JP5636650B2 - Polarizing element and projection display device - Google Patents

Description

The present invention relates to a polarizing element and projecting shooting display equipment.

  Liquid crystal devices are used in various electro-optical devices. As a structure of a liquid crystal device, a structure in which a liquid crystal layer is sandwiched between a pair of substrates arranged opposite to each other is widely known, and a polarizing element for inputting predetermined polarized light into the liquid crystal layer, a voltage A configuration including an alignment film that controls the alignment of liquid crystal molecules when no voltage is applied is common.

  As a polarizing element, a film-type polarizing element manufactured by orienting iodine or a dichroic dye in a stretching direction by stretching a resin film containing iodine or a dichroic dye in one direction, or on a transparent substrate There is known a wire grid type polarizing element formed by laying nanoscale metal wires on the surface.

  Since the wire grid polarizing element is composed of an inorganic material, it has a feature that it is superior in heat resistance as compared with an organic material, and is particularly suitably used in a place where heat resistance is required. For example, it is suitably used as a polarizing element for a light valve of a liquid crystal projector (projection display device) exposed to light from a high-output light source. As such a wire grid type polarization element, for example, techniques disclosed in Patent Documents 1 and 2 are disclosed.

  In Patent Document 1, in a wire grid polarizing element having a metal thin wire having a cross-sectional shape with a large aspect ratio, a dielectric thin wire extending in parallel with the metal thin wire is formed in contact with the side surface of the metal thin wire, and the dielectric thin wire is formed. The structure which uses and supports a metal fine wire is proposed. According to this configuration, the thin metal wires are not easily collapsed, and high reliability can be obtained.

  Patent Document 2 proposes a configuration in which conductive elements are formed on ribs formed in a stripe shape on the surface of a substrate. According to this configuration, the optical constant (dielectric constant) decreases in the layer below the conductive element (on the rib side), thereby shifting the resonant wavelength of the wire grid polarizing element by a short wavelength, and with respect to TM light in the visible light region. The light transmittance (Tp) can be increased and the light transmittance (Tc) with respect to TE light can be decreased.

  In Patent Document 3, the transmittance for p-polarized (TM) light is increased and the transmittance for s-polarized (TE) light is increased in the visible light region by combining a wire grid and a multilayer dielectric thin film. It can be reduced.

JP 2008-145581 A Special table 2003-502708 gazette Special table 2008-532422 gazette

  However, for the purpose of improving the brightness of devices using a wire grid polarizing element, such as a projection display device and a liquid crystal device, the optical properties are even better than those of the wire grid polarizing device having the structure shown in the above document. There is a need for wire grid polarizers that are shown.

  In order to improve the luminance of light through the wire grid polarizing element, in the case of an absorption type wire grid polarizing element, it is required to improve the balance between transmission characteristics, reflection characteristics, and absorption characteristics. That is, a high TM light transmittance, a low TE light transmittance, a low TE light reflectance, and a high light absorption rate for realizing a low reflectance are required. By adopting a wire grid polarizing element with improved balance, for example, as a polarizing element for a liquid crystal light valve of a liquid crystal projector, it is possible to improve luminance and realize high-contrast image display.

  The present invention has been made in view of such circumstances, and has a high TM light transmittance, a low TE light transmittance, a low TE light reflectance, and a high light absorption for realizing a low reflectance. An object of the present invention is to provide a wire grid type polarizing element that realizes a rate, a manufacturing method thereof, a projection display device, a liquid crystal device, and an electronic device that have high display quality and excellent reliability.

In order to solve the above problems, a polarizing element of the present invention includes a substrate, and a plurality of first dielectric layers provided on the substrate in a stripe shape when viewed from the normal direction of one surface of the substrate, A pair of fine metal wires extending in the same direction as the first dielectric layer on the first dielectric layer, and each normal metal wire as viewed from the normal direction. At least a portion overlaps with the fine metal wires and extends in the same direction as the fine metal wires, and on each of the first dielectric layers and between the pair of fine metal wires A second dielectric layer stacked in contact with the pair of thin metal wires and having an upper end lower than the upper ends of the pair of fine metal wires, wherein the upper end of the second dielectric layer is the pair of fine metal wires. The region between the plurality of first dielectric layers is higher than the lower end of the first dielectric layer. It is in a position lower than the lower end of the pair of fine metal wires, and the height from the upper end of the fine metal wire to the upper end of the second dielectric layer, and the lower end of the fine metal wire to the bottom of the region between the first dielectric layers. The height is set independently according to the wavelength of light transmitted through itself, and the region between the first dielectric layers from the lower end of the thin metal wire is shorter as the wavelength of the light transmitted through itself is shorter. It characterized that you set small the height to the bottom of.
In order to solve the above problems, a polarizing element of the present invention includes a substrate, and a plurality of first dielectric layers provided on the substrate in a stripe shape when viewed from the normal direction of one surface of the substrate, A pair of fine metal wires extending in the same direction as the first dielectric layer on the first dielectric layer, and each normal metal wire as viewed from the normal direction. At least a portion overlaps with the fine metal wires and extends in the same direction as the fine metal wires, and on each of the first dielectric layers and between the pair of fine metal wires And a second dielectric layer that is laminated in contact with the pair of fine metal wires and has an upper end lower than the upper ends of the pair of fine metal wires.

  According to this configuration, since the metal thin wire is supported by the second dielectric layer in contact with the metal thin wire, the metal thin wire is unlikely to fall down, and damage can be suppressed. Further, the bottom of the region between the first dielectric layers is lower than the lower end of the fine metal wires, and the bottom (the upper end of the second dielectric layer) is between the pair of fine metal wires on the first dielectric layer. It is lower than the top of the thin line. Therefore, the material disposed around the fine metal wire can be further reduced, and the dielectric constant around the fine metal wire can be lowered, so that the transmittance of TM light can be improved. In addition, since the light absorption layer absorbs unnecessary light, unnecessary incident light can be absorbed and reflection in the light incident direction can be suppressed. Therefore, it can be set as the polarizing element which has a favorable optical characteristic.

In the present invention, it is desirable that a third dielectric layer is laminated between the thin metal wire and the light absorption layer.
According to this configuration, the separation distance between the thin metal wire and the light absorption layer can be controlled so that the light absorption layer efficiently absorbs unnecessary incident light.

In this invention, it is desirable to have a protective film which covers the said metal fine wire and the said light absorption layer.
According to this configuration, it is possible to prevent the metal thin wire and the light absorption layer from being oxidized, and to obtain a highly reliable polarizing element that is hardly deteriorated.

  In the present invention, the height from the upper end of the thin metal wire to the upper end of the second dielectric layer and the height from the lower end of the fine metal wire to the bottom of the region between the first dielectric layers are transparent to itself. It is desirable to set according to the wavelength of the light to be generated.

  According to the inventors' investigation, depending on the wavelength of light to be transmitted, the height from the upper end of the thin metal wire to the upper end of the second dielectric layer, and the height from the lower end of the fine metal wire to the bottom of the region between the first dielectric layers, It was found that the optimum values were different. That is, a polarizing element having good optical characteristics can be obtained by appropriately designing such that the heights are made equal or different depending on the wavelength of light to be transmitted.

In the present invention, the light absorption layer is preferably made of germanium.
According to this configuration, since the light absorption layer is formed using the formation material that is difficult to oxidize, a highly reliable polarizing element that is not easily deteriorated can be obtained. In particular, when the polarizing element is used for a high temperature application, the oxidation reaction is accelerated under a high temperature environment, but by using germanium, a polarizing element having a highly durable light absorption layer can be obtained.

  Further, in the method for manufacturing a polarizing element of the present invention, the step of forming a metal film on the substrate so as to cover the upper surfaces and side surfaces of the plurality of temporary protrusions provided in a substantially striped shape in plan view on one surface side of the substrate. And removing the metal film provided in the upper surface of the temporary ridge portion and the region between the adjacent temporary ridge portions, and remaining in contact with both sides of each temporary ridge portion in the width direction. Forming a metal film into a plurality of thin metal wires, a step of digging up the temporary protrusions and the substrate exposed from a region where a part of the metal film is removed, and depositing a forming material on an upper end of the thin metal wires. And a step of forming a light absorption layer.

  According to this method, the fine metal wires can be provided with a cycle that is half the cycle (pitch) of the ridges, and it is easy to narrow the pitch of the fine metal wires. In addition, after forming the temporary ridges in advance, forming the fine metal wires, and then dug down the temporary ridges and the grooves, thereby reducing the substrate material disposed around the fine metal wires and having a high aspect ratio. Formation of a fine metal wire can be easily achieved. Furthermore, by forming such a light absorption layer that overlaps the fine metal wires, unnecessary incident light is absorbed and reflection in the light incident direction is suppressed. Therefore, a polarizing element having good optical characteristics can be easily formed.

In the present invention, the light absorption layer is preferably formed by oblique film formation from an oblique direction with respect to a normal direction of one surface of the substrate.
According to this method, it is possible to easily form the light absorption layer that overlaps the thin metal wires without burying the region between the thin metal wires with the material for forming the light absorption layer.

The projection display device of the present invention includes an illumination optical system that emits first and second color lights having different wavelengths, a first liquid crystal light valve that modulates the first color light, and the second liquid crystal light valve. A second liquid crystal light valve for modulating color light; a first polarizing element on which light modulated by the first liquid crystal light valve is incident; and a first liquid crystal light incident on light modulated by the second liquid crystal light valve. 2 polarizing elements, and a projection optical system that projects the polarized light transmitted through the first polarizing element and the polarized light transmitted through the second polarizing element onto a projection surface, the first polarizing element And the second polarizing element is the polarizing element according to any one of claims 1 to 5, wherein the first polarizing element and the second polarizing element have the first polarizing element from the upper end of the thin metal wire. 2 Height to the top of the dielectric layer and below the thin metal wire The height to the bottom area of the first dielectric layers from, but are set independently according to the wavelength of light to be transmitted itself, the wavelength of the first color light and the second color light The height from the lower end of the thin metal wire in the first polarizing element to the bottom of the region between the first dielectric layers is shorter than the lower end of the thin metal wire in the second polarizing element. It is characterized by being smaller than the height to the bottom of the region between the dielectric layers .
The projection display device of the present invention includes an illumination optical system that emits light, a liquid crystal light valve that modulates the light, the polarizing element that receives light modulated by the liquid crystal light valve, and the polarizing element. And a projection optical system that projects the transmitted polarized light onto the projection surface.
According to this configuration, since the polarizing element having excellent optical characteristics is provided, it is possible to provide a projection display apparatus having high reliability and excellent display characteristics.

In the present invention, the illumination optical system emits light including a plurality of colored lights having different wavelengths, the liquid crystal light valve is provided corresponding to each of the plurality of colored lights, and the polarizing element is the polarized light It is desirable that the depth of digging in the groove provided between the plurality of fine metal wires of the element be different corresponding to the color light modulated by the liquid crystal light valve.
According to this configuration, since a polarizing element designed for a plurality of color lights is used, a transmittance can be controlled for each color light, and a projection display device capable of excellent display can be obtained.

The liquid crystal device of the present invention is characterized in that a liquid crystal layer is sandwiched between a pair of substrates, and the above-described polarizing element is formed on the liquid crystal layer side of at least one of the pair of substrates. .
According to this configuration, it is possible to provide a liquid crystal device having a polarizing element having excellent optical characteristics and having excellent display characteristics.

An electronic apparatus according to the present invention includes the above-described liquid crystal device.
According to this configuration, it is possible to provide an electronic apparatus including a display unit or a light modulation unit that is excellent in display quality and reliability.

It is the schematic of the polarizing element which concerns on embodiment of this invention. It is process sectional drawing which shows the manufacturing process of the polarizing element of this embodiment. It is process sectional drawing which shows the manufacturing process of the polarizing element of this embodiment. It is a schematic block diagram which shows an example of the exposure apparatus used for manufacture of a polarizing element. It is a schematic diagram of a projection type display which is one form of electronic equipment. It is a schematic block diagram which shows an example of the liquid crystal device provided with the polarizing element of this embodiment. It is a perspective view of a mobile phone which is one form of electronic equipment. It is explanatory drawing which shows the Example of this invention. It is explanatory drawing which shows the Example of this invention. It is explanatory drawing which shows the Example of this invention. It is explanatory drawing which shows the Example of this invention. It is explanatory drawing which shows the Example of this invention. It is explanatory drawing which shows the Example of this invention. It is explanatory drawing which shows the Example of this invention.

  Hereinafter, a polarizing element and a method for manufacturing the polarizing element according to embodiments of the present invention will be described with reference to the drawings. 1A and 1B are schematic views of a polarizing element 1 according to the present embodiment. FIG. 1A is a partial perspective view, and FIG. 1B is a partial cross-sectional view of the polarizing element 1 cut along a YZ plane.

  In the following description, an XYZ coordinate system is set, and the positional relationship of each member will be described with reference to this XYZ coordinate system. At this time, a predetermined direction in the horizontal plane is defined as an X-axis direction, a direction orthogonal to the X-axis direction in the horizontal plane is defined as a Y-axis direction, and a direction orthogonal to each of the X-axis direction and the Y-axis direction is defined as a Z-axis direction. In the case of this embodiment, the extending direction of the fine metal wires is the X-axis direction, and the arrangement axis of the fine metal wires is the Y-axis direction. In all of the following drawings, the film thicknesses and dimensional ratios of the constituent elements are appropriately changed in order to make the drawings easy to see.

(Polarizing element)
As shown in FIG. 1A, the polarizing element 1 includes a substrate 11 and a fine metal wire 14 formed on the substrate 11 so as to extend in one direction.

The substrate 11 is made of a translucent dielectric material such as glass, quartz, or plastic. Depending on the application to which the polarizing element 1 is applied, since the polarizing element 1 stores heat and becomes high temperature, the substrate 11 is preferably made of glass or quartz having high heat resistance. In the present embodiment, a glass substrate mainly composed of SiO ₂ is used as the substrate 11.

  A plurality of first groove portions (groove portions) 12 extending in the X-axis direction are formed on the surface of the substrate 11, and a portion between adjacent first groove portions 12 is a ridge extending in the X-axis direction. It becomes part 13. The first groove parts 12 are formed at equal intervals in the Y-axis direction with a period shorter than the wavelength of visible light, and the ridges 13 are also arranged with the same period.

  The ridge 13 is a first ridge (first dielectric layer) 13 a having a substantially rectangular cross-sectional shape formed so as to rise from the bottom of the first groove 12 in the vertical direction (Z-axis direction) of the substrate 11. And a second ridge (second dielectric layer) 13b having a substantially rectangular cross-sectional shape formed on the upper portion of the first ridge 13a. The bottom area (plan view area from the Z-axis direction) of the second ridge 13b is smaller than the surface area of the upper surface of the first ridge 13a, and the first ridge 13a and the second ridge 13b is provided so as to overlap each other in the center in the longitudinal direction. Therefore, a part of the 1st protruding item | line part 13a is exposed on both sides on both sides of the 2nd protruding item | line part 13b. In the drawing, the exposed surface of the first ridge 13a is represented by reference numeral 13y.

  The fine metal wires 14 are attached to the side surfaces of the second ridges 13b in each of the two exposed surfaces 13y of the ridges 13 so as to form a pair. Therefore, the side surfaces of the first ridges 13a are It is a side wall portion of one groove portion 12. Further, the fine metal wires 14 are formed so as to extend in the X-axis direction in the same manner as the extending direction of the ridges 13. Such a thin metal wire 14 transmits linearly polarized light (TM light) that vibrates in a direction (Y-axis direction) orthogonal to its extending direction, and linearly polarized light that vibrates in its own extending direction (X-axis direction). (TE light) is reflected. As a material for forming the metal thin wire 14, for example, a metal material such as aluminum is used.

  A space between two thin metal wires 14 provided on one protruding line portion 13 is a second groove portion 15 extending in the X-axis direction. Accordingly, the first groove portions 12 and the second groove portions 15 are alternately provided between the plurality of fine metal wires 14 included in the polarizing element 1. In other words, between the fine metal wires 14, the first groove portions 12 and the second convex stripe portions 13 b are alternately provided in a direction intersecting with the extending direction of the fine metal wires 14. Similar to the first groove 12, the second groove 15 is formed at equal intervals in the Y-axis direction with a period shorter than the wavelength of visible light.

Such fine metal wires 14 are covered on both side surfaces and upper surface by the first protective film 16. The first protective film 16 is formed of a light-transmitting dielectric material such as a silicon oxide film (SiO ₂ ), silicon nitride (SiN), silicon nitrogen oxide (SiON), alumina (Al ₂ O ₃ ), or the like. And has a function of preventing oxidation of the fine metal wires 14. These materials have an extinction coefficient of 0 and are translucent. In addition, since these materials also have insulating properties, the first protective film 16 insulates the fine metal wires 14 from the surroundings. The first protective film 16 of this embodiment uses SiO ₂ as a forming material.

  A light absorption layer 17 is formed on the upper surface of the first protective film 16. The light absorption layer 17 extends in the same direction as the fine metal wires 14 along the fine metal wires 14, and includes germanium (Ge), molybdenum (Mo), tantalum (Ta), tungsten (W), silicon (Si), and the like. It is provided using the material. These materials have a positive extinction coefficient and absorb light. The light absorption layer 17 of this embodiment uses Ge (extinction coefficient: 0.23) as a forming material. Further, the portion of the first protective film 16 sandwiched between the thin metal wire 14 and the light absorption layer 17 is the third dielectric layer in the present invention.

A second protective film 18 that covers the light absorbing layer 17 and is in contact with the first protective film 16 is formed on the light absorbing layer 17. The second protective film 18 can be formed using the same forming material as the first protective film 16. The second protective film 18 of the present embodiment is made of SiO ₂ as a forming material like the first protective film 16.

  Thus, in the polarizing element 1 of the present embodiment, since the first protective film 16 and the second protective film 18 are formed of an insulating material, for example, when the polarizing element 1 is incorporated in an apparatus, the thin metal wire 14 and the light absorption Layer 17 does not energize the wiring of the device.

  The dimension of each part shown in FIG.1 (b) is the space | interval P2 of two metal fine wires 14 provided on the protruding item | line part 13, for example, 70 nm, and the space | interval P2 of the adjacent metal fine wires 14 on both sides of the 2nd groove part 15: It is 70 nm, and the interval (period) T: 140 nm between the adjacent ridges 13. The metal thin wire 14 has a height H: 50 nm and a width W1: 17.5 nm.

  Further, the lower end 14a of the thin metal wire 14 is provided so as to be higher than the bottom 12x of the first groove portion 12 (on the opposite side to the substrate 11 side in the Z-axis direction). Further, the upper end 14 b of the fine metal wire 14 is provided so as to be higher than the bottom of the second groove 15, that is, the upper end 13 x of the ridge 13.

  The height L2 of the first ridge portion 13a, the height L3 of the second ridge portion 13b, and the depth L4 of the second groove portion 15 shown in the figure are the formation of the first groove portion 12 and the second groove portion 15 depending on the design. It can be controlled in the process. As is apparent from the figure, the height from the bottom 12x of the first groove 12 to the lower end 14a of the thin metal wire 14 is equal to the height L2 of the first protruding portion 13a, and the metal from the upper end 13x of the protruding portion 13 is metal. The height of the thin wire 14 to the upper end 14b is equal to the depth L4 of the second groove 15. In this embodiment, L2, L3, and L4 are all 25 nm. Further, the thickness L1 of the substrate 11 shown in the figure is the thickness from the back surface of the substrate 11.

  Further, the thickness L5 of the first protective film 16 sandwiched between the thin metal wire 14 and the light absorption layer 17 is 20 mn, the height L6 of the light absorption layer 17 is 15 nm, and the height of the second protective film 18 is The thickness L7 is 5 nm, and the thickness W2 of the protective film provided on the side surface of the thin metal wire 14 is 5 nm.

  Among these values, the height L2 of the first ridge 13a and the depth L4 of the second groove 15 are particularly closely related to the optical characteristics of the polarizing element 1. Details will be described later with reference to examples.

(Polarizing element manufacturing method)
2 and 3 are explanatory views of a method for manufacturing the polarizing element 1. All the figures correspond to the cross-sectional view of FIG.

  First, as shown in FIG. 2A, a substrate material 11X such as a glass substrate is prepared, a resist material is applied on one surface side of the substrate material 11X by spin coating, and a resist layer is formed by pre-baking this. . As the resist material, for example, a chemically amplified positive photoresist TDUR-P338EM (manufactured by Tokyo Ohka Kogyo Co., Ltd.) is used. Then, for example, the resist layer is exposed by a two-beam interference exposure method using laser light having a wavelength of 266 nm as exposure light, and the resist layer is baked (PEB), and then the resist layer is developed. Thereby, the resist 20 having a striped pattern is formed. The height of the resist 20 of this embodiment is 200 nm.

  Here, as an exposure apparatus that performs the two-beam interference exposure method, for example, the one shown in FIG. 4 can be used. The exposure apparatus 120 includes a laser light source 121 that irradiates exposure light, a diffraction beam splitter 122, a light shielding plate 123, beam expanders 124 and 125, mirrors 126 and 127, and a stage 128 on which the substrate 11X is placed. I have.

  The laser light source 121 is, for example, an Nd: YVO4 laser device having a fourth harmonic wavelength of 266 nm. The diffractive beam splitter 122 is a branching unit that splits one laser beam output from the laser light source 121 to generate two laser beams. The diffractive beam splitter 122 is configured to generate two diffracted beams (± first order) having the same intensity when the incident laser beam is TE polarized light. Note that although it is slight, a straight component (0th-order light) is generated, which adversely affects the resist pattern. Therefore, the 0th-order light is shielded by the light shielding plate 123.

  The beam expander 124 includes a lens 124a and a spatial filter 124b, and has a configuration in which one of the two laser beams branched by the diffractive beam splitter 122 is expanded to, for example, about 300 mm. Similarly, the beam expander 125 also includes a lens 125a and a spatial filter 125b, and is configured to increase the other beam diameter of the two laser beams.

  The mirrors 126 and 127 are configured to reflect the laser beams transmitted through the beam expanders 124 and 125 toward the stage 128, respectively. Here, the mirrors 126 and 127 generate interference light by intersecting the reflected laser beams, and irradiate the resist layer 20a on the substrate 11 with the interference light.

  By irradiating the resist layer 20 a with interference light using such an exposure apparatus 120, the resist layer 20 a can be exposed with a formation pitch narrower than the wavelength of the laser light source 121.

Next, as shown in FIG. 2B, a dry etching process is performed through the resist 20, and the substrate material 11X is patterned by digging down the substrate material 11X, so that the substrate having the groove 12A and the temporary protruding portion 13A is obtained. 11A is formed. As the dry etching in this step, for example, anisotropic etching by performing reactive ion etching using a mixed gas of C ₂ F ₆ , CF ₄ , and CHF ₃ as an etching gas is preferably used.

  Next, as shown in FIG. 2C, a metal thin film 14A using aluminum as a forming material is formed on the entire surface of the substrate 11A so as to cover the upper surface and side surfaces of the temporary protrusion 13A and the bottom surface of the groove 12A. The metal thin film 14A can be formed using a generally known method such as a sputtering method, a CVD method, or a vapor deposition method.

  Next, as shown in FIG. 2 (d), among the metal thin film 14A provided on the entire surface of the substrate 11A, one of the metal thin films 14A provided on the upper surface of the temporary protrusion 13A and the bottom surface of the groove 12A. The portion is removed by dry etching to form a fine metal wire 14. For example, when anisotropic etching by reactive ion etching using a chlorine-based gas as an etching gas is performed, the width in the Y-axis direction of the formed thin metal wire 14 is preferable.

  The width and height of the fine metal wires 14 formed in this way are defined by the film thickness of the metal thin film 14A formed on the temporary protrusion 13A and the height of the temporary protrusion 13A. . Therefore, the aspect ratio of the thin metal wire 14 can be easily changed by changing the height of the temporary protruding portion 13A or the thickness of the metal thin film 14A.

  Next, as shown in FIG. 2 (e), dry etching is performed using the fine metal wire 14 as a mask, and the substrate 11A is dug to form the first groove 12, the ridge 13, and the second groove 15. To do. In the present embodiment, control is performed so that the digging amount (height of the first ridge 13a) L2 of the first groove 12 and the depth L4 of the second groove 15 are equal.

Next, as shown in FIG. 3A, a first protective film 16 for protecting the fine metal wires 14 is formed by vacuum deposition of SiO ₂ . At this time, the thickness (thickness in the Y-axis direction) of the first protective film 16 on the side surface of the fine metal wire 14 is larger than the thickness (thickness in the Z-axis direction) of the first protective film 16 above the fine metal wire 14. It is desirable that is thinner. Such a shape can be realized by forming the first protective film 16 obliquely from the + Y axis direction and the −Y axis direction.

  Further, when vacuum film formation is performed, film formation is also performed on the bottoms of the first groove part 12 and the second groove part 15, and it is considered that each groove part is filled by the film formation amount. Therefore, anisotropic etching is performed as necessary. It is also good to do. Alternatively, each groove portion is formed in advance assuming the amount of burying of the groove portion by film formation, and a part of each groove portion is filled by vacuum film formation, so that the desired amount of digging down of the first groove portion 12 and the second groove portion 15 can be obtained. It is also possible to realize the depth of

  Next, as shown in FIG. 3B, the light absorption layer 17 is formed by obliquely forming Ge. By obliquely depositing Ge, the light absorption layer 17 can be formed above the fine metal wires 14 without burying the first groove portion 12 and the second groove portion 15 with Ge.

Next, as shown in FIG. 3C, a second protective film 18 for protecting the light absorption layer 17 is formed by vacuum deposition of SiO ₂ . In the formation of the second protective film 18, as in the formation of the first protective film 16, it is considered that the first groove portion 12 and the second groove portion 15 are filled, but anisotropic etching is performed as necessary. Alternatively, each groove portion may be formed in advance assuming the amount of burying of the groove portion by film formation.
As described above, the polarizing element 1 of the present embodiment is completed.

  According to the polarizing element 1 having the above-described configuration, since the fine metal wires 14 are supported by the ridges 13, the fine metal wires 14 are unlikely to fall down, and damage can be suppressed. Moreover, since the substrate material between the thin metal wires 14 is removed by providing the first groove portion 12 and the second groove portion 15, it is possible to improve characteristics with respect to transmitted light. Further, since the first groove portion 12 is dug deeper than the lower end of the fine metal wire 14 (on the side of the substrate 11 in the Z-axis direction), the substrate material disposed around the fine metal wire 14 can be further reduced and transmitted. The characteristic with respect to light can be improved. In addition, since the light absorption layer 17 absorbs unnecessary light, unnecessary incident light can be absorbed and reflection of incident light in the light incident direction can be suppressed. Therefore, it can be set as the polarizing element 1 which has a favorable optical characteristic.

  Moreover, according to the manufacturing method of the polarizing element 1 having the above-described configuration, the metal fine wires 14 can be provided with a period that is half the period (pitch) of the temporary protrusion 13A that is formed in advance. Can be improved. Moreover, after forming the temporary protrusion 13A, the fine metal wire 14 is formed, and then the first groove portion 12 and the second groove portion 15 are provided, whereby the fine metal wire between the first groove portion 12 and the second groove portion can be easily formed. 14 The amount of digging from the upper end (the side opposite to the substrate 11 in the Z-axis direction) can be changed. Therefore, it is possible to easily achieve both the removal of the substrate material around the fine metal wires 14 and the suppression of the damage of the fine metal wires 14. Furthermore, by forming such a light absorption layer 17 that overlaps with the fine metal wires 14, unnecessary incident light is absorbed and reflection in the light incident direction is suppressed. Therefore, the polarizing element 1 having good optical characteristics can be easily formed.

  In the present embodiment, the thin metal wires 14 are formed of aluminum. However, the present invention is not limited to this, and a different metal material may be used.

  In the present embodiment, the two-beam interference exposure method is used for forming the resist 20, but the resist 20 can also be formed by transferring a resist pattern to a resist material using a nanoimprint method.

  Further, in the present embodiment, anisotropic etching is performed to form the first groove 12, and the first groove 12 having a substantially rectangular shape in cross section is shown in FIG. 1, but the lower end 14 a of the thin metal wire 14 is shown. If the bottom part 12x of the 1st groove part 12 is formed low, it will not restrict to this. For example, the first ridge 13 a that is the side wall of the first groove 12 may be over-etched, and the first groove 12 may enter the region overlapping with the fine metal wire 14.

  Moreover, in this embodiment, although the space | interval P1 of the two metal fine wires 14 provided on the protruding item | line part 13 and the space | interval P2 of the adjacent metal fine wires 14 on both sides of the 2nd groove part 15 shall be equal. Not limited to this, the interval P1 and the interval P2 may be different. Also, some of the intervals P1 may be different from the other intervals P1, and some of the intervals P2 may be different from the other intervals P2.

  In the present embodiment, the height L2 of the first ridge 13a and the depth L4 of the second groove 15 are formed to be equal, but not limited to this, the values of L2 and L4 are It may be different. As will be described later with reference to examples, it was found that a polarizing element having different values of L2 and L4 can provide good optical characteristics. Suitable for obtaining.

  For example, by performing dry etching in FIG. 2E through an appropriate mask, the depth of the first groove 12 and the second groove 15 can be changed.

  Further, by using different formation materials for the ridges 13 and the substrate 11 below the ridges 13, the difference between the etching rates due to the difference in the formation materials can be used, and the first groove 12 It is also possible to change the digging depth with the second groove 15. Such a configuration can be achieved by forming a layer of the material for forming the ridges 13 on the surface of the substrate material 11X.

  Further, even when the interval P1 and the interval P2 are set to different values, the manner in which the etching gas enters can be changed and the etching rate can be made different for each groove portion, so that the depth of the first groove portion 12 and the second groove portion 15 is reduced. Can be changed.

In the present embodiment, the first protective film 16 and the second protective film 18 are formed using SiO ₂ which is the same forming material. However, different materials may be used.

[Projection display]
Next, an embodiment of the electronic device of the present invention will be described. 5 includes a light source 810, dichroic mirrors 813 and 814, reflection mirrors 815, 816 and 817, an incident lens 818, a relay lens 819, an exit lens 820, light modulators 822, 823 and 824, a cross. A dichroic prism 825 and a projection lens 826 are provided.

  The light source 810 includes a lamp 811 such as a metal halide and a reflector 812 that reflects the light of the lamp. As the light source 810, besides a metal halide, an ultrahigh pressure mercury lamp, a flash mercury lamp, a high pressure mercury lamp, a deep UV lamp, a xenon lamp, a xenon flash lamp, or the like can be used.

  The dichroic mirror 813 transmits red light contained in white light from the light source 810 and reflects blue light and green light. The transmitted red light is reflected by the reflection mirror 817 and is incident on the light modulation unit 822 for red light. Of the blue light and green light reflected by the dichroic mirror 813, green light is reflected by the dichroic mirror 814 and is incident on the green light light modulation unit 823. The blue light is transmitted through the dichroic mirror 814, and the blue light is transmitted through the relay optical system 821 including the incident lens 818, the relay lens 819, and the output lens 820 provided to prevent light loss due to a long optical path. Is incident on.

  In the light modulators 822 to 824, an incident side polarization element 840 and an emission side polarization element part 850 are arranged on both sides of the liquid crystal light valve 830. The incident side polarizing element 840 and the exit side polarizing element unit 850 are arranged so that their transmission axes are orthogonal to each other (crossed Nicols arrangement).

  The incident side polarization element 840 is a reflection type polarization element, and reflects light in a vibration direction orthogonal to the transmission axis.

  On the other hand, the exit-side polarizing element unit 850 includes a first polarizing element (pre-polarizing plate, pre-polarizer) 852 and a second polarizing element 854. As the first polarizing element 852, the polarizing element of the present invention according to the second embodiment described above, which includes a protective film and has high heat resistance, is used. The second polarizing element 854 is a polarizing element using an organic material as a forming material. The exit side polarization element section 850 is an absorption type polarization element, and the polarization elements 852 and 854 cooperate to absorb light. The first polarizing element 852 may be the polarizing element according to the first embodiment of the present invention.

  In general, an absorption-type polarizing element formed of an organic material is easily deteriorated by heat, so that it is difficult to use it as a polarizing means for a high-power projection display device that requires high luminance. However, in the projection display device 800 of the present invention, the first polarizing element 852 formed of an inorganic material having high heat resistance is disposed between the second polarizing element 854 and the liquid crystal light valve 830, and the polarizing element 852 and 854 cooperate to absorb light. Therefore, deterioration of the second polarizing element 854 formed of an organic material can be suppressed.

  In addition, each first polarizing element 852 has the first polarizing element 852 corresponding to the wavelength of the light modulated by the light modulating units 822 to 824 in order to efficiently transmit the light modulated by the light modulating units 822 to 824. The digging depth between the fine metal wires is changed. Therefore, efficient light utilization is possible.

  The three color lights modulated by the respective light modulation units 822 to 824 are incident on the cross dichroic prism 825. The cross dichroic prism 825 is formed by bonding four right-angle prisms. A dielectric multilayer film that reflects red light and a dielectric multilayer film that reflects blue light are formed in an X shape at the interface. Yes. These dielectric multilayer films combine the three color lights to form light representing a color image. The synthesized light is projected onto the screen 827 by the projection lens 826 which is a projection optical system, and the image is enlarged and displayed.

  Since the projection display apparatus 800 having the above-described configuration uses the above-described polarizing element of the present invention for the exit-side polarizing element unit 850, deterioration of the polarizing element can be suppressed even when a high-output light source is used. . Therefore, the projection display device 800 having high reliability and excellent display characteristics can be obtained.

[Liquid Crystal Device]
FIG. 6 is a schematic cross-sectional view showing an example of a liquid crystal device 300 including the polarizing element according to the present invention. The liquid crystal device 300 of the present embodiment is configured such that a liquid crystal layer 350 is sandwiched between an element substrate 210 and a counter substrate 320.

  The element substrate 210 and the counter substrate 320 include polarizing elements 330 and 340. The polarizing elements 330 and 340 are the polarizing elements of the second embodiment described above, and each has a structure in which a thin metal wire having a protective film is formed on a light-transmitting substrate such as glass, quartz, or plastic. Yes.

  The polarizing element 330 includes a substrate body 331, a metal thin wire 332, and a protective film 333, and the polarizing element 340 includes a substrate body 341, a metal thin wire 242, and a protective film 343, respectively. In the present embodiment, the substrate bodies 331 and 341 are not only substrates for polarizing elements but also serve as substrates for liquid crystal devices. Further, the fine metal wire 332 and the fine metal wire 242 are arranged so as to cross each other. In any of the polarizing elements, the fine metal wire is disposed on the inner surface side (the liquid crystal layer 350 side).

  On the inner surface side of the polarizing element 330, a pixel electrode 314, wiring (not shown) and a TFT element are provided, and an alignment film 316 is provided. Similarly, a common electrode 324 and an alignment film 326 are provided on the inner surface side of the polarizing element 340.

  In the liquid crystal device having such a configuration, the substrate main bodies 331 and 341 function as the substrate for the liquid crystal device and the substrate for the polarizing element, so that the number of components can be reduced. Therefore, the entire device can be thinned, and the function of the liquid crystal device 300 can be improved. Furthermore, since the device structure is simplified, manufacturing is easy and cost reduction can be achieved.

  In the liquid crystal device of the present embodiment, the polarizing element of the second embodiment is used, but the polarizing element of the first embodiment that does not include a protective film can also be used. In that case, it is preferable to provide a protective layer for protecting each polarizing element separately at the positions of the protective films 333 and 343.

[Electronics]
Next, another embodiment according to the electronic apparatus of the present invention will be described. FIG. 7 is a perspective view showing an example of an electronic apparatus using the liquid crystal device shown in FIG. A cellular phone (electronic device) 1300 illustrated in FIG. 7 includes the liquid crystal device of the present invention as a small-sized display portion 1301, and includes a plurality of operation buttons 1302, an earpiece 1303, and a mouthpiece 1304. . Accordingly, the mobile phone 1300 including a display portion that is excellent in reliability and capable of high-quality display can be provided.

  In addition to the mobile phone, the liquid crystal device of the present invention includes an electronic book, a personal computer, a digital still camera, a liquid crystal television, a projector, a viewfinder type or a monitor direct view type video tape recorder, a car navigation device, a pager, It can be suitably used as image display means for electronic notebooks, calculators, word processors, workstations, videophones, POS terminals, devices equipped with touch panels, and the like.

  The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but it goes without saying that the present invention is not limited to such examples. Various shapes, combinations, and the like of the constituent members shown in the above-described examples are examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.

[Example]
Examples of the present invention will be described below. In this example, evaluation was performed by simulation analysis in order to confirm the effects of the invention. In this example, evaluation was performed by simulation analysis of the modeled polarizing element. In the following description of the embodiments, the reference numerals shown in FIG. 1 are used as appropriate.

  The simulation analysis was performed using GSolver, which is analysis software manufactured by Grating Solver Development, using each parameter such as the shape and refractive index of the modeled polarizing element.

[Verification of digging depth between first groove and second groove]
First, the influence on the optical characteristics of the polarizing element with respect to the depths L2 and L4 of the first groove 12 and the second groove 15 was verified. The optical characteristics compared are light transmittance (Tp) for TM light, light transmittance (Tc) for TE light, reflectance (Rp) for TM light, and reflectance (Rc) for TE light.

  8 to 13 are graphs showing the evaluation results. 8 to 10 show the results when the period T is 70 nm, and FIGS. 11 to 13 show the results when the period T is 140 nm. 8 and 11 are the evaluation results for blue light (wavelength: 440 nm), FIGS. 9 and 12 are the evaluation results for green light (wavelength: 530 nm), and FIGS. 10 and 13 are for red light (wavelength: 640 nm). The evaluation results are shown.

  Each (a) shows transmission characteristics with the horizontal axis representing the L2 value (nm) and the vertical axis representing the transmittance (%), and the optical characteristics with respect to changes in the L2 value when the L4 value is used as a reference. It shows a change. Each (b) also shows reflection characteristics with the horizontal axis representing the value of L2 (nm) and the vertical axis representing the reflectance (%).

  As a result of the evaluation, the optical characteristics were better when the period T was 70 nm than when the period T was 140 nm, and physical properties were improved by narrow pitching of the fine metal wires. Further, the light of each color showed the best Tp in the structure having different values of L2 and L4. The optimum value of L2 with respect to a predetermined value of L4 in each color light is as shown in Table 1 below.

  From this result, it was found that the optimum values of L2 and L4 differ depending on the transmission wavelength. Moreover, it turned out that the value of L2 and L4 does not necessarily need to be equal.

[Verification of film thickness of first protective film]
Next, the influence on the optical characteristics of the polarizing element with respect to the film thickness L5 of the first protective film 16 was verified. The optical properties compared are: light transmittance (Tp) for TM light, light transmittance (Tc) for TE light, reflectance (Rp) for TM light, reflectance (Rc) for TE light, and TM light and TE light. Is the absorption rate.

  FIG. 14 is a graph showing the evaluation results. FIG. 9A shows the transmission characteristics with the horizontal axis representing the value of L5 (nm) and the vertical axis representing the transmittance (%), and the optical characteristics with respect to changes in the value of L5 when the value of L4 is used as a reference. It shows a change. (B) also shows reflection characteristics with the horizontal axis representing the value of L5 (nm) and the vertical axis representing the reflectance (%). (C) also shows the absorption characteristics with the horizontal axis representing the value of L5 (nm) and the vertical axis representing the absorption rate (%).

  As a result of the evaluation, it was found that the light transmittance with respect to TE light decreases as the value of L5 is increased. At the same time, since the reflectivity decreases and the absorptance increases with respect to TE light, when the thickness of the first protective film 16 is increased and the separation distance between the thin metal wire 14 and the light absorption layer 17 is increased, the light absorption layer It has become possible to efficiently absorb TE light, resulting in a decrease in the light transmittance of TE light.

  In addition, since the light transmittance with respect to TM light is increased, the optical characteristics can be improved by increasing the film thickness of the first protective film 16 and increasing the distance between the thin metal wire 14 and the light absorption layer 17. Indicated. Therefore, from this result, it was found that the fine metal wire 14 and the light absorption layer 17 do not directly contact each other, and better optical characteristics are exhibited when an appropriate separation distance is maintained. This trend did not change even when the value of L4 was changed.

  From these results, it was confirmed that the polarizing element having the configuration of the present invention has good optical characteristics, and it was confirmed that the configuration of the present invention is effective for solving the problems.

DESCRIPTION OF SYMBOLS 1,330,340 ... Polarizing element, 11 ... Board | substrate, 11X ... Board | substrate material, 12 ... 1st groove part (groove part), 13 ... Projection stripe part, 13a ... 1st projection stripe part (1st dielectric material layer), 13b ... Second ridge (second dielectric layer), 13A ... Temporary ridge, 14 ... Metal fine wire, 16 ... First protective film (protective film, dielectric layer), 17 ... Light absorbing layer, 18 ... Second Protective film (protective film), 20 ... resist, 300 ... liquid crystal device, 310 ... element substrate (pair of substrates), 320 ... counter substrate (pair of substrates), 350 ... liquid crystal layer, 800 ... projection display device, 810 ... Light source (illumination optical system), 826 ... projection lens (projection optical system), 830 ... liquid crystal light valve, 852 ... first polarizing element (polarizing element), 1300 ... mobile phone (electronic device),

Claims (5)

A substrate,
A plurality of first dielectric layers provided on the substrate in a stripe shape when viewed from the normal direction of one surface of the substrate;
On each of the first dielectric layers, a pair of fine metal wires provided extending in the same direction as the first dielectric layer;
On each of the thin metal wires, at least a portion thereof overlaps with the fine metal wires when viewed from the normal direction, and a light absorption layer provided extending in the same direction as the fine metal wires,
A second dielectric having an upper end lower than the upper ends of the pair of fine metal wires, which is laminated on and in contact with the pair of fine metal wires on each first dielectric layer and between the pair of fine metal wires. A layer, and
An upper end of the second dielectric layer is higher than a lower end of the pair of thin metal wires, and a region between the plurality of first dielectric layers is lower than a lower end of the pair of thin metal wires. Yes,
The height from the upper end of the thin metal wire to the upper end of the second dielectric layer and the height from the lower end of the thin metal wire to the bottom of the region between the first dielectric layers are the wavelengths of the light that passes through it. depending are set independently by and as the wavelength of light to be transmitted itself is short, that you set the height reduced from the lower end of the thin metal wire to the bottom region of the first dielectric interlayer A polarizing element.   The polarizing element according to claim 1, wherein a third dielectric layer is laminated between the thin metal wire and the light absorption layer.   The polarizing element according to claim 1, further comprising a protective film that covers the thin metal wire and the light absorption layer.   The polarizing element according to claim 1, wherein the light absorption layer is made of germanium. An illumination optical system for emitting a first color light and a second color light having different wavelengths;
A first liquid crystal light valve that modulates the first color light;
A second liquid crystal light valve that modulates the second color light;
A first polarizing element on which light modulated by the first liquid crystal light valve is incident;
A second polarizing element on which light modulated by the second liquid crystal light valve is incident;
A projection optical system that projects the polarized light transmitted through the first polarizing element and the polarized light transmitted through the second polarizing element onto a projection surface;
The first polarizing element and the second polarizing element are polarizing elements according to any one of claims 1 to 4,
In the first polarizing element and the second polarizing element, the height from the upper end of the thin metal wire to the upper end of the second dielectric layer, and the bottom of the region between the lower end of the thin metal wire and the first dielectric layer Are set independently according to the wavelength of the light transmitted through them,
The wavelength of the first color light is shorter than the wavelength of the second color light,
The height from the lower end of the thin metal wire in the first polarizing element to the bottom of the region between the first dielectric layers is the region between the lower end of the thin metal wire and the first dielectric layer in the second polarizing element. A projection display device characterized by being smaller than the height to the bottom of the projector.

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