JP5584365B2 - 結合研磨物品および形成方法 - Google Patents
結合研磨物品および形成方法 Download PDFInfo
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- JP5584365B2 JP5584365B2 JP2013527346A JP2013527346A JP5584365B2 JP 5584365 B2 JP5584365 B2 JP 5584365B2 JP 2013527346 A JP2013527346 A JP 2013527346A JP 2013527346 A JP2013527346 A JP 2013527346A JP 5584365 B2 JP5584365 B2 JP 5584365B2
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- binder
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- abrasive
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- 238000000034 method Methods 0.000 title claims description 38
- 239000011230 binding agent Substances 0.000 claims description 148
- 239000000203 mixture Substances 0.000 claims description 131
- 239000006061 abrasive grain Substances 0.000 claims description 89
- 229910052751 metal Inorganic materials 0.000 claims description 64
- 239000002184 metal Substances 0.000 claims description 63
- 239000012071 phase Substances 0.000 claims description 63
- 239000000945 filler Substances 0.000 claims description 42
- 239000011148 porous material Substances 0.000 claims description 35
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 28
- 229910052802 copper Inorganic materials 0.000 claims description 28
- 239000010949 copper Substances 0.000 claims description 28
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 26
- 239000011236 particulate material Substances 0.000 claims description 19
- 238000005245 sintering Methods 0.000 claims description 19
- 239000007791 liquid phase Substances 0.000 claims description 15
- 238000005498 polishing Methods 0.000 claims description 11
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- 239000003795 chemical substances by application Substances 0.000 claims 3
- 238000000227 grinding Methods 0.000 description 289
- 239000000523 sample Substances 0.000 description 133
- 239000000463 material Substances 0.000 description 73
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 26
- 229910052718 tin Inorganic materials 0.000 description 25
- 239000002245 particle Substances 0.000 description 17
- 239000002243 precursor Substances 0.000 description 17
- 230000006872 improvement Effects 0.000 description 16
- 230000008569 process Effects 0.000 description 13
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 11
- 229910003460 diamond Inorganic materials 0.000 description 11
- 239000010432 diamond Substances 0.000 description 11
- 239000010936 titanium Substances 0.000 description 11
- 229910052719 titanium Inorganic materials 0.000 description 11
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 11
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- 239000003082 abrasive agent Substances 0.000 description 9
- -1 oxides Chemical class 0.000 description 9
- 230000008859 change Effects 0.000 description 8
- 229910017052 cobalt Inorganic materials 0.000 description 8
- 239000010941 cobalt Substances 0.000 description 8
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 8
- 238000009826 distribution Methods 0.000 description 8
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- 229910052582 BN Inorganic materials 0.000 description 6
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 6
- 229910000831 Steel Inorganic materials 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- 229910000048 titanium hydride Inorganic materials 0.000 description 6
- 150000002739 metals Chemical class 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 229910001369 Brass Inorganic materials 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000010951 brass Substances 0.000 description 4
- 229910010272 inorganic material Inorganic materials 0.000 description 4
- 239000011147 inorganic material Substances 0.000 description 4
- 150000001247 metal acetylides Chemical class 0.000 description 4
- 239000011368 organic material Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 3
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 230000016507 interphase Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000010008 shearing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 239000011135 tin Substances 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910001104 4140 steel Inorganic materials 0.000 description 1
- 229910052580 B4C Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 101000984533 Homo sapiens Ribosome biogenesis protein BMS1 homolog Proteins 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 102100027057 Ribosome biogenesis protein BMS1 homolog Human genes 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910003564 SiAlON Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- VQYHBXLHGKQYOY-UHFFFAOYSA-N aluminum oxygen(2-) titanium(4+) Chemical compound [O-2].[Al+3].[Ti+4] VQYHBXLHGKQYOY-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- 230000002902 bimodal effect Effects 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- QXJJQWWVWRCVQT-UHFFFAOYSA-K calcium;sodium;phosphate Chemical compound [Na+].[Ca+2].[O-]P([O-])([O-])=O QXJJQWWVWRCVQT-UHFFFAOYSA-K 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
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- 235000010980 cellulose Nutrition 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 239000011246 composite particle Substances 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 239000011363 dried mixture Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052987 metal hydride Inorganic materials 0.000 description 1
- 150000004681 metal hydrides Chemical class 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
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- 230000000737 periodic effect Effects 0.000 description 1
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- 229920002647 polyamide Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
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- 238000001556 precipitation Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000007873 sieving Methods 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000012815 thermoplastic material Substances 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 239000011366 tin-based material Substances 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/009—Tools not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
- B24D3/10—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
- B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Description
最初の結合研磨材サンプルでは、当産業において知られている1A1形状を有する直径4インチのホイールを作製する。サンプルの形成は、27 Philo Curtis Road,Sandy Hook,CT 06482,USAに所在するConnecticut Engineering Associate Corporationより入手したU.S.メッシュ325の大きさの45.96グラムの真鍮粉末(すなわち、銅:スズの重量比が60:40)を含む混合物を形成するステップを含む。この真鍮粉末を、Chemetall Chemical Products,New Providence New Jersey,USAより購入した同じ大きさの5.11グラムの水素化チタンと乾式ブレンドする。USメッシュサイズ−120/+140の立方晶窒化ホウ素の砥粒も真鍮粉末および水素化チタンと混合する。この砥粒は、Saint−Gobain Ceramics and Plastics,Worcester,MAのものであり、CBN−Vとして市販されている。
本明細書に記載のサンプル1と同じ方法を使用してサンプル2を作製する。サンプル2は、砥粒材料の25%を置換する量の溶融石英フィラー材料を含んだ。この溶融石英は、U.S.メッシュ−120/+140の大きさであり、Washington Millsより入手した。最終的に形成された結合研磨材は、比(VP/VBM)が2.3であり、気孔(100%相互接続された気孔)の量が本体の全体積の29%体積パーセントである。
サンプル1と同じ形成方法を使用して第3のサンプル(サンプル3)を作製した。最初の混合物は、372グラムの60/40銅/スズの金属結合組成物、41グラムの水素化チタンの活性結合組成物前駆体、359グラムのサイズB181のCBN−Vの砥粒、サイズ100メッシュの38AアルミナとしてSaint−Gobain Grains and Powdersより入手可能な131グラムのフィラー、および58グラムの実施例1で使用したバインダーを使用して形成される。サンプル3は、比(VP/VBM)が2.5であり、気孔率は約29体積%である。
実施例1に記載の方法に従って第4のサンプル(サンプル4)を作製する。最初の混合物は、138グラムの60/40の銅−スズの金属結合組成物、活性結合成分前駆体としての15グラムの水素化チタン、20グラムの実施例1の有機バインダー、およびSaint−Gobain Ceramics and PlasticsよりRB 270/325 U.S.メッシュのダイヤモンドグリットとして入手可能な164グラムのダイヤモンドから形成される。サンプル4は、比(VAG/VBM)が2.3であり、気孔率は約36体積%である。
6%のコバルトを有する直径0.5インチの炭化タングステンの工作物に対するフルート研削に、サンプル4およびサンプルC2を使用する。この種の被削材は、プロット701および702の間の差で示されるように、炭化タングステン含有量が多い(94%対90%)ために実施例4の項作物よりも研削が困難である。プロット701は、10%のコバルトバインダーを有する炭化タングステンの工作物に対する、3000rpmおよび6インチ/分の研削速度で800秒の研削時間でのサンプルC2の研削動力を表している。実際、プロット701は図6のプロット601と同じである。プロット702は、6%のコバルトバインダーを有する炭化タングステンの工作物に対する、3000rpmおよび6インチ/分の研削速度で800秒の研削時間でのサンプルC2の研削動力を表している。図示されるように、サンプルC2の場合、10%のコバルトを有する工作物の研削に必要な動力は、わずか6%のコバルトを有する炭化タングステンでできた工作物の研削に必要な動力よりもはるかに少ない。
Claims (13)
- 金属を含む結合剤中に含まれる砥粒を含む本体を含む研磨物品であって、前記本体は、VAG/VBMの比が少なくとも1.3であり、ここでVAGは、前記本体の全体積中の砥粒の体積パーセントであり、VBMは、前記本体の全体積中の結合剤の体積パーセントであり、前記本体は、活性結合組成物を含み、前記結合剤の全体積の少なくとも1体積%を活性結合組成物が構成し、前記活性結合組成物が前記砥粒と前記結合剤との界面に配置される、研磨物品。
- 金属または金属合金を含む結合剤中に含まれる砥粒を含む結合研磨本体を含む研磨物品であって、前記結合剤が、結合相および析出相を含む複合材料を含み、前記析出相が、活性結合組成物の少なくとも1つの元素と、前記結合剤の少なくとも1つの元素とを含む組成を有し、前記活性結合組成物が前記砥粒と前記結合剤との界面に配置される、研磨物品。
- 前記結合剤中の前記活性結合組成物の一部が、前記砥粒と前記結合剤との間の界面において前記砥粒を取り囲む、請求項1または2に記載の研磨物品。
- 前記砥粒の平均グリットサイズが1ミクロン〜1000ミクロンの間の範囲内である、請求項1または2に記載の研磨物品。
- 前記砥粒のアスペクト比が3:1以下であり、アスペクト比は長さ:幅の寸法の比として定義される、請求項1または2に記載の研磨物品。
- 前記VAG/VBMの比が2.0〜5.0の間の範囲内である、請求項1に記載の研磨物品。
- 1.7〜7.0の間の範囲内であるVP/VBMの比をさらに含み、ここでVPは、前記本体の全体積中の砥粒およびフィラーを含む粒子状材料の体積パーセントであり、VBMは、前記本体の全体積中の結合剤の体積パーセントである、請求項1または2に記載の研磨物品。
- 前記フィラーが、元の形状および大きさを実質的に維持して前記本体中に含まれる粒子状材料を含む、請求項7に記載の研磨物品。
- 前記本体が、少なくとも5体積%の気孔を含み、前記気孔の過半量が、前記本体の前記体積を通過して延在する相互接続された孔隙の網目構造を画定する相互接続された気孔である、請求項1または2に記載の研磨物品。
- 前記活性結合組成物が、前記結合剤の全体積の10体積%〜30体積%の間の範囲内の量で存在する、請求項1または2に記載の研磨物品。
- 前記結合相が銅から本質的になる、請求項2に記載の研磨物品。
- 研磨物品の形成方法であって:
砥粒および結合剤を含む混合物を形成するステップであって、前記結合剤が金属または金属合金を含むステップと;
前記混合物を成形して未加工物品を形成するステップと;
ある温度で前記未加工物品を焼結させることで、液相焼結させて、前記結合剤中に含まれる前記砥粒を含む研磨本体を形成するステップと
を含み、
前記本体は、活性結合組成物を含み、前記結合剤の全体積の少なくとも1体積%を活性結合組成物が構成し、前記活性結合組成物が前記砥粒と前記結合剤との界面に配置され、前記本体は、VP/VBMの比が少なくとも3:2であり、ここでVPは、前記本体の全体積中の砥粒およびフィラーを含む粒子状材料の体積パーセントであり、VBMは、前記本体の全体積中の結合剤の体積パーセントである、方法。 - 前記混合物から砥粒および結合剤の凝集物を形成するステップをさらに含む、請求項12に記載の方法。
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KR101891189B1 (ko) * | 2015-07-15 | 2018-08-23 | 미츠이켄사쿠토이시 가부시키가이샤 | 연마 공구 및 그 제조방법 그리고 연마물의 제조방법 |
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