JP5578227B2 - Method for correcting molding mold, molding mold, antireflection article, image display device, and showcase - Google Patents

Description

  The present invention relates to an antireflection article for preventing reflection by closely arranging a large number of minute protrusions at intervals equal to or shorter than the shortest wavelength of an electromagnetic wave wavelength band for preventing reflection.

  In recent years, regarding an antireflection film, which is a film-shaped antireflection article, there has been proposed a method for preventing reflection by arranging a large number of microprotrusions closely on the surface of a transparent substrate (transparent film) (patent) References 1-3). This method utilizes the principle of a so-called moth-eye structure, and the refractive index for incident light is continuously changed in the thickness direction of the substrate, whereby a discontinuous interface of refractive index is obtained. Is eliminated to prevent reflection.

  In the antireflection article according to this moth-eye structure, the microprojections are closely arranged so that the interval d between adjacent microprojections is equal to or less than the shortest wavelength Λmin (d ≦ Λmin) of the wavelength band of the electromagnetic wave to prevent reflection. . Moreover, each microprotrusion is produced so that a cross-sectional area may become small gradually toward the front end side from a transparent base material so that it may be planted on a transparent base material.

  Various uses have been proposed for such antireflection articles. For example, it can be placed on the light exit surface of various image display devices to reduce external light reflection such as sunlight on the screen to improve image visibility, or to form the microprojections on a sheet or plate-like transparent substrate Furthermore, by constructing a touch panel using an electrode in which a transparent conductive film such as ITO (indium tin oxide) is formed on the microprojection group, light reflection between the touch panel electrode and various adjacent members is performed. It has been proposed to reduce the occurrence of interference fringes, ghost images, and the like.

  The fine protrusions provided on such an antireflection article are formed by pressing and pressing an shaping mold having a fine uneven shape on an ultraviolet curable resin. The mold for forming the fine protrusions is manufactured by forming a molding layer having a fine uneven shape on the polished surface of the base material whose surface is polished via an adhesion layer. Depending on the production environment and the like, foreign substances such as fibrin (cellulose) may adhere to the surface of the shaping layer. As described above, a fine uneven shape is formed on the surface of the shaping layer, which is very brittle. Therefore, if foreign matter adheres to the surface, it is difficult to remove it. If an anti-reflective article is manufactured using the molding die to which the foreign matter adheres, the anti-reflective article has a minute projection not properly formed at a position corresponding to the foreign matter, and the anti-reflective function is locally provided. In some cases, it deteriorates or an appearance defect occurs.

Japanese Patent Laid-Open No. 50-70040 Special Table 2003-531962 Japanese Patent No. 4632589

  The present invention has been made in view of such a situation, and the foreign matter attached to the molding die that causes deterioration of the antireflection function of the microprotrusions related to the moth-eye structure of the antireflection article and the appearance defect is removed. The purpose is to remove.

  The present inventor has made extensive studies to solve the above-mentioned problems, and the foreign matter adhered to the molding die that causes deterioration of the antireflection function of the microprojections related to the moth-eye structure of the antireflection article and the appearance defect. The idea of removing the film by irradiating it with a laser beam has been reached, and the present invention has been completed.

    Specifically, the present invention provides the following.

  (1) Molding metal for shaping the microprojections of an antireflective article in which the microprojections are closely arranged and the interval between adjacent microprojections is equal to or less than the shortest wavelength of the wavelength band of the electromagnetic wave for preventing reflection A method for correcting a mold, wherein the mold for molding includes a mold layer in which a fine concavo-convex shape for molding the fine protrusions is formed on the surface of the antireflection article, and the mold for molding The correction method comprises a foreign matter detection step of detecting foreign matter attached to the surface of the shaping layer, and a foreign matter removal step of removing the foreign matter detected by the foreign matter detection step by laser light irradiation. A method for correcting a characteristic mold for molding.

  (2) The method for correcting a molding die according to (1), wherein the foreign matter removing step removes the foreign matter with a laser beam having a wavelength of 532 nm or 1064 nm.

  (3) The foreign matter removing step includes a first removing step that removes most of the foreign matter and a second removing step that removes the foreign matter that could not be removed in the first removing step. (1) or (2) the method for correcting the molding die.

  (4) The method for correcting a molding die according to (3), wherein the second removal step is such that an output of the laser beam is smaller than an output of the laser beam in the first removal step.

  (5) The mold for molding according to (3) or (4), wherein in the second removal step, a laser light irradiation range is narrower than a laser light irradiation range in the first removal step. How to fix.

  (6) A mold for molding modified by any of the mold mold correcting methods of (1) to (5), wherein the fine uneven shape of the mold layer is the correction method The mold for shaping is characterized in that the top of the part corrected by the step is lower than other peripheral parts.

  (7) In the antireflection article formed by the molding die according to (6), the base portion of the microprojection has a portion corresponding to the modified portion of the molding layer in another peripheral portion. An anti-reflective article characterized by being higher in comparison.

  (8) An image display device provided with the antireflection article of (7) in an image display panel.

  (9) A showcase in which an anti-reflective article according to (7) is provided in a showcase that houses an exhibit and provides the exhibit for display.

  It is possible to remove foreign matter adhering to the molding die, which causes deterioration of the antireflection function of the microprojections related to the moth-eye structure of the antireflection article and causes the appearance to be defective.

1 is a conceptual perspective view showing an antireflection article according to a first embodiment of the present invention. It is a figure where it uses for description of an adjacent protrusion. It is a figure where it uses for description of the maximum point. It is a figure which shows a Delaunay figure. It is a frequency distribution diagram used for measurement of the distance between adjacent protrusions. It is a frequency distribution figure with which it uses for description of minute height. It is a figure which shows the manufacturing process of the antireflection article | item of FIG. It is a figure which shows the roll plate which concerns on the reflection preventing article of FIG. It is a figure which shows the manufacturing process of the roll plate of FIG. It is a figure which shows the outline of the roll plate 13 in which the foreign material F adhered to the surface of the shaping layer 13c. It is the front view and side view of the correction apparatus 50 which detects and removes the foreign material F adhering to the roll plate. It is a figure which shows the outline of the anti-reflective article manufactured by the roll plate 13 from which the foreign material F was removed, and the roll plate 13.

[First Embodiment]
FIG. 1 is a diagram (conceptual perspective view) showing an antireflection article according to a first embodiment of the present invention. This antireflection article 1 is an antireflection film whose overall shape is formed by a film shape. In the image display apparatus according to this embodiment, the antireflection article 1 is held by being attached to the front side surface of the image display panel, and the reflection of external light such as sunlight and electric light on the screen is reduced by the antireflection article 1. And improve visibility. The antireflection article is not limited to a flat film shape, but may be a flat sheet shape or a flat plate shape (referred to as a film, a sheet, or a plate in order of relatively small thickness). In addition, instead of a flat shape, a curved shape, a three-dimensional film shape, a sheet shape, or a plate shape can be used, and various lenses, prisms, and other three-dimensional shapes are appropriately used depending on the application. Can be adopted.

Here, the antireflection article 1 is produced by closely arranging a large number of minute protrusions on the surface of the substrate 2 made of a transparent film. A plurality of closely arranged microprotrusions is collectively referred to as a microprotrusion group. Here, the base material 2 is, for example, a cellulose resin such as TAC (Triacetylcellulose), an acrylic resin such as PMMA (polymethyl methacrylate), a polyester resin such as PET (Polyethylene terephthalate), PP (polypropylene), or the like. Polyolefin resins, vinyl resins such as PVC (polyvinyl chloride), and various transparent resin films such as PC (polycarbonate) can be applied. In the present embodiment, the antireflection article 1 is arranged on the surface of various image display panels such as a liquid crystal display panel, an electroluminescent display panel, and a plasma display panel of the image display device, thereby reflecting on the surfaces of these display panels. Reduces the reflected light to improve visibility.
As described above, the shape of the antireflection article is not limited to the film shape, and various shapes can be adopted, so that the base material 2 can be used in addition to these materials, for example, according to the shape of the antireflection article. Various transparent inorganic materials such as glass such as soda glass, potash glass, lead glass, ceramics such as PLZT, quartz, and meteorite can be applied.

  The anti-reflective article 1 forms an uncured resin layer 4 (hereinafter referred to as a receiving layer as appropriate) 4 which forms a fine uneven receiving layer composed of a group of minute protrusions on a base material 2. 4 is subjected to a molding treatment and hardened, whereby the fine protrusions are placed in close contact with the surface of the substrate 2. In this embodiment, an acrylate-based ultraviolet curable resin, which is one of the molding resins used for the molding process, is applied to the receiving layer 4 to form the ultraviolet curable resin layer 4 on the substrate 2. . The antireflection article 1 is manufactured so that the refractive index gradually changes in the thickness direction due to the uneven shape by the microprotrusions, and reduces the reflection of incident light in a wide wavelength range by the principle of the moth-eye structure.

  In this way, the microprotrusions produced in the antireflection article 1 are closely arranged so that the distance d between adjacent microprotrusions is equal to or less than the shortest wavelength Λmin (d ≦ Λmin) of the wavelength band of the electromagnetic wave to prevent reflection. The In this embodiment, since the main purpose is to improve visibility by arranging the image display panel, the shortest wavelength is set to the shortest wavelength (380 nm) in the visible light region in consideration of individual differences and viewing conditions. The distance d is set to 100 to 300 nm in consideration of variation. The adjacent minute protrusions related to the distance d are so-called adjacent minute protrusions, which are in contact with the hem portions of the minute protrusions, which are the base portions on the base 2 side. In the anti-reflective article 1, the minute projections are closely arranged so that when a line segment is created so as to sequentially follow the valleys between the minute projections, a large number of polygonal regions surrounding each minute projection are connected in plan view. Thus, a mesh-like pattern is produced. The adjacent minute protrusions related to the distance d are protrusions that share a part of the line segments constituting the mesh pattern.

  The minute protrusions are defined in more detail as follows. In the antireflection by the moth-eye structure, the effective refractive index at the interface between the transparent substrate surface and the adjacent medium is continuously changed in the thickness direction to prevent reflection. It is necessary to satisfy the following conditions. With respect to the protrusion interval, which is one of these conditions, when the minute protrusions are regularly arranged at a constant period as disclosed in, for example, Japanese Patent Application Laid-Open No. 50-70040 and Japanese Patent No. 4632589, the adjacent spaces are adjacent to each other. The interval d between the minute projections to be performed is the projection arrangement period P (d = P). Thus, when the longest wavelength in the visible light band is λmax and the shortest wavelength is λmin, the minimum necessary condition that can exhibit the antireflection effect at the longest wavelength in the visible light band is Λmin = λmax. P ≦ λmax, and the necessary and sufficient condition that can exhibit the antireflection effect for all wavelengths in the visible light band is Λmin = λmin, and therefore P ≦ λmin.

  The wavelengths λmax and λmin may have some width depending on observation conditions, light intensity (luminance), individual differences, and the like, but are typically λmax = 780 nm and λmin = 380 nm. A preferable condition that can more reliably exhibit an antireflection effect for all wavelengths in the visible light band is d ≦ 300 nm, and a more preferable condition is d ≦ 200 nm. Note that the lower limit value of the period d is usually d ≧ 50 nm, preferably d ≧ 100 nm, for reasons such as the expression of the antireflection effect and the securing of the isotropic (low angle dependency) of the reflectance. On the other hand, the height H of the protrusion is set to H ≧ 0.2 × λmax = 156 nm (assuming λmax = 780 nm) from the viewpoint of exhibiting a sufficient antireflection effect.

  However, when the minute protrusions are irregularly arranged as in this embodiment, the distance d between the adjacent minute protrusions varies. More specifically, as shown in FIG. 2, when viewed from the normal direction of the front or back surface of the substrate, when the microprojections are not regularly arranged at a constant period, the repetition period P of the protrusions In some cases, the distance d between adjacent protrusions cannot be defined, and even the concept of adjacent protrusions is suspicious. Therefore, in such a case, it is calculated as follows.

  (1) That is, first, an in-plane arrangement of projections (planar shape of projection arrangement) is detected using an atomic force microscope (AFM) or a scanning electron microscope (SEM). FIG. 2 is an enlarged photograph actually obtained by an atomic force microscope.

  (2) Subsequently, the maximum point of the height of each protrusion (hereinafter simply referred to as the maximum point) is detected from the obtained in-plane arrangement. There are various methods for obtaining the maximum point, such as a method of sequentially comparing the planar view shape and the enlarged photograph of the corresponding cross-sectional shape to obtain the maximum point, and a method of obtaining the maximum point by image processing of the plan view enlarged photo. Can be applied. FIG. 3 is a diagram showing the detection result of the maximum point by the processing of the image data relating to the enlarged photograph shown in FIG. 2, and the portions indicated by black dots in this figure are the maximum points of the respective protrusions. In this process, image data is processed in advance by a low-pass filter having a Gaussian characteristic of 4.5 × 4.5 pixels, thereby preventing erroneous detection of the maximum point due to noise. Further, a maximum point was obtained in units of 1 nm (= 1 pixel) by sequentially scanning a filter for detecting a maximum value of 8 pixels × 8 pixels.

  (3) Next, a Delaunay diagram with the detected maximum point as a generating point is created. Here, Delaunay diagram is obtained by dividing the Voronoi region adjacent to the Voronoi region when the Voronoi division is performed with each local maximum as the generating point, and connecting the adjacent generating points with line segments. This is a net-like figure made up of triangular aggregates. Each triangle is called a Delaunay triangle, and a side of each triangle (a line segment connecting adjacent generating points) is called a Delaunay line. FIG. 4 is a diagram in which the Delaunay diagram (represented by white line segments) obtained from FIG. 3 is superimposed on the original image of FIG. The Delaunay diagram has a dual relationship with the Voronoi diagram. Voronoi division means that a plane is divided by a net-like figure made up of a closed polygon aggregate defined by perpendicular bisectors of line segments (Droney lines) connecting between adjacent generating points. A network figure obtained by Voronoi division is a Voronoi diagram, and each closed region is a Voronoi region.

  (4) Next, the frequency distribution of the line segment length of each Delaunay line, that is, the frequency distribution of the distance between adjacent maximum points (hereinafter referred to as the distance between adjacent protrusions) is obtained. FIG. 5 is a histogram of the frequency distribution created from the Delaunay diagram of FIG. As shown in FIGS. 2 and 10, when there is a groove or the like at the top of the protrusion, or when the top is divided into a plurality of peaks, from the obtained frequency distribution, A frequency distribution is created by removing data resulting from a fine structure having a concave portion at the top and a fine structure in which the top is split into a plurality of peaks, and selecting only the data of the projection body itself.

  Specifically, in a fine structure in which a concave portion exists at the top of the protrusion, or a fine structure related to a multi-modal micro protrusion in which the top is divided into a plurality of peaks, a single peak that does not have such a fine structure. The distance between adjacent local maximum points is clearly different from the numerical value range in the case of a sexual microprojection. Thus, by removing the corresponding data using this feature, only the data of the projection body itself is selected and the frequency distribution is detected. More specifically, for example, about 5 to 20 adjacent single-peaked microprojections are selected from an enlarged photograph of a microprojection (group) in plan view as shown in FIG. 2, and the distance between adjacent maximum points is selected. The value of is sampled and the value clearly deviates from the numerical range obtained by sampling (usually data whose value is ½ or less of the average distance between adjacent maximum points obtained by sampling) To detect the frequency distribution. In the example of FIG. 5, data having a distance between adjacent maximal points of 56 nm or less (the leftmost small mountain indicated by the arrow A) is excluded. FIG. 5 shows a frequency distribution before performing such exclusion processing. Incidentally, such exclusion processing may be executed by setting the above-described maximum inspection filter.

(5) The average value d _AVG and the standard deviation σ are obtained from the frequency distribution of the distance d between adjacent protrusions thus obtained. Here, when the frequency distribution obtained in this way is regarded as a normal distribution and the average value d _AVG and the standard deviation σ are obtained, the average value d _AVG = 158 nm and the standard deviation σ = 38 nm are obtained in the example of FIG. As a result, the maximum value of the distance d between adjacent protrusions is set to dmax = d _AVG + 2σ, and in this example, dmax = 234 nm.

The same method is applied to define the height of the protrusion. In this case, a relative height difference of each local maximum point position from a specific reference position is acquired from the local maximum point obtained by the above (2), and is histogrammed. FIG. 6 is a diagram showing a histogram of the frequency distribution of the protrusion height H with the protrusion root position obtained in this way as a reference (height 0). The average value _HAVG of the protrusion height and the standard deviation σ are obtained from the frequency distribution based on the histogram. Here in the example of FIG. 6, the mean value _H AVG = 178 nm, the standard deviation sigma = 30 nm. Thus in this example, the height of the projections is an average value _H AVG = 178 nm. In the histogram of the projection height H shown in FIG. 6, in the case of a multi-peak microprojection, the plurality of data are mixed for one projection because it has a plurality of vertices. Therefore, in this case, the frequency distribution is obtained by adopting the vertex having the highest height from among the plurality of vertices belonging to the same microprotrusion as the protuberance.

  In addition, the reference position when measuring the height of the protrusion described above is based on the valley bottom (minimum point of height) between the adjacent minute protrusions as a reference of height 0. However, when the height of the valley bottom itself varies depending on the location, (1) First, an area sufficient for the average value to collect the average value of the heights of the valley bottoms measured from the front surface or the back surface of the substrate 2. Calculate in (2) Next, a surface having the height of the average value and parallel to the front surface or the back surface of the substrate 2 is considered as a reference surface. (3) Then, the height of each microprotrusion from the reference surface is calculated by setting the reference surface to a height of 0 again.

If the protrusions are irregularly arranged, when this way the maximum value of the adjacent protrusions distance obtained by dmax = d AVG ₊ 2σ, average H _AVG height of projections are arranged regularly It has been found necessary to satisfy the above conditions. Specifically, the condition of the distance between the microprotrusions that exhibits the antireflection effect is dmax ≦ Λmin. The minimum necessary condition that can exhibit the antireflection effect at the longest wavelength in the visible light band is Λmin = λmax, and therefore dmax ≦ λmax, and the antireflection effect can be achieved for all wavelengths in the visible light band. The necessary and sufficient condition is Λmin = λmin, and therefore dmax ≦ λmin. A preferable condition that can more reliably exhibit the antireflection effect for all wavelengths in the visible light band is dmax ≦ 300 nm, and a more preferable condition is dmax ≦ 200 nm. Also, dmax ≧ 50 nm is usually satisfied and dmax ≧ 100 nm is preferable because of the antireflection effect and ensuring the isotropic (low angle dependency) of the reflectance. The height of the protrusion is set to _HAVG ≧ 0.2 × λmax = 156 nm (assuming λmax = 780 nm) in order to exhibit a sufficient antireflection effect.

2 to 6, dmax = 234 nm ≦ λmax = 780 nm, and it can be seen that the antireflection effect can be sufficiently achieved by satisfying the condition of dmax ≦ λmax. In addition, since the shortest wavelength λmin in the visible light band is 380 nm, it can be seen that the sufficient condition dmax ≦ λmin for exhibiting the antireflection effect in all visible light wavelength bands is also satisfied. When the average protrusion the height _H AVG = 178 nm Also, the average projection height _{H AVG} ≧ 0.2 × λmax = _156nm becomes (as the longest wavelength .lambda.max = 780 nm in the visible light wavelength band), realizing a sufficient antireflection effect It can be seen that the conditions regarding the height of the protrusions to satisfy are also satisfied. Note since the standard deviation sigma = 30 _nm, since the relationship between the _{H AVG -σ = 148nm <0.2 ×} λmax = 156nm is satisfied, statistically, more than 50% of the total protrusions, 84% or less It can be seen that the condition of the height of the protrusion (178 nm or more) is satisfied. From the observation results by AFM and SEM, and the analysis result of the height distribution of the microprojections, the multi-peak microprojections tend to occur more frequently with the microprojections with a higher height than the microprojections with a relatively low height. It turned out to be.

  FIG. 7 is a diagram illustrating a manufacturing process of the antireflection article 1. In the manufacturing process 10, in the resin supply process, an uncured and liquid ultraviolet curable resin that forms a microprojection-shaped receiving layer is applied to the base material 2 in the form of a belt-shaped film by the die 12. In addition, about application | coating of an ultraviolet curable resin, not only the case by the die | dye 12 but various methods are applicable. Subsequently, in the manufacturing process 10, the pressing roller 14 presses and presses the substrate 2 against the peripheral side surface of the roll plate 13 (molding mold) which is a mold for molding the antireflection article, thereby A liquid acrylate-based ultraviolet curable resin is brought into close contact with the material 2 in an uncured state, and the ultraviolet curable resin is sufficiently filled in the concave portions having fine irregularities formed on the peripheral side surface of the roll plate 13. In this state, in this manufacturing process, the ultraviolet curable resin is cured by irradiation with ultraviolet rays, and thereby a microprojection group is produced on the surface of the substrate 2. In this manufacturing process, the substrate 2 is peeled off from the roll plate 13 through the peeling roller 15 together with the cured ultraviolet curable resin. In the production process 10, an anti-reflection article 1 is produced by producing an adhesive layer or the like on the substrate 2 as necessary, and then cutting it into a desired size. Accordingly, the antireflection article 1 is mass-produced efficiently by sequentially molding the fine shape produced on the peripheral side surface of the roll plate 13 which is a mold for molding on the long base material 2 made of a roll material. The

  FIG. 8 is a diagram showing the configuration of the roll plate 13. FIG. 8A is a perspective view showing the entire configuration of the roll plate 13. FIG. 8B is an enlarged view illustrating the configuration of the roll plate 13 in detail in the portion b of FIG. FIGS. 8C and 8D are enlarged views corresponding to FIG. 8B for explaining another configuration of the roll plate 13. 8B to 8D exaggerate the thicknesses of the adhesion layer 13b and the shaping layer 13c for easy understanding.

The roll plate 13 has a fine concavo-convex shape formed on the peripheral side surface of the base material, which is a cylindrical metal material, by repeating anodizing treatment and etching treatment, and the fine concavo-convex shape is formed on the substrate 2 as described above. It is shaped. For this reason, a columnar or cylindrical member in which high-purity aluminum is provided at least on the peripheral side surface is used as the base material.
Specifically, as shown in FIG. 8B, in one form of the roll plate 13, a high-purity aluminum pipe is applied to the base material 13a, and a fine surface is formed on the peripheral side surface of the base material 13a. The shaping part 13c which consists of uneven | corrugated shape is provided.
Further, as shown in FIG. 8C, in another form of the roll plate 13, a hollow stainless steel pipe is applied to the base material 13a, and an application made of high-purity aluminum is directly applied to the peripheral side surface of the base material 13a. A mold layer (molding part) 13c is provided. In place of the stainless steel pipe, pipe material such as copper, aluminum, or resin may be applied.

Further, as shown in FIG. 8D, another form of the roll plate 13 is a shaping layer (molding portion) in which fine irregularities are formed on the peripheral side surface of the base material 13a via the adhesion layer 13b. ) 13c is provided. As an example, a hollow aluminum pipe is applied to the base material 13a, silicon dioxide (SiO ₂ ) is applied to the adhesion layer 13b, and high-purity aluminum is applied to the shaping layer 13c. Here, the adhesion layer 13b has a layer thickness of about 100 nm, and the shaping layer 13c has a layer thickness of about 400 nm. In place of the aluminum pipe, pipe material such as copper, stainless steel, or resin may be applied. The adhesion layer 13b is not limited to silicon dioxide, but other materials such as silicon monoxide (SiO), a mixture of silicon monoxide and silicon dioxide, tantalum oxide (Ta ₂ O ₅ ), titanium oxide (TiO ₂ , Ti ₃ O _5), tin oxide _(SnO 2), aluminum oxide _{(Al 2 0} 3), chromium oxide _{(Cr 2 O} 3), barium titanate (BaTiO _3), indium oxide _{(In 2 O} 3), zinc oxide ( ZnO, ZnO ₂ ), metal oxides such as TiC, SiC, BC, WC, nitrides such as TiN, SiN, CrN, BN, AIN, CN, ZrN, and barium fluoride ( BaF _2), magnesium fluoride _(MgF 2), magnesium oxide (MgO), diamond-like carbon (DLC), child using glassy carbon or the like It can also be.

  In the roll plate 13, fine holes are densely formed on the peripheral side surface of the shaping portion (molding layer) 13 c by repeating the anodizing treatment and the etching treatment. The concavo-convex shape is produced by gradually increasing the diameter of the fine holes so as to have a larger diameter. As a result, the roll plate 13 is densely formed with fine holes whose diameter gradually decreases in the depth direction, and the antireflection article 1 has a diameter that gradually decreases as it approaches the top corresponding to the fine holes. A fine concavo-convex shape is produced by a large number of fine protrusions. At that time, by appropriately adjusting various conditions such as purity (amount of impurities), crystal grain size, anodizing treatment and / or etching treatment of the shaping layer 13c (aluminum layer), To do.

[Roll plate manufacturing process]
FIG. 9 is a diagram illustrating a manufacturing process of the roll plate 13.
In this manufacturing process, the peripheral side surface of the base material 13a is made into a super mirror surface by an electrolytic composite polishing method in which electrolytic elution action and abrasion action by abrasive grains are combined (electropolishing). Then, silicon dioxide is applied to the peripheral side surface of the base material 13a to form the adhesion layer 13b. Subsequently, in this step, aluminum is vapor-deposited or sputtered on the peripheral side surface of the base material 13a via the adhesion layer 13b to produce a high-purity aluminum layer (molding layer 13c). Subsequently, in this step, the forming layer 13c is processed by alternately repeating the anodizing steps A1,..., AN, the etching steps E1,.

  In this manufacturing process, in the anodic oxidation process A1,..., AN, a fine hole is produced on the peripheral side surface of the shaping layer 13c by an anodic oxidation method, and the produced fine hole is further dug. Here, in the anodic oxidation step, various methods applied to the anodic oxidation of aluminum can be widely applied, for example, when a carbon rod, a stainless steel plate, or the like is used for the negative electrode. Further, as the solution, various neutral and acid solutions can be used. More specifically, for example, a sulfuric acid aqueous solution, an oxalic acid aqueous solution, a phosphoric acid aqueous solution and the like can be used. In the manufacturing steps A1,..., AN, the fine holes are formed in shapes corresponding to the target depth and the shape of the fine protrusions, respectively, by managing the liquid temperature, the applied voltage, the time for anodization, and the like.

  In the subsequent etching process E1,..., EN, the mold is immersed in an etching solution, the hole diameter of the fine hole produced and dug in the anodizing process A1,. These fine holes are shaped so that the hole diameter becomes smaller and smoother. As the etching solution, various etching solutions that are applied to this type of treatment can be widely applied. More specifically, for example, a sulfuric acid aqueous solution, an oxalic acid aqueous solution, a phosphoric acid aqueous solution, or the like can be used. Thus, in this manufacturing process, the anodizing treatment and the etching treatment are alternately performed a plurality of times (for example, 3 to 5 times), thereby forming fine holes for forming on the peripheral side surface of the base material.

[Foreign matter on the roll plate (cellulose)]
FIG. 10 is a schematic view of the roll plate 13 in which the foreign matter F adheres to the surface of the shaping layer 13c, and corresponds to FIG. 8B.
As shown in FIG. 10, on the surface of the roll plate 13 appropriately produced by the above-described manufacturing process, as foreign matter F, cellulose (fibrin) caused by the operator's clothes and the like, and the shaping layer 13c In some cases, fine aluminum powder may be adhered by a process such as sputtering at the time of formation. Here, the shaping layer 13c on the outermost surface of the roll plate 13 has a fine uneven shape formed on the surface as described above, and is very brittle. It is difficult to remove with. If an anti-reflective article is manufactured with the roll plate 13 to which the foreign matter F is adhered, the anti-reflective article has a minute projection not properly formed at a position corresponding to the foreign matter F, and the anti-reflective function is locally provided. Deterioration or poor appearance may occur.

Further, in the case of the moth-eye structure, particularly when the fine protrusions are formed with the ultraviolet curable resin, the release property between the roll plate 13 and the ultraviolet curable resin layer 4 pressed and pressed against the roll plate 13 is improved. Therefore, a release agent is applied to the surface of the roll plate 13. Therefore, when the foreign matter F adheres to the roll plate 13, the manufactured antireflection article 1 also has a problem that the part corresponding to the attached foreign matter F is distorted or bubbles are generated.
Therefore, in this embodiment, the foreign matter F of the roll plate 13 is detected and removed by using the foreign matter removing device 50 described below.

[Roll foreign material removal device]
FIG. 11 is a front view and a side view of the foreign matter removing apparatus 50 that detects and removes the foreign matter F adhering to the roll plate 13.
The foreign matter removing apparatus 50 holds both ends of the rotation shaft of the base material 13a of the roll plate 13 by a holding mechanism, so that the rotation shaft becomes substantially horizontal, and can be rotated by the rotation shaft. The roll plate 13 is held so as not to contact the part. The foreign matter removing apparatus 50 rotates the roll plate 13 held by the holding mechanism at a slow speed by operating a foot switch (not shown).

  The foreign matter removing device 50 is provided with a screw shaft 51 in parallel with the rotation axis of the roll plate 13. Here, the screw shaft 51 is provided with a nut portion 53 constituting a ball screw together with the screw shaft 51, and the nut portion 53 is provided with a microscope 54 for observing the peripheral side surface of the roll plate 13 (molding layer 13c). . In the foreign matter removing device 50, the screw shaft 51 and the nut portion 53 constitute a movable mechanism of the microscope 54, and the microscope 54 can be moved in the direction along the rotation axis of the roll plate 13 by the rotation of the screw shaft 51. Thereby, the operator who operates the foreign material removal apparatus 50 can observe the surrounding side surface of the shaping layer 13c with the microscope 54, and can detect the foreign material F adhering to the surface.

  The foreign matter removing device 50 is provided with a laser irradiation device 55 at a position opposite to the above-described microscope 54 with the roll plate 13 interposed therebetween. The foreign matter removing device 50 is provided with a screw shaft 52 in parallel with the rotation axis of the roll plate 13, and the screw shaft 52 and a nut portion (not shown) provided in the laser irradiation device 55 are screwed together to fix the ball screw. By configuring, the laser irradiation device 55 can be moved in the direction along the rotation axis of the roll plate 13. Thereby, the foreign material removal apparatus 50 becomes possible to irradiate a laser beam to the specific position of the surrounding side surface of the roll plate 13 (molding layer 13c). The laser irradiation device 55 includes a YAG (Yttrium Aluminum Garnet) laser that irradiates laser light having a wavelength of 532 nm and a pulse period of 6 nsec.

  The laser irradiation device 55 may be a device that irradiates a laser beam having a wavelength of 1064 nm when the foreign substance F is cellulose, but it is preferable to use an apparatus having a wavelength of 532 nm because of the efficiency of removing the foreign substance. In addition, an apparatus that irradiates laser light having a wavelength of 266 nm or 355 nm is not suitable for use because it cannot efficiently remove only the foreign matter F. This is because when this apparatus irradiates the laser beam to such an extent that the foreign matter F can be removed, not only the foreign matter F but also the base material 13a and the adhesion layer 13b may be damaged. . In addition, the antireflection article manufactured with the roll plate corrected by this apparatus is because the base material 13a and the like are damaged, so that appropriate microprotrusions are not formed at the site corresponding to the corrected site.

  Moreover, when the foreign material F is a fine aluminum powder, it is preferable to use an apparatus having a wavelength of 532 nm from the efficiency of foreign material removal. An apparatus that irradiates a laser beam having a wavelength of 266 nm or 355 nm is generally not appropriate for the size of the foreign matter F to be corrected. This is because when the laser beam is irradiated to such an extent that the foreign matter F can be removed, the machining margin in the vertical direction is large with respect to the horizontal direction and the removal efficiency of the foreign matter F is low, as well as the base material 13a and the adhesion layer This is because 13b may be damaged. In addition, the antireflection article manufactured with the roll plate corrected by this apparatus is because the base material 13a and the like are damaged, so that appropriate microprotrusions are not formed at the site corresponding to the corrected site.

The laser light of the laser irradiation device 55 used in the present invention can be ultraviolet light, visible light, infrared light, or the like, and is not particularly limited. Further, not only YAG laser light but also CO ₂ laser light, excimer laser light, or the like can be used as the light source, and pulse laser light or continuous laser light can be used as these laser lights.
For example, if the YAG laser can obtain not only the above-mentioned YAG second harmonic (wavelength 532 nm) but also a laser output (light quantity) or the like, the YAG fundamental wave (wavelength 1064 nm) or the YAG third harmonic (Wavelength 355 nm), YAG fourth harmonic (wavelength 266 nm), YAG fifth harmonic (wavelength 213 nm), and the like can also be used. Further, instead of irradiation with excimer laser light of rare gas halogen such as ArF, KrF, XeF, or XeCl, an energy beam such as an electron beam, an ion beam, or an X-ray can be used.

[How to modify the roll version]
FIG. 12 is a diagram showing an outline of the roll plate 13 from which the foreign matter F has been removed and the antireflection article produced by the roll plate 13. FIG. 12A is a view corresponding to FIG. 8B of the enlarged cross section of the roll plate 13 after the foreign matter F is removed. FIG. 12B is an enlarged cross-sectional view of a minute protrusion at a site corresponding to the site where the foreign material F has been removed from the antireflection article manufactured by the roll plate 13 from which the foreign material F has been removed.

An operator installs the roll plate 13 in the foreign matter removing apparatus 50 described above, and uses the microscope 54 to detect cellulose that becomes the foreign matter F from the surface of the roll plate 13 (molding layer 13c) (foreign matter detection step). . Here, the foreign substance detection step of the present embodiment detects the foreign substance F by visual observation of the operator through the microscope 54, but is not limited to this. For example, the surface of the shaping layer 13c may be photographed with a camera or the like through the microscope 54, and the foreign matter F may be automatically detected based on the photographed image.
When the foreign matter F is found from the surface of the shaping layer 13c, the operator matches the laser light irradiation position of the laser irradiation device 55 with the found position of the foreign matter F on the roll plate 13, and emits the laser light. Irradiation toward the foreign matter F is performed, and the foreign matter F is removed by ablation processing (foreign matter removing step). Here, the laser irradiation device 55 is provided with a mask (not shown), and the laser beam is set to irradiate only within a predetermined range of the surface of the shaping layer 13c. Also, two types of masks are provided, and the irradiation range can be changed according to the degree of removal of the foreign matter F. In the present embodiment, a mask M1 for limiting the laser light irradiation range to 150 × 150 μm and a mask M2 for limiting to 50 × 50 μm are provided.

In general, the foreign matter F adhering to the roll plate 13 has a length of about 1 mm in the case of cellulose, a diameter of several tens to 100 μm, and a height of 15 in the case of fine aluminum powder. ˜20 μm and its width or diameter is 40˜60 μm.
Therefore, the operator first uses the mask M1 to irradiate laser light over a wide range to remove most of the foreign matter F adhering to the shaping layer 13c (first removal step). Here, when the length of the foreign matter F is longer than the irradiation range of the mask, the operator moves the laser irradiation device 55 to irradiate the foreign matter F with the laser light a plurality of times.

Next, the operator confirms the site where most of the foreign matter F has been removed by using the microscope 54, and the remaining part of the foreign matter F that could not be removed, the foreign matter pieces scattered by the laser light, etc. are formed. It is confirmed whether it exists on the surface of the layer 13c. When there is a remaining part of the foreign matter F, the operator moves the irradiation position of the laser light to a position where the remaining part of the foreign matter F exists, and uses the mask M2 to irradiate the laser light (second). Removal step). Here, as described above, the mask M2 restricts the irradiation range to be narrower than that of the mask M1, so that the operator can efficiently irradiate the remaining part of the minute foreign matter F and the like with laser light.
At this time, the output of the laser beam may be made lower than in the case of the laser beam irradiation by the mask M1, and the laser beam may be irradiated according to the shape (size) of the remaining part of the foreign matter F or the like. By carrying out like this, it can suppress that the shaping layer 13c of the roll plate 13 located under the foreign material F is shaved more than necessary, or the base material 13a and the adhesion layer 13b are damaged.
When the foreign matter F is sufficiently small with respect to the irradiation range of the mask M1, for example, when the foreign matter F is the fine aluminum powder described above, the operator uses the mask M2 from the beginning and adheres to the shaping layer 13c. The foreign matter F to be removed may be removed.

As shown in FIG. 12 (a), the fine uneven shape on the surface of the shaping layer 13c of the roll plate 13 from which the foreign matter F has been removed by the above-described process is as follows. Lower than the surrounding area.
Moreover, the base part (root) of the microprojection of the antireflection article manufactured by the roll plate 13 modified by the above-described modification method is located in the modified part of the shaping layer 13c as shown in FIG. The corresponding part is formed to be higher than the other peripheral parts. However, the antireflection function and appearance of the antireflective article at that part are almost the same as those of other peripheral parts.

[Laser irradiation conditions]
Next, an evaluation test for removing foreign matter attached to the shaping layer 13c of the roll plate 13 with respect to the irradiation condition of the laser beam by the laser irradiation device 55 will be described.
[Evaluation test when foreign matter F is cellulose]
In this evaluation test, the foreign matter removal result when cellulose adheres to the shaping layer 13c of the roll plate 13 having a three-layer structure (see FIG. 8D) as the foreign matter F is evaluated.
The laser irradiation device 55 used for removing the foreign substance F in this evaluation test is a YAG laser (HSL-5000II FS manufactured by HOYA CANDEO OPTRONICS Co., Ltd.) that irradiates laser light having a wavelength of 532 nm and a pulse period of 6 nsec. The laser beam irradiation is spot irradiation that limits the irradiation range by the mask M1, and the irradiation range is set to 150 × 150 μm. In this test, the removal of foreign matter only by laser light irradiation with the mask M1 is evaluated.
Table 1 below summarizes the evaluation results of the removal of foreign matter attached to the shaping layer 13c with respect to the output value of the laser beam and the number of times of laser beam irradiation.

In Table 1, “◯”, “X”, and “−” indicate the evaluation of foreign matter removal, and “◯” indicates that the foreign matter F (cellulose) attached to the shaping layer 13c was sufficiently removed. Further, x indicates that the foreign matter F could not be sufficiently removed, and − indicates that the foreign matter F was sufficiently removed, but the base material 13a and the adhesion layer 13b of the roll plate 13 are also included. Indicates that it has been hurt.
As shown in Table 1, when the output value of the irradiated laser beam was 126 to 144 μJ, the evaluation of foreign matter removal was x regardless of the number of times of laser beam irradiation. In this case, the remainder of the foreign matter F that could not be removed remained on the surface of the shaping layer 13c. This is considered to be caused by insufficient output of the laser beam.

When the output value of the laser beam to be irradiated was 174 to 180 μJ, the evaluation of the removal of foreign matters was −irrespective of the number of times of laser beam irradiation. Also, the evaluation of foreign matter removal is performed when the laser beam irradiation output is 150 to 156 μJ and the number of irradiation times is 20 times or more, and when the laser beam irradiation output is 162 to 168 μJ and the number of irradiation times is 5 or more. Became-.
In these cases, the foreign matter F could be sufficiently removed from the surface of the shaping layer 13c, but not only the foreign matter F but also the shaping layer 13c of the roll plate 13 located therebelow was shaved more than necessary. The base material 13a and the adhesion layer 13b located under the shaping layer 13c are damaged. This is considered to be because the output of the laser beam is too large. When the anti-reflective article is manufactured with a roll plate in which the molding layer 13c is cut more than necessary or the base material 13a is damaged, the anti-reflective article has a minute size appropriate for the part corresponding to the corrected part. No protrusion is formed.

  On the other hand, the output value of the laser beam to be irradiated is 150 to 156 μJ, the number of times of laser irradiation is 1 to 10 times, and the output value of the laser beam to be irradiated is 162 to 168 μJ, and the number of times of laser irradiation is In the case of once, the evaluation of the removal of the foreign matter was “good”, and it was confirmed that the foreign matter F (cellulose) was sufficiently removed from the surface of the shaping layer 13c. In particular, when the output value of the laser beam is 156 μJ and irradiation is performed 10 times, the laser beam is most efficiently obtained without scraping the shaping layer 13c more than necessary or damaging the base material 13a of the roll plate 13 or the like. It was confirmed that the foreign substance F can be removed from the shaping layer 13c.

[Evaluation test when foreign matter F is fine aluminum powder]
In this evaluation test, evaluation is performed on the result of removing foreign matter when fine aluminum powder adheres to the shaping layer 13c of the three-layered roll plate 13 (see FIG. 8D) as foreign matter F.
The laser irradiation device 55 used for removing the foreign substance F in this evaluation test is a YAG laser (HSL-5000II FS manufactured by HOYA CANDEO OPTRONICS Co., Ltd.) that irradiates laser light having a wavelength of 532 nm and a pulse period of 6 nsec. Here, as described above, the fine aluminum powder has a height of 15 to 20 μm and a width or diameter of 40 to 60 μm. Therefore, the laser beam irradiation is performed by spot irradiation using a mask M2 (irradiation range is 50 × 50 μm).
Table 2 below summarizes the evaluation results of the removal of foreign matter adhering to the shaping layer 13c with respect to the output value of the laser beam and the number of times of irradiation with the laser beam.

  In Table 2, “◯” and “X” indicate the evaluation of foreign matter removal, and “◯” indicates that the foreign matter F (fine aluminum powder) adhering to the shaping layer 13c was sufficiently removed. Further, x indicates that the foreign matter F within the laser light irradiation range is not sufficiently removed, or the foreign matter F (aluminum) melted by the laser light is scattered around the laser light irradiation range.

When the output value of the laser beam to be irradiated is 200 to 220 mJ, the evaluation of the removal of foreign matter is x regardless of the number of times of laser beam irradiation. In addition, when the laser beam irradiation output is 240 mJ and the number of irradiation times is 40 times or less, when the laser beam irradiation output is 320 to 400 mJ and the number of irradiation times is 30 times or less, the laser beam irradiation output is Even when the number of irradiations was 450 to 510 mJ and the number of irradiations was 20 times or less, the evaluation of foreign matter removal was x.
In these cases, the remainder of the foreign matter F that could not be removed remained on the surface of the shaping layer 13c. This is considered to be caused by insufficient output of the laser beam.

In addition, when the output value of the laser beam to be irradiated is 570 to 600 mJ, the evaluation of foreign matter removal is x regardless of the number of times of laser beam irradiation, the laser beam irradiation output is 510 to 540 mJ, and the number of irradiation times is 60 times. In the case of, the evaluation of foreign matter removal was x.
In these cases, the foreign matter F (aluminum) melted by the laser beam is scattered around the irradiation range of the laser beam, the shaping layer 13c is shaved more than necessary, or the base material 13a is damaged. I ended up getting lost. This is considered to be because the output of the laser is too large.

On the other hand, the output value of the laser light to be irradiated is 240 mJ, the number of times of laser irradiation is 50 to 60 times, and the output value of the laser light is 320 to 400 mJ, and the number of times of irradiation is 40 to 60 times. The output value of the laser light is 450 mJ, the number of irradiation times is 30 to 60 times, the output value of the laser light is 510 mJ, the number of irradiation times is 30 to 50 times, and the output value of the laser light Is 540 mJ and the number of irradiations is 20 to 50 times, the evaluation of foreign matter removal is ○, and it is confirmed that the foreign matter F (fine aluminum powder) is sufficiently removed from the surface of the shaping layer 13c. It was.
Also, in this evaluation test, as an example, the laser beam is irradiated at a frequency less than the above predetermined number at 540 mJ in Table 2 to leave about 5 μm in height of the foreign substance F, and after the irradiation, the low output irradiation in Table 2 240 mJ may be combined, and the remaining foreign substance F having a height of about 5 μm may be removed while visually adjusting.

As described above, the invention of the present embodiment can achieve the following effects.
(1) The method for correcting the roll plate 13 is to detect foreign matter F adhering to the surface of the shaping layer 13c of the roll plate 13 in the foreign matter detection step, and irradiate the detected foreign matter F with laser light in the foreign matter detection step. Remove with. Thereby, even if it is a case where the foreign material F adheres to the roll plate 13, it can suppress that problems, such as deterioration of an anti-reflective function and an external appearance defect, arise in the manufactured anti-reflective article.
(2) Since the foreign substance detection step uses laser light having a wavelength of 532 nm or 1064 nm, the removal of the foreign substance F adhering to the shaping layer 13c can be realized more specifically.
(3) The foreign matter removing step includes a step of removing most of the foreign matter F (first removing step) and a step of removing the remainder of the foreign matter F that could not be removed in the step (second removing step). Since it comprises, the foreign material F can be efficiently and rapidly removed from the shaping layer 13c.
(4) Since the output of the laser beam in the second removal step is smaller than the output of the laser beam in the first removal step, the remaining part of the foreign matter F that could not be removed in the first removal step is removed in the second removal step. When removing, it can suppress that the base material 13a and the contact | adherence layer 13b of the roll plate 13 are damaged. Thereby, it can suppress that the anti-reflective article in which a microprotrusion is not formed appropriately by using the roll plate 13 with which the base material 13a etc. were damaged is manufactured.
(5) Since the irradiation range of the laser beam in the second removal step is narrower than the irradiation range of the laser beam in the first removal step, the size of the remaining part of the foreign matter F that could not be removed in the first removal step Accordingly, the foreign substance F can be efficiently removed from the shaping layer 13c. Moreover, it can suppress that a laser beam is irradiated with respect to the site | part to which the remainder of the foreign material F, etc. have not adhered.

[Second Embodiment]
In the second embodiment, an antireflection article manufactured by the roll plate 13 modified by the same method of correcting the roll plate 13 as in the first embodiment is used for a showcase.
In the following description, parts that perform the same functions as those of the first embodiment described above are given the same reference numerals or the same reference numerals at the end, and redundant descriptions are omitted as appropriate.
This showcase is a rectangular parallelepiped case for storing exhibits made of precious items such as jewelry and artworks, and providing them for display. In this showcase, five surfaces including an outer peripheral surface and a ceiling surface are configured by display plates for display of the exhibit so that the exhibit placed inside can be viewed from above and around. In this embodiment, the display plate is formed by attaching the film-shaped antireflection article 1 to one side or both sides of a glass plate which is a transparent plate. Here, since this antireflection article 1 is an antireflection film having a moth-eye structure, this showcase sufficiently prevents the reflection of illumination and the reflection of outdoor scenery, etc. As a result, it is possible to appreciate the exhibits with a remarkably high presence.

  The showcase is not limited to the case where the display plate material is provided on the outer peripheral surface and the ceiling surface, and various configurations can be widely applied, for example, when the display plate material is provided on the four surfaces except the back surface. In addition, the showcase is not limited to a rectangular parallelepiped, and a cube, a polygonal column, a columnar shape, or the like can be applied. Furthermore, a specific transparent plate material may be arranged only on one side, such as when the antireflection article 1 is arranged on only one side of the back side transparent plate material.

  In addition, the antireflection article 1 having the moth-eye structure can ensure extremely high transparency as compared with the antireflection film having the thin film multilayer structure, so that a plate material such as glass for protecting the exhibit is not disposed. There is also the danger of giving such an illusion to the viewer. Therefore, instead of disposing the antireflection article 1 over the entire surface of the glass plate, the attachment of the antireflection article 1 to both surfaces is partially stopped, the position of attachment between the front and back surfaces of the glass plate is shifted, The areas to be attached may be different between the front and back surfaces of the glass plate. In addition, a decorative effect may be imparted by shifting the position to be pasted in this way, changing the region, or partially pasting.

Other Embodiment
The specific configuration suitable for the implementation of the present invention has been described in detail above. However, the present invention can be variously modified from the configuration of the above-described embodiment without departing from the spirit of the present invention, and further the conventional configuration. Can be combined.

  That is, in the above-described embodiment, the case where the number of repetitions of the anodizing treatment and the etching treatment is set to 3 to 5 has been described, but the present invention is not limited to this, and the number of repetitions is set to other numbers. In addition, the present invention can be widely applied to the case where the treatment is repeated a plurality of times and the final treatment is anodized.

  In the first embodiment described above, the case where the antireflection article is arranged on the front side of various image display panels such as a liquid crystal display panel, an electroluminescent display panel, a plasma display panel, etc. has been described. The invention is not limited to this, and is widely applied to, for example, a case where the reflection loss of incident light from the backlight to the liquid crystal display panel is reduced by reducing the reflection loss of incident light from the backlight (increasing incident light utilization efficiency) be able to. Here, the surface side of the image display panel is a light output surface of the image display panel and also a surface on the image observer side. The back side of the image display panel is the opposite side of the surface of the image display panel. In the case of a transmissive image display apparatus using a backlight (back light source), the incident light from the backlight is incident. It is also a surface.

  Moreover, although the above-mentioned embodiment described the case where the anti-reflective article by a film shape was produced by the shaping process using a roll plate, this invention is not limited to this, The transparent base material which concerns on the shape of an anti-reflective article Depending on the shape, for example, when creating an antireflection article by processing a sheet using a shaping mold with a specific curved shape, such as a flat plate, the process related to the shaping process, the mold is the antireflection article It can change suitably according to the shape of the transparent base material which concerns on a shape.

  In the above-described embodiment, the case where an acrylate-based ultraviolet curable resin is applied to the shaping resin has been described. However, the present invention is not limited to this, and various ultraviolet-curable resins such as epoxy-based and polyester-based resins, or acrylates. Wide range when using various materials such as electron beam curable resins such as epoxy, epoxy and polyester, thermosetting resins such as urethane, epoxy, and polysiloxane, and molding resins in various curing forms The present invention can be applied, and further, for example, it can be widely applied to a case where a heated thermoplastic resin is pressed and shaped.

  Further, in the above-described embodiment, as shown in FIG. 1, microprojections are formed on the receiving layer 4 of the laminate formed by laminating the receiving layer (ultraviolet curable resin layer) 4 on one surface of the substrate 2. The groups 5, 5A, 5B,... Are shaped and the receiving layer 4 is cured to form the antireflection article 1. The layer structure is a two-layer laminate. However, the present invention is not limited to such a form. Although not shown, the antireflection article 1 of the present invention is a single layer in which the microprojections 5, 5A, 5B,... Are directly formed on one surface of the substrate 2 without interposing another layer. It may be a configuration. Alternatively, one or more intermediate layers on one surface of the substrate 2 (layers that improve substrate surface performance such as interlayer adhesion, coating suitability, surface smoothness, etc. Also referred to as primer layer, anchor layer, etc. .) May be formed, and a laminate of three or more layers in which the microprotrusions 5, 5A, 5B,... Are formed on the surface of the receptor layer may be used.

Further, in the above-described embodiment, as shown in FIG. 1, the microprojections 5, 5A, 5B,... Are formed only on one surface of the base material 2 (directly or via another layer). However, the present invention is not limited to such a form. The microprojection groups 5, 5A, 5B,... May be formed on both surfaces of the substrate 2 (directly or via other layers).
Although not shown, in the antireflection article 1 of the present invention as shown in FIG. 1 and the like, the surface opposite to the surface on which the microprojections are formed of the substrate 2 (the lower surface of the substrate 2 in FIG. 1). Various adhesive layers are formed on the adhesive layer, and a release film (release paper) is laminated on the surface of the adhesive layer so as to be peelable. In such a form, the release film is peeled and removed to expose the adhesive layer, and the antireflection article 1 of the present invention can be laminated and laminated on the desired surface of the desired article by the adhesive layer. The antireflection performance can be easily imparted to a desired article. As the adhesive, various types of known adhesive forms such as a pressure-sensitive adhesive (pressure-sensitive adhesive), a two-component curable adhesive, an ultraviolet curable adhesive, a thermosetting adhesive, and a hot melt adhesive can be used. .

  Although not shown, in the antireflection article 1 of the present invention as shown in FIG. 1 etc., the microprojections 5, 5 A, 5 B,... The protective film may be peeled and removed at an appropriate time after carrying, carrying, buying and selling, post-processing or construction. In such a form, it is possible to prevent the antireflection performance from being deteriorated due to damage or contamination of the microprojection group during storage, transportation and the like.

  In the above-described embodiment, the case where the antireflection article with the film shape is arranged on the front side surface of the image display panel or the incident surface of the illumination light has been described. However, the present invention is not limited to this and is applied to various applications. be able to. Specifically, it should be applied to applications that are placed on the back surface (image display panel side) of the surface side member such as a touch panel, various window materials, various optical filters, etc. installed on the screen of the image display panel through a gap. Can do. In this case, it is possible to prevent interference fringes such as Newton rings due to light interference between the image display panel and the surface side member, and between the light emission surface of the image display panel and the light incident surface side of the surface side member. Thus, it is possible to prevent ghost images due to multiple reflections, and to achieve effects such as reduction of reflection loss with respect to image light emitted from the screen and entering these surface side members.

  Alternatively, a transparent electrode constituting the touch panel is formed on a film or plate-like transparent substrate with a group of microprojections specific to the present invention, and a transparent conductive film such as ITO (indium tin oxide) is further formed on the group of microprojections. The formed one can be used. In this case, it is possible to prevent light reflection between the touch panel electrode and the counter electrode or various members adjacent to the touch panel electrode, thereby reducing the occurrence of interference fringes, ghost images, and the like.

  Moreover, you may make it arrange | position on both surfaces of the glass plate surface (external side) used for a show window of a store, or the surface and the back surface (product or exhibition side). In this case, it is possible to improve the visibility for customers and spectators of products, artworks, etc. by preventing light reflection on the surface of the glass plate.

  Further, the present invention can be widely applied to the case where the lens or prism is used on various optical devices such as glasses, a telescope, a camera, a video camera, a gun sighting mirror (sniper scope), binoculars, a periscope, and the like. In this case, the visibility by preventing light reflection on the lens or prism surface can be improved. Furthermore, the present invention can also be applied to the case where the book is placed on the surface of a printed portion (characters, photos, drawings, etc.), and can prevent light reflection on the surface of the characters and improve the visibility of the characters. In addition, it should be placed on the surface of signs (posters, posters, various other stores, streets, exterior walls, etc.) (road guidance, maps, smoking cessation, entrances, emergency exits, no entry, etc.) to improve visibility. Can do. In addition, a light entrance surface of a window material for a lighting fixture using incandescent bulbs, light emitting diodes, fluorescent lamps, mercury lamps, EL (electroluminescence), etc. (in some cases, it also serves as a diffuser plate, condenser lens, optical filter, etc.) By arranging it on the side, it is possible to prevent light reflection on the light incident surface of the window material, reduce the reflection loss of the light source light, and improve the light utilization efficiency. Furthermore, it can arrange | position on the display window surface (display observer side) of a timepiece and other various measuring devices, the light reflection of these display window surfaces can be prevented, and visibility can be improved.

  Furthermore, it is placed on the inside, outside, or both sides of the windows of the cockpits (driver's cabs, wheelhouses) of vehicles such as automobiles, railway vehicles, ships, and aircraft to prevent reflection of indoor and outdoor light from the windows. Thus, it is possible to improve the visibility of the outside world of the driver (driver, driver). Furthermore, it can be arranged on the surface of a night vision device lens or window material used for crime prevention monitoring, gun sighting, astronomical observation, etc. to improve visibility at night and in the dark.

  Furthermore, the surface of the transparent substrate (window glass, etc.) that forms windows, doors, partitions, wall surfaces, etc. of buildings such as houses, stores, offices, schools, hospitals, etc. (inside, outside, or both sides) It is possible to improve the visibility of the outside world or the daylighting efficiency. Furthermore, it can arrange | position on the surface of a greenhouse, the transparent sheet | seat of an agricultural greenhouse, or a transparent board (window material), and can improve the sunlight lighting efficiency. Furthermore, it can arrange | position on the solar cell surface and can improve the utilization efficiency (power generation efficiency) of sunlight.

  Furthermore, in the above-described embodiment, the wavelength band of the electromagnetic wave for preventing reflection is exclusively the visible light band (all or part of the visible light band), but the present invention is not limited to this, and the electromagnetic wave for preventing reflection. May be set to a wavelength band other than visible light rays such as infrared rays and ultraviolet rays. In that case, the shortest wavelength Λmin in the wavelength band of the electromagnetic wave may be set to the shortest wavelength in which the antireflection effect in the wavelength band of infrared rays, ultraviolet rays, etc. is desired in each conditional expression. For example, when it is desired to prevent reflection in the infrared band where the shortest wavelength Λmin is 850 nm, the distance d between adjacent protrusions (or its maximum value dmax) may be designed to be 850 nm or less, for example, d (dmax) = 800 nm. . In this case, an antireflection effect cannot be expected in the visible light band (380 to 780 nm), and an antireflection article exhibiting an antireflection effect for infrared rays having a wavelength of 850 nm or more can be obtained.

  In the various exemplary embodiments described above, when the film-shaped antireflection article of the present invention is disposed on the front surface, back surface, or both front and back surfaces of a transparent substrate such as a glass plate, it is disposed and covered over the entire surface of the transparent substrate. In addition, it can be arranged only in a partial area. As an example of this, for example, for a single window glass, a film-shaped antireflection article is attached to the indoor side surface only with an adhesive in a square area at the center, and an antireflection article is provided in the other areas. The case where it does not stick can be mentioned. In the case where the antireflection article is arranged only in a partial area of the transparent substrate, it is easy to visually recognize the presence of the transparent substrate without special display or a collision prevention fence, etc. The effect of reducing the risk of collision and injury, and the effect that both the prevention of peeping indoors (indoors) and the transparency of the transparent substrate (in the region where the antireflection article is disposed) can be achieved.

DESCRIPTION OF SYMBOLS 1 Antireflection article 2 Base material 4 Ultraviolet curable resin layer, receiving layer 5, 5A, 5B Microprotrusion 6 Uneven surface 10 Manufacturing process 12 Die 13 Roll plate 13a Base material 13b Adhesive layer 13c Molding layer 14, 15 Roller

Claims (9)

Modification of the molding die for molding the microprojections of the antireflection article in which the microprojections are closely arranged and the interval between the adjacent microprojections is equal to or less than the shortest wavelength of the wavelength band of the electromagnetic wave for preventing reflection A method,
The mold for molding includes a molding layer in which a fine concavo-convex shape for molding the microprotrusions is formed on the surface of the antireflection article,
The method for modifying the mold for molding is as follows:
A foreign matter detection step of detecting foreign matter attached to the surface of the shaping layer;
A foreign matter removing step of removing the foreign matter detected by the foreign matter detecting step by irradiating a laser beam,
A method for correcting a molding die characterized by the above. The foreign matter removing step removes the foreign matter with a laser beam having a wavelength of 532 nm or 1064 nm;
The method for correcting a molding die according to claim 1. The foreign matter removing step includes a first removing step that removes most of the foreign matter, and a second removing step that removes the foreign matter that could not be removed in the first removing step.
The method for correcting a molding die according to claim 1 or 2, characterized in that: In the second removal step, the output of the laser beam is smaller than the output of the laser beam in the first removal step.
The method for correcting a molding die according to claim 3. In the second removal step, the laser light irradiation range is narrower than the laser light irradiation range in the first removal step;
The method for correcting a mold for molding according to claim 3 or 4, wherein: A mold for molding modified by the method for modifying a mold for molding according to any one of claims 1 to 5,
The fine uneven shape of the shaping layer is such that the top of the part corrected by the correction method is lower than other peripheral parts,
Molding mold characterized by. An antireflective article formed by the mold for molding according to claim 6,
The base of the microprojection is such that the part corresponding to the modified part of the shaping layer is higher than other peripheral parts,
An antireflection article characterized by   An image display device comprising the antireflection article according to claim 7 on an image display panel. In a showcase that houses exhibits and serves for the exhibition,
A showcase provided with the antireflection article according to claim 7.