JP5611790B2 - Magnetic levitation device - Google Patents

Description

  The present invention relates to a magnetic levitation apparatus that supports a floating body in a non-contact manner by a magnetic force of a magnet, and more particularly to a magnetic levitation apparatus suitable for non-contact support of a rotating body.

  Magnetic bearings are widely used as means for supporting a rotating body in a non-contact manner. Usually, a magnetic bearing is comprised by the radial bearing which carries out non-contact support of the movement orthogonal to the rotating shaft of the rotor which rotates, and the thrust bearing which carries out non-contact support of the movement parallel to a rotating shaft. In that case, in order to stably support the rotor, which is a floating body, in a non-contact manner, it is common to apply a normal conducting attraction type magnetic levitation system that controls the attractive force of the electromagnet to any bearing. .

  In the normal conducting magnetic levitation system, it is necessary to always form a predetermined attraction force by flowing a bias current through the electromagnet in order to support the levitated body in a non-contact manner. Therefore, power is always consumed regardless of the presence or absence of external force acting on the rotor. Further, since the electromagnet coil is always energized, heat generation is unavoidable, and some cooling means must be taken.

  Applying so-called zero power control, in which a magnet unit is composed of permanent magnets and electromagnets, and the excitation current to the electromagnet is converged to zero while maintaining the stability of the levitated state in order to perform attraction type magnetic levitation with low power consumption (For example, refer to Patent Documents 1 and 2). By adopting such a configuration, the magnetic force required to support the floating body in a non-contact manner can be provided by the magnetic force caused by the permanent magnet, and the bias that needs to flow to the electromagnet in order to support the non-contact in a steady manner. No current is required. Further, even when the relative displacement between the levitating body and the magnet unit is large, a large electromagnetic force can be controlled with a small excitation current to the electromagnet.

  However, when a magnetic bearing is configured by applying zero power control, magnetic levitation control is performed so that the excitation current to the electromagnet always converges to zero, so the excitation current converges to zero and the gap length changes. As a result, it becomes stable at a position where magnetic levitation can be achieved only by the magnetic force of the permanent magnet. Accordingly, when the rotor's own weight or steady external force acts on the magnetic bearing, the rotation center of the rotor is displaced according to the external force. Displacement of the center of rotation causes, for example, a problem of swirling in a device that rotates at high speed, and in a pump or the like, a fluctuation in efficiency due to the rotational position becomes a problem. In some cases, the rotor may come into contact with a container or a pipe. .

JP 61-102105 A Japanese Patent Laid-Open No. 2001-19286

  As described above, in order to reduce the power consumption of the magnetic bearing and to design a large relative displacement between the magnet unit and the levitated body, the magnet unit is composed of an electromagnet and a permanent magnet, and zero power control is applied. The method is effective. However, when a magnetic bearing is configured by applying zero power control, there is a problem that when a steady external force acts on the magnetic bearing, the rotation center of the rotor is displaced according to the external force. This is a major factor that causes a problem of run-out in a device that rotates at a high speed and causes a reduction in efficiency.

  The present invention has been made to solve such a problem, and in a method of constantly converging the excitation current to the electromagnet to zero by zero power control, it is possible to suppress the position fluctuation of the levitated body caused by a steady external force. Provided is a magnetic levitation device capable of obtaining good followability even when a dynamic external force is applied.

A magnetic levitation apparatus according to an embodiment of the present invention includes a levitation body at least partially formed of a ferromagnetic material, a permanent magnet, and an electromagnet, and is disposed so as to face the levitation body. A magnetic unit that forms a magnetic circuit of magnetic flux caused by the permanent magnet via the air gap, and a magnetic unit that forms a magnetic circuit of magnetic flux caused by the electromagnet via the air gap on the floating body, and the magnet unit on the floating body There so as to face said movable frame magnet unit is fixed, and the movable frame and fixed frame for supporting a load applied to the floating body, given the movable frame of the floating body relative to the fixed frame Relative displacement along the non-contact support direction between the movable frame support means that can be supported along the non-contact support direction and the distance between the fixed frame and the movable frame can be adjusted, and the floating body and the magnet unit Measure 1 of a gap sensor, and the fixed frame and the movable frame, the second gap sensor for measuring a relative displacement along the non-contact support direction, and said first gap sensor of the second gap sensor Control means for supporting the floating body in a non-contact support direction along the non -contact support direction by controlling a current of the electromagnet according to each output.

The perspective view which shows schematic structure of the magnetic levitation apparatus concerning 1st Embodiment. The perspective view which shows the structure of the vertical direction support apparatus used for the magnetic levitation apparatus of 1st Embodiment. The perspective view which shows the structure of the magnet unit attached to the vertical direction support apparatus of FIG. The perspective view which shows the structure of the horizontal direction support apparatus used for the magnetic levitation apparatus of 1st Embodiment. Schematic which shows the structure of the control apparatus of the electromagnet electric current in 1st Embodiment. The block diagram which shows the circuit structure of the control arithmetic unit used for the control apparatus of FIG. The characteristic view which shows the relationship between the magnetic support characteristic and spring support characteristic in 1st Embodiment. The figure which shows the response characteristic by control of the exciting current in 1st Embodiment. The block diagram which is for demonstrating the magnetic levitation apparatus concerning 2nd Embodiment, and shows the circuit structure of a control arithmetic unit. The block diagram for demonstrating the magnetic levitation apparatus concerning 3rd Embodiment, and showing the circuit structure of a control arithmetic unit.

  In order to prevent the displacement of the levitated body due to the steady external force described above, a magnet unit is placed inside the movable frame supported by the elastic body against the magnetic levitating system to which zero power control is applied, and acts on the levitated body. A configuration that mechanically absorbs a change in relative displacement that changes according to the magnitude of the external force to be performed is conceivable. By setting it as such a structure, the absolute position of a floating body can be maintained in a predetermined position.

  On the other hand, in a magnetic bearing using an electromagnet, the controlled object is generally only a rotating body. Even in the configuration in which the movable frame supported by the elastic body is arranged on the outer periphery of the rotating body, the control target is only the rotating body, and the operation of the movable frame is a passive operation by the elastic body, so that The absolute position of the floating body can be maintained at a predetermined position with respect to the acting external force. However, when only the levitating body is controlled, there is a problem that when a dynamic external force or the like is applied, the response cannot be sufficiently followed, and the fluctuation of the absolute position of the levitating body temporarily increases. As a result, swirling again becomes a problem.

  Therefore, in the embodiment of the present invention, not only the floating body, but also the movable frame in which the magnet unit is arranged is controlled, so that even when a dynamic external force is applied, it can follow well, and the absolute position of the floating body A magnetic levitation device that can reduce the fluctuation of the excitation current and the excitation current can be provided.

  Embodiments of the present invention will be described below with reference to the drawings.

(First embodiment)
FIG. 1 is a perspective view showing a schematic configuration of the magnetic levitation apparatus according to the first embodiment.

  The magnetic levitation device of this embodiment supports a cylindrical levitation body 10, a vertical support device 20 that supports the levitation body 10 in the z direction (up and down direction), and a levitation body 10 in the y direction (left and right direction). And a lateral support device 30. The levitated body 10 rotates about an axis in the x direction, and is entirely formed of a ferromagnetic material or partly formed of a ferromagnetic material.

  In FIG. 2, the structure of the vertical direction support apparatus 20 is shown. The longitudinal support device 20 includes a longitudinal fixed frame 21, a longitudinal movable frame 22, a magnet unit (Z-axis magnet unit) 23 disposed in each of the upper and lower parts of the longitudinal movable frame 22, the floating body 10 and the magnet unit. The first gap sensor 24 that measures relative displacement with respect to 23, the second gap sensor 25 that measures relative displacement between the longitudinal fixed frame 21 and the longitudinal movable frame 22, and the vertically movable frame 22 are operated in the vertical direction. It comprises a linear guide 26 that enables it and a spring 27 that elastically supports the longitudinal movable frame 22. The vertical movable frame 22 is connected to the vertical fixed frame 21 via a linear guide 26 and a spring 27, and has a structure movable in the vertical direction.

  The gap sensor 24 may be provided on both the upper and lower sides of the longitudinal movable frame 22 in order to measure the relative displacement between the upper and lower magnet units 23 and the floating body 10. Since the distance between the magnet units 23 is constant and only one of them needs to be measured, for example, as shown in FIG. Similarly, the gap sensor 25 may be provided on both the upper and lower sides of the vertical fixed frame 21 in order to measure the relative displacement between the upper and lower ends of the vertical movable frame 22 and the vertical fixed frame 21. Since both are understood if only one is measured, for example, it is arranged only on the lower side as shown in FIG.

  FIG. 3 shows the configuration of the magnet unit 23. The magnet unit 23 is composed of a permanent magnet 41 and an electromagnet 44 composed of a yoke 42 and a coil 43 wound around the yoke 42. That is, the yokes 42 are connected to both ends of the permanent magnet 41, and the coils 43 are wound around the yokes 42. The magnet unit 23 forms a magnetic circuit of magnetic flux caused by the permanent magnet 41 through the air gap in the floating body 10 and forms a magnetic circuit of magnetic flux caused by the electromagnet 44 through the air gap in the floating body 10. It is supposed to be. Further, the direction of the magnetic flux generated by the electromagnet 44 changes according to the direction of the current flowing through the coil 43, and the magnetic flux formed by the permanent magnet 41 can be strengthened or weakened.

  FIG. 4 shows the configuration of the lateral support device 30. Similar to the vertical support device 20, the horizontal support device 30 includes a horizontal fixed frame 31, a horizontal movable frame 32, and magnet units (Y-axis magnet units) disposed inside the left and right sides of the horizontal movable frame 32. 33, a first gap sensor 34 that measures the relative displacement between the levitated body 10 and the laterally movable frame 32, a second gap sensor 35 that measures the relative displacement between the laterally fixed frame 31 and the laterally movable frame 32, A linear guide 36 that enables the laterally movable frame 32 to move in the left-right direction, and a spring 37 that elastically supports the laterally movable frame 32. The laterally movable frame 32 is connected to the laterally fixed frame 31 via a linear guide 36 and a spring 37, and has a structure movable in the left-right direction.

  The configuration of the magnet unit 33 is the same as that of the magnet unit 23, and is formed of a permanent magnet and an electromagnet. The gap sensor 34 may be provided on both the left and right sides of the movable frame 32 in order to measure the relative displacement between the left and right magnet units 33 and the floating body 10. Is fixed, and only one of them needs to be measured. For example, as shown in FIG. Similarly, the gap sensor 35 may be provided on both the left and right sides of the lateral fixed frame 31 in order to measure the relative displacement between the left and right ends of the lateral movable frame 32 and the lateral fixed frame 31. For example, as shown in FIG. 4, it is arranged only on the left side. Further, the lateral support device 30 includes a position adjustment leg 38 and can be adjusted in the vertical direction.

  The magnet unit 23 is disposed so as to sandwich the floating body 10 from the z direction, and the magnet unit 33 is disposed so as to sandwich the floating body 10 from the y direction. And the magnet units 23 and 33 connect the coil 43 of the electromagnet 44 to a control apparatus in order to control the voltage applied to the electromagnet 44 and to support the floating body 10 in a non-contact manner. FIG. 5 shows a schematic configuration of an electromagnet current control apparatus. Since the vertical support device 20 and the horizontal support device 30 perform control with the same configuration, the control device of the vertical support device 20 will be described as an example here.

  The control device detects the state quantity of the magnetic levitation device, and controls to calculate the voltage applied to the electromagnet 44 in order to stably support the floating body 10 in a non-contact manner in accordance with a signal from the sensor unit 50. It comprises a computing unit 60 and a power amplifier 55 that excites the electromagnet 44 in accordance with the output of the control computing unit 60, and controls the magnetic force generated between the magnet unit 23 and the levitated body 10. Yes. The sensor unit 50 includes a first gap sensor 24 that measures the relative displacement between the floating body 10 and the magnet unit 23, and a second gap sensor 25 that measures the relative displacement between the longitudinal fixed frame 21 and the longitudinal movable frame 22. , And a current sensor 51 for detecting an excitation current to the electromagnet 44.

  FIG. 6 shows a specific configuration of the control arithmetic unit 60. The control arithmetic unit 60 includes differentiators 61 and 62 for calculating the speed from the variation of the displacement, a gain compensator 63 for multiplying an appropriate feedback gain, a current deviation target value generator 64 for setting a current deviation target value, , A subtractor 65 that subtracts the minute fluctuation Δiz of the excitation current to the electromagnet 44 from the current deviation target value, an integration compensator 66 that integrates the output value of the subtractor 65 and multiplies an appropriate feedback gain, and a gain compensator 63. The adder 67 is configured to add the sum of the output values of the A and the subtractor 68 that subtracts the output value of the adder 67 from the output value of the integral compensator 66 and outputs the control voltage ez to the electromagnet 44.

  The differentiator 61 calculates the change rate of the relative displacement between the levitated body 10 and the magnet unit 23 from the minute variation Δzr of the relative displacement between the levitated body 10 and the magnet unit 23 calculated from the output value of the first gap sensor 24. The minute variation Δvr is calculated. The differentiator 62 calculates the vertical fixed frame 21 and the vertical movable frame 22 from the minute fluctuation Δzf of the relative displacement between the vertical fixed frame 21 and the vertical movable frame 22 calculated from the output value of the second gap sensor 25. A minute variation Δvf of the change speed of the relative displacement with respect to is calculated. The gain compensator 63 multiplies an appropriate feedback gain by Δzr, Δvr, Δzf, Δvf, and the minute fluctuation Δiz of the exciting current to the electromagnet 44 calculated from the output value of the current sensor 51.

  Here, when the value of the current deviation target value generator 64 is set to zero, the excitation current to the electromagnet 44 can be converged to zero in a state where the levitated body 10 is stably supported without contact. Thereby, the levitated body 10 can be stably supported only by the magnetic force of the permanent magnet 41, and so-called zero power control can be realized. That is, the floating body 10 can be stably supported in a non-contact manner by controlling the excitation current to the electromagnet 44 by the control loop including the sensor unit 50, the control arithmetic unit 60, and the power amplifier 55. In this state, by setting the current deviation target value to zero, the exciting current to the electromagnet 44 can be made substantially zero while maintaining the non-contact support of the floating body 10.

  When zero power control is applied, when a disturbance load due to mass fluctuation of the floating body 10 or external force fluctuation applied to the floating body 10 is applied, the floating body reaches a position where all these loads and the magnetic force by the permanent magnet 41 are balanced. It is necessary to flow a current through the electromagnet 44 transiently so as to change the relative displacement between the magnet 10 and the magnet unit 23. However, when the stable support state is reached, the excitation current to the electromagnet 44 is converged to zero by zero power control, and all these loads can be stably supported only by the magnetic force of the permanent magnet 41.

  By using the same control device as in FIG. 5 and the same control arithmetic unit as in FIG. 6 for the magnet unit 33 of the lateral support device 30 as well, it is zero in the y direction as well as in the z direction. Power control can be realized. Thereby, it becomes possible to support the floating body 10 in a non-contact manner.

  When the vertical movable frame 22 and the horizontal movable frame 32 are connected to the vertical fixed frame 21 and the horizontal fixed frame 31 via the linear guides 26 and 36 and the springs 27 and 37 as in the above configuration, zero When the floating body 10 is stably supported in a non-contact manner by power control, the relationship shown in FIG. 7 is established. That is, the relative displacement between the floating body 10 and the magnet units 23 and 33 changes so that the magnetic force generated by the permanent magnet 41 and the total weight of the floating body 10 and the acting disturbance load are balanced by zero power control. Further, by combining the spring support characteristics having a slope opposite to the magnetic support characteristics by the springs 27 and 37 having the displacement-restoring force characteristics equivalent to the displacement-attraction force characteristics by the magnetic force, the result is shown in the figure. Thus, the variation in the absolute position of the levitated body 10 is greatly reduced.

  Here, as shown in FIG. 7, the displacement with respect to the load by the magnet is substantially linear in a region where the displacement is relatively small. Therefore, the displacement by the magnet can be absorbed by the spring by combining it with a linear spring that changes the displacement with respect to the load.

  In this way, by providing the movable frames 22 and 32 supported by the linear guides 26 and 36 and the springs 27 and 37 with respect to the fixed frames 21 and 31, a steady external force acts on the floating body 10. However, by moving the movable frames 22 and 32 instead of moving the floating body 10, it is possible to prevent the rotational center position of the floating body 10 from being displaced according to the external force. That is, the fluctuations of the floating body 10 due to the external force can be absorbed by the movable frames 22 and 32.

  In addition, in this embodiment, the control arithmetic unit 60 is configured as shown in FIG. 6, and the relative displacement and speed of the movable frame and the fixed frame are controlled, so that the integrated values of Δzr, Δvr, Δiz, and Δiz are obtained. As compared with the zero power control that feeds back, the fluctuation of the absolute position of the floating body 10 and the convergence of the excitation current to the electromagnet 44 are improved. In particular, when a step external force acts on the floating body 10, high convergence as shown in FIG. 8 can be obtained.

  This is due to the following reason. That is, in a general control method, the vertical movable frame 22 and the horizontal movable frame 32 are passively operated by the springs 27 and 37 in the vertical direction and the horizontal direction, respectively. On the other hand, in the control method of the present embodiment, Δzf and Δvf are calculated from the output values of the second gap sensors 25 and 35, and information on the vertical movable frame 22 and the horizontal movable frame 32 is fed back. This is because passive movements in the vertical and horizontal directions by the springs 27 and 37 are controlled.

  In the present embodiment, high-precision measurement can be realized by using, for example, an eddy current gap sensor as a sensor for measuring the distance. On the other hand, when the detection target is something other than metal, the detection target is not limited to metal by using an optical gap sensor. Further, when the contact type is used, an inexpensive system can be configured. The output command value of the power amplifier is not limited to either current or voltage, and in either case, an effect can be obtained with the same configuration. The same applies to the second and third embodiments described later.

  As described above, according to the present embodiment, the movable frames 22 and 32 are provided on the fixed frames 21 and 31 via the linear guides 26 and 36 and the springs 27 and 37, and the magnet units 23 and 33 are fixed to the movable frames 22 and 32. By performing the magnetic levitation control of the levitation body 10 by the above, the center deviation of the levitation body 10 due to the steady external force can be absorbed by the movable frames 22 and 32, and the center deviation of the levitation body due to the steady external force is suppressed be able to. In addition, by performing feedback control in consideration of the displacement of the movable frames 22 and 32, it is possible to obtain good tracking characteristics even when a dynamic external force or the like is applied.

(Second Embodiment)
FIG. 9 is a block diagram for explaining a magnetic levitation apparatus according to the second embodiment and showing a circuit configuration of a control arithmetic unit. The same parts as those in FIG. 6 are denoted by the same reference numerals, and detailed description thereof is omitted.

  This embodiment is different from the first embodiment described above in that a state observer is used instead of a differentiator in the control arithmetic unit 60 of the control device. The state observer has a necessary motion model calculation formula, and estimates necessary information from various sensor information. The state observer 71 of the present embodiment introduces Δzr, Δzf calculated using the first gap sensor 24 and the second gap sensor 25, and Δiz calculated using the current sensor 51, whereby Δvr, Δvf Is supposed to be estimated.

  In the first embodiment, the control voltage ez is calculated by feeding back six integrated values of Δzr, Δvr, Δzf, Δvf, Δiz, and Δiz. Also in this embodiment, although basically unchanged, Δvr and Δvf are obtained using the state observer 71 instead of differentiating the output values of Δzr and Δzf in order to obtain Δvr and Δvf.

  As with the first embodiment, the other components that are the computing units are a gain compensator 63 that multiplies Δzr, Δvr, Δzf, Δvf, Δiz by an appropriate feedback gain, and a current deviation target value generator 64. A subtractor 65 that subtracts Δiz from the current deviation target value generator 64, an integration compensator 66 that integrates the output value of the subtractor 65 and multiplies an appropriate feedback gain, and the sum of the output values of the gain compensator 63. An adder 67 for adding, and a subtractor 68 for subtracting the output value of the adder 67 from the output value of the integral compensator 66 and outputting the control voltage ez to the electromagnet.

  When the state observer 71 is used as in the present embodiment, it is more resistant to noise than when the differentiators 61 and 62 are used, and the speed of convergence of the estimation error can be arbitrarily changed. Thus, the levitated body 10 can be supported in a non-contact manner. The lateral support device 30 can also be controlled with the same configuration.

  As described above, according to the present embodiment, the effect similar to that of the first embodiment can be obtained, and since there is little noise when obtaining the minute fluctuations Δvr and Δvf of the change speed, the floating body 10 levitation control can be performed more stably.

(Third embodiment)
FIG. 10 is a block diagram illustrating a schematic configuration of a control arithmetic unit for explaining a magnetic levitation apparatus according to the third embodiment. The same parts as those in FIG. 6 are denoted by the same reference numerals, and detailed description thereof is omitted.

  This embodiment is different from the first embodiment described above in that, like the second embodiment, in addition to estimating Δvr and Δvf by the state observer 72, the floating body 10 and the longitudinally movable The external force applied to the frame 22 is estimated and fed back to the control voltage ez.

  With the inputs of Δzr and Δzf calculated using the first gap sensor 24 and the second gap sensor 25 and Δiz calculated using the current sensor 51, the state observer 72 is applied to Δvr and Δvf and the floating body 10. The external force ur and the external force uf applied to the vertical movable frame 22 are estimated. Other configurations include a gain compensator 63 that multiplies Δzr, Δvr, Δzf, Δvf, Δiz by an appropriate feedback gain and multiplies the estimated external forces ur and uf by a feedback gain, a current deviation target value generator 64, Δiz Is subtracted from the current deviation target value, an integration compensator 66 that integrates the output value of the subtractor 65 and multiplies an appropriate feedback gain, and an adder 67 that adds the sum of the output values of the gain compensator 63. The subtractor 68 outputs the control voltage ez to the electromagnet 44 by subtracting the output value of the adder 67 from the output value of the integral compensator 66.

  When the state observer 72 is used as in the present embodiment, a control input corresponding to the estimated external force can be applied by estimating the external force applied to the floating body 10, and the influence of the external force can be reduced. In addition, external force is not normally applied to the vertical movable frame 22, but by estimating the external force applied to the vertical movable frame 22 in advance, for example, when an unexpected disturbance acts on the vertical movable frame 22, It is possible to avoid a state where the floating body 10 and the vertical movable frame 22 are in contact with each other. The lateral support device 30 can also be controlled with the same configuration.

  As described above, according to the present embodiment, it is possible to obtain the same effect as that of the second embodiment, and to estimate the external force applied to the movable frames 22 and 32 in advance, so that the floating body 10 and the movable body 10 can move. A state in which the frames 22 and 32 are in contact with each other can be avoided, and the reliability of the flying control can be further improved.

(Modification)
The present invention is not limited to the above-described embodiments. In the embodiment, the rotating body is used as the floating body. However, the floating body is not necessarily limited to the rotating body, and may be one that only needs to be supported in one direction. For example, in a use for conveying a steel plate in a non-contact manner, only a longitudinal support frame is required.

  Further, the present invention controls the displacement to zero together with the exciting current to the electromagnet, but the displacement does not necessarily have to be strictly zero, and is substantially zero as shown in FIG. Anything is fine. Furthermore, in order to perform more precise position control, it is possible to control the minute positional deviation shown in FIG. 7 closer to zero by the minute current control of the electromagnet.

  Further, the means for supporting the movable frame on the fixed frame is not limited to a spiral spring but may be a leaf spring, and is not necessarily limited to a spring, and an elastic body may be used. Furthermore, an actuator can be used instead of the elastic body.

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 10 ... Levitation body 20 ... Vertical direction support apparatus 21 ... Vertical direction fixed frame 22 ... Vertical direction movable frame 23, 33 ... Magnet unit 24, 34 ... 1st gap sensor 25, 35 ... 2nd gap sensor 26, 36 ... Linear guide 27, 37 ... Spring 30 ... Lateral support device 31 ... Lateral fixed frame 32 ... Lateral movable frame 38 ... Position adjustment leg 41 ... Permanent magnet 42 ... Relay 43 ... Coil 44 ... Electromagnet 50 ... Sensor unit 51 ... Current sensor 55 ... Power amplifier 60 ... Control operation unit 61,62 ... Differentiator 63 ... Gain compensator 64 ... Current deviation target generator 65,68 ... Subtractor 66 ... Integration compensator 67 ... Adder 71,72 ... State observation vessel

Claims (9)

A levitated body at least partially formed of a ferromagnetic material;
A permanent magnet and an electromagnet are provided opposite to each other with the floating body interposed therebetween, and a magnetic circuit of magnetic flux caused by the permanent magnet is formed in the floating body through a gap, and the floating body is formed through the gap. A magnet unit that forms a magnetic circuit of magnetic flux caused by an electromagnet;
A movable frame to which the magnet unit is fixed so that the magnet unit faces the floating body;
A fixed frame that supports a load applied to the movable frame and the floating body;
Movable frame support means for supporting the movable frame with respect to the fixed frame along a predetermined non-contact support direction of the floating body, and capable of adjusting a distance between the fixed frame and the movable frame;
A first gap sensor for measuring a relative displacement of the levitating body and the magnet unit along the non-contact support direction ;
A second gap sensor for measuring a relative displacement of the fixed frame and the movable frame along the non-contact support direction ;
Control means for supporting the floating body in a non-contact support direction along the non -contact support direction by controlling a current of the electromagnet in accordance with each output of the first gap sensor and the second gap sensor;
A magnetic levitation apparatus comprising:   2. The magnetic levitation apparatus according to claim 1, further comprising: means for measuring an excitation current to the electromagnet; and means for causing the excitation current to the electromagnet to converge to zero.   The control means includes the relative displacement derived from the output of the first gap sensor and the time change rate of the relative displacement, the relative displacement derived from the output of the second gap sensor, and the time change rate of the relative displacement. The magnetic levitation apparatus according to claim 1 or 2, wherein a control gain is obtained by multiplying a deviation from a target value of the excitation current to the electromagnet by a predetermined gain.   The control means includes a first differentiator for obtaining a time change rate of relative displacement between the levitating body and the magnet unit from an output of the first gap sensor, and an output of the second gap sensor. The magnetic levitation apparatus according to claim 3, further comprising: a second differentiator that obtains a temporal change rate of relative displacement between the movable frame and the movable frame.   The control means inputs the output of the first gap sensor, the output of the second gap sensor, and the excitation current to the electromagnet, and the time change rate of relative displacement between the floating body and the magnet unit, The magnetic levitation apparatus according to claim 3, further comprising: a state observer that estimates a time change rate of relative displacement between the fixed frame and the movable frame. The state observer estimates the external force applied to the floating body and the movable frame together with the time change speed of each relative displacement,
The control means is characterized in that a control output is obtained by multiplying the external force by a predetermined gain together with the relative displacement, a time change speed of the relative displacement, and a deviation from a target value of the excitation current. The magnetic levitation device according to claim 5.   The control means integrates a target value generator for setting a target value of an excitation current to the electromagnet, a gain applied to a deviation between the target value set by the target value generator and the excitation current to the electromagnet. The magnetic levitation apparatus according to claim 1, further comprising: an integral compensator that performs the operation.   The magnetic levitation apparatus according to claim 1, wherein the movable frame support means includes an elastic element. The floating body is a rotating body,
The magnet unit includes a pair of Y-axis magnet units that sandwich the floating body from the Y direction perpendicular to the rotational axis of the floating body, and a pair of Z that sandwich the floating body from the Z direction orthogonal to the rotational axis and the Y direction. A shaft magnet unit,
The movable frame includes a Y-axis movable frame that fixes the Y-axis magnet unit, and a Z-axis movable frame that fixes the Z-axis magnet unit.
The magnetic levitation apparatus according to claim 1, wherein the fixed frame includes a Y-axis fixed frame that supports the Y-axis movable frame and a Z-axis fixed frame that supports the Z-axis movable frame.

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