JP5751359B2 - Vibrators, oscillators, gyros and electronic equipment - Google Patents

Description

  The present invention relates to piezoelectric devices such as piezoelectric vibrators and piezoelectric oscillators used in various electronic devices, and more particularly to a surface-mount type piezoelectric device that hermetically seals a package containing a piezoelectric vibrating piece.

  Conventionally, many surface-mount type piezoelectric devices suitable for mounting on a circuit board or the like have been used. Generally, a surface-mount type piezoelectric device consists of a thin box-type base made of an insulating material such as ceramic and a flat lid joined to the base, and a package in which a piezoelectric vibrating piece is mounted and hermetically sealed. Adopt structure. In addition, piezoelectric devices are required to be further reduced in size and thickness in accordance with recent downsizing and thinning of electronic devices.

  In order to reduce the size of the piezoelectric device, a pair of vibrating arms extending in parallel from the base end, and a support arm extending in parallel with the vibrating arm from the base end and provided with an extraction electrode from the excitation electrode, A tuning-fork type piezoelectric vibrating piece having the following is known (see, for example, Patent Document 1). A thickness-shear vibration mode piezoelectric vibrating piece having a vibrating part of a rectangular thin plate is also known to have a structure including a support arm that extends in parallel to the base end of the vibrating part and is provided with an extraction electrode from the excitation electrode. (For example, refer to Patent Document 2).

  These piezoelectric vibrating reeds are mechanically fixed and supported at the same time as being electrically connected by being fixed to the mount electrode of the package with a conductive adhesive on the support arm. Accordingly, the size of the base end portion is reduced in the longitudinal direction as compared with the conventional structure in which the piezoelectric vibration piece is fixedly supported by the conductive adhesive at the base end portion. The device can be miniaturized.

  Usually, one support arm of the piezoelectric vibrating piece is provided on each side of the vibrating arm or the vibrating portion in that the piezoelectric vibrating piece is fixed in a balanced manner. It is also possible to provide only one support arm on one side of the vibrating arm or the vibrating portion and fix the supporting arm and the base end portion to the package (see, for example, Patent Document 3).

  Furthermore, the tuning-fork type piezoelectric vibrating piece can be reduced in size in the longitudinal direction by shortening the vibrating arm by forming a weight portion having an enlarged width at the tip of the vibrating arm (for example, a patent (Ref. 4). By this wide weight portion, it is possible to suppress the generation of the higher-order vibration mode and to obtain the stability of the vibration frequency.

  Further, the surface-mount type piezoelectric device is preliminarily provided with an external device in order to discharge gas and moisture generated from the sealing material at the time of joining the lid and the base and / or seal the inside to a desired vacuum state or atmosphere. A package structure is used in which a sealing hole communicating with the lid and the lid is closed after the lid and the base are joined. In many cases, the sealing hole of the package is provided in a base having a structure in which thin plates of ceramic material are laminated (see, for example, Patent Documents 2, 3, and 5), but can also be provided in a flat lid (for example, , See Patent Document 6).

JP 2004-297198 A JP 2009-21794 A JP 2004-343541 A JP 2005-5896 A JP 2006-332727 A JP 2002-171152 A

  The sealing hole of the package is closed by irradiating a spherical or pellet-shaped sealing material made of a low melting point metal placed therein with a laser beam or a halogen lamp, etc., and instantaneously heating and melting the sealing material. At this time, it is preferable to make the inner opening diameter of the sealing hole smaller than the outer opening diameter so that the sealing material does not fall into the package. When such a sealing hole has a laminated structure of ceramic thin plates, the large diameter hole provided in the ceramic thin plate constituting the bottom plate and the small diameter hole provided in the ceramic thin plate laminated thereon are concentric. By disposing in, a two-layer structure with a step is formed. Also, a lid made of a metal flat plate can be formed with a sealing hole by forming a downward convex portion using a jig such as a punch and opening a through hole at the center thereof.

  When the above-described conventional sealing holes are provided in either the base or the lid of the package, they are arranged so as to overlap the piezoelectric vibrating reed when viewed in plan so as to reduce the planar size of the package. . In particular, when the sealing hole is provided at a position overlapping the excitation electrode of the piezoelectric vibrating piece, after the lid is joined to the base, the excitation electrode is partially irradiated by irradiating laser light or the like from the outside through the sealing hole. By removing, the vibration frequency of the piezoelectric vibrating piece can be finely adjusted.

  However, as described above, the package in which the sealing hole is provided in the base and is arranged so as to overlap the piezoelectric vibrating piece needs to have a laminated structure of at least two layers on the bottom plate portion of the base. Furthermore, a gap must be provided between the inner opening of the sealing hole and the piezoelectric vibrating piece. Therefore, it is difficult to further reduce the thickness and height of the package. Similarly, when the sealing hole is provided in the lid, a gap must be provided between the convex portion on the inner surface of the lid and the piezoelectric vibrating piece, which limits the reduction in thickness and height of the package.

  Accordingly, the present invention has been made in view of the above-described conventional problems, and an object of the present invention is to reduce the size and height of a piezoelectric device including a surface mount type package having a sealing hole in a base or a lid. It is to realize at the same time.

In order to achieve the above object, the present invention can be realized as the following forms or application examples.
A vibrator according to an embodiment of the present invention includes a vibration part, and a first support part and a second support part that extend from a base end part of the vibration part and are arranged along both sides of the vibration part. A vibration piece, including a base and a lid joined to the base, the package having the vibration piece attached to the inside, and the inside and the outside of the package are provided to communicate with each other and sealed with a sealing material The first support part and the second support part are attached to the base, and the length of the first support part in the direction extending from the base end part is the first support part. 2 shorter than the length of the support portion in the direction extending from the base end portion, and the sealing material is closer to the first support portion than the second support portion so as not to overlap the vibration piece in plan view. It is arranged.
In a vibrator according to another embodiment of the present invention, the base is provided with a bottomed recess, the lid closes an opening of the recess, and the vibrating piece is attached to the inside of the recess. It is characterized by.
In the vibrator according to another embodiment of the present invention, the inner wall of the concave portion includes a convex portion protruding toward the inner side, and the sealing material is disposed on the convex portion in plan view. It is characterized by that.
In the vibrator according to another embodiment of the present invention, the first support portion is disposed along one side of the vibration portion in a plan view, and the second support portion is in the plan view. It is arranged along the other side of the vibration part, and the convex part is arranged ahead of the tip of the first support part along the extending direction of the first support part in plan view. And
A vibrator according to another embodiment of the present invention is characterized in that the vibration part is arranged closer to the second support part than the first support part in a plan view.
A vibrator according to another embodiment of the present invention is characterized in that the vibrating section is a vibrating arm that vibrates by bending vibration.
A vibrator according to another embodiment of the present invention is characterized in that the vibrating arm includes a weight portion at a tip thereof.
A vibrator according to another embodiment of the present invention is characterized in that the vibration section vibrates by thickness shear vibration.
An oscillator according to another embodiment of the present invention includes the vibrator.
A gyro according to another embodiment of the present invention includes the vibrator.
An electronic apparatus according to another embodiment of the present invention includes the vibrator.
[Application Example 1] A piezoelectric vibrating piece and a package for hermetically sealing the piezoelectric vibrating piece are provided, and the piezoelectric vibrating piece extends from the vibrating portion and a base end portion of the vibrating portion and on both sides of the vibrating portion. A package having a first base plate and a second base arm, and a package defined by a box-shaped base made of an insulating material, a flat lid joined to the top of the base, and the base and the lid. A cavity for accommodating the piezoelectric vibrating piece therein, a protrusion projecting into the cavity from the base or lid, and a sealing hole penetrating the protrusion and opening in the cavity and on the outer surface of the package The piezoelectric vibrating piece is fixedly supported on the bottom surface of the cavity in the first and second support arms, the sealing hole is hermetically closed by the sealing material, and the length of the first support arm is the second support. It is shorter than the length of the arm, and the convex part is piezoelectric in plan view. In a range where the tip end of the first support arm is located further in the extension direction of the first support arm and at least partially overlaps the second support arm in the length direction of the piezoelectric vibrating piece so as not to overlap the moving piece. A piezoelectric device characterized by being provided.

  Thus, by making one of the support arms provided on both sides of the vibration part shorter than the other, a plane space that does not overlap with the piezoelectric vibrating piece is secured inside the cavity, and a convex portion is provided in this plane space to provide a sealing hole. By opening, the package can be reduced in height and downsized in plan.

Application Example 2 A piezoelectric device characterized in that, in the width direction of the piezoelectric vibrating piece, the vibrating portion is arranged so as to be closer to the second support arm that is longer than the short first support arm.
As a result, the position of the center of gravity of the piezoelectric vibrating piece is closer to the second supporting arm than the first supporting arm, so that the piezoelectric vibrating piece can be supported in a more balanced manner, preventing vibration leakage of the piezoelectric vibrating piece, Further vibration stability can be achieved.

Application Example 3 The base is formed in a box shape by a laminated structure of a plurality of insulating material plates, the bottom surface of the cavity is defined by a first insulating material plate, and the convex portion is laminated on the first insulating material plate. A large hole portion formed in the first insulating material plate and a small hole portion formed in the second insulating material plate so as to be continuous with the large hole portion. The piezoelectric device is characterized in that the sealing hole is formed to have a step inside.
In this way, since the base having a stepped sealing hole for placing a spherical or pellet-shaped sealing material therein can be made into a laminated structure composed of a minimum of two insulating material plates, It is advantageous for low profile.

Application Example 4 The piezoelectric device, wherein the lid has a convex portion, and the sealing hole of the convex portion has an inclined surface tapered from the outer surface of the lid toward the cavity.
Accordingly, a spherical or pellet-shaped sealing material that is similarly heated and melted by irradiation with a laser beam or a halogen lamp can be placed on the inclined surface of the sealing hole so as not to fall into the cavity.

Application Example 5 A piezoelectric device comprising a tuning fork-type piezoelectric vibrating piece having at least one pair of vibrating arms that extend in parallel from the base end portion thereof and bend and vibrate.
Application Example 6 A piezoelectric device characterized in that the vibrating arm has a wide weight portion at the tip thereof.
Thereby, even if the vibrating arm is shortened, the generation of the higher-order vibration mode is suppressed and the stability of the vibration frequency can be obtained, so that the entire piezoelectric vibrating piece can be downsized in the longitudinal direction.

Application Example 7 A piezoelectric device characterized in that the vibration part has a thickness-vibration piezoelectric vibration piece made of a rectangular flat plate.

Application Example 8 In the piezoelectric device, the piezoelectric vibrating piece is fixed to the bottom surface of the cavity at the base end portion in addition to the first and second support arms.
Thereby, it can support more stably and reliably.

(A) is a plan view showing the first embodiment of the piezoelectric device according to the present invention with the lid omitted, (B) is a longitudinal sectional view taken along the line IB-IB, and (C) is the IC-IC line. FIG. (A) is a plan view of a second embodiment of the piezoelectric device according to the present invention, (B) is a longitudinal sectional view taken along line IIB-IIB, and (C) is a longitudinal sectional view taken along line IIC-IIC. (A) is a plan view showing a third embodiment of the piezoelectric device according to the present invention with the lid omitted, and (B) is a longitudinal sectional view taken along the line III-III. (A) is a plan view showing the first embodiment of the piezoelectric device according to the present invention with the lid omitted, and (B) is a longitudinal sectional view taken along the line IV-IV.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

  1A to 1C show a first embodiment of a piezoelectric device according to the present invention. The piezoelectric vibrator 1 of the first embodiment includes a package 3 that hermetically seals a tuning fork type piezoelectric vibrating piece 2 inside. The package 3 has a box-shaped base 4 made of a ceramic material and a flat rectangular thin plate lid 5. The base 4 is formed by laminating a lower ceramic thin plate 6 having a rectangular flat plate shape and an upper ceramic thin plate 7 having a rectangular frame shape, thereby defining a cavity for accommodating the piezoelectric vibrating reed 2 therein. . The lid 5 is airtightly joined to the upper end surface of the base 4 by the sealing material 8.

  The lid 5 is formed of a metal material such as Kovar, 42 alloy, or SUS, or an insulating material such as glass, silicon, crystal, or ceramic. When the lid 5 is a metal material, a seam ring made of Kovar or the like, or a brazing material such as silver solder or solder can be used as the sealing material 8. When the lid 5 is made of glass, silicon, crystal, ceramic, or the like, low melting point glass or an adhesive can be used for the sealing material 8.

  The piezoelectric vibrating piece 2 includes a base end portion 9 and a pair of vibrating arms 10 and 11 extending in parallel with each other in the length direction from the base end portion. Each vibrating arm has a wide weight portion 10a, 11a at its tip. Even if the length of the vibrating arm is shortened by the weight portion, generation of higher-order vibration mode is suppressed and vibration frequency stability can be obtained, and the entire piezoelectric vibrating piece 2 can be downsized in the longitudinal direction. Can do. The width of the vibrating arms 10 and 11 of the present embodiment is constant over the entire length. In another embodiment, the vibrating arm can be formed so that the width of the vibrating arm is tapered from the proximal end side toward the distal end.

  Further, the piezoelectric vibrating piece 2 includes a first support arm 14 and a second support arm 15 which are disposed on both sides in the width direction and are coupled to the connecting portions 12 and 13 on both sides of the base end portion 9. The first and second support arms 14 and 15 respectively extend substantially parallel to the vibrating arm along both sides of the vibrating arm from the connecting portion. The second support arm 15 has a length that extends to the vicinity of the weight portion 11 a of the vibrating arm 11, whereas the first support arm 14 is formed to be half the length of the second support arm 15.

  The bottom surface of the cavity of the base 4 has a position that generally corresponds to the tip portion of the first support arm 14 of the mounted piezoelectric vibrating piece 2 and a position that roughly corresponds to the tip portion and the middle portion of the second support arm 15. Mount electrodes 16 to 18 are provided. In the piezoelectric vibrating piece 2, the distal end portion of the first support arm 14, the distal end portion and the intermediate portion of the second support arm 15 are fixed to the corresponding mount electrodes 16 to 18 with conductive adhesives 19 to 21, respectively. As a result, the piezoelectric vibrating reeds are drawn electrodes (not shown) wired from the excitation electrodes (not shown) of the vibrating arms 10 and 11 to the first and second support arms 14 and 15 via the base end 9. ) Is electrically connected and at the same time mechanically supported.

  Further, the base 4 is provided with a convex portion 7a that protrudes upward from the bottom surface of the cavity. The projecting portion 7 a is formed with a sealing hole 22 that communicates the inside of the cavity with the outside of the package 3. The sealing hole 22 is airtightly closed with an appropriate sealing material 23 such as Au—Sn or solder.

  As shown in FIGS. 1B and 1C, the convex portion 7 a is formed by a portion extending from the rectangular frame-shaped upper ceramic thin plate 7 constituting the base 4 to the inside of the cavity. The sealing hole 22 has a large hole portion 22a penetrating the lower ceramic thin plate 6 defining the bottom surface of the cavity and a small hole portion 22b penetrating the extending portion of the upper ceramic thin plate 7 concentrically. By arranging, it is formed so as to have a step inside. When the sealing hole 22 is sealed by this step, a spherical or pellet-shaped sealing material is placed in the sealing hole so as not to fall into the cavity, and a laser beam or a halogen lamp or the like is used in a vacuum atmosphere. Can be melted by heating.

The convex portion 7 a is disposed in a planar space defined between the tip of the short first support arm 14 and the weight portion 10 a of the adjacent vibrating arm 10. Thus the convex portion 7a, so as not to overlap the piezoelectric vibrating piece 2 in plan view, further located ahead tip of the first support arm in the extending direction of the first supporting arm, and the piezoelectric vibrating It is provided in a range at least partially overlapping the second support arm in the length direction of the piece 2. Thereby, the package 3 can be reduced in height and reduced in size in a plane. In particular, since the base 4 can have a laminated structure composed of a minimum of two ceramic thin plates, it is advantageous for reducing the height of the package 3.

  In the present embodiment, the piezoelectric vibrating piece 2 vibrates by making the connecting portion 13 of the base end portion 9 with the second support arm 15 shorter than the connecting portion 12 with the first support arm 14 in the width direction. A vibrating part composed of the arms 10 and 11 is arranged closer to the second support arm than the first support arm. As a result, the position of the center of gravity of the piezoelectric vibrating piece 2 is closer to the second supporting arm 15 than the first supporting arm 14, so that the piezoelectric vibrating piece can be supported in a more balanced manner. Therefore, vibration leakage of the piezoelectric vibrating piece 2 can be effectively prevented, and the vibration stability can be further improved.

  2A to 2C show a second embodiment of the piezoelectric device according to the present invention. The piezoelectric vibrator 31 of the second embodiment includes a package 33 that hermetically seals the tuning fork type piezoelectric vibrating piece 32 inside. The package 33 has a box-shaped base 34 made of a ceramic material and a flat rectangular thin plate lid 35. Similarly to the base 4 of the first embodiment, the base 34 includes a rectangular flat plate-like lower ceramic thin plate 36 and a rectangular frame-shaped upper ceramic thin plate 37 that are stacked to house the piezoelectric vibrating piece 32 therein. A cavity for is defined.

  The piezoelectric vibrating piece 32 has exactly the same configuration as the piezoelectric vibrating piece 2 of the first embodiment and is fixedly supported on the base 34 in the same manner, so that further description is omitted.

  The lid 35 is hermetically bonded to the upper end surface of the base 34 by a sealing material 38. The lid 35 of the present embodiment is made of a metal material such as Kovar, 42 alloy, SUS. As the sealing material 38, a seam ring made of Kovar or the like, or a brazing material such as silver solder or solder can be used.

  The lid 35 is provided with a convex portion 39 projecting downward from the inner surface thereof into the cavity. A sealing hole 40 is formed in the center of the convex portion 39 to communicate the inside of the cavity with the outside of the package 33. The sealing hole 40 is hermetically closed with an appropriate sealing material 41 such as Au—Sn or solder.

  As shown in FIGS. 2 (B) and 2 (C), the convex portion 39 is formed in a downward conical shape, and the sealing hole 40 has an inclined surface tapered from the outer surface of the lid 35 toward the cavity. Have. When the sealing hole 40 is sealed by this inclined surface, a spherical or pellet-shaped sealing material is placed in the sealing hole so as not to fall into the cavity, and a laser beam or a halogen lamp in a vacuum atmosphere. It can be heated and melted by irradiation. Such a convex part 39 and the sealing hole 40 can be formed using jigs, such as a punch, for example.

  The convex portion 39 is disposed in a planar space defined between the tip of the short first support arm 14 and the weight portion 10a of the adjacent vibrating arm 10. In this way, the convex portion 39 is positioned further in front of the tip of the first vibrating arm in the extending direction of the first support arm so as not to overlap with the piezoelectric vibrating piece 32 in plan view, and the piezoelectric vibration. In the length direction of the piece 32, it is provided in a range at least partially overlapping with the second support arm. As a result, the package 33 can be reduced in height and downsized in plan.

  3A and 3B show a third embodiment of the piezoelectric device according to the present invention. The piezoelectric vibrator 51 of the third embodiment includes a package 3 that hermetically seals a thickness-shear vibration mode piezoelectric vibrating piece 52 inside. Since the package 3 has exactly the same configuration as the package of the first embodiment, further description is omitted.

  The piezoelectric vibrating piece 52 includes a base end portion 53 and a rectangular flat plate-like vibrating portion 54 extending from the base end portion in the length direction. Further, the piezoelectric vibrating piece 52 includes a first support arm 57 and a second support arm 58 that are disposed on both sides in the width direction and are coupled to connecting portions 55 and 56 on both sides of the base end portion 53. The first and second support arms 57 and 58 respectively extend substantially parallel to both sides of the vibrating portion from the connecting portion. The first support arm 57 is formed to be half as long as the second support arm 58.

  The package 3 has the same configuration as the package of the first embodiment. In the present embodiment, the convex portion 7a provided on the base 4 is positioned ahead of the tip of the first vibrating arm in the extending direction of the short first support arm 57 so as not to overlap the piezoelectric vibrating piece 52 in plan view. And at least partially overlapping the second support arm 58 in the longitudinal direction of the piezoelectric vibrating piece. As a result, similar to the first embodiment, the package 3 can be reduced in height and reduced in size in plan view. Further, the base 4 can be a laminated structure composed of a minimum of two ceramic thin plates, and the package 3 can be effectively reduced in height.

  Also in the present embodiment, the piezoelectric vibrating piece 52 is configured such that the connecting portion 56 of the base end portion 53 with the second support arm 58 is shorter than the connecting portion 55 with the first support arm 57 in the width direction. 52 is disposed closer to the second support arm than the first support arm. Thereby, the position of the center of gravity of the piezoelectric vibrating piece 52 is closer to the second supporting arm 58 than the first supporting arm 57, so that the piezoelectric vibrating piece can be supported in a more balanced manner. Therefore, vibration leakage of the piezoelectric vibrating piece 52 can be effectively prevented, and further vibration stability can be achieved.

  4A and 4B show a fourth embodiment of the piezoelectric device according to the present invention. The piezoelectric vibrator 61 according to the fourth embodiment includes a package 33 that hermetically seals the thickness-vibration vibration mode piezoelectric vibrating piece 62 inside. Since the package 33 has the same configuration as the package of the second embodiment, further description thereof is omitted.

  Similarly to the piezoelectric vibrating piece 52 of the third embodiment, the piezoelectric vibrating piece 62 includes a base end portion 63, a rectangular flat plate-like vibrating portion 64 extending in the length direction from the base end portion, and a width direction thereof. It has a first support arm 67 and a second support arm 68 that are arranged on both sides and are connected to connecting portions 65 and 66 on both sides of the base end portion 63. The first and second support arms 67 and 68 respectively extend substantially parallel to both sides of the vibrating portion from the connecting portion. The first support arm 67 is formed to be half as long as the second support arm 68.

  The package 33 has the same configuration as the package of the second embodiment. In the present embodiment, the convex portion 39 provided on the lid 35 does not overlap with the piezoelectric vibrating piece 62 in a plan view, and extends ahead of the tip of the first vibrating arm in the extension direction of the short first support arm 67. And at least partially overlaps the second support arm 68 in the length direction of the piezoelectric vibrating piece. As a result, similar to the second embodiment, the package 33 can be reduced in height and planarly reduced in size.

  The present invention is not limited to the above embodiments, and can be implemented with various modifications or changes within the technical scope thereof. For example, the piezoelectric vibrating piece can be fixed to the bottom surface of the cavity of the base at the first and second support arms and the base end portion, and thereby more stably and reliably supported. In addition to the piezoelectric vibrators of the above embodiments, the present invention can be applied to various piezoelectric devices such as a piezoelectric gyro element in which two pairs of vibrating arms extend from the base end portion.

  DESCRIPTION OF SYMBOLS 1, 31, 51, 61 ... Piezoelectric vibrator, 2, 32, 52, 62 ... Piezoelectric vibrating piece, 3, 33 ... Package, 4, 34 ... Base, 5, 35 ... Lid, 6, 7, 36, 37 ... Ceramic thin plate, 7a, 39 ... convex part, 8, 38 ... sealing material, 953, 63 ... base end part, 10, 11 ... vibrating arm, 10a, 11a ... weight part, 12, 13, 53, 63 ... connecting part , 14, 57, 67: first support arm, 1558, 68: second support arm, 16-18: mount electrode, 19-21: conductive adhesive, 22, 40: sealing hole, 23, 41: sealed Stop material, 54, 64... Vibrating part.

Claims (11)

A vibrating piece including a vibrating portion, and a first support portion and a second support portion that extend from a base end portion of the vibrating portion and are disposed along both sides of the vibrating portion ;
A package including a base and a lid joined to the base, and the vibration piece is mounted inside;
A deaeration hole provided to communicate the inside and the outside of the package, and closed by a sealing material;
Including
The first support part and the second support part are attached to the base,
The length of the first support portion in the direction extending from the base end portion is shorter than the length of the second support portion in the direction extending from the base end portion,
The vibrator is characterized in that the sealing material is disposed closer to the first support portion than the second support portion so as not to overlap the vibrating piece in plan view. In claim 1,
The base is provided with a bottomed recess,
The lid closes the opening of the recess,
The vibrator, wherein the vibrating piece is attached to the inside of the recess. In claim 2,
The inner wall of the concave portion includes a convex portion protruding toward the inner side,
The vibrator, wherein the sealing material is disposed on the convex portion in a plan view. In claim 3,
The first support portion is disposed along one side of the vibrating portion in plan view.
The second support part is disposed along the other side of the vibration part in plan view,
The convex portion is
The vibrator according to claim 1, wherein the vibrator is arranged ahead of a tip end of the first support portion along a direction in which the first support portion extends in a plan view. In any one of Claims 1 thru | or 4,
The vibrator is arranged so as to be closer to the second support part than the first support part in a plan view. In any one of Claims 1 thru | or 5,
The vibrator is a vibrating arm that vibrates by bending vibration. In claim 6,
The vibrator, wherein the vibrating arm includes a weight portion at a tip thereof. In any one of Claims 1 thru | or 5,
The vibrator is characterized in that the vibrator vibrates by thickness shear vibration.   An oscillator comprising the vibrator according to claim 1.   A gyro comprising the vibrator according to claim 1.   An electronic apparatus comprising the vibrator according to claim 1.

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