JP5609452B2 - Manufacturing method of composite substrate - Google Patents

Description

  The present invention relates to a method for manufacturing a composite substrate, and more particularly to a method for manufacturing a composite substrate in which a cap member is bonded to one main surface of the substrate.

  Conventionally, a composite substrate having electronic components mounted on a substrate has been provided as a module electronic component. In this type of composite substrate, for example, a composite substrate A shown in the perspective view of FIG. 10 is a type in which an electronic component is covered with a cap member 110 in order to protect an electronic component (not shown) mounted on the substrate 101. There are things. The cap member 110 is bonded to the substrate 101 by the bonding material 120 (see, for example, Patent Document 1).

JP 2007-103749 A

  Such a composite substrate is manufactured in a state of a collective substrate. That is, a joined body is formed in which a cap member is temporarily fixed on a substrate (collective substrate) including a plurality of composite substrate portions via an uncured joining material. Next, the bonding material is cured by a heating process, and the cap member is completely fixed to the substrate. Next, the joined body is cut to divide a portion to be a composite substrate.

  In order to prevent the cap member from moving during the heating process, it is conceivable that the joined body is sandwiched between flat jigs and heated while the cap member is pressed.

  However, as exaggeratedly illustrated in the front view of FIG. 9, the joined body 11 in which the cap member 14 is temporarily fixed to the one main surface 12a of the substrate 12 is disposed between the flat jigs 20x and 22x. When the jig 20x is heated while being held by the cap member 14 by being sandwiched between the clips 30, the flat jigs 20x and 22x sandwiching the joined body 11 are deformed (curved) with a temperature change, and the cap member 14 May not be able to be held down, and bonding failure of the cap member 14 may occur. This is considered to be due to a difference in linear expansion coefficient between the jigs 20x and 22x and the substrate 12, a non-uniform temperature distribution of the jigs 20x and 22x and the substrate 12, or the like.

  In view of such circumstances, the present invention intends to provide a method of manufacturing a composite substrate that can satisfactorily bond a cap member to a substrate.

  In order to solve the above problems, the present invention provides a method for manufacturing a composite substrate configured as follows.

  The manufacturing method of a composite substrate includes: (i) a first step of forming a joined body in which a cap member is temporarily fixed to one main surface of a substrate including a plurality of composite substrate portions via an uncured joining material. And (ii) sandwiching the joined body between a first jig member disposed on the cap member side of the joined body and a second jig member placed on the substrate side of the joined body. A second step of heating, cooling and curing the bonding material to completely fix the cap member to the substrate; and (iii) the cap member being completely fixed to the substrate. A third step of cutting the joined body to divide a portion that becomes the composite substrate from the joined body. At least one of the facing surface of the first jig member facing the joined body and the facing surface of the second jig member facing the joined body is formed in a convex shape. In the second step, the substrate of the joined body is deformed by sandwiching the joined body between the facing surface of the first jig member and the facing surface of the second jig member, The first jig member is heated and then cooled in a state where the cap member of the joined body is pressed by the first jig member.

  According to the above method, in the second step, the substrate of the joined body is forcibly deformed along the opposing surface of the convex first jig member or the opposing surface of the second jig member. Even if the substrate of the joined body and the first and second jig members are deformed as the temperature changes, the cap member is held in a state where all the cap members are pressed by the first jig member. Good bonding can be achieved.

  Preferably, the opposing surface of the first jig member and the opposing surface of the second jig member are different from the opposing surface of the first jig member and the second surface in the second step. When the joined body is sandwiched between the opposing surfaces of the jig member, the substrate is warped if it is cooled after being heated without deforming the substrate of the joined body in the second step. And warp the substrate in the opposite direction.

  In this case, in the second step, the first and second jig members are used to forcibly deform the substrate, and the direction opposite to the direction of warping of the substrate that occurs when the cap member is completely fixed is used. Next, the substrate is warped using the first and second jig members. Thereby, the curvature of a board | substrate can be offset and the curvature of a board | substrate when a cap member is fixed completely can be corrected.

  Preferably, at least one of the facing surface of the first jig member and the facing surface of the second jig member is formed in a convex shape by a curved surface.

  In this case, when the joined body is sandwiched between the opposing surface of the first jig member and the opposing surface of the second jig member in the second step, the opposing surface formed in a convex shape by the curved surface The substrate of the joined body can be deformed into a predetermined shape along the same, and it is easy to bring all the cap members of the joined body into contact with the opposing surface of the first jig member.

Preferably, in the second step, when the bonded body is sandwiched between the facing surface of the first jig member and the facing surface of the second jig member, the substrate of the bonded body A pressing member is disposed between the intermediate portion of the other main surface of the second jig surface and the opposed surface of the second jig member, and the opposed surface of the first jig member is arranged by arranging the pressing member. And the opposing surface of the second jig member, only the opposing surface of the second jig member is formed in a convex shape. The pressing member presses the intermediate portion of the other main surface of the substrate of the bonded body, and the opposite surface of the second jig member is an end of the other main surface of the substrate of the bonded body. Abuts against the part.

  In this case, the intermediate part of the joined body is sandwiched between the opposing surface of the first jig member and the pressing member, and between the opposing surface of the first jig member and the opposing surface of the second jig member. When the end of the joined body is sandwiched between the substrates, the substrate of the joined body is warped, so that it is easy to press all the cap members of the joined body with the first jig member.

  Preferably, the opposing surface of the first jig member is disposed between the opposing surface of the first jig member and the opposing surface of the second jig member in the second step. A concave portion into which the cap member of the joined body is fitted when the joined body is sandwiched is formed.

  In this case, when the cap member is fitted into the concave portion of the opposing surface of the first jig member, the displacement of the cap member is reliably prevented.

  Preferably, the warpage amount of the substrate of the joined body when sandwiched between the facing surface of the first jig member and the facing surface of the second jig member in the second step. Is smaller than the thickness of the substrate.

  In this case, the substrate can be deformed with a pressure that does not damage the substrate.

  According to the present invention, the cap member can be favorably bonded to the substrate.

It is sectional drawing of a composite substrate. Example 1 It is a front view which shows the state which pinched | interposed the joined body. Example 1 It is a top view which shows the state which pinched | interposed the joined body. Example 1 It is the (a) side view, (b) top view, (c) front view of a joined body. Example 1 It is a front view which shows the state which pinched | interposed the joined body. (Example 2) It is a front view which shows the state which pinched | interposed the joined body. (Example 3) It is a front view which shows the state which pinched | interposed the joined body. Example 4 It is a bottom view of the 1st jig member. Example 4 It is a front view which shows the state which pinched | interposed the joined body. (Example) It is a perspective view of a composite substrate. (Conventional example 1)

  Hereinafter, embodiments of the present invention will be described with reference to FIGS.

  <Example 1> The manufacturing method of the composite substrate of Example 1 will be described with reference to FIGS.

  FIG. 1 is a cross-sectional view of the composite substrate 10. FIG. 2 is a front view showing a state in which the joined body 11 is sandwiched. FIG. 3 is a plan view showing a state in which the joined body 11 is sandwiched. 4A is a side view of the joined body 11, FIG. 4B is a plan view of the joined body 11, and FIG. 4C is a front view of the joined body 11.

  As shown in FIG. 1, in the composite substrate 10, the mounting components 2, 4, 6 mounted on the one main surface 12 a of the substrate 12 are covered with a cap member 14. The cap member 14 is fixed to the substrate 12 with a bonding material 16. On one main surface 12 a of the substrate 12, land electrodes 12 p for mounting the mounting components 2, 4, 6 and bonding pads 12 q for bonding the cap member 14 are formed. For example, two or more bonding pads 12q are provided for one cap member 14. Although not shown, for example, a connection electrode for mounting the composite substrate 10 on another circuit board or the like is provided on the other main surface 12b or the side surface 12s of the substrate 12. A connection electrode for connecting to another circuit board or the like may be provided on an exposed portion of the one main surface 12a of the substrate 12 that is not covered with the cap member 14.

  As shown in FIG. 4, the composite substrate 10 is manufactured by producing a joined body 11 including a portion that becomes a plurality of composite substrates 10 and then dividing the joined body 11. In the joined body 11, a cap member 14 is fixed to one main surface 12 a of the substrate 12 in a collective substrate state for each portion that becomes the composite substrate 10. In FIG. 4, illustration of the bonding material 16 is omitted.

  Next, the manufacturing process of the composite substrate 10 will be further described.

  (1) First, the joined body 11 is formed. That is, a substrate 12 in a state of a collective substrate including a part that becomes a plurality of composite substrates 10 and having mounting components 2, 4, and 6 mounted on one main surface 12a is prepared. An uncured bonding material 16 is applied to a bonding pad 12q on one main surface 12a of the substrate 12 using a dispenser, and a cap member 14 is placed thereon and temporarily fixed.

  The substrate 12 is a multilayer substrate formed by laminating a plurality of layers of glass epoxy resin or ceramics. The substrate 12 may be a single layer substrate. The cap member 14 is produced by pressing a metal plate into a box shape. Alternatively, it is manufactured by punching a metal plate into a substantially cross shape and bending each piece. The bonding material 16 is a conductive adhesive, a solder paste, or the like, and is cured when heated.

  When the same bonding material 16 is used for the mounting components 2, 4, 6 and the cap member 14, the bonding material 16 is applied to the land electrode 12 p and the bonding pad 12 q on the one main surface 12 a of the substrate 12 by screen printing or the like. The mounting of the components 2, 4, 6 and the temporary fixing of the cap member can be performed simultaneously.

  (2) Next, as shown in FIG. 2 and FIG. 3, while holding the bonded body 11 between the first jig member 20 and the second jig member 22 with the clip 30, Cool in an oven or reflow oven. Thereby, the bonding material 16 is cured, and the cap member 14 is completely fixed to the substrate 12.

  As shown in FIG. 2, the first jig member 20 disposed on the cap member 14 side of the joined body 11 has a facing surface 20 a facing the joined body 11 on the top surface 14 a of the cap member 14 of the joined body 11. It abuts and presses the cap member 14.

  As for the 2nd jig | tool member 22 arrange | positioned at the board | substrate 12 side of the conjugate | zygote 11, the opposing surface 22a which opposes the conjugate | zygote 11 is formed in the convex shape which continues smoothly. For example, as shown in FIG. 2, the facing surface 22a facing the joined body 11 is a part of a substantially cylindrical curved surface whose arc-shaped cross section is continuous in the direction perpendicular to the paper surface of FIG.

  As shown in FIG. 3, the clip 30 is sandwiched along a pair of opposing sides of the rectangular joined body 11 and the jig members 20 and 22, whereby the rectangular joined body 11 and the jig members 20 and 22 are sandwiched. The other pair of sides facing each other are curved as shown in FIG.

  That is, the substrate 12 and the first jig member 20 of the joined body 11 are flat plates in the natural state. When the joined body 11 is sandwiched between the jig members 20 and 22 by the clip 30, the substrate 12 and the first jig member 20 are deformed along the facing surface 22 a of the second jig member 22, and the substrate 12 The other main surface 12b of the second jig member 22 is in contact with the opposing surface 20a of the second jig member 22, and the opposing surface 20a of the first jig member 20 is in contact with the top surface 14a of the cap member 14 of the joined body 11. Thereby, all the cap members 14 can be pressed by the opposing surface 20a of the first jig member 20.

  By setting the joined body 11 between the jig members 20 and 22 to be warped, the temperature distribution of the joined body 11 and the jig members 20 and 22 becomes non-uniform with the temperature change of heating and cooling. However, since the state where all the cap members 14 are pressed can be maintained, the cap members 14 can be favorably bonded to the substrate 12.

  Moreover, the curvature of the board | substrate 12 of the conjugate | zygote 11 can be corrected by heating and cooling in the state which clamped the conjugate | zygote 11 between the jig members 20 and 22. FIG. For example, when the joined body 11 is heated and cooled in a natural state, that is, the substrate 12 is not warped, the joined body 11 is cured when the substrate 12 warps so that the other main surface 12b of the substrate 12 is convex. The substrate 12 is heated and cooled in a state where the substrate 12 is warped so that the other main surface 12b of the substrate 12 is concaved between the tool members 20 and 22, so that the warpage of the substrate 12 is offset. Can be reduced.

  Since the opposing surface 22a of the second jig member 22 is formed in a convex shape with a curved surface, the opposing surface of the second jig member 22 when the joined body 11 is sandwiched between the jig members 20 and 22. The substrate 12 of the bonded body 11 can be deformed into a predetermined shape along the line 22a, and it is easy to bring all the cap members 14 of the bonded body 11 into contact with the facing surface 20a of the first jig member 20. .

  (3) Next, the bonded body 11 in which the cap member 14 is completely fixed to the substrate 12 is cut and divided into individual pieces of the composite substrate 10.

  The composite substrate 10 can be manufactured through the above steps (1) to (3).

  <Example 2> The manufacturing method of the composite substrate of Example 2 is demonstrated, referring FIG.

  The second embodiment is substantially the same as the first embodiment. Hereinafter, the same reference numerals are used for the same components as the first embodiment, and differences from the first embodiment will be mainly described.

  In Example 2, the composite substrate 10 is manufactured in the same process as (1) to (3) in Example 1, but the shape of the jig member used in the process (2) is different from that in Example 1.

  FIG. 5 is a front view showing a state in which the joined body 11 is sandwiched between the first jig member 20 and the second jig member 23. As shown in FIG. 5, the opposing surface 23a facing the joined body 11 of the second jig member 23 has a convex shape whose height changes stepwise due to the pressing member 26 being arranged in the middle portion thereof. Is formed. The top surface 26 a of the pressing member 26 is in contact with the intermediate portion 12 c of the other main surface 12 b of the substrate 12. The end portions 12 d and 12 e of the substrate 12 are in contact with the facing surface 23 a of the second jig member 23. On both sides of the pressing member 26, gaps 28 and 29 are formed between the other main surface 12b of the substrate 12 and the opposing surface of the second jig member 23 and 23a.

  When the joined body 11 is sandwiched between the jig members 20 and 23 by the clip 30, the substrate 12 and the first jig member 20 are relatively lowered on both the left and right sides in FIG. Thus, the opposing surface 20a of the first jig member 20 contacts the top surface 14a of the cap member 14 of the joined body 11. Thereby, all the cap members 14 can be pressed by the opposing surface 20a of the first jig member 20.

  The intermediate part of the joined body 11 is sandwiched between the opposing surface 20 a of the first jig member 20 and the pressing member 26, and the opposing surface 20 a of the first jig member 20 and the second jig member 23 are opposed to each other. Since the end portion of the joined body 11 is sandwiched between the surface 23 a and the substrate 12 of the joined body 11 is warped, all the cap members 14 of the joined body 11 can be pressed by the first jig member 20. Easy.

  <Example 3> The manufacturing method of the composite substrate of Example 3 will be described with reference to FIG.

  In Example 3, the composite substrate 10 is manufactured in the same process as (1) to (3) in Example 1, but the shape of the jig member used in the process (2) is different from that in Example 1.

  FIG. 6 is a front view showing a state in which the joined body 11 is sandwiched between the first jig member 21 and the second jig member 24. As shown in FIG. 6, the first jig member 22 disposed on the cap member 14 side of the joined body 11 is formed in a convex shape in which the facing surface 22 a facing the joined body 11 is smoothly continuous. For example, as shown in FIG. 6, the facing surface 22 a facing the joined body 11 is a part of a substantially cylindrical curved surface whose arc-shaped cross section is continuous in the direction perpendicular to the paper surface of FIG. 6.

  The substrate 12 of the joined body 11 and the second jig member 24 arranged on the substrate 12 side of the joined body 11 are flat plates in a natural state where they are not sandwiched between the clips 30. When the joined body 11 is sandwiched between the jig members 21 and 24 by the clip 30, the substrate 12 and the second jig member 24 are deformed along the opposing surface 21a of the first jig member 21, and the substrate The other main surface 12 b of 12 is in contact with the facing surface 24 a of the second jig member 24. The facing surface 21 a of the first jig member 21 contacts the top surface 14 a of the cap member 14 of the joined body 11. Thereby, all the cap members 14 can be pressed by the opposing surface 21 a of the first jig member 21.

  By setting the joined body 11 to be bent between the jig members 21 and 24, the temperature distribution of the joined body 11 and the jig members 21 and 24 becomes non-uniform as the temperature changes during heating and cooling. However, since the state where all the cap members 14 are pressed can be maintained, the cap members 14 can be favorably bonded to the substrate 12.

  Further, the warping of the substrate 12 can be corrected by heating and cooling in a state where the joined body 11 is bent between the jig members 21 and 24. For example, when heating and cooling the bonded body 11 in a natural state, that is, in a state where the substrate 12 is not warped, the substrate 11 is warped so that the other main surface 12b of the substrate 12 becomes concave. The substrate 12 is heated and cooled while being warped so that the other main surface 12b of the substrate 12 is convex so as to be sandwiched between the members 21 and 24, so that the warpage of the substrate 12 is offset. Can be reduced.

  <Example 4> The manufacturing method of the composite substrate of Example 4 is demonstrated referring FIG.7 and FIG.8.

  In Example 4, the composite substrate 10 is manufactured in the same process as (1) to (3) in Example 1, but the shape of the jig member used in the process (2) is different from that in Example 1.

  FIG. 7 is a front view showing a state in which the joined body 11 is sandwiched between the first jig member 20k and the second jig member 22. FIG. FIG. 8 is a bottom view of the first jig member 20k.

  As shown in FIGS. 7 and 8, the first jig member 20 k disposed on the cap member 14 side of the joined body 11 has the cap member 14 of the joined body 11 on the facing surface 20 s facing the joined body 11. A groove 20p to be fitted is formed.

  The substrate 12 and the first jig member 20k of the joined body 11 are plate-like in a natural state. When the joined body 11 is sandwiched between the jig members 20k and 22 as shown in FIG. 7, the substrate 12 and the second jig member 22 are deformed along the facing surface 20s of the first jig member 20k. The other main surface 12 b of the substrate 12 abuts against the facing surface 22 a of the second jig member 22. The groove 20p of the opposing surface 20s of the first jig member 20k is fitted into the groove on the top surface 14a side of the cap member 14 of the joined body 11, and the bottom surface 20x of the groove 20p contacts the top surface 14a of the cap member 14. Touch. Thereby, all the cap members 14 can be pressed by the bottom face 20x of the groove 20p of the first jig member 20k. Further, since the cap member 14 is disposed inside the inner peripheral surfaces 20y and 20z of the groove 20p of the first jig member 20k and the position of the cap member 14 is regulated, the displacement of the cap member 14 is ensured. Can be prevented.

  When the joined body 11 is sandwiched between the jig members 20k and 22, it is preferable that the amount of warpage of the substrate 12 indicated by the symbol D in FIG. 7 is smaller than the thickness of the substrate 12 indicated by the symbol T. In this case, the substrate 12 can be deformed with a force that does not damage the substrate 12. In other Examples 1 to 3, similarly, it is preferable that D <T.

  The warpage amount D of the substrate 12 is the maximum height of the intermediate portion 12c of the substrate 12 with respect to the plane including the end portions 12d and 12e of the substrate 12.

  <Summary> As described above, when the joined body is sandwiched between the jig members, the substrate of the joined body is warped, so that the cap member can be favorably joined to the substrate.

  The present invention is not limited to the above embodiment, and can be implemented with various modifications.

  For example, the opposing surfaces 20a and 24a of the jig members 20 and 24 are arranged such that the interval between the opposing surfaces of the jig members is larger than that of the intermediate portion when the joined body 11 is disposed between the jig members 22 and 21 as a pair. Since the end portion only needs to be wider, it does not have to be a flat surface in a natural state.

DESCRIPTION OF SYMBOLS 10 Composite board | substrate 11 Junction body 12 Board | substrate 12a One main surface 12b The other main surface 12c Intermediate | middle part 12d, 12e End part 14 Cap member 16 Bonding material 20 1st jig | tool member 20a Opposite surface 20k 1st jig | tool member 20p Groove 20s Opposing surface 21 1st jig member 21a Opposing surface 22 2nd jig member 22a Facing surface 23 2nd jig member 23a Facing surface 24 Pressing member 24a Facing surface 26 Pressing member 30 Clip

Claims (6)

A first step of forming a bonded body in which a cap member is temporarily fixed to one main surface of a substrate including a portion to be a plurality of composite substrates via an uncured bonding material;
In a state where the joined body is sandwiched between a first jig member arranged on the cap member side of the joined body and a second jig member placed on the substrate side of the joined body, And then cooling and curing the bonding material to completely fix the cap member to the substrate;
A third step of cutting the joined body in which the cap member is completely fixed to the substrate and dividing a portion that becomes the composite substrate from the joined body;
With
At least one of the facing surface of the first jig member facing the joined body and the facing surface of the second jig member facing the joined body is formed in a convex shape,
In the second step, the substrate of the joined body is deformed by sandwiching the joined body between the facing surface of the first jig member and the facing surface of the second jig member, A method of manufacturing a composite substrate, comprising: heating and then cooling in a state where the cap member of the joined body is pressed by a first jig member.   The opposed surface of the first jig member and the opposed surface of the second jig member are the opposed surface of the first jig member and the second jig in the second step. When the joined body is sandwiched between the opposing surfaces of the members, the substrate of the joined body is heated without being deformed in the second step, and then the substrate is warped in a direction opposite to the direction in which the substrate warps. The method of manufacturing a composite substrate according to claim 1, wherein the substrate is warped.   The at least one of the opposing surface of the first jig member and the opposing surface of the second jig member is formed in a convex shape by a curved surface. The manufacturing method of the composite substrate of description. In the second step, when the bonded body is sandwiched between the facing surface of the first jig member and the facing surface of the second jig member, the other main side of the substrate of the bonded body A pressing member is disposed between an intermediate portion of the surface and the opposing surface of the second jig member, and the pressing member is disposed, whereby the opposing surface of the first jig member and the first Only the facing surface of the second jig member out of the facing surfaces of the two jig members is formed in a convex shape,
The pressing member presses the intermediate portion of the other main surface of the substrate of the bonded body, and the opposite surface of the second jig member is an end of the other main surface of the substrate of the bonded body. The method of manufacturing a composite substrate according to claim 1, wherein the composite substrate is in contact with a portion.   In the second step, the joined body is placed between the facing surface of the first jig member and the facing surface of the second jig member on the facing surface of the first jig member. The method for manufacturing a composite substrate according to claim 1, wherein a concave portion into which the cap member of the joined body is fitted when sandwiched is formed.   In the second step, the warpage amount of the substrate of the joined body when sandwiched between the facing surface of the first jig member and the facing surface of the second jig member is The method of manufacturing a composite substrate according to claim 1, wherein the method is smaller than the thickness of the substrate.

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