JP5691687B2 - Inspection device - Google Patents

Description

  The present invention relates to an inspection apparatus.

  For example, confocal microscope, optical coherence tomography (OCT: Optical Coherence Tomography), SHG (Second harmonic generation: Second) are methods for measuring the surface and internal structure and state of scatterers such as skin and other biological tissues. There are various methods such as harmonic generation) light microscope, ultrasonic echo, X-ray, MRI (magnetic resonance imaging) and the like. Among these, in living body measurement, light measurement using light is suitable because there is no problem of exposure and the like, and the object to be measured can be limited by selecting the wavelength of irradiation light. In addition, the optical measurement has an advantage that the apparatus can be reduced in size and can be reduced in price as compared with the X-ray or the like.

  For example, near-infrared light that irradiates a living tissue with near infrared light, detects light diffusely reflected in the living tissue with a photodetector, and performs quantitative analysis of the living tissue from a signal obtained by the photodetector. There are optical measurement methods such as external spectroscopy. In optical measurement methods such as near infrared spectroscopy, various information in living tissue can be obtained non-invasively and instantaneously, so it is attracting attention in many applications in the medical field. It is used for measurement.

  In addition to this, there is a method for quantitative evaluation of the state of collagen structure in the skin and collagen. It is known that the orientation and distribution state of the collagen structure that occupies 70% or more of the dermis layer in the skin has a close relationship with skin firmness and wrinkles. For this reason, comprehensive evaluation of changes in the collagen structure inside the skin and changes in skin surface morphology before and after using skincare products is very important in developing useful ingredients for cosmetics and selecting cosmetics to use. It is valid.

  By the way, in the past, it was difficult to evaluate the state of the dermis inside the skin non-invasively without damaging the collagen structure, but in recent years, non-invasive skin without damaging the collagen structure by optical measurement techniques. It is becoming possible to evaluate the state of the internal dermis.

  Patent Document 1 discloses a method of irradiating long and short pulse light toward the inside of the skin, detecting the generated second harmonic generation light (SHG light), and measuring the collagen orientation in the skin based on the detection result. Has been. A method for visualizing the collagen structure inside the skin by applying OCT has also been proposed.

  Further, Patent Document 2 discloses a skin image acquisition device for acquiring an image used for property evaluation such as skin elasticity and elasticity.

  Patent Document 3 discloses that P-polarized light is incident on the skin surface and the reflected light of the S-polarized component is received, and S-polarized light is incident on the skin surface and the reflected light of the P-polarized component is received. There is disclosed a method for evaluating the skin transparency based on the total reflectance of two reflected lights of an S-polarized component reflected light and a P-polarized component reflected light.

  However, the method described in Patent Document 1 has a problem that the measurement device used is expensive and large, and cannot be used by general users. Yes.

  In addition, since the information obtained by the skin image acquisition device described in Patent Document 2 is only information based on the surface of the skin, information related to the internal structure of the skin, such as skin elasticity, is indirectly indirectly to some extent. Although it is possible to know, it was insufficient to directly evaluate the state of collagen structure in the skin.

  In addition, the method described in Patent Document 3 irradiates polarized light in a specific direction and detects light having a polarization component orthogonal to the irradiated light, so that the skin surface state is sufficiently known. It is difficult to determine the skin condition in detail.

  The present invention has been made in view of the above, and provides a low-cost inspection apparatus that can easily detect the state of the surface and the inner surface of the skin and can determine the state of the skin. It is intended.

The present invention provides a light source that irradiates a test object with linearly polarized light having a first polarization direction, and a regular reflection light detector that detects light regularly reflected on the test object from among the light irradiated from the light source. An optical element that is diffusely reflected by the inspection object among the light emitted from the light source and transmits light in a second polarization direction orthogonal to the first polarization direction; and the optical Covers the diffuse reflected light detector that detects light that has passed through the element, the light source, the specular reflected light detector, the optical element, and the diffuse reflected light detector, and the inspection target is irradiated with light from the light source. features and dark box having an opening in part, have a, a transparent plate in contact with the test object provided in the opening of the dark box, the transparent plate, that the one and the other surfaces are not parallel And

  In the present invention, the transparent plate is characterized in that one surface and the other surface are not parallel.

  The present invention also provides a light source that irradiates the inspection target with linearly polarized light in the first polarization direction, and a regular reflection light that detects light regularly reflected by the inspection target among the light irradiated from the light source. A detector, and an optical element that transmits light in a second polarization direction orthogonal to the first polarization direction, the light being diffusely reflected in the inspection object among the light irradiated from the light source; Covers the diffuse reflected light detector that detects light that has passed through the optical element, the light source, the specular reflected light detector, the optical element, and the diffuse reflected light detector, and irradiates the inspection object from the light source. A dark box having an opening in a portion to be formed; and a transparent member formed in the entire inside of the dark box.

  Further, according to the present invention, the light emitted from the light source is irradiated to an irradiation area in the inspection object, and the diffuse reflection detector is installed in a direction substantially perpendicular to the surface of the inspection object in the irradiation area. It is characterized by being.

  The present invention is characterized in that a plurality of measurement systems including the light source, the specular reflection light detector, and the diffuse reflection light detector are provided.

  Further, the present invention is characterized in that the light source includes a light emitting diode and an optical element that transmits only a component in the first polarization direction among the light emitted from the light emitting diode. .

  In the invention, it is preferable that the light source has one or a plurality of surface emitting lasers.

  According to the present invention, the light source is a surface emitting laser array in which a plurality of the surface emitting lasers are two-dimensionally arranged.

  In the present invention, the specular reflection light detector and the diffuse reflection light detector are connected to an analysis unit, and the analysis unit includes a value obtained by the specular reflection detector and the diffuse reflection light. Based on the value obtained by the detector, the surface of the inspection object and the internal state in the vicinity of the surface are displayed on a display unit connected to the analysis unit.

  ADVANTAGE OF THE INVENTION According to this invention, the state of the surface and inner surface of skin can be detected easily, and the small test | inspection apparatus which can discriminate | determine the state of skin can be provided at low cost.

Structural diagram of the inspection apparatus according to the first embodiment The principal part enlarged view of the inspection apparatus in 1st Embodiment Explanation of light reflection Explanatory drawing of the test | inspection apparatus in 1st Embodiment Structure diagram of inspection apparatus in second embodiment Structure of surface emitting laser element Top view of the inspection apparatus according to the third embodiment Structural diagram of the inspection apparatus in the third embodiment Structure diagram of inspection apparatus in fourth embodiment Structure diagram of inspection apparatus in fifth embodiment

  The form for implementing this invention is demonstrated below. In addition, about the same member etc., the same code | symbol is attached | subjected and description is abbreviate | omitted. Moreover, in this Embodiment, a scatterer means the arbitrary things comprised with a scattering medium, for example, a biological tissue is mentioned. The inspection apparatus according to the present embodiment measures an inspection object existing in a scattering medium inside the scatterer, and skin is an example of the inspection object. In this specification, the skin and the like will be described, but the inspection target of the inspection apparatus according to the present embodiment is not limited to the skin and the like.

[First Embodiment]
The inspection procedure in this embodiment is to non-invasively quantify the state of the skin by inspecting the state of the skin, such as the smoothness of the skin surface and the orientation and density of collagen in the dermis layer inside the skin. is there. One of the skin aging phenomena with aging is an increase in wrinkles, etc. From the viewpoint of beauty, there is a need for a method and an inspection apparatus for quantitatively inspecting wrinkles and the like in order to prevent and improve wrinkles. ing.

  Since the state of the dermis layer inside the skin is considered to be greatly involved in the formation of wrinkles, it is necessary to quantitatively examine not only the state of the skin surface but also the state of the skin. As a wrinkle inspection method, a wrinkle grade standard is established, but it is performed by visual inspection, a two-dimensional image analysis method using a photograph, or the like. However, all of these tests are based only on information on the skin surface, and are insufficient for accurately checking the state of wrinkles. In addition, there is a method of taking a wrinkle replica and performing a three-dimensional analysis using a confocal microscope or the like. However, in this case as well, only the surface state of the skin is analyzed, and the apparatus is also expensive.

  Next, the inspection apparatus in the present embodiment will be described based on FIG. The inspection apparatus in the present embodiment is an optical inspection apparatus having an optical sensor. Specifically, the light source 10, the polarization filter 11, the collimating lens 20, the regular reflection light detector 30, the diffuse reflection light detector 40, and the polarization filter 41 are provided. The light source 10, the polarizing filter 11, the collimating lens 20, the specular reflection light detector 30, the diffuse reflection light detector 40, and the polarizing filter 41 are housed in the dark box 50, and are on the surface in contact with the skin to be inspected. A transparent plate 60 is provided. Further, the specular reflection light detector 30 and the diffuse reflection light detector 40 are connected to the analysis unit 70, and based on information obtained by the specular reflection light detector 30 and the diffuse reflection light detector 40, such as skin Analysis is performed, and the state of the examined skin or the like is displayed on the display unit 80.

  The dark box 50 is made of aluminum, and has a black alumite treatment on the surface in order to reduce the influence of disturbance light and stray light. The dark box 50 has an opening on the surface in contact with the skin to be inspected. A transparent plate 60 through which light having a wavelength emitted from the light source 10 passes is installed in the opening.

  FIG. 2 shows an optical sensor portion of the inspection apparatus according to the present embodiment. For the light source 10, an LED (Light Emitting Diode) is used. The light emitted from the light source 10 by the polarizing filter 11 becomes S-polarized light, and is irradiated to the skin or the like via the collimator lens 20. At this time, the incident angle θ of the light or the like emitted from the light source 10 is 60 °. That is, it is installed so as to be incident through the transparent plate 60 at an angle of 60 ° with respect to the normal direction of the skin surface. In the present embodiment, the light incident on the transparent plate 60 is refracted, but it is not illustrated in the drawings or the like that the light is refracted.

  The collimating lens 20 is installed on the optical path of the light emitted from the light source 10, and makes the light emitted from the light source 10 substantially parallel light. In the present embodiment, the width of the light beam emitted from the collimator lens 20 is 4 mm. Light emitted from the collimating lens 20 is applied to the skin or the like via the transparent plate 60. In addition, the area | region where the light from the light source 10 is irradiated to surfaces, such as skin, may be described as an illumination area | region, and the center of this illumination area | region may be described as an "illumination center." In addition, the light emitted from the collimating lens 20 may be referred to as “irradiation light”. The inspection apparatus according to the present embodiment performs an inspection in a state where the skin or the like is in contact with the outer surface of the transparent plate 60, but the skin or the like is brought into contact with the outer surface of the transparent plate 60. It is possible to accurately determine the position of the illumination center in

  In general, when light is incident on a boundary surface of a medium, a surface including an incident light beam and a normal of the boundary surface at an incident point is called an “incident surface”. Therefore, when the incident light is composed of a plurality of light beams, there is an incident surface for each light beam. In the present specification, for convenience, the light incident surface incident on the illumination is defined as an incident surface on the skin. It describes. In the present embodiment, in the three-dimensional orthogonal coordinate system, the direction orthogonal to the surface of the skin or the like is described as the Z axis direction, and the plane parallel to the surface of the skin or the like is described as the XY plane. That is, a plane including the illumination center and parallel to the XZ plane is a light incident plane on the skin or the like.

  The regular reflection light detector 30 is disposed on the + X side of the illumination center in the XZ plane. An angle ψ between a line L1 connecting the illumination center and the center of the regular reflection light detector 30 and the surface of the skin or the like is about 150 °.

  The polarizing filter 41 is disposed on the + Z side of the illumination center. The polarizing filter 41 is a polarizing filter that transmits P-polarized light and shields S-polarized light. Instead of the polarizing filter 41, a polarizing beam splitter having an equivalent function may be used.

  The diffuse reflection light detector 40 is disposed on the + Z side of the polarizing filter 41. In the present embodiment, an angle φ formed by a line L2 connecting the illumination center and the centers of the polarizing filter 41 and the diffuse reflected light detector 40 and the surface of the skin or the like is about 90 °.

  As described above, the centers of the light source 10, the polarizing filter 11, the polarizing filter 41, the specular reflection light detector 30, and the diffuse reflection light detector 40 exist on the incident surface.

  By the way, when light is irradiated on the skin or the like which is a scatterer, the reflected light from the skin or the like is divided into light reflected on the surface of the skin or the like and light reflected on the inside of the skin or the like. Moreover, the reflected light reflected on the surface of the skin or the like is divided into reflected light that is regularly reflected and reflected light that is diffusely reflected. Hereinafter, in the present embodiment, for convenience, as shown in FIG. 3A, the reflected light regularly reflected on the surface of the skin or the like is referred to as “surface regular reflected light”, as shown in FIG. 3B. The diffusely reflected light is also referred to as “surface diffuse reflected light”.

  The surface of the skin or the like is composed of a flat part (a flat part) and an inclined part (slope part), and the smoothness of the surface of the skin or the like is determined by the ratio. The light reflected at the flat surface portion becomes surface regular reflection light, and the light reflected at the slope portion becomes surface diffuse reflection light. The surface diffuse reflection light is reflected light that is completely scattered and reflected, and the reflection direction is isotropic. For this reason, the light quantity of surface regular reflection light increases, so that smoothness becomes high.

  On the other hand, the reflected light from the inside of the surface tissue such as skin is scattered only by the collagen fibers in the dermis layer and the like, and thus becomes only diffuse reflected light. Hereinafter, for convenience, reflected light from the inside of the skin or the like is referred to as “internal diffuse reflected light”. Similar to the surface diffuse reflection light, the internal diffuse reflection light is also a reflection light that is completely scattered and reflected, and the reflection direction is isotropic.

  The polarization direction in the surface regular reflection light and the surface diffuse reflection light is the same as the polarization direction of the incident light. By the way, in order to rotate the polarization direction on the surface of the skin or the like, incident light must be reflected on a surface inclined in the direction of rotation of the polarization direction along the optical axis. Here, since the light source 10, the illumination center, and the regular reflection light detector 30 are in the same plane, the reflected light rotated in the polarization direction out of the light reflected by the surface is detected by the regular reflection light detector 30. Not.

  On the other hand, the polarization direction of the internally diffuse reflected light is rotated from the polarization direction of the incident light. This is considered to be because the light passes through collagen fibers and the like inside the skin and the like, rotates by multiple reflection, and the polarization direction rotates.

  Therefore, as shown in FIG. 4, although the surface diffuse reflection light and the internal diffuse reflection light are incident on the polarization filter 41, the polarization direction of the surface diffuse reflection light is the same S-polarized light as the incident light. The surface diffuse reflection light is shielded by the polarizing filter 41. On the other hand, since the polarization direction of the internal diffuse reflection light is rotated with respect to the polarization direction of the incident light, the P-polarized component included in the internal diffuse reflection light is transmitted through the polarization filter 41. Therefore, the P-polarized component included in the internally diffuse reflected light is received by the photodetector 40.

  The light quantity of the P-polarized component contained in the internal diffuse reflected light has a correlation with the component and density in the surface layer tissue such as skin. This is because the amount of light of the P-polarized component depends on the absorption into the living tissue and the optical path length when passing through the living tissue inside the skin.

  The regular reflection light detector 30 receives a part of the surface regular reflection light, the surface diffuse reflection light and the internal diffuse reflection light. Each of the regular reflection light detector 30 and the diffuse reflection light detector 40 outputs an electrical signal (photoelectric conversion signal) corresponding to the received light amount, and the electrical signal is input to the analysis unit 70. In the present embodiment, in the reflected light generated by irradiating the skin or the like with light from the light source 10, the signal level in the output signal of the regular reflection light detector 30 is “S1”, and the diffuse reflection light detector The signal level of the 40 output signals is “S2”.

  In the analysis unit 70, values of S1 and S2 measured in advance for a large number of samples such as skin in various states are stored as a “skin state determination table” in a storage unit 71 such as a ROM in the analysis unit 70. ing. Based on the values of S1 and S2 detected by the skin or the like to be measured, the analysis unit 70 selects the closest skin state from among a number of samples such as skin in the skin state determination table, and the selected skin Are displayed on the display unit 80.

More specifically, for example, with respect to the values of S1 and S2 obtained from the skin to be measured or the like, the matching rate of the sample such as skin in the skin state determination table with S1a and S2a is calculated from the equation shown in Equation 1. Then, the sample of the skin or the like having the highest precision is specified as the sample of the skin or the like closest to the skin to be measured.

この皮膚等のサンプルは、皮膚等におけるキメの間隔、角質水分量、メラニン量、ヘモグロビン量等の生理特性値が、それぞれ適切な方法により既に測定されており、計測対象となる皮膚等の生理特性値は、この皮膚等のサンプルの生理特性値に近い値であると推定することができる。

In this skin sample, physiological properties such as texture interval, keratin water content, melanin content, hemoglobin content, etc. have already been measured by appropriate methods. It can be estimated that the value is close to the physiological characteristic value of the sample such as skin.

  In addition, the values of S1 and S2 indicate the surface state and internal state of the skin, etc., and using the ratio S1 / S2 values, for example, “the skin surface has few wrinkles, but the collagen fibers It is also possible to display on the display unit 80 that the structure is disordered and wrinkles are likely to occur in the future, so that early care is necessary.

  Further, in the skin condition determination table, the correlation between the values of S1 and S2 and the grade of the wrinkle standard is stored, and the wrinkle grade level is determined by the analysis unit 70 based on the detected values of S1 and S2. The wrinkle grade can also be displayed on the display unit 80.

  As described above, in the inspection apparatus according to the present embodiment, the optimal skin care product and skin care method can be selected based on the information displayed on the display unit 80, and can be used to develop useful cosmetic ingredients. can do.

[Second Embodiment]
Next, a second embodiment will be described. The inspection apparatus according to the present embodiment has a structure using a surface emitting laser (VCSEL: Vertical Cavity Surface Emitting LASER) element as a light source.

  The inspection apparatus in the present embodiment will be described with reference to FIG. The inspection apparatus in the present embodiment is an optical inspection apparatus having an optical sensor. Specifically, it has a light source 110, a collimating lens 20, a regular reflection light detector 30, a diffuse reflection light detector 40, and a polarization filter 41.

  In the present embodiment, the light source 110 is a surface emitting laser element having a light emitting portion made of a plurality of VCSELs on the same substrate surface, and as shown in FIG. 6, nine light emitting portions (ch1 to ch9) are provided. This is a two-dimensional array of surface emitting laser arrays. Specifically, one surface emitting laser element, that is, one VCSEL chip includes nine light emitting portions (VCSEL), and each light emitting portion is provided corresponding to each light emitting portion. It is connected to the electrode pad via a wiring.

  In this embodiment, since the light source 110 is formed by a surface emitting laser element, the light emitted from the light source provided in the vicinity of the light source in the first embodiment is converted into light having a predetermined linear polarization. This eliminates the need for a polarizing filter. In the present embodiment, the light source 110 is a linearly polarized multi-channel (channel) surface emitting laser array, but the light emitting unit is a single surface emitting laser. Also good. However, in this case, since the ratio of the amount of internal rotation to the amount of irradiation light is very small, from the viewpoint of S / N, a plurality of channels are made to emit light simultaneously so that high output irradiation can be performed.

  Note that the light source 110, the collimating lens 20, the specular reflection light detector 30, the diffuse reflection light detector 40, and the polarization filter 41 are housed in the dark box 50 as in the first embodiment, and A transparent plate 60 is provided on the surface in contact with the skin.

  By the way, in order to detect the surface state of the skin or the like from the amount of reflected light, it is preferable to use a semiconductor laser having a high energy density as the light source 110 in order to improve the S / N. However, in this case, a speckle pattern is generated when light is applied to a rough surface such as the surface of the skin or the like. Since this speckle pattern differs depending on the portion irradiated with light, the detection light in the specular reflection light detector 30 and the diffuse reflection light detector 40 varies, and the identification accuracy decreases.

  For this reason, it is possible to reduce the contrast ratio of the speckle pattern of the reflected light and to detect the reflected light amount more accurately by simultaneously emitting light from a plurality of channels as compared to the case of emitting only one channel. Become. Therefore, measurement accuracy can be increased and identification accuracy can be increased.

  Further, when a surface emitting laser is used in the light source 110, high-density integration, which is difficult with an LED or the like, can be performed, and all the laser light emitted from the light source 110 in the vicinity of the optical axis of the collimating lens 20 can be obtained. Can be collected. Thereby, it is possible to collimate these laser beams with a constant incident angle.

  In the present embodiment, the use of a surface emitting laser for the light source 110 eliminates the need for a polarizing filter provided on the side of the light emitted from the light source 110, thereby further reducing the size and cost of the inspection apparatus. Can do.

  The contents other than the above are the same as those in the first embodiment.

[Third Embodiment]
Next, an inspection apparatus according to the third embodiment will be described. This embodiment has two measurement systems each including a light source, a specular reflection light detector, and a scattered reflection light detector. Specifically, as shown in FIGS. 7 and 8, the inspection apparatus according to the present embodiment includes a first measurement system 201 and a second measurement system 202. The first measurement system 201 includes a first light source unit 210, a first regular reflection light detector 231, and a first scattered reflection light detector 241. The first light source unit 210 includes a light source 211 made of VCSEL or the like and a collimator lens 212. In addition, a polarizing filter 251 is provided in front of the first scattered reflected light detector 241. The second measurement system 202 includes a second light source unit 220, a second regular reflection light detector 232, and a second scattered reflection light detector 242. The second light source unit 220 includes a light source 221 made of VCSEL or the like and a collimator lens 221. In addition, a polarizing filter 252 is provided in front of the second scattered reflected light detector 242. In the present embodiment, the first regular reflection light detector 231 and the second regular reflection light detector 232 are light emitted from the first light source unit 210 and the second light source unit 220 corresponding to each. The specular reflection light is detected. Further, the first scattered / reflected light detector 241 and the second scattered / reflected light detector 242 are respectively scattered / reflected light of the light emitted from the first light source unit 210 and the second light source unit 220 corresponding to each. Is detected.

  The first measurement system 201 and the second measurement system 202 are housed in a dark box 260, and a transparent plate 261 is provided at a portion in contact with the skin to be measured. The first regular reflection light detector 231 and the second regular reflection light detector 232, the first scattered reflection light detector 241 and the second scattered reflection light detector 242 are connected to the analysis unit 70. The first regular reflection light detector 231 and the second regular reflection light detector 232, the first scattered reflection light detector 241 and the second scattered reflection light detector 242 are based on the obtained information, The skin and the like are analyzed, and the display unit 80 displays the state of the skin and the like as a result of the examination.

  The dark box 260 is made of aluminum, and has a black alumite treatment on the surface in order to reduce the influence of disturbance light and stray light. The dark box 260 has an opening on a part of the surface in contact with the skin to be inspected. Yes. In this opening, a transparent plate 261 through which light having a wavelength emitted from the first light source unit 210 and the second light source unit 220 passes is installed.

  As the light sources 211 and 221, a VCSEL is used in the same manner as the light source described in the second embodiment. Each of the first light source unit 210 and the second light source unit 220 is formed so as to emit S-polarized light.

  The irradiation angle of the light emitted from the first light source unit 210 to the skin and the like and the irradiation angle of the light emitted from the second light source unit 220 to the skin and the like are both the same angle θ. θ is 80 °. The angle θ is an angle with respect to the normal line of the surface of the skin or the like. In addition, the irradiation region where the first light source unit 210 emits light to the skin and the like and the second light source unit 220 the light irradiation region to the skin and the like are at substantially the same position and have substantially the same area. Has been.

  The angle between the line connecting the illumination center and the center of the first specular reflection light detector 231 and the surface of the skin, etc., and the line connecting the illumination center and the center of the second specular reflection light detector 232 and the skin, etc. Is the same angle ψ, and in this embodiment, the angle ψ is 170 °.

  The angle between the line connecting the illumination center and the center of the first diffuse reflection detector 241 and the surface of the skin, etc., and the line connecting the illumination center and the center of the second diffuse reflection detector 242 and the skin, etc. Is the same angle φ, and in this embodiment, the angle φ is about 90 °.

  The first light source unit 210, the illumination center, the first specular reflection light detector 231, and the first scattered reflection light detector 241 are arranged on substantially the same plane, and the second light source unit 210, the illumination The center, the second specular light detector 232, and the second scattered light detector 242 are arranged on substantially the same plane.

  The polarization filters 251 and 252 are disposed on the + Z side of the illumination center, and transmit P-polarized light and shield S-polarized light. Instead of the polarizing filters 251 and 252, a polarizing beam splitter having an equivalent function may be used.

  The inspection apparatus according to the present embodiment includes an analysis unit 70 and a display unit 80 as in the first embodiment, and includes a first regular reflection light detector 231, a second regular reflection light detector 232, The first scattered reflected light detector 241 and the second scattered reflected light detector 242 each output an electrical signal (photoelectric conversion signal) corresponding to the amount of received light, and these electrical signals are input to the analysis unit 70 for analysis. Is done. In the present embodiment, when the light beam emitted from the first light source unit 210 irradiates the skin or the like, the signal level in the output signal of the first regular reflection light detector 211 is “S11”, the first The signal level in the output signal of the diffuse reflection light detector 212 is described as “S12”. Further, when the light beam emitted from the second light source unit 220 irradiates the skin or the like, the signal level in the output signal of the second regular reflection light detector 221 is “S21”, and the second diffuse reflection light detector. The signal level in the output signal 222 is described as “S22”. In addition, in order to detect the internal diffuse reflected light with high accuracy, the light emission time in the first light source unit 210 and the light emission time in the second light source unit 220 are individually turned on and analyzed so that they do not overlap. It is controlled by the unit 70 and the like. Thereby, reflected light in different measurement systems is not detected.

  In the analysis unit 70, values of signal levels S11, S12, S21, and S22 measured in advance for a large number of samples such as skin in various states are referred to as “skin state determination table” from the ROM or the like in the analysis unit 70. Is stored in the storage unit 71. Based on the signal levels S11, S12, S21, and S22 detected by the skin or the like to be measured, the analysis unit 70 identifies the closest skin state from a number of skin and other samples in the skin state determination table. The specified state is displayed on the display unit 80.

  As described above, in the inspection apparatus according to the present embodiment, the optimal skin care product and skin care method can be selected based on the information displayed on the display unit 80, and can be used to develop useful cosmetic ingredients. can do.

  In a fibrous scatterer having an orientation like collagen in the dermis layer such as skin, the reflected light has anisotropy in the XY plane, and the ratio of regular reflection and diffuse reflection changes depending on the irradiation direction. In the inspection apparatus according to the present embodiment, light is irradiated from a plurality of directions on the XY plane, and calculation values such as a regular reflection light amount, a surface diffuse reflection light amount, an internal diffuse reflection light amount, and respective variations are used. It is possible to inspect the surface and the internal state of the skin with higher accuracy, and the presence or absence of the collagen inside the skin and the inspection of the orientation direction can be made more reliable.

Since the orientation state of collagen is considered to correlate with the occurrence of wrinkles in the skin, it is possible to simultaneously check the state of collagen inside the skin and the state of wrinkles in the skin using the inspection apparatus in this embodiment. It is possible to determine whether or not the cause of occurrence is due to changes in the skin. In addition, it is possible to select a skin care product for preventing wrinkles by knowing the condition inside the skin before wrinkles are generated on the skin surface. The contents other than the above are described in the first embodiment. And it is the same as that of 2nd Embodiment.

[Fourth Embodiment]
Next, a fourth embodiment will be described. In the present embodiment, both surfaces of the transparent plate 360 are not parallel, and the other surface is inclined with respect to one surface. That is, as shown in FIG. 9, the inspection apparatus according to the present embodiment has a transparent plate 360 that is not a parallel plate. Since this transparent plate 360 is not formed so that one surface on the outside and the other surface on the inside are formed in parallel, of the light emitted from the light source 10, one surface on the outside of the transparent plate 360, the skin, etc. Is regularly reflected by the regular reflection light detector 30, but the light reflected by the other surface inside the transparent substrate 360 is reflected at a different angle from the other surface. The light does not enter the regular reflection light detector 30.

  Therefore, since the light reflected from the back surface of the transparent plate 360, that is, the light reflected from the other surface is formed so as not to enter the regular reflection light detector 30, an accurate inspection can be performed.

  The contents other than those described above are the same as in the first embodiment, and can be applied to the second embodiment and the third embodiment.

[Fifth Embodiment]
Next, a fifth embodiment will be described. The inspection apparatus in the present embodiment is an optical inspection apparatus having an optical sensor. Specifically, as shown in FIG. 10, the light source 10, the polarization filter 11, the collimating lens 20, the specular reflection light detector 30, the diffuse reflection light detector 40, and the polarization filter 41 are provided. The light source 10, the polarization filter 11, the collimating lens 20, the specular reflection light detector 30, the diffuse reflection light detector 40, and the polarization filter 41 are housed in the dark box 50, and the entire dark box 50 is solidified by the transparent member 450. Of the structure.

  Examples of such a transparent member 450 include a transparent resin material. The surface of the transparent member 450 is a surface that is in direct contact with the skin and the like, and the position of the illumination center is determined by this surface, so that it is formed to be a flat surface such as a mirror surface by flattening or polishing.

  In this way, by fixing the entire interior of the dark box 50 with the transparent member 450, the positions of the light source 10, the polarizing filter 11, the collimating lens 20, the specular reflection light detector 30, the diffuse reflection light detector 40, the polarizing filter 41, and the like can be adjusted. It can be fixed securely. As a result, no positional deviation occurs due to vibration or the like, and a highly reliable inspection can be performed.

  Further, by hardening the entire interior of the dark box 50 with the transparent member 450, the problem of back surface reflection in the transparent plate or the like does not occur, and it is not necessary to consider light refraction or the like generated at the interface of the transparent plate. Therefore, the characteristics are improved and the design and manufacture are easy.

  The contents other than those described above are the same as in the first embodiment, and can be applied to the second embodiment and the third embodiment.

  As mentioned above, although the form which concerns on implementation of this invention was demonstrated, the said content does not limit the content of invention.

DESCRIPTION OF SYMBOLS 10 Light source 11 Polarization filter 20 Collimating lens 30 Regular reflection light detector 40 Scattered reflection light detector 41 Polarization filter 50 Dark box 60 Transparent plate 70 Analysis part 71 Storage part 80 Display part

JP 2009-236610 A JP 2008-302101A Japanese Patent No. 4105554

Claims (7)

A light source that irradiates a test object with linearly polarized light in a first polarization direction;
Of the light irradiated from the light source, a regular reflection light detector that detects light specularly reflected in the inspection object;
Of the light emitted from the light source, an optical element that is diffusely reflected on the inspection object and transmits light in a second polarization direction orthogonal to the first polarization direction;
A diffuse reflection detector for detecting light that has passed through the optical element;
A dark box that covers the light source, the specularly reflected light detector, the optical element, and the diffusely reflected light detector, and has an opening in a portion where the inspection object is irradiated with light from the light source;
A transparent plate in contact with the inspection object provided in the opening of the dark box;
I have a,
The inspection apparatus according to claim 1, wherein one surface of the transparent plate is not parallel to the other surface . The light emitted from the light source is irradiated to an irradiation region in the inspection object,
The inspection apparatus according to claim 1, wherein the diffuse reflected light detector is installed in a direction substantially perpendicular to the surface of the inspection object in the irradiation region. The light source, the inspection apparatus according to claim 1 or 2, characterized in that a plurality of measuring systems including the regular reflection light detector and the diffuse reflection light detector. The light source is
A light emitting diode;
The light emitting diode of the light emitted from the inspection apparatus according to any one of claims 1 to 3, characterized in that one having an optical element, a that transmits only the component of the first polarization direction. Said light source inspection apparatus according to claim 1, wherein 3 of the one having one or more surface emitting lasers. 6. The inspection apparatus according to claim 5 , wherein the light source is a surface emitting laser array in which a plurality of the surface emitting lasers are two-dimensionally arranged. The specular reflection light detector and the diffuse reflection light detector are connected to an analysis unit,
The analysis unit is connected to the analysis unit based on the value obtained by the specular reflection light detector and the value obtained by the diffuse reflection light detector and the internal state of the surface to be inspected and the vicinity of the surface. inspection apparatus according to claim 1, characterized in that, characterized in that on the display unit 6.

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