JP5766860B2 - Magnetic head suspension - Google Patents

Description

  The present invention relates to a magnetic head suspension for supporting a magnetic head slider that reads and / or writes data to a storage medium such as a hard disk.

  As the capacity of the magnetic disk drive increases, further improvement in the positioning accuracy of the magnetic head slider with respect to the target track is required. For this reason, the main actuator such as a voice coil motor or the like causes coarse movement of the magnetic head slider in the seek direction. In addition, a magnetic head suspension has been proposed that enables fine movement of the magnetic head slider in the seek direction by a piezoelectric element acting as a sub-actuator.

  For example, in Patent Document 1 below, a support unit that is driven in a seek direction by a main actuator by a voice coil motor or the like, a load bending unit that generates a pressing load, and the support unit are supported by the load bending unit. A magnetic head suspension comprising: a load beam portion; and a flexure portion fixed to the support portion and a lower surface (disk facing surface) of the load beam portion, wherein a flexure substrate of the flexure portion is attached to the support portion. A support portion fixing region to be fixed, a load beam portion fixing region to be fixed to the load beam portion, a pair of left and right longitudinal beams extending from the load beam portion fixing region to a distal end side, and tips of the pair of left and right longitudinal beams And a pair of left and right piezoelectric elements fixed to the pair of longitudinal beams. Emissions have been disclosed.

  In the magnetic head suspension described in Patent Document 1, the entire magnetic head suspension can be coarsely moved in the seek direction by the main actuator, and the head mounting region can be finely moved in the seek direction by the pair of piezoelectric elements. Can do.

  However, since the entire pair of piezoelectric elements is supported by the pair of longitudinal beams in the flexure substrate, when the pair of piezoelectric elements is expanded and contracted to move the head mounting region in the seek direction, The reaction force from the pair of piezoelectric elements is applied to the base end side of the flexure substrate (that is, the load beam portion fixing region and the support portion fixing region). As a result, the positioning accuracy of the magnetic head slider is increased. And the vibration characteristics of the magnetic head suspension may be deteriorated.

  That is, the flexure substrate has a relatively low rigidity in order to flexibly swing the head mounting area in the roll direction and the pitch direction. Therefore, as in the configuration described in Patent Document 1, when the pair of piezoelectric elements are supported by the pair of longitudinal beams of the flexure substrate as a whole, when the pair of piezoelectric elements expands and contracts, A portion of the flexure substrate located on the base end side from the pair of piezoelectric elements may be vibrated or displaced due to a reaction force. As a result, the positioning accuracy of the magnetic head slider is deteriorated and the vibration characteristics of the magnetic head suspension are deteriorated. The problem of incurring deterioration occurs.

  Also in Patent Document 2 below, the entire magnetic head suspension can be coarsely moved in the seek direction by a main actuator such as a voice coil motor, and the head mounting area can be finely moved in the seek direction by a pair of piezoelectric elements. Magnetic head suspensions have been proposed.

  However, also in the magnetic head suspension described in Patent Document 2, the whole of the pair of piezoelectric elements is supported by the flexure substrate in the flexure portion, and therefore, the same problem as in Patent Document 1 may occur.

JP 2001-216748 A JP 2010-146631 A

  The present invention has been made in view of the prior art, and in a magnetic head suspension capable of performing fine movement by a pair of piezoelectric elements in addition to coarse movement by a main actuator such as a voice coil motor, the vibration is generated at the time of fine movement by the pair of piezoelectric elements. The object is to prevent or reduce the deterioration of characteristics.

  In order to achieve the above object, the present invention has a load beam portion supported on a support portion that is swung around a swing center via a load bending portion, and a magnetic head slider on a flat plate-like main body portion of the load beam portion. A magnetic head suspension in which a flexure substrate supporting a flexure portion is supported, and the magnetic head slider can be finely moved in a seek direction by a pair of left and right piezoelectric elements, and the flexure substrate is connected to a disk surface in the main body portion. A load beam portion fixing region fixed in a superposed state on the opposite lower surface, a longitudinal beam extending from the load beam portion fixing region to the front end side, and supporting the magnetic head slider on the lower surface facing the disk surface and the disk An upper surface opposite to the surface is a head mounting region engaged with a first dimple formed in the main body, A head mounting region positioned on the distal end side in the suspension longitudinal direction from the distal end portion of the hand beam; and a pair of left and right connecting beams that connect the longitudinal beam and the head mounting region, wherein the pair of connecting beams are the longitudinal beam A pair of left and right width extending portions extending outward from the distal end of the suspension in the width direction of the suspension, and a pair of left and right longitudinal extending portions extending from the outer ends of the pair of width extending portions to the front end side of the suspension longitudinal direction. A pair of left and right tip side width direction extending portions extending inwardly in the suspension width direction from the tip end portions of the pair of longitudinally extending portions and coupled to the head mounting region, and the pair of piezoelectric elements The distal end side is fixed in a superposed state to the lower surface of the main body portion exposed through the surrounding region surrounded by the longitudinal beam, the pair of connecting beams, and the head mounting region, and the proximal end side is the pair. To provide a magnetic head suspension which is secured respectively in the width direction extending site.

  Preferably, a pair of left and right cutouts opened outward in the suspension width direction is provided at the distal end portion of the longitudinal beam connected to the pair of width extending portions.

Preferably, the body portion is provided with an opening penetrating vertically.
The opening has an edge at the distal end located on the proximal side in the suspension longitudinal direction from the distal end of the pair of piezoelectric elements, and an edge in the suspension width direction is outside the suspension width direction outside the edge of the pair of piezoelectric elements on the outer side in the suspension width direction. In the suspension width direction inwardly with respect to the pair of longitudinally extending portions, and the base end side edge is positioned on the suspension longitudinal direction proximal end side with respect to the distal ends of the pair of widthwise extending portions. Is done.

In one form, the piezoelectric element includes a lower surface side electrode layer and an upper surface side electrode provided on the piezoelectric element body, a lower surface facing the disk surface in the piezoelectric element body, and an upper surface opposite to the disk surface, respectively. And the flexure part is a wiring structure integrally provided on the lower surface of the flexure substrate, the insulating layer laminated on the lower surface of the flexure substrate, and the lower surface of the insulating layer And a wiring structure including a signal wiring for a magnetic head slider stacked on the bottom surface and a voltage supply wiring stacked on the lower surface of the insulating layer.
In this case, preferably, the piezoelectric element is fixed by a conductive adhesive in a state in which the upper surface side electrode layer is polymerized on the lower surface of the main body portion on the distal end side, and on the upper surface side on the proximal end side. The lower electrode layer is electrically connected to the voltage supply wiring by a conductive adhesive while the electrode layer is fixed to the lower surface of the pair of widthwise extending portions by an insulating adhesive. .

  Preferably, the main body portion protrudes from the pair of piezoelectric elements in a direction close to the disk surface on the proximal side in the suspension longitudinal direction, and is opposite to the disk surface of the longitudinal beam or the pair of connecting beams. A second dimple is provided that engages the upper surface of the side.

In the magnetic head suspension according to the present invention, the flexure substrate is fixed to the lower surface of the plate-like main body portion of the load beam portion opposite to the disk surface in a superposed state, and the load beam portion fixing region. A longitudinal beam extending toward the distal end; a head mounting region that supports a magnetic head slider; and a pair of left and right coupling beams that couple the longitudinal beam and the head mounting region; A pair of left and right width extending portions extending outward in the suspension width direction from the distal end portion, and a pair of left and right longitudinal extending portions extending from the outer end portion of the pair of width direction extending portions to the suspension longitudinal direction distal end side; A pair of left and right tip side widths extending inwardly in the suspension width direction from the tip ends of the pair of longitudinally extending portions and connected to the head mounting region Since it has the extending portion, and it is possible to effectively improve the flexibility of the roll and pitch directions of the head-mounting region.
In addition, the pair of piezoelectric elements are fixed in a superposed state on the lower surface of the main body portion, which is exposed through a surrounding region surrounded by the longitudinal beams, the pair of connecting beams, and the head mounting region. The end sides are respectively fixed to the pair of width direction extending portions. Accordingly, the head mounting region can be flexibly moved in the seek direction in accordance with the expansion / contraction operation of the pair of piezoelectric elements, and at that time, the magnetic head is caused by a reaction force accompanying the expansion / contraction operation of the pair of piezoelectric elements. It is possible to prevent the vibration characteristics of the suspension from being deteriorated as much as possible.

FIG. 1 is a top view of the magnetic head suspension according to the first embodiment of the present invention. FIG. 2 is a bottom view of the magnetic head suspension according to the first embodiment. FIG. 3 is a side view of the magnetic head suspension according to the first embodiment. 4A and 4B are a top view and a bottom view, respectively, of the flexure part in the magnetic head suspension according to the first embodiment. FIG. 5 is an enlarged view of a portion V in FIG. 6 is a vertical side view of the portion shown in FIG. FIGS. 7A and 7B are schematic plan views of the flexure substrate and the pair of piezoelectric elements in the magnetic head suspension according to the first embodiment, and supply voltage to the pair of piezoelectric elements, respectively. 2 shows an initial state where there is no voltage and a stretched state where voltage is supplied to the pair of piezoelectric elements. FIG. 8 is a top view of the magnetic head suspension according to the second embodiment of the present invention. FIG. 9 is a partial longitudinal sectional view of the magnetic head suspension according to the second embodiment and corresponds to FIG. FIG. 10 is a partial longitudinal sectional view of the magnetic head suspension according to the third embodiment of the present invention, corresponding to FIGS. 6 and 9. FIG. 11 is a top view of a magnetic head suspension according to the fourth embodiment of the present invention. FIG. 12 is a bottom view of the magnetic head suspension according to the fourth embodiment. FIG. 13 is a side view of the magnetic head suspension according to the fourth embodiment. 14A and 14B are a top view and a bottom view, respectively, of the flexure portion in the magnetic head suspension according to the fourth embodiment. FIG. 15 is an enlarged view of the XV portion in FIG. 16 is a longitudinal side view of the portion shown in FIG. FIG. 17 is a top view of a magnetic head suspension according to the fifth embodiment of the present invention. 18A and 18B are cross-sectional views taken along lines XVIII (a) -XVIII (a) and XVIII (b) -XVIII (b) in FIG. 17, respectively. FIG. 19 is a partial longitudinal sectional view of the magnetic head suspension according to the sixth embodiment of the present invention, corresponding to FIGS. 16 and 18 (a). 20 is a partial longitudinal sectional view of the magnetic head suspension according to the seventh embodiment of the present invention, corresponding to FIG. FIG. 21 is a top view of a magnetic head suspension according to the eighth embodiment of the present invention. FIG. 22 is an enlarged view of a portion XXII in FIG. FIG. 23 is a top view of the magnetic head suspension according to the ninth embodiment of the present invention. FIG. 24 is an enlarged view of a portion XXIV in FIG. 25 (a) and 25 (b) are end views of a first modification of a pair of piezoelectric elements to which the magnetic head suspension according to the present invention can be applied, as viewed from one side and the other side in the thickness direction.

Embodiment 1
Hereinafter, preferred embodiments of a magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
1 to 3 are a top view (a plan view viewed from the side opposite to the disk surface), a bottom view (a bottom view viewed from the disk surface side), and a side surface of the magnetic head suspension 1A according to the present embodiment, respectively. The figure is shown. In FIG. 2, a circle mark indicates a welding point.

  As shown in FIGS. 1 to 3, the magnetic head suspension 1A presses a support 10 that is directly or indirectly rocked around a rocking center by a main actuator and a magnetic head slider 50 toward the disk surface. A load bending portion 20 that generates a load for the purpose, a load beam portion 30 that is supported by the support portion 10 via the load bending portion 20 and transmits the load to the magnetic head slider 50, and the magnetic head slider 50. And a pair of left and right piezoelectric elements 60 for finely moving the magnetic head slider 50 in the seek direction.

  The support portion 10 is a member that supports the load beam portion 30 via the load bending portion 20 in a state where the support portion 10 is directly or indirectly connected to the main actuator such as a voice coil motor. It is supposed to have.

In the present embodiment, the support portion 10 is a base plate provided with a boss portion 15 that is joined by caulking to the tip of a carriage arm (not shown) connected to the main actuator.
The support part 10 is preferably formed by a stainless plate having a thickness of 0.1 mm to 0.8 mm, for example.
As a matter of course, an arm whose base end is connected to the swing center of the main actuator can be adopted as the support portion 10.

  As described above, the load beam portion 30 is a member for transmitting the load generated by the load bending portion 20 to the magnetic head slider 50, and therefore requires a predetermined rigidity.

In the present embodiment, as shown in FIGS. 1 to 3, the load beam portion 30 is bent to a side opposite to the disk surface from a flat plate-like main body portion 31 and both end portions in the width direction of the main body portion 31. The flange portion 32 is formed, and the flange portion 32 ensures rigidity.
The load beam portion 30 is preferably formed by a stainless plate having a thickness of 0.02 mm to 0.1 mm, for example.

The main body portion 31 is formed with a first dimple 33 (1) protruding at the tip portion toward the side close to the disk surface.
The first dimple 33 (1) has a protruding height of about 0.05 mm to 0.1 mm, for example.
The first dimple 33 (1) is in contact with the upper surface (surface opposite to the disk surface) of the following head mounting area 418 in the flexure section 40, and the load is applied to the first dimple 33 (1). Via the head mounting area 418.

In the present embodiment, the load beam portion 30 further integrally has a lift tab 34 extending from the front end of the main body portion 31 to the front end side in the suspension longitudinal direction. The lift tab 34 is associated with a ramp provided in the magnetic disk device when the magnetic head suspension 1A is swung by the main actuator so that the magnetic head slider 50 is positioned radially outward of the disk surface. In addition, the magnetic head slider 50 is a member for separating the magnetic head slider 50 from the disk surface along the z direction (direction perpendicular to the disk surface).
A reference numeral 35 in FIG. 1 is a vibration damping material 35 fixed to the upper surface of the main body 31.

  The load bending portion 20 has a proximal end portion connected to the support portion 10 and a distal end portion connected to the load beam portion 30, and the magnetic head slider 50 is moved to the disk surface based on its own elastic deformation. Generates a pressing load that pushes toward.

  As shown in FIGS. 1 and 2, in the present embodiment, the load bending portion 20 is spaced apart from each other across the suspension longitudinal center line CL with the plate surface facing the disk surface. A pair of left and right leaf springs 21 is provided.

  Preferably, the pair of leaf springs 21 are bent in advance in a direction in which the magnetic head slider 50 approaches the disk surface before the magnetic head suspension 1A is mounted on the magnetic disk device, and the magnetic When incorporated in the disk device, the magnetic head slider 50 is brought into an elastically deformed state bent back so as to be placed on the disk surface.

  When the magnetic disk device is activated and the disk surface rotates, the magnetic head slider 50 receives air pressure associated with the rotation of the disk surface and floats away from the disk surface. The pair of leaf springs 21 are elastically deformed so as to be further bent back according to the floating operation of the slider 50.

  That is, the plate spring 21 is elastically deformed when the magnetic head suspension 1A is incorporated into the magnetic disk device, and the plate spring 21 is elastically deformed by the floating operation of the magnetic head slider 50 accompanying the rotation of the disk surface. The spring 21 has a retained elasticity, and this retained elasticity acts as the pressing load.

  The pair of leaf springs 21 is formed of, for example, a stainless steel plate having a thickness of 0.02 mm to 0.1 mm.

In the present embodiment, as shown in FIGS. 1 and 2, the pair of leaf springs 21 are formed integrally with the load beam portion 30.
That is, the magnetic head suspension 1 </ b> A according to the present embodiment includes a load beam portion / plate spring forming body 300 that integrally forms the load beam portion 30 and the pair of plate springs 21.

  As shown in FIG. 2, the formed body 300 includes the load beam portion 30, the pair of leaf springs 21 extending from both sides of the load beam portion 30 to the base end side in the suspension width direction of the main body portion 31, A pair of support portion joining regions 310 extending from the pair of leaf springs 21 to the proximal end side are integrally provided.

As shown in FIG. 2, the formed body 300 is formed at a plurality of welding points in a state where the pair of support portion joining regions 310 are in contact with the front end side of the lower surface of the support portion 10 facing the disk surface. It is connected to the support portion 10 by spot welding.
Preferably, the spot welding can be performed from the side of the formed body 300, thereby facilitating the welding operation.

4 (a) and 4 (b) show a top view and a bottom view of the flexure section 40, respectively.
The flexure unit 40 includes a flexure substrate 410 that is fixed to the flat plate body 31 of the load beam unit 30 while supporting the magnetic head slider 50.

  As shown in FIGS. 2, 4 (a) and 4 (b), the flexure substrate 410 includes a load beam portion fixing region 411 that is fixed to the lower surface of the main body portion 31 in a superposed state, and the load beam portion. A head mounting region 418 that is positioned on the tip side of the fixing region 411 and supports the magnetic head slider 50.

  Preferably, the load beam portion fixing region 411 is fixed to the main body portion 31 by spot welding at a plurality of welding points, as shown in FIG.

As shown in FIGS. 2 and 3, the head mounting area 418 supports the magnetic head slider 50 on the lower surface facing the disk surface.
As described above, the first dimple 33 (1) is in contact with the upper surface of the head mounting area 418. Accordingly, the head mounting area 418 has a roll direction and a pitch with the first dimple 33 (1) as a fulcrum. It can swing flexibly in the direction.

The flexure substrate 410 has a lower rigidity than the load beam unit 30 so that the head mounting region 418 can swing in the roll direction and the pitch direction.
The flexure substrate 410 is preferably formed of a metal material such as stainless steel having a thickness of about 0.01 mm to 0.025 mm, for example.

In the present embodiment, the flexure substrate 410 is also fixed to the support portion 10.
That is, the flexure substrate 410 is further provided with a support portion fixing region 413 fixed to the lower surface of the support portion 10 in a superposed state, and a load bending portion connecting the load beam portion fixing region 411 and the support portion fixing region 413. And a corresponding area 412.

  Preferably, the support portion fixing region 413 is fixed to the support portion 10 by spot welding at a plurality of welding points, as shown in FIG.

  The load bending corresponding region 412 is formed between the pair of left and right leaf springs 21 in the suspension width direction in order to prevent the flexure substrate 410 from affecting the elastic deformation operation of the load bending portion 20 as much as possible. The load beam portion fixing region 411 and the support portion fixing region 413 are connected to each other in a state of being positioned at the position.

  In the present embodiment, as shown in FIGS. 2 and 4 (b), the flexure section 40 includes a signal wiring 432 for electrically connecting the magnetic head slider 50 to the outside, and the pair of piezoelectric elements. A wiring structure 430 including a voltage supply wiring 433 for supplying a voltage to 60 is integrally provided on the lower surface of the flexure substrate 410.

FIG. 5 shows an enlarged view of a portion V in FIG.
Specifically, as shown in FIGS. 2, 4 and 5, the wiring structure 430 includes an insulating layer 431 stacked on the lower surface of the flexure substrate 410 and a magnetic head stacked on the lower surface of the insulating layer 431. The signal wiring 432 for the slider and the voltage supply wiring 433 stacked on the lower surface of the insulating layer 431 are included.
Preferably, the wiring structure 430 may include an insulating cover layer (not shown) that surrounds the signal wiring 432 and the voltage supply wiring 433.

  The pair of piezoelectric elements 60 has a suspension longitudinal center line CL sandwiched so that the magnetic head slider 50 can be finely moved in the seek direction by extending one side and shortening the other according to the applied voltage. It arrange | positions so that it may be symmetrical with respect to each other and the expansion-contraction direction may differ with respect to each other.

The piezoelectric element 60 includes, for example, a piezoelectric element body made of PZT (lead zirconate titanate), a lower surface side electrode layer fixed to a lower surface (disk facing surface) of the piezoelectric element body, and an upper surface of the piezoelectric element body. An upper surface side electrode layer fixed to (a back surface opposite to the disk surface) may be provided.
The piezoelectric element body has a thickness of 0.01 mm to 0.1 mm, for example.
The electrode layer is, for example, Ag or Au having a thickness of 0.05 μm to several μm.

  In the present embodiment, the pair of piezoelectric elements 60 is expanded and contracted while the head mounting area 418 is moved in the seek direction with respect to the load beam portion fixing area 411 according to the expansion and contraction of the pair of piezoelectric elements 60. In order to prevent the flexure substrate 410 from vibrating or misaligned as much as possible during operation, the following configuration is provided.

FIG. 6 shows a longitudinal side view of the portion shown in FIG.
As shown in FIGS. 4 to 6, the flexure substrate 410 extends from the load beam portion fixing region 411 to the front end side as a connection structure for connecting the head mounting region 418 to the load beam portion fixing region 411. It has a longitudinal beam 415 and a pair of left and right connecting beams 416 that connect the distal end side of the longitudinal beam 415 and the head mounting area 418.

  The longitudinal beam 415 extends along the suspension longitudinal direction at the center of the suspension width direction, and is not fixed so that at least the distal end side can move relative to the main body portion 31 of the load beam portion 30.

  The pair of left and right connecting beams 416 has a proximal end portion branched from the distal end portion of the longitudinal beam 415 to the left and right, and a distal end portion connected to the head mounting region 418.

  In the present embodiment, the pair of connecting beams 416 is a part of the lower surface of the main body 31 via the longitudinal beam 415, the pair of connecting beams 416 and the surrounding region 417 surrounded by the head mounting region 418. The longitudinal beam 415 and the head mounting area 418 are connected so that the is exposed.

  As shown in FIGS. 4 and 5, the connecting beam 416 includes a width direction extending portion 416 a extending outward from the distal end portion of the longitudinal beam 415, and an outer end portion of the width direction extending portion. A connecting portion for connecting the head mounting region.

  In the illustrated embodiment, the connecting portion includes a longitudinally extending portion 416b extending from the outer end portion of the widthwise extending portion 416a to the distal end side in the suspension longitudinal direction, and a suspension portion extending from the distal end portion of the longitudinally extending portion 416b. A distal end side width direction extending portion 416c that extends inward in the width direction and is connected to the head mounting region 418 is provided.

  In this embodiment, the left and right width direction extending portions 416a, the left and right longitudinal direction extending portions 416b, the left and right tip side width direction portions 416c, and the head mounting region 418 define the surrounding region 417.

  As shown in FIGS. 5 and 6, the pair of piezoelectric elements 60 are fixed by an adhesive in a state where the distal end side is polymerized on the lower surface of the main body 31 via the surrounding region 417, and the proximal end side is Each of the pair of connecting beams 416 is fixed by an adhesive.

  Thus, in the present embodiment, the head mounting region 418 is connected to the longitudinal beam 415 in which at least the distal end portion is movable relative to the load beam portion 30 and the distal end portion of the longitudinal beam 415. It is supported by the pair of left and right connecting beams 416 so that it can swing flexibly in the roll direction and the pitch direction.

In addition, the pair of piezoelectric elements 60 arranged symmetrically with respect to each other with respect to the suspension longitudinal center line CL and having different expansion / contraction directions with respect to each other has a distal end side having higher rigidity than the flexure substrate 410. The load beam portion 30 is fixed to the main body portion 31 and the base end side is connected to the pair of left and right connecting beams 416.
Accordingly, when a voltage is applied to the pair of piezoelectric elements 60, the base end side is easily expanded or shortened while the front end side fixed to the main body 31 is fixed, and thus the head mounting region 418 is seeked. It can be flexibly swung in the direction.

  FIGS. 7A and 7B show an initial state in which no voltage is supplied to the pair of piezoelectric elements 60 and a stretched state in which voltage is supplied to the pair of piezoelectric elements 60, respectively. A schematic diagram is shown.

  That is, when a voltage is supplied to the pair of piezoelectric elements 60, the extension-side piezoelectric element 60 (the upper piezoelectric element 60 in FIG. 7B) is substantially fixed because the distal end side is fixed to the main body 31. The base end side moves to the suspension longitudinal direction base end side while being in a fixed state where it does not move.

  On the other hand, the shortened piezoelectric element 60 (the lower piezoelectric element 60 in FIG. 7B) is in a fixed state in which the distal end side is fixed to the main body 31 and is not substantially moved, while the proximal end side is Move to the tip side in the longitudinal direction of the suspension.

  Expansion and contraction of the pair of piezoelectric elements 60 (that is, the base end side of one piezoelectric element 60 moves to the base end side in the suspension longitudinal direction and the base end side of the other piezoelectric element 60 moves to the tip end side in the suspension longitudinal direction. The head mounting region 418 is moved while the longitudinal beam 415 and the pair of connecting beams 416 are elastically deformed by the operation), and thereby the magnetic head slider 50 supported by the head mounting region 418 is finely moved. be able to.

  At this time, as described above, the distal ends of the pair of piezoelectric elements 60 are fixed to the main body 31 of the load beam section 30 having higher rigidity than the flexure substrate 410, and therefore the pair of piezoelectric elements 60 expands and contracts. It is possible to prevent or reduce the reaction force generated by the operation as much as possible on the magnetic head suspension 1A.

  Accordingly, the magnetic head slider 50 can be flexibly finely moved in the seek direction by the expansion / contraction operation of the pair of piezoelectric elements 60, while preventing the vibration characteristics of the magnetic head suspension 1A from being deteriorated as much as possible. Or it can be reduced.

As described above, in the present embodiment, the piezoelectric element 60 includes the upper surface side electrode layer and the lower surface side electrode layer that are arranged so as to sandwich the piezoelectric element body.
In this case, preferably, as shown in FIG. 6, the front end side of the upper surface side electrode layer can be fixed to the lower surface of the main body 31 by the conductive adhesive 70.
According to such a configuration, the front end side of the piezoelectric element 60 can be fixed to the main body 31 while the upper surface side electrode layer is set to the ground potential.

The piezoelectric element 60 can be fixed to the connecting beam 416 on the base end side as long as the expansion / contraction operation of the piezoelectric element 60 is transmitted to the connecting beam 416.
In this embodiment, as shown in FIGS. 5 and 6, the insulating adhesive 80 in a state where the base end side of the upper surface side electrode layer is superposed on the lower surface (disk facing surface) of the pair of connecting beams 416. It is fixed by.

In the present embodiment, as described above, the upper electrode layer of the piezoelectric element 60 is set to the ground potential.
In this case, as shown in FIGS. 5 and 6, the lower electrode layer can be electrically connected to the voltage supply wiring 433 by the conductive adhesive 70.
According to such a configuration, the mechanical connection strength between the base end portion of the piezoelectric element 60 and the connecting beam 416 is improved while the lower electrode layer and the voltage supply wiring 433 are electrically connected. be able to.

Embodiment 2
Hereinafter, another embodiment of a magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
FIG. 8 shows a top view (a plan view seen from the side opposite to the disk surface) of the magnetic head suspension 1B according to the present embodiment.
FIG. 9 is a partial longitudinal sectional view of the magnetic head suspension 1B, and shows a sectional view corresponding to FIG. 6 in the first embodiment.
In the figure, the same members in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIGS. 8 and 9, the magnetic head suspension 1 </ b> B according to the present embodiment is mainly related to the first embodiment in that a second dimple 33 (2) is provided in the main body 31. This is different from the magnetic head suspension 1A.

  The second dimple 33 (2) has a fixed position where the pair of piezoelectric elements 60 are fixed to the main body 31 (in the present embodiment, the distal end side of the piezoelectric elements 60 is fixed to the main body 31). Position) on the proximal side and on the center line CL, projecting in a direction close to the disk surface, and opposite to the disk surface of the longitudinal beam 415 or the pair of connecting beams 416. Engage with the top surface.

By providing the second dimple 33 (2), the main body when the head mounting region 418 is moved via the pair of connecting beams 416 and the longitudinal beams 415 by the expansion and contraction of the pair of piezoelectric elements 60. The frictional resistance between the portion 31 and the flexure substrate 410 can be reduced.
Therefore, the fine movement of the magnetic head slider 50 by the expansion / contraction operation of the pair of piezoelectric elements 60 can be smoothly performed.

  In the present embodiment, as shown in FIG. 9, the entire pair of piezoelectric elements 60 is disposed in the surrounding region 417, and the base end side is formed of the pair of connecting beams by the insulating adhesive 80. 416 is fixed to each of 416.

  In this case, preferably, as shown in FIG. 9, a portion of the connecting beam 416 facing the base end portion of the piezoelectric element 60 (the width direction extending portion 416 a) is formed from the base end portion of the piezoelectric element 60. Suspension longitudinal direction front end rather than the width direction extension part 416a so that the insulating layer 431 in the wiring structure 430 may overlap with the lower surface of the base end side of the piezoelectric element 60 while being positioned on the base end side in the suspension longitudinal direction. The insulating layer 431 extends in the width direction and extends in the width direction by the insulating adhesive 80 in a state in which the base end side of the piezoelectric element 60 is polymerized on the extending portion of the insulating layer 431. The portion 416a can be adhered.

  As shown in FIG. 9, the lower surface side electrode layer is electrically connected to the voltage supply wiring 433 by the conductive adhesive 70.

Preferably, a coating opening 38 is provided in the main body 31.
By providing the opening 38, the application of the insulating adhesive 80 for fixing the base end side of the piezoelectric element 60 to the extending portion of the insulating layer 431 and the connecting beam 416 is applied to the load beam portion 30. It can be performed from the upper surface side (the side opposite to the disk surface).

Embodiment 3
Hereinafter, still another embodiment of the magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
FIG. 10 is a partial longitudinal sectional view of the magnetic head suspension 1C according to the present embodiment, and shows sectional views corresponding to FIG. 6 in the first embodiment and FIG. 9 in the second embodiment.
In the drawing, the same members in the first and second embodiments are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the magnetic head suspension 1 </ b> A according to the first embodiment, the piezoelectric element 60 is disposed on the lower surface side of the main body portion 31 of the load beam portion 30, and the distal end side of the piezoelectric element 60 is the load beam portion 30. It is fixed to the lower surface of the main body 31 by an adhesive in a polymerized state.

  On the other hand, in the magnetic head suspension 1 </ b> C according to the present embodiment, as shown in FIG. 10, the piezoelectric element 60 is disposed on the upper surface side of the main body portion 31, and the tip side of the piezoelectric element 60 is located on the top side. The upper surface of the main body 31 is fixed by an adhesive in a polymerized state.

On the other hand, the flexure substrate 410 is disposed on the lower surface side of the main body 31 as in the first and second embodiments.
It is possible to fix the base end side of the piezoelectric element 60 disposed on the upper surface side of the main body portion 31 to the connecting beam 416 on the flexure substrate 410 disposed on the lower surface side of the main body portion 31. For this reason, in the present embodiment, as shown in FIG. 10, an opening 39 is formed in the main body 31.
That is, the base end side of the piezoelectric element 60 is fixed to the connecting beam 416 with an adhesive via the opening 39 formed in the main body 31.

  Preferably, the distal end side of the piezoelectric element 60 is fixed to the upper surface of the main body portion 31 by fixing the front end side of the lower electrode layer on the upper surface of the main body portion 31 with the conductive adhesive 70. It is fixed in an electrically connected state to.

  Further, the base end side of the piezoelectric element 60 is fixed by the insulating adhesive 80 in a state where the base end side of the lower surface side electrode layer is superposed on the upper surface of the connecting beam 416 through the opening 39. It is fixed to the upper surface of the connecting beam 416.

  The base end side of the upper surface side electrode layer is electrically connected to the voltage supply wiring 433 provided on the lower surface of the flexure substrate 410 through the opening 39 and the opening 419 formed in the flexure substrate 410. .

Embodiment 4
Hereinafter, still another embodiment of the magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
11 to 13 are a top view (a plan view seen from the side opposite to the disk surface), a bottom view (a bottom view seen from the disk surface side), and a side surface of the magnetic head suspension 1D according to the present embodiment, respectively. The figure is shown. In FIG. 12, the circles indicate welding points.
In the figure, the same members in the first to third embodiments are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the magnetic head suspensions 1 </ b> A to 1 </ b> C according to the first to third embodiments, the distal ends of the pair of piezoelectric elements 60 are bonded to the main body 31 of the load beam portion 30 to be a substantially immovable fixing portion. And the base end side of a pair of said piezoelectric element 60 acts as a moving part which moves according to the expansion-contraction operation | movement of the said piezoelectric element 60. FIG.

  On the other hand, in the magnetic head suspension 1D according to the present embodiment, the base end sides of the pair of piezoelectric elements 60 are bonded to the main body portion 31 of the load beam portion 30 to be a substantially immovable fixing portion, In addition, the distal ends of the pair of piezoelectric elements 60 are configured to act as a moving unit that moves in accordance with the expansion and contraction operation of the piezoelectric elements 60.

  Specifically, the magnetic head suspension 1D includes a flexure portion 40D instead of the flexure portion 40, as compared with the magnetic head suspension 1A according to the first embodiment.

14A and 14B show a top view and a bottom view of the flexure portion 40D, respectively.
The flexure portion 40D is different from the flexure portion 40 in that the flexure substrate 410 is changed to a flexure substrate 410D.

FIG. 15 is an enlarged view of the XV portion in FIG.
Further, FIG. 16 shows a longitudinal side view of the portion shown in FIG.

As shown in FIGS. 14 (a), 14 (b), and 15, the flexure substrate 410D extends from the load beam portion fixing region 411 to the front end side from the load beam portion fixing region 411 at the center in the suspension width direction. In addition, the longitudinal beam 415D at least the distal end side of which is not fixed to the main body portion, the head mounting region 418, the left and right branches from the distal end portion of the longitudinal beam 415D, and the distal end portion enters the head mounting region 418. It includes a pair of connected left and right connecting beams 416D.
Note that the flexure substrate 410D further includes the support portion fixing region 413 and the load bending portion corresponding region 412 in the same manner as the flexure substrate 410.

  As shown in FIGS. 12 and 15, the flexure substrate 410D is disposed so that the lower surface of the main body 31 is exposed on both sides of the longitudinal beam 415D in the suspension width direction.

  The pair of piezoelectric elements 60 are fixed by an adhesive in a state in which the base end side is superimposed on the lower surface of the main body 31 on both sides of the longitudinal beam 415D in the suspension width direction, and the distal end side is attached to the pair of connection beams 416D. Each is fixed by an adhesive.

Also in the magnetic head suspension 1D according to the present embodiment having such a configuration, the same effect as in the first embodiment can be obtained.
That is, the head mounting area 418 includes at least a distal end portion of the longitudinal beam 415D that is movable relative to the load beam portion 30 and a pair of left and right coupling beams 416D that are coupled to the distal end portion of the longitudinal beam 415D. Thereby, it can be flexibly swung in the roll direction and the pitch direction.

  In addition, the pair of piezoelectric elements 60 arranged symmetrically with respect to each other with respect to the suspension longitudinal center line CL and having different expansion / contraction directions with respect to each other are arranged at one end side in the suspension longitudinal direction (in this embodiment, The end side) is fixed to the main body 31 of the load beam portion 30 having higher rigidity than the flexure substrate 410D, and the other end side in the suspension longitudinal direction (the front end side in the present embodiment) is the pair of connecting beams 416D. Respectively.

  Accordingly, when a voltage is applied to the pair of piezoelectric elements 60, the distal end side easily expands or shortens while the proximal end side fixed to the main body portion 31 is fixed, whereby the head mounting region 418 is seeked. The magnetic head suspension 1D can be prevented or reduced as much as possible from deteriorating the vibration characteristics of the magnetic head suspension 1D.

In the present embodiment, as shown in FIG. 16, the pair of piezoelectric elements 60 are fixed by the conductive adhesive 70 in a state where the base end side of the upper surface side electrode layer is polymerized on the lower surface of the main body 31. Has been.
According to such a configuration, the base end side of the piezoelectric element 60 can be fixed to the main body 31 while the upper surface side electrode layer is set to the ground potential.

  The piezoelectric element 60 can be fixed to the connecting beam 416D on the distal end side as long as the expansion / contraction operation of the piezoelectric element 60 is transmitted to the connecting beam 416D.

  In this embodiment, as shown in FIGS. 14 (a), 14 (b), and 15, the connecting beam 416D extends in the width direction extending outward from the distal end side of the longitudinal beam 415D in the suspension width direction. An extension portion 416Db extending from the outer end portion of the width direction extending portion 416Da to the distal end side in the suspension longitudinal direction, and an inward portion of the longitudinal extension portion 416Db extending inward in the suspension width direction. And a front end side width direction extending portion 416Dc connected to the head mounting region 418.

  In this case, for example, as shown in FIG. 15, the front end side of the upper surface side electrode layer is fixed to the lower surface (disk facing surface) of the corresponding width direction extending portion 416 Da by an insulating adhesive 80. ing.

  Instead, the insulating layer 431 in the wiring structure 430 is disposed on the distal end side of the piezoelectric element 60 while the width direction extending portion 416Da is positioned on the distal end side in the suspension longitudinal direction from the distal end portion of the piezoelectric element 60. The insulating layer 431 Da extends in the suspension longitudinal base end side so as to overlap with the lower surface, and the piezoelectric element 60 is overlapped with the extending portion of the insulating layer 431 in the state where the insulating layer 431 extends. It is also possible to adhere the extending portion of the insulating layer 431 and the extending portion 416Da in the width direction with the adhesive 80.

In the present embodiment, as described above, the upper electrode layer of the piezoelectric element 60 is set to the ground potential.
In this case, as shown in FIGS. 15 and 16, the lower electrode layer can be electrically connected to the voltage supply wiring 433 by the conductive adhesive 70.

  According to such a configuration, the mechanical connection strength between the distal end portion of the piezoelectric element 60 and the connecting beam 416D is improved while the lower electrode layer and the voltage supply wiring 430 are electrically connected. Can do.

Embodiment 5
Hereinafter, another embodiment of a magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
FIG. 17 shows a top view (a plan view seen from the side opposite to the disk surface) of the magnetic head suspension 1E according to the present embodiment.
FIGS. 18A and 18B are cross-sectional views taken along lines XVIII (a) -XVIII (a) and XVIII (b) -XVIII (b) in FIG. 17, respectively.
In addition, in the figure, the same code | symbol is attached | subjected to the same member in the said Embodiment 1-5, and the detailed description is abbreviate | omitted.

  In the magnetic head suspension 1E according to the present embodiment, as shown in FIGS. 17, 18A and 18B, the main body 31 is mainly provided with the second dimple 33 (2). This is different from the magnetic head suspension 1D according to the fourth embodiment.

  The second dimple 33 (2) has a fixed position where the pair of piezoelectric elements 60 are fixed to the main body 31 (in this embodiment, the base end side of the piezoelectric elements 60 is fixed to the main body 60). Is positioned on the center line and protrudes in a direction close to the disk surface, and is on the upper surface of the longitudinal beam 415D or the pair of connecting beams 416D opposite to the disk surface. Is engaged.

By providing the second dimple 33 (2), the main body when the head mounting region 418 is moved through the pair of connecting beams 416D and the longitudinal beams 415D by the expansion and contraction of the pair of piezoelectric elements 60. The frictional resistance between the portion 31 and the flexure substrate 410D can be reduced.
Therefore, the fine movement of the magnetic head slider 50 by the expansion / contraction operation of the pair of piezoelectric elements 60 can be smoothly performed.

  In the present embodiment, as shown in FIG. 1 (a) 8, the tip side of the pair of piezoelectric elements 60 is superposed on the lower surface of the width direction extending portion 416Da of the connecting beam 416D. Fixed by an insulating adhesive 80,

  Instead, the insulating layer 431 in the wiring structure 430 is disposed on the distal end side of the piezoelectric element 60 while the width direction extending portion 416Da is positioned on the distal end side in the suspension longitudinal direction from the distal end portion of the piezoelectric element 60. In the state where the width direction extending portion 416Da extends to the base side in the suspension longitudinal direction so as to overlap with the lower surface, the tip side of the piezoelectric element 60 is overlapped with the extending portion of the insulating layer. The adhesive 80 can adhere the extending portion of the insulating layer 431 and the extending portion 416Da in the width direction.

  As shown in FIG. 18A, the lower surface side electrode layer is electrically connected to the voltage supply wiring 433 by the conductive adhesive 70.

Embodiment 6
Hereinafter, still another embodiment of the magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
FIG. 19 is a partial vertical cross-sectional view of the magnetic head suspension 1F according to the present embodiment, showing cross-sectional views corresponding to FIG. 16 in the fourth embodiment and FIG. 18 (a) in the fifth embodiment. .
In addition, in the figure, the same code | symbol is attached | subjected to the same member in the said Embodiment 1-5, and the detailed description is abbreviate | omitted.

  In the magnetic head suspension 1 </ b> D according to the fourth embodiment, the piezoelectric element 60 is disposed on the lower surface side of the main body 31 of the load beam portion 30, and the base end side of the piezoelectric element 60 is the main body 31. It is fixed to the lower surface with an adhesive in a polymerized state.

  On the other hand, in the magnetic head suspension 1F according to the present embodiment, as shown in FIG. 19, the piezoelectric element 60 is disposed on the upper surface side of the main body 31, and the base end side of the piezoelectric element 60 is The upper surface of the main body 31 is fixed by an adhesive in a polymerized state.

On the other hand, the flexure substrate 410D is disposed on the lower surface side of the main body 31 as in the fourth and fifth embodiments.
It is possible to fix the distal end side of the piezoelectric element 60 disposed on the upper surface side of the main body 31 to the pair of connection beams 416D in the flexure substrate 410D disposed on the lower surface side of the main body portion 31. Therefore, in the present embodiment, an opening 39 is formed in the main body 31 as shown in FIG.
That is, the distal end side of the piezoelectric element 60 is fixed to the connecting beam 416D with an adhesive via the opening 39 formed in the main body 31.

  Preferably, the base end side of the lower surface side electrode layer is fixed to the upper surface of the main body 31 by the conductive adhesive 70 so that the base end side of the piezoelectric element 60 is fixed to the main body 31. It is fixed to the upper surface.

  Further, the distal end side of the piezoelectric element 60 is fixed by the insulating adhesive 80 in a state where the distal end side of the lower electrode layer is superposed on the upper surfaces of the pair of connecting beams 416D through the openings 39. It is fixed to the upper surface of the pair of connecting beams 416D.

  The front end side of the upper electrode layer is electrically connected to the voltage supply wiring 433 provided on the lower surface of the flexure substrate 410D through the opening 39 and the opening 419 formed in the flexure substrate 410D.

Embodiment 7
Hereinafter, still another embodiment of the magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
FIG. 20 is a partial longitudinal sectional view of the magnetic head suspension 1G according to the present embodiment, and shows a sectional view corresponding to FIG. 9 in the second embodiment.
In addition, in the figure, the same code | symbol is attached | subjected to the same member in the said Embodiment 1-6, and the detailed description is abbreviate | omitted.

  The magnetic head suspension 1G according to the present embodiment connects the voltage supply side electrode layer (the lower surface side electrode layer in the present embodiment) of the piezoelectric element 60 to the voltage supply wiring 433 provided in the flexure portion 40G. The structure is different from the magnetic head suspension 1B according to the second embodiment.

  Specifically, the magnetic head suspension 1G has a flexure portion 40G instead of the flexure portion 40, as compared with the magnetic head suspension 1B according to the second embodiment.

  The flexure unit 40G is different from the flexure unit 40 in that the flexure substrate 410 is changed to a flexure substrate 410G.

  The flexure substrate 410G is different from the flexure substrate 410 in that the edge facing the piezoelectric element 60 in the width direction extending portion 416a forms a bent portion 420 that is bent to the opposite side of the disk surface. It is different.

  In such a configuration, as shown in FIG. 20, the voltage supply side electrode layer (the lower surface side electrode layer in the present embodiment) of the piezoelectric element 60 is connected to the bent portion 420 of the voltage supply wiring 433. It is electrically connected to the located part by the conductive adhesive 70.

  According to the present embodiment, the bonding of the piezoelectric element 60 to the corresponding connecting beam 416 and the electrical connection of the voltage supply-side electrode layer of the piezoelectric element 60 to the voltage supply wiring 433 are performed in the conductive state. Since the adhesive adhesive 70 can be used, the assembly work efficiency can be improved.

  In the present embodiment, the case where the bent portion 420 is applied to the magnetic head suspension 1B according to the second embodiment has been described as an example. However, the bent portion 420 is not limited to the first embodiment and the first embodiment. The present invention can also be applied to the magnetic head suspensions 1A, 1D, and 1E according to the fourth and fifth embodiments.

Embodiment 8
Hereinafter, still another embodiment of the magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
FIG. 21 is a top view of the magnetic head suspension 1H according to the present embodiment.
FIG. 22 is an enlarged view of the XXII part in FIG.
In addition, in the figure, the same code | symbol is attached | subjected to the same member in the said Embodiment 1-7, and the detailed description is abbreviate | omitted.

  In the magnetic head suspension 1H according to the present embodiment, the load beam portion fixing region 411 and the head mounting region 418 are connected by the longitudinal beam 415 and the pair of connecting beams 416, and further, a pair of left and right proximal ends The magnetic head suspension 1A is different from the magnetic head suspension 1A according to the first embodiment in that it is also connected by the side reinforcing beam 421.

Specifically, the magnetic head suspension 1H has a flexure portion 40H instead of the flexure portion 40, as compared with the magnetic head suspension 1A according to the first embodiment.
The flexure unit 40H includes a flexure substrate 410H instead of the flexure substrate 410, as compared with the flexure unit 40.

  As shown in FIG. 22, the flexure substrate 410H includes the pair of proximal reinforcing beams in addition to the load beam portion fixing region 411, the longitudinal beam 415, the pair of connecting beams 416, and the head mounting region 418. 421.

  The base end side reinforcing beam 421 is configured to connect the load beam portion fixing region 411 and the head mounting region 418 while passing outward in the suspension width direction from the pair of connecting beams 416.

  By providing the pair of proximal-side reinforcing beams 421, the force with which the head mounting area 418 is pressed against the first dimple 33 (1) can be increased. Posture stabilization, in particular, when the magnetic head suspension 1H is swung by the main actuator so that the magnetic head slider 50 is positioned radially outward of the disk surface and the lift tab 34 is engaged with the ramp. It is possible to stabilize the posture at the time of retreating.

  In this embodiment, the case where the magnetic head suspension 1A according to the first embodiment includes the pair of base end side reinforcing beams 421 has been described as an example. However, any one of the first to seventh embodiments described above. Further, the pair of proximal-side reinforcing beams 421 can be provided.

Embodiment 9
Hereinafter, still another embodiment of the magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
FIG. 23 shows a top view of the magnetic head suspension 1I according to the present embodiment.
FIG. 24 shows an enlarged view of a portion XXIV in FIG.
In addition, in the figure, the same code | symbol is attached | subjected to the same member in the said Embodiment 1-8, and the detailed description is abbreviate | omitted.

  In the magnetic head suspension 1I according to the present embodiment, the head mounting region 418 is connected to the load beam portion fixing region 411 by the longitudinal beam 415 and the pair of connecting beams 416, and the following tip side fixing region is further provided. It is also different from the magnetic head suspension 1A according to the first embodiment in that it is also connected to 425.

Specifically, the magnetic head suspension 1I has a flexure portion 40I instead of the flexure portion 40, as compared with the magnetic head suspension 1A according to the first embodiment.
The flexure portion 40I has a flexure substrate 410I instead of the flexure substrate 410, as compared with the flexure portion 40.

  As shown in FIG. 24, the flexure substrate 410I has a distal end than the head mounting region 418 in addition to the load beam portion fixing region 411, the longitudinal beam 415, the pair of connecting beams 416, and the head mounting region 418. The front end side fixing region 425 fixed to the lower surface of the main body 31 on the side in a superposed state, and a pair of left and right front end side reinforcing beams 426 connecting the front end side fixing region 425 and the head mounting region 418 are further provided. doing.

  By providing the tip side fixing region 425 and the pair of tip side reinforcing beams 426, the force with which the head mounting region 418 is pressed against the first dimple 33 (1) can be increased. Stabilization of the posture of the head mounting area 418, in particular, the magnetic head suspension 1I is swung by the main actuator so that the magnetic head slider 50 is positioned radially outward of the disk surface, so that the lift tab 34 is moved. It is possible to stabilize the posture at the time of retraction when engaging with the lamp.

  In the present embodiment, the case where the magnetic head suspension according to the first embodiment includes the distal-end-side fixing region 425 and the pair of distal-end-side reinforcing beams 426 has been described as an example. Any one of 1 to 8 can include the distal-end-side fixing region 425 and the pair of distal-end-side reinforcing beams 426.

  In each of the above embodiments, the configuration in which the pair of piezoelectric elements 60 are separate from each other has been described as an example. However, the present invention is not limited to such a configuration.

FIGS. 25A and 25B are plan views of the first modification 61 of the pair of piezoelectric elements that can be used in the magnetic head suspension according to the present invention, as viewed from one side and the other side in the thickness direction.
The first modified example 61 includes a common piezoelectric element body 610, a first piezoelectric element electrode layer 611 (1) and a second piezoelectric element arranged in parallel on one end surface of the piezoelectric element body 610 in the thickness direction. Electrode layer 611 (2), and a common electrode layer 612 disposed on the other end surface in the thickness direction of the piezoelectric element body 610.

  Further, in the piezoelectric element 60 and the piezoelectric element 61 according to the first modification in each of the embodiments, only one of the pair of electrode layers is disposed on the end surface on one side in the thickness direction of the piezoelectric element body, and Only the other of the pair of electrode layers is disposed on the other surface of the other side, but it is also possible to use a piezoelectric element according to a second modification different from these.

That is, in the second modification, one of the first electrode layers has an embedded region embedded in the piezoelectric element body and an external connection region for the first electrode layer provided on the outer surface of the piezoelectric element body. Provided. The other second electrode layer is provided with a pair of external connection regions for the second electrode layer disposed on both end surfaces in the thickness direction of the piezoelectric element body so as to face the embedded region. The first electrode layer external connection region is disposed on at least one end surface on both sides in the thickness direction of the piezoelectric element body while being electrically disconnected from the second electrode layer external connection region.
In this case, both of the pair of first and second electrode layers are disposed on at least one of both end surfaces in the thickness direction of the piezoelectric element body.

1A to 1I Magnetic head suspension 10 Support portion 20 Load bending portion 21 Elastic plate 30 Load beam portion 31 Main body portion 33 (1) First dimple 33 (2) Second dimple 39 Opening of main body portion 40 Flexure portion 50 Magnetic head slider 60 Piezoelectric element 70 Conductive adhesive 80 Insulating adhesive 410 Flexure substrate 411 Load beam portion overlapping region 415 Long beam 416 Connection beam 416a Width extending portion 417 Surrounding region 418 Head mounting region 430 Wiring structure 431 Insulating layer 432 Signal wiring 433 Voltage supply wiring CL Suspension longitudinal center line

Claims (5)

A load beam portion is supported on a support portion that is swung around a swing center via a load bending portion, and a flexure portion flexure substrate that supports a magnetic head slider is supported on a plate-like main body portion of the load beam portion, A magnetic head suspension in which the magnetic head slider is finely movable in a seek direction by a pair of left and right piezoelectric elements;
The flexure substrate opposes the disk surface, a load beam portion fixing region fixed in a superposed state on a lower surface of the main body portion facing the disk surface, a longitudinal beam extending from the load beam portion fixing region to the front end side, and the disk surface. The lower surface supports the magnetic head slider, and the upper surface opposite to the disk surface is a head mounting region that engages with a first dimple formed in the main body, and is longer than the distal end of the longitudinal beam. A head mounting area located on the front end side in the direction, and a pair of left and right connecting beams connecting the longitudinal beam and the head mounting area,
The pair of connecting beams includes a pair of left and right width extending portions extending outward from the distal end of the longitudinal beam in the suspension width direction, and an outer end portion of the pair of width extending portions from the distal end in the suspension longitudinal direction. A pair of left and right longitudinally extending portions that extend, and a pair of left and right distal end side widthwise extending portions that extend inward in the suspension width direction from the distal ends of the pair of longitudinally extending portions and are connected to the head mounting region Have
The pair of piezoelectric elements is fixed in a superposed state on the lower surface of the main body portion exposed through the surrounding region surrounded by the longitudinal beams, the pair of connecting beams, and the head mounting region, and the base end side is the base end side. A magnetic head suspension, wherein the magnetic head suspension is fixed to a pair of width direction extending portions.   2. The magnetic head according to claim 1, wherein a pair of left and right cutouts that open outward in the suspension width direction is provided at a distal end portion of the longitudinal beam connected to the pair of width direction extending portions. suspension. The main body is provided with an opening penetrating vertically.
The opening has a distal edge located on the proximal side in the suspension longitudinal direction from the distal ends of the pair of piezoelectric elements, and a suspension width direction edge located outside the suspension width direction outer edge of the pair of piezoelectric elements. In the suspension width direction inwardly with respect to the pair of longitudinally extending portions, and the base end side edge is positioned on the suspension longitudinal direction proximal end side with respect to the distal ends of the pair of widthwise extending portions. The magnetic head suspension according to claim 1, wherein the magnetic head suspension is a magnetic head suspension. The piezoelectric element includes a piezoelectric element body, a lower surface facing the disk surface in the piezoelectric element body, and a lower surface side electrode layer and an upper surface side electrode layer provided on an upper surface opposite to the disk surface, respectively. ,
The flexure portion has a wiring structure integrally provided on the lower surface of the flexure substrate,
The wiring structure includes an insulating layer stacked on a lower surface of the flexure substrate, a signal wiring for a magnetic head slider stacked on a lower surface of the insulating layer, and a voltage supply wiring stacked on a lower surface of the insulating layer. Including
The piezoelectric element is fixed by a conductive adhesive in a state where the upper surface side electrode layer is polymerized on the lower surface of the main body portion on the distal end side, and the upper surface side electrode layer is bonded to the pair on the proximal end side. The lower surface side electrode layer is electrically connected to the voltage supply wiring by a conductive adhesive while being fixed to the lower surface of the extending portion in the width direction by an insulating adhesive. The magnetic head suspension according to claim 1.   The main body portion protrudes from the pair of piezoelectric elements in a direction close to the disk surface on the proximal side in the suspension longitudinal direction, and is an upper surface opposite to the disk surface of the longitudinal beam or the pair of connecting beams. 5. The magnetic head suspension according to claim 1, further comprising a second dimple that engages with the magnetic head suspension.

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