank, and when the work holding means is further rotated by a predetermined angle, the work to be held is removed from the liquid in the storage tank. A configuration may be conceived in which it is disposed so as to be discharged. According to this, the work holding means is rotated by a predetermined angle, and the work to be held is put into the liquid in the storage tank, and the work holding means is further rotated by the predetermined angle to hold the work to be held in the liquid in the storage tank. A step of discharging to the outside can be realized.

  Further, as the work holding means, a plurality of first work holding means and second work holding means may be provided in parallel. According to this, it becomes possible to increase the number of workpieces conveyed per unit time (number of processes).

DESCRIPTION OF SYMBOLS 1 Transfer apparatus 10 1st work holding means 11 1st holding part 12 of 1st work holding means 2nd holding part 13 of 1st work holding means 13 Rotating shaft 20 of 1st work holding means 2nd Work holding means 21 First holding portion 22 of second work holding means Second holding portion 23 of second work holding means Rotating shaft 30 of second work holding means Storage tank 31 Horizontal rail W Work L Liquid

Claims (9)

In a transfer device that inputs and discharges plate-like workpieces to and from the liquid in the storage tank,
A work holding means having a holding part for holding the work and being rotatably supported,
The workpiece holding means is configured to have a pair of holding surfaces that face perpendicular to the rotation axis, the rotary shaft is located in the plane so as to be interposed the pair of holding surfaces,
The holding portion is formed on each of the holding surfaces, holds two opposite sides of the workpiece between the pair of holding surfaces,
A transfer apparatus characterized in that the work holding means for holding the work is rotated so that the work is charged and discharged at an angle with respect to the liquid in the storage tank. The workpiece holding means is arranged so that when the workpiece is rotated by a predetermined angle, the holder is inserted into the liquid, and when the workpiece is further rotated by a predetermined angle, the holder is discharged out of the liquid. The conveying apparatus according to claim 1, wherein the conveying apparatus is provided. The work holding means includes a first holding portion to the position of the axisymmetric a second holding portion with respect to the rotation axis as the holding portion, the holding portion of the first or the second holding portion The transport apparatus according to claim 2, wherein when one of the two is positioned in the liquid, the other is positioned outside the liquid. As the work holding means, a first work holding means and a second work holding means are provided, and one of the first holding part or the second holding part in the first work holding means, and the first work holding means One of the first holding part or the second holding part in the second work holding means is opposed to the liquid in the liquid, and the first holding part or the second in the first work holding means. And the other of the first holding part or the second holding part of the second work holding means is disposed so as to face each other in the liquid. The conveying device according to claim 3. 5. The transfer apparatus according to claim 4, wherein a horizontal rail through which the work passes is provided between the first work holding means and the second work holding means. In a transfer method for loading and discharging a plate-shaped workpiece to and from the liquid in the storage tank,
The workpiece is held between the pair of holding surfaces by a holding portion formed on the holding surface of the workpiece holding means having a pair of holding surfaces opposed to the rotation axis orthogonal to the rotation axis provided at the in-plane position. The workpiece holding means is rotated in a state where the two opposite sides are held, and the workpiece is provided with an angle with respect to the liquid in the storage tank. Method. In a transfer method for loading and discharging a plate-shaped workpiece to and from the liquid in the storage tank,
The workpiece is held between the pair of holding surfaces by a holding portion formed on the holding surface of the workpiece holding means having a pair of holding surfaces opposed to the rotation axis orthogonal to the rotation axis provided at the in-plane position. Holding two opposite sides of
Rotating the work holding means by a predetermined angle, and throwing the held work into the liquid with an angle;
Rotating the work holding means by a predetermined angle and discharging the held work out of the liquid with an angle; and
A conveying method comprising: In a transfer method for loading and discharging a plate-shaped workpiece to and from the liquid in the storage tank,
(A1) A first workpiece formed on the first holding surface of the first workpiece holding means having a pair of first holding surfaces facing each other at right angles to a rotation axis provided at an in-plane position with respect to one workpiece. Holding the two opposite sides of the one workpiece between the pair of first holding surfaces by one of the holding portion or the second holding portion;
(A2) After the step A1, the first work holding means is rotated by a predetermined angle, and the one work to be held is thrown into the liquid with an angle; and
(A3) After step A2, in the liquid, the one workpiece is provided at an in- plane position from one of the first holding portion or the second holding portion of the first workpiece holding means. The second workpiece holding means having a pair of second holding surfaces opposed perpendicular to the rotation axis is transferred to one of the first holding portion and the second holding portion formed on the second holding surface. Holding the two opposite sides of the one workpiece between the pair of second holding surfaces;
(A4) After the step A2, with respect to another work, the other of the first holding part or the second holding part of the first work holding means, between the pair of first holding surfaces. Holding two opposite sides of the other workpiece;
(A5) After the steps A3 and A4, the first work holding means is rotated by a predetermined angle, and the other work to be held is thrown into the liquid at an angle;
(B1) After the step A3, rotating the second workpiece holding means by a predetermined angle and discharging the one workpiece to be held at an angle to the outside of the liquid;
(B2) After the step B1, the step of taking out the one workpiece from one of the first holding portion or the second holding portion of the second workpiece holding means;
(A6) After the steps A5 and B1, in the liquid, the second work is moved from the other of the first holding part or the second holding part of the first work holding means to the second Transferring to the other of the first holding portion or the second holding portion of the workpiece holding means and holding the two opposite sides of the other workpiece between the pair of second holding surfaces;
(B3) After the steps A6 and B2, the second work holding means is rotated by a predetermined angle, and the other work to be held is discharged out of the liquid at an angle;
(B4) After the step B3, taking out the other workpiece from the first holding portion or the other of the second holding portions of the second workpiece holding means;
A conveying method comprising: In a transfer method for loading and discharging a plate-shaped workpiece to and from the liquid in the storage tank,
(A1) A first workpiece formed on the first holding surface of the first workpiece holding means having a pair of first holding surfaces facing each other at right angles to a rotation axis provided at an in-plane position with respect to one workpiece. Holding the two opposite sides of the one workpiece between the pair of first holding surfaces by one of the holding portion or the second holding portion;
(A2) After the step A1, the first work holding means is rotated by a predetermined angle, and the one work to be held is thrown into the liquid with an angle; and
(A3 ′) After step A2, in the liquid, move the one work from one of the first holding part or the second holding part of the first work holding means to a horizontal rail. Step to change and support,
(C1) After the step A3 ′, the one work is supported by the horizontal rail and moved on the horizontal rail;
(C2) After the step C1, in the liquid, the second work has a pair of second holding surfaces facing each other perpendicularly to a rotation axis provided at an in-plane position from the horizontal rail. Move to one of the first holding part or the second holding part formed on the second holding surface of the work holding means, and the two opposite sides of the one work between the pair of second holding surfaces Holding the step;
(B1) After the step C2, the second work holding means is rotated by a predetermined angle, and the one work to be held is discharged out of the liquid with an angle;
(B2) After the step B1, the step of taking out the one workpiece from one of the first holding portion or the second holding portion of the second workpiece holding means;
(A4) After the step A2, with respect to another work, the other of the first holding part or the second holding part of the first work holding means, between the pair of first holding surfaces. Holding two opposite sides of the other workpiece;
(A5) After the steps A3 ′ and A4, the first work holding means is rotated by a predetermined angle, and the other work to be held is thrown into the liquid at an angle;
(A6 ′) After the steps A5 and C1, in the liquid, the other work is moved from the other of the first holding part or the second holding part of the first work holding means to the horizontal rail. Step to change to support,
(C3) After the step A6 ′, the other work is supported by the horizontal rail and moved on the horizontal rail;
(C4) After step C3, in the liquid, the other workpiece is moved from the horizontal rail to the first holding portion of the second workpiece holding means or the other of the second holding portions. Changing, holding the two opposite sides of the other workpiece between the pair of second holding surfaces;
(B3) After the steps B2 and C4, the second work holding means is rotated by a predetermined angle, and the other work to be held is discharged out of the liquid with an angle;
(B4) After the step B3, taking out the other workpiece from the first holding portion or the other of the second holding portions of the second workpiece holding means;
A conveying method comprising:

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